Input device

Abstract

To detect a force applied to a shaft portion with high sensitivity without increasing the strain amount of a strain generating body.SOLUTION: An input device includes a shaft portion, a planer deformation portion integrally formed with the shaft portion and orthogonal to an axial direction of the shaft portion, a plurality of strain detection elements provided in the deformation portion, and a detection circuit. The detection circuit includes: a first measurement circuit including some of the plurality of strain detection elements and detecting a force applied to the shaft portion in a direction orthogonal to the axial direction; a second measurement circuit including others of the plurality of some strain detection elements and detecting a force applied to the shaft portion in a direction orthogonal to the axial direction; a first fixed resistor connected to a power-supply voltage side of the first measurement circuit; and a second fixed resistor connected to a ground side of the second measurement circuit. The input device detects a force applied to the shaft portion in the axial direction based on a voltage between a connection point of the first measurement circuit and the first fixed resistor and a connection point of the second measurement circuit and the second fixed resistor.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to an input device. [Background technology]

[0002] The following Patent Document 1 discloses a technology for an input device that detects operations applied to an operating member in the X-axis, Y-axis, and Z-axis directions by detecting the distortion of a strain-generating body using a voltage detection circuit having a bridge circuit consisting of four distortion detection elements printed on a flexible substrate and a resistor connected to the bridge circuit.

[0003] Furthermore, Patent Document 2 listed below discloses a technology for an input device that detects the operation of a lever protrusion in each of the X-axis and Z-axis directions by detecting the distortion of a strain-generating body using a detection circuit having a bridge circuit consisting of four distortion detection elements printed on a flexible substrate and a resistor connected to the bridge circuit. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2000-047814 [Patent Document 2] Patent Publication No. 2021-177291 Summary of the Invention [Problem to be solved by the invention]

[0005] However, in conventional input devices, in order to increase the output of the detection circuit and detect operations with high sensitivity, it is necessary to greatly distort the strain element, which may reduce the durability of the strain element. [Means for solving the problem]

[0006] An input device according to one embodiment comprises an axial portion, a plate-shaped deformation portion integrally formed with the axial portion and perpendicular to the axial direction of the axial portion, a plurality of strain detection elements provided in the deformation portion, and a detection circuit, wherein the detection circuit comprises a first measurement circuit including some of the plurality of strain detection elements and detecting a force applied to the axial portion in a direction perpendicular to the axial direction, a second measurement circuit including another portion of the plurality of strain detection elements and detecting a force applied to the axial portion in a direction perpendicular to the axial direction, a first fixed resistor connected to the power supply voltage side of the first measurement circuit, and a second fixed resistor connected to the ground side of the second measurement circuit, and detects the axial force applied to the axial portion based on the voltage between the connection point between the first measurement circuit and the first fixed resistor and the connection point between the second measurement circuit and the second fixed resistor. [Effects of the Invention]

[0007] According to an input device according to an embodiment, the force applied to the shaft portion can be detected with high sensitivity without increasing the amount of strain on the strain-generating body. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is an exploded perspective view of a force sensor according to an embodiment, viewed from above (positive Z-axis direction); [Figure 2] FIG. 1 is an exploded perspective view of a force sensor according to an embodiment, viewed from below (negative Z-axis direction); [Figure 3] 1 is a bottom view of a force sensor according to an embodiment; [Figure 4] 1 is a circuit diagram of a detection circuit included in a force sensor according to an embodiment; [Figure 5] FIG. 10 is a circuit diagram showing a first modified example of the configuration of a detection circuit included in a force sensor according to an embodiment; [Figure 6] FIG. 10 is a circuit diagram showing a second modified example of the configuration of the detection circuit included in the force sensor according to the embodiment; [Figure 7] FIG. 10 is a circuit diagram showing a third modified example of the configuration of the detection circuit included in the force sensor according to the embodiment; [Figure 8] FIG. 10 is a circuit diagram showing a fourth modified example of the configuration of the detection circuit included in the force sensor according to the embodiment; [Figure 9]FIG. 10 is a diagram showing a first modified example of a force sensor according to an embodiment; [Figure 10] FIG. 10 is a circuit diagram showing a fifth modified example of the configuration of the detection circuit included in the force sensor according to the embodiment; [Figure 11] FIG. 10 is a circuit diagram showing a sixth modified example of the configuration of the detection circuit included in the force sensor according to the embodiment; [Figure 12] FIG. 11 is a circuit diagram showing a seventh modified example of the configuration of the detection circuit included in the force sensor according to the embodiment. [Figure 13] FIG. 10 is a circuit diagram showing an eighth modified example of the configuration of the detection circuit included in the force sensor according to the embodiment; [Figure 14] FIG. 10 is a diagram illustrating a modified example of a switch included in a force sensor according to an embodiment; [Figure 15] FIG. 10 is a diagram showing a first modified example of the arrangement of a plurality of strain detection elements in a force sensor according to an embodiment; [Figure 16] FIG. 10 is a diagram showing a second modified example of the arrangement of a plurality of strain detection elements in the force sensor according to the embodiment; [Figure 17] FIG. 10 is a diagram showing a third modified example of the arrangement of a plurality of strain detection elements in the force sensor according to the embodiment; [Figure 18] FIG. 10 is a cross-sectional view showing a second modified example of the force sensor according to the embodiment; [Figure 19] FIG. 10 is a cross-sectional view showing a third modified example of the force sensor according to the embodiment. [Figure 20] FIG. 10 is a cross-sectional view showing a fourth modified example of the force sensor according to the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0009] An embodiment will be described below. For convenience, in the following description, the X-axis direction in the drawings will be referred to as the left-right direction, the Y-axis direction in the drawings as the front-rear direction, and the Z-axis direction in the drawings as the up-down direction. The positive X-axis direction will be referred to as the rightward direction, the positive Y-axis direction as the forward direction, and the positive Z-axis direction as the upward direction. These directions indicate relative positional relationships within the device and do not limit the installation direction or operation direction of the device. Any devices that have the same relative positional relationships within the device, even if they have different installation directions or operation directions, are all within the scope of the present invention.

[0010] (Configuration of force sensor 100) Fig. 1 is an exploded perspective view of a force sensor 100 according to an embodiment as viewed from above (positive Z-axis direction). Fig. 2 is an exploded perspective view of a force sensor 100 according to an embodiment as viewed from below (negative Z-axis direction).

[0011] As shown in FIGS. 5 to 8, the force sensor 100 (an example of an “input device”) includes a strain element 110, an operation knob 120, and a flexible substrate .

[0012] The strain generating element 110 is a resin member that is strained by receiving an operational input from an operator. The strain generating element 110 has a base portion 111 and a shaft portion 112.

[0013] The base 111 is a horizontal, flat plate-like portion that has a constant thickness in the vertical direction (Z-axis direction). The base 111 has a square shape when viewed from above and below.

[0014] An upwardly recessed recess 113 is formed on the lower surface of the base 111. The recess 113 has a circular shape when viewed from below. A base 131 of a flexible substrate 130 is disposed in the recess 113.

[0015] A circular deformation portion 111A is provided in the center of the top surface of base portion 111. Deformation portion 111A is a portion that is distorted when an operating load is applied from shaft portion 112. Deformation portion 111A has recess 113 on the back side, which makes it thin-walled and more susceptible to distortion.

[0016] Four through holes 114 that pass through the base 111 in the vertical direction are formed at the four corners of the base 111. The base 111 is fixed to an arbitrary installation surface (not shown) by four fixing screws (not shown) that pass through the four through holes 114.

[0017] Shaft 112 is a cylindrical part that stands in the center of deformation part 111A of base 111 and has an axial direction extending in the vertical direction (Z-axis direction). Shaft 112 is formed integrally with deformation part 111A, and transmits the operating load applied by the operator to deformation part 111A, thereby causing distortion in deformation part 111A.

[0018] The operation knob 120 is attached to the upper end of the shaft portion 112 of the flexure body 110. Specifically, a recess 122 that is recessed upward is formed on the lower surface of the operation knob 120. In a plan view from below, the recess 122 has a circular shape with approximately the same diameter as the upper end of the shaft portion 112 of the flexure body 110. The operation knob 120 is attached to the upper end of the shaft portion 112 of the flexure body 110 by fitting the upper end of the shaft portion 112 of the flexure body 110 into the recess 122. The operation knob 120 receives operation input from an operator.

[0019] The flexible substrate 130 is a flexible film-like wiring member. The flexible substrate 130 has a base portion 131 and an extension portion 132.

[0020] The base 131 has an annular shape in a plan view, is disposed in the recess 113 of the flexure body 110, and is attached to the rear surface of the deformation portion 111A of the flexure body 110. A circular opening 131A is formed in the center of the base 131.

[0021] The lead-out portion 132 is a strip-shaped portion that extends outward (in the positive X-axis direction and the positive Y-axis direction) from the outer peripheral edge of the base portion 131. The lead-out portion 132 has a tip that is electrically connected to an external connector (not shown).

[0022] Eight strain detection elements 140 are provided around the opening 131A on the lower surface of the base 131 of the flexible substrate 130. Each of the eight strain detection elements 140 is a resistor printed on the lower surface of the base 131. The eight strain detection elements 140 are provided to detect strain in the deformation portion 111A of the flexure body 110 in response to an operation input by an operator to the shaft portion 112 of the flexure body 110. The eight strain detection elements 140 are collectively arranged on the back surface of the deformation portion 111A by attaching the base 131 of the flexible substrate 130 to the back surface of the deformation portion 111A of the flexure body 110.

[0023] The flexible substrate 130 can output a strain detection signal (analog signal) that represents the strain of the deformation portion 111A of the strain generating body 110 detected by each of the eight strain detection elements 140 to an external computer via the lead-out portion 132.

[0024] In the force sensor 100 configured as described above, when an operator operates (tilts or presses) the shaft portion 112 of the strain body 110, a strain is generated in the deformation portion 111A of the strain body 110, and the strain can be detected by the eight strain detection elements 140 provided on the strain body 110.

[0025] (Arrangement of strain detection element 140) Next, the arrangement of the eight strain detection elements 140 in the force sensor 100 will be described with reference to Fig. 3. Fig. 3 is a bottom view of the force sensor 100 according to one embodiment.

[0026] As shown in FIG. 3, the force sensor 100 has two strain detection elements 140 provided on the underside of the base 131 of the flexible substrate 130, in each of four directions (forward (positive Y-axis direction), backward (negative Y-axis direction), rightward (positive X-axis direction), and leftward (negative X-axis direction)) based on the opening 131A (i.e., the center of the base 131).

[0027] These eight strain detection elements 140 are resistors printed on the lower surface of the base 131 of the flexible substrate 130. Each of these eight strain detection elements 140 has a rectangular shape with the detection direction as the longitudinal direction, and is connected at both ends in the longitudinal direction to wiring (not shown) of the flexible substrate 130. As the deforming portion 111A of the strain generating body 110 is distorted, the resistance value of these eight strain detection elements 140 increases as they expand in the longitudinal direction, and the resistance value decreases as they contract in the longitudinal direction.

[0028] Specifically, on the underside of the base 131, on the right side (positive side of the X-axis) of the opening 131A, a strain detection element 140 marked "SX1" (hereinafter referred to as "strain detection element SX1") and a strain detection element 140 marked "SX2" (hereinafter referred to as "strain detection element SX2") are arranged side by side in the Y-axis direction so as to be parallel to each other.

[0029] Furthermore, on the underside of the base 131, on the left side (negative side of the X-axis) of the opening 131A, a strain detection element 140 marked "SX3" (hereinafter referred to as "strain detection element SX3") and a strain detection element 140 marked "SX4" (hereinafter referred to as "strain detection element SX4") are arranged side by side in the Y-axis direction so as to be parallel to each other.

[0030] Furthermore, on the underside of the base 131, on the front side (positive side of the Y axis) relative to the opening 131A, a strain detection element 140 marked "SY1" (hereinafter referred to as "strain detection element SY1") and a strain detection element 140 marked "SY2" (hereinafter referred to as "strain detection element SY2") are arranged side by side in the X axis direction so as to be parallel to each other.

[0031] Furthermore, on the underside of the base 131, on the rear side (negative side of the Y axis) relative to the opening 131A, a strain detection element 140 marked "SY3" (hereinafter referred to as "strain detection element SY3") and a strain detection element 140 marked "SY4" (hereinafter referred to as "strain detection element SY4") are arranged side by side in the X axis direction so as to be parallel to each other.

[0032] Each of the eight strain detection elements 140 has a rectangular shape with the longitudinal direction being the detection direction, and is provided with the tilt direction of the shaft portion 112 being the detection direction.

[0033] That is, the four strain detection elements 140 provided on the right side (positive side of the X-axis) and left side (negative side of the X-axis) are oriented so that the detection direction is the X-axis direction.

[0034] As a result, when the shaft portion 112 is tilted in the X-axis direction, the four strain detection elements 140 provided on the right side (positive side of the X-axis) and left side (negative side of the X-axis) expand or contract in the X-axis direction, changing their resistance value, and can detect the tilting operation in the X-axis direction.

[0035] For example, in one embodiment of the force sensor 100, when an operating load is applied to the shaft portion 112 in the positive direction of the X-axis, the two strain detection elements SX1 and SX2 on the positive side of the X-axis expand, causing the resistance value to change in the positive direction, and the two strain detection elements SX3 and SX4 on the negative side of the X-axis contract, causing the resistance value to change in the negative direction.

[0036] Conversely, in one embodiment of the force sensor 100, when an operating load is applied to the shaft portion 112 in the negative direction of the X-axis, the two strain detection elements SX1 and SX2 on the positive side of the X-axis contract, causing the resistance value to change in the negative direction, and the two strain detection elements SX3 and SX4 on the negative side of the X-axis expand, causing the resistance value to change in the positive direction.

[0037] The four strain detection elements 140 provided on the front side (positive side of the Y axis) and rear side (negative side of the Y axis) are oriented so that the detection direction is the Y axis direction.

[0038] As a result, when the shaft portion 112 is tilted in the Y-axis direction, the four strain detection elements 140 provided on the front side (positive side of the Y-axis) and rear side (negative side of the Y-axis) expand or contract in the Y-axis direction, changing their resistance value, and can detect the tilting operation in the Y-axis direction.

[0039] For example, in one embodiment of the force sensor 100, when an operating load is applied to the shaft portion 112 in the positive direction of the Y axis, the two strain detection elements SY1 and SY2 on the positive side of the Y axis expand, causing the resistance value to change in the positive direction, and the two strain detection elements SY3 and SY4 on the negative side of the Y axis contract, causing the resistance value to change in the negative direction.

[0040] Conversely, in one embodiment of the force sensor 100, when an operating load is applied to the shaft portion 112 in the negative Y-axis direction, the two strain detection elements SY1 and SY2 on the positive Y-axis side contract, causing the resistance value to change in the negative direction, and the two strain detection elements SY3 and SY4 on the negative X-axis side expand, causing the resistance value to change in the positive direction.

[0041] Furthermore, for example, in one embodiment of the force sensor 100, when an operating load is applied to the shaft portion 112 in the negative direction of the Z axis, all eight strain detection elements 140 expand, causing the resistance value to change in the positive direction.

[0042] The strain detection element SX1 is an example of a "first X-axis strain detection element." The strain detection element SX2 is an example of a "second X-axis strain detection element." The strain detection element SX3 is an example of a "third X-axis strain detection element." The strain detection element SX4 is an example of a "fourth X-axis strain detection element."

[0043] Moreover, strain detection element SY1 is an example of a "first Y-axis strain detection element." Moreover, strain detection element SY2 is an example of a "second Y-axis strain detection element." Moreover, strain detection element SY3 is an example of a "third Y-axis strain detection element." Moreover, strain detection element SY4 is an example of a "fourth Y-axis strain detection element."

[0044] (Configuration of detection circuit 150) FIG. 4 is a circuit diagram of the detection circuit 150 included in the force sensor 100 according to one embodiment.

[0045] As shown in FIG. 4, the detection circuit 150 included in the force sensor 100 has a first measurement circuit 151 and a second measurement circuit 152, and each of the measurement circuits 151 and 152 is configured by four strain detection elements 140.

[0046] The first measuring circuit 151 is a bridge circuit in which a first X-axis series circuit 151A, in which the strain detection elements SX3 and SX1 are connected in series, and a second X-axis series circuit 151B, in which the strain detection elements SX2 and SX4 are connected in series, are connected in parallel. The strain detection elements SX3 and SX2 are provided on the power supply voltage +B side. On the other hand, the strain detection elements SX1 and SX4 are provided on the ground side.

[0047] The first measurement circuit 151 has a first X-axis connection point PX1 between the strain detection elements SX3 and SX1, and a second X-axis connection point PX2 between the strain detection elements SX2 and SX4.

[0048] The voltage value at the first X-axis connection point PX1 and the voltage value at the second X-axis connection point PX2 have opposite polarities to each other.

[0049] The second measurement circuit 152 is a bridge circuit in which a first Y-axis series circuit 152A, in which the strain detection elements SY3 and SY1 are connected in series, and a second Y-axis series circuit 152B, in which the strain detection elements SY2 and SY4 are connected in series, are connected in parallel. The strain detection elements SY3 and SY2 are provided on the power supply voltage +B side. On the other hand, the strain detection elements SY1 and SY4 are provided on the ground side.

[0050] The second measurement circuit 152 has a first Y-axis connection point PY1 between the strain detection elements SY3 and SY1, and a second Y-axis connection point PY2 between the strain detection elements SY2 and SY4.

[0051] The voltage value at the first Y-axis connection point PY1 and the voltage value at the second Y-axis connection point PY2 have opposite polarities to each other.

[0052] The detection circuit 150 according to one embodiment detects a force applied to the shaft portion 112 in the X-axis direction based on the voltage between the first X-axis connection point PX1 and the second X-axis connection point PX2. The detection circuit 150 according to one embodiment also detects a force applied to the shaft portion 112 in the Y-axis direction based on the voltage between the first Y-axis connection point PY1 and the second Y-axis connection point PY2.

[0053] Furthermore, the detection circuit 150 of one embodiment has a first fixed resistor R1 connected to the power supply voltage (constant voltage terminal +B) side of the first measurement circuit 151 and a second fixed resistor R2 connected to the ground side of the second measurement circuit 152, and detects the force in the Z-axis direction applied to the shaft portion 112 based on the voltage between the first Z-axis connection point PZ1 between the first measurement circuit 151 and the first fixed resistor R1 and the second Z-axis connection point PZ2 between the second measurement circuit 152 and the second fixed resistor R2.

[0054] As described above, the detection circuit 150 according to one embodiment is provided with four strain detection elements SX1, SX2, SX3, and SX4, twice the usual number, for detecting the operating load in the X-axis direction. Therefore, two voltage values ​​are obtained: a voltage value output from the first X-axis connection point PX1 (an intermediate potential between strain detection elements SX1 and SX2) and a voltage value output from the second X-axis connection point PX2 (an intermediate potential between strain detection elements SX3 and SX4). By measuring the difference between these two voltage values ​​using the differential amplifier 153X, an output SXout on the X-axis that is twice as large as that of the conventional circuit can be obtained. Therefore, the detection circuit 150 according to one embodiment can detect the force applied to the shaft portion 112 in the X-axis direction with high sensitivity without increasing the strain of the strain element 110. By doubling the sensitivity, the minimum detectable force is halved compared to the conventional circuit. Meanwhile, the maximum detectable force is within the range that does not damage the strain element 110 or the strain detection elements 140, and remains the same as the conventional circuit. Therefore, the dynamic range is doubled compared to the conventional circuit.

[0055] For example, the X-axis output SXout of the detection circuit 150 according to one embodiment is calculated by the following equation (1): where k is a constant based on the magnitude of the power supply voltage +B and the sensitivity of the strain detection element 140.

[0056]

number

[0057] Similarly, in detecting the operating load in the Y-axis direction, detection circuit 150 according to one embodiment is provided with four strain detection elements SY1, SY2, SY3, and SY4, twice the usual number. This provides two voltage values: a voltage value output from first Y-axis connection point PY1 (the intermediate potential between strain detection elements SY1 and SY2) and a voltage value output from second Y-axis connection point PY2 (the intermediate potential between strain detection elements SY3 and SY4). By measuring the difference between these two voltage values ​​using differential amplifier 153Y, it is possible to obtain twice the output of the Y-axis as output SYout. Therefore, detection circuit 150 according to one embodiment can detect the force applied to shaft 112 in the Y-axis direction with high sensitivity without increasing the strain of strain element 110. By doubling the sensitivity, the minimum detectable force is halved compared to the conventional method, doubling the dynamic range.

[0058] For example, the Y-axis output SYout of the detection circuit 150 according to one embodiment is calculated by the following equation (2): where k is a constant based on the magnitude of the power supply voltage +B and the sensitivity of the strain detection element 140.

[0059]

number

[0060] Furthermore, in detecting an operating load in the Z-axis direction, the detection circuit 150 according to one embodiment obtains two voltage values: a voltage value output from the first Z-axis connection point PZ1 (an intermediate potential between the first measurement circuit 151 and the first fixed resistor R1) and a voltage value output from the second Z-axis connection point PZ2 (an intermediate potential between the second measurement circuit 152 and the second fixed resistor R2). Therefore, by measuring the difference between these two voltage values ​​using the differential amplifier 153Z, it is possible to obtain an output SZout for the Z-axis that is twice as large as in the conventional case. Therefore, the detection circuit 150 according to one embodiment can detect a force applied to the shaft portion 112 in the Z-axis direction with high sensitivity without increasing the amount of strain of the strain element 110. By doubling the sensitivity, the minimum detectable force is halved compared to the conventional case, and the dynamic range is doubled.

[0061] For example, the Z-axis output SZout by the detection circuit 150 according to one embodiment is calculated by the following equation (3): where k is a constant based on the magnitude of the power supply voltage +B and the sensitivity of the strain detection element 140. BRX represents the combined resistance of the strain detection elements SX1, SX2, SX3, and SX4 of the first measurement circuit 151. BRY represents the combined resistance of the strain detection elements SY1, SY2, SY3, and SY4 of the second measurement circuit 152.

[0062]

number

[0063] The detection circuit 150 is realized by, for example, an IC (Integrated Circuit). The detection circuit 150 may also include an A / D converter, which converts the X-axis output SXout, the Y-axis output SYout, and the Z-axis output SZout into digital signals, after the differential amplifiers 153X, 153Y, and 153Z. The ground may be at any potential that can be regarded as a reference potential, and may be different from the actual earth potential.

[0064] (First modified example of the configuration of the detection circuit 150) FIG. 5 is a circuit diagram showing a first modified example of the configuration of the detection circuit 150 included in the force sensor 100 according to one embodiment.

[0065] The detection circuit 150-2 shown in FIG. 5 differs from the detection circuit 150 shown in FIG. 4 in that the first fixed resistor R1 is connected to the power supply voltage (constant voltage terminal +B) side of the second measurement circuit 152, and the second fixed resistor R2 is connected to the ground side of the first measurement circuit 151.

[0066] However, the detection circuit 150-2 shown in FIG. 5 is the same as the detection circuit 150 shown in FIG. 4 in that, with regard to detecting the operating load in the Z-axis direction, two voltage values ​​are obtained: a voltage value output from the first Z-axis connection point PZ1 (an intermediate potential between the second measurement circuit 152 and the first fixed resistor R1) and a voltage value output from the second Z-axis connection point PZ2 (an intermediate potential between the first measurement circuit 151 and the second fixed resistor R2).

[0067] Therefore, similar to the detection circuit 150 shown in FIG. 4, the detection circuit 150-2 shown in FIG. 5 can obtain an output SZout for the Z axis that is twice the normal output by measuring the difference between these two voltage values.

[0068] (Second Modification of the Configuration of the Detection Circuit 150) FIG. 6 is a circuit diagram showing a second modified example of the configuration of the detection circuit 150 included in the force sensor 100 according to one embodiment.

[0069] In the detection circuit 150-8 shown in FIG. 6, the first measurement circuit 151 is a bridge circuit in which a first X-axis series circuit 151A, in which the strain detection elements SX3 and SX1 are connected in series, and a second X-axis series circuit 151B', in which the strain detection elements SX4 and SX2 are connected in series, are connected in parallel. The strain detection elements SX3 and SX4 are provided on the power supply voltage +B side. The strain detection elements SX1 and SX2 are provided on the ground side. Compared to the detection circuit 150 shown in FIG. 4, the connection relationship between the strain detection elements SX2 and SX4 that constitute the second X-axis series circuit 151B' is reversed. That is, in the detection circuit 150 shown in FIG. 4, the strain detection element SX2 is connected to the power supply voltage +B side, and the strain detection element SX4 is connected to the ground side. On the other hand, in the detection circuit 150-8 shown in FIG. 6, the strain detection element SX4 is connected to the power supply voltage +B side, and the distortion detection element SX2 is connected to the ground side.

[0070] In addition, in the detection circuit 150-8 shown in FIG. 6, the first measurement circuit 151 has a first X-axis connection point PX1 between the strain detection element SX3 and the strain detection element SX1, and a second X-axis connection point PX2' between the strain detection element SX4 and the strain detection element SX2.

[0071] In addition, in the detection circuit 150-8 shown in FIG. 6, the second measurement circuit 152 is a bridge circuit in which a first Y-axis series circuit 152A, in which the strain detection elements SY3 and SY1 are connected in series, and a second Y-axis series circuit 152B', in which the strain detection elements SY4 and SY2 are connected in series, are connected in parallel. The strain detection elements SY3 and SY4 are provided on the power supply voltage +B side. The strain detection elements SY1 and SY2 are provided on the ground side. Compared to the detection circuit 150 shown in FIG. 4, the connection relationship between the strain detection elements SY2 and SY4 constituting the second Y-axis series circuit 152B' is reversed. That is, in the detection circuit 150 shown in FIG. 4, the strain detection element SY2 is connected to the power supply voltage +B side, and the strain detection element SY4 is connected to the ground side. On the other hand, in the detection circuit 150-8 shown in FIG. 6, the strain detection element SY4 is connected to the power supply voltage +B side, and the strain detection element SY2 is connected to the ground side.

[0072] In addition, in the detection circuit 150-8 shown in Figure 6, the second measurement circuit 152 has a first Y-axis connection point PY1 between the strain detection element SY3 and the strain detection element SY1, and a second Y-axis connection point PY2' between the strain detection element SY4 and the strain detection element SY2.

[0073] In the detection circuit 150-8 shown in Fig. 6, the voltage value at the first X-axis connection point PX1 is approximately equal to the voltage value at the second X-axis connection point PX2'. Also, in the detection circuit 150-8 shown in Fig. 6, the voltage value at the first Y-axis connection point PY1 is approximately equal to the voltage value at the second Y-axis connection point PY2'.

[0074] 6, two voltage values ​​are obtained: a voltage value output from the first X-axis connection point PX1 (an intermediate potential between the strain detection elements SX1 and SX3), and a voltage value output from the second X-axis connection point PX2' (an intermediate potential between the strain detection elements SX2 and SX4). By adding these two voltage values ​​together using an adder circuit, an X-axis output SXout that is twice as large as the conventional output can be obtained.

[0075] The X-axis output SXout from the detection circuit 150 related to the detection circuit 150-8 shown in Fig. 6 is calculated by the following formula (4). Here, k is a constant based on the magnitude of the power supply voltage +B and the sensitivity of the strain detection element 140. l is a constant output when no load is applied. Note that, to simplify data processing, an external computer may correct the output to a value obtained by subtracting the constant l.

[0076]

number

[0077] 6 obtains two voltage values: a voltage value output from the first Y-axis connection point PY1 (an intermediate potential between strain detection elements SY1 and SY3) and a voltage value output from the second Y-axis connection point PY2' (an intermediate potential between strain detection elements SY2 and SY4). By adding these two voltage values ​​together using an adder circuit, it is possible to obtain a Y-axis output SYout that is twice as large as the conventional output.

[0078] The Y-axis output SYout from the detection circuit 150 related to the detection circuit 150-8 shown in Fig. 6 is calculated by the following formula (5). Here, k is a constant based on the magnitude of the power supply voltage +B and the sensitivity of the strain detection element 140. 1 is a constant output when no load is applied. Note that, to simplify data processing, an external computer may correct the output to a value obtained by subtracting the constant 1.

[0079]

number

[0080] Furthermore, the detection circuit 150-8 shown in Figure 6 has a first fixed resistor R1 connected to the power supply voltage (constant voltage terminal +B) side of the first measurement circuit 151, and a second fixed resistor R2 connected to the power supply voltage (constant voltage terminal +B) of the second measurement circuit 152, and detects the force in the Z-axis direction applied to the shaft portion 112 based on the voltage between the first Z-axis connection point PZ1 between the first fixed resistor R1 and the first measurement circuit 151 and the second Z-axis connection point PZ2' between the second fixed resistor R2 and the second measurement circuit 152.

[0081] 6 detects an operating load in the Z-axis direction by obtaining two voltage values: a voltage value output from the first Z-axis connection point PZ1 (an intermediate potential between the first fixed resistor R1 and the first measurement circuit 151) and a voltage value output from the second Z-axis connection point PZ2' (an intermediate potential between the second fixed resistor R2 and the second measurement circuit 152). By adding these two voltage values ​​together using an adder circuit, it is possible to obtain a Z-axis output SZout that is twice as large as the conventional output.

[0082] The Z-axis output SZout from the detection circuit 150 associated with the detection circuit 150-8 shown in Fig. 6 is calculated by the following equation (6). Here, k is a constant based on the magnitude of the power supply voltage +B and the sensitivity of the strain detection element 140. 1 is a constant that is output when no load is applied. Note that, to simplify data processing, an external computer may correct the output to a value obtained by subtracting the constant 1.

[0083]

number

[0084] 6 includes a switch SW1 and a switch SW2 between the power supply voltage +B and the first measurement circuit 151. The detection circuit 150-8 shown in FIG. 6 also includes a switch SW3 and a switch SW4 between the power supply voltage +B and the second measurement circuit 152.

[0085] When detecting the operational loads of the X-axis and Y-axis, the detection circuit 150-8 shown in Fig. 6 switches the switch SW1 off and the switch SW2 on, thereby connecting the first measurement circuit 151 directly to the power supply voltage +B without passing through the first fixed resistor R1. At the same time, the detection circuit 150-8 shown in Fig. 6 switches the switch SW3 off and the switch SW4 on, thereby connecting the second measurement circuit 152 directly to the power supply voltage +B without passing through the second fixed resistor R2. This allows the detection circuit 150-5 shown in Fig. 8 to prevent a decrease in the detection sensitivity of the operational loads of the X-axis and Y-axis due to the first fixed resistor R1 and the second fixed resistor R2.

[0086] Furthermore, when detecting the Z-axis operational load, the detection circuit 150-8 shown in Fig. 6 turns on the switch SW1 and turns off the switch SW2, thereby connecting the first measurement circuit 151 to the power supply voltage +B via the first fixed resistor R1. At the same time, the detection circuit 150-8 shown in Fig. 6 turns on the switch SW3 and turns off the switch SW4, thereby connecting the second measurement circuit 152 to the power supply voltage +B via the second fixed resistor R2. This enables the detection circuit 150-8 shown in Fig. 6 to detect the Z-axis operational load.

[0087] (Third modified example of the configuration of the detection circuit 150) FIG. 7 is a circuit diagram showing a third modified example of the configuration of the detection circuit 150 included in the force sensor 100 according to one embodiment.

[0088] The connection positions of the fixed resistors R1, R2, and the switches SW1 and SW2 are different between the detection circuit 150-8 shown in Fig. 6 and the detection circuit 150-9 shown in Fig. 7. In the detection circuit 150-9 shown in Fig. 7, the fixed resistor R1 is provided on the ground side of the first measurement circuit 151. Similarly, the fixed resistor R2 is provided on the ground side of the second measurement circuit 152.

[0089] 7 includes switches SW1 and SW2 between the first measurement circuit 151 and the ground, and switches SW3 and SW4 between the second measurement circuit 152 and the ground.

[0090] When detecting the operational loads of the X-axis and Y-axis, the detection circuit 150-9 shown in Fig. 7 turns off the switch SW1 and turns on the switch SW2 to ground the first measurement circuit 151 without passing through the first fixed resistor R1. At the same time, the detection circuit 150-9 shown in Fig. 7 turns off the switch SW3 and turns on the switch SW4 to ground the second measurement circuit 152 without passing through the second fixed resistor R2. This allows the detection circuit 150-9 shown in Fig. 7 to prevent a decrease in the detection sensitivity of the operational loads of the X-axis and Y-axis due to the first fixed resistor R1 and the second fixed resistor R2.

[0091] 7 turns on switch SW1 and turns off switch SW2 to ground the first measurement circuit 151 via the first fixed resistor R1 when detecting the Z-axis operation load. At the same time, the detection circuit 150-9 turns on switch SW3 and turns off switch SW4 to ground the second measurement circuit 152 via the second fixed resistor R2. This enables the detection circuit 150-9 shown in FIG. 7 to detect the Z-axis operation load.

[0092] (Fourth Modification of the Configuration of the Detection Circuit 150) FIG. 8 is a circuit diagram showing a fourth modified example of the configuration of the detection circuit 150 included in the force sensor 100 according to one embodiment.

[0093] In the detection circuit 150-3 shown in FIG. 8, the first measurement circuit 151 is a bridge circuit in which a first X-axis series circuit 151A, in which the strain detection element SX3 and the strain detection element SX1 are connected in series, and a first Y-axis series circuit 152A, in which the strain detection element SY3 and the strain detection element SY1 are connected in series, are connected in parallel.

[0094] In addition, in the detection circuit 150-3 shown in FIG. 8, the first measurement circuit 151 has a first X-axis connection point PX1 between the strain detection elements SX3 and SX1, and a first Y-axis connection point PY1 between the strain detection elements SY3 and SY1.

[0095] In addition, in the detection circuit 150-3 shown in FIG. 8, the second measurement circuit 152 is a bridge circuit in which a second X-axis series circuit 151B, in which the strain detection elements SX2 and SX4 are connected in series, and a second Y-axis series circuit 152B, in which the strain detection elements SY2 and SY4 are connected in series, are connected in parallel.

[0096] In addition, in the detection circuit 150-3 shown in FIG. 8, the second measurement circuit 152 has a second X-axis connection point PX2 between the strain detection elements SX2 and SX4, and a second Y-axis connection point PY2 between the strain detection elements SY4 and SY2.

[0097] In the detection circuit 150-3 shown in Fig. 8, the voltage value at the first X-axis connection point PX1 and the voltage value at the second X-axis connection point PX2 have opposite polarities. In the detection circuit 150-3 shown in Fig. 8, the voltage value at the first Y-axis connection point PY1 and the voltage value at the second Y-axis connection point PY2 have opposite polarities.

[0098] Similar to the detection circuit 150 shown in FIG. 4, the detection circuit 150-3 shown in FIG. 8 can obtain two voltage values: a voltage value output from the first X-axis connection point PX1 (an intermediate potential between the strain detection elements SX1 and SX2) and a voltage value output from the second X-axis connection point PX2 (an intermediate potential between the strain detection elements SX3 and SX4). By measuring the difference between these two voltage values, it is possible to obtain an X-axis output SXout that is twice as large as the conventional output.

[0099] Furthermore, similar to the detection circuit 150 shown in FIG. 4, the detection circuit 150-3 shown in FIG. 8 can obtain two voltage values: a voltage value output from the first Y-axis connection point PY1 (an intermediate potential between the strain detection elements SY3 and SY4) and a voltage value output from the second Y-axis connection point PY2 (an intermediate potential between the strain detection elements SY1 and SY2). Therefore, by measuring the difference between these two voltage values, it is possible to obtain a Y-axis output SYout that is twice as large as the conventional output.

[0100] Furthermore, similar to the detection circuit 150 shown in FIG. 4, the detection circuit 150-3 shown in FIG. 8 obtains two voltage values: a voltage value output from the first Z-axis connection point PZ1 (an intermediate potential between the first measurement circuit 151 and the first fixed resistor R1) and a voltage value output from the second Z-axis connection point PZ2 (an intermediate potential between the second measurement circuit 152 and the second fixed resistor R2). By measuring the difference between these two voltage values, it is possible to obtain a Z-axis output SZout that is twice as large as the conventional output.

[0101] (First Modification of Force Sensor 100) Fig. 9 is a diagram showing a first modified example of a force sensor 100 according to an embodiment. The force sensor 100-2 shown in Fig. 9 is configured to be able to detect an operator's tilting operation of the shaft portion 112 of the strain element 110 in the X-axis direction and a pressing operation in the Z-axis direction. For this reason, the force sensor 100-2 shown in Fig. 9 has two strain detection elements 140 provided on the lower surface of the base portion 131 of the flexible substrate 130, one to the right (positive direction of the X-axis) and one to the left (negative direction of the X-axis).

[0102] Specifically, in the force sensor 100-2 shown in FIG. 9, strain detection elements SX1 and SX2 are arranged parallel to each other in the Y-axis direction on the right side (positive side of the X-axis) of the underside of the base 131.

[0103] In addition, in the force sensor 100-2 shown in FIG. 9, strain detection elements SX3 and SX4 are arranged parallel to each other in the Y-axis direction on the left side (X-axis negative side) of the lower surface of the base 131.

[0104] In the force sensor 100-2 shown in FIG. 9, each of the strain detection elements SX1, SX2, SX3, and SX4 has a rectangular shape and is arranged with its long side parallel to the X-axis so that the X-axis direction is the detection direction.

[0105] (Fifth Modification of the Configuration of the Detection Circuit 150) FIG. 10 is a circuit diagram showing a fifth modified example of the configuration of the detection circuit 150 included in the force sensor 100-2 of FIG.

[0106] 10 differs from the detection circuit 150 shown in Fig. 4 in that it does not have a configuration for detecting an operational load in the Y-axis direction. The configurations for detecting an operational load in the X-axis direction and the configurations for detecting an operational load in the Z-axis direction are the same for the detection circuit 150 shown in Fig. 4 and the detection circuit 150 shown in Fig. 10. For example, the detection circuit 150-4 shown in Fig. 10 is used in a force sensor 100-2 that is capable of a tilt operation in the X-axis direction and a press operation in the Z-axis direction.

[0107] 10 includes a first measurement circuit 151. The first measurement circuit 151 includes a first X-axis series circuit 151A in which the strain detection elements SX3 and SX1 are connected in series, and a second X-axis series circuit 151B in which the strain detection elements SX2 and SX4 are connected in series, which are connected in parallel.

[0108] In addition, in the detection circuit 150-4 shown in FIG. 10, the first fixed resistor R1 is connected to the power supply voltage (constant voltage terminal +B) side of the second X-axis series circuit 151B, and the second fixed resistor R2 is connected to the ground side of the first X-axis series circuit 151A.

[0109] Similar to the detection circuit 150 shown in FIG. 4, the detection circuit 150-4 shown in FIG. 10 can obtain two voltage values: a voltage value output from the first X-axis connection point PX1 (an intermediate potential between the strain detection elements SX1 and SX3) and a voltage value output from the second X-axis connection point PX2 (an intermediate potential between the strain detection elements SX2 and SX4). By measuring the difference between these two voltage values, it is possible to obtain an X-axis output SXout that is twice the normal output.

[0110] Furthermore, the detection circuit 150-4 shown in FIG. 10 can obtain two voltage values: a voltage value output from the first Z-axis connection point PZ1 (an intermediate potential between the second X-axis series circuit 151B and the first fixed resistor R1) and a voltage value output from the second Z-axis connection point PZ2 (an intermediate potential between the first X-axis series circuit 151A and the second fixed resistor R2). Therefore, by measuring the difference between these two voltage values, it is possible to obtain a Z-axis output SZout that is twice the normal output.

[0111] (Sixth Modification of the Configuration of the Detection Circuit 150) FIG. 11 is a circuit diagram showing a sixth modified example of the configuration of the detection circuit 150 included in the force sensor 100 according to an embodiment.

[0112] 11 differs from the detection circuit 150 shown in FIG. 4 in that a switch SW1 and a switch SW2 are provided between the first measurement circuit 151 and the power supply voltage (constant voltage terminal +B). However, the switch SW1 is provided between the first fixed resistor R1 and the power supply voltage (constant voltage terminal +B). In FIG. 11, the switch SW1 is provided between the fixed resistor R1 and the power supply voltage +B. However, the switch SW1 may be provided between the first measurement circuit 151 and the fixed resistor R1.

[0113] 4 in that a detection circuit 150-5 shown in Fig. 11 includes a switch SW3 and a switch SW4 between the second measurement circuit 152 and ground. In Fig. 11, the switch SW3 is provided between the second fixed resistor R2 and ground. However, the switch SW3 may be provided between the second measurement circuit 152 and the fixed resistor R2.

[0114] The detection circuit 150-5 shown in FIG. 11 switches the switches SW1, SW2, SW3, and SW4 at high speed in a time-division manner.

[0115] For example, when detecting the operational loads of the X-axis and Y-axis, the detection circuit 150-5 shown in Fig. 11 switches the switch SW1 off and the switch SW2 on, thereby connecting the first measurement circuit 151 directly to the power supply voltage (constant voltage terminal +B) without passing through the first fixed resistor R1. At the same time, the detection circuit 150-5 shown in Fig. 11 switches the switch SW3 off and the switch SW4 on, thereby connecting the second measurement circuit 152 directly to ground without passing through the second fixed resistor R2. This allows the detection circuit 150-5 shown in Fig. 11 to prevent a decrease in the detection sensitivity of the operational loads of the X-axis and Y-axis due to the first fixed resistor R1 and the second fixed resistor R2.

[0116] 11 turns on switch SW1 and turns off switch SW2 when detecting an operational load on the Z axis, thereby connecting first measurement circuit 151 to the power supply voltage (constant voltage terminal +B) via first fixed resistor R1. At the same time, detection circuit 150-5 shown in FIG. 11 turns on switch SW3 and turns off switch SW4, thereby connecting second measurement circuit 152 to ground via second fixed resistor R2. This enables detection circuit 150-5 shown in FIG. 11 to detect an operational load on the Z axis.

[0117] (Seventh Modification of the Configuration of the Detection Circuit 150) FIG. 12 is a circuit diagram showing a seventh modified example of the configuration of the detection circuit 150 included in the force sensor 100 according to one embodiment.

[0118] 8 in that a detection circuit 150-6 shown in Fig. 12 includes a switch SW1 and a switch SW2 between the first measurement circuit 151 and the power supply voltage (constant voltage terminal +B). However, the switch SW1 is provided between the first fixed resistor R1 and the power supply voltage (constant voltage terminal +B).

[0119] 8 in that a detection circuit 150-6 shown in Fig. 12 includes a switch SW3 and a switch SW4 between the second measurement circuit 152 and the ground. However, the switch SW3 is provided between the second fixed resistor R2 and the ground.

[0120] The detection circuit 150-6 shown in FIG. 12 switches the switches SW1, SW2, SW3, and SW4 at high speed in a time-division manner.

[0121] For example, when detecting the operation loads of the X-axis and Y-axis, the detection circuit 150-6 shown in Fig. 12 switches the switch SW1 off and the switch SW2 on, thereby connecting the first measurement circuit 151 directly to the power supply voltage (constant voltage terminal +B) without passing through the first fixed resistor R1. At the same time, the detection circuit 150-6 shown in Fig. 12 switches the switch SW3 off and the switch SW4 on, thereby connecting the second measurement circuit 152 directly to ground without passing through the second fixed resistor R2. This allows the detection circuit 150-6 shown in Fig. 12 to reduce power consumption.

[0122] 12 turns on switch SW1 and turns off switch SW2, thereby connecting first measurement circuit 151 to the power supply voltage (constant voltage terminal +B) via first fixed resistor R1. At the same time, detection circuit 150-6 shown in FIG. 12 turns on switch SW3 and turns off switch SW4, thereby connecting second measurement circuit 152 to ground via second fixed resistor R2. This enables detection circuit 150-6 shown in FIG. 12 to detect the Z-axis operation load.

[0123] (Eighth Modification of the Configuration of the Detection Circuit 150) FIG. 13 is a circuit diagram showing an eighth modified example of the configuration of the detection circuit 150 included in the force sensor 100 according to one embodiment.

[0124] 13 differs from the detection circuit 150-4 shown in Fig. 10 in that a switch SW1 and a switch SW2 are provided between the first measurement circuit 151 and the power supply voltage (constant voltage terminal +B). However, the switch SW1 is provided between the first fixed resistor R1 and the power supply voltage (constant voltage terminal +B).

[0125] 13 differs from the detection circuit 150-4 shown in Fig. 10 in that a switch SW3 and a switch SW4 are provided between the first measurement circuit 151 and the ground. However, the switch SW3 is provided between the second fixed resistor R2 and the ground.

[0126] The detection circuit 150-7 shown in FIG. 13 switches the switches SW1, SW2, SW3, and SW4 at high speed in a time-division manner.

[0127] For example, when detecting an X-axis operation load, the detection circuit 150-7 shown in Fig. 13 switches the switch SW1 off and the switch SW2 on, thereby connecting the first measurement circuit 151 directly to the power supply voltage (constant voltage terminal +B) without passing through the first fixed resistor R1. At the same time, the detection circuit 150-7 shown in Fig. 13 switches the switch SW3 off and the switch SW4 on, thereby connecting the first measurement circuit 151 directly to ground without passing through the second fixed resistor R2. This allows the detection circuit 150-7 shown in Fig. 13 to reduce power consumption.

[0128] 13 turns on switch SW1 and turns off switch SW2, thereby connecting first measurement circuit 151 to the power supply voltage (constant voltage terminal +B) via first fixed resistor R1. At the same time, detection circuit 150-7 shown in FIG. 13 turns on switch SW3 and turns off switch SW4, thereby connecting first measurement circuit 151 to ground via second fixed resistor R2. This enables detection circuit 150-7 shown in FIG. 13 to detect the operation load of the Z axis.

[0129] FIG. 14 is a diagram showing a modified example of the switch included in the force sensor 100 according to one embodiment.

[0130] The switches SW1, SW2, SW3, and SW4 shown in FIGS. 6, 7, and 11 to 13 are realized by, for example, transistors built into an IC. The connection order of the first fixed resistor R1 and the switch SW1 is not important. As shown in FIG. 14(a), the switch SW1 may be located closer to the power supply voltage than the first fixed resistor R1. As shown in FIG. 14(b), the switch SW1 may be located closer to the ground than the fixed resistor R1. Similarly, the connection order of the second fixed resistor R2 and the switch SW3 is not important. Furthermore, in the detection circuits 150-5 to 150-7 shown in FIGS. 11 to 13, instead of the two SPST switches SW1 and SW2, a single SPDT switch that can be connected to either the first fixed resistor R1 or the first measurement circuit 151 may be provided. In this case, too, the connection order of the switch and the first fixed resistor R1 is not important. As shown in FIG. 14(c), the changeover switch may be located closer to the power supply voltage than the first fixed resistor R1. As shown in FIG. 14(d), the changeover switch may be located closer to the ground than the fixed resistor R1. Similarly, the order in which the second fixed resistor R2 and the changeover switch are connected may be reversed. Also, instead of using two switches as shown in FIG. 14(c), a DPDT (double-pole, double-throw) switch as shown in FIG. 14(e) may be used. Similarly, instead of using two switches as shown in FIG. 14(d), a DPDT (double-pole, double-throw) switch as shown in FIG. 14(f) may be used.

[0131] (First Modification of Arrangement of Multiple Strain Detection Elements 140) FIG. 15 is a diagram showing a first modified example of the arrangement of the plurality of strain detection elements 140 in the force sensor 100 according to one embodiment.

[0132] 15 is a configuration in which the positions of strain detecting elements SX3 and SX4 are swapped compared to the configuration in FIG. 3. In both the configuration in FIG. 15 and the configuration in FIG. 3, strain detecting elements SX3 and SX1 are connected to form a first X-axis series circuit 151A. Also, strain detecting elements SX2 and SX4 are connected to form a second X-axis series circuit 151B. In the configuration in FIG. 3, strain detecting elements SX3 and SX1, which are positioned symmetrically about an axis, are connected in series to form the first X-axis series circuit 151A. On the other hand, in the configuration in FIG. 15, strain detecting elements SX3 and SX1, which are positioned symmetrically about a 180-degree point, are connected in series to form the first X-axis series circuit 151A.

[0133] In both the configuration of FIG. 15 and the configuration of FIG. 3, the strain detection elements SX3 and SX4 are arranged on the negative side of the X-axis, so even if the positions of the strain detection elements SX3 and SX4 are swapped, the voltage value at the first X-axis connection point PX1 does not change.

[0134] Similarly, in the configuration of Fig. 3, the strain detection elements SX2 and SX4, which are positioned symmetrically about an axis, are connected in series to form the second X-axis series circuit 151B. On the other hand, in the configuration of Fig. 15, the strain detection elements SX4 and SX2, which are positioned symmetrically about a 180-degree angle, are connected in series to form the second X-axis series circuit 151B.

[0135] In both the configurations of Figure 15 and Figure 3, the strain detection elements SX3 and SX4 are provided on the negative side of the X-axis, so even if the positions of the strain detection elements SX3 and SX4 are swapped, the voltage value at the second X-axis connection point PX2 does not change.

[0136] Therefore, in the force sensor 100 according to one embodiment, even if the positions of the strain detection elements SX3 and SX4 are interchanged, by measuring the difference between the first X-axis connection point PX1 and the second X-axis connection point PX2, it is possible to obtain an X-axis output SXout that is twice as large as the conventional output.

[0137] 15 shows a configuration in which the positions of strain detecting elements SY3 and SY4 are swapped compared to the configuration in FIG. 3. In both the configuration in FIG. 15 and the configuration in FIG. 3, strain detecting elements SY3 and SY1 are connected to form a first Y-axis series circuit 152A. Also, strain detecting elements SY2 and SY4 are connected to form a second Y-axis series circuit 152B. In the configuration in FIG. 3, strain detecting elements SY3 and SY1, which are positioned symmetrically about a line, are connected in series to form the first Y-axis series circuit 152A. On the other hand, in the configuration in FIG. 15, strain detecting elements SY3 and SY1, which are positioned symmetrically about a 180-degree point, are connected in series to form the first Y-axis series circuit 152A.

[0138] In both the configuration of Figure 15 and the configuration of Figure 3, the strain detection elements SY3 and SY4 are arranged on the negative side of the Y-axis, so even if the positions of the strain detection elements SY3 and SY4 are swapped, the voltage value at the first Y-axis connection point PY1 does not change.

[0139] Similarly, in the configuration of Fig. 3, the strain detection elements SY2 and SY4, which are positioned symmetrically about an axis, are connected in series to form the second Y-axis series circuit 152B. On the other hand, in the configuration of Fig. 15, the strain detection elements SY2 and SY4, which are positioned symmetrically about a 180-degree angle, are connected in series to form the second Y-axis series circuit 152B.

[0140] In both the configuration of Figure 15 and the configuration of Figure 3, the strain detection elements SY3 and SY4 are arranged on the negative side of the Y-axis, so even if the positions of the strain detection elements SY3 and SY4 are swapped, the voltage value at the second Y-axis connection point PY2 does not change.

[0141] Therefore, in one embodiment of the force sensor 100, even if the positions of the strain detection elements SY3 and SY4 are swapped, by measuring the difference between the first Y-axis connection point PY1 and the second Y-axis connection point PY2, it is possible to obtain a Y-axis output SYout that is twice as large as the conventional output.

[0142] (Second modified example of arrangement of multiple strain detection elements 140) FIG. 16 is a diagram showing a second modified example of the arrangement of the plurality of strain detection elements 140 in the force sensor 100 according to one embodiment.

[0143] 12, the force sensor 100 according to one embodiment may have eight strain detection elements 140 radially arranged on the lower surface of the base 131 of the flexible substrate 130. That is, two strain detection elements 140 are paired at equal intervals and equal angles in four directions (front-rear, left-right directions). Four pairs (eight in total) of strain detection elements 140 may be provided corresponding to the four directions (front-rear, left-right directions).

[0144] For example, in the example shown in Figure 16, the direction between SX1 and SX2 is the positive direction of the X axis. The direction between SX3 and SX4 is the negative direction of the X axis. The direction between SY1 and SY2 is the positive direction of the Y axis. The direction between SY3 and SY4 is the negative direction of the Y axis. In the example shown in Figure 16, eight strain detection elements 140 are arranged radially at equal intervals (i.e., 45° intervals).

[0145] (Third Modification of Arrangement of Multiple Strain Detection Elements 140) FIG. 17 is a diagram showing a third modified example of the arrangement of the plurality of strain detection elements 140 in the force sensor 100 according to one embodiment.

[0146] 17, the force sensor 100 according to one embodiment may have four strain detection elements 140 corresponding to the four directions provided on the upper surface of the base 131 of the flexible substrate 130, and four strain detection elements 140 corresponding to the four directions provided on the lower surface of the base 131 of the flexible substrate 130. In this case, the four strain detection elements 140 on the upper surface of the base 131 and the four strain detection elements 140 on the lower surface of the base 131 may be arranged to overlap each other. This allows the two overlapping strain detection elements 140 to be equally deformed (contracted or expanded).

[0147] 17(a), strain detection element SX1 is provided in the positive direction of the X-axis, strain detection element SX4 in the negative direction of the X-axis, strain detection element SY1 in the positive direction of the Y-axis, and strain detection element SY4 in the negative direction of the Y-axis on the underside of flexible substrate 130. Also, as shown in Fig. 17(b), strain detection element SX2 is provided in the negative direction of the X-axis, SX3 in the positive direction of the X-axis, SY2 in the negative direction of the Y-axis, and SY3 in the positive direction of the Y-axis on the upper side of flexible substrate 130.

[0148] In the example shown in FIG. 17, the strain detecting element SX1 on the X-axis positive side on the upper surface of the base 131 and the strain detecting element SX3 on the X-axis positive side on the lower surface of the base 131 are arranged to overlap each other.

[0149] In the example shown in FIG. 17, the strain detection element SX2 on the negative side of the X axis on the upper surface of the base 131 and the strain detection element SX4 on the negative side of the X axis on the lower surface of the base 131 are arranged to overlap each other.

[0150] In the example shown in FIG. 17, the strain detecting element SY2 on the Y-axis positive side on the upper surface of the base 131 and the strain detecting element SY4 on the Y-axis positive side on the lower surface of the base 131 are arranged to overlap each other.

[0151] In the example shown in FIG. 17, the strain detecting element SY1 on the Y-axis negative side on the upper surface of the base 131 and the strain detecting element SY3 on the Y-axis negative side on the lower surface of the base 131 are arranged to overlap each other.

[0152] When an operating load is applied in the positive direction of the X axis, SX1 and SX2 expand and the resistance value changes in the positive direction. On the other hand, when an operating load is applied in the positive direction of the X axis, SX3 and SX4 contract and the resistance value changes in one direction.

[0153] Conversely, when an operating load is applied in the negative X-axis direction, SX1 and SX2 contract and the resistance value changes in the negative direction. On the other hand, when an operating load is applied in the negative X-axis direction, SX3 and SX4 expand and the resistance value changes in the positive direction.

[0154] Furthermore, when an operating load is applied in the positive direction of the Y axis, SY1 and SY2 expand, and the resistance value changes in the positive direction. On the other hand, when an operating load is applied in the positive direction of the Y axis, SY3 and SY4 contract, and the resistance value changes in one direction.

[0155] Conversely, when an operating load is applied in the negative Y-axis direction, SY1 and SY2 contract, causing the resistance value to change in the negative direction. On the other hand, when an operating load is applied in the negative Y-axis direction, SY3 and SY4 expand, causing the resistance value to change in the positive direction.

[0156] In the example shown in Figure 17, when an operational load is applied in the negative direction of the Z axis, SX1, SX4, SY1, and SY4 expand, causing the resistance value to change in the positive direction. On the other hand, when an operational load is applied in the positive direction of the Z axis, SX2, SX3, SY2, and SY3 contract, causing the resistance value to change in the negative direction. For this reason, SZout measures the load in the Z direction based on SX1, SX4, SY1, SY4, R1, and R2 (or SX2, SX3, SY2, SY3, R1, and R2).

[0157] (Second to Fourth Modifications of the Force Sensor 100) Fig. 18 is a cross-sectional view showing a second modified example of the force sensor 100 according to an embodiment. Fig. 19 is a cross-sectional view showing a third modified example of the force sensor 100 according to an embodiment. Fig. 20 is a cross-sectional view showing a fourth modified example of the force sensor 100 according to an embodiment.

[0158] Force sensors 100-3 to 100-5 shown in Figures 18 to 20 have the same configuration as force sensor 100, in that they detect strain generated in deforming portion 111A of strain body 110 due to a tilting operation by an operator using eight strain detection elements 140 provided on strain body 110.

[0159] 18 to 20, the force sensors 100-3 to 100-5 are provided such that the strain body 110 is stacked on a substrate 180. The force sensors 100-3 to 100-5 shown in Fig. 18 to 20 are configured such that the shaft 121 extending downward from the lower surface of the operation knob 120 passes through the shaft 112 of the strain body 110 in the vertical direction, and further, a dome-shaped metallic movable contact member 160 is provided facing the lower end surface 121A of the shaft 121 of the operation knob 120.

[0160] In the force sensors 100-3 to 100-5 shown in Figures 18 to 20, when the operation knob 120 is pressed by an operator, the lower end surface 121A of the shaft portion 121 of the operation knob 120 presses the top (center) of the movable contact member 160, causing the movable contact member 160 to reverse from a convex shape to a concave shape.

[0161] As a result, the force sensors 100-3 to 100-5 shown in Figures 18 to 20 provide a clicking sensation in response to a pressing operation by the operator, and can detect the pressing operation by bringing the center of the movable contact member 160 into contact with the fixed contact 182, thereby switching the switch comprising the movable contact member 160 and the fixed contact 182 to the on state.

[0162] 18 has a horizontal, flat elastic member 170-1 made of an elastic material (e.g., rubber, silicone, etc.) between the bottom end surface 121A of the shaft portion 121 of the operation knob 120 and the top of the movable contact member 160. As a result, the force sensor 100-3 shown in Fig. 18 can absorb contact noise between the bottom end surface 121A of the shaft portion 121 of the operation knob 120 and the top of the movable contact member 160 using the elastic member 170-1, between the bottom end surface 121A of the shaft portion 121 of the operation knob 120 and the top of the movable contact member 160, thereby suppressing the contact noise.

[0163] In the example shown in FIG. 18, a protrusion 171 is provided on the lower surface of the elastic member 170-1, and the protrusion 171 can reliably press the top of the movable contact member 160.

[0164] 19 has a block-shaped elastic member 170-2 made of an elastic material (e.g., rubber, silicone, etc.) provided below the center of the movable contact member 160 (inside the recess 181 of the substrate 180). As a result, the force sensor 100-4 shown in FIG. 19 can absorb the abutment sound between the movable contact member 160 and the substrate 180 caused by the reversal movement of the movable contact member 160 by the elastic member 170-2 below the center of the movable contact member 160, thereby suppressing the abutment sound. Furthermore, the force sensor 100-4 shown in FIG. 19 can attenuate the moving speed of the shaft portion 121 of the operation knob 120 by the elastic member 170-2, and as a result, can suppress the abutment sound between the bottom end surface 121A of the shaft portion 121 of the operation knob 120 and the top of the movable contact member 160.

[0165] 20 has a circular elastic member 170-3 made of an elastic material (e.g., rubber, silicone, etc.) provided between the underside of the operation knob 120 and the upper surface of the shaft portion 121 of the operation knob 120 so as to surround the shaft portion 121 of the operation knob 120. As a result, the force sensor 100-5 shown in Fig. 20 can absorb contact noise between the underside of the operation knob 120 and the upper surface of the shaft portion 121 of the operation knob 120 by the elastic member 170-3 between the underside of the operation knob 120 and the upper surface of the shaft portion 121 of the operation knob 120, thereby suppressing the contact noise.

[0166] Although one embodiment of the present invention has been described in detail above, the present invention is not limited to these embodiments, and various modifications and changes are possible within the scope of the gist of the present invention described in the claims.

[0167] For example, in each of the detection circuits described above, the configuration for detecting the operation load in the Z-axis direction applied to the shaft portion 112 (i.e., the first fixed resistor R1, the second fixed resistor R2, the differential amplifier 153Z, etc.) may not be provided. [Explanation of symbols]

[0168] 100, 100-2, 100-3, 100-4, 100-5 Force sensor 110 Strain body 111 Base 111A Deformed part 112 Shaft 113 Recess 114 Through hole 120 Operation Knob 121 Shaft 121A Bottom end surface 122 recess 130 Flexible PCB 131 Base 131A opening 132 Drawer section 140 Strain detection element SX1, SX2, SX3, SX4, SY1, SY2, SY3, SY4 strain detection elements S1, S2, S3, S4 strain detection elements 150, 150-2, 150-3, 150-4, 150-5, 150-6, 150-7, 150-8, 150-9 Detection circuit 151 1st measurement circuit 151A 1st X-axis series circuit 151B 2nd X-axis series circuit 152 2nd measurement circuit 152A 1st Y-axis series circuit 152B 2nd Y-axis series circuit 153X, 153Y, 153Z Differential Amplifier 160 Movable contact member 170-1, 170-2, 170-3 Elastic member 180 boards 182 Fixed contacts PX1 1st X-axis connection point PX2 2nd X-axis connection point PY1 1st Y-axis connection point PY2 Second Y-axis connection point PZ1 1st Z-axis connection point PZ2 Second Z-axis connection point R1 First fixed resistor R2 2nd fixed resistor SXout X-axis output SYout Y-axis output SZout Z-axis output

Claims

1. A shaft portion; a plate-shaped deformation portion that is integrally formed with the shaft portion and perpendicular to the axial direction of the shaft portion; a plurality of strain detection elements provided in the deformation portion; Detection circuit and Equipped with The detection circuit a first measurement circuit including some of the plurality of strain detection elements and configured to detect a force applied to the shaft portion in a direction perpendicular to the axial direction; a second measurement circuit including another part of the plurality of strain detection elements and configured to detect a force applied to the shaft portion in a direction perpendicular to the axial direction; a first fixed resistor connected to a power supply voltage side of the first measurement circuit; a second fixed resistor connected to the ground side of the second measurement circuit; and The axial force applied to the shaft portion is detected based on a voltage between a connection point between the first measurement circuit and the first fixed resistor and a connection point between the second measurement circuit and the second fixed resistor. An input device characterized by:

2. The plurality of strain sensing elements are a first X-axis strain detection element and a second X-axis strain detection element provided on the positive side of the X-axis perpendicular to the axial direction; a third X-axis strain detection element and a fourth X-axis strain detection element provided on the negative side of the X-axis; a first Y-axis strain detection element and a second Y-axis strain detection element provided on a positive side of a Y-axis perpendicular to the axial direction and the X-axis; a third Y-axis strain detection element and a fourth Y-axis strain detection element provided on the negative side of the Y-axis; It consists of The first measurement circuit a bridge circuit in which a first X-axis series circuit in which the first X-axis strain detection element and the third X-axis strain detection element are connected in series and a second X-axis series circuit in which the second X-axis strain detection element and the fourth X-axis strain detection element are connected in series are connected in parallel; the first X-axis strain detection element and the fourth X-axis strain detection element are provided on the ground side, the second X-axis strain detection element and the third X-axis strain detection element are provided on the power supply voltage side, a first X-axis connection point between the first X-axis strain sensing element and a third X-axis strain sensing element, and a second X-axis connection point between the second X-axis strain sensing element and a fourth X-axis strain sensing element; The second measurement circuit a bridge circuit in which a first Y-axis series circuit, in which the first Y-axis strain detection element and the third Y-axis strain detection element are connected in series, and a second Y-axis series circuit, in which the second Y-axis strain detection element and the fourth Y-axis strain detection element are connected in series, are connected in parallel; the first Y-axis strain detection element and the fourth Y-axis strain detection element are provided on the ground side, the second Y-axis strain detection element and the third Y-axis strain detection element are provided on the power supply voltage side, a first Y-axis connection point between the first Y-axis strain sensing element and a third Y-axis strain sensing element, and a second Y-axis connection point between the second Y-axis strain sensing element and a fourth Y-axis strain sensing element; The detection circuit Detecting a force applied in the direction of the X-axis based on a voltage between the first X-axis connection point and the second X-axis connection point; A force applied in the direction of the Y-axis is detected based on a voltage between the first Y-axis connection point and the second Y-axis connection point.

2. The input device according to claim 1.

3. The plurality of strain sensing elements are a first X-axis strain detection element and a second X-axis strain detection element provided on the positive side of the X-axis perpendicular to the axial direction; a third X-axis strain detection element and a fourth X-axis strain detection element provided on the negative side of the X-axis; a first Y-axis strain detection element and a second Y-axis strain detection element provided on a positive side of a Y-axis perpendicular to the axial direction and the X-axis; a third Y-axis strain detection element and a fourth Y-axis strain detection element provided on the negative side of the Y-axis; It consists of The first measurement circuit a bridge circuit in which a first X-axis series circuit, in which the first X-axis strain detection element and the third X-axis strain detection element are connected in series, and a first Y-axis series circuit, in which the third Y-axis strain detection element and the first Y-axis strain detection element are connected in series, are connected in parallel; a first X-axis connection point between the first X-axis strain sensing element and the third X-axis strain sensing element, and a first Y-axis connection point between the third Y-axis strain sensing element and the first Y-axis strain sensing element; The second measurement circuit a bridge circuit in which a second X-axis series circuit in which the second X-axis strain detection element and the fourth X-axis strain detection element are connected in series and a second Y-axis series circuit in which the second Y-axis strain detection element and the fourth Y-axis strain detection element are connected in series are connected in parallel; a second X-axis connection point between the second X-axis strain sensing element and the fourth X-axis strain sensing element, and a second Y-axis connection point between the second Y-axis strain sensing element and the fourth Y-axis strain sensing element; the first X-axis strain detection element and the fourth X-axis strain detection element are provided on the ground side, the second X-axis strain detection element and the third X-axis strain detection element are provided on the power supply voltage side, the first Y-axis strain detection element and the fourth Y-axis strain detection element are provided on the ground side, the second Y-axis strain detection element and the third Y-axis strain detection element are provided on the power supply voltage side, The detection circuit Detecting a force applied in the direction of the X-axis based on a voltage between the first X-axis connection point and the second X-axis connection point; A force applied in the direction of the Y-axis is detected based on a voltage between the first Y-axis connection point and the second Y-axis connection point.

2. The input device according to claim 1.

4. The plurality of strain sensing elements are a first X-axis strain detection element and a second X-axis strain detection element provided on the positive side of the X-axis perpendicular to the axial direction; a third X-axis strain detection element and a fourth X-axis strain detection element provided on the negative side of the X-axis; It consists of the first measurement circuit is a first X-axis series circuit in which a third X-axis strain detection element and a first X-axis strain detection element are connected in series; the second measurement circuit is a second X-axis series circuit in which a second X-axis strain detection element and a fourth X-axis strain detection element are connected in series, the first X-axis strain detection element and the fourth X-axis strain detection element are provided on the ground side, the second X-axis strain detection element and the third X-axis strain detection element are provided on the power supply voltage side, a first X-axis connection point between the first X-axis strain sensing element and a third X-axis strain sensing element, and a second X-axis connection point between the second X-axis strain sensing element and a fourth X-axis strain sensing element; A force applied in the direction of the X-axis is detected based on a voltage between the first X-axis connection point and the second X-axis connection point.

2. The input device according to claim 1.

5. The detection circuit When detecting a force applied to the shaft portion in a direction perpendicular to the axial direction, the power supply voltage and the first measurement circuit are connected via the first fixed resistor, and the second measurement circuit is grounded via the second fixed resistor; When detecting a force applied to the shaft portion in the axial direction, the power supply voltage and the first measurement circuit are directly connected, and the second measurement circuit is directly grounded.

4. The input device according to claim 1, wherein the input device is a touch panel.

6. A shaft portion; a plate-shaped deformation portion that is integrally formed with the shaft portion and perpendicular to the axial direction of the shaft portion; a plurality of strain detection elements provided in the deformation portion; Detection circuit and Equipped with The detection circuit a first measurement circuit including some of the plurality of strain detection elements and configured to detect a force applied to the shaft portion in a direction perpendicular to the axial direction; a second measurement circuit including another part of the plurality of strain detection elements and configured to detect a force applied to the shaft portion in a direction perpendicular to the axial direction; a first fixed resistor connected to a power supply voltage side or a ground side of the first measurement circuit; a second fixed resistor connected to the power supply voltage side or the ground side of the second measurement circuit; and When the first fixed resistor is connected to the power supply voltage side of the first measurement circuit, the second fixed resistor is connected to a power supply voltage side of the second measurement circuit, When the first fixed resistor is connected to the ground side of the first measurement circuit, the second fixed resistor is connected to the ground side of the second measurement circuit, A voltage at a connection point between the first measurement circuit and the first fixed resistor and a voltage at a connection point between the second measurement circuit and the second fixed resistor are added together to detect the axial force applied to the shaft portion. An input device characterized by:

7. The plurality of strain sensing elements are a first X-axis strain detection element and a second X-axis strain detection element provided on the positive side of the X-axis perpendicular to the axial direction; a third X-axis strain detection element and a fourth X-axis strain detection element provided on the negative side of the X-axis; a first Y-axis strain detection element and a second Y-axis strain detection element provided on a positive side of a Y-axis perpendicular to the axial direction and the X-axis; a third Y-axis strain detection element and a fourth Y-axis strain detection element provided on the negative side of the Y-axis; It consists of The first measurement circuit a bridge circuit in which a first X-axis series circuit in which the first X-axis strain detection element and the third X-axis strain detection element are connected in series and a second X-axis series circuit in which the second X-axis strain detection element and the fourth X-axis strain detection element are connected in series are connected in parallel; the first X-axis strain detection element and the second X-axis strain detection element are provided on the ground side, the third X-axis strain detection element and the fourth X-axis strain detection element are provided on the power supply voltage side, a first X-axis connection point between the first X-axis strain sensing element and the third X-axis strain sensing element, and a second X-axis connection point between the second X-axis strain sensing element and the fourth X-axis strain sensing element; The second measurement circuit a bridge circuit in which a first Y-axis series circuit, in which the first Y-axis strain detection element and the third Y-axis strain detection element are connected in series, and a second Y-axis series circuit, in which the second Y-axis strain detection element and the fourth Y-axis strain detection element are connected in series, are connected in parallel; the first Y-axis strain detection element and the second Y-axis strain detection element are provided on the ground side, the third Y-axis strain detection element and the fourth Y-axis strain detection element are provided on the power supply voltage side, a first Y-axis connection point between the first Y-axis strain sensing element and a third Y-axis strain sensing element, and a second Y-axis connection point between the second Y-axis strain sensing element and a fourth Y-axis strain sensing element; The detection circuit adding the voltage at the first X-axis connection point and the voltage at the second X-axis connection point to detect a force applied in the direction of the X-axis; The voltage at the first Y-axis connection point and the voltage at the second Y-axis connection point are added together to detect the force applied in the Y-axis direction.

7. The input device according to claim 6.

8. A shaft portion; a plate-shaped deformation portion that is integrally formed with the shaft portion and perpendicular to the axial direction of the shaft portion; a plurality of strain detection elements provided in the deformation portion; Detection circuit and Equipped with The detection circuit a first measurement circuit including some of the plurality of strain detection elements and configured to detect a force applied to the shaft portion in a direction perpendicular to the axial direction; a second measurement circuit including another part of the plurality of strain detection elements and configured to detect a force applied to the shaft portion in a direction perpendicular to the axial direction; and The plurality of strain sensing elements are a first X-axis strain detection element and a second X-axis strain detection element provided on the positive side of the X-axis perpendicular to the axial direction; a third X-axis strain detection element and a fourth X-axis strain detection element provided on the negative side of the X-axis; a first Y-axis strain detection element and a second Y-axis strain detection element provided on a positive side of a Y-axis perpendicular to the axial direction and the X-axis; a third Y-axis strain detection element and a fourth Y-axis strain detection element provided on the negative side of the Y-axis; It consists of The first measurement circuit a bridge circuit in which a first X-axis series circuit in which the first X-axis strain detection element and the third X-axis strain detection element are connected in series and a second X-axis series circuit in which the second X-axis strain detection element and the fourth X-axis strain detection element are connected in series are connected in parallel; a first X-axis connection point between the first X-axis strain sensing element and a third X-axis strain sensing element, and a second X-axis connection point between the second X-axis strain sensing element and a fourth X-axis strain sensing element; The second measurement circuit a bridge circuit in which a first Y-axis series circuit, in which the first Y-axis strain detection element and the third Y-axis strain detection element are connected in series, and a second Y-axis series circuit, in which the second Y-axis strain detection element and the fourth Y-axis strain detection element are connected in series, are connected in parallel; a first Y-axis connection point between the first Y-axis strain sensing element and a third Y-axis strain sensing element, and a second Y-axis connection point between the second Y-axis strain sensing element and a fourth Y-axis strain sensing element; The detection circuit Detecting a force applied in the direction of the X-axis based on a voltage between the first X-axis connection point and the second X-axis connection point; A force applied in the direction of the Y-axis is detected based on a voltage between the first Y-axis connection point and the second Y-axis connection point. An input device characterized by:

9. a flexible substrate provided on the deformation section; the first X-axis strain detection element and the second X-axis strain detection element are provided adjacent to each other on a positive side of the X-axis with the shaft portion as a reference on one surface of the flexible substrate, the third X-axis strain detection element and the fourth X-axis strain detection element are provided adjacent to each other on a negative side of the X-axis with the shaft portion as a reference on the one surface of the flexible substrate, the first Y-axis strain detection element and the second Y-axis strain detection element are provided adjacent to each other on a positive side of the Y-axis with the shaft portion as a reference on the one surface of the flexible substrate, The third Y-axis strain detection element and the fourth Y-axis strain detection element are provided adjacent to each other on the negative side of the Y-axis with the shaft portion as a reference on the one surface of the flexible substrate.

9. The input device according to claim 2, 3 or 8.

10. the first X-axis strain detection element and the second X-axis strain detection element are provided parallel to each other, the third X-axis strain detection element and the fourth X-axis strain detection element are provided parallel to each other, the first Y-axis strain detection element and the second Y-axis strain detection element are arranged parallel to each other, The third Y-axis strain detection element and the fourth Y-axis strain detection element are provided in parallel to each other.

10. The input device according to claim 9.

11. The plurality of strain detection elements are arranged radially around the shaft portion.

10. The input device according to claim 9.

12. a flexible substrate provided on the deformation section; the first X-axis strain detection element is provided on a positive side of the X-axis with the shaft portion as a reference on one surface of the flexible substrate, the second X-axis strain detection element is provided on the other surface of the flexible substrate at a position overlapping with the first X-axis strain detection element on the positive side of the X-axis based on the shaft portion, the third X-axis strain detection element is provided on the negative side of the X-axis with the shaft portion as a reference on the one surface of the flexible substrate, the fourth X-axis strain detection element is provided on the other surface of the flexible substrate at a position overlapping with the third X-axis strain detection element on a negative side of the X-axis with the shaft portion as a reference; the first Y-axis strain detection element is provided on the positive side of the Y-axis with the shaft portion as a reference on the one surface of the flexible substrate, the second Y-axis strain detection element is provided on the other surface of the flexible substrate at a position overlapping with the first Y-axis strain detection element on a positive side of the Y-axis based on the shaft portion, the third Y-axis strain detection element is provided on the negative side of the Y-axis with respect to the shaft portion on the one surface of the flexible substrate, The fourth Y-axis strain detection element is provided at a position overlapping with the third Y-axis strain detection element on the negative side of the Y-axis with the shaft portion as a reference on the other surface of the flexible substrate.

9. The input device according to claim 2, 3 or 8.

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