Flow velocity inspection device for jet head

Abstract

To enable the inspection of the flow velocity of the gas ejected from each squirt hole in a flow velocity inspection device for a jet head with multiple squirt holes formed.SOLUTION: A flow velocity inspection device (10) for inspecting the flow velocity of gas ejected from a jet head (70) having multiple squirt holes arranged in the Z-direction and having a single prescribed plane passing through the opening ends of the multiple squirt holes, comprises a head support mechanism (12) supporting the jet head, a flow velocity meter (41, 46) having a detection unit (44) and that measures the flow velocity of gas blown onto the detection unit, a distance adjustment mechanism (51X, 56X) that adjusts the distance between the prescribed plane and the detection section, and a movement mechanism (20) that moves the detection section and the distance adjustment mechanism in the Z-direction.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a flow velocity inspection device for inspecting the flow velocity of gas ejected from an ejection head. [Background technology]

[0002] For example, there is a jet head that is used in a dust removal device that removes dust from precision targets such as exposure masks and substrates, and that jets gas to be blown onto the target (see Patent Document 1). The jet head described in Patent Document 1 jets air from a slit that spans almost the entire length in the longitudinal direction. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 3975205 Summary of the Invention [Problem to be solved by the invention]

[0004] In order to increase the flow rate of the ejected air (i.e., gas), the slit width is often made very narrow, for example, 0.1 mm. For this reason, in the ejection head described in Patent Document 1, it is difficult to form a slit of uniform width over the entire longitudinal length of the ejection head by machining or other methods. To address this issue, it is possible to form multiple slits (i.e., ejection ports) in the longitudinal direction of the ejection head. However, in this case, there is a risk that some of the ejection ports may become clogged or that differences in the flow rate of the gas ejected from the multiple ejection ports may occur. For this reason, it is necessary to inspect the flow rate of the gas ejected from each ejection port.

[0005] The present invention has been made to solve the above-mentioned problems, and its main object is to make it possible to inspect the flow rate of gas ejected from each nozzle in a flow rate inspection device for an ejection head having multiple nozzles. [Means for solving the problem]

[0006] The first means for solving the above problem is: A flow velocity inspection device for inspecting the flow velocity of gas ejected from an ejection head having a plurality of ejection ports arranged in a predetermined direction and a same predetermined plane passing through the open ends of the plurality of ejection ports, a head support mechanism for supporting the ejection head; a flow meter having a detection unit and measuring a flow velocity of the gas blown onto the detection unit; a distance adjustment mechanism for adjusting the distance between the predetermined plane and the detection unit; a movement mechanism that moves the detection unit and the distance adjustment mechanism in the predetermined direction; A jet head flow velocity inspection device comprising:

[0007] According to the above configuration, the jet head is formed with a plurality of jetting ports arranged in a predetermined direction. The same predetermined plane passes through the open ends of the plurality of jetting ports. Therefore, by detecting the flow velocity of the gas jetted from each jetting port at a certain distance from the predetermined plane, the flow velocity of the gas jetted from the plurality of jetting ports can be inspected under certain conditions.

[0008] Here, the flow meter has a detection unit and measures the flow velocity of the gas blown onto the detection unit. Therefore, the flow meter can measure the flow velocity of the gas at the position of the detection unit. The jet head is supported by a head support mechanism, and the distance between the predetermined plane and the detection unit can be adjusted by a distance adjustment mechanism. Therefore, by jetting gas from the jet head, the flow meter can measure the flow velocity of the gas in a state where the distance between the predetermined plane and the detection unit is adjusted (i.e., under constant conditions).

[0009] The movement mechanism then moves the detection unit and the distance adjustment mechanism, which has adjusted the distance between the predetermined plane and the detection unit, in the predetermined direction. Therefore, the movement mechanism sequentially moves the detection unit to positions facing each nozzle, and the flow rate of the gas ejected from the nozzle facing the detection unit can be measured sequentially under constant conditions. Therefore, in a flow rate inspection device for a jet head having multiple nozzles, the flow rate of the gas ejected from each nozzle can be inspected. As a result, users can evaluate clogging of some nozzles, variations in the gas flow rate among multiple nozzles, and the like. Ultimately, the quality of the jet head can be maintained and its performance can be improved based on the flow rate inspection results.

[0010] The second means includes a position adjustment mechanism that adjusts the position of the detection unit in a direction parallel to the predetermined plane and perpendicular to the predetermined direction. This configuration makes it easy to adjust the detection unit so that it is positioned directly in front of the nozzle in a direction parallel to the predetermined plane and perpendicular to the predetermined direction. This makes it possible to accurately measure the flow velocity of the gas ejected from each nozzle.

[0011] The third means includes a recording unit that records the flow velocity of the gas measured by the flow meter, and a control unit that causes the flow velocities of the gas to be measured sequentially by the flow meter while moving the detection unit at a constant speed in the predetermined direction using the moving mechanism, and causes the flow velocities of the gas measured sequentially by the flow meter to be recorded by the recording unit.

[0012] According to the above configuration, the control unit controls the moving mechanism, the flow meter, and the recording unit, so that the flow velocity of the gas ejected from each nozzle can be automatically measured and recorded sequentially, thereby improving the inspection efficiency and suppressing the variation in the measurements.

[0013] In a fourth aspect, the flow meter is a thermal flow meter. With this configuration, since the detection unit of a thermal flow meter can be easily miniaturized, the flow velocity of the gas ejected from each nozzle can be accurately measured even if the nozzle dimensions are small. [Brief explanation of the drawings]

[0014] [Figure 1] FIG. 1 is a perspective view showing a flow velocity inspection device for a jet head. [Figure 2] FIG. [Figure 3] FIG. [Figure 4] FIG. 4 is a front view showing the positional relationship between the ejection head and the probe. [Figure 5] FIG. 5 is an enlarged schematic diagram of part A in FIG. 4. [Figure 6] FIG. 10 is a schematic diagram showing a mode in which the probe support portion is fixed by a fixing jig. [Figure 7] FIG. [Figure 8] FIG. 2 is a perspective vertical cross-sectional view of the ejection head assembly. [Figure 9] FIG. [Figure 10] FIG. 4 is a schematic diagram showing the flow velocity of air in the ejection head. [Figure 11] 6 is a graph showing the air flow velocity at each position of each ejection head. DETAILED DESCRIPTION OF THE INVENTION

[0015] An embodiment of a flow velocity inspection device that inspects the flow velocity of air ejected from multiple ejection heads will be described below with reference to the drawings. The multiple ejection heads are applied to a dust removal device that removes dust from photomasks used in exposure equipment, for example. The dust removal device ejects air (i.e., gas) onto the top surface of the photomask to remove the dust, and then sucks the removed dust and discharges it into a duct.

[0016] As shown in FIG. 1, the jet head flow velocity inspection device 10 includes a first frame 11, a support base 12, a second frame 16, a moving mechanism 20, a measuring head 40, a control device 80, and the like.

[0017] The first frame 11 is formed into a rectangular parallelepiped frame shape using a plurality of structural members. A support base 12 is attached to the upper part of the first frame 11. A control device 80 is housed inside the first frame 11.

[0018] The support base 12 is formed in the shape of a rectangular plate. The support base 12 is arranged so that the main surface, which is the surface with the largest area, is the upper surface 12a and the lower surface 12b. The support base 12 is attached to the first frame 11 so that the upper surface 12a is horizontal.

[0019] Backing plates 13 and 14 (i.e., backing members) are attached to the upper surface of the support base 12. The backing plates 13 and 14 are formed, for example, in a rectangular parallelepiped shape. The backing plates 13 and 14 are arranged so that their longitudinal directions are perpendicular to each other. The rectangular parallelepiped jet head assembly 60 is placed on the upper surface 12a of the support base 12, and two perpendicular side surfaces of the jet head assembly 60 are brought into contact with the side surfaces of the backing plates 13 and 14, respectively, so that the jet head assembly 60 is supported by the support base 12 in a fixed position. The jet head assembly 60 is equipped with a plurality of jet heads, which will be described later. The support base 12 and the backing plates 13 and 14 form a head support mechanism.

[0020] A second frame 16 is attached to the upper surface 12a of the support base 12. The second frame 16 supports a movement mechanism 20 and a linear guide 30. The movement mechanism 20 and the linear guide 30 are supported by the second frame 16 so as to be located above the jet head assembly 60, whose position is determined by the backing plates 13 and 14.

[0021] The movement mechanism 20 includes a drive unit 21 and a linear guide 30 .

[0022] The drive unit 21 includes a stepping motor 22, a rail 23, and a motor table 24. The rail 23 is formed linearly. The rail 23 guides the movement of the motor table 24 along the rail 23. The stepping motor 22 rotates a certain angle when a pulse signal is input, and moves the motor table 24 a predetermined distance along the rail 23. The backing plates 13, 14 and the rail 23 are arranged so that the motor table 24 moves parallel to the longitudinal direction of the positioned jet head assembly 60. The length of the rail 23 is longer than the longitudinal length of the jet head assembly 60. The motor table 24 is movable over the entire longitudinal length of the jet head assembly 60. The drive state of the drive unit 21 is controlled by a control device 80.

[0023] The linear guide 30 includes a rail 31, a carriage 32, and a ball (not shown). The rail 31 is formed in a straight line. The carriage 32 is supported by the rail 31 via a ball. The linear guide 30 smoothly moves the carriage 32 along the rail 31 while supporting a member attached to the carriage 32. The backing plates 13, 14 and the rail 31 are arranged so that the carriage 32 moves parallel to the longitudinal direction (predetermined direction) of the positioned jet head assembly 60. The length of the rail 31 is longer than the longitudinal length of the jet head assembly 60. The carriage 32 is movable over the entire longitudinal length of the jet head assembly 60.

[0024] A measuring head 40 is attached to the motor table 24 of the drive unit 21 and the carriage 32 of the linear guide 30. The measuring head 40 is moved along the rail 23 by the drive unit 21, and is guided by the linear guide 30 so as to move along the rail 31 (i.e., in a predetermined direction).

[0025] As shown in Figures 2 and 3, the measurement head 40 includes a first flow meter 41, a second flow meter 46, a first XY table 51, a second XY table 56, a distance sensor 33, a position sensor 34, a support member 52, a first support plate 53, and a second support plate 58, etc.

[0026] The first current meter 41 and the second current meter 46 (current meter) each include a main body 42, a probe support portion 43, and a probe 44. The main body 42 is attached to the motor table 24 via a support member 52. The support member 52 is attached to the carriage 32. The first support plate 53 and the second support plate 58 are attached to the carriage 32 via the support member 52. In other words, the motor table 24, the support member 52, the carriage 32, the first support plate 53, and the second support plate 58 are connected to each other and move as a unit.

[0027] The main body 42 is connected to the probe 44 (the connection state is not shown). The first and second current meters 41 and 46 are thermal current meters that measure the flow velocity of the fluid based on the amount of heat the fluid removes from the probe 44. Specifically, the main body 42 applies electricity to a sensor 44a (see FIG. 5) included in the probe 44, and measures the flow velocity based on a change in electrical resistance that occurs when the sensor 44a is cooled by wind (air flow). The main body 42 (i.e., the first and second current meters 41 and 46) is connected to the control device 80 and inputs the measured flow velocity to the control device 80. The main body 42 is equipped with a display unit 42a that displays the measured flow velocity. The probe support unit 43 supports the probe 44 and is fixed to the first XY table 51 and the second XY table 56 via a fixing jig 45.

[0028] A fixing jig 45 is attached to each of the first XY table 51 and the second XY table 56. The first XY table 51 and the second XY table 56 move the fixing jig 45 in the X direction and the Y direction, respectively. The amount of movement of the fixing jig 45 by the first XY table 51 can be adjusted and measured by an X-axis micrometer 51X and a Y-axis micrometer 51Y. The amount of movement of the fixing jig 45 by the second XY table 56 can be adjusted and measured by an X-axis micrometer 56X and a Y-axis micrometer 56Y.

[0029] As shown in FIG. 4 , the X-axis micrometer 51X (first distance adjustment mechanism, distance adjustment mechanism) adjusts the distance ΔX between the tip surface (predetermined plane) of the left-side jet head 70 (first jet head) and the probe 44 (sensor 44a, detection unit). The X-axis micrometer 56X (second distance adjustment mechanism, distance adjustment mechanism) adjusts the distance ΔX between the tip surface (predetermined plane) of the right-side jet head 70 (second jet head) and the probe 44 (sensor 44a, detection unit). The Y-axis micrometer 51Y (position adjustment mechanism) adjusts the position of the probe 44 in the Y direction, which is parallel to the tip surface of the left-side jet head 70 and perpendicular to the longitudinal direction (predetermined direction) of the jet head assembly 60. The Y-axis micrometer 56Y (position adjustment mechanism) adjusts the position of the probe 44 in the Y direction, which is parallel to the tip surface of the right-side jet head 70 and perpendicular to the longitudinal direction of the jet head assembly 60.

[0030] Fig. 5 is an enlarged schematic diagram of part A in Fig. 4. The jet head 70 is formed with a plurality of jetting ports 73 (see Figs. 9 and 10) arranged in the Z direction (predetermined direction) perpendicular to the X and Y directions. The tip surface S1 (predetermined plane) of the jet head 70 is a plane passing through the open ends 73a of the plurality of jetting ports 73 (see Figs. 9 and 10).

[0031] As shown in FIG. 6, a sensor 44a (detection unit) is built into the tip (i.e., near the tip) of the probe 44. A fixing jig 45 fixes the probe support 43. When the fixing jig 45 fixes the probe support 43, the relative positions of the fixing jig 45 and the probe support 43 in the Y direction can be adjusted. For example, by adjusting the length ΔY from one end of the probe support 43 in the Y direction to one end of the fixing jig 45 in the Y direction to a predetermined length ΔYs, the position of the sensor 44a in the Y direction can be roughly aligned with the position of the jet head 70 in the Y direction. The predetermined length ΔYs is the length when the sensor 44a faces the tip of the jet head 70 and can be determined in advance. Furthermore, the position of the probe 44 in the Y direction can be finely adjusted by the Y-axis micrometer 51Y. This allows the sensor 44a to be positioned directly in front of the jet nozzle 73 (i.e., the tip of the jet head 70) in the Y direction.

[0032] As shown in FIG. 5 , the X-axis micrometer 51X adjusts the distance ΔX between the tip surface S1 (predetermined plane) of the jet head 70 and the sensor 44a of the probe 44. The X-axis micrometer 51X can adjust the distance ΔX between the tip surface S1 and the sensor 44a within a range of 5 to 15 mm. In this embodiment, the distance ΔX is adjusted to 10 mm, for example. By adjusting the distance ΔX, the magnitude of the flow velocity measured by the first flow meter 41 can be adjusted to an appropriate range (e.g., 25 to 45 m / sec). The movement mechanism 20 moves the measurement head 40 along the rail 31 of the linear guide 30, so that the sensor 44a moves in the Z direction while maintaining a constant distance ΔX between the tip surface S1 and the sensor 44a. As a result, the sensor 44a moves while sequentially facing the multiple jetting ports 73, and the first flow meter 41 measures the air flow velocity at each position. The same applies to the second flow meter 46. The movement mechanism 20 can move the measuring head 40 at a speed in the range of 0.2 to 1.0 mm / sec, and in this embodiment, moves the measuring head 40 at, for example, 0.5 mm / sec. That is, the movement mechanism 20 moves the sensor 44a (probe 44), the first XY table 51, and the second XY table 56 in the Z direction.

[0033] As shown in FIG. 2, a distance sensor 33 and a position sensor 34 are attached to the second support plate 58. The distance sensor 33 is, for example, a laser displacement meter, and measures the distance ΔX between the tip surface S1 and the sensor 44a. The distance sensor 33 may directly measure the distance ΔX between the tip surface S1 and the sensor 44a, or may be a sensor that indirectly measures the distance ΔX between the tip surface S1 and the sensor 44a by measuring the distance between the distance sensor 33 and another member. The position sensor 34 is, for example, a laser displacement meter, and measures the position of the sensor 44a in the Y direction. The position sensor 34 may directly measure the position of the sensor 44a in the Y direction, or may be a sensor that indirectly measures the position of the sensor 44a in the Y direction by measuring the distance between the position sensor 34 and another member.

[0034] 7 is a perspective view of the jet head assembly 60. The jet head assembly 60 includes two jet head groups 61, two blocks 62, four joint blocks 63, a connecting plate 65, and the like.

[0035] The two jet head groups 61 are arranged parallel to each other and facing each other. The jet head group 61 includes six (i.e., a plurality of) jet heads 70 (not shown in FIG. 7) and six (i.e., a plurality of) supply blocks 64. The six supply blocks 64 are lined up in the longitudinal direction (predetermined direction) of the jet head group 61 and connected to each other. The length of the jet head group 61 in the longitudinal direction is, for example, 600 to 800 mm.

[0036] A joint block 63 is provided between the jet head groups 61 and the blocks 62. The connecting plate 65 is a rectangular frame-shaped plate material, and connects the two jet head groups 61, the two blocks 62, and the four joint blocks 63.

[0037] The joint block 63 is provided with ports 66 to which clean air (clean dry air) at high pressure (predetermined pressure) is supplied. Air is supplied to the two ports 66 at equal flow rates.

[0038] As shown in Fig. 8, each supply block 64 has a supply chamber 67 formed therein. The supply chamber 67 is formed as a rectangular prism-shaped space and extends in the longitudinal direction of the jet head group 61. Adjacent supply chambers 67 communicate with each other. The supply chamber 67 of the supply block 64 at one end in the longitudinal direction of the jet head group 61 communicates with a port 66 via a joint flow path formed inside the joint block 63.

[0039] The supply block 64 is formed in a rectangular parallelepiped shape. A triangular groove 68 having a right-angled triangular cross section is formed in the lower bottom portion (bottom) of the supply block 64. The triangular groove 68 is formed over the entire length of the supply block 64 in the longitudinal direction (predetermined direction). A jet head 70 is attached to one bottom surface 68a of the triangular groove 68. A communication passage 69 that connects the supply chamber 67 to the jet head 70 is formed in the supply block 64. In the jet head assembly 60, two jet head groups 61 are assembled facing each other. That is, in the jet head assembly 60, the jet ports 73 of the jet heads 70 of the two jet head groups 61 are assembled facing each other.

[0040] FIG. 9 is a perspective view of the jet head 70. The jet head 70 is formed in the shape of a rectangular plate having a short side and a long side. The jet head 70 has a plurality of jet ports 73 that open at one end in the short side and are adjacent (side by side) along the entire length in the long side. The jet ports 73 are formed in a slit shape. The width of the jet ports 73 in the thickness direction of the jet head 70 is, for example, 0.1 mm. The jet ports 73 communicate with through holes 75 via communication passages 74. The through holes 75 communicate with the supply chamber 67 via the communication passages 69. Each jet head 70 jets air to be blown onto the photomask when pressurized air is supplied to the supply chamber 67.

[0041] 1, the control device 80 includes a recording unit 81 and a control unit 82. The recording unit 81 is configured, for example, by a storage device capable of writing and holding data. The control unit 82 is configured, for example, by an ECU (Electronic Control Unit) including a CPU, a ROM, a RAM, an input / output interface, etc.

[0042] The recording unit 81 records the air flow velocities measured by the first flow meter 41 and the second flow meter 46 based on a command from the control unit 82.

[0043] First, pressurized air is supplied to the jet head group 61 on the first flow meter 41 side, and air is jetted from the six jet heads 70 of the jet head group 61. At this time, pressurized air is not supplied to the jet head group 61 on the second flow meter 46 side.

[0044] The control unit 82 causes the movement mechanism 20 to move the measurement head 40 (i.e., the sensor 44a) in the Z direction at 0.5 mm / sec (i.e., a constant speed), while causing the first flow meter 41 to sequentially measure the air flow velocity and causing the recording unit 81 to record the air flow velocities sequentially measured by the first flow meter 41. At this time, the movement mechanism 20 moves the measurement head 40 so that the sensor 44a sequentially faces all of the jet nozzles 73 of all of the jet heads 70 included in one jet head group 61. The time interval for measuring the air flow velocity by the first flow meter 41 can be set to, for example, 0.1 sec per measurement. Then, the control unit 82 performs a moving average process on the air flow velocities sequentially measured by the first flow meter 41 and causes the recording unit 81 to record the result. In the moving average process, each time a flow velocity is measured, the previous n measurement values, including the measurement value at that time, are averaged. Furthermore, the control unit 82 determines whether all of the air flow velocities after the moving average process are within a predetermined appropriate range. The appropriate range can be set, for example, within ±a% of the average value of the flow velocity. Furthermore, the control unit 82 creates a graph showing the relationship between the position of the sensor 44a in the Z direction and the air flow velocity after moving average processing, and causes the recording unit 81 to record the graph. The graph may also be printed out by a printer.

[0045] Thereafter, pressurized air is supplied to the jet head group 61 on the second flow meter 46 side, causing air to be jetted from the six jet heads 70 of the jet head group 61. At this time, pressurized air is not supplied to the jet head group 61 on the first flow meter 41 side. Then, as described above, the control unit 82 causes the movement mechanism 20 to move the measurement head 40 (i.e., the sensor 44a) in the Z direction at 0.5 mm / sec (i.e., a constant speed), while causing the second flow meter 46 to sequentially measure the air flow velocity, and causes the recording unit 81 to record the air flow velocities sequentially measured by the second flow meter 46. At this time, the movement mechanism 20 moves the measurement head 40 in the direction opposite to the measurement by the first flow meter 41. Then, when measurements by the first flow meter 41 and the second flow meter 46 are repeated multiple times, the movement mechanism 20 moves the measurement head 40 alternately in the forward and reverse directions in the Z direction.

[0046] 10 is a schematic diagram showing the flow velocity of air in the ejection head 70. In the ejection head 70, seven communication passages 74 are connected to one through-hole 75. The communication passages 74 at both ends are connected to two ejection ports 73, and the communication passages 74 other than those at both ends are each connected to one ejection port 73. For this reason, the flow velocity of air ejected from the second ejection port 73 from both ends, indicated by the dashed arrow, is lower than the flow velocity of air ejected from the other ejection ports 73, indicated by the solid arrow.

[0047] FIG. 11 is a graph showing the air flow velocity at each position of each jet head 70. This graph shows the results of five measurements taken by the first flow meter 41 of the flow velocity testing device 10. In each half of each jet head 70, the flow velocity of the air ejected from the second jet nozzle 73 from each end, indicated by the dashed arrows in FIG. 10, is lower than the flow velocity of the air ejected from the other jet nozzles 73, indicated by the solid arrows. In other words, the flow velocity of the air ejected from each jet nozzle 73 of each jet head 70 is measured with enough accuracy to distinguish the air flow velocity for each jet nozzle 73. Furthermore, the difference in absolute values ​​of the flow velocity is small among the five measurements, and the flow velocity of the air ejected from each jet nozzle 73 is measured with high reproducibility.

[0048] The present embodiment described above in detail has the following advantages.

[0049] The flow meter 41, 46 has a sensor 44a (probe 44) and measures the flow velocity of air blown toward the sensor 44a. Therefore, the flow meter 41, 46 can measure the flow velocity of air at the position of the sensor 44a. The jet head 70 (jet head assembly 60) is supported by a head support mechanism (support base 12 and backing plates 13, 14), and the distance ΔX between the tip surface S1 of the jet head 70 and the sensor 44a can be adjusted by the X-axis micrometers 51X, 56X. Therefore, by jetting air from the jet head 70, the flow meter 41, 46 can measure the flow velocity of air in a state where the distance ΔX between the tip surface S1 and the sensor 44a is adjusted (i.e., under constant conditions).

[0050] The movement mechanism 20 moves the sensor 44a and the X-axis micrometers 51X and 56X in the Z direction (a predetermined direction) while adjusting the distance ΔX between the tip surface S1 and the sensor 44a. Therefore, the movement mechanism 20 sequentially moves the sensor 44a to a position facing each nozzle 73, and the flow velocity of the air ejected from the nozzle 73 facing the sensor 44a can be sequentially measured under constant conditions. Therefore, the flow velocity inspection device 10 for the jet head 70, which has multiple nozzles 73, can inspect the flow velocity of the air ejected from each nozzle 73. As a result, the user can evaluate clogging of some nozzles 73, variations in the air flow velocity among the multiple nozzles 73, and so on. Ultimately, the flow velocity inspection results can be used to maintain the quality of the jet head 70 and improve its performance.

[0051] The flow velocity testing device 10 includes Y-axis micrometers 51Y and 56Y that adjust the position of the sensor 44a in the Y direction, which is parallel to the tip surface S1 and perpendicular to the Z direction. This configuration makes it easy to adjust the sensor 44a so that it is positioned directly in front of the nozzles 73 in the Y direction. This makes it possible to accurately test the flow velocity of the air ejected from each nozzle 73.

[0052] The control unit 82 controls the moving mechanism 20, the flow meters 41, 46, and the recording unit 81, so that the flow velocity of the air ejected from each nozzle 73 can be automatically measured and recorded in sequence. This improves the inspection efficiency and reduces the variation in the measurements.

[0053] The flow meters 41 and 46 are thermal flow meters. With this configuration, the flow meters 41 and 46 can easily have miniaturized sensors 44a, so that even if the dimensions of the nozzles 73 are small, the flow velocity of the air ejected from each nozzle 73 can be accurately measured.

[0054] The flow velocity testing device 10 includes a distance sensor 33 that measures the distance ΔX between the tip surface S1 and the sensor 44a. With this configuration, the distance ΔX between the tip surface S1 and the sensor 44a can be accurately adjusted using the X-axis micrometers 51X and 56X while measuring the distance ΔX between the tip surface S1 and the sensor 44a with the distance sensor 33.

[0055] The flow velocity testing device 10 includes a position sensor 34 that measures the position of the sensor 44a in the Y direction. With this configuration, the position of the sensor 44a in the Y direction can be measured by the position sensor 34, while the position of the sensor 44a can be accurately adjusted by the Y-axis micrometers 51Y and 56Y.

[0056] The X-axis micrometers 51X and 56X can adjust the distance ΔX between the tip surface S1 and the sensor 44a to 5 to 15 mm. With this configuration, the air flow velocity measured by the flowmeters 41 and 46 can be adjusted to an appropriate value (for example, 25 to 45 m / sec).

[0057] The movement mechanism 20 can move the sensor 44a in the Z direction at a speed of 0.2 to 1.0 mm / sec. This configuration allows the speed at which the sensor 44a is moved by the movement mechanism 20 to be adjusted appropriately, thereby shortening the measurement time while maintaining the accuracy of measuring the air flow velocity.

[0058] Because the instantaneous flow velocity of the air ejected from each nozzle 73 fluctuates greatly, if the air flow velocity measured by the flow meter 41, 46 is used as is, the flow velocity of the air ejected from each nozzle 73 may not be accurately evaluated. In this regard, the control unit 82 performs a moving average process on the air flow velocity sequentially measured by the flow meter 41, 46 and causes the recording unit 81 to record the moving average. This configuration can suppress the influence of fluctuations in the flow velocity of the air ejected from each nozzle 73, making it easier to accurately evaluate the flow velocity of the air ejected from each nozzle 73. As a result, as shown in FIG. 11 , the flow velocity of the air ejected from each nozzle 73 of each ejection head 70 can be measured with such accuracy that the air flow velocity for each nozzle 73 can be distinguished, and the flow velocity of the air ejected from each nozzle 73 can be measured with high reproducibility.

[0059] The control unit 82 causes the movement mechanism 20 to move the sensor 44a at a constant speed in the Z direction so that the sensor 44a faces all of the nozzles 73 in sequence, while causing the flow rate meters 41, 46 to sequentially measure the air flow rate. This allows the flow rate of air ejected from all of the nozzles 73 to be measured. The control unit 82 then performs a moving average process on the air flow rates sequentially measured by the flow rate meters 41, 46, and determines whether all of the air flow rates after the moving average process are within a predetermined appropriate range. This makes it possible to determine whether the flow rate of air ejected from all of the nozzles 73 is within the appropriate range, i.e., whether all of the nozzles 73 are normal, while suppressing the influence of fluctuations in the flow rate of air ejected from each nozzle 73.

[0060] The control unit 82 creates a graph showing the relationship between the position of the sensor 44a in the Z direction and the air flow velocity after moving average processing, and causes the recording unit 81 to record the graph. With this configuration, the characteristics of the ejection head 70 can be easily understood by referring to the graph recorded by the recording unit 81. Furthermore, by creating and recording the graph when the ejection head 70 is shipped, it becomes easier to compare the characteristics of the ejection head 70 after use with the characteristics of the ejection head 70 at the time of shipment.

[0061] The movement mechanism 20 moves the measurement head 40, which includes the sensors 44a of the flow meters 41 and 46 and the X-axis micrometers 51X and 56X, in the Z direction. Therefore, by moving the measurement head 40 in the Z direction using the movement mechanism 20, the two sensors 44a are sequentially moved to positions facing each of the nozzles 73 of the jet head 70, and the flow velocities of the air jetted from the nozzles 73 facing each of the two sensors 44a can be sequentially calculated under constant conditions. Therefore, the flow velocities of the air jetted from each of the nozzles 73 of each of the jet heads 70 in the two jet head groups 61 can be inspected using a single measurement head 40.

[0062] The above embodiment can be modified as follows: The same parts as those in the above embodiment are denoted by the same reference numerals and the description thereof will be incorporated herein.

[0063] The flow velocity testing device 10 may perform the measurement by the first flow meter 41 and the measurement by the second flow meter 46 only once each.

[0064] The distance sensor 33 may be omitted. Even in this case, the user can visually check the distance ΔX measured by the X-axis micrometers 51X and 56X and adjust the distance ΔX between the tip surface S1 (predetermined plane) of the jet head 70 and the probe 44 (sensor 44a, detection unit).

[0065] The position sensor 34 may be omitted. Even in this case, the user can visually check the position measured by the Y-axis micrometers 51Y and 56Y and adjust the position of the probe 44 (sensor 44a, detection unit) in the Y direction.

[0066] The recording unit 81 may be omitted. Even in this case, the user can visually check the flow rate displayed on the display unit 42a of the flow meter 41, 46 to check the flow rate of the air ejected from each ejection port 73.

[0067] The Y-axis micrometers 51Y and 56Y may be omitted. Even in this case, when the probe support section 43 is fixed by the fixing jig 45, the relative position in the Y direction between the fixing jig 45 and the probe support section 43 can be adjusted. Consequently, the position of the probe 44 (sensor 44a, detection section) in the Y direction can be adjusted.

[0068] Pressurized air is supplied to two jet head groups 61 facing the first flow meter 41 and the second flow meter 46, respectively, and air is jetted from the six jet heads 70 of each of the two jet head groups 61. The control unit 82 may then cause the first flow meter 41 and the second flow meter 46 to sequentially measure the air flow velocity while moving the measurement head 40 (i.e., the sensor 44a) in the Z direction at 0.5 mm / sec (i.e., a constant speed) using the movement mechanism 20, and may cause the recording unit 81 to record the air flow velocities sequentially measured by the first flow meter 41 and the second flow meter 46. With this configuration, the flow velocity of air jetted from each jet port 73 of each jet head 70 of the two jet head groups 61 can be simultaneously inspected.

[0069] The control unit 82 may perform the following determination before measuring the flow velocity of the air ejected by the jet head 70. That is, the control unit 82 causes the movement mechanism 20 to move the sensor 44a in the Z direction (a predetermined direction), while causing the distance sensor 33 to sequentially measure the distance ΔX between the tip surface S1 of the jet head 70 and the sensor 44a, and determines whether the distance ΔX between the tip surface S1 and the sensor 44a is constant based on the distance ΔX sequentially measured by the distance sensor 33. At this time, the control unit 82 can complete the determination in a short time by causing the movement mechanism 20 to move the sensor 44a at a speed higher than that used when measuring the air flow velocity.

[0070] According to the above configuration, the control unit 82 controls the moving mechanism 20 and the distance sensor 33, thereby automatically determining whether the distance ΔX between the tip surface S1 and the sensor 44a is constant. Therefore, it is possible to improve the efficiency of determination and suppress variations in determination.

[0071] 3, the flow velocity testing device 10 may include a pressure sensor 35 that measures the pressure of the air supplied to the jet head 70. The control unit 82 may then monitor whether the pressure measured by the pressure sensor 35 is within a predetermined pressure range while the movement mechanism 20 moves the sensor 44a at a constant speed in the Z direction so that the sensor 44a faces all of the jet nozzles 73 in sequence, and while the flow meters 41, 46 measure the air flow velocity in sequence.

[0072] According to the above configuration, when inspecting the flow velocity of air ejected from each nozzle 73, it is possible to monitor whether the pressure of the air supplied to the ejection head 70 is within a predetermined pressure range. Therefore, it is possible to monitor whether the flow velocity of air ejected from each nozzle 73 is affected by the pressure of the air supplied to the ejection head 70.

[0073] The shape of the ejection port 73 of the ejection head 70 is not limited to a slit shape, but may be rectangular, square, circular, etc. The number of ejection ports 73 of the ejection head 70 may be any plural number. The ejection head 70 may have a plurality of capillaries that eject air arranged in a predetermined direction, and the same predetermined plane may pass through the open ends of the plurality of capillaries.

[0074] The current meters 41 and 46 are not limited to thermal current meters, but may be other types of current meters such as Pitot tube current meters.

[0075] The gas ejected from the two ejection head groups 61 is not limited to air, but may be nitrogen, oxygen, argon, or the like.

[0076] · Liquid crystal substrates, wafers, glass substrates, etc. can also be used as dust removal targets. The above modifications may be implemented in combination.

[0077] Characteristic configurations extracted from the above-described embodiments and modifications will be described below. [Configuration 1] A flow velocity inspection device for inspecting the flow velocity of gas ejected from an ejection head having a plurality of ejection ports arranged in a predetermined direction and a same predetermined plane passing through the open ends of the plurality of ejection ports, a head support mechanism for supporting the ejection head; a flow meter having a detection unit and measuring a flow velocity of the gas blown onto the detection unit; a distance adjustment mechanism for adjusting the distance between the predetermined plane and the detection unit; a movement mechanism that moves the detection unit and the distance adjustment mechanism in the predetermined direction; A jet head flow velocity inspection device comprising: [Configuration 2] 2. The flow velocity inspection device for a jet head according to claim 1, further comprising a position adjustment mechanism for adjusting the position of the detection unit in a direction parallel to the predetermined plane and perpendicular to the predetermined direction. [Configuration 3] a recording unit that records the flow velocity of the gas measured by the flow meter; a control unit that causes the flow velocities of the gas to be measured sequentially by the flow meter while the detection unit is moved at a constant speed in the predetermined direction by the moving mechanism, and causes the flow velocities of the gas measured sequentially by the flow meter to be recorded by the recording unit. [Configuration 4] 4. The jet head flow velocity inspection device according to any one of configurations 1 to 3, wherein the flow velocity meter is a thermal flow velocity meter. [Configuration 5] 5. The jet head flow velocity inspection device according to any one of configurations 1 to 4, further comprising a distance sensor that measures the distance between the predetermined plane and the detection unit. [Configuration 6] 6. The jet head flow velocity inspection device according to any one of configurations 1 to 5, further comprising a position sensor that measures the position of the detection unit in a direction that is parallel to the predetermined plane and perpendicular to the predetermined direction. [Configuration 7] A flow velocity inspection device for a jet head as described in configuration 5, further comprising a control unit that causes the distance sensor to sequentially measure the distance between the specified plane and the detection unit while the movement mechanism moves the detection unit in the specified direction, and determines whether the distance between the specified plane and the detection unit is constant based on the distances sequentially measured by the distance sensor. [Configuration 8] 8. The jet head flow velocity inspection device according to any one of configurations 1 to 7, wherein the distance adjustment mechanism is capable of adjusting the distance between the predetermined plane and the detection unit to 5 to 15 mm. [Configuration 9] 9. The jet head flow velocity inspection device according to any one of configurations 1 to 8, wherein the movement mechanism is capable of moving the detection unit in the predetermined direction at a speed of 0.2 to 1.0 mm / sec. [Configuration 10] 4. The flow velocity inspection device for a jet head according to configuration 3, wherein the control unit performs a moving average process on the flow velocity of the gas sequentially measured by the flow meter and causes the recording unit to record the result. [Configuration 11] The control unit uses the moving mechanism to move the detection unit in the predetermined direction at a constant speed so as to face all of the nozzles in sequence, while causing the flow velocities of the gas to be measured in sequence by the flow meter, and determines whether the flow velocities of all of the gases after the moving average processing are within a predetermined appropriate range. [Configuration 12] The control unit creates a graph showing the relationship between the position of the detection unit in the specified direction and the flow velocity of the gas after the moving average processing, and causes the recording unit to record the graph. [Configuration 13] a pressure sensor that measures the pressure of the gas supplied to the ejection head; The control unit uses the moving mechanism to move the detection unit in the predetermined direction at a constant speed so as to face all of the nozzles in sequence, and monitors whether the pressure measured by the pressure sensor is within a predetermined pressure range when the flow rate of the gas is measured in sequence by the flow rate meter. [Configuration 14] The jet head includes a first jet head and a second jet head, the support mechanism supports a jet head assembly in which the first jet head and the second jet head are assembled to face each other, the flow meter includes a first flow meter and a second flow meter; the distance adjustment mechanism includes a first distance adjustment mechanism that adjusts the distance between the predetermined plane of the first jetting head and the detection unit of the first flow meter, and a second distance adjustment mechanism that adjusts the distance between the predetermined plane of the second jetting head and the detection unit of the second flow meter, The flow velocity inspection device for a jet head described in any one of configurations 1 to 13, wherein the moving mechanism moves a measurement head including the detection unit of the first flow meter, the first distance adjustment mechanism, the detection unit of the second flow meter, and the second distance adjustment mechanism in the predetermined direction. [Explanation of symbols]

[0078] 10...flow velocity inspection device, 12...support base, 13...backing plate, 14...backing plate, 20...moving mechanism, 21...driving unit, 30...linear guide, 40...measuring head, 41...first flow meter (flow meter), 44...probe, 44a...sensor (detection unit), 46...second flow meter (flow meter), 51...first XY table, 51X...X-axis micrometer (distance adjustment mechanism), 51Y...Y-axis micrometer (position adjustment mechanism), 56...second XY table, 56X...X-axis micrometer (distance adjustment mechanism), 56Y...Y-axis micrometer (position adjustment mechanism), 60...ejection head assembly, 61...ejection head group, 70...ejection head, 73...ejection nozzle, 73a...opening end, 80...control device, 81...recording unit, 82...control unit.

Claims

1. A flow velocity inspection device for inspecting the flow velocity of gas ejected from an ejection head having a plurality of ejection ports arranged in a predetermined direction and a same predetermined plane passing through the open ends of the plurality of ejection ports, a head support mechanism for supporting the ejection head; a flow meter having a detection unit and measuring a flow velocity of the gas blown onto the detection unit; a distance adjustment mechanism for adjusting the distance between the predetermined plane and the detection unit; a movement mechanism that moves the detection unit and the distance adjustment mechanism in the predetermined direction; A jet head flow velocity inspection device comprising:

2. The jet head flow velocity inspection device according to claim 1 , further comprising a position adjustment mechanism that adjusts the position of the detection unit in a direction parallel to the predetermined plane and perpendicular to the predetermined direction.

3. a recording unit that records the flow velocity of the gas measured by the flow meter; 3. A flow velocity inspection device for an ejection head as described in claim 1 or 2, comprising: a control unit that causes the detection unit to move at a constant speed in the predetermined direction using the moving mechanism, sequentially measures the flow velocity of the gas using the flow meter, and records the flow velocity of the gas sequentially measured by the flow meter using the recording unit.

4. 3. The jet head flow velocity inspection device according to claim 1, wherein the flow meter is a thermal flow meter.

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