Dust collecting device

Abstract

To provide a dust collecting device that can improve the removal efficiency of harmful substances and reduce production costs.SOLUTION: A dust collecting device includes a particle separation component 1, an airflow output component 2 and a particle collection component 3. One side of the particle separation component extends outward to form a first gas input portion 11, one end of the particle separation component extends outward to form a first gas output portion 12, and another end of the particle separation component extends outward to form a foreign matter export portion 13. One side of the airflow output component extends outward to form an airflow inlet portion 21, one end of the airflow output component extends outward to form a second gas output portion 22, and another end of the airflow output component extends outward to form a second gas input portion 23. The second gas output portion is connected to the first gas input portion. The particle collection component is connected to the foreign matter export portion.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a dust collector, and more particularly to a dust collector that can capture harmful substances without consuming power or water. [Background technology]

[0002] In particulate dust waste treatment systems in high-tech manufacturing industries, fine dust must be collected during many waste air reduction processes. Fine dust in waste air is made up of extremely fine solid particles that remain suspended in the air for long periods of time. Particles with a diameter of more than 10 μm are classified as coarse particles, and these particles are adsorbed by nasal hairs and the mucous membranes in the nasopharynx. Fine dust with a diameter of less than 10 μm (PM10) belongs to the suspended particles category, and once inhaled, it travels deep into the lungs via the trachea and bronchi.

[0003] Current semiconductor manufacturing process equipment uses local scrubbers to remove fine dust particles. However, local scrubbers not only consume energy (i.e., they require a supply of electricity and water), but also have many internal parts and a complex structure, resulting in considerable maintenance costs. Summary of the Invention [Problem to be solved by the invention]

[0004] The technical problem that the present invention seeks to solve is to provide a dust collection device that addresses the shortcomings of the current art. [Means for solving the problem]

[0005] To solve the above technical problems, one technical solution adopted by the present invention is to provide a dust collecting device including at least one particle separation component, at least one airflow output component, and at least one particle trap component. The at least one particle separation component has a body, one side of the body of the at least one particle separation component extending outward to form a first gas input port, one end of the body of the at least one particle separation component extending outward to form a first gas output port, and the other end of the body of the at least one particle separation component extending outward to form a foreign matter export port. The first gas output port is connected to a first external device, and the first gas input port, the first gas output port, and the foreign matter export port are in communication with each other. At least one airflow output component has a body, one side of the body of the at least one airflow output component extending outward to form an airflow inlet, one end of the body of the at least one airflow output component extending outward to form a second gas output component, and the other end of the body of the at least one airflow output component extending outward to form a second gas input component. The airflow inlet is connected to an external air source device, the second gas output component is connected to the first gas input component, and the second gas input component is connected to a second external device. The airflow inlet, the second gas output component, and the second gas input component are in communication with each other. At least one particle collection component is connected to the foreign matter export component.

[0006] One beneficial effect of the present invention is that the dust collecting device provided by the present invention improves the removal efficiency of harmful substances and reduces production costs through the above-mentioned technical means.

[0007] In order to better understand the features and technical contents of the present invention, please refer to the following detailed description of the present invention and the accompanying drawings, which are provided for reference and explanation only and are not intended to limit the scope of the present invention. [Brief explanation of the drawings]

[0008] [Figure 1]1 is a schematic view showing a state in which a dust collecting device according to a first embodiment of the present invention is in use. [Figure 2] 1 is an exploded view of a dust collecting device according to a first embodiment of the present invention. [Figure 3] 1 is a schematic diagram showing the structure of a particle separation component of a dust collecting device according to a first embodiment of the present invention. [Figure 4] 1 is a perspective view of a particle separation component of a dust collecting device according to a first embodiment of the present invention; [Figure 5] 1 is a cross-sectional view of an airflow output part of a dust collecting device according to a first embodiment of the present invention. [Figure 6] FIG. 6 is an enlarged view of a portion VI in FIG. 5. [Figure 7] 1 is a schematic diagram showing a state in which a particle separation component of a dust collecting apparatus according to a first embodiment of the present invention is used. [Figure 8] FIG. 4 is a schematic diagram showing the structure of a dust collecting device according to a second embodiment of the present invention. [Figure 9] FIG. 4 is a schematic diagram showing the structure of a dust collecting device according to a third embodiment of the present invention. [Figure 10] FIG. 10 is a schematic diagram showing the structure of a dust collecting device according to a fourth embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0009] The following describes the implementation of the "dust collecting device" according to the present invention through specific embodiments. Those skilled in the art will be able to understand the advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied in other different specific embodiments, and the details in this specification can be modified and changed in various ways based on different perspectives and applications without departing from the spirit of the present invention.

[0010] It should be understood that when terms such as "first," "second," and "third" are used in the present specification, these terms should not be used to limit the various elements. These terms are mainly used to distinguish one element from another. Furthermore, the term "or" used in the present specification should be understood to include any one or more combinations of the associated listed items, depending on the actual situation.

[0011] [First embodiment] Please refer to Figures 1 to 7, which show a schematic diagram of a dust collector according to a first embodiment of the present invention in use, an exploded view, a schematic diagram of the structure of a particle separation component, an overhead view of the particle separation component, a cross-sectional view of an airflow output component, an enlarged view of portion VI in Figure 5, and a schematic diagram of the particle separation component in use. As shown in these figures, the first embodiment of the present invention provides a dust collector Z including at least one particle separation component 1, at least one airflow output component 2, and at least one particle collection component 3.

[0012] As shown in FIGS. 1 to 4 and 6 , the particle separation component 1 may have a main body 10, with one side of the main body 10 extending outward to form a first gas input port 11, one end of the main body 10 extending outward to form a first gas output port 12, and the other end of the main body 10 extending outward to form a foreign matter export port 13. The first gas output port 12 may be detachably connected to a first external device E1, such as, but not limited to, a turbo pump, dry pump, or central processing unit (e.g., a wet scrubber) of a semiconductor device. The first gas input port 11, the first gas output port 12, and the foreign matter export port 13 are interconnected. For example, the particle separation component 1 may have a hollow tubular structure, and the main body 10 of the particle separation component 1 may have a hollow cavity. A first gas output port 12 is provided at the top of the body 10 of the particle separation component 1, and the first gas output port 12 has a tubular structure and is connected to the inside of the body 10 of the particle separation component 1. A foreign matter export port 13 is provided at the bottom of the body 10 of the particle separation component 1, and the foreign matter export port 13 has a tubular structure and is connected to the inside of the body 10 of the particle separation component 1. A first gas input port 11 is provided on a side of the body 10 of the particle separation component 1 and near the top, and the first gas input port 11 has a tubular structure and can be connected to the inside of the body 10 of the particle separation component 1. The first gas input port 11 is installed tangentially to the body 10 of the particle separation component 1 in a tangential manner. Furthermore, the body 10, the first gas input port 11, and the first gas output port 12 of the particle separation component 1 may be straight tubular, the foreign matter export port 13 may be conical, and the diameter 12D of the first gas input port 11 and the first gas output port 12 is less than or equal to the diameter 10D of the body of the particle separation component 1. In some embodiments, the body 10, the first gas input port 11, the first gas output port 12, and the foreign matter export port 13 of the particle separation component 1 may have an integrated structure.

[0013] Furthermore, as shown in FIG. 3, the diameter 10D of the body 10 of the particle separation component 1 is defined as a predetermined value, ranging from 5 to 500, preferably 15 to 80. The unit is centimeters, but is not limited thereto. The diameter 11D of the first gas input port 11 and the diameter 12D of the first gas output port 12 are in the range of 0.01 to 1 times the predetermined value, preferably 0.5 times. That is, the diameters 11D and 12D are in the range of 9 to 220 centimeters, preferably 50 centimeters. The length 10L of the body 10 of the particle separation component 1 and the length 13L of the foreign matter export port 13 are in the range of 0.5 to 4 times the predetermined value, preferably 2 times. The length 12L of the first gas output port 12 is in the range of 1 to 4.5 times the predetermined value, preferably 1.5 times. The predetermined distance 14L between the outer edge of the first gas input section 11 and the top edge of the body 10 of the particle separation component 1 is in the range of 0.1 to 0.5 times the predetermined value, and more preferably 0.125 times the predetermined value. It is noteworthy that when the body 10 and the foreign matter export section 13 of the particle separation component 1 are designed to have an elongated shape, smaller solid particles are separated from the gas phase. For example, gas containing fine particles of 2.5 μm or less can be separated. On the other hand, when the body 10 and the foreign matter export section 13 of the particle separation component 1 are designed to have a short, thick shape, larger solid particles are separated from the gas phase. For example, gas containing suspended particles with a diameter of 2.5 μm or more can be separated.

[0014] Furthermore, as shown in FIG. 3 , one end of the foreign matter export portion 13 is connected to the body 10 of the particle separation component 1, and the other end of the foreign matter export portion 13 extends outward to form a protruding connection portion 130. The protruding connection portion 130 is connected to the particle collection component 3. The protruding connection portion 130 may have a straight tubular structure. The diameter 130D of the protruding connection portion 130 is in the range of 0.1 to 0.5 times a predetermined value, more preferably 0.25 times. The length 130L of the protruding connection portion 130 is in the range of 0.1 to 0.5 times a predetermined value, more preferably 0.125 times. Furthermore, one end of the first gas output portion 12 is connected to the body 10 of the particle separation component 1, and the other end of the first gas output portion 12 may extend toward the interior of the body 10 of the particle separation component 1 to form an extended lead-out portion 120. The diameter of the extending lead-out portion 120 may be the same as the diameter 12D of the first gas output portion 12, and the length 120L of the extending lead-out portion 120 is in the range of 0.1 to 2.5 times a predetermined value, and more preferably 0.75 times.

[0015] 1, 2, 5, and 6, the airflow output component 2 has a main body 20, one side of which extends outward to form an airflow inlet 21, one end of which extends outward to form a second gas output 22, and the other end of which extends outward to form a second gas input 23. The airflow inlet 21 may be removably connected to an external air source G (e.g., a supply device for semiconductor equipment that provides general air or special gases (e.g., inert gas)). The second gas output 22 is connected to the first gas input 11, and the second gas input 23 may be removably connected to a second external device E2 (e.g., a turbo pump, dry pump, or central processing unit (e.g., a wet scrubber) for semiconductor equipment). The airflow introduction portion 21, the second gas output portion 22, and the second gas input portion 23 are in communication with each other. For example, the body 20 of the airflow output part 2 may have a trapezoidal shape (e.g., a trapezoidal shape with rounded corners), a conical shape, or other similar geometric shapes. The body 20 of the airflow output part 2 has a cavity portion 200 and a guide ear portion 201. The cavity portion 200 has a hollow structure, and one end of the cavity portion 200 may extend outward to form the second gas output portion 22. The cavity portion 200 has a flat wall surface 200a and an arc-shaped wall surface 200b, and the flat wall surface 200a is connected to the arc-shaped wall surface 200b, which is connected to the inner wall surface of the second gas output portion 22. The other end of the cavity portion 200 may extend outward to form a first hook portion 200c. The outer edge of the first hook portion 200c may include a first arc angle a1, a second arc angle a2, and a third arc angle a3. The first arc angle a1 is an R angle and is in the range of 1.5 to 2.5 centimeters, more preferably 2 centimeters, but is not limited to this. The second arc angle a2 is an R angle and is in the range of 2 to 3 centimeters, more preferably 2.5 centimeters, but is not limited to this. The third arc angle a3 is an R angle and is in the range of 5 to 7 centimeters, more preferably 6.51 centimeters, but is not limited to this.The guide ear portion 201 surrounds the side (i.e., outer edge, outer surface) of the cavity portion 200, and the outer edge of the guide ear portion 201 extends outward to form the air flow inlet portion 21. One end of the guide ear portion 201 is connected to the cavity portion 200, and the other end of the guide ear portion 201 extends toward the cavity portion 200 in a rotating manner to form a second hook portion 201a, which extends outward to form a second gas input portion 23. A special flow path 2010 is defined between the guide ear portion 201 and the cavity portion 200 (i.e., inside the guide ear portion 201), and the special flow path 2010 communicates with the air flow inlet portion 21 and the inside of the cavity portion 200. The air flow inlet portion 21, the second gas output portion 22, and the second gas input portion 23 are tubular structures.

[0016] Furthermore, as shown in Figures 5 and 6, the special flow path 2010 is divided into a guide area 2010a and a discharge area 2010b. The guide area 2010a is connected to the discharge area 2010b, and the cross section of the guide area 2010a is conical. There is a predetermined angle RA between the inner wall surface of the guide ear portion 201 and the outer wall surface of the cavity portion 200, and the predetermined angle RA is in the range of 8 to 30 degrees, more preferably 8 degrees, 16 degrees, 19 degrees, or 26.5 degrees, but is not limited to these. One end of the discharge area 2010b communicates with the guide area 2010a, and the other end of the guide area 2010a communicates with the interior of the cavity portion 200. The cross section of the discharge area 2010b is C-shaped or hook-shaped.

[0017] 1 and 2, the particle collection component 3 is connected to the foreign matter export portion 13. For example, the particle collection component 3 is a collection bucket or a collection tank. One end of the particle collection component 3 extends outward to form a foreign matter import portion 31, which is connected to the foreign matter export portion 13. The diameter of the foreign matter import portion 31 is the same as the diameter 130D of the protruding connection portion 130.

[0018] Therefore, when the airflow inlet 21 receives a driving airflow DA supplied from the external air source device G and the second gas input 23 receives a harmful airflow HA supplied from the second external device E2, the at least one airflow output component 2 causes the harmful airflow HA to flow to the second gas output 22 by the driving airflow DA. Here, when the first gas input 11 receives the harmful airflow HA supplied from the second gas output 22, the first gas input 11 introduces the harmful airflow HA into the body of the at least one particle separation component 1, causing the harmful airflow HA to flow in a spiral shape. This flow separates at least one harmful substance HS in the harmful airflow HA from the harmful airflow HA, forming a purified airflow PA. The at least one particle separation component 1 transports the purified airflow PA to the first external device E1 through the first gas output 12. The at least one particle separation component 1 collects the at least one harmful substance HS separated from the harmful airflow HA by the foreign matter export component 13 and transports it to the at least one particle collection component 3. When the airflow introduction component 21 receives the driving airflow DA, the guide ear component 201 introduces the driving airflow DA into the cavity component 200 through the special flow path 2010, causing the harmful airflow HA to flow to the second gas output component 22. The second gas input component 23 is configured to introduce the harmful airflow HA into the cavity component 200 and combine it with the driving airflow DA to increase the flow intensity of the harmful airflow HA.

[0019] For example, as shown in FIGS. 1 to 7, the dust collector Z of the present invention can be applied to a semiconductor manufacturing apparatus and function as a highly efficient dust collector. Therefore, when the second external device E2 supplies the dust collector Z with a harmful airflow HA generated during the semiconductor manufacturing process, the dust collector Z can receive a driving airflow DA (e.g., an inert gas flow) supplied from the external air source device G through the airflow inlet 21 of the airflow output part 2 and introduce it into the special flow path 2010. The airflow output part 2 then causes the driving airflow DA to flow spirally within the special flow path 2010 due to the structural design of the special flow path 2010, and then flows into the cavity 200 through the discharge area 2010b. Once the driving airflow DA enters the cavity 200, it flows toward the cavity 200 and the second gas output part 22 according to the structural design of the discharge area 2010b. At the same time, the driving airflow DA entrains the harmful airflow HA introduced from the second gas input port 23 and combines with the harmful airflow HA to form a strong and stable airflow that flows toward the second gas output port 22. Finally, the harmful airflow HA combined with the driving airflow DA is transported to the particle separation component 1 through the second gas output port 22.

[0020] Next, the dust collector Z first introduces the harmful airflow HA transported from the second gas output port 22 into the main body 10 of the particle separation component 1 through the first gas input port 11 of the particle separation component 1. Due to the installation and connection methods of the first gas input port 11 and the main body 10 of the particle separation component 1, as well as the structural design of the main body 10 of the particle separation component 1, the harmful airflow HA can flow in a spiral pattern when it enters the main body 10 of the particle separation component 1. During the flow of the harmful airflow HA, the harmful substances HS contained in the harmful airflow HA fall to the bottom of the main body 10 of the particle separation component 1 (i.e., toward the foreign matter export port 13) and are separated from the harmful airflow HA. The particle separation component 1 then collects the separated harmful substances HS through the foreign matter export port 13 and transports them into the main body 30 of the particle collection component 3 through the foreign matter import port 31. The harmful airflow HA becomes a purified airflow PA due to the separation of the harmful substances HS, and flows toward the first gas output port 12.

[0021] Finally, the purified airflow PA is exported through a first gas output 12 to a first external device E1.

[0022] As a result, the dust collector Z of the present invention employs the above-mentioned technical means, first utilizing the structural design of the airflow output component 2 to use the airflow (active airflow) supplied from the external air source G to improve the airflow force of the hazardous airflow HA and supply it to the particle separation component 1. The particle separation component 1 then captures large and small dust particles in the hazardous airflow HA, improving the efficiency of removing hazardous substances. This solves the problem of clogged pipes in semiconductor manufacturing equipment, eliminates the need to supply additional electricity or water, and will also eliminate the need to add heater tape to the pipes in the future.

[0023] [Second embodiment] Please refer to Figure 8. This is a structural schematic diagram of a dust collecting device according to a second embodiment of the present invention. Please also refer to Figures 1 to 7. The difference between this embodiment and the first embodiment described above is that in this embodiment, multiple airflow output parts 2 can be installed in the dust collecting device Z of the present invention. In this embodiment, two airflow output parts 2 are exemplified, but the present invention is not limited to this.

[0024] For example, the dust collecting device Z of the present invention can significantly improve the airflow force (transmission power) of the harmful airflow HA by installing multiple airflow output components 2 and combining each airflow output component 2 with an external air source device G. Therefore, if the distance (or piping) between the second external device E2 and the particle separation component 1 is too long, or if the distance (or piping) between the airflow output component 2 and the particle separation component 1 is too long, installing one or more airflow output components 2 between the second external device E2 and the particle separation component 1, or between the airflow output component 2 and the particle separation component 1, can prevent the airflow force of the harmful airflow HA from being reduced or slowed down, and prevent a decrease in the harmful substance removal efficiency of the particle separation component 1.

[0025] [Third embodiment] Please refer to Figure 9, which is a structural schematic diagram of a dust collecting device according to a third embodiment of the present invention. Please also refer to Figures 1 to 8. The difference between this embodiment and the previous embodiments is that in this embodiment, multiple particle separating components 1 can be installed in the dust collecting device Z of the present invention. In this embodiment, two particle separating components 1 are exemplified, but the present invention is not limited to this.

[0026] For example, the dust collector Z of the present invention can further install one or more particle separation components 1 between the particle separation component 1 and the first external device E1, and by differentiating the structural design of the main body 10 of each particle separation component 1 (as in the first embodiment described above), the removal efficiency of multiple harmful substances can be improved. Furthermore, when the harmful airflow HA contains harmful particle particles of different sizes, after the airflow output component 2 delivers the harmful airflow HA to the particle separation component 1, the dust collector Z of the present invention first removes the harmful particles with larger particle sizes from the harmful airflow HA using the first particle separation component 1. The first particle separation component 1 then delivers the harmful airflow HA from which the harmful particles with larger particle sizes have been removed to the second particle separation component 1 via the first gas output part 12, and at this time, the dust collector Z of the present invention can remove the harmful particles with smaller particle sizes from the harmful airflow HA using the second particle separation component 1.

[0027] The dust collector Z of the present invention is not limited to the above-described implementation method. In actual implementation, the dust collector Z of the present invention can first remove harmful substances with small particle sizes from the harmful airflow HA using the first particle separation component 1, and then remove harmful substances with large particle sizes from the harmful airflow HA using the second particle separation component 1.

[0028] [Fourth embodiment] Please refer to Figure 10, which is a structural schematic diagram of a dust collecting device according to a fourth embodiment of the present invention. Please also refer to Figures 1 to 9. The difference between this embodiment and the previous embodiments is that in this embodiment, multiple dust collecting devices Z can be installed in the present invention. In this embodiment, two dust collecting devices Z are exemplified, but the present invention is not limited to this.

[0029] For example, in the present invention, by installing multiple dust collectors Z between the first external device E1 and the second external device E2, the removal efficiency of multiple harmful substances can be improved and a decrease in the airflow force (transmission power) of the harmful airflow HA can be prevented. Furthermore, by differently designing the main body 10 of the particle separation component 1 of each dust collector Z (as in the first embodiment described above), if the harmful airflow HA contains harmful substance particles of different sizes, the airflow output component 2 of the first dust collector Z transports the harmful airflow HA to the particle separation component 1, and then the first particle separation component 1 is used to remove large harmful substances from the harmful airflow HA. The first particle separation component 1 then transports the harmful airflow HA from which the large harmful substances have been removed to the airflow output component 2 of the next dust collector Z via the first gas output part 12. At this time, the airflow output component 2 transports the harmful airflow HA to the next particle separation component 1, and the next particle separation component 1 is used to remove small harmful substances from the harmful airflow HA. In this embodiment, the airflow output component 2 is installed between the two particle separation components 1, which prevents the airflow force of the harmful airflow HA from decreasing or slowing down, and prevents the harmful substance removal efficiency of the particle separation component 1 from decreasing.

[0030] However, the above example is merely one embodiment of the present invention and is not intended to limit the present invention.

[0031] [Beneficial effects of the invention] One of the beneficial effects of the present invention is that the dust collector Z provided by the present invention can improve the removal efficiency of harmful substances and reduce production costs through the above-mentioned technical solution.

[0032] Furthermore, the dust collector Z of the present invention uses the above-mentioned technical solution and utilizes the driving airflow provided by an external device, eliminating the need for a gas-driven device that consumes additional energy, thereby eliminating the need for an additional power supply and the consumption of water resources. Furthermore, the dust collector Z of the present invention employs a simple structural design, which not only effectively improves the efficiency of removing harmful substances, but also significantly reduces the costs and expenses of equipment maintenance. Furthermore, it also solves the problem of pipe clogging in semiconductor manufacturing equipment, eliminating the need for heat belts in pipes in the future.

[0033] Furthermore, the dust collector Z of the present invention can significantly improve the airflow force (transmission power) of the harmful airflow HA by installing multiple airflow output components 2. Also, by installing multiple particle separation components 1 with different structural designs, it is possible to improve the removal efficiency of various harmful substances. Furthermore, by installing multiple dust collectors Z, it is possible to increase the removal efficiency of various harmful substances and prevent a decrease in the airflow force (transmission power) of the harmful airflow HA.

[0034] The above disclosure is merely a preferred embodiment of the present invention, and does not limit the scope of the claims of the present invention. Therefore, all equivalent technical modifications made based on the contents of the specification and accompanying drawings of the present invention shall be included in the scope of the claims of the present invention. [Explanation of symbols]

[0035] Z dust collector 1 Particle separation component 10 Main Unit 10D diameter 10L length 11 First gas input section 11D diameter 12 first gas output section 12D diameter 12L length 120 Extension lead-out part 120L length 13 Foreign Material Export Department 13L length 130 Protruding connection part 130D diameter 130L length 14L specified distance 2 Airflow output parts 20 Main Unit 200 cavity part 200a flat wall 200b Arc-shaped wall 200c First hook part a1 First arc angle a2 Second arc angle a3 Third arc angle 201 Guide ear part 201a Second hook part 2010 Special flow path 2010a Conduction Area 2010b Discharge Area 21 Air flow inlet 22 second gas output section 23 Second gas input 3 Particle collection parts 30 Main Unit 31 Foreign body import section DA Driven Airflow E1 First external device E2 Second external device G. External air supply device HA Harmful Air Flow HS Hazardous Substances PA Purified Airflow RA Predetermined angle

Claims

1. 1. A dust collection device comprising at least one particle separation component, at least one airflow output component, and at least one particle collection component, the at least one particle separation component has a body, one side of the body of the at least one particle separation component extends outward to form a first gas input port, one end of the body of the at least one particle separation component extends outward to form a first gas output port, and the other end of the body of the at least one particle separation component extends outward to form a foreign matter export port, the first gas output port is connected to a first external device, and the first gas input port, the first gas output port, and the foreign matter export port are in communication with each other; the at least one airflow output component has a body, one side of the body of the at least one airflow output component extends outward to form an airflow inlet, one end of the body of the at least one airflow output component extends outward to form a second gas output component, the other end of the body of the at least one airflow output component extends outward to form a second gas input component, the airflow inlet is connected to an external air source device, the second gas output component is connected to the first gas input component, the second gas input component is connected to a second external device, the airflow inlet, the second gas output component and the second gas input component are in communication with each other, The at least one particle collection component is connected to the foreign matter export portion. A dust collecting device characterized by:

2. 2. The dust collecting device of claim 1, wherein when the airflow inlet receives a driving airflow supplied from the external air source device and the second gas input receives a harmful airflow supplied from the second external device, the at least one airflow output component is driven by the driving airflow to cause the harmful airflow to flow toward the second gas input component, when the first gas input component receives the harmful airflow supplied from the second gas input component, the first gas input component introduces the harmful airflow into a body of the at least one particle separation component and drives the harmful airflow to flow in a vortex shape, thereby separating at least one harmful substance in the harmful airflow from the harmful airflow and forming a purified airflow, the at least one particle separation component sends the purified airflow to the first external device via the first gas input component, and the at least one particle separation component collects the at least one harmful substance separated from the harmful airflow via the foreign matter export component and sends the at least one harmful substance to the at least one particle collection component.

3. the body of the at least one airflow output component has a cavity portion and a guide ear portion, one end of the cavity portion extends outward to form a second gas output portion, the other end of the cavity portion extends outward to form a first hook portion, the guide ear portion surrounds a side of the cavity portion, and an outer edge of the guide ear portion extends outward to form the airflow inlet portion, one end of the guide ear portion is connected to the cavity portion, and the other end of the guide ear portion extends into the cavity portion in a swiveling manner to form a second hook portion, and the second hook portion extends outward to form the second gas input portion; a special flow path is defined between the guide ear portion and the cavity portion, and the special flow path is in communication with the airflow inlet portion and the interior of the cavity portion; The special flow path is divided into a guide area and a discharge area, the guide area is connected to the discharge area, the cross section of the guide area is conical, and the cross section of the discharge area is C-shaped or hook-shaped; When the airflow inlet receives the driving airflow, the guide ear introduces the driving airflow into the cavity through the special flow path, driving the harmful airflow to flow toward the second gas output, and the second gas input is arranged to introduce the harmful airflow into the cavity and combine with the driving airflow to increase the flow intensity of the harmful airflow; The dust collecting device of claim 2 , wherein one end of the at least one particle collection component extends outward to form the foreign matter import portion, and the foreign matter import portion is connected to the foreign matter export portion.

4. the body of the at least one particle separation component, the first gas input port, and the first gas output port are straight tubular; the foreign matter export port is conical; and the diameters of the first gas input port and the first gas output port are equal to or less than the diameter of the body of the at least one particle separation component; a diameter of the body of the at least one particle separation component is defined by a predetermined value, a diameter of the first gas input port and a diameter of the first gas output port are 0.01 to 1 times the predetermined value, a length of the body of the at least one particle separation component and a length of the foreign matter export port are 0.5 to 4 times the predetermined value, and a length of the first gas output port is 1 to 4.5 times the predetermined value; one end of the foreign matter export portion is connected to the body of the at least one particle separation component, and the other end of the foreign matter export portion extends outward to form a protruding connection portion, and the protruding connection portion is connected to the at least one particle collection component, the diameter of the protruding connection portion is 0.1 to 0.5 times the predetermined value, and the length of the protruding connection portion is 0.1 to 0.5 times the predetermined value; 2. The dust collecting device of claim 1, wherein one end of the first gas output portion is connected to a body of the at least one particle separation component, and the other end of the first gas output portion extends into the at least one particle separation component to form an extended lead-out portion, the diameter of the extended lead-out portion being equal to the diameter of the first gas output portion, and the length of the extended lead-out portion being 0.1 to 2.5 times the predetermined value.

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