Robot teaching system and robot control device

Abstract

To provide a robot teaching system capable of appropriately generating a work program for moving a transfer robot to a target position in a chamber in a flat panel manufacturing system for manufacturing flat panels, and to provide a robot control device.SOLUTION: A robot teaching system 11 includes: feature point detection means 130 that detects a feature point in a chamber PC while sensing inside of the chamber PC by using a sensor 30 installed in a holding portion 22 that holds a workpiece W in a transfer robot 20; position calculation means 140 that calculates a position of the feature point; and program generation means 150 that generates a work program for operating the transfer robot 20 to move the transfer robot 20 to a target position based on the position of the feature point.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present invention relates to a robot teaching system and a robot control device. [Background technology]

[0002] In recent years, industrial robots have become widespread in the industrial world, including large-scale manufacturing systems for processing glass substrates for large flat panels, including flat panel displays (FPDs) such as liquid crystal displays and organic electroluminescence (EL) displays.

[0003] In such large-scale manufacturing systems, multiple process chambers are arranged to perform various processes on workpieces such as glass substrates. Furthermore, a transfer robot (transfer device) is arranged in the transfer chamber, and the transfer robot (transfer device) transports the workpiece to a desired position in each process chamber.

[0004] In Patent Document 1, the transfer device is equipped with an optical sensor at the tip of a support pick, and by moving the support pick upward in the transfer chamber and irradiating light toward the tip, the transfer device identifies the upper end position of the opening between the transfer chamber and the load lock chamber. Furthermore, in the load lock chamber, the support pick is moved upward and rotated while irradiating light toward the tip and downward, thereby identifying the upper end position / side wall position of the buffer (groove). Then, the operation of the transfer device is corrected based on the identified upper end position of the opening and the upper end position / side wall position of the buffer (groove). In this way, Patent Document 1 automatically adjusts the operating position of the transfer device. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 2019-220588 Summary of the Invention [Problem to be solved by the invention]

[0006] However, the transfer device disclosed in Patent Document 1 checks the top end position / side wall position of a specific buffer (groove) while rotating inside the chamber, which may result in collision with these, and since it is a local detection, it is not possible to grasp the entire inside of the chamber. If other obstacles exist inside the chamber, there is also a risk of collision with these.

[0007] However, in a large-scale manufacturing system for processing large flat panel glass substrates, there is a problem in that it is difficult for an operator to operate a transfer robot while directly checking the state inside the chamber.

[0008] Therefore, the present invention aims to provide a robot teaching system and a robot control device that can appropriately generate an operation program for moving a transport robot to a target position within a chamber in a flat panel manufacturing system that manufactures flat panels. [Means for solving the problem]

[0009] A robot teaching system according to one aspect of the present invention is a robot teaching system used in a flat panel manufacturing system that manufactures flat panels, having a plurality of chambers, a transport robot that transports workpieces between the plurality of chambers, and a robot control device that controls the operation of the transport robot, and is equipped with a feature point detection means that detects feature points within the chamber while sensing the interior of the chamber using a sensor installed in a holding section that holds the workpiece in the transport robot, a position calculation means that calculates the position of the feature point, and a program generation means that generates an operation program for operating the transport robot to move to a target position based on the position of the feature point.

[0010] According to this aspect, the feature point detection means detects feature points within the chamber using a sensor installed in the holder of the transfer robot, and the program generation means generates an operation program for operating the transfer robot to move to a target position based on the position of the feature point calculated by the position calculation means. This makes it possible to grasp the state inside the chamber and appropriately generate an operation program for moving the transfer robot to the target position within the chamber.

[0011] In the above aspect, the characteristic feature may include at least a part of a support pin that supports the workpiece within the chamber.

[0012] According to this aspect, it is possible to grasp the positions of the support pins arranged in the chamber and appropriately generate an operation program for moving the transfer robot based on the positions of the support pins.

[0013] In the above aspect, the characteristic point may include at least a part of a wall surface that constitutes the chamber.

[0014] According to this aspect, it is possible to grasp the positions of the wall surfaces that constitute the chamber, and to appropriately generate an operation program for moving the transfer robot based on the positions of the wall surfaces.

[0015] In the above aspect, the operation program may set a movement path for the transfer robot so as to avoid collisions within the chamber.

[0016] According to this aspect, the transfer robot can be appropriately moved within the chamber based on the operation program.

[0017] In the above aspect, the apparatus may further comprise a mapping means for mapping the positions of the characteristic points in the chamber, and a display means for displaying the results of the mapping.

[0018] According to this aspect, the mapping means maps the positions of the characteristic points within the chamber, and the display means displays the mapping results, allowing the user to check the state of the interior of the chamber.

[0019] In the above aspect, the device may further comprise a target position receiving means for receiving, from a user operation, how to set the target position.

[0020] According to this aspect, the target position receiving means receives, from a user operation, information on how to set the target position, so that a target position can be set according to each user.

[0021] A robot control device according to one aspect of the present invention is used in a flat panel manufacturing system for manufacturing flat panels, and is a robot control device that controls the operation of a transport robot that transports workpieces between multiple chambers.The robot control device includes: a feature point detection means that detects feature points within the chamber while sensing the interior of the chamber using a sensor installed in a holding section that holds the workpiece in the transport robot; a position calculation means that calculates the position of the feature point; and a program generation means that generates an operation program for operating the transport robot to move to a target position based on the position of the feature point.

[0022] According to this aspect, the feature point detection means detects feature points within the chamber using a sensor installed in the holder of the transfer robot, and the program generation means generates an operation program for operating the transfer robot to move to a target position based on the position of the feature point calculated by the position calculation means. This makes it possible to grasp the state inside the chamber and appropriately generate an operation program for moving the transfer robot to the target position within the chamber. [Effects of the Invention]

[0023] According to the present invention, it is possible to provide a robot teaching system and a robot control device that can appropriately generate an operation program for moving a transport robot to a target position within a chamber in a flat panel manufacturing system that manufactures flat panels. [Brief explanation of the drawings]

[0024] [Figure 1] 1 is an external perspective view showing an overview of a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 2] 1 is a plan view showing the internal structure of a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 3] 1 is a schematic diagram showing the configuration of a transfer robot system 10 used in a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 4A] 1 is a schematic diagram showing a state in which a sensor device 30 (wall surface sensing) is arranged on a transfer robot 20 used in a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 4B] 1 is a schematic diagram showing a state in which a sensor device 30 (for sensing the direction of travel) is arranged on a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. [Figure 4C] 1 is a schematic diagram showing a state in which a sensor device 30 (downward sensing) is arranged on a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. [Figure 5] 1 is a functional block diagram showing each function of a robot control device 100 that controls the operation of a transfer robot 20 in a robot teaching system 11 used in a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 6] 10 is a schematic diagram showing how the transfer robot 20 senses the sidewall surface and the support pins 90 inside the process chamber PC while advancing from the transfer chamber TC toward the process chamber PC. [Figure 7]1 is a flowchart showing the flow of processing of a robot teaching method M100 executed by a robot teaching system 11 used in a flat panel manufacturing system 1 according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0025] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. Note that the embodiment described below is merely a specific example for carrying out the present invention and is not intended to limit the present invention. Furthermore, to facilitate understanding of the description, the same components in each drawing will be assigned the same reference numerals as much as possible, and duplicate descriptions may be omitted.

[0026] <One embodiment> [Flat panel manufacturing system configuration] Fig. 1 is an external perspective view showing an overview of a flat panel manufacturing system 1 according to one embodiment of the present invention, and Fig. 2 is a plan view showing the internal structure of the flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in Fig. 1 and Fig. 2, the flat panel manufacturing system 1 is a large multi-chamber system that includes a transfer chamber TC in the center and multiple process chambers PC and load lock chambers LLC arranged to surround the transfer chamber TC.

[0027] The flat panel manufacturing system 1 is a vacuum processing system for processing glass substrates for large flat panels including flat panel displays (FPDs) such as liquid crystal displays and organic EL displays.

[0028] The load lock chamber LLC is a chamber for transferring workpieces W (such as glass substrates) between the outside and the process chambers PC before and after processing in the process chambers PC, allowing the process chambers PC to maintain a vacuum state without being exposed to the outside atmosphere. The transfer chamber TC can also maintain a vacuum state.

[0029] The transfer chamber TC is configured to be able to maintain a vacuum state as described above, and is equipped with a transfer robot 20. The transfer robot 20 has a transfer mechanism (hand holders and fingers) that transfers the workpiece W between each process chamber PC and the load lock chamber LLC.

[0030] The multiple process chambers PC are configured to be able to maintain a vacuum state as described above, and are equipped with a mounting table on which the workpiece W transferred by the transfer robot 20 arranged in the transfer chamber TC is placed. The mounting table may be configured, for example, to be provided with multiple support pins so that the workpiece W is supported by the support pins. Then, in each process chamber PC, with the workpiece W placed thereon, plasma processing such as CVD (Chemical Vapor Deposition), etching, ashing, or film formation under vacuum conditions may be performed on the workpiece W. Note that the same type of processing may be performed in each process chamber PC, or different types of processing may be performed in each process chamber.

[0031] [Transport robot system configuration] 3 is a schematic diagram showing the configuration of a transfer robot system 10 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 3, the transfer robot system 10 includes a transfer robot 20, a robot control device 100, and a teaching pendant TP.

[0032] As described with reference to FIGS. 1 and 2 , the transfer robot 20 is disposed in the transfer chamber TC in the flat panel manufacturing system 1 and transfers a workpiece W between each process chamber PC and the load lock chamber LLC. The transfer robot 20 is, for example, a horizontal articulated robot intended to transfer glass substrates, and is a clean transfer robot used for transfers in clean environments in the manufacturing of semiconductor devices and flat panel displays, the medical and food industries, and the like. In this embodiment, the transfer robot 20 is, for example, a two-axis or three-axis cylindrical coordinate system, and has a hand holder 21 and fingers (holding portions) 22 as end effectors. The transfer of the workpiece W (e.g., a glass substrate) while held by the fingers 22 will be described as an example.

[0033] The robot control device 100 is a device that controls the operation of the transfer robot 20. For example, the robot control device 100 is connected to an operating device such as a teaching pendant TP and can acquire operation instruction information input via the operating device. Based on the operation instruction information, the robot control device 100 starts and stops the transfer robot 20, and operates each axis, arm, and hand holder 21 (fingers 22) of the transfer robot 20 to take out, transport, and place a workpiece W in each process chamber PC and load lock chamber LLC.

[0034] The teaching pendant TP is an operating device operated by an operator, and receives input from the operator regarding operation instruction information for the transport robot 20, such as the transport work of transporting the workpiece W. Typically, the operator uses an operating device such as the teaching pendant TP to input appropriate instruction information, for example, for starting and stopping the transport robot 20, as well as for setting the transport robot 20, operating the arm and hand holder 21 (fingers 22), and registering teaching points.

[0035] Furthermore, regarding the registration of teaching points, an operator may sequentially register teaching points on the movement path of the transfer robot 20 using an operating device such as a teaching pendant TP while operating the transfer robot 20, or teaching points may be automatically registered by automatic teaching. Automatic teaching is effective in environments or situations where an operator cannot enter the interior and cannot grasp the state inside each chamber from the outside, such as the flat panel manufacturing system 1.

[0036] Here, there is a situation in which the transfer robot 20 installed in the transfer chamber TC inserts its fingers 22 into the load lock chamber LLC, removes the workpiece W placed there using the fingers 22, and transfers it to a mounting table in the process chamber PC while it is held by the fingers 22. The transfer robot 20 operates the arm and hand holder 21 (fingers 22) based on operation instruction information from the robot control device 100, removes the workpiece W from the load lock chamber LLC, and transfers it to the process chamber PC as the transfer destination.

[0037] At this time, the finger 22 holding the workpiece W advances from the transfer chamber TC toward the load lock chamber LLC or the process chamber PC, and proceeds inside the load lock chamber LLC or the process chamber PC. For example, the finger 22 attached to the hand holder 21 of the transport robot 20 proceeds while avoiding collision with support pins or wall surfaces arranged in the transfer chamber TC or the process chamber PC, and transports the workpiece W held by the finger 22 to a target position.

[0038] As described above, in the flat panel manufacturing system 1, it is difficult for an operator to operate the transfer robot while directly checking the state inside each chamber, and therefore it is necessary to properly grasp the state inside each chamber using, for example, a sensor device arranged on the finger 22 and instruct the transfer robot 20 to move to a target position. Below, a method for generating an operation program for operating the transfer robot 20 while grasping the state inside the chambers and moving the finger 22 into the load lock chamber LLC and the process chamber PC using the sensor device will be described.

[0039] [Configuration of the sensor device] 4A is a schematic diagram showing a state in which a sensor device 30 (wall surface sensing) is disposed on a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 4A, the sensor device 30 is disposed on the tip of a finger 22 attached to a hand holder 21 of the transfer robot 20.

[0040] The sensor device 30 has two sensors 31A and 32A at both ends thereof. For example, the two sensors 31A and 32A may be attached to the front surface, the back surface, the surface facing the direction of travel, the surface facing the hand holder 21, or an outer side surface of the sensor device 30.

[0041] The sensor device 30, to which two sensors 31A and 32A are attached, is placed and held on the tip of the finger 22 of the transport robot 20, and the two sensors 31A and 32A are capable of sensing the outward direction. Specifically, the two sensors 31A and 32A may be distance measuring sensors capable of sensing the distance from each of the two ends to the wall surface in the outward direction, in a direction perpendicular to the moving direction of the finger 22 and in a horizontal direction.

[0042] This makes it possible to sense the distance from sensor 31A to the wall surface in the outward direction and the distance from sensor 32A to the wall surface in the outward direction. In other words, by installing two sensors 31A and 32A at both ends of sensor device 30, it is possible to grasp the distances from both ends of the tip of finger 22 to the wall surface.

[0043] The positions of the sensors 31A and 32A installed in the sensor device 30 are not limited to both ends of the sensor device 30, and for example, one sensor may be installed at one end or the center of the sensor device 30. The distance from the one sensor to the wall surface may be sensed, and the distance from both ends of the tip of the finger 22 to the wall surface may be calculated based on the sensing result and the size of the load lock chamber LLC (process chamber PC).

[0044] Furthermore, the sensor device 30 may be provided with a sensor capable of sensing the direction of travel so as to sense the distance to the back wall surface in the direction of travel. Specifically, the sensor device 30 may be provided with a distance measuring sensor capable of sensing the distance to the wall surface (back wall surface) in the direction of travel and in the horizontal direction of the finger 22, so as to grasp the distance to the back wall surface.

[0045] 4B is a schematic diagram showing a state in which a sensor device 30 (for sensing a direction of travel) is disposed on the transfer robot 20 used in the flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 4B, the sensor device 30 is disposed on the tip of the finger 22 attached to the hand holder 21 of the transfer robot 20.

[0046] The sensor device 30 includes a sensor 31B. For example, the sensor 31B may be a two-dimensional laser sensor that is attached to the front surface, the back surface, or the side surface in the traveling direction of the sensor device 30 and is capable of sensing only a predetermined range in a direction perpendicular to the traveling direction of the finger 22 of the transfer robot 20.

[0047] The sensor device 30 equipped with the sensor 31B is placed and held at the tip of the finger 22 of the transport robot 20, and the sensor 31B is configured to be able to sense the direction of movement of the finger 22 of the transport robot 20 and the downward direction inside the load lock chamber LLC and the process chamber PC.

[0048] As a result, while the finger 22 advances toward the load lock chamber LLC and the process chamber PC, the sensor 31B can sequentially sense the downward direction inside the load lock chamber LLC and the process chamber PC within the above-mentioned specified range (sensing range) of the two-dimensional laser sensor, and detect support pins, etc.

[0049] Although one sensor 31B is disposed in the center of the sensor device 30, this is not limiting. For example, as long as it is possible to detect support pins and the like disposed inside the load lock chamber LLC and the process chamber PC and to ascertain their positions, the sensor may be disposed at an end of the sensor device 30, or two or more sensors may be disposed.

[0050] 4C is a schematic diagram showing a state in which a sensor device 30 (downward sensing) is disposed on a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 4C, the sensor device 30 is disposed on the tip of a finger 22 attached to a hand holder 21 of the transfer robot 20. The sensor device 30 includes four sensors 31C to 34C, and the sensors 31C to 34C are disposed so as to correspond to the four fingers 22, respectively.

[0051] The four sensors 31C to 34C included in the sensor device 30 are attached to the rear surface of the sensor device 30 so as to be arranged corresponding to the four fingers 22, respectively. The sensor device 30 is placed and held on the tip of the finger 22 of the transfer robot 20, so that the sensors 31C to 34C can sense the downward direction of each of the four fingers 22.

[0052] As a result, while the fingers 22 advance toward the load lock chamber LLC and the process chamber PC, the sensors 31C to 34C can detect whether or not a support pin or the like is arranged below each of the four fingers 22.

[0053] The attachment positions of the four sensors 31C to 34C in the sensor device 30 are not limited to the back surface of the sensor device 30, and other attachment positions or attachment methods may be used as long as they are capable of sensing the downward direction of each of the four fingers 22. For example, the four sensors 31C to 34C may be fixed to the sensor device 30 facing downward using attachments or the like that are arranged to protrude from the tips of the fingers 22 in the direction of movement of the fingers 22.

[0054] The sensor device 30 shown in Figures 4A to 4C is placed at the tip of the finger 22 of the transport robot 20, but the sensor device 30 (including each sensor placed in the sensor device 30) is calibrated, and the robot control device 100 is aware of the position of the sensor device 30 (the position of each sensor placed in the sensor device 30), and is also able to understand the positions of the wall surface and support pins sensed by the sensor device 30 (each sensor placed in the sensor device 30) from the position of the finger 22 (robot coordinate system).

[0055] Also, here, the sensor device 30 is provided with one or more sensors as a unit and is disposed at the tip of the finger 22 of the transfer robot 20, but is not limited to this. As long as the positions of the wall surface and the support pins can be properly grasped, for example, one or more sensors (sensor devices) may be attached to the tip of the finger 22 directly or via an attachment mechanism. The robot control device 100 knows in advance the configuration and position of the attachment mechanism, and is also able to grasp the positions of the wall surface and the support pins detected by the sensor (sensor device) (robot coordinate system). In this case, the above-mentioned calibration may not be necessary.

[0056] Furthermore, the sensor device 30 shown in Figures 4A to 4C is equipped with sensors 31A and 32A for sensing wall surfaces, a sensor 31B for sensing support pins in the forward and downward directions, and sensors 31C to 34C for sensing the presence or absence of support pins in the downward direction, but two or more of these may be combined.

[0057] The sensors installed in the sensor device 30 are not limited to distance measurement sensors and two-dimensional laser sensors, but may be, for example, cameras (stereo cameras), LiDAR, and other optical sensors.

[0058] Furthermore, the sensor device 30 may be equipped with a control unit and a communication unit, and may notify, for example, the robot control device 100 of information detected (acquired) by one or more sensors arranged in the sensor device 30.

[0059] [Robot control device configuration] 5 is a functional block diagram showing each function of a robot control device 100 that controls the operation of a transfer robot 20 in a robot teaching system 11 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 5, the robot control device 100 includes a robot control means 110, a sensing means 120, a feature point detection means 130, a position calculation means 140, and a program generation means 150, and controls the operation of the transfer robot 20.

[0060] The robot control device 100 holds the sensor device 30 at the tip of the finger 22 and moves the hand holder 21 (fingers 22) from the transfer chamber TC toward the load lock chamber LLC (process chamber PC), while sensing characteristic points inside the load lock chamber LLC (process chamber PC) using the sensor in the sensor device 30.

[0061] 3, the robot control device 100 is connected to the transfer robot 20, and further has many functions for performing various controls and processes based on operation instruction information from an operating device such as a teaching pendant TP, or automatic control (automatic teaching). Here, the robot control device 100 is mainly shown to have a function of appropriately grasping the state inside the load lock chamber LLC (process chamber PC) of the transfer robot 20 and teaching the transfer robot 20 to move to a target position, but it also has other configurations and functions.

[0062] The robot control means 110 operates the transport robot 20. For example, the transport robot 20 is in a state where the sensor device 30 is held by the fingers 22, and the robot control means 110 operates each axis, arm, and hand holder 21 (fingers 22) of the transport robot 20.

[0063] The sensing means 120 senses the inside of the load lock chamber LLC (process chamber PC) using the sensor in the sensor device 30 while the robot control means 110 causes the hand holder 21 (fingers 22: holding part) of the transport robot 20 to move from the transfer chamber TC toward the load lock chamber LLC (process chamber PC).

[0064] For example, the sensing means 120 includes wall surface sensing means 121 and support pin sensing means 122. The wall surface sensing means 121 senses the distance to the wall surface inside the load lock chamber LLC (process chamber PC) using sensors 31A and 32A (FIG. 4A) attached to the sensor device 30. The support pin sensing means 122 senses the downward direction of the moving direction of the fingers 22 and the downward direction of each of the four fingers 22 inside the load lock chamber LLC (process chamber PC) using sensors 31B (FIG. 4B) and / or sensors 31C to 34C (FIG. 4C) attached to the sensor device 30.

[0065] The characteristic point detection means 130 senses the inside of the load lock chamber LLC (process chamber PC) using the sensor device 30 held by the finger 22 of the transfer robot 20, and detects characteristic points inside the load lock chamber LLC (process chamber PC).

[0066] For example, the feature point detection means 130 may detect, for example, each point on the side wall surface sensed at a predetermined timing as a feature point when sensing the side wall surface of the load lock chamber LLC (process chamber PC) by the wall surface sensing means 121. Also, the feature point detection means 130 may detect, for example, a support pin or other obstacle as a feature point when sensing the downward direction of the moving direction of the finger 22 inside the load lock chamber LLC (process chamber PC) and / or the downward direction of each of the four fingers 22 by the support pin sensing means 122.

[0067] More specifically, if the sensor installed in the sensor device 30 is a camera, the feature point detection means 130 may detect support pins and other obstacles based on the acquired image by pattern matching, etc. Also, if the sensor is an optical sensor such as a distance measurement sensor, the feature point detection means 130 may detect support pins and other obstacles based on the distance (displacement) from the sensor to the bottom surface inside the load lock chamber LLC (process chamber PC).

[0068] The position calculation means 140 calculates the positions of the feature points detected by the feature point detection means 130. As described above, the robot control device 100 knows in advance the positions of the sensor device 30 (including the sensors installed in the sensor device 30) placed at the tip of the finger 22 through calibration or the like. As a result, for example, the position calculation means 140 may calculate the positions (robot coordinates) of the feature points detected by the sensing means 120 and the feature point detection means 130 based on the position (robot coordinates) of the sensor device 30.

[0069] Specifically, the position calculation means 140 calculates the position (robot coordinates) of the sidewall surface of the load lock chamber LLC (process chamber PC) and the positions (robot coordinates) of support pins and other obstacles inside the load lock chamber LLC (process chamber PC).

[0070] The program generation means 150 generates an operation program for operating the transfer robot 20 so as to move to a target position based on the positions of the feature points detected by the feature point detection means 130. As described above, the robot control device 100 knows the positions (robot coordinates) of the sidewall surfaces of the load lock chamber LLC (process chamber PC) and the positions (robot coordinates) of support pins and other obstacles inside the load lock chamber LLC (process chamber PC), and therefore the operation program sets the operation of the transfer robot 20, including the operation path of the transfer robot 20, so that the transfer robot 20 (including the fingers 22 and the workpiece W held by them) reaches the target position while avoiding collision with the wall surfaces, support pins, other obstacles, etc.

[0071] Here, the target position may be set, for example, to the center of the load lock chamber LLC (process chamber PC). The center position can be calculated based on the positions of the wall surface and / or support pins calculated by the feature point detection means 130 and the position calculation means 140. The operation program may set the operation of the transfer robot 20, including the movement path of the transfer robot 20, so that the TCP (Tool Center Point) of the transfer robot 20 reaches the target position. The TCP is set to the center position of the area of ​​the fingers 22 on which the workpiece W (flat panel) is placed when the workpiece W is placed on the hand (fingers 22). For example, when the workpiece W is placed on the entire fingers 22, the TCP is the center position of the fingers 22. When the workpiece W is placed on the tip half of the fingers 22, the TCP is the center position of the tip half of the area of ​​the fingers 22 (i.e., the 1 / 4 position of the fingers 22).

[0072] The target position is not limited to the center of the load lock chamber LLC (process chamber PC), and may be set to an appropriate position depending on the process in each chamber, or may be set by the operator (target position receiving means). For example, as the target position receiving means, the operator may specifically set the target position using a teaching pendant TP or the like, or may set the target position to the center, the rear side, or the front side based on the position of the chamber wall calculated by the feature point detection means 130 and the position calculation means 140. Furthermore, the target position may be set to the center, the rear side, or the front side based on each end support pin of the support pins calculated by the feature point detection means 130 and the position calculation means 140. Furthermore, the center support pin or a certain number support pin may be set as the target position.

[0073] Furthermore, based on the position of the side wall surface of the load lock chamber LLC (process chamber PC) calculated by the feature point detection means 130 and the position calculation means 140 and the positions of support pins and other obstacles inside the load lock chamber LLC (process chamber PC), these may be mapped in the robot coordinate system (mapping means), and the mapping results may be displayed, for example, on a display screen of a teaching pendant TP or the like (display means).

[0074] This allows the operator to grasp the state inside the load lock chamber LLC (process chamber PC). Furthermore, if an image of the transfer robot 20 (fingers 22) is also superimposed, the state inside the load lock chamber LLC (process chamber PC) can be more appropriately grasped. The operator may also set a target position after checking this display screen. By mapping the positions of the sidewall surfaces of the load lock chamber LLC (process chamber PC) and the support pins and other obstacles inside the load lock chamber LLC (process chamber PC), the possibility of the transfer robot 20 (including the fingers 22 and the workpiece W placed thereon) colliding with the sidewall surfaces, support pins, and other obstacles can be reduced compared to simply teaching the operation of the transfer robot 20 so that the TCP reaches the target position.

[0075] [About the operation of the transport robot] 6 is a schematic diagram showing how the transfer robot 20 senses the side wall surface and support pins 90 inside the process chamber PC while advancing from the transfer chamber TC toward the process chamber PC. As shown in Fig. 6, the sensor device 30 is provided with two sensors 31A and 32A at both ends thereof (Fig. 4A) and a sensor 31B (Fig. 4B) at the center thereof, and is configured to be able to detect the wall surface and support pins.

[0076] The robot control device 100 operates the hand holder 21 (fingers 22) of the transport robot 20 arranged in the transfer chamber TC, causing the fingers 22 to advance from the transfer chamber TC toward the process chamber PC and further inside the process chamber PC.

[0077] As the finger 22 advances toward the process chamber PC, the sensor device 30 (sensors 31A, 32A) senses both side wall surfaces, and the sensor device 30 (sensor 31B) senses the downward direction of the moving direction of the finger 22. Then, the support pins 90 arranged on both side wall surfaces and in the process chamber PC are detected in order, and their positions (coordinates) are calculated.

[0078] Based on the positions of both side walls and the support pins obtained by sensing, the robot control device 100 instructs the fingers 22 of the transfer robot 20 to move to a target position while avoiding collision with the wall surfaces and support pins of the process chamber PC.

[0079] [Robot teaching method] Next, we will explain in detail the method of instructing the transport robot 20 to move to the target position by moving the hand holder 21 (finger 22) of the transport robot 20 from the transfer chamber TC toward the process chamber PC while grasping the state inside the process chamber PC using the sensor device 30 held at the tip of the finger 22.

[0080] 7 is a flowchart showing the processing flow of a robot teaching method M100 executed by the robot teaching system 11 used in the flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 7, the robot teaching method M100 includes steps S110 to S170, and each step is executed by a processor included in the robot control device 100.

[0081] In step S110, the robot control means 110 moves the hand holder 21 (fingers 22) of the transport robot 20, with the sensor device 30 held at the tip of the finger 22, from the transfer chamber TC toward the process chamber PC.

[0082] In step S120, while the sensing means 120 moves the finger 22 inside the process chamber PC, the sensing means 120 senses the inside of the process chamber PC using the sensor device 30 held at the tip of the finger 22. Specifically, the wall surface sensing means 121 senses the directions of both side wall surfaces using two sensors 31A and 32A attached to both ends of the sensor device 30, and the support pin sensing means 122 senses the downward direction of the moving direction of the finger 22 using the sensor 31B attached to the center of the sensor device 30.

[0083] In step S130, the feature point detection means 130 and the position calculation means 140 calculate the distance to the wall surface, using each point on the wall surface sensed at each predetermined timing in step S120 as a feature point, and then calculate the position (coordinates) of the wall surface.

[0084] In step S140, the characteristic point detection means 130 and the position calculation means 140 calculate the positions (coordinates) of the support pins detected by sequentially sensing the downward direction of the moving direction of the finger 22 in step S120.

[0085] Note that steps S130 and S140 may be performed in parallel, in reverse order, or alternately.

[0086] In step S150, the robot control device 100 determines whether sensing inside the process chamber PC has been completed, and if it has been completed ("Yes" in step S150), proceeds to processing in step S160; if it has not been completed ("No" in step S150), returns to processing in step S120, advances the finger 22, and continues sensing inside the process chamber PC.

[0087] For example, it may be determined that sensing inside the process chamber PC is complete when the tip of the finger 22 reaches near the back wall surface of the process chamber PC, or on the other hand, it is not necessarily necessary to sense the entire inside of the process chamber PC, and it may be determined that sensing inside the process chamber PC is complete when the TCP reaches a target position, for example.

[0088] In step S160, the robot controller 100 calculates a target position based on the positions (coordinates) of the wall surface and / or the positions (coordinates) of the support pins calculated in step S130 and / or step S140. For example, the robot controller 100 may set the center of the process chamber PC as the target position.

[0089] Here, the target position is calculated in step S160 after sensing inside the process chamber PC is completed ("Yes" in step S150), but the target position may also be calculated or set before sensing inside the process chamber PC is completed.

[0090] In step S170, the program generating means 150 generates an operation program for operating the transfer robot 20 so as to move to the target position calculated in step S160. For example, the operation program sets the operation of the transfer robot 20, including the operation path of the transfer robot 20, so that the fingers 22 of the transfer robot 20 reach the target position while avoiding collision with the wall surface and support pins of the process chamber PC.

[0091] As described above, according to the robot teaching system 11, robot control device 100, and robot teaching method M100, the robot control means 110 causes the fingers 22 of the transfer robot 20 to enter the process chamber PC from the transfer chamber TC. The sensing means 120 senses both side walls and the downward direction of the moving direction inside the process chamber PC using the sensor device 30 installed at the tip of the fingers 22, and the feature point detection means 130 detects feature points inside the process chamber PC. The program generation means 150 generates an operation program for operating the transfer robot 20 to move to a target position based on the position of the feature point calculated by the position calculation means 140. This makes it possible to grasp the state inside the process chamber PC and appropriately generate an operation program for moving the transfer robot 20 (TCP) to a target position inside the process chamber PC.

[0092] In this embodiment, the situation in which the hand holder 21 (fingers 22) of the transfer robot 20 advances from the transfer chamber TC toward the process chamber PC has been described as an example, but the present invention is not limited to this. For example, the present invention can be similarly applied to a situation in which the hand holder 21 (fingers 22) of the transfer robot 20 advances from the transfer chamber TC toward the load lock chamber LLC.

[0093] The above-described embodiments are intended to facilitate understanding of the present invention and are not intended to limit the present invention. The elements of the embodiments, as well as their arrangement, materials, conditions, shapes, sizes, etc., are not limited to those illustrated and can be modified as appropriate. Furthermore, configurations shown in different embodiments can be partially substituted or combined with each other. [Explanation of symbols]

[0094] 1...flat panel manufacturing system, 10...transport robot system, 11...robot teaching system, 20...transport robot, 21...hand holder, 22...finger, 30...sensor device, 31A, 32A, 31B, 31C to 34C...sensors, 90...support pin, 100...robot control device, 110...robot control means, 120...sensing means, 121...wall surface sensing means, 122...support pin sensing means, 130...feature point detection means, 140...position calculation means, 150...program generation means, TC...transfer chamber, PC...process chamber, LLC...load lock chamber, TP...teaching pendant, W...workpiece, M100...robot teaching method, S110 to S170...each step of robot teaching method M100

Claims

1. A robot teaching system for use in a flat panel manufacturing system that manufactures flat panels, the system having a plurality of chambers, a transfer robot that transfers workpieces between the plurality of chambers, and a robot control device that controls the operation of the transfer robot, a feature point detection means for detecting a feature point in the chamber while sensing the inside of the chamber using a sensor installed in a holder that holds the workpiece in the transfer robot; a position calculation means for calculating the position of the feature point; a program generating means for generating an operation program for operating the transport robot so as to move to a target position based on the position of the feature point, Robot teaching system.

2. The feature includes at least a part of a support pin that supports the workpiece in the chamber. The robot teaching system according to claim 1 .

3. The characteristic feature includes at least a part of a wall surface that constitutes the chamber. The robot teaching system according to claim 1 .

4. In the operation program, a movement path of the transfer robot is set so as to avoid collisions within the chamber. The robot teaching system according to claim 1 .

5. mapping means for mapping the location of the feature points within the chamber; and a display means for displaying the mapping result. The robot teaching system according to claim 1 .

6. The apparatus further includes a target position receiving means for receiving, from a user operation, information on how to set the target position. The robot teaching system according to claim 1 .

7. 1. A robot control device used in a flat panel manufacturing system for manufacturing flat panels, the robot control device controlling the operation of a transfer robot that transfers workpieces between a plurality of chambers, a feature point detection means for detecting a feature point in the chamber while sensing the inside of the chamber using a sensor installed in a holder that holds the workpiece in the transfer robot; a position calculation means for calculating the position of the feature point; a program generating means for generating an operation program for operating the transport robot so as to move to a target position based on the position of the feature point, Robot control device.

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