Lifting mechanism, substrate processing apparatus and lifting method

Abstract

To provide technology that reduces the height of an apparatus.SOLUTION: A lifting mechanism according to one embodiment of the present disclosure for raising and lowering a substrate holder that holds a plurality of substrates in a shelf-like configuration, comprises: a support part for supporting the substrate holder; a lifting part connected to the support part and raising and lowering the support part; a first extensible part that extends and retracts in response to the raising and lowering of the support part; and a second extensible part that extends and retracts in response to the lifting and lowering of the support part, with the extensible direction during lifting and lowering of the support part being opposite to that of the first extensible part.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to a lifting mechanism, a substrate processing apparatus, and a lifting method. [Background technology]

[0002] There is known a technique for raising and lowering a boat supporting a plurality of substrates using a boat elevator (see, for example, Patent Documents 1 and 2). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2002-359237 [Patent Document 2] Japanese Patent Application Laid-Open No. 2004-281881 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides techniques that can reduce the height of the device. [Means for solving the problem]

[0005] A lifting mechanism according to one aspect of the present disclosure is a lifting mechanism that raises and lowers a substrate holder that holds multiple substrates in a shelf-like manner, and includes a support section that supports the substrate holder, a lifting section connected to the support section and that raises and lowers the support section, a first extension section that expands and contracts in accordance with the raising and lowering of the support section, and a second extension section that expands and contracts in accordance with the raising and lowering of the support section, and whose extension direction when raising and lowering the support section is opposite to that of the first extension section. [Effects of the Invention]

[0006] According to the present disclosure, the height of the device can be reduced. [Brief explanation of the drawings]

[0007] [Figure 1]1 is a cross-sectional view (1) showing a substrate processing apparatus according to a first embodiment. [Figure 2] FIG. 2 is a cross-sectional view (2) showing the substrate processing apparatus according to the first embodiment. [Figure 3] FIG. 2 is a cross-sectional view showing a lifting mechanism according to the first example. [Figure 4] FIG. 1 is a cross-sectional view (1) showing an example of the operation of the lifting mechanism according to the first example. [Figure 5] FIG. 10 is a cross-sectional view (2) showing an example of the operation of the lifting mechanism according to the first example. [Figure 6] FIG. 10 is a cross-sectional view (3) showing an example of the operation of the lifting mechanism according to the first example. [Figure 7] FIG. 4 is a cross-sectional view (4) showing an example of the operation of the lifting mechanism according to the first example. [Figure 8] FIG. 5 is a cross-sectional view (5) showing an example of the operation of the lifting mechanism according to the first example. [Figure 9] FIG. 10 is a cross-sectional view (1) showing another example of the operation of the lifting mechanism according to the first example. [Figure 10] FIG. 10 is a cross-sectional view (2) showing another example of the operation of the lifting mechanism according to the first example. [Figure 11] FIG. 10 is a cross-sectional view (3) showing another example of the operation of the lifting mechanism according to the first example. [Figure 12] FIG. 10 is a cross-sectional view (4) showing another example of the operation of the lifting mechanism according to the first example. [Figure 13] FIG. 5 is a cross-sectional view (5) showing another example of the operation of the lifting mechanism according to the first example. [Figure 14] FIG. 10 is a cross-sectional view showing a lifting mechanism according to a second example. [Figure 15] 10 is a cross-sectional view (1) showing an example of the operation of the lifting mechanism according to the second example. FIG. [Figure 16] FIG. 10 is a cross-sectional view (2) showing an example of the operation of the lifting mechanism according to the second example. [Figure 17] FIG. 10 is a cross-sectional view (3) showing an example of the operation of the lifting mechanism according to the second example. [Figure 18] FIG. 4 is a cross-sectional view (4) showing an example of the operation of the lifting mechanism according to the second example. [Figure 19]FIG. 5 is a cross-sectional view (5) showing an example of the operation of the lifting mechanism according to the second example. [Figure 20] FIG. 1 is a cross-sectional view (1) showing a substrate processing apparatus according to a second embodiment. [Figure 21] FIG. 10 is a cross-sectional view (2) showing the substrate processing apparatus according to the second embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0008] Hereinafter, non-limiting exemplary embodiments of the present disclosure will be described with reference to the accompanying drawings. In all the accompanying drawings, the same or corresponding reference numerals are used to designate the same or corresponding members or components, and redundant descriptions will be omitted.

[0009] [First embodiment] (Substrate processing equipment) A substrate processing apparatus 100 according to a first embodiment will be described with reference to Figures 1 and 2. Figures 1 and 2 are cross-sectional views showing the substrate processing apparatus 100 according to the first embodiment. Figure 1 shows a state in which the substrate holder WB is in a processing position. Figure 2 shows a state in which the substrate holder WB is in a transfer position.

[0010] The substrate processing apparatus 100 includes a processing chamber 110 , a load lock chamber 120 , a substrate transfer chamber 160 , and a control unit 190 .

[0011] The processing chamber 110 can depressurize its interior. The processing chamber 110 can accommodate a substrate holder WB therein. The substrate holder WB holds multiple substrates W in a shelf-like manner. The substrates W are, for example, semiconductor wafers. Although five substrates W are shown in FIGS. 1 and 2, the number of substrates W is not limited. In the processing chamber 110, multiple substrates W held by the substrate holder WB are processed simultaneously. A load / unload port 110a is provided at the bottom of the processing chamber 110 for loading and unloading the substrate holder WB. The processing chamber 110 is provided with a gas nozzle 111, an exhaust device 112, and a heater 113.

[0012] The gas nozzle 111 is provided around the substrate holder WB located in the processing chamber 110. The gas nozzle 111 discharges processing gas from the gas source GS1 from around the substrate holder WB located in the processing chamber 110 toward the substrate holder WB and the substrate W. The processing gas may be selected depending on the type of processing. The number of gas nozzles 111 may be one or more.

[0013] The exhaust device 112 reduces the pressure inside the processing chamber 110 by evacuating the processing chamber 110. The exhaust device 112 includes, for example, a vacuum pump and a pressure control valve. The exhaust device 112 controls the pressure inside the processing chamber 110 to a predetermined pressure by adjusting the opening of the pressure control valve while evacuating the processing chamber 110 with the vacuum pump. The predetermined pressure may be set depending on the type of processing.

[0014] The heater 113 is provided in the process chamber 110. The heater 113 may be provided around the substrate holder WB located in the process chamber 110. The heater 113 heats the substrate holder WB and the substrate W to a predetermined temperature from the periphery of the substrate holder WB located in the process chamber 110. The predetermined temperature may be set depending on the type of process.

[0015] The load lock chamber 120 is located below the processing chamber 110. The load lock chamber 120 can be depressurized. The load lock chamber 120 can accommodate a substrate holder WB therein. An inlet / outlet 120a is provided at the top of the load lock chamber 120 for loading and unloading the substrate holder WB. The load lock chamber 120 communicates with the processing chamber 110 via the inlet / outlet 110a and the inlet / outlet 120a. The substrate holder WB is loaded from the load lock chamber 120 into the processing chamber 110 via the inlet / outlet 110a and the inlet / outlet 120a. The substrate holder WB is unloaded from the processing chamber 110 into the load lock chamber 120 via the inlet / outlet 110a and the inlet / outlet 120a. Inside the load lock chamber 120, the substrate W is loaded into the substrate holder WB and unloaded from the substrate holder WB. A load / unload port 120b for loading and unloading a substrate W is provided on a side wall of the load lock chamber 120 on the negative side in the X-axis direction. The substrate W is loaded from the substrate transfer chamber 160 into the load lock chamber 120 through the load / unload port 120b. The substrate W is unloaded from the load lock chamber 120 into the substrate transfer chamber 160 through the load / unload port 120b. An exhaust device 126 and an elevating mechanism 300 are provided in the load lock chamber 120.

[0016] The exhaust device 126 reduces the pressure inside the load lock chamber 120 by evacuating the inside of the load lock chamber 120. The exhaust device 126 includes, for example, a vacuum pump and a pressure control valve. The exhaust device 126 controls the inside of the load lock chamber 120 to a predetermined pressure by adjusting the opening of the pressure control valve while evacuating the inside of the load lock chamber 120 with the vacuum pump. The predetermined pressure may be the same as the pressure inside the processing chamber 110.

[0017] The lifting mechanism 300 is configured to lift and move the substrate holder WB between a processing position (see FIG. 1) and a transfer position (see FIG. 2). The processing position may be a position where the substrate holder WB is entirely housed in the processing chamber 110 and the lid 311 airtightly closes the loading / unloading opening 110a and the loading / unloading opening 120a. The transfer position may be a position directly below the processing position where the substrate holder WB is entirely housed in the load lock chamber 120. The transfer position may be a position where a part of the substrate holder WB faces the loading / unloading opening 120b.

[0018] The lifting mechanism 300 includes a support portion 310 , a lifting portion 320 , a first flange 330 , a second flange 340 , an inner bellows 350 , and an outer bellows 360 .

[0019] The support part 310 supports the substrate holder WB and includes a cover 311, a seal member 312, a rotation axis 313, a support arm 314, and a shaft 315.

[0020] When the substrate holder WB is positioned in the processing chamber 110, the lid 311 airtightly closes the loading / unloading port 110a and the loading / unloading port 120a using a sealing member 312. This airtightly seals the processing chamber 110. The sealing member 312 is, for example, an O-ring. A through-hole that vertically penetrates the lid 311 is provided in the center of the lid 311. A rotating shaft 313 is inserted into the through-hole. The gap between the lid 311 and the rotating shaft 313 is sealed by a magnetic fluid seal. The rotating shaft 313 supports the substrate holder WB rotatably around a vertical axis M11. One end of a support arm 314 is fixed to the lower part of the rotating shaft 313. The support arm 314 supports the rotating shaft 313. A shaft 315 is fixed to the other end of the support arm 314. The shaft 315 can extend above the load lock chamber 120 through the ceiling of the load lock chamber 120 .

[0021] The lifting / lowering unit 320 is connected to the support unit 310. The lifting / lowering unit 320 moves the substrate holder WB up and down between the processing position and the transfer position by raising and lowering the support unit 310 between an upper end position and a lower end position. For example, the lifting / lowering unit 320 lifts the support unit 310 from the lower end position to the upper end position to transport the substrate holder WB from the transfer position to the processing position. For example, the lifting / lowering unit 320 lowers the support unit 310 from the upper end position to the lower end position to transport the substrate holder WB from the processing position to the transfer position.

[0022] 1, the upper end position is a position where the length of the inner bellows 350 is shorter than the length of the outer bellows 360. The upper end position may be a position where the length of the inner bellows 350 is minimum and the length of the outer bellows 360 is maximum. The upper end position may be a position where the upper surface of the shaft 315 is at a height between the first flange 330 and the second flange 340. The upper end position may be a position where the upper surface of the shaft 315 is higher than the ceiling of the load lock chamber 120.

[0023] 2, the lower end position is a position where the length of the inner bellows 350 is longer than the length of the outer bellows 360. The lower end position may be a position where the length of the inner bellows 350 is maximum and the length of the outer bellows 360 is minimum. The lower end position may be a position where the upper surface of the shaft 315 is lower than the second flange 340. The lower end position may be a position where the upper surface of the shaft 315 is lower than the ceiling of the load lock chamber 120.

[0024] The lifting / lowering unit 320 may be extendable. In this case, it is possible to prevent the lifting / lowering unit 320 from jumping out above the ceiling of the processing chamber 110. The lifting / lowering unit 320 lifts the support unit 310 by contracting. The lifting / lowering unit 320 lowers the support unit 310 by extending.

[0025] The first flange 330 is provided above the shaft 315. The first flange 330 has a circular plate shape. The height position of the first flange 330 is variable.

[0026] The second flange 340 is provided below the first flange 330. The second flange 340 has a circular plate shape. The height position of the second flange 340 is fixed. The second flange 340 may be fixed to the ceiling of the load lock chamber 120.

[0027] The inner bellows 350 has an expandable and contractible bellows cylindrical shape. The inner bellows 350 connects the shaft 315 and the first flange 330 in an expandable and contractible manner. The inner bellows 350 expands and contracts as the support part 310 moves up and down. The inner bellows 350 contracts when the support part 310 is raised, and expands when the support part 310 is lowered. The inner bellows 350 is an example of a first expandable part.

[0028] The outer bellows 360 has an expandable and contractible bellows-like shape. The outer bellows 360 is provided around the inner bellows 350. The outer bellows 360 connects the first flange 330 and the second flange 340 in an expandable and contractible manner. The outer bellows 360 expands and contracts as the support portion 310 moves up and down. The outer bellows 360 expands when the support portion 310 is raised and contracts when the support portion 310 is lowered. In other words, the expansion and contraction direction of the outer bellows 360 when the support portion 310 is raised and lowered is opposite to that of the inner bellows 350. This configuration can save space. The central axis of the outer bellows 360 may coincide with the central axis of the inner bellows 350. The inner diameter of the outer bellows 360 may be larger than the outer diameter of the inner bellows 350. The inner bellows 350 and the outer bellows 360 airtightly separate the internal space and the external space of the load lock chamber 120. By providing the inner bellows 350 and the outer bellows 360, the support part 310 can be raised and lowered while maintaining the airtightness inside the load lock chamber 120. The outer bellows 360 is an example of a second expandable part.

[0029] The substrate transfer chamber 160 is connected to the negative side of the load lock chamber 120 in the X-axis direction. The substrate transfer chamber 160 is capable of depressurizing its interior. A substrate transfer robot 161 is provided in the substrate transfer chamber 160. An exhaust device may be provided in the substrate transfer chamber 160.

[0030] The substrate transfer robot 161 is provided in the substrate transfer chamber 160. The substrate transfer robot 161 loads the substrate W into the substrate holder WB at the transfer position through the loading / unloading opening 120b. The substrate transfer robot 161 unloads the substrate W held by the substrate holder WB at the transfer position through the loading / unloading opening 120b. The substrate transfer robot 161 may include a horizontal articulated arm.

[0031] The control unit 190 is an electronic circuit such as a CPU (Central Processing Unit), FPGA (Field Programmable Gate Array), ASIC (Application Specific Integrated Circuit), etc. The control unit 190 executes various control operations described in this specification by executing instruction codes stored in a memory or by being a circuit designed for a specific application.

[0032] As described above, according to the first embodiment, the lifting mechanism 300 includes the support part 310, the lifting part 320, the inner bellows 350, and the outer bellows 360. The support part 310 supports the substrate holder WB. The lifting part 320 is connected to the support part 310 and raises and lowers the support part 310. The inner bellows 350 expands and contracts as the support part 310 rises and lowers. The outer bellows 360 expands and contracts as the support part 310 rises and lowers, and the direction of expansion and contraction when raising and lowering the support part 310 is opposite to that of the inner bellows 350. In this case, when the support part 310 is at its lowermost position, the upper surface of the support part 310 is positioned below the ceiling of the load lock chamber 120. Therefore, the height by which the upper surface of the support part 310 protrudes above the ceiling of the load lock chamber 120 when the support part 310 rises to its uppermost position is reduced. This allows the upper surface of the support portion 310 to be positioned lower than the ceiling portion of the processing chamber 110. As a result, the height of the substrate processing apparatus 100 can be reduced.

[0033] [Lifting mechanism] (Example 1) A first example of a lifting mechanism 400 will be described with reference to Fig. 3. Fig. 3 is a cross-sectional view showing the first example of the lifting mechanism 400. The lifting mechanism 400 can be applied as the lifting mechanism 300 included in the substrate processing apparatus 100.

[0034] The lifting mechanism 400 includes a support section 410 , a first lifting section 420 , a second lifting section 430 , a transmission section 440 , an inner bellows 450 , and an outer bellows 460 .

[0035] The support part 410 supports the substrate holder WB. The support part 410 has a cover 411, a seal member 412, a rotating shaft 413, a support arm 414, and a shaft 415. The cover 411, the seal member 412, the rotating shaft 413, the support arm 414, and the shaft 415 may have the same configurations as the cover 311, the seal member 312, the rotating shaft 313, the support arm 314, and the shaft 315, respectively.

[0036] The first lifting unit 420 lifts and lowers the support unit 410. The first lifting unit 420 has a first screw shaft 421, a first nut 422, and a first guide rail 423.

[0037] The first screw shaft 421 extends vertically and is rotatably supported by a first bearing 442.

[0038] The first nut 422 is threadedly engaged with the first screw shaft 421 so as to be able to move up and down. The first nut 422 moves up and down along the first screw shaft 421 as the first screw shaft 421 rotates. The first nut 422 converts the rotational motion of the first screw shaft 421 into linear motion. The shaft 415 is fixed to the first nut 422. The portion where the first screw shaft 421 and the first nut 422 are threadedly engaged may include a ball screw mechanism.

[0039] The first guide rail 423 is provided in parallel with the first screw shaft 421. The first guide rail 423 guides the up and down movement of the shaft 415. The number of first guide rails 423 is not limited, but is, for example, two.

[0040] The second lifting unit 430 lifts and lowers the first lifting unit 420. The second lifting unit 430 has a second screw shaft 431, a second nut 432, a second guide rail 433, and a second motor 434.

[0041] The second screw shaft 431 is provided in parallel to the first screw shaft 421. The second screw shaft 431 is rotatably supported by a second bearing 443.

[0042] The second nut 432 is threadedly engaged with the second screw shaft 431 so as to be movable up and down. The second nut 432 moves up and down along the second screw shaft 431 as the second screw shaft 431 rotates. The second nut 432 converts the rotational motion of the second screw shaft 431 into linear motion. The portion where the second screw shaft 431 and the second nut 432 are threadedly engaged may include a ball screw mechanism.

[0043] The second guide rail 433 is provided in parallel to the second screw shaft 431. The second guide rail 433 guides the vertical movement of the bracket 441. The number of second guide rails 433 is not limited, but may be one, for example.

[0044] The second motor 434 applies a driving force to the second screw shaft 431 to rotate the second screw shaft 431. The second motor 434 may be connected to the lower end of the second screw shaft 431.

[0045] The transmission unit 440 transmits the driving force of the second lifting unit 430 to the first lifting unit 420. The transmission unit 440 has a bracket 441, a first bearing 442, a second bearing 443, a first timing pulley 444, a second timing pulley 445, and a timing belt 446.

[0046] The bracket 441 supports the upper end of the first guide rail 423. A first bearing 442 and a second bearing 443 are fixed to the bracket 441. The first bearing 442 rotatably supports the first screwed shaft 421. The second bearing 443 rotatably supports the second nut 432. The first timing pulley 444 is fixed to the upper end of the first screwed shaft 421 and rotates integrally with the first screwed shaft 421. The second timing pulley 445 is fixed to the second nut 432 and rotates integrally with the second nut 432. The timing belt 446 meshes with the first timing pulley 444 and the second timing pulley 445 and transmits rotational force between the first timing pulley 444 and the second timing pulley 445.

[0047] The inner bellows 450 has an expandable and contractible bellows cylindrical shape. The inner bellows 450 connects the shaft 415 and the outer bellows 460 in an expandable and contractible manner. The inner bellows 450 and the outer bellows 460 are connected at their upper parts. The portion where the inner bellows 450 and the outer bellows 460 are connected functions as a first flange. The inner bellows 450 expands and contracts as the support part 410 moves up and down. The inner bellows 450 contracts when the support part 410 is raised, and expands when the support part 410 is lowered. The inner bellows 450 is an example of a first expandable part.

[0048] The outer bellows 460 has an expandable and contractible bellows cylindrical shape. The outer bellows 460 is provided around the inner bellows 450. The outer bellows 460 connects the inner bellows 450 and the base plate 470 in an expandable and contractible manner. The outer bellows 460 is connected to the base plate 470 at its lower part. The portion where the outer bellows 460 and the base plate 470 are connected functions as a second flange. The outer bellows 460 expands and contracts as the support unit 410 moves up and down. The outer bellows 460 expands when the support unit 410 is raised and contracts when the support unit 410 is lowered. In other words, the expansion and contraction direction of the outer bellows 460 when the support unit 410 is raised and lowered is opposite to that of the inner bellows 450. The central axis of the outer bellows 460 may coincide with the central axis of the inner bellows 450. The inner diameter of the outer bellows 460 may be larger than the outer diameter of the inner bellows 450. The inner bellows 450 and the outer bellows 460 airtightly separate the internal space and the external space of the load lock chamber 120. By providing the inner bellows 450 and the outer bellows 460, the support part 410 can be raised and lowered while maintaining the airtightness inside the load lock chamber 120. The outer bellows 460 is an example of a second expandable part.

[0049] The lifting mechanism 400 is configured so that the torque for lifting and lowering the first nut 422 relative to the first screw shaft 421 is different from the torque for lifting and lowering the second nut 432 relative to the second screw shaft 431. Hereinafter, the torque for lifting and lowering the first nut 422 relative to the first screw shaft 421 will be referred to as a first torque, and the torque for lifting and lowering the second nut 432 relative to the second screw shaft 431 will be referred to as a second torque.

[0050] For example, the first torque and the second torque can be configured to be different from each other by making the lead of the first screw shaft 421 different from the lead of the second screw shaft 431. For example, the first torque and the second torque can be configured to be different from each other by making the outer diameter of the first timing pulley 444 different from the outer diameter of the second timing pulley 445. For example, the first torque and the second torque can be configured to be different from each other by making the number of teeth of the first timing pulley 444 different from the number of teeth of the second timing pulley 445.

[0051] The lifting mechanism 400 is configured, for example, so that the second torque is greater than the first torque. For example, the second torque can be made greater than the first torque by making the lead of the second screw shaft 431 greater than the lead of the first screw shaft 421. For example, the second torque can be made greater than the first torque by making the outer diameter of the second timing pulley 445 greater than the outer diameter of the first timing pulley 444. For example, the second torque can be made greater than the first torque by making the number of teeth of the second timing pulley 445 greater than the number of teeth of the first timing pulley 444.

[0052] The lifting mechanism 400 is configured, for example, so that the second torque is smaller than the first torque. For example, the second torque can be made smaller than the first torque by making the lead of the second screw shaft 431 smaller than the lead of the first screw shaft 421. For example, the second torque can be made smaller than the first torque by making the outer diameter of the second timing pulley 445 smaller than the outer diameter of the first timing pulley 444. For example, the second torque can be made smaller than the first torque by making the number of teeth of the second timing pulley 445 smaller than the number of teeth of the first timing pulley 444.

[0053] An example of the operation of the lifting mechanism 400 according to the first example will be described with reference to Figures 4 to 8. Figures 4 to 8 are cross-sectional views showing an example of the operation of the lifting mechanism 400 according to the first example. Below, an operation will be described in which, when the second torque is greater than the first torque, the support part 410 is first raised from the lower end position to the upper end position, and then the support part 410 is lowered from the upper end position to the lower end position.

[0054] 4 shows a state in which the support portion 410 is in the lowest position. As shown in FIG. 4, when the support portion 410 is in the lowest position, the length of the inner bellows 450 is longer than the length of the outer bellows 460.

[0055] As shown in FIG. 4 , the second motor 434 rotates the second screw shaft 431 in the first direction. At this time, the second nut 432 rotates in the first direction together with the second screw shaft 431 because there is no restriction on the rotational direction. That is, when the second screw shaft 431 rotates, the second nut 432 rotates together. The second timing pulley 445 is fixed to the second nut 432. Therefore, when the second nut 432 rotates in the first direction, the second timing pulley 445 rotates integrally with the second nut 432 in the first direction. The timing belt 446 transmits the rotational force of the second timing pulley 445 to the first timing pulley 444. Therefore, when the second timing pulley 445 rotates in the first direction, the rotational force of the second timing pulley 445 is transmitted to the first timing pulley 444, causing the first timing pulley 444 to rotate in the first direction. The first timing pulley 444 is fixed to the first threaded shaft 421. Therefore, when the first timing pulley 444 rotates in the first direction, the first threaded shaft 421 rotates integrally with the first timing pulley 444 in the first direction. When the first threaded shaft 421 rotates in the first direction, the first nut 422 starts to rise along the first threaded shaft 421. A shaft 415 is fixed to the first nut 422. Therefore, when the first nut 422 starts to rise along the first threaded shaft 421, the support part 410 including the shaft 415 starts to rise.

[0056] Fig. 5 shows a state in which support part 410 is in a first intermediate position midway up from the lower end position to the upper end position. Shaft 415 is not shown in Fig. 5. As shown in Fig. 5, when support part 410 is in the first intermediate position, the length of inner bellows 450 is the same as the length of outer bellows 460.

[0057] 5, when the first nut 422 rises to the upper end of the first screw shaft 421, the first screw shaft 421 cannot rotate any further. Therefore, the second nut 432 is restricted in the rotational direction, and the second nut 432 rises along the second screw shaft 431. As a result, the bracket 441, the first lifting unit 420, and the support unit 410 rise.

[0058] Fig. 6 shows a state in which the support part 410 is at the upper end position. The shaft 415 is not shown in Fig. 6. As shown in Fig. 6, when the support part 410 is at the upper end position, the length of the inner bellows 450 is shorter than the length of the outer bellows 460.

[0059] As shown in FIG. 6, when the second nut 432 rises to the upper end of the second screw shaft 431, the bracket 441, the first lifting section 420 and the support section 410 rise, and the support section 410 reaches the upper end position.

[0060] As shown in FIG. 6 , the second motor 434 rotates the second screw shaft 431 in a second direction. The second direction is opposite to the first direction. At this time, the second nut 432 rotates together with the second screw shaft 431 in the second direction because there is no restriction on the rotational direction. That is, when the second screw shaft 431 rotates, the second nut 432 rotates together. The second timing pulley 445 is fixed to the second nut 432. Therefore, when the second nut 432 rotates in the second direction, the second timing pulley 445 rotates integrally with the second nut 432 in the second direction. The timing belt 446 transmits the rotational force of the second timing pulley 445 to the first timing pulley 444. Therefore, when the second timing pulley 445 rotates in the second direction, the rotational force of the second timing pulley 445 is transmitted to the first timing pulley 444, causing the first timing pulley 444 to rotate in the second direction. The first timing pulley 444 is fixed to the first threaded shaft 421. Therefore, when the first timing pulley 444 rotates in the second direction, the first threaded shaft 421 rotates integrally with the first timing pulley 444 in the second direction. When the first threaded shaft 421 rotates in the second direction, the first nut 422 starts to descend along the first threaded shaft 421. A shaft 415 is fixed to the first nut 422. Therefore, when the first nut 422 starts to descend along the first threaded shaft 421, the support part 410 including the shaft 415 starts to descend.

[0061] 7 shows a state in which support part 410 is in a second intermediate position midway down from the upper end position to the lower end position. As shown in Fig. 7, when support part 410 is in the second intermediate position, the length of inner bellows 450 is the same as the length of outer bellows 460. The lengths of inner bellows 450 and outer bellows 460 when support part 410 is in the second intermediate position are longer than the lengths of inner bellows 450 and outer bellows 460 when support part 410 is in the first intermediate position.

[0062] 7, when the first nut 422 descends to the lower end of the first screw shaft 421, the first screw shaft 421 cannot rotate any further. Therefore, the second nut 432 is restricted in the rotational direction, and the second nut 432 starts to descend along the second screw shaft 431. As a result, the bracket 441, the first lifting unit 420, and the support unit 410 start to descend.

[0063] 8 shows a state in which the support portion 410 is at the lowest position. As shown in FIG. 8, when the support portion 410 is at the lowest position, the length of the inner bellows 450 is longer than the length of the outer bellows 460.

[0064] As shown in FIG. 8, when the second nut 432 descends to the lower end of the second screw shaft 431, the bracket 441, the first lifting section 420 and the support section 410 descend, and the support section 410 reaches the lower end position.

[0065] As described above, according to one example of the operation of the lifting mechanism 400 according to the first example, the support part 410 can be raised and lowered between the upper end position and the lower end position by the driving force applied by the second motor 434. In this case, only one motor is required, which reduces costs.

[0066] 9 to 13, another example of the operation of the lifting mechanism 400 according to the first example will be described. Figures 9 to 13 are cross-sectional views showing another example of the operation of the lifting mechanism 400 according to the first example. Below, an operation will be described in which, when the second torque is smaller than the first torque, the support part 410 is first raised from the lower end position to the upper end position, and then the support part 410 is lowered from the upper end position to the lower end position.

[0067] 9 shows a state in which the support portion 410 is at the lowest position. As shown in FIG. 9, when the support portion 410 is at the lowest position, the length of the inner bellows 450 is longer than the length of the outer bellows 460.

[0068] As shown in FIG. 9, the second motor 434 rotates the second screw shaft 431 in a first direction. At this time, the second nut 432 is not constrained in the rotational direction, but the second torque is smaller than the first torque. Therefore, the second nut 432 does not rotate together with the second screw shaft 431, but rises along the second screw shaft 431. In other words, when the second screw shaft 431 rotates, the second nut 432 rises along the second screw shaft 431 without co-rotating. As a result, the bracket 441, the first lifting unit 420, and the support unit 410 rise.

[0069] 10 shows a state in which the support part 410 is in a third intermediate position, which is midway up from the lower end position to the upper end position. As shown in FIG. 10, when the support part 410 is in the third intermediate position, the length of the inner bellows 450 is the same as the length of the outer bellows 460.

[0070] As shown in FIG. 10 , when the second nut 432 reaches the upper end of the second screw shaft 431, the second nut 432 cannot rise any further and therefore rotates together with the second screw shaft 431 in the first direction. That is, when the second screw shaft 431 rotates, the second nut 432 rotates together. The second timing pulley 445 is fixed to the second nut 432. Therefore, when the second nut 432 rotates in the first direction, the second timing pulley 445 rotates integrally with the second nut 432 in the first direction. The timing belt 446 transmits the rotational force of the second timing pulley 445 to the first timing pulley 444. Therefore, when the second timing pulley 445 rotates in the first direction, the rotational force of the second timing pulley 445 is transmitted to the first timing pulley 444, causing the first timing pulley 444 to rotate in the first direction. The first timing pulley 444 is fixed to the first screw shaft 421. Therefore, when the first timing pulley 444 rotates in the first direction, the first threaded shaft 421 rotates in the first direction integrally with the first timing pulley 444. When the first threaded shaft 421 rotates in the first direction, the first nut 422 starts to rise along the first threaded shaft 421. The shaft 415 is fixed to the first nut 422. Therefore, when the first nut 422 starts to rise along the first threaded shaft 421, the support part 410 including the shaft 415 starts to rise.

[0071] Fig. 11 shows a state in which the support part 410 is at the upper end position. The shaft 415 is not shown in Fig. 11. As shown in Fig. 11, when the support part 410 is at the upper end position, the length of the inner bellows 450 is shorter than the length of the outer bellows 460.

[0072] As shown in FIG. 11, when the first nut 422 rises to the upper end of the first screw shaft 421, the support part 410 including the shaft 415 reaches the upper end position.

[0073] As shown in FIG. 11 , the second motor 434 rotates the second screw shaft 431 in a second direction. The second direction is opposite to the first direction. At this time, the second nut 432 is not constrained in the rotational direction, but the second torque is smaller than the first torque. Therefore, the second nut 432 does not rotate together with the second screw shaft 431, but descends along the second screw shaft 431. In other words, when the second screw shaft 431 rotates, the second nut 432 does not rotate co-rotatingly, but descends along the second screw shaft 431. As a result, the bracket 441, the first lifting unit 420, and the support unit 410 descend.

[0074] 12 shows a state in which support part 410 is in a fourth intermediate position midway down from the upper end position to the lower end position. As shown in Fig. 12, when support part 410 is in the fourth intermediate position, the length of inner bellows 450 is the same as the length of outer bellows 460. The lengths of inner bellows 450 and outer bellows 460 when support part 410 is in the fourth intermediate position are shorter than the lengths of inner bellows 450 and outer bellows 460 when support part 410 is in the third intermediate position.

[0075] As shown in FIG. 12 , when the second nut 432 descends to the lower end of the second screw shaft 431, the second nut 432 cannot descend any further and therefore rotates together with the second screw shaft 431 in the second direction. That is, when the second screw shaft 431 rotates, the second nut 432 rotates together. The second timing pulley 445 is fixed to the second nut 432. Therefore, when the second nut 432 rotates in the second direction, the second timing pulley 445 rotates integrally with the second nut 432 in the second direction. The timing belt 446 transmits the rotational force of the second timing pulley 445 to the first timing pulley 444. Therefore, when the second timing pulley 445 rotates in the second direction, the rotational force of the second timing pulley 445 is transmitted to the first timing pulley 444, causing the first timing pulley 444 to rotate in the second direction. The first timing pulley 444 is fixed to the first screw shaft 421. Therefore, when the first timing pulley 444 rotates in the second direction, the first threaded shaft 421 rotates in the second direction integrally with the first timing pulley 444. When the first threaded shaft 421 rotates in the second direction, the first nut 422 starts to descend along the first threaded shaft 421. The shaft 415 is fixed to the first nut 422. Therefore, when the first nut 422 starts to descend along the first threaded shaft 421, the support part 410 including the shaft 415 starts to descend.

[0076] 13 shows a state in which the support portion 410 is at the lowest position. As shown in FIG. 13, when the support portion 410 is at the lowest position, the length of the inner bellows 450 is longer than the length of the outer bellows 460.

[0077] As shown in FIG. 13, when the first nut 422 descends to the lower end of the first screw shaft 421, the support portion 410 reaches the lower end position.

[0078] As described above, according to another example of the operation of the lifting mechanism 400 of the first example, the support portion 410 can be raised and lowered between an upper end position and a lower end position by the driving force applied by the second motor 434.

[0079] (Example 2) A lifting mechanism 500 according to a second example will be described with reference to Fig. 14. Fig. 14 is a cross-sectional view showing the lifting mechanism 500 according to the second example. The lifting mechanism 500 can be applied as the lifting mechanism 300 provided in the substrate processing apparatus 100. The lifting mechanism 500 differs from the lifting mechanism 400 in that it has a first lifting section 520 and a second lifting section 530 that are driven independently of each other.

[0080] The lifting mechanism 500 includes a support portion 510 , a first lifting portion 520 , a second lifting portion 530 , a connection portion 540 , an inner bellows 550 , and an outer bellows 560 .

[0081] The support part 510 supports the substrate holder WB. The support part 510 has a cover 511, a seal member 512, a rotating shaft 513, a support arm 514, and a shaft 515. The cover 511, the seal member 512, the rotating shaft 513, the support arm 514, and the shaft 515 may have the same configurations as the cover 411, the seal member 412, the rotating shaft 413, the support arm 414, and the shaft 415, respectively.

[0082] The first lifting unit 520 lifts and lowers the support unit 510. The first lifting unit 520 has a first screw shaft 521, a first nut 522, a first guide rail 523, and a first motor 524. The first screw shaft 521, the first nut 522, and the first guide rail 523 may have the same configurations as the first screw shaft 421, the first nut 422, and the first guide rail 423, respectively.

[0083] The first motor 524 applies a driving force to the first screw shaft 521 to rotate the first screw shaft 521. The first motor 524 may be connected to the upper end of the first screw shaft 521.

[0084] The second lifting unit 530 lifts and lowers the first lifting unit 520. The second lifting unit 530 has a second screw shaft 531, a second nut 532, a second guide rail 533, and a second motor 534. The second screw shaft 531, the second nut 532, the second guide rail 533, and the second motor 534 may have the same configurations as the second screw shaft 431, the second nut 432, the second guide rail 433, and the second motor 434, respectively.

[0085] The connecting portion 540 has a bracket 541, a first bearing 542, and a second bearing 543. The bracket 541, the first bearing 542, and the second bearing 543 may have the same configuration as the bracket 441, the first bearing 442, and the second bearing 443, respectively.

[0086] The inner bellows 550 and the outer bellows 560 may have the same configuration as the inner bellows 450 and the outer bellows 460, respectively. The outer bellows 560 connects the inner bellows 550 and the base plate 570 in an expandable and contractible manner.

[0087] 15 to 19, an example of the operation of the lifting mechanism 500 according to the second example will be described. Figures 15 to 19 are cross-sectional views showing an example of the operation of the lifting mechanism 500 according to the second example. Below, an operation will be described in which the support part 510 is first raised from the lower end position to the upper end position, and then the support part 510 is lowered from the upper end position to the lower end position.

[0088] 15 shows a state in which the support portion 510 is at the lowest position. As shown in FIG. 15, when the support portion 510 is at the lowest position, the length of the inner bellows 550 is longer than the length of the outer bellows 560.

[0089] 15, the first motor 524 rotates the first screw shaft 521 in a first direction. As a result, the first nut 522 starts to rise along the first screw shaft 521. The shaft 515 is fixed to the first nut 522. Therefore, when the first nut 522 starts to rise along the first screw shaft 521, the support part 510 including the shaft 515 starts to rise.

[0090] 16 shows a state in which support part 510 is in a first intermediate position midway up from the lower end position to the upper end position. Shaft 515 is not shown in Fig. 16. As shown in Fig. 16, when support part 510 is in the first intermediate position, the length of inner bellows 550 is the same as the length of outer bellows 560.

[0091] As shown in FIG. 16, when the first nut 522 rises to the upper end of the first screw shaft 521, the first motor 524 stops the rotation of the first screw shaft 521.

[0092] 16, the second motor 534 rotates the second screw shaft 531 in the first direction. As a result, the second nut 532 starts to rise along the second screw shaft 531. As a result, the bracket 541, the first lifting unit 520, and the support unit 510 rise. When the second nut 532 rises to the upper end of the second screw shaft 531, the second motor 534 stops the rotation of the second screw shaft 531.

[0093] Fig. 17 shows a state in which support portion 510 is at the upper end position. Shaft 515 is not shown in Fig. 17. As shown in Fig. 17, when support portion 510 is at the upper end position, the length of inner bellows 550 is shorter than the length of outer bellows 560.

[0094] As shown in FIG. 17, when the second nut 532 rises to the upper end of the second screw shaft 531, the support part 510 reaches the upper end position.

[0095] 17, the first motor 524 rotates the first screw shaft 521 in a second direction. The second direction is opposite to the first direction. As a result, the first nut 522 starts to descend along the first screw shaft 521. The shaft 515 is fixed to the first nut 522. Therefore, when the first nut 522 starts to descend along the first screw shaft 521, the support part 510 including the shaft 515 starts to descend.

[0096] 18 shows a state in which support part 510 is in a second intermediate position midway down from the upper end position to the lower end position. As shown in Fig. 18, when support part 510 is in the second intermediate position, the length of inner bellows 550 is the same as the length of outer bellows 560. The lengths of inner bellows 550 and outer bellows 560 when support part 510 is in the second intermediate position are longer than the lengths of inner bellows 550 and outer bellows 560 when support part 510 is in the first intermediate position.

[0097] As shown in FIG. 18, when the first nut 522 descends to the lower end of the first screw shaft 521, the first motor 524 stops the rotation of the first screw shaft 521.

[0098] 18, when the first nut 522 descends to the lower end of the first screwed shaft 521, the second motor 534 rotates the second screwed shaft 531 in the second direction. As a result, the second nut 532 starts to descend along the second screwed shaft 531. When the second nut 532 starts to descend along the second screwed shaft 531, the bracket 541, the first lifting unit 520, and the support unit 510 also start to descend. When the second nut 532 descends to the lower end of the second screwed shaft 531, the second motor 534 stops the rotation of the second screwed shaft 531.

[0099] 19 shows a state in which the support portion 510 is at the lowest position. As shown in FIG. 19, when the support portion 510 is at the lowest position, the length of the inner bellows 550 is longer than the length of the outer bellows 560.

[0100] As shown in FIG. 19, when the second nut 532 descends to the lower end of the second screw shaft 531, the support portion 510 reaches the lower end position.

[0101] As described above, according to an example of the operation of the lifting mechanism 500 of the second example, the support portion 510 can be raised and lowered between the upper end position and the lower end position by the driving forces applied by the first motor 524 and the second motor 534.

[0102] In the above embodiment, when the support unit 510 is raised from the lower end position to the upper end position, the first motor 524 first rotates the first screw shaft 521, and then the second motor 534 rotates the second screw shaft 531. However, this is not limiting. For example, when the support unit 510 is raised from the lower end position to the upper end position, the second motor 534 may first rotate the second screw shaft 531, and then the first motor 524 may rotate the first screw shaft 521. For example, when the support unit 510 is raised from the lower end position to the upper end position, the first motor 524 may rotate the first screw shaft 521, while the second motor 534 may rotate the second screw shaft 531.

[0103] In the above embodiment, when the support unit 510 is lowered from the upper end position to the lower end position, the first motor 524 first rotates the first screw shaft 521 and then the second motor 534 rotates the second screw shaft 531. However, this is not limiting. For example, when the support unit 510 is lowered from the upper end position to the lower end position, the second motor 534 may first rotate the second screw shaft 531 and then the first motor 524 may rotate the first screw shaft 521. For example, when the support unit 510 is lowered from the upper end position to the lower end position, the first motor 524 may rotate the first screw shaft 521 while the second motor 534 rotates the second screw shaft 531.

[0104] Second Embodiment A substrate processing apparatus 200 according to a second embodiment will be described with reference to Figures 20 and 21. Figures 20 and 21 are cross-sectional views showing the substrate processing apparatus 200 according to the second embodiment. Figure 20 shows a state in which the substrate holder WB is in the processing position. Figure 21 shows a state in which the substrate holder WB is in the transfer position.

[0105] The substrate processing apparatus 200 includes a processing chamber 210 , a load lock chamber 220 , a substrate transfer chamber 260 , and a control unit 290 .

[0106] The processing chamber 210 may have the same configuration as the processing chamber 110. A loading / unloading port 210a for loading and unloading the substrate holder WB is provided at the bottom of the processing chamber 210. The processing chamber 210 is provided with a gas nozzle 211, an exhaust device 212, and a heater 213. The gas nozzle 211, the exhaust device 212, and the heater 213 may have the same configuration as the gas nozzle 111, the exhaust device 112, and the heater 113. The gas nozzle 211 discharges processing gas from a gas source GS2 from around the substrate holder WB located in the processing chamber 210 toward the substrate holder WB and the substrate W.

[0107] The load lock chamber 220 is located below the processing chamber 210. The load lock chamber 220 is capable of depressurizing its interior. The load lock chamber 220 is capable of accommodating a substrate holder WB therein. An inlet / outlet 220a is provided at the top of the load lock chamber 220 for loading and unloading the substrate holder WB. The load lock chamber 220 communicates with the processing chamber 210 via the inlet / outlet 210a and the inlet / outlet 220a. The substrate holder WB is loaded from the load lock chamber 220 into the processing chamber 210 via the inlet / outlet 210a and the inlet / outlet 220a. The substrate holder WB is unloaded from the processing chamber 210 into the load lock chamber 220 via the inlet / outlet 210a and the inlet / outlet 220a. In the load lock chamber 220, the substrate W is loaded into the substrate holder WB and unloaded from the substrate holder WB. A load / unload port 220b for loading and unloading a substrate W is provided on a side wall of the load lock chamber 220 on the negative side in the X-axis direction. The substrate W is loaded from the substrate transfer chamber 260 into the load lock chamber 220 through the load / unload port 220b. The substrate W is unloaded from the load lock chamber 220 into the substrate transfer chamber 260 through the load / unload port 220b. The load lock chamber 220 is provided with an exhaust device 226 and an elevating mechanism 600. The exhaust device 226 may have the same configuration as the exhaust device 126.

[0108] The lifting mechanism 600 is configured to lift and move the substrate holder WB between a processing position (see FIG. 20) and a transfer position (see FIG. 21). The processing position may be a position where the entire substrate holder WB is housed in the processing chamber 210 and the lid 611 airtightly closes the loading / unloading opening 210a and the loading / unloading opening 220a. The transfer position may be a position directly below the processing position where the entire substrate holder WB is housed in the load lock chamber 220. The transfer position may be a position where a part of the substrate holder WB faces the loading / unloading opening 220b.

[0109] The lifting mechanism 600 includes a support portion 610 , a lifting portion 620 , a first flange 630 , a second flange 640 , an inner bellows 650 , and an outer bellows 660 .

[0110] The support part 610 supports the substrate holder WB and includes a cover 611, a seal member 612, and a shaft 615.

[0111] When the substrate holder WB is positioned in the processing chamber 210, the lid 611 airtightly closes the loading / unloading port 210a and the loading / unloading port 220a using a sealing member 612. This airtightly seals the processing chamber 210. The sealing member 612 is, for example, an O-ring. A through-hole that penetrates the lid 611 vertically is provided in the center of the lid 611. A shaft 615 is inserted into the through-hole. The gap between the lid 611 and the shaft 615 is sealed by a magnetic fluid seal. The shaft 615 supports the substrate holder WB rotatably around a vertical axis M21. The shaft 615 can penetrate the bottom of the load lock chamber 220 and extend below the load lock chamber 220.

[0112] The lifting / lowering unit 620 is connected to the support unit 610. The lifting / lowering unit 620 lifts and lowers the support unit 610 between an upper end position and a lower end position, thereby moving the substrate holder WB up and down between the processing position and the transfer position. For example, the lifting / lowering unit 620 lifts the support unit 610 from the lower end position to the upper end position, thereby transporting the substrate holder WB from the transfer position to the processing position. For example, the lifting / lowering unit 620 lowers the support unit 610 from the upper end position to the lower end position, thereby transporting the substrate holder WB from the processing position to the transfer position.

[0113] 20 , the upper end position is a position where the length of the inner bellows 650 is longer than the length of the outer bellows 660. The upper end position may be a position where the length of the inner bellows 650 is maximum and the length of the outer bellows 660 is minimum. The upper end position may be a position where the lower surface of the shaft 615 is higher than the second flange 640. The upper end position may be a position where the lower surface of the shaft 615 is higher than the bottom of the load lock chamber 220.

[0114] 21 , the lower end position is a position where the length of the inner bellows 650 is shorter than the length of the outer bellows 660. The lower end position may be a position where the length of the inner bellows 650 is minimum and the length of the outer bellows 660 is maximum. The lower end position may be a position where the lower surface of the shaft 615 is at a height between the first flange 630 and the second flange 640. The lower end position may be a position where the lower surface of the shaft 615 is lower than the bottom of the load lock chamber 220.

[0115] The lifting / lowering unit 620 may be extendable. In this case, the amount by which the lifting / lowering unit 620 protrudes below the bottom of the load lock chamber 220 can be reduced. The lifting / lowering unit 620 lifts the support unit 610 by extending. The lifting / lowering unit 620 lowers the support unit 610 by contracting.

[0116] The first flange 630 is provided below the shaft 615. The first flange 630 has a circular plate shape. The height position of the first flange 630 is variable.

[0117] The second flange 640 is provided above the first flange 630. The second flange 640 has a circular plate shape. The height position of the second flange 640 is fixed. The second flange 640 may be fixed to the bottom of the load lock chamber 220.

[0118] The inner bellows 650 has an expandable and contractible bellows cylindrical shape. The inner bellows 650 connects the shaft 615 and the first flange 630 in an expandable and contractible manner. The inner bellows 650 expands and contracts as the support part 610 moves up and down. The inner bellows 650 expands when the support part 610 is raised, and contracts when the support part 610 is lowered. The inner bellows 650 is an example of a first expandable part.

[0119] The outer bellows 660 has an expandable and contractible bellows-like shape. The outer bellows 660 is provided around the inner bellows 650. The outer bellows 660 connects the first flange 630 and the second flange 640 in an expandable and contractible manner. The outer bellows 660 expands and contracts as the support portion 610 moves up and down. The outer bellows 660 contracts when the support portion 610 is raised and expands when the support portion 610 is lowered. In other words, the expansion and contraction direction of the outer bellows 660 when the support portion 610 is raised and lowered is opposite to that of the inner bellows 650. The central axis of the outer bellows 660 may coincide with the central axis of the inner bellows 650. The inner diameter of the outer bellows 660 may be larger than the outer diameter of the inner bellows 650. The inner bellows 650 and the outer bellows 660 airtightly separate the internal space and the external space of the load lock chamber 220. By providing the inner bellows 650 and the outer bellows 660, the support part 610 can be raised and lowered while maintaining airtightness inside the load lock chamber 220. The outer bellows 660 is an example of a second expandable part.

[0120] The substrate transfer chamber 260 may have the same configuration as the substrate transfer chamber 160. The substrate transfer chamber 260 is provided with a substrate transfer robot 261. The substrate transfer robot 261 may have the same configuration as the substrate transfer robot 161.

[0121] The control unit 290 may have the same configuration as the control unit 190.

[0122] As described above, according to the second embodiment, the lifting mechanism 600 includes the support portion 610, the lifting portion 620, the inner bellows 650, and the outer bellows 660. The support portion 610 supports the substrate holder WB. The lifting portion 620 is connected to the support portion 610 and raises and lowers the support portion 610. The inner bellows 650 expands and contracts as the support portion 610 rises and lowers. The outer bellows 660 expands and contracts as the support portion 610 rises and lowers, and the direction of expansion and contraction when raising and lowering the support portion 610 is opposite to that of the inner bellows 650. In this case, when the support portion 610 is at the upper end position, the lower surface of the support portion 610 is positioned above the bottom of the load lock chamber 220. Therefore, when the support portion 610 descends to the lower end position, the height by which the lower surface of the support portion 610 protrudes below the bottom of the load lock chamber 220 is reduced. As a result, the height of the substrate processing apparatus 200 can be reduced.

[0123] The embodiments disclosed herein should be considered to be illustrative in all respects and not restrictive, and the above-described embodiments may be omitted, substituted, or modified in various ways without departing from the scope and spirit of the appended claims. [Explanation of symbols]

[0124] 300 Lifting mechanism 310 Support part 320 Lifting section 350 inner bellows 360 outer bellows 400 Lifting mechanism 410 Support part 420 First lift section 430 Second lift section 450 inner bellows 460 Outer Bellows 500 Lifting mechanism 510 Support part 520 First lift section 530 Second lift section 550 inner bellows 560 Outer Bellows 600 Lifting mechanism 610 Support part 620 Lifting section 650 inner bellows 660 Outer Bellows W substrate WB board holder

Claims

1. A lifting mechanism for lifting and lowering a substrate holder that holds a plurality of substrates in a shelf-like manner, a support portion that supports the substrate holder; an elevator connected to the support and configured to raise and lower the support; A first expansion and contraction unit that expands and contracts in accordance with the elevation and lowering of the support unit; A second expansion and contraction unit that expands and contracts in accordance with the lifting and lowering of the support unit, and whose expansion and contraction direction when the support unit is lifted and lowered is opposite to that of the first expansion and contraction unit; A lifting mechanism having:

2. the lifting unit is configured to lift and lower the support unit between a first position and a second position; The first position is a position where the length of the first stretchable portion is shorter than the length of the second stretchable portion, The second position is a position where the length of the first stretchable portion is longer than the length of the second stretchable portion. The lifting mechanism according to claim 1 .

3. the first position is a position where the length of the first elastic portion is a minimum length and the length of the second elastic portion is a maximum length, The second position is a position where the length of the first stretchable portion is maximum and the length of the second stretchable portion is minimum. The lifting mechanism according to claim 2 .

4. The first position is higher than the second position. The lifting mechanism according to claim 2 .

5. The first position is lower than the second position. The lifting mechanism according to claim 2 .

6. a first flange whose height position is variable; a second flange whose height position is fixed; and the first extension / contraction portion connects the support portion and the first flange in an extendable and contractible manner; The second extension / contraction portion connects the first flange and the second flange in an extendable and contractible manner. The lifting mechanism according to any one of claims 1 to 5.

7. The second elastic portion is provided around the first elastic portion. The lifting mechanism according to claim 6.

8. The central axis of the second stretchable portion coincides with the central axis of the first stretchable portion. The lifting mechanism according to claim 6.

9. a substrate holder that holds a plurality of substrates in a shelf-like manner; a lifting mechanism for lifting and lowering the substrate holder; Equipped with The lifting mechanism includes: a support portion that supports the substrate holder; an elevator connected to the support and configured to raise and lower the support; A first expansion and contraction unit that expands and contracts in accordance with the elevation and lowering of the support unit; A second expansion and contraction unit that expands and contracts in accordance with the lifting and lowering of the support unit, and whose expansion and contraction direction when the support unit is lifted and lowered is opposite to that of the first expansion and contraction unit; having Substrate processing equipment.

10. A method for raising and lowering a substrate holder that holds a plurality of substrates in a shelf-like manner using a lifting mechanism, comprising: The lifting mechanism includes: a support portion that supports the substrate holder; an elevator connected to the support and configured to raise and lower the support; A first expansion and contraction unit that expands and contracts in accordance with the elevation and lowering of the support unit; A second expansion and contraction unit that expands and contracts in accordance with the lifting and lowering of the support unit, and whose expansion and contraction direction when the support unit is lifted and lowered is opposite to that of the first expansion and contraction unit; and The lifting unit lifts and lowers the support unit. Lifting method.

Images