Ultrasonic transducer and ultrasonic bonding apparatus

Abstract

To provide an ultrasonic transducer having high heat radiation effect.SOLUTION: An ultrasonic transducer 20 includes: a plurality of piezoelectric elements 22 sandwiched between a pair of electrodes 23 and 24; and a first block 26 and a second block 27 configured to integrally vibrate with the plurality of piezoelectric elements 22 by sandwiching the plurality of piezoelectric elements 22 in a front-rear direction. The first block 26 includes a cylindrical block body 26A and a plurality of heat dissipation plates 26B extending in a radial direction from the block body 26A. Further, the second block 27 includes a cylindrical block body 27A and a plurality of heat dissipation plates 27A extending from the block body 27A in the radial direction.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to an ultrasonic vibrator and an ultrasonic bonding device. [Background technology]

[0002] Patent Document 1 discloses an ultrasonic bonding device using an ultrasonic vibrator. In this ultrasonic bonding device, the temperature of the ultrasonic vibrator rises due to heat generated by the piezoelectric element during ultrasonic vibration, so an air-cooling device is used to air-cool the ultrasonic vibrator. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2019-181508 Summary of the Invention [Problem to be solved by the invention]

[0004] However, in Patent Document 1, the ultrasonic vibrator itself is not particularly devised, and its heat dissipation effect is low. This low heat dissipation effect also applies to ultrasonic vibrators that do not require the use of an air-cooling device.

[0005] An object of the present invention is to obtain an ultrasonic vibrator with a high heat dissipation effect. [Means for solving the problem]

[0006] The ultrasonic vibrator of the present invention comprises at least one piezoelectric element, and a front block and a rear block configured to sandwich the at least one piezoelectric element from the front-to-rear direction when the central axis direction is the front-to-rear direction, so as to vibrate integrally with the at least one piezoelectric element, and at least one of the front block and the rear block comprises a cylindrical block body and a plurality of heat sinks extending radially from the block body.

[0007] The ultrasonic bonding device of the present invention is an ultrasonic bonding device that bonds workpieces by applying ultrasonic vibrations of the ultrasonic vibrator to the workpieces, and includes the ultrasonic vibrator, a cover that covers the outer periphery of the ultrasonic vibrator, and an air-cooling device that circulates cooling air inside the cover to air-cool the ultrasonic vibrator. [Effects of the Invention]

[0008] According to the present invention, an ultrasonic vibrator with a high heat dissipation effect can be obtained. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a configuration diagram of an ultrasonic bonding device according to an embodiment of the present invention. [Figure 2] FIG. 2 is a cross-sectional view of the ultrasonic transducer of FIG. [Figure 3] FIG. 3 is a perspective view of the ultrasonic transducer of FIG. [Figure 4] FIG. 4 is a perspective view of the ultrasonic transducer of FIG. [Figure 5] FIG. 5 is a configuration diagram for explaining an ultrasonic bonding device according to a modified example. [Figure 6] FIG. 6 is a configuration diagram for explaining an ultrasonic bonding device according to a modified example. DETAILED DESCRIPTION OF THE INVENTION

[0010] An ultrasonic bonding device 10 according to one embodiment of the present invention will be described below with reference to the drawings. In the drawings, reference numerals may be attached to only some of the elements.

[0011] 1 is configured to ultrasonically bond a member W1 and a member W2 of a workpiece W. The ultrasonic bonding device 10 includes an ultrasonic vibrator 20, a vibration amplifier 30, a cover 40, an air-cooling device 50, a driving device 61, an anvil 62, an ultrasonic oscillator 64, and a controller 65.

[0012] 2 to 4, the ultrasonic vibrator 20 is formed as a Langevin vibrator. The ultrasonic vibrator 20 includes a piezoelectric laminate 21, a first metal block 26, a second metal block 27, and a fastening mechanism 28. In the direction of the central axis C of the ultrasonic vibrator 20, the side facing the workpiece W is referred to as the "front" and the opposite side is referred to as the "rear." The direction of the central axis C is also referred to as the front-rear direction.

[0013] The piezoelectric stack 21 is formed in a cylindrical shape with a central axis C as the central axis and a through-hole 21A passing through the center. The piezoelectric stack 21 has a structure in which a plurality of piezoelectric elements 22, a plurality of electrodes 23, and a plurality of electrodes 24 are stacked in the front-rear direction.

[0014] Each of the plurality of piezoelectric elements 22 is formed in a ring shape having a through hole in the center that forms part of through hole 21A. Each of the plurality of first electrodes 23 includes a doughnut-shaped electrode body 23A having a through hole in the center that forms part of through hole 21A, and a terminal 23B extending from electrode body 23A. Each of the plurality of second electrodes 24 includes a doughnut-shaped electrode body 24A having a through hole in the center that forms part of through hole 21A, and a terminal 24B extending from electrode body 24A.

[0015] The first electrodes 23 and the second electrodes 24 are arranged alternately in the front-to-rear direction. One piezoelectric element 22 is sandwiched between the electrode body 23A of the first electrode 23 and the electrode body 24A of the second electrode 24 that are adjacent in the front-to-rear direction. The terminals 23B and 24B extend in opposite directions from the electrode body 23A or 23B when viewed in the front-to-rear direction.

[0016] The first block 26 includes a cylindrical block body 26A and a plurality of heat sinks 26B extending radially from the block body 26A. Each heat sink 26B extends in the front-to-rear direction. The rear surface of the block body 26A is provided with a female screw hole 26C (threading is not shown) that screws into a male screw shaft 28A (described later) of a fastening mechanism 28. The front surface of the block body 26A is provided with a mounting hole 26D to which the vibration amplifier 30 is fixed.

[0017] The second block 27 includes a cylindrical block main body 27A and a plurality of heat sinks 27B extending radially from the block main body 27A in the radial direction of the block main body 27. Each heat sink 27B extends in the front-rear direction. The second block 27 includes a through-hole 27C at its center when viewed from the front-rear direction. The through-hole 27C is coaxial with and communicates with the through-hole 21A of the piezoelectric stack 21.

[0018] The fastening mechanism 28 tightens and fixes the piezoelectric stack 21 and the second block 27 to the first block 26. To this end, the fastening mechanism 28 is made up of a male screw member 28A and a female screw member 28B. The male screw member 28A is cylindrical and has a threaded outer surface (not shown). The female screw member 28B is made up of a nut or the like and has a threaded hole 28BA in its center that screws into the female screw member 28A. The threaded inner surface of the through hole 28BA is not shown in the drawing.

[0019] The male screw member 28A of the fastening mechanism 28 is inserted into the through-hole 27C of the second block 27 and the through-hole 21A of the piezoelectric stack 21 with its central axis aligned with the central axis C. The front end of the male screw member 28A is screwed into the female screw hole 26C (threading is not shown) of the first block 26. This fixes the male screw member 28A to the first block 26.

[0020] The rear end of the male screw member 28A, whose front end is threaded into the female screw hole 26C of the first block 26, protrudes from the second block 27. The female screw member 28B threadably engages with this rear end. This threaded engagement causes the female screw member 28B and the first block 26 to fasten the second block 27 and the piezoelectric stack 21 from the front-to-rear direction. As a result, the first block 26 and the second block 27 clamp the piezoelectric stack 21 from the front-to-rear direction. For example, a work robot grips the protrusion 27D of the second block 27 and rotates the female screw member 28B to perform the fastening. The first block 26 has two flat surfaces H for gripping the first block 26 with a predetermined jig during this fastening. The two flat surfaces are located on opposite sides of the central axis C. Some of the heat sinks 26B have notches 26BA that avoid an extension plane of the plane H in a direction perpendicular to the front-rear direction (i.e., notches that avoid intersection of the heat sinks 26B with the extension plane). These notches 26BA prevent interference between the predetermined tool and the heat sinks 26B. For example, at least one notch 26BA may be provided on each of the two planes H.

[0021] The first block 26, the second block 27, and the female screw member 28B sandwich the piezoelectric laminate 21 from the front-rear direction, so that when the piezoelectric element 22 vibrates, the vibration is transmitted to the first block 26, the second block 27, and the female screw member 28B, as described below. In other words, when the piezoelectric element 22 vibrates, the first block 26, the second block 27, and the female screw member 28B vibrate integrally with the piezoelectric element 22. Naturally, the male screw member 28A that threadably engages with the first block 26 and the female screw member 28B also vibrates integrally with them. In this embodiment, the piezoelectric element 22 expands and contracts in the front-rear direction. Therefore, during vibration, the ultrasonic vibrator 20 (particularly, the block main bodies 26A and 27A) repeatedly expands in the direction of the central axis C and contracts radially, then expands radially and contracts in the direction of the central axis C.

[0022] The vibration amplifier 30 in FIG. 1 includes a booster 31 and an ultrasonic horn 32 connected by screws or the like. The vibration amplifier 30 is attached to the ultrasonic vibrator 20 and amplifies ultrasonic vibrations. Here, the booster 31 of the vibration amplifier 30 is fixed to the ultrasonic vibrator 20 by screws or the like. The screws are threaded into mounting holes 26D of the ultrasonic vibrator 20. The vibration amplifier 30 has a node that does not vibrate during ultrasonic vibration. Specifically, a flange 31A is provided at the node of the booster 31, and the flange 31A is fixed to the front end of a cover 40 that covers the ultrasonic vibrator 20. This supports the ultrasonic vibrator 20 within the cover 40 but at a position that does not contact the cover 40. The ultrasonic vibrator 20 may be supported in any manner.

[0023] The cover 40 is formed in a cylindrical shape that covers the outer periphery of the ultrasonic vibrator 20 and houses the ultrasonic vibrator 20 inside. An air-cooling device 50 that air-cools the ultrasonic vibrator 20 is provided at the rear end of the cover 40. Note that the cover 40 is depicted in cross section in Fig. 1.

[0024] The air-cooling device 50 is disposed behind the ultrasonic vibrator 20 and blows cooling air from behind towards the ultrasonic vibrator 20 to cool the ultrasonic vibrator 20. A blower such as a blower fan or an air supply device that supplies compressed air is used as the air-cooling device 50. The cooling air from the air-cooling device 50 flows forward within the cover 40. To prevent air that reaches the front end of the cover 40 from accumulating, an exhaust port for exhausting the cooling air to the outside of the cover 40 may be provided at the front end of the cover 40 and / or at the flange 31A.

[0025] The driving device 61 pushes the node portion of the ultrasonic horn 32 in a direction perpendicular to the front-rear direction (the up-down direction in FIG. 1), and presses the tip of the ultrasonic horn 32 against the workpiece W held by the anvil 62.

[0026] The ultrasonic waves generated by the ultrasonic vibrator 20 are amplified by the booster 31 and ultrasonic horn 32 of the vibration amplifier 30, and are applied to the workpieces W from the ultrasonic horn 32 pressed against the workpieces W, thereby ultrasonically joining the workpieces W. The ultrasonic vibrations are, for example, vibrations in the forward and backward directions.

[0027] The ultrasonic oscillator 64 generates an electrical signal having an ultrasonic frequency and inputs the generated electrical signal to the ultrasonic vibrator 20. For example, the ultrasonic oscillator 64 applies an AC voltage of the above frequency between the terminals 23B and 24B of the first electrode 23 and the second electrode 24 of the ultrasonic vibrator 20. Either the terminal 23B or the terminal 24B may be connected to ground and supplied with a reference potential. The AC voltage causes the piezoelectric element 22 between the terminals 23B and 24B to ultrasonically vibrate, resulting in the entire ultrasonic vibrator 20 ultrasonically vibrating.

[0028] The controller 65 is composed of a computer or the like, and operates the ultrasonic oscillator 64 to oscillate the electrical signal in accordance with a predetermined control program. The controller 65 also controls the operation of the drive device 61 and the air-cooling device 50. After the workpieces W are joined, the controller 65 operates the air-cooling device 50 to cool the ultrasonic vibrator 20.

[0029] As described above, the ultrasonic vibrator 20 includes a plurality of piezoelectric elements 22 sandwiched between a pair of electrodes 23 and 24, and a first block 26 and a second block 27 configured to sandwich the plurality of piezoelectric elements 22 from the front and rear directions and vibrate integrally with the plurality of piezoelectric elements 22. The first block 26 includes a cylindrical block main body 26A and a plurality of heat sinks 26B extending radially from the block main body 26A. The second block 27 also includes a cylindrical block main body 27A and a plurality of heat sinks 27B extending radially from the block main body 27A. In the ultrasonic vibrator 20, the piezoelectric elements 22 generate heat during ultrasonic vibration (when power is input), and the generated heat increases the temperatures of the first block 26 and the second block 27. In this embodiment, the provision of the heat sinks 26B and 27B increases the surface area exposed to the cooling air from the air-cooling device 50 compared to when these plates are not provided, thereby improving the heat dissipation effect.

[0030] The number of piezoelectric elements 22, first electrodes 23, and second electrodes 24 may be any number. Furthermore, for example, when the first block 26 and the second block 27 are connected to a reference potential, one electrode to which a high-frequency potential is applied may be provided. In this case, a piezoelectric element 22 may be disposed between one electrode and the first block 26, and between the one electrode and the second block 27. Alternatively, the first block 26 and the second block 27 may be insulated from each other, and each of the first block 26 and the second block 27 may function as an electrode that applies a voltage to the piezoelectric element 22. In this case, the number of piezoelectric elements 22 may be one. The piezoelectric stack 21 may include one or more piezoelectric elements and one or more electrodes that drive the one or more piezoelectric elements.

[0031] As described above, block bodies 26A and 27A are configured to expand in the direction of central axis C and contract radially when subjected to ultrasonic vibration, then expand radially and contract again in the direction of central axis C, repeatedly. Heat sinks 26B and 27B extend radially from block body 26A or 27A when viewed from the direction of central axis C, and also extend along central axis C. This allows heat sinks 26B and 27B to extend in the direction of expansion and contraction of block body 26A or 27A, and thus does not interfere with the expansion and contraction of block body 26A or 27A. Furthermore, heat sinks 26B and 27B are prevented from receiving excessive stress due to the expansion and contraction of block body 26A or 27A. Furthermore, because the heat sinks 26B and 27B extend in the direction of the central axis C, the cooling air from the rear air-cooling device 50 can flow between adjacent heat sinks 26B and between adjacent heat sinks 27B without being obstructed by the heat sinks 26B or 27B (see arrows A1 and A2 in Figure 3), improving the heat dissipation effect and air cooling efficiency.

[0032] 2 to 4, the piezoelectric element 22 has a circular outer shape when viewed from the direction of the central axis C. The outer peripheral surfaces of the block bodies 26A and 27A have a diameter equal to or larger than the diameter of the outer shape of the piezoelectric element 22. With this configuration, the surface area of ​​the outer peripheral surfaces of the block bodies 26A and 27A (the surface area of ​​the outer peripheral surfaces between the heat sinks) is also increased, resulting in a high heat dissipation effect.

[0033] The heat sink may be formed on only one of the first block 26 and the second block 27. However, as shown in FIGS. 2 to 4, the second block 27 is smaller than the first block 26 (here, its length in the front-to-rear direction is shorter). In such a case, the second block 27 has a smaller thermal capacity and is therefore more likely to retain heat. For this reason, it is better to improve the heat dissipation effect of at least the smaller second block 27 of the first block 26 and the second block 27. For this reason, it is preferable to provide the heat sink on the smaller second block 27. The size relationship between the first block 26 and the second block 27 may be reversed. In this case, the heat sink may be provided only on the smaller first block 26.

[0034] The ultrasonic bonding device 10 includes an ultrasonic vibrator 20, a cover 40 that covers the outer periphery of the ultrasonic vibrator, and an air-cooling device 50 that circulates cooling air inside the cover 40 to cool the ultrasonic vibrator 20. The ultrasonic bonding device 10 is configured to bond the workpieces W by applying ultrasonic vibrations from the ultrasonic vibrator 20 to the workpieces W. With this configuration, for example, the shape of the ultrasonic vibrator 20 can be modified to improve heat dissipation, even without using a high-power air-cooling device 50. Conventionally, air cooling by the air-cooling device 50 has been sufficient to cool the ultrasonic vibrator 20. However, the present inventors discovered that when a high-power ultrasonic vibrator 20 is used, for example, to increase the wire thickness of a harness connecting a battery to a motor or a charger in an electric vehicle, the ultrasonic vibrator 20 generates heat accordingly, and conventional air-cooling methods take too long to cool the ultrasonic vibrator 20 (e.g., a cooling period of 60 seconds is required for a bonding time of 2 seconds). Therefore, the present inventors improved the heat dissipation effect by modifying the shape of the ultrasonic vibrator 20, as in the present embodiment. This improves the cooling efficiency of the ultrasonic vibrator 20, thereby shortening the cooling time of the ultrasonic vibrator 20. It also prevents the air cooling device 50 from becoming too high in output. The shortened cooling time leads to a shortened cooling time per bonding in mass production of products by ultrasonic bonding, for example, and thereby improves the production efficiency of the product.

[0035] Furthermore, the second block 27 located behind the first block 26 is smaller than the first block 26, and at least the second block 27 is provided with a plurality of heat sinks 27B, and the air-cooling device 50 is disposed behind the ultrasonic vibrator 20 and includes a blower that blows cooling air forward. This allows the second block 27, which has a small heat capacity and is prone to heat buildup, to be efficiently cooled.

[0036] As a modified example, the air-cooling device 50 may be an intake device (for example, an intake fan such as a ventilation fan) that draws in air from inside the cover 40. In such a case, as shown in Figures 5 and 6, the cover 40 may be provided with one or more through holes 41 extending in the circumferential direction of the cover 40 to connect the inside and outside of the cover 40.

[0037] As shown in FIG. 5, the through holes 41 are preferably disposed at the outer periphery of the piezoelectric laminate 21 (more specifically, one or more piezoelectric elements 22). The outer periphery refers to a position where all or only a portion of the through holes 41 overlaps with the piezoelectric laminate 21 or the piezoelectric elements 22 in the radial direction of the ultrasonic transducer 20, which is perpendicular to the direction of the central axis C. Due to such a positioning of the through holes 41, when the air-cooling device 50, which serves as an air supply device, operates to draw air into the cover 40, the air drawn in from the outside to the inside of the cover 40 through the through holes 41 can hit the piezoelectric laminate 21 (see arrow A3). Therefore, the piezoelectric elements 22 of the piezoelectric laminate 21 are efficiently cooled. Furthermore, by disposing the air-cooling device 50, which serves as an air intake device, behind the ultrasonic transducer 20 and providing a heat sink 27B on the second block 27, the air drawn in through the through holes 41 is directed toward the second block 27, and the second block 27 can also be effectively cooled by the heat sink 27B. The air-cooling device 50 as an intake device may be located at a position other than the rear of the ultrasonic vibrator 20.

[0038] 6, the through-holes 41 may be disposed at a position forward of the front end of the piezoelectric stack 21, in other words, forward of the rear end of the first block 26. This allows the first block 26 to the second block 27 to be cooled by air drawn in through the through-holes 41. The through-holes 41 are preferably provided in a position forward of the rear end of the first block 26 and rearward of the front end of the first block 26 (FIG. 6 also shows this position). This prevents the air drawn in through the through-holes 41 from hitting the first block 26, so the piezoelectric stack 21 including the piezoelectric elements 22 and the second block 27 can be air-cooled by air that is not heated by the first block 26 or that is heated only slightly (see arrow A4).

[0039] When the through hole 41 is provided, the cooling efficiency of the ultrasonic vibrator 20 can be increased due to the position of the through hole 41, so that it is not necessary to provide heat sinks 26B and 27B on both the first block 26 and the second block 27.

[0040] The present invention is not limited to the above-described embodiments and modifications. For example, the present invention includes various modifications to the above-described embodiments and modifications that can be understood by a person skilled in the art within the scope of the technical concept of the present invention. The configurations described in the above-described embodiments and modifications can be combined as appropriate within a consistent range. For example, the present invention may be applied to an ultrasonic bonding device that applies ultrasonic vibrations to a workpiece to bond it when heating the workpiece for soldering. The use of the ultrasonic vibrator can also be determined arbitrarily.

[0041] The configurations disclosed in this specification are described below. (Appendix 1) at least one piezoelectric element; a front block and a rear block configured to sandwich the at least one piezoelectric element from the front-rear direction when the central axis direction is the front-rear direction, and to vibrate integrally with the at least one piezoelectric element; At least one of the front block and the rear block includes a cylindrical block body and a plurality of heat sinks extending radially from the block body. Ultrasonic transducer. (Appendix 2) the block body is configured to, upon vibration, repeatedly expand in the direction of the central axis and contract in the radial direction, and then expand in the radial direction and contract in the direction of the central axis, The plurality of heat sinks extend radially from the block body when viewed from the central axis direction and extend along the central axis direction. 2. The ultrasonic transducer of claim 1. (Appendix 3) the at least one piezoelectric element has a circular outer shape when viewed from the central axis direction, The outer circumferential surface of the block body has a diameter equal to or larger than the outer diameter of the at least one piezoelectric element. 3. The ultrasonic transducer according to claim 1 or 2. (Appendix 4) the smaller of the front block and the rear block includes the block body and the plurality of heat sinks; 4. The ultrasonic vibrator according to any one of Supplementary Notes 1 to 3. (Appendix 5) An ultrasonic bonding apparatus that bonds workpieces by applying ultrasonic vibrations of the ultrasonic vibrator according to any one of Supplementary Notes 1 to 4 to the workpieces, The ultrasonic vibrator; a cover that covers the outer periphery of the ultrasonic vibrator; an air-cooling device that circulates cooling air inside the cover to air-cool the ultrasonic vibrator; An ultrasonic bonding device comprising: (Appendix 6) The front block is smaller than the rear block, At least the rear block includes the block body and the plurality of heat sinks, The air-cooling device includes a blower disposed behind the ultrasonic vibrator and blowing cooling air forward. 6. The ultrasonic bonding apparatus according to claim 5. (Supplementary Note 7) The air-cooling device is an intake device that draws in air from within the cover, the cover has a through hole that communicates the inside with the outside and is arranged at an outer periphery position of the piezoelectric element; 6. The ultrasonic bonding apparatus according to claim 5. (Appendix 8) At least the rear block includes the block body and the plurality of heat sinks, The air cooling device is disposed behind the ultrasonic transducer. 8. The ultrasonic bonding apparatus of claim 7. (Appendix 9) the air-cooling device is an intake device that is disposed behind the ultrasonic vibrator and that draws in air from within the cover, the cover has a through hole that connects the inside and the outside of the cover, the through hole being located forward of the rear end of the front block. 6. The ultrasonic bonding apparatus according to claim 5. (Appendix 10) The through hole is disposed at a position rearward of the front end of the front block. 10. The ultrasonic bonding apparatus according to claim 9. [Explanation of symbols]

[0042] 10...ultrasonic bonding device, 20...ultrasonic vibrator, 21...piezoelectric laminate, 21A...through hole, 22...piezoelectric element, 23...electrode, 23...first electrode, 23A...electrode body, 23B...terminal, 24...electrode, 24...second electrode, 24A...electrode body, 24B...terminal, 26...first block, 26A...block body, 26B...heat sink, 26C...female screw hole, 26D...mounting hole, 27...second block, 27A...block body, 27B...heat sink, 28...fastening mechanism, 28A...male screw member, 28B...female screw member, 30...vibration amplifier, 40...cover, 41...through hole, 50...air cooling device, 61...driver, 62...anvil, 64...ultrasonic oscillator, 65...controller, A1 to A3...arrow, C...center axis, H...plane, W...workpiece, W1...member, W2...member.

Claims

1. at least one piezoelectric element; a front block and a rear block configured to sandwich the at least one piezoelectric element from the front-rear direction when the central axis direction is the front-rear direction, and to vibrate integrally with the at least one piezoelectric element, At least one of the front block and the rear block includes a cylindrical block body and a plurality of heat sinks extending radially from the block body. Ultrasonic transducer.

2. the block body is configured to, upon vibration, repeatedly expand in the direction of the central axis and contract in the radial direction, and then expand in the radial direction and contract in the direction of the central axis, The plurality of heat sinks extend radially from the block body when viewed from the central axis direction and extend along the central axis direction. The ultrasonic transducer according to claim 1 .

3. the at least one piezoelectric element has a circular outer shape when viewed from the central axis direction, the outer circumferential surface of the block body has a diameter equal to or larger than the diameter of the outer shape of the at least one piezoelectric element; The ultrasonic transducer according to claim 1 .

4. the smaller of the front block and the rear block includes the block body and the plurality of heat sinks; The ultrasonic transducer according to claim 1 .

5. 10. An ultrasonic bonding apparatus that bonds workpieces by applying ultrasonic vibrations of the ultrasonic vibrator according to claim 1 to the workpieces, The ultrasonic vibrator; a cover that covers the outer periphery of the ultrasonic vibrator; an air-cooling device that circulates cooling air inside the cover to air-cool the ultrasonic vibrator; An ultrasonic bonding device comprising:

6. The front block is smaller than the rear block, At least the rear block includes the block body and the plurality of heat sinks, The air-cooling device includes a blower disposed behind the ultrasonic vibrator and blowing cooling air forward. The ultrasonic bonding device according to claim 5 .

7. the air-cooling device is an intake device that draws in air from within the cover, the cover has a through hole that communicates the inside with the outside and is arranged at an outer periphery position of the piezoelectric element; The ultrasonic bonding device according to claim 5 .

8. At least the rear block includes the block body and the plurality of heat sinks, The air cooling device is disposed behind the ultrasonic transducer. The ultrasonic bonding device according to claim 7.

9. the air-cooling device is an intake device that is disposed behind the ultrasonic vibrator and that draws in air from within the cover, the cover has a through hole that connects the inside and the outside of the cover, the through hole being located forward of the rear end of the front block. The ultrasonic bonding device according to claim 5 .

10. The through hole is disposed at a position rearward of the front end of the front block. The ultrasonic bonding device according to claim 9.

Images