Assembly jig for electron beam irradiation apparatus, and maintenance method for electron beam irradiation apparatus

Abstract

To provide an assembly jig for an electron beam irradiation apparatus that enables simplification of a configuration of the assembly jig, and a maintenance method for an electron beam irradiation apparatus.SOLUTION: An electron beam acceleration apparatus 11 in an electron beam irradiation apparatus includes a vacuum container 21 having an opening, an electron beam generation unit 23 inserted into the vacuum container 21 through the opening, and a lid body 22 that is attached to the vacuum container 21 so as to close the opening and supports the electron beam generation unit 23. An assembly jig 30 includes a carriage 31 configured to be able to place the electron beam acceleration apparatus 11 taken out from a shielding body 12, and a support member 32 attached to the carriage 31. The carriage 31 has an attachment portion 44 to which the support member 32 is attached. The support member 32 has an attached portion 51 attached to the attachment portion 44, and a lid body holding portion 52 that holds the lid body 22 in a state in which the attached portion 51 is attached to the attachment portion 44.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to an assembly jig for an electron beam irradiation apparatus and a maintenance method for an electron beam irradiation apparatus. [Background technology]

[0002] Conventionally, there is an electron beam irradiation device equipped with an electron beam accelerator including a vacuum vessel and an electron beam generator disposed within the vacuum vessel (see, for example, Patent Document 1). The electron beam accelerator is disposed within a shield that shields against magnetism. The electron beam accelerator accelerates the electron beam generated by the electron beam generator and irradiates the electron beam from an irradiation window provided in the vacuum vessel to the outside of the vacuum vessel. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2003-149398 Summary of the Invention [Problem to be solved by the invention]

[0004] In the above-described electron beam irradiation apparatus, for example, when performing maintenance on the electron beam generation unit inside the vacuum vessel, the electron beam irradiation apparatus can be disassembled using an assembly jig including a first carriage and a second carriage. In a maintenance method using this assembly jig, first, the electron beam accelerator is removed from the shield and placed on the first carriage. Then, the electron beam generation unit is removed from the vacuum vessel using the second carriage. In this way, two carriages, the first carriage and the second carriage, are required to perform maintenance on the electron beam generation unit. Because the carriages are heavy and occupy a large space, there is a demand for a simplification of the assembly jig so as to reduce the number of carriages. [Means for solving the problem]

[0005] [1] An assembly jig for an electron beam irradiation apparatus that solves the above-mentioned problem is an assembly jig used for an electron beam irradiation apparatus that includes an electron beam accelerator and a shielding body surrounding the electron beam accelerator, wherein the electron beam accelerator includes a vacuum container having an opening, an electron beam generating unit that is inserted into the vacuum container through the opening, and a lid that is attached to the vacuum container so as to cover the opening and supports the electron beam generating unit, and the assembly jig includes a carriage configured to be able to place the electron beam accelerator removed from the shielding body, and a support member attached to the carriage, the carriage having an attachment portion to which the support member is attached, and the support member having an attachment portion attached to the attachment portion and a lid holding portion that holds the lid when the attachment portion is attached to the attachment portion.

[0006] According to this configuration, the lid that supports the electron beam generator can be held by the lid holder of the support member attached to the carriage. This allows the assembly jig to have a simple configuration with only one carriage, while still allowing for easy assembly and disassembly of the vacuum vessel and the electron beam generator. Therefore, it is possible to assemble the electron beam irradiation device and perform maintenance of the electron beam generator using an assembly jig with a simple configuration.

[0007] [2] In the assembly jig for an electron beam irradiation device described in [1] above, the mounting portion of the support member is detachably mounted to the mounting portion of the cart, and the cart is provided with a storage fixing portion that fixes the support member when removed from the mounting portion.

[0008] With this configuration, when placing the electron beam accelerator on the carriage, the support members attached to the mounting portions of the carriage do not get in the way of the work. Also, by fixing the support members to the storage fixing portions of the carriage, the support members can be stored in the carriage. This makes it possible to reduce the space occupied by the assembly jig, including the carriage and the support members.

[0009] [3] In the assembly jig for the electron beam irradiation apparatus described in [1] or [2] above, the electron beam irradiation apparatus comprises a stand on which the electron beam accelerator is placed within the shielding body, the assembly jig comprises a connecting member connecting the stand to the carriage, the carriage comprises a connecting part connected to the connecting member, and the assembly jig is configured so that the electron beam accelerator on the stand can be moved onto the carriage via the connecting member by connecting the connecting part of the carriage to the connecting member fixed to the stand.

[0010] According to this configuration, the electron beam accelerator can be removed from the shield and moved onto the cart by the connecting member that connects the cart and the base of the electron beam irradiation device. [4] In the assembly jig for an electron beam irradiation device described in [3] above, when the connecting portion is defined as a first connecting portion, the carriage has a second connecting portion connected to the connecting member, separate from the first connecting portion, and when the side of the carriage on which the first connecting portion is provided is defined as the front end side of the carriage, the second connecting portion is provided on the rear end side of the carriage.

[0011] According to this configuration, after the electron beam accelerator on the pedestal is moved onto the trolley through the connecting member, the connection between the connecting member and the first connecting part can be disconnected, the trolley can be inverted, and the second connecting part of the trolley can be connected to the connecting member.

[0012] [5] In the assembly jig for an electron beam irradiation apparatus described in [4] above, the shield in the electron beam irradiation apparatus has an opening and closing portion which serves as an entrance and exit for the electron beam accelerator, the vacuum container is elongated with a longitudinal direction, the opening and the lid are provided at one end of the vacuum container in the longitudinal direction, the electron beam accelerator is configured to be insertable into the shield from the opening and closing portion along the longitudinal direction, and when the electron beam irradiation apparatus is fully assembled, the electron beam accelerator is arranged within the shield so that the lid is located at the rear side relative to the opening and closing portion.

[0013] According to this configuration, when the electron beam accelerator on the gantry is moved onto the cart via the connecting member, the electron beam accelerator faces the front end side of the cart (the first connecting portion side) on the cart. Therefore, after the electron beam accelerator is moved onto the cart, by reversing the direction of the cart and connecting the second connecting portion to the connecting member, the end of the electron beam accelerator on the cart opposite the lid can be made to face the shield. This allows the vacuum vessel removed from the lid to be returned into the shield via the connecting member.

[0014] [6] A maintenance method for an electron beam irradiation device that solves the above problem is a maintenance method for an electron beam irradiation device that uses an assembly jig for an electron beam irradiation device described in any one of [1] to [5] above, and includes: a removal step of placing the electron beam accelerator removed from the shielding body on the cart; a lid fixing step of fixing the lid holding portion of the support member attached to the cart to the lid in the electron beam accelerator after the removal step; and an exposure step of removing the vacuum container in the electron beam accelerator from the lid and returning it to the shielding body after the lid fixing step, thereby exposing the electron beam generation unit supported by the support member via the lid from the vacuum container.

[0015] According to this method, in the lid fixing step, the lid is fixed to a lid holder of a support member attached to the carriage, thereby enabling the carriage to hold the electron beam generating unit and the lid. Then, in the exposure step, the vacuum vessel is removed from the lid and returned to the shielding chamber, thereby exposing the electron beam generating unit from the vacuum vessel. Therefore, while the assembly jig has a simple configuration with only one carriage, it is possible to perform maintenance such as replacing the electron beam generating unit after the exposure step.

[0016] [7] A maintenance method for an electron beam irradiation apparatus that solves the above-mentioned problem is a maintenance method for an electron beam irradiation apparatus that uses the assembly jig for an electron beam irradiation apparatus described in [4] or [5] above, and includes the steps of: a removal step of placing the electron beam accelerator removed from the shielding body on the carriage; a lid fixing step of fixing the lid holder of the support member attached to the carriage to the lid of the electron beam accelerator after the removal step; and a lid fixing step of removing the vacuum vessel of the electron beam accelerator from the lid and returning it into the shielding body after the lid fixing step. and an exposure process for exposing a sagittal beam generating unit from the vacuum vessel, wherein in the removal process, the first connecting portion of the carriage is connected to the connecting member fixed to the pedestal, and the electron beam acceleration device on the pedestal is moved onto the carriage via the connecting member, and after the removal process or the lid body fixing process, the first connecting portion is disconnected from the connecting member, the orientation of the carriage is reversed, and then the second connecting portion is connected to the connecting member, and in the exposure process, the vacuum vessel of the electron beam acceleration device on the carriage is moved onto the pedestal via the connecting member.

[0017] According to this method, in the lid fixing step, the lid is fixed to a lid holder of a support member attached to the carriage, thereby enabling the electron beam generation unit and the lid to be held on the carriage via the support member. Furthermore, in the carriage inversion step, the carriage on which the electron beam accelerator is mounted is inverted and the second connecting portion is connected to the connecting member, enabling the end of the electron beam accelerator on the carriage opposite the lid to face the shielding body. This allows the vacuum vessel detached from the lid to be returned to the shielding body over the connecting member in the exposure step, thereby exposing the electron beam generation unit from the vacuum vessel. Therefore, while the assembly jig has a simple configuration with only one carriage, maintenance such as replacing the electron beam generation unit can be performed after the exposure step. [Effects of the Invention]

[0018] According to the assembly jig for an electron beam irradiation apparatus and the maintenance method for an electron beam irradiation apparatus of the present invention, it is possible to simplify the structure of the assembly jig. [Brief explanation of the drawings]

[0019] [Figure 1] FIG. 1 is a schematic diagram showing an electron beam irradiation device according to an embodiment. [Figure 2] FIG. 2 is an exploded perspective view showing a carriage and a support member in the assembly jig of the embodiment. [Figure 3] FIG. 3 is a schematic diagram for explaining a maintenance method for the electron beam irradiation device in the same embodiment. [Figure 4] FIG. 4 is a schematic diagram for explaining a maintenance method for the electron beam irradiation device in the same embodiment. [Figure 5] FIG. 5 is a schematic diagram for explaining a maintenance method for the electron beam irradiation device in the same embodiment. [Figure 6] FIG. 6 is a partial perspective view showing a state in which the connecting members are stored on a carriage in the assembly jig of the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0020] Hereinafter, an embodiment of an assembly jig for an electron beam irradiation apparatus and a maintenance method for an electron beam irradiation apparatus will be described with reference to the drawings. Note that, for the sake of convenience, the drawings may show some components in an exaggerated or simplified form. Furthermore, the dimensional ratios of the various components may differ from the actual ratios.

[0021] (Configuration of electron beam irradiation device 10) As shown in FIG. 1 , the electron beam irradiation apparatus 10 includes an electron beam accelerator 11, a shield 12, and a gantry 13. When the electron beam irradiation apparatus 10 is fully assembled, the electron beam accelerator 11 is placed on the gantry 13. When the electron beam irradiation apparatus 10 is fully assembled, the gantry 13 and the electron beam accelerator 11 are disposed inside the shield 12. That is, the shield 12 surrounds the electron beam accelerator 11 and the gantry 13. The shield 12 shields against magnetism and prevents the magnetism inside the shield 12 from being emitted to the outside. The electron beam irradiation apparatus 10 of this embodiment is, for example, an area irradiation type electron beam irradiation apparatus.

[0022] (Configuration of electron beam accelerator 11) The electron beam accelerator 11 is assembled inside the shield 12 through an opening / closing portion 12a of the shield 12 toward a first direction D1. The first direction D1 and a second direction D2, which is the opposite direction to the first direction D1, are, for example, directions parallel to a horizontal plane perpendicular to the direction of gravity. The electron beam accelerator 11 is disposed at an irradiation position P1 on a gantry 13 inside the shield 12. When disposed at the irradiation position P1, the electron beam accelerator 11 accelerates and irradiates an electron beam based on power supplied from a high-voltage power supply (not shown).

[0023] The electron beam accelerator 11 includes a vacuum vessel 21, a lid 22, and an electron beam generator 23. The vacuum vessel 21 is elongated along a first direction D1. The electron beam accelerator 11 is configured to be insertable into the shield 12 from an opening / closing portion 12a along the length of the vacuum vessel 21. The vacuum vessel 21 has, for example, a cylindrical shape extending in the first direction D1. The vacuum vessel 21 has a first end 21a, which is the front end in the first direction D1 of the vacuum vessel 21 when it is positioned at an irradiation position P1 in the assembled state of the electron beam irradiation device 10, and a second end 21b, which is the end opposite to the first end 21a. The second end 21b is the front end in the second direction D2 of the vacuum vessel 21 when it is positioned at the irradiation position P1 in the assembled state of the electron beam irradiation device 10.

[0024] The vacuum vessel 21 has an opening 24 at the first end 21a. The opening 24 runs along the length of the vacuum vessel 21. The lid 22 of the electron beam accelerator 11 is attached to the first end 21a of the vacuum vessel 21 in a manner that closes the opening 24 of the vacuum vessel 21. The vacuum vessel 21 also has an opening at the second end 21b, which is closed by a door 28 provided at the second end 21b. A vacuum pump 25 is attached to the outer surface of the door 28, for example, to create a vacuum inside the vacuum vessel 21. When the electron beam irradiation device 10 is fully assembled, the electron beam accelerator 11 is disposed within the shield 12 so that the lid 22 is located at the rear side (front side in the first direction D1) of the opening / closing portion 12a and the vacuum pump 25 is located at the front side of the opening / closing portion 12a.

[0025] The electron beam generation unit 23 in the electron beam accelerator 11 is disposed within the vacuum vessel 21 by being inserted into the vacuum vessel 21 through the opening 24. The electron beam generation unit 23 includes a generation unit main body 26 and an insulator 27 that supports the generation unit main body 26. The generation unit main body 26 generates electron beams based on power supplied from a high-voltage power supply (not shown). The insulator 27 is integrally provided on the inner surface 22a of the lid 22. The insulator 27 supports the generation unit main body 26 relative to the lid 22 while electrically insulating the generation unit main body 26 from the lid 22. That is, the lid 22 closes the opening 24 of the vacuum vessel 21 and supports the electron beam generation unit 23 within the vacuum vessel 21.

[0026] A cable (not shown) electrically connected to the generating unit main body 26 for supplying power to the generating unit main body 26 is routed inside the insulator 27 of the electron beam generating unit 23, and the cable is drawn out from the outer surface 22b of the lid 22 to the outside of the vacuum vessel 21. The electron beam accelerator 11 of this embodiment is configured so that no container (e.g., a pressure vessel) separate from the vacuum vessel 21 is provided on the outer surface 22b side of the lid 22. This makes it possible to easily attach the electron beam accelerator 11 to an assembly jig 30, which will be described later.

[0027] When positioned at irradiation position P1, the electron beam accelerator 11 accelerates the electron beam generated by the electron beam generator 23 and irradiates the electron beam to the outside of the vacuum vessel 21 through an irradiation window (not shown) provided in the vacuum vessel 21.

[0028] (Configuration of assembly jig 30) The above-described electron beam irradiation device 10 can be assembled and disassembled using an assembly jig 30 shown in Fig. 2. As shown in Fig. 2, the assembly jig 30 includes a carriage 31 and a support member 32 attached to the carriage 31. The assembly jig 30 also includes a connecting member 33 (see Fig. 3) that connects the pedestal 13 and the carriage 31. The connecting member 33 has, for example, a rail shape extending along the second direction D2. The connecting member 33 is connected to the pedestal 13 by being fixed to a pedestal-side fixing portion 13a provided on the pedestal 13.

[0029] (Configuration of bogie 31) The dolly 31 in the assembly jig 30 is configured so that the electron beam accelerator 11 removed from the shielding body 12 in the electron beam irradiation device 10 can be placed on it. The dolly 31 includes, for example, a frame 41, a plurality of wheels 42 provided on the lower part of the frame 41, and a support rail 43 supported on the upper part of the frame 41. The dolly 31 includes, for example, four wheels 42. The dolly 31 includes, for example, two support rails 43. The frame 41 of the dolly 31 includes a mounting portion 44 to which the support member 32 is attached, and a storage fixing portion 45 that fixes the support member 32 when it is removed from the mounting portion 44.

[0030] 3, the frame 41 of the carriage 31 includes a first connecting portion 46 connectable to the connecting member 33 and a second connecting portion 47 connectable to the connecting member 33. When the side of the carriage 31 on which the first connecting portion 46 is provided is the front end side of the carriage 31, the second connecting portion 47 is provided on the rear end side of the carriage 31. The assembly jig 30 is configured to be able to move the electron beam accelerator 11 between an irradiation position P1 on the gantry 13 and a position on the support rails 43 of the carriage 31 by connecting either the first connecting portion 46 or the second connecting portion 47 of the carriage 31 to the connecting member 33 fixed to the gantry 13. The mounting portion 44 of the carriage 31 is provided on the front end side of the frame 41.

[0031] 2, the cart 31 has a handle 48 that can be grasped by an operator when moving the cart 31 or changing the direction of the cart 31. The handle 48 is provided on the rear end side of the frame 41.

[0032] 6, the above-mentioned connecting member 33 can be stored in the carriage 31 when not in use. When the connecting member 33 is stored in relation to the carriage 31, the connecting member 33 is hooked onto a pin 49 provided on a first connecting portion 46 of the carriage 31, for example, and the lower end of the connecting member 33 is fixed to the frame 41 of the carriage 31 with a bolt.

[0033] (Configuration of support member 32) As shown in FIG. 2 , the support member 32 has an attachment portion 51 that is attached to the attachment portion 44 of the carriage 31, and a lid body holding portion 52 that holds the lid body 22 when the attachment portion 51 is attached to the attachment portion 44. The attachment portion 51 is detachably attached to the attachment portion 44 of the carriage 31. For example, the attachment portion 51 has two bolt fastening portions 51a that are bolted to the attachment portion 44 of the carriage 31. Furthermore, the attachment portion 51 is configured to be attachable to the storage fixing portion 45 of the carriage 31 when detached from the fixing portion 44. In other words, the storage fixing portion 45 is configured to be able to fasten the bolt fastening portions 51a of the attachment portion 51 of the support member 32 with bolts. Note that the support member 32 is configured not to protrude from the frame body 41 when the support member 32 is fixed to the storage fixing portion 45.

[0034] The lid holder 52 of the support member 32 is configured to be able to hold the lid 22 of the electron beam irradiation device 10. The lid holder 52 is fixed to the lid 22 by, for example, bolting.

[0035] (Maintenance method for the electron beam irradiation device 10) The procedure for performing maintenance on the electron beam accelerator 11 in the electron beam irradiation device 10 will be described below.

[0036] (Removal process) First, as shown in FIG. 3 , an unloading step is performed in which the electron beam accelerator 11 is removed from the shield 12 and placed on the carriage 31 of the assembly jig 30. In this unloading step, the gantry 13 and the carriage 31 are connected to each other by a connecting member 33. The connecting member 33 is fixed to the gantry-side fixing portion 13a of the gantry 13 through the opening / closing portion 12a of the shield 12 when it is in the open state. In addition, in the unloading step, the connecting member 33 is fixed to the first connecting portion 46 of the carriage 31. Then, the electron beam accelerator 11, which is located at the irradiation position P1 within the shield 12, is moved in the second direction D2 over the connecting member 33 to the support rails 43 of the carriage 31. Thereafter, the vacuum vessel 21 of the electron beam accelerator 11 is fixed so as not to move on the support rails 43 by, for example, a stopper (not shown) provided on the carriage 31. During this removal step, the support member 32 is fixed to the storage fixing portion 45 of the dolly 31. Therefore, during the removal step, the support member 32 is not attached to the attachment portion 44 of the dolly 31, and therefore, when the electron beam accelerator 11 is moved from inside the shield 12 to onto the dolly 31, the electron beam accelerator 11 does not interfere with the lid holder 52 of the support member 32.

[0037] (Cart reversal process) In the maintenance method of this embodiment, for example, after the removal step, a carriage inversion step is performed in which the orientation of the carriage 31 carrying the electron beam accelerator 11 is inverted by 180 degrees. In this carriage inversion step, first, the first connecting portion 46 of the carriage 31 is released from the connecting member 33. Then, the orientation of the carriage 31 is inverted by 180 degrees so that the rear end side (the second connecting portion 47 side) of the carriage 31 faces the first direction D1 (see FIG. 4). As a result, the second end 21b of the vacuum vessel 21 on the carriage 31 faces the shield 12. Then, the second connecting portion 47 of the carriage 31 is fixed to the connecting member 33.

[0038] (Lid fixing process) After the carriage inversion step, a lid fixing step is performed in which the lid holder 52 of the support member 32 in the assembly jig 30 is fixed to the lid 22 in the electron beam accelerator 11. In this lid fixing step, first, the support member 32 is removed from the storage fixing portion 45 of the carriage 31, and the attached portion 51 of the support member 32 is attached to the attachment portion 44 of the carriage 31 (see FIG. 4). Thereafter, the lid holder 52 of the support member 32 is fastened and fixed to the lid 22 with, for example, a bolt.

[0039] (Exposure process) After the lid fixing step, an exposure step is performed in which the vacuum vessel 21 in the electron beam accelerator 11 is removed from the lid 22 and returned to the irradiation position P1 within the shield 12, as shown in FIG. 5 . The lid 22 is fixed to the vacuum vessel 21 by, for example, bolts. In the exposure step, the bolts fastened to the lid 22 from the vacuum vessel 21 are first removed. Then, the stoppers fixing the vacuum vessel 21 on the support rails 43 are removed, and the vacuum vessel 21 is moved in the first direction D1 over the connecting members 33 to the irradiation position P1 on the pedestal 13. This exposes the electron beam generation unit 23, which is supported by the support members 32 via the lid 22, from the shield 12. By exposing the electron beam generation unit 23 from the vacuum vessel 21 in this manner, maintenance such as replacement of the generation unit main body 26 and the insulators 27 of the electron beam generation unit 23 becomes possible. After the exposing step, the connection between the connecting member 33 and the platform 13 and the cart 31 may be released, and the connecting member 33 may be removed from the opening / closing part 12a, and then the opening / closing part 12a may be closed.

[0040] Furthermore, for example, when assembling the electron beam irradiation device 10 after maintenance of the electron beam generating unit 23, the above-described steps are performed in reverse order from the exposure step. More specifically, first, on the carriage 31, the electron beam generating unit 23 is attached to the lid 22 fixed to the lid holding portion 52 of the support member 32.

[0041] Next, the vacuum vessel 21 inside the shield 12 is moved onto the carriage 31 via the connecting member 33, and the vacuum vessel 21 is placed over the electron beam generation unit 23. Thereafter, the lid 22 fixed to the lid holder 52 is fixed to the first end 21a of the vacuum vessel 21. Thereafter, the lid holder 52 is released from the lid 22, and the support member 32 is removed from the mounting portion 44 of the carriage 31. Then, the support member 32 is fixed to the storage fixing portion 45 of the carriage 31.

[0042] Next, the second connecting part 47 of the dolly 31 is disconnected from the connecting member 33, the orientation of the dolly 31 with the electron beam accelerator 11 loaded thereon is reversed by 180 degrees, and the first connecting part 46 of the dolly 31 is connected to the connecting member 33. Thereafter, the electron beam accelerator 11 on the dolly 31 is moved to the irradiation position P1 on the gantry 13 via the connecting member 33. Thereafter, the connecting member 33 is released from the gantry 13 and the dolly 31, the connecting member 33 is removed from the opening / closing part 12a, and the opening / closing part 12a is closed.

[0043] (Effects of this embodiment) The effects of this embodiment will be described below. (1) The electron beam irradiation device 10 includes an electron beam accelerator 11 and a shield 12 surrounding the electron beam accelerator 11. The electron beam accelerator 11 includes a vacuum vessel 21 having an opening 24, an electron beam generator 23 inserted into the vacuum vessel 21 through the opening 24, and a lid 22 attached to the vacuum vessel 21 so as to cover the opening 24 and supporting the electron beam generator 23. The assembly jig 30 includes a carriage 31 configured to be able to place the electron beam accelerator 11 removed from the shield 12, and a support member 32 attached to the carriage 31. The carriage 31 has an attachment portion 44 to which the support member 32 is attached. The support member 32 includes an attachment portion 51 attached to the attachment portion 44 and a lid holder 52 that holds the lid 22 when the attachment portion 51 is attached to the attachment portion 44. According to this configuration, the lid 22 supporting the electron beam generation unit 23 can be held by the lid holder 52 of the support member 32 attached to the carriage 31. This allows the assembly jig 30 to have a simple configuration with only one carriage 31, while also making it possible to easily assemble and disassemble the vacuum vessel 21 and the electron beam generation unit 23. Therefore, it is possible to assemble the electron beam irradiation device 10 and perform maintenance of the electron beam generation unit 23 using the assembly jig 30 with a simple configuration.

[0044] (2) The mounting portion 51 of the support member 32 is detachably mounted to the mounting portion 44 of the dolly 31. According to this configuration, when the electron beam accelerator 11 is placed on the dolly 31, the support member 32 is removed from the mounting portion 44, so that the support member 32 does not get in the way of the work. The dolly 31 also includes a storage fixing portion 45 that fixes the support member 32 when it is removed from the mounting portion 44. This makes it possible to store the support member 32 in the dolly 31 by fixing the support member 32 to the storage fixing portion 45 of the dolly 31.

[0045] (3) The electron beam irradiation device 10 includes a pedestal 13 on which the electron beam accelerator 11 is placed within the shielding body 12. The assembly jig 30 includes a connecting member 33 that connects the pedestal 13 to a carriage 31. The carriage 31 includes a first connecting portion 46 that is connected to the connecting member 33. The assembly jig 30 is configured such that the electron beam accelerator 11 on the pedestal 13 can be moved onto the carriage 31 over the connecting member 33 by connecting the first connecting portion 46 of the carriage 31 to the connecting member 33 fixed to the pedestal 13. With this configuration, the electron beam accelerator 11 removed from the shielding body 12 can be moved onto the carriage 31 by the connecting member 33 that connects the carriage 31 to the pedestal 13 of the electron beam irradiation device 10.

[0046] (4) The carriage 31 includes a second coupling part 47 coupled to the coupling member 33, separate from the first coupling part 46. When the side of the carriage 31 on which the first coupling part 46 is provided is the front end side of the carriage 31, the second coupling part 47 is provided on the rear end side of the carriage 31. With this configuration, after the electron beam accelerator 11 on the gantry 13 has been moved onto the carriage 31 via the coupling member 33, the coupling member 33 and the first coupling part 46 can be disconnected, and the carriage 31 can be turned over, and the second coupling part 47 of the carriage 31 can be coupled to the coupling member 33.

[0047] (5) The shield 12 in the electron beam irradiation device 10 has an opening / closing portion 12a that serves as an entrance / exit for the electron beam accelerator 11. The vacuum vessel 21 has an elongated shape with a longitudinal direction. The opening 24 and the lid 22 are provided at one longitudinal end (first end 21a) of the vacuum vessel 21. The electron beam accelerator 11 is configured to be insertable into the shield 12 from the opening / closing portion 12a along the longitudinal direction of the vacuum vessel 21. When the electron beam irradiation device 10 is fully assembled, the electron beam accelerator 11 is disposed within the shield 12 such that the lid 22 is located on the rear side (front side in the first direction D1) of the opening / closing portion 12a. With this configuration, when the electron beam accelerator 11 on the gantry 13 is moved onto the carriage 31 over the connecting member 33, the electron beam accelerator 11 faces the front end side of the carriage 31 (the first connecting portion 46 side) on the carriage 31. Therefore, after the electron beam accelerator 11 is moved onto the carriage 31, the carriage 31 is reversed and the second connecting part 47 is connected to the connecting member 33, so that the end (second end 21b) of the electron beam accelerator 11 on the carriage 31 opposite to the lid 22 can be directed toward the shield 12. This allows the vacuum vessel 21 removed from the lid 22 to be returned into the shield 12 by passing over the connecting member 33.

[0048] (6) In the maintenance method for the electron beam irradiation apparatus 10 according to the present embodiment, in the removal step, the electron beam accelerator 11 removed from the shielding body 12 is placed on the carriage 31. In the lid fixing step after the removal step, the lid holder 52 of the support member 32 is fixed to the lid 22 of the electron beam accelerator 11. In the exposure step after the lid fixing step, the vacuum vessel 21 of the electron beam accelerator 11 is removed from the lid 22 and returned to the shielding body 12, thereby exposing the electron beam generation unit 23 supported by the support member 32 via the lid 22 from the vacuum vessel 21. According to this method, in the lid fixing step, by fixing the lid 22 to the lid holder 52 of the support member 32 attached to the carriage 31, it is possible to hold the electron beam generation unit 23 and the lid 22 on the carriage 31 via the support member 32. Then, in the exposure step, the vacuum vessel 21 is removed from the lid 22 and returned to the shielding body 12, thereby exposing the electron beam generating unit 23 from the vacuum vessel 21. Therefore, even though the assembly jig 30 has a simple configuration with only one carriage 31, it is possible to perform maintenance such as replacing the electron beam generating unit 23 after the exposure step.

[0049] (7) In the maintenance method for the electron beam irradiation device 10 according to the present embodiment, in the removal step, the first connecting portion 46 of the carriage 31 is connected to the connecting member 33 fixed to the gantry 13, and the electron beam accelerator 11 on the gantry 13 is moved onto the carriage 31 via the connecting member 33. In the carriage inversion step, the first connecting portion 46 is disconnected from the connecting member 33, the orientation of the carriage 31 is reversed, and then the second connecting portion 47 is connected to the connecting member 33. In the exposure step, the vacuum vessel 21 of the electron beam accelerator 11 on the carriage 31 is moved onto the gantry 13 via the connecting member 33. According to this method, in the carriage inversion step, the orientation of the carriage 31 on which the electron beam accelerator 11 is placed is reversed and the second connecting portion 47 is connected to the connecting member 33, so that the end (second end 21b) of the electron beam accelerator 11 on the carriage 31 opposite the lid 22 can be directed toward the shield 12. As a result, in the exposure step, the vacuum vessel 21 removed from the lid 22 can be returned to the inside of the shield 12 over the connecting member 33, thereby exposing the electron beam generating unit 23 from the vacuum vessel 21. Therefore, even though the assembly jig 30 has a simple configuration with only one carriage 31, it is possible to perform maintenance such as replacing the electron beam generating unit 23 after the exposure step.

[0050] (Other embodiments) The above embodiment can be modified as follows: The above embodiment and the following modifications can be combined with each other to the extent that no technical contradiction occurs.

[0051] In the assembled state of the electron beam irradiation device 10 in the above embodiment, the electron beam accelerator 11 may be disposed within the shield 12 so that the cover 22 is located on the near side (forward in the second direction D2) of the opening / closing unit 12a. In this case, in the removal step, the second connecting portion 47 at the rear end of the carriage 31 is connected to the connecting member 33. Then, in the removal step, when the electron beam accelerator 11 within the shield 12 is moved in the second direction D2 onto the carriage 31, the cover 22 of the electron beam accelerator 11 faces the front end side (the mounting portion 44 side) of the carriage 31. Therefore, in the maintenance method for the electron beam irradiation device 10, the carriage inversion step as in the above embodiment can be omitted. Furthermore, omitting the carriage inversion step makes it possible to omit the first connecting portion 46 from the carriage 31. In this case, in the removal step, the mounting portion 44 of the carriage 31 is provided on the side opposite (the front end side) of the carriage 31 from the rear end side connected to the connecting member 33. Therefore, even if the support member 32 is attached to the mounting portion 44 in the removal step, the support member 32 does not interfere with the movement of the electron beam accelerator 11. For this reason, in this case, the support member 32 may be fixed to the mounting portion 44 of the carriage 31 by welding or the like so as not to be removable.

[0052] In the carriage 31 of the assembly jig 30 in the above embodiment, the storage fixing portion 45 may be omitted. In the assembly jig 30 of the above embodiment, the support member 32 may be assembled to be movable (for example, rotatable or slidable in the vertical direction) relative to the carriage 31. The support member 32 may be configured to move between a use position where the lid body holder 52 can be fixed to the lid body 22 and a retracted position where the lid body holder 52 does not interfere with the movement of the electron beam accelerator 11.

[0053] In the carriage 31 of the assembly jig 30 in the above embodiment, a handle portion 48 may be further provided on the front end side of the frame body 41. In the above embodiment, the connecting member 33 is provided separately for each of the gantry 13 and the dolly 31, but this is not limiting, and for example, the connecting member 33 may be provided on either the gantry 13 or the dolly 31. In this case, it is preferable that the connecting member 33 is provided on either the gantry 13 or the dolly 31 so as to be able to switch between two states, a use state and a storage state.

[0054] The configurations of the carriage 31 and the support member 32 in the assembly jig 30 are not limited to those in the above embodiment, and can be changed as appropriate depending on the configuration of the electron beam irradiation device 10. For example, the number of wheels 42 on the carriage 31 is not limited to those in the above embodiment, and may be three or less, or five or more.

[0055] In the above embodiment, the electron beam irradiation device 10 is of an area irradiation type, but the present invention is not limited to this, and can also be applied to electron beam irradiation devices other than the area irradiation type, such as a scanning irradiation type.

[0056] The embodiments and modifications disclosed herein are illustrative in all respects, and the present invention is not limited to these examples. That is, the scope of the present invention is defined by the claims, and it is intended to include all modifications within the meaning and scope of the claims. [Explanation of symbols]

[0057] 10...Electron beam irradiation device 11...Electron beam accelerator 12...shielding body 12a...Opening and closing section 13... Mounting stand 21...Vacuum container 22...lid body 23...Electron beam generator 24…Aperture 30...Assembly jig 31...Cart 32...Support member 33...Connecting member 44...Mounting part 45...Fixed storage section 46...1st connection part (connection part) 47…Second connection part 51...Attachment part 52...Lid holding part

Claims

1. An assembly jig used in an electron beam irradiation apparatus including an electron beam accelerator and a shield surrounding the electron beam accelerator, The electron beam accelerator a vacuum vessel having an opening; an electron beam generating unit inserted into the vacuum vessel through the opening; a lid attached to the vacuum vessel so as to close the opening and supporting the electron beam generating unit, The assembly jig includes: a carriage configured to be able to mount the electron beam accelerator removed from the shield; and a support member attached to the carriage, the carriage has a mounting portion to which the support member is attached, The support member has an attachment portion attached to the attachment portion, and a lid body holding portion that holds the lid body when the attachment portion is attached to the attachment portion. Assembly jig for electron beam irradiation equipment.

2. the attached portion of the support member is detachably attached to the attachment portion of the carriage, The carriage includes a storage fixing portion that fixes the support member in a state where the support member is removed from the mounting portion. An assembly jig for the electron beam irradiation apparatus according to claim 1.

3. the electron beam irradiation device includes a stand on which the electron beam accelerator is placed within the shielding body, the assembly jig includes a connecting member that connects the base and the carriage, the carriage includes a coupling portion coupled to the coupling member, the assembly jig is configured so that the connection portion of the carriage is connected to the connection member fixed to the pedestal, thereby allowing the electron beam accelerator on the pedestal to be moved onto the carriage through the connection member. An assembly jig for the electron beam irradiation apparatus according to claim 1.

4. When the coupling portion is a first coupling portion, the carriage includes a second coupling portion coupled to the coupling member, separate from the first coupling portion, When the side of the bogie where the first coupling portion is provided is the front end side of the bogie, the second coupling portion is provided on the rear end side of the bogie. An assembly jig for the electron beam irradiation apparatus according to claim 3.

5. the shield in the electron beam irradiation device includes an opening / closing portion that serves as an entrance / exit for the electron beam accelerator; the vacuum vessel has an elongated shape having a length direction, the opening and the lid are provided at one end of the vacuum container in the length direction, the electron beam accelerator is configured to be insertable into the shield from the opening / closing portion along the length direction, When the electron beam irradiation device is in a completed assembly state, the electron beam accelerator is disposed in the shielding body so that the cover is located on the far side of the opening / closing unit. An assembly jig for the electron beam irradiation apparatus according to claim 4.

6. A maintenance method for an electron beam irradiation apparatus using the assembly jig for an electron beam irradiation apparatus according to any one of claims 1 to 5, comprising: a removal step of placing the electron beam accelerator removed from the shield on the carriage; a lid fixing step of fixing the lid holder of the support member attached to the carriage to the lid of the electron beam accelerator after the removing step; and an exposure step of exposing the electron beam generating unit supported by the support member via the lid from the vacuum container by removing the vacuum container in the electron beam accelerator from the lid and returning it to the shielding body after the lid fixing step. A maintenance method for an electron beam irradiation device.

7. A maintenance method for an electron beam irradiation apparatus using the assembly jig for an electron beam irradiation apparatus according to claim 4 or 5, comprising: a removal step of placing the electron beam accelerator removed from the shield on the carriage; a lid fixing step of fixing the lid holder of the support member attached to the carriage to the lid of the electron beam accelerator after the removing step; an exposure step of exposing the electron beam generating unit supported by the support member via the lid from the vacuum container by removing the vacuum container of the electron beam accelerator from the lid and returning it to the shielding body after the lid fixing step, In the removing step, the first connecting portion of the carriage is connected to the connecting member fixed to the gantry, and the electron beam accelerator on the gantry is moved onto the carriage through the connecting member; a carriage inversion step of disconnecting the first connecting part from the connecting member after the removal step or the lid body fixing step, reversing the orientation of the carriage, and then connecting the second connecting part to the connecting member; In the exposure step, the vacuum vessel of the electron beam accelerator on the carriage is moved onto the pedestal via the connecting member. A maintenance method for an electron beam irradiation device.

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