Expansion method and expansion device

Abstract

To expand an expandable sheet so that chips can be efficiently manufactured.SOLUTION: An expansion method for expanding an expandable sheet of a workpiece unit including a plate-shaped workpiece, a first ring frame disposed so as to surround the workpiece, and an expandable sheet adhered to the workpiece and the first ring frame. In the expansion method, the first ring frame of the workpiece unit is disposed on the first support unit, the second ring frame is disposed on the second support unit overlapping the first support unit, and the expandable sheet is radially expanded by pressing the expandable sheet. A central region of the expandable sheet is pressed in a direction inclined radially outward from a direction perpendicular to the opening of the first ring frame, a distance between chips formed by dividing the workpiece with the dividing starting point or a dividing groove as a boundary is increased, and the expanded expandable sheet is fixed to the second ring frame disposed in the second support unit.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] The present invention relates to an expansion method and an expansion device for expanding an expanding sheet of a workpiece unit including a plate-shaped workpiece on which a dividing starting point or dividing groove is formed, a ring frame arranged to surround the workpiece, and an expanding sheet attached to the workpiece and the ring frame. [Background technology]

[0002] In the device chip manufacturing process, a disk-shaped wafer is used, on which devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integration) are formed in multiple regions defined by multiple intersecting dividing lines (streets). By dividing this wafer along the dividing lines, multiple device chips, each equipped with a device, are obtained. The device chips are installed in various electronic devices, such as mobile phones and personal computers.

[0003] For example, a cutting device equipped with an annular cutting blade is used to divide a plate-shaped workpiece such as a semiconductor wafer (see Patent Document 1). Alternatively, a laser processing device that irradiates a laser beam onto the workpiece is used to divide the workpiece.

[0004] When a workpiece is carried into a cutting device or the like, the workpiece, a ring frame having an opening large enough to accommodate the workpiece, and an adhesive tape attached to the ring frame so as to close the opening are integrated to form a workpiece unit. In this workpiece unit, the workpiece is attached to the adhesive tape inside the opening of the ring frame.

[0005] After the workpiece is divided by a cutting device or the like, the resulting individual chips continue to be supported by the ring frame via the adhesive tape. The individual chips are then picked up from the adhesive tape and mounted on the desired target. To facilitate chip pick-up from the adhesive tape, the adhesive tape is expanded toward the periphery inside the opening of the ring frame after the workpiece is divided, widening the gap between the individual chips. For this reason, the adhesive tape is also called an expandable sheet.

[0006] A known method is to expand an expandable sheet to widen the chip spacing, and then heat and shrink the expandable sheet in the region between the workpiece and the ring frame to maintain the chip spacing (see Patent Document 2). This method is sometimes called heat shrinking.

[0007] Another known method involves preparing an inner ring and an outer ring having an inner diameter slightly larger than the outer diameter of the inner ring, and sandwiching and fixing an expanded expanding sheet between the inner ring and the outer ring (see Patent Document 3). For example, after expanding the expanding sheet, the expanding sheet is sandwiched between both rings inside the opening of a ring frame.

[0008] More specifically, an inner ring is placed on the underside of the expanding sheet, and when the outer ring is lowered from above the expanding sheet to accommodate the inner ring, the expanding sheet is sandwiched between the two rings from the inside and outside. This maintains the spacing between the expanded chips. In this case, the expanding sheet is cut outside the area sandwiched between the two rings, and the workpiece (chip) is separated from the ring frame. [Prior art documents] [Patent documents]

[0009] [Patent Document 1] Japanese Patent Application Publication No. 2019-192846 [Patent Document 2] Patent Publication No. 2021-19138 [Patent Document 3] Japanese Patent Application Publication No. 2020-191328 Summary of the Invention [Problem to be solved by the invention]

[0010] When heat shrinking is used to maintain the spacing between the expanded chips, the expansion device that expands the expanding sheet must be equipped with a mechanism for heating a specific area of ​​the expanding sheet, which increases the cost of the expansion device. Also, when heat shrinking is used, the process of sufficiently heating the expanding sheet takes time, which reduces the efficiency of chip manufacturing.

[0011] Furthermore, when sandwiching an expanded sheet between an inner ring and an outer ring, both rings had to be thicker than the ring frame in order to sandwich the expanded sheet between the rings with sufficient holding force. As a result, the thickness of the integrated product consisting of the expanded sheet sandwiched between the rings and each chip became large, and when multiple integrated products were stored in a cassette for transport, the number of integrated products that could be stored in the cassette was significantly limited. In other words, these integrated products were difficult to transport, which caused a decrease in chip manufacturing efficiency.

[0012] The present invention has been made in consideration of such problems, and aims to provide a method and an expansion device for expanding an expandable sheet that can expand an expandable sheet so as to efficiently manufacture chips. [Means for solving the problem]

[0013] According to one aspect of the present invention, there is provided a method for expanding an expandable sheet of a workpiece unit including a plate-shaped workpiece on which division starting points or division grooves are formed, a first ring frame having an opening and arranged so as to surround the workpiece, and an expandable sheet attached to the workpiece and the first ring frame, the method comprising a first arranging step of arranging the first ring frame of the workpiece unit on a first support unit, a second arranging step of arranging a second ring frame having an opening on a second support unit overlapping the first support unit, and after the first arranging step and the second arranging step, and an expanding step of pressing the expanding sheet inside the opening to radially expand the expanding sheet, in which in the expanding step, a central region of the expanding sheet surrounded by the region attached to the first ring frame is pressed in a direction inclined radially outward from a direction perpendicular to the opening of the first ring frame, in which in the expanding step, the distance between each chip formed by dividing the workpiece at the dividing starting points or dividing grooves as boundaries increases, and in the expanding step, the expanded expanding sheet is fixed to the second ring frame arranged on the second support unit.

[0014] Preferably, the planar shape of the first ring frame matches the planar shape of the second ring frame, and when the first positioning step and the second positioning step are performed, the opening of the first ring frame overlaps with the opening of the second ring frame, and a portion of the exposed portion of the expanded sheet between the first ring frame and the workpiece before expansion is within the area sandwiched between the first ring frame and the second ring frame when the expansion step is performed.

[0015] More preferably, the method further comprises, after the expanding step, an expanded sheet cutting step of cutting the expanded sheet fixed to the second ring frame along the opening of the second ring frame.

[0016] According to another aspect of the present invention, there is provided an expansion device for expanding an expandable sheet of a workpiece unit including a plate-shaped workpiece on which division starting points or division grooves are formed, a first ring frame having an opening and arranged so as to surround the workpiece, and an expandable sheet attached to the workpiece and the first ring frame, the expansion device including a first support unit supporting the first ring frame of the workpiece unit, a second support unit overlapping with the first support unit and supporting a second ring frame having an opening, and the workpiece with the first ring frame supported by the first support unit. and a sheet pressing and expanding unit that can press a central region of the expanding sheet of the unit, surrounded by the region attached to the first ring frame, in a pressing direction inclined radially outward from a direction perpendicular to the opening of the first ring frame, wherein the sheet pressing and expanding unit expands the expanding sheet, thereby increasing the distance between each chip formed by dividing the workpiece at the division starting point or the division groove as a boundary, and can fix the expanded expanding sheet to the second ring frame arranged on the second support unit.

[0017] Preferably, the sheet pressing and expanding unit has a movable support part, a drive part that moves the movable support part along a direction perpendicular to the opening of the first ring frame supported by the first support unit, and a pressing part that is supported by the movable support part via a guide part and presses the expanding sheet, and the guide part guides the pressing part to move in the pressing direction.

[0018] More preferably, the planar shape of the first ring frame supported by the first support unit coincides with the planar shape of the second ring frame supported by the second support unit.

[0019] Preferably, the device further comprises a cutter that cuts the expandable sheet fixed to the second ring frame along the opening of the second ring frame. [Effects of the Invention]

[0020] In an expansion method and expansion device according to one aspect of the present invention, when an expandable sheet attached to a first ring frame is pressed to radially expand, the central region of the expandable sheet is pressed in a direction (pressing direction) inclined radially outward from a direction perpendicular to the opening of the first ring frame, and the expanded expandable sheet is then fixed to a second ring frame.

[0021] Here, the expanding sheet is not simply pressed in a direction perpendicular to the opening of the first ring frame, but is pressed and expanded in a direction inclined radially outward. This allows a wide flat area of ​​the expanding sheet to be formed around the workpiece (divided chips). In this case, the expanding sheet is attached to the second ring frame in this relatively large flat area, so the expanding sheet is attached to the second ring frame with sufficient fixing force.

[0022] As described above, the expansion method and expansion device according to one aspect of the present invention can fix the expanded sheet with sufficient fixing force without using thick inner and outer rings, allowing chips to be transported efficiently in a cassette. Furthermore, because heat shrinking is not required, the time and structure required for heat shrinking can be omitted, reducing the time and cost required for the process, and enabling chips to be manufactured with high efficiency.

[0023] Therefore, one aspect of the present invention provides a method and an apparatus for expanding an expanding sheet that can expand the expanding sheet so as to efficiently manufacture chips. [Brief explanation of the drawings]

[0024] [Figure 1] FIG. 1(A) is a perspective view schematically showing the front side of a workpiece, and FIG. 1(B) is a perspective view schematically showing the back side of the workpiece. [Figure 2] FIG. 2(A) is a perspective view that schematically shows how a division starting point is formed in a workpiece, and FIG. 2(B) is a cross-sectional view that schematically shows how a division starting point is formed in a workpiece. [Figure 3] FIG. 10 is a perspective view schematically showing a workpiece unit including a workpiece having a division starting point formed therein; [Figure 4] FIG. 10 is a perspective view schematically illustrating a support unit of the expansion device. [Figure 5] Figure 5(A) is a cross-sectional view schematically showing the workpiece unit arranged on the first support unit and the second ring frame arranged on the second support unit, and Figure 5(B) is a cross-sectional view schematically showing the state in which the sheet pressing and expansion unit is lowered. [Figure 6] Figure 6(A) is a cross-sectional view showing a schematic diagram of the expanded sheet being pressed downward, and Figure 6(B) is a cross-sectional view showing a schematic diagram of the expanded sheet being pressed in an outward tilted direction and fixed to the second ring frame. [Figure 7] Figure 7(A) is a cross-sectional view that schematically shows how the expanded sheet is cut, and Figure 7(B) is a cross-sectional view that schematically shows the integrated body of the second ring frame, the workpiece, and the expanded sheet. [Figure 8] FIG. 2 is a cross-sectional view schematically illustrating an example of the configuration of a sheet pressing and expanding unit. [Figure 9] 10 is a cross-sectional view schematically showing the sheet pressing and expanding unit in which the pressing portion has moved in a direction tilted outward from below. FIG. [Figure 10] 1 is a flowchart showing the flow of each step of a method for expanding an expandable sheet. [Figure 11] FIG. 11(A) is a cross-sectional view schematically showing an expansion device according to a modified example, and FIG. 11(B) is a cross-sectional view schematically showing how an expandable sheet is expanded in the expansion device according to the modified example. DETAILED DESCRIPTION OF THE INVENTION

[0025] Hereinafter, an embodiment of the present invention will be described in detail with reference to the accompanying drawings. First, a workpiece unit including an expandable sheet expanded by an expansion method and expansion device according to this embodiment will be described. FIG. 2(A) is a perspective view showing a workpiece unit 11. As shown in FIG. 2(A), the workpiece unit 11 includes a plate-shaped workpiece 1, a first ring frame 7 arranged to surround the workpiece 1, and an expandable sheet 9 fixed to the workpiece 1 and the first ring frame 7.

[0026] Before being processed, the workpiece 1 is placed inside the opening 7a of the first ring frame 7. Then, an expandable sheet 9 is fixed to the workpiece 1 and the first ring frame 7 so as to close the opening 7a of the first ring frame 7. In this way, the workpiece 1, the expandable sheet 9, and the first ring frame 7 are integrated to form a workpiece unit 11. At this time, for example, the expandable sheet 9 is disposed on the front surface 1a side of the workpiece 1, and the back surface 1b side is exposed to the outside.

[0027] Next, we will explain each component included in the workpiece unit 11. Fig. 1(A) is a perspective view schematically showing the front surface 1a side of a plate-shaped workpiece 1, and Fig. 1(B) is a perspective view schematically showing the back surface 1b side of the workpiece 1.

[0028] The plate-shaped workpiece 1 is made of, for example, silicon (Si), silicon carbide (SiC), gallium nitride (GaN), or other semiconductor materials (GaAs, InP, etc.), or the workpiece 1 is a plate-shaped substrate (wafer) made of a material such as a composite oxide, for example, lithium tantalate (LT) and lithium niobate (LN).

[0029] There are no limitations on the material, structure, size, etc. of the workpiece 1. For example, the workpiece 1 may be a substrate made of sapphire, glass (quartz glass, borosilicate glass, etc.), etc. The workpiece 1 does not have to be disk-shaped, and may be a rectangular plate-shaped.

[0030] A plurality of mutually intersecting planned division lines 3 are set on the surface 1a of the workpiece 1, and devices 5 such as ICs (Integrated Circuits) and LSIs (Large Scale Integrations) are formed in each area partitioned by the planned division lines 3. When the workpiece 1 is divided along the planned division lines 3, individual device chips (chips, individual pieces) can be formed. There are no restrictions on the type, number, shape, structure, size, arrangement, etc. of the devices 5, and the workpiece 1 does not necessarily have to have any devices 5 formed thereon.

[0031] When dividing the workpiece 1, for example, a laser processing device is used that can focus a laser beam having a wavelength that is transparent to the workpiece 1 (a wavelength that passes through the workpiece 1) inside the workpiece 1. FIG. 2(A) is a perspective view that schematically shows the workpiece 1 being laser processed by the laser processing device 2. As shown in FIG. 2(A), the workpiece 1 is carried into the laser processing device 2 in a state that it is contained in a workpiece unit 11.

[0032] The first ring frame 7 is a ring frame formed of a material such as metal, and has an opening 7a with a diameter larger than the diameter of the workpiece 1. When forming the workpiece unit 11, the workpiece 1 is positioned within the opening 7a of the first ring frame 7 and accommodated in the opening 7a.

[0033] The expanding sheet 9 has a diameter larger than the opening 7a of the first ring frame 7. The expanding sheet 9 is, for example, a tape called a dicing tape that includes a base layer and an adhesive layer formed on the base layer. When the expanding sheet 9 is a dicing tape, the expanding sheet 9 is attached to the first ring frame 7 and the workpiece 1 by the adhesive force exerted by the adhesive layer.

[0034] Alternatively, the expandable sheet 9 may be a resin-based sheet without an adhesive layer, such as a polyolefin-based sheet or a polyester-based sheet, in which case the expandable sheet 9 is thermocompression bonded to the workpiece 1 and the first ring frame 7. When thermocompression bonding the expandable sheet 9 to the workpiece 1 or the like, the expandable sheet 9 is pressed against the workpiece 1 or the like while being heated to a temperature near its melting point or softening point. This allows the expandable sheet 9 to be fixed to the workpiece 1 or the like without relying on the adhesive strength of the adhesive layer.

[0035] In the laser processing device 2, a laser beam 6 having a wavelength that can pass through the workpiece 1 is focused inside the workpiece 1, and an affected layer that will serve as the starting point for division along the planned division line 3 is formed inside the workpiece 1. Here, the laser processing device 2 that forms an affected layer that will serve as the starting point for division in the plate-shaped workpiece 1 will be described.

[0036] The laser processing device 2 includes a holding table (chuck table) (not shown) that holds the workpiece 1 via an expanded sheet 9, and a laser processing unit 4 that irradiates a laser beam 6 onto the workpiece 1 held on the holding table.

[0037] The laser processing unit 4 includes a processing head 4a that focuses a laser beam 6 having a wavelength that is transparent to the workpiece 1 inside the workpiece 1. The laser processing unit 4 includes a laser oscillator that includes a medium such as Nd:YAG that pulses a laser beam having a wavelength of 1064 nm.

[0038] 2(B) is a cross-sectional view schematically showing the workpiece 1 to be laser-processed. A focal point 4b is positioned at a predetermined depth inside the workpiece 1, and the workpiece 1 and the laser beam 6 are moved relatively along the planned dividing line 3 while the laser beam 6 is focused at the focal point 4b. In this way, the laser beam 6 is irradiated onto the workpiece 1 along the planned dividing line 3, and an affected layer 3a is formed inside the workpiece 1 along the planned dividing line 3.

[0039] 3 is a perspective view showing a workpiece unit 11 including a workpiece 1 having a division starting point (deteriorated layer 3a) formed therein. In FIG. 3, the workpiece 1 having the deteriorated layer 3a formed along the planned division line 3 is shown schematically, and the deteriorated layer 3a formed inside the workpiece 1 is indicated by a broken line.

[0040] Furthermore, when the affected layer 3a is formed, cracks may be formed that extend from the affected layer 3a toward the front surface 1a and the back surface 1b of the workpiece 1. Alternatively, cracks may be extended from the affected layer 3a by applying an external force to the workpiece 1 having the affected layer 3a formed therein. For example, the external force is applied to the workpiece 1 by pressing the workpiece 1 with a pressing member (not shown). Alternatively, the external force is applied to the workpiece 1 by expanding the expand sheet 9 in the circumferential direction inside the opening 7a of the first ring frame 7.

[0041] When the deteriorated layer 3a and cracks extending from the deteriorated layer 3a are formed in the workpiece 1, the workpiece 1 is divided along the planned dividing lines 3. In other words, the deteriorated layer 3a functions as a dividing starting point when dividing the workpiece 1.

[0042] The laser processing unit 4 may irradiate the workpiece 1 with a laser beam 6 having a wavelength that is absorbed by the workpiece 1, instead of the laser beam 6 having a wavelength that can pass through the workpiece 1. In this case, the workpiece 1 is ablated by the irradiation of the laser beam 6, and dividing grooves are formed in place of the affected layer 3a. A cutting device equipped with an annular cutting blade may be used to divide the workpiece 1, and dividing grooves may be formed in the workpiece 1 by the cutting blade.

[0043] The individual chips (device chips) formed by dividing the workpiece 1 continue to be supported by the expanding sheet 9. After that, the expanding sheet 9 is expanded to widen the gap between the chips, making it easier to pick up the chips. However, after expanding the expanding sheet 9, it is necessary to maintain the expanded state of the expanding sheet 9.

[0044] In the method and device for expanding an expandable sheet 9 according to the present embodiment described below, the expanded state of the expanded expandable sheet 9 is efficiently maintained. The expanded expandable sheet 9 is fixed to a ring frame (second ring frame 13) different from the first ring frame 7 that constituted the workpiece unit 11. This maintains the expanded state of the expandable sheet 9. In other words, the widened spacing between the chips is maintained.

[0045] 5(A) and other figures show cross-sectional views that schematically illustrate the expansion device 8. The expansion device 8, which expands the expanding sheet 9, includes a first support unit 10 that supports the first ring frame 7 of the workpiece unit 11, a second support unit 12 that overlaps with the first support unit 10, and a sheet pressing and expanding unit 14 that can press and expand the expanding sheet 9.

[0046] The first support unit 10 and the second support unit 12 included in the expansion device 8 have the same configuration. Fig. 4 is a perspective view showing a schematic view of the support units included in the expansion device 8. The first support unit 10 and the second support unit 12 each include an annular support portion (support table) 16 with a flat upper surface 18.

[0047] The diameter of the opening 20 of the support portion 16 of the first support unit 10 is preferably larger than the diameter of the opening 7a of the first ring frame 7. Furthermore, the diameter of the opening 20 of the support portion 16 of the second support unit 12 is preferably larger than the diameter of the opening 13a of the second ring frame 13. However, the size of the opening 20 is not limited to this.

[0048] The workpiece unit 11 is placed on the first support unit 10. At this time, the position of the first ring frame 7 of the workpiece unit 11 is adjusted so that the opening 7a overlaps with the opening 20 of the support portion 16 of the first support unit 10. In particular, it is preferable to adjust the position so that the center of the opening 7a of the first ring frame 7 overlaps with the center of the opening 20 of the support portion 16.

[0049] Furthermore, the second ring frame 13 is placed on the second support unit 12. At this time, the position of the second ring frame 13 is adjusted so that the opening 13a overlaps with the opening 20 of the support portion 16 of the second support unit 12. In particular, it is preferable to adjust the position so that the center of the opening 13a of the second ring frame 13 overlaps with the center of the opening 20 of the support portion 16.

[0050] For example, when the second support unit 12 is disposed below the first support unit 10, the operation of loading and unloading the second ring frame 13 into and from the second support unit 12 may not proceed smoothly due to the first support unit 10. One reason for this is that the gap between the first support unit 10 and the second support unit 12 is narrow.

[0051] Therefore, the positions of the first support unit 10 and the second support unit 12 may be changeable relative to each other. For example, one or both of the first support unit 10 and the second support unit 12 may be able to move up and down in a direction perpendicular to the opening 20 of the support portion 16. More specifically, when the upper surface 18 of the support portion 16 is parallel to the horizontal direction, the support portion 16 may move up and down along the vertical direction. Alternatively, the support portion 16 may move along the horizontal direction.

[0052] The first support unit 10 may include a plurality of clamps 22 for fixing the first ring frame 7 of the workpiece unit 11 placed on the support portion 16. FIG. 4 shows four clamps 22 provided at equal intervals on the outer circumferential surface of the support portion 16. Note that the clamps 22 are omitted in the figures other than FIG. 4. The second support unit 12 also includes a plurality of clamps 22 for fixing the second ring frame 13 placed on the support portion 16.

[0053] In the expansion device 8, a workpiece unit 11 including an expanding sheet 9 to be expanded is transported to a first support unit 10. At this time, a first ring frame 7 is fixed by a clamp 22. Also, a second ring frame 13 for fixing the expanded expanding sheet 9 is transported to a second support unit 12. At this time, the second ring frame 13 is fixed by a clamp 22. In the expansion device 8, the expanding sheet 9 is pressed and expanded in this state.

[0054] Next, we will explain the sheet pressing and expanding unit 14 that presses and expands the expanding sheet 9. Figure 5(A) and other figures show cross-sectional views that schematically show the pressing portion 24 of the sheet pressing and expanding unit 14. Figures 8 and 9 also show cross-sectional views that schematically show the sheet pressing and expanding unit 14. The sheet pressing and expanding unit 14 can press the expanding sheet 9 of the workpiece unit 11, whose first ring frame 7 is supported by the first support unit 10.

[0055] In particular, the sheet pressing and expanding unit 14 can press the central region of the expanding sheet 9 surrounded by the region attached to the first ring frame 7 in a direction inclined radially outward from the direction perpendicular to the opening 7a of the first ring frame 7. That is, the sheet pressing and expanding unit 14 presses the expanding sheet 9 inside the opening 7a of the first ring frame 7 to radially expand the expanding sheet 9. Here, the central region of the expanding sheet 9 refers to the region exposed to the opening 7a of the first ring frame 7, and generally includes the center of the expanding sheet 9.

[0056] The seat pressing expansion unit 14 includes a drive unit (lifting mechanism) 30 and a moving support unit (lifting shaft) 32 that supports each component and is movable by the drive unit 30. The drive unit 30 is realized by, for example, a moving mechanism configured with a motor and a ball screw, or an air cylinder. However, the drive unit 30 is not limited to these. When the drive unit 30 is an air cylinder, the upper end of the moving support unit 32 is connected to a piston provided in the drive unit 30. In addition, the pressing unit 24 is disposed below the moving support unit 32.

[0057] When the drive unit (lifting mechanism) 30 is operated, the pressing unit 24 can be moved together with the moving support unit (lifting shaft) 32. The drive unit 30 can move the moving support unit 32 (pressing unit 24) along a direction perpendicular to the opening 7a of the first ring frame 7 supported by the first support unit 10.

[0058] For example, when the upper surfaces 18, 18a of the first support unit 10 are parallel to the horizontal plane (XY plane), the opening 7a of the first ring frame 7 placed on the first support unit 10 is also parallel to the horizontal plane (XY plane). In other words, when the first ring frame 7 is placed on the first support unit 10, the opening 7a penetrates the first ring frame 7 along the vertical direction (Z-axis direction) perpendicular to the horizontal plane. When the drive unit 30 is operated at this time, the movable support unit 32 moves up and down along the vertical direction (Z-axis direction), and the pressing unit 24 disposed on the movable support unit 32 moves up and down.

[0059] However, the upper surface 18 of the first support unit 10 does not have to be strictly parallel to the horizontal plane, and the opening 7a does not have to pass through the first ring frame 7 strictly in the vertical direction (Z-axis direction). In other words, the drive unit 30 does not have to raise and lower the moving support unit 32 and the pressing unit 24 in a direction that does not deviate at all from the vertical direction (Z-axis direction).

[0060] In short, when the drive unit 30 moves the movable support unit 32, it is not necessary for the movable support unit 32 and the pressing unit 24 to move without any deviation from the direction perpendicular to the opening 7a (vertical direction) of the first ring frame 7 supported by the first support unit 10. As long as the expansion device 8 according to this embodiment can function properly, a certain degree of deviation from the direction perpendicular to the opening 7a (vertical direction) is naturally allowed for the moving directions of the movable support unit 32 and the pressing unit 24.

[0061] Next, the pressing portion 24 supported by the moving support portion 32 will be described. As shown in Figure 8 and other figures, the pressing portion 24 is composed of a fixed portion 26 that is directly fixed to the lower end of the moving support portion 32, and a plurality of oblique portions 28 that are arranged around the fixed portion 26. The oblique portions 28 are not directly fixed to the moving support portion 32.

[0062] The fixed portion 26 of the pressing portion 24 is a hard member made of metal or the like and has a flat bottom surface, and moves together with the movable support portion 32. The bottom surface of the fixed portion 26 is parallel to the opening 7a of the first ring frame 7 supported by the first support unit 10. When the movable support portion 32 moves along the vertical direction, the fixed portion 26 also moves along the vertical direction, and the bottom surface of the fixed portion 26 is parallel to the horizontal plane. The fixed portion 26 has the function of pressing the expanded sheet 9 of the workpiece unit 11 supported by the first support unit 10. Note that the fixed portion 26 can be omitted from the pressing portion 24.

[0063] Furthermore, an elevating body 34 is slidably provided on the moving support part 32. For example, the elevating body 34 has a through-hole (not shown) that penetrates the moving support part 32, and covers the moving support part 32 while contacting the outer circumferential surface of the moving support part 32.

[0064] A drive source (not shown) is connected to the lifting body 34, which provides a driving force for sliding relative to the moving support part 32. Alternatively, the lifting body 34 has a built-in drive source (not shown) for providing the driving force. For example, the seat pressing expansion unit 14 may have a support (not shown) that supports the drive part 30, and the drive source for sliding the lifting body 34 relative to the moving support part 32 may be provided on this support.

[0065] Here, the drive source for sliding the lifting body 34 relative to the movement support part 32 is realized by, for example, a ball screw type movement mechanism, an air cylinder, etc. However, the drive source is not limited to these.

[0066] A support arm 36 that supports the inclined portion 28 of the pressing portion 24 is fixed to the lifting body 34. The support arm 36 extends from the lifting body 34 radially outward of the moving support portion 32. The base end side of the support arm 36 is connected to the lifting body 34, and a cylindrical pin 38 that extends horizontally is fixed to the tip side of the support arm 36, and a guide portion 40 is arranged in which a guide hole 42 that slidably accommodates the pin 38 is formed.

[0067] A plurality of guide members 40 are arranged around the movement support member 32. A support pillar 44 that supports the inclined member 28 (described later) is fixed to each guide member 40. The guide member 40 is, for example, a flat member that extends along a plane that includes the radial direction of the movement support member 32 and the movement direction of the lifting body 34.

[0068] The guide hole 42 of the guide part 40 is formed in a direction inclined from the direction of movement of the lifting body 34, and penetrates the front and back of the guide part 40. The guide part 40 is movable relative to the support arm 36 while accommodating the pin 38 in the guide hole 42. In other words, the guide part 40 is movable relative to the support arm 36 within a range in which the pin 38 can move along the guide hole 42.

[0069] When the guide part 40 moves relative to the support arm 36, the position of the pin 38 housed in the guide hole 42 changes in the guide hole 42. Because the guide hole 42 is formed in the guide part 40 along a direction inclined from the movement direction of the lifting body 34, the guide part 40 moves relative to the support arm 36 along a direction inclined from the movement direction of the lifting body 34.

[0070] For example, if the movable support member 32 is aligned vertically and the expanding sheet 9 to be expanded is placed below the movable support member 32, the guide member 40 is oriented so that the distance from the lower end of the guide hole 42 to the movable support member 32 is shorter than the distance from the upper end of the guide hole 42. In this case, when the lifting body 34 is moved relative to the movable support member 32, the support arm 36 moves together with the lifting body 34, and the pin 38 fixed to the support arm 36 moves through the guide hole 42 of the guide member 40. Then, the guide member 40 receives force from the pin 38 and moves toward or away from the movable support member 32.

[0071] In the sheet pressing and expanding unit 14, when the pressing portion 24 is not pressing the expanding sheet 9, the lifting body 34 is moved so as to be positioned higher relative to the moving support portion 32. At this time, the guide portion 40 approaches the moving support portion 32.

[0072] When expanding the expanding sheet 9, first, the movable support section 32 moves, causing the entire pressing section 24 to move, and the expanding sheet 9 is pressed by the fixed section 26 and the oblique section 28 of the pressing section 24. When further expanding the expanding sheet 9, the lifting body 34 is moved so that its position relative to the movable support section 32 becomes lower. At this time, the guide section 40 moves in a direction away from the movable support section 32 while descending.

[0073] The inclined portion 28, which is fixed to the guide portion 40 via the support pillar 44, moves together with the guide portion 40. When the lifting body 34 is moved (lowered) relative to the movable support portion 32, the inclined portion 28 of the pressing portion 24 moves downward and away from the movable support portion 32. That is, the inclined portion 28 moves in a pressing direction, which is a direction inclined radially outward from a direction perpendicular to the opening 7a of the first ring frame 7 supported by the first support unit 10 (for example, a vertical direction) (for example, a diagonal direction between the vertical and horizontal directions). In this way, the guide portion 40 guides the pressing portion 24 (inclined portion 28) to move in the pressing direction.

[0074] The inclined portions 28 press the expanding sheet 9 while passing through the openings 7a of the first ring frame 7 of the workpiece unit 11 supported by the first support unit 10, and the tips (outermost ends) of the inclined portions 28 advance into the area where they overlap with the first ring frame 7. In other words, the tips of the inclined portions 28 advance into the area between the first ring frame 7 supported by the first support unit 10 and the second ring frame 13 supported by the second support unit 12. At this time, if a circle connecting the tips of the multiple inclined portions 28 of the pressing portion 24 is imagined, the diameter of this circle will exceed the diameter of the openings 7a of the first ring frame 7.

[0075] The expanding sheet 9 continues to expand while the tip of the inclined portion 28 of the pressing portion 24 advances into the region between the first ring frame 7 and the second ring frame 13. The inclined portion 28 of the pressing portion 24 then moves until the expanding sheet 9 finally comes into contact with the second ring frame 13.

[0076] In the process up to this point, as the expand sheet 9 expands, the gaps 3b between the chips 15 formed by dividing the workpiece 1 starting from the division starting points (deteriorated layers 3a) widen. Alternatively, the gaps 3b between the chips 15 formed by dividing the workpiece 1 along the division starting points (deteriorated layers 3a) or the division grooves widen. In either case, the distance between each chip 15 formed by dividing the workpiece 1 along the division starting points (deteriorated layers 3a) or the division grooves increases.

[0077] The shape of the inclined portion 28 is determined so that the inclined portion 28 does not come into contact with the first ring frame 7 or the like. For example, the thickness of the tip of the inclined portion 28 is smaller than the distance between the first ring frame 7 and the second ring frame 13. Alternatively, the thickness of the tip of the inclined portion 28 is smaller than the distance between the upper surface 18a of the support portion 16a of the first support unit 10 and the upper surface 18b of the support portion 16b of the second support unit 12. Here, the thickness of the tip of the inclined portion 28 refers to the thickness in a direction perpendicular to the opening 7a of the first ring frame 7 (for example, the vertical direction).

[0078] The sheet pressing and expanding unit 14 described so far will now be summarized. The sheet pressing and expanding unit 14 has a movable support section 32 and a drive section (not shown) that moves the movable support section 32 along a direction perpendicular to the opening 7a of the first ring frame 7 supported by the first support unit 10. The sheet pressing and expanding unit 14 further has a pressing section 24 (inclined section 28) that is supported by the movable support section 32 via a guide section 40 and presses the expanding sheet 9. This guide section 40 guides the pressing section 24 (inclined section 28) so that it moves in a pressing direction that is inclined radially outward from the direction perpendicular to the opening 7a of the first ring frame 7.

[0079] The sheet pressing and expanding unit 14 expands the expanding sheet 9, thereby increasing the distance between each chip 15 formed by dividing the workpiece 1 at the dividing starting points (deteriorated layers 3a) or dividing grooves. At the same time, the sheet pressing and expanding unit 14 fixes the expanded expanding sheet 9 to a second ring frame 13 arranged on the second support unit 12.

[0080] Thus, in the expansion device 8 according to this embodiment, the inclined portion 28 of the pressing portion 24 can advance in a direction inclined radially outward from a direction perpendicular to the opening 7a of the first ring frame 7. Therefore, even if the first ring frame 7 and the second ring frame 13 have the same planar shape, the tip of the inclined portion 28 can advance into the area between the first ring frame 7 and the second ring frame 13 and press the expanding sheet 9 against the second ring frame 19.

[0081] In the expansion device 8 according to this embodiment, the expandable sheet 9 is attached to the second ring frame 13 in a relatively large flat area around the workpiece 1 (chips 15 formed by dividing the workpiece 1). Therefore, the expandable sheet 9 is attached to the second ring frame 13 with sufficient fixing force.

[0082] Furthermore, the expansion device 8 according to this embodiment may further include a cutting unit (cutter) that cuts the expanding sheet 9 fixed to the second ring frame 13 along the opening 13a of the second ring frame 13. Fig. 7(A) shows a side view that schematically illustrates the cutter 46 that cuts the expanding sheet 9.

[0083] The cutter 46 enters the region between the first support unit 10 and the second support unit 12 and cuts into the expanding sheet 9 from the outside toward the side surface of the oblique portion 28 of the pressing portion 24. Then, while cutting into the expanding sheet 9, the cutter 46 moves one or more revolutions along the opening 13a of the second ring frame 13 and separates the central region of the expanding sheet 9 from the first ring frame 7.

[0084] This forms a frame unit including the second ring frame 13, the expanded sheet 9, and the workpiece 1 (chips 15). Figure 7(B) includes a cross-sectional view showing a schematic view of the frame unit 17. In the frame unit 17, the chips 15 are kept spaced apart widely, making it easy to pick up the chips 15 from the expanded sheet 9.

[0085] The cutter 46 does not need to cut into the expanding sheet 9 toward the side surface of the inclined portion 28 of the pressing portion 24, but may cut into the expanding sheet 9 toward the surface of the second ring frame 13. However, if the cutter 46 cuts toward the second ring frame 13, scratches will be formed on the surface of the second ring frame 13 by the cutter 46. On the other hand, if the cutter 46 cuts toward the side surface of the inclined portion 28, scratches will not be formed on the surface of the second ring frame 13, and the second ring frame 13 can be reused for a long period of time.

[0086] Next, as one mode of use of the expansion device 8 according to this embodiment, an expansion method for expanding the expandable sheet 9 using the expansion device 8 will be described. Fig. 10 is a flowchart showing the flow of each step of the expansion method for expanding the expandable sheet 9. Each step will be described in detail below.

[0087] First, a first placement step S10 is performed in which the first ring frame 7 of the workpiece unit 11 is placed on the first support unit 10, and a second placement step S20 is performed in which the second ring frame 13 is placed on the second support unit 12 that overlaps the first support unit 10. Fig. 5(A) is a cross-sectional view schematically showing the workpiece unit 11 placed on the first support unit 10 and the second ring frame 13 placed on the second support unit 12.

[0088] The first arrangement step S10 and the second arrangement step S20 may be performed simultaneously, or the first arrangement step S10 may be performed first, or the second arrangement step S20 may be performed first.

[0089] In the first placement step S10, a workpiece unit 11 including a workpiece 1 on which a division starting point (deteriorated layer 3a) or a division groove has been formed, a first ring frame 7, and an expanded sheet 9 is transported to a first support unit 10. Then, the first ring frame 7 is placed on an upper surface 18a of a support portion 16a of the first support unit 10. At this time, it is preferable to adjust the position of the first ring frame 7 so that the center of the opening 7a of the first ring frame 7 and the center of the opening 20a of the support portion 16a of the first support unit 10 coincide with each other. Thereafter, the first ring frame 7 is fixed to the first support unit 10 by a clamp 22 of the first support unit 10.

[0090] In the second placement step S20, the second ring frame 13 is transported to the second support unit 12 and placed on the upper surface 18b of the support portion 16b. At this time, the position of the second ring frame 13 is preferably adjusted so that the center of the opening 13a of the second ring frame 13 coincides with the center of the opening 20b of the support portion 16b of the second support unit 12. Thereafter, the second ring frame 13 is fixed to the second support unit 12 by the clamp 22 of the second support unit 12.

[0091] The same type of ring frame can be used for the first ring frame 7 and the second ring frame 13. That is, the planar shape of the first ring frame 7 may match the planar shape of the second ring frame. When the same type of ring frame is used, the second ring frame 13 can be transported using the mechanism and container used to transport the first ring frame 7, so there is no need to prepare two different mechanisms and containers specialized for transporting each ring frame. That is, the first ring frame 7, the second ring frame 13, etc. can be transported efficiently.

[0092] Here, when the same type of ring frame is used for the first ring frame 7 and the second ring frame 13, it is preferable that the first ring frame 7 and the second ring frame 13 completely overlap when the first arranging step S10 and the second arranging step S20 are performed. In this case, the openings 7a and 13a of the first ring frame 7 and the second ring frame 13 completely overlap each other.

[0093] After the first arrangement step S10 and the second arrangement step S20, an expansion step S30 is performed in which the expandable sheet 9 is pressed to radially expand the expandable sheet 9. The pressing of the expandable sheet 9 in the expansion step S30 is performed by the sheet pressing and expanding unit 14 of the expansion device 8.

[0094] In the expansion step S30, the pressing portion 24 of the sheet pressing expansion unit 14 is lowered to contact the expanding sheet 9, and the pressing portion 24 is further lowered to press the expanding sheet 9. Thereafter, the pressing portion 24 is further lowered and moved radially (outward in the radial direction) to fix the expanding sheet 9 to the second ring frame 13. Each stage of the expansion step S30 will be described below.

[0095] In the expansion step S30, first, the pressing portion 24 is lowered to bring the pressing portion 24 (fixed portion 26 and inclined portion 28) into contact with the expanding sheet 9. FIG. 5(B) is a cross-sectional view that schematically shows the state in which the sheet pressing expansion unit 14 is lowered. When the pressing portion 24 of the sheet pressing expansion unit 14 is lowered, the moving support portion 32 (see FIG. 8, etc.) is lowered. At this time, the lifting body 34 is not moved relative to the moving support portion 32.

[0096] After the pressing portion 24 comes into contact with the expanding sheet 9, the pressing portion 24 is further lowered, causing the expanding sheet 9 to be pressed by the pressing portion 24. FIG. 6(A) is a cross-sectional view schematically showing the expanding sheet 9 pressed by the pressing portion 24. When the pressing portion 24 begins to press the central region of the expanding sheet 9 inside the opening 7a of the first ring frame 7, the expanding sheet 9 begins to expand radially outward. When the expanding sheet 9 expands, a radially outward force is applied to the workpiece 1 fixed to the expanding sheet 9.

[0097] For example, if a division starting point (degraded layer 3a) has been formed in the workpiece 1 at the time the expansion step S30 is started, the workpiece 1 is divided at the division starting point (degraded layer 3a) due to the radially outward force applied to the workpiece 1. As a result, individual chips 15 are formed, and gaps 3b are generated between adjacent chips 15. Also, for example, if a division groove has been formed in the workpiece 1 and chips 15 have been formed at the time the expansion step S30 is started, the radially outward force applied to the workpiece 1 widens the gaps 3b between the chips 15. In either case, in the expansion step S30, the distance between the chips 15 of the workpiece 1 divided at the division starting point (degraded layer 3a) or the division groove increases.

[0098] In the expansion step S30, the central region of the expanding sheet 9, surrounded by the region fixed to the first ring frame 7, is pressed in a direction inclined radially outward from a direction perpendicular to the opening 7a of the first ring frame 7. Here, radially outward means, for example, a direction from the center of the workpiece 1 toward its outer periphery. The expanded expanding sheet 9 is then fixed to the second ring frame 13 arranged on the second support unit 12. FIG. 6(B) is a cross-sectional view schematically showing the expanding sheet 9 that has been pressed, expanded, and fixed to the second ring frame 13.

[0099] When pressing the expanding sheet 9 in a direction inclined radially outward from the direction perpendicular to the opening 7a of the first ring frame 7 (for example, a direction between the vertical and horizontal directions), the lifting body 34 is moved (lowered) relative to the movement support part 32, as shown in Fig. 9. Then, the guide part 40 functions to move the inclined part 28 of the pressing part 24 in that direction (pressing direction).

[0100] For example, if the planar shapes of the first ring frame 7 and the second ring frame 13 are the same, the tip (outermost periphery) of the pressing portion 24 will be in the area sandwiched between the first ring frame 7 and the second ring frame 13. As a result, part of the exposed portion of the expandable sheet 9 between the first ring frame 7 and the workpiece 1 before expansion will be in the area sandwiched between the first ring frame 7 and the second ring frame 13.

[0101] Whether the planar shapes of the first ring frame 7 and the second ring frame 13 are the same or different, the pressing portion 24 (slanted portion 28) presses the expanding sheet 9 toward the second ring frame 13. If the expanding sheet 9 is a tape with an adhesive layer, the adhesive layer adheres the expanding sheet 9 to the second ring frame 13. This maintains the expanded state of the expanding sheet 9 inside the opening 13a of the second ring frame 13, and maintains the gap 3b between the tips 15.

[0102] Furthermore, if the expanding sheet 9 is a sheet that does not have an adhesive layer, the expansion device 8 may include a heating unit that heats the expanding sheet 9. When the pressing section 24 (oblique section 28) presses the expanding sheet 9 against the second ring frame 13, the heating unit may heat the expanding sheet 9 to a predetermined temperature. In this case, the expanding sheet 9 is fixed to the second ring frame 13 by thermocompression bonding.

[0103] When the expansion device 8 includes a heating unit that contributes to thermocompression bonding of the expanding sheet 9, the heating unit may be built into the supporting portion 16b of the second supporting unit 12, or into the oblique portion 28 of the pressing portion 24, for example. In these cases, a heater including an electric heating wire or the like can be used as the heating unit. When the heating unit is built into the supporting portion 16b, the heating unit heats the expanding sheet 9 that is in contact with the second ring frame 13 via the second ring frame 13.

[0104] Furthermore, the heating unit does not have to be built into the support portion 16b of the second support unit 12, and may be a heat gun that blows hot air onto a specified area of ​​the expanding sheet 9, or an infrared lamp that irradiates infrared rays onto a specified area of ​​the expanding sheet 9.

[0105] In the method for expanding the expandable sheet 9 performed by the expansion device 8, the expanding step S30 may be followed by an expanding sheet cutting step S40. In the expanding sheet cutting step S40, the expanding sheet 9 fixed to the second ring frame 13 is cut along the openings 13a of the second ring frame 13.

[0106] The expanding sheet 9 may be cut in the expanding sheet cutting step S40 using a cutting unit (cutter 46) of the expansion device 8. Fig. 7(A) is a cross-sectional view schematically showing how the expanding sheet 9 is cut by the cutting unit (cutter 46).

[0107] In the expanded sheet cutting step S40, first, the cutter 46 is inserted from the outside between the support portion 16a of the first support unit 10 and the support portion 16b of the second support unit 12, and cuts into the expanded sheet 9. In this state, the cutter 46 is moved along the opening 13a of the second ring frame 13. For example, the cutter 46 is made to make one revolution around the opening 13a.

[0108] When the expandable sheet 9 is cut along the opening 13a with the cutter 46, the central portion of the expandable sheet 9 is separated from the first ring frame 7. This forms a frame unit 17 (see FIG. 7(B)) including the cut workpiece 1 (chip 15), the expandable sheet 9, and the second ring frame 13. Thereafter, the frame unit 17 and the first ring frame 7 are carried out of the expansion device 8.

[0109] Fig. 7(B) is a cross-sectional view schematically showing the frame unit 17. As shown in Fig. 7(B), in the frame unit 17, the expanding sheet 9 is expanded, and the chips 15 are fixed to the expanding sheet 9 with the distance between the chips 15 increased, making it easy to pick up individual chips 15.

[0110] As described above, when the expansion method for expanding the expandable sheet 9 is carried out using the expansion device 8, the expandable sheet 9 is not simply pressed in a direction perpendicular to the opening 7a of the first ring frame 7, but is pressed in a direction inclined radially outward to expand. This allows a wide flat area of ​​the expandable sheet 9 to be formed around the workpiece 1 (divided chips 15). In this case, the expandable sheet 9 is attached to the second ring frame 13 in this relatively large flat area, and therefore the expandable sheet 9 is attached to the second ring frame 13 with sufficient fixing force.

[0111] In this case, there is no need for heat shrinking to shrink the expanded expand sheet 9. In particular, if the first ring frame 7 and the second ring frame 13 have the same planar shape, the frame unit 17 can be transported using a cassette that can accommodate and transport the workpiece unit 11, and therefore the chips 15 can be efficiently transported while contained in the frame unit 17. This reduces the time and cost required for the process, allowing for highly efficient chip production.

[0112] In the above embodiment, the first support unit 10 is positioned above the second support unit 12, the first ring frame 7 of the workpiece unit 11 is disposed above the second ring frame 13, and the expanding sheet 9 is pressed from above. However, one aspect of the present invention is not limited to this.

[0113] That is, in the expansion device 8 and the method for expanding an expanding sheet 9 according to one aspect of the present invention, the first support unit 10 may be disposed below the second support unit 12, and the first ring frame 7 may be disposed below the second ring frame 13. The expanding sheet 9 may then be pressed from below.

[0114] 11(A) is a cross-sectional view schematically showing an expansion device 48 according to a modified example. Next, the expansion device 48 according to the modified example will be described. For the expansion device 48 according to the modified example described below, the description of the expansion device 8 above can be referred to for elements not specifically described.

[0115] The expansion device 48 that expands the expanding sheet 9 includes a first support unit 52 that supports the first ring frame 7 of the workpiece unit 11, a second support unit 50 that overlaps the first support unit 52, and a sheet pressing and expanding unit 54 that can press and expand the expanding sheet 9. Here, in the expansion device 48 according to the modified example, the second support unit 50 is disposed above the first support unit 52.

[0116] The first support unit 52 and the second support unit 50 are provided with annular support portions (support tables) 56a and 56b having flat upper surfaces 58a and 58b, respectively. The first support unit 52 and the second support unit 50 may be provided with clamps 22 (see FIG. 4) for fixing the ring frame placed thereon, similar to the first support unit 10 and the second support unit 12 of the expansion device 8 described above.

[0117] The sheet pressing and expanding unit 54 of the expansion device 48 presses the expanding sheet 9 from below to expand it. The sheet pressing and expanding unit 54 of the expansion device 48 according to the modified example has a pressing portion 55 that presses the expanding sheet 9 from below. Here, unlike the expansion device 8 described above, the pressing portion 55 of the sheet pressing and expanding unit 54 of the expansion device 48 does not have the two components, the fixed portion 26 and the inclined portion 28.

[0118] The pressing portion 55 of the sheet pressing and expanding unit 54 presses the expanding sheet 9 while passing through the opening 7a of the first ring frame 7 of the workpiece unit 11 supported by the first support unit 52. At this time, the pressing portion 55 advances from a direction intersecting the opening 7a of the first ring frame 7 (vertical upward) to a direction inclined radially outward (a direction between the vertical upward and horizontal directions, the pressing direction).

[0119] Then, the pressing portion 55 presses the expanding sheet 9 against the second ring frame 19 to bring the expanding sheet 9 into contact with the second ring frame 19, thereby fixing the expanding sheet 9 to the second ring frame 19. Fig. 11(B) is a cross-sectional view schematically showing how the expanding sheet 9 is expanded in an expansion device 48 according to a modified example.

[0120] 11(A) and 11(B), the second ring frame 19 to which the expanded expanding sheet 9 is fixed does not have to be the same type of ring frame as the first ring frame 7. For example, the second ring frame 19 may be smaller than the first ring frame 7, and the opening 19a of the second ring frame 19 may have a smaller diameter than the opening 7a of the first ring frame 7.

[0121] However, even in this case, the opening 19a of the second ring frame 19 must be large enough to accommodate the workpiece 1 (plurality of chips 15) fixed to the expanded sheet 9.

[0122] In this case, the tip (upper end) of the pressing portion 55 that presses the expanding sheet 9 does not need to advance into the region between the first ring frame 7 and the second ring frame 19. Even if the tip of the pressing portion 55 does not advance into this region, the pressing portion 55 can press the expanding sheet 9 against the second ring frame 19.

[0123] After the sheet pressing and expanding unit 54 expands and presses the expanding sheet 9 to fix the expanding sheet 9 to the second ring frame 19, the expanding device 48 may cut the expanding sheet 9 along the openings 19a of the second ring frame 19. When the expanding sheet 9 is cut, a frame unit is formed that includes the expanded expanding sheet 9, the second ring frame 19, and the workpiece 1 (chip 15).

[0124] The structures, methods, etc. according to the above-described embodiments can be modified as appropriate without departing from the scope of the object of the present invention. [Explanation of symbols]

[0125] 1 Workpiece 1a surface 1b back side 3 Planned division line 3a Altered layer 3b Gap 5 Devices 7. First Ring Frame 7a aperture 9 Expanded Sheet 11 Workpiece unit 13,19 Second ring frame 13a,19a opening 15 chips 17 Frame Unit 2. Laser processing equipment 4 Laser processing unit 4a Processing head 4b Focus point 6 Laser Beam 8,48 Expansion Unit 10,52 First support unit 12,50 Second support unit 14,54 Sheet pressing expansion unit 16,16a,16b,56a,56b Support part 18,18a,18b,58a,58b Top surface 20,20a,20b opening 22 Clamp 24,55 Pressing part 26 Fixed part 28 Diagonal section 30 Drive unit 32 Moving support part 34 Elevating body 36 Support Arm 38-pin 40 Guide section 42 Guide hole 44 Support column 46 Cutter

Claims

1. An expansion method for expanding an expandable sheet of a workpiece unit including a plate-shaped workpiece having a division starting point or a division groove formed therein, a first ring frame having an opening and arranged to surround the workpiece, and an expandable sheet attached to the workpiece and the first ring frame, comprising: a first placing step of placing the first ring frame of the workpiece unit on a first support unit; a second placement step of placing a second ring frame having an opening on a second support unit overlapping the first support unit; and an expansion step of, after the first and second arrangement steps, pressing the expandable sheet inside the opening of the first ring frame to radially expand the expandable sheet, In the expansion step, a central region of the expandable sheet surrounded by the region attached to the first ring frame is pressed in a direction inclined radially outward from a direction perpendicular to the opening of the first ring frame, In the expanding step, the distance between each chip formed by dividing the workpiece at the dividing starting point or the dividing groove is increased, In the expanding step, the expanded sheet is fixed to the second ring frame disposed on the second support unit.

2. The planar shape of the first ring frame is the same as the planar shape of the second ring frame; When the first and second arranging steps are performed, the opening of the first ring frame overlaps with the opening of the second ring frame; The expansion method described in claim 1, wherein a portion of the exposed portion of the expanded sheet between the first ring frame and the workpiece before expansion enters the area sandwiched between the first ring frame and the second ring frame when the expansion step is performed.

3. The expansion method according to claim 1 or claim 2, further comprising an expanded sheet cutting step of cutting the expanded sheet fixed to the second ring frame along the opening of the second ring frame after the expansion step.

4. An expansion device for expanding an expandable sheet of a workpiece unit including a plate-shaped workpiece on which division starting points or division grooves are formed, a first ring frame having an opening and arranged to surround the workpiece, and an expandable sheet attached to the workpiece and the first ring frame, a first support unit that supports the first ring frame of the workpiece unit; a second support unit that overlaps with the first support unit and supports a second ring frame having an opening; a sheet pressing and expanding unit that can press a central region of the workpiece unit, the central region being surrounded by a region of the expand sheet attached to the first ring frame, of the workpiece unit, the first ring frame being supported by the first support unit, in a pressing direction that is inclined radially outward from a direction perpendicular to the opening of the first ring frame; The sheet pressing and expanding unit is an expansion device that expands the expanding sheet, thereby increasing the distance between each chip formed by dividing the workpiece at the dividing starting point or the dividing groove, and can fix the expanded expanding sheet to the second ring frame arranged on the second support unit.

5. The sheet pressing and expanding unit includes: A moving support part; a drive unit that moves the movable support unit along a direction perpendicular to the opening of the first ring frame supported by the first support unit; a pressing section that is supported by the movement support section via a guide section and presses the expanding sheet, The expansion device according to claim 4 , wherein the guide portion guides the pressing portion to move in the pressing direction.

6. 6. The expansion device according to claim 4, wherein the planar shape of the first ring frame supported by the first support unit coincides with the planar shape of the second ring frame supported by the second support unit.

7. The expansion device according to claim 4 or claim 5, further comprising a cutter that cuts the expanding sheet fixed to the second ring frame along the opening of the second ring frame.

Images