Sensor and electronic device

Abstract

To provide a sensor and an electronic device whose performance can be improved.SOLUTION: According to an embodiment, a sensor includes a mounting member, a sensor unit, and a fixing member. The mounting member includes a first mounting portion. The sensor unit includes a sensor base and a first sensor portion. The sensor base includes a first region, a second region, and a first end portion. The first region is located between the second region and the first end portion. The first sensor portion includes a first support section fixed to the first region, a first movable section supported by the first support section, and a first fixed electrode fixed to the first region. A first gap is provided between the first region and the first movable section. The fixing member fixes the second region to the first mounting portion. The first end portion is a free end.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD OF THE INVENTION Embodiments of the present invention relate to sensors and electronic devices. [Background technology]

[0002] For example, acceleration and the like are detected by sensors having MEMS structures, and improvements in the performance of sensors are desired. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2020-11375 Summary of the Invention [Problem to be solved by the invention]

[0004] Embodiments of the present invention provide sensors and electronic devices that can improve performance. [Means for solving the problem]

[0005] According to an embodiment of the present invention, a sensor includes a mounting member, a sensor unit, and a fixing member. The mounting member includes a first mounting member. The sensor unit includes a sensor base and a first sensor unit. The sensor base includes a first region, a second region, and a first end. The first region is located between the second region and the first end. The first sensor unit includes a first support portion fixed to the first region, a first movable portion supported by the first support portion, and a first fixed electrode fixed to the first region. A first gap is provided between the first region and the first movable portion. The fixing member fixes the second region to the first mounting member. The first end is a free end. [Brief explanation of the drawings]

[0006] [Figure 1] 1(a) and 1(b) are schematic views illustrating the sensor according to the first embodiment. [Figure 2] 2A and 2B are schematic plan views illustrating a part of the sensor according to the first embodiment. [Figure 3] 3(a) to 3(c) are schematic cross-sectional views illustrating a part of the sensor according to the first embodiment. [Figure 4] FIG. 4 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 5] FIG. 5 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 6] FIG. 6 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 7] FIG. 7 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 8] FIG. 8 is a schematic plan view illustrating a part of the sensor according to the first embodiment. [Figure 9] FIG. 9 is a schematic plan view illustrating a part of the sensor according to the first embodiment. [Figure 10] 10(a) to 10(d) are schematic cross-sectional views illustrating a part of the sensor according to the first embodiment. [Figure 11] FIG. 11 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 12] FIG. 12 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 13] 13A and 13B are schematic cross-sectional views illustrating the sensor according to the first embodiment. [Figure 14] FIG. 14 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 15] 15(a) and 15(b) are schematic plan views illustrating a part of the sensor according to the first embodiment. [Figure 16] 16A and 16B are schematic cross-sectional views illustrating a part of the sensor according to the first embodiment. [Figure 17] FIG. 17 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 18] FIG. 18 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 19] FIG. 19 is a schematic view illustrating an electronic device according to the second embodiment. [Figure 20] 20(a) to 20(h) are schematic views illustrating applications of the electronic device according to the embodiment. [Figure 21] 21(a) and 21(b) are schematic diagrams illustrating applications of the sensor according to the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as those in reality. Even when the same part is shown, the dimensions and ratios may be different depending on the drawing. In this specification and in each drawing, elements similar to those previously described with reference to the previous drawings are designated by the same reference numerals, and detailed descriptions thereof will be omitted where appropriate.

[0008] (First embodiment) 1(a) and 1(b) are schematic views illustrating the sensor according to the first embodiment. Fig. 1(a) is a side view, and Fig. 1(b) is a plan view. 2A and 2B are schematic plan views illustrating a part of the sensor according to the first embodiment. 3(a) to 3(c) are schematic cross-sectional views illustrating a part of the sensor according to the first embodiment. Fig. 3(a) is a cross-sectional view taken along line A1-A2 in Fig. 2. Fig. 3(b) is a cross-sectional view taken along line A3-A4 in Fig. 2. Fig. 3(c) is a cross-sectional view taken along line A5-A6 in Fig. 2.

[0009] 1(a) and 1(b), a sensor 110 according to this embodiment includes a mounting member 60, a sensor unit 10E, and a fixing member 41. The mounting member 60 includes a first mounting portion 61.

[0010] As shown in Figures 1(a), 2(a), and 3(a) to 3(c), the sensor unit 10E includes a sensor base 50s and a first sensor unit 10Ea. The sensor base 50s includes a first region 50a, a second region 50b, and a first end portion 50e. The first region 50a is located between the second region 50b and the first end portion 50e.

[0011] The first sensor unit 10Ea includes a first support unit 11s, a first movable unit 10A, and a first fixed electrode 21. The first support unit 11s is fixed to the first region 50a. The first movable unit 10A is supported by the first support unit 11s. The first fixed electrode 21 is fixed to the first region 50a. A first gap g1 is provided between the first region 50a and the first movable unit 10A. A first intermediate layer 51i may be provided between the first region 50a and the first support unit 11s. The first intermediate layer 51i may be an insulating layer.

[0012] As shown in FIGS. 1(a) and 1(b), the fixing member 41 fixes the second region 50b to the first mounting portion 61. In the embodiment, the first end portion 50e is a free end. For example, a second gap g2 is provided between the first mounting portion 61 and the first region 50a. For example, a second gap g2 is provided between the first mounting portion 61 and the first end portion 50e.

[0013] For example, a part of the first movable part 10A may function as a movable electrode. A detection signal generated between the movable electrode and the first fixed electrode 21 changes depending on the acceleration applied to the sensor part 10E. The acceleration can be detected by detecting the detection signal or a signal corresponding to the detection signal.

[0014] When a temperature change occurs in the sensor 110, stress may occur in the sensor unit 10E due to differences in thermal expansion coefficients, etc. For example, in the reference example, the entire sensor base 50s is fixed to the first mounting portion 61 by the fixing member 41. In the reference example, stress (thermal stress) due to temperature change is likely to occur in the sensor unit 10E. The thermal stress affects the detection signal. In the reference example, it is difficult to obtain sufficiently high detection accuracy.

[0015] In contrast, in the embodiment, the second region 50b of the sensor base 50s is fixed to the first mounting portion 61 by the fixing member 41. On the other hand, the first region 50a where the sensor unit 10E is provided is not fixed to the first mounting portion 61. Because the first end 50e is a free end, the first end 50e can be freely displaced in response to temperature changes. For example, the first region 50a can also be freely displaced in response to temperature changes. For example, thermal stress in the sensor unit 10E is suppressed. In the embodiment, the effects of temperature changes can be suppressed. According to the embodiment, a sensor capable of improving performance is provided.

[0016] As shown in Fig. 3(b), the direction from the first region 50a to the first support portion 11s is defined as a first direction D1. As shown in Fig. 1(a), the direction from the first region 50a to the first end portion 50e is defined as a second direction D2. The second direction D2 intersects with the first direction D1.

[0017] The first direction D1 is the Z-axis direction. One direction perpendicular to the Z-axis direction is the X-axis direction. The direction perpendicular to the Z-axis direction and the X-axis direction is the Y-axis direction. The second direction D2 may be, for example, the X-axis direction.

[0018] The first mounting portion 61 may be substantially along the XY plane. The sensor base 50s is substantially along the XY plane. The direction from the first mounting portion 61 to the sensor base 50s is along the first direction D1.

[0019] 2(a), the first movable portion 10A may include a first movable electrode 11. For example, the first movable electrode 11 faces the first fixed electrode 21 in the second direction D2. A first signal generated between the first movable electrode 11 and the first fixed electrode 21 changes depending on the acceleration applied to the sensor portion 10E. The acceleration is detected by detecting a value based on the first signal.

[0020] As shown in FIG. 2(a), the first movable portion 10A may further include a first movable base portion 18A, a second movable base portion 18B, and a first beam 11M. The first movable base portion 18A is connected to the first support portion 11s. A portion of the first beam 11M is connected to the first movable base portion 18A. Another portion of the first beam 11M is connected to the second movable base portion 18B. For example, the first beam 11M extends along a third direction D3. The third direction D3 intersects with a plane including the first direction D1 and the second direction D2. The third direction D3 may be, for example, the Y-axis direction. The first movable electrode 11 is connected to the first beam 11M.

[0021] For example, the resonant frequency of the first beam 11M may change due to acceleration applied to the sensor unit 10E. The change in the resonant frequency may be detected by a first signal generated between the first movable electrode 11 and the first fixed electrode 21. The acceleration may be detected by detecting the change in the resonant frequency.

[0022] As shown in FIG. 2(a), the first movable portion 10A may include a first movable connecting portion 18P. The first movable connecting portion 18P is provided between the first movable base portion 18A and the first support portion 11s. The first support portion 11s supports the first movable connecting portion 18P. The first movable connecting portion 18P supports the first movable base portion 18A. The length (width) of the first movable connecting portion 18P along the third direction D3 is shorter than the length (width) of the first movable base portion 18A along the third direction D3. For example, the first movable base portion 18A may be deformed (or displaced) so as to rotate within the XY plane around the first movable connecting portion 18P.

[0023] For example, deformation (or displacement) of the first movable base 18A applies stress to the first beam 11M. The stress generated in the first beam 11M changes the resonant frequency of the first beam 11M. Acceleration is detected by detecting the change in the resonant frequency. By providing the first movable connecting part 18P with a narrow width, the deformation (displacement) of the first movable base 18A due to acceleration becomes large. High sensitivity is obtained.

[0024] 2(a), the first movable section 10A may include a first movable part 18X. The first movable part 18X is connected to a first movable base 18A. For example, the first movable base 18A is provided between the first movable part 18X and the first support 11s in the second direction D2. A first movable connection part 18P is provided between the first movable base 18A and the first support 11s in the second direction D2.

[0025] The length (width) of the first movable part 18X along the third direction D3 is longer than the length (width) of the first movable base 18A along the third direction D3. By providing the first movable part 18X, the deformation (displacement) of the first movable base 18A in response to acceleration can be increased. The first movable part 18X functions as, for example, a proof mass.

[0026] 2(a) and 3(c), the first sensor unit 10Ea may further include a second fixed electrode 22. The second fixed electrode 22 is fixed to the first region 50a. The first movable unit 10A may further include a second movable electrode 12. The second movable electrode 12 faces the second fixed electrode 22 in the second direction D2.

[0027] The first movable part 10A may further include a second other movable base part 18BM and a second beam 12M. A portion of the second beam 12M is connected to the second other movable base part 18BM. Another portion of the second beam 12M is connected to the first movable base part 18A. The second beam 12M extends along a third direction D3. In this example, the direction from the second beam 12M to the first beam 11M is along the third direction D3.

[0028] The second movable electrode 12 is connected to the second beam 12M. For example, the first resonant frequency of the first beam 11M and the second resonant frequency of the second beam 12M change in response to the acceleration applied to the sensor unit 10E. The change in the resonant frequency corresponds to, for example, a change in the stress applied to the beam.

[0029] In one state of acceleration, when the first resonant frequency increases, the second resonant frequency decreases. In another state of acceleration, when the first resonant frequency decreases, the second resonant frequency increases. By detecting the change in the difference between the two resonant frequencies, acceleration can be detected with higher sensitivity. Acceleration can be detected with higher accuracy. The detected acceleration includes a component in a direction intersecting the first direction D1. In this example, the detected acceleration includes, for example, a component in a third direction D3.

[0030] As shown in FIG. 2(a), the first sensor unit 10Ea may further include a first other fixed electrode 31 and a second other fixed electrode 32. The first other fixed electrode 31 and the second other fixed electrode 32 are fixed in the first region 50a. The first other fixed electrode 31 faces the first movable electrode 11. The second other fixed electrode 32 faces the second movable electrode 12. In this example, in the second direction D2, at least a portion of the first movable electrode 11 is located between the first fixed electrode 21 and the first other fixed electrode 31. In the second direction D2, at least a portion of the second movable electrode 12 is located between the second fixed electrode 22 and the second other fixed electrode 32.

[0031] For example, an AC signal is applied between the first movable electrode 11 and the first other fixed electrode 31. This AC signal causes the first beam 11M to vibrate. A change in the first resonant frequency of the first beam 11M due to acceleration may be detected by a first signal between the first fixed electrode 21 and the first movable electrode 11.

[0032] For example, an AC signal is applied between the second movable electrode 12 and the second other fixed electrode 32. This AC signal causes the second beam 12M to vibrate. A change in the second resonant frequency of the second beam 12M due to acceleration may be detected by a second signal between the second fixed electrode 22 and the second movable electrode 12.

[0033] The first other fixed electrode 31 and the second other fixed electrode 32 are, for example, drive electrodes. The first fixed electrode 21 and the second fixed electrode 22 are, for example, detection electrodes.

[0034] 2(a), in this example, the first sensor unit 10Ea further includes a first opposing fixed electrode 21A, a second opposing fixed electrode 22A, a first opposing other fixed electrode 31A, and a second opposing other fixed electrode 32A. These fixed electrodes are fixed to the first region 50a.

[0035] As shown in FIG. 2(a), in this example, the first movable part 10A includes a first opposing movable electrode 11A and a second opposing movable electrode 12A. The first opposing fixed electrode 21A faces the first opposing movable electrode 11A in the second direction D2. The first opposing other fixed electrode 31A faces the first opposing movable electrode 11A in the second direction D2. In this example, the first opposing movable electrode 11A is located between the first opposing fixed electrode 21A and the first opposing other fixed electrode 31A. The second opposing fixed electrode 22A faces the second opposing movable electrode 12A in the second direction D2. The second opposing other fixed electrode 32A faces the second opposing movable electrode 12A in the second direction D2. In this example, the second opposing movable electrode 12A is located between the second opposing fixed electrode 22A and the second opposing other fixed electrode 32A.

[0036] 3(b), for example, the first movable part 10A may include a first movable part electrode 11E. The first movable part electrode 11E is electrically connected to the first movable electrode 11, the second movable electrode 12, the first opposing movable electrode 11A, and the second opposing movable electrode 12A.

[0037] 2(b), a control unit 70 may be provided. The control unit 70 may be included in the sensor 110. The control unit 70 may be provided separately from the sensor 110. The control unit 70 may be configured to supply drive signals (e.g., AC signals) to, for example, the first other fixed electrode 31, the second other fixed electrode 32, the first opposing other fixed electrode 31A, and the second opposing other fixed electrode 32A.

[0038] The control unit 70 may be electrically connected to, for example, the first fixed electrode 21, the second fixed electrode 22, the first opposing fixed electrode 21A, and the second opposing fixed electrode 22A. The control unit 70 may be configured to detect signals between each of these fixed electrodes and the first movable part 10A.

[0039] In an embodiment, acceleration may be detected based on the detection result of the difference between the first resonant frequency of the first beam 11M and the second resonant frequency of the second beam 12M. As already described, in the embodiment, for example, adverse effects due to thermal stress are mitigated. For example, stress relaxation due to creep is suppressed. For example, changes in resonant frequency caused by thermal stress are suppressed.

[0040] For example, it is possible to suppress a change in the distance between the first movable electrode 11 and the first fixed electrode 21 due to a change in temperature. For example, it is possible to suppress the influence of a change in the soft spring effect due to the electrostatic spring.

[0041] As already described, in the embodiment, the second region 50b is fixed to the first mounting portion 61 by the fixing member 41. At least a portion of the first region 50a is not fixed to the first mounting portion 61, and the first end portion 50e is a free end. For example, the first region 50a is deformable in response to temperature changes. On the other hand, the second region 50b is easily deformed by stress caused by temperature changes. For example, the rate of change of the first curvature of the first region 50a in the second direction D2 with respect to temperature is defined as the first rate of change. The change of the second curvature of the second region 50b in the second direction D2 with respect to temperature is defined as the second rate of change. For example, the first rate of change is lower than the second rate of change.

[0042] 1(a) and 1(b), a portion of the fixing member 41 may be provided between the first mounting portion 61 and the second region 50b. Another portion of the fixing member 41 may not overlap with the second region 50b.

[0043] For example, the second region 50b includes a first side surface 50sf. The first side surface 50sf intersects with a plane (e.g., the XY plane) that intersects with the first direction D1. The fixing member 41 may be in contact with the first side surface 50sf. This allows for high-strength fixing.

[0044] The second region 50b may include a plurality of first side surfaces 50sf. One of the plurality of first side surfaces 50sf is, for example, along the X-axis direction. Another of the plurality of first side surfaces 50sf is, for example, along the Y-axis direction.

[0045] 1(b), a plurality of fixing members 41 may be provided. A direction from one of the plurality of fixing members 41 to another of the plurality of fixing members 41 may intersect with the first direction D1 and may intersect with the second direction D2.

[0046] The direction from one of the plurality of fixing members 41 to another of the plurality of fixing members 41 may intersect with the first direction D1 and be along the second direction D2.

[0047] FIG. 4 is a schematic plan view illustrating the sensor according to the first embodiment. 4, the sensor 111 according to this embodiment has one fixing member 41. The fixing member 41 is provided between the first mounting portion 61 and the second region 50b. Except for this, the configuration of the sensor 111 may be the same as the configuration of the sensor 110.

[0048] FIG. 5 is a schematic plan view illustrating the sensor according to the first embodiment. 5, the number of fixing members 41 in the sensor 112 according to the embodiment is three. The direction from one of the fixing members 41 to another of the fixing members 41 may be inclined with respect to the second direction D2. Except for this, the configuration of the sensor 112 may be similar to the configuration of the sensor 110.

[0049] FIG. 6 is a schematic plan view illustrating the sensor according to the first embodiment. 6, in the sensor 113 according to the embodiment, the number of fixing members 41 is 3. Except for this, the configuration of the sensor 113 may be the same as the configuration of the sensor 110.

[0050] FIG. 7 is a schematic plan view illustrating the sensor according to the first embodiment. 8 and 9 are schematic plan views illustrating a part of the sensor according to the first embodiment. 10(a) to 10(d) are schematic cross-sectional views illustrating a part of the sensor according to the first embodiment. Fig. 10(a) is a cross-sectional view taken along line A7-A8 in Fig. 8. Fig. 10(c) is a cross-sectional view taken along line A9-A10 in Fig. 8. Fig. 10(b) is a cross-sectional view taken along line B1-B2 in Fig. 8. Fig. 10(d) is a cross-sectional view taken along line B3-B4 in Fig. 8.

[0051] 7, in the sensor 114 according to the embodiment, the sensor base 50s further includes a second end 50f in addition to the first end 50e. A direction from the second end 50f toward the first region 50a (e.g., a third direction D3) intersects with a plane including the first direction D1 and the second direction D2. The third direction D3 extends, for example, along the Y-axis direction. The second end 50f is a free end. The remaining configuration of the sensor 114 may be similar to that of the sensor 110.

[0052] In the sensor 114, the provision of the first free end 50e can suppress the influence of thermal stress in the first region 50a along the second direction D2, and the provision of the second free end 50f can suppress the influence of thermal stress in the first region 50a along the third direction D3.

[0053] In the sensor 114, the sensor unit 10E includes a first sensor unit 10Ea and a second sensor unit 10Eb.

[0054] As already explained, the first sensor unit 10Ea includes a first support unit 11s, a first movable unit 10A, and a first fixed electrode 21 (see FIG. 8). As shown in FIG. 10(b), the first support unit 11s is fixed to the first region 50a. The first movable unit 10A is supported by the first support unit 11s. As shown in FIG. 10(a), the first fixed electrode 21 is fixed to the first region 50a. A first gap g1 is provided between the first region 50a and the first movable unit 10A. A first intermediate layer 51i may be provided between the first region 50a and the first support unit 11s. The first intermediate layer 51i may be an insulating layer.

[0055] The first movable part 10A may include a first movable electrode 11. The first movable electrode 11 faces the first fixed electrode 21 in the second direction D2. For example, acceleration may be detected based on detection of a value corresponding to a first signal generated between the first movable electrode 11 and the first fixed electrode 21.

[0056] As shown in FIG. 8, the second sensor unit 10Eb includes a second support unit 12s, a second movable unit 10B, and a second fixed electrode 22. As shown in FIG. 10(c), the second support unit 12s is fixed to the first region 50a. The second movable unit 10B is supported by the second support unit 12s. As shown in FIG. 10(d), the second fixed electrode 22 is fixed to the first region 50a. A portion of the first gap g1 is provided between the first region 50a and the second movable unit 10B. A second intermediate layer 52i may be provided between the first region 50a and the second support unit 12s. The second intermediate layer 52i may be an insulating layer.

[0057] The second movable part 10B may further include a second movable electrode 12. In this example, the second movable electrode 12 faces the second fixed electrode 22 in the third direction D3. For example, the acceleration may be detected based on detection of a value according to a second signal generated between the second movable electrode 12 and the second fixed electrode 22.

[0058] For example, the direction of the first acceleration component of the acceleration detected by the first sensor unit 10Ea may intersect with the direction of the second acceleration component of the acceleration detected by the second sensor unit 10Eb. For example, acceleration components along multiple directions can be detected.

[0059] As shown in FIG. 8, in this example, the first movable portion 10A may further include a first movable base portion 18A, a second movable base portion 18B, and a first beam 11M. The first movable base portion 18A is connected to the first support portion 11s. A portion of the first beam 11M is connected to the first movable base portion 18A. Another portion of the first beam 11M is connected to the second movable base portion 18B. For example, the first beam 11M extends along a third direction D3. The first movable electrode 11 is connected to the first beam 11M.

[0060] As shown in FIG. 10(a), the first sensor unit 10Ea may include a first opposing fixed electrode 21A. The first opposing fixed electrode 21A is fixed to the first region 50a. The first movable unit 10A may include a first opposing movable electrode 11A and a first opposing beam 11AM. The first opposing fixed electrode 21A faces the first opposing movable electrode 11A in the second direction D2. A portion of the first opposing beam 11AM is connected to the first movable base 18A. Another portion of the first opposing beam 11AM is connected to the second movable base 18B. For example, the first opposing beam 11AM extends along the third direction D3. The first opposing movable electrode 11A is connected to the first opposing beam 11AM. The first movable unit 10A may further include a first movable part 18X connected to the second movable base 18B.

[0061] For example, the first sensor unit 10Ea may detect the difference between the first resonance frequency of the first beam 11M and the third resonance frequency of the first opposing beam 11AM, thereby achieving high sensitivity and high accuracy.

[0062] 8, in this example, the second movable portion 10B may further include a third movable base portion 18C, a fourth movable base portion 18D, and a second beam 12M. The third movable base portion 18C is connected to the second support portion 12s. A portion of the second beam 12M is connected to the third movable base portion 18C. Another portion of the second beam 12M is connected to the fourth movable base portion 18D. For example, the second beam 12M extends along the second direction D2. The second movable electrode 12 is connected to the second beam 12M.

[0063] As shown in FIG. 10(d), the second sensor unit 10Eb may include a second opposing fixed electrode 22A. The second opposing fixed electrode 22A is fixed to the first region 50a. The second movable unit 10B may include a second opposing movable electrode 12A and a second opposing beam 12AM. The second opposing fixed electrode 22A faces the second opposing movable electrode 12A in the third direction D3. A portion of the second opposing beam 12AM is connected to the third movable base 18C. Another portion of the second opposing beam 12AM is connected to the fourth movable base 18D. For example, the second opposing beam 12AM extends along the second direction D2. The second opposing movable electrode 12A is connected to the second opposing beam 12AM. The second movable unit 10B may further include a second movable part 18Y connected to the fourth movable base 18D.

[0064] For example, the second sensor unit 10Eb may detect the difference between the second resonance frequency of the second beam 12M and the fourth resonance frequency of the second opposing beam 12AM, thereby achieving high sensitivity and high accuracy.

[0065] The first movable part 10A may include a first movable connecting part 18P provided between the first movable base part 18A and the second movable base part 18B. The length of the first movable connecting part 18P along the second direction D2 is shorter than the length of the first movable base part 18A along the third direction D3.

[0066] The second movable portion 10B may include a second movable connecting portion 18Q provided between the third movable base portion 18C and the fourth movable base portion 18D. The length of the second movable connecting portion 18Q along the third direction D3 is shorter than the length of the third movable base portion 18C along the third direction D3.

[0067] 7, the first sensor unit 10Ea may include a first other fixed electrode 31 and a first opposing other fixed electrode 31A. The second sensor unit 10Eb may include a second other fixed electrode 32 and a second opposing other fixed electrode 32A. These other fixed electrodes are fixed in the first region 50a. The first other fixed electrode 31 faces the first movable electrode 11. The second other fixed electrode 32 faces the second movable electrode 12. The first opposing other fixed electrode 31A faces the first opposing movable electrode 11A. The second opposing other fixed electrode 32A faces the second opposing movable electrode 12A.

[0068] 8, for example, the first movable part 10A may include a first movable part electrode 11E. The first movable part electrode 11E is electrically connected to the first movable electrode 11 and the first opposing movable electrode 11A.

[0069] 8, for example, the second movable portion 10B may include a second movable portion electrode 12E. The second movable portion electrode 12E is electrically connected to the second movable electrode 12 and the second opposing movable electrode 12A.

[0070] 9, a control unit 70 may be provided. The control unit 70 may be included in the sensor 114. The control unit 70 may be provided separately from the sensor 114. The control unit 70 may be configured to supply drive signals (e.g., AC signals) to, for example, the first other fixed electrode 31, the second other fixed electrode 32, the first opposing other fixed electrode 31A, and the second opposing other fixed electrode 32A.

[0071] The control unit 70 may be electrically connected to, for example, the first fixed electrode 21 and the first opposing fixed electrode 21A. The control unit 70 may be configured to detect signals between each of these fixed electrodes and the first movable part 10A. The control unit 70 may be electrically connected to, for example, the second fixed electrode 22 and the second opposing fixed electrode 22A. The control unit 70 may be configured to detect signals between each of these fixed electrodes and the second movable part 10B.

[0072] 7, the direction from the first sensor unit 10Ea to the first end 50e is along the second direction D2. The direction from the second sensor unit 10Eb to the first end 50e is along the second direction D2. The direction from the second end 50f to the first sensor unit 10Ea is along the third direction D3. The direction from the second end 50f to the second sensor unit 10Eb is along the third direction D3.

[0073] FIG. 11 is a schematic plan view illustrating the sensor according to the first embodiment. As shown in FIG. 11 , a sensor 115 according to the embodiment is provided with a plurality of fixing members 41. The plurality of fixing members 41 are provided between the first mounting portion 61 and the second region 50b. A first sensor unit 10Ea is provided in the sensor 115. The second sensor unit 10Eb is omitted from the sensor 115. The remaining configuration of the sensor 115 may be similar to that of the sensor 110. The sensor 115 is also susceptible to the effects of thermal stress. A sensor capable of improving performance is provided.

[0074] FIG. 12 is a schematic plan view illustrating the sensor according to the first embodiment. 13A and 13B are schematic cross-sectional views illustrating the sensor according to the first embodiment. 13(a) is a cross-sectional view taken along line B5-B6 in FIG. 12, and FIG. 13(b) is a cross-sectional view taken along line B7-B8 in FIG.

[0075] 12, in the sensor 116 according to the embodiment, the sensor base 50s further includes a third region 50c and a third end portion 50g. Except for this, the configuration of the sensor 116 may be similar to the configuration of the sensor 110.

[0076] The second region 50b is disposed between the third region 50c and the first region 50a. The direction from the third end 50g to the third region 50c is the same as the direction from the first region 50a to the first end 50e. In this example, these directions are the second direction D2. The third end 50g is a free end.

[0077] In the sensor 116, the sensor unit 10E includes a second sensor unit 10Eb. As shown in FIG. 12, the second sensor unit 10Eb includes a second support unit 12s, a second movable unit 10B, and a second fixed electrode 22. As shown in FIG. 13(b), the second support unit 12s is fixed to the third region 50c. The second movable unit 10B is supported by the second support unit 12s. As shown in FIG. 12, the second fixed electrode 22 is fixed to the third region 50c. A third gap g3 is provided between the third region 50c and the second movable unit 10B. The sensor 116 is also susceptible to the effects of thermal stress. A sensor capable of improving performance is provided.

[0078] In the sensor 116, the second movable electrode 12 faces the second fixed electrode 22 in the second direction D2. The second beam 12M extends along the third direction D3.

[0079] FIG. 14 is a schematic plan view illustrating the sensor according to the first embodiment. 15(a) and 15(b) are schematic plan views illustrating a part of the sensor according to the first embodiment. 16A and 16B are schematic cross-sectional views illustrating a part of the sensor according to the first embodiment. Figure 16(a) is a cross-sectional view taken along line A1-A2 in Figure 15(a), and Figure 16(b) is a cross-sectional view taken along line A3-A4 in Figure 15(a).

[0080] 14, in the sensor 117 according to the embodiment, the shape of the first sensor portion 10Ea is different from the shape of the first sensor portion 10Ea in the sensor 110 etc. Except for this, the configuration of the sensor 117 may be similar to the configuration of the sensor 110 etc.

[0081] As shown in FIG. 15(a), in the sensor 117, the first sensor unit 10Ea includes a first support unit 11s, a first movable unit 10A, and a first fixed electrode 21. As shown in FIG. 16(a), the first support unit 11s is fixed to a first region 50a of the base body 50. The first movable unit 10A is supported by the first support unit 11s. The first fixed electrode 21 is fixed to the first region 50a. A first gap g1 is provided between the first region 50a and the first movable unit 10A.

[0082] The first movable portion 10A includes a first movable electrode 11. The first movable electrode 11 faces the first fixed electrode 21 in the second direction D2. In the sensor 117, a first signal generated between the first movable electrode 11 and the first fixed electrode 21 also changes in response to acceleration applied to the sensor portion 10E. For example, the first signal generated between the first movable electrode 11 and the first fixed electrode 21 may correspond to a change in the distance between the first movable electrode 11 and the first fixed electrode 21. The first signal may correspond to a change in the electrostatic capacitance between the first movable electrode 11 and the first fixed electrode 21.

[0083] In the sensor 117, the first movable section 10A includes a first movable part 18X. A part of the first movable part 18X becomes the first movable electrode 11. In this example, the first movable section 10A includes a first beam 11M. The first beam 11M is supported by a first support section 11s. The first beam 11M supports the first movable part 18X. The first beam 11M extends along a third direction D3.

[0084] For example, acceleration including a component in the second direction D2 is applied to the sensor unit 10E. The applied acceleration displaces the first movable part 18X. The displacement includes a component along the second direction D2. The displacement changes the distance between the first movable electrode 11 and the first fixed electrode 21. The change in distance is detected. For example, the acceleration is detected by detecting a change in the capacitance between the first movable electrode 11 and the first fixed electrode 21.

[0085] In this example, a plurality of first support portions 11s are provided, and a plurality of first beams 11M are provided. A portion of one of the plurality of first beams 11M is supported by one of the plurality of first support portions 11s. Another portion of each of the plurality of first beams 11M is connected to the first movable part 18X.

[0086] In this example, the first sensor unit 10Ea further includes a first opposing fixed electrode 21A. The first movable part 18X is located between the first fixed electrode 21 and the first opposing fixed electrode 21A in the second direction D2. A part of the first movable part 18X may serve as the first opposing movable electrode 11A. The first opposing movable electrode 11A faces the first opposing fixed electrode 21A in the second direction D2.

[0087] The first other signal generated between the first opposing movable electrode 11A and the first opposing fixed electrode 21A may change in accordance with the acceleration.

[0088] 15(b), a first movable part electrode 11E may be provided on the first movable part 10A. The first movable part electrode 11E is electrically connected to the first movable electrode 11 and the first opposing movable electrode 11A.

[0089] A control unit 70 may be provided. The control unit 70 may be electrically connected to the first movable portion electrode 11E, the first fixed electrode 21, and the first opposing fixed electrode 21A. The control unit 70 may be configured to detect a first signal generated between the first movable electrode 11E and the first fixed electrode 21. The control unit 70 may be configured to detect a first other signal generated between the first opposing movable electrode 11A and the first opposing fixed electrode 21A. A value corresponding to the difference between the first signal and the first other signal may be detected.

[0090] As such, the first movable portion 10A may further include a first beam 11M. A portion of the first beam 11M is connected to the first support portion 11s. Another portion of the first beam 11M is connected to the first movable electrode 11. The first beam 11M extends along a third direction D3. The third direction D3 intersects with a plane including the first direction D1 and the second direction D2.

[0091] The first sensor unit 10Ea may further include a first opposing fixed electrode 21A fixed to the first region 50a. The first movable unit 10A may further include a first opposing movable electrode 11A. The first opposing movable electrode 11A faces the first opposing fixed electrode 21A in the second direction D2. The first movable electrode 11 is located between the first fixed electrode 21 and the first opposing fixed electrode 21A. The first opposing movable electrode 11A is located between the first movable electrode 11 and the first opposing fixed electrode 21A.

[0092] FIG. 17 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. As shown in FIG. 17 , in a sensor 118 according to the embodiment, a first sensor unit 10Ea includes a first support unit 11s, a first movable unit 10A, and a first fixed electrode 21. The first movable unit 10A may include a first movable electrode 11. In the sensor 118, a displacement of the first movable unit 10A based on acceleration is detected. For example, the first sensor unit 10Ea may be configured to detect a value corresponding to the displacement of the first movable unit 10A in response to the acceleration received by the sensor unit 10E. The acceleration may be detected by detecting a value corresponding to the displacement of the first movable unit 10A. The displacement of the first movable unit 10A may be detected optically or electrically. For example, a value corresponding to a change in the distance between the first movable electrode 11 and the first fixed electrode 21 in response to the acceleration may be detected. This may detect the acceleration. The change in distance may be, for example, a change in the capacitance between the first movable electrode 11 and the first fixed electrode 21. For example, a component of the acceleration in a direction intersecting the first direction D1 may be detected.

[0093] FIG. 18 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. 18, in the sensor 120 according to the embodiment, the mounting member 60 further includes a second mounting portion 62 and a side portion 63 in addition to the first mounting portion 61. The remaining configuration of the sensor 120 may be similar to the configuration of the sensors 110 to 116.

[0094] The sensor unit 10E is provided between the first mounting portion 61 and the second mounting portion 62. A fourth gap g4 is provided between the sensor unit 10E and the second mounting portion 62. The side portion 63 is provided around the sensor unit 10E in a plane (XY plane) that intersects with the direction (first direction D1) from the first mounting portion 61 to the second mounting portion 62. For example, the sensor unit 10E is provided in a space inside the mounting member 60. For example, the space may be reduced in pressure. For example, the air pressure in the space is lower than 1 atmosphere. The influence of heat from the outside can be suppressed. Higher accuracy detection is possible.

[0095] In the embodiment, the sensor base 50s may include, for example, silicon. At least a portion of the first intermediate layer 51i and the second intermediate layer 52i may include an insulating material (for example, silicon oxide, etc.). The first movable part 10A and the second movable part 10B may include, for example, silicon. The mounting member 60 may include, for example, ceramics. The ceramics may include, for example, aluminum oxide. The fixing member 41 may include, for example, a conductive material. The conductive material may include a conductive resin. The conductive resin includes, for example, a plurality of conductive particles and a resin surrounding the plurality of conductive particles. The plurality of conductive particles may include, for example, at least one selected from the group consisting of Ag particles and Au particles. The resin may include at least one selected from the group consisting of epoxy-based resins and silicone-based resins.

[0096] (Second embodiment) The second embodiment relates to an electronic device. FIG. 19 is a schematic view illustrating an electronic device according to the second embodiment. As shown in FIG. 19 , an electronic device 310 according to an embodiment includes the sensor according to the first embodiment and a circuit control unit 170. In this example, the sensor 110 is depicted as the sensor. The circuit control unit 170 can control a circuit 180 based on a signal S1 obtained from the sensor. The circuit 180 is, for example, a control circuit for a drive device 185. According to the embodiment, for example, the circuit 180 for controlling the drive device 185 can be controlled with high precision.

[0097] 19, a sensor system 210 according to an embodiment includes a sensor according to the first embodiment (for example, the sensor 110) and a detection target member 81. The sensor 110 is fixed to the detection target member 81. The sensor 110 can detect a signal from the detection target member 81.

[0098] 20(a) to 20(h) are schematic views illustrating applications of the electronic device according to the embodiment. As shown in FIG. 20(a), the electronic device 310 may be at least a part of a robot. As shown in FIG. 20(b), the electronic device 310 may be at least a part of a machine tool robot installed in a manufacturing factory or the like. As shown in FIG. 20(c), the electronic device 310 may be at least a part of an automated guided vehicle in a factory or the like. As shown in FIG. 20(d), the electronic device 310 may be at least a part of a drone (unmanned aerial vehicle). As shown in FIG. 20(e), the electronic device 310 may be at least a part of an airplane. As shown in FIG. 20(f), the electronic device 310 may be at least a part of a ship. As shown in FIG. 20(g), the electronic device 310 may be at least a part of a submarine. As shown in FIG. 20(h), the electronic device 310 may be at least a part of an automobile. The electronic device 310 may include, for example, at least one of a robot and a moving object.

[0099] 21(a) and 21(b) are schematic diagrams illustrating applications of the sensor according to the embodiment. As shown in FIG. 21(a), a sensor 430 according to the embodiment includes the sensor according to the first embodiment and a transceiver 420. In the example of FIG. 21(a), the sensor 110 is depicted as the sensor. The transceiver 420 can transmit a signal obtained from the sensor 110, for example, wirelessly or by wire. The sensor 430 is provided, for example, on a slope 410 of a road 400 or the like. The sensor 430 can monitor, for example, the condition of a facility (e.g., infrastructure). The sensor 430 may be, for example, a condition monitoring device.

[0100] For example, the sensor 430 detects changes in the condition of the slope surface 410 of the road 400 with high accuracy. The changes in the condition of the slope surface 410 include, for example, at least one of a change in the inclination angle and a change in the vibration state. The signal (inspection result) obtained from the sensor 110 is transmitted by the transceiver unit 420. The condition of a facility (e.g., infrastructure) can be monitored, for example, continuously.

[0101] As shown in FIG. 21(b), the sensor 430 is provided, for example, in a part of a bridge 460. The bridge 460 is provided over a river 470. For example, the bridge 460 includes at least one of a main girder 450 and a pier 440. The sensor 430 is provided in at least one of the main girder 450 and the pier 440. For example, the angle of at least one of the main girder 450 and the pier 440 may change due to deterioration or the like. For example, the vibration state of at least one of the main girder 450 and the pier 440 may change. The sensor 430 detects these changes with high accuracy. The detection result can be transmitted to any location by the transmitter / receiver 420. Abnormalities can be detected effectively.

[0102] The embodiments may include the following technical solutions. (Technical proposal 1) a mounting member including a first mounting portion; a sensor unit including a sensor base and a first sensor unit, wherein the sensor base includes a first region, a second region, and a first end portion, the first region being between the second region and the first end portion, the first sensor unit including a first support portion fixed to the first region, a first movable portion supported by the first support portion, and a first fixed electrode fixed to the first region, and a first gap being provided between the first region and the first movable portion; a fixing member that fixes the second region to the first mounting portion; Equipped with The first end is a free end of the sensor.

[0103] (Technical proposal 2) The sensor described in Technical Solution 1, wherein a second gap is provided between the first mounting portion and the first region.

[0104] (Technical proposal 3) The sensor described in Technical Solution 2, wherein a second direction from the first region to the first end intersects with a first direction from the first region to the first support portion.

[0105] (Technical proposal 4) the first movable portion includes a first movable electrode, The sensor described in Technical Solution 3, wherein the first movable electrode faces the first fixed electrode in the second direction.

[0106] (Technical proposal 5) The sensor described in Technical Solution 4, wherein the first signal generated between the first movable electrode and the first fixed electrode changes according to the acceleration applied to the sensor portion.

[0107] (Technical proposal 6) the first movable part further includes a first movable base, a second movable base and a first beam; a portion of the first beam is connected to the first movable base; Another portion of the first beam is connected to the second movable base, the first beam extends along a third direction; the third direction intersects with a plane including the first direction and the second direction, The sensor described in Technical Solution 4, wherein the first movable electrode is connected to the first beam.

[0108] (Technical proposal 7) the first sensor unit further includes a second fixed electrode fixed to the first region; the first movable portion further includes a second movable electrode; the second movable electrode faces the second fixed electrode in the second direction, the first movable portion further includes a second other movable base and a second beam; a portion of the second beam is connected to the second other movable base; Another portion of the second beam is connected to the first movable base, the second beam extends along the third direction, the second movable electrode is connected to the second beam, The sensor described in Technical Solution 6, wherein the first resonant frequency of the first beam and the second resonant frequency of the second beam change according to the acceleration applied to the sensor portion.

[0109] (Technical proposal 8) A sensor described in any one of Technical Proposals 3 to 7, wherein a first rate of change of a first curvature of the first region in the second direction with respect to temperature is smaller than a second rate of change of a second curvature of the second region in the second direction with respect to temperature.

[0110] (Technical proposal 9) a portion of the fixing member is provided between the first mounting portion and the second region, The sensor according to any one of Technical Schemes 3 to 8, wherein another part of the fixing member does not overlap with the second region.

[0111] (Technical proposal 10) the second region includes a first side surface intersecting a plane intersecting the first direction, The sensor according to any one of Technical Solutions 3 to 8, wherein the fixing member contacts the first side surface.

[0112] (Technical proposal 11) The sensor according to any one of Technical Schemes 3 to 8, wherein the fixing member is provided between the first mounting portion and the second region.

[0113] (Technical proposal 12) A plurality of the fixing members are provided, The sensor according to any one of technical proposals 3 to 8, wherein a direction from one of the plurality of fixing members to another of the plurality of fixing members intersects with the first direction and intersects with the second direction.

[0114] (Technical proposal 13) A plurality of the fixing members are provided, The sensor according to any one of technical proposals 3 to 8, wherein the direction from one of the plurality of fixing members to another of the plurality of fixing members intersects with the first direction and is along the second direction.

[0115] (Technical proposal 14) the sensor substrate further includes a second end; a direction from the second end to the first region intersects with a plane including the first direction and the second direction; The sensor according to any one of Technical Solutions 3 to 6, wherein the second end is a free end.

[0116] (Technical proposal 15) the sensor unit further includes a second sensor unit, The second sensor unit is a second support portion fixed to the first region; a second movable portion supported by the second support portion; a second fixed electrode fixed to the first region; Including, A sensor described in Technical Proposal 14, wherein a portion of the first gap is provided between the first region and the second movable part.

[0117] (Technical proposal 16) the sensor substrate further includes a third region and a third end; the second region is between the third region and the first region, a direction from the third end to the third region is aligned with a direction from the first region to the first end; The sensor according to any one of Technical Solutions 2 to 6, wherein the third end is a free end.

[0118] (Technical proposal 17) the sensor unit further includes a second sensor unit, The second sensor unit is a second support portion fixed to the third region; a second movable portion supported by the second support portion; a second fixed electrode fixed to the third region; Including, The sensor described in Technical Solution 16, wherein a third gap is provided between the third region and the second movable part.

[0119] (Technical proposal 18) the first movable portion further includes a first beam, a portion of the first beam is connected to the first support portion, another portion of the first beam is connected to the first movable electrode; the first beam extends along a third direction; The sensor described in Technical Solution 4 or 5, wherein the third direction intersects with a plane including the first direction and the second direction.

[0120] (Technical proposal 19) the first sensor unit further includes a first opposing fixed electrode fixed to the first region; the first movable portion further includes a first opposing movable electrode, the first opposing movable electrode faces the first opposing fixed electrode in the second direction, the first movable electrode is located between the first fixed electrode and the first opposing fixed electrode; The sensor described in Technical Solution 18, wherein the first opposing movable electrode is located between the first movable electrode and the first opposing fixed electrode.

[0121] (Technical proposal 20) A sensor according to any one of technical proposals 1 to 19; a circuit control unit capable of controlling a circuit based on a signal obtained from the sensor; An electronic device comprising:

[0122] According to embodiments, sensors and electronic devices are provided that allow for improved performance.

[0123] The above describes embodiments of the present invention with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configurations of each element included in the sensor, such as the mounting member, sensor unit, sensor base, support unit, fixed electrode, movable unit, fixed member, and control unit, are within the scope of the present invention as long as a person skilled in the art can implement the present invention in a similar manner and obtain similar effects by appropriately selecting them from known ranges.

[0124] Furthermore, any combination of two or more elements of each specific example within the scope of technical feasibility is also included within the scope of the present invention as long as it includes the gist of the present invention.

[0125] In addition, all sensors and electronic devices that can be implemented by a person skilled in the art by appropriately modifying the design based on the sensors and electronic devices described above as embodiments of the present invention also fall within the scope of the present invention, as long as they include the gist of the present invention.

[0126] In addition, within the scope of the concept of the present invention, a person skilled in the art may come up with various modifications and alterations, and it will be understood that these modifications and alterations also fall within the scope of the present invention.

[0127] Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, and are also included in the scope of the invention and its equivalents as defined in the claims. [Explanation of symbols]

[0128] 10A, 10B: first and second movable parts, 10E: sensor part, 10Ea, 10Eb: first and second sensor part, 11, 12: first and second movable electrodes, 11A, 12A: first and second opposing movable electrodes, 11AM, 12AM: first and second opposing beams, 11E, 12E: first and second movable part electrodes, 11M, 12M: first and second beams, 11s, 12s: first and second support parts, 18A to 18D: first to fourth movable base parts, 18BM: second other movable base part, 18P, 18Q: first and second movable connecting parts, 18X, 18Y: first and second movable parts, 21, 22: first and second fixed electrodes, 21A, 22A: first and second opposing fixed electrodes, 31, 32: first and second other fixed electrodes, 31A, 32A: first and second opposing other fixed electrodes, 41: fixing member, 50a-50c: first to third regions, 50e-50g: first to third end portions, 50s: sensor base, 50sf: first side surface, 51i, 52i: first and second intermediate layers, 60: mounting member, 61, 62: first and second mounting portions, 63: side portion, 70: control unit, 110-118, 120: sensor, 170: circuit control unit, 180: circuit, 185: driving device, 310: electronic device, 400: road, 410: slope surface, 420: transmitting / receiving unit, 430: sensor, 440: pier, 450: main girder, 460: bridge, 470: River, D1~D3: 1st~3rd direction, S1: Signal, g1~g4: 1st~4th gap

Claims

1. a mounting member including a first mounting portion; a sensor unit including a sensor base and a first sensor unit, wherein the sensor base includes a first region, a second region, and a first end portion, the first region being between the second region and the first end portion, the first sensor unit including a first support portion fixed to the first region, a first movable portion supported by the first support portion, and a first fixed electrode fixed to the first region, and a first gap being provided between the first region and the first movable portion; a fixing member that fixes the second region to the first mounting portion; Equipped with The sensor, wherein the first end is a free end.

2. The sensor according to claim 1 , wherein a second gap is provided between the first mounting portion and the first region.

3. The sensor of claim 2 , wherein a second direction from the first region to the first end intersects with a first direction from the first region to the first support portion.

4. the first movable portion includes a first movable electrode, The sensor according to claim 3 , wherein the first movable electrode faces the first fixed electrode in the second direction.

5. the first movable part further includes a first movable base, a second movable base, and a first beam; a portion of the first beam is connected to the first movable base; Another portion of the first beam is connected to the second movable base, the first beam extends along a third direction; the third direction intersects with a plane including the first direction and the second direction, The sensor of claim 4 , wherein the first movable electrode is connected to the first beam.

6. the first sensor unit further includes a second fixed electrode fixed to the first region; the first movable portion further includes a second movable electrode; the second movable electrode faces the second fixed electrode in the second direction, the first movable portion further includes a second other movable base and a second beam; a portion of the second beam is connected to the second other movable base; Another portion of the second beam is connected to the first movable base, the second beam extends along the third direction, the second movable electrode is connected to the second beam, The sensor according to claim 5 , wherein a first resonance frequency of the first beam and a second resonance frequency of the second beam change in accordance with acceleration applied to the sensor portion.

7. the sensor substrate further includes a second end; a direction from the second end to the first region intersects with a plane including the first direction and the second direction; The sensor according to any one of claims 3 to 5, wherein the second end is a free end.

8. the sensor unit further includes a second sensor unit, The second sensor unit a second support portion fixed to the first region; a second movable portion supported by the second support portion; a second fixed electrode fixed to the first region; Including, The sensor according to claim 7 , wherein a portion of the first gap is provided between the first region and the second movable portion.

9. the sensor substrate further includes a third region and a third end; the second region is between the third region and the first region, a direction from the third end to the third region is aligned with a direction from the first region to the first end; the third end is a free end; the sensor unit further includes a second sensor unit, The second sensor unit a second support portion fixed to the third region; a second movable portion supported by the second support portion; a second fixed electrode fixed to the third region; Including, The sensor according to any one of claims 2 to 5, wherein a third gap is provided between the third region and the second movable portion.

10. A sensor according to any one of claims 1 to 6; a circuit control unit capable of controlling a circuit based on a signal obtained from the sensor; An electronic device comprising:

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