Apparatus and method for handling optical devices - Patents.com

Abstract

FIELD OF THE DISCLOSURE Embodiments of the present disclosure relate generally to optical devices. More specifically, embodiments described herein relate to devices and methods for gripping optical devices. In embodiments, the device for gripping an optical device includes a base coupled to a proximal end of a stem extending from a bottom surface of the base. The device also includes a plurality of arms movably coupled to the bottom surface of the base. The plurality of arms are coupled to an actuator operable to laterally move the plurality of arms along an XY plane parallel to the bottom surface of the base. In some embodiments, the device includes a suction pad operable to provide a non-contact normal suction force.

Description

[Technical field]

[0001]

[0001] Embodiments of the present disclosure relate generally to optical devices. More specifically, embodiments described herein relate to an apparatus and method for holding an optical device. [Background technology]

[0002]

[0002] Virtual reality is generally considered to be a computer-generated simulated environment in which a user has an apparent physical presence. Virtual reality experiences are generated in 3D and can be viewed using a head-mounted display (HMD), such as glasses or other wearable display devices with near-eye display panels as lenses, to display a virtual reality environment that replaces the real environment.

[0003]

[0003] Optical devices, including waveguide combiners such as augmented reality waveguide combiners and planar optical devices such as metasurfaces, are used to assist in image overlay. Generated light is propagated through the optical device until the light exits the optical device and is overlaid onto the surrounding environment.

[0004]

[0004] Optical devices generally include structures and components disposed thereon. The optical devices and structures are formed from thin and brittle materials that can be damaged when exposed to external stresses or external contaminants. Furthermore, some of the coatings applied onto the structures are sensitive and can be damaged during manufacturing if not handled properly. Thus, optical devices are vulnerable to damage when it is difficult to transfer the optical devices between different processing tools. The thin and delicate nature of the optical devices as well as their varying geometries make it difficult to hold, e.g., grip, the optical devices. One of the difficulties is gripping the optical devices without damaging, deforming, distorting, leaving marks, and / or remaining on the optical devices.

[0005]

[0005] Therefore, there is a need in the art for improved devices and methods for holding optical devices. Summary of the Invention

[0006] In an embodiment, an apparatus for holding an optical device is provided. The apparatus includes a base coupled to a proximal end of a stem extending from a bottom surface of the base. A suction pad is disposed on a distal end of the stem. The suction pad is operable to provide a non-contact vertical suction force to a substrate held by the apparatus. The apparatus also includes a plurality of arms movably coupled to the bottom surface of the base. The plurality of arms are coupled to an actuator operable to laterally move the plurality of arms along an XY plane parallel to the bottom surface of the base. The plurality of arms also include a plurality of holding pads disposed on each of the plurality of arms.

[0007] In another embodiment, an apparatus for holding an optical device is provided. The apparatus includes a gripper actuator coupled to a proximal end of a stem extending from a bottom surface of the actuator, and a suction pad disposed at a distal end of the stem, the suction pad operable to provide a non-contact normal suction force to a held substrate. The apparatus also includes first and second arms coupled to the gripper actuator. The actuator is operable to laterally move the multiple arms along an XY plane parallel to the bottom surface of the actuator. The multiple arms also include multiple holding pads disposed on each of the multiple arms.

[0008] In yet another embodiment, a method of holding an optical device is provided. The method includes positioning a substrate to be held beneath a plurality of holding pads disposed on a first arm and a second arm of the holding device. The first arm and the second arm of the holding device are disposed on opposite sides of a suction pad operatively coupled to an actuator and operable to provide a vertical holding force to the held substrate. The method continues with manipulating the first arm to move a holding pad disposed on the first arm just into contact with an edge of the held substrate, manipulating the second arm to move a holding pad disposed on the second arm so as to contact the held substrate and apply a lateral force thereto, and actuating the suction pad to provide the vertical holding force to the held substrate.

[0009]

[0009] In order that the above-mentioned features of the present disclosure may be understood in detail, the present disclosure summarized above will now be more particularly described with reference to embodiments, some of which are illustrated in the accompanying drawings. It should be noted, however, that the accompanying drawings depict only exemplary embodiments, and therefore should not be considered as limiting the scope of the present disclosure, which may admit of other equally effective embodiments. [Brief description of the drawings]

[0010] [Figure 1A] 1 is a schematic cross-sectional view of a retention device according to certain embodiments described herein. [Figure 1B] 1B is a schematic cross-sectional view of a portion of the retention device shown in FIG. 1A according to certain embodiments described herein. [Figure 1C] 1B is a schematic cross-sectional view of a portion of the retention device shown in FIG. 1A according to certain embodiments described herein. [Diagram 2] 1A and 1B are schematic bottom views of a gripping device according to certain embodiments described herein. [Diagram 3] 1 is a schematic perspective view of a support pad according to certain embodiments described herein; [Figure 4]1B is a flow diagram of a method for holding an optical device using the embodiment of the holding device shown in FIG. 1A, according to certain embodiments described herein. [Diagram 5] 1B is a flow diagram of a method for holding an optical device using the embodiment of the holding device shown in FIG. 1A, according to certain embodiments described herein. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011]

[0017] To facilitate understanding, wherever possible, the same reference numerals have been used to designate identical elements common to the figures. It is contemplated that elements and features of one embodiment may be beneficially incorporated in other embodiments without further detail.

[0012]

[0018] SUMMARY OF THE DISCLOSURE Embodiments of the present disclosure relate generally to optical devices. More specifically, embodiments described herein relate to an apparatus and method for holding an optical device. In one embodiment, the apparatus includes a base coupled to a stem extending from a bottom surface of the base. A suction pad disposed on the stem is operable to provide a non-contact vertical holding force to a substrate held by the apparatus. A plurality of arms extend from the base, each of which may be coupled to an actuator operable to move each of the plurality of arms parallel to and laterally along the bottom surface of the base. A plurality of holding pads are also disposed on each of the plurality of arms to provide a lateral force in direct contact to hold the optical device.

[0013]

[0019] 1A is a schematic cross-sectional view of a holding apparatus 100 according to an embodiment described herein. In an embodiment, the holding apparatus 100 is operable to hold a substrate 102. The holding apparatus 100 is operable to transport and handle the substrate 102 before, after, and / or during processing.

[0014]

[0020] In an embodiment that can be combined with other embodiments described herein, the substrate 102 can be any substrate used in the art and can be either opaque or transparent depending on the application of the substrate. Furthermore, the selection of the substrate 102 can further include substrates having various shapes, thicknesses, and diameters. In an embodiment that can be combined with other embodiments described herein, the substrate 102 includes, but is not limited to, glass, silicon carbide, or combinations thereof. In another embodiment that can be combined with other embodiments described herein, the substrate 102 is an optical device such as a waveguide combiner, a planar optical device such as a metasurface, an optical lens, an optical lens assembly, an optical frame, a semiconductor wafer, or the like. In yet another embodiment that can be combined with other embodiments described herein, the substrate 102 can have an optical device structure patterned on one or more surfaces of the substrate 102.

[0015]

[0021] In one embodiment, the holding apparatus 100 is a two-axis linear holding apparatus. The holding apparatus 100 includes a base 104, a stem 106, a number of arms 108, a suction pad 110, an air port 112, and a holding pad 114. In certain embodiments, which may be combined with other embodiments herein, the base 104 may be coupled to or extend from a base apparatus (not shown) operable to transport and handle the substrate 102, such as a modular cart, a robot arm assembly of a transfer robot that extends to an interior portion of a processing chamber, an exterior portion of a processing chamber, or the like. The base 104 may be movably connected to the base apparatus such that the base 104 and the holding apparatus 100 in general may move relative to the processing chamber to provide overall movement and positioning of the holding apparatus 100 and any substrate 102 held thereon.

[0016]

[0022] The proximal end of the stem 106 is coupled to a bottom surface 118 of the base 104, and the suction pad 110 is disposed on a distal end of the stem 106 opposite the base 104. The suction pad 110 is configured to provide a contactless suction force to "hold" the substrate 102 without physically contacting the substrate 102. In one embodiment, the force of the suction pad 110 can be used in place of the holding pad 114 to support the substrate 102 without contacting it. Alternatively, the suction pad 110 can be used in addition to the holding pad 114 to allow a stronger holding force on the substrate 102 by the holding apparatus 100.

[0017]

[0023] In one embodiment, the suction pad 110 provides a non-contact vertical suction force to the substrate 102 such that the suction pad 110 is spaced apart from the top surface of the substrate 102 held by the holding pad 114 by a gap of about 0.3 millimeters to about 0.8 millimeters, for example about 0.5 millimeters. In one embodiment, which can be combined with other embodiments herein, the suction pad 110 can be a Bernoulli pad or a Coanda pad. For example, the suction pad 110 can utilize the Bernoulli principle or the Coanda effect to generate a suction force on the substrate 102. In an embodiment, the stem 106 can further include an air port 112 operably connected to the suction pad 110 and in fluid communication with an external air or vacuum source (not shown). The air port 112 can use the external air or vacuum source to supply air to and / or remove air from the suction pad 110 to enable the suction pad 110 to generate a vertical holding suction force. In certain embodiments, the suction pad 110 may be any device operable to provide a vertical holding force to the substrate 102 without contacting the substrate 102 .

[0018]

[0024] In an embodiment, as shown in FIG. 1A and FIG. 2A, the plurality of arms 108 may include a first arm 108A and a second arm 108B. The first and second arms 108A, 108B may each be formed as a rectangular member adjacent to a bottom surface 118 of the base 104 and disposed at opposite ends of the base 104. The first and second arms 108A, 108B may be disposed parallel to each other such that the stem 106 and the suction pad 110 are disposed at an intermediate portion between the first and second arms 108A, 108B. Each of the plurality of arms 108 includes a plurality of holding pads 114. The holding pads 114 are configured to contact an edge of the substrate 102 to hold the substrate 102. As shown in FIG. 1B and FIG. 2A, the holding device 100 has a holding area defined by the plurality of holding pads 114. In an embodiment, the holding area is sized to correspond to a surface area of ​​the optical device held by the holding device 100. In an embodiment, the force from the suction pad 110 is used to hold the substrate 102 in the vertical or Z direction, and the holding pad 114 prevents lateral movement and / or rotation of the substrate 102, i.e., movement in the X direction and rotation along the XY plane.

[0019]

[0025] In an embodiment, which may include other embodiments described herein, the multiple arms 108 may be connected to an actuator 119 for controlling and moving the multiple arms 108 relative to the base 104. In an embodiment, the arms 108A, 108B may be operable to extend away from each other and / or retract toward each other to support and hold the substrate 102. In an embodiment, the multiple arms 108 may be individually controlled in force, position, or velocity. In another embodiment, the multiple arms 108 may be controlled together. Each of the multiple arms 108 may include or be coupled to an actuator 119 for laterally moving the multiple arms 108 (and the multiple holding pads 114 disposed on each of the multiple arms 108) along an XY plane parallel to the bottom surface 118 of the base 104. In an embodiment, which may be combined with other embodiments described herein, the actuator may be an electronic programmable gripper device, such as a SMAC gripper coupled to or integrated into the base 104. In another embodiment, the actuator may be a microactuator. Additionally, the actuator may be a voice coil actuator, which is a non-commutated DC linear actuator made of a unipolar permanent magnet and a copper coil.

[0020]

[0026] As shown in FIG. 1B and FIG. 1C, the first and second arms 108A, 108B can be moved relative to one another to change the distance "D", thereby varying the holding area of ​​the holding device 100 defined by the space between the plurality of holding pads 114. The holding area can be increased and decreased as needed by increasing and decreasing the distance "D" between the first and second arms 108A, 108B, respectively. The position of the holding pads can be adjusted to hold the substrate 102 based on the size, shape, and position of the substrate 102. In embodiments that can be combined with other embodiments herein, the arms 108A, 108B can be independently controllable.

[0021]

[0027] 2A is a schematic bottom view of the retention device 100. The retention device 100 includes a base 104, a stem 106, a suction pad 110, first and second arms 108A, 108B, and a retention pad 114. In one embodiment, which can be combined with other embodiments described herein, the first and second arms 108A, 108B are each coupled to an actuator of the base 104 via a plurality of fasteners secured through a plurality of through holes 120. In another embodiment, which can be combined with other embodiments described herein, each of the plurality of retention pads 114 is coupled to the plurality of arms 108A, 108B via a plurality of openings 122. The plurality of openings 122 allows for various arrangements and numbers of retention pads 114 disposed on each of the first and second arms 108A, 108B.

[0022]

[0028] In one embodiment, which may be combined with other embodiments herein, the base 104 may be coupled to or may further include a theta actuator such that the multiple arms 108 may rotate about the Z axis, thereby allowing rotational translational movement of the multiple arms 108 and the holding pads 114 disposed thereon along an XY plane parallel to the bottom surface 118 of the base 104. Such rotational movement may allow the holding apparatus 100 to be better aligned and accommodating substrates 102 of various sizes and orientations. In another embodiment, the holding pads 114 may be in various orientations and alignments when connected to each of the multiple arms 108. For example, in one embodiment, the holding pads 114 of the first arm 108A may be laterally aligned with the holding pads 114 of the second arm 108B. In another embodiment, the holding pads 114 of the first arm 108A may be misaligned with the holding pads 114 of the second arm 108B, as shown in FIG. 1B.

[0023]

[0029] In one embodiment, which can be combined with other embodiments described herein, the holding device 100 includes a light source 124. In one aspect, the light source 124 can be movable or fixed relative to the holding device 100. In another aspect, the light source can be external to the holding device 100 or can be integrated with the holding device 100. The light source 124 can provide light for further processing of the substrate 102. For example, the light source 124 can provide light for a curing process, such as providing ultraviolet light to the substrate 102. The light source 124 can be used to provide illumination to the surrounding environment of the holding device 100. In another embodiment, which can be combined with other embodiments described herein, the light source 124 is a ring light, i.e., the light source 124 is ring-shaped such that light is provided to the substrate 102 evenly or substantially evenly.

[0024]

[0030] In one embodiment, which may be combined with other embodiments described herein, the holding device 100 includes a visualization system 126. The visualization system 126 may be external to the holding device 100 or may be integrated with the holding device 100. In an embodiment, as shown in FIG. 2A, the holding device 100 includes a plurality of ports 128 disposed on the stem 106 for integrating the visualization system 126 with the holding device 100. The plurality of ports 128 are operable to accommodate one or more devices, such as one or more cameras and / or sensors of the visualization system 126. In an embodiment, the visualization system 126 may also be communicatively coupled to a controller 130. The controller 130 may be communicatively coupled to the holding device 100 such that the controller 130 may facilitate operation of the visualization system 126 and handling and transport of the substrate 102 by the holding device 100 in response to data collected about the substrate 102 from the visualization system 126. In another embodiment, which may be combined with other embodiments described herein, the controller 130 is communicatively coupled to a central processing unit (CPU) 132. The controller 130 can execute the method 400 described below by downloading a program stored in a memory storage medium through an input / output (I / O) device (not shown) and controlling the visualization system 126 and the holding device 100 according to the program.

[0025]

[0031] The one or more cameras housed in the ports 128 may be operable to assist in the metrology process as well as the functionality of the holding device 100. The one or more sensors housed in the ports 128 may be proximity sensors and may be operable to communicate with the controller 130. For example, the sensors may communicate with the controller 130 when the substrate 102 is held by the holding device 100. Although FIG. 2A illustrates the visualization system 126 having four of the ports 128, one or more of the ports 128 may be used. Any number of devices may be used with the holding device 100, such as one or more cameras and sensors. Additionally, the ports 128 may be located along other portions of the holding device 100, such as the bottom surface 118 of the base 104, and thus are not limited to being located on the arms 108.

[0026]

[0032] Each of the multiple arms 108 may be operated in a force mode and / or a position mode. In the position mode, each arm 108 is moved to a predetermined position relative to the substrate 102 such that a holding pad on the respective arm 108 contacts an edge of the substrate 102 to provide an alignment surface for "gripping" the substrate 102 between the holding pads 114 of the multiple arms 108. In the force mode, another arm 108 is operated to contact the substrate 102 and apply a configurable force to the holding pads 114 that provide an alignment surface for the substrate 102 to "grip" the substrate 102 between the holding pads 114. For example, in the embodiment shown in FIG. 1B, a first arm 108A may be operated in a position mode to contact the substrate 102 and provide an alignment surface for holding the substrate 102, and a second arm 108B may be operated in a force mode to apply a configurable force to the substrate 102 to hold the substrate 102 between the holding pads 114 extending from the multiple arms 108A, 108B. Combined with the use of suction pads 110 to apply a non-contact normal vacuum force toward the center of the substrate 102, the lateral force applied by the holding device 100 along the edge of the substrate 102 is highly controllable and can be used to grip the substrate 102 regardless of its geometry.

[0027]

[0033] The holding force applied by the holding device 100 to the substrate 102 between the holding pads 114 may range from about 0.1 to about 3.8 N, or from about 10 grams to about 350 grams. The actual holding force applied by the holding device 100 to the substrate 102 may depend on the substrate 102 and on whether the suction pads 110 are in use. This holding force allows delicate handling of optical devices such as lens assemblies and lens frames. In one embodiment, the suction pads 110 are not activated to generate a vertical suction force that aids in "holding" the substrate 102, such as when the holding device 100 is used to hold a lens frame that does not have a surface to which vacuum suction is applied. In this embodiment, the substrate 102 is fully supported by the lateral force applied by the holding pads 114.

[0028]

[0034] 2B is a schematic bottom view of the holding apparatus 200 according to certain embodiments described herein. The holding apparatus 200 includes a base plate 204, a stem 206, a suction pad 210, a plurality of arms 208, and a holding pad 214. In one embodiment, which may be combined with other embodiments herein, the base 204 may be coupled to or extend from a base apparatus (not shown) operable to transport and handle the substrate 102, such as a modular cart, a robot arm assembly of a transfer robot that extends to an interior portion of a processing chamber, an exterior portion of a processing chamber, or the like. The base 204 may be movably connected to the base apparatus such that the base 204 and the holding apparatus 200 in general may move relative to the processing chamber to provide overall movement and positioning of the holding apparatus 200 and any substrate 102 held thereon.

[0029]

[0035] In one embodiment, which may be combined with other embodiments herein, the suction pad 210 includes a plurality of apertures 216. The plurality of apertures 216 are in communication with the inlet 212. Thus, air may be supplied or removed through the plurality of apertures 216 to create a retention force on the substrate 102. For example, the retention force on the substrate may be created with a vacuum force applied through the plurality of apertures 216, such as by utilizing the Coanda effect.

[0030]

[0036] In certain embodiments, the support pads 114 may utilize corner contact or direct contact to the edge of the substrate 102. Thus, delicate portions of the substrate 102, such as optical device structures and coatings thereon, are not damaged during transport or handling.

[0031]

[0037] 3 is a schematic perspective view of an exemplary support pad 114 according to certain embodiments disclosed herein. The support pad 114 is used in the holding apparatus 100 and is operable to contact an edge of the substrate 102. Although only two support pads 114 are shown on each of the multiple arms 108 in FIGS. 2A and 2B, any number of support pads 114 may be used to hold the substrate 102. In an embodiment, which may be combined with other embodiments herein, each of the support pads 114 may further include a silicone sleeve.

[0032]

[0038] 4 is a flow diagram of an exemplary method 400 for holding a substrate 102 using the holding apparatus 100 of FIG 1 in accordance with certain embodiments described herein. In an embodiment, the method 400 provides for picking up and moving the substrate 102 to a target stage using the holding apparatus 100.

[0033]

[0039] The method 400 begins at step 402 by positioning the substrate 102 below the holding apparatus 100 and within the field of view of the visualization system 126 for scanning and aligning the substrate 102 to the holding apparatus 100. The visualization system 126, communicatively coupled to the holding apparatus 100, may be external to the holding apparatus 100 or may be integrated therewith. In embodiments in which the visualization system 126 is external to the holding apparatus 100, the visualization system 126 may include one or more movable cameras and / or sensors that can be controlled and moved as needed to scan the substrate 102. In another embodiment, the one or more cameras and / or sensors of the visualization system 126 are integrated with the holding apparatus 100, such that positioning the substrate 102 below the holding apparatus 100 in preparation for transfer may also position the substrate 102 within the field of view of the visualization system 126 for scanning.

[0034]

[0040] Step 404 then continues by scanning the substrate 102 using one or more cameras and / or sensors of the visualization system 126 to detect one or more fiducials on the substrate 102 and / or to detect characteristics and related specifications of the substrate 102, such as the position, orientation, size, and edges of the substrate 102. In an embodiment, the substrate 102 may be formed with one or more fiducials to assist the holding device 100 in determining the orientation, position, and / or any other physical characteristics of the substrate 102 for alignment and holding by the holding device 100. In another embodiment, which may be combined with other embodiments described herein, step 402 includes scanning the substrate 102 with one or more sensors of the visualization system 126 to determine the characteristics of the substrate 102 and whether the holding device 100 will employ the suction pad 110. For example, if the visualization system 126 determines that the substrate 102 is a frame assembly that does not have a surface for the suction pad 110 to apply suction force, it may not activate the suction pad 110 to hold the scanned substrate 102.

[0035]

[0041] In step 406, as the substrate 102 is scanned by the visualization system 126, the controller 130 aligns the arms 108A, 108B of the holding device 100 over and relative to the substrate 102 based on the scanning of the substrate in preparation for contact with the holding pads 114. In an embodiment, the controller 130 may use stored data associated with the scanned substrate 102, if available, in aligning the holding device 100. In an embodiment, stored data associated with the scanned substrate 102, such as specifications associated with characteristics of the substrate 102, may be obtained by the CPU 132 and used based on one or more respective fiducials on the substrate 102 scanned by the visualization system 126.

[0036]

[0042] To begin holding or "gripping" the substrate 102, in step 408 the holding apparatus 100 begins by first operating the first arm 108A in a position mode to move the first arm 108A to a predetermined position relative to the substrate 102 and provide the substrate 102 with an alignment surface for "gripping" the substrate 102. In an embodiment, the first arm 108 is thus moved to a position such that the plurality of holding pads 114 on the first arm 108A are just in contact with the substrate 102.

[0037]

[0043] Once the support pad 114 of the first arm 108A is positioned adjacent to the substrate 102, in step 410, the second arm 108B is operated in a force mode to contact the substrate 102, positioning the substrate 102 between the support pads 114 of the first and second arms 108A, 108B and applying a configurable force between the support pads 114.

[0038]

[0044] In step 412, the holding apparatus 100 may optionally activate the suction pad 110 to apply a non-contact vacuum force towards the center of the substrate 102 depending on the substrate 102. If the suction pad 110 is activated to assist in applying a vertical holding force, only a low lateral force may need to be applied by the holding pad 114 to prevent lateral movement and / or rotation of the substrate 102 during handling. In an embodiment, by varying the force of the holding pad 114 and the pressure of the air supply to the suction pad 110, the holding force applied to the substrate 102 can also be varied to avoid defects, damage, and distortion of the substrate 102.

[0039]

[0045] In an embodiment that may be combined with other embodiments herein, when suction pads 110 are not utilized to hold the substrate 102, the substrate 102 is supported entirely by a configurable lateral force exerted against the edge of the substrate 102 between the holding pads 114. Because each of the multiple arms 108 is separately operable in either a position mode or a force mode, the force exerted against the edge of the substrate 102 is finely adjustable and can be tailored to "grasp" the substrate 102 without distorting or damaging the substrate 102.

[0040]

[0046] Once the substrate 102 is securely held between the holding pads 114, an actuator of a base device connected to the holding device 100 can be operated to move the holding device 100 and the substrate 102 held therein to transfer the substrate 102 to the target stage in step 414. In an embodiment that can be combined with other embodiments herein, step 414 can optionally include scanning the substrate 102 before transferring it to ensure that the substrate 102 is properly and securely held by the holding device 100. Once the substrate 102 has been transferred to the target site, in step 416, the arm 108 of the holding device is retracted to release the substrate 102 on the target stage.

[0041]

[0047] 5 is a flow diagram of an exemplary method 500 for holding a substrate 102 according to certain embodiments described herein. In an embodiment, the method 500 provides for picking up and moving the substrate 102 to a target stage using the holding device 100.

[0042]

[0048] The method 500 begins at step 502 by positioning the substrate 102 beneath the holding apparatus 100 in a position to be held by the holding apparatus 100. At step 504, the holding apparatus 100 begins by first operating the first arm 108A in a position mode to move the first arm 108A into a predetermined position relative to the substrate 102 and provide the substrate 102 with an alignment surface for "gripping" the substrate 102. In an embodiment, the first arm 108 is thus moved into a position such that the plurality of holding pads 114 on the first arm 108A are just in contact with the substrate 102.

[0043]

[0049] Once the support pad 114 of the first arm 108A is positioned adjacent to the substrate 102, in step 506, the second arm 108B is operated in force mode to contact the substrate 102, positioning the substrate 102 between the support pads 114 of the first and second arms 108A, 108B and applying a configurable force between the support pads 114.

[0044]

[0050] In step 508, the holding apparatus 100 may optionally activate the suction pad 110 to apply a non-contact vacuum force towards the center of the substrate 102 depending on the substrate 102. If the suction pad 110 is activated to assist in applying a vertical holding force, only a low lateral force may need to be applied by the holding pad 114 to prevent lateral movement and / or rotation of the substrate 102 during handling. In an embodiment, by varying the force of the holding pad 114 and the pressure of the air supply to the suction pad 110, the holding force applied to the substrate 102 can also be varied to avoid defects, damage, and distortion of the substrate 102.

[0045]

[0051] In an embodiment that may be combined with other embodiments herein, when suction pads 110 are not utilized to hold the substrate 102, the substrate 102 may be supported entirely by a configurable lateral force applied to the edge of the substrate 102 between the holding pads 114. Because each of the multiple arms 108 is separately operable in either a position mode or a force mode, the force applied to the edge of the substrate 102 is finely adjustable and can be tailored to "grasp" the substrate 102 without distorting or damaging the substrate 102.

[0046]

[0052] Once the substrate 102 is securely held between the holding pads 114, an actuator of a base device connected to the holding device 100 can be operated to move the holding device 100 and the substrate 102 held therein to transfer the substrate 102 to the target stage in step 510. Once the substrate 102 has been transferred to the target site, the arm 108 of the holding device is retracted in step 512, releasing the substrate 102 onto the target stage.

[0047]

[0053] In summary, an apparatus for gripping a substrate and a method for gripping a substrate have been shown and described herein. While the foregoing is directed to embodiments of the present disclosure, other and further embodiments of the disclosure may be devised without departing from the basic scope thereof, as determined by the following claims.

Claims

1. A device for holding an optical device, comprising: a base coupled to a proximal end of the stem, the stem extending from a bottom surface of the base; a suction pad disposed on a distal end of the stem, the suction pad operable to apply a normal suction force to a held substrate; a plurality of arms movably connected to a bottom surface of the base, the plurality of arms being connected to an actuator operable to move the plurality of arms laterally along an XY plane parallel to the bottom surface of the base; a plurality of support pads disposed on each of the plurality of arms; An apparatus comprising:

2. The device of claim 1 , further comprising an air vent, the air vent in fluid communication with an air source and the suction pad.

3. The apparatus of claim 1 , further comprising a visualization system, the visualization system including one or more cameras and / or one or more sensors communicatively coupled to the controller.

4. The apparatus of claim 1 , further comprising a light source configured to provide light to the held substrate.

5. The apparatus of claim 1 , wherein movement of the arms along a bottom surface of the base enables the retention pads to apply a configurable lateral force to an edge of the held substrate.

6. 10. The apparatus of claim 1, wherein the suction pad is operable to provide a non-contact normal suction force to the held substrate, and the suction pad is spaced from the held substrate by a gap in a range of about 0.3 millimeters to about 0.8 millimeters.

7. 13. The apparatus of claim 1, wherein an actuator is configured to enable the plurality of retention pads to apply a lateral force to an edge of the retained substrate, the lateral force being in a range from about 0.1 to about 3.8 N, or from about 10 grams to about 350 grams.

8. The apparatus of claim 1 , wherein the actuator comprises an electrically programmable gripper device.

9. A device for holding an optical device, comprising: a gripper actuator coupled to a proximal end of a stem, the stem extending from a bottom surface of the gripper actuator; a suction pad disposed on a distal end of the stem, the suction pad operable to apply a normal suction force to a held substrate; first and second arms coupled to the gripper actuator, the gripper actuator operable to move the first and second arms laterally along an XY plane parallel to a bottom surface of the gripper actuator; a plurality of support pads disposed on each of the first and second arms; An apparatus comprising:

10. 10. The device of claim 9, further comprising an air vent, the air vent in fluid communication with an air source and the suction pad.

11. The apparatus of claim 9 , further comprising a visualization system, the visualization system including one or more cameras and / or one or more sensors communicatively coupled to the controller.

12. The apparatus of claim 9 , further comprising a light source configured to provide light to the held substrate.

13. 10. The apparatus of claim 9, wherein movement of the first and second arms along a bottom surface of the gripper actuator enables the plurality of holding pads to apply a configurable lateral force to an edge of the held substrate.

14. 10. The apparatus of claim 9, wherein the suction pad is spaced from the top surface of the held substrate by a gap in a range of about 0.3 millimeters to about 0.8 millimeters.

15. 10. The apparatus of claim 9, wherein the gripper actuator is configured to enable the plurality of holding pads to apply a lateral force to an edge of the held substrate, the lateral force being in a range from about 0.1 to about 3.8 N, or from about 10 grams to about 350 grams.

16. 1. A method of holding an optical device, comprising: positioning the substrate to be held beneath a plurality of holding pads disposed on a first arm and a second arm of a holding device, the first and second arms being operatively coupled to an actuator and disposed on opposite sides of a suction pad, the suction pads being operable to apply a vertical holding force to the held substrate; manipulating the first arm to move the holding pad disposed on the first arm so that it just contacts an edge of the held substrate; manipulating the second arm to move the support pad disposed on the second arm into contact with the held substrate and apply a lateral force thereto; activating the suction pad to provide a vertical holding force to the held substrate; The method includes:

17. 17. The method of claim 16, further comprising scanning the held substrate with a visualization system coupled to the holding device, the visualization system comprising one or more cameras and / or one or more sensors communicatively coupled to a controller.

18. 20. The method of claim 17, wherein scanning the held substrate enables detection of one or more fiducials on the held substrate and / or determination of a size, orientation, position, and / or any other physical characteristic of the held substrate.

19. 17. The method of claim 16, wherein actuating the suction pads to provide a vertical holding force to the held substrate makes it possible to vary the lateral force necessarily exerted by the plurality of holding pads to hold the held substrate.

20. 17. The method of claim 16, wherein lateral movement and / or rotation of the held substrate is prevented by manipulating the second arm to apply a lateral force to the held substrate.

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