Coating removal system and method of operating a coating removal system

Abstract

The coating removal process includes providing a coating removal vessel (100) having a sealable processing space (106), providing within the sealable processing space (106) a coating removal fluid (126) that reacts with the coating at an elevated temperature above the ambient air temperature surrounding the removal vessel, placing within the processing space a component having a coating to be removed thereon, sealing the sealable processing space (106) from ambient air surrounding the processing space, heating the coating removal fluid (126) to a temperature above its boiling point at the ambient air pressure, removing the coating from the component using the coating removal fluid (126) at a temperature above its boiling point at the ambient air pressure, reducing the temperature of the coating removal fluid (126) to a temperature below its boiling point at the ambient air pressure, venting the sealable space (106) to the ambient air, and removing the component from the processing space (106).

Description

[Technical field]

[0001] The present disclosure relates to the field of cleaning of components used in semiconductor processing facilities, where material is deposited or formed on a surface of the component as a by-product of processes performed in the processing facility, and where the component is treated to remove a coating deposited thereon as a by-product of processes performed in the processing facility when the amount of deposits formed on the component can or will adversely affect processing in the processing facility. [Background technology]

[0002] Components used in a particular process environment in a process facility, such as a process chamber, where a deposition or coating process is performed to coat an object in the process chamber, or where an etching or material removal process is performed to etch or remove a coating on an object in the process chamber, are often coated with a deposition material or with a by-product of the etching or material removal process. This coating may be made in stages, for example, each time an object is processed in the processing facility to be coated, a coating of the same thickness or thinner is formed or deposited on the chamber components exposed to the process environment in the process chamber as the coating on the object to be coated. Similarly, in an etching or material removal process, by-products of the etching or material removal process may deposit on the walls or other surfaces of the chamber components exposed to the process environment. This coating may flake off from the component when it reaches a certain thickness and become a process contaminant, for example, by becoming attached to the object to be coated or by precipitating on a support provided to support the object in the object processing chamber or system, thereby damaging the surface of the object to be coated on its supported side in the processing chamber or system. Because process chamber components are typically the higher cost components of a processing chamber, the components are usually recycled for reuse one or more times. This recycling of the components requires removing any coatings formed thereon as a by-product of the processes to which the components were exposed, and cleaning the components, after which the components may be suitable for reuse. In some cases, the components will have a protective coating applied on top before being used in a process environment or process chamber, and removing the coating that is a by-product of the process environment may remove some or all of the protective coating. In that case, the protective coating will also need to be replaced.Additional undesirable coatings may result from natural oxidation of the component or other effects, such as those that occur as a by-product of combustion in internal combustion engines, gas turbine engines, etc. Again, reconditioning the component requires removal of the by-product coating. During reconditioning of a component that has been exposed to materials that form undesirable coatings thereon as a by-product of the component's use, the undesirable coating on the surface of the component must necessarily be removed. Removal processes typically include the following: a) Chemical processes, such as wet etching processes, in which the component is exposed to a liquid etchant whose chemical composition reacts with the unwanted coating on the component to chemically remove the coating. b) Dry etching techniques, such as plasma etching, in which plasma activated species react with the undesired coating to remove it from the component. c) Physical removal processes, such as grit blasting, in which the component is bombarded with grit or particulates to physically scrape off the undesirable coating from the underlying surface of the component.

[0003] A combination of these processes or techniques may also be used to remove the unwanted coating from the component.

[0004] Many materials, such as certain metal, metal oxide, and other material coatings on underlying components, are considered difficult or impractical or impossible to remove using wet or dry etching chemistries and techniques without similarly damaging the underlying components. For example, hafnium oxide, and aluminum oxide, as well as other coating compositions, are often not easily removable using chemical etching techniques. For example, the time to remove the undesired coating may be excessive, or possible chemistries available for wet etching the coating to remove the coating using known wet etching techniques may not effectively remove the undesired coating at a high enough removal rate to be commercially viable, or may also adversely etch the underlying material of the component. In addition, the component from which the undesired coating is removed may have critical dimensions, such as critical hole sizes, material thicknesses, or physical feature dimensions, that must remain within manufacturer or other specified tolerances in order to effectively reuse the component in the process chamber. If the undesired coating material reacts slowly with the etchant, and the etchant also reacts with the component material, material may be removed from the component and critical feature dimensions may no longer be present on the component. When this occurs, the component is no longer usable for its intended purpose and must be replaced. Etchant materials often have a greater etch or reaction rate with the material of the undesirable coating compared to the reaction rate with the underlying component. However, the undesirable coating often has a different thickness across the surface of the part, and due to the isotropic nature of wet etching, portions of the component surface are exposed to the etchant while other portions of the component remain covered with the undesirable coating material that should be removed. This can result in over-etching or removal of portions of the underlying component.

[0005] Some materials cannot be readily removed by wet or dry etching techniques because the etch rate of the coating is so slow that the time to remove the coating would be excessive. In this case, the coating is frequently removed by bead or grit blasting, where the coating is physically removed by impinging on the coating and peeling it off the surface of the component. However, the underlying component surface is exposed to the impinging beads or grit, which erode the exposed component surface, removing material therefrom, resulting in dimensional changes that ultimately require replacement of the component. If the component is a part used in a process chamber used in the manufacture of semiconductors, the dimensional integrity of the part is often critical to at least one of the electrical, fluid flow, temperature, or other process characteristics, which in turn is critical to the repeatability of the manufacturing process. When these components have buildup of materials such as hafnium oxide, aluminum oxide, and other difficult to remove materials or their etch by-products, bead or grit blasting may be the only practical means of removing the coating, as the reaction rate between the coating and the etchant may be so slow that the time to etch away the undesirable coating may be commercially impractical. Summary of the Invention

[0006] Provided herein are methods and apparatus for removing coating layers from surfaces of components, including at least exterior surfaces of the component, concave surfaces of the component therein, e.g., holes or openings, interior surfaces of the component accessible from the exterior of the component, or other component surfaces having a material thereon or attached thereto that is desired to be removed. In one aspect, a coating removal vessel includes an outer body with a processing space and an opening into the processing space, a cover over the opening, the cover including a sealing portion therein that is contactable with the surface of the outer body and the cover, a component holder removably positionable within the processing space, a heater configured to heat a cleaning fluid to a temperature above a boiling point of the cleaning fluid at an ambient air pressure surrounding the coating removal vessel, when delivered to the processing space, and a pressure regulator, wherein the component holder is positioned within the processing space, and the cover is sealingly connected to the vessel to close the opening and seal the processing space from the ambient air, and the cleaning fluid positionable within the processing space is heatable to a temperature above its boiling point in the ambient air, but self-pressurized to a pressure sufficient to prevent boiling of the cleaning fluid within the pressure vessel.

[0007] In another aspect, a method of removing a coating from a component includes providing a coating removal vessel having a sealable processing space therein, providing within the sealable processing space a coating removal fluid that reacts with the coating at an elevated temperature above an ambient air temperature surrounding the removal vessel, placing within the processing space within the coating removal vessel a component having a coating to be removed thereon, sealing the sealable process space from ambient air surrounding the processing space, heating the coating removal fluid to a temperature above its boiling point at the ambient air pressure, removing the coating from the component using the coating removal fluid at a temperature above its boiling point at the ambient air pressure, reducing the temperature of the coating removal fluid to a temperature below its boiling point at the ambient air pressure, venting the sealable space to the ambient air, and removing the component from the processing space.

[0008] In another aspect, a coating removal system includes a containment vessel having an interior space and a sealable door, and one or more coating removal vessels configured to be received within the containment vessel.

[0009] In another aspect, a method for removing a coating from a component includes providing a containment vessel having an interior space and a closeable door, providing one or more coating removal vessels configured to be received within the containment vessel, providing a coating removal liquid in the coating removal vessels, disposing the component in the coating removal vessels, disposing the coating removal vessels within the interior space of the containment vessel and closing the closeable door to seal the interior space, and increasing the pressure and temperature of the coating removal fluid above a boiling point of the coating removal fluid while maintaining the coating removal fluid in a liquid state. [Brief description of the drawings]

[0010] [Figure 1] FIG. 2 is a schematic cross-sectional view of a coating removal chamber. [Diagram 2] 2 is a schematic diagram of the coating removal chamber of FIG. 1 showing the connections of the coating removal chamber to peripheral equipment useful in the operation of the coating removal chamber. [Diagram 3] FIG. 2 is a plan view of the coating removal vessel of FIG. 1. [Figure 4] FIG. 1 is a schematic diagram of a component configured to provide a self-pressurizable interior space for cleaning of the component. [Diagram 5] 1 is a schematic diagram of an alternative material removal system in which individual coating removal chambers or vessels are processed within a containment vessel. [Figure 6] FIG. 6 is a side view of the containment vessel of FIG. [Figure 7] FIG. 6 is a plan view of the pressure vessel of FIG. [Figure 8] FIG. 2 is a schematic diagram of another alternative coating removal system. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] Described herein are methods and apparatus for removing coatings from underlying components, e.g., components used in semiconductor manufacturing facilities, including components used in manufacturing facilities and exposed to semiconductor processing environments, where a base component, i.e., a component prior to being placed in some type of processing facility and exposed to a process environment, has an underlying material composition that can include a component made of a single material, a part constructed of multiple different materials, a coated part where the coating is intended to protect the underlying component material from exposure to the manufacturing environment, or other composition.

[0012] Such exemplary parts include silicon carbide components such as rings, and metal components such as shields, chambers, showerheads, exhaust ducts, etc. used in processing equipment. These components have critical thicknesses, critical hole dimensions, and other critical feature dimensions. Hole dimensions, including diameter, taper angle, depth, etc., are considered important for effective use of the shields in manufacturing environments, e.g., semiconductor processing chambers. It is well known that during use, film layers form as coatings on the surfaces of these components and need to be removed over a period of time, depending on deposition thickness, run time of the process equipment, or other criteria. Because components are expensive, users of manufacturing equipment clean and reuse them, including removing the film layers that build up on top during use, i.e., the undesirable coatings. The number of times a component can be reused depends, in part, on how much of the component's underlying material is removed during the coating removal process, especially in critical dimension areas such as its holes. Users of components want to remove the coatings from the components and reuse as many of the components as possible.

[0013] Here, to remove the coating, a coating removal fluid, i.e., a removal fluid having active chemicals therein that can etch away, i.e., remove, the undesired coating at room temperature (20C), but whose etching rate is unacceptably low or that cannot remove material of the underlying coating at room temperature, is used at a fluid temperature above the boiling point of the fluid at atmospheric pressure. This is accomplished by maintaining the removal fluid, in which the component is disposed, at superatmospheric pressure, i.e., pressure above the local ambient atmospheric pressure where the process is carried out, while the component is exposed to the coating removal fluid. Thus, during use of the component in a processing chamber or manufacturing environment, material of the undesired coating deposited thereon comes into contact with the coating removal fluid at a temperature above its boiling point at normal or local atmospheric pressure, i.e., at or near 760 Torr. Alternatively, the removal fluid can be maintained at a temperature at which the coating material fluid has difficulty remaining in a liquid state due to its excessive evaporation, e.g., 70% to 100% of its boiling point temperature at atmospheric pressure.

[0014] Thus, in one aspect, a coating removal vessel 100 is provided that functions to receive components therein at atmospheric pressure and provides an enclosed environment to raise the temperature of the coating removal fluid therein above its boiling point at atmospheric pressure while maintaining conditions therein such that the removal fluid does not boil. This is accomplished by maintaining the coating removal fluid in an enclosed environment within the vessel 100 and then heating the fluid from a temperature below its boiling point in the ambient air of the environment to a temperature above its boiling point. Because the fluid space is enclosed, the fluid will release vapor as it approaches its atmospheric boiling point, and the vapor is enclosed within the fixed space of the vessel. The vapor has a lower density than the coating removal fluid and resides in the head space above or above the coating removal fluid and is pressurized as the temperature of the coating removal fluid increases, resulting in a vapor pressure of the coating removal fluid from which more vapor is generated to equalize the increased pressure in the head space, which is sufficient to prevent the coating removal fluid from boiling, even though the coating removal fluid is at a temperature above its boiling point at atmospheric pressure. This temperature, which is higher than can be achieved with a liquid coating removal fluid when exposed to ambient atmospheric conditions, significantly increases the etch rate of the coating material for a particular coating removal fluid chemistry, thereby enabling wet etch removal of coatings on components that were not possible or impractical using prior art wet etchants.

[0015] Here, in one embodiment, the coating removal vessel 100 is shown in cross section in FIG. 1 and generally includes a generally straight annular body 104 defining a processing space 106 therein, a removable cover 102 releasably secured to the body 104, a temperature maintenance system 108, a first fluid line 110 in fluid communication with the processing space 106 through the cover 102, a second fluid line 112 in fluid communication with the processing space 106 through the cover 102, and a third fluid line 114 inlet 100 forming a fluid outlet in fluid communication with the processing space 106 through a base 116 of the body 104. The first fluid line 110 is closed at its end distal from the cover 102 with a rupture disk 120. The rupture disk 120 is configured to break or burst at a pressure lower than the pressure at which the coating removal vessel 100 would fail or leak due to its overpressure condition. Alternatively, a pressure relief valve may be used in place of the rupture disk 120. The second fluid line 112 is connected to a collection vessel 199 through a vent valve 122 as shown in FIG. 2. The vent valve 122 may be operated manually or automatically to allow fluid in the processing space 106 to be released from the processing space 106, including superatmospheric steam 124 generated by heating the removal fluid 126 therein into the head space 128 of the coating removal vessel 100. The third fluid line 114 is here configured to provide a fluid outlet, allowing the removal fluid in liquid form to be drained by gravity from the processing space 106 of the coating removal vessel 100. Here, a drain valve 130 is connected to an end of the third fluid line 114 that is external and distal to the base 116 of the body 104 through a flanged connection 132. The exhaust valve 130 can have manual or automatic operation, or both, and is shown diagrammatically as being maintained in a closed state during operation of the coating removal vessel 100 to remove coatings from components 200 disposed within the processing space 106.

[0016] The body 104 is generally configured as a straight annular housing, having a circumferential vessel wall 134 extending circumferentially around the processing space 106, a convex base wall 136 extending from a lower circumferential end wall 138 of the vessel wall 134, and a circumferential flange 152 forming an upper end wall 140 of the body 104. A landing surface 142 is provided on an inner surface 144 of the convex base wall 136 facing and bounding a lower portion of the processing space 106. The landing surface 142 can be a circumferential ledge extending from the inner surface 144 of the convex base wall 136 inwardly into the processing space 106, a series of projections spaced apart from one another in a circumferential path extending from the inner surface 144 of the convex base wall 136 inwardly into the processing space 106, a separate insert disposed on the inner extension of the inner surface 144 of the convex base wall 136 inwardly into the processing space 106, or another structure. The landing surface 142 desirably extends in a direction perpendicular to the direction of gravity, i.e., generally horizontal and parallel to the top wall 140, and is configured to allow a component holder, such as a cage or basket 146, to be placed thereon without sliding in a direction toward the vessel wall 134. The basket 146 is used to store or hold within the coating removal vessel 100 one or more components 200 having thereon the coating(s) to be removed.

[0017] A temperature maintenance system 108 is provided to heat the removal fluid 126 in the processing space 106 to a desired temperature for removing the coating(s) on the component 200 in the processing space 106 and to maintain the desired temperature of the removal fluid 126 during the coating removal process. The temperature of the coating removal fluid 126 fluid can be maintained at a single temperature or within a desired temperature range while removing the coating from the component 200, or different temperatures or temperature ranges can be used at different times during the coating removal process. To provide this functionality for the vessel 100, the temperature maintenance system 108 includes a heater 148 about the exterior surface 150 of the vessel wall 104 and cooling channels 151 extending through a circumferential flange 152 at opposing first and second ends 154 and 156 thereof, into the processing space 106, and in contact with the removal fluid 126. Here, the cooling channel 151 is configured as a length of piping capable of flowing a fluid coolant, the portion of which within the processing space 106 is configured in the shape of a straight toroidal coil 158 having a coil inner diameter 160. The coil inner diameter 160 is configured to be larger than the maximum width dimension of the basket 146 to allow the basket 146 to be freely placed and removed from the processing space, and to maintain a gap between the sides of the basket 146 and the adjacent peripheral surface of the coil 158 to allow removal fluid therebetween. The opposing first and second ends 154 and 156 of the cooling channel 151 are fluidly connected to a chiller 162 and a pump 164, shown generally in FIG. 2, which are operably connected to a system controller 166. The chiller 162 cools the fluid coolant flowing from the second end 156 of the cooling channel 151, and the pump 164 causes the chilled or cooled fluid to flow into the first end 154 of the cooling channel 151. The heater 148 is provided as a heating jacket or other heating system that may surround an exterior surface 150 of the vessel wall 134 .The heater 148 can be provided as a single enclosure element such as a heating blanket, as multiple enclosure elements stacked on top of each other, each at a height less than the height of the vessel wall 134, as individual heater segments arranged side-by-side around the exterior surface 150 of the vessel wall 134, or combinations thereof. The heater 148, or individual separate portions of the heater, if used, are electrical resistance heaters operably connected to a power source 172 operably connected to a system controller 166 (FIG. 2). A thermocouple 174 is disposed within the processing space and operably connected to the system controller 166 by a thermocouple wire. The system controller 166 uses the thermocouple 174 to monitor the temperature of the removal liquid within the processing space. Although only one thermocouple 174 is shown, multiple such devices can be provided at different locations within the processing space 106.

[0018] As described further herein, the heater 148 is used to heat the coating removal fluid 126 to its desired coating removal temperature under the control of a system controller 166 operably connected to a power source 172. Fluid flowing through the cooling channels 151 is used to remove heat from the removal fluid. Operation of the system controller 166 to cause cooling and heating of the coating removal fluid during a coating removal process on the components 200 in the processing space 106 can result in reaching and maintaining one or more desired set point temperatures or temperature ranges during the coating removal process.

[0019] The cover 102 is configured to be releasably secured to a circumferential flange 152 forming the top wall 140 of the body 104. When removed, the processing space 106 is accessible for placing the basket 146 and components 200 therein or removing them from the processing space 106. Securement of the cover 102 to the circumferential flange 152 may be provided by clamps, bolts, or the like, where the cover 102 includes a lifting eye 178 protruding from its cover top surface 176 to which a hoist or overhead crane may be connected to lift the cover 102 from the top wall 140 of the body 104, and a plurality of fastener openings 180 extending therethrough and spaced apart from one another along a bolt circle 180. The circumferential flange 152 includes a number of studs 182 corresponding to the fastener openings 180 and extending generally perpendicular to the top wall 140 of the body 104. Each of the studs is disposed along the bolt circle and is spaced from one another the same distance as the fastener openings 180. Each stud 182 includes a base portion 184 that extends from the top end wall 140 of the body 104 inwardly of the circumferential flange 152, and a threaded shank portion 186 that extends away from the top end wall 140 of the body 104 a distance that is greater than the thickness of the cover 102 at the location of the fastener openings 180 through the cover 102.

[0020] To releasably secure the cover 102 to the body 104, the cover 102 is lowered onto the top wall 140 of the body 104 such that the shank portions 186 of the different studs 182 are aligned to pass through the different fastener openings 180. The cover 102 is then lowered further so that its inner cover surface adjacent its periphery rests against the top wall 140 of the body 104. As a result, a portion of the shank portion 186 of each of the studs 182 extends outwardly from the outer cover surface 188 a sufficient distance to place a washer 190 and a threaded nut 192 over the protruding portion of each stud 182. By tightening the nut 192 on the threaded shaft, the inner cover surface is biased against the top wall surface 140. A sealing groove 194 extends inwardly of the top end wall 140 at a location inwardly of the bolt circle of the studs 182 and also extends circumferentially around and into the top end wall 140 to prevent outward leakage of fluid between the inner cover surface and the top wall surface 140. A sealing ring 196 is positioned in the sealing groove 194 such that the sealing ring 196 contacts a base 198 of the sealing groove 194 over its circumferential extent. The sealing ring 196 and sealing groove 194 are sized such that in a free, uncompressed state, the sealing ring 196 extends outwardly of the sealing groove 194 while contacting the base 198 of the sealing groove 194. As the cover 102 is lowered onto the top wall 140, the inner cover surface engages this protruding portion of the sealing ring 196, and as the cover 102 is further lowered towards the top wall 140, the sealing ring 196 becomes compressed, maintaining contact between the sealing ring 196 and the base 198 of the sealing groove 194 and maintaining contact between the inner cover surface and the sealing ring 196. This seals the interface area between the inner cover surface and the top wall 140 to prevent fluid leakage therethrough.

[0021] During the removal of unwanted or undesirable coatings from a component 200 using the removal vessel 100, the component 200 or multiple components 200 are placed in a basket 146, and the basket 146 with the components 200 therein is lowered into the removal fluid 126 present in the processing space 106. The cover 102 is then lowered onto the top wall 140 and secured to the top wall 140 by placing washers 190 over each protruding portion of each stud 182 and threading nuts 192 onto the protruding portions of each stud 182. The nuts 192 are then tightened to secure each of the washers against the outer cover surface 188, thereby securing the cover 102 to the body 104.

[0022] Once the cover 102 is secured to the body 104, the system controller 166 activates the power supply 172 to provide power to the heater 148 and activates the pump 164 to begin pumping cooling fluid through the cooling channels 151. The cooling fluid may be pumped during heating of the removal fluid 126, after heating, or both during and after heating. Once the removal fluid reaches a desired temperature, the system controller 166 controls the chiller 162 to appropriately cool the cooling fluid that has absorbed heat while flowing through the cooling channels 151, and simultaneously controls the operation of the heater 148 by varying the voltage, current, or both supplied by the power supply 172 to the heater 148 to maintain the desired temperature of the removal fluid 126.

[0023] When the basket 146 having the component 200 from which the coating is to be removed is placed in the removal fluid 126 and the cover 102 is secured to the top wall 140, the removal fluid and any air disposed between the removal fluid 126 and the cover 102 are at or exposed to atmospheric pressure. The vent valve 122 and the exhaust valve 130 are then maintained in a closed position to prevent the fluid from flowing outside the processing space 106 while the removal fluid is heated to a desired process temperature to remove the coating on the component 200. As the processing space 106 is sealed by the position of the vent valve 122 and the exhaust valve 130 and the cover 102 connected to the top wall 140, as the removal fluid 126 is heated, vapor 124 is generated. Because the vapor exists in a liquid state and has a lower density than the removal fluid 126 surrounding the component 200 to be treated, the vapor 124 will collect in the head space 128 above the liquid removal fluid 126. As this vapor 124 continues to evolve, the pressure in the head space 128 increases to a level above the ambient atmospheric pressure. This pressure causes the vapor pressure of the liquid removal fluid to equalize with the increased pressure in the head space, such that the coating removal fluid, at a pressure above atmospheric pressure, is at a pressure that has a higher boiling point in the processing space 106 than its boiling point at the ambient atmospheric pressure immediately surrounding the vessel 100. Thus, the vapor 124 generated from the liquid removal fluid 126 rises into the head space 128, further increasing the pressure in the processing space 106, thereby heating the liquid removal fluid 126 to a temperature well above its boiling point at the ambient atmospheric pressure.

[0024] When the removal fluid is heated to a desired processing temperature to remove the coating from the component 200, the etching or removal rate of the removal fluid 126 around the component 200 increases. This increase allows the removal fluid to remove coatings that were previously removed using bead or grit blasting or other physical removal techniques, where the removal fluid chemistry is selected to be relatively unreactive with the material of the component underlying the coating to be removed, but reactive enough to allow the coating to be removed from the component within a commercially reasonable period of time. Once the coating is removed from the component, the cleaning process is terminated, i.e., an endpoint is reached, after which the removal fluid is passively or actively cooled and the headspace 128 is vented to atmospheric pressure via the second fluid line 112 and the vent valve 122.

[0025] A number of process end point paradigms can be used to determine when to vent the process space 106 of the removal vessel 100 through the second fluid line 112 by moving the vent valve 122 to the open position. For example, the time, temperature, etch rate, and thickness of the coating to be removed of the coating removal process can be considered. The length of time the part is exposed to the hot removal fluid, as well as the ramp times from the initial removal fluid temperature to the higher process temperature and from the higher process temperature to a temperature where no significant vapor is generated at atmospheric pressure, are selected based on the thickness of the coating layer to be removed. As the temperature is ramped up to the process temperature or down to the opening temperature of the removal fluid, the removal fluid still reacts with the coating, so this must be taken into account to determine how quickly to ramp up and down the temperature, as well as how long to maintain the component 200 and the removal fluid around the component 200 in a liquid state at the elevated temperature.

[0026] To remove the components 200 from the coating removal vessel 100, the system controller 166 controls the chiller 162 to continue to cool the cooling fluid that absorbed heat while flowing through the cooling channel 151, and simultaneously controls the power supply 172 to stop powering the heater 148. The system controller 166 can increase the flow rate of coolant through the pump 164, or increase heat removal from the cooling fluid by the chiller 162 to reduce the temperature of the cooling fluid entering the coil 158, or both to increase heat removal from the removal fluid 126 and decrease the time it takes for the removal fluid 126 to cool to a temperature sufficient to allow venting and opening the coating removal vessel. If the temperature of the removal fluid 126 falls below its boiling point at atmospheric pressure, the vent valve 122 can be opened to vent vapor from the headspace and equalize pressure on or at the opposing outer cover surface 188 and inner cover surface. Venting can be performed at any time, either before or after the temperature of the removal fluid 126 falls below its boiling point at atmospheric pressure. However, venting when the temperature of the removal fluid 126 is at or above its boiling point at atmospheric pressure can initiate instant boiling of the removal fluid unless the vent line is pressurized. Once the pressure in the headspace 128 equalizes with the ambient air pressure, the nuts 192 are removed from the studs 182, the washers 190 are removed, and the cover 102 is lifted off the body to allow access to the basket 146. The basket 146 is removed and replaced with an additional basket having one or more components 200 therein to perform the same coating material removal of the one or more additional components 200.

[0027] The chemistry of the removal fluid can be changed by removing the coating removal fluid 126 by opening the drain valve 130 and allowing the removal fluid 126 to drain from the processing space 106. The inner walls and cover of the body are then rinsed, for example with a buffer, followed by one or more rinses with deionized water, and the drain valve 130 is moved to a closed position. With the cover 102 removed from the body 104 and the drain valve 130 in the closed position, a new removal chemistry is injected into the processing space 106. Alternatively, a third fluid conduit 193 can be used to flush new removal fluid into the processing space 106. Here, a series of valves and at least one T-connection on the drain line downstream of the third fluid line 114 inlet can be configured to direct the used removal solution to a collection facility, such as a collection vessel 199, or to allow a fresh or different removal fluid to flow inside the third fluid line 114 inlet and from the removal fluid reservoir 197 into the processing space 106. 2, the exhaust valve 130 can be closed and the refill valve 191 can be opened to allow the removal fluid 126 in the removal fluid reservoir 197 to pass through the third fluid line 114 to the inside of the processing space 106. The refill valve 191 can then be closed and the above cycle for operating the vessel 100 to perform coating removal from a component can be performed one or more times for one or more components 200.

[0028] In another embodiment, the component itself can be or provide a pressure vessel for performing coating removal from its interior at high temperature. Here, for example, the process chamber itself is cleaned, the interior walls of the chamber are coated during processing of the parts therein, and the coating needs to be removed. Other components, for example, gas manifolds and process conduits through which gas flows during use and which may form deposits on the interior surfaces of the manifolds or piping, can also be used in this way to create an internal sealed environment for high temperature removal fluid temperature removal of the coating, for example, a temperature at least 50% of the boiling point of the removal fluid at the local ambient atmospheric pressure and above the boiling point of the removal fluid at the local ambient atmospheric pressure. If a deposited coating needs to be removed from an interior space of a component, the component can be used to provide a pressure vessel for storing a heated removal fluid that is heated above its boiling point at atmospheric pressure, provided that the interior space can be sealed and safely pressurized to the upper ambient pressure.

[0029] FIG. 4 shows such a component, here a manifold 222, in schematic form, in which gas enters and exits through a sealable threaded connection when in use in a processing environment. Here, the manifold 222 includes a hollow body 202, which may include internal baffles, internal serpentine paths, or other internal architecture (not shown) configured to allow mixing of two gas streams therein. The first manifold inlet 204 and the second manifold inlet 206 include fluid conduits in fluid communication with the interior space of the manifold 222, as does the fluid outlet 208 of the manifold 222. Here, the manifold 222 itself provides a sealed pressure vessel for cleaning its interior surfaces. To enable this, the manifold is wrapped in a component heater 210 around its exterior surface, or alternatively placed in an oven, which heats the manifold 222 and the coating removal fluid therein to a temperature above the boiling point of the removal fluid 126 at the surrounding atmospheric pressure.

[0030] Similar to coating removal vessel 100, here a rupture disk 212 is connected and sealed to second manifold inlet 206, and a relief valve 214 is fluidly connected to first manifold inlet 204 in a relief fluid circuit 216. Similarly, a manifold exhaust valve 218 is fluidly connected to outlet 208 in a exhaust line 220.

[0031] To perform material removal of the interior surface of the manifold 222, or another component having an interior surface to be cleaned, removal fluid is flowed therein through the first manifold inlet 204, or alternatively through the outlet 208, after which the relief valve 214 is closed and the component heater 210 is energized to generate heat and increase the temperature of the removal fluid. The manifold exhaust valve 218 is likewise closed and the rupture disk 212 seals off the second inlet 206, so that as the removal fluid heats up and generates its vapor or gas, the vapor or gas becomes trapped within the interior space of the manifold and the pressure within the manifold 222 increases to a temperature at which the removal fluid 126 would evaporate or boil excessively at atmospheric pressure. The manifold 222 is held at this elevated temperature for a predetermined time to ensure that the undesired coating on its interior surface is completely removed, after which the power to the heater 210 is removed and the manifold is allowed to return to a lower temperature. The relief valve 214 is then moved to its open position, and the manifold drain valve 218 is likewise moved to its open position, allowing the removal fluid to drain into a collection container as in Figure 2. The interior of the manifold 222 is then flushed with a buffer solution to remove residual removal fluid 126, and then with deionized water to remove residual removal fluid therefrom.

[0032] Referring to FIG. 5, an alternative configuration of a coating removal system is shown in which one or more coating removal vessels 300 can be disposed inside a sealable containment vessel 302, which is pressurized to allow for superatmospheric wet or liquid etching of components within the coating removal vessel 300. Here, in contrast to the removal vessel 100 of FIGS. 1-4, the coating removal vessel 300 does not need to be independently pressurized relative to its surrounding outside air, i.e., heated independently relative to the internal containment space 304 around the containment vessel 302, but instead, the coating removal vessel 300 is filled with pressurized coating removal fluid while within the containment vessel 302, allowing or enabling the pressure within the coating removal vessel 300 disposed therein to be maintained at the local atmospheric outside air pressure above the surroundings of the containment vessel 302. Here, the containment vessel 302 itself can be heated, such that the fluid therein is maintained at or above the desired temperature of the coating removal fluid in the coating removal chamber 300. In this manner, the coating removal vessel 300 does not need to be constructed of materials strong enough to withstand the pressure differential between its interior and exterior. Thus, the coating removal vessel can be constructed of materials selected for their resistance to reaction with the removal chemistry used to remove the coating from the parts, and with the reaction products of the removal process, as well as the ease of cleaning of its surfaces.

[0033] The containment vessel 302 here is a pressure vessel having a generally straight annular body shell 301, for example formed of stainless steel, with a hemispherical cap 303 at one end welded to one generally annular end wall of the body shell 303, and a door 320 hinged to the opposite end of the body shell 301. The door 320 can be pivoted open to provide access to the containment space 304 through a resulting opening 306, and can be latched closed to allow the internal containment space 304 to maintain a pressure above the ambient air pressure. A latch is provided to secure the door 320 closed against the containment open end 306, and a suitable seal or seals are provided to create an airtight seal between the door 320 and the containment annular wall 307 around the open end 306. Alternatively, studs, washers and nuts can be used to secure the periphery of the door 320 to the annular end wall 307 of the body shell 301.

[0034] In contrast to the configurations for removing coatings from some of Figures 1-4 herein, here the part(s) from which the coating is to be removed are placed in one or more coating removal vessels 300 at a location outside the containment vessel 302. For example, the coating removal vessel 300 can be placed on a wet bench, and the part(s) from which the coating is to be removed are placed on the wet bench therein. The coating removal vessel 300 can be configured to include a body that generally encloses a processing space, the opening of which is covered by a cover. The coating removal vessel 300 or vessel 300 is then placed on the open end 306 of the containment vessel 302. A shelf or pedestal 310 is supported from a lower portion of the body shell 301 by standoffs 311, and the pedestal 310 supports the coating removal vessel(s) thereon. The interior space is fluidly connected to the heated and pressurized coating removal fluid space within the pressure vessel 400 for selectively filling the coating removal vessel 300 with fluid at or near the desired processing pressure and processing temperature of the coating removal fluid.

[0035] In one embodiment herein, the coating removal vessel 300 is loaded with the component(s) from which the coating is to be removed and placed in a containment vessel without any coating removal fluid therein. In this embodiment, the coating removal fluid is delivered to the coating removal vessel 300 from a separate pressure vessel 400 after being placed in the containment vessel 302. After the coating removal vessel 300 is placed in the containment space 304 and its opening 306 is sealed with the door 320, the pressure of the containment vessel 302 increases to a pressure higher than the outside air pressure surrounding the containment vessel 302. Here, each coating removal vessel 300 includes a vent opening 294 extending through its cover to communicate the pressure in the containment space 304 with the interior space of the coating removal vessel, thereby maintaining the pressure of the coating removal fluid placed therein at or equal to the pressure of the containment space 304.

[0036] The pressure in the containment space 304 can be increased incrementally in one or more steps to a pressure equal to or greater than the pressure created or present in the coating removal vessel 300 disposed therein. In another embodiment, the pressure in the coating removal space 298 of the coating removal vessel 300 can be monitored and the pressure in the containment space 304 can be increased or decreased based on the pressure in the coating removal space 298 to adjust the pressure of the coating removal fluid in the coating removal space 298. In the embodiment of the material removal system shown in FIGS. 5-7, the pressurized fluid in the containment space is maintained at an elevated temperature to provide heat to the coating material fluid in the coating removal vessel 300. After processing the components to remove the coating from the part(s) in the coating removal vessel 300, the pressure in the containment space 304 is reduced as the temperature of the removal fluid decreases, but can be maintained at or greater than the pressure required to prevent boiling of the coating removal fluid in the coating removal space 298. Prior to opening the door 320 of the containment vessel 302, the pressure in the containment vessel 302 is brought to its ambient pressure. In this embodiment, the coating removal vessel 300 can be loaded with parts and placed in the containment vessel 302, i.e., reused, over multiple part coating removal processes, and the parts can be loaded and removed from the containment vessel for removal.

[0037] The coating removal system of FIG. 5 generally includes a containment chamber or vessel 302 having an interior containment space 304, one or more of removable coating removal vessels 300 replaceably disposed therein, and a utility connected to at least one of the containment vessel 302 or removable coating removal vessels 300 and configured to control the pressure and temperature of the coating removal process. In FIG. 5 , the utility connects between a system controller 324 and the containment vessel 302 and includes one or more containment vessel pressure sensors 326, one or more containment vessel temperature sensors 328, and a containment vessel heater control line 330. The one or more containment vessel pressure sensors 326 and the one or more containment vessel temperature sensors 328 are configured to provide electrical signals indicative of the pressure and temperature within the containment space 304. However, as previously described, the one or more containment vessel pressure sensors 326 and the one or more containment vessel temperature sensors 328 can be connected to directly monitor the pressure and temperature of the interior space of the coating removal vessel 300. Controller 324 is configured to receive these signals and send containment heater control signals to containment heater power supply 332, which is connected to one or more jacket heaters 360 (FIG. 6) disposed about an exterior surface of the containment vessel. Controller 324 controls the power output of power supply 332 to containment heater 360 based on a desired temperature set point of the containment space 304 or the walls of the containment vessel 302.

[0038] Here, to pressurize the containment space 302, a separate pump 434 or pump can be provided that is connected to a fluid source to pump fluid into the containment vessel 302 to increase the pressure or containment space. In another embodiment, the containment space 304 can be maintained at atmospheric pressure. In another embodiment, the same pressure vessel 400 used to fill the coating removal chamber 300 with coating removal fluid may be used to supply the coating removal fluid to the containment vessel containment space 304. In FIG. 5, the pressure vessel 400 supplies the coating removal fluid as a liquid directly to the coating removal vessel 300. The pressure vessel 400 includes an outer circumferential wall 404 and upper and lower hemispherical caps 406, 408 that hermetically enclose the pressurizable space 402. A pump 410 is provided in communication with the interior pressurizable space 402 of the pressure vessel via a pump line 412. The pump 410 is connected to a fluid supply line 412 to enable pumping of fluid into the pressurizable space 402. Fluid supply line 412 is connected to a source of fluid used as a coating removal fluid supplied to coating removal chamber 300 to perform a coating removal process. One or more pressure vessel temperature sensors 416 and pressure sensors 414 are provided to provide signals to controller 324 indicative of the pressure and temperature of pressurizable space 402 or the wall temperature of pressure vessel 400. Controller 324 is configured to send a pressure vessel heater power signal to pressure vessel heater power supply 418, which provides power to one or more jacket heaters 420 external to pressure vessel 400.

[0039] The pressurizable space 402 of the pressure vessel 400 is fluidly connected to the interior space of the coating removal chamber 300 to allow for the supply of pressurized fluid thereto and removal of pressurized fluid from the coating removal vessel 300. In FIG. 5, a pressurized fluid fill line 422 extends from a lower portion of the pressurizable space 402 through a valve 424, through an upper portion of the containment vessel 302, and to an upper interior portion of the coating removal chamber 300. If multiple chambers of the coating removal chambers 300 are processed together in a single containment space, the fill line 422 is branched to simultaneously fill multiple coating removal vessels 300 with coating removal fluid. A fluid return line 430 extends from the lower portion of the coating removal vessel 300 through a return valve 428, through the lower wall of the containment space 304, and from there to the upper portion of the pressurizable space 420.

[0040] 5, with the containment vessel 302 at local outside pressure 322, or in other words local atmospheric pressure, the door 320 of the containment vessel 302 is opened, and the coating removal vessel 300, which has been processed in the high pressure, high temperature environment of the containment space 304 but has been purged or substantially purged of coating removal fluid, is removed from the containment space 304 through the opening 306 after the door 320 is opened. The part therein is removed for further processing, and a new part, with the coating removed from the top, is placed in the same or a different one of the coating removal vessels 300, which is then placed through the opening 306 and placed on the pedestal 310 within the containment vessel 302. The door 320 is then closed and latched, sealing and isolating the containment space 304 of the containment vessel 302 from the surrounding outside air 322.

[0041] Prior to placing the coating removal vessel 300 in the containment space, the pressure vessel 400 is filled or nearly filled with the coating removal fluid 432 that is transferred or flushed into the containment vessel 302. Here, during removal of the part or component and the coating removal vessel 300 and placement in the containment vessel, the pressure vessel 400 can be operated to maintain a desired fluid pressure and temperature of the coating removal fluid 432 therein. For example, the temperature of the coating removal fluid 432 in the pressure vessel 400 can be maintained above the boiling temperature at atmospheric or ambient air pressure 322, and a pump 410 can be used to increase the flow of the liquid coating removal fluid 432 into the pressurizable space 402, increasing the pressure of the fluid in the pressurizable space 402 from a pressure greater than 1 atmosphere to on the order of 10 atmospheres or more. In this manner, the coating removal fluid can be held at its desired process pressure and temperature for use in removing coatings from components and can be delivered immediately to the coating removal vessel 300 in the containment vessel 302 once the door 320 is closed and the opening is sealed. Using a pressure vessel 400 to maintain the coating removal fluid at or near the removal process temperature and flowing the fluid into the coating removal vessel 300 at or near the coating removal process pressure and temperature reduces the time required to process parts in the coating removal vessel 300 by eliminating the need to heat the fluid in-situ using a heating blanket or other type of heater.

[0042] Once the coating removal vessel 300 with the part or component 200 from which the coating is to be removed is placed in the containment vessel 302 and the door 320 is closed and sealed, the valve 424 is opened to allow the coating removal fluid 432 to flow from the pressure vessel 432 into the coating removal vessel 300 in the containment space 304. The high pressure in the pressurizable space 402 causes the coating removal fluid 432 to flow into the coating removal vessel 300. Here, the cover of the coating removal vessel 300 includes a vent opening 294, which allows the pressure in the containment space 304 to be communicated to the interior space of the coating removal vessel 300. Thus, the pressure in the containment space 304 is maintained at a pressure slightly below that of the coating removal fluid 432, but at this pressure, the coating removal vessel 300 can only be filled by the pressure difference between the high pressure pressure vessel 400 and the low pressure containment space 304, since the coating removal fluid 432 does not boil at its inlet temperature to the coating removal vessel.

[0043] The containment space relief valve 362 is fluidly connected to the containment space 304 to vent pressure within the containment space 304 to prevent back pressure therein and to prevent a sufficient amount of pressurized fluid from covering the components within the coating removal chamber 300. The pump 364 is fluidly connected to the containment space 304 to pressurize the containment space 304, with the relief valve 362 configured to open at a pressure greater than the processing pressure of the parts or components within the coating removal chamber 300. The pump 364 and relief valve 362 are used to control the pressure within the containment space 304, thereby controlling the flow rate of the coating removal fluid to the coating removal vessel 300 by controlling the pressure difference between the containment space 304 and the coating removal fluid 432 entering the coating removal vessel 300. The amount of coating removal fluid dispensed to each tank may be controlled or determined by a fluid sensor on the inner sidewall of the coating removal vessel, a flow meter in the fill line 422, or by other methods. The pump 410 can be operated to keep the pressure of the coating removal fluid 432 at or above the pressure required to prevent the fluid from boiling as it enters the coating removal vessel 300 during filling of the coating removal vessel 300, and to maintain that pressure above the pressure in the containment space 304 when the containment space relief valve 362 opens to vent the containment space 304. Once the coating removal vessel 300 is filled with hot coating removal fluid that is at a temperature above its boiling point at atmospheric pressure and at a pressure sufficient to prevent boiling in the coating removal vessel 304, the fill valve 424 is closed and the coating removal process is carried out. Heat from the fluid in the containment space that has risen to or above the process temperature is transferred through the walls of the coating removal vessel 300 to heat the coating removal fluid therein, or vice versa, as needed. The containment vessel heater(s) 460 preferably maintain the fluid in the containment vessel 302 at or above the desired process temperature and reduce heat loss from the coating removal fluid in the coating removal vessel 300. If the pressure within the containment space 304 drops, the fill pump 434 can be activated to provide additional fluid to the containment space 304 to maintain the desired processing pressure within the coating removal vessel 300 fluidly connected thereto.The controller 324 is electrically coupled to the fill valve 424 and the return valve 428 and controls their opening and closing via electrical control signals from the controller 324 .

[0044] A pressure vessel 400 coupled to the coating removal vessel 300 allows the coating removal fluid 432 to be recycled and reused. Thus, as the process of removing coatings from parts in the coating removal vessel nears the end, the pressure in the pressure vessel 400 is reduced to below the pressure of the containment vessel 302. Once the coating removal process is complete, a return valve 428 is opened by the controller 324 to allow the higher pressure pressurized fluid in the coating removal vessel 300 to flow into the lower pressure pressurizable space 402 of the pressure vessel 400. A pressure vessel relief valve 423 is provided to allow a headspace above the returning pressurized fluid to be vented to prevent a build-up of back pressure that would prevent the pressure vessel 400 from being refilled with pressurizable fluid 432. A pump 434 can be used to selectively communicate a fluid, such as outside air, into the containment vessel to maintain sufficient pressure in the containment vessel such that as the pressurized fluid is returned to the pressure vessel 400, the fluid in the containment vessel remains at a higher pressure than the pressure in the pressure vessel 400. At the same time, power to the containment vessel heater 360 is removed, allowing the containment vessel to begin cooling to a temperature where it is safe to open the door 320. Once the pressurized fluid is returned to the pressure vessel 400, the vent valve 428 is switched to a closed position, isolating the pressurized space 402 and the containment space 304 from one another, and the containment vessel 302 is vented through the containment vessel relief valve 362 or another valve under the operation of the controller 324. As with the embodiment of Figures 1-4 herein, a cooling coil can be provided to be immersed in the pressurized fluid in the pressure vessel 400 to more precisely control its temperature. The coil can also be used to cool the walls of the containment vessel 302 after the pressurized fluid is removed. Other cooling of the containment vessel 302, such as one or more blowers that blow air on the exterior of the containment vessel, can be used. The coating removal fluid returned to the pressure vessel 400 is heated and pressurized in the pressure vessel as necessary, and maintained at that pressure and temperature until the containment vessel 302 is reloaded with a new coating removal vessel 300 and the components 200 therein are processed to remove the coating. Although a single pressure vessel 400 is shown connected to a single containment vessel 302 , multiple containment vessels 302 can be connected to the single pressure vessel 400 .In this case, after filling the coating removal vessel 300 in the initial containment vessel 302, the pressure vessel 400 can be refilled with coating removal fluid to heat and pressurize the pressurized fluid to fill the coating removal vessel 300 in another containment vessel. Alternatively, the pressure vessel pressurized space 402 can be sized to hold enough pressurized fluid to fill the coating removal vessels 300 in more than one containment vessel. Additionally, two or more pressure vessels 400 can be connected to a single containment vessel to allow one of the pressure vessels to be at process temperature and pressure while the fluid in the coating removal vessel 300 is vented to another pressure vessel 400. Additionally, the different vessels of the pressure vessels 400 can hold different types of coating removal fluid.

[0045] In this embodiment of the coating removal system, the coating removal vessel 300 is configured substantially the same as the coating removal vessel 100 of Figures 1-4 herein, except that it is not pressure resistant. In other words, the coating removal vessel 300 includes one or more vent openings 294 extending through its wall, allowing fluid, or at least fluid pressure, to communicate between its coating removal space 298 and the surrounding containment space 304. This allows the pressure within the coating removal vessel 300 to be the same as the pressure within the containment space 304, so that the material of the coating removal vessel does not need to be a high strength material capable of holding a higher pressure within the coating removal space 298 than outside the coating removal vessel 300, thereby allowing users of the system more freedom in choosing the materials used within the coating removal vessel 300. Although pressurization of the containment space is described herein as using air or gas, a liquid such as deionized water, or a coating removal fluid 432, can be used to pressurize the containment space 304. 8, a further embodiment of a coating removal system is shown in which, similar to coating removal vessel 100, coating removal vessel 300 is configured to be heated and simultaneously cooled to maintain a desired temperature of coating removal space 298 and the removal fluid therein. Here, a lower portion of coating removal vessel 300 is configured as a fluid reservoir, and a cage, platform, or other retaining structure, such as the cage of FIG. 2, is placed over the reservoir such that a liquid volume of coating fluid at room temperature (approximately 20 degrees Celsius) is placed within coating removal vessel 300 beneath the parts from which the coating is to be removed.

[0046] Referring to FIG. 8, a modification of the coating removal system of FIGS. 5-7 is shown, where the containment vessel of FIG. 8 is used, but is now individually heated and thus no pressure vessel 400 is required. Here, the coating removal vessels 300 are held within the containment space of the containment vessel, but the individual coating removal vessels are individually heated to generate a vapor of the coating removal fluid to pressurize the individual coating removal vessels 300. Similar to the coating removal vessel 100 of FIGS. 1-4, this coating removal vessel 300 includes a temperature maintenance system 108 (FIG. 1) including a heater 148 around the exterior surface 150 of the coating removal vessel wall 104 and a cooling channel 151 extending through circumferential flanges 152 at opposite first and second ends 154 and 156 thereof, and between them within the coating removal space 298, in contact with the removal fluid 126. Here, the cooling channel 151 is configured as a length of tubing capable of flowing a fluid coolant, the portion of which within the processing space 106 is configured in the shape of a straight toroidal coil. The coil inner diameter is configured to be larger than the maximum width dimension of the basket 146 (FIG. 1) to allow the basket 146 to be freely placed in and removed from the coating removal space 298, and to maintain a gap between the sides of the basket 146 and the adjacent peripheral surface of the coil 158 to allow removal fluid therebetween. Opposite first and second ends 154, 156 of the cooling channel 151 are fluidly connected via fluid quick connections or other types of connectors to a chiller 162 and a pump 164, shown generally in FIG. 5, which are operably connected to a system controller 166. Here, a first cooling fluid line 312 extends through the wall of the containment vessel 302 and is connected between a first end 154 of the cooling channel 151 and a cooling fluid pump 164, and a second fluid line 314 extends between a second end 156 of the cooling channel 151 and a chiller 162. The chiller 162 is fluidly connected to the coolant pump 164 such that a continuous fluid loop is created for pumping the cooling fluid.The chiller 162 cools the fluid coolant flowing from the second end 156 of the cooling channel 151, and the pump forces the chilled or cooled fluid into the first end 154 of the cooling channel 151. The first and second fluid lines 312, 314 may have a first portion extending to a wall of the containment vessel and a fluid connector positioned to allow fluid to pass through the wall of the containment vessel, and a second portion bifurcating to lead from the fluid connector to an opposing end of the cooling channel 151, where the second portion may be flexible and includes a second fitting at the end of the cooling channel 151 for connection to the cooling channel. The flexibility allows for easier connection of the first and second fluid lines 312, 314 to the cooling channel.

[0047] The heater 148, which heats the coating removal vessel 300 and thus the parts and coating removal fluid therein, is provided as a heating jacket or other heating system that can surround the exterior surface 150 of the vessel wall 134 of the coating removal vessel 300. The heater can be provided as a single surrounding element, as multiple surrounding elements stacked on top of each other, each with a height less than the height of the vessel wall 134, as individual heater segments arranged side by side as a heater strip extending vertically around the exterior surface 150 of the vessel wall 134, or as a combination thereof. The heater 148 of each coating removal vessel 300, or individual separate portions thereof when used, is operably connected to a power source 172 that is operably connected to the system controller 166 via wiring 173. Multiple wiring can be used, each dedicated to the heater 148 or heaters associated with one coating removal chamber, or the wiring 173 can include a master bus cable from which individual wires or electrical cables extend to the individual heaters 148 associated with each coating removal vessel 300. A variable controller 351 is disposed between each of the coating removal vessels 300 and the power source 172 to adjust the power provided to each of the heaters 148. Alternatively, multiple power sources 172 are used such that power is dedicated to the heaters 148 associated with each individual coating removal vessel 300. A thermocouple 174 is disposed within the coating removal space 298 of each coating removal vessel 300 and is operably connected to the system controller 166 by a thermocouple wire. The system controller 166 uses the thermocouple 174 to monitor the temperature of the removal fluid within the coating removal space 298. Although only one thermocouple is shown, multiple such devices can be deployed at different locations within the coating removal space 298. By varying the power provided to the heaters 148 and the flow of cooling fluid to the cooling channels 151 of each coating removal vessel 300, the temperature of the coating removal fluid can be controlled.

[0048] The containment vessel 304 is configured as a pressurizable space capable of maintaining its sealing and structural integrity at a pressure higher than the pressure surrounding the containment vessel, which is typically the local outside air pressure during use. During operation of the process to remove the coating from the part, a relatively non-reactive gas, such as nitrogen or air, or an inert gas, such as argon, is used to actively pump into the containment vessel 302 and increase the pressure therein, i.e., within its containment space 304. The containment space 304 may be maintained at a pressure higher than the outside air ambient pressure, for example, 1.1 times the ambient air pressure, greater than 1 to 1.5 times the ambient air pressure, greater than 1 to 2 times the ambient air pressure, or more, for example, 10 times the ambient air pressure. The containment vessel 302 and door 320 are constructed of stainless steel, which provides sufficient strength to withstand the pressure differential between the containment space 304 and the ambient air pressure.

[0049] The containment space 302 is connected to a gas or fluid source, e.g., nitrogen, or a gas that is inert or relatively non-reactive with the coating removal fluid, via a gas supply 336 connected to a pump 334. The pump is configured to pump gas into the containment space to achieve a pressure higher than the atmospheric pressure surrounding the containment space 302. The pump 334 can be a compressor. A fluid removal line 338 is fluidly connected to the containment space 304 for drawing fluid from the containment space 304. Here, the fluid removal line 338 is connected to a valve 340, which can be varied to vary the conductivity of the fluid passing through the valve 340, from which a foreline 341 extends to a collection vessel 342 configured to capture or condense the coating removal fluid flowing therethrough, which is connected to a vacuum source 344 via a valve 346, which can be a facility vacuum system of a vacuum pump.

[0050] In one method of using the coating removal vessel 300, one or more parts having a coating thereon to be removed are placed in the coating removal vessel 300. In one embodiment, the coating removal vessel 300 is removed from the containment vessel 302 through the opening 306 when the door 320 is open, and the part or parts placed therein are replaced with the part or components from which the coating is to be removed. The coating removal vessel 300 is then placed on a pedestal or platform 310 and connected to the power supply 172, the controller 166, and the first and second fluid supply lines 312, 314 are connected to the first and second ends 154, 156 of the cooling channel 151. The door 320 is then closed to seal the containment space 304 from the surrounding atmosphere 322. In another embodiment, the coating removal vessel 300 is maintained in the containment space 304, and the part or components from which the coating is to be removed are passed through the opening 306 and placed in the coating removal vessel 300 on the platform 310. The door 320 is then closed to seal the containment space 304 from the ambient air 322. The pump 334 is then operated to increase the pressure in the containment space 304 by pumping a gas therein. The pump 334 can be operated to pump the containment space 304 to a predetermined pressure higher than the ambient air 322, or can simply be operated to maintain the pressure in the containment space 304 at or above the pressure in the coating removal vessel (300). The heater 148 is powered to heat the coating removal fluid to a desired temperature higher than its boiling point at atmospheric pressure. As the temperature in the coating removal vessel 300 increases, vapor of the coating removal fluid is generated. In one embodiment, the coating removal vessel 300 includes one or more vent openings 294 to communicate the pressure of the containment vessel into the coating removal vessel 300. In this embodiment, the pressure in the containment space 304 can be maintained at a pressure above the pressure at which significant vapor is generated from the coating removal fluid, or below the pressure at which the coating removal fluid begins to boil, based on the temperature of the coating removal fluid.In another embodiment, the vent opening 294 includes a pressure relief valve connected thereto, which is connected to a controller and can be operated by the controller to open a vent passage when the pressure in the coating removal vessel 300 reaches an undesirable pressure. If necessary, the pressure in the containment vessel is controlled using the pump 334 and vacuum system 334 to maintain the containment space pressure at a level high enough to prevent the coating removal fluid from boiling when heated to high temperatures for the coating removal process. In addition, when the desired containment space 304 pressure is reached, a valve 350 at the fluid inlet from the pump 334 to the containment space 304 can be closed to disengage the pump, while the valve 340 can be closed as well. The pump 334 can be reactivated if the pressure in the containment space 334 drops by opening the valve 350 and then activating the pump 334.

[0051] After an appropriate amount of time has elapsed to ensure the coating has been removed from the parts, if pump 334 has not already been disengaged and isolated from the containment space 304, it is disengaged and isolated from the containment space 304 by closing valve 350 and opening valve 340 to allow the containment vessel to vent to vacuum lime 344, which may be slightly below the ambient air pressure around containment vessel 302. Then, when the containment space regains the pressure of the ambient air 322 around containment vessel 302, door 320 can be opened to remove the parts or the coating removal vessel with parts therein from the containment vessel and another set of parts can be returned to the containment space and into the coating removal vessel to be processed.

[0052] Although containment vessel 302 is described herein as being pressurized with a gas, the containment space may also be pressurized using a liquid.

[0053] Table 1 shows exemplary chemicals useful for removing exemplary coatings from exemplary underlying materials. The coatings in Table 1 have previously been considered impossible or impractical to remove using chemical removal processes, i.e., wet etching processes. Thus, grit or bead blasting to remove the coatings, and the resulting essentially removal of material from the underlying components 200, has been the only process used to remove these coatings. As a result, the useful life of the underlying components 200 has been limited by the coating removal process, as critical dimensions of these components 200 will be outside of the manufacturer's specifications after one or more coating removal processes. TIFF2025504657000002.tif111170

[0054] In each case listed in Table 1, the process temperature at which the coating removal is performed is above the boiling point of the removal fluid at atmospheric pressure. For example, a NaOH / H2O solution with 10% NaOH and 90% H2O has a boiling point of 105°C, and a solution with 50% NaOH and 50% H2O has a boiling point of 140°C. A KOH / H2O solution has a boiling point in the range of 140-150°C. In each case in Table 1, the process temperature is above the boiling point at atmospheric pressure of the removal chemical used to remove the coating. In addition, the KOH and NaOH removal chemicals are known to be relatively unreactive with silicon carbide and titanium, which are the materials of the underlying components in Table 1. In addition, the temperature range at which the KOH and NaOH solutions listed in Table 1 can be used in tanks where the solutions are exposed to atmospheric pressure would result in very low coating removal rates, making it commercially unfeasible to remove these coatings using wet etching techniques. Thus, it is believed herein that less than 0.1%-0.5% of the component's underlying material is removed in each coating removal step. As a result, the number of coating removals and component reuse times is greatly increased as opposed to using bead or grit blasting to remove the coating on components having these underlying material compositions.

Claims

1. 1. A coating removal container comprising: an outer body having a treatment space and an opening into the treatment space; a cover for covering the opening, the cover including a sealing portion therein that is contactable with a surface of the outer body and the cover; a component holder removably positionable within the processing space; a heater configured to heat a cleaning fluid when delivered to the processing space to a temperature above a boiling point of the cleaning fluid at an ambient pressure surrounding the coating removal vessel; a pressure regulator; A coating removal vessel, wherein the component holder is disposed within the processing space, the cover is sealingly connected to the vessel to close the opening and seal the processing space from the ambient atmosphere, and a cleaning fluid disposable within the processing space is heatable to a temperature above its boiling point in the ambient atmosphere but self-pressurizes to a pressure sufficient to prevent boiling of the cleaning fluid within the pressure vessel.

2. The coating removal vessel of claim 1 , further comprising a headspace disposed within the processing volume adjacent to the cover.

3. The coating removal vessel of claim 1 , further comprising: a first fluid line disposed on the cover and in fluid communication with the processing space; and a second fluid line disposed on the cover and in fluid communication with the processing space.

4. The coating removal vessel of claim 1 , further comprising a cooling element disposed within the processing space of the body.

5. The coating removal vessel of claim 4, wherein the cooling element comprises a fluid channel having a first end disposed outside the body within the processing space of the coating removal vessel, a second end disposed outside the body, and an intermediate portion disposed within the body.

6. The coating removal vessel of claim 1 , wherein the outer body comprises an exterior wall, and a heater is disposed about the exterior wall of the body.

7. The coating removal vessel of claim 1 , further comprising a cooling element disposed within the processing space of the body, the outer body comprising an exterior wall, and a heater disposed about the exterior wall of the body.

8. The coating removal vessel of claim 7 further comprising a power source connected to the heater.

9. 10. The coating removal vessel of claim 8, further comprising a system controller operably coupled to the power source and the cooling element and configured to control heat generated by the heater and heat removed from the processing space by the cooling element to maintain a desired processing temperature in the processing space above the boiling point at local ambient air pressure of a coating removal fluid disposed in the processing space.

10. 1. A method for removing a coating from a component, comprising: To provide a coating removal container having a sealable processing space therein; providing within the sealable processing volume a coating removal fluid that reacts with the coating at an elevated temperature above an ambient temperature surrounding the removal vessel; placing a component having a coating thereon to be removed within the treatment space of the coating removal vessel; sealing the sealable processing space from ambient air surrounding the processing space; heating the coating removal fluid to a temperature above its boiling point at the ambient pressure; removing the coating from the component using the coating removal fluid at the temperature above its boiling point at the pressure of the ambient air; reducing the temperature of the coating removal fluid to a temperature below its boiling point at the pressure of the ambient air; venting the sealable space to the surrounding atmosphere; and removing the component from the processing space.

11. The method of claim 10 , further comprising removing the coating from the component in the coating removal vessel while using the removal fluid to remove less than 0.05% of the material of the component.

12. The method of claim 11 , further comprising removing the removal fluid from the processing space that has been exposed to a coating to be removed from a component, and providing fresh removal fluid to the processing space.

13. The method of claim 10 , wherein the coating to be removed is one of hafnium oxide or aluminum oxide, and the component material is silicon carbide or titanium.

14. 1. A method for removing at least one coating of hafnium oxide or aluminum oxide from an underlying material comprising at least one of silicon carbide or titanium, comprising: exposing the coating to a removal fluid that is reactive to the coating but non-reactive to the underlying material on which it resides, at a temperature where the removal fluid is liquid at atmospheric conditions at or near a pressure of 14.7 psi; maintaining the temperature of the removal fluid at a temperature above which the removal fluid is liquid at atmospheric conditions at or near a pressure of 14.7 psi; removing the coating by reacting the coating with the removal fluid; reducing the temperature of the removal fluid to a temperature at or below which the removal fluid is liquid at atmospheric conditions at or near a pressure of 14.7 psi; A method comprising:

15. The method of claim 14 , wherein the coating comprises one of hafnium oxide or aluminum oxide.

16. The method of claim 14 , wherein the removal fluid does not etch the underlying material of the component.

17. The method of claim 14 , wherein the coating comprises at least one of hafnium oxide or aluminum oxide, and the component material comprises at least one of silicon nitride or titanium.

18. The method of claim 17 , wherein the removal fluid comprises at least one of KOH or NaOH.

19. 1. A coating removal system comprising: a containment vessel having an interior space and a sealable door; one or more coating removal vessels configured to be received within the containment vessel; A coating removal system comprising:

20. 20. The coating removal system of claim 19, further comprising a pressure vessel selectively fluidly connected to an interior volume of a coating removal vessel within the interior volume of the containment vessel.

21. The coating removal system of claim 20 , further comprising a pump fluidly connected to the pressure vessel.

22. 22. The coating removal system of claim 21, further comprising a heater in contact with an exterior surface of the coating removal vessel.

23. The coating removal system of claim 22 further comprising a heater in contact with an exterior surface of the containment vessel.

24. 1. A method for removing a coating from a component, comprising: providing a containment vessel having an interior space and a sealable door; providing one or more coating removal vessels configured to be received within the containment vessel; providing a coating removal liquid in the coating removal container; Placing the component in a coating removal vessel; placing the coating removal vessel within the interior volume of the containment vessel and closing the sealable door to seal the interior volume; increasing the pressure and temperature of the coating removal fluid to above the boiling point of the coating removal fluid while maintaining the coating removal fluid in a liquid state; A method for removing a coating comprising:

25. providing a pressure source selectively fluidly connected to the interior volume of the containment vessel; flowing pressurized fluid from the pressure vessel into the containment vessel; 25. The coating removal method of claim 24, further comprising:

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