Artificial crystal furnace and artificial crystal furnace system equipped with the artificial crystal furnace

Abstract

An artificial crystal furnace and an artificial crystal furnace system including the artificial crystal furnace are provided. The artificial crystal furnace includes a furnace body including an upper furnace chamber, a lower furnace chamber, and a valve provided between the upper and lower furnace chambers, the valve being capable of dividing the upper and lower furnace chambers into two independent cavities, a crystal cooling mechanism provided in the furnace body, the crystal cooling mechanism being provided with at least one pulling hole through which the pulled crystal passes, and a lifting device provided in the upper furnace chamber, connected to the crystal cooling mechanism, and driving the crystal cooling mechanism to move up and down in the upper and lower furnace chambers. The crystal cooling mechanism is raised to the upper furnace chamber above the valve by the lifting device, so that continuous pulling of crystals or ingots can be performed without stopping the furnace, and the problem of being unable to clean the cooling mechanism is effectively avoided. Furthermore, even if water leakage occurs in the cooling shield, the cooling mechanism can be replaced without stopping the furnace, so that the possibility of the furnace body bursting is avoided, and the production efficiency of the artificial crystal furnace is also improved.

Description

[Technical field]

[0001] (CROSS REFERENCE TO RELATED APPLICATIONS) This application claims the benefit of Chinese Patent Application No. 202210277537.7, filed on March 21, 2022, and Chinese Patent Application No. 202223045663.4, filed on November 16, 2022, with the State Intellectual Property Office of the People's Republic of China, the entire contents of which are hereby incorporated by reference in their entirety.

[0002] The present application relates to the technical field of artificial crystal preparation, and in particular to an artificial crystal furnace and an artificial crystal furnace system including the artificial crystal furnace. [Background technology]

[0003] The photovoltaic power generation industry has become a "new boon" of the new energy industry, driven by the national macro-strategy policy of "peaking out carbon dioxide emissions and achieving carbon neutrality." In this context, along with the development of the photovoltaic power generation industry, the global demand for polycrystalline silicon / monocrystalline silicon has grown rapidly, and demand in the market exceeds supply. As a result, the price of polycrystalline silicon / monocrystalline silicon, the main raw material for solar cells, has soared, and many domestic companies are expanding their production.

[0004] Taking polycrystalline silicon / monocrystalline silicon as an example, how to improve the crystal pulling speed is one of the key technologies in improving the efficiency of crystal pulling. When silicon rods or silicon cores are produced by the pulling method (i.e., placing silicon material in a crucible and heating and melting it to form a silicon melt, and then pulling up the silicon rods or silicon cores after placing a seed crystal in contact with the surface of the silicon melt, and under controlled conditions, continuously rearranging the atoms or molecules at the interface between the seed crystal and the silicon melt, and gradually solidifying while lowering the temperature so that a new silicon rod or silicon core grows), cold shields are widely used in the process of preparing silicon rods or silicon cores by the pulling method, and their main function is to improve the crystal growth speed and crystal growth quality as well as reduce costs. The application of cold shields has become the focus of technological innovation in this field. Through the application of cold shields, the pulling speed is 1mm / min~2mm / min. However, in practical applications, as shown in FIG. 1, the cooling shield 11 used in most companies is fixed to the inner wall of the lower furnace chamber 12, and the cooling shield 11 is not liftable, i.e., it cannot realize lifting.

[0005] The inventors have found a Chinese invention patent with application number 202110024156.3, filed on January 8, 2021, and titled "Crystal Growth Furnace" through a search. The patent provides a technical solution that allows the cooling shield 11 to achieve a small range of lifting and lowering in the lower furnace chamber 12, so that precise control over the crystal cooling process can be achieved, the crystal cooling rate can be effectively controlled, the crystal temperature distribution can be precisely adjusted, the thermal field flexibility can be improved, and different products can be produced under the condition that the thermal field does not change. The manufacturing and research and development costs are greatly reduced, and flow and position control can be performed at various crystal growth stages, so that the quality uniformity of the entire ingot is realized and the overall utilization rate of the crystal is improved.

[0006] According to the Chinese invention patent with patent application number 201520585827.3, filing date August 6, 2015, and invention title "Lifting gear for draft pipe of Czochralski single crystal growth furnace", in the invention, two additional lifting ports are installed symmetrically and horizontally on the furnace cover. The guide column, the lead screw and the sliding block constitute a high-precision linear moving unit. One end of the lift bar is fixed to the sliding block, and the other end is connected to the lifting claw to realize the up and down movement of the draft pipe, and the upper end of the corrugated pipe is connected to the sliding block, and the other end is connected to the lifting port of the furnace cover. The O-ring seal ensures the airtightness of the gear, and the rotating knob is connected to the lift bar to rotate the angle of the lifting claw to realize the gripping and releasing action of the draft pipe. The synchronous action of the other lifting claws is realized by a single motor driving a commutator, a flexible axle, etc.

[0007] Through practical application, it is found that the above two solutions have the following technical disadvantages when pulling a single ingot: 1. The existing structure of the lifting device cannot lift the cooling shield above the furnace cover (in the technical solution disclosed in the invention entitled "Lifting Gear for Draft Pipe of Czochralski Single Crystal Growth Furnace", the draft pipe can only be lifted below the furnace cover), so if the cooling shield cannot be lifted above the furnace cover, the cooling shield must be stopped to be cleaned. If the cooling shield cannot be cleaned, after the silicon material in the crucible melts to form a silicon liquid, the impurities in the silicon liquid and in the furnace chamber will vaporize and float on the surface of the cooling shield. Due to the cooling medium in the cooling shield, the temperature of the cooling shield is relatively low, and in this case, the volatiles will condense and adhere to the surface of the cooling shield. When the volatiles accumulate to a certain thickness, they will fall onto the upper surface of the melt in the crucible, and then float on the upper surface of the melt due to the effects of gas flow disturbance and thermal expansion and contraction. Since the melting point of the volatiles is higher than that of the silicon material, the volatiles cannot be melted, and the volatiles cannot be vaporized, and the volatiles continue to exist on the top surface of the melt. Since the crucible is constantly rotating during pulling, the volatiles in the crucible do not stay still at a specific point on the top surface of the silicon melt, but float at variable positions. If the floating matter adheres to the crystallization position of the ingot, the floating matter will destroy the molecular arrangement direction (there will be a position shift in the crystal direction) when the silicon melt solidifies, and the crystal line will collapse. At this time, the newly grown ingot will change from single crystal to polycrystal, and the growth of the single ingot will fail.

[0008] 2. During the pulling process, if the cooling shield leaks water, the cooling shield cannot be pulled upward from the lower furnace chamber in a timely manner (i.e., the cooling shield cannot be separated from the thermal field), and the silicon melt in the crucible can only be strongly cooled by cutting off the water source and power supply. If the amount of water leakage is excessive, the cooling water will be instantly vaporized due to the high temperature in the thermal field. At this time, if the gas generated by gasification cannot be discharged from the furnace chamber in a timely manner in the thermal field, the furnace body will burst. When multiple silicon cores are pulled up simultaneously by the Czochralski method, if the crystal cooling mechanism cannot be pulled out from the lower furnace chamber, the following technical disadvantages will occur:

[0009] 1. The lifting device of the existing structure cannot lift the crystal cooling mechanism above the furnace cover (in the technical solution disclosed in the invention entitled "Lifting Gear for Draft Pipe of Czochralski Single Crystal Growth Furnace", the draft pipe can only be lifted below the furnace cover), so if the crystal cooling mechanism cannot be lifted above the furnace cover, the crystal cooling mechanism must be stopped to be cleaned. After the silicon material in the crucible melts to form silicon liquid, the impurities in the silicon liquid and in the furnace chamber vaporize and float on the lower surface or side wall of the crystal cooling mechanism. Due to the cooling medium in the crystal cooling mechanism, the temperature of the crystal cooling mechanism is relatively low, and in this case, the volatiles condense and adhere to the lower surface or side wall of the crystal cooling mechanism. When the volatiles accumulate to a certain thickness, they fall onto the upper surface of the melt in the crucible, and then float on the upper surface of the melt due to the effects of gas flow disturbance and thermal expansion and contraction. Since the melting point of the volatiles is higher than that of the silicon material, the volatiles cannot be melted, and the volatiles cannot be vaporized, and the volatiles continue to exist on the upper surface of the melt. Since the crucible is constantly rotating during pulling, the volatiles in the crucible do not stay still at a specific point on the upper surface of the silicon melt, but float at variable positions. When the floating objects adhere to the crystallization position of the silicon core, the light ones will cause a convex deformation of the outer edge surface of the pulled silicon core. In serious cases, the silicon core will be left behind in the crystal through hole due to the change in the silicon core diameter, and the pulling will eventually be forced to stop, and thus the pulling will end. The pulled silicon core cannot be used as a final product, but will only become scrap.

[0010] 2. Since the crystal cooling mechanism cannot be pulled upward from the lower furnace chamber (i.e., the crystal cooling mechanism cannot be separated from the thermal field) and is located above the crucible, when the crucible realizes continuous supply, the crystal cooling mechanism blocks the channel of the continuous supply device, so that the working condition requirement for continuous supply to the crucible without stopping the furnace cannot be realized.

[0011] 3. When the deposition of material on the crystal cooling mechanism is excessive, the furnace must be shut down to clean the deposition, which significantly reduces the production efficiency of silicon cores, etc.

[0012] Therefore, one of the technical problems to be solved is how to provide a lifting device for raising the crystal cooling mechanism into the upper furnace chamber above the lower furnace chamber based on raising and lowering the cooling shield or crystal cooling mechanism. Summary of the Invention

[0013] In order to solve the above problems, the present application provides an artificial crystal furnace, which can conveniently realize the lifting and lowering of the crystal cooling mechanism so as to better pull up the crystal. The crystal cooling mechanism is lifted by the lifting device to the upper furnace chamber above the valve, so that the crystal or ingot can be continuously pulled up without stopping the furnace, and the problem that the cooling mechanism cannot be cleaned is effectively avoided. Moreover, even if water leakage occurs in the cooling shield, the cooling mechanism can be replaced without stopping the furnace, thereby avoiding the possibility of the furnace body bursting, and also improving the production efficiency of the artificial crystal furnace.

[0014] According to one aspect of the present application, an artificial crystal furnace includes a furnace body having an upper furnace chamber, a lower furnace chamber provided below the upper furnace chamber, and a valve provided between the upper furnace chamber and the lower furnace chamber, the valve being capable of dividing the upper furnace chamber and the lower furnace chamber into two independent cavities; a crystal cooling mechanism provided within the furnace body, the crystal cooling mechanism having at least one pulling hole through which a pulled crystal passes; and a lifting device provided in the upper furnace chamber and connected to the crystal cooling mechanism, for driving the crystal cooling mechanism to move up and down within the upper furnace chamber and the lower furnace chamber.

[0015] Preferably, the lifting device includes at least one lifting arm connected to the crystal cooling mechanism and an elevator for driving the lifting arm to move up and down.

[0016] Preferably, the lifting device is provided with a cooling medium channel and the crystal cooling mechanism is provided with a cooling channel for a cooling medium flow, the cooling medium channel being in fluid communication with the cooling channel.

[0017] Preferably, the lifting arm is provided in a straight or bent line configuration.

[0018] Preferably, two lifting arms are provided.

[0019] Preferably, the coolant channels are provided on the side walls of the lift arm or within the hollow structure of the lift arm.

[0020] Preferably, the lifting arm is provided in a broken line-shaped structure, at least one linear groove penetrating the inner wall of the upper furnace chamber is provided on the outer peripheral surface of the upper furnace chamber, the cover body is provided around the linear groove relative to the outer peripheral surface of the upper furnace chamber, and the broken line segment of the lifting arm moves up and down within the linear groove.

[0021] Preferably, at least one lifting arm cavity is provided in the outer edge surface of the upper furnace chamber, the inner cavity of the lifting arm cavity is integrally formed with the inner cavity of the upper furnace chamber, and the lifting arm is configured to be able to move up and down within the cavity formed by the inner cavity of the lifting arm cavity and the inner cavity of the upper furnace chamber.

[0022] Preferably, the lifting arm is provided in a straight structure, and the upper end of the lifting arm is connected to the elevator by penetrating the top of the upper furnace chamber.

[0023] Preferably the elevator comprises a hydraulic cylinder, an air cylinder, an electric push rod, a lead screw elevator or a flexible shaft elevator.

[0024] Preferably, the elevator comprises a lifting block, a power source, a support frame, a guide column, a lead screw and a nut, the support frame is provided on the outer part of the upper furnace chamber, two parallel guide columns are provided on the support frame, the lifting block is provided on the two guide columns, a nut is provided on the lifting block, the nut is sleeve-shaped on the lead screw, the upper and lower ends of the lead screw are provided on the upper and lower ends of the support frame, respectively, the lead screw is connected to the power source, and the lifting block is connected to the lifting arm.

[0025] Preferably, the elevator comprises a lifting block, a power source, a support frame, a guide column, a flexible shaft elevator and a flexible shaft, the support frame is provided on the outer part of the upper furnace chamber, two parallel guide columns are provided on the support frame, a lifting block is provided on the two guide columns, the flexible shaft is provided on the lifting block in the middle of the two guide columns, the flexible shaft is connected to the flexible shaft elevator provided on the support frame, the flexible shaft elevator is externally connected to the power source, and the lifting block is connected to the lifting arm.

[0026] Preferably, the guide column comprises a linear guide rail, a linear bearing and a guide feed rod.

[0027] Preferably, the valve comprises a gate valve, a rotary plate valve or a flap valve.

[0028] Preferably, a seal is provided between the outer peripheral surface of the upper furnace chamber and the lifting arm.

[0029] Preferably, a bellows is provided in the form of a sleeve on the outer peripheral surface of the lifting arm, one end of the bellows is connected to the upper furnace chamber, and the other end of the bellows is connected to the lifting machine.

[0030] Preferably, a cooling jacket is provided connected between the crystal cooling mechanism and the lifting device, and the cooling jacket is used to cool the crystal.

[0031] Preferably, the lifting device comprises at least one lifting arm and an elevator for driving the lifting arm to move up and down, the upper end of the cooling jacket is connected to the lifting arm, the lower end of the cooling jacket is connected to the crystal cooling mechanism, and the upper end of the lifting arm is connected to the elevator.

[0032] Preferably, a cooling medium channel is provided in the lift arm, the cooling medium channel communicating in series with the medium channel of the cooling jacket and the cooling channel of the crystal cooling mechanism.

[0033] Preferably, a cooling medium channel is provided in the lift arm, the cooling medium channel communicating in parallel with the medium channel of the cooling jacket and the cooling channel of the crystal cooling mechanism.

[0034] Preferably, the cooling jacket comprises an upper cover plate, a cooling jacket outer ring, a cooling jacket inner ring and a lower cover plate, the cooling jacket outer ring being sleeve-like around the cooling jacket inner ring, the upper cover plate being provided at an upper end of a cavity between the cooling jacket outer ring and the cooling jacket inner ring, the lower cover plate being provided at a lower end of a cavity between the cooling jacket outer ring and the cooling jacket inner ring, and an upper inlet for the cooling medium and an upper outlet for the cooling medium being provided in the upper cover plate.

[0035] Preferably, the lower cover plate is provided with a lower outlet for the cooling medium and a lower inlet for the cooling medium.

[0036] Preferably, the cooling jacket further comprises a plurality of flow guide plates arranged at predetermined intervals in a cavity between the cooling jacket outer ring and the cooling jacket inner ring, and the upper ends of the plurality of flow guide plates are arranged to contact the upper cover plate within the cavity at positions before and after the upper cooling medium inlet and the upper cooling medium outlet.

[0037] Preferably, the cooling jacket further comprises a spiral flow guide plate and a cooling medium return pipe provided in a cavity between the cooling jacket outer ring and the cooling jacket inner ring, the upper cooling medium outlet being connected to the cooling medium return pipe, the lower end of the cooling medium return pipe passing through the spiral flow guide plate and located in the lower center of the cavity between the cooling jacket outer ring and the cooling jacket inner ring.

[0038] Preferably, the cooling jacket further comprises a spiral flow guide plate and a cooling medium flow guide pipe provided in a cavity between the cooling jacket outer ring and the cooling jacket inner ring, the upper cooling medium outlet being connected to the cooling medium flow guide pipe and the lower end of the cooling medium flow guide pipe being connected to the lower cooling medium inlet by passing through the spiral flow guide plate.

[0039] Preferably, the cooling jacket comprises an upper cover plate, a cooling jacket outer ring, a cooling jacket inner ring and a lower cover plate, the cooling jacket outer ring is sleeve-shaped around the cooling jacket inner ring, the upper cover plate is provided at an upper end of a cavity between the cooling jacket outer ring and the cooling jacket inner ring, the lower cover plate is provided at a lower end of a cavity between the cooling jacket outer ring and the cooling jacket inner ring, an upper inlet for the cooling medium and an upper outlet for the cooling medium are provided on an outer peripheral surface of the cooling jacket outer ring, and a lower outlet for the cooling medium and a lower inlet for the cooling medium are provided in the lower cover plate.

[0040] According to another aspect of the present application, there is provided an artificial crystal furnace system including the artificial crystal furnace described above.

[0041] According to the present application, a valve is provided between the upper furnace chamber and the lower furnace chamber, and then the crystal cooling mechanism is connected to a lifting device, and the crystal cooling mechanism is moved up and down in the cavity of the upper furnace chamber and the lower furnace chamber by the lifting device, thereby realizing the cleaning of the volatile matter attached to the crystal cooling mechanism without stopping the furnace. At the same time, the crystal cooling mechanism during heating is prevented from absorbing heat from the heater, thereby reducing the labor intensity and improving the production efficiency.

[0042] Furthermore, according to the present application, when the cooling mechanism leaks during pulling, the crystal cooling mechanism can be pulled upward from the lower furnace chamber by the lifting device, which effectively avoids the problem that the cooling water is instantly vaporized at the high temperature of the thermal field when the cooling mechanism leaks, and the possibility of the furnace body bursting.

[0043] Furthermore, according to the present application, due to the configuration of the lifting device, the crystal cooling mechanism can be withdrawn upward from the lower furnace chamber to provide a supply channel for the continuous supply device when the crucible realizes continuous supply, thereby realizing the operating condition requirement for continuous supply of the crucible without shutting down the furnace.

[0044] Furthermore, according to the present application, since a cooling jacket is provided above the cooling device and the ingot is cooled by the cooling jacket and the cooling device, the cooling rate of the ingot is increased, thereby improving the efficiency of pulling the ingot. [Brief description of the drawings]

[0045] [Figure 1] FIG. 2 is a schematic diagram showing the structure of an existing cooling shield configuration in a reactor body. [Diagram 2] FIG. 2 is a schematic diagram of a structure of a lifting device in a lower position according to a first embodiment of the present application; [Diagram 3] FIG. 2 is a schematic diagram of a structure of a lifting device in an upper position according to a first embodiment of the present application; [Figure 4] 2 is a schematic diagram of a three-dimensional structure of a cover body according to the first embodiment of the present application. FIG. [Diagram 5] FIG. 2 is a schematic diagram of a second structure of the upper furnace chamber according to the first embodiment of the present application; [Figure 6] FIG. 11 is a schematic diagram of a third structure of an upper furnace chamber according to the first embodiment of the present application. [Figure 7] 1 is a schematic diagram of a structure of a lifting device according to a first embodiment of the present application; [Figure 8] FIG. 5 is a schematic diagram of the structure as viewed from the right side of FIG. [Figure 9] FIG. 2 is a schematic diagram of a structure of a lift block according to the first embodiment of the present application. [Figure 10] FIG. 4 is a schematic diagram of a second structure of the lifting device according to the first embodiment of the present application. [Figure 11] FIG. 11 is a schematic diagram of a structure of a lifting device in a lower position according to a second embodiment of the present application; [Figure 12] FIG. 11 is a schematic diagram of a structure of a lifting device in an upper position according to a second embodiment of the present application; [Figure 13] FIG. 4 is a schematic diagram of a first structure of a cooling jacket according to a second embodiment of the present application. [Figure 14] FIG. 6 is a schematic diagram of a second structure of a cooling jacket according to a second embodiment of the present application. [Figure 15] FIG. 11 is a schematic diagram of a third structure of a cooling jacket according to a second embodiment of the present application. [Figure 16] FIG. 16 is a schematic diagram of the structure of FIG. 15 as viewed from above. [Figure 17] FIG. 11 is a schematic diagram of a fourth structure of a cooling jacket according to a second embodiment of the present application. [Figure 18] FIG. 11 is a schematic diagram of a fifth structure of a cooling jacket according to a second embodiment of the present application. [Figure 19] FIG. 11 is a schematic diagram of a sixth structure of a cooling jacket according to a second embodiment of the present application. [Figure 20] FIG. 11 is a schematic diagram showing an application example in which an ingot is pulled up using a lifting device according to a second embodiment of the present application. [Figure 21] FIG. 21 is a schematic diagram of the structure of the combination of the crystal cooling mechanism and the cooling jacket shown in FIG. 20. [Figure 22] FIG. 11 is a schematic diagram showing an application example in which an ingot is pulled using only a cooling jacket according to a second embodiment of the present application. [Diagram 23] FIG. 11 is a schematic diagram showing a structure according to a second embodiment of the present application in which a cooling jacket is driven by a lifting mechanism to be raised into an upper furnace chamber, and then the upper furnace chamber rotates to move away from the lower furnace chamber. [Figure 24] FIG. 11 is a schematic diagram showing an application example of pulling multiple crystals according to a second embodiment of the present application. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0046] Without implying any adverse limitations to the present application, the present application will be described in detail below by the embodiments. Although the present application has been described in detail, and its specific embodiment modes have been described as well, it will be apparent to those skilled in the art that various changes and modifications can be made in the specific implementation modes of the present application without departing from the spirit and scope of the present application.

[0047] In describing the present invention, it should be understood that the orientations or positional relationships indicated by the terms "center," "side," "length," "width," "height," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "upper / top," "lower / bottom," "inside / inside," "outside / outside," "side / side" and the like are based on the orientations or positional relationships shown in the drawings, and do not indicate or suggest that the devices or elements referred to have a particular orientation or must be configured and operated in a particular orientation, but are merely for the convenience of describing and simplifying the description of the present invention, and therefore should not be construed as limitations of the present invention.

[0048] It should be further noted that in describing the present invention, unless expressly specified and limited otherwise, the terms "provided / provided", "attached", "connected" and "connect" should be interpreted broadly. For example, it may be a fixed connection or a removable connection or an integral connection. It may be a mechanical connection or an electrical connection. It may be a direct connection or an indirect connection through an intermediate medium. It may be a communication between two elements. Those skilled in the art can understand the specific meaning of the above terms in the present invention according to the specific situation.

[0049] It should be noted that the present application relates not only to single crystal furnaces, but also to crystal furnaces capable of pulling several crystals simultaneously, in which case the upper furnace chamber referred to below corresponds to the smaller furnace chamber in the single crystal furnace, and the lower furnace chamber corresponds to the main furnace chamber in the single crystal furnace.

[0050] According to the present application, there is provided an artificial crystal furnace including a furnace body having an upper furnace chamber, a lower furnace chamber provided below the upper furnace chamber, and a valve provided between the upper furnace chamber and the lower furnace chamber, the valve being capable of dividing the upper furnace chamber and the lower furnace chamber into two independent cavities; a crystal cooling mechanism provided within the furnace body, the crystal cooling mechanism having at least one pulling hole through which pulled crystals pass; and a lifting device provided in the upper furnace chamber, connected to the crystal cooling mechanism, and driving the crystal cooling mechanism to move up and down within the upper furnace chamber and the lower furnace chamber.

[0051] According to the present application, by providing a lifting device, the lifting and lowering of the crystal cooling mechanism is conveniently realized, thereby realizing better crystal pulling.

[0052] Furthermore, according to the present application, the crystal cooling mechanism can be raised by the lifting device to the upper furnace chamber above the valve, so that the crystal or ingot can be continuously pulled without shutting down the furnace, and the problem of the cooling mechanism not being cleanable can be effectively avoided. Furthermore, even if water leakage occurs in the cooling shield, the cooling mechanism can be replaced without shutting down the furnace, thereby avoiding the possibility of the furnace body bursting, and also improving the production efficiency of the artificial crystal furnace.

[0053] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, specific structures of preferred embodiments of the present application will be described in detail with reference to the accompanying drawings and embodiments.

[0054] First embodiment 2 to 10 are schematic diagrams showing a lifting device provided with a crystal cooling mechanism for an artificial crystal furnace according to a preferred embodiment of the present application.

[0055] As shown in Figures 2 and 3, according to one embodiment of the present application, the artificial crystal furnace may include an upper furnace chamber 1001, a crystal cooling mechanism 10011, a lifting device connected to the crystal cooling mechanism 10011, and a lower furnace chamber 10012. The lifting device includes an elevator 1004 and a lifting arm 1007. The upper furnace chamber 1001 is provided above the lower furnace chamber 10012, and a valve is provided between the lower end surface of the upper furnace chamber 1001 and the upper end surface of the lower furnace chamber 10012. Through the valve, the upper furnace chamber and the lower furnace chamber can be divided into two independent cavities. The valve may include a gate valve 1009, a rotary plate valve, and a flap valve. In fact, the main function of the valve is to divide the cavities of the upper furnace chamber 1001 and the lower furnace chamber 10012 into two independent cavities. That is, when the valve is opened, the cavities of the upper furnace chamber 1001 and the lower furnace chamber 10012 communicate with each other to form one integrated cavity, and when the valve is closed, the cavities of the upper furnace chamber 1001 and the lower furnace chamber 10012 are divided into two independent cavities. In the embodiment of the present application, the valve is shown as a gate valve 1009 as an example. An openable and closable furnace door is provided on the outer edge surface of the upper furnace chamber 1001 by a hinge. The lifting device according to the present application is connected to the crystal cooling mechanism 10011 and drives the crystal cooling mechanism 10011 to move up and down in the cavities of the upper furnace chamber 1001 and the lower furnace chamber 10012.

[0056] Also, at least one lifting arm 1007 is provided in the upper furnace chamber 1001, and the lifting arm 1007 is connected to the crystal cooling mechanism. In a specific embodiment, a cooling medium channel can be provided on the side wall of the lifting arm 1007. Alternatively, the lifting arm 1007 is provided as a hollow structure, and the inner hole in the middle of the lifting arm 1007 is the cooling medium channel. The lower end of the cooling medium channel is connected to the medium outlet or medium inlet of the crystal cooling mechanism 10011, and the upper end of the cooling medium channel is connected to the cooling source. That is, the cooling medium introduced into the crystal cooling mechanism 10011 is transmitted through the cooling medium channel of the lifting arm 1007.

[0057] When one lift arm 1007 is provided, two cooling medium channels for inflow and outflow are provided in the lift arm 1007. The upper port of one cooling medium channel is connected to the cooling source and the lower port is connected to the medium inlet of the crystal cooling mechanism 10011, while the lower port of the other cooling medium channel is connected to the medium outlet of the crystal cooling mechanism 10011 and the upper port is connected to the recovery port of the cooling source. In other words, the two cooling medium channels, one for inflow and the other for outflow, form one medium flow path together with the crystal cooling mechanism 10011.

[0058] When two lift arms 1007 are provided, one cooling medium channel is provided in each of the two lift arms 1007. The two cooling medium channels also form one medium flow path, one inflow and one outflow. The structure of the crystal cooling mechanism 10011 according to the present invention will be described in detail here. The specific structure is not the focus of the present invention. Furthermore, each of the cooling shields or crystal cooling mechanisms according to this embodiment has one or more pull holes through which the ingot passes.

[0059] In one embodiment, as shown in Figs. 2, 3, 5 and 6, the case where two lifting arms 1007 are provided is taken as an example. Two lifting arms 1007 are provided in the upper furnace chamber 1001, and preferably, the two lifting arms 1007 are symmetrically provided in the upper furnace chamber 1001. The connection forms involving the lifting arms 1007 and the crystal cooling mechanism 10011 are various, and are also conventional connection forms in the present technology, such as screw connection or welding connection. However, it must be ensured that no medium leakage occurs after connection, and the tightness of the connection must be ensured. In a specific embodiment, the number of the lifting arms 1007 is preferably two, and the two lifting arms 1007 are symmetrically provided, so that it can be ensured that the crystal cooling mechanism 10011 can be smoothly lifted and lowered, and the economic efficiency and practicality are optimized. Similarly, three or more lifting arms may be alternatively selected and used, all of which are within the scope of the present invention. Even when a single lifting arm 1007 is provided, the lifting and lowering of the lifting arm 1007 can be realized, and this is also within the scope of the present invention.

[0060] Furthermore, the lower end tip of the lifting arm 1007 is connected to the crystal cooling mechanism 10011 and drives the crystal cooling mechanism 10011 to move up and down within the cavities of the upper furnace chamber 1001 and the lower furnace chamber 10012. That is, the lifting arm 1007 drives the crystal cooling mechanism 10011 to move it upward within the upper furnace chamber 1001 and completely separate it from the lower furnace chamber 10012. The upper end tip of the lifting arm 1007 is connected to the elevator 1004 provided outside the upper furnace chamber 1001 via the upper furnace chamber 1001. The lifting arm 1007 is driven by the elevator 1004 to move up and down. The main function of the elevator 1004 is to drive the lifting arm to move up and down, and a seal is provided between the outer peripheral surface of the upper furnace chamber 1001 and the lifting arm 1007.

[0061] Also, as shown in Figs. 2, 3, 5 and 6, the lifting arm 1007 may be provided in a straight line structure or a broken line structure. When the lifting arm 1007 is provided as a broken line structure, it can be understood from the drawings that the main function of the broken line structure is to enable the connection of the lifter 1004 and the crystal cooling mechanism 10011 that are not on the same straight line. In practical applications, the mentioned broken line segment is within the scope of the present invention whether it is a straight line bend, an arc bend or an oblique bend. At least one straight line groove 1006 through the inner wall of the upper furnace chamber 1001 is provided on the outer peripheral surface of the upper furnace chamber 1001. In one embodiment, the number of the straight line grooves 1006 is preferably two, and the two straight line grooves 1006 are provided symmetrically, and the cover body 1005 is provided around the straight line groove 1006 with respect to the outer peripheral surface of the upper furnace chamber 1001. The broken line structure of the lifting arm 1007 moves up and down in the linear groove 1006. The tip of the upper end of the lifting arm 1007 passes through the upper end surface of the cover body 1005 and is connected to the lifter 1004 located outside the cover body 1005. In one embodiment, the specific structure of the cover body 1005 is shown in FIG. 4. The cover body 1005 can be welded to the outer edge surface of the upper furnace chamber 1001 so that the inner cavity of the cover body 1005 and the inner cavity of the upper furnace chamber 1001 form an integrated cavity through the linear groove 1006. A lifting arm through hole for accommodating the lifting arm 1007 that moves up and down is provided on the upper end surface of the cover body 1005. A seal is provided in the lifting arm through hole. The main function of the seal is to ensure that the integral cavity formed by the upper furnace chamber 1001 and the cover body 1005 becomes one sealed cavity, that is, to ensure that no leakage occurs in the sealed cavity when the lifting arm 1007 moves up and down. The seal can be selected from a sealing ring, an O-ring, a shaft seal, etc., as long as the sealing effect is realized.

[0062] Alternatively, in a specific embodiment, as shown in FIG. 6, an alternative structure of the upper furnace chamber 1001 is to provide at least one lift arm cavity 10029 on the outer peripheral surface of the upper furnace chamber 1001. The lift arm cavity 10029 is of an annular or linear structure. The inner cavity of the lift arm cavity 10029 and the inner cavity of the upper furnace chamber 1001 are integrally provided to form one whole cavity. The lifter 1004 is provided above the lift arm cavity 10029, and the lifter 1004 is connected to the tip of the upper end of the lift arm 1007. That is, the main function of the lift arm cavity 10029 is to form a space for the lift arm 1007 to move up and down, and its specific structural form may be provided as an annular structure, or any other various shapes may be selected as long as it can ensure that the lift arm 1007 moves up and down in the upper furnace chamber 1001. This effect can also be achieved by integrally expanding the diameter of the upper furnace chamber 1001. Although the economic efficiency may be somewhat reduced by increasing the diameter of the upper furnace chamber 1001 as a whole, this structure is also within the scope of protection of the present invention.

[0063] 5, when the lifting arm 1007 is provided in a linear structure, the upper part of the lifting arm 1007 is connected to the elevator 1004 provided in the upper part of the upper furnace chamber 1001 through the upper part of the upper furnace chamber 1001. In this structural form, it can be understood that the lifting arm 1007 may be provided in a broken line structure.

[0064] Also, the elevator 1004 is either a hydraulic cylinder, an air cylinder, an electric push rod, a lead screw elevator, or an elevator for a flexible shaft. In one embodiment, when the elevator 1004 is provided as a hydraulic cylinder, an air cylinder, or an electric push rod, it can be directly connected to the tip of the upper end of the lifting arm 1007. In this case, the up and down movement of the lifting arm 1007 can be realized by simply providing a hydraulic cylinder, an air cylinder, or an electric push rod above the upper furnace chamber, then providing a telescopic rod of the hydraulic cylinder or the air cylinder or an electric push rod to one bracket, and then connecting the hydraulic cylinder, the air cylinder, or the electric push rod to the tip of the upper end of the lifting arm 1007. When an extendable rod of a hydraulic cylinder or air cylinder or an electric push rod is provided on the support frame of the upper furnace chamber 1001 or the rack, the extendable rod for the hydraulic cylinder, air cylinder or electric push rod is connected to the lifting block 1002, and the lifting block 1002 is connected to the upper tip of the lifting arm 1007, thereby causing the lifting arm 1007 to move up and down.

[0065] 7, 8 and 9, the lead screw elevator includes a lifting block 1002, a power source 10019, a support frame 10020, a guide column 10021, a lead screw 10022 and a nut 10023. The support frame 10020 is provided on the outer side of the upper furnace chamber 1001. For example, it may be provided on a bracket of a rack or directly on the rack. Two parallel guide columns 10021 are provided on the support frame 10020, the lifting block 1002 is provided on the two guide columns 10021, a nut 10023 is provided on the lifting block 1002, and the nut 10023 is provided in a sleeve shape on the lead screw 10022. The upper and lower ends of the lead screw 10022 are provided on the upper and lower ends of the support frame 10020, respectively, and the upper end or the lower end of the lead screw 10022 is connected to the power source 10019. The power source 10019 is preferably a motor, but a reducer can be provided between the motor and the lead screw. The lifting block 1002 is connected to the tip of the upper end of the lifting arm 1007. In one embodiment, an alternative structure of the guide column 10021 is a linear guide rail, a linear bearing, and a guide feed rod. The structure of the lifting block 1002 is shown in FIG. 9. The lifting block 1002 has a rectangular structure, and two guide holes 10024 for mounting the guide column 10021 are provided on the upper surface of the lifting block 1002. A nut fixing hole 10025 is provided in the center of the lifting block 1002, and a nut 10023 is provided in the nut fixing hole 10025. A lifting arm fixing hole 10026 is provided at the front end of the nut fixing hole 10025, and the lifting arm fixing hole 10026 is connected to the lifting arm 1007.

[0066] 10, the flexible shaft elevator includes an elevator block 1002, a power source 10019, a support frame 10020, a guide column 10021, a flexible shaft elevator 10027, and a flexible shaft 10028. The support frame 10020 is provided on the outer side of the upper furnace chamber 1001, two parallel guide columns 10021 are provided on the support frame 10020, and the elevator block 1002 is provided on the two guide columns 10021. The flexible shaft 10028 is installed on the elevator block 1002 between the two guide columns 10021. The tip of the upper end of the flexible shaft 10028 is connected to the flexible shaft elevator 10027 provided on the upper surface of the support frame 10020, and the flexible shaft elevator 10027 is externally connected to the power source 10019. The lifting block 1002 is connected to the tip of the upper end of the lifting arm 1007. In an embodiment, an alternative structure of the guide column 10021 can be selected as a straight guide rail as well. The lifter 10027 for flexible shaft is also directly available on the market for purchase, and its structure includes a housing, a flexible shaft roller, a ball spline, and a nut. For example, one flexible shaft roller is disposed in the housing, and the flexible shaft roller is sleeved against the ball spline, and the ball spline is driven by the power source 10019 to realize forward or reverse rotation. One end of the flexible shaft roller is provided with a male thread, which cooperates with a nut, which is fixed to the housing, and the flexible shaft 10028 is wound on the flexible shaft roller. During winding, the flexible shaft roller performs a left-right movement while performing a rotational movement against the ball spline to ensure that the tip of the lower end of the flexible shaft 10028 only moves up and down without performing left-right movement.

[0067] In order to improve the sealing performance of the upper furnace chamber 1001, a bellows 1003 is provided in a sleeve shape on the outer peripheral surface of the lifting arm 1007. The upper end of the bellows 1003 is connected to a lifting block 1002 of the lifting machine 1004, and the lower end of the bellows 1003 is connected to the upper furnace chamber 1001.

[0068] In a specific application example of the present invention, as shown in Figures 2 and 3, a crucible support 10015 is provided in the lower furnace chamber 10012, and a crucible 10013 to be supported is provided on the crucible support 10015. An isolation sleeve 10016 is provided inside the crucible 10013, and a heater 10014 is provided around the crucible 10013. A supply pipe 10010 is further provided in the lower furnace chamber 10012, and one end (upper end in the figure) of the supply pipe 10010 is connected to an automatic supply device outside the furnace, and the other end (lower end in the figure) of the supply pipe 10010 is connected to the open end of the crucible 10013. A crystal cooling mechanism 10011 is provided above the crucible 10013 by the lifting device of the present invention. The upper furnace chamber 1001 is provided above the lower furnace chamber 10012, and a gate valve 1009 or a rotary plate valve is provided between the upper furnace chamber 1001 and the lower furnace chamber 10012. The upper shaft 1008 is provided at the center of the upper end of the upper furnace chamber. The upper shaft is a moving mechanism, and a receiving section is provided at the tip of the lower end of the upper shaft 1008, which receives and connects the seed crystal 10018, and the upper shaft 1008 drives the seed crystal 10018 to move up and down. In use, when the heater 10014 heats the silicon material in the crucible 10013, the power source 10019 is activated. The crystal cooling mechanism 10011 is separated from the crucible 10013 by driving it to rise using the elevator 1004 and the elevator arm 1007. At this time, the heater 10014 heats the silicon material in the crucible 10013, so as to prevent the crystal cooling mechanism 10011 from absorbing heat during heating, thereby increasing the heating rate of the silicon material by the heater 10014. At the same time, the continuous supply of the supply pipe 10010 into the crucible 10013 can be better realized by the upward movement of the crystal cooling mechanism 10011. When the silicon material in the crucible 10013 is melted, the seed crystal 10018 is driven by the upper shaft 1008 to descend, and the crystal cooling mechanism 10011 is driven by the lifting device to descend to a predetermined position. After the tip of the lower end of the seed crystal 10018 comes into contact with the molten silicon liquid and the tip of the lower end of the seed crystal 10018 melts, the upper shaft 1008 drives the seed crystal 10018 to move upward, and at this time, the silicon liquid rises simultaneously following the seed crystal 10018.After the silicon liquid rises and reaches the crystal cooling mechanism 10011, the temperature of the silicon liquid gradually decreases and begins to crystallize, at which point the newly formed columnar crystal is the desired ingot 10017. The ingot 10017 can be either a single ingot with a large diameter or a silicon core with a small diameter. When the pulling is performed for a certain period of time, volatiles in the silicon material will adhere to the inner wall of the crystal cooling mechanism 10011, and once the volatiles have adhered to a certain extent, it becomes necessary to clean the adhesion. When the volatiles need to be cleaned, it is known to open the furnace chamber after shutting down the furnace and clean the crystal cooling mechanism 10011. In the present invention, the crystal cooling mechanism 10011 is raised into the upper furnace chamber 1001 by the elevator 1004 and the elevator arm 1007 without stopping the furnace, then the gate valve 1009 is closed to isolate the lower furnace chamber 10012 from the upper furnace chamber 1001, and then the furnace door of the upper furnace chamber 1001 is opened to clean the crystal cooling mechanism 10011. After cleaning, the furnace door is closed and the upper furnace chamber 1001 is evacuated, then the gate valve 1009 is opened, and then the crystal cooling mechanism 10011 is lowered by the elevator 1004 and the elevator arm 1007 to above the crucible 10013 in the lower furnace chamber 10012 to start pulling up the ingot 10017.

[0069] According to this embodiment, the present invention provides a valve between the upper furnace chamber and the lower furnace chamber, connects the cooling shield or crystal cooling mechanism to a lifting device, and moves the cooling shield or crystal cooling mechanism up and down in the cavity of the upper furnace chamber and the lower furnace chamber by the lifting device, thereby realizing the cleaning of the volatile matter attached to the cooling shield or crystal cooling mechanism without stopping the furnace. At the same time, the absorption of heat from the heater by the cooling shield or crystal cooling mechanism etc. during heating is also avoided, thereby reducing the labor intensity and improving the production efficiency.

[0070] According to a preferred embodiment of the present application, for example, as shown in Figures 20, 21 and 22, the lifting device described herein is used to pull a single ingot in a single crystal furnace. Here, the crystal cooling device in Figure 22 can be provided as a cooling jacket described below according to the second embodiment. The cooling jacket has one pulling hole in the center through which the pulled crystal passes. However, the structure of the cooling jacket is not limited to this, and multiple crystal pulling holes may be provided in it.

[0071] The lifting arm 1007 is configured with a broken line structure, and the tip of the lower end of the lifting arm 1007 is connected to the crystal cooling mechanism 10011. Two linear grooves 1006 are formed on the outer peripheral surface of the upper furnace chamber 1001 so as to penetrate the inner wall of the upper furnace chamber. A cover body 1005 is provided around the linear grooves 1006 with respect to the outer peripheral surface of the upper furnace chamber 1001. The broken line segments of the lifting arm 1007 move up and down within the linear grooves 1006, so that the lifting arm 1007 drives the cooling shield or cooling mechanism 10011 to move up and down within the upper furnace chamber 1001 and the lower furnace chamber 10012.

[0072] The elevator 1004 includes a lifting block 1002, a power source 10019, a support frame 10020, a guide column 10021, a lead screw 10022, and a nut 10023. The support frame 10020 is provided on the outer side of the upper furnace chamber 1001. Two parallel guide columns 10021 are provided on the support frame 10020. The lifting block 1002 is provided on the two guide columns 10021. The nut 10023 is provided on the lifting block 1002. The nut 10023 is provided in a sleeve shape on the lead screw 10022. The upper and lower ends of the lead screw 10022 are provided on the upper and lower ends of the support frame 10020, respectively. The lead screw 10022 is connected to the power source 10019. The lift block 1002 is connected to a lift arm 1007 and drives the lift arm 1007 to move up and down within a linear groove 1006 .

[0073] When the present application is applied to single ingot pulling in a single crystal furnace, it has the following advantageous effects:

[0074] 1. After the silicon material in the crucible melts to form silicon liquid, the impurities in the silicon liquid and in the furnace chamber vaporize and float on the surface of the cooling shield or crystal cooling mechanism. Due to the cooling medium in the cooling shield, the temperature of the cooling shield is relatively low, and in this case, the volatiles condense and adhere to the surface of the cooling shield. When the volatiles accumulate to a certain thickness, they fall onto the upper surface of the melt in the crucible, and then float on the upper surface of the melt due to the effects of gas flow disturbance and thermal expansion and contraction. Since the melting point of the volatiles is higher than the melting point of the silicon material, the volatiles cannot be melted, and the volatiles cannot be vaporized, and the volatiles continue to exist on the upper surface of the melt. Since the crucible is constantly rotating during pulling, the volatiles in the crucible do not stay stationary at a specific point on the upper surface of the silicon melt, but float at variable positions. If the floating particles adhere to the crystalline position of the ingot, they will destroy the molecular alignment direction (causing misalignment in the crystalline direction) when the silicon melt solidifies, causing the crystal line to collapse. At this time, the newly grown ingot will change from single crystal to polycrystalline, and the growth of the single ingot will fail.

[0075] According to the present application, a lifting device for the cooling shield or cooling mechanism is provided, so that when it is found that floating objects are attached to the cooling shield or cooling mechanism, the cooling shield or cooling mechanism is pulled upward from the lower furnace chamber by the lifting device. When the cooling shield or cooling mechanism leaves the lower furnace chamber and enters the upper furnace chamber, the valve is closed. Then, the upper furnace chamber is rotated by the furnace chamber rotation mechanism, so that the upper furnace chamber and the lower furnace chamber are separated (the state after the upper furnace chamber is rotated is shown in FIG. 23, and the furnace chamber rotation mechanism is a prior art of the present technology, and many single crystal furnaces use it, so the description thereof will not be repeated here). Therefore, even if the furnace is not stopped (when the thermal field in the lower furnace chamber continues to operate without stopping the furnace), the cooling shield or cooling mechanism is cleaned to realize the continuous pulling of the ingot, and the problem that the cooling shield is not cleanable is effectively avoided.

[0076] 2. If water leakage occurs in the cooling shield or the cooling mechanism during pulling, the cooling shield or the cooling mechanism can be pulled upward from the lower furnace chamber by the lifting device. When the cooling shield leaves the lower furnace chamber and enters the upper furnace chamber, the valve is closed. After that, the upper furnace chamber is rotated by the furnace chamber rotation mechanism so as to separate the upper furnace chamber from the lower furnace chamber (the furnace chamber rotation mechanism is a conventional technology of this technology, and many single crystal furnaces use it), and a new cooling shield is replaced without stopping the furnace (the thermal field in the lower furnace chamber continues to operate without stopping the furnace). Therefore, the problem that the cooling water is instantly vaporized at the high temperature of the thermal field when water leakage occurs in the cooling shield, the possibility of the furnace body bursting, etc. are effectively avoided.

[0077] According to another preferred embodiment of the present application, for example, the lifting device described in the present application is applied to a silicon core furnace to simultaneously lift multiple silicon cores using the Czochralski method, as shown in FIG. 24 .

[0078] The lifting arm 1007 is configured to have a broken line shape structure. The lifting arm 1007 is connected to the cooling shield or cooling mechanism 10011. Two linear grooves 1006 are formed on the outer peripheral surface of the upper furnace chamber 1001 so as to penetrate the inner wall of the upper furnace chamber. A cover body 1005 is provided around the linear grooves 1006 with respect to the outer peripheral surface of the upper furnace chamber 1001. The broken line segments of the lifting arm 1007 move up and down in the linear grooves 1006, so that the lifting arm 1007 drives the cooling shield or cooling mechanism 10011 to move up and down in the upper furnace chamber 1001 and the lower furnace chamber 10012.

[0079] The elevator 1004 includes a lifting block 1002, a power source 10019, a support frame 10020, a guide column 10021, a lead screw 10022, and a nut 10023. The support frame 10020 is provided on the outer side of the upper furnace chamber 1001. Two parallel guide columns 10021 are provided on the support frame 10020, the lifting block 1002 is provided on the two guide columns 10021, and the nut 10023 is provided on the lifting block 1002. The nut 10023 is provided in a sleeve shape on the lead screw 10022. The upper and lower ends of the lead screw 10022 are provided on the upper and lower ends of the support frame 10020, respectively. The lead screw 10022 is connected to the power source 10019. The lift block 1002 is connected to a lift arm 1007 and drives the lift arm 1007 to move up and down within a linear groove 1006 .

[0080] When the present application is applied to a silicon core furnace to pull up multiple silicon cores simultaneously, it has the following advantageous effects:

[0081] 1. After the silicon material in the crucible melts to form silicon liquid, the impurities in the silicon liquid and in the furnace chamber vaporize and float on the surface of the crystal cooling mechanism 10011. Due to the cooling medium in the crystal cooling mechanism 10011, the temperature of the crystal cooling mechanism 10011 is relatively low, and in this case, the volatiles condense and adhere to the surface of the crystal cooling mechanism 10011. When the volatiles accumulate to a certain thickness, they fall onto the upper surface of the melt in the crucible, and then float on the upper surface of the melt due to the effects of gas flow disturbance and thermal expansion and contraction. Since the melting point of the volatiles is higher than the melting point of the silicon material, the volatiles cannot be melted, and the volatiles cannot be vaporized, and the volatiles continue to exist on the upper surface of the melt. Since the crucible is constantly rotating during pulling, the volatiles in the crucible do not stay still at a specific point on the upper surface of the silicon melt, but float at variable positions. When the floating matter adheres to the crystallization position of the silicon core, a light one will cause a convex deformation of the outer edge surface of the pulled silicon core. In serious cases, the silicon core will be left behind in the crystal through-hole due to the change in the diameter of the silicon core, and the pulling will eventually be forced to stop, thus terminating this round of pulling. The pulled silicon core cannot be used as a final product, and will only become scrap.

[0082] According to the present application, a lifting device for the cooling shield or crystal cooling mechanism is provided, so that when it is found that floating objects are attached to the crystal cooling mechanism 10011, the crystal cooling mechanism 10011 can be pulled upward from the lower furnace chamber by the lifting device. When the crystal cooling mechanism 10011 leaves the lower furnace chamber and enters the upper furnace chamber, the valve is closed. Then, the upper furnace chamber is rotated by the furnace chamber rotation mechanism, thereby separating the upper furnace chamber from the lower furnace chamber. Therefore, when the furnace is not stopped (when the thermal field in the lower furnace chamber continues to operate without stopping the furnace), the crystal cooling mechanism 10011 is cleaned to realize the continuous pulling of the ingot (i.e., the crystal cooling mechanism is raised by the lifting device into the upper furnace chamber 1001 above the valve, and the lower furnace chamber below the valve is still in a continuous operating state, so that the crystal cooling mechanism can be cleaned without stopping the furnace). Therefore, the inability to clean the crystal cooling mechanism 10011 is effectively avoided.

[0083] 2. Due to the configuration of the lifting device, the crystal cooling mechanism can be withdrawn upward from the lower furnace chamber to provide a supply channel for the continuous supply device when the crucible realizes continuous supply, thereby realizing the working condition requirement for continuous supply of the crucible without stopping the furnace.

[0084] 3. It is possible to clean the deposits on the crystal cooling mechanism without shutting down the furnace, which effectively improves the production efficiency of silicon cores.

[0085] Second embodiment 11-12 show a second embodiment according to the present application. As shown in the figures, the second embodiment differs from the first embodiment in that a cooling jacket 100019 is provided in a manner connected between a cooling device or a cooling shield and a lifting device. FIGS. 13-19 show several different structures of the cooling jacket 100019 according to preferred embodiments of the present application. However, the structures of the cooling jacket are not limited to these, and the cooling jacket of the present application can be modified or replaced as necessary.

[0086] An artificial crystal furnace having a lifting function for pulling a crystal will be described with reference to Figs.

[0087] As shown in the figure, the artificial crystal furnace includes an upper furnace chamber 1001, an elevator 1004, an elevator arm 1007, a crystal cooling mechanism 10011, a cooling jacket 100019, and a valve. The upper furnace chamber 1001 is provided above the lower furnace chamber 10012, and a valve is provided between the lower end surface of the upper furnace chamber 1001 and the upper end surface of the lower furnace chamber 10012. In fact, the main function of the valve is to divide the cavities of the upper furnace chamber 1001 and the lower furnace chamber 10012 into two independent cavities. That is, when the valve is opened, the cavities of the upper furnace chamber 1001 and the lower furnace chamber 10012 communicate with each other to form one integral cavity, and when the valve is closed, the cavities of the upper furnace chamber 1001 and the lower furnace chamber 10012 are divided into two independent cavities. The valve is a gate valve 1009. Furthermore, an openable and closable furnace door is provided on the outer peripheral surface of the upper furnace chamber 1001 by a hinge.

[0088] In addition, at least one lifting arm 1007 is provided in the upper furnace chamber 1001, and the lower end of the lifting arm 1007 is connected to the upper end of the cooling jacket 100019. The lower end of the cooling jacket 100019 is connected to the crystal cooling mechanism 10011, and the lifting arm 1007 drives the cooling jacket 100019 and the crystal cooling mechanism 10011 to move up and down within the cavities of the upper furnace chamber 1001 and the lower furnace chamber 10012. In other words, a scenario can be realized in which the lifting arm 1007 drives the cooling jacket 100019 and the crystal cooling mechanism 10011 to rise into the upper furnace chamber 1001 and completely separate them from the lower furnace chamber 10012.

[0089] In addition, the cooling medium channel of the lift arm 1007 is connected in series or parallel to the cooling jacket 100019 and the crystal cooling mechanism 10011. In one embodiment, the cooling medium channel is provided on the side wall of the lift arm 1007, or the lift arm 1007 is provided with a hollow structure and the cooling medium channel is provided in the central inner hole of the lift arm 1007. That is, the cooling medium introduced into the cooling jacket 100019 and the crystal cooling mechanism 10011 is transmitted through the cooling medium channel of the lift arm 1007.

[0090] When one lift arm 1007 is provided, two cooling medium channels for inflow and outflow are provided in the lift arm 1007. The upper port of one of the cooling medium channels is connected to the cooling source, and the lower port is connected to the upper cooling medium inlet 1901 of the cooling jacket 100019. The lower port of the other cooling medium channel is connected to the upper cooling medium outlet 1904 of the cooling jacket 100019, and the upper port is connected to the return port of the cooling source. The cooling jacket 100019 and the crystal cooling mechanism 10011 communicate in series or in parallel, i.e. the two cooling medium channels, one for inflow and the other for outflow, together with the cooling jacket 100019 and the crystal cooling mechanism 10011 form a complete medium flow path.

[0091] When two lift arms 1007 are provided, one cooling medium channel is provided on each of the two lift arms 1007, and these two cooling medium channels also form one complete medium flow path, one for inflow and one for outflow. The structure of the crystal cooling mechanism 10011 in this embodiment is substantially the same as that in the first embodiment, so details will not be described here.

[0092] In one embodiment, as shown in Figs. 11 and 12, when two lifting arms 1007 are provided, the two lifting arms 1007 are provided symmetrically in the upper furnace chamber 1001. The connection forms of the lifting arms 1007 and the cooling jacket 100019 are various, and are conventional connection forms in the present technology, such as screw connection or welding connection. However, it is necessary to ensure that no medium leakage occurs after connection, and the tightness of the connection must be ensured. In a specific embodiment, the number of the lifting arms 1007 is preferably two, and the two lifting arms 1007 are provided symmetrically, so that it can be ensured that the cooling jacket 100019 and the crystal cooling mechanism 10011 can be smoothly raised and lowered, and the economic efficiency and practicality are optimized. Three or more lifting arms may be used, which is also within the scope of protection of the present application. Even when one lifting arm 1007 is provided, the lifting and lowering of the lifting arm 1007 can be realized, which is also within the scope of the present application.

[0093] In one embodiment, when the cooling medium channel is connected in series with the cooling jacket 100019 and the crystal cooling mechanism 10011, the upper end of the cooling medium channel is connected to a cooling source and a cooling medium recovery device, respectively, the outlet of the lower end of the cooling medium channel is connected to the upper cooling medium inlet 1901 of the cooling jacket 100019, the inlet of the lower end of the cooling medium channel is connected to the upper cooling medium outlet 1904 of the cooling jacket 100019, the lower cooling medium outlet 1902 of the cooling jacket 100019 is connected to the cooling medium inlet of the crystal cooling mechanism 10011, and the cooling medium outlet of the crystal cooling mechanism 10011 is connected to the lower cooling medium inlet 1908 of the cooling jacket 100019. When the cooling medium channel is connected in parallel to the cooling jacket 100019 and the crystal cooling mechanism 10011, the upper end of the cooling medium channel is connected to the cooling source and the cooling medium recovery device, respectively, the outlet at the lower end of the cooling medium channel is connected to the upper inlet 1901 for the cooling medium of the cooling jacket 100019 and the cooling medium inlet of the crystal cooling mechanism 10011 via pipes, and the inlet at the lower end of the cooling medium channel is connected to the upper outlet 1904 for the cooling medium of the cooling jacket 100019 and the cooling medium outlet of the crystal cooling mechanism 10011 via pipes, respectively.

[0094] The top end of the lifting arm 1007 passes through the upper furnace chamber 1001 and is connected to an elevator 1004 provided outside the upper furnace chamber 1001, and the lifting arm 1007 is driven by the elevator 1004 to move up and down. The main function of the elevator 1004 is to drive the lifting arm to move up and down. A seal is provided between the outer peripheral surface of the upper furnace chamber 1001 and the lifting arm 1007, thereby forming a crystal cooling device having a lifting function for pulling the crystal.

[0095] In addition, at least one linear groove 1006 penetrating the inner wall of the upper furnace chamber 1001 is provided on the outer peripheral surface of the upper furnace chamber 1001. The cover body 1005 is provided around the linear groove 1006 with respect to the outer peripheral surface of the upper furnace chamber 1001. The broken line structure of the lifting arm 1007 moves up and down within the linear groove 1006, and the upper part of the lifting arm 1007 passes through the upper end surface of the cover body 1005 and is connected to the elevator 1004 provided outside the cover body 1005.

[0096] In a specific embodiment, the lift arm 1007 is configured as a straight structure or a polygonal structure.

[0097] When the lifting arm 1007 is provided as a broken line structure, it can be understood from Figs. 11-12 that the main function of the broken line structure is to enable the connection of the lifter 1004, the cooling jacket 100019 and the crystal cooling mechanism 10011, which are not on the same straight line. In practical applications, the mentioned broken line structure is within the scope of the present application, whether it is a straight line bend, an arc bend or an oblique bend. At least one linear groove 1006 penetrating the inner wall of the upper furnace chamber 1001 is provided on the outer peripheral surface of the upper furnace chamber 1001. In one embodiment, the number of the linear grooves 1006 is preferably two, and the two linear grooves 1006 are preferably provided symmetrically. The cover body 1005 is provided around the linear groove 1006 with respect to the outer peripheral surface of the upper furnace chamber 1001. The broken line structure of the lifting arm 1007 moves up and down in the linear groove 1006. The upper part of the lifting arm 1007 passes through the upper end surface of the cover body 1005 and is connected to the lifting machine 1004 provided outside the cover body 1005. In one embodiment, the cover body 1005 can be welded to the outer edge surface of the upper furnace chamber 1001, so that the inner cavity of the cover body 1005 and the inner cavity of the upper furnace chamber 1001 form an integrated cavity through the linear groove 1006. A lifting arm through hole for accommodating the lifting arm 1007 moving up and down is provided on the upper end surface of the cover body 1005. A seal is provided in the lifting arm through hole. The main function of the seal is to ensure that the integrated cavity formed by the upper furnace chamber 1001 and the cover body 1005 becomes one sealed cavity, that is, to ensure that no leakage occurs in the sealed cavity when the lifting arm 1007 moves up and down. The seal can be selected from a sealing ring, an O-shaped ring, a shaft seal, etc., as long as the sealing effect is realized.

[0098] Similar to the first embodiment, in a specific embodiment, at least one lift arm cavity may alternatively be provided on the outer peripheral surface of the upper furnace chamber 1001. The lift arm cavity is of an annular structure or a linear structure. The inner cavity of the lift arm cavity and the inner cavity of the upper furnace chamber 1001 are integrally provided to form one integral cavity. The lifter 1004 is provided above the lift arm cavity, and the lifter 1004 is connected to the tip of the upper end of the lift arm 1007. That is, the main function of the lift arm cavity is to form one space for the lift arm 1007 to move up and down, and its specific structural form may be provided as an annular structure, or any other various shapes may be selected as long as it can ensure that the lift arm 1007 moves up and down in the upper furnace chamber 1001. This effect can also be achieved by increasing the diameter of the upper furnace chamber 1001 as a whole. Although the economic efficiency may be slightly lower by increasing the diameter of the upper furnace chamber 1001 as a whole, this structure is still within the scope of protection of the present application.

[0099] Also, when the lifting arm 1007 is provided in a linear structure, the upper part of the lifting arm 1007 is connected to the elevator 1004 provided in the upper part of the upper furnace chamber 1001 through the upper part of the upper furnace chamber 1001. In this structural form, it should be understood that the lifting arm 1007 may be provided in a broken line structure.

[0100] Also, the elevator 1004 is either a hydraulic cylinder, an air cylinder, an electric push rod, a lead screw elevator, or an elevator for a flexible shaft. In one embodiment, when the elevator 1004 is provided as a hydraulic cylinder, an air cylinder, or an electric push rod, it can be directly connected to the upper head of the lifting arm 1007. At this time, the lifting arm 1007 can be moved up and down simply by providing a hydraulic cylinder, an air cylinder, or an electric push rod above the upper furnace chamber, providing a hydraulic cylinder, an air cylinder, or an electric push rod on one bracket, and connecting the hydraulic cylinder, the air cylinder, or the electric push rod to the upper end of the lifting arm 1007. When the hydraulic cylinder, the air cylinder, or the electric push rod is provided on the support frame of the upper furnace chamber 1001 or the rack, the telescopic rod of the hydraulic cylinder or the air cylinder or the electric push rod is connected to the lifting block 1002, and the lifting block 1002 is connected to the tip of the upper end of the lifting arm 1007, thereby moving the lifting arm 1007 up and down.

[0101] The lead screw elevator also includes a lifting block 1002, a power source, a support frame, a guide column, a lead screw, and a nut. The support frame is provided on the outer side of the upper furnace chamber 1001. For example, it may be provided on a bracket of the rack or directly on the rack. Two parallel guide columns are provided on the support frame, the lifting block 1002 is provided on the two guide columns, and a nut is provided on the lifting block 1002, which is sleeved on the lead screw. The upper and lower ends of the lead screw are provided on the upper and lower ends of the support frame, respectively, and the upper end or the lower end of the lead screw is connected to the power source. The power source is preferably a motor. It is also possible to switch between the motor and the lead screw through a reducer. The lifting block 1002 is connected to the upper end of the lifting arm 1007. In one embodiment, an alternative structure of the guide column can be a straight guide rail. The lifting block 1002 has a rectangular structure. Two guide holes for mounting guide columns are provided on the top surface of the lifting block 1002, and a nut fixing hole is provided in the center of the lifting block 1002. A nut is provided in the nut fixing hole, and a lifting arm fixing hole is provided at the front end of the nut fixing hole. The lifting arm fixing hole is connected to the lifting arm 1007.

[0102] The flexible shaft elevator also includes a lifting block 1002, a power source, a support frame, a guide column, a flexible shaft elevator and a flexible shaft. The support frame is provided on the outer side of the upper furnace chamber 1001, two parallel guide columns are provided on the support frame, and the lifting block 1002 is provided on the two guide columns. The flexible shaft is installed on the lifting block 1002 between the two guide columns. The upper end of the flexible shaft is connected to the flexible shaft elevator provided above the support frame. The flexible shaft elevator is externally connected to the power source. The lifting block 1002 is connected to the upper end of the lifting arm 1007. In one embodiment, an alternative structure of the guide column can be selected as a straight guide rail as well. The flexible shaft elevator is also directly available on the market for purchase, and the structure includes a housing, a flexible shaft roller, a ball spline, a nut, etc. A flexible shaft roller is disposed in the housing, the flexible shaft roller is sleeved against the ball spline, and the ball spline is driven by a power source to realize forward or reverse rotation. One end of the flexible shaft roller is provided with a male screw, which cooperates with a nut, and the nut is fixed to the housing. The flexible shaft is wound around the flexible shaft roller. During winding, the flexible shaft roller moves left and right while rotating against the ball spline, so as to ensure that the tip of the lower end of the flexible shaft moves only up and down without moving left and right.

[0103] In order to improve the sealing performance of the upper furnace chamber 1001, a bellows 1003 is provided in a sleeve shape on the outer peripheral surface of the lifting arm 1007. The upper end of the bellows 1003 is connected to a lifting block 1002 of the lifting machine 1004, and the lower end of the bellows 1003 is connected to the upper furnace chamber 1001.

[0104] In a specific embodiment of the present application, taking the pulling of silicon material as an example, as shown in Figures 11 and 12, a crucible support 10015 is provided in the lower furnace chamber 10012, and a crucible 10013 is provided on the crucible support 10015. An isolation sleeve 10016 is provided inside the crucible 10013, and a heater 10014 is provided around the crucible 10013. A supply pipe 10010 is provided in the lower furnace chamber 10012. One end of the supply pipe 10010 (e.g., the upper end in the figure) is connected to an automatic supply device, and the other end of the supply pipe 10010 (e.g., the lower end in the figure) is connected to the open end of the crucible 10013. A crystal cooling mechanism 10011 is provided above the crucible 10013 by the lifting device of the present application. The upper furnace chamber 1001 is provided above the lower furnace chamber 10012, and a gate valve 1009 is provided between the upper furnace chamber 1001 and the lower furnace chamber 10012. The upper shaft 1008 is provided at the center of the upper end of the upper furnace chamber. The lower end of the upper shaft 1008 is connected to the seed crystal 10018, and the upper shaft 1008 drives the seed crystal 10018 to move up and down. In use, when the heater 10014 heats the silicon material in the crucible 10013, the power source is started at this moment. The cooling jacket 100019 and the crystal cooling mechanism 10011 are driven by the elevator 1004 and the elevator arm 1007 to rise, whereby the cooling jacket 100019 and the crystal cooling mechanism 10011 are separated from the crucible 10013. After the cooling jacket 100019 and the crystal cooling mechanism 10011 are separated from the crucible 10013, the heater 10014 heats the silicon material in the crucible 10013, so as to increase the heating rate of the silicon material by the heater 10014 by preventing the cooling jacket 100019 and the crystal cooling mechanism 10011 from absorbing heat during heating. At the same time, the continuous supply of the supply pipe 10010 to the crucible 10013 can be better realized by the upward movement of the cooling jacket 100019 and the crystal cooling mechanism 10011. When the silicon material in the crucible 10013 is melted, the seed crystal 10018 is driven by the upper shaft 1008 to descend, and the crystal cooling mechanism 10011 is driven by the lifting device to descend to a predetermined position.After the tip of the lower end of the seed crystal 10018 contacts the molten silicon liquid and the tip of the lower end of the seed crystal 10018 melts, the upper shaft 1008 drives the seed crystal 10018 to move upward, and at this time, the silicon liquid rises simultaneously following the seed crystal 10018. After the silicon liquid rises and reaches the crystal cooling mechanism 10011, the temperature of the silicon liquid gradually decreases and begins to crystallize. Then, the cooling jacket 100019 further cools the pulled ingot 10017, and the newly formed columnar crystal becomes the desired ingot 10017. The ingot 10017 can be either a single ingot with a large diameter or a silicon core with a small diameter. When the pulling is performed for a certain period of time, the volatiles in the silicon material will adhere to the inner wall of the crystal cooling mechanism 10011, and when the volatiles adhere to a certain extent, it becomes necessary to clean the adhesion. When volatiles need to be cleaned, it is known to shut down the furnace and then open the furnace chamber to clean the cooling jacket 100019 and the crystal cooling mechanism 10011. In the present application, without shutting down the furnace, the cooling jacket 100019 and the crystal cooling mechanism 10011 are raised into the upper furnace chamber 1001 by the elevator 1004 and the lifting arm 1007, after which the gate valve 1009 is closed to isolate the lower furnace chamber 10012 from the upper furnace chamber 1001, and then the furnace door of the upper furnace chamber 1001 is opened to clean the cooling jacket 100019 and the crystal cooling mechanism 10011. After cleaning, the furnace door is closed, the upper furnace chamber 1001 is evacuated, then the gate valve 1009 is opened, and the cooling jacket 100019 and the crystal cooling mechanism 10011 are lowered into the lower furnace chamber 10012 by the elevator 1004 and the elevator arm 1007 and suspended above the crucible 10013, after which the pulling of the ingot 10017 is started. This effectively improves the yield and pulling efficiency of the ingot 10017.

[0105] The lifting mechanism referred to in this embodiment may use the lifting device described in the first embodiment.

[0106] Also, when the cooling medium channel is in series communication with the cooling jacket 100019 and the crystal cooling mechanism 10011, the structure of the cooling jacket 100019 is as shown in FIG. 13. The first structure of the cooling jacket 100019 is that the cooling jacket 100019 includes an upper cover plate 1903, a cooling jacket outer ring 1905, a cooling jacket inner ring 1906, and a lower cover plate 1907. The cooling jacket outer ring 1905 is sleeved around the cooling jacket inner ring 1906. The upper cover plate 1903 is provided at the upper end of the cavity between the cooling jacket outer ring 1905 and the cooling jacket inner ring 1906, and the lower cover plate 1907 is provided at the lower end of the cavity between the cooling jacket outer ring 1905 and the cooling jacket inner ring 1906. An upper inlet 1901 for cooling medium and an upper outlet 1904 for cooling medium are provided symmetrically on an upper cover plate 1903 , and a lower outlet 1902 for cooling medium and a lower inlet 1908 for cooling medium are provided symmetrically on a lower cover plate 1907 .

[0107] Also, when the cooling medium channel is in parallel communication with the cooling jacket 100019 and the crystal cooling mechanism 10011, the structure of the cooling jacket 100019 is as shown in FIG. 14. The second structure of the cooling jacket 100019 is that the cooling jacket 100019 includes an upper cover plate 1903, a cooling jacket outer ring 1905, a cooling jacket inner ring 1906, and a lower cover plate 1907. The cooling jacket outer ring 1905 is sleeved around the cooling jacket inner ring 1906. The upper cover plate 1903 is provided at the upper end of the cavity between the cooling jacket outer ring 1905 and the cooling jacket inner ring 1906, and the lower cover plate 1907 is provided at the lower end of the cavity between the cooling jacket outer ring 1905 and the cooling jacket inner ring 1906. The upper inlet 1901 for the cooling medium and the upper outlet 1904 for the cooling medium are provided symmetrically on the upper cover plate 1903.

[0108] Also, when the cooling medium channel is in parallel communication with the cooling jacket 100019 and the crystal cooling mechanism 10011, the structure of the cooling jacket 100019 may be as shown in Figs. 15-16. The third structure of the cooling jacket 100019 is that the cooling jacket 100019 includes an upper cover plate 1903, a cooling jacket outer ring 1905, a cooling jacket inner ring 1906, a lower cover plate 1907, and a flow guide plate 1909. The cooling jacket outer ring 1905 is provided around the cooling jacket inner ring 1906 in a sleeve shape. The upper cover plate 1903 is provided at the upper end of the cavity between the cooling jacket outer ring 1905 and the cooling jacket inner ring 1906, and the lower cover plate 1907 is provided at the lower end of the cavity between the cooling jacket outer ring 1905 and the cooling jacket inner ring 1906. The upper inlet 1901 for the cooling medium and the upper outlet 1904 for the cooling medium are provided symmetrically on the upper cover plate 1903. A plurality of flow guide plates 1909 are spaced apart in the cavity between the cooling jacket outer ring 1905 and the cooling jacket inner ring 1906. The plurality of flow guide plates 1909 are provided in the form of flow guide plates 1909 whose upper end tips are in contact with the upper cover plate 1903 in the cavity at positions before and after the upper inlet 1901 for the cooling medium and the upper outlet 1904 for the cooling medium, respectively. In order to further improve the cooling effect, as shown in FIG. 16, one flow guide plate 1909 whose lower end tip is connected to the lower cover plate 1907 is provided between two flow guide plates 1909 whose upper end tips are in contact with the upper cover plate 1903. This allows a wave-like flow of the cooling medium in the cavity to be realized, and the cooling effect is further improved.

[0109] Also, when the cooling medium channel is in parallel communication with the cooling jacket 100019 and the crystal cooling mechanism 10011, the structure of the cooling jacket 100019 may be as shown in FIG. 17. The fourth structure of the cooling jacket 100019 is that the cooling jacket 100019 includes an upper cover plate 1903, a cooling jacket outer ring 1905, a cooling jacket inner ring 1906, a lower cover plate 1907, a cooling medium return pipe 1910 and a spiral flow guide plate 1911. The cooling jacket outer ring 1905 is sleeved around the cooling jacket inner ring 1906. The upper cover plate 1903 is provided at the upper end of the cavity between the cooling jacket outer ring 1905 and the cooling jacket inner ring 1906, and the lower cover plate 1907 is provided at the lower end of the cavity between the cooling jacket outer ring 1905 and the cooling jacket inner ring 1906. An upper inlet 1901 for the cooling medium and an upper outlet 1904 for the cooling medium are provided symmetrically on the upper cover plate 1903. A spiral flow guide plate 1911 is provided in the cavity between the cooling jacket outer ring 1905 and the cooling jacket inner ring 1906. The upper outlet 1904 for the cooling medium is connected to the upper end of a cooling medium return pipe 1910 provided in the cavity between the cooling jacket outer ring 1905 and the cooling jacket inner ring 1906, and the cooling medium return pipe 1910 passes through the spiral flow guide plate 1911 and its lower end end is located in the central lower part of the cavity between the cooling jacket outer ring 1905 and the cooling jacket inner ring 1906.

[0110] Also, when the cooling medium channel is in series communication with the cooling jacket 100019 and the crystal cooling mechanism 10011, the structure of the cooling jacket 100019 may be as shown in FIG. 18. The fifth structure of the cooling jacket 100019 is that the cooling jacket 100019 comprises an upper cover plate 1903, a cooling jacket outer ring 1905, a cooling jacket inner ring 1906, a lower cover plate 1907, a spiral flow guide plate 1911 and a cooling medium flow guide pipe 1912. The cooling jacket outer ring 1905 is sleeved around the cooling jacket inner ring 1906. The upper cover plate 1903 is provided at the upper end of the cavity between the cooling jacket outer ring 1905 and the cooling jacket inner ring 1906, and the lower cover plate 1907 is provided at the lower end of the cavity between the cooling jacket outer ring 1905 and the cooling jacket inner ring 1906. An upper inlet 1901 for the cooling medium and an upper outlet 1904 for the cooling medium are symmetrically provided on an upper cover plate 1903, and a lower outlet 1902 for the cooling medium and a lower inlet 1908 for the cooling medium are symmetrically provided on a lower cover plate 1907. A spiral flow guide plate 1911 is provided in a cavity between the cooling jacket outer ring 1905 and the cooling jacket inner ring 1906. The upper outlet 1904 for the cooling medium is connected to the upper end of a cooling medium flow guide pipe 1912 provided in the cavity between the cooling jacket outer ring 1905 and the cooling jacket inner ring 1906, and the cooling medium flow guide pipe 1912 passes through the spiral flow guide plate 1911 and its lower end is connected to the lower inlet 1908 for the cooling medium.

[0111] Also, when the cooling medium channel is in series communication with the cooling jacket 100019 and the crystal cooling mechanism 10011, the structure of the cooling jacket 100019 may be as shown in FIG. 19. The sixth structure of the cooling jacket 100019 is that the cooling jacket 100019 includes an upper cover plate 1903, a cooling jacket outer ring 1905, a cooling jacket inner ring 1906, and a lower cover plate 1907. The cooling jacket outer ring 1905 is sleeved around the cooling jacket inner ring 1906. The upper cover plate 1903 is provided at the upper end of the cavity between the cooling jacket outer ring 1905 and the cooling jacket inner ring 1906, and the lower cover plate 1907 is provided at the lower end of the cavity between the cooling jacket outer ring 1905 and the cooling jacket inner ring 1906. An upper cooling medium inlet 1901 and an upper cooling medium outlet 1904 are symmetrically provided on the outer peripheral surface of the cooling jacket outer ring 1905 , and a lower cooling medium outlet 1902 and a lower cooling medium inlet 1908 are symmetrically provided on the lower cover plate 1907 .

[0112] In this embodiment, the cooling jacket is provided above the cooling shield or cooling device, and the ingot is cooled by the cooling jacket and the cooling shield or cooling device, so that the cooling speed of the ingot is increased, and the efficiency of pulling the ingot is improved. Furthermore, a valve is provided between the upper furnace chamber and the lower furnace chamber, the cooling jacket and the cooling shield are connected to a lifting arm, the lifting arm is connected to a lifting machine, and the cooling jacket and the cooling shield are driven to move up and down in the cavities of the upper furnace chamber and the lower furnace chamber by the lifting arm, so that the cooling jacket and the cooling shield can be cleaned without stopping the furnace while avoiding the absorption of heat from the heater by the cooling jacket and the cooling shield or cooling device during heating, etc. Therefore, the labor intensity is reduced, the production efficiency is improved, and other advantageous effects make it suitable for large-scale popularization and application.

[0113] The above description is merely a preferred embodiment of the present invention, and is not intended to limit the present invention. Those skilled in the art will appreciate that the above embodiments of the present invention may be combined with each other, and the present invention may have various modifications and variations. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention are within the scope of protection of the present invention.

Claims

1. A furnace body, the furnace body comprising an upper furnace chamber (1001), a lower furnace chamber (10012) provided below the upper furnace chamber (1001), and a valve provided between the upper furnace chamber (1001) and the lower furnace chamber (10012), the valve being capable of dividing the upper furnace chamber (1001) and the lower furnace chamber (10012) into two independent cavities; A crystal cooling mechanism (10011) provided in the furnace body, the crystal cooling mechanism (10011) having at least one pulling hole through which the pulled crystal passes; a lifting device provided in the upper furnace chamber (1001), connected to the crystal cooling mechanism (10011), and driving the crystal cooling mechanism (10011) to move up and down within the upper furnace chamber (1001) and the lower furnace chamber (10012); An artificial crystal furnace equipped with:

2. The artificial crystal furnace of claim 1, wherein the lifting device comprises at least one lifting arm (1007) connected to the crystal cooling mechanism (10011) and an elevator (1004) for driving the lifting arm (1007) to move up and down.

3. 3. The artificial crystal furnace according to claim 2, wherein the lifting device is provided with a cooling medium channel, and the crystal cooling mechanism (10011) is provided with a cooling channel for a cooling medium flow, the cooling medium channel being in communication with the cooling channel.

4. The artificial crystal furnace according to claim 2 , wherein the lifting arm (1007) is provided in a linear structure or a polygonal structure.

5. 4. The artificial crystal furnace according to claim 2 or 3, wherein two of said lifting arms (1007) are provided.

6. 4. The artificial crystal furnace according to claim 3, wherein the cooling medium channels are provided on the side walls of the lifting arms (1007) or within the hollow structure of the lifting arms (1007).

7. 5. The artificial crystal furnace according to claim 4, wherein the lifting arm (1007) is provided in a broken line structure, at least one linear groove (1006) penetrating the inner wall of the upper furnace chamber is provided on the outer peripheral surface of the upper furnace chamber (1001), a cover body (1005) is provided around the linear groove (1006) with respect to the outer peripheral surface of the upper furnace chamber (1001), and a broken line segment of the lifting arm (1007) moves up and down within the linear groove (1006).

8. 3. The artificial crystal furnace according to claim 2, wherein at least one lift arm cavity (10029) is provided on the outer edge surface of the upper furnace chamber (1001), an inner cavity of the lift arm cavity (10029) is integrally formed with an inner cavity of the upper furnace chamber (1001), and the lift arm (1007) is configured so as to be able to move up and down within a cavity formed by the inner cavity of the lift arm cavity (10029) and the inner cavity of the upper furnace chamber (1001).

9. 5. The artificial crystal furnace according to claim 4, wherein the lifting arm (1007) is provided in a linear structure, and the upper end of the lifting arm (1007) is connected to the elevator (1004) by penetrating the top of the upper furnace chamber (1001).

10. 4. The artificial crystal furnace according to claim 2 or 3, wherein the elevator (1004) comprises a hydraulic cylinder, an air cylinder, an electric push rod, a lead screw elevator or an elevator for a flexible shaft.

11. The elevator (1004) comprises a lifting block (1002), a power source (10019), a support frame (10020), a guide column (10021), a lead screw (10022) and a nut (10023). The support frame (10020) is provided on the outer side of the upper furnace chamber (1001), two parallel guide columns (10021) are provided on the support frame (10020), the lifting block (1002) is provided on the two guide columns (10021), and the nut (10023) is provided on the upper furnace chamber (1001).

3. The artificial crystal furnace as described in claim 2, wherein a nut (10023) is provided on the lifting block (1002), the nut (10023) is provided in a sleeve-like shape on the lead screw (10022), the upper and lower ends of the lead screw (10022) are provided on the upper and lower ends of the support frame (10020), respectively, the lead screw (10022) is connected to the power source (10019), and the lifting block (1002) is connected to the lifting arm (1007).

12. The elevator comprises a lifting block (1002), a power source (10019), a support frame (10020), a guide column (10021), a lifting device for a flexible shaft (10027) and a flexible shaft (10028). The support frame (10020) is provided on the outer side of the upper furnace chamber (1001), two parallel guide columns (10021) are provided on the support frame (10020), the lifting block (1002) is provided on the two guide columns (10021), and the flexible shaft (10028) is provided on the upper furnace chamber (1001). The artificial crystal furnace of claim 2, wherein a flexible shaft (10028) is provided in the lifting block (1002) at the center of two guide columns (10021), the flexible shaft (10028) is connected to a flexible shaft elevator (10027) provided in the support frame (10020), the flexible shaft elevator (10027) is externally connected to the power source (10019), and the lifting block (1002) is connected to the lifting arm (1007).

13. The artificial crystal furnace according to claim 11 or 12, wherein the guide column (10021) comprises a linear guide rail, a linear bearing and a guide feed rod.

14. 5. The artificial crystal furnace according to claim 1, wherein the valve comprises a gate valve, a rotary plate valve or a flap valve.

15. 5. The artificial crystal furnace according to claim 2, further comprising a seal provided between an outer peripheral surface of the upper furnace chamber (1001) and the lifting arm (1007).

16. 5. The artificial crystal furnace according to claim 2, wherein a bellows (1003) is provided in a sleeve-like shape on the outer peripheral surface of the lifting arm (1007), one end of the bellows (1003) is connected to the upper furnace chamber (1001), and the other end of the bellows (1003) is connected to the elevator (1004).

17. 2. The artificial crystal furnace according to claim 1, wherein a cooling jacket (100019) is provided between the crystal cooling mechanism (10011) and the lifting device, and the cooling jacket (100019) is used to cool the crystal.

18. The artificial crystal furnace of claim 17, wherein the lifting device comprises at least one lifting arm (1007) and an elevator (1004) for driving the lifting arm (1007) to move up and down, the upper end of the cooling jacket (100019) is connected to the lifting arm (1007), the lower end of the cooling jacket (100019) is connected to the crystal cooling mechanism (10011), and the upper end of the lifting arm (1007) is connected to the elevator (1004).

19. The artificial crystal furnace according to claim 18, wherein a cooling medium channel is provided in the lifting arm (1007), and the cooling medium channel is connected in series to the medium channel of the cooling jacket (100019) and the cooling channel of the crystal cooling mechanism (10011).

20. The artificial crystal furnace according to claim 18, wherein a cooling medium channel is provided in the lifting arm (1007), and the cooling medium channel is in parallel communication with the medium channel of the cooling jacket (100019) and the cooling channel of the crystal cooling mechanism (10011).

21. 21. The artificial crystal furnace according to claim 17, wherein the cooling jacket (100019) comprises an upper cover plate (1903), a cooling jacket outer ring (1905), a cooling jacket inner ring (1906) and a lower cover plate (1907), the cooling jacket outer ring (1905) being sleeve-shaped around the cooling jacket inner ring (1906), the upper cover plate (1903) being provided at an upper end of a cavity between the cooling jacket outer ring (1905) and the cooling jacket inner ring (1906), the lower cover plate (1907) being provided at a lower end of the cavity between the cooling jacket outer ring (1905) and the cooling jacket inner ring (1906), and an upper inlet (1901) for a cooling medium and an upper outlet (1904) for a cooling medium being provided in the upper cover plate (1903).

22. 22. The artificial crystal furnace according to claim 21, wherein said lower cover plate (1907) is provided with a lower outlet (1902) for the cooling medium and a lower inlet (1908) for the cooling medium.

23. The artificial crystal furnace of claim 21, wherein the cooling jacket (100019) further comprises a plurality of flow guide plates (1909) arranged at predetermined intervals in the cavity between the cooling jacket outer ring (1905) and the cooling jacket inner ring (1906), and the upper ends of the plurality of flow guide plates (1909) are arranged to contact the upper cover plate (1903) in the cavity at positions before and after the upper inlet (1901) for the cooling medium and the upper outlet (1904) for the cooling medium.

24. The artificial crystal furnace of claim 21, wherein the cooling jacket (100019) further comprises a spiral flow guide plate (1911) and a cooling medium return pipe (1910) provided in the cavity between the cooling jacket outer ring (1905) and the cooling jacket inner ring (1906), the upper cooling medium outlet (1904) is connected to the cooling medium return pipe (1910), and the tip of the lower end of the cooling medium return pipe (1910) passes through the spiral flow guide plate (1911) and is located in the lower center of the cavity between the cooling jacket outer ring (1905) and the cooling jacket inner ring (1906).

25. The artificial crystal furnace of claim 22, wherein the cooling jacket (100019) further comprises a spiral flow guide plate (1911) and a cooling medium flow guide pipe (1912) provided in the cavity between the cooling jacket outer ring (1905) and the cooling jacket inner ring (1906), the upper cooling medium outlet (1904) is connected to the cooling medium flow guide pipe (1912), and the lower end of the cooling medium flow guide pipe (1912) is connected to the lower cooling medium inlet (1908) by penetrating the spiral flow guide plate (1911).

26. The cooling jacket (100019) comprises an upper cover plate (1903), a cooling jacket outer ring (1905), a cooling jacket inner ring (1906) and a lower cover plate (1907), the cooling jacket outer ring (1905) being sleeved around the cooling jacket inner ring (1906), and the upper cover plate (1903) being disposed at the upper end of a cavity between the cooling jacket outer ring (1905) and the cooling jacket inner ring (1906).

21. The artificial crystal furnace according to any one of claims 17 to 20, wherein the lower cover plate (1907) is provided at the lower end of a cavity between the cooling jacket outer ring (1905) and the cooling jacket inner ring (1906), an upper inlet (1901) for the cooling medium and an upper outlet (1904) for the cooling medium are provided on the outer peripheral surface of the cooling jacket outer ring (1905), and a lower outlet (1902) for the cooling medium and a lower inlet (1908) for the cooling medium are provided in the lower cover plate (1907).

27. An artificial crystal furnace system comprising the artificial crystal furnace according to any one of claims 1 to 26.

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