Valve Orifice Insert
The valve orifice insert with a plastic tubular body and interference fit design addresses the issues of fluid leakage and misalignment in conventional valves, providing a reliable and precise seal for improved fluid control in semiconductor manufacturing.
Patent Information
- Application Number
- JP2024556771
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2022-04-07
- Filing Date
- 2023-02-09
- Publication Date
- 2025-04-15
AI Technical Summary
Conventional valves face issues with fluid leakage due to poor metal-to-metal contact and corrosion, as well as misalignment of resin parts, which affects the integrity of the seal and precision in fluid control, particularly in semiconductor manufacturing.
A valve orifice insert with a plastic tubular body and stepped wall structure, featuring circumferential protrusions that form an interference fit with the step-shaped opening in the valve assembly, providing a reliable and precise seal without metal-to-metal contact.
The solution effectively prevents fluid leakage and ensures precise control of fluid flow, even at low flow rates, while reducing the risk of corrosion and contamination, thus enhancing the reliability and precision of manufacturing processes.
Smart Images

Figure 2025510858000001_ABST
Abstract
Description
[Background technology]
[0001] Many conventional valves operate by lowering or raising a diaphragm to close or open a gap in the valve orifice, regulating the flow of fluid through the valve. In one type of conventional valve, the valve is closed by metal-to-metal contact between the diaphragm and the valve orifice. Even slight misalignment of the metal-to-metal contact surfaces can cause a seal failure and fluid leakage. Furthermore, as these types of valves age, the metal corrodes, causing poor seals at the metal-to-metal contact points and resulting in leakage. Poor seals and leakage degrade the quality of the manufacturing process in which the valves are used. Summary of the Invention
[0002] In another type of conventional valve, described in U.S. Pat. No. 8,733,397, a plastic part is sandwiched between two metal parts by compression, and the plastic part contacts the diaphragm to seal the orifice. Although this method avoids metal-to-metal contact between the diaphragm and the sealing surface of the plastic part, there is a risk that the integrity of the seal between the plastic part and the surrounding metal parts will deteriorate over time, resulting in leakage or entrapment of fluid. Furthermore, the sealing surface of the plastic part may become misaligned during manufacture or use, which may make it difficult to control very low flow rates. Such deterioration of the seal quality may adversely affect manufacturing processes that require high-precision fluid control and low contamination levels, especially in the semiconductor manufacturing field. Such technical challenges have been obstacles to further advances in valve design.
[0003] [overview] According to one aspect of the disclosure, there is provided a valve orifice insert sized to fit into a stepped opening in an orifice structure of a valve assembly. The valve orifice insert is a stepped-walled plastic tubular body including a first tubular portion and a second tubular portion having an outer diameter dimension smaller than the first tubular portion, the first tubular portion and the second tubular portion being joined by a stepped structure. The valve orifice insert includes at least one circumferential protrusion that extends radially outwardly a predetermined distance from an outer surface of the first tubular portion or an outer surface of the second tubular portion to form an interference fit with the stepped opening when the valve orifice insert is fitted into the stepped opening.
[0004] This Summary is provided to introduce in a simplified form some of the concepts that are further described below in the Detailed Description. This Summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter. Moreover, the claimed subject matter is not limited to implementations that solve any or all disadvantages noted in any part of this disclosure. [Brief description of the drawings]
[0005] [Figure 1] FIG. 1 is a cross-sectional view of a valve orifice insert fitted into an orifice structure of a valve assembly according to a first embodiment of the present disclosure. [Diagram 2] FIG. 2 is a first perspective view of the valve orifice insert of FIG. 1 according to a first embodiment of the present disclosure. [Diagram 3] 3 is a second perspective view of the valve orifice insert of FIG. 1 according to the first embodiment of the present disclosure. [Figure 4] FIG. 4 is a first perspective view of an orifice structure of the valve assembly of FIG. 1 according to a first embodiment of the present disclosure. [Diagram 5] 5 is a second perspective view of the orifice structure of the valve assembly of FIG. 1 according to the first embodiment of the present disclosure. [Figure 6]FIG. 6 is a first perspective view of a valve orifice insert fitted into the orifice structure of the valve assembly of FIG. 1 according to a first embodiment of the present disclosure. [Figure 7] FIG. 7 is a second perspective view of the valve orifice insert fitted into the orifice structure of the valve assembly of FIG. 1 according to the first embodiment of the present disclosure. [Figure 8] FIG. 8 is a cross-sectional view of a fluid flow control device incorporating the valve orifice insert and orifice structure of the valve assembly of FIG. 1 according to a first embodiment of the present disclosure. [Figure 9] FIG. 9 is a cross-sectional view of a valve orifice insert fitted into an orifice structure of a valve assembly according to a second embodiment of the present disclosure. [Figure 10] FIG. 10 is a first perspective view of the valve orifice insert of FIG. 9 according to a second embodiment of the present disclosure. [Figure 11] FIG. 11 is a second perspective view of the valve orifice insert of FIG. 9 according to a second embodiment of the present disclosure. [Figure 12] FIG. 12 is a cross-sectional view of a valve orifice insert fitted into an orifice structure of a valve assembly according to a third embodiment of the present disclosure. [Figure 13] FIG. 13 is a first perspective view of the valve orifice insert of FIG. 12 according to a third embodiment of the present disclosure. [Figure 14] FIG. 14 is a second perspective view of the valve orifice insert of FIG. 12 according to a third embodiment of the present disclosure. [Figure 15] FIG. 15 is a cross-sectional view of the valve orifice insert of FIG. 12 installed in a valve body of a valve assembly in accordance with a third embodiment of the present disclosure. [Figure 16] FIG. 16 illustrates a method of manufacturing a valve assembly by inserting the valve orifice insert of FIG. 1, FIG. 9 or FIG. 12 into an orifice structure of the valve assembly according to one embodiment of the disclosure. [Figure 17] FIG. 17 is a schematic diagram of an example computing environment in which the fluid flow control device of FIG. 8 may be implemented. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0006] In view of the above problems, and referring to FIG. 1, a valve orifice insert 10 is sized to fit into a stepped opening 104 of an orifice structure 102 of a valve assembly 100 according to a first embodiment of the present disclosure. The valve orifice insert 10 includes a plastic tubular body 12 having a stepped wall 14 including a first tubular portion 16 and a second tubular portion 18 having an outer diameter dimension smaller than that of the first tubular portion 16. The first tubular portion 16 and the second tubular portion 18 are joined by a stepped structure 22. The first circumferential projection 20 extends radially outward from the outer surface 34 of the first tubular portion 16 a first predetermined distance 37a to form an interference fit with the stepped opening 104 when the valve orifice insert 10 is fitted into the stepped opening 104. The second circumferential projection 24 extends radially outward from the outer surface of the second tubular portion 18 a second predetermined distance 37b to form an interference fit with the stepped opening 104 when the valve orifice insert 10 is seated therein. A first interference distance 36a of the interference fit between the first circumferential projection 20 and the stepped opening 104 and a second interference distance 36b of the interference fit between the second circumferential projection 24 and the stepped opening 104 may be, for example, 1 / 10000 to 1 / 100 of an inch. It will be understood that the interference distance refers to the difference between the outer diameter of the first circumferential projection 20 and the inner diameter of the stepped opening 104, and also refers to the difference between the outer diameter of the second circumferential projection and the inner diameter of the stepped opening.
[0007] Of course, the valve orifice insert 10 may be manufactured with different diameters for the first tubular portion 16 and the second tubular portion 18 to accommodate orifice structures 102 having different orifice diameters.
[0008] The first tubular portion 16 includes a lip structure 26 that projects axially from a first end 28 of the first tubular portion 16 and includes a planar valve seat surface 30 formed at a distal end of the lip structure 26. The first tubular portion 16 also includes an axially protruding central structure 48 having a central opening 50 of an axially extending central passage 40 in fluid communication with a transverse passage 42 that extends transversely within the valve orifice insert 10. A central flat valve seat surface 49 is formed at the distal end of the axially protruding central structure 48.
[0009] The space between the lip structure 26 and the central structure 48 forms a recess cavity 38 having a first side opening 52 for the first side passage 44 and a second side opening 54 for the second side passage 46. The first side passage 44 and the second side passage 46 extend axially within the valve orifice insert 10. The orifice structure 102 may include a first outlet 112a and a second outlet 112b that open to a first orifice passage 116a and a second orifice passage 116b, respectively, of the orifice structure 102, which are in fluid communication with the space within the recess cavity 38.
[0010] In cross-section, Figure 1 shows the valve orifice insert 10 inserted into the stepped opening 104 of the orifice structure 102 such that after insertion, at least the first circumferential projection 20 extends radially outward from the outer surface of the first tubular portion 16 a first predetermined distance 37a and the second circumferential projection 24 extends radially outward from the outer surface of the second tubular portion 18 a second predetermined distance 37b to form an interference fit with the tapered surface 106 of the stepped opening 104. Because the interference fit between the second circumferential projection 24 and the tapered surface 106 occurs obliquely relative to the axial direction of insertion, this interference fit is enhanced by both an axial compressive force of axial vector V1 and a radial compressive force of radial vector V2 acting on the tapered surface 106. In particular, the axial force represented by vector V1 facilitates secure retention of the insert in the stepped opening 104. The insertion of the valve orifice insert is stopped at a predetermined depth by the stepped structure 22. After insertion, the first tubular portion 16 rests on the stepped surface 110 of the stepped opening 104, and the flat valve seating surface 30 formed at the distal end of the lip structure 26 is flush with the upper surface 120 of the orifice structure 102 and the central flat valve seating surface 49 formed at the distal end of the axially protruding central structure 48.
[0011] The first circumferential projection 20 is formed as a ridge extending radially outward from the outer surface of the first tubular portion 16 formed adjacent the first end 28 of the plastic tubular body 12. The interference fit compresses the first circumferential projection 20 a first predetermined distance 37a against the sidewall 108 of the stepped opening 104, thereby providing an effective seal to prevent fluid within the valve orifice insert 10 from leaking and becoming trapped in the space between the valve orifice insert 10 and the orifice structure 102. The second circumferential projection 24 has a lobe shape and extends radially outward from the outer surface of the second tubular portion 18 formed adjacent the second end 32 of the plastic tubular body 12 opposite the first end 28.
[0012] The stepped opening 104 has a tapered surface 106 that tapers away from the second end 32 of the valve orifice insert 10 fitted into the stepped opening 104, and at least the second circumferential projection 24 contacts at least a portion of the tapered surface 106. The tapered surface 106 faces away from the surface of the stepped structure 22. When the valve orifice insert 10 is inserted into the stepped opening 104, the second circumferential projection 24 is compressed and slides down towards the tapered surface 106. When the second circumferential projection 24 reaches the tapered surface 106, the second circumferential projection 24 springs out and contacts the tapered surface 106, thereby creating a sealing and locking action. In other words, the interference fit compresses the second circumferential projection 24 against the tapered surface 106 a second predetermined distance 37b, thereby forming a sealing and locking mechanism that secures within the stepped opening 104 and prevents fluid within the valve orifice insert 10 from leaking and becoming trapped in the space between the valve orifice insert 10 and the orifice structure 102.
[0013] The valve orifice insert 10 includes an engineered plastic, which may be selected from the group consisting of polyetheretherketone (PEEK), polytetrafluoroethylene (PTFE), perfluoroalkoxy (PFA), and polychlorotrifluoroethylene (PCTFE). The engineered plastic is preferably a PEEK plastic due to its compressibility, resilience, and flexibility.
[0014] 2, a valve orifice insert 10 according to a first embodiment of the present disclosure is shown in a perspective view illustrating the first end 28 of the valve orifice insert 10 and the distal end of the lip structure 26 of the first tubular portion 16. The exterior surface of the first tubular portion 16 is cylindrical or conical. In this view, the recessed cavity 38 forms a ring around the central structure 48 and the central opening 50. The lip structure 26 forms a protruding ring surrounding the recessed cavity 38. A first side opening 52 and a second side opening 54 sandwich the central opening 50 within the recessed cavity 38.
[0015] Referring to FIG. 3, the valve orifice insert 10 according to the first embodiment of the present disclosure is shown in a perspective view, showing the second end 32 of the valve orifice insert 10 and showing the first inlet 56 to the first side passage 44 and the second inlet 58 to the second side passage 46 as viewed on the distal face 60 of the second tubular portion 18. The lateral passage 42 extending radially within the second tubular portion 18 is shown in the side wall 62 of the second tubular portion 18. In this view, the lateral passage 42 passes perpendicularly to the first side passage 44 and the second side passage 46. The outer surface of the second tubular portion 18 is also cylindrical or conical. The outer surfaces of the first tubular portion 16 and the second tubular portion 18 are concentric with each other.
[0016] 4, a perspective view of the orifice structure 102 of the valve assembly 100 is shown, showing the stepped surface 110 of the stepped opening 104 and the top surface 120 of the orifice structure 102. The top surface 120 forms an annular surface around the edge of the orifice structure 102. The first orifice passage 116a and the second orifice passage 116b are two of the plurality of orifice passages 116a-j. Similarly, the first outlet 112a and the second outlet 112b are two of the plurality of outlets 112a-j. The first lateral outlet 114a and the second lateral outlet 114b are provided in the sidewall 118 of the orifice structure 102 and are configured to communicate with the lateral passage 42 when the valve orifice insert 10 is fully inserted into the orifice structure 102.
[0017] 5, a perspective view of the orifice structure 102 of the valve assembly 100 is shown illustrating the tapered surface 106 of the stepped opening 104 and the bottom surface 122 of the orifice structure 102. The tapered surface 106 forms an annular surface around the stepped opening 104. A first outlet 112a is shown in FIG.
[0018] 6, there is shown a perspective view of the valve orifice insert 10 fully inserted into the stepped opening 104 of the orifice structure 102 of the valve assembly 100, with the flat valve seating surface 30 formed at the distal end of the lip structure 26 being coplanar with the top surface 120 of the orifice structure 102. It will be appreciated that in the process of manufacturing the valve assembly 100 with the valve orifice insert 10 fully inserted, the lip structure 26 of the tubular plastic valve insert 10 and the top surface 120 of the orifice structure 102 of the valve assembly 100 are simultaneously lapped with a flat lapping tool to form the valve sealing surface 30 on the lip structure 26 and the central flat valve seating surface 49 on the central structure 48, which are coplanar with the top surface 120 of the orifice structure 102 of the valve assembly 100. The coplanarity of the flat seating surface 30 and the central flat seating surface 49 with the surfaces of the orifice structure 102 allows fine control of the fluid flow through the orifice structure 102 at relatively small command flow rates.
[0019] 7, a perspective view is shown of the valve orifice insert 10 fully inserted into the stepped opening 104 of the orifice structure 102 of the valve assembly 100 such that the second circumferential projection 24 projects into contact with the tapered surface 106, thereby providing a seal and locking action. A first inlet 56 to the first side passage 44 and a second inlet 58 to the second side passage 46 are at the distal face 60 of the second tubular portion 18.
[0020] Referring to FIG. 8, a cross-sectional view of a fluid flow controller 130 incorporating a first embodiment of a valve orifice insert 10 and a valve assembly 100 according to an embodiment of the present disclosure is shown. The fluid flow controller 130 includes a flow path 126 and a valve assembly 100 disposed in the flow path 126 to control the flow of fluid along the flow path 126. The valve orifice insert 10 and valve assembly 100 depicted in FIG. 8 are substantially similar to those of the embodiment of FIGS. 1-7. The valve assembly 100 includes a first outlet 112a, a second outlet 112b, an actuator 136, and a diaphragm 132 coupled to the actuator 136. The orifice structure 102 of the valve assembly 100 includes the valve orifice insert 10 disposed in a stepped opening 104 of the valve assembly 100. The actuator 136 is configured to move the diaphragm 132 under command of a controller 138 operatively coupled to the actuator 136 to selectively contact or space the diaphragm 132 from the flat valve seat surface 30 to stop or allow fluid flow through the orifice structure 102 at a commanded flow rate, for example in the sub-sccm (or less than 1 sccm) range of 0.05-1 sccm.
[0021] For example, when the diaphragm 132 is in the closed position in contact with the planar valve seating surface 30, fluid reaching the outer surface of the first tubular portion 16 from the first and second side passages 44, 46 is trapped within the recessed cavity 38. However, when the diaphragm 132 moves away from the planar valve seating surface 30, the fluid trapped within the recessed cavity 38 begins to flow into the first and second orifice passages 116a, 116b and into the central passage 40 through the central opening 50 of the axially protruding central structure 48. Because the central planar valve seating surface 49 of the central structure 48, the planar valve seating surface 30 of the lip structure 26, and the upper surface 120 of the orifice structure 102 are all coplanar with one another, the flow of fluid from the recessed cavity 38 into the orifice passages 116a, 116b and into the central passage 40 can be finely regulated by an actuator 136 operatively coupled to the diaphragm 132.
[0022] The controller 138 includes a processor 140 and a memory 142 operably coupled to the processor 140. The processor 140 sends a drive signal to the actuator 136 to move the diaphragm 132 selectively into or out of contact with the flat valve seating surface 30 and the central flat valve seating surface 49. When the diaphragm 132 contacts the flat valve seating surface 30 and the central flat valve seating surface 49 to form a seal, the upper surface 120 of the orifice structure 102 aligns with the mounting structure 134 that supports the diaphragm 132. In this example, the processor 140 and the memory 142 are physically integrated into the controller 138. Alternatively, the processor 140 and / or the memory 142 may be included in a separate physical computing device configured to communicate with the actuator 136 via wired and / or wireless signals. The functions of the processor 140 and the memory 142 may be distributed among multiple communicatively coupled computing devices, which in some examples may include one or more client computing devices and / or one or more server computing devices.
[0023] The valve orifice insert 10 includes a plastic tubular body 12 having an outer surface 34. The first circumferential projection 20 extends radially outward from the outer surface 34 of the first tubular portion 16 to form an interference fit with the sidewall 108 of the stepped opening 104, and the second circumferential projection 24 forms an interference fit with the tapered surface 106 of the orifice structure 102. This provides an effective seal to prevent fluid within the valve orifice insert 10 from leaking out and becoming trapped in the space between the outer surface 34 of the plastic tubular body 12 and the orifice structure 102. The lip structure 26 includes a flat valve seating surface 30 formed at a distal end of the lip structure 26 that is coplanar with the central flat valve seating surface 49 of the central structure 48 and the top surface 120 of the orifice structure 102 that supports the mounting structure 134 of the diaphragm 132. The coplanarity of the flat valve seat surface 30 with the central flat valve seat surface 49 of the central structure 48 and the upper surface 120 of the orifice structure 102 allows fine control of the fluid flow through the orifice structure 102 at relatively small command flow rates, for example, on the order of 0.05-1 sccm.
[0024] 9, a valve orifice insert 210 according to a second embodiment of the present disclosure is illustrated. The configuration of the second embodiment of the valve orifice insert 210 is substantially similar to that of the first embodiment of the valve orifice insert 10, and therefore a detailed description thereof will be omitted here for the sake of brevity. It should be noted that like parts are designated with like reference numerals throughout the detailed description and accompanying drawings.
[0025] 9 illustrates the valve orifice insert 210 being inserted into the stepped opening 104 of the orifice structure 102 such that, after insertion, at least the first circumferential projection 220 extends radially outward from the outer surface 234 of the first tubular portion 216 a first predetermined distance 237a to form an interference fit with the sidewall 108 of the stepped opening 104, and the second circumferential projection 224 extends radially outward from the outer surface of the second tubular portion 218 a second predetermined distance 237b to form an interference fit with the tapered surface 106 of the stepped opening 104. The first interference distance 236a of the interference fit between the first circumferential projection 220 and the stepped opening 104, and the second interference distance 236b of the interference fit between the second circumferential projection 224 and the stepped opening 104 may be, for example, 1 / 10000-1 / 100 of an inch. As mentioned above, the interference distance refers to the difference between the outer and inner diameters of the valve orifice insert and the stepped orifice prior to insertion.
[0026] The first tubular portion 216 includes an alignment structure 226 projecting axially from the first end 228 and includes an alignment surface 230 formed at a distal end of the alignment structure 226 and a central flat valve seating surface 249 formed at a distal end of the central structure 248. After insertion, the first tubular portion 216 rests on the stepped surface 110 of the stepped opening 104 such that the alignment surface 230 formed at the distal end of the alignment structure 226 and the central flat valve seating surface 249 formed at the distal end of the central structure 248 are coplanar with the upper surface 120 of the orifice structure 102.
[0027] A central structure 248 projects axially from the center of the first tubular portion 216. A central opening 250 is provided in the center of the central structure 248 for a central passage 240 that extends radially within the valve orifice insert 210. In the second embodiment, the central passage 240 is narrower than the central passage 40 of the first embodiment of the valve orifice insert 10. Unlike the first embodiment, the second embodiment of the valve orifice insert 210 does not have a side passage that flows parallel to the central passage 240.
[0028] 10, a valve orifice insert 210 according to a second embodiment of the present disclosure is illustrated in a perspective view showing the first end 228 of the valve orifice insert 210 and the distal end of the alignment structure 226 of the first tubular portion 216. In the second embodiment, the alignment structure 226 comprises four separate alignment structures 226a-d protruding from a surface of the first end 228 of the first tubular portion 216, with each separate alignment structure 226a-d forming an alignment surface 230 at the distal end of each separate alignment structure 226a-d. However, the number of alignment structures 226a-d is not specifically limited to four, and may be two, three, or more than four in alternative embodiments. The space between the separate alignment structures 226a-d and the central structure 248 forms a concave cavity 238, which does not have a side opening in the second embodiment. It will be appreciated that when the valve orifice insert 210 is inserted into the orifice structure 102 of the valve assembly 100, the upper surface 120 of the orifice structure 102 is coplanar with the alignment surfaces 230 at the distal ends of each of the separate alignment structures 226a-d and the central flat valve seat surface 249 at the distal end of the central structure 248.
[0029] 11, a valve orifice insert 210 according to a second embodiment of the present disclosure is illustrated in a perspective view showing the second end 232 of the valve orifice insert 210 and illustrating the opening to the central flow passage 240 on the distal surface 260 of the second tubular portion 218. Unlike the first embodiment, the distal surface 260 of the valve orifice insert 210 of the second embodiment does not have a side opening to the side flow passage.
[0030] 12, a valve orifice insert 310 according to a third embodiment of the present disclosure is illustrated. The configuration of the third embodiment valve orifice insert 310 is substantially similar to the configuration of the second embodiment valve orifice insert 210, and therefore a detailed description thereof will be omitted here for the sake of brevity. It should be noted that like parts are designated with like reference numerals throughout the detailed description and accompanying drawings.
[0031] FIG. 12 shows the valve orifice insert 310 inserted into the stepped opening 104 of the orifice structure 102 such that, after insertion, at least the first circumferential projection 320 extends radially outwardly from the outer surface of the first tubular portion 316 a first predetermined distance 337a and the second circumferential projection 324 extends radially outwardly from the outer surface of the second tubular portion 318 a second predetermined distance 337b to form an interference fit with the tapered surface 106 of the stepped opening 104.
[0032] The first tubular portion 316 includes a lip structure 326 that projects axially from a first end 328 of the first tubular portion 316 and includes a flat valve seating surface 330 formed at a distal end of the lip structure 326. After insertion, the first tubular portion 316 rests on the stepped surface 110 of the stepped opening 104 and the flat valve seating surface 330 formed at the distal end of the lip structure 326 is coplanar with the upper surface 120 of the orifice structure 102.
[0033] Unlike the first embodiment, the valve orifice insert 310 of the third embodiment does not have a central structure or side passages. Instead, the space enclosed by the lip structure 326 forms a concave cavity 338 that opens into a central passage 340 that extends axially within the valve orifice insert 310 and forms the inner surfaces of the first tubular portion 316 and the second tubular portion 318 that are cylindrical or conical and concentric.
[0034] 13, a valve orifice insert 310 according to a third embodiment of the present disclosure is shown in a perspective view illustrating the first end 328 of the valve orifice insert 310 and the distal end of the lip structure 326 of the first tubular portion 316. In the third embodiment, the lip structure 326 forms a protruding ring that surrounds a recessed cavity 338. The distal end of the lip structure 326 defines a ring-shaped flat valve seat surface 330.
[0035] 14, a valve orifice insert 310 according to a third embodiment of the present disclosure is shown in a perspective view illustrating the second end 332 of the valve orifice insert 310. Unlike the first embodiment, the distal surface 360 of the valve orifice insert 310 of the third embodiment does not have a side opening to a side flow passage. Instead, the space surrounded by the second circumferential projection 324 forms a single opening to the central flow passage 340.
[0036] 15, a cross-sectional view of the third embodiment valve orifice insert 310 is shown fully inserted into a stepped opening 404 of an orifice structure 402 of a valve assembly 400, the orifice structure 402 being a valve block. At least the first circumferential projection 320 extends radially outwardly a first predetermined distance 337a from the outer surface 334 of the first tubular portion 316 to form an interference fit with the sidewall 408 of the stepped opening 404, and the second circumferential projection 324 extends radially outwardly a second predetermined distance 337b from the outer surface of the second tubular portion 318 to form an interference fit with the tapered surface 406 of the stepped opening 404. A first interference distance 336a of the interference fit between the first circumferential projection 320 and the sidewall 408 and a second interference distance 336b of the interference fit between the second circumferential projection 324 and the tapered surface 406 may be, for example, 1 / 10000-1 / 100 of an inch. As discussed above, the interference distance refers to the difference between the outer diameter and the inner diameter of the valve orifice insert and the stepped orifice prior to insertion.
[0037] In this embodiment, the orifice structure 402 includes a first orifice passage 416 and a second orifice passage 418 in fluid communication with the central passage 340. After insertion, the first tubular portion 316 rests on the stepped surface 410 of the stepped opening 404, and a flat valve seat surface 330 formed at the distal end of the lip structure 326 is coplanar with an upper surface 420 of the orifice structure 402.
[0038] 16, a method 500 for manufacturing a valve assembly is described. The following description of method 500 is provided with reference to the software and hardware components described above and illustrated in Figures 1-15. It will be appreciated that method 500 may also be performed in other contexts using other suitable hardware and software components.
[0039] At step 502, a stepped opening is formed in an orifice structure of a valve assembly. At step 504, a valve orifice insert is formed from a plastic material and has a tubular body with a stepped wall including a first tubular portion and a second tubular portion having an outer diameter dimension smaller than the first tubular portion, the first tubular portion and the second tubular portion being joined by the stepped structure. At step 506, the valve orifice insert is inserted into the stepped opening, and after insertion, at least one circumferential protrusion extends radially outward from the outer surface of the first tubular portion or the outer surface of the second tubular portion a predetermined distance to form an interference fit with the stepped opening. Insertion of the valve orifice insert can be stopped at a predetermined depth by the stepped structure.
[0040] At step 508, the lip structure of the tubular plastic valve insert and a surface of the orifice structure of the valve assembly are simultaneously lapped with a planar lapping tool to form a valve sealing surface on the lip structure that is coplanar with a surface of the orifice structure of the valve assembly. The lip structure protrudes axially from the first end of the first tubular portion. The lip structure includes a planar valve seat surface formed at a distal end of the lip structure.
[0041] The above-described systems and methods can be used to improve the seal between the orifice and the valve diaphragm, allowing the control valve to control lower flow rates and to increase the effective stroke of the valve by reducing the force required to seal. In contrast to conventional designs that use compressive force to seal with a plastic part sandwiched between two metal parts, the present disclosure uses a radial interference fit for sealing, resulting in a simpler design with fewer parts. Also, compared to a fit that sandwiches a plastic part between two metal parts, the interference fit reduces leakage and entrapment of fluid between the valve orifice insert and the orifice structure, which can cause corrosion of the orifice structure and contamination of the fluid flowing in the flow path of the fluid control system. The compressibility, flexibility and elasticity of the plastic material of the valve orifice insert strengthen the interference fit and ensure a long life. The synergistic effect of the two different interference fits allows the valve orifice insert to resist displacement from the orifice structure more strongly compared to a valve design that includes a plastic part sandwiched between two metal parts. The coplanarity of the planar valve seat surface and the surface of the orifice structure allows fine control of fluid flow through the orifice structure at relatively small command flow rates. The present disclosure may be applied to many valve designs for regulating fluid flow.
[0042] In some embodiments, the methods and processes described herein may be coupled to a computing system of one or more computing devices. In particular, such methods and processes may be implemented as computer application programs or services, application programming interfaces (APIs), libraries, and / or other computer program products.
[0043] 17 illustrates generally a non-limiting embodiment of a computing system 600 capable of performing one or more of the processes described above. The computing system 600 is illustrated in a simplified manner. The computing system 600 may embody the controller 138 described above and illustrated in FIG. 8. The computing system 600 may take the form of one or more personal computers, server computers, network computing devices, mobile computing devices, mobile communication devices (e.g., smartphones), and / or other computing devices, as well as custom circuit board assemblies.
[0044] Computing system 600 includes a logic processor 602, a volatile memory 604, and a non-volatile storage device 606. Computing system 600 may optionally include a display subsystem 608, an input subsystem 610, a communication subsystem 612, and / or other components not shown in FIG.
[0045] Logic processor 602 includes one or more physical devices configured to execute instructions. For example, logic processor may be configured to execute instructions that are part of one or more applications, programs, routines, libraries, objects, components, data structures, or other logical entities. Such instructions are implemented to perform a task, implement a data type, transform the state of one or more components, achieve a technical effect, or otherwise obtain a desired result.
[0046] A logical processor may include one or more physical processors (hardware) configured to execute software instructions. Additionally or alternatively, a logical processor may include one or more hardware logic circuits or firmware devices configured to execute hardware-implemented logic or firmware instructions. The processors of logical processor 602 may be single-core or multi-core, and the instructions executed thereon may be configured for sequential, parallel, and / or distributed processing. Individual components of the logical processor may optionally be distributed across two or more separate devices, which may be remotely located and / or configured for cooperative processing. Aspects of the logical processor may be virtualized and executed by remotely accessible networked computing devices configured in a cloud computing configuration. In such cases, it will be understood that these virtualized aspects may be executed on different physical logical processors of various different machines.
[0047] Non-volatile storage 606 includes one or more physical devices configured to hold instructions executable by a logical processor to perform the methods and processes described herein. When such methods and processes are performed, the state of non-volatile storage 606 may be transformed, for example, to hold different data.
[0048] The non-volatile storage device 606 may include removable and / or built-in physical devices. The non-volatile storage device 606 may include optical memory (e.g., CD, DVD, HD-DVD, Blu-Ray Disc, etc.), semiconductor memory (e.g., ROM, EPROM, EEPROM, FLASH memory, etc.), and / or magnetic memory (e.g., hard disk drive, floppy disk drive, tape drive, MRAM, etc.), or other mass storage device technologies. The non-volatile storage device 606 may include non-volatile, dynamic, static, read / write, read-only, sequential access, location addressable, file addressable, and / or content addressable devices. It will be appreciated that the non-volatile storage device 606 is configured to retain instructions even when power to the non-volatile storage device 606 is interrupted.
[0049] Volatile memory 604 may include physical devices including random access memory. Volatile memory 604 is typically utilized by logic processor 602 to temporarily store information during the processing of software instructions. It will be appreciated that if power to volatile memory 604 is disconnected, volatile memory 604 typically does not continue to store instructions.
[0050] The logical processor 602, the volatile memory 604, and the non-volatile storage 606 may be integrated into one or more hardware logic components, including, for example, a Field-Programmable Gate Array (FPGA), a Program- and Application-specific Integrated Circuit (PASIC / ASIC), a Program- and Application-specific Standard Products (PSSP / ASSP), a System-on-a-Chip (SOC), a Complex Programmable Logic Device (CPLD), and the like.
[0051] The terms "module," "program," and "engine" may be used to describe aspects of the computing system 600 that are typically implemented in software by the processor to perform a particular function using a portion of volatile memory, which function includes a transformation operation that specifically configures the processor to perform the function. In this manner, a module, program, or engine may be instantiated via the logical processor 602 that executes instructions held by the non-volatile storage 606 using a portion of the volatile memory 604. It will be understood that different modules, programs, and / or engines may be instantiated from the same application, service, code block, object, library, routine, API, function, etc. Similarly, the same module, program, and / or engine may be instantiated from different applications, services, code blocks, objects, routines, APIs, functions, etc. The terms "module," "program," and "engine" may encompass individual or groups of executable files, data files, libraries, drivers, scripts, database records, etc.
[0052] If included, the display subsystem 608 may be used to present a visual representation of the data held by the non-volatile storage device 606. The visual representation may take the form of a graphical user interface (GUI). As the methods and processes described herein modify the data held by the non-volatile storage device and thus transform the state of the non-volatile storage device, the state of the display subsystem 608 may likewise be transformed to visually represent the changes in the underlying data. The display subsystem 608 may include one or more display devices utilizing virtually any type of technology. Such display devices may be combined with the logic processor 602, the volatile memory 604, and / or the non-volatile storage device 606 in a shared enclosure, or such display devices may be peripheral display devices.
[0053] If included, input subsystem 610 may consist of or interface with one or more user input devices, such as a keyboard, mouse, touch screen, etc.
[0054] If included, the communications subsystem 612 may be configured to communicatively couple the various computing devices described herein with each other and with other devices. The communications subsystem 612 may include wired and / or wireless communication devices compatible with one or more different communications protocols. As a non-limiting example, the communications subsystem may be configured for communication over a wired or wireless local or wide area network, such as a wireless telephone network, or an HDMI over Wi-Fi connection. In some embodiments, the communications subsystem may enable the computing system 600 to send and / or receive messages to and from other devices over a network, such as the Internet.
[0055] It will be understood that the configurations and / or approaches described herein are exemplary in nature and that numerous variations are possible, and therefore the specific embodiments or examples are not to be considered in a limiting sense. The specific routines or methods described herein may represent one or more of any number of processing strategies. As such, the various acts shown and / or described may be performed in the order shown and / or described, in other orders, in parallel, or omitted. Similarly, the order of the processing described above may be changed.
[0056] The subject disclosure includes all novel and non-obvious combinations and subcombinations of the various features and techniques disclosed herein. The various features and techniques disclosed herein are not necessarily required for all embodiments of the subject disclosure. Moreover, the various features and techniques disclosed herein may define patentable subject matter apart from the disclosed embodiments and may find utility in other embodiments not expressly disclosed herein.
[0057] As used herein, "and / or" refers to a logical disjunction, and thus, it will be understood that A and / or B have the following truth table: JPEG2025510858000002.jpg41170
[0058] As used herein, terms such as "includes," "including," "has," "contains," and the like are intended to be inclusive, without excluding additional or other elements, similar to the open transition term "comprises."
Claims
1. a valve orifice insert sized to fit into a stepped opening in an orifice structure of a valve assembly, the valve orifice insert comprising: A plastic tubular body having a stepped wall including a first tubular portion and a second tubular portion having an outer diameter dimension smaller than that of the first tubular portion, the first tubular portion and the second tubular portion being joined by a stepped structure; at least one circumferential protrusion extending radially outward from an outer surface of the first tubular portion or an outer surface of the second tubular portion a predetermined distance to form an interference fit with the stepped opening when the valve orifice insert is fitted into the stepped opening.
2. 2. The valve orifice insert of claim 1, wherein the at least one circumferential protrusion is a first circumferential protrusion formed adjacent a second end of the plastic tubular body opposite the first end of the plastic tubular body and extending radially outward from the outer surface of the second tubular portion.
3. 2. The valve orifice insert of claim 1, further comprising a second circumferential projection formed adjacent a first end of said plastic tubular body and extending radially outward from an outer surface of said first tubular portion.
4. 4. The valve orifice insert of claim 3, wherein said second circumferential projection is formed as a ridge extending radially outwardly a predetermined distance from said outer surface of said first tubular portion.
5. the outer surface of the first tubular portion and the outer surface of the second tubular portion are cylindrical or conical and concentric; 4. The valve orifice insert of claim 3, wherein the inner surface of the first tubular portion and the inner surface of the second tubular portion are cylindrical or conical and concentric.
6. 2. The valve orifice insert of claim 1, wherein the interference fit has an interference distance of 1 / 10000-1 / 100 inch.
7. 2. The valve orifice insert of claim 1, further comprising a lip structure projecting axially from the first end of the first tubular portion, the lip structure including a flat valve seat surface formed at a distal end thereof.
8. 8. The valve orifice insert of claim 7, wherein the stepped opening further includes a tapered surface that gradually moves away from a second end of the valve orifice insert that is fitted into the stepped opening, and at least one circumferential protrusion contacts at least a portion of the tapered surface.
9. 9. The valve orifice insert of claim 8, wherein said tapered surface faces away from said stepped surface.
10. 10. The valve orifice insert of claim 1, comprising an engineered plastic.
11. 1. A method of manufacturing a valve assembly, comprising: forming a stepped opening in an orifice structure of the valve assembly; forming a valve orifice insert from a plastic material, the valve orifice insert having a tubular body with a stepped wall including a first tubular section and a second tubular section having an outer diameter dimension smaller than that of the first tubular section, the first tubular section and the second tubular section being joined by a stepped structure; inserting the valve orifice insert into the stepped opening such that, after insertion, at least one circumferential projection extends radially outward from an outer surface of the first tubular portion or an outer surface of the second tubular portion a predetermined distance to form an interference fit with the stepped opening; Simultaneously lapping a lip structure of the tubular plastic valve insert and a surface of the orifice structure of the valve assembly with a flat lapping tool; forming a valve sealing surface on the lip structure that is coplanar with the surface of the orifice structure of the valve assembly; The method of manufacturing a valve assembly, wherein the lip structure projects axially from a first end of the first tubular portion, the lip structure including a flat valve seat surface formed on a distal end thereof.
12. The manufacturing method according to claim 11 , wherein the valve orifice insert is stopped at a predetermined depth by the step structure.
13. 13. The method of claim 12, wherein the at least one circumferential protrusion includes a first circumferential protrusion formed adjacent a second end of the plastic tubular body opposite the first end of the plastic tubular body and extending radially outward from the outer surface of the second tubular body.
14. The method of claim 13 , wherein a valve orifice insert is formed to include a second circumferential projection extending radially outward from the outer surface of the first tubular portion adjacent the first end of the plastic tubular body.
15. the outer surface of the first tubular portion and the outer surface of the second tubular portion are cylindrical or conical and concentric; The method according to claim 13, wherein the inner surface of the first tubular portion and the inner surface of the second tubular portion are cylindrical or conical and concentric.
16. The method of claim 11, wherein the interference fit has an interference distance of 1 / 10000-1 / 100 inch.
17. 12. The method of claim 11, wherein the stepped opening further includes a tapered surface that tapers away from a second end of the tubular plastic valve insert that is fitted into the stepped opening, and the at least one circumferential projection contacts at least a portion of the tapered surface.
18. The method of claim 11 , wherein the tubular plastic valve insert is made of engineered plastic.
19. A flow path; a valve assembly disposed in the flow path to control a flow of fluid along the flow path, the valve including an inlet, an outlet, an orifice structure having a valve orifice insert disposed at an opening thereof in fluid communication with the inlet and the outlet, and a diaphragm coupled to an actuator, the actuator configured to move the diaphragm under command of a controller to selectively contact or separate the diaphragm from a flat valve seat surface to stop or allow fluid flow through the orifice structure at a commanded flow rate; 1. A fluid control device, wherein the valve orifice insert comprises a plastic tubular body having an outer surface, at least one circumferential projection extending radially outward from the outer surface to form an interference fit with a wall of the opening, and a lip structure including the flat valve seat surface formed at a distal end thereof that is coplanar with a surface of the orifice structure that supports a peripheral portion of the diaphragm.
20. The fluid flow control device of claim 19, wherein the commanded flow rate is a flow rate in the range of 0.05-1 sccm.