Reticle container having a rotating connector with a spring force latch - Patents.com

Abstract

The reticle container includes a rotating latch including a spring. The spring provides a force to urge the reticle container segments toward one another such that a reticle in the container is clamped between the container segments. The rotating latch may include a head as part of the assembly of one of the cover or base plate of the reticle container, with a slot configured to receive the head in the other of the cover or base plate. The head may be disposed on an end of a shaft, the shaft connected to a base, the base being contacted by the force provided by the spring such that contact between the head and the other of the cover or base plate provides a clamping force to a reticle stored between the cover and base plate.

Description

[Technical field]

[0001] SUMMARY The present disclosure is directed to containers for storing and / or transporting reticles, and in particular to containers that include rotating connectors that use a spring force to hold the connectors closed. [Background technology]

[0002] Reticles are typically transported, processed, and stored in a reticle container that includes an inner pod and an outer pod. The inner pod is configured for use during processing of the reticle, for example in photolithography, such as an extreme ultraviolet (EUV) process. Features of the inner pod that make the inner pod suitable for use in reticle processing, such as filters, formation of seals, and / or other features of the inner pod, may make the inner pod more complex and expensive, and less suitable for storing reticles. Summary of the Invention

[0003] SUMMARY The present disclosure is directed to containers for storing and / or transporting reticles, and in particular to containers that include rotating connectors that use a spring force to hold the connectors closed.

[0004] The reticle container can be secured by a rotating latch. The rotating latch can be driven by a spring force to pull segments of the reticle container toward each other and clamp the reticle located within the container. Reticles of various thicknesses can be secured within the container by using a spring force on the latch of the container to provide a force that clamps the reticle within the container. The rotating latch can secure the reticle container with reduced particle generation or keep any generated particles away from the reticle stored therein. Additionally, the rotating latch can be automatically actuated to secure the reticle within the reticle or reticle container without the need for human interaction.

[0005] In one embodiment, the reticle container includes a first container segment and a second container segment. The first container segment and the second container segment define an interior space configured to accommodate a reticle. The first container segment includes an opening extending through the first container segment and a retaining recess intersecting the opening on a side of the first container segment configured to face away from the second container segment when the reticle container is assembled. The second container segment includes a rotatable latch, the rotatable latch including a latch base, a shaft, and a head. The head is configured to pass through the opening when in a first orientation and engage with the retaining recess when in a second orientation. The rotatable latch is configured to be rotated between the first orientation and the second orientation.

[0006] In one embodiment, the reticle container further includes a spring configured to contact the second container segment and the rotatable latch, the spring actuating the rotatable latch such that the head is driven toward the second container segment.

[0007] In one embodiment, the latch base includes an actuation feature.

[0008] In one embodiment, the retention recess includes a sloped surface.

[0009] In one embodiment, the shaft includes a retaining ring groove and the rotatable latch includes a retaining ring, a portion of the retaining ring received in the retaining ring groove. In one embodiment, one or more retaining projections extend outwardly from the shaft. In one embodiment, the one or more retaining projections are part of a retaining pin, and the retaining pin is retained in a channel formed in the slot.

[0010] In one embodiment, the opening is a slot.In one embodiment, the head includes two protrusions on either side.

[0011] In one embodiment, a method of closing a reticle container includes passing a head of a rotatable latch through an opening provided on a first container segment and rotating the rotatable latch so that the head engages a retaining recess that intersects with the opening.

[0012] In one embodiment, rotating the rotatable latch includes engaging an actuation feature provided on a base of the rotatable latch with an actuator, the actuator rotating the rotatable latch through engagement with the actuation feature.

[0013] In one embodiment, the rotatable latch is included in the second container segment and the reticle is located between the first container segment and the second container segment.

[0014] In one embodiment, a spring in contact with the rotatable latch applies a force that drives the engagement of the head with the retention recess.

[0015] In one embodiment, a retaining ring is provided in a retaining ring groove formed in the shaft of the rotatable latch.

[0016] In one embodiment, the opening is a slot.

[0017] In one embodiment, the head includes two protrusions on either side. [Brief description of the drawings]

[0018] [Figure 1] 1 illustrates an exploded view of a reticle container and a reticle according to one embodiment. [Diagram 2] 1 illustrates a perspective view of a reticle container in closure according to one embodiment. [Diagram 3] 1 illustrates a cross-sectional view of a reticle container in closure according to one embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0019] SUMMARY The present disclosure is directed to containers for storing and / or transporting reticles, and in particular to containers that include rotating connectors that use a spring force to hold the connectors closed.

[0020] 1 shows an exploded view of a reticle container and a reticle according to one embodiment. Reticle container 100 includes a cover 102 and a base plate 104. Cover 102 includes a cover latch feature 106. Base plate 104 includes a base plate latch feature 108. A reticle 110 can be contained within reticle container 100 between cover 102 and base plate 104.

[0021] The reticle container 100 is a container configured to contain a reticle 110, such as a reticle for processing, such as photolithography, e.g., extreme ultraviolet (EUV) processing. The reticle container 100 can be used to transport and / or store the reticle 110. In one embodiment, the reticle container 100 is an EUV reticle container. In one embodiment, the reticle container 100 is a stocker pod for storing the reticle 110 before, during, or after processing. In one embodiment, the reticle container 100 is received at a load port of an EUV processing device and opened, and the reticle 110 can be added to or removed from the reticle container 100. The reticle container 100 contains the reticle 110 in an interior space within the reticle container 100. In one embodiment, the reticle container 100 clamps the reticle 110 to secure the reticle 110 in a particular position. In one embodiment, reticle container 100 forms a seal around the perimeter of reticle 110 when reticle container 100 is placed within reticle container 100. In one embodiment, reticle container 100 does not form a seal and includes a gap in at least some areas around the perimeter of reticle 110 when reticle container 100 is placed within reticle container 100.

[0022] The cover 102 forms a first container segment of the reticle container 100. The cover 102 forms a portion of an interior space that accommodates the reticle 110. The cover 102 includes one or more cover latch features 106. The cover latch features 106 form a portion of a latch configured to secure the cover 102 to the base plate 104. In one embodiment, the cover latch features 106 can include a slot and a retention area, such as slot 206 and retention area 208, as shown in FIG. 2 and described below. In one embodiment, the cover latch features 106 can include a latch mechanism having a protruding shaft and head, such as latch mechanism 210, shaft 212, and head 214, as shown in FIG. 2 and described below. The cover 102 can be latched to the base plate 104 to clamp the reticle 110 between the cover 102 and the base plate 104. In one embodiment, the latch may be such that the cover 102 and base plate 104 do not form a seal with one another and the perimeters of the cover 102 and base plate 104 are spaced apart from one another.

[0023] The base plate 104 forms a second container segment of the reticle container 100. When combined with the cover 102, the base plate 104 forms an interior space capable of housing a reticle 110. The base plate 104 includes one or more base plate latch features 108. The base plate latch features 108 are configured to interface with the cover latch features 106 to form a latch configured to at least partially secure the cover 102 to the base plate 104. In one embodiment, the base plate latch features 108 can include a slot and a retention area, such as slot 206 and retention area 208 as shown in FIG. 2 and described below. In one embodiment, the base plate latch features 108 can include a latch mechanism having a protruding shaft and head, such as latch mechanism 210, shaft 212, and head 214 as shown in FIG. 2 and described below.

[0024] 2 shows a perspective view of a reticle container in closure according to one embodiment. Reticle container 200 includes a cover 202 and a base plate 204. Cover 202 includes a slot 206 and a retention area 208 that intersects or surrounds slot 206. Base plate 204 includes a latch mechanism 210 that includes a shaft 212 and a head 214 that protrude from base plate 204 towards cover 202.

[0025] The cover 202 forms a portion of the reticle container 200. When combined with the base plate 204, the cover 202 defines a space configured to accommodate a reticle, such as the reticle 110 described above and shown in FIG. 1. The cover 202 includes a slot 206 and a retention area 208. The slot 206 is an opening through the thickness of the cover 202. The slot 206 is configured to allow the head 214 to pass therethrough when the head 214 is aligned with the slot 206 and to prevent the head 214 from passing therethrough when the head 214 is not aligned with the slot 206. The slot 206 can have any suitable shape, e.g., oval, cross, rectangular, etc., for selectively allowing passage of the head 214 based on the alignment. The slot 206 can be positioned to face the latch mechanism 210 when the cover 202 and the base plate 204 are joined. The slots 206 can be located in a peripheral region of the cover 202 such that the interface of the slots 206 with the latching mechanisms 210 is outside of the region of the reticle container 200 configured to receive a reticle. The cover 202 can include additional slots 206, including, for example, a slot 206 for each of the latching mechanisms provided on the base plate 204. The retention area 208 can intersect or surround the slots 206. The retention area 208 is on a side of the cover 202 that faces away from the base plate 204 when the reticle container 200 is assembled. The retention area 208 can include a recess configured to receive the head 214 when a portion of the head 214 and shaft 212 pass through the slot 206 and are rotated such that the head 214 is out of alignment with the slot 206. The retention area 208 can include an angled portion configured to limit rotation of the head 214 such that the head 214 cannot move into alignment with the slot 206 unless explicitly manipulated to effect such alignment.

[0026] The base plate 204 forms another portion of the reticle container 200. The base plate 204 is configured to define an interior space capable of receiving a reticle when mated with the cover 202. In the embodiment shown in FIG. 2, the base plate 204 includes a latching mechanism 210. The latching mechanism 210 provides a shaft 212 extending outwardly from the base plate 204 on a side of the base plate 204 configured to face the cover 202 when the reticle container 200 is assembled. The head 214 is disposed at the end of the shaft 212. The head 214 is configured to be able to pass through the slot 206 when in a first orientation and unable to pass through the slot 206 when in the other orientation. The head 214 may be configured to be held by contact with the retention area 208 such that the head 214 is in a position where it cannot pass through the slot 206. The head 214 may have any suitable shape, such as, for example, an oval, a cross, a rectangle, etc., depending on the shape of the slot 206.

[0027] 2 provides the slot 206 and retention area 208 on the cover 202 and the latch mechanism 210 on the base plate 204, in embodiments, the slot 206 and retention area 208 can instead be located on the base plate 204 and the latch mechanism 210 can be located on the cover 202. In such embodiments, the slot 206 extends through the base plate 204 and the retention area is on a side of the base plate 204 opposite the side that faces the cover 202 when the reticle container 200 is assembled. Also, in such embodiments, the shaft 212 and head 214 extend outwardly from the cover 202 on a side of the cover 202 that faces the base plate 204 when the reticle container 200 is assembled.

[0028] Figure 3 shows a cross-sectional view of a reticle container in closure according to the embodiment shown in Figure 2. As seen in Figure 3, the latch mechanism 210 includes a base 216. The base 216 includes an actuation feature 218. The latch mechanism 210 includes a latch retainer body 220. A spring 222 is disposed within the latch retainer body 220 and contacts the base 216.

[0029] The base 216 is joined to the shaft 212. The base 216 includes an actuation feature 218. The actuation feature 218 can be any suitable feature that allows the base 216 to be engaged with and rotated by a user or an automated system. In the embodiment shown in FIG. 3, the actuation feature is a recess formed in a side of the base 216 that faces outward from the latch mechanism 216. In an embodiment, the actuation feature 218 can be a protrusion. The actuation feature 218 can have any suitable shape that can allow the base 216 to rotate about the axis of the shaft 212 upon engagement with the actuation feature. Non-limiting examples of shapes of the actuation feature can be a protrusion or recess having a cross-sectional profile such as an oval, star, square, etc.

[0030] The latch retainer body 220 is a portion of a cover or base plate of a reticle container configured to receive the base 216 and a portion of the shaft 212 such that the base 216 can rotate about the axis of the shaft 212. The latch retainer body 220 includes an opening 224 and a bore 226. The base 216 can move axially within the bore 226. The opening 224 allows the shaft 212 to extend from the latch retainer body 220. The spring 222 can be received within the bore 226. The spring 222 is configured to contact the base 216 opposite the actuation feature 218. The spring can also contact the latch retainer body 220 in an area where the latch retainer body 220 surrounds the opening 224. The spring provides a spring force that urges the base 216 away from the opening 224. The force applied by the spring 220 can drive the base 216 when the head 214 is engaged with the holding area 208 such that the cover 202 and the base plate 204 are driven toward each other, thus clamping the reticle within the reticle container 200.

[0031] In one embodiment, the base 216 is joined to the shaft 212 by a mechanical connection such as threading the shaft 212 into an opening in the base 216, or any other suitable mechanical connection such as an interface of connection features, a snap fit using suitable features, a press fit, etc. In one embodiment, the shaft 212 is integrally formed with the base 216. In one embodiment where the shaft is integrally formed with the base 216, the shaft 212 and head 214 can be mechanically joined, for example, after threading the shaft 212 through the opening 224 in the latch retaining body 220. In one embodiment, the base 216, the shaft 212, and the head 214 can all be formed as one piece. In this embodiment, the opening 224 can be shaped such that the head 214 can pass through the opening 224 when in a particular orientation. The opening 224 can be positioned such that it is not aligned with the slot 206.

[0032] In one embodiment, retention can be provided along the shaft 212 such that passage of the opening 224 cannot occur beyond a certain point. In one embodiment, the retention feature 228 can include a retaining ring 230 and a retaining groove 232 configured to receive the retaining ring 230. In other embodiments, the retention feature 228 can alternatively include a pin that passes through the opening, or any other suitable mechanism that provides mechanical interference between the shaft 212 and the opening 224. In one embodiment, the retention feature 228 can be integrally formed within the shaft 212. In one embodiment, the retention feature 228 can include one or more additional components, such as the retaining ring 230, the pins described above, or any other suitable additional components. The additional components can be joined to the shaft 212 by a mechanical connection, such as, for example, a snap fit or a press fit.

[0033] Aspects:

[0034] It is understood that any of the embodiments 1-9 can be combined with any of the embodiments 10-16.

[0035] Aspect 1. A reticle container comprising: a first container segment; a second container segment; the first container segment and the second container segment define an interior space configured to accommodate a reticle; the first container segment includes an opening extending through the first container segment and a retention recess intersecting the opening on a side of the first container segment configured to face away from the second container segment when the reticle container is assembled; A reticle container, wherein the second container segment includes a rotatable latch, the rotatable latch includes a latch base, a shaft, and a head, the head configured to pass through the opening when in a first orientation and engage with the retaining recess when in a second orientation, the rotatable latch configured to be rotated between the first orientation and the second orientation.

[0036] Aspect 2. The reticle container of claim 1, further comprising a spring configured to contact the second container segment and the rotatable latch, the spring actuating the rotatable latch such that the head is driven toward the second container segment.

[0037] Aspect 3. The reticle container of aspect 1 or 2, wherein the latch base includes an actuation feature.

[0038] Aspect 4. The reticle container of aspect 1 or 2, wherein the retention recess includes an inclined surface.

[0039] Embodiment 5. A reticle container according to any one of embodiments 1-4, wherein the shaft includes a retaining ring groove, the rotatable latch includes a retaining ring, and a portion of the retaining ring is received in the retaining ring groove.

[0040] Embodiment 6. A reticle container according to any one of embodiments 1-5, wherein the one or more retention protrusions extend outwardly from the shaft.

[0041] Embodiment 7. A reticle container as described in embodiment 6, wherein the one or more retention protrusions are part of a retention pin, and the retention pin is retained within a channel formed in the slot.

[0042] Embodiment 8. The reticle container of any one of embodiments 1-7, wherein the opening is a slot.

[0043] Embodiment 9. The reticle container of embodiment 8, wherein the head includes two protrusions on either side.

[0044] Aspect 10. A method of closing a reticle container comprising: passing a head of a rotatable latch through an opening in a first container segment; and rotating the rotatable latch so that the head engages with a retaining recess that intersects with the opening.

[0045] Aspect 11. The method of aspect 10, wherein rotating the rotatable latch includes engaging an actuation feature provided on a base of the rotatable latch with an actuator, the actuator rotating the rotatable latch through engagement with the actuation feature.

[0046] Aspect 12. The method of aspect 10 or 11, wherein the rotatable latch is included in the second container segment, and the reticle is located between the first container segment and the second container segment.

[0047] Embodiment 13. The method of any one of embodiments 10-12, wherein a spring contacting the rotatable latch exerts a force that drives engagement between the head and the retaining recess.

[0048] Example 14. The method of any one of Examples 10-13, wherein the retaining ring is disposed within a retaining ring groove formed in a shaft of the rotatable latch.

[0049] Embodiment 15. The method of any one of embodiments 10-14, wherein the opening is a slot.

[0050] Embodiment 16. The method of any one of embodiments 10 to 15, wherein the head includes two protrusions on either side.

[0051] The examples disclosed in this application should be considered in all respects as illustrative and not restrictive. The scope of the invention is indicated by the appended claims, rather than by the foregoing description, and all changes that come within the meaning and range of equivalency of the claims are intended to be embraced therein.

Claims

1. 1. A reticle container comprising: a first container segment; a second container segment; the first container segment and the second container segment define an interior space configured to receive a reticle; the first container segment includes an opening extending through the first container segment and a retention recess intersecting the opening on a side of the first container segment configured to face away from the second container segment when the reticle container is assembled; A reticle container, wherein the second container segment includes a rotatable latch, the rotatable latch including a latch base, a shaft, and a head, the head configured to pass through the opening when in a first orientation and engage with the retention recess when in a second orientation, the rotatable latch configured to be rotated between the first orientation and the second orientation.

2. 10. The reticle container of claim 1, further comprising a spring configured to contact the second container segment and the rotatable latch, the spring urging the rotatable latch such that the head is driven toward the second container segment.

3. The reticle container of claim 1 , wherein the latch base includes an actuation feature.

4. The reticle container of claim 1 , wherein the retention recess includes an inclined surface.

5. 10. The reticle container of claim 1, wherein the shaft includes a retaining ring groove, the rotatable latch includes a retaining ring, a portion of the retaining ring received in the retaining ring groove.

6. The reticle container of claim 1 , wherein one or more retention protrusions extend outwardly from the shaft.

7. The reticle container of claim 6 , wherein the one or more retention protrusions are part of a retention pin, the retention pin being retained in a channel formed in a slot.

8. The reticle container of claim 1 , wherein the opening is a slot.

9. The reticle container of claim 8 , wherein the head includes two protrusions on opposite sides.

10. A method for closing a reticle container, comprising: passing a head of a rotatable latch through an opening in a first container segment; and rotating the rotatable latch so that the head engages with a retaining recess that intersects with the opening.

11. 11. The method of claim 10, wherein rotating the rotatable latch includes engaging an actuation feature on a base of the rotatable latch with an actuator, the actuator rotating the rotatable latch through the engagement with the actuation feature.

12. The method of claim 10 , wherein the rotatable latch is included in a second container segment, and a reticle is located between the first container segment and the second container segment.

13. The method of claim 10 , wherein a spring contacting the rotatable latch applies a force driving engagement between the head and the retention recess.

14. The method of claim 10 , wherein a retaining ring is provided in a retaining ring groove formed in a shaft of the rotatable latch.

15. The method of claim 10 , wherein the opening is a slot.

16. The method of claim 10 , wherein the head includes two protrusions on either side.

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