A transducer mounting body for a probe of an acoustic microscope, particularly an ultrasonic scanning microscope, which includes at least one transducer and one lens, and an acoustic microscope, particularly an ultrasonic scanning microscope

Abstract

The present invention relates in particular to a transducer mount (10) for a probe (20) having at least one transducer (21) and one lens (22) of an acoustic microscope, in particular an ultrasonic scanning microscope, the transducer mount (10) having a receiving space (18) for receiving the probe (20), a supply line (14) for supplying a liquid coupling medium, in particular water, being fluidly connected to the receiving space (18), the receiving space (18) comprising an outlet opening (38) facing the sample (40) to be inspected for discharging the liquid coupling medium from the receiving space (18), and a suction chamber (32) to which a negative pressure is applied or can be applied being provided outside the receiving space (18) and laterally of the outlet opening (38) of the receiving space for sucking the coupling medium discharged from the outlet opening (38).

Description

Technical Field

[0001] The present invention relates to a transducer mounting body for a probe provided with at least one transducer and one lens in an acoustic microscope, particularly an ultrasonic scanning microscope, and to an acoustic microscope, particularly an ultrasonic scanning microscope. Furthermore, the present invention relates to the use or arrangement of the transducer mounting body and to a method of operating an acoustic microscope, particularly an ultrasonic scanning microscope.

Background Art

[0002] An ultrasonic microscope or acoustic microscope, also called a scanning acoustic microscope (SAM), is used to scan a sample with ultrasonic waves in a scanning manner and process the reflected sound waves to generate an image of the structure of the sample.

[0003] An ultrasonic microscope includes an ultrasonic head, also called a probe or transducer head. Thus, the ultrasonic head includes an acoustic lens and an acoustic transducer (transducer) connected thereto.

[0004] In the case of inspection by an acoustic microscope, water is used as a coupling medium between the acoustic transducer and the sample to be inspected in order to transmit the sound waves emitted by the transducer well to the sample. For this purpose, a coupling medium having good properties suitable for sound wave conduction is required.

[0005] In an ultrasonic microscope operating in a frequency band from 1 MHz to 5 GHz, it is common to immerse the sample in a water bath and place it on a sample holder, and the inspection of the sample is performed by the immersion method using an ultrasonic microscope. In other methods, a water flow formed between the acoustic transducer and the sample is used to ensure good acoustic coupling to the sample.

[0006] One object of the present invention is to ensure that in an acoustic microscope, the sample to be inspected comes into contact with the coupling medium only locally and for the shortest possible time, and to provide a stable local coupling medium cushion, in particular a water cushion, free of air bubbles, between the acoustic transducer and the sample. Another object is to simplify the modification of existing acoustic scanning microscopes for acoustic microscopes.

Summary of the Invention

[0007] This object is achieved by a transducer mount for a probe having at least one transducer and one lens, in particular a transducer head mount, for an acoustic microscope, in particular an ultrasonic scanning microscope, having a receiving space for receiving the probe, a supply line for a liquid coupling medium, in particular water, being fluidly connected to this receiving space, the receiving space having a circular outlet opening, in particular, facing the sample to be inspected for discharging the liquid coupling medium from the receiving space, and a suction chamber being provided outside the receiving space and laterally of the outlet opening of the receiving space, either under negative pressure or capable of having negative pressure applied thereto, for sucking the coupling medium escaping from the outlet opening.

[0008] The present invention is based on the idea that by providing a transducer mount for a probe in an acoustic microscope, in particular an ultrasonic scanning microscope, a local water cushion is provided between the outlet opening of the receiving space and the surface of the sample to be inspected, and a good coupling of ultrasonic waves is allowed by a local water cushion of water as the coupling medium between the transducer mount, in particular outside the outlet opening, and the surface of the sample with respect to the transducer. Thereby, the peripheral region outside the cushion of the coupling medium remains in a dry state or is dried again after scanning. Preferably, in the case of the operation of the acoustic microscope, the sample is scanned smoothly and non - contact, for example, at a maximum speed of 2 m / s and a maximum acceleration of 50 m / s2.

[0009] According to the present invention, when the coupling medium flows out from the outlet opening of the receiving space, an internal region is formed by the transducer attachment body, and in this internal region, a local cushion of the coupling medium is formed between the receiving space and the surface of the sample. By using negative pressure, the excess coupling medium is sucked from the surface of the sample through the suction chamber to the external region.

[0010] When the transducer attachment body according to the present invention is used in an acoustic microscope, only a part of the sample surface is sometimes, that is, temporarily and locally wetted by the coupling medium, and the other regions of the sample surface that have not been inspected are dry without being wetted. Therefore, it is easy to inspect samples sensitive to water. Since the contact time of the coupling medium contacting the sample surface by the transducer attachment body is short, for example, oxidation of the metal sample surface can be prevented. Preferably, pure water is used as the coupling medium.

[0011] Furthermore, another advantage of the transducer attachment body is that the acoustic microscope configured therein can operate regardless of the position. That is, the sample is oriented in both the horizontal and vertical directions, and the sample oriented in the horizontal direction can be inspected from both the lower and upper sides.

[0012] By forming the receiving space and the outlet opening facing the sample to be inspected, a coupling medium exists or can exist between the transducer attachment body and the sample. Thereby, between the probe transducer and the region of the sample to be inspected, especially outside the receiving space and / or outside the outlet opening, a coupling medium is formed or can be formed as a kind of cushion. By using and forming the suction chamber arranged laterally at the outlet opening of the receiving space, the existing coupling medium outside the ultrasonic region is removed again by suction, thereby keeping the contact time between the coupling medium and the surface of the sample to be inspected short.

[0013] Furthermore, another advantage of the present invention is that in order to improve the implementation of an existing acoustic microscope, an existing acoustic microscope, especially a probe for a scanning ultrasonic microscope, can be easily retrofitted by the transducer attachment body according to the present invention.

[0014] In particular, by forming a suction chamber in a transducer attachment body formed as a transducer head attachment body or a probe attachment body, the coupling medium between the transducer attachment body, preferably outside the inspection area of the transducer, can be evacuated or is evacuated.

[0015] When the probe is arranged in the receiving space, the outlet opening of the receiving space is formed on the side opposite the acoustic lens of the probe or on the side opposite the distal end of the probe. Thus, the outlet opening is formed centrally or centered on the outlet opening side of the receiving space. Preferably, the outlet opening is formed on the lower or upper side of the receiving space. Furthermore, in particular the area of the circular outlet opening is preferably smaller than the cross-section of the receiving space, and the outlet opening is formed to limit the flow in case the coupling medium leaks from the receiving space.

[0016] Furthermore, a further development of the transducer attachment body is characterized in that the suction chamber at least partially surrounds the outlet opening of the receiving space in an annular or preferably annular manner, preferably in the region on the outlet side of the receiving space. Thereby, the partially annular or annular suction chamber enables the effective removal of a larger outer region of the coupling medium cushion between the receiving space or the outlet opening of the transducer attachment body and the surface of the sample to be inspected from the sample surface.

[0017] With the transducer attachment body according to the invention, it is possible to continuously supply the flow of the coupling medium from the receiving space of the transducer attachment body to the surface of the sample to be inspected and to continuously remove the coupling medium outside the inspection area of the transducer. Preferably, an air bubble-free cushion or a cushion without air bubbles is provided under the lens of the acoustic transducer.

[0018] Furthermore, one embodiment of the transducer attachment body is characterized in that the suction chamber is fluidly connected to at least one discharge line for discharging the coupling medium from the suction chamber. A negative pressure is supplied to the suction chamber in order to remove the coupling medium escaping from the outlet opening from the inspection area through the discharge line.

[0019] Preferably, in a further development, two or more discharge lines are fluidly connected to the suction chamber, and the two or more discharge lines are fluidly connected to the overall discharge line. Thereby, the discharge lines connected to the suction chamber are opened into the overall supply line in order to divert the coupling medium evacuated from the probe through the overall discharge line.

[0020] Thereby, in other embodiments, two discharge lines are provided for the suction chamber, the suction chamber comprises two suction chamber openings, each suction chamber opening is connected to a respective discharge line, and in particular the suction chamber openings are arranged opposite each other. By providing two discharge lines in the suction chamber, the coupling medium is efficiently guided away from the probe simultaneously at multiple locations.

[0021] Furthermore, in one configuration of the transducer attachment, it is advantageous if a bubble collection region for gas bubbles, in particular an air bubble collection region for air bubbles, is formed inside the receiving space. This bubble collection region prevents bubbles from entering the region between the transducer and the surface of the sample to be inspected, thus not affecting the inspection and improving the quality of the inspection by the acoustic microscope. Preferably, the bubble collection region captures and collects air bubbles or bubbles within the receiving space, thereby preventing the bubbles from being conveyed through the outlet opening of the receiving space.

[0022] For this purpose, according to another aspect, it is advantageously provided that the bubble collection region comprises a collection flow path, in particular the collection flow path is at least partially circumferential and / or is formed at least partially annular or annular inside the receiving space.

[0023] Preferably, according to a further development, the bubble collection region or the collection flow path is formed on the side opposite to the outlet opening of the receiving space.

[0024] Furthermore, in the case of the transducer attachment, it is preferable that the bubble collection region or the collection flow path is fluidly connected by the discharge line, in particular the overall discharge line, and the bypass line. Thereby, the minute bubbles collected in the bubble collection region or the collection flow path can be preferably continuously removed from the receiving space.

[0025] Furthermore, one configuration of the transducer attachment is characterized in that the receiving space is provided with an inlet for introducing the probe into the receiving space, and the inlet is formed opposite to the outlet opening. Thereby, it becomes possible to arrange the probe and the transducer within the receiving space of the transducer attachment. Thereby, it becomes possible to realize different operating distances of the transducer with respect to the sample. For example, the transducer attachment is displaced along the side surface of the probe and positioned accordingly. Thereby, the attachment can be appropriately fixed to the probe.

[0026] Furthermore, in another advantageous development of the transducer attachment, the inlet is formed with a sealing body, in particular a sealing ring, and / or the inlet is provided with a preferably circumferential recess for the sealing body, in particular the sealing ring, and in particular the sealing body, in particular the sealing ring, is arranged within the recess.

[0027] Furthermore, in the case of the transducer attachment, it is preferable that a rib structure or at least one flow path or flow path structure is formed on the inner side of the inner wall of the receiving space of the receiving space. When the probe is arranged in the receiving space, the flowing coupling medium can be guided from the supply pipe through the rib structure or at least one flow path or through the flow path structure, preferably to the outlet opening of the receiving space formed between the inner wall of the receiving space and the side surface of the cylindrical probe.

[0028] Preferably, the transducer attachment is formed as an adapter.

[0029] Furthermore, in one configuration, the transducer mount is made of plastic. For this reason, plastics that do not release heteroatoms into the coupling medium or release an extremely small amount thereof are preferably used. In particular, plastic materials suitable for 3D printing are employed. Furthermore, in a preferred embodiment, plastics with high dimensional stability and / or long-term resistant plastics are also employed.

[0030] Preferably, according to one embodiment, the transducer mount is formed with a preferably wirelessly readable identification device, in particular an RFID chip or a barcode or an EEPROM. By doing so, it becomes possible to detect a clearly detectable, preferably automatically evaluable feature of the transducer mount by a corresponding detection device, thereby improving the handling of the transducer mount.

[0031] Furthermore, the embodiment of the transducer mount is characterized in that the supply line for the coupling medium comprises a line connector connector, and the discharge line or the overall discharge line for the coupling medium comprises a line connector connector, and the connector connector of the supply pipe and the connector connector of the discharge line or the overall discharge line are formed differently. For example, the connector connector of the supply line and the connector connector of the discharge line or the overall discharge line have different shapes, whereby the lines connected to the respective connector connectors are clearly connected to the respective connector connectors.

[0032] Furthermore, the object of the present invention is solved by an acoustic microscope comprising a probe having at least one transducer and one lens, in particular an ultrasonic scanning microscope, and the above-described transducer mount is arranged on the probe. To avoid repetition, it is explicitly referred to in the previous description.

[0033] According to a further development of the acoustic microscope, it is advantageous if the supply line is connected to a coupling medium container for the liquid coupling medium, in particular if a pump connected to the coupling medium container is provided in the supply line and / or if the discharge line, in particular the overall discharge line, is connected to a negative pressure source.

[0034] Furthermore, an embodiment of the acoustic microscope is characterized in that the probe preferably comprises exclusively one transducer and one lens, or the probe comprises a plurality of transducers and a plurality of lenses for each transducer. In the context of the present invention, the probe introduced or introduced and arranged in the receiving space of the transducer holder comprises a single transducer having a (single) lens for focusing (ultra) sound waves. In an alternative configuration, the probe is formed in particular by an array or by an arrangement of a plurality of transducers and lenses for each transducer. For example, in the case of an array, the transducers are arranged linearly adjacent to each other. In the context of this invention, other arrangements of transducers and lenses are possible and feasible in the case of the probe.

[0035] Furthermore, the object of the present invention is solved, in particular as described above, by the use or arrangement of a transducer holder in a probe of an acoustic microscope, in particular an ultrasonic scanning microscope, the transducer holder being formed as described above. For this purpose, express reference is made to the previous description.

[0036] A further result of this object is obtained from the method of operation of an acoustic microscope, in particular an ultrasonic scanning microscope, the acoustic microscope being formed with a probe having at least one transducer and one lens, and the transducer holder according to the present invention being arranged as described above. To avoid repetition, express reference is made to the above description.

[0037] Other features of the present invention will become apparent from the description of the embodiments according to the present invention, together with the claims and the accompanying drawings. Embodiments according to the present invention can meet individual features or combinations of a plurality of features.

[0038] In the present invention, features specified as "in particular" or "preferably" should be understood as optional features. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Hereinafter, without limiting the general inventive concept based on exemplary embodiments with reference to the drawings, any details regarding the invention not further described in the text are explicitly referred to in the drawings.

Figure 1

Figure 2

Figure 3

Mode for Carrying Out the Invention

[0040] In the drawings, the same or similar members and / or components are given the same reference numerals, and corresponding repeated descriptions are omitted respectively.

[0041] FIG. 1 is a schematic view of a transducer attachment 10 according to the present invention. FIGS. 2 and 3 are a longitudinal sectional view and a plan view of the transducer attachment 10, respectively. The transducer attachment 10 is made of plastic and is preferably integral.

[0042] The transducer attachment 10 includes a main body 12 having a receiving space 18 inside. The receiving space 18 is fluidly connected to a supply unit 140 including a supply line 14 for supplying a coupling medium such as water to the receiving space 18 of the main body 12. Further, the main body includes a discharge unit 16 for discharging the coupling medium from the suction chamber 32 of the main body 12 (see FIG. 2).

[0043] For further details of the transducer attachment 10, refer to the longitudinal sectional view of FIG. 2. Inside, the main body 12 includes a receiving space 18 fluidly connected to the supply unit 140. A coupling medium container (not shown here) is provided in the supply line 14 of the supply unit 140 itself for supplying a liquid coupling medium such as water to the receiving space 18.

[0044] In the longitudinal sectional view of FIG. 2, a probe 20 of an acoustic microscope, particularly an ultrasonic scanning microscope, is introduced into the receiving space 18 through an inlet 24 of the main body 12. The probe 20 includes an acoustic transducer or transducer 21 for generating sound waves, and a lens 22 for converging the sound waves is disposed at the front end of the probe 20. The probe 20 having the transducer 21 and the lens 22 is a part of an acoustic scanning microscope (not shown here), particularly an ultrasonic scanning microscope.

[0045] In the upper region of the inlet 24, a circumferential recess 26 is formed, and a sealing ring 28 for sealing the receiving space 18 against the side surface of the probe 20 when the probe 20 is disposed in the receiving space 18 is accommodated in the recess 26.

[0046] When the coupling medium flows into the receiving space 18 through the supply unit 140, the coupling medium, particularly water, is guided in the direction of the outlet opening 38 through a flow path formed between the outer surface of the probe and the inner wall of the receiving space so as to be led through the outlet opening 38 in the direction of the surface 42 of the sample 40 to be inspected, particularly guided to the lower side and / or circumferentially of the receiving space 18.

[0047] Due to the spacing of the transducer mounting body 10 with respect to the sample 40 to be inspected, a coupling medium cushion 50 is formed between the outlet opening 38 and the surface 42 of the sample 40, and sound waves are well coupled to the sample 40 to be inspected during the operation of the transducer 21.

[0048] The outlet opening 38 is surrounded in the lateral direction by the suction chamber 32. By applying a negative pressure to the suction chamber 32, the outer region of the coupling medium cushion 50 is removed from the inspection region between the transducer 21 and the surface 42 of the sample 40. For this purpose, the suction chamber 32 is fluidly connected via two opposing openings (see FIG. 3) to two discharge lines 34.1, 34.2 that merge into the overall discharge line 34. When a negative pressure is applied to the overall discharge line 34, the discharge lines 34.1, 34.2 that are fluidly connected thereto continue to maintain a fluid connection with the suction chamber 32. The suction chamber 32 as well as the discharge lines 34.1, 34.2 and the overall discharge line 34 are part of the discharge unit 16 for discharging the suctioned or evacuated coupling medium.

[0049] Furthermore, the receiving space 18 comprises a collecting channel 30 for collecting bubbles, for example, bubbles contained as microbubbles in the coupling medium, in the region of the seal ring 28 within the receiving space 18. The collecting channel 30 is further fluidly connected to the overall discharge line 34 via a bypass line 36. When a negative pressure is applied to the overall discharge line 34, air bubbles or bubbles are removed from the collecting channel 30 through the bypass line 36.

[0050] All features cited, including those that can be read off alone from the drawings, as well as the individual features disclosed in combination with other features, are considered to be essential both individually and in combination. The embodiments according to the present specification may be realized by individual features or combinations of a plurality of features.

Explanation of Reference Numerals

[0051] 10 Transducer mounting body 12 Main body 14 Supply line 16 Discharge unit 18 Receiving space 20 Probe 21 Transducer 22 Lens 24 Inlet 26 Recess 28 Seal ring 30 Collection Flow Path 32 Suction Chamber 34 Overall Discharge Line 34.1, 34.2 Discharge Lines 36 Bypass Line 38 Outlet Opening 40 Sample 42 Surface 50 Bonding Medium Cushion 140 Supply Unit

Claims

Claim 1 A transducer mount (10) for a probe (20) having an acoustic microscope, in particular at least one transducer (21) and one lens (22) for an ultrasonic scanning microscope, the transducer mount (10) having a receiving space (18) for receiving the probe (20), a supply line (14) for supplying a liquid coupling medium, in particular water, being fluidly connected to the receiving space (18), the receiving space (18) being provided with an outlet opening (38) facing a sample (40) to be inspected for the discharge of the liquid coupling medium from the receiving space (18), and a suction chamber (32) to which a negative pressure is applied or can be applied being provided outside the receiving space (18) and laterally of the outlet opening (38) of the receiving space for sucking the coupling medium escaping from the outlet opening (38). Claim 2 The transducer mount (10) according to claim 1, wherein the suction chamber (32) at least partially surrounds or surrounds the outlet opening (38), preferably in a region on the outlet side of the receiving space (18). Claim 3 The transducer mount (10) according to claim 1 or claim 2, wherein the suction chamber (32) is fluidly connected to at least one discharge line (34, 34.1, 34.2) for discharging the coupling medium from the suction chamber (32). Claim 4 The transducer mount (10) according to claim 3, wherein two or more discharge lines (34, 34.1, 34.2) are fluidly connected to the suction chamber (32), and the two or more discharge lines (34.1, 34.2) are fluidly connected to an overall discharge line (34). Claim 5 The transducer mount (10) according to claim 4, wherein two discharge lines are provided for the suction chamber (32), the suction chamber (32) having two suction chamber openings, each suction chamber opening being connected to a respective discharge line (34, 34.1, 34.2), in particular the suction chamber openings being arranged opposite each other. Claim 6 The transducer mount (10) according to any one of claims 1 to 5, wherein a bubble collection region (28), in particular an air bubble collection region, for bubbles, in particular air bubbles, contained in the coupling medium is formed inside the receiving space (18). Claim 7 The bubble collection region (28) comprises a collection flow path, in particular the collection flow path is formed at least partially circumferentially and / or at least partially annularly or annularly inside the receiving space (18), the transducer mounting body (10) according to claim 6.

8. The transducer mounting body (10) according to claim 6 or claim 7, wherein the bubble collection region (28) or the collection flow path is formed on the opposite side of the outlet opening (38) of the receiving region.

9. The transducer mounting body (10) according to any one of claims 6 to 8, wherein the bubble collection region (28) or the collection flow path is fluidly connected to the discharge line (34, 34.1, 34.2), in particular to the overall discharge line (34, 34.1, 34.2), by a bypass line.

10. The transducer mounting body (10) according to any one of claims 1 to 9, wherein the receiving space (18) comprises an inlet for introducing a probe (20) into the receiving space (18), and the inlet is formed opposite to the outlet opening (38).

11. The transducer mounting body (10) according to claim 10, wherein the inlet is formed with a sealing body, in particular a sealing ring, and / or the inlet comprises a preferably circumferential recess for the sealing body, in particular the sealing ring, and in particular the sealing body, in particular the sealing ring, is arranged in the recess.

12. The transducer mounting body (10) according to any one of claims 1 to 11, wherein a rib structure or at least a flow path or a flow path structure is formed inside the receiving space (18) on the inner wall of the receiving space (18).

13. The transducer mounting body (10) according to any one of claims 1 to 12, wherein the transducer mounting body (10) is formed as an adapter.

14. The transducer mounting body (10) according to any one of claims 1 to 13, wherein the transducer mounting body (10) is made of plastic.

15. The transducer mounting body (10) according to any one of claims 1 to 14, wherein the transducer mounting body (10) is preferably formed with an identification device readable wirelessly, in particular an RFID chip, a barcode, or an EEPROM.

16. The supply line (14) for the coupling medium is provided with a connector assembly for the line, and the discharge line (34, 34.1, 34.2) for the coupling medium or the overall discharge line (34, 34.1, 34.2) is provided with a connector assembly for the line, and the connector assembly of the supply line and the connector assembly of the discharge line (34, 34.1, 34.2) or the overall discharge line (34, 34.1, 34.2) are formed differently. The transducer mounting body (10) according to any one of claims 1 to 15.

17. An acoustic microscope, in particular an ultrasonic scanning microscope, having a probe (20) having at least one transducer (21) and one lens (22), wherein the transducer mounting body (10) according to any one of claims 1 to 16 is arranged on the probe (20).

18. The supply line (14) is connected to a coupling medium container for the liquid coupling medium. In particular, a pump connected to the coupling medium container is provided in the supply line (14), and / or the discharge line (34, 34.1, 34.2), in particular the overall discharge line (34, 34.1, 34.2), is connected to a negative pressure source. The acoustic microscope according to claim 17.

19. The probe (20) preferably comprises exclusively one transducer (21) and one lens (22), or the probe (20) comprises a plurality of transducers (21) and a plurality of lenses (22) for each transducer (21). The acoustic microscope according to claim 17 or claim 18.

20. Use or arrangement of the transducer mounting body (10) in a probe (20) of an acoustic microscope, in particular an ultrasonic scanning microscope, wherein the transducer mounting body (10) is formed according to any one of claims 1 to 16, in particular according to any one of claims 17 to 19.

21. A method of operating an acoustic microscope, in particular an ultrasonic scanning microscope, wherein the acoustic microscope is formed with a probe (20) having at least one transducer (21) and one lens (22), and on the probe (20) A method of operating an acoustic microscope, wherein the transducer mounting body (10) according to any one of claims 1 to 16 is arranged.

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