Particle measurement device

Abstract

A particle measurement device is disclosed. The particle measurement device of the present invention includes a mount unit for fixing a flow cell, and a resonance unit disposed behind the mount unit to form a resonance space that is open front and back. The resonance unit can include a case disposed behind the mount unit to form the resonance space, and a resonance space adjustment module located inside the case for adjusting at least one of the shape and size of the resonance space.

Description

Technical Field

[0001] The present invention relates to a particle measurement device. In particular, the present invention relates to a particle measurement device that effectively measures a liquid sample containing nanoparticles.

Background Art

[0002] In the manufacturing processes of products that require high precision such as displays and semiconductors, various organic and inorganic chemical substances used require chemicals of higher purity than at present in order to prevent a decrease in manufacturing yield. In order to confirm the quality of high-purity chemicals, high-level analysis technologies have been developed and newly applied. Among these, the importance of particle analysis is increasing more and more. Since even small particles on the order of 10 nanometers can affect the yield reduction and high integration of semiconductor manufacturing processes, along with the development of a stable analysis method for quality control, the scalability of the technology must be ensured so that the causes of defects that may occur during the process can also be analyzed.

[0003] Generally, a substance that is uniformly dispersed in a liquid in the form of molecules or ions is called a solution. A state in which fine particles having a diameter of about 1 nm to 1000 nm, which are larger than ordinary molecules and ions, are dispersed without aggregation or precipitation in this solution is called a colloidal state, and a substance in this colloidal state is called a colloid.

[0004] The research on fine colloids present in a solution has been concentrated on obtaining information on the physicochemical properties of the substance to be analyzed and improving the detection output of a separation analyzer. So far, the analysis of colloidal particles has a limit of 100 nm in size, and the development of technology is required in that a high-concentration sample is needed to accurately analyze colloidal particles of 100 nm or less.

[0005] As a method for measuring colloidal nanoparticles, a light scattering analysis method that uses the light scattering intensity to confirm the particle size is usually used. However, when measuring fine nanoparticles with a size smaller than 100 nm, even if scattered light is generated, if the concentration is low, the detection probability rapidly decreases, making it difficult to obtain highly reliable results, and there is a limit that the particle concentration must be several ppm (parts per million) or more. When the particle size is large, the scattering intensity is large, while on the other hand, as the particle size becomes smaller, the area that can scatter light decreases, so the intensity of the scattered light becomes weak and measurement becomes difficult. Therefore, since relatively many particles must contribute to scattering, the sensitivity significantly decreases at concentrations below ppm.

[0006] When a laser beam is irradiated onto nanoparticles and laser induced breakdown occurs, it can lead to a shock wave. When measuring nanoparticles by measuring the sound signal of the shock wave, since noise is likely to be measured simultaneously with the sound signal, it is necessary to amplify the sound signal.

Prior Art Documents

Patent Documents

[0007]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0008] An object of the present invention is to solve the above - mentioned problems and other problems.

[0009] Another object of the present invention is to provide a particle measurement device that effectively measures nanoparticles.

[0010] Another object of the present invention is to provide a particle measurement device that effectively fixes a flow cell in which a liquid sample containing nanoparticles flows.

[0011] Another object of the present invention is to provide a particle measurement device that effectively suppresses torsional force.

[0012] Another object of the present invention is to provide a particle measurement device that effectively measures acoustic waves generated from nanoparticles.

[0013] Another object of the present invention is to provide a particle measurement device that amplifies a specific frequency band in the generated acoustic wave.

[0014] Another object of the present invention is to provide a particle measurement device including a resonance plate that resonates in a specific frequency band.

[0015] Another object of the present invention is to provide a particle measurement device that forms a resonance space in which acoustic waves resonate inside.

[0016] Another object of the present invention is to provide a particle measurement device that adjusts at least one of the shape and size of the resonance space.

Means for Solving the Problems

[0017] To achieve the above or other objects, according to one aspect of the present invention, there is provided a particle measurement device including a mount unit that fixes a flow cell, and a resonance unit that is disposed behind the mount unit and forms a resonance space that is open at the front and rear. The resonance unit includes a case that is disposed behind the mount unit and forms the resonance space, and a resonance space adjustment module that is located inside the case and adjusts at least one of the shape and size of the resonance space.

Effects of the Invention

[0018] The effects of the particle measurement device according to the present invention will be described as follows.

[0019] According to at least one of the embodiments of the present invention, a particle measurement device capable of effectively measuring nanoparticles can be provided.

[0020] According to at least one of the embodiments of the present invention, a particle measurement device capable of effectively fixing a flow cell through which a liquid sample containing nanoparticles flows can be provided.

[0021] According to at least one of the embodiments of the present invention, a particle measurement device capable of effectively suppressing torsional force can be provided.

[0022] According to at least one of the embodiments of the present invention, a particle measurement device capable of effectively measuring acoustic waves generated from nanoparticles can be provided.

[0023] According to at least one of the embodiments of the present invention, a particle measurement device capable of amplifying a specific frequency band in the generated acoustic waves can be provided.

[0024] According to at least one of the embodiments of the present invention, a particle measurement device including a resonance plate that resonates in a specific frequency band can be provided.

[0025] According to at least one of the embodiments of the present invention, a particle measurement device capable of forming a resonance space in which acoustic waves resonate internally can be provided.

[0026] According to at least one of the embodiments of the present invention, a particle measurement device capable of adjusting at least one of the shape and size of the resonance space can be provided.

[0027] A further scope of application of the present invention will become apparent from the following detailed description. However, it should be understood that various changes and modifications within the spirit and scope of the present invention will become apparent to those skilled in the art from this detailed description, and the detailed description and specific examples, while indicating preferred embodiments of the present invention, are given by way of illustration only.

Brief Description of the Drawings

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DETAILED DESCRIPTION OF THE INVENTION

[0029] Hereinafter, embodiments disclosed in this specification will be described in detail with reference to the accompanying drawings. However, the same or similar components will be denoted by the same reference numerals regardless of the drawing numbers, and redundant descriptions will be omitted. The suffixes "module" and "section" of the components used in the following description are given or mixed for the purpose of facilitating the preparation of the specification, and do not have any significance or usefulness by themselves. Also, when explaining the embodiments disclosed in this specification, if it is determined that a specific description of related known technologies may obscure the gist of the embodiments disclosed in this specification, the detailed description thereof will be omitted. Note that the accompanying drawings are only for facilitating the understanding of the embodiments disclosed in this specification, and the technical idea disclosed in this specification is not limited by the accompanying drawings, and any modifications, equivalents, or alternatives included in the spirit and technical scope of the present invention should be understood to be included in the present invention.

[0030] Terms including ordinal numbers such as first, second, etc. are used to describe various components, but do not limit the components. The above terms are used only for the purpose of distinguishing one component from another.

[0031] When a component is referred to as "connected" or "attached" to another component, it should be understood that it may be directly connected or directly attached to the other component, or there may be still other components in between. In contrast, when a component is referred to as "directly connected" or "directly attached" to another component, it should be understood that there are no other components in between.

[0032] The singular form includes the plural form unless otherwise specified.

[0033] In the present invention, "including" or "having" indicates the presence of the features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, and does not preclude the presence or possibility of addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

[0034] In the drawings, for the sake of convenience of explanation, the components are exaggerated or reduced in size. For example, the size and thickness of each configuration shown in the drawings are arbitrarily shown for the convenience of explanation, and the present invention is not necessarily limited to what is shown in the drawings.

[0035] When a certain embodiment can be embodied differently, the specific process order may be performed differently from the order described. For example, two processes described continuously may be performed substantially simultaneously, or may be advanced in the order opposite to the described order.

[0036] In the following embodiments, the statement that a film, region, component, etc. are connected includes not only the case where the film, region, component are directly connected, but also the case where other films, regions, components are interposed between the film, region, component and are indirectly connected. For example, in this specification, the statement that a film, region, component, etc. are electrically connected includes not only the case where the film, region, component, etc. are directly electrically connected, but also the case where other films, regions, components, etc. are interposed therebetween and are electrically indirectly connected.

[0037] Figures 1 to 3 are views showing a particle measurement device 10 according to an embodiment of the present invention as seen from various directions. For example, in Figure 1, the front, right side, and upper surfaces of the particle measurement device 10 can be observed. For example, in Figure 2, the front, left side, and lower surfaces of the particle measurement device 10 can be observed. For example, in Figure 3, the right side, upper surface, and rear surface of the particle measurement device 10 can be observed. Figure 4 is an exploded perspective view of the particle measurement device 10 according to an embodiment of the present invention.

[0038] In this specification, the direction of the particle measurement device 10 can be indicated using a Cartesian coordinate system.

[0039] For example, the negative Y-axis direction can represent the front of the particle measurement device 10. For example, the positive Y-axis direction can represent the rear of the particle measurement device 10.

[0040] For example, the negative X-axis direction can represent the left direction of the particle measurement device 10. For example, the positive X-axis direction can represent the right direction of the particle measurement device 10.

[0041] For example, the negative Z-axis direction can represent the lower direction of the particle measurement device 10. For example, the positive Z-axis direction can represent the upper direction of the particle measurement device 10.

[0042] Referring to FIGS. 1 to 4, the particle measurement device 10 can include a flow cell 1000. The flow cell 1000 can form a shape extending in one direction. The flow cell 1000 can form a shape extending, for example, from bottom to top.

[0043] The flow cell 1000 may be a passage through which a liquid flows. For example, a liquid can flow from the lower end to the upper end of the flow cell 1000. The liquid flowing through the flow cell 1000 can contain nanoparticles. The nanoparticles contained in the liquid flowing through the flow cell 1000 can be the objects that the particle measurement device 10 intends to measure.

[0044] At least a part of the flow cell 1000 can transmit light or electromagnetic waves. For example, at least a part of the light or electromagnetic waves incident on the front surface of the flow cell 1000 can pass through the flow cell 1000 and proceed from the rear surface of the flow cell 1000 to the rear of the flow cell 1000.

[0045] The particle measurement device 10 can include a mounting unit 2000. The mounting unit 2000 can be coupled to the flow cell 1000. For example, the flow cell 1000 can be fixed to the mounting unit 2000.

[0046] The mounting unit 2000 can include a fixing module 2100. The fixing module 2100 can be coupled to or fix the flow cell 1000. For example, the fixing module 2100 can be located on the left and right side surfaces of the flow cell 1000.

[0047] A plurality of fixing modules 2100 can be provided. For example, the fixing module 2100 can include a first fixing module 2100a and a second fixing module 2100b. For example, the fixing module 2100 can mean at least one of the first fixing module 2100a and the second fixing module 2100b.

[0048] The first fixing module 2100a can face the left side surface of the flow cell 1000. The second fixing module 2100b can face the right side surface of the flow cell 1000. The flow cell 1000 can be arranged between the first fixing module 2100a and the second fixing module 2100b.

[0049] The mounting unit 2000 can include a bridge module 2500. The bridge module 2500 can be coupled to the first fixing module 2100a and the second fixing module 2100b. The bridge module 2500 can connect the first fixing module 2100a and the second fixing module 2100b.

[0050] The bridge module 2500 can be provided in plural. For example, the bridge module 2500 can include an upper bridge module 2501 and a lower bridge module 2502. For example, the bridge module 2500 can mean at least one of the upper bridge module 2501 and the lower bridge module 2502.

[0051] The upper bridge module 2501 can be coupled to the upper end of the fixed module 2100. For example, the upper bridge module 2501 can be coupled to the upper ends of the first fixed module 2100a and the second fixed module 2100b.

[0052] The lower bridge module 2502 can be coupled to the lower end of the fixed module 2100. For example, the lower bridge module 2502 can be coupled to the lower ends of the first fixed module 2100a and the second fixed module 2100b.

[0053] The bridge module 2500 can suppress the torsion of the fixed module 2100. The bridge module 2500 can suppress the spreading of the first fixed module 2100a and the second fixed module 2100b. The bridge module 2500 can provide a coupling force between the fixed module 2100 and the flow cell 1000.

[0054] The bridge module 2500 can be connected to the flow cell 1000. For example, the bridge module 2500 can communicate with the flow cell 1000. The bridge module 2500 can include a flow cell extension pipe 2535. The flow cell extension pipe 2535 may be a passage through which the liquid flowing through the flow cell 1000 flows. In FIGS. 1 to 3, only a part of the flow cell extension pipe 2535 can be displayed.

[0055] The particle measurement device 10 can include a resonance unit 3000. The resonance unit 3000 can form a space inside. The internal space of the resonance unit 3000 can be called the "resonance space".

[0056] The resonance unit 3000 can include a first side case 3100. The first side case 3100 can be arranged behind the first fixing module 2100a. The first side case 3100 can be connected or coupled to the first fixing module 2100a. For example, the first side case 3100 can form a shape extending rearward from the first fixing module 2100a.

[0057] The resonance unit 3000 can include a second side case 3200. The second side case 3200 can be arranged behind the second fixing module 2100b. The second side case 3200 can be connected or coupled to the second fixing module 2100b. For example, the second side case 3200 can form a shape extending rearward from the second fixing module 2100b.

[0058] The first side case 3100 and the second side case 3200 can face each other. The first side case 3100 and the second side case 3200 can be separated from each other. For example, the first side case 3100 and the second side case 3200 can be horizontally separated from each other.

[0059] The first side case 3100 and the second side case 3200 can face the resonance space. The side cases 3100, 3200 can mean at least one of the first side case 3100 and the second side case 3200.

[0060] The resonance unit 3000 can include a rear case 3400. The rear case 3400 can include a rear case plate 3410. The rear case plate 3410 can form the rear surface of the resonance unit 3000. The rear case plate 3410 can form the shape of a plate. The rear case plate 3410 can face the resonance space.

[0061] The rear case 3400 can include a rear case opening 3420. The rear case opening 3420 can be formed in the rear case plate 3410. The rear case opening 3420 can be formed to penetrate in the front-rear direction of the rear case plate 3410. The rear case opening 3420 can communicate with the resonance space 3420.

[0062] The resonance unit 3000 can include a resonance module 3700. The resonance module 3700 can include a resonance plate 3710. The resonance plate 3710 can contact the side cases 3100, 3200. The resonance plate 3710 can form the outer surface of the resonance unit 3000. For example, the resonance plate 3710 can form at least a part of the upper surface of the resonance unit 3000. For example, the resonance plate 3710 can form at least a part of the lower surface of the resonance unit 3000.

[0063] In other examples, the resonance module 3700 can be formed in the side cases 3100, 3200. In other examples, the resonance module 3700 can be formed in the rear case 3400.

[0064] In other examples, the resonance module 3700 can be located in the resonance space. For example, the resonance module 3700 can be disposed between the first side case 3100 and the second side case 3200. For example, the resonance module 3700 can be disposed in front of the rear case plate 3410.

[0065] The operating principle of the particle measurement device 10 will be described. The laser beam can be incident on the front surface of the flow cell 1000. The laser beam can be incident on the flow cell 1000 in a pulse manner. At least a part of the laser beam incident on the front surface of the flow cell 1000 can reach the inside of the flow cell 1000. At least a part of the laser beam that has reached the inside of the flow cell 1000 can pass through the rear case opening 3420 and proceed to the rear of the resonance unit 3000.

[0066] The laser beam that has reached the inside of the flow cell 1000 can add energy to the liquid (or liquid sample) flowing through the flow cell 1000. For example, the particles contained in the liquid sample can receive energy from the laser beam. The size of the particles contained in the liquid sample may be at the nanometer level. In this context, the particles contained in the liquid sample can be called "nanoparticles".

[0067] When the nanoparticles contained in the liquid sample receive energy from the laser beam, a shock wave may be generated. For example, when the liquid sample receives energy from the laser beam, plasma may be generated in the space where the liquid sample reacts to the laser beam.

[0068] For example, when plasma or a shock wave is generated inside the flow cell 1000, an acoustic wave can be generated and proceed to the rear of the flow cell 1000.

[0069] The characteristics of the acoustic wave can depend on the state of the nanoparticles. The state of the nanoparticles may be a state related to at least one of the number density of the nanoparticles, the size distribution of the nanoparticles, and the shape of the nanoparticles. Therefore, information on the nanoparticles can be obtained by measuring and analyzing the acoustic wave.

[0070] In order to effectively measure an acoustic wave, it is necessary to increase the amplitude of the acoustic wave. The resonance unit 3000 can resonate the acoustic wave.

[0071] For example, the resonance plate 3710 of the resonance unit 3000 can resonate the acoustic wave. For example, the resonance plate 3710 can resonate with respect to the portion corresponding to the natural frequency of the resonance plate 3710 in the acoustic wave. Therefore, by making the natural frequency of the resonance plate 3710 correspond to the frequency band of the acoustic wave to be measured, the acoustic wave can be effectively measured.

[0072] The natural frequency of the resonance plate 3710 can be determined by at least one of the material, elasticity, length, thickness, and width of the resonance plate 3710. For example, by adjusting the length of the resonance plate 3710, the natural frequency of the resonance plate 3710 can be adjusted.

[0073] The length of the resonance plate 3710 can be based on the front-back direction. For example, the length of the resonance plate 3710 can mean the distance from the fixed end to the free end of the resonance plate 3710. In other words, by adjusting the distance from the fixed end to the free end of the resonance plate 3710, the natural frequency of the resonance plate 3710 can be adjusted.

[0074] In another example, the resonance space of the resonance unit 3000 can resonate the acoustic wave. For example, by adjusting at least one of the shape and size of the resonance space of the resonance unit 3000, the frequency of the resonance portion in the acoustic wave can be adjusted.

[0075] FIG. 5 is a diagram showing a flow cell 1000 according to an embodiment of the present invention. FIG. 6 is a cross-sectional view taken along "C1-C2" of the flow cell of FIG. 5.

[0076] Referring to FIGS. 5 and 6, the flow cell 1000 can form a shape extending in one direction. For example, the flow cell 1000 can extend from the upper end and connect to the lower end. For example, the upper end 1010 of the flow cell can form the upper end of the flow cell 1000. For example, the lower end 1020 of the flow cell can form the lower end of the flow cell 1000.

[0077] The flow cell 1000 can form a hollow portion inside. For example, the hollow portion 1050 of the flow cell may be a hollow portion formed inside the flow cell 1000. The hollow portion 1050 of the flow cell can be connected to the upper end 1010 and the lower end 1020 of the flow cell. For example, the hollow portion 1050 of the flow cell can be open at the upper end 1010 of the flow cell. For example, the hollow portion 1050 of the flow cell can be open at the lower end 1020 of the flow cell.

[0078] The hollow portion 1050 of the flow cell may be a passage through which a liquid sample flows. For example, the liquid sample can flow into the hollow portion 1050 of the flow cell from the lower end 1020 and flow upward, and be discharged from the upper end 1010 of the flow cell to the outside of the flow cell 1000.

[0079] The flow cell 1000 can form an outer surface. For example, the outer surface 1100 of the cell can mean the outer surface of the flow cell 1000. The outer surface 1100 of the cell can include a first cell bonding surface 1110. The first cell bonding surface 1110 can face and be in close contact with the first fixing module 2100a (see FIG. 1). The outer surface 1100 of the cell can include a second cell bonding surface 1120. The second cell bonding surface 1120 can face and be in close contact with the second fixing module 2100b (see FIG. 1). The cell bonding surfaces 1110, 1120 can mean at least one of the first cell bonding surface 1110 and the second cell bonding surface 1120.

[0080] The cell outer surface 1100 can include the cell incident surface 1130. The cell incident surface 1130 can form the front face of the flow cell 1000. The cell incident surface 1130 can be the surface on which the laser beam is incident. The cell outer surface 1100 can include the cell transmission surface 1140. The cell transmission surface 1140 can form the rear face of the flow cell 1000. The cell transmission surface 1140 can be the surface through which the laser beam passes and advances to the outside.

[0081] The cell inner surface 1200 can form the flow cell hollow portion 1050. The cell inner surface 1200 can include a first cell inner surface 1210 and a second cell inner surface 1220. The first cell inner surface 1210 can correspond to the first cell bonding surface 1110. The second cell inner surface 1220 can correspond to the second cell bonding surface 1120. The cell inner surface 1200 can include a third cell inner surface 1230 and a fourth cell inner surface 1240. The third cell inner surface 1230 can correspond to the cell incident surface 1130. The fourth cell inner surface 1240 can correspond to the cell transmission surface 1140.

[0082] FIG. 7 and FIG. 8 are diagrams showing the fixed module and the resonance unit according to an embodiment of the present invention as viewed from different angles.

[0083] Referring to FIGS. 7 and 8, the resonance unit 3000 can include a front beam 3300. The front beam 3300 can form the front portion of the resonance unit 3000. The front beam 3300 can connect the first side case 3100 and the second side case 3200. The front beam 3300 can be coupled to the first side case 3100 and the second side case 3200, respectively. The front beam 3300 can be located behind the fixed module 2100.

[0084] Multiple front beams 3300 can be provided. For example, the front beam 3300 can include an upper front beam 3310. The upper front beam 3310 can be coupled or connected to the upper ends of the side cases 3100, 3200. For example, the lower front beam 3320 can be coupled or connected to the lower ends of the side cases 3100, 3200.

[0085] The upper front beam 3310, the lower front beam 3320, the first fixing module 2100a, and the second fixing module 2100b can form an opening. The opening formed by the upper front beam 3310, the lower front beam 3320, the first fixing module 2100a, and the second fixing module 2100b can be closed by the flow cell 1000 (see FIG. 1).

[0086] The first side case 3100 can form a shape extending rearward from the first fixing module 2100a. For example, the first side case 3100 and the first fixing module 2100a can be integrally formed.

[0087] The second side case 3200 can form a shape extending rearward from the second fixing module 2100b. For example, the second side case 3200 and the second fixing module 2100b can be integrally formed.

[0088] One end of the resonance plate 3710 can be coupled to the front beam 3300. For example, the front end portion of the resonance plate 3710 can be coupled to the upper front beam 3310. In another example, the front end portion of the resonance plate 3710 can be coupled to the lower front beam 3320.

[0089] At least one of the front end portion and the rear end portion of the resonance plate 3710 can be coupled or fixed to the cases 3100, 3200, 3300, 3400. The cases 3100, 3200, 3300, 3400 can mean at least one of the first side case 3100, the second side case 3200, the front beam 3300, and the rear case 3400.

[0090] For example, the front end portion of the resonance plate 3710 may be coupled and fixed to the upper front beam 3310, and the rear end portion of the resonance plate 3710 may be separated in the cases 3100, 3200, 3300, 3400. In this case, the front end portion of the resonance plate 3710 may be a fixed end, and the rear end portion of the resonance plate 3710 may be a free end.

[0091] For example, the front end portion of the resonance plate 3710 may be coupled and fixed to the upper front beam 3310, and the rear end portion of the resonance plate 3710 may be coupled and fixed to the upper end of the rear case 3400. In this case, both the front end portion and the rear end portion of the resonance plate 3710 may be fixed ends.

[0092] The combination and arrangement of the fixed end and the free end of the resonance plate 3710 can affect the natural frequency of the resonance plate 3710. The combination and arrangement of the fixed end and the free end of the resonance plate 3710 can be adjusted according to the frequency band of the acoustic wave to be measured.

[0093] The cases 3100, 3200, 3300, 3400, 3500 can include at least one of the first side case 3100, the second side case 3200, the front beam 3300, the rear case 3400, the upper case 3500 (see FIG. 15), and the lower case (not shown).

[0094] The cases 3100, 3200, 3300, 3400, 3500 can form a resonance space. The cases 3100, 3200, 3300, 3400, 3500 can face the resonance space. The cases 3100, 3200, 3300, 3400, 3500 and the resonance module 3700 can form a resonance space. The resonance module 3700 can be coupled to the cases 3100, 3200, 3300, 3400, 3500.

[0095] FIG. 9 is a perspective view showing the first fixing module 2100a of FIG. 1. FIG. 10 is a cross-sectional view taken along "B1 - B2" of the fixing module of FIG. 9.

[0096] Referring to FIGS. 9 and 10, the first fixing module 2100a can be observed. The structure of the second fixing module 2100b (see FIG. 1) can be made similar to the structure of the first fixing module 2100a. For example, the first fixing module 2100a and the second fixing module 2100b (see FIG. 1) may be different from each other in the extending direction of the fixing body upper protrusion 2150 and the fixing body lower protrusion 2160.

[0097] The fixing module 2100 can include a fixing body 2110. The fixing body 2110 can form the overall shape of the fixing module 2100. The fixing body 2110 can be formed by extending downward from the upper end and connecting to the lower end.

[0098] The fixing body 2110 can form a quadrangular prism shape. For example, the fixing body 2110 can form an outer surface. For example, the outer surface of the fixing body 2110 can be divided into four parts.

[0099] For example, the fixing body 2110 can include a fixing body coupling surface 2111. The fixing body coupling surface 2111 can form a part of the outer surface of the fixing body 2110. The fixing body coupling surface 2111 can face and couple with the cell coupling surfaces 1110, 1120 (see FIG. 6). The shape of the fixing body coupling surface 2111 can correspond to the shape of the cell coupling surfaces 1110, 1120 (see FIG. 6).

[0100] For example, the fixing body coupling surface 2111 of the first fixing module 2100a can face and couple with the first cell coupling surface 1110 (see FIG. 6). For example, the fixing body coupling surface 2111 of the second fixing module 2100b (see FIG. 1) can face and couple with the second cell coupling surface 1120 (see FIG. 6).

[0101] The fixed body 2110 can include a fixed body front surface 2112. The fixed body front surface 2112 can form the front surface of the fixed body 2110. The fixed body 2110 can include a fixed body rear surface 2113.

[0102] The fixed body rear surface 2113 can form the rear surface of the fixed body 2110. The fixed body rear surface 2113 can be coupled to the side cases 3100, 3200 (see FIGS. 7 and 8).

[0103] For example, when the first fixing module 2100a is integrally formed with the first side case 3100 (see FIG. 7), the fixed body rear surface 2113 of the first fixing module 2100a may not be formed.

[0104] For example, when the second fixing module 2100b (see FIG. 1) is integrally formed with the second side case 3200 (see FIG. 8), the fixed body rear surface 2113 of the second fixing module 2100b (see FIG. 1) may not be formed.

[0105] The fixed body 2110 can include a fixed body side surface 2114. The fixed body side surface 2114 can be located on the opposite side of the fixed body coupling surface 2111.

[0106] The fixing module 2100 can include a fixed body upper protrusion 2150. The fixed body upper protrusion 2150 can be formed to protrude upward from the upper end of the fixed body 2100. The fixed body upper protrusion 2150 can form a step with the upper end of the fixed body 2100.

[0107] Referring to FIGS. 7 and 9, the upper protrusion 2150 of the fixed body can form a shape extending in one direction. For example, the upper protrusion 2150 of the fixed body of the first fixing module 2100a can form a shape extending horizontally. For example, the upper protrusion 2150 of the fixed body of the first fixing module 2100a can form a shape extending in the front-rear direction.

[0108] For example, the upper protrusion 2150 of the fixed body of the second fixing module 2100b can form a shape extending horizontally. For example, the upper protrusion 2150 of the fixed body of the second fixing module 2100b can form a shape extending in the left-right direction. In other words, the direction in which the upper protrusion 2150 of the fixed body of the first fixing module 2100a extends can be offset or intersect with the direction in which the upper protrusion 2150 of the fixed body of the second fixing module 2100b extends.

[0109] The fixing module 2100 can include a lower protrusion 2160 of the fixed body. The lower protrusion 2160 of the fixed body can be formed to protrude downward from the lower end of the fixed body 2100. The lower protrusion 2160 of the fixed body can form a step with the lower end of the fixed body 2100.

[0110] The fixed body protrusions 2150, 2160 can mean at least one of the upper protrusion 2150 of the fixed body and the lower protrusion 2160 of the fixed body.

[0111] Referring to FIGS. 7 and 9, the lower protrusion 2160 of the fixed body can form a shape extending horizontally. The direction in which the lower protrusion 2160 of the fixed body extends horizontally can be offset or intersect with the direction in which the upper protrusion 2150 of the fixed body extends. For example, the lower protrusion 2160 of the fixed body of the first fixing module 2100a can form a shape extending in the left-right direction.

[0112] For example, the lower protrusion 2160 of the fixed body of the second fixed module 2100b can form a shape extending in the front-rear direction. In other words, the direction in which the lower protrusion 2160 of the fixed body of the first fixed module 2100a extends can deviate from or intersect with the direction in which the lower protrusion 2160 of the fixed body of the second fixed module 2100b extends.

[0113] The upper protrusion 2150 of the fixed body can include an upper protrusion coupling hole 2155. Through the upper protrusion coupling hole 2155, the upper protrusion 2150 of the fixed body can be coupled to the upper bridge module 2501 (see FIG. 1).

[0114] The lower protrusion 2160 of the fixed body can include a lower protrusion coupling hole (not shown). Through the lower protrusion coupling hole (not shown), the lower protrusion 2160 of the fixed body can be coupled to the lower bridge module 2502 (see FIG. 1). The protrusion coupling hole 2155 can mean at least one of the upper protrusion coupling hole 2155 and the lower protrusion coupling hole (not shown).

[0115] FIGS. 11 and 12 are views showing the bridge module 2500 according to an embodiment of the present invention as seen from different directions.

[0116] Referring to FIGS. 11 and 12, the upper bridge module 2501 can be observed. The structure of the lower bridge module 2502 (see FIG. 1) can be made similar to the structure of the upper bridge module 2501. For example, the upper bridge module 2501 and the lower bridge module 2502 (see FIG. 1) may be different from each other in the extending direction of the first bridge groove 2515 and the second bridge groove 2525.

[0117] The bridge module 2500 can include a bridge body 2505. The bridge body 2505 can form the overall shape of the bridge module 2500. The bridge body 2505 can form a bridge body coupling surface 2506. The bridge body coupling surface 2506 can face the fixed module 2100 (see FIG. 1). The bridge body 2505 can include a bridge body opposing surface 2507. The bridge body opposing surface 2507 can be located on the opposite side of the bridge body coupling surface 2506.

[0118] The bridge module 2500 can include a first bridge part 2510. The first bridge part 2510 may be a part of the bridge body 2505. The first bridge part 2510 can be coupled to the first fixed module 2100a (see FIG. 1).

[0119] The first bridge part 2510 can include a first bridge groove 2515. The first bridge groove 2515 can be coupled to the fixed body protrusions 2150, 2160 (see FIG. 9) of the first fixed module 2100a. The first bridge groove 2515 can be formed by being recessed from the bridge body coupling surface 2506.

[0120] The first bridge part 2510 can include a first bridge fastening hole 2513. The first bridge fastening hole 2513 can be formed by being recessed from the bridge body opposing surface 2507. The first bridge fastening hole 2513 can communicate with the first bridge groove 2515. The first bridge fastening hole 2513 can communicate with the protrusion coupling hole 2155 (see FIG. 9) of the first fixed module 2100a.

[0121] The screw inserted into the first bridge fastening hole 2513 can be inserted and fixed into the protrusion coupling holes 2155 (see FIG. 9) of the fixed body protrusions 2150, 2160 (see FIG. 9) located in the first bridge groove 2515. Thereby, the first fixing module 2100a (see FIG. 9) and the bridge module 2500 can be coupled.

[0122] The bridge module 2500 can include a second bridge part 2520. The second bridge part 2520 can be another part of the bridge body 2505. The second bridge part 2520 can be coupled to the second fixing module 2100b (see FIG. 1).

[0123] The second bridge part 2520 can include a second bridge groove 2525. The second bridge groove 2525 can be coupled to the fixed body protrusions 2150, 2160 (see FIG. 9) of the second fixing module 2100b (see FIG. 1). The second bridge groove 2525 can be formed by being recessed from the bridge body coupling surface 2506.

[0124] The second bridge part 2520 can include a second bridge fastening hole 2523. The second bridge fastening hole 2523 can be formed by being recessed from the bridge body opposing surface 2507. The second bridge fastening hole 2523 can communicate with the second bridge groove 2525. The second bridge fastening hole 2523 can communicate with the protrusion coupling hole 2155 (see FIG. 9) of the second fixing module 2100b (see FIG. 1).

[0125] The screw inserted into the second bridge fastening hole 2523 can be inserted and fixed into the protrusion coupling hole 2155 (see FIG. 9) of the fixed body protrusions 2150, 2160 (see FIG. 9) located in the second bridge groove 2525. Thereby, the second fixing module 2100b (see FIG. 9) and the bridge module 2500 can be coupled. The bridge fastening holes 2513, 2523 can mean at least one of the first bridge fastening hole 2513 and the second bridge fastening hole 2523.

[0126] The bridge module 2500 can include a third bridge part 2530. The third bridge part 2530 can be another part of the bridge body 2505. The third bridge part 2530 can be located between the first bridge part 2510 and the second bridge part 2520.

[0127] The third bridge part 2530 can be coupled to the flow cell 1000 (see FIG. 1). The third bridge part 2530 can include a third bridge hollow part 2531. The third bridge hollow part 2531 can be formed in the third bridge part 2530. The third bridge hollow part 2531 can extend from the bridge body coupling surface 2506 and connect to the bridge body opposing surface 2507. The third bridge hollow part 2531 can communicate with the flow cell hollow part 1050 (see FIG. 5).

[0128] The third bridge part 2530 can include a third bridge mounting opening 2533. The third bridge mounting opening 2533 can be formed in the bridge body coupling surface 2506. The third bridge mounting opening 2533 can be coupled to the flow cell 1000 (see FIG. 1). The third bridge mounting opening 2533 can be connected to the third bridge hollow part 2531. The third bridge mounting opening 2533 can be located between the first bridge groove 2515 and the second bridge groove 2525.

[0129] The third bridge part 2530 can include a third bridge external opening 2534. The third bridge external opening 2534 can be formed on the bridge body facing surface 2507. The third bridge external opening 2534 can be connected to a flow cell extension pipe 2535 (see FIG. 1). The third bridge external opening 2534 can be positioned between the first bridge fastening hole 2513 and the second bridge fastening hole 2523. The third bridge external opening 2534 can be connected to the third bridge hollow part 2531.

[0130] Referring to FIGS. 9 to 12, in the first fixing module 2100a and the second fixing module 2100b, the directions in which the fixing body upper protrusions 2150 extend may be different from each other. Alternatively, in the first fixing module 2100a and the second fixing module 2100b, the directions in which the fixing body lower protrusions 2160 extend may be different from each other.

[0131] To explain the effect thereof, when the bolts are inserted into the bridge fastening holes 2513, 2523 and the protrusion coupling holes 2155 and coupled, they rotate, so the flow cell 1000 (see FIG. 1) may be subjected to torsional force. By arranging the fixing body protrusions 2150, 2160 as described above, the torsional force received by the flow cell 1000 (see FIG. 1) can be minimized.

[0132] FIG. 13 is a view showing the particle measurement device according to an embodiment of the present invention as seen from above.

[0133] Referring to FIG. 13, the resonance plate 3710 can be disposed between the upper ends of the first side case 3100 and the second side case 3200. The resonance plate 3710 can be fastened to the upper front beam 3310 (see FIG. 7). For example, the front end portion of the resonance plate 3710 can be fastened to the upper front beam 3310 (see FIG. 7). For example, the front end portion of the resonance plate 3710 can be coupled to the upper front beam 3310 (see FIG. 7) by the resonance plate fixing part 3720. The front end portion of the resonance plate 3710 may be a fixed end. The resonance plate fixing part 3720 may be a bolt or a screw.

[0134] The resonance plate 3710 can be disposed between the first side case 3100 and the second side case 3200. The resonance plate 3710 may be in a state separated from the first side case 3100 and the second side case 3200. The resonance plate 3710 may be in a state separated from the rear case 3400. That is, the rear end portion of the resonance plate 3710 may be a free end.

[0135] The first side case 3100 can include the first side fastening holes 3110. The first side fastening holes 3110 can be formed at the upper end of the first side case 3100. The first side fastening holes 3110 can be provided in plurality. The plurality of first side fastening holes 3110 can be arranged at intervals in the front-rear direction.

[0136] The second side case 3200 can include the second side fastening holes 3210. The second side fastening holes 3210 can be formed at the upper end of the second side case 3200. The second side fastening holes 3210 can be provided in plurality. The plurality of second side fastening holes 3210 can be arranged at intervals in the front-rear direction. The side fastening holes 3110, 3210 can mean at least one of the first side fastening holes 3110 and the second side fastening holes 3210.

[0137] FIG. 14 is a diagram showing a state in which a slide bar 3810 according to an embodiment of the present invention is provided on first and second side cases.

[0138] Referring to FIG. 14, the slide module 3800 can include a slide bar 3810. The slide bar 3810 can be located on one surface of the resonance plate 3710. For example, at least a part of the slide bar 3810 can be located on the upper surface of the resonance plate 3710.

[0139] The slide bar 3810 can include a slide bar body 3811. The slide bar body 3811 can form the overall shape of the slide bar 3810. The slide bar body 3811 can form a shape that extends from one end and connects to the other end.

[0140] The slide bar body 3811 can divide one surface of the resonance plate 3710 in the front-rear direction. That is, the slide bar body 3811 can cross the resonance plate 3710 in the lateral direction.

[0141] Slide bar holes 3812 can be formed at both ends of the slide bar body 3811. The slide bar hole 3812 located at one end of the slide bar body 3811 can correspond to the first side fastening hole 3110. The slide bar hole 3812 located at the other end of the slide bar body 3811 can correspond to the second side fastening hole 3210.

[0142] When bolts are sequentially inserted into the slide bar holes 3812 and the side fastening holes 3110, 3210 and fastened, the slide bar body 3811 can connect the first side case 3100 and the second side case 3200.

[0143] When a bolt is sequentially inserted into and fastened to the slide bar hole 3812 and the side fastening holes 3110 and 3210, the slide bar body 3811 can contact one surface of the resonance plate 3710. The resonance plate 3710 does not necessarily vibrate at the position where it contacts the slide bar body 3811. That is, the resonance plate 3710 can form a fixed end at the position where it contacts the slide bar body 3811. Therefore, by adjusting the position where the slide bar body 3811 is disposed, the natural frequency of the resonance plate 3710 can be adjusted.

[0144] FIG. 15 is a view showing a resonance unit in which a slide slit is formed in an upper case. FIG. 16 is a cross-sectional view taken along "D1 - D2" of FIG. 15.

[0145] Referring to FIGS. 15 and 16, the resonance unit 3000 can include an upper case 3500. The upper case 3500 can include an upper case plate 3510. The upper case plate 3510 can form at least a part of the upper face of the resonance unit 3000. The upper case plate 3510 can be connected to the side cases 3100 and 3200 and the rear case 3400.

[0146] The upper case 3500 can include a receiving opening (not shown). The receiving opening (not shown) can be formed in the upper case plate 3510. The receiving opening (not shown) can receive the resonance plate 3710.

[0147] The upper case 3500 can include a slide opening 3520. The slide opening 3520 can include a first slide opening 3521 and a second slide opening 3522. The slide opening 3520 can mean at least one of the first slide opening 3521 and the second slide opening 3522.

[0148] The first slide opening 3521 can be adjacent to the first side case 3100. The second slide opening 3522 can be adjacent to the second side case 3200.

[0149] The first slide opening 3521 can be disposed between the first side case 3100 and the second slide opening 3522. The first slide opening 3521 can be formed between the first side case 3100 and the resonance plate 3710.

[0150] The second slide opening 3522 can be disposed between the first slide opening 3521 and the second side case 3200. The second slide opening 3522 can be formed between the second side case 3200 and the resonance plate 3710.

[0151] The slide opening 3520 can form an elongated shape in one direction. Alternatively, the slide opening 3520 can form an extended shape in one direction. For example, the slide opening 3520 can form a shape extending in the front-rear direction.

[0152] FIG. 17 is a view showing a state where a slide bar is connected to the slide opening shown in FIG. 15. FIG. 18 is a cross-sectional view taken along "E1 - E2" of FIG. 17.

[0153] Referring to FIGS. 17 and 18, a plurality of slide bars 3810 can be provided. For example, the slide bar 3810 can include a first slide bar 3810a and a second slide bar 3810b. The slide bar 3810 can mean at least one of the first slide bar 3810a and the second slide bar 3810b.

[0154] The first slide bar 3810a can be located on one surface of the resonance plate 3710. The second slide bar 3810b can be located on the other surface of the resonance plate 3710. The resonance plate 3710 can be located between the first slide bar 3810a and the second slide bar 3810b.

[0155] Holes can be formed at both ends of the slide bar 3810. The holes formed at both ends of the slide bar 3810 can communicate with the slide opening 3520. The hole formed at one end of the slide bar 3810 can be called the "first fixing hole". The hole formed at the other end of the slide bar 3810 can be called the "second fixing hole".

[0156] Threads can be formed on the outer surfaces of the holes formed at both ends of the slide bar 3810. The threads formed on the outer surfaces of the holes formed at both ends of the slide bar 3810 can be called the "slide bar threads".

[0157] The slide module 3800 can include a fixed part 3820. The fixed part 3820 can be received in the slide opening 3520. The fixed part 3820 can move along the slide opening 3520 in the slide opening 3520.

[0158] The fixed part 3820 coupled to the first fixing hole of the slide bar 3810 can be called the "first fixed part". The fixed part 3820 coupled to the second fixing hole of the slide bar 3810 can be called the "second fixed part". The first fixed part can be received and coupled in the first slide opening 3521. The second fixed part can be received and coupled in the second slide opening 3522.

[0159] The fixed part 3820 can include bolts or screws. Threads can be formed on the outer surface of the fixed part 3820. The threads formed on the outer surface of the fixed part 3820 can be called "fixed part threads". The slider bar threads can be coupled with the fixed part threads.

[0160] Referring to FIGS. 17 and 18, the slide opening 3520 can be exposed to the outside except for the portion covered by the slider bar 3810. The slide module 3800 can include a shielding member (not shown) that closes the slide opening 3520 exposed to the outside.

[0161] FIG. 19 is a view showing a state before the slider bar shown in FIG. 18 comes into close contact with the resonance plate. In FIG. 19, for the sake of explanation, only the slide module is shown.

[0162] Referring to FIGS. 18 and 19, before the slider bar 3810 comes into close contact with the resonance plate 3710, the slider bar 3810 can form a shape bent toward the resonance plate 3710. For example, the first slider bar 3810a and the second slider bar 3810b can form a shape bent toward the resonance plate 3710.

[0163] The slider bar 3810 can have elasticity. When the fixed part 3820 rotates, the slider bar threads and the fixed part threads engage with each other, and the end of the slider bar 3810 can move. For example, when the fixed part 3820 rotates, the end of the slider bar 3810 can move toward the upper case plate 3510 (see FIG. 17).

[0164] When the ends of the first slider bar 3810a and the second slider bar 3810b move toward the upper case plate 3510 (see FIG. 17), the slider bar 3810 can become flatter. Since the slider bar 3810 has elasticity, an elastic force can be provided to the resonance plate 3710.

[0165] That is, due to the elastic force of the slide bar 3810, the resonance plate 3710 can be closely attached to and coupled with the slide bar 3810. As a result, the resonance plate 3710 can form a fixed end at the position in contact with the slide bar 3810. By moving the fixed part 3820 along the slide opening 3520 in the slide opening 3520, the natural frequency of the resonance plate 3710 can be adjusted.

[0166] Referring to FIGS. 17 to 19, the slide bar 3810 can be provided singly. For example, the slide bar 3810 can be disposed on the upper surface of the resonance plate 3710. In another example, the slide bar 3810 can be disposed on the lower surface of the resonance plate 3710.

[0167] Before the slide bar 3810 comes into close contact with the resonance plate 3710, the slide bar 3810 can form a shape bent toward the resonance plate 3710. For example, the slide bar 3810 can form a shape convex toward the resonance plate 3710.

[0168] In another example, the resonance plates 3710 can be separated in the cases 3100, 3200, 3300, 3400, 3500. For example, the resonance plates 3710 can be located in the resonance space. In this case, a "connecting member" for connecting one end of the resonance plate 3710 to the cases 3100, 3200, 3300, 3400, 3500 can be formed. One end of the resonance plate 3710 can be fixed to the connecting member to form a fixed end.

[0169] FIG. 20 is a cross-sectional view along "A1 - A2" of the resonance unit and the mount unit shown in FIG. 7. In FIG. 20, for convenience of explanation, the cross-section of the flow cell 1000 is also shown.

[0170] Referring to FIG. 20, the resonance unit 3000 can form a resonance space inside. The resonance unit 3000 can include a lower case (not shown). The resonance space can be formed by the side cases 3100, 3200, a lower case (not shown), the bridge module 2500 (refer to FIG. 1), the rear case 3400, and an upper part. Here, the upper part can include at least one of the resonance plate 3710 (refer to FIG. 1) and the upper case 3400 (refer to FIG. 17).

[0171] The resonance unit 3000 can include a resonance space adjustment module 3900. The resonance space adjustment module 3900 can include a resonance space adjustment plate 3910. The resonance space adjustment plate 3910 can be located between the first side case 3100 and the second side case 3200.

[0172] The resonance space adjustment plate 3910 can be arranged adjacent to the side cases 3100, 3200. The resonance space adjustment plate 3910 can be located or coupled to the inner surfaces of the cases 3100, 3200, 3300, 3400, 3500. For example, the resonance space adjustment plate 3910 can be movably coupled to the inner surfaces of the cases 3100, 3200, 3300, 3400, 3500.

[0173] A plurality of resonance space adjustment plates 3910 can be provided. The resonance space adjustment plate 3910 can include a first resonance space adjustment plate 3911 and a second resonance space adjustment plate 3912. The resonance space adjustment plate 3910 can mean at least one of the first resonance space adjustment plate 3911 and the second resonance space adjustment plate 3912.

[0174] The first resonance space adjustment plate 3911 and the second resonance space adjustment plate 3912 can be separated from each other. For example, the first resonance space adjustment plate 3911 and the second resonance space adjustment plate 3912 can face each other. The first resonance space adjustment plate 3911 and the second resonance space adjustment plate 3912 can move so as to move away from or approach each other.

[0175] The first resonance space adjustment plate 3911 can be adjacent to the first side case 3100. The first resonance space adjustment plate 3911 can be located between the first side case 3100 and the second resonance space adjustment plate 3912.

[0176] The second resonance space adjustment plate 3912 can be adjacent to the second side case 3200. The second resonance space adjustment plate 3912 can be located between the second side case 3200 and the first resonance space adjustment plate 3911.

[0177] The resonance space adjustment plate 3910 can face the resonance space. In other words, the shape and / or size of the resonance space can be changed by the resonance space adjustment plate 3910.

[0178] Referring to FIGS. 1 to 20, although not shown, the resonance plate 3710 can be coupled to the side cases 3100 and 3200. For example, the side cases 3100 and 3200 can include receiving openings as openings. The resonance plate 3710 can be located in the receiving openings of the side cases 3100 and 3200. One end of the resonance plate 3710 can be coupled and fixed to the side cases 3100 and 3200.

[0179] FIG. 21 is a cross-sectional view taken along "A1 - A2" of the resonance unit and the mount unit shown in FIG. 7, showing a state in which the resonance space adjustment plate 3910 is moved by the plate mover 3920. In FIG. 21, for convenience of explanation, a cross-section of the flow cell 1000 is also shown.

[0180] Referring to FIGS. 20 and 21, the resonance space adjustment module 3900 can include a plate mover 3920. The plate mover 3920 can be coupled or fixed to the cases 3100, 3200, 3300, 3400, 3500. The plate mover 3920 can be connected or coupled to a resonance space adjustment plate 3910 to move the resonance space adjustment plate 3910.

[0181] The plate mover 3920 can include a connecting shaft 3921. The connecting shaft 3921 can be connected to the resonance space adjustment plate 3910 and the side cases 3100, 3200 respectively. The resonance space adjustment plate 3910 can move along the connecting shaft 3921.

[0182] When the resonance space adjustment plate 3910 moves, the shape and / or size of the resonance space can change. For example, the first resonance space adjustment plate 3911 and the second resonance space adjustment plate 3912 can approach or separate from each other. For example, compared with the resonance space shown in FIG. 20, the resonance space shown in FIG. 21 can be smaller in size and narrower in width.

[0183] When the shape and / or size of the resonance space changes, the resonance frequency of the resonance space can change. Therefore, by adjusting the position of the resonance space adjustment plate 3910, the resonance frequency of the resonance space can be adjusted.

[0184] FIG. 22 is a cross-sectional view along "A1 - A2" of the resonance unit and the mount unit shown in FIG. 7, showing a state in which the resonance space adjustment plate 3910 is bent according to an embodiment of the present invention. In FIG. 22, for convenience of explanation, the cross-section of the flow cell 1000 is also shown.

[0185] As shown in FIGS. 20 and 22, the first resonance space adjustment plate 3911 may be bent toward the second resonance space adjustment plate 3912. For example, the second resonance space adjustment plate 3912 may be bent toward the first resonance space adjustment plate 3911.

[0186] The first resonance space adjustment plate 3911 can be divided into two segments. For example, the first resonance space adjustment plate 3911 can include a first front resonance space adjustment plate 3911f and a first rear resonance space adjustment plate 3911r. The first front resonance space adjustment plate 3911f and the first rear resonance space adjustment plate 3911r can be connected to each other.

[0187] The second resonance space adjustment plate 3912 can be divided into two segments. For example, the second resonance space adjustment plate 3912 can include a second front resonance space adjustment plate 3912f and a second rear resonance space adjustment plate 3912r. The second front resonance space adjustment plate 3912f and the second rear resonance space adjustment plate 3912r can be connected to each other.

[0188] The first front resonance space adjustment plate 3911f and the second front resonance space adjustment plate 3912f can face each other from the front, as shown in FIG. 20 for example.

[0189] When the first resonance space adjustment plate 3911 is bent toward the second resonance space adjustment plate 3912, or the second resonance space adjustment plate 3912 is bent toward the first resonance space adjustment plate 3911, the first front resonance space adjustment plate 3911f and the second front resonance space adjustment plate 3912f can face each other obliquely.

[0190] The first rear resonance space adjustment plate 3911r and the second rear resonance space adjustment plate 3912r can face each other from the front, as shown in FIG. 20 for example.

[0191] The front resonance space adjustment plates 3911f, 3912f can include or mean at least one of the first front resonance space adjustment plate 3911f and the second front resonance space adjustment plate 3912f.

[0192] The rear resonance space adjustment plates 3911r and 3912r can include or mean at least one of the first rear resonance space adjustment plate 3911r and the second rear resonance space adjustment plate 3912r.

[0193] The resonance space adjustment plate 3910 may be bent at the boundary between the front resonance space adjustment plates 3911f and 3912f and the rear resonance space adjustment plates 3911r and 3912r. For example, the resonance space adjustment plate 3910 can be convex toward the resonance space.

[0194] When the first resonance space adjustment plate 3911 is bent toward the second resonance space adjustment plate 3912, or the second resonance space adjustment plate 3912 is bent toward the first resonance space adjustment plate 3911, the first rear resonance space adjustment plate 3911r and the second rear resonance space adjustment plate 3912r can face each other obliquely.

[0195] When the first resonance space adjustment plate 3911 is bent toward the second resonance space adjustment plate 3912, or the second resonance space adjustment plate 3912 is bent toward the first resonance space adjustment plate 3911, the width between the first resonance space adjustment plate 3911 and the second resonance space adjustment plate 3912 can be made to decrease and then increase from the flow cell 1000 toward the rear case opening 3420. Thereby, the amplification effect of the acoustic wave can be enhanced.

[0196] When the first resonance space adjustment plate 3911 is bent toward the second resonance space adjustment plate 3912, or the second resonance space adjustment plate 3912 is bent toward the first resonance space adjustment plate 3911, the resonance space can be divided into two. For example, the resonance space can be divided into a first resonance space and a second resonance space.

[0197] The first resonance space may be a portion located between the first front resonance space adjustment plate 3911f and the second front resonance space adjustment plate 3912f in the resonance space.

[0198] The second resonance space may be a portion located between the first rear resonance space adjustment plate 3911r and the second rear resonance space adjustment plate 3912r in the resonance space.

[0199] FIG. 23 is a diagram showing a case according to an embodiment of the present invention.

[0200] Referring to FIG. 23, the cases 3100, 3200, 3300, 3400, 3500, 3600 can include an upper case 3500 and a lower case 3600. The upper case 3500 can connect the upper ends of the first side case 3100 and the second side case 3200. The upper case 3500 can form the upper surface of the resonance unit 3000.

[0201] The lower case 3600 can connect the lower ends of the first side case 3100 and the second side case 3200. The lower case 3600 can face the upper case 3500 below the upper case 3500. The lower case 3600 can form the lower surface of the resonance unit 3000.

[0202] FIG. 24 is a cross-sectional view taken along "D1-D2" of the case shown in FIG. 23. FIG. 25 is a diagram showing a state in which the resonance space adjustment plate shown in FIG. 24 has moved.

[0203] Referring to FIG. 24, the resonance space adjustment plate 3910 can be located on the inner surface of the cases 3100, 3200, 3300, 3400, 3500, 3600. For example, the resonance space adjustment plate 3910 can contact the inner surface of the first side case 3100.

[0204] The resonance space adjustment plate 3910 can form both end portions. For example, the resonance space adjustment plate 3910 can include a first end portion 3910j and a second end portion 3910k. The resonance space adjustment plate 3910 can form a shape that extends from the first end portion 3910j and connects to the second end portion 3910k.

[0205] Referring to FIG. 25, the resonance space adjustment plate 3910 can move on the inner surfaces of the cases 3100, 3200, 3300, 3400, 3500, 3600.

[0206] For example, the first end portion 3910j of the resonance space adjustment plate 3910 can be movably in contact with the inner surface of the first side case 3100. The first side case 3100 with which the first end portion 3910j of the resonance space adjustment plate 3910 is in contact can be referred to as the "first case".

[0207] For example, the second end portion 3910k of the resonance space adjustment plate 3910 can be movably in contact with the inner surface of the lower case 3600. The lower case 3600 with which the second end portion 3910k of the resonance space adjustment plate 3910 is in contact can be referred to as the "second case". The first case and the second case can be connected to each other to form an angle.

[0208] In other words, while the resonance space adjustment plate 3910 is in contact with the inner surfaces of the cases 3100, 3200, 3300, 3400, 3500, 3600, its attitude can be changed with reference to the cases 3100, 3200, 3300, 3400, 3500, 3600. When the resonance space adjustment plate 3910 changes its attitude with reference to the cases 3100, 3200, 3300, 3400, 3500, 3600 while being in contact with the inner surfaces of the cases 3100, 3200, 3300, 3400, 3500, 3600, at least one of the shape and size of the resonance space can be changed. Thereby, the resonance frequency of the resonance unit 3000 can be changed.

[0209] In other examples, the resonance space adjustment plate 3910 can be elastic. For example, the first end 3910j of the resonance space adjustment plate 3910 is fixed to the first side case 3100, and the second end 3910k of the resonance space adjustment plate 3910 can be movably in contact with the inner surface of the lower case 3600. Thereby, at least one of the shape and size of the resonance space can be changed, and the resonance frequency of the resonance unit 3000 can be changed.

[0210] Any of the above-described embodiments or other embodiments of the present invention are not mutually exclusive or distinguishable. In any of the above-described embodiments or other embodiments of the present invention, respective configurations or functions can be used in combination or combined.

[0211] It is apparent to those skilled in the art that the present invention can be embodied in other specific forms without departing from the spirit and essential characteristics of the present invention. The above detailed description should not be construed in a limiting sense in any respect and should be regarded as exemplary. The scope of the present invention should be determined by a reasonable interpretation of the appended claims, and all modifications within the equivalent scope of the present invention are included in the scope of the present invention.

Claims

1. A mount unit for fixing a flow cell, and a resonance unit disposed behind the mount unit and forming a resonance space that is open front and back, wherein the resonance unit includes a case disposed behind the mount unit to form the resonance space, and a resonance space adjustment module located inside the case and adjusting at least one of the shape and size of the resonance space, a particle measurement device.

2. The resonance space adjustment module includes a resonance space adjustment plate movably coupled to the inner surface of the case, The particle measurement device according to claim 1.

3. When the resonance space adjustment plate moves, at least one of the shape and size of the resonance space is adjusted, The particle measurement device according to claim 2.

4. The resonance space adjustment module includes a plate mover fixed to the case and coupled to the resonance space adjustment plate to move the resonance space adjustment plate, The particle measurement device according to claim 2.

5. The plate mover includes a connecting shaft fixed to the case, The plate mover is movably coupled to the connecting shaft, The particle measurement device according to claim 4.

6. The resonance space adjustment plate includes a first resonance space adjustment plate and a second resonance space adjustment plate facing each other, The particle measurement device according to claim 2.

7. The first resonance space adjustment plate and the second resonance space adjustment plate are movable so as to approach and separate from each other, The particle measurement device according to claim 6.

8. At least a part of the resonance space adjustment plate is movable toward the resonance space, The particle measurement device according to claim 2.

9. The resonance space adjustment plate is bendable convexly toward the resonance space, The particle measurement device according to claim 2.

10. The resonance space adjustment plate includes a front resonance space adjustment plate and a rear resonance space adjustment plate connected to each other, The particle measurement device according to claim 9.

11. The resonance space adjustment plate is bendable at the boundary between the front resonance space adjustment plate and the rear resonance space adjustment plate, The particle measurement device according to claim 10.

12. The resonance space adjustment plate is movable along the inner surface of the case, The particle measurement device according to claim 2.

13. The case includes a first case and a second case that are connected to each other to form an angle, one end of the resonance space adjustment plate is movably in contact with the first case, the other end of the resonance space adjustment plate is movably in contact with the second case, The particle measurement device according to claim 12.

14. When the resonance space adjustment plate moves along the inner surface of the case, it changes its attitude with respect to the case, The particle measurement device according to claim 12.

15. The case includes a first case and a second case that are connected to each other to form an angle, one end of the resonance space adjustment plate is fixed to the first case, the other end of the resonance space adjustment plate is movably in contact with the second case, The particle measurement device according to claim 12.

16. The resonance space adjustment plate has elasticity, The particle measurement device according to claim 15.

Images