Rare earth rotating target and its manufacturing method

Abstract

The present invention relates to a rare earth rotary target and its manufacturing method, the rare earth rotary target including a backing tube and at least one rare earth target tube welded to the outside of the backing tube, the backing tube and the rare earth target tube being welded via an intermediate weld layer, the intermediate weld layer including an indium metal welding material and an aluminum sheet disposed therein, the aluminum content of the intermediate weld layer being 3-10 wt.%, the backing tube, the aluminum sheet, and the rare earth target tube being concentric and cylindrical. The technical solution of the present invention is based on the aspects of target welding and welding material alloying, and by adding an aluminum sheet between the weld layers and combining it with a heat treatment process, the melting point of the welding material is increased, thereby achieving the objective of improving the sputtering power density and target utilization rate of the rare earth rotary target, realizing low-temperature welding, and mitigating the oxidation of the rare earth target.

Description

[Technical Field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application is filed based on and claims priority from a Chinese patent application bearing application number 202211099977.4 and filed on September 7, 2022, and the entirety of which is incorporated herein by reference.

[0002] The present invention relates to the technical fields of magnetic materials, storage and electronic information, and more particularly to a rare earth rotating target and a method for manufacturing the same. [Background technology]

[0003] Rotating targets for magnetron sputtering require a target tube and a backing tube welded together via a weld layer. The sputtering power density of the target is closely related to the quality of the weld layer. In conventional technologies, indium is generally used as the welding material. However, since indium has a melting point of only 156.6°C, using a higher power density will cause the welding material to melt and lead to target weld fracture. This also results in the target thinning during the later stage of sputtering, and the melting of the welding material is a key factor limiting the target utilization rate. The use of welding materials with higher melting points, such as tin or indium-tin alloys, can improve sputtering power density. However, high welding temperatures are likely to cause oxidation of the chemically active rare earth target during the welding process, making target welding more difficult. Summary of the Invention [Problem to be solved by the invention]

[0004] Based on the above situation in the prior art, the object of the embodiment of the present invention is to provide a rare earth rotary target and a manufacturing method thereof, which increases the melting point of the welding material by adding an aluminum sheet between the welding layers and combining with a heat treatment process, thereby achieving the objective of improving the sputtering power density and target utilization rate of the rare earth rotary target. [Means for solving the problem]

[0005] In order to achieve the above object, according to one aspect of the present invention, there is provided a rare earth rotating target, the rare earth rotating target including a backing tube and at least one rare earth target tube welded to the outside of the backing tube; The backing tube and the rare earth target tube are welded via an intermediate weld layer, which includes a metallic indium welding material and at least one aluminum sheet disposed in the metallic indium welding material, the aluminum content in the intermediate weld layer being 3 to 10 wt.%, and the backing tube, the aluminum sheet, and the rare earth target tube form a concentric cylindrical structure.

[0006] Furthermore, the rare earth target tube includes a rotating target tube of any one of lanthanum, cerium, praseodymium, neodymium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, lutetium, yttrium, and scandium.

[0007] Furthermore, the thickness of a single aluminum sheet is 0.05 to 0.15 mm.

[0008] According to another aspect of the present invention, there is provided a method for manufacturing the rare earth rotary target according to the first aspect of the present invention, the method comprising the steps of: a step of filling a metallic indium welding material between the backing tube and the rare earth target tube at a preset welding temperature and disposing an aluminum sheet in the metallic indium welding material, or disposing an aluminum sheet in the metallic indium welding material in advance, and then filling a metallic indium welding material with an aluminum sheet disposed between the backing tube and the rare earth target tube, thereby welding the backing tube and the rare earth target tube together to obtain a rare earth rotary target after welding; heat treating the welded rare earth rotating target; and cooling the heat-treated rare earth rotating target to room temperature and cleaning it.

[0009] moreover, The method further includes pre-applying a layer of metallic indium welding material to the aluminum sheet before filling.

[0010] Furthermore, the preset welding temperature is 190 to 230°C.

[0011] Furthermore, the heat treatment a step of cooling the welded rare earth rotating target to room temperature and then cleaning it; The cleaned rare earth rotating target was placed in a vacuum heat treatment furnace and heated for 10 -3 a step of evacuating the air to a vacuum of 0.5 Pa or less; The method includes a step of directly heat-treating the rare earth rotating target or heat-treating it after filling an inert gas, the heat-treating temperature being 140°C to 640°C, and the heat-treating time being 0.5 to 50 hours.

[0012] Furthermore, the heat treatment is a stepwise heat treatment, Heat treatment at 140°C for 0.5 to 1 hour, Heat treatment at 157°C for 1 to 3 hours, Heat treatment at 200°C for 1 to 3 hours, Heat treatment at 250°C for 1 to 3 hours, Heat treatment at 300°C for 1 to 3 hours, Heat treatment at 350°C for 1 to 5 hours. Heat treatment at 400°C for 1 to 5 hours, Heat treatment at 450°C for 1 to 5 hours. Heat treatment at 500°C for 1 to 5 hours. Heat treatment at 550°C for 1 to 5 hours. Heat treatment at 600°C for 1 to 5 hours, and heat treating at 630°C for 1 to 6 hours. [Effects of the Invention]

[0013] In summary, an embodiment of the present invention provides a rare earth rotary target and a manufacturing method thereof, the rare earth rotary target including a backing tube and at least one rare earth target tube welded to the outside of the backing tube, the backing tube and the rare earth target tube being welded via an intermediate weld layer, the intermediate weld layer including an indium metal welding material and at least one aluminum sheet disposed within the indium metal welding material, the aluminum content in the intermediate weld layer being 3-10 wt.%, and the thickness of each aluminum sheet being 0.05-0.15 mm, and the backing tube, aluminum sheet, and rare earth target tube forming a concentric cylindrical structure. The technical solution of the embodiment of the present invention is based on the aspects of target welding and welding material alloying. An aluminum sheet is added between the welding layers, and combined with the heat treatment process, a reasonable thickness is selected to better control the melting point of the welding material, reduce the segregation of the welding material components, and reduce the contamination of the target by the welding material. A stepwise heat treatment is used to melt the welding material without allowing it to flow out, and ensure the uniformity of the welding material. The temperature is increased stepwise so that the indium and aluminum in the welding material gradually form a high-melting point alloy, thereby increasing the melting point of the alloy welding material. This achieves the purpose of improving the sputtering power density and target utilization rate of the rare earth rotating target, realizes low-temperature welding, and alleviates the oxidation of the rare earth target. [Brief explanation of the drawings]

[0014] [Figure 1] 1 is a schematic diagram of the overall structure of a rare earth rotary target provided in an embodiment of the present invention. [Figure 2] 2 is a cross-sectional view of the rare earth rotary target shown in FIG. 1 at a point c. [Figure 3] 1 is a flowchart of a method for manufacturing a rare earth rotary target provided in an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0015] In order to clarify the objectives, technical solutions and advantages of the present invention, the present invention will be described in more detail below with reference to the drawings in conjunction with specific embodiments. It should be understood that these descriptions are merely illustrative and do not limit the scope of the present invention. In addition, in the following description, descriptions of known structures and techniques will be omitted to avoid unnecessary confusion with the concept of the present invention.

[0016] Unless otherwise specified, technical or scientific terms used in one or more embodiments of the present invention have the common meanings understood by those skilled in the art to which this disclosure belongs. The use of words such as "first," "second," and similar terms in one or more embodiments of the present invention does not denote any order, quantity, or importance, but merely serves to distinguish different components. Words such as "comprise" or "comprise" mean that the elements or items appearing before the word cover the elements or items listed thereafter and their equivalents, but do not exclude other elements or items. Words such as "connect" or "connected" are not limited to physical or mechanical connections, but may also include electrical connections, whether direct or indirect. Terms such as "top," "bottom," "left," and "right" are used only to indicate relative positions, and if the absolute positions of the objects being described change, the relative positions may also change accordingly.

[0017] The technical solution of the present invention will be described in detail below with reference to the drawings. An embodiment of the present invention provides a rare earth rotary target. Figure 1 shows a schematic diagram of the overall structure of the rare earth rotary target, which includes a backing tube 1 and at least one rare earth target tube welded to the outside of the backing tube. Figure 1 shows four rare earth target tubes as an example, including rare earth target tube A1, rare earth target tube A2, rare earth target tube A3, and rare earth target tube A4. The rare earth target tubes are joined together, and a certain gap is left at the joint depending on the expansion coefficient.

[0018] FIG. 2 shows a cross-sectional view of the rare earth rotary target at a position c in FIG. 1. As shown in FIG. 2, the backing tube 1 and the rare earth target tube A are welded via an intermediate weld layer, which includes a metal indium welding material 3 and at least one aluminum sheet 2 disposed in the metal indium welding material, and the aluminum content in the intermediate weld layer is 3 to 10 wt. %, and the backing tube 1, the aluminum sheet 2 and the rare earth target tube A form a concentric cylindrical structure. Here, the rare earth target tube A includes a rotating target tube containing any one of lanthanum (La), cerium (Ce), praseodymium (Pr), neodymium (Nd), samarium (Sm), europium (Eu), gadolinium (Gd), terbium (Tb), dysprosium (Dy), holmium (Ho), erbium (Er), thulium (Tm), ytterbium (Yb), lutetium (Lu), scandium (Sc), and yttrium (Y). The thickness of each aluminum sheet 2 is 0.05 to 0.15 mm. This thickness allows for better control of the melting point of the welding material and more uniform composition. If the thickness is too large, the alloying time will be long and the composition will vary significantly. If the thickness is too small, the target composition will be high in the weld layer and the target will be contaminated.

[0019] An embodiment of the present invention further provides a method for manufacturing a rare earth rotation target, where the rare earth rotation target is the rare earth rotation target according to the above embodiment of the present invention. FIG. 3 shows a flowchart of the method for manufacturing the rare earth rotation target, where the method includes the following steps S1 to S3:

[0020] In step S1, at a preset welding temperature of, for example, 190 to 230°C, a metallic indium welding material is filled between the backing tube and the rare earth target tube, and an aluminum sheet is placed in the metallic indium welding material. Alternatively, an aluminum sheet is placed in the metallic indium welding material, and then the metallic indium welding material with the aluminum sheet placed between the backing tube and the rare earth target tube is filled in order to weld the backing tube and the rare earth target tube together, thereby obtaining a rare earth rotating target after welding. To improve the quality of the welded joint, a layer of metallic indium welding material can be applied to the aluminum sheet before filling.

[0021] In S2, the welded rare earth rotary target is heat treated, and the heat treatment includes: a step of cooling the welded rare earth rotating target to room temperature and then cleaning it; The cleaned rare earth rotating target was placed in a vacuum heat treatment furnace and heated for 10 -3 a step of evacuating the air to a vacuum of 0.5 Pa or less; The method includes a step of directly heat-treating the rare earth rotating target or heat-treating the target after filling the inert gas, the heat-treating temperature is 140°C to 640°C, and the heat-treating time is 0.5 to 50 hours. Preferably, the heat-treating is a stepwise heat-retention treatment, Heat treatment at 140°C for 0.5 to 1 hour, Heat treatment at 157°C for 1 to 3 hours, Heat treatment at 200°C for 1 to 3 hours, Heat treatment at 250°C for 1 to 3 hours, Heat treatment at 300°C for 1 to 3 hours, Heat treatment at 350°C for 1 to 5 hours. Heat treatment at 400°C for 1 to 5 hours, Heat treatment at 450°C for 1 to 5 hours. Heat treatment at 500°C for 1 to 5 hours. Heat treatment at 550°C for 1 to 5 hours. Heat treatment at 600°C for 1 to 5 hours, The process involves heat treatment at 630°C for 1 to 6 hours.

[0022] The heat treatment process of this embodiment of the present invention preferably adopts a stepwise heat-retention treatment method, which melts the welding material without causing it to flow out and ensures the uniformity of the welding material, and gradually increases the temperature so that the welding material, such as indium, and aluminum gradually form a high-melting-point alloy.

[0023] In S3, the heat-treated rare earth rotating target is cooled to room temperature and cleaned.

[0024] The rare earth rotating target manufactured by the above method has a welding bonding rate of 95% or more, a melting point of the welding material of 400°C or more, and a sputtering power density of 2-12W / cm2, which is 30% higher than that of pure indium welding. 2 , preferably 6 to 10 W / cm 2 The target usage rate is high at over 88%.

[0025] Specific examples and experimental data are given below.

[0026] Example 1 The rotating target has a total length of 1600 mm and is composed of nine terbium target tubes joined together. The target tubes at both ends are dog-bone shaped and have outer diameters of 165 mm and 158 mm, respectively. The outer diameter of the middle region is 158 mm. The gap between the target tube and the backing tube is 1 mm. The aluminum sheet is cylindrical and concentric with the target tube. It consists of two 0.125 mm thick aluminum rings. The aluminum content in the weld layer is 10%. It is welded at 220°C. The welding is completed, and the heat treatment process is: 1) 140℃-0.5h, 2) 157℃-1.5h, 3) 200℃-1.5h, 4) 250℃-1.5h, 5) 300℃-2h, 6) 350℃-3h, 7) 400℃-3h, 8) 450℃-3h, 9) 500℃-3h, 10) 550℃-4h, 11) 600℃-4h, 12) 630℃-4h. The total heat treatment time is 35h, the melting point of the welding material reaches 600℃, the welding bonding rate is >95%, and the power of the sputtering target is 5W / cm. 2 The target utilization rate was 90%, the deviation of the aluminum content was ±0.1%, and the Tb content in the weld layer was <10 ppm.

[0027] Example 2 The power of the sputtering target is 8W / cm 2 Other than that, the conditions were the same as in Example 1.

[0028] Example 3 The power of the sputtering target is 10W / cm 2 Other than that, the conditions were the same as in Example 1.

[0029] Example 4 The conditions were the same as in Example 1, except that it consisted of one 0.05 mm and two 0.1 mm aluminum sheets.

[0030] Example 5 The power of the sputtering target is 12 W / cm 2 Other than that, the conditions were the same as in Example 1.

[0031] Example 6 The conditions were the same as in Example 6, except that the target material was dysprosium.

[0032] Example 7 The conditions were the same as in Example 1, except that the target material was gadolinium and consisted of two 0.125 mm aluminum sheets with an aluminum content of 10%.

[0033] Example 8 The conditions were the same as in Example 1, except that the target material was yttrium and consisted of one 0.05 mm and two 0.1 mm aluminum sheets.

[0034] Example 9 The rotating target has a total length of 1500 mm and is composed of six connected scandium target tubes. The target tubes at both ends are dog-bone shaped and have outer diameters of 112 mm and 108 mm, respectively. The outer diameter of the middle region is 108 mm. The gap between the target tube and the backing tube is 1 mm. The aluminum sheets are cylindrical and concentric with the target tubes. One aluminum sheet is 0.05 mm thick and one is 0.08 mm thick. The weld consisted of an aluminum ring, the aluminum content in the weld layer was 5%, and the welding was completed at 210°C. The heat treatment process was as follows: 1) 140°C-0.5h, 2) 157°C-1.5h, 3) 200°C-1.5h, 4) 250°C-1.5h, 5) 300°C-2h, 6) 350°C-3h, 7) 400°C-3h, 8) 450°C-3h, 9) 500°C-3h, 10) 550°C-4h, 11) 600°C-4h, 12) 630°C-4h.

[0035] Example 10 The rotating target has a total length of 1500 mm and is composed of six ytterbium target tubes joined together. The target tubes at both ends are dog-bone shaped with outer diameters of 112 mm and 108 mm, respectively. The outer diameter of the middle region is 108 mm. The gap between the target tube and the backing tube is 1 mm. The aluminum sheets are cylindrical and concentric with the target tubes. One aluminum sheet is 0.06 mm thick and one is 0.1 mm thick. The weld consisted of an aluminum ring, the aluminum content of the weld layer was 6%, and the welding was completed at 210°C. The heat treatment process was as follows: 1) 140°C-0.5h, 2) 157°C-1.5h, 3) 200°C-1.5h, 4) 250°C-1.5h, 5) 300°C-2h, 6) 350°C-3h, 7) 400°C-3h, 8) 450°C-3h, 9) 500°C-3h, 10) 550°C-4h, 11) 600°C-4h, 12) 630°C-4h.

[0036] Example 11 The rotating target has a total length of 1500 mm and is made up of six lantern target tubes joined together. The target tubes at both ends are dog-bone shaped, with outer diameters of 112 mm and 108 mm, respectively. The outer diameter of the middle region is 108 mm. The gap between the target tube and the backing tube is 1 mm. The aluminum sheets are cylindrical and concentric with the target tubes. One sheet is 0.05 mm thick, one is 0.06 mm thick, and one is 0.1 mm thick. The aluminum ring was used, and the aluminum content in the weld layer was 8%. The welding was completed at 210°C. The heat treatment process was as follows: 1) 140°C-0.5h, 2) 157°C-1.5h, 3) 200°C-1.5h, 4) 250°C-1.5h, 5) 300°C-2h, 6) 350°C-3h, 7) 400°C-3h, 8) 450°C-3h, 9) 500°C-3h, 10) 550°C-4h, 11) 600°C-4h, 12) 630°C-4h.

[0037] Example 12 The rotating target has a total length of 1500 mm and is composed of six joined holmium target tubes. The target tubes at both ends are dog-bone shaped and have outer diameters of 112 mm and 108 mm, respectively. The outer diameter of the middle region is 108 mm. The gap between the target tube and the backing tube is 1 mm. The aluminum sheets are cylindrical and concentric with the target tubes. One 0.05 mm thick aluminum sheet and two 0.1 mm thick aluminum sheets are used. The weld consisted of an aluminum ring, the aluminum content in the weld layer was 10%, and the welding was completed at 210°C. The heat treatment process was as follows: 1) 140°C-0.5h, 2) 157°C-1.5h, 3) 200°C-1.5h, 4) 250°C-1.5h, 5) 300°C-2h, 6) 350°C-3h, 7) 400°C-3h, 8) 450°C-3h, 9) 500°C-3h, 10) 550°C-4h, 11) 600°C-4h, 12) 630°Ch.

[0038] Example 13 The rotating target has a total length of 1500 mm and is made up of seven joined erbium target tubes. The target tubes at both ends are dog-bone shaped with outer diameters of 112 mm and 108 mm, respectively. The outer diameter of the middle region is 108 mm. The gap between the target tube and the backing tube is 1 mm. The aluminum sheets are cylindrical and concentric with the target tubes. One sheet is 0.07 mm thick, one is 0.08 mm thick, and one is 0.1 mm thick. The aluminum ring was used, and the aluminum content in the weld layer was 10%. The welding was completed at 210°C. The heat treatment process was as follows: 1) 140°C-0.5h, 2) 157°C-1.5h, 3) 200°C-1.5h, 4) 250°C-1.5h, 5) 300°C-2h, 6) 350°C-3h, 7) 400°C-3h, 8) 450°C-3h, 9) 500°C-3h, 10) 550°C-4h, 11) 600°C-4h, 12) 630°C-4h.

[0039] Example 14 The rotating target has a total length of 1500 mm and is composed of eight joined samarium target tubes. The target tubes at both ends are dog-bone shaped and have outer diameters of 112 mm and 108 mm, respectively. The outer diameter of the middle region is 108 mm. The gap between the target tube and the backing tube is 1 mm. The aluminum sheets are cylindrical and concentric with the target tubes. One aluminum sheet is 0.1 mm thick and one is 0.15 mm thick. The weld consisted of a metal ring, the aluminum content in the weld layer was 10%, and the welding was completed at 210°C. The heat treatment process was as follows: 1) 140°C-0.5h, 2) 157°C-1.5h, 3) 200°C-1.5h, 4) 250°C-1.5h, 5) 300°C-2h, 6) 350°C-3h, 7) 400°C-3h, 8) 450°C-3h, 9) 500°C-3h, 10) 550°C-4h, 11) 600°C-4h, 12) 630°C-4h.

[0040] (Comparative Example 1) The rotating target has a total length of 1600 mm and is composed of nine terbium target tubes joined together. The outer diameters of the dog-bone sections A4 and A1 are 165 mm and 158 mm, respectively, and the outer diameter of the middle section is 158 mm. The gap between the target tube and the backing tube is 1 mm. There is no aluminum sheet, and the aluminum content in the weld layer is 0%. The welding is completed at 220°C, the welding bonding rate is >95%, and the power of the sputtering target is 5 W / cm. 2 The target utilization rate was 82%.

[0041] (Comparative Example 2) The power of the sputtering target is 6W / cm 2 Other than that, the conditions were the same as in Comparative Example 1, and the target suffered a weld fracture during the coating process.

[0042] (Comparative Example 3) The conditions were the same as in Example 1, except that it consisted of two 0.02 mm, two 0.03 mm and one 0.15 mm aluminum sheets.

[0043] Comparative Example 4 The conditions were the same as in Example 1, except that it consisted of one 0.25 mm aluminum sheet.

[0044] (Comparative Example 5) The target structure was the same as in Example 1, but the heat treatment process was different. The heat treatment processes were: 1) 140°C-0.5h, 2) 157°C-3h, 3) 200°C-4h, 4) 300°C-5h, 5) 400°C-10h, 6) 500°C-10h, and 7) 630°C-17.5h, with a total heat treatment time of 50h.

[0045] Example 6 The conditions were the same as in Example 1 except that the heat treatment process was at 630°C for 17.5 hours.

[0046] (Comparative Example 7) The target structure was the same as in Example 1, consisting of a single 0.13 mm thick aluminum sheet, with an aluminum content of 5% in the weld layer, and the heat treatment processes were: 1) 140°C-0.5h, 2) 157°C-1.5h, 3) 200°C-1.5h, 4) 250°C-1.5h, 5) 300°C-2h, 6) 350°C-3h, 7) 400°C-3h, 8) 450°C-3h, and 9) 480°C-3h.

[0047] (Comparative Example 8) The conditions were the same as in Example 1, except that the sample consisted of one 0.05 mm aluminum sheet, the aluminum content was 2%, and the heat treatment times were 1) 140°C-0.5h, 2) 157°C-3h, 3) 200°C-4h, 4) 300°C-5h, and 5) 330°C-10h.

[0048] (Comparative Example 9) The conditions were the same as in Example 1, except that it consisted of one 0.07 mm, one 0.1 mm and two 0.15 mm aluminum sheets, with an aluminum content of 15%.

[0049] (Comparative Example 10) The rotating target has a total length of 1600 mm and is composed of nine terbium target tubes joined together. The two end target tubes are dog-bone shaped with outer diameters of 165 mm and 158 mm, respectively, and the outer diameter of the middle region is 158 mm. The gap between the target tube and the backing tube is 1 mm. The aluminum sheet is columnar and concentric with the target tube. It is welded using a welding material with an aluminum content of 10%. The welding is completed at 650°C, and the power of the sputtering target is 5 W / cm. 2 It was.

[0050] Tables 1 and 2 show a comparison of the performance parameters of the above-mentioned Examples and Comparative Examples.

[0051] JPEG2025526963000002.jpg129170JPEG2025526963000003.jpg155170

[0052] JPEG2025526963000004.jpg93170JPEG2025526963000005.jpg35170

[0053] As can be seen from Tables 1 and 2 above, the rare earth rotary target and its manufacturing method provided in the technical solutions of the embodiments of the present invention can improve the power of the sputtering target and the target utilization rate by adding an aluminum sheet to the low-temperature welding process and combining it with the heat treatment process.

[0054] (1) Compared to welding using pure indium, adding an aluminum sheet (aluminum content 3-10%) to the weld layer improved the target utilization rate, increasing it from 82% to over 89%.

[0055] (2) Compared with welding using pure indium, adding aluminum sheet to the welding layer significantly increases the melting point of the welding material, raising it to above 400°C. This is beneficial for improving the power of the sputtering target, ensuring that the target will not be welded and broken, i.e., the welding material will not melt, the backing tube and the target tube will not slide, and the target power will not exceed 5W / cm. 2 from 6 to 12 W / cm 2 improved to.

[0056] (3) The rational heat treatment process can shorten the total heat treatment time, bring the melting point of the welding material closer to the theoretical melting point, reduce contamination of the target by the welding material, and prevent later weld cracking. It also solves the problems of melting of the welding material, target contamination, and high target components in the weld layer caused by the one-stage heating heat treatment process.

[0057] (4) By controlling the thickness of each aluminum sheet to 0.05-0.15 mm, it is possible to improve the target utilization rate, increase the sputtering power density, and reduce contamination of the target by the welding layer. If the thickness of a single aluminum sheet is too thick, it becomes difficult to control the melting point of the welding material. In this case, by selecting a combination of multiple aluminum sheets, it is possible to better control the melting point of the welding material.

[0058] (5) Compared with the conventional indium welding temperature of 220°C, if a 600°C welding material is used, the welding temperature must be above 600°C. The embodiment provided in the present invention can achieve welding at 220°C, and the melting point of the welding material can be increased to 600°C through processing, which reduces the difficulty of welding, reduces contamination of the target by the welding material, and improves the power density of target sputtering.

[0059] In summary, the embodiments of the present invention relate to a rare earth rotary target and a manufacturing method thereof, which is applicable to rare earth metal and alloy targets used in grain boundary diffusion, memory, electronic information, etc., through magnetic material coating. The rare earth rotary target includes a backing tube and at least one rare earth target tube welded to the outside of the backing tube. The backing tube and the rare earth target tube are welded via an intermediate weld layer. The intermediate weld layer includes a metallic indium welding material and at least one aluminum sheet disposed in the metallic indium welding material, and the aluminum content in the intermediate weld layer is 3-10 wt.%, and the backing tube, aluminum sheet and rare earth target tube form a concentric cylindrical structure. The technical solution of the embodiment of the present invention is based on the aspects of target welding and welding material alloying, and involves adding an aluminum sheet between the welding layers and combining it with a heat treatment process to increase the melting point of the welding material, raising the melting point of the welding material from 156.6°C to above 400°C, which can significantly improve the power density of the sputtering target, achieve the goal of improving the sputtering power density and target utilization rate of the rare earth rotating target, realize low-temperature welding, and mitigate the oxidation of the rare earth target.

[0060] It should be understood that the above-mentioned specific embodiments of the present invention are merely for illustrative purposes of explaining and interpreting the principles of the present invention, and are not intended to limit the present invention. Therefore, any modifications, equivalent replacements, improvements, etc. made without departing from the spirit and scope of the present invention should fall within the scope of protection of the present invention. Furthermore, the appended claims of the present invention are intended to cover all changes and modifications that fall within the scope and boundaries of the appended claims, or equivalent forms of these scopes and boundaries.

Claims

1. a backing tube and at least one rare earth target tube welded to the exterior of the backing tube; the backing tube and the rare earth target tube are welded via an intermediate weld layer, the intermediate weld layer including a metallic indium welding material and at least one aluminum sheet disposed in the metallic indium welding material, the aluminum content in the intermediate weld layer being 3 to 10 wt.%, and the backing tube, the aluminum sheet, and the rare earth target tube having a concentric cylindrical structure.

2. 2. The rare earth rotating target according to claim 1, wherein the rare earth target tube comprises a rotating target tube of any one of lanthanum, cerium, praseodymium, neodymium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, lutetium, yttrium, and scandium.

3. 2. The rare earth rotary target according to claim 1, wherein the thickness of each aluminum sheet is 0.05 to 0.15 mm.

4. a step of filling a metallic indium welding material between the backing tube and the rare earth target tube at a preset welding temperature and disposing an aluminum sheet in the metallic indium welding material, or disposing an aluminum sheet in the metallic indium welding material in advance, and then filling a metallic indium welding material with an aluminum sheet disposed between the backing tube and the rare earth target tube, thereby welding the backing tube and the rare earth target tube together to obtain a rare earth rotary target after welding; heat treating the welded rare earth rotating target; The method for manufacturing a rare earth rotation target according to any one of claims 1 to 3, further comprising the step of cooling the heat-treated rare earth rotation target to room temperature and cleaning it.

5. The method of claim 4 further comprising the step of pre-applying a layer of metallic indium welding material to the aluminum sheet prior to filling.

6. 5. The manufacturing method according to claim 4, wherein the preset welding temperature is 190 to 230°C.

7. The heat treatment is a step of cooling the welded rare earth rotating target to room temperature and then cleaning it; The cleaned rare earth rotating target was placed in a vacuum heat treatment furnace and heated for 10 －３ a step of evacuating the chamber to a pressure of 0.2 Pa or less; The manufacturing method according to claim 4, further comprising the steps of directly heat-treating the rare earth rotating target or heat-treating it after filling it with an inert gas, the heat-treating temperature is 140°C to 640°C, and the heat-treating time is 0.5 to 50 hours; The heat treatment is a stepwise heat treatment, Heat treatment at 140°C for 0.5 to 1 hour; Heat treatment at 157°C for 1 to 3 hours; Heat treatment at 200°C for 1 to 3 hours; Heat treatment at 250°C for 1 to 3 hours; Heat treatment at 300°C for 1 to 3 hours, Heat treatment at 350°C for 1 to 5 hours, Heat treatment at 400°C for 1 to 5 hours, Heat treatment at 450°C for 1 to 5 hours; Heat treatment at 500°C for 1 to 5 hours; Heat treatment at 550°C for 1 to 5 hours; Heat treatment at 600°C for 1 to 5 hours; and heat treating the resulting mixture at 630° C. for 1 to 6 hours.

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