Extreme ultraviolet inner pod distribution support

Abstract

The device includes an inner container having a base plate and a cover, an outer container having a pod dome and a pod door, and a first set of pins and a second set of pins disposed on the pod door. The pod door has a locked state and an unlocked state. The first set of pins and the second set of pins are configured to support the base plate. When the pod door is in the unlocked state and the first set of pins contacts the base plate, a clearance is formed between the second set of pins and the base plate. When the pod door is in the locked state, the first set of pins and the second set of pins contact the base plate.

Description

[Technical Field]

[0001] The present disclosure relates generally to substrate containers, such as reticle pods used for reticles. More specifically, the present disclosure relates to reticle pods (e.g., extreme ultraviolet (EUV) reticle pods) having distribution supports for their inner pods, and methods for manufacturing the reticle pods. [Background technology]

[0002] Reticle pods are used to house reticles, such as photolithography masks, used during semiconductor processing, such as EUV processing. Reticle pods can be used to store and transport reticles. Reticle pods can include inner pods that are handled and manipulated by one or more tools during processing. The inner pod of a reticle pod includes a base plate and a cover that contains the reticle and protects the reticle from contamination or physical damage during transportation, storage, and processing. Reticle pods include, for example, EUV pods for use in EUV photolithography tools. Reticle pods can include an outer pod with a pod door and a pod dome that contains the inner pod.

[0003] overview The present disclosure relates generally to substrate containers, such as reticle pods for use with reticles. More specifically, the present disclosure relates to reticle pods having distribution supports for inner pods of reticle pods, such as extreme ultraviolet (EUV) reticle pods, and methods for manufacturing the reticle pods.

[0004] In a reticle pod, an inner pod may be clamped within an outer pod for shipping and transport within a manufacturing facility. Cover clamps on the outer pod may be applied at locations around the four corners of the inner pod. Support for the inner pod against the base plate may be at multiple points on the underside of the base plate, called pins (e.g., dynamic coupling (KC) pins). Differences in support and / or clamping locations from the cover to the inner pod's base plate may create a high pressure area above at least one of the KC pins and localized deformation of the inner pod. Such high pressure and deformation may accelerate wear between the cover and the inner pod's base plate.

[0005] It will be appreciated that the grooves of the KC pins that interface with the internal pod baseplate may be specified by SEMI (an industry association that includes companies involved in the electronics design and manufacturing supply chain), ASML (Advanced Semiconductor Materials Lithography), and RPDM (Reticle Pod Design Manual) for proper interfacing with various tools in the fab (i.e., microchip manufacturing plant). It is also important to have precise positional control of the internal pod to properly interface with the internal pod and, in some cases, to allow for the reticle to be placed on the internal pod baseplate. Other pins (e.g., safety catch pins) may be intentionally left with clearance from the baseplate to minimize tilt of the safety catch pins during loading and not interfere with the precise alignment of the internal pod on the KC pins.

[0006] The embodiments disclosed herein allow for the provision of a compliant KC pin, such that the majority of support can be provided by the safety catch pin when the outer pod clamps the inner pod. For example, the embodiments disclosed herein allow for the provision of a compliant pod door housing in the thickness or height direction and / or for the provision of a spring-loaded KC pin. The embodiments disclosed herein allow for the provision of an activated or actuated safety catch pin that can be driven inward (i.e., toward the base plate) when the pod door is latched or locked (under load). The safety catch pin can be driven, for example, by the pod door's latch cam and / or latch arm.

[0007] In one embodiment, the apparatus includes an inner container having a base plate and a cover, an outer container having a pod dome and a pod door, and a first set of pins and a second set of pins disposed on the pod door. The pod door has a locked state and an unlocked state. The first set of pins and the second set of pins are configured to support the base plate. When the pod door is in the unlocked state and the first set of pins contacts the base plate, a clearance is formed between the second set of pins and the base plate. When the pod door is in the locked state, the first set of pins and the second set of pins contact the base plate.

[0008] In some embodiments, the outer container includes a clamping mechanism, and when the pod door is in a locked state, the clamping force exerted by the clamping mechanism on the cover is not aligned with a first set of pins in the height direction of the inner container.

[0009] In some embodiments, the clearance is in the range of 0.1 millimeters to 0.2 millimeters, or in the range of about 0.1 millimeters to about 0.2 millimeters.

[0010] In some embodiments, at least one pin in the first set of pins is compliant along the height of the inner container.

[0011] In one embodiment, at least one pin is a spring-loaded pin.

[0012] In some embodiments, the pod door includes a compliant base for supporting at least one pin.

[0013] In one embodiment, the second set of pins is configured to activate when the pod door transitions from the unlocked state to the locked state, and when the second set of pins is activated, each pin in the second set of pins is pushed toward and contacts the base plate.

[0014] In one embodiment, the pod door includes a latch arm that pushes the second set of pins toward the base plate when the pod door transitions from the unlocked state to the locked state, causing the second set of pins to contact the base plate.

[0015] In one embodiment, the pod door includes a door cam that drives the second set of pins toward the base plate when the pod door transitions from the unlocked state to the locked state, causing the second set of pins to contact the base plate.

[0016] In some embodiments, the apparatus further comprises a support pin disposed on the pod door.

[0017] In one embodiment, an apparatus includes an inner container having a base plate and a cover, an outer container having a pod dome and a pod door, and a first set of pins and a second set of pins disposed on the pod door. The pod door has a locked state and an unlocked state. The first set of pins and the second set of pins are configured to support the base plate. A method of manufacturing the apparatus includes manufacturing the first set of pins and the second set of pins such that when the pod door is in the unlocked state and the first set of pins contact the base plate, a clearance is formed between the second set of pins and the base plate, and such that when the pod door is in the locked state, the first set of pins and the second set of pins contact the base plate.

[0018] In one embodiment, the method further includes manufacturing a clamping mechanism on the outer container such that when the pod door is in a locked state, the clamping force applied from the clamping mechanism on the cover is not aligned with a first set of pins in the height direction of the inner container.

[0019] In some embodiments, the clearance is in the range of 0.1 millimeters to 0.2 millimeters, or in the range of about 0.1 millimeters to about 0.2 millimeters.

[0020] In one embodiment, the method includes manufacturing at least one pin of the first set of pins such that the at least one pin is compliant along the height of the inner container.

[0021] In one embodiment, at least one pin is a spring-loaded pin.

[0022] In one embodiment, the method includes fabricating a compliant base for the pod door to support at least one pin.

[0023] In one embodiment, the method includes fabricating a second set of pins that are actuated when the pod door transitions from the unlocked state to the locked state, such that when the second set of pins is actuated, each pin in the second set of pins is pushed toward and contacts the base plate.

[0024] In one embodiment, the method includes manufacturing a latch arm of the pod door such that when the pod door transitions from an unlocked state to a locked state, the latch arm pushes the second set of pins toward the base plate, causing the second set of pins to contact the base plate.

[0025] In one embodiment, the method includes manufacturing a door cam for the pod door such that when the pod door is in a locked state, the door cam drives the second set of pins toward the base plate, thereby causing the second set of pins to contact the base plate.

[0026] In some embodiments, the method includes manufacturing a support pin disposed on the pod door.

[0027] Reference is made to the accompanying drawings which form a part of this disclosure and which show by way of illustration embodiments in which the systems and methods described herein may be practiced. [Brief explanation of the drawings]

[0028] [Figure 1] FIG. 1 is a perspective view of a reticle pod according to an embodiment. [Figure 2A] FIG. 1 is a front perspective view of a portion of a reticle pod, according to an embodiment. [Figure 2B] 2B is a front left perspective view of the reticle pod of FIG. 2A according to an embodiment. [Figure 3] FIG. 10 is a top view of a pod door of an external pod, according to an embodiment. [Figure 4A] FIG. 1 is a cross-sectional perspective view of a dynamic coupling pin according to an embodiment. [Figure 4B] FIG. 4B is a perspective view of the dynamic coupling pin of FIG. 4A according to an embodiment. [Figure 5] 1 is a cross-sectional view of a reticle pod according to an embodiment. [Figure 6] FIG. 10 is an exploded view of a portion of a pod door according to an embodiment.

[0029] Like numbers refer to like parts throughout.

[0030] Detailed Description The present disclosure relates generally to substrate containers, such as reticle pods used for reticles. More specifically, the present disclosure relates to a reticle pod (e.g., an extreme ultraviolet (EUV) reticle pod) having distribution support for an inner pod, and a method for manufacturing the reticle pod.

[0031] It will be understood that the EUV inner pod can be supported inside the EUV outer pod by multiple KC pins (e.g., three KC pins). The embodiments described and referenced herein are not limited to the number of pins described. That is, the number of pins described and referenced herein is provided for illustrative purposes only and is not intended to be limiting. The physics of these coupling systems have supports in three positions that position the supports (which may not be aligned with the clamps required for the reticle), with the outer pod positions typically being used. Specifically, the KC pins at the "rear" of the inner or outer pod are in the center of the base plate, and the cover clamps are at the corners. This can not only place high pressure on the rear KC pins, but can also cause deformation that causes sliding movement between the cover and base plate.

[0032] The embodiments disclosed herein can provide a compliant rear KC pin structure that allows the inner pod to lower while clamping the outer pod and be supported at the corners by additional support features (e.g., safety catch pins). The embodiments disclosed herein can also allow the additional support features to rise to support the inner pod when the outer pod is latched, equalizing pressure on the inner pod. A compliant (e.g., spring-loaded) KC pin structure can provide distributed support for the inner pod. It will be appreciated that if the KC pin is a spring-loaded pin, it may need to be designed to have a firm stop when not compressed by clamping the outer pod to maintain positional accuracy.

[0033] It will be understood that the term "pin," as defined herein, may refer to any suitable support mechanism, including, but not limited to, pins, pads, posts, ribs, walls, etc.

[0034] Specific embodiments of the present disclosure are described herein with reference to the accompanying drawings. However, it should be understood that the disclosed embodiments are merely examples of the disclosure, which may be embodied in various forms. Well-known functions or structures have not been described in detail to avoid unnecessarily obscuring the present disclosure. Therefore, specific structural and functional details disclosed herein should not be construed as limiting, but merely as a basis for the claims and as a representative basis for teaching those skilled in the art how to variously use the present disclosure in virtually any appropriately detailed structure. In the present specification and drawings, like reference numerals represent elements that can perform the same, similar, or equivalent functions.

[0035] The scope of the disclosure should be determined by the appended claims and their legal equivalents, rather than by the examples described herein. For example, the steps recited in any method claim may be performed in any order and are not limited to the order presented in the claims. Further, no element is essential to the practice of the present disclosure unless specifically described herein as "critical" or "essential."

[0036] Some embodiments of the present application have been described in detail with reference to the accompanying drawings, so that those skilled in the art can easily understand the advantages and features of the present application. Terms such as "near," "far," "top," "bottom," "left," and "right" used in the present application are defined according to a typical observation angle of a person skilled in the art and for the sake of convenience. These terms are not limited to a specific direction.

[0037] 1 is a perspective view of a reticle pod 100 according to one embodiment. Reticle pod 100 includes inner pods (130 and 140) and outer pods (110 and 120). Reticle pod 100 may be, for example, but not limited to, a reticle pod for EUV processing of photolithography masks, etc. In one embodiment, reticle pod 100 has a length direction (X-direction), a width direction (Y-direction), and a thickness or height direction (Z-direction).

[0038] The internal pods (130 and 140) have an internal space with a reticle receiving portion for receiving a reticle 150. The internal pods (130 and 140) include a cover 130 and a base plate 140. The cover 130 and the base plate 140 are configured to be coupled to one another. When coupled together, the cover 130 and the base plate 140 define an internal space sized and shaped to receive the reticle 150. The reticle 150 may be, but is not limited to, a photolithography mask (such as to be used in EUV processing).

[0039] The external pods (110 and 120) include a pod dome 110 and a pod door 120. The external pods (110 and 120) are configured to house the internal pods (130 and 140) within an interior space defined by the pod dome 110 and the pod door 120. The pod dome 110 may be secured to the pod door 120 to enclose the interior space and house the internal pods (130 and 140), for example, during shipping and handling of the reticle pod 100. The pod dome 110 and the pod door 120 may each include or be made entirely of one or more polymeric materials or any other suitable materials.

[0040] Figure 2A is a front side perspective view of a portion of a reticle pod 200 according to one embodiment. Figure 2B is a front left perspective view of the reticle pod 200 of Figure 2A according to one embodiment.

[0041] As shown in FIGS. 2A and 2B , the reticle pod 200 includes an inner pod and an outer pod. The inner pods (130 and 140) include a cover 130 and a base plate 140. The interior space of the inner pods (130 and 140) is enclosed (e.g., closed) by placing the cover 130 on the base plate 140. The cover 130 directly contacts the base plate 140. The inner pods (130 and 140) can be opened by moving the cover 130 away from the base plate 140 (e.g., by moving the cover 130 upward in the Z direction). For example, an external tool (e.g., an automated arm) can open the inner pods (130 and 140) to access the reticle storage compartment and remove the reticle (e.g., 150 in FIG. 1 ).

[0042] The external pod includes a pod dome (not shown, see 110 in FIG. 1 ) and a pod door 120. The external pod may be configured to house the internal pods (130 and 140) within an interior space defined by the pod dome and the pod door 120. The pod door 120 may be in a locked (e.g., latched) state and an unlocked (e.g., unlatched) state. When the pod door 120 is in the locked state, the pod door 120 is locked (e.g., latched, which occurs when a load or clamp pressure is applied to the cover 130), and the pod dome may be secured to the pod door 120 to enclose the interior space and house the internal pods (130 and 140), for example, during shipping and handling of the reticle pod 200. When the pod door 120 is in the unlocked state, the pod door 120 is unlocked (e.g., unlatched), and the pod dome may be unlocked from the pod door 120.

[0043] The internal pods (130 and 140) and / or the base plate 140 may be supported by the pod door 120. A first set of pins (125, 127, 129, see also FIG. 3 ), such as dynamic coupling (KC) pins, may be disposed on the pod door 120 to support the internal pods (130 and 140) and / or the base plate 140. That is, the support of the internal pods (130 and 140) to the base plate 140 may be at points (e.g., three or any suitable number) on the underside of the base plate, called KC pins (125, 127, 129). A second set of pins (121 and 123), such as safety catch pins, may also be disposed on the pod door 120. The second set of pins (121 and 123) may also be configured to support the inner pods (130 and 140) and / or the base plate 140, for example, when the pod door 120 is in the locked state.

[0044] 2A , when the pod door 120 is in the unlocked state, each of the KC pins (125, 127, 129) contacts the base plate, forming a clearance C between each of the safety catch pins (121 and 123) and the base plate 140. In one embodiment, the clearance C is in the range of 0.1 millimeters to 0.2 millimeters, or in the range of about 0.1 millimeters to about 0.2 millimeters. It will be appreciated that the weight of the inner pods (130 and 140) is typically in the range of 1 pound to 1.5 pounds, or in the range of about 1 pound to about 1.5 pounds, and that when the pod door 120 is in the unlocked state, the pressure due to the weight of the inner pods (130 and 140) may not reduce the clearance C.

[0045] It will also be appreciated that when the pod door 120 is in the unlocked state, the clearance C between the safety catch pins (121 and 123) and the base plate 140 can serve as an indicator of whether the KC pins (125, 127, 129) are correctly positioned, for example, by verifying that there is no contact between the base plate 140 and the safety catch pins (121 and 123). For the KC pin (125, 127, 129) alignment to function properly, the base plate 140 must be in direct and complete contact with each of the KC pins (125, 127, 129) when the pod door 120 is in the unlocked state. If the base plate 140 is in direct contact with the safety catch pins (121 and 123) when the pod door 120 is in the unlocked state, this may indicate that the base plate 140 is not correctly centered. That is, when the pod door 120 is in an unlocked state, in order for the KC pins (125, 127, 129) to function properly with respect to their positional characteristics and / or accuracy, the safety catch pins (121 and 123) must be in a clearance state with respect to the base plate 140. In other words, the safety catch pins (121, 123) are intentionally in a clearance state so that the safety catch pins (121, 123) do not interfere with the precise alignment of the inner pods (130, 140) on the KC pins (125, 127, 129).

[0046] When the pod door 120 is in the locked state, the inner pods (130 and 140) can be clamped to the outer pods (110, 120) for shipping and fab transport. As shown as block arrows in FIG. 2B, the cover clamps from the outer pods (110, 120) can be positioned at the four corners of the inner pods (130 and 140). Reticle clamps are shown as vertical arrows near the cover clamps. Filter inlets (or purge inlets) (122, 124) can be located on, within, or through the pod door 120. When the outer pods (110, 120) clamp the inner pods (130, 140) while clamping the outer pods (110, 120), for example, when the pod door 120 transitions from an unlocked state to a locked state, the inner pods (130, 140) move downward (e.g., in the Z direction) and may be supported by additional support features (e.g., safety catch pins (121, 123)). That is, when the pod door 120 is in the locked state, both the KC pins (125, 127, 129) and the safety catch pins (121, 123) are in direct and complete contact with the base plate 140. In one embodiment, the clamping positions (i.e., each block arrow in FIG. 2B ) may generate 7 pounds of force, or approximately 7 pounds of force, at each corner of the inner pods (130, 140). It will be appreciated that the KC pins (125, 127, 129) may be designed to have a firm stop when not compressed by the external pod clamp to maintain positional accuracy.

[0047] 3 is a top view of the pod door 120 of an external pod according to one embodiment. KC pins (125, 127, 129), safety catch pins (121, 123), and filter inlets (122, 124) are located on the pod door 120. It will be understood that the embodiments described and referenced herein are not limited to the number and locations of the pins and / or inlets described. That is, the number and locations of the pins and / or inlets described and referenced herein are provided for illustrative purposes only and are not intended to be limiting.

[0048] 3, the rear KC pin 125 is located near the bottom of the pod door 120 in plan view, near or above the center line L of the pod door 120. The front KC pins (127, 129) are located near the top of the pod door 120 in plan view, and are symmetrically located along the center line L. The safety catch pins (121, 123) are located near the bottom of the pod door 120 in plan view, and are symmetrically located along the center line L. The filter inlets (122, 124) are located near the bottom and near the sides of the pod door 120 in plan view, and are symmetrically located along the center line L. The rear KC pin 125 and the safety catch pins (121, 123) can be substantially aligned with each other in the X direction.

[0049] In some embodiments (see, e.g., FIGS. 2B and 3 ), when the pod door 120 is in the locked state, the clamping force (see, e.g., the Z-direction block arrows in FIG. 2B ) applied to the cover 130 from the clamping mechanism (e.g., the cover clamp of the outer pod (110, 120) or the like) is misaligned in the Z direction with the KC pins (125, 127, 129). The difference between the support position (from the KC pins) and the clamping position (see, e.g., the block arrows in FIG. 2B ) from the cover 130 to the base plate 140 can create a high-pressure area at least above the rear KC pin 125, as well as localized deformation. Such high pressure and deformation can result in accelerated wear between the cover 130 and the base plate 140. The embodiments disclosed herein can help distribute such pressure to reduce or spread wear from a particular location (such as the rear KC pin 125 or other KC pins) to other locations, reducing the aggressiveness or severity of wear at a particular location that a user may perceive or be concerned about.

[0050] Figure 4A is a cross-sectional perspective view of an embodiment of a KC pin 400. Figure 4B is a perspective view of an embodiment of the KC pin 400 of Figure 4A. The KC pin 400 can be any of the KC pins (125, 127, 129) of Figures 2A-3.

[0051] It will be understood that the embodiments described and referenced herein are not limited to the KC pin structures and implementations described herein, i.e., the KC pin structures and implementations described and referenced herein are provided for illustrative purposes only and are not intended to be limiting.

[0052] In some embodiments, the KC pin 400 may be a spring-loaded pin. As shown in Figures 4A and 4B, the KC pin 400 may include a cap 410, a compressible member (e.g., a wave washer, spring, etc.) 420, and a body 430. The body 430 includes a tip 432, a shoulder 434, and an end 436. The tip 432 may be received in a recess in the cap 410. The wave washer 420 may be positioned on the shoulder 434 and surround the tip 432 to support the tip 432.

[0053] In certain embodiments, the cap 410 may be made of a polymer (e.g., polyethylene, etc.) or any suitable material(s). The wave washer 420 may be made of stainless steel or any suitable material. The cap 410 may slide over the tip 432. It will be appreciated that the tip 432 (together with the wave washer 420) may be configured to be compliant in the Z direction while maintaining lateral stiffness. The KC pin 400 may be compliant in the Z direction. When the outer pod (110, 120) tightens around the cover 130 of the inner pod (130, 140), for example, when the pod door 120 transitions from an unlocked state to a locked state, the KC pin 400 can be depressed (e.g., by a base plate on the cap 410) a certain distance (e.g., in the range of 0.1 millimeters to 0.2 millimeters, or in the range of about 0.1 millimeters to about 0.2 millimeters) under a certain force or load (e.g., in the range of 4 pounds to 5 pounds, or in the range of about 4 pounds to about 5 pounds). 2A, it will be understood that when the pod door 120 is in the locked state, both the KC pins (125, 127, 129) and the safety catch pins (121, 123) are in direct and complete contact with the base plate 140, thereby distributing a clamping force or pressure (7 pounds, or approximately 7 pounds, at each clamp position) from the base plate 140 to the KC pins (125, 127, 129) and also to the safety catch pins (121, 123). That is, at the rear end of the pod door 120, the safety catch pins (121, 123) and the rear KC pin 125 can provide support to resist the clamping pressure (e.g., 14 pounds, or approximately 14 pounds, at the rear end of the pod door 120).

[0054] When the pod door 120 transitions from a locked state to an unlocked state, the wave washer 420 on the shoulder portion 434 of the KC pin 400 can push the cap 410 back a certain distance (e.g., in the range of 0.1 millimeters to 0.2 millimeters, or in the range of about 0.1 millimeters to about 0.2 millimeters) to the previous position of the KC pin 400 (before it was pushed out).

[0055] 5 is a cross-sectional view of a reticle pod 500 according to one embodiment. The reticle pod 500 can be the reticle pods (100 and / or 200) described above. The reticle pod 500 includes an inner pod (cover 130 and base plate 140) and an outer pod (pod dome 110 and pod door 120). The housing of the pod door 120 includes a base 510 for supporting the KC pins (125, 127, 129) and a plurality of rib structures 520 below the base 510. In one embodiment, the minimum thickness of the base 510 can be in the range of 2 millimeters to 2.5 millimeters, or in the range of approximately 2 millimeters to approximately 2.5 millimeters.

[0056] In some embodiments, the housing of the pod door 120, such as the base 510 and the rib structure 520 (below the KC pin(s)), may be configured to be compliant in the Z direction. Some rib structures may be removed and / or additional rib structures may be added to achieve the desired compliance.

[0057] When the outer pod (110, 120) tightens around the cover 130 of the inner pod (130, 140), for example, when the pod door 120 transitions from an unlocked state to a locked state, the housing of the pod door 120 can be pushed down (e.g., by one or more KC pins (125, 127, 129)) a specific distance (e.g., in the range of 0.1 millimeters to 0.2 millimeters, or in the range of about 0.1 millimeters to about 0.2 millimeters) under a specific force or load (e.g., in the range of 4 pounds to 5 pounds, or in the range of about 4 pounds to about 5 pounds). 2A, it will be understood that when the pod door 120 is in the locked state, both the KC pins (125, 127, 129) and the safety catch pins (121, 123) are in direct and complete contact with the base plate 140, thereby distributing a clamping force or pressure (7 pounds or approximately 7 pounds at each clamp position) from the base plate 140 to the KC pins (125, 127, 129) and the safety catch pins (121, 123). That is, at the rear end of the pod door 120, the safety catch pins (121, 123) and the rear KC pin 125 can provide support to resist the clamping pressure (14 pounds or approximately 14 pounds at the rear end of the pod door 120).

[0058] When the pod door 120 transitions from a locked state to an unlocked state, the housing of the pod door 120, e.g., the base 510 and the rib structure 520, can push one or more KC pins (125, 127, 129) back a certain distance (e.g., in the range of 0.1 millimeters to 0.2 millimeters, or in the range of approximately 0.1 millimeters to approximately 0.2 millimeters) to the previous position (before being pushed out) of the one or more KC pins (125, 127, 129).

[0059] It will be understood that the embodiments described and referenced herein are not limited to the housing structures (e.g., base 510 and rib structure 520) and implementations of pod door 120 described herein. That is, the housing structures and implementations of pod door 120 described and referenced herein are provided for illustrative purposes only and are not intended to be limiting.

[0060] Figure 6 is an exploded view of a portion of a pod door 600 (in an upside-down position relative to the pod door 120 of Figure 5) according to one embodiment. The pod door 600 can be the pod door 120 described above.

[0061] The pod door 600 includes a door cam 620 and one or more latch arms 610 (also shown as 610 in FIG. 5 ). It will be understood that one or more ramps (not shown) may be provided on the underside of the one or more latch arms 610, such that when the door cam 620 drives the latch arms outward (e.g., when the pod door 600 transitions from the unlocked state to the locked state), the one or more latch arms 610 can move up along the one or more ramps and push the safety catch pins (121, 123) up toward the base plate 140. It will be understood that in another embodiment, the one or more ramps may be optional, and when the door cam 620 drives the latch arms outward (e.g., when the pod door 600 transitions from the unlocked state to the locked state), the one or more latch arms 610 can push the safety catch pins (121, 123) up toward the base plate 140. In yet another embodiment, the door cam 620 can drive the safety catch pins (121, 123) upward toward the base plate 140 when the pod door 600 transitions from the unlocked state to the locked state.

[0062] In one embodiment, when the outer pod tightens around the inner pod's cover 130, for example, when the pod door 600 transitions from an unlocked state to a locked state, the door cam 620 can drive one or more latch arms 610 outward, and the one or more latch arms 610 can rise along one or more ramps and, under a certain force or load (e.g., in the range of 4 pounds to 5 pounds, or in the range of about 4 pounds to about 5 pounds), push the safety catch pins (121, 123) toward the base plate 140 (e.g., via the base 510 below the safety catch pins) a certain distance (e.g., in the range of 0.1 millimeters to 0.2 millimeters, or in the range of about 0.1 millimeters to about 0.2 millimeters).

[0063] 2A, it will be understood that when the pod door 600 is in the locked state, both the KC pins (125, 127, 129) and the safety catch pins (121, 123) are in direct and complete contact with the base plate 140, thereby distributing a clamping force or pressure (7 pounds or approximately 7 pounds at each clamping position) from the base plate 140 to the KC pins (125, 127, 129) and the safety catch pins (121, 123). That is, at the rear end of the pod door 600, the safety catch pins (121, 123) and the rear KC pin 125 can provide support to resist the clamping pressure (e.g., 14 pounds or approximately 14 pounds at the rear end of the pod door 600). When the pod door 600 is in the locked state, the safety catch pins (121, 123) are actuated (e.g., pushed toward and contact the base plate 140 (e.g., by one or more latch arms 610 or by the door cam 610)).

[0064] In one embodiment, when the pod door 600 transitions from a locked state to an unlocked state, the door cam 620 can drive one or more latch arms 610 inward, which can move downward along one or more ramps to retract the safety catch pins (121, 123) a certain distance (e.g., in the range of 0.1 millimeters to 0.2 millimeters, or in the range of about 0.1 millimeters to about 0.2 millimeters) (e.g., via the base 510 below the safety catch pins) to their previous position (before being pushed up). It will be appreciated that in another embodiment, the one or more ramps may be optional, and when the door cam 620 drives the latch arms inward, the one or more latch arms 610 may retract (e.g., via the base 510 below the safety catch pins) a specific distance to their previous positions (before being pushed up) In yet another implementation, when the pod door 600 transitions from a locked state to an unlocked state, the door cam 620 may retract (e.g., via the base 510 below the safety catch pins) a specific distance to their previous positions.

[0065] In some embodiments, one or more of the support pins (not shown) may be disposed on the pod door 600. For example, the support pin may be disposed between the front KC pins 127 and 129. The support pin may also be disposed between the KC pins 125 and 127, between the KC pins 125 and 129, or in any suitable location. The support pin (e.g., the height or compliance of the support pin) may be configured to reduce and / or equalize the pressure on the front KC pins 127 and 129 when the pod door 600 is in the locked state.

[0066] It will be understood that the embodiments described and referenced herein are not limited to the described structures and implementations of the pod door 600. That is, the structures and implementations of the pod door 600 described and referenced herein are provided for illustrative purposes only and are not intended to be limiting.

[0067] Embodiments disclosed herein can provide methods for manufacturing one or more components of a reticle pod, such as those described above, and the resulting reticle pod can help distribute forces (e.g., forces caused by clamping forces) to prevent wear over cycles.

[0068] It will be appreciated that existing reticle pods have undergone FEA (finite element analysis) to demonstrate high pressure areas. Wear studies have shown consistent contact and wear indicators above the rear KC pins and / or other locations on the KC pins. Shimmed safety catch pins or pads to eliminate space or clearance have been tested and shown to eliminate wear on the inner pod base plate sets that previously wore above the rear KC pins and / or other locations.

[0069] It will be appreciated that FEA and testing have shown that high pressures associated with differential clamping from the cover to the base plate of the inner pod can cause wear above the rear KC pin of the pin. The embodiments disclosed herein can reduce such high pressures and further precisely restrain the inner pod. The embodiments disclosed herein can provide a more uniform support structure beneath the inner pod within the outer pod to even further reduce localized pressures and movement due to bending.

[0070] Aspects Any of the following aspects can be combined with each other.

[0071] Aspect 1 1. An apparatus, comprising: an inner vessel having a base plate and a cover; an outer container having a pod dome and a pod door, the pod door having a locked state and an unlocked state; and a first set of pins and a second set of pins disposed on the pod door, the first set of pins and the second set of pins configured to support the base plate; when the pod door is in an unlocked state and the first set of pins contact the base plate, a clearance is formed between the second set of pins and the base plate, and when the pod door is in a locked state, the first set of pins and the second set of pins contact the base plate.

[0072] Aspect 2 The apparatus of aspect 1, wherein the outer container includes a clamping mechanism, and when the pod door is in a locked state, the clamping force applied from the clamping mechanism on the cover is not aligned with the first set of pins in the height direction of the inner container.

[0073] Aspect 3 3. The apparatus of claim 1 or 2, wherein the clearance is in the range of 0.1 millimeters to 0.2 millimeters, or in the range of about 0.1 millimeters to about 0.2 millimeters.

[0074] Aspect 4 Aspect 4. The apparatus of any one of aspects 1 to 3, wherein at least one pin in the first set of pins has compliance in the height direction of the inner vessel.

[0075] Aspect 5 5. The apparatus of embodiment 4, wherein the at least one pin is a spring-loaded pin.

[0076] Aspect 6 5. The apparatus of embodiment 4, wherein the pod door includes a compliant base for supporting the at least one pin.

[0077] Aspect 7 the second set of pins are configured to actuate when the pod door transitions from an unlocked state to a locked state; Aspect 7. The apparatus of any of aspects 1-6, wherein when the second set of pins is actuated, each pin of the second set of pins is pushed toward and contacts the base plate.

[0078] Aspect 8 the pod door includes a latch arm; The apparatus of embodiment 7, wherein when the pod door transitions from an unlocked state to a locked state, the latch arm pushes the second set of pins toward the base plate, causing the second set of pins to contact the base plate.

[0079] Aspect 9 the pod door includes a door cam; The apparatus of claim 7, wherein when the pod door transitions from an unlocked state to a locked state, the door cam drives the second set of pins toward the base plate, causing the second set of pins to contact the base plate.

[0080] Aspect 10 10. The apparatus of any of aspects 1-9, further comprising a support pin disposed on the pod door.

[0081] Aspect 11 A method of manufacturing an apparatus, the apparatus including: an inner container having a base plate and a cover; an outer container having a pod dome and a pod door, the pod door having a locked state and an unlocked state; and a first set of pins and a second set of pins disposed on the pod door, the first set of pins and a second set of pins configured to support the base plate; manufacturing the first set of pins and the second set of pins such that when the pod door is in an unlocked state and the first set of pins contact the base plate, a clearance is formed between the second set of pins and the base plate, and when the pod door is in a locked state, the first set of pins and the second set of pins contact the base plate; A method comprising:

[0082] Aspect 12 The method of claim 11, further comprising manufacturing a clamping mechanism on the outer container such that when the pod door is in a locked state, the clamping force applied from the clamping mechanism on the cover is not aligned with the first set of pins in the height direction of the inner container.

[0083] Aspect 13 13. The method of claim 11 or 12, wherein the clearance is in the range of 0.1 millimeters to 0.2 millimeters, or in the range of about 0.1 millimeters to about 0.2 millimeters.

[0084] Aspect 14 Aspect 14. The method of any one of aspects 11 to 13, further comprising manufacturing at least one pin of the first set of pins such that the at least one pin is compliant along a height of the inner vessel.

[0085] Aspect 15 15. The method of embodiment 14, wherein the at least one pin is a spring-loaded pin.

[0086] Aspect 16 15. The method of embodiment 14, further comprising manufacturing a compliant base for the pod door to support the at least one pin.

[0087] Aspect 17 manufacturing the second set of pins to be activated when the pod door transitions from an unlocked state to a locked state; 17. The method of any of aspects 11-16, wherein when the second set of pins is actuated, each pin of the second set of pins is pushed toward and contacts the base plate.

[0088] Aspect 18 18. The method of claim 17, further comprising manufacturing the latch arm of the pod door so that when the pod door transitions from an unlocked state to a locked state, the latch arm presses the second set of pins toward the base plate, thereby causing the second set of pins to contact the base plate.

[0089] Aspect 19 A method as described in aspect 17, further comprising manufacturing the door cam of the pod door so that when the pod door is in a locked state, the door cam drives the second set of pins toward the base plate, thereby causing the second set of pins to contact the base plate.

[0090] Aspect 20 20. The method of any one of embodiments 11-19, further comprising manufacturing a support pin disposed on the pod door.

[0091] The examples disclosed herein are to be considered in all respects as illustrative and not restrictive. The scope of the invention is indicated by the appended claims, rather than the foregoing specification, and all changes that come within the meaning and range of equivalency of the claims are intended to be embraced therein.

[0092] The terms used herein are intended to describe particular embodiments and are not intended to be limiting. The terms "a," "an," and "the" include the plural unless expressly stated otherwise. As used herein, the terms "comprises" and / or "comprising" specify the presence of stated features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, and / or components.

[0093] With reference to the foregoing specification, it should be understood that changes may be made in details, particularly with respect to the materials of construction used and the shape, size and arrangement of parts without departing from the scope of the present disclosure. The specification and described embodiments are exemplary only, the true scope and spirit of the present disclosure being indicated by the following claims.

Claims

1. 1. An apparatus, comprising: an inner vessel having a base plate and a cover; an outer container having a pod dome and a pod door, the pod door having a locked state and an unlocked state; and a first set of pins and a second set of pins disposed on the pod door, the first set of pins and the second set of pins configured to support the base plate; Equipped with when the pod door is in an unlocked state and the first set of pins contact the base plate, a clearance is formed between the second set of pins and the base plate; The apparatus, wherein the first set of pins and the second set of pins contact the base plate when the pod door is in a locked state.

2. the outer container includes a clamping mechanism; 2. The apparatus of claim 1, wherein when the pod door is in a locked state, the clamping force exerted by the clamping mechanism on the cover is not aligned with the first set of pins in the height direction of the inner container.

3. The device of claim 1 , wherein the clearance is in the range of 0.1 millimeters to 0.2 millimeters, or in the range of about 0.1 millimeters to about 0.2 millimeters.

4. The apparatus of claim 1 , wherein at least one pin in the first set of pins is compliant in the height direction of the inner vessel.

5. The apparatus of claim 4 , wherein the at least one pin is a spring-loaded pin.

6. The apparatus of claim 4 , wherein the pod door includes a compliant base for supporting the at least one pin.

7. the second set of pins are configured to actuate when the pod door transitions from an unlocked state to a locked state; The apparatus of claim 1 , wherein when the second set of pins is actuated, each pin in the second set of pins is forced toward and contacts the base plate.

8. the pod door includes a latch arm; 8. The apparatus of claim 7, wherein when the pod door transitions from an unlocked state to a locked state, the latch arm pushes the second set of pins toward the base plate, causing the second set of pins to contact the base plate.

9. the pod door includes a door cam; 8. The apparatus of claim 7, wherein when the pod door transitions from an unlocked state to a locked state, the door cam drives the second set of pins toward the base plate, causing the second set of pins to contact the base plate.

10. The apparatus of claim 1 , further comprising a support pin disposed on the pod door.

11. A method of manufacturing an apparatus, the apparatus including: an inner container having a base plate and a cover; an outer container having a pod dome and a pod door, the pod door having a locked state and an unlocked state; and a first set of pins and a second set of pins disposed on the pod door, the first set of pins and the second set of pins configured to support the base plate; manufacturing the first set of pins and the second set of pins such that when the pod door is in an unlocked state and the first set of pins contact the base plate, a clearance is formed between the second set of pins and the base plate, and when the pod door is in a locked state, the first set of pins and the second set of pins contact the base plate; A method comprising:

12. 12. The method of claim 11, further comprising manufacturing a clamping mechanism on the outer container such that when the pod door is in a locked state, the clamping force applied from the clamping mechanism on the cover is not aligned with the first set of pins in the height direction of the inner container.

13. The method of claim 11 , wherein the clearance is in the range of 0.1 millimeters to 0.2 millimeters, or in the range of about 0.1 millimeters to about 0.2 millimeters.

14. The method of claim 11 , further comprising manufacturing at least one pin of the first set of pins such that the at least one pin is compliant along the height of the inner vessel.

15. The method of claim 14 , wherein the at least one pin is a spring-loaded pin.

16. The method of claim 14 , further comprising manufacturing a compliant base for the pod door to support the at least one pin.

17. manufacturing the second set of pins to be activated when the pod door transitions from an unlocked state to a locked state; The method of claim 11 , wherein when the second set of pins is actuated, each pin in the second set of pins is forced toward and contacts the base plate.

18. 18. The method of claim 17, further comprising manufacturing the latch arm of the pod door such that when the pod door transitions from an unlocked state to a locked state, the latch arm presses the second set of pins toward the base plate, thereby causing the second set of pins to contact the base plate.

19. 18. The method of claim 17, further comprising manufacturing the door cam of the pod door such that when the pod door is in a locked state, the door cam drives the second set of pins toward the base plate, thereby causing the second set of pins to contact the base plate.

20. The method of claim 11 further comprising manufacturing a support pin disposed on the pod door.

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