EFEM humidity control system using desiccant

Abstract

We provide an EFEM humidity control system that uses desiccant to easily control the humidity in the transfer chamber through a desiccant facility that is composed of multiple blocks and can be installed and removed from the EFEM. [Solution] The EFEM humidity control system using a desiccant includes an EFEM including a transfer chamber, which is a space where wafers are transferred to a process module, and a desiccant equipment that can be installed and separated in the EFEM and controls the humidity in the transfer chamber. The desiccant equipment includes a plurality of block bodies that can be connected and separated to each other and transported individually, and each of the plurality of block bodies houses humidity control equipment. The humidity control equipment includes a desiccant rotor that contains an adsorbent that adsorbs moisture in the air supplied to the transfer chamber and is rotated by a drive motor, and a regeneration heater that heats the air so that the heated air removes the moisture adsorbed by the adsorbent.

Description

[Technical Field]

[0001] The present invention relates to an EFEM humidity control system using a desiccant, and more specifically, to an EFEM humidity control system using a desiccant that can easily control the humidity in a transfer chamber through a desiccant device that is composed of multiple blocks and can be installed and removed from the EFEM. [Background technology]

[0002] Generally, semiconductor processing cluster equipment uses various chemical gases during the process, and the gases remain on the wafer after the process is completed inside the chamber. Therefore, if gases, fumes, etc. remaining in the POUP (Front Opening Unified Pod: a storage container for semiconductor processes) react with moisture during unloading, particles and defects can occur on the wafer.

[0003] The environmental conditions inside the existing EFEM (Equipment Front End Module) are not humidity controlled, and the air inside the FAB is supplied through an FFU (Fan Filter Unit), so the humidity in the air easily reacts with the residual gas on the wafer, easily generating particles or defects. Also, since the process time for a particular process usually takes about an hour, the residual gas on the wafer reacts with the undehumidified air inside the EFEM to generate particles, which causes problems that reduce yields.

[0004] Meanwhile, a system for supplying nitrogen (N2) into the POUP may be constructed and used to minimize humidity when the wafer is waiting after the process is completed inside the POUP. However, when constructing a system for supplying nitrogen (N2), a large amount of nitrogen must be introduced into a completely sealed space, which has the disadvantage of being expensive (see Patent Document 1).

[0005] In addition, in conventional systems, the desiccant equipment is installed integrally with the EFEM, which makes it difficult to manage the desiccant equipment individually. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Korean Patent No. 10-2106625 Summary of the Invention [Problem to be solved by the invention]

[0007] To solve these problems, there is an increasing need for an EFEM humidity control system that uses desiccant to reduce the internal humidity of the transfer chamber space of the EFEM, which is bonded in semiconductor manufacturing equipment, without using nitrogen, through an individually controllable desiccant facility, thereby improving the environmental conditions that can cause particles to be generated on the wafer after the process is completed.

[0008] The problem to be solved by the present invention is to provide an EFEM humidity control system using a desiccant that can easily control the humidity in a transfer chamber through a desiccant facility that is composed of multiple blocks and can be installed and removed from the EFEM.

[0009] The problems to be solved by the present invention are not limited to those mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the following description. [Means for solving the problem]

[0010] According to one embodiment of the present invention, there is provided an EFEM humidity control system using a desiccant, comprising: an EFEM including a transfer chamber, which is a space where wafers are transferred to a process module; and a desiccant device that can be installed in and separated from the EFEM and controls the humidity in the transfer chamber. The desiccant device includes a plurality of blocks that can be connected to and separated from each other for individual transport. Each of the plurality of blocks houses humidity control equipment. The humidity control equipment includes a desiccant rotor that includes an adsorbent that adsorbs moisture in air supplied to the transfer chamber and is rotated by a drive motor; and a regeneration heater that heats the air so that the heated air removes moisture adsorbed by the adsorbent. [Effects of the Invention]

[0011] According to the present invention, it is possible to provide an EFEM humidity control system using a desiccant that can easily control the humidity in a transfer chamber through a desiccant device that is composed of multiple block bodies and can be installed and removed from the EFEM. [Brief explanation of the drawings]

[0012] [Figure 1] 1 is a diagram showing a desiccant facility that can be installed and separated from an EFEM in an EFEM humidity control system using a desiccant according to the present invention. [Figure 2] 1 is a diagram showing a desiccant installation including a plurality of blocks. [Figure 3] 10 is a diagram illustrating that the type or number of humidity control devices allocated to and housed in each of a plurality of block bodies can be adjusted. [Figure 4] This is a diagram showing that the number of blocks constituting a plurality of blocks can be adjusted, and accordingly, the type or number of humidity control devices housed in a given block can be adjusted. [Figure 5] 1 is a diagram showing a shape in which a plurality of blocks have predetermined markings. [Figure 6]1 is a conceptual diagram of an EFEM humidity control system using a desiccant according to one embodiment of the present invention. [Figure 7] FIG. 10 is a conceptual diagram of an EFEM humidity control system using a desiccant according to another embodiment of the present invention. [Figure 8] FIG. 10 is a conceptual diagram of an EFEM humidity control system using a desiccant according to another embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0013] The present invention is not limited to the embodiments disclosed below, but may be embodied in various different forms, and the present embodiments are provided merely so that the disclosure of the present invention will be complete and will fully convey the scope of the invention to those skilled in the art to which the present invention pertains.

[0014] As used herein, the singular includes the plural unless the phrase specifically states otherwise. As used herein, 'comprises' and / or 'comprising' does not exclude the presence or addition of one or more other elements, steps, and operations.

[0015] 1 to 5, a desiccant facility for an EFEM humidity control system using a desiccant according to the present invention will be described, which includes a plurality of blocks and can be installed and separated from the EFEM.

[0016] Figure 1 is a diagram showing a desiccant facility that can be installed and separated from an EFEM in an EFEM humidity control system using a desiccant according to the present invention. Figure 2 is a diagram showing a desiccant facility that includes multiple blocks.

[0017] Figure 3 shows that the type or number of humidity control devices allocated to and housed in each of a plurality of block bodies can be adjusted. Figure 4 shows that the number of block bodies constituting a plurality of block bodies can be adjusted, and accordingly, the type or number of humidity control devices housed in a given block body can be adjusted. Figure 5 shows the shape of a plurality of block bodies with predetermined markings.

[0018] 1 to 5, the EFEM humidity control system 10 using a desiccant according to the present invention includes an EFEM (Equipment Front End Module) 20 including a transfer chamber, which is a space where a workpiece is transferred to a process module, and desiccant equipment 1, 8 for controlling the humidity in the transfer chamber T.

[0019] The EFEM 20 is a standard interface module of process equipment that supplies workpieces such as wafers or masks in cassettes to process modules on a semiconductor line.

[0020] The EFEM 20 may include a transfer chamber T, which is a space where workpieces such as wafers or masks are transferred to a process module; a transfer unit (ATM Robot) 230 equipped with robotic forceps to transfer workpieces such as wafers or masks in a cassette to the process module; an aligner that aligns workpieces such as wafers in a certain direction when transferring them to the process module; an air purification filter FFU (Fan Filter Unit) that purifies the air in the transfer chamber T to prevent contamination of the workpieces; a FOUP (Front-Opening Unified Pod) 60 that accommodates workpieces transferred to the process module; and a load port 50 that is disposed below the FOUP 60 and supports the FOUP 60 (see FIG. 8).

[0021] The desiccant equipment 1 and 8 can be installed in and separated from the EFEM 20, and are a system for adjusting the humidity of the transfer chamber T that constitutes the EFEM 20.

[0022] As shown in FIG. 1, in the present invention, the desiccant device 1 is not integrated with the EFEM 20, but the desiccant device 1 can be installed on the EFEM 20 while being supported by an installation frame 2, or can be separated from the EFEM 20.

[0023] Therefore, it is easier to install an EFEM than an integrated type, and since a desiccant system can be installed in an existing EFEM that does not have a desiccant system, the humidity of the air in the transfer chamber can also be adjusted in the existing EFEM.

[0024] Also, as shown in FIG. 2, the desiccant equipment 1 may include a plurality of blocks 3, 4, 5, 6, and 7 that can be connected and separated from one another and transported individually.

[0025] That is, the desiccant equipment 1 is not an integrated type but a divided type, and therefore the desiccant equipment 1 can be transported individually.

[0026] Since the desiccant equipment 1 can be transported separately in this manner, it is lighter in size and weight than an integrated desiccant equipment, reducing spatial constraints associated with transportation, and the desiccant equipment 1 can be transported and installed simply and easily.

[0027] Also, each of the plurality of blocks 3, 4, 5, 6, and 7 can accommodate its own assigned humidity control device.

[0028] Such humidity control equipment may include a desiccant rotor 70 that includes an adsorbent that adsorbs moisture from the air supplied to the transfer chamber T and is rotated by a drive motor 75, and a regeneration heater 100 that heats the air so that the heated air removes the moisture adsorbed by the adsorbent.

[0029] That is, the humidity control equipment for controlling the humidity of the transfer chamber T can be divided into a plurality of blocks 3, 4, 5, 6, and 7 and operated individually.

[0030] For example, among the plurality of block bodies 3, 4, 5, 6, and 7, one of the block bodies may house a desiccant rotor 70, another block body may house a regenerative heater 100, and another block body may house a fan.

[0031] Since the humidity control equipment is individually housed in this manner, only the block housing the humidity control equipment that needs to be replaced or repaired can be separated from the desiccant equipment 1 and 8, making it easy to replace or repair.

[0032] Meanwhile, as shown in Fig. 2, in connection with the connection between the plurality of block bodies 3, 4, 5, 6, and 7, adjacent block bodies may be fixed by surface pressure, or may be fixed by a connecting member such as a hook lock clip 15. Of course, the connecting method between the block bodies is not limited to this and may be various.

[0033] For example, a socket type fastening or a bolt fastening may be applied to connect the block bodies.

[0034] Next, the type or number of humidity control devices allocated to and housed in each of the plurality of block bodies 3, 4, 5, 6, and 7 may be adjustable.

[0035] That is, the specific humidity control device may be housed in a specific block among the multiple blocks 3, 4, 5, 6, and 7, or may be housed in a block other than the specific block in some cases. Also, the specific block may house only one humidity control device or multiple humidity control devices.

[0036] As shown in FIG. 3, there can be a total of five blocks 3, 4, 5, 6, and 7, with the desiccant rotor 70 housed in the third block 5 and the regenerative heater 100 housed in the fourth block 6.

[0037] Thereafter, the desiccant rotor 70 can be housed in the second block body 4 in consideration of changes in the installation environment, humidity control method, etc.

[0038] In addition, the desiccant rotor 70 and the regeneration heater 100 may be housed together in the fourth block body 6 .

[0039] In this way, an optimum humidity control environment for the transfer chamber can be configured in consideration of various conditions, and the installation compatibility of the desiccant equipment 1 can be improved.

[0040] Next, the number of blocks constituting the plurality of blocks can be adjusted, and accordingly, the type or number of humidity control devices housed in a given block can be adjusted.

[0041] That is, the number of blocks can be adjusted in consideration of various conditions that are the same as the installation environment, and the type and number of humidity control devices installed in the blocks can also be adjusted accordingly.

[0042] Referring to FIG. 4, the plurality of blocks 3, 4, 5, 6, and 7 can be composed of five blocks, or three blocks 9, 11, and 12.

[0043] Furthermore, in the five block bodies 3 , 4 , 5 , 6 , and 7 , the desiccant rotor 70 can be housed in the third block body 5 , and the regenerative heater 100 can be housed in the fourth block body 6 .

[0044] On the other hand, among the three blocks 9, 11, and 12, the desiccant rotor 70 and the regenerative heater 100 can be accommodated in the second block 11.

[0045] In this way, it is possible to configure an optimum humidity control environment for the transfer chamber in consideration of various conditions, and the installation compatibility of the desiccant equipment 1 and 8 can be improved.

[0046] Additionally, as shown in FIG. 5, each of the plurality of blocks 3, 4, 5, 6, and 7 may have a predetermined marking, and the predetermined marking may include one or more of a number marking A and a marking B indicating the type of humidity control equipment contained therein.

[0047] By providing predetermined markings on the surfaces of the blocks 3, 4, 5, 6, and 7, the bonding order of the blocks 3, 4, 5, 6, and 7 can be intuitively grasped, making it easier to bond the blocks 3, 4, 5, 6, and 7.

[0048] Also, since it is possible to intuitively know what humidity control devices are housed in the blocks 3, 4, 5, 6, and 7, it is easy to replace and monitor the humidity control devices.

[0049] Meanwhile, the humidity control device may further include a particle removal filter and an organic matter removal filter.

[0050] The particle removal filter is a filter that removes particles generated during the process in which the adsorbent of the desiccant rotor 70 adsorbs moisture and removes the moisture adsorbed by the adsorbent.

[0051] The organic matter removal filter is a filter that removes organic matter flowing inside the desiccant equipment.

[0052] During semiconductor manufacturing, various organic substances may be generated, and these organic substances may flow inside semiconductor equipment and may also flow into desiccant equipment.

[0053] Such organic matter can reduce the yield of semiconductor processes and degrade the quality of the process environment, so an organic matter removal filter can be installed to remove the organic matter.

[0054] These filters can be accommodated and installed in a specific block among a plurality of blocks, and therefore, when replacing these filters, only the specific block housing the filter that needs to be replaced can be separated to perform the filter replacement work.

[0055] Therefore, the particle removal filter and the organic matter removal filter can be easily replaced.

[0056] As described above, in the EFEM humidity control system using a desiccant according to the present invention, the desiccant equipment configured with a plurality of blocks that can be installed and separated from the EFEM has been described.

[0057] The humidity control method for the transfer chamber of the EFEM using the desiccant equipment will be described in detail below.

[0058] To facilitate understanding of the invention, the blocks are not shown in Figures 6 to 8, but only the humidity control device housed in the blocks. Also, although the humidity control device is shown to be located on the side of the EFEM in the drawings, the humidity control device can be installed in various positions, such as above the EFEM.

[0059] An EFEM humidity control system using a desiccant according to an embodiment of the present invention will be described with reference to Fig. 6. Fig. 6 is a view showing an EFEM humidity control system using a desiccant according to an embodiment of the present invention.

[0060] Referring to FIG. 6, an EFEM humidity control system using a desiccant according to an embodiment of the present invention may include an EFEM 20 including a transfer chamber, which is a space where wafers are transferred to a process module, and the above-described desiccant equipment.

[0061] The desiccant equipment is a system that adjusts the humidity in the transfer chamber T that constitutes EFEM20.

[0062] In this regard, various chemical gases are used during semiconductor processing, and at this time, gases remain on the wafer after the process is completed inside the transfer chamber. Therefore, if gases or fumes remaining in the POUP 60 react with moisture during unloading, particles or defects can occur on the wafer.

[0063] That is, the residual gas on the wafer reacts with the undehumidified air inside the EFEM, generating particles and causing problems such as a decrease in yield.

[0064] To solve this problem, it is necessary to adjust the humidity in the transfer chamber, and in the present invention, a desiccant can be used to adjust the humidity.

[0065] Such desiccant equipment may include a transfer chamber air recovery line 120, a desiccant rotor 70, a branching means 80, a temperature control device 90, a dehumidified air supply line 130, a regeneration air supply line 140, a temperature sensor 110, a regeneration fan 145, and a regeneration heater 100.

[0066] One side of the transfer chamber air recovery line 120 may be fluidly connected to the transfer chamber T, and the other side may be connected to the desiccant rotor 70 .

[0067] Under this connection, the moist air in the transfer chamber T flows along the transfer chamber air recovery line 120 and is then supplied to the desiccant rotor 70 .

[0068] At this time, a blower is installed between the transfer chamber T and the transfer chamber air recovery line 120 so that the moist air in the transfer chamber T can flow into the transfer chamber air recovery line 120.

[0069] The desiccant rotor 70 may contain an adsorbent for adsorbing moisture within the housing.

[0070] The external air OA or a mixture of the external air OA and the internal air (air provided from the transfer chamber T) can flow into the adsorption section (dehumidification section) of the desiccant rotor 70 and be dehumidified.

[0071] Meanwhile, a humid air damper 125 may be installed on the transfer chamber air recovery line 120, and the humid air damper 125 may adjust the amount of internal air flowing into the desiccant rotor 70 in consideration of the humidity in the transfer chamber T.

[0072] That is, the desiccant rotor 70 includes an adsorbent that adsorbs moisture from the external air or mixed air, and can remove moisture from the external air or mixed air through the adsorbent.

[0073] Specifically, the moist air supplied to the desiccant rotor 70 comes into contact with the adsorbent in the housing, and the moisture contained in the moist air is adsorbed by the adsorbent, so that the moist air can become dehumidified air or dry air.

[0074] When condensation occurs, a force greater than the attractive force acts between molecules on the surface of the adsorbent, generating heat greater than the heat of condensation. This heat is called the heat of adsorption, and is about 1.5 to 2 times the heat of condensation.

[0075] Therefore, the dehumidified air that has been dehumidified and exits the desiccant rotor 70 is heated by the heat of adsorption and can have a high temperature of 50° C. or more.

[0076] On the other hand, the adsorbent may be silica gel or zeolite, but is not limited thereto.

[0077] In addition, the desiccant rotor 70 can be rotated by a drive motor 75, and the adsorbed portion of the adsorbent that adsorbs moisture in the air can be moved to the regeneration zone where the moisture can be removed, and the adsorbed portion can be moved to the adsorption zone again through rotation.

[0078] The branching means 80 is a means for branching the dehumidified air that has come out of the desiccant rotor 70 .

[0079] The dehumidified air leaving the desiccant rotor 70 passes through the branching means 80, and a portion of the air is used as regenerated air and can flow back to the desiccant rotor 70, while the remainder can flow into the transfer chamber T.

[0080] Meanwhile, the branching means 80 may be a branch pipe or a three-way valve.

[0081] The temperature adjusting device 90 adjusts the temperature of the remaining dehumidified air branched by the branching means 80 to a set temperature.

[0082] As described above, the remaining dehumidified air branched by the branching means 80 is directed to the transfer chamber T, but due to the heat of adsorption, the remaining dehumidified air may have a high temperature that is not suitable for the transfer chamber T.

[0083] Taking this into consideration, a temperature control device 90 can be installed on the dehumidified air supply line 130 described below, and the temperature control device 90 can lower the temperature of the dehumidified air heading toward the transfer chamber T to make it reach the set temperature.

[0084] Meanwhile, the temperature control device 90 may be an air cooler, a cooling coil, a heat exchanger, an evaporator, or the like, but is not limited to these.

[0085] The dehumidified air supply line 130 is a line through which the remaining dehumidified air branched through the branching means 80 flows, and can supply the remaining dehumidified air that has been brought to a set temperature by the temperature adjustment device 90 to the transfer chamber T.

[0086] The regeneration air supply line 140 is a line that supplies a part of the dehumidified air branched by the branching means 80 or the outside air OA to the desiccant rotor 70 .

[0087] In order to supply the air used in the regeneration process of the desiccant rotor 70 to the desiccant rotor 70, first, external air OA can be pushed in through a regeneration fan 145 located behind the desiccant rotor 70 as shown in FIG.

[0088] Alternatively, the regeneration fan may be positioned in front of the desiccant rotor 70 and draw in external air OA.

[0089] The external air OA thus introduced can be heated by the regeneration heater 100 and supplied to the regeneration zone of the desiccant rotor 70 .

[0090] Furthermore, not only the above-mentioned outside air OA but also a part of the dehumidified air or a mixture of a part of the dehumidified air and the outside air OA can be used as the regeneration air.

[0091] For this purpose, a portion of the dehumidified air flowing through the regeneration air supply line 140 moves to the mixing means 82 and is mixed with the external air OA introduced by the regeneration fan 145 to generate mixed air, which can be heated by the regeneration heater 100 and then supplied to the regeneration zone of the desiccant rotor 70.

[0092] On the other hand, the mixing means 82 may be a damper, a three-way valve, or the like, and is not limited to a particular type.

[0093] The mixing means 82 can adjust the amount of dehumidified air and the amount of outside air OA that constitute the mixed air depending on the situation by opening or closing the path.

[0094] That is, in some cases, only a portion of the dehumidified air can be used as regeneration air by the mixing means 82, or only the outside air OA can be used.

[0095] A part of the dehumidified air thus supplied can be used to remove moisture by the adsorbent that has adsorbed moisture, thereby making the adsorbent usable again.

[0096] Generally, to remove moisture using an adsorbent used for moisture adsorption, external air is introduced, heated, and supplied to the desiccant rotor 70. However, in the present invention, in some cases, there is no need to introduce external air, and dehumidified air heated by the heat of adsorption is used, or a relatively small amount of external air can be used.

[0097] Therefore, the structure of the desiccant equipment is simplified, it can be made smaller, and humidity control for the transfer chamber T can be performed simply and easily.

[0098] Also, since a portion of the dehumidified air is dehumidified and dried, it has excellent moisture adsorption performance and has a relatively high temperature due to the heat of adsorption, which can reduce the energy required to heat the regenerative heater 100.

[0099] The temperature sensor 110 is installed on the regeneration air supply line 140 and measures the temperature of a portion of the dehumidified air.

[0100] Even if some of the dehumidified air has a high temperature, it may not be hot enough to remove moisture from the adsorbent and reuse the adsorbent.

[0101] In consideration of this, the temperature sensor 110 can measure the temperature of a portion of the dehumidified air, and from this, it can be determined whether the portion of the dehumidified air has a temperature that can remove moisture from the adsorbent.

[0102] The regeneration heater 100 is a device that is installed on the regeneration air supply line 140 and heats the regeneration air.

[0103] As described above, the regeneration air may be a portion of the dehumidified air, outside air, or a mixture thereof.

[0104] In particular, the regenerative heater 100 can heat a portion of the dehumidified air when the temperature measured by the temperature sensor 110 is below the temperature setpoint.

[0105] When the temperature sensor 110 measures the temperature of a portion of the dehumidified air and the measured temperature is below a temperature setpoint, which is a temperature at which it is difficult to remove moisture from the adsorbent, the regenerative heater 100 can heat a portion of the dehumidified air to a temperature above the temperature setpoint.

[0106] Additionally, the EFEM humidity control system using a desiccant according to an embodiment of the present invention may further include a temperature and humidity sensor 30 and a control device 40.

[0107] The temperature and humidity sensor 30 is a sensor that is installed in the transfer chamber T of the EFEM 20 and measures the temperature and humidity of the transfer chamber T.

[0108] The control device 40 is a device that is installed in the EFEM 20 or exists separately from the EFEM 20 and controls the humidity adjustment process of the EFEM 20.

[0109] In one embodiment, the control device 40 can operate the desiccant equipment when the humidity measured by the temperature and humidity sensor 30 exceeds the humidity reference value, and can then stop the operation of the desiccant equipment when the humidity reaches the humidity reference value.

[0110] Here, the reference humidity value may refer to the humidity at which problems such as yield reduction occur, such as the reaction of residual gas on a workpiece, such as a wafer, with undehumidified air inside the EFEM 20 to generate particles.

[0111] By operating the desiccant equipment only when humidity control of the transport chamber T is required through the control device 40, the desiccant equipment does not need to be operated unnecessarily, which allows for efficient operation of the equipment, such as energy saving.

[0112] Additionally, the control device 40 can control the degree to which the regenerative heater 100 heats a portion of the dehumidified air depending on the humidity in the transfer chamber T measured by the temperature and humidity sensor 30, and can simultaneously control the degree to which the drive motor 75 rotates the desiccant rotor 70.

[0113] In this regard, the degree of moisture contained in the air leaving the transport chamber T may vary, and therefore the regeneration rate at which moisture is removed by the adsorbent and the time at which the regenerated adsorbent returns to the adsorption zone must be adjusted.

[0114] That is, the higher the humidity in the transport chamber T, the higher the temperature of the portion of the dehumidified air used as regeneration air must be, and the earlier the regenerated adsorbent must return to the adsorption zone and be introduced into the adsorption process again.

[0115] Taking this into consideration, the control device 40 can control the regeneration heater 100 and the drive motor 75 according to the humidity in the transfer chamber T.

[0116] The EFEM humidity control system using a desiccant according to one embodiment of the present invention has been described above. Hereinafter, an EFEM humidity control system using a desiccant according to another embodiment of the present invention will be described with reference to Fig. 7. Fig. 7 is a view showing an EFEM humidity control system using a desiccant according to another embodiment of the present invention.

[0117] Referring to FIG. 7, an EFEM humidity control system using a desiccant according to another embodiment of the present invention may further include an outside air fan 190 and an air pressure sensor 170 in addition to the above-described EFEM humidity control system using a desiccant.

[0118] The outside air fan 190 is a fan that draws outside air E into the transfer chamber T, thereby creating a positive pressure inside the transfer chamber T of the EFEM 160 and preventing external impurities from entering the transfer chamber T.

[0119] The air pressure sensor 170 is a sensor for measuring the air pressure in the transfer chamber T, and it is possible to check whether the transfer chamber T maintains a positive pressure.

[0120] On the other hand, in the present invention, when the desiccant equipment is in operation, only the remaining dehumidified air is flowed into the transfer chamber T, so the amount of air in the transfer chamber can be reduced, and therefore positive pressure may not be generated and supplied inside the transfer chamber.

[0121] Taking this into consideration, when the air pressure measured by the air pressure sensor 170 is below the air pressure reference value due to the operation of the desiccant equipment, the control device 180 can operate the outdoor air fan 190 so that the air pressure reaches the air pressure reference value.

[0122] The EFEM humidity control system using a desiccant according to another embodiment of the present invention has been described above. Hereinafter, the EFEM humidity control system using a desiccant according to another embodiment of the present invention will be described with reference to Fig. 8. Fig. 8 is a conceptual diagram of the EFEM humidity control system using a desiccant according to another embodiment of the present invention.

[0123] Referring to FIG. 8, an EFEM humidity control system 310 using a desiccant according to another embodiment of the present invention has a plurality of humidity sensors, and can measure the humidity of air at multiple points.

[0124] Specifically, the humidity sensor may include a humid air humidity sensor 290 installed on the transport chamber air recovery line 120, a dry air humidity sensor 300 installed on the dehumidified air supply line 130, and a transport chamber humidity sensor 280 installed in the transport chamber T.

[0125] At this time, the control device 40 can select one of the humid air humidity sensor 290, the dry air humidity sensor 300, and the transfer chamber humidity sensor 280, and if the humidity measured by the selected humidity sensor exceeds the reference humidity value, the degree to which the regenerative heater 100 heats a portion of the dehumidified air and the degree to which the drive motor 75 rotates the desiccant rotor 70 can be increased.

[0126] Generally, when comparing the first humidity in the transfer chamber T, the second humidity on the transfer chamber air recovery line 120, and the third humidity on the dehumidified air supply line 130, the second humidity is the highest, followed by the first humidity, and the third humidity is the lowest.

[0127] Therefore, the second humidity may exceed the reference humidity value most frequently, and the third humidity may exceed the reference humidity value least frequently.

[0128] That is, depending on which humidity sensor the control device 40 selects, it can be determined whether changes in the operation levels of the regenerative heater 100 and the driving motor 75 occur frequently.

[0129] Taking this into consideration, depending on whether it is desired that the regenerative heater 100 and the drive motor 75 operate in a sensitive manner to humidity changes or, conversely, insensitive manner, the control device 40 can select one of the above-mentioned humidity sensors to measure the humidity of the air.

[0130] Although the embodiments of the present invention have been described above with reference to the accompanying drawings, those skilled in the art will understand that the present invention may be embodied in other specific forms without changing the technical spirit or essential features thereof. Therefore, it should be understood that the above-described embodiments are illustrative in all respects and are not limiting. [Explanation of symbols]

[0131] 1.8 Desiccant equipment 2 Installation frame 3, 4, 5, 6, 7, 9, 11, 12 blocks 15 Hook Lock Clip 10, 150, 200, 310 EFEM humidity control system 20, 160, 210 EFEM 30 Temperature and humidity sensor 40, 180, 220 control device 50 Loading Port 60 POUP 70 Desiccant Rotor 75 drive motor 90 Temperature control device 100 Regenerative Heater 110 Temperature Sensor 120 Transfer chamber air recovery line 130 Dehumidified air supply line 140 Regenerated air supply line 170 Air pressure sensor 190 Outdoor air fan 230 Transport Unit 240 Air Purification Module 250 1st blower 260 2nd blower 270 Air Quality Sensor 280 Transport chamber humidity sensor 290 Humid Air Humidity Sensor 300 Dry Air Humidity Sensor

Claims

1. an EFEM (Equipment Front End Module) including a transfer chamber, which is a space in which a workpiece is transferred to a process module; a desiccant device that can be installed and separated from the EFEM and adjusts the humidity of the transfer chamber; The desiccant equipment includes a plurality of blocks that can be connected and separated to each other and transported individually, Each of the plurality of blocks houses a humidity control device, The humidity control device is a desiccant rotor that includes an adsorbent that adsorbs moisture from the air supplied to the transfer chamber and is rotated by a drive motor; a regeneration heater for heating air so that the heated air removes the moisture adsorbed by the adsorbent.

2. 2. The EFEM humidity control system using a desiccant according to claim 1, wherein the type or number of humidity control devices allocated to and housed in each of the plurality of blocks is adjustable.

3. 2. The EFEM humidity control system using a desiccant according to claim 1, wherein the number of blocks constituting the plurality of blocks is adjustable, and therefore the type or number of humidity control devices housed in a given block is adjustable.

4. Each of the plurality of blocks has a predetermined indicia; 2. The EFEM humidity conditioning system using a desiccant according to claim 1, wherein the predetermined markings include at least one of a number marking and a marking indicating the type of humidity conditioning equipment accommodated.

5. The humidity control device is a branching means for branching the dehumidified air that has exited the desiccant rotor; a regeneration air supply line for supplying a portion of the dehumidified air branched by the branching means to the desiccant rotor to remove moisture with the adsorbent; a temperature sensor installed on the regeneration air supply line to measure the temperature of the portion of the dehumidified air; The EFEM humidity control system using a desiccant according to claim 1, wherein the regeneration heater is installed on the regeneration air supply line and heats a portion of the dehumidified air when the temperature measured by the temperature sensor is lower than a temperature setting value.

6. a temperature and humidity sensor for measuring the temperature and humidity of the transfer chamber; 6. The EFEM humidity control system using a desiccant according to claim 5, further comprising: a control device that controls the degree to which the regenerative heater heats a portion of the dehumidified air in accordance with the humidity measured by the temperature and humidity sensor, and simultaneously controls the degree to which the drive motor rotates the desiccant rotor.

7. The humidity control device is a transfer chamber air recovery line that supplies air from the transfer chamber to the desiccant rotor; a branching means for branching the dehumidified air that has exited the desiccant rotor; a regeneration air supply line for supplying a portion of the dehumidified air branched by the branching means to the desiccant rotor so that the moisture is removed by the adsorbent; a dehumidified air supply line that supplies the remainder of the dehumidified air branched by the branching means to the transfer chamber, an outside air fan that introduces outside air into the transfer chamber; an air pressure sensor for measuring the air pressure in the transfer chamber; 2. The EFEM humidity control system using a desiccant according to claim 1, further comprising: a control device that, when the air pressure measured by the air pressure sensor is lower than a reference air pressure value due to operation of the humidity control equipment, operates the outside air fan to make the air pressure reach the reference air pressure value.

8. The humidity control device is a transfer chamber air recovery line that supplies air from the transfer chamber to the desiccant rotor; a branching means for branching the dehumidified air that has exited the desiccant rotor; a regeneration air supply line for supplying a portion of the dehumidified air branched by the branching means to the desiccant rotor so that the moisture is removed by the adsorbent; a dehumidified air supply line that supplies the remainder of the dehumidified air branched by the branching means to the transfer chamber, a humid air humidity sensor installed on the transfer chamber air recovery line; a dry air humidity sensor installed on the dehumidified air supply line; a transfer chamber humidity sensor installed in the transfer chamber; 2. The EFEM humidity control system of claim 1, further comprising: a control device that selects one humidity sensor from the humid air humidity sensor, the dry air humidity sensor, and the transfer chamber humidity sensor, and increases the degree to which the regenerative heater heats a portion of the dehumidified air and the degree to which the drive motor rotates the desiccant rotor when the humidity measured by the selected humidity sensor exceeds a reference humidity value.

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