Inspection probe and inspection device

Abstract

A test probe is disclosed. The test probe includes a barrel having a tubular barrel body and a plurality of skirt portions separated from one another by slits along the longitudinal direction at one end of the barrel body. A sliding portion accommodated within the barrel body and a plunger extending from the sliding portion and having a terminal contact portion exposed from the skirt portion and elastically contacting the skirt portion. The skirt portion includes a skirt body whose diameter tapers in a partial conical shape from the barrel body toward the tip, and a skirt tip portion provided at the tip region of the skirt body. The inner diameter surface of the skirt tip has a section contact surface that can contact the outer diameter surface of the terminal contact portion over a predetermined length section.

Description

[Technical Field]

[0001] The present invention relates to a test probe and a test device for testing electrical characteristics of a device under test such as a semiconductor. [Background technology]

[0002] FIG. 1 is a diagram illustrating a conventional test probe 10. As shown in FIG.

[0003] Referring to FIG. 1, the inspection probe 10 includes a cylindrical barrel 11, a plunger 12 slidably coupled within one side of the barrel 11, a terminal 13 fixedly coupled to the other side of the barrel 11, and a spring 14 sandwiched between the plunger 12 and the terminal 13 within the barrel 11 to provide elastic force.

[0004] The inspection signal may be transmitted from the plunger 12 to the terminal 13 via the barrel 11 and the spring 14. More specifically, the inspection signal given to the plunger 12 is transmitted to the terminal 13 fixed to the other end of the barrel 11 through one end of the barrel 11, the inner wall of the barrel 11, and the spring 14. At this time, an appropriate gap must be maintained between the plunger 12 and the barrel 11 to ensure smooth sliding of the plunger 12. Such a gap not only causes an unstable contact state during inspection, but also generates unstable resistance values ​​as shown in FIG. 2, which can lead to a non-defective product being judged as defective. Summary of the Invention [Problem to be solved by the invention]

[0005] An object of the present invention is to provide an inspection probe and an inspection device that can improve the reliability of inspection by ensuring a stable signal transmission path during inspection.

[0006] Another object of the present invention is to provide an inspection probe and an inspection device that are highly durable. [Means for solving the problem]

[0007] To achieve the above object, a test probe according to a first embodiment of the present invention is provided. The test probe includes a barrel having a tubular barrel body and a plurality of skirt portions separated from each other by slits along the longitudinal direction at one end of the barrel body, a sliding portion housed within the barrel body, and a plunger extending from the sliding portion and having a terminal contact portion exposed from the skirt portion and elastically contacting the skirt portion. The skirt portion includes a skirt body whose diameter tapers in a partial conical shape from the barrel body toward the tip, and a skirt tip portion provided in the tip region of the skirt body. The inner diameter surface of the skirt tip portion has a section contact surface that can contact the outer diameter surface of the terminal contact portion over a predetermined length section.

[0008] The region of the section contact surface may have a thickened portion that extends radially outward beyond the thickness of the skirt body.

[0009] The skirt portion may be thicker than the barrel body.

[0010] The section contact surface may be formed by chamfering.

[0011] The inner curvature of the section contact surface in the circumferential direction may be smaller than the outer curvature of the terminal contact portion in the circumferential direction.

[0012] Another embodiment of the present invention provides a test probe. The test probe includes a barrel having a tubular barrel body and a plurality of skirt portions separated from each other by slits along the longitudinal direction at one end of the barrel body, a sliding portion housed within the barrel body, and a plunger extending from the sliding portion and having a terminal contact portion exposed from the skirt portion and elastically contacting the skirt portion. The skirt portion includes a skirt body whose diameter tapers in a partial conical shape from the barrel body toward the tip, and a skirt tip portion provided at the tip region of the skirt body. The barrel body includes a protrusion on an edge facing the slit that protrudes toward the inside of the barrel.

[0013] The testing device according to the embodiment of the present invention includes a testing socket in which both ends of the testing probe are supported so as to partially protrude. [Effects of the Invention]

[0014] According to an embodiment of the present invention, an inspection probe includes a barrel body and a plurality of skirt portions separated by slits formed in a longitudinal direction at one end of the barrel body and tapering toward a central axis. A section contact surface is formed on the inner surface of the tip region of each skirt portion so as to be capable of elastically contacting the outer diameter surface of a plunger over a predetermined length section, thereby maintaining stable contact with the plunger during inspection, thereby improving the reliability of the inspection.

[0015] The skirt portion may have reduced durability due to being separated by the slits, so durability can be improved by forming at least a portion of the skirt portion to be thicker than the barrel body.

[0016] The inner diameter surface edge of the skirt portion is designed not to come into contact with the outer surface of the plunger, thereby preventing the outer surface of the plunger from being damaged during inspection.

[0017] At least a portion of the plunger that contacts the section contact surface may be formed so that its diameter decreases in the direction of pressure during testing. Therefore, durability can be improved by ensuring that the skirt portion maintains stable contact during testing and does not contact the plunger or contacts it with minimal pressure before testing. [Brief explanation of the drawings]

[0018] [Figure 1] FIG. 1 illustrates a conventional inspection probe. [Figure 2] FIG. 10 is a diagram showing a distribution of resistance values ​​measured during an inspection using a conventional inspection probe. [Figure 3] 1 is a perspective view showing an inspection probe according to a first embodiment of the present invention. [Figure 4] 4 is a cross-sectional view of the inspection probe taken along line AA in FIG. 3. [Figure 5] 4 is a diagram showing a contact state between the skirt portion of FIG. 3 and the terminal contact portion of the plunger. FIG. [Figure 6] FIG. 3 is a diagram showing a distribution of resistance values ​​measured during an inspection using the inspection probe according to the first embodiment of the present invention. [Figure 7] 1 is a diagram showing an inspection probe according to a first embodiment of the present invention and an inspection device in which the inspection probe is supported by an inspection socket. [Figure 8] FIG. 10 is a diagram showing an inspection probe according to a second embodiment of the present invention. [Figure 9] FIG. 10 is a diagram showing an inspection probe according to a third embodiment of the present invention. [Figure 10] FIG. 10 is a diagram showing an inspection probe according to a fourth embodiment of the present invention. [Figure 11] FIG. 10 is a diagram showing an inspection probe according to a fifth embodiment of the present invention. [Figure 12] FIG. 12 is a cross-sectional view taken along line BB in FIG. [Figure 13] FIG. 10 is a diagram showing an inspection probe according to a sixth embodiment of the present invention. [Figure 14] 14 is a diagram showing an operating state of the inspection probe of FIG. 13. FIG. [Figure 15] FIG. 4 is a schematic diagram showing a method for manufacturing the barrel of FIG. 3. [Figure 16] FIG. 10 is a schematic diagram showing a method for manufacturing the barrel of FIG. 9. [Figure 17] 11 is a schematic diagram showing a method for manufacturing the barrel of FIG. 10. FIG. [Figure 18] 3A to 3C are schematic diagrams illustrating an assembly process of the inspection probe according to the first embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0019] Hereinafter, an inspection probe 100 according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

[0020] FIG. 3 is a diagram showing an inspection probe 100 according to a first embodiment of the present invention, and FIG. 4 is a cross-sectional view of the inspection probe 100 taken along line AA in FIG.

[0021] 3 and 4, the inspection probe 100 includes, for example, a cylindrical barrel 110, a plunger 120 slidably coupled within one side of the barrel 110, a terminal 130 fixedly coupled to the other side of the barrel 110, and an elastic body 140 sandwiched between the plunger 120 and the terminal 130 within the barrel 110 to provide elastic force.

[0022] The barrel 110 includes a barrel body 111 and a skirt portion 112 extending longitudinally from one end into which the plunger 120 is inserted and separated by a plurality of slits 113 formed at predetermined intervals along the circumferential direction. There may be two or more slits 113. The slits 113 may extend obliquely or spirally relative to the longitudinal direction of the test probe 100. The slits 113 may be formed by cutting with a constant width or by cutting in a tapered shape.

[0023] The plunger 120 includes a sliding portion 121 that is accommodated within the barrel body 111 and slides therein, and a terminal contact portion 122 that extends from the sliding portion 121, is exposed from the skirt portion 112, and elastically contacts the skirt portion 112.

[0024] The sliding portion 121 has a diameter corresponding to the inner diameter of the barrel body 111. The diameter of the sliding portion 121 is set smaller than that of the barrel body 111 so that the sliding portion 121 can slide within the barrel body 111.

[0025] The terminal contact portion 122 has a diameter smaller than that of the sliding portion 121. The diameter of the terminal contact portion 122 is set to such an extent that the terminal contact portion 122 can pass through while making contact with the tip of the skirt portion 121. The end of the terminal contact portion 122 comes into contact with the terminal for inspection (310 in FIG. 7).

[0026] The terminal 130 is fixedly coupled to the other end of the barrel 111 by a dimple or caulking. Alternatively, the terminal 130 may be inserted in a slidable manner without being fixed.

[0027] During testing, the elastic body 140 is compressed and restored by the sliding movement of the plunger 120. The elastic body 140 may be realized by, for example, a coil spring.

[0028] FIG. 5 is a diagram showing the contact state between the skirt portion 112 of FIG. 3 and the terminal contact portion 122 of the plunger 120, and FIG. 6 is a diagram showing the distribution of resistance values ​​measured during testing using the testing probe 100 according to the first embodiment of the present invention.

[0029] Referring to FIG. 5, the skirt portion 112 has a skirt main body 1121 whose diameter decreases in a partial cone shape from the barrel main body 111 toward the tip, and a skirt tip portion 1122 provided in the tip region of the skirt main body 1121.

[0030] The inner diameter surface of skirt tip portion 1122 has a section contact surface CS that can come into contact with the outer diameter surface of terminal contact portion 122 over a predetermined length section L. The contact force with which the inner diameter surface of skirt tip portion 1122 presses against the outer surface of terminal contact portion 122 is preferably smaller than the restoring force of elastic body 140. If the contact force is greater than the restoring force of elastic body 140, plunger 120, which has entered barrel 110 due to pressure during inspection, may not return to its original position.

[0031] As shown in FIG. 5(a), the tips of the adjacent skirt portions 112 have a small clearance G between them to prevent interference between them when they elastically move in the radial direction.

[0032] When the terminal contact portion 122 is not inserted, the section contact surface CS of the skirt portion 112 is located inside the outer diameter range of the terminal contact portion 122. Therefore, when the terminal contact portion 122 is inserted, the section contact surface CS of the skirt portion 112 can always contact the outer diameter surface of the terminal contact portion 122.

[0033] The inner diameter surface of the skirt tip portion 1122 and the edge 1123 of the tip surface of the skirt tip portion 1122 are chamfered with a predetermined curvature. As an example, the inner circumferential curvature of the section contact surface CS of the skirt tip portion 1122 is smaller than the outer circumferential curvature of the terminal contact portion 122. Only a portion of the inner inner diameter of the section contact surface CS contacts the outer surface of the terminal contact portion 122. In other words, the outer edge portion of the inner diameter of the skirt tip portion 1122 can be separated from the outer diameter of the terminal contact portion 122.

[0034] This feature of the skirt tip 1122 ensures contact between the inner diameter surface of the skirt tip 1122 and the outer diameter surface of the terminal contact portion 122 while providing minimal contact force, thereby preventing the problem of the compressed plunger 120 not returning to its original position during testing. In particular, since the outer diameter surface of the terminal contact portion 122 is separated from the edge portion of the inner diameter range of the skirt tip 1122, this solves the problem of reduced durability caused by the edge portion of the skirt tip 1122 scratching the outer diameter surface of the terminal contact portion 122 during testing. In another embodiment, the inner curvature of the section contact surface CS in the circumferential direction may be smaller than the outer curvature of the terminal contact portion 122 in the circumferential direction.

[0035] The bending angle between the inner surface of the skirt body 1121 and the section contact surface CS may be 155° to 175°. The bending angle may be determined by the length of the skirt portion 112 and the outer diameter of the terminal contact portion 122.

[0036] 6, the test probe 100 of the present invention exhibits a constant resistance of approximately 50 Ω during testing. This result is due to the fact that the skirt tip 1122 of the skirt portion 112 constantly applies pressure to the outer diameter surface of the terminal contact portion 122 of the plunger 120 during testing, maintaining contact.

[0037] FIG. 7 is a diagram showing an inspection probe 100 according to a first embodiment of the present invention and an inspection device 1 in which the inspection probe 100 is supported by an inspection socket 200. As shown in FIG.

[0038] 7(a), the inspection probe 100 is in a state before being supported by the probe accommodating portion 210 of the inspection socket 200. One end 121E of the sliding portion 121 contacts the inner diameter surface of the skirt portion 112 below the bending point TP. That is, the bent skirt portion 112 serves to prevent the sliding portion 121 from slipping out of the barrel 110. Meanwhile, the pressure force applied by the skirt portion 112 to the terminal contact portion 122 is reduced by the one end 121E of the sliding portion 121.

[0039] 7(b), the test probe 100 is supported in the probe receiving portion 210 of the test socket 200. The one end 121E of the sliding portion 121 is positioned inside the barrel body 111 through the bending point TP. At this time, the skirt portion 112 is released from contact with the one end 121E of the sliding portion 121, and the reduced pressure of the skirt portion 112 can be restored and applied to the terminal contact portion 122.

[0040] FIG. 8 is a diagram showing an inspection probe 100 according to a second embodiment of the present invention.

[0041] Referring to FIG. 8, the plunger 120 includes a sliding portion 121 inserted into the barrel body 111, a terminal contact portion 122 that contacts the terminal (310 in FIG. 7) of the testing circuit board (300 in FIG. 7), and an inclined contact portion 123 that connects the sliding portion 121 and the terminal contact portion 122.

[0042] The inclined contact portion 123 has a gently inclined conical section that contacts or is close to the inner surface of the skirt portion 112 .

[0043] The test probe 100 of the present invention requires concentric movement along the central axis because the tip of the skirt portion 112 is always in contact with the terminal contact portion 122 of the plunger 120. Eccentric movement can cause problems such as forced deformation of the weak skirt portion 112, such as deformation of the bending angle. The inclined contact portion 123, which has a conical section, can move concentrically using the inner surface of the skirt portion 112 that is in contact with or close to it as a guide.

[0044] FIG. 9 is a diagram showing an inspection probe 100 according to a third embodiment of the present invention.

[0045] Referring to FIG. 9, the skirt portion 112 has a thickened portion 1124 that extends radially outward in the region of the section contact surface CS.

[0046] The section contact surface CS is formed by, for example, machining the inner diameter surface of the tip of the skirt portion 112 at a predetermined angle, as shown in Figure 15(b), so that it makes linear contact with the terminal contact portion 122 along the longitudinal direction. As a result, the thickness of the section contact surface CS region is reduced, resulting in reduced durability. The thick-walled portion 1124 can compensate for the reduced thickness caused by the angle machining of the section contact surface CS.

[0047] FIG. 10 is a diagram showing an inspection probe 100 according to a fourth embodiment of the present invention.

[0048] 10, the skirt portion 112A may be formed thicker than the barrel body 111. In this case, a portion of the barrel body 111 adjacent to the bending point TP of the skirt portion 112A may be formed thicker than the remaining portion of the barrel body 111, similar to the skirt portion 112A.

[0049] The skirt portion (112 in FIG. 3) is weak in durability because it is separated longitudinally by the slit 113. The inspection probe 100 shown in FIG. 10 can compensate for the weak durability by forming the skirt portion 112A to be thicker than the barrel body 111.

[0050] FIG. 11 is a diagram showing an inspection probe 100 according to a fifth embodiment of the present invention, and FIG. 12 is a cross-sectional view taken along line BB in FIG.

[0051] Referring to FIGS. 11 and 12, the test probe 100 includes a barrel 110 and a plunger 120 .

[0052] The barrel 110 includes at least one protrusion 114 that protrudes inward. The at least one protrusion 114 is formed along the bending point TP and along the longitudinal extension of the slit 113. The protrusion 114 may be formed by caulking the area between the barrel body 111 and the slit 113 on the outside of the barrel 110.

[0053] The plunger 120 has a step portion 123a between the sliding portion 121 and the terminal contact portion 122. The step portion 123a can be caught by the protrusion 114 to prevent the plunger 120 from coming off the barrel body 111.

[0054] FIG. 13 is a diagram showing an inspection probe 100 according to a sixth embodiment of the present invention, and FIG. 14 is a diagram showing the operation state of the inspection probe 100 of FIG.

[0055] Referring to FIG. 13, the plunger 120 includes a sliding portion 121 that is accommodated in the barrel body 111 and slides therein, and a terminal contact portion 122 that extends from the sliding portion 121 with a reduced diameter.

[0056] The terminal contact portion 122 includes a tapered portion 122T that is inclined so that the diameter decreases toward the sliding portion 121, and a horizontally extending portion 122E that extends with a constant diameter from the tapered portion 122T. The terminal contact portion 122 may be composed only of the tapered portion 122T, omitting the horizontally extending portion 122E.

[0057] Before inspection, the plunger 120 is in a state of protruding from the barrel body 111. At this time, the section contact surface CS of the skirt portion 112 may be located on the smaller diameter surface of the outer diameter surface of the tapered portion 122T. Therefore, the pressure force between the section contact surface CS of the skirt portion 112 and the outer diameter surface of the tapered portion 122T is relatively small.

[0058] 14, during inspection, the plunger 120 is pressurized and moves toward the inside of the barrel body 111. At this time, the section contact surface CS of the skirt portion 112 is located on the larger-diameter surface of the outer diameter surface of the tapered portion 122T or on the horizontally extending portion. As such, the section contact surface CS of the skirt portion 112 contacts the outer diameter surface of the tapered portion 122T with as little pressure as possible before inspection, but may contact the outer diameter surface of the tapered portion 122T or the horizontally extending portion 122E with a sufficient area and pressure during inspection. As such, by reducing the time that the skirt portion 112 maintains its deformation before inspection, fatigue at the bending point TP of the skirt portion 112 can be reduced.

[0059] FIG. 15 is a schematic diagram showing a method for manufacturing the barrel 110 of FIG.

[0060] 15(a), a cylindrical pipe member 110M made of a conductive material is formed. The pipe member 110M may include a flange 115.

[0061] In the second step, as shown in FIG. 15(b), a section contact surface CS is formed on the inner diameter surface of one end of the pipe member 110M. The section contact surface CS is formed at an angle of 5° to 25° with respect to the longitudinal direction. The section contact surface CS may be formed by various methods, such as chamfering, forging, or using a die. The angle at which the section contact surface CS is formed is such that the section contact surface CS of the skirt portion 112 is substantially parallel to the terminal contact portion 122 in FIG. 3. The angle may be determined by the bending angle of the skirt portion, the outer diameter of the terminal contact portion 122, the outer diameter of the barrel 110, etc.

[0062] 15(c), in the third step, slits 113 are formed at intervals along the longitudinal direction of one end of the pipe member 110M. The number of slits 113 is not limited to four.

[0063] 15(d), the skirt portions 112 separated by the slits 113 are bent toward the central axis. At this time, elasticity may be imparted to the skirt portions 112 in the radial direction relative to the central axis.

[0064] In a modified embodiment, the order of the steps may be changed, i.e., the section contact surface CS in the second step may be formed on the inner diameter surface of the tip of the skirt portion 112 formed in the third step or on the inner diameter surface of the tip of the bent skirt portion 112 in the fourth step.

[0065] FIG. 16 is a schematic diagram showing a method for manufacturing the barrel 110 of FIG.

[0066] 16(a), a cylindrical pipe member 110M made of a conductive material is formed. The pipe member 110M may include a flange 115.

[0067] In the second step, as shown in Fig. 16(b), a thickened portion 1124 is formed in the region of a section contact surface CS, which will be described later, so as to extend radially outward. The thickened portion 1124 may be formed by, for example, upset forging, a die, or the like.

[0068] In the third step, as shown in FIG. 16(c), a section contact surface CS is formed on the inner diameter surface of one end of the pipe member 110M. The section contact surface CS is formed at an angle of 5° to 25° with respect to the longitudinal direction. The section contact surface CS may be formed by chamfering, forging, using a die, or the like. The angle at which the section contact surface CS is formed is such that the section contact surface CS of the skirt portion 112 is substantially parallel to the terminal contact portion 122 in FIG. 3. The angle may be determined by the bending angle of the skirt portion, the outer diameter of the terminal contact portion 122, the outer diameter of the barrel 110, etc.

[0069] 16(d), slits 113 are formed at intervals along the longitudinal direction of one end of the pipe member 110M. The number of slits 113 is not limited to four.

[0070] 16(e), the skirt portions 112 separated by the slits 113 are bent toward the central axis. At this time, the skirt portions 112 may be given elasticity in the radial direction relative to the central axis.

[0071] FIG. 17 is a schematic diagram showing a method for manufacturing the barrel 110 of FIG.

[0072] 17(a), a cylindrical pipe member 110M made of a conductive material is formed. The pipe member 110M may include a flange 115.

[0073] 17(b), in the second step, the thickness of the region where the skirt portion 112T is to be formed is formed to be thicker than the thickness of the barrel body 111. The skirt portion 112T may be formed by, for example, upset forging, a die, or the like.

[0074] In the third step, as shown in FIG. 17(c), a section contact surface CS is formed on the inner diameter surface of one end of the pipe member 110M. The section contact surface CS is formed at an angle of 5° to 25° with respect to the longitudinal direction. The section contact surface CS may be formed by chamfering, forging, using a die, or the like. The angle at which the section contact surface CS is formed is such that the section contact surface CS of the skirt portion 112 is substantially parallel to the terminal contact portion 122 in FIG. 3. The angle may be determined by the bending angle of the skirt portion, the outer diameter of the terminal contact portion 122, the outer diameter of the barrel 110, etc.

[0075] 17(d), in the fourth step, slits 113 are formed at intervals along the longitudinal direction of one end of the pipe member 110M. The number of slits 113 is not limited to four.

[0076] 17(e), the skirt portions 112 separated by the slits 113 are bent toward the central axis. At this time, elasticity may be imparted to the skirt portions 112 in the radial direction relative to the central axis.

[0077] FIG. 18 is a schematic diagram showing the assembly process of the inspection probe 100 according to the first embodiment of the present invention.

[0078] The first step is to form a barrel 110 having a skirt 112 at one end by the method shown in FIG.

[0079] In the second step, the plunger 120 is inserted from the other end of the barrel 110 so that the terminal contact portion 122 protrudes from the skirt portion 112 .

[0080] In the third step, the elastic body 140 is inserted into the barrel 110 from the other end of the barrel 110 .

[0081] In the fourth step, the terminal 140 is partially inserted and fixed into the other end of the barrel 110. The terminal 130 may be fixed by caulking (punching) the barrel 110 at a position corresponding to the groove 131 of the terminal 130.

[0082] While preferred embodiments of the present invention have been illustrated and described above, the present invention is not limited to the specific embodiments described above, and it goes without saying that various modifications can be made by those skilled in the art to which the invention pertains without departing from the gist of the present invention as claimed in the claims, and such modified embodiments should not be understood separately from the technical ideas and perspectives of the present invention. [Explanation of symbols]

[0083] 1: Inspection device 100: Inspection probe 110: Barrel 111: Barrel body 112: Skirt part 1121: Skirt body 1122: Skirt tip 1123: Tip 1124: Thick part 113: Slit 114: Protrusion 120: Plunger 121: Sliding portion 122: Terminal contact portion 122T: Tapered part 122E: Horizontal extension part 123: Inclined contact portion 130: Terminal 140: Elastic body 200: Inspection socket 210: Probe storage section 300: Inspection circuit board 310: Terminal CS: Section contact surface TP: Turning point

Claims

1. An inspection probe, a barrel having a tubular barrel body and a plurality of skirt portions separated from each other by slits along a longitudinal direction at one end of the barrel body; a sliding portion accommodated in the barrel body; and a plunger extending from the sliding portion and having a terminal contact portion exposed from the skirt portion and elastically contacting the skirt portion, the skirt portion includes a skirt main body whose diameter decreases in a partial conical shape from the barrel main body toward the tip, and a skirt tip portion provided in a tip region of the skirt main body, The inspection probe has an inner diameter surface of the skirt tip portion having a section contact surface that can come into contact with the outer diameter surface of the terminal contact portion over a predetermined length section.

2. The test probe of claim 1 , wherein the section contact surface region has a thickened portion that extends radially outward beyond the thickness of the skirt body.

3. The test probe of claim 1 , wherein the skirt portion is thicker than the barrel body.

4. The inspection probe according to claim 1 , wherein the section contact surface is formed by chamfering.

5. 2. The inspection probe according to claim 1, wherein the inner curvature in the circumferential direction of the section contact surface is smaller than the outer curvature in the circumferential direction of the terminal contact portion.

6. An inspection probe, a barrel having a tubular barrel body and a plurality of skirt portions separated from each other by slits along a longitudinal direction at one end of the barrel body; a plunger having a sliding portion accommodated in the barrel body and a terminal contact portion extending from the sliding portion and exposed from the skirt portion to elastically contact the skirt portion; the skirt portion includes a skirt main body whose diameter decreases in a partial conical shape from the barrel main body toward the tip, and a skirt tip portion provided in a tip region of the skirt main body, The inspection probe, wherein the barrel body includes a protrusion on an edge facing the slit that protrudes inward of the barrel body.

7. An inspection device, The inspection probe according to any one of claims 1 to 6, a test socket that supports the test probe so that both ends of the test probe partially protrude.

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