Optical ranging sensor

Abstract

To provide a proximity optical sensor having a configuration suitable for miniaturization.SOLUTION: A common optical function part 10 having one function of light emitting and light receiving, a first optical function part 11 and a second optical function part 12 having the other function of light emitting and light receiving, and a first light shielding wall 21 arranged between the common optical function part 10 and the first optical function part 11 are provided, and a part of light emitted from a function part having a light emitting function among the common optical function part 10, the first optical function part 11, and the second optical function part 12 and reflected by an object positioned on a directional axis of the common optical function part 10 is received by a function part having a light receiving function. The first optical functional unit 11 and the second optical functional unit 12 have directional characteristics different from each other, and when a virtual plane orthogonal to a directional axis of the common optical functional unit 10 is set as a height reference and a direction in which the directional axis of the common optical functional unit 10 faces is defined as a positive height, no light shielding wall is disposed or a second light shielding wall lower than the first light shielding wall is disposed between the common optical functional unit 10 and the second optical functional unit 12.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an optical distance measuring sensor. [Background technology]

[0002] An optical distance measuring sensor is known that measures the distance to an object by detecting light emitted from a light-emitting element and reflected by the object with a light-receiving element (Patent Document 1). The distance measuring sensor disclosed in Patent Document 1 has one light-receiving element and two pairs of light-emitting elements arranged on a single line. The two light-emitting elements that make up each pair of light-emitting elements are driven by signals that are 90° out of phase with each other. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Special Publication No. 62-17163 Summary of the Invention [Problem to be solved by the invention]

[0004] In the distance measuring sensor disclosed in Patent Document 1, a light-emitting element must be placed on both sides of the light-receiving element. This requires a large space to place the light-receiving element and multiple light-emitting elements, making it difficult to miniaturize the proximity light sensor. An object of the present invention is to provide a proximity light sensor with a configuration suitable for miniaturization. [Means for solving the problem]

[0005] According to one aspect of the present invention, a shared optical function unit having one of a light emitting function and a light receiving function; a first optical function unit and a second optical function unit each having the other of a light emitting function and a light receiving function; a first light-shielding wall disposed between the shared optical function unit and the first optical function unit; It is equipped with the shared optical function unit has a directivity characteristic in which the half-value angle from a directional axis is 15° or less, the shared optical function unit, the first optical function unit, and the second optical function unit are arranged so that a part of light emitted from a function unit having a light-emitting function among the shared optical function unit, the first optical function unit, and the second optical function unit and reflected by an object located on a directional axis of the shared optical function unit can be received by a function unit having a light-receiving function; the first optical function unit and the second optical function unit have different directional characteristics from each other, An optical ranging sensor is provided in which, when a virtual plane perpendicular to the directional axis of the shared optical function unit is used as the height reference and the direction in which the directional axis of the shared optical function unit faces is defined as positive height, either no light-shielding wall is placed between the shared optical function unit and the second optical function unit, or a second light-shielding wall lower than the first light-shielding wall is placed.

[0006] According to another aspect of the present invention, a substrate having a first surface; a shared optical function unit having one of a light emitting function and a light receiving function; a first optical function unit and a second optical function unit each having the other of a light emitting function and a light receiving function; Equipped with the shared optical function unit, the first optical function unit, and the second optical function unit are arranged so that a part of light emitted from a function unit having a light-emitting function among the shared optical function unit, the first optical function unit, and the second optical function unit and reflected by an object located on a directional axis of the shared optical function unit can be received by a function unit having a light-receiving function; the shared optical function unit, the first optical function unit, and the second optical function unit are each disposed on the first surface and include a shared active unit, a first active unit, and a second active unit, each made of a semiconductor that emits or receives light, and a shared directional characteristic adjustment structure, a first directional characteristic adjustment structure, and a second directional characteristic adjustment structure, each disposed on a side of the shared active unit, the first active unit, and the second active unit facing the first surface, the shared directional characteristic adjusting structure includes a plurality of shared light-shielding portions extending from the shared active portion toward a normal direction of the first surface and arranged with gaps in a direction parallel to the first surface in a first cross section that passes through the shared active portion and the first active portion and is perpendicular to the first surface, and in a second cross section that passes through the shared active portion and the second active portion and is perpendicular to the first surface, the first directivity adjustment structure includes, in the first cross section, a plurality of first light-shielding portions extending from the first active portion in a direction inclined toward an opposite side to the shared active portion with respect to a normal direction of the first surface and arranged with gaps in between in a direction parallel to the first surface; the second directivity adjustment structure includes, in the second cross section, a plurality of second light-shielding portions extending from the second active portion in a direction inclined toward the shared active portion with respect to a normal direction of the first surface and arranged with gaps in between in a direction parallel to the first surface; The optical distance measuring sensor is provided in which the height of the first light-shielding portion is higher than the heights of the shared light-shielding portion and the second light-shielding portion, with the first surface being used as a height reference. [Effects of the Invention]

[0007] Because distance measurement can be performed using three functional units, namely, the shared optical functional unit, the first optical functional unit, and the second optical functional unit, it is possible to achieve a smaller size compared to conventional optical distance measurement sensors. Furthermore, by providing a first light-shielding wall, stray light between the shared optical functional unit and the first optical functional unit can be suppressed. Since there is no light-shielding wall between the shared optical functional unit and the second optical functional unit, or a second light-shielding wall lower than the first light-shielding wall is provided, reflected light from the object can be received when the shared optical functional unit and the second optical functional unit are operated, even when the object is extremely close. This allows distance measurement to be performed even when the object is extremely close. [Brief explanation of the drawings]

[0008] [Figure 1] 1A and 1B are a plan view and a perspective view, respectively, of an optical distance measuring sensor according to a first embodiment. [Figure 2]2A and 2B are cross-sectional views taken along dashed dotted lines 2A-2A and 2B-2B in FIG. 1A, respectively. [Figure 3] FIG. 3 is a schematic diagram for explaining a method for calculating the distance to the object. [Figure 4] FIG. 4A is a graph showing the relationship between the ideal light reception levels S1 and S2 calculated from equation (3) and the distance z, and FIG. 4B is a graph showing the relationship between the ratio S1 / S2 of the light reception levels and the distance z. [Figure 5] 5A is a graph showing the results of a simulation of the relationship between the light reception levels S1 and S2 and the distance z when the first light-shielding wall 21 and the second light-shielding wall 22 are not provided, FIG. 5B is a graph showing the relationship between the light reception level ratio S1 / S2 calculated based on the light reception levels S1 and S2 shown in FIG. 5A and the distance z, and FIG. 5C is a graph showing the relationship between the light reception levels S1 and S2 and the distance z when the second light-shielding wall 22 is set to the same height as the first light-shielding wall 21, obtained by simulating the relationship. FIG. 5D is a graph showing the relationship between the ratio S1 / S2 of the light reception levels calculated based on the light reception levels S1 and S2 shown in FIG. 5C and the distance z. FIG. 5E is a graph showing the results of the relationship between the light reception levels S1 and S2 and the distance z in the optical distance measuring sensor according to the first embodiment obtained by simulation. FIG. 5F is a graph showing the relationship between the ratio S1 / S2 of the light reception levels calculated based on the light reception levels S1 and S2 shown in FIG. 5E and the distance z. [Figure 6] FIG. 6A is a perspective view of the optical distance measuring sensor according to the second embodiment, and FIG. 6B is a cross-sectional view passing through the shared optical function unit 10 and the second optical function unit 12. As shown in FIG. [Figure 7] Figure 7A is a graph showing the simulation results of the relationship between the light receiving level S1 of the first optical function unit 11 and the light receiving level S2 of the second optical function unit 12 of the optical distance measuring sensor according to the second embodiment and the distance z to the target object 60 (Figure 2), and Figure 7B is a graph showing the relationship between the light receiving level ratio S1 / S2 calculated based on the light receiving levels S1 and S2 shown in Figure 7A and the distance z. [Figure 8]8A and 8B are cross-sectional views of an optical distance measuring sensor according to a third embodiment. [Figure 9] 9A and 9B are cross-sectional views of an optical distance measuring sensor according to the fourth embodiment. [Figure 10] 10A and 10B are cross-sectional views of an optical distance measuring sensor according to the fifth embodiment. [Figure 11] 11A and 11B are cross-sectional views of an optical distance measuring sensor according to the sixth embodiment. [Figure 12] FIG. 12 is a plan view of the optical distance measuring sensor according to the seventh embodiment. [Figure 13] FIG. 13 is a plan view of the optical distance measuring sensor according to the eighth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0009] [First Example] An optical distance measuring sensor according to a first embodiment will be described with reference to FIGS. 1A to 5F. 1A and 1B are a plan view and a perspective view, respectively, of an optical distance measuring sensor according to a first embodiment. A shared optical function unit 10, a first optical function unit 11, and a second optical function unit 12 are mounted on a first surface 41, which is one surface of a substrate 30. The shared optical function unit 10 has one of the functions of emitting light and receiving light, and the first optical function unit 11 and the second optical function unit 12 have the other of the functions of emitting light and receiving light. In the first embodiment, an example will be described in which the shared optical function unit 10 has the function of emitting light, and the first optical function unit 11 and the second optical function unit 12 have the function of receiving light.

[0010] A half line extending in a direction in which the intensity of light emitted from the shared optical function unit 10 is maximized is called a directional axis 10C. For example, the directional axis 10C is perpendicular to the first surface 41. The optical distance measuring sensor according to the first embodiment measures the distance to an object on the directional axis 10C. The shared optical function unit 10, the first optical function unit 11, and the second optical function unit 12 have a positional relationship in which part of the light emitted from the shared optical function unit 10 and diffusedly reflected by the object on the directional axis 10C is received by the first optical function unit 11 and the second optical function unit 12.

[0011] The shared optical function unit 10 and the first optical function unit 11 form one light receiving / emitting pair, and the shared optical function unit 10 and the second optical function unit 12 form another light receiving / emitting pair. The shared optical function unit 10 is shared by the two light receiving / emitting pairs.

[0012] The shared optical function section 10, the first optical function section 11, and the second optical function section 12 are arranged at positions corresponding to the vertices of a triangle whose maximum interior angle is 90° or less when the first surface 41 is viewed in a plane (hereinafter, sometimes simply referred to as "in a plane view").

[0013] In a plan view, a light-shielding frame 31 is arranged so as to surround the shared optical function unit 10, the first optical function unit 11, and the second optical function unit 12. The frame 31 is fixed to a first surface 41 of the substrate 30. A first light-shielding wall 21 is arranged between the shared optical function unit 10 and the first optical function unit 11, and a second light-shielding wall 22 is arranged between the shared optical function unit 10 and the second optical function unit 12. The first light-shielding wall 21 and the second light-shielding wall 22 are made of the same material as the frame 31 and are integrally formed therewith.

[0014] A processing unit 50 is mounted on the first surface 41 of the substrate 30. The processing unit 50 controls the operations of the shared optical function unit 10, the first optical function unit 11, and the second optical function unit 12, and calculates the distance to the target based on the measured light reception levels measured by the two light receiving and emitting pairs. The processing unit 50 may be mounted on the surface of the substrate 30 opposite to the first surface 41, or may be mounted on a substrate different from the substrate 30.

[0015] 2A and 2B are cross-sectional views taken along dashed lines 2A-2A and 2B-2B in FIG. 1A, respectively. The shared optical function unit 10 may be, for example, a light-emitting diode (LED) with a lens or a vertical-cavity surface-emitting laser (VCSEL) with a lens. The shared optical function unit 10 includes a semiconductor shared active unit 10A and a shared condenser lens 10B disposed in front of the shared active unit 10A. The optical axis of the shared condenser lens 10B coincides with the directional axis 10C. Here, "forward" refers to the direction in which the shared optical function unit 10 emits light and the direction in which the first optical function unit 11 and the second optical function unit 12 are sensitive. In FIGS. 2A and 2B, thin closed solid lines indicate examples of the directional characteristic patterns of the shared optical function unit 10, the first optical function unit 11, and the second optical function unit 12.

[0016] The shared optical function section 10 , the first optical function section 11 , the second optical function section 12 , the first light-shielding wall 21 , the second light-shielding wall 22 , and the frame 31 are fixed to a first surface 41 of the substrate 30 .

[0017] The intensity of the light emitted in the direction of the directional axis 10C is maximized. The half-value angle of the directional characteristic of the shared optical function unit 10 is denoted as α0. The "half-value angle" is the angle between the directional axis 10C and the direction in which the light intensity is half of the intensity in the direction of the directional axis 10C.

[0018] A lens-equipped photodiode or a lens-equipped phototransistor is used as the first optical function unit 11 and the second optical function unit 12. The first optical function unit 11 includes a first active unit 11A and a first condenser lens 11B arranged in front of the first active unit 11A. The second optical function unit 12 includes a second active unit 12A and a second condenser lens 12B arranged in front of the second active unit 12A.

[0019] The half line that faces the direction in which the light receiving sensitivity is maximum in the directional characteristics of the first optical function unit 11 is called the directional axis 11C. The directional axis 11C is inclined in a direction away from the directional axis 10C of the shared optical function unit 10. The half-value angle of the directional characteristics of the first optical function unit 11 is denoted as α1.

[0020] The half line that faces the direction in which the light receiving sensitivity is maximized in the directional characteristics of the second optical function unit 12 is called the directional axis 12C. The directional axis 12C is inclined in a direction approaching the directional axis 10C of the shared optical function unit 10. The half-value angle of the directional characteristics of the second optical function unit 12 is denoted as α2.

[0021] As described above, the first optical function unit 11 and the second optical function unit 12 have different directional characteristics. Here, "different" means that the directional characteristics of the two units are different when mounted on the substrate 30. For example, even if the directional characteristics of the first optical function unit 11 and the second optical function unit 12 are the same when mounted on the substrate 30 in different orientations, the directional characteristics of the two units will be different. For example, when comparing the light receiving sensitivity of the first optical function unit 11 and the second optical function unit 12 in a direction toward an arbitrary point within the distance measurement range on the directional axis 10C of the shared optical function unit 10, the second optical function unit 12 has a higher sensitivity than the first optical function unit 11.

[0022] The shared optical function unit 10 has a narrower directivity than the first optical function unit 11 and the second optical function unit 12. That is, the half-value angle α0 of the directivity of the shared optical function unit 10 is smaller than both the half-value angles α1 and α2 of the directivity of the first optical function unit 11 and the second optical function unit 12. For example, the half-value angle α0 is 15° or less.

[0023] A first light-shielding wall 21 is disposed between the shared optical function unit 10 and the first optical function unit 11, and a second light-shielding wall 22 is disposed between the shared optical function unit 10 and the second optical function unit 12. When an imaginary plane perpendicular to the directional axis 10C of the shared optical function unit 10, for example, the first surface 41, is used as the height reference, the second light-shielding wall 22 is lower than the first light-shielding wall 21. Here, the traveling direction of light emitted from the shared optical function unit 10 is defined as a positive height.

[0024] Next, a method for calculating the distance to an object will be described with reference to FIG. 3. FIG. 3 is a schematic diagram for explaining the method for calculating the distance to an object. An object 60 is located on a directional axis 10C of the shared optical function unit 10. The intersection of the directional axis 10C and the surface of the object 60 is referred to as an observation point P. The first optical function unit 11 and the second optical function unit 12 are disposed on a virtual plane 40 that includes the shared optical function unit 10 and is perpendicular to the directional axis 10C. In reality, as shown in FIG. 1A, the plane including the directional axis 10C and the first optical function unit 11 and the plane including the directional axis 10C and the second optical function unit 12 are not the same plane, but in FIG. 3, these two planes are represented as a single plane.

[0025] 3, the first optical function unit 11 is represented as an ideal point light source, and the first optical function unit 11 and the second optical function unit 12 are represented as points that serve as references for defining the directional characteristics of the light receiving sensitivity. The distance from the shared optical function unit 10 to the first optical function unit 11 is denoted as d1, and the distance from the shared optical function unit 10 to the second optical function unit 12 is denoted as d2.

[0026] The distance from the shared optical function unit 10 to the observation point P is denoted as z. The distances from the observation point P to the first optical function unit 11 and the second optical function unit 12 are denoted as r1 and r2, respectively. The angle between the line segment connecting the observation point P and the first optical function unit 11 and the directional axis 10C is denoted as θ1, and the angle between the line segment connecting the observation point P and the second optical function unit 12 and the directional axis 10C is denoted as θ2. The tilt angle of the directional axis 11C of the first optical function unit 11 relative to the normal direction of the virtual plane 40 is denoted as ρ1, and the tilt angle of the directional axis 11C of the second optical function unit 12 is denoted as ρ2. Here, the tilt angle away from the directional axis 10C is defined as positive. Therefore, in the first embodiment, the tilt angle ρ2 is a negative value.

[0027] Generally, the directional characteristics of the light receiving elements such as the first optical function unit 11 and the second optical function unit 12 can be approximated by a power function of a cosine function. The exponents used when approximating the directional characteristics of the first optical function unit 11 and the second optical function unit 12 by a power function of a cosine function are denoted as n1 and n2, respectively.

[0028] Since the shared optical function unit 10 has narrow directional characteristics, it is assumed that the light emitted from the shared optical function unit 10 is substantially incident on the observation point P. It is assumed that the surface of the object 60 is a uniform diffuse reflecting surface. The distances r1 and r2 are given by the following equations.

number

[0029] The angles θ1 and θ2 are given by the following equations:

number

[0030] The emitted luminous intensity of the shared optical function unit 10 is denoted as G, and the reflectance of the surface of the object 60 is denoted as α. The light intensity at the positions of the first optical function unit 11 and the second optical function unit 12 is proportional to the emitted luminous intensity G and the reflectance α. Furthermore, the light intensity at the positions of the first optical function unit 11 and the second optical function unit 12 is inversely proportional to the square of the distances r1 and r2, respectively. When the directional characteristics of the first optical function unit 11 and the second optical function unit 12 are taken into consideration in addition to this light intensity, the light receiving levels S1 and S2 of the first optical function unit 11 and the second optical function unit 12 are expressed by the following equations:

number

[0031] The ratio S1 / S2 of the light reception level S1 by the first optical function unit 11 to the light reception level S2 by the second optical function unit 12 is expressed by the following formula.

number

[0032] 4A is a graph showing the relationship between the ideal light receiving levels S1 and S2 calculated from Equation (3) and the distance z. The horizontal axis represents the distance z in units of mm, and the vertical axis represents the light receiving levels S1 and S2 in arbitrary units. The distances d1 and d2 were set to 5.0 mm, and the inclination angles ρ1 and ρ2 were set to +17° and -16°, respectively. The exponents n1 and n2 of the cosine functions representing the directional characteristics of the first optical function unit 11 and the second optical function unit 12 were set to 15 and 32, respectively.

[0033] FIG. 4B is a graph showing the relationship between the ratio S1 / S2 of the received light levels and the distance z. The horizontal axis represents the distance z in units of mm, and the vertical axis represents the ratio S1 / S2 of the received light levels. The ratio S1 / S2 of the received light levels increases monotonically with the distance z. In other words, there is a one-to-one correspondence between the ratio S1 / S2 of the received light levels and the distance z. Therefore, the distance z can be calculated based on the ratio S1 / S2 of the received light levels.

[0034] 4A and 4B, the shared optical function unit 10 is assumed to be a point light source, and the first optical function unit 11 and the second optical function unit 12 are assumed to be reference points for defining the directional characteristics of the light-receiving sensitivity. However, as shown in FIGS. 2A and 2B, the actual shared optical function unit 10 includes a shared active unit 10A, which is a light-emitting unit, and a shared condenser lens 10B arranged in front of it. Similarly, the first optical function unit 11 includes a first active unit 11A, which is a light-receiving unit, and a first condenser lens 11B arranged in front of it, and the second optical function unit 12 includes a second active unit 12A, which is a light-receiving unit, and a second condenser lens 12B arranged in front of it.

[0035] Therefore, in addition to the reflected light from the object 60 (FIG. 3), stray light such as direct light from the shared optical function unit 10 and multiple reflected light may be incident on the first optical function unit 11 and the second optical function unit 12. When the object 60 is located near the vertex of the shared focusing lens 10B of the shared optical function unit 10, the light receiving levels S1 and S2 become larger than the theoretically calculated values ​​due to the influence of the stray light.

[0036] Fig. 5A is a graph showing the results of a simulation of the relationship between the light reception levels S1 and S2 and the distance z when the first light-shielding wall 21 and the second light-shielding wall 22 are not disposed. The distance z from the vertex of the shared focusing lens 10B is defined as 0 mm. Fig. 5B is a graph showing the relationship between the distance z and the ratio S1 / S2 of the light reception levels calculated based on the light reception levels S1 and S2 shown in Fig. 5A. The horizontal axis of Fig. 5A and Fig. 5B represents the distance z in mm, the vertical axis of Fig. 5A represents the light reception level in arbitrary units, and the vertical axis of Fig. 5B represents the light reception level ratio S1 / S2.

[0037] Comparing the graph in FIG. 5A with the graph in FIG. 4A, it can be seen that the light reception levels S1 and S2 increase when the distance z is near 0 mm. Furthermore, the rate of increase in the light reception level S1 when the distance z is near 0 mm is greater than the rate of increase in the light reception level S2. Therefore, as the distance z gradually increases from 0 mm, the ratio of the light reception levels S1 / S2 decreases, reaches a minimum value, and then begins to increase. Therefore, even if the ratio of the light reception levels S1 / S2 is calculated, the distance z cannot be uniquely determined.

[0038] Stray light can be reduced by placing a light-shielding wall between the light-emitting unit and the light-receiving unit. A simulation was performed on an optical distance measuring sensor according to a comparative example in which the second light-shielding wall 22 (FIG. 2B) of the first embodiment is set to the same height as the first light-shielding wall 21 (FIG. 2A).

[0039] Fig. 5C is a graph showing the results of a simulation of the relationship between the light reception levels S1 and S2 and the distance z in an optical distance measuring sensor according to a comparative example in which the second light-shielding wall 22 is set to the same height as the first light-shielding wall 21. Fig. 5D is a graph showing the relationship between the light reception level ratio S1 / S2 calculated based on the light reception levels S1 and S2 shown in Fig. 5C and the distance z. The horizontal axis of Fig. 5C and Fig. 5D represents the distance z in units of mm, the vertical axis of Fig. 5C represents the light reception level in arbitrary units, and the vertical axis of Fig. 5D represents the light reception level ratio S1 / S2.

[0040] Comparing the graph in Figure 5C with the graph in Figure 5A, it can be seen that the light reception levels S1 and S2 decrease when the distance z is near 0 mm. This is because stray light is reduced. When the distance z to the object is 0 mm, the light reception levels S1 and S2 are both nearly 0, making it difficult to distinguish between a case where the distance z to the object is 0 mm and a case where there is no object.

[0041] Furthermore, when the distance z is near 0 mm, the denominator value of the ratio S1 / S2 of the received light levels approaches 0, which may make it impossible to calculate the ratio S1 / S2 of the received light levels. Even if the ratio can be calculated, the calculated value of the ratio S1 / S2 of the received light levels becomes unstable. For example, as shown in FIG. 5D, when the distance z is near 0 mm, the relationship between the ratio S1 / S2 of the received light levels and the distance z exhibits a similar trend to that shown in FIG. 5B. Therefore, even if the ratio S1 / S2 of the received light levels is calculated, the distance z cannot be uniquely determined.

[0042] Fig. 5E is a graph showing the results of a simulation of the relationship between the light reception levels S1 and S2 and the distance z in the optical distance measuring sensor according to the first embodiment. Fig. 5F is a graph showing the relationship between the light reception level ratio S1 / S2 calculated based on the light reception levels S1 and S2 shown in Fig. 5E and the distance z. The horizontal axis of Fig. 5E and Fig. 5F represents the distance z in units of mm, the vertical axis of Fig. 5E represents the light reception level in arbitrary units, and the vertical axis of Fig. 5F represents the light reception level ratio S1 / S2.

[0043] Because the height of the first light-shielding wall 21 (FIG. 2A) is the same as that of the comparative example shown in FIG. 5C, the light reception level S1 is approximately the same as the light reception level S1 in the comparative example (FIG. 5C). Because the height of the second light-shielding wall 22 (FIG. 2B) is lower than that of the second light-shielding wall in the comparative example shown in FIG. 5C, the light reception level S2 is higher than the light reception level S2 shown in FIG. 5C when the distance z is near 0 mm. Because the light reception level S2 does not become 0 even when the distance z to the object is 0 mm, it is possible to distinguish between a case where the distance z to the object is 0 mm and a case where the object does not exist.

[0044] 5F, even when the distance z is close to 0 mm, the ratio S1 / S2 of the received light levels increases almost monotonically with respect to the distance z. This makes it possible to calculate the distance z based on the ratio S1 / S2 of the received light levels even when the distance z is close to 0 mm.

[0045] Next, the excellent effects of the first embodiment will be described. In the first embodiment, distance measurement can be performed using the shared optical function unit 10, the first optical function unit 11, and the second optical function unit 12, making it possible to miniaturize the optical distance measurement sensor compared to conventional distance measurement sensors that require the arrangement of four or more light-receiving and light-emitting elements.

[0046] When the optical distance measuring sensor is miniaturized and the distance from the shared optical function unit 10 to the first optical function unit 11 and the distance from the shared optical function unit 10 to the second optical function unit 12 are shortened, the influence of stray light increases. In the first embodiment, a first light-shielding wall 21 (FIG. 2A) is arranged between the shared optical function unit 10 and the first optical function unit 11, and a second light-shielding wall 22 (FIG. 2B) is arranged between the shared optical function unit 10 and the second optical function unit 12, so that the sensor is less susceptible to the influence of stray light. In particular, when the optical distance measuring sensor is miniaturized to the point where the center-to-center distance between the shared active unit 10A and the first active unit 11A and the center-to-center distance between the shared active unit 10A and the second active unit 12A are 5 mm or less, a remarkable effect of being less susceptible to the influence of stray light is obtained.

[0047] Furthermore, since the height of the second light-shielding wall 22 is lower than the height of the first light-shielding wall 21, as explained with reference to Figures 5E and 5F, distance measurement is possible even when an object 60 (Figure 3) is present in close proximity to the shared optical function unit 10.

[0048] Next, the preferred heights of the first light-shielding wall 21 and the second light-shielding wall 22 will be described. In order to suppress the incidence of stray light from the shared optical function unit 10 to the first optical function unit 11, it is preferable to make the first light-shielding wall 21 high. For example, it is preferable to make the height of the first light-shielding wall 21 equal to or higher than the height of the midpoint of the line segment L1 (FIG. 2A) connecting the vertex of the shared condenser lens 10B and the vertex of the first condenser lens 11B. Conversely, if the first light-shielding wall 21 is made too high, the lower limit of the measurable distance z (FIG. 3) becomes longer. For example, it is preferable to make the upper surface of the first light-shielding wall 21 at the same height as or lower than the top surface of the frame 31.

[0049] As described with reference to FIGS. 5C and 5D, if the second light-shielding wall 22 (FIG. 2B) is raised, the light-receiving level S2 of the second optical function unit 12 decreases when the distance z is near 0 mm, making it impossible to perform stable distance measurement. It is preferable to lower the second light-shielding wall 22 so that light of a certain intensity is incident on the second optical function unit 12 when the distance z to the target object is 0 mm. For example, it is preferable to lower the second light-shielding wall 22 so that it does not intersect with a half-line L3 inclined by a half-value angle α2 of the directivity characteristic from the directional axis 12C (FIG. 2B) of the second optical function unit 12 toward the directional axis 10C of the shared optical function unit 10. Alternatively, it is preferable to position the second light-shielding wall 22 at a position lower than the line segment L2 (FIG. 2B) connecting the vertex of the shared focusing lens 10B and the second active unit 12A.

[0050] Next, a description will be given of a preferred positional relationship in plan view among the shared optical function unit 10, the first optical function unit 11, and the second optical function unit 12. As the positions in plan view of the shared optical function unit 10, the first optical function unit 11, and the second optical function unit 12, it is preferable to adopt the center positions of the shared active unit 10A, the first active unit 11A, and the second active unit 12A (FIGS. 2A and 2B), respectively.

[0051] When the angle between the ray from the shared optical function unit 10 toward the first optical function unit 11 and the ray from the shared optical function unit 10 toward the second optical function unit 12 becomes large, the ratio S1 / S2 of the light receiving levels becomes more susceptible to the inclination of the surface of the object 60 with respect to the directional axis 10C. In order to reduce the influence of the inclination of the surface of the object 60 with respect to the directional axis 10C, it is preferable to reduce the angle between the ray from the shared optical function unit 10 toward the first optical function unit 11 and the ray from the shared optical function unit 10 toward the second optical function unit 12. For example, it is preferable to set this angle to 90° or less, and more preferably to set it to 60° or less.

[0052] Next, an optical distance measuring sensor according to a modification of the first embodiment will be described. In the first embodiment, the shared optical function unit 10 has a light-emitting function, and the first optical function unit 11 and the second optical function unit 12 have a light-receiving function, but conversely, the shared optical function unit 10 may have a light-receiving function, and the first optical function unit 11 and the second optical function unit 12 may have a light-emitting function. In this case, the directional characteristics of the shared optical function unit 10 are the directional characteristics of the light-receiving sensitivity, and the directional characteristics of the first optical function unit 11 and the second optical function unit 12 are the directional characteristics of the intensity of the emitted light.

[0053] In formulas (1) and (2), it is assumed that the directional axis 10C of the shared optical function unit 10 is orthogonal to a virtual plane 40 ( FIG. 3 ) including the positions of the shared optical function unit 10, the first optical function unit 11, and the second optical function unit 12, but the two do not necessarily have to be orthogonal. If the angle θ0 between the ray from the shared optical function unit 10 toward the first optical function unit 11 and the directional axis 10C is known, the distance r1 can be expressed in terms of the distance d1, the distance z, and the angle θ0 using the law of cosines instead of formula (1). Furthermore, the angle θ1 can be expressed in terms of the distance d1, the distance z, and the angle θ0 instead of formula (2) using the law of sines.

[0054] [Second Example] Next, an optical distance measuring sensor according to a second embodiment will be described with reference to Figures 6A to 7B. Below, a description of the configuration common to the optical distance measuring sensor according to the first embodiment described with reference to Figures 1A to 5F will be omitted.

[0055] Fig. 6A is a perspective view of the optical distance measuring sensor according to the second embodiment, and Fig. 6B is a cross-sectional view passing through the shared optical function unit 10 and the second optical function unit 12. In the optical distance measuring sensor according to the first embodiment, as shown in Figs. 1B and 2B, a second light-shielding wall 22 is arranged between the shared optical function unit 10 and the second optical function unit 12. In contrast, in the optical distance measuring sensor according to the second embodiment, no light-shielding wall is arranged between the shared optical function unit 10 and the second optical function unit 12.

[0056] Fig. 7A is a graph showing the simulation results of the relationship between the light receiving level S1 of the first optical function unit 11 and the light receiving level S2 of the second optical function unit 12 of the optical distance measuring sensor according to the second embodiment and the distance z (Fig. 2) to the target object 60. Fig. 7B is a graph showing the relationship between the light receiving level ratio S1 / S2 calculated based on the light receiving levels S1 and S2 shown in Fig. 7A and the distance z. The horizontal axis of Fig. 7A and Fig. 7B represents the distance z in units of mm, the vertical axis of Fig. 7A represents the light receiving level in arbitrary units, and the vertical axis of Fig. 7B represents the light receiving level ratio S1 / S2.

[0057] In the optical distance measuring sensor according to the second embodiment, it can be seen that the light reception level S2 (FIG. 5E) is higher when the distance z is near 0 mm compared to the light reception level S2 (FIG. 5E) in the optical distance measuring sensor according to the first embodiment in which the second light-shielding wall 22 (FIG. 2B) is disposed. In the second embodiment, as in the first embodiment, the ratio of the light reception levels S1 / S2 increases monotonically with respect to the distance z, as shown in FIG. 7B.

[0058] Next, the excellent effects of the second embodiment will be described. In the second embodiment, as in the first embodiment (FIG. 5F), the ratio S1 / S2 of the received light levels increases monotonically with respect to the distance z, making distance measurement possible even when the distance z is close to 0 mm. Compared to the optical distance measuring sensor of the second embodiment, the optical distance measuring sensor of the first embodiment has less stray light reaching the second optical function unit 12 due to the provision of the second light-shielding wall 22 (FIG. 2B). Stray light is a factor that reduces the S / N ratio. When a high S / N ratio is required, it is preferable to provide the second light-shielding wall 22, as in the optical distance measuring sensor of the first embodiment.

[0059] [Third Example] Next, an optical distance measuring sensor according to a third embodiment will be described with reference to Figures 8A and 8B. Below, a description of the configuration common to the optical distance measuring sensor according to the first embodiment described with reference to Figures 1A to 5F will be omitted.

[0060] 8A and 8B are cross-sectional views of an optical distance measuring sensor according to a third embodiment. In the optical distance measuring sensor according to the first embodiment (FIGS. 2A and 2B), a lensed LED or lensed VCSEL including a shared active section 10A and a shared condenser lens 10B is used as the shared optical function section 10. A lensed photodiode or lensed phototransistor including an active section and a condenser lens is used as the first optical function section 11 and the second optical function section 12. These components are mounted on a first surface 41 of a substrate 30.

[0061] In contrast to this, in the optical distance measuring sensor according to the third embodiment, the shared active unit 10A, the first active unit 11A, and the second active unit 12A are mounted on the first surface 41 of the substrate 30, and the shared condenser lens 10B, the first condenser lens 11B, and the second condenser lens 12B are supported by at least one of the frame 31, the first light-shielding wall 21, and the second light-shielding wall 22. The shared active unit 10A and the shared condenser lens 10B form a shared optical function unit 10, the first active unit 11A and the first condenser lens 11B form a first optical function unit 11, and the second active unit 12A and the second condenser lens 12B form a second optical function unit 12.

[0062] When the first surface 41 of the substrate 30 is used as the height reference, the height to the top surface of the frame 31 is equal to the height to the top surface of the first light-shielding wall 21. The height to the top surface of the second light-shielding wall 22 is lower than the height to the top surfaces of the frame 31 and the first light-shielding wall 21. The heights to the apexes of the shared condenser lens 10B, the first condenser lens 11B, and the second condenser lens 12B are equal to the height to the top surface of the frame 31 and the top surface of the first light-shielding wall 21, or are lower than the height to the top surface of the frame 31 and the top surface of the first light-shielding wall 21.

[0063] The heights of the vertices of the shared condenser lens 10B and the second condenser lens 12B are higher than the height of the top surface of the second light-shielding wall 22. With this configuration, even when the object 60 (FIG. 3) is almost in contact with the top surface of the frame, light reflected by the object 60 and stray light among the light emitted from the shared optical function unit 10 are received by the second optical function unit 12.

[0064] Next, the excellent effects of the third embodiment will be described. In the third embodiment, as in the first embodiment, it is possible to miniaturize the optical distance measuring sensor, and distance measurement can be performed even when the target object is located very close to the optical distance measuring sensor.

[0065] [Fourth Example] Next, an optical distance measuring sensor according to a fourth embodiment will be described with reference to Figures 9A and 9B. Below, a description of the configuration common to the optical distance measuring sensor according to the first embodiment described with reference to Figures 1A to 5F will be omitted.

[0066] 9A and 9B are cross-sectional views of the optical distance measuring sensor according to the fourth embodiment. In the optical distance measuring sensor according to the first embodiment (FIGS. 2A and 2B), the shared condenser lens 10B, the first condenser lens 11B, and the second condenser lens 12B are exposed to the outside. In contrast, in the optical distance measuring sensor according to the fourth embodiment, a transparent plate 35 is fixed to the surface of the frame 31 opposite to the substrate 30. The substrate 30, the frame 31, and the transparent plate 35 make the space in which the shared optical function unit 10, the first optical function unit 11, and the second optical function unit 12 are arranged into a sealed space isolated from the outside.

[0067] The light emitted from the shared optical function unit 10 passes through the transparent plate 35 and is emitted to the outside. The light reflected by the object passes through the transparent plate 35 and is received by the first optical function unit 11 and the second optical function unit 12.

[0068] Next, the excellent effects of the fourth embodiment will be described. In the fourth embodiment, as in the first embodiment, it is possible to miniaturize the optical distance measuring sensor, and distance measurement can be performed even when the target object is located very close to the optical distance measuring sensor. Furthermore, in the fourth embodiment, it is possible to protect the shared optical function unit 10, the first optical function unit 11, and the second optical function unit 12 from moisture and dirt.

[0069] Furthermore, even when the object is in contact with the transparent plate 35, the optical path length from the apex of the shared condenser lens 10B of the shared optical function unit 10 to the object is ensured to be at least the thickness of the transparent plate 35. For example, in the graph shown in FIG. 5F, the range immediately near where the distance z is 0 mm is not substantially used. In other words, the range where the slope of the ratio S1 / S2 of the received light level to the distance z is relatively large is used. This prevents a decrease in distance measurement accuracy.

[0070] [Fifth Example] Next, an optical distance measuring sensor according to a fifth embodiment will be described with reference to Figures 10A and 10B. Below, a description of the configuration common to the optical distance measuring sensor according to the first embodiment described with reference to Figures 1A to 5F will be omitted.

[0071] 10A and 10B are cross-sectional views of an optical distance measuring sensor according to a fifth embodiment. In the optical distance measuring sensor according to the first embodiment, the directional axis 11C (FIG. 2A) of the first optical function unit 11 is inclined away from the directional axis 10C of the shared optical function unit 10, and the directional axis 12C (FIG. 2B) of the second optical function unit 12 is inclined toward the directional axis 10C of the shared optical function unit 10. In contrast, in the optical distance measuring sensor according to the fifth embodiment, both the directional axis 10C of the shared optical function unit 10 and the directional axis 12C of the second optical function unit 12 are parallel to the directional axis 10C of the shared optical function unit 10. However, the half-value angle α1 of the directional characteristic of the first optical function unit 11 is smaller than the half-value angle α2 of the directional characteristic of the second optical function unit 12.

[0072] Therefore, the relationship between the light reception levels S1, S2 and the distance z shows the same tendency as the relationship between the light reception levels S1, S2 and the distance z in the optical distance measuring sensor according to the first embodiment.

[0073] Next, the excellent effects of the fifth embodiment will be described. In the fifth embodiment, as in the first embodiment, it is possible to miniaturize the optical distance measuring sensor, and distance measurement can be performed even when the target object is located very close to the optical distance measuring sensor.

[0074] [Sixth Example] Next, an optical distance measuring sensor according to a sixth embodiment will be described with reference to Figures 11A and 11B. Below, a description of the configuration common to the optical distance measuring sensor according to the first embodiment described with reference to Figures 1A to 5F will be omitted.

[0075] 11A and 11B are cross-sectional views of an optical distance measuring sensor according to a sixth embodiment. In the optical distance measuring sensor according to the first embodiment (FIGS. 2A and 2B), a shared condensing lens 10B, a first condensing lens 11B, and a second condensing lens 12B are arranged to provide directivity to the shared optical function unit 10, the first optical function unit 11, and the second optical function unit 12. In contrast, in the optical distance measuring sensor according to the sixth embodiment, a shared directivity adjusting structure 10E provides a desired directivity to the shared optical function unit 10, a first directivity adjusting structure 11E provides a desired directivity to the first optical function unit 11, and a second directivity adjusting structure 12E provides a desired directivity to the second optical function unit 12.

[0076] A shared active portion 10A having a light-emitting function, and a first active portion 11A and a second active portion 12A having a light-receiving function are arranged on a first surface 41 of a common substrate 30. A cross section passing through the shared active portion 10A and the first active portion 11A and perpendicular to the first surface 41 is referred to as a first cross section (cross section shown in FIG. 11A), and a cross section passing through the shared active portion 10A and the second active portion 12A and perpendicular to the first surface 41 is referred to as a second cross section (cross section shown in FIG. 11B).

[0077] The shared directivity adjusting structure 10E includes a plurality of shared light-shielding portions 10F. Each of the plurality of shared light-shielding portions 10F extends from the shared active portion 10A in the normal direction of the first surface 41. The plurality of shared light-shielding portions 10F are arranged with gaps between them in the direction parallel to the first surface 41 in the first cross section (FIG. 11A) and the second cross section (FIG. 11B).

[0078] The first directivity adjusting structure 11E includes a plurality of first light-shielding portions 11F. In the first cross section (FIG. 11A), each of the plurality of first light-shielding portions 11F extends from the first active portion 11A in a direction inclined toward the opposite side to the shared active portion 10A with respect to the normal direction of the first surface 41. The plurality of first light-shielding portions 11F are arranged at intervals in a direction parallel to the first surface 41.

[0079] The second directivity adjusting structure 12E includes a plurality of second light-shielding portions 12F. In the second cross section (FIG. 11B), each of the second light-shielding portions 12F extends from the second active portion 12A in a direction inclined toward the shared active portion 10A with respect to the normal direction of the first surface 41. The second light-shielding portions 12F are arranged in a direction parallel to the first surface 41 with gaps between them.

[0080] The multiple shared light-shielding portions 10F, first light-shielding portion 11F, and second light-shielding portion 12F are embedded in a transparent film 33 arranged on the first surface 41. Light emitted from the shared active portion 10A passes through gaps between the multiple shared light-shielding portions 10F and is emitted to the outside. Light reflected by an object passes through gaps in the first light-shielding portions 11F and is incident on the first active portion 11A, and passes through gaps in the second light-shielding portions 12F and is incident on the second active portion 12A.

[0081] Since the extending direction of the shared light blocking portion 10F is parallel to the normal direction of the first surface 41, the shared optical function portion 10 is provided with directional characteristics showing the same tendency as the shared optical function portion 10 of the optical distance measuring sensor according to the first embodiment in the first cross section and the second cross section. Similarly, the first optical function portion 11 and the second optical function portion 12 are provided with directional characteristics showing the same tendency as the first optical function portion 11 and the second optical function portion 12 of the optical distance measuring sensor according to the first embodiment in the first cross section and the second cross section, respectively.

[0082] Using first surface 41 as the height reference, the height of first light-shielding portion 11F is higher than the heights of shared light-shielding portion 10F and second light-shielding portion 12F. This reduces stray light reaching first active portion 11A. Furthermore, the heights of second light-shielding portion 12F and shared light-shielding portion 10F are approximately equal and lower than the height of the top surface of transparent film 33. This allows a certain amount of reflected light to enter second active portion 12A even when an object is located very close to the top surface of transparent film 33.

[0083] Next, the excellent effects of the sixth embodiment will be described. By setting the heights of the shared light-shielding portion 10F, the first light-shielding portion 11F, and the second light-shielding portion 12F as described above, an effect equivalent to that achieved by providing a difference in height between the first light-shielding wall 21 and the second light-shielding wall 22 of the optical distance measuring sensor according to the first embodiment (FIGS. 2A and 2B) can be obtained. Furthermore, in the sixth embodiment, semiconductor processes can be applied to the fabrication of the shared active portion 10A, the first active portion 11A, the second active portion 12A, the shared light-shielding portion 10F, the first light-shielding portion 11F, the second light-shielding portion 12F, and the transparent film 33. This allows for further miniaturization compared to when multiple components are mounted on a substrate.

[0084] [Seventh Example] Next, an optical distance measuring sensor according to a seventh embodiment will be described with reference to Fig. 12. Below, a description of the configuration common to the optical distance measuring sensor according to the first embodiment described with reference to Figs. 1A to 5F will be omitted.

[0085] 12 is a plan view of an optical distance measuring sensor according to Example 7. The optical distance measuring sensor according to Example 1 has one shared optical function unit 10, one first optical function unit 11, and one second optical function unit 12. In contrast, the optical distance measuring sensor according to Example 7 has two shared optical function units 10X and 10Y.

[0086] In a plan view, the two shared optical function units 10X and 10Y are arranged on opposite sides of a line segment LS connecting the center of the first optical function unit 11 and the center of the second optical function unit 12. For example, they are arranged on the perpendicular bisector of the line segment LS and at positions equidistant from the line segment LS. For example, the two shared optical function units 10X and 10Y, the first optical function unit 11, and the second optical function unit 12 are arranged at positions corresponding to the four vertices of a square.

[0087] A first light-shielding wall 21 is arranged between each of the shared optical function units 10X, 10Y and the first optical function unit 11, and a second light-shielding wall 22, which is lower than the first light-shielding wall 21, is arranged between each of the shared optical function units 10X, 10Y and the second optical function unit 12.

[0088] The distance to an observation point on the directional axis of the shared optical function unit 10X can be measured by operating one of the shared optical function unit 10X, the first optical function unit 11, and the second optical function unit 12. The distance to an observation point on the directional axis of the shared optical function unit 10Y can be measured by operating the other of the shared optical function unit 10Y, the first optical function unit 11, and the second optical function unit 12. That is, the distances to two observation points on the surface of the object can be measured.

[0089] Next, the excellent effects of the seventh embodiment will be described. In the seventh embodiment, as described above, the distances to two observation points on the surface of the object can be measured, and thus information about the posture of the object can be obtained. The first optical function unit 11 and the second optical function unit 12 are shared by the two shared optical function units 10X and 10Y, which allows for miniaturization of the device.

[0090] [Eighth Example] Next, an optical distance measuring sensor according to an eighth embodiment will be described with reference to Fig. 13. Below, a description of the configuration common to the optical distance measuring sensor according to the first embodiment described with reference to Figs. 1A to 5F will be omitted.

[0091] 13 is a plan view of an optical distance measuring sensor according to an eighth embodiment. In the optical distance measuring sensor according to the first embodiment (FIG. 1A), a pair of a first optical function unit 11 and a second optical function unit 12 are arranged for one shared optical function unit 10. In contrast, in the optical distance measuring sensor according to the eighth embodiment, a pair of a first optical function unit 11X and a second optical function unit 12X, and another pair of a first optical function unit 11Y and a second optical function unit 12Y are arranged for one shared optical function unit 10. In a plan view, the first optical function units 11X and 11Y are arranged in positions that are point-symmetric with respect to the shared optical function unit 10. Furthermore, the second optical function units 12X and 12Y are also arranged in positions that are point-symmetric with respect to the shared optical function unit 10.

[0092] The angle formed by the half line from the center of the shared optical function unit 10 toward the center of one first optical function unit 11X and the half line toward the center of one second optical function unit 12X is denoted as θx, and the angle formed by the half line from the center of the shared optical function unit 10 toward the center of the other first optical function unit 11Y and the half line toward the center of the other second optical function unit 12Y is denoted as θy. In this case, the angle θx and the angle θy are equal.

[0093] A first light-shielding wall 21 is arranged between the shared optical function unit 10 and each of the first optical function units 11X and 11Y, and a second light-shielding wall 22, which is lower than the first light-shielding wall 21, is arranged between the shared optical function unit 10 and each of the second optical function units 12X and 12Y.

[0094] Next, the excellent effects of the eighth embodiment will be described. When the surface of the object is inclined with respect to the directional axis of the shared optical function unit 10, the light reception level changes depending on the direction from the shared optical function unit 10 to the location where the observation point is observed (for example, the first optical function units 11X and 11Y and the second optical function units 12X and 12Y). Based on the difference in the light reception level between the first optical function units 11X and 11Y and the second optical function units 12X and 12Y, which are arranged symmetrically with respect to the shared optical function unit 10, information about the inclination of the object can be obtained.

[0095] Each embodiment is merely an example, and it goes without saying that partial substitution or combination of the configurations shown in different embodiments is possible. Similar effects resulting from similar configurations of multiple embodiments will not be mentioned sequentially for each embodiment. Furthermore, the present invention is not limited to the above-described embodiments. For example, it will be obvious to those skilled in the art that various modifications, improvements, combinations, etc. are possible.

[0096] Based on the above examples described in this specification, the following invention is disclosed. <1> a shared optical function unit having one of a light emitting function and a light receiving function; a first optical function unit and a second optical function unit each having the other of a light emitting function and a light receiving function; a first light-shielding wall disposed between the shared optical function unit and the first optical function unit; It is equipped with the shared optical function unit has a directivity characteristic in which the half-value angle from a directional axis is 15° or less, the shared optical function unit, the first optical function unit, and the second optical function unit are arranged so that a part of light emitted from a function unit having a light-emitting function among the shared optical function unit, the first optical function unit, and the second optical function unit and reflected by an object located on a directional axis of the shared optical function unit can be received by a function unit having a light-receiving function; the first optical function unit and the second optical function unit have different directional characteristics from each other, An optical ranging sensor in which, when a virtual plane perpendicular to the directional axis of the shared optical function unit is used as the height reference and the direction in which the directional axis of the shared optical function unit faces is defined as positive height, either no light-shielding wall is placed between the shared optical function unit and the second optical function unit, or a second light-shielding wall lower than the first light-shielding wall is placed between the shared optical function unit and the second optical function unit.

[0097] <2> the directional axis of the first optical function unit is inclined in a direction away from the directional axis of the shared optical function unit, The directional axis of the second optical function unit is inclined in a direction approaching the directional axis of the shared optical function unit. <1> The optical distance measuring sensor according to claim 1.

[0098] <3> The second light-shielding wall has a height such that the directional axis of the second optical function unit does not intersect with a half-line formed by tilting the directional axis of the second optical function unit toward the directional axis of the shared optical function unit by a half-value angle of the directional characteristic of the second optical function unit. <2> The optical distance measuring sensor according to claim 1.

[0099] <4> The shared optical function unit, the first optical function unit, and the second optical function unit each include a shared active unit, a first active unit, and a second active unit, each made of a semiconductor that emits or receives light, and a shared condenser lens, a first condenser lens, and a second condenser lens arranged in front of the shared active unit, the first active unit, and the second active unit, respectively. <1> or <2> The optical distance measuring sensor according to claim 1.

[0100] <5> The height of the first light-shielding wall is equal to or greater than the height of the midpoint of the line segment connecting the vertex of the common condenser lens and the vertex of the first condenser lens. <4> The optical distance measuring sensor according to claim 1.

[0101] <6> The second light-shielding wall is disposed at a position lower than a line segment connecting the vertex of the common condenser lens and the second active portion. <4> or <5> The optical distance measuring sensor according to claim 1.

[0102] <7> moreover, a common substrate on which the shared active portion, the first active portion, and the second active portion are mounted; a frame fixed to the substrate and surrounding the shared active portion, the first active portion, and the second active portion in a plan view; It is equipped with The shared condenser lens, the first condenser lens, and the second condenser lens are supported by at least one of the frame, the first light-shielding wall, and the second light-shielding wall. <4> ~ <6> 10. The optical distance measuring sensor according to claim 9, wherein:

[0103] <8> The display device further includes a transparent plate fixed to a surface of the frame opposite to the substrate, The substrate, the frame, and the transparent plate form a sealed space in which the shared optical function unit, the first optical function unit, and the second optical function unit are arranged. <7> The optical distance measuring sensor according to claim 1.

[0104] <9> The center-to-center distance between the shared active portion and the first active portion, and the center-to-center distance between the shared active portion and the second active portion are both 5 mm or less. <4> ~ <8> 10. The optical distance measuring sensor according to claim 9,

[0105] <10> Further, a processing unit is provided that calculates a distance to an object based on a ratio between a light receiving level measured by operating the shared optical function unit and the first optical function unit and a light receiving level measured by operating the shared optical function unit and the second optical function unit. <1> ~ <9> 10. The optical distance measuring sensor according to claim 9,

[0106] <11> a substrate having a first surface; a shared optical function unit having one of a light emitting function and a light receiving function; a first optical function unit and a second optical function unit each having the other of a light emitting function and a light receiving function; Equipped with the shared optical function unit, the first optical function unit, and the second optical function unit are arranged so that a part of light emitted from a function unit having a light-emitting function among the shared optical function unit, the first optical function unit, and the second optical function unit and reflected by an object located on a directional axis of the shared optical function unit can be received by a function unit having a light-receiving function; the shared optical function unit, the first optical function unit, and the second optical function unit are each disposed on the first surface and include a shared active unit, a first active unit, and a second active unit, each made of a semiconductor that emits or receives light, and a shared directional characteristic adjustment structure, a first directional characteristic adjustment structure, and a second directional characteristic adjustment structure, each disposed on a side of the shared active unit, the first active unit, and the second active unit facing the first surface, the shared directional characteristic adjusting structure includes a plurality of shared light-shielding portions extending from the shared active portion toward a normal direction of the first surface and arranged with gaps in a direction parallel to the first surface in a first cross section that passes through the shared active portion and the first active portion and is perpendicular to the first surface, and in a second cross section that passes through the shared active portion and the second active portion and is perpendicular to the first surface, the first directivity adjustment structure includes, in the first cross section, a plurality of first light-shielding portions extending from the first active portion in a direction inclined toward an opposite side to the shared active portion with respect to a normal direction of the first surface and arranged with gaps in between in a direction parallel to the first surface; the second directivity adjustment structure includes, in the second cross section, a plurality of second light-shielding portions extending from the second active portion in a direction inclined toward the shared active portion with respect to a normal direction of the first surface and arranged with gaps in between in a direction parallel to the first surface; An optical distance measuring sensor in which the height of the first light-shielding portion is higher than the heights of the shared light-shielding portion and the second light-shielding portion, using the first surface as a height reference.

[0107] <12> Further, a processing unit is provided that calculates a distance to an object based on a ratio between a light receiving level measured by operating the shared optical function unit and the first optical function unit and a light receiving level measured by operating the shared optical function unit and the second optical function unit. <11> The optical distance measuring sensor according to claim 1. [Explanation of symbols]

[0108] 10, 10X, 10Y shared optical function section 10A shared active part 10B Common condenser lens 10C Directional axis 10E Common Directional Adjustment Structure 10F common light shielding area 11, 11X, 11Y 1st optical function section 11A 1st active part 11B First condenser lens 11C Directional axis 11E 1st directional characteristic adjustment structure 11F 1st light shielding section 12, 12X, 12Y 2nd optical function section 12A 2nd active part 12B Second focusing lens 12C Directional axis 12E 2nd directional characteristic adjustment structure 12F 2nd light shielding section 21 First Light-Shielding Wall 22 Second Light-Shielding Wall 30 boards 31 frames 33 Transparent membrane 35 Transparent plate 40 Virtual Plane 41 Page 1 50 Processing section 60 Objects

Claims

1. a shared optical function unit having one of a light emitting function and a light receiving function; a first optical function unit and a second optical function unit each having the other of a light emitting function and a light receiving function; a first light-shielding wall disposed between the shared optical function unit and the first optical function unit; It is equipped with the shared optical function unit has a directivity characteristic in which a half-value angle from a directional axis is 15° or less, the shared optical function unit, the first optical function unit, and the second optical function unit are arranged so that a part of light emitted from a function unit having a light-emitting function among the shared optical function unit, the first optical function unit, and the second optical function unit and reflected by an object located on a directional axis of the shared optical function unit can be received by a function unit having a light-receiving function; the first optical function unit and the second optical function unit have different directional characteristics from each other, An optical ranging sensor in which, when a virtual plane perpendicular to the directional axis of the shared optical function unit is used as the height reference and the direction in which the directional axis of the shared optical function unit faces is defined as positive height, either no light-shielding wall is placed between the shared optical function unit and the second optical function unit, or a second light-shielding wall lower than the first light-shielding wall is placed between the shared optical function unit and the second optical function unit.

2. a directional axis of the first optical function unit is inclined in a direction away from a directional axis of the shared optical function unit, The optical distance measuring sensor according to claim 1 , wherein the directional axis of the second optical function section is inclined in a direction approaching the directional axis of the shared optical function section.

3. The optical ranging sensor of claim 2, wherein the second light-shielding wall has a height such that it does not intersect with a half-line formed by tilting the directional axis of the second optical function unit toward the directional axis of the shared optical function unit by a half-value angle of the directional characteristic of the second optical function unit.

4. 3. The optical ranging sensor of claim 1, wherein the shared optical function unit, the first optical function unit, and the second optical function unit each include a shared active unit, a first active unit, and a second active unit made of a semiconductor that emits or receives light, and a shared focusing lens, a first focusing lens, and a second focusing lens arranged in front of the shared active unit, the first active unit, and the second active unit, respectively.

5. 5. The optical distance measuring sensor according to claim 4, wherein the height of the first light-shielding wall is equal to or greater than the height of a midpoint of a line segment connecting a vertex of the shared condenser lens and a vertex of the first condenser lens.

6. The optical distance measuring sensor according to claim 4 , wherein the second light-shielding wall is disposed at a position lower than a line segment connecting the apex of the shared condenser lens and the second active portion.

7. moreover, a common substrate on which the shared active portion, the first active portion, and the second active portion are mounted; a frame fixed to the substrate and surrounding the shared active portion, the first active portion, and the second active portion in a plan view; It is equipped with The optical distance measuring sensor according to claim 4 , wherein the shared condensing lens, the first condensing lens, and the second condensing lens are supported by at least one of the frame, the first light-shielding wall, and the second light-shielding wall.

8. The display device further includes a transparent plate fixed to a surface of the frame opposite to the substrate, The optical distance measuring sensor of claim 7, wherein the substrate, the frame, and the transparent plate form an enclosed space in which the shared optical function unit, the first optical function unit, and the second optical function unit are arranged.

9. 5. The optical distance measuring sensor according to claim 4, wherein the center-to-center distance between the shared active portion and the first active portion and the center-to-center distance between the shared active portion and the second active portion are both 5 mm or less.

10. An optical ranging sensor as described in any one of claims 1 to 3, further comprising a processing unit that calculates the distance to an object based on the ratio of the light receiving level measured by operating the shared optical function unit and the first optical function unit to the light receiving level measured by operating the shared optical function unit and the second optical function unit.

11. a substrate having a first surface; a shared optical function unit having one of a light emitting function and a light receiving function; a first optical function unit and a second optical function unit each having the other of a light emitting function and a light receiving function; Equipped with the shared optical function unit, the first optical function unit, and the second optical function unit are arranged so that a part of light emitted from a function unit having a light-emitting function among the shared optical function unit, the first optical function unit, and the second optical function unit and reflected by an object located on a directional axis of the shared optical function unit can be received by a function unit having a light-receiving function; the shared optical function unit, the first optical function unit, and the second optical function unit are each disposed on the first surface and include a shared active unit, a first active unit, and a second active unit, each made of a semiconductor that emits or receives light, and a shared directional characteristic adjusting structure, a first directional characteristic adjusting structure, and a second directional characteristic adjusting structure, each disposed on a side of the shared active unit, the first active unit, and the second active unit facing the first surface, the shared directional characteristic adjusting structure includes a plurality of shared light-shielding portions extending from the shared active portion toward a normal direction of the first surface and arranged with gaps in a direction parallel to the first surface in a first cross section that passes through the shared active portion and the first active portion and is perpendicular to the first surface, and in a second cross section that passes through the shared active portion and the second active portion and is perpendicular to the first surface, the first directivity adjustment structure includes, in the first cross section, a plurality of first light-shielding portions extending from the first active portion in a direction inclined toward an opposite side to the shared active portion with respect to a normal direction of the first surface and arranged with gaps in between in a direction parallel to the first surface; the second directivity adjustment structure includes, in the second cross section, a plurality of second light-shielding portions extending from the second active portion in a direction inclined toward the shared active portion with respect to a normal direction of the first surface and arranged with gaps in between in a direction parallel to the first surface, An optical distance measuring sensor in which the height of the first light-shielding portion is higher than the heights of the shared light-shielding portion and the second light-shielding portion, using the first surface as a height reference.

12. The optical distance measuring sensor according to claim 11, further comprising a processing unit that calculates a distance to an object based on a ratio between a light receiving level measured by operating the shared optical function unit and the first optical function unit and a light receiving level measured by operating the shared optical function unit and the second optical function unit.

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