Resin sealing apparatus

Abstract

To provide a resin sealing device capable of resin-sealing works of different shapes in the same line.SOLUTION: A resin sealing device (1) is provided with a rail (51), a first loader (52) which moves along the rail (51), a first supply magazine (22A) which supplies a first workpiece (wa), a second supply magazine (22B) which supplies a second workpiece (wb) having a shape different from that of the first workpiece (wa), a first mold (32A) which resin-seals the first workpiece (wa), a second mold (32B) which resin-seals the second workpiece (wb), a first containing magazine (44A) which contains the first workpiece (WA) in a resin-sealed state, and a second containing magazine (44B) which contains the second workpiece (WB) in a resin-sealed state, wherein the first loader (52) is provided with a first loader hand (56) which is configured so as to be able to grip both the first workpiece (wa) and the second workpiece (wb).SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a resin sealing device. [Background technology]

[0002] When resin-encapsulating different types of workpieces, setting up a dedicated line for each type of workpiece results in a large footprint for the resin-encapsulating equipment. Using the same line at different times requires work such as replacing and adjusting supply magazines, storage magazines, loader hand chucks, unloader hand chucks, and molds. For this reason, Patent Document 1 discloses a resin-encapsulating equipment that can simultaneously encapsulate different types of semiconductor chips mounted on different types of substrates with encapsulating resin materials of various shapes. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2004-266153 Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the resin sealing device described in Patent Document 1, the chuck claws provided on the underside of the inloader are attached to correspond to the size of the substrate, and the chuck claws and vacuum clamping mechanism on the underside of the unloader are replaced as appropriate to accommodate resin-sealed substrates and unnecessary resin of various shapes.

[0005] Since the chuck jaws can be replaced to accommodate substrates of various shapes, it is possible to produce substrate T products manually while automatically producing substrate U products, or to produce substrate U products manually while automatically producing substrate T products.As described above, when substrate T is resin-sealed in the third press unit and substrate U is resin-sealed in the fourth press unit, either the substrate U products or the substrate T products will be produced manually rather than automatically.

[0006] The present invention has been made in view of the above-mentioned problems, and has an object to provide a resin sealing apparatus that can resin-seal workpieces of different shapes on the same line. [Means for solving the problem]

[0007] A resin sealing device according to one embodiment of the present invention includes a rail, a loader that moves along the rail, a first supply magazine that supplies a first workpiece, a second supply magazine that supplies a second workpiece having a different shape from the first workpiece, a first mold that seals the first workpiece with resin, a second mold that seals the second workpiece with resin, a first storage magazine that stores the first workpiece in a resin-sealed state, and a second storage magazine that stores the second workpiece in a resin-sealed state, and the loader includes a loader hand that is configured to be able to grasp both the first workpiece and the second workpiece. [Effects of the Invention]

[0008] According to the present invention, it is possible to provide a resin sealing apparatus that can seal workpieces of different shapes with resin on the same line. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a plan view showing an example of a resin sealing apparatus according to an embodiment of the present invention; [Figure 2] 2 is a bottom view showing an example of the first loader hand shown in FIG. 1. FIG. [Figure 3] 3 is a front view showing an example of a first loader hand shown in FIG. 2. FIG. [Figure 4] FIG. 10 is a cross-sectional view showing a first loader hand lifting a workpiece from a preheater. [Figure 5] 10 is a plan view showing an example of a first gripped portion of a first workpiece that is not sealed with resin. FIG. [Figure 6] 10 is a plan view showing an example of a second gripped portion of a second workpiece that is not sealed with resin. FIG. [Figure 7]10 is a plan view showing an example of a third gripped portion of the first workpiece in a resin-sealed state. FIG. [Figure 8] 10 is a plan view showing an example of a fourth gripped portion of the second workpiece in a resin-sealed state. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0010] A preferred embodiment of the present invention will be described with reference to the accompanying drawings. In each drawing, components with the same reference numerals have the same or similar configurations. For the sake of clarity and understanding of the positional relationships between components, each drawing is conveniently illustrated with an orthogonal coordinate system consisting of an X-axis, a Y-axis, and a Z-axis. The horizontal plane including the X-axis and the Y-axis is referred to as the "XY plane," and the direction of the Z-axis arrow is referred to as the vertically upward direction, while the direction opposite to the Z-axis arrow is referred to as the vertically downward direction. When viewed from the front side of the resin sealing device 1, the X-axis direction is, for example, the left-right direction, and the Y-axis direction is, for example, the front-rear direction. The present invention will now be described in detail with reference to the drawings.

[0011] 1 is a plan view showing an example of a resin sealing apparatus 1 according to one embodiment of the present invention. In the example shown, the resin sealing apparatus 1 is configured as a transfer molding machine, and includes an in-module 2, a plurality of press modules 3, an out-module 4, a conveying device 5, etc. The resin sealing apparatus 1 is not limited to a transfer molding machine, and may also be a compression molding machine.

[0012] The in-module 2 includes a work supply device 21 that supplies workpieces w, a resin supply device 29 that supplies resin materials such as resin tablets, etc. The work supply device 21 includes a plurality of supply magazines 22 including first and second supply magazines 22A and 22B. In the illustrated example, the work supply device 21 includes four supply magazines 22A, 22B, 22C, and 22D. The number of supply magazines 22 is not limited to the illustrated example, and may be three or less, or five or more.

[0013] The first supply magazine 22A stores a first workpiece wa (shown in FIG. 5). The second supply magazine 22B stores a second workpiece wb (shown in FIG. 6) having a different shape from the first workpiece wa. The shapes of the first and second workpieces wa and wb will be described in detail later.

[0014] The type of workpiece w is not particularly limited, and may be a metal substrate such as a lead frame, a semiconductor substrate such as a silicon substrate, an insulating substrate such as a PCB (Printed Circuit Board) substrate, or a ceramic substrate such as a DBC (Direct Bonded Copper) substrate. When resin is molded onto a substrate in multiple stages, the workpiece w may be a semi-finished product in which some of the resin has been molded onto the substrate in a previous process.

[0015] The first supply magazine 22A supplies a first workpiece wa as an example of the workpiece w, and the second supply magazine 22B supplies a second workpiece wb as another example of the workpiece w. The third and fourth supply magazines 22C and 22D may supply a workpiece w having a shape different from the first and second workpieces wa and wb, or may supply either the first or second workpiece wa and wb.

[0016] In the illustrated example, the work supply device 21 further includes a turntable 23, a pick-and-place mechanism 24, a preheater 25, etc. These are not essential components and may be modified or omitted. The turntable 23 moves left and right along rails that extend across multiple supply magazines 22, receives the workpieces w from each supply magazine 22, and aligns them in a predetermined orientation.

[0017] The pick-and-place mechanism 24 moves back and forth along a rail extending between the turntable 23 and the preheater 25, and lifts up the workpiece w aligned by the turntable 23 and places it on the preheater 25. The preheater 25 preheats the workpiece w received from the pick-and-place mechanism 24.

[0018] The transport device 5 includes a rail 51 extending across the in-module 2, the multiple press modules 3, and the out-module 4, and first and second loaders 52, 53 that move along the rail 51. The first loader 52 includes a carriage 54 configured to be movable left and right along the rail 51, and a first loader hand 56 configured to be able to move forward and backward relative to the carriage 54 and to be able to enter and retreat from the die 32. The first loader 52 retrieves the workpiece w from the preheater 25 and carries the workpiece w into the die 32 corresponding to the workpiece w.

[0019] The second loader 53 includes a carriage 55 configured to be movable left and right along the rails 51, and a second loader hand 57 configured to be movable forward and backward relative to the carriage 55 to enter and retreat from the mold 32. The second loader 53 carries out the resin-sealed workpiece W from the mold 32 and places it on the pallet 41 of the outer module 4.

[0020] Each of the first and second loaders 52, 53 may further include a cleaning device for removing dust. The first loader 52 may be referred to as a loader, and the second loader 53 may be referred to as an unloader. The second loader 53 may be omitted, and the first loader 52 may also function as an unloader for the second loader 53.

[0021] The first mold 32A corresponds to the first workpiece wa. The second mold 32B corresponds to the second workpiece wb. The first loader 52 carries the first workpiece wa into the first mold 32A, and carries the second workpiece wb into the second mold 32B. The second loader 53 carries the first workpiece WA, which has been sealed with resin, out of the first mold 32A, and carries the second workpiece WB, which has also been sealed with resin, out of the second mold 32B.

[0022] Each press module 3 sandwiches the supplied workpiece w between dies, applies pressure, and seals it with resin (molding). Each of the multiple press modules 3 includes a press mechanism 31, a die 32, etc. At least one of the multiple press modules 3 includes a first die 32A, which is an example of the die 32, for sealing the first workpiece wa with resin. At least one other of the multiple press modules 3 includes a second die 32B, which is another example of the die 32, for sealing the second workpiece wb with resin.

[0023] In the illustrated example, the resin sealing apparatus 1 includes four press modules 3A, 3B, 3C, and 3D, with the first press module 3A including a first mold 32A and the second press module 3B including a second mold 32B. The third and fourth press modules 3C and 3D may include third and fourth molds 32C and 32D having shapes different from the first and second molds 32A and 32B, or may include the first or second molds 32A and 32B.

[0024] The out-module 4 collects the resin-sealed product, i.e., the resin-sealed workpiece W, from the second loader 53 or the first loader 52. The out-module 4 includes a plurality of storage magazines 44 including first and second storage magazines 44A, 44B.

[0025] In the illustrated example, the outer module 4 includes four storage magazines 44A, 44B, 44C, and 44D. The number of storage magazines 44 is not limited to the illustrated example and may be three or less, or five or more. When the number of supply magazines 22 and the number of storage magazines 44 are equal, there may be a one-to-one correspondence between the supply magazines 22 and the storage magazines 44.

[0026] The first storage magazine 44A stores the first workpiece WA (shown in FIG. 7) in a resin-sealed state. The second storage magazine 44B stores the second workpiece WB (shown in FIG. 8) in a resin-sealed state. The shapes of the first and second workpieces WA, WB in a resin-sealed state will be explained in detail later. The third and fourth storage magazines 44C, 44D may store workpieces W having shapes different from the first and second workpieces WA, WB, or may store either the first or second workpiece WA, WB.

[0027] In the illustrated example, the out-module 4 further includes a pallet 41, a degator 42, a pick-and-place mechanism 43, etc. These are not essential components and may be modified or omitted. The pallet 41 moves back and forth to transport the resin-sealed workpiece W received from the second loader 53, etc., directly below the degator 42 to the supply magazine 44. The degator 42 separates unnecessary resin from the workpiece W.

[0028] The pick and place mechanism 43 lifts the workpiece W from the pallet 41 and carries the workpiece W into the storage magazine 44 corresponding to the workpiece W. To distinguish it from the pick and place mechanism 24 of the in-module 2 described above, the pick and place mechanism 24 of the in-module 2 may be referred to as the first pick and place mechanism 43, and the pick and place mechanism 43 of the out-module 4 may be referred to as the second pick and place mechanism 43.

[0029] Figure 2 is a bottom view showing an example of the first loader hand 56 shown in Figure 1. The second loader hand 57 has substantially the same shape and function as the first loader hand 56. Therefore, the first loader hand 56 will be described in detail as a representative, and a duplicated description of the second loader hand 57 will be omitted.

[0030] The first loader hand 56 has at least one first chuck 58. In the illustrated example, two first chucks 58, one on the left and one on the right, are provided to grip two first workpieces wa. Each first chuck 58 has first jaws 58L, 58R that can be opened and closed.

[0031] One of the first claws 58L faces the workpiece w from one side in any direction, and the other first claw 58R faces the workpiece w from the other side opposite the one side in any direction. In the example shown, the first claw 58L faces the workpiece w from the left side in the left-right direction X, and the first claw 58R faces the workpiece w from the right side in the left-right direction X.

[0032] Each first chuck 58 includes at least one first jaw 58L and at least one other first jaw 58R. In each first chuck 58, the number of first jaws 58L and the number of other first jaws 58R do not have to match. In the example shown, the left first chuck 58 includes six first jaws 58L and four other first jaws 58R. The right first chuck 58 includes four first jaws 58L and six other first jaws 58R.

[0033] Similarly, the second loader hand 57 has at least one second chuck 59 (shown in FIGS. 7 and 8). Each second chuck 59 has openable and closable second jaws 59L, 59R (shown in FIGS. 7 and 8). In each second chuck 59, the number of second jaws 59L on one side and the number of second jaws 59R on the other side do not have to match.

[0034] Fig. 3 is a front view showing an example of the first loader hand 56 shown in Fig. 2. Fig. 4 is a cross-sectional view showing the first loader hand lifting the workpiece w from the preheater 25. As shown in Figs. 3 and 4, the tip 58D of each of the first claws 58L, 58R and the tip portion including the vicinity thereof are formed in a hook shape capable of supporting the underside of the workpiece w. The second claws 59L, 59R have substantially the same shape as the first claws 58L, 58R.

[0035] 3, a base end portion including a base end 58P and the vicinity thereof of each of the first claws 58L, 58R is connected to a drive unit 60. The drive unit 60 opens and closes the first claws 58L, 58R to adjust the distance s between the tips 58D of the first claws 58L, 58R.

[0036] In the illustrated example, when the first claws 58L, 58R open and close, the first claws 58L, 58R move horizontally so that the tip of at least one of the first claws 58L, 58R describes a linear trajectory rather than an arc-shaped trajectory. Compared to a configuration in which the first claws 58L, 58R rotate, a configuration in which the first claws 58L, 58R move horizontally makes it less likely for a gap to occur between the hook-shaped tip and the underside of the workpiece w, and the workpiece w can be supported more stably.

[0037] Fig. 5 is a plan view showing an example of a first gripped portion pa of a first workpiece wa in a state where it is not sealed with resin. Fig. 6 is a plan view showing an example of a second gripped portion pb of a second workpiece wb in a state where it is not sealed with resin. In the examples shown in Figs. 5 and 6, the first and second workpieces wa, wb are formed in strip shapes. The shapes of the first and second workpieces wa, wb are not limited to the examples shown in the drawings and can be selected from various shapes.

[0038] 5, the first workpiece wa has at least one first gripped portion pa. The first chuck 58 is provided to grip the first workpiece wa at the first gripped portion pa. When the first loader hand 56 grips the first workpiece wa, the tips of the first claws 58L, 58R abut against the underside of the first gripped portion pa of the first workpiece wa from below, supporting the weight of the first workpiece wa.

[0039] 6, the second workpiece wb has at least one second gripped portion pb. The second chuck 59 is provided to grip the second workpiece wb at the second gripped portion pb. When the first loader hand 56 grips the second workpiece wb, the tips of the first claws 58L, 58R abut against the underside of the second gripped portion pb of the second workpiece wb from below, supporting the weight of the second workpiece wb.

[0040] 5 and 6, the width of the first gripped portion pa is greater than the width of the second gripped portion pb. The first claws 58L, 58R can open to a distance sa greater than the width of the first gripped portion pa, and can close to a distance sb smaller than the width of the second gripped portion pb. This allows the first loader hand 56 to grip both the first and second workpieces wa, wb.

[0041] Fig. 7 is a plan view showing an example of a third gripped portion PA of a first workpiece WA in a state where it is resin-sealed with sealing resin R. Fig. 8 is a plan view showing an example of a fourth gripped portion PB of a second workpiece WB in a state where it is resin-sealed with sealing resin R. In the example shown, the openings of the first and second workpieces wa, wb are blocked by sealing resin R. The shapes of the first and second workpieces WA, WB in a resin-sealed state are not limited to the example shown in the figure, and can be selected from a variety of shapes.

[0042] 7, the resin-sealed first workpiece WA has at least one third gripped portion PA. The second chuck 59 is provided to grip the first workpiece WA at the third gripped portion PA. When the second loader hand 57 grips the first workpiece WA, the tips of the second claws 59L and 59R abut against the underside of the third gripped portion PA of the first workpiece WA from below, supporting the weight of the first workpiece WA.

[0043] 8, the second workpiece WB in a resin-sealed state has at least one fourth gripped portion PB. The second chuck 59 is provided to grip the second workpiece WB at the fourth gripped portion PB. When the second loader hand 57 grips the second workpiece WB, the tips of the second claws 59L, 59R abut against the underside of the fourth gripped portion PB of the second workpiece Wb from below, supporting the weight of the second workpiece WB.

[0044] 7 and 8, the width of the third gripped portion PA is greater than the width of the fourth gripped portion PB. The second claws 59L, 59R can open to a distance SA greater than the width of the third gripped portion PA, and can close to a distance SB smaller than the width of the fourth gripped portion PB. This allows the second loader hand 57 to grip both the first and second workpieces WA, WB.

[0045] According to the resin sealing device 1 of the present invention configured as described above, it is equipped with a first loader 52 configured to be able to grip both the first and second workpieces wa, wb, so that first and second workpieces wa, wb of different shapes can be transported on the same line without the need for replacement or adjustment work, and the first and second workpieces wa, wb can be automatically resin sealed.

[0046] Since the resin sealing apparatus 1 is equipped with not only the first loader 52 but also the second loader 53, the second loader 53 can hold another workpiece W while the first loader 52 is holding the workpiece w. For example, the roles can be divided so that the first loader 52 carries the workpiece w into the mold 32, and the second loader 53 carries the workpiece W out of the mold. Even if the shapes of the works w and W change between a non-resin-sealed state and a resin-sealed state, the first and second loaders 52 and 53 can be adjusted to suit each state.

[0047] The above-described embodiments are intended to facilitate understanding of the present invention and are not intended to limit the present invention. The elements of the embodiments, as well as their arrangement, materials, conditions, shapes, sizes, etc., are not limited to those illustrated and can be modified as appropriate. Furthermore, configurations shown in different embodiments can be partially substituted or combined with each other.

[0048] [Appendix 1] The resin sealing device 1 includes a rail 51, a first loader 52 that moves along the rail 51, a first supply magazine 22A that supplies the first work wa, a second supply magazine 22B that supplies the second work wb that has a different shape from the first work wa, a first mold 32A that seals the first work wa with resin, a second mold 32B that seals the second work wb with resin, a first storage magazine 44A that stores the first work WA in a resin-sealed state, and a second storage magazine 44B that stores the second work WB in a resin-sealed state, and the first loader 52 includes a first loader hand 56 that is configured to be able to hold both the first work wa and the second work wb.

[0049] According to Supplementary Note 1, the first loader 52 is configured to be able to grasp both the first workpiece wa and the second workpiece wb. Therefore, first workpieces wa and second workpieces wb of different shapes can be transported on the same line without the need for replacement or adjustment work, and the first workpieces wa and second workpieces wb can be automatically sealed with resin. Furthermore, if workpieces WA and WB of different shapes were stored in the same storage magazine 44, they would have to be sorted in a later process, which would be a significant burden on the worker. However, according to Supplementary Note 1, multiple storage magazines 44A and 44B are provided, so that workpieces WA and WB of different shapes can be stored separately by shape. The workpieces WA and WB sealed with resin in the first mold 32A or second mold 32B may be transported by the first loader 52 or by the second loader 53, which will be described later.

[0050] [Appendix 2] In Appendix 1, the resin sealing device 1 further includes a second loader 53 that moves along a rail 51, and the second loader 53 includes a second loader hand 57 that is configured to be able to hold both the first work WA and the second work WB in a resin-sealed state, and the first loader 52 may transport the first work wa into the first mold 32A and the second work wb into the second mold 32B, and the second loader 53 may transport the first work WA in a resin-sealed state from the first mold 32A and the second work WB in a resin-sealed state from the second mold 32B.

[0051] According to Supplementary Note 2, since not only the first loader 52 but also the second loader 53 is provided, while the first loader 52 is holding the workpiece w, the second loader 53 can hold another workpiece W. The roles can be divided so that the first loader 52 carries the workpiece w into the mold 32, and the second loader 53 carries the workpiece W out of the mold 32. Even if the shapes of the works w and W change between a state where they are not sealed with resin and a state where they are sealed with resin, the first loader 52 and the second loader 53 can be adjusted to suit each state.

[0052] [Appendix 3] In Appendix 2, the second loader hand 57 has at least one second chuck 59, each of the at least one second chuck 59 having second claws 59L, 59R that can be opened and closed, the first workpiece WA in a resin-sealed state has a third gripped portion that is gripped by each of the at least one second chuck 59, the second workpiece in a resin-sealed state has a fourth gripped portion PB that is gripped by each of the at least one second chuck 59, the third gripped portion PA is larger than the fourth gripped portion PB, and the second claws 59L, 59R may be configured to be able to open larger than the third gripped portion PA and to close smaller than the fourth gripped portion PB.

[0053] According to Supplementary Note 3, even if the sizes of the first workpiece WA in a resin-sealed state and the second workpiece WB in a resin-sealed state are different, the second claws 59L, 59R, which include both in their range of motion, can securely grip either workpiece W. Because not only the first loader 52 but also the second loader 53 is provided, even if the sizes of the first workpiece wa in a non-resin-sealed state and the first workpiece WA in a resin-sealed state are different, the range of motion of the second claws 59L, 59R can be adjusted to match the resin-sealed state.

[0054] [Appendix 4] In any one of Appendices 1 to 3, the first loader hand 56 may include at least one first chuck 58, each of which includes first jaws 58L, 58R that can be opened and closed, the first workpiece wa having a first gripped portion pa that is gripped by each of the at least one first chuck 58, the second workpiece wb having a second gripped portion pb that is gripped by each of the at least one first chuck 58, the first gripped portion pa being larger than the second gripped portion pb, and the first jaws 58L, 58R may be configured to be able to open larger than the first gripped portion pa and close smaller than the second gripped portion pb.

[0055] According to Supplementary Note 4, even if the sizes of the first workpiece wa not sealed with resin and the second workpiece wb not sealed with resin are different, both workpieces w can be securely gripped using the first jaws 58L, 58R, which include both of them in their range of motion. If the sizes of the gripped portions of the first workpiece wa not sealed with resin and the first workpiece WA sealed with resin are approximately the same, they can be securely gripped in either state. [Explanation of symbols]

[0056] REFERENCE SIGNS LIST 1...resin sealing device, 2...in-module, 3...press module, 4...out-module, 5...conveyor device, 21...work supply device, 22...supply magazine, 22A...first supply magazine, 22B...second supply magazine, 22C...third supply magazine, 22D...fourth supply magazine, 23...turntable, 24...pick and place mechanism, 25...preheater, 29...resin supply device, 31...press mechanism, 32A...first mold, 32B...second mold, 32C...third mold, 32D...third mold, 41...pallet, 42...degater, 43...pick and place mechanism, 44...storage magazine, 44A...first storage magazine, 44B...second storage magazine, 44C...third storage magazine, 44D...fourth storage magazine Gin, 51...rail, 52...first loader, 53...second loader, 54, 55...cart, 56...first loader hand, 57...second loader hand, 58...first chuck, 58L, 58R...first jaw, 59...second chuck, 59L, 59R...second jaw, pa...first gripped part, pb...second gripped part, PA...third gripped part, PB...fourth gripped part, sa...maximum distance of first jaw, sb...minimum distance of first jaw, SA...maximum distance of second jaw, SB...maximum distance of second jaw, R...sealing resin, wa...first workpiece not sealed with resin, WA...first workpiece sealed with resin, wb...second workpiece not sealed with resin, WB...second workpiece sealed with resin, X...left-right direction, Y...front-back direction, Z...up-down direction.

Claims

1. Rails and a first loader that moves along the rail; a first supply magazine that supplies a first workpiece; a second supply magazine that supplies a second workpiece having a shape different from that of the first workpiece; a first mold for resin-sealing the first workpiece; a second mold for resin-sealing the second workpiece; a first storage magazine that stores the first workpieces in a resin-sealed state; a second storage magazine that stores the second workpiece in a resin-sealed state, the first loader includes a first loader hand configured to be able to grip both the first workpiece and the second workpiece; Resin sealing equipment.

2. Further comprising a second loader that moves along the rail; the second loader includes a second loader hand configured to be able to grip both the first workpiece and the second workpiece in a resin-sealed state, the first loader carries the first workpiece into the first mold and carries the second workpiece into the second mold; the second loader carries out the first workpiece in a resin-sealed state from the first mold, and carries out the second workpiece in a resin-sealed state from the second mold; The resin sealing device according to claim 1 .

3. the second loader hand includes at least one second chuck; Each of the at least one second chuck has a second jaw that can be opened and closed, the first workpiece in a resin-sealed state has a third gripped portion gripped by each of the at least one second chuck, and the second workpiece in a resin-sealed state has a fourth gripped portion gripped by each of the at least one second chuck, The third gripped portion is larger than the fourth gripped portion, The second claw is configured to be able to open wider than the third gripped portion and to close narrower than the fourth gripped portion. The resin sealing device according to claim 2 .

4. the first loader hand includes at least one first chuck; Each of the at least one first chuck has a first jaw that can be opened and closed, the first workpiece has a first gripped portion gripped by each of the at least one first chuck, and the second workpiece has a second gripped portion gripped by each of the at least one first chuck, The first gripped portion is larger than the second gripped portion, The first claw is configured to be able to open wider than the first gripped portion and to close narrower than the second gripped portion. The resin sealing device according to claim 1 .

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