Transport system, EFEM, and container transport device

Abstract

To provide a technique capable of simplifying a configuration related to delivery of a storage container for storing a substrate.SOLUTION: A conveyance system 100 includes a vessel conveyance device 101 for conveying a storage vessel for storing a substrate, and a EFEM102 connected to a processing device M for processing the substrate. A container conveying device 101 includes a traveling body 11 having traveling wheels 112, and a placement part 12 which is provided on the traveling body 11 and on which a storage container is placed. A EFEM102 includes a base plate 31 which is a plate-shaped member arranged in a standing posture and in which an opening 311 opened and closed by a door 32 is provided in a plane, and a vessel holding part 34 which is provided on the base plate 31 and can hold a storage vessel in a cantilever manner without being supported from below by other members while abutting on the periphery of the opening 311 in the base plate 31.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a technique for transporting a storage container for storing substrates. [Background technology]

[0002] A highly clean environment is required in semiconductor manufacturing processes, etc. In recent years, mini-environment systems have increasingly been adopted to create clean environments in semiconductor manufacturing plants, replacing the downflow system. The mini-environment system creates a localized clean environment only around the substrate being processed, and can create a highly clean environment at lower cost than the downflow system, which creates a clean environment throughout the entire plant.

[0003] In the mini-environment system, substrates are transported and stored in a containment vessel maintained at a higher level of cleanliness than the external atmosphere. A module called an Equipment Front End Module (EFEM) is used to transfer substrates between the containment vessel that stores the substrates and the processing equipment that performs various processes on the substrates. The EFEM, for example, comprises a transfer chamber that houses a transfer robot and a load port connected to it. The load port is an interface for transferring substrates into and out of the containment vessel, and includes a platform on which the containment vessel is placed. The lid of the containment vessel placed on the platform is removed from the vessel body, connecting the interior of the vessel body to the internal space of the transfer chamber.

[0004] The transport of the storage container to the load port is performed using, for example, an AGV (Automated Guided Vehicle), an AMR (Autonomous Mobile Robot), or the like. An AGV is an unmanned transport vehicle that travels on the floor and travels on the floor by receiving a supply of power or the like. An AMR is an autonomous transport robot. For example, an AGV, an AMR, or the like travels on the floor to the vicinity of the load port, and then uses its mounted robot arm to grab the storage container loaded on it and transfer it to the loading section of the load port, or uses its robot arm to grab the storage container that is placed on the loading section of the load port and transfer it to itself. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Publication No. 2022-86777 Summary of the Invention [Problem to be solved by the invention]

[0006] As mentioned above, in order to transfer the containment vessel to and from the loading section of the load port, the AGV, AMR, etc. must be equipped with a robot arm, etc. This inevitably led to the AGV, AMR, etc. becoming larger and more expensive.

[0007] The present invention has been made to solve the above-mentioned problems, and has an object to provide a technique that can simplify the configuration related to the transfer of a storage container that stores substrates. [Means for solving the problem]

[0008] In order to achieve the above object, the present invention takes the following measures.

[0009] That is, the present invention is a transport system comprising: a container transport device that transports a storage container for storing substrates; and an EFEM connected to a processing device that processes the substrates, wherein the container transport device comprises a running body having running wheels, and a mounting section provided on the running body on which the storage container is placed, and the EFEM comprises: a base plate that is a plate-like member arranged in an upright position and has an opening that is opened and closed by a door section formed in its surface; and a container holding section that is provided on the base plate and can hold the storage container in a cantilevered manner without being supported from below by another member while abutting the periphery of the opening in the base plate.

[0010] According to this configuration, the container transport device can travel to the EFEM while placing the containment vessel on the mounting section, and the EFEM can receive the containment vessel directly from the container transport device by holding the containment vessel placed on the mounting section of the container transport device in a cantilever manner with the container holding section. Furthermore, the EFEM can directly hand over the containment vessel to the container transport device by releasing the containment vessel from the container holding section and placing it on the mounting section of the container transport device, and the container transport device can run away from the EFEM while placing the containment vessel on the mounting section. Therefore, the configuration for handing over the containment vessel can be simplified.

[0011] Preferably, the conveying system is characterized in that the placement section is capable of appearing and disappearing from the placement surface on which the storage container is placed, and is provided with a positioning pin that, when protruding from the placement surface, guides and positions the storage container to a predetermined position within the surface of the placement surface.

[0012] According to this configuration, the storage container is placed in a predetermined position by being guided by the positioning pin. Furthermore, since the positioning pin can freely appear and disappear from the placement surface, the positioning pin does not get in the way when not in use.

[0013] Preferably, the transport system is characterized in that the container transport device includes a mount driving mechanism that moves the mount relative to the traveling body.

[0014] With this configuration, for example, when the traveling body is placed in contact with or close to the base plate, the mounting portion can be moved closer to or away from the base plate (and thus the container holding portion provided thereon). For example, by bringing the mounting portion closer to the container holding portion, the container holding portion can easily hold the storage container placed on the mounting portion, or the storage container held by the container holding portion can be easily placed on the mounting portion.

[0015] The present invention is also directed to an EFEM. The EFEM according to the present invention is characterized by comprising: a base plate, which is a plate-like member arranged in an upright position and has an opening formed in its surface that is opened and closed by a door portion; a container holder provided on the base plate and capable of holding a containment container for storing substrates in a cantilevered manner without being supported from below by another member while abutting the periphery of the opening in the base plate; and a door portion drive mechanism provided on the main surface of the base plate opposite to the main surface against which the containment container abuts, which moves the door portion between a position where the door portion opens the opening and a position where the door portion closes the opening.

[0016] The present invention is also directed to a container transport device, which includes a traveling body having running wheels, a platform provided on the traveling body on which a storage container for storing substrates is placed, and a platform drive mechanism for moving the platform relative to the traveling body. [Effects of the Invention]

[0017] According to the present invention, the configuration for transferring the storage container for storing the substrates can be simplified. [Brief explanation of the drawings]

[0018] [Figure 1] FIG. 1 is a diagram showing the overall configuration of a transport system. [Figure 2] FIG. [Figure 3]1 is a side view of a container transport device and a storage container placed on a placement unit thereof; [Figure 4] Side view of EFEM. [Figure 5] FIG. [Figure 6] FIG. 10 is a side view of the port unit and the containment vessel held by its vessel holder. [Figure 7] FIG. [Figure 8] FIG. [Figure 9] FIG. 10 is a diagram showing the flow of operations in which a storage container is handed over from a container transfer device to an EFEM in the transfer system. [Figure 10] FIG. 10 is a diagram for explaining the operation of transferring a storage container from a container transfer device to an EFEM in the transfer system. [Figure 11] FIG. 10 is a diagram showing the flow of operations in which a storage container is transferred from an EFEM to a container transfer device in the transfer system. [Figure 12] 10A and 10B are diagrams for explaining the operation of transferring a storage container from an EFEM to a container transfer device in the transfer system. [Figure 13] FIG. 10 is a perspective view of a container transport device according to a modified example. [Figure 14] 5A and 5B are diagrams for explaining the operation of the container transport device. [Figure 15] 5A and 5B are diagrams for explaining the operation of the container transport device. [Figure 16] FIG. 10 is a perspective view of a transfer chamber according to a modified example. [Figure 17] FIG. 10 is a perspective view of a transfer chamber according to a modified example. DETAILED DESCRIPTION OF THE INVENTION

[0019] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0020] <1.Transportation system> 1, a transfer system 100 according to the embodiment includes a container transfer device 101, an EFEM 102, and a control unit 103. The container transfer device 101 transfers a storage container 9. The EFEM (Equipment Front End Module) 102 is connected to a processing device M and transfers substrates 90 between the storage container 9 and the processing device M. The control unit 103 controls the container transfer device 101 and the EFEM 102.

[0021] The object to be transported by the transport system 100 is a storage container 9 that stores substrates 90. Specifically, for example, as illustrated in FIG. 3 , the storage container 9 includes a container body 91 with one side open and a lid 92 that closes the opening of the container body 91 (a so-called FOUP (Front Opening Unified Pod)). The container body 91 is provided with a jaw 911 that surrounds the opening and protrudes outward, and the lid 92 is attached to the inside of the jaw 911. With the lid 92 attached, the inner peripheral surface of the jaw 911 abuts against the peripheral surface of the lid 92, sealing the inside of the container body 91. The lid 92 is provided with a latch (not shown) for fixing the lid 92 to the container body 91. Furthermore, inside the container body 91, shelves or grooves (not shown) that support the peripheries of the substrates 90 are provided in multiple stages, allowing multiple substrates 90 to be stored in multiple stages in a horizontal position.

[0022] <1-1. Container transport device> The container transfer device 101 will be described with reference to Figures 2 and 3. Figure 2 is a perspective view of the container transfer device 101. Figure 3 is a side view of the container transfer device 101 and the storage container 9 placed on its placement unit 12.

[0023] The container transport device 101 includes a traveling body 11, a placement unit 12, and a placement unit drive mechanism 13.

[0024] (Training body 11) The running body 11 runs on a floor. The running body 11 includes, for example, a rectangular parallelepiped body 111 and a plurality of running wheels 112 (four in the illustrated example) provided below the body 111. Each running wheel 112 is supported, for example, to be able to roll freely around a horizontal axle and to be able to rotate freely around a vertical rotation axis. At least one of the four running wheels 112 (a pair of adjacent running wheels 112, 112 in the illustrated example) serves as a driving wheel 112a, and the remaining running wheels 112 serve as driven wheels 112b. However, the driven wheels 112b are not essential, and all of the running wheels 112 may be driving wheels 112a.

[0025] The body 111 houses a traveling drive unit 113 that drives each driving wheel 112a. The traveling drive unit 113 rotates the axle of each driving wheel 112a around its axis. As a result, each driving wheel 112a rotates, and each driven wheel 112b rotates in response to the rotation of the driving wheels 112a, causing the traveling body 11 to travel. The traveling drive unit 113 also rotates each driving wheel 112a around its rotation axis. As a result, the orientation of each driving wheel 112a is changed, and the traveling direction of the traveling body 11 is changed. The traveling drive unit 113 can be configured to include, for example, a power source (e.g., a battery), a driving source (e.g., a motor) that receives electric power from the power source and generates driving force, and a mechanism (e.g., a gear mechanism) that transmits the driving force generated by the driving source to the axle or rotating shaft.

[0026] (Placement section 12) The placing section 12 is a flat member and is provided on the traveling body 11. In the example shown in the figure, the placing section 12 is provided on the upper surface of the body 111 via a placing section drive mechanism 13. The storage vessel 9 is placed on the placing section 12. In other words, the upper surface of the placing section 12 becomes the placing surface 12a on which the storage vessel 9 is placed. The storage vessel 9 is placed on the placing section 12 in an orientation such that the lid 92 is placed on a predetermined side. For ease of explanation, the side on which the lid 92 is placed when the storage vessel 9 is placed on the placing section 12 in the correct orientation will be referred to as the "front side" below.

[0027] The mounting surface 12a is provided with one or more (three in the illustrated example) positioning pins (guide pins) 121. Each positioning pin 121 is disposed at a position corresponding to the vertex of a triangle within the mounting surface 12a. When the positioning pin 121 protrudes from the mounting surface 12a, it engages with a recess provided in the bottom surface of the storage container 9, guiding and positioning the storage container 9 to a predetermined position within the mounting surface 12a (so-called kinematic coupling).

[0028] The mounting surface 12a is provided with a fixing portion 122. When the fixing portion 122 protrudes from the mounting surface 12a, the fixing portion 122 is hooked onto a fixed portion (for example, a front retaining feature) provided on the bottom surface of the storage container 9, thereby fixing the storage container 9 at a predetermined position (a position positioned by the positioning pin 121) with respect to the mounting surface 12a.

[0029] One or more gas nozzles 123 (four in the illustrated example) are provided on the mounting surface 12a. The gas nozzles 123 may be used as gas supply nozzles. In this case, the gas nozzles 123, when protruding from the mounting surface 12a, are connected to a gas supply valve provided on the bottom surface of the containment vessel 9 and supply a predetermined gas (e.g., nitrogen gas, inert gas, dry air, etc.) into the containment vessel 9 through the gas supply valve. The gas nozzles 123 may also be used as gas exhaust nozzles. In this case, the gas nozzles 123, when protruding from the mounting surface 12a, are connected to a gas exhaust valve provided on the bottom surface of the containment vessel 9 and exhaust gas from the containment vessel 9 through the gas exhaust valve. For example, when gas nozzles 123 are provided at the four corners of the mounting surface 12a, a pair of gas nozzles 123, 123 on the front side may be used as gas supply nozzles, and a pair of gas nozzles 123, 123 on the rear side may be used as gas exhaust nozzles. The gas in the containment vessel 9 can be replaced with the predetermined gas by discharging the gas in the containment vessel 9 through the gas exhaust valve and gas exhaust nozzle and supplying a predetermined gas to the containment vessel 9 through the gas supply nozzle and gas supply valve. Furthermore, by controlling the gas supply amount and discharge amount, the pressure in the containment vessel 9 can be adjusted to a desired value. For example, by setting the pressure in the containment vessel 9 to a pressure slightly higher than that of the clean room and / or transfer space V (described below) in which the processing device M is installed, it is possible to prevent gas from flowing into the container body 91 when the lid 92 of the containment vessel 9 is opened.

[0030] The positioning pin 121, the fixing portion 122, and the gas nozzle 123 are each a member (retractable member) that can be freely projected and retracted relative to the mounting surface 12a. A drive mechanism (not shown) that moves each retractable member between a retracted position and a protruding position is connected to each retractable member. The "retracted position" is a position where the retractable member does not protrude from the mounting surface 12a (i.e., a position where the upper end of the retractable member is located below the mounting surface 12a). On the other hand, the "protruding position" is a position where at least a portion of the retractable member protrudes from the mounting surface 12a (i.e., a position where the upper end of the retractable member is located above the mounting surface 12a). The retractable member is located in the retracted position when not in use, and is moved to the protruding position when in use.

[0031] (Placement section drive mechanism 13) The mount drive mechanism 13 moves the mount 12 back and forth relative to the traveling body 11 (specifically, the body 111). The mount drive mechanism 13 includes, for example, a flat rectangular parallelepiped housing 131 provided on the upper surface of the body 111, and a rod 132 and a cylinder 133 housed therein. The rod 132 is provided in a position extending back and forth along the underside of the top plate of the housing 131. The cylinder 133 is provided at the base end of the rod 132 and moves the rod 132 forward and backward along the direction of extension. The cylinder 133 controls air pressure by, for example, opening and closing a solenoid valve (a so-called air cylinder) to move the rod 132 forward and backward. A slit 134 extending back and forth is provided in the top plate of the housing 131, and a connecting part 135 is inserted through this slit. The lower end portion of the connection portion 135 protrudes below the top plate of the housing 131 and is connected to the rod 132. On the other hand, the upper end portion of the connection portion 135 protrudes above the top plate of the housing 131 and is connected to the placement portion 12.

[0032] In this configuration, when the rod 132 moves forward and backward in response to the drive of the cylinder 133, the mounting unit 12 connected to the rod 132 via the connecting unit 135 is guided by a linear guide provided on the top plate of the housing 131 and moves forward and backward along the upper surface of the top plate of the housing 131 (i.e., parallel to the upper surface of the body 111). This causes the mounting unit 12 to move between an advanced position K1 and a retracted position K2. Note that the "advanced position K1" is, for example, a position where the lid 92 of the storage container 9 mounted on the mounting unit 12 is disposed in the same vertical plane as the front surface of the body 111 (i.e., disposed flush). On the other hand, the "retracted position K2" is a position behind the advanced position K1.

[0033] <1-2.EFEM> The EFEM 102 will be described with reference to FIGS. 4 to 6. FIG. 4 is a side view of the EFEM 102. FIG. 5 is a perspective view of the port unit 30. FIG. 6 is a side view of the port unit 30 and the storage container 9 held in its container holding portion 34. For ease of explanation, FIG. 4 shows one side wall of the transfer chamber 21 removed. Also, FIG. 6 shows the base plate 31 in cross section.

[0034] The EFEM 102 includes a transport section 20 and one or more port units 30 .

[0035] (i) Conveyor unit 20 The transfer section 20 includes a transfer chamber 21 and a transfer robot 22 .

[0036] (Transportation chamber 21) The transfer chamber 21 is, for example, a rectangular parallelepiped housing, and one side wall (first side wall 211) is connected to the processing device M. An opening 212a is formed in the side wall (second side wall 212) opposite the first side wall 211, and a port unit 30 (specifically, a base plate 31 (described later)) is airtightly attached to close the opening. In other words, a portion of the second side wall 212 is formed by the base plate 31 of the port unit 30. A plurality of port units 30 may be provided on the second side wall 212. In the example of FIG. 1, three port units 30 are arranged in a row and provided on the second side wall 212.

[0037] The interior of the transfer chamber 21 forms, for example, a substantially sealed transfer space V. The transfer space V is maintained at a higher level of cleanliness than the outside (i.e., a clean room in which the processing device M is installed). Specifically, for example, a fan filter unit (FFU) 213 is installed inside the transfer chamber 21, and gas purified by the fan filter unit 213 is sent downward, thereby forming a downflow of clean gas in the transfer space V. A chemical filter 214, a circulation duct 215, etc. are further installed inside the transfer chamber 21, and the gas flow that reaches the bottom of the transfer space V may pass through the chemical filter 214 to remove contaminants, etc., and then return to the fan filter unit 213 through the circulation duct 215 and be sent downward again (i.e., an airflow circulation may be formed).

[0038] The transfer chamber 21 may be provided with a gas supply port and a gas exhaust port (both not shown), allowing a predetermined gas (e.g., nitrogen gas, dry air, dry nitrogen gas, etc.) to be purged through the gas supply port, and gas from the transfer space V to be exhausted through the gas exhaust port. In this case, the pressure, gas concentration, etc. of the transfer space V can be adjusted to any desired value by controlling the amount of gas supplied through the gas supply port and the amount of gas exhausted through the gas exhaust port. For example, by appropriately controlling the amount of gas supplied and the amount of gas exhausted, the transfer space V may be maintained at a pressure (slightly positive pressure) slightly higher than the outside (e.g., a clean room in which the processing device M is installed). This ensures that gas does not flow into the transfer space V from the outside through a small gap that connects the inside and outside of the transfer chamber 21.

[0039] (Transport Robot 22) The transfer robot 22 is a transfer device that transfers the substrate 90 between the storage container 9 (i.e., the storage container 9 held in the container holder 34 (described later) of the port unit 30) and the processing device M, and is housed in the transfer chamber 21. The transfer robot 22 may have any configuration. As an example, the transfer robot 22 includes one or more hands 221 that hold the substrate 90, and an arm 222 connected to the hands 221. Furthermore, the transfer robot 22 includes various drive mechanisms 223 for rotating the hands 221 and bending and extending, rotating, and raising and lowering the arms 222.

[0040] (ii) Port Unit 30 The port unit 30 holds the storage container 9 and removes the lid 92 of the held storage container 9 from the container body 91 to connect the inside of the container body 91 to the internal space (transfer space) V of the transfer chamber 21 without exposing the inside of the container body 91 to the external atmosphere. The port unit 30 includes a base plate 31, a door part 32, a door part drive mechanism 33, and a container holding part 34.

[0041] (Base plate 31) The base plate 31 is a flat plate-shaped member (panel member). For example, the main surface of the base plate 31 is slightly larger than the opening 212a provided in the second side wall 212 of the transfer chamber 21, and the base plate 31 is attached to the second side wall 212 in an upright position so as to close the opening 212a. For example, a gasket (not shown) may be provided around the periphery of the main surface of the base plate 31 on the side facing the second side wall 212, so that the base plate 31 is airtightly attached to the second side wall 212 via the gasket.

[0042] An opening 311 is provided in the surface of the base plate 31. As an example, the base plate 31 may include a window unit 312 in the shape of a window frame attached to the opening provided in the surface. In this case, the opening 311 is defined by the frame of the window unit 312. That is, the portion of the base plate 31 surrounding the opening 311 is formed by the frame of the window unit 312. The opening 311 is provided at a height corresponding to the mounting unit 12 of the container conveying device 101 (specifically, at a height facing the lid 92 of the storage container 9 placed on the mounting unit 12). Furthermore, the size of the opening 311 is slightly larger than the lid 92 of the storage container 9. Therefore, the lid 92, which is attached in an upright position to the container body 91 of the storage container 9, can pass through the opening 311 while remaining in an upright position.

[0043] (Door section 32) The door part 32 is a member that closes the opening 311 provided in the base plate 31. The door part 32 is, for example, a flat plate-like member whose main surface is slightly larger than the opening 311, and is in an upright position so as to abut against the base plate 31 from the side of the transfer space V and completely close the opening 311. At this time, the transfer space V may be sealed by the peripheral part of the door part 32 and the surrounding part of the opening 311 on the base plate 31 being in airtight contact with each other via a sealing member or the like.

[0044] The door part 32 is provided with a lid holding mechanism 321. When the door part 32 is closing the opening 311, the lid holding mechanism 321 connects and integrates the lid 92, which is arranged opposite the opening 311, with the door part 32, thereby holding the lid 92 on the door part 32. The lid holding mechanism 321 also latches and releases the connection between the container body 91 and the lid 92.

[0045] (Door drive mechanism 33) The door section drive mechanism 33 is a mechanism for moving the door section 32 relative to the opening 311, and is provided on the main surface (first main surface) 31a of the base plate 31 facing the transfer space V. Specifically, the door section drive mechanism 33 includes, for example, a first slide rail 331 extending vertically and provided on the first main surface 31a of the base plate 31, and a lift block 332 supported movably (i.e., liftable) along the first slide rail 331. On the upper surface of the lift block 332, a second slide rail 333 extending in the normal direction to the first main surface 31a and a support frame 334 supported movably along the second slide rail 333 are provided. The support frame 334 is connected to the door section 32 and supports it. Furthermore, the door section drive mechanism 33 further includes, for example, a drive source, a conversion mechanism that converts the power applied from the drive source into the lifting and lowering movement of the lift block 332 along the first slide rail 331, a conversion mechanism that converts the power applied from the drive source into the forward and backward movement of the support frame 334 along the second slide rail 333, and a link mechanism that links these two conversion mechanisms (all of which are not shown). The drive source can be configured to include a motor (for example, a stepping motor), a cylinder (for example, an air cylinder), etc. Each conversion mechanism and link mechanism can be configured to include, for example, a ball screw mechanism, a cam mechanism, etc.

[0046] The door section 32 is driven by the door section drive mechanism 33 to move between a closed position D1 and an open position D2. The "closed position D1" is a position where the door section 32 completely blocks the opening 311. On the other hand, the "open position D2" is a position where the door section 32 completely opens the opening 311, specifically, for example, a position where the upper edge of the door section 32 is positioned lower than the lower edge of the opening 311. The opening 311 is opened and closed by the door section 32 moving between the closed position D1 and the open position D2. For example, when the door section drive mechanism 33 moves the door section 32 from the closed position D1 to the open position D2, the power applied from the drive source is first converted into an advancing / retracting movement of the support frame 334 (advancing / retracting movement in a direction away from the base plate 31), and then converted into a descending movement of the lifting block 332 via the link mechanism. In this case, the door section 32 first moves in a direction away from the base plate 31, moving from the closed position D1 to the motion conversion position Dt, and then descends from the motion conversion position Dt to the open position D2. That is, the door section 32 moves from the closed position D1, via the motion conversion position Dt, to the open position D2. Meanwhile, when the door section drive mechanism 33 moves the door section 32 from the open position D2 to the closed position D1, the power applied from the drive source is first converted into an upward movement of the lift block 332, and then converted via the link mechanism into an advancing / retracting movement of the support frame 334 (advancing / retracting movement in a direction toward the base plate 31). In this case, the door section 32 first rises from the open position D2 to the motion conversion position Dt, and then moves in a direction toward the base plate 31, moving from the motion conversion position Dt to the closed position D1. That is, the door section 32 moves from the open position D2, via the motion conversion position Dt, to the closed position D1.

[0047] (Container holding part 34) The container holder 34 is provided on the base plate 31 (the main surface (second main surface) 31b of the base plate 31 opposite the transfer space V) and holds the storage container 9 in a cantilever manner while abutting against a portion of the second main surface 31b of the base plate 31 around the opening 311. The container holder 34 can hold the storage container 9 by itself (i.e., without providing a member (a member that generates an upward drag force) that contacts the bottom surface of the storage container 9 and supports the storage container 9 from below, separate from the container holder 34). In other words, the container holder 34 can hold the storage container 9 in a cantilever manner without being supported from below by another member (a member different from the container holder 34). The container holder 34 includes, for example, a pair of holding units 340, 340. One holding unit 340 is provided on one side of the opening 311, and the other holding unit 340 is provided on the other side of the opening 311.

[0048] The holding unit 340 will be described with reference to Figures 7 and 8 in addition to Figures 5 and 6. Figure 7 is a front view of the holding unit 340. Figure 8 is a plan view of the holding unit 340.

[0049] The holding unit 340 includes a rotating shaft 341, which is a rod-shaped member, and one or more holding claws 342 (two in the illustrated example) provided on the rotating shaft 341. The holding claws 342 include protruding pieces 342a that protrude in a direction intersecting (e.g., perpendicular to) the extension direction of the rotating shaft 341, and protrusions 342b provided at the tips of the protruding pieces 342a. The rotating shaft 341 is supported in a plane parallel to the second main surface 31b of the base plate 31 by a plurality of support pieces 343 provided on the second main surface 31b. The plurality of support pieces 343 are arranged in the vicinity of and along the edge (e.g., the edge extending in the vertical direction) of the opening 311. The support piece 343 located at the upper end in the arrangement direction has a recess 343a on its lower surface, and the other support pieces 343 have through-holes 343b that penetrate vertically. The upper end portion of the rotating shaft 341 is housed in the recess 343a, and the middle portion in the extending direction is inserted into the through-hole 343b, so that the rotating shaft 341 is supported near the edge of the opening 311 and extending parallel to the edge so as to be rotatable about its axis. It is also preferable that the support pieces 343 are provided at positions such that they sandwich the holding claws 342 provided on the rotating shaft 341 from above and below. A drive unit 344 is connected to the rotating shaft 341 to rotate the rotating shaft 341 about its axis. The drive unit 344 can be formed, for example, by a motor (e.g., a stepping motor), a cylinder (e.g., an air cylinder), or the like.

[0050] In this configuration, when the drive unit 344 rotates the rotating shaft 341 around its axis, the holding claws 342 rotate around the rotating shaft 341 and change their position between a holding position F1 and a release position F2. The "holding position F1" is, for example, a rotational position in which the holding claws 342 extend along (in the planar direction of) the second main surface 31b of the base plate 31 (FIG. 8(a)). On the other hand, the "release position F2" is a rotational position in which the holding claws 342 extend in the normal direction of the second main surface 31b of the base plate 31 (FIG. 8(b)). For example, assume that the storage container 9 is disposed such that the jaw 911 abuts against or is close to the periphery of the opening 311 on the second main surface 31b of the base plate 31, and the holding claws 342 are in the release position F2 (FIG. 8(b)). When the rotating shaft 341 is rotated from this state in a direction that reduces the angle between the holding claws 342 and the base plate 31, the tip of the protrusion 342b approaches the base plate 31 as the rotation proceeds, and when the holding claws 342 reach the holding position F1, the protrusion 342b comes into contact with the jaw 911 and presses it toward the base plate 31 (FIG. 8(a)). On the other hand, when the rotating shaft 341 is rotated from this state in a direction that increases the angle between the holding claws 342 and the base plate 31 as the rotation proceeds, the tip of the protrusion 342b moves away from the base plate 31, and when the holding claws 342 reach the release position F2, the tip of the protrusion 342b retracts outward from the jaw 911 (FIG. 8(b)). When the holding claws 342 of each of the pair of holding units 340, 340 are set to the holding position F1, the storage container 9 is brought into contact (pressed) with the surrounding portion of the opening 311 in the base plate 31 over the entire circumference of the jaw portion 911. This generates a frictional force (for example, a frictional force that balances the weight of the storage container 9) between the storage container 9 and the base portion 31, and the storage container 9 is held in a cantilevered manner without being supported from below by other members ( FIG. 6 ). On the other hand, when the holding claws 342 of each of the pair of holding units 340, 340 are set to the release position F2, the holding of the storage container 9 is released.

[0051] <1-3. Control Unit> The control unit 103 is an element that controls the operation of each component included in each of the container conveying device 101 and the EFEM 102 and performs various arithmetic processing. It is configured, for example, by a general-purpose computer having electrical circuits or a microcomputer. Specifically, the control unit 103 includes, for example, a processor such as a central processing unit (CPU) that processes data, a read-only memory (ROM) that stores basic programs, a random access memory (RAM) used as a work area when the CPU performs predetermined processing (data processing), a storage device configured by a nonvolatile storage device such as a flash memory or a hard disk drive, and a bus line connecting these components to each other. The control unit 103 performs processing defined by a program stored in the storage device, for example, by the CPU executing the program. However, some or all of the processing performed by the control unit 103 may be performed by hardware such as a dedicated logic circuit (e.g., a dedicated processor).

[0052] <2. Operation of the transport system> The operation of the transport system 100 will be described. Note that the series of operations described below are performed by the control unit 103 controlling each unit provided in the container transport device 101 and each unit provided in the EFEM 102. The transport system 100 may be provided with various sensors at appropriate positions (for example, sensors that detect the positions of the traveling body 11, the placement unit 12, the door unit 32, the storage container 9, etc.), and the control unit 103 may control the operation of each unit based on detection information acquired from each sensor.

[0053] (a) When the containment vessel 9 is handed over from the vessel transfer device 101 to the EFEM 102 The operation when the storage container 9 is transferred from the container transfer device 101 to the EFEM 102 will be described with reference to Figures 9 and 10. Figure 9 is a diagram showing the flow of the operation, and Figure 10 is a diagram for explaining the operation.

[0054] Step S101 In this case, the container transfer device 101 places the storage vessel 9 on the placement unit 12 and travels (self-propelled) on the floor to the installation position of the EFEM 102 to which the storage vessel 9 is to be transferred (arrow AR11 in FIG. 10( a)). When traveling on the floor with the storage vessel 9 placed on the placement unit 12, the container transfer device 101 is in a container transfer state. Specifically, the "container transfer state" refers to a state in which the positioning pins 121 and the fixing parts 122 are both positioned in the protruding positions and the placement unit 12 is positioned in the retracted position K2. When the storage vessel 9 is placed on the placement unit 12, the positioning pins 121 and the fixing parts 122 are both positioned in the protruding positions. This means that the storage vessel 9 placed on the placement unit 12 is positioned at a predetermined position within the placement surface 12a by the positioning pins 121 and is fixed to the predetermined position by the fixing parts 122. Therefore, even if the traveling speed of the travelling body 11 is high, the storage vessel 9 will not be shaken off. Furthermore, by disposing the mounting part 12 in the retracted position K2, the center of gravity of the container transfer device 101 is less likely to shift forward, allowing the container transfer device 101 to travel stably. Note that, for example, while the container transfer device 101 is traveling, the gas nozzle 123 may be disposed in the protruding position as needed, and connected to a gas supply valve or a gas exhaust valve provided on the bottom surface of the storage container 9, thereby supplying (purging) gas to the storage container 9 and / or exhausting gas from the storage container 9.

[0055] Step S102 When the container transfer device 101 arrives at the installation position of the EFEM 102, it is positioned at a position (opposing position) P facing the port unit 30 to which the storage container 9 is to be transferred in the front-rear direction ( FIG. 10( b) ). Specifically, the opposing position P is a position where the front surface of the body 111 of the traveling body 11 faces, while being close to or abutting, the lower portion of the opening 311 in the base plate 31 of the port unit 30. As described above, the opening 311 is formed at a height facing the lid 92 of the storage container 9 placed on the placement unit 12. Also, at this stage, the door unit 32 is positioned in the closed position D1. Therefore, when the container transfer device 101 is positioned at the opposing position P, the lid 92 of the storage container 9 placed on the placement unit 12 faces, while being spaced apart in the front-rear direction from, the door unit 32 that closes the opening 311.

[0056] Step S103 Next, the container transfer device 101 is placed in a delivery state. Specifically, the "delivery state" refers to a state in which the mounting unit 12 is located at the forward position K1 and the positioning pin 121, the fixing unit 122, and the gas nozzle 123 are all located at their retracted positions. Specifically, the mounting unit 12 is first moved from the retracted position K2 to the forward position K1 (arrow AR12 in FIG. 10(c)), and then the positioning pin 121, the fixing unit 122, and the gas nozzle 123 are all moved from their protruding positions to their retracted positions, thereby placing the container transfer device 101 in a delivery state. By moving the mounting unit 12 to the forward position K1, the storage container 9 placed on the mounting unit 12 approaches the base plate 31, and the jaw 911 of the storage container 9 abuts (docks) or comes sufficiently close to the periphery of the opening 311 in the base plate 31. This brings the lid 92 of the containment vessel 9 and the door part 32 closing the opening 311 into sufficient proximity. Furthermore, by placing the positioning pin 121 in the retracted position, the positioning pin 121 is disengaged from a recess provided in the bottom surface of the containment vessel 9, and the positioning pin 121 moves away from the bottom surface and retracts below the mounting surface 12a. Furthermore, by placing the fixing part 122 in the retracted position, the engagement between the fixing part 122 and a fixed part provided in the bottom surface of the containment vessel 9 is released, and the fixing part 122 moves away from the bottom surface and retracts below the mounting surface 12a. Furthermore, by placing the gas nozzle 123 in the retracted position, the gas nozzle 123 is disconnected from a gas supply valve or a gas exhaust valve provided in the bottom surface of the containment vessel 9, and the gas nozzle 123 moves away from the bottom surface and retracts below the mounting surface 12a. In other words, when the positioning pin 121, the fixing part 122, and the gas nozzle 123 are all positioned in the retracted position, the storage container 9 is able to move relative to the mounting part 12 (i.e., it is able to move along the plane of the mounting surface 12a and move away from the mounting surface 12a).

[0057] Step S104 Next, the container holding unit 34 provided in the EFEM 102 (specifically, the port unit 30) holds the storage container 9 placed on the mounting unit 12 of the container transfer device 101. Specifically, the rotating shaft 341 provided in each of the pair of holding units 340, 340 is rotated about its axis, and each holding claw 342 is changed in position from the release position F2 to the holding position F1 (arrow AR13 in FIG. 10(c)). Then, each holding claw 342 abuts against the jaw 911 and presses it toward the base plate 31. For example, the storage container 9 is slightly lifted by the jaw 911 being pressed toward the base plate 31, and the bottom surface of the storage container 9 is slightly separated from the mounting surface 12a. As a result, the storage container 9 is held in a cantilevered manner without being supported from below by the mounting unit 12. That is, by setting each holding claw 342 to the holding position F1, the storage container 9 is held in a cantilevered manner without being supported from below by the mounting unit 12, while the jaws 911 abut against the portion around the opening 311 in the base plate 31. In this way, the EFEM 102 receives the storage container 9 directly from the container conveying device 101 by holding the storage container 9 placed on the mounting unit 12 in a cantilevered manner with the container holding units 34.

[0058] Step S105 Once the storage vessel 9 is held by the vessel holder 34, the vessel transfer device 101 can move away from the port unit 30 to any desired position (arrow AR14 in FIG. 10(d)). For example, the vessel transfer device 101 may move to a position P facing another port unit 30 equipped with the EFEM 102, or to an installation position of another EFEM 102. As described above, at this stage, the positioning pin 121, the fixing portion 122, and the gas nozzle 123 are all positioned in their retracted positions. Therefore, when the vessel transfer device 101 moves away from the port unit 30, these portions 121, 122, and 123 do not interfere with the storage vessel 9 held by the vessel holder 34. Note that when traveling on the floor without a storage vessel 9 placed on the placement portion 12, the vessel transfer device 101 is preferably in an empty transfer state. However, the "empty transfer state" specifically refers to a state in which the positioning pin 121, the fixing part 122, and the gas nozzle 123 are all disposed in the retracted positions, and the mounting part 12 is disposed in the retracted position K2. Here, the positioning pin 121, the fixing part 122, and the gas nozzle 123 are already disposed in the retracted positions, so that the container transfer device 101 enters the empty transfer state by moving the mounting part 12 from the advanced position K1 to the retracted position K2.

[0059] In the port unit 30, after the container holder 34 holds the storage container 9, the following operations are performed. First, the lid 92 of the storage container 9 and the door portion 32 are connected and integrated. This causes the door portion 32 to hold the lid 92. Furthermore, the latch between the container body 91 of the storage container 9 and the lid 92 is released. Then, the door portion 32, together with the lid 92 it holds, moves from the closed position D1 to the open position D2. This opens the opening 311, and the interior of the container body 91 communicates with the transfer space V through the opening 311. Once the interior of the container body 91 communicates with the transfer space V, the transfer robot 22 arranged in the transfer space V removes the substrate 90 stored in the container body 91 and transfers it to the processing device M. In the processing device M, a predetermined process is performed on the substrate 90. The transfer robot 22 transfers the substrate 90, which has undergone the predetermined process in the processing device M, from the processing device M and stores it in the container body 91. Thereafter, when a predetermined number of substrates 90 have been stored in the container body 91, the door part 32, together with the lid 92 it holds, is moved from the open position D2 to the closed position D1. As a result, the lid 92 held by the door part 32 is attached to the container body 91. When the lid 92 is attached to the container body 91, a latch is applied between the container body 91 and the lid 92, and the door part 32 and the lid 92 are released from their connection, and the two are separated (the held state is released).

[0060] (b) When the containment vessel 9 is handed over from the EFEM 102 to the vessel transfer device 101 The operation when the storage container 9 is transferred from the EFEM 102 to the container transfer device 101 will be described with reference to Fig. 11 and Fig. 12. Fig. 11 is a diagram showing the flow of the operation, and Fig. 12 is a diagram for explaining the operation.

[0061] Step S201 In this case, the container transfer device 101 travels on the floor without placing the storage vessel 9 on the placement unit 12, and moves to the installation position of the EFEM 102 that is to receive the storage vessel 9 (arrow AR21 in FIG. 12(a)). When traveling on the floor without placing the storage vessel 9 on the placement unit 12, the container transfer device 101 is in an empty transfer state. As described above, the empty transfer state is specifically a state in which, for example, the positioning pin 121, the fixing unit 122, and the gas nozzle 123 are all positioned in the retracted position, and the placement unit 12 is positioned in the retracted position K2.

[0062] Step S202 When the EFEM 102 arrives at its installation position, the container transfer device 101 is positioned at a position P opposite the port unit 30 that is to receive the storage vessel 9 ( FIG. 12( b) ). At this stage, the container holder 34 provided in the port unit 30 holds the storage vessel 9. That is, the storage vessel 9 is cantilevered by the container holder 34 (without being supported by any other member) while the jaw 911 abuts against the periphery of the opening 311 in the base plate 31. Therefore, the container transfer device 101 is positioned at the position P opposite the storage vessel 9 held by the container holder 34. As described above, at this stage, the positioning pin 121, the fixing portion 122, and the gas nozzle 123 are all positioned in their retracted positions. Therefore, when the container transfer device 101 moves below the storage vessel 9, these portions 121, 122, and 123 do not interfere with the storage vessel 9. As an example, when the container transfer device 101 is disposed at the facing position P, the placement surface 12a and the bottom surface of the storage container 9 are sufficiently close to each other in a non-contact state.

[0063] Step S203 Next, the container transfer device 101 is placed in a delivery state. As described above, the delivery state is, for example, a state in which the placement unit 12 is disposed at the forward position K1, and the positioning pin 121, the fixing unit 122, and the gas nozzle 123 are all disposed at the retracted positions. Here, the positioning pin 121, the fixing unit 122, and the gas nozzle 123 are already disposed at the retracted positions, so the placement unit 12 is moved from the retracted position K2 to the forward position K1 (arrow AR22 in FIG. 12(c)), thereby placing the container transfer device 101 in a delivery state. As an example, when the placement unit 12 is disposed at the forward position K1, the placement unit 12 is positioned directly below the storage container 9 held by the container holder 34.

[0064] Step S204 Next, the container holder 34 provided in the EFEM 102 (specifically, the port unit 30) releases the hold of the storage container 9. Specifically, the rotating shaft 341 provided in each of the pair of holding units 340, 340 is rotated about its axis, and each holding claw 342 changes its position from the holding position F1 to the release position F2 (arrow AR23 in FIG. 12(c)). Then, each holding claw 342 moves away from the jaw 911 and retreats to the outside of the jaw 911. As an example, when the state in which the jaw 911 is pressed against the base plate 31 is released, the storage container 9 sinks slightly, and the bottom surface of the storage container 9 comes into contact with the mounting surface 12a. That is, the storage container 9 is placed on the mounting portion 12. That is, when each holding claw 342 is set to the release position F2, the container holder 34 releases the hold of the storage container 9, and the storage container 9 is placed on the mounting portion 12. In this way, the EFEM 102 releases the storage container 9 from the container holder 34 and places it on the placement unit 12 , thereby directly transferring the storage container 9 to the container transfer device 101 .

[0065] Step S205 When the storage container 9 is placed on the mounting portion 12, the container conveying device 101 is placed in a container conveying state. As described above, the container conveying state is, for example, a state in which the positioning pin 121 and the fixing portion 122 are both positioned in the protruding position and the mounting portion 12 is positioned in the retracted position K2. However, for example, the positioning pin 121 is moved from the retracted position to the protruding position after the mounting portion 12 is moved to the advanced position K1 and before the container holding portion 34 releases its hold on the storage container 9. Therefore, when the container holding portion 34 releases its hold on the storage container 9 (specifically, when each holding claw 342 changes position from the holding position F1 to the release position F2) and the storage container 9 is placed on the mounting portion 12, the positioning pin 121 engages with a recess provided on the bottom surface of the storage container 9, and the storage container 9 is guided to a predetermined position within the mounting surface 12a and positioned at the predetermined position. Furthermore, after the storage container 9 is placed on the placement unit 12, the fixing unit 122 is moved from the retracted position to the protruding position and hooked onto a fixing portion provided on the bottom surface of the storage container 9. This fixes the storage container 9 to the predetermined position relative to the placement surface 12a. After the fixing unit 122 is moved to the protruding position, the placement unit 12 is moved from the advanced position K1 to the retracted position K2. This puts the container conveying device 101 into a container conveying state.

[0066] Step S206 Thereafter, the container conveying device 101 places the storage container 9 on the mounting section 12, and travels on the floor to move the storage container 9 to the installation position of the next device to which it should be handed over (arrow AR24 in FIG. 12(d)). The next device to which the storage container 9 should be handed over may be, for example, another EFEM 102.

[0067] <3. Effects> The transfer system 100 according to the above embodiment includes a container transfer device 101 that transfers a storage container 9 that stores substrates 90, and an EFEM 102 that is connected to a processing device M that processes the substrates 90. The container transfer device 101 includes a running body 11 having running wheels 112, and a mounting unit 12 that is provided on the running body 11 and on which the storage container 9 is placed. The EFEM 102 also includes a base plate 31 that is a plate-like member that is arranged in an upright position and has an opening 311 formed in its surface that is opened and closed by a door unit 32, and a container holder 34 that is provided on the base plate 31 and can hold the storage container 9 in a cantilevered manner while abutting against the periphery of the opening 311 in the base plate 31 without being supported from below by another member.

[0068] According to this configuration, the container transfer device 101 can travel to the EFEM 102 while placing the storage vessel 9 on the platform 12. The EFEM 102 can receive the storage vessel 9 directly from the container transfer device 101 by using the container holder 34 to cantilever the storage vessel 9 placed on the platform 12 of the container transfer device 101. The EFEM 102 can also directly transfer the storage vessel 9 to the container transfer device 101 by releasing the container holder 34 from holding the storage vessel 9 and placing it on the platform 12 of the container transfer device 101. The container transfer device 101 can then run away from the EFEM 102 while placing the storage vessel 9 on the platform 12. This simplifies the configuration for transferring the storage vessel 9. For example, while conventional EFEMs are provided with a load port equipped with a platform on which the storage vessel 9 is placed, the EFEM 102 according to the above embodiment does not require such a load port and is therefore not provided with one. Therefore, the EFEM 102 can reduce the footprint (the area occupied by the factory) compared to conventional EFEMs, which is advantageous from the perspective of the SDGs. Furthermore, AGVs, AMRs, and the like that have conventionally been used to transport the containment vessel 9 to the load port must be equipped with a robot arm or the like for transferring the containment vessel 9. In contrast, the container transfer device 101 does not require a robot arm or the like, and is not equipped with a robot arm or the like. Therefore, the container transfer device 101 can be made smaller than the AGVs, AMRs, and the like that have conventionally been used to transport the containment vessel 9 to the load port, and manufacturing costs can also be reduced.

[0069] Furthermore, in the above embodiment, the mounting portion 12 is provided with a positioning pin 121 that can freely appear and disappear with respect to the mounting surface 12a on which the storage container 9 is placed, and that, when protruding from the mounting surface 12a, guides and positions the storage container 9 to a predetermined position within the mounting surface 12a. With this configuration, the storage container 9 is placed at the predetermined position by being guided by the positioning pin 121. When the positioning pin 121 is provided, even if the storage container 9 is placed at a position slightly deviated from the predetermined position, the storage container 9 is guided by the positioning pin 121 and is ultimately placed at the predetermined position. In other words, the provision of the positioning pin 121 allows the storage container 9 to be placed on the mounting surface 12a at a position slightly deviated from the predetermined position. Furthermore, because the positioning pin 121 can freely appear and disappear with respect to the mounting surface 12a, the positioning pin 121 does not get in the way when the storage container 9 is not in use. For example, when the container conveying device 101 moves away from (step S105) or approaches (step S202) the port unit 30, the positioning pin 121 is positioned in a recessed position, so that it does not interfere with the storage container 9 held in the container holding portion 34.

[0070] Furthermore, in the above embodiment, the mounting unit 12 is capable of retracting into and out of the mounting surface 12a on which the storage container 9 is placed, and includes a fixing unit 122 that fixes the storage container 9 to the mounting surface 12a when protruding from the mounting surface 12a. If the storage container 9 is fixed to the mounting surface 12a by the fixing unit 122, the storage container 9 will not be shaken off even if the traveling speed of the traveling body 11 is high. In other words, the provision of the fixing unit 122 allows the traveling speed of the container conveying device 101 to be sufficiently high, thereby increasing throughput. Furthermore, because the fixing unit 122 is capable of retracting into and out of the mounting surface 12a, the fixing unit 122 does not get in the way when not in use.

[0071] Furthermore, in the above embodiment, gas nozzle 123 is provided which is capable of retracting into and out of mounting surface 12a on which storage container 9 is placed, and which supplies gas to or exhausts gas from storage container 9 when protruding from mounting surface 12a. With this configuration, for example, the gas inside storage container 9 can be replaced with a predetermined gas. Furthermore, because gas nozzle 123 is capable of retracting into and out of mounting surface 12a, gas nozzle 123 does not get in the way when not in use.

[0072] Furthermore, in the above embodiment, the container conveying device 101 includes a mounting unit drive mechanism 13 that moves the mounting unit 12 relative to the traveling body 11. With this configuration, for example, when the traveling body 11 is disposed in contact with or close to the base plate 31, the mounting unit 12 can be moved closer to or farther away from the base plate 31 (and thus the container holding unit 34 provided thereon). For example, by moving the mounting unit 12 closer to the base plate 31, the container holding unit 34 can easily hold the storage container 9 mounted on the mounting unit 12, or the storage container 9 held by the container holding unit 34 can be easily placed on the mounting unit 12.

[0073] Furthermore, in the above embodiment, the opening 311 in the base plate 31 of the EFEM 102 is provided at a height facing the lid 92 of the storage container 9 placed on the placement unit 12 of the container transfer device 101. With this configuration, there is no need to raise or lower the placement unit 12 to hold the storage container 9 placed on the placement unit 12 in the container holding unit 34. Therefore, the configuration for transferring the storage container 9 can be particularly simplified.

[0074] In the above embodiment, the EFEM 102 is provided on the main surface (first main surface) 31a of the base plate 31 opposite to the main surface (second main surface) 31b against which the storage container 9 abuts, and includes a door section drive mechanism 33 that moves the door section 32 between a position (open position) D1 at which the door section 32 opens the opening 311 and a position (closed position) D2 at which the door section 32 closes the opening 311. With this configuration, the door section drive mechanism 33 does not get in the way when the container conveying device 101 is brought close to the base plate 31, so that the container conveying device 101 can be brought close to the base plate 31 without difficulty. This allows, for example, the container holder 34 to easily hold the storage container 9 placed on the placement unit 12, or the storage container 9 held by the container holder 34 can be placed on the placement unit 12 without difficulty.

[0075] <4. Modifications> The transport system 100 according to the above embodiment can be modified as appropriate. In the following, differences from the above embodiment will be described, and explanations of points that do not differ from the above embodiment will be omitted. Furthermore, the elements described in the above embodiment will be denoted by the same reference numerals.

[0076] <4-1. First modified example> (i) Configuration of the container transport device The transfer system according to the first modified example differs from the above embodiment in the configuration of the container transfer device. The configuration of the container transfer device 101a included in the transfer system according to the first modified example will be described with reference to Fig. 13. Fig. 13 is a perspective view of the container transfer device 101a.

[0077] The container conveying device 101a includes a running body 41, a shelf 42, a plurality of (two in the illustrated example) placement sections 43, a plurality of (two in the illustrated example) placement section driving mechanisms 44, and a shelf driving mechanism 45.

[0078] (Training body 41) The running body 41 runs on a floor. The running body 41 includes, for example, a flat, rectangular parallelepiped base body 411 and a plurality of (four in the illustrated example) running wheels 412 provided below the base body 411. The configuration of the running wheels 412 is similar to that of the running wheels 112 according to the above embodiment. At least one of the four running wheels 412 (a pair of adjacent running wheels 412, 412 in the illustrated example) serves as a driving wheel 412a, and the remaining running wheels 412 serve as driven wheels 412b. However, the driven wheels 412b are not essential, and all of the running wheels 412 may be driven wheels 412a. The base body 411 also houses a running drive unit 413 that drives each of the driving wheels 412a. The configuration of the running drive unit 413 is similar to that of the running drive unit 113 according to the above embodiment.

[0079] (Shelf 42) The shelf 42 is a shelf for holding a plurality of storage vessels 9 in multiple stages, and is mounted on the traveling body 41. In the example shown in the figure, the shelf 42 is provided on the upper surface of the base body 411. The shelf 42 is configured to include a plurality of shelf plates 421 (two in the example shown) arranged at intervals in the vertical direction, and side plates 422 connecting the shelf plates 421 adjacent in the vertical direction (for example, connecting the edges extending in the front-rear direction of the shelf plates 421).

[0080] (Placement portion 43) The mounting portion 43 is a flat member and is provided on each of the multiple shelf plates 421. In the example shown in the figure, the mounting portion 43 is provided on the upper surface of the shelf plate 421 via a mounting portion drive mechanism 44. The storage vessel 9 is placed on the mounting portion 43. In other words, the upper surface of the mounting portion 43 serves as the mounting surface on which the storage vessel 9 is placed. The configuration of the mounting portion 43 is similar to that of the mounting portion 12 according to the above embodiment. In other words, the mounting surface of the mounting portion 43 is provided with positioning pins, fixing portions, and gas nozzles. In addition, a drive mechanism is provided to move each of these portions between a retracted position and an extended position.

[0081] (Placement section drive mechanism 44) The placement section drive mechanism 44 moves the placement sections 43 provided on each of the plurality of shelf boards 421 back and forth relative to the traveling body 41 (specifically, the base body 411 and the shelf boards 421 of the shelves 42 provided on the base body 411). The configuration of the placement section drive mechanism 44 is the same as that of the placement section drive mechanism 13 according to the above embodiment.

[0082] (Shelf drive mechanism 45) The shelf driving mechanism 45 raises and lowers the shelves 42. The shelf driving mechanism 45 includes, for example, multiple sets of rods 451 and cylinders 452 provided on the base 411. For example, one set of rods 451 and cylinders 452 is provided at each of the four corners of the top surface of the base 411. Each rod 451 is provided in an orientation extending in the vertical direction. In this example, an outwardly projecting plate 453 is provided on the side plate 422, and the upper end of the rod 451 is connected to the outwardly projecting plate 453. The cylinder 452 is provided at the lower end of the rod 451 and moves the rod 451 forward and backward along the direction of its extension. The cylinder 452 controls air pressure by, for example, opening and closing a solenoid valve (a so-called air cylinder) to move the rod 451 forward and backward with the air pressure.

[0083] In this configuration, when the rods 451 move vertically back and forth in response to the drive of the multiple cylinders 452, the extension plate 453 (and thus the shelf 42) moves up and down. This causes the shelf 42 to move between a lower position G1 and an upper position G2. Note that the "lower position G1" is, for example, a height at which the lid 92 of the storage container 9 placed on the placement portion 43 provided on the upper shelf plate 421 faces the opening 311 (see FIG. 14(a)). On the other hand, the "upper position G2" is, for example, a height at which the lid 92 of the storage container 9 placed on the placement portion 43 provided on the lower shelf plate 421 faces the opening 311 provided in the base plate 31 of the EFEM 102 (see FIG. 14(b)).

[0084] (ii) Operation of the container transport device The operation of the container transfer device 101a will be described with reference to Figure 14 in addition to Figures 9 and 11. Figure 14 is a diagram for explaining the operation of the container transfer device 101a.

[0085] (a) When the containment vessel 9 is handed over from the vessel transfer device 101a to the EFEM 102 In this case, the container transfer device 101a places the storage container 9 on a placement portion 43 provided on one of the shelves 421, and travels along the floor to move to the installation position of the EFEM 102 to which the storage container 9 is to be transferred (step S101). When traveling along the floor with the storage container 9 placed on one of the placement portions 43, the container transfer device 101a is in a container transfer state. That is, the positioning pins and fixing portions provided on the placement portion 43 on which the storage container 9 is placed are both positioned in the protruding positions, and the placement portion 43 is positioned in the retracted position K2. In the container transfer state, it is preferable that the shelf 42 is positioned in the lower position G1 to lower the center of gravity.

[0086] When the container transfer device 101a arrives at the installation position of the EFEM 102, the shelf 42 is raised or lowered as necessary. For example, if the storage container 9 to be transferred to the EFEM 102 is placed on the placement portion 43 provided on the upper shelf plate 421, the shelf 42 remains in the lower position G1 (FIG. 14(a)). On the other hand, if the storage container 9 to be transferred to the EFEM 102 is placed on the placement portion 43 provided on the lower shelf plate 421, the shelf 42 is raised to the upper position G2 (FIG. 14(b)). After the shelf 42 is raised or lowered as necessary, the container transfer device 101a is positioned at a position P facing the port unit 30 to which the storage container 9 is to be transferred (step S102). Specifically, the facing position P is a position where the front surface of the base body 411 of the traveling body 41 faces, while being close to or abutting, the lower portion of the opening 311 in the base plate 31 of the port unit 30. When the container conveying device 101a is positioned at the opposing position P, the lid 92 of the storage container 9 (the storage container 9 to be handed over to the EFEM 102) placed on the placement section 43 is positioned opposite the door section 32 that blocks the opening 311 while being spaced apart in the front-to-back direction.

[0087] The subsequent processing is the same as in the above embodiment. First, the container transfer device 101a is set to a transfer state (step S103). That is, first, the placement unit 43 (the placement unit 43 on which the storage container 9 to be transferred to the EFEM 102 is placed) is moved from the retracted position K2 to the advanced position K1. Next, the positioning pin, the fixing unit, and the gas nozzle provided on the placement unit 43 are all moved from the protruding position to the retracted position. After that, the container holder 34 provided on the EFEM 102 (specifically, the port unit 30) holds the storage container 9 placed on the placement unit 43 of the container transfer device 101a (step S104). That is, the EFEM 102 directly receives the storage container 9 from the container transfer device 101a by cantilevering the storage container 9 placed on the placement unit 43 with the container holder 34. Once the storage container 9 is held by the container holder 34, the container transfer device 101a can move away from the port unit 30 to any position (step S105).

[0088] (b) When the containment vessel 9 is handed over from the EFEM 102 to the vessel transfer device 101a In this case, the container transfer device 101a travels on the floor without placing a storage container 9 on at least one of the placement sections 43, and moves to the installation position of the EFEM 102 that is to receive the storage container 9 (step S201). When traveling on the floor without placing a storage container 9 on the placement section 43, the container transfer device 101a is in an empty transfer state. That is, the positioning pins, fixing sections, and gas nozzles provided on the placement section 43 on which the storage container 9 is not placed are all positioned in their retracted positions, and the placement section 43 is positioned in the retracted position K2. In the empty transfer state, it is preferable that the shelf 42 is positioned in the lower position G1 to lower the center of gravity.

[0089] When the EFEM 102 arrives at the installation position, the shelf 42 is raised or lowered as necessary. For example, when the storage container 9 is to be received by the placement unit 43 provided on the upper shelf 421, the shelf 42 remains in the lower position G1 (FIG. 15(a)). On the other hand, when the storage container 9 is to be received by the placement unit 43 provided on the lower shelf 421, the shelf 42 is raised to the upper position G2 (FIG. 15(b)). After the shelf 42 is raised or lowered as necessary, the container transfer device 101a is positioned at a position P opposite the port unit 30 that is to receive the storage container 9 (step S202). With the container transfer device 101a positioned at the opposite position P, the storage container 9 held by the container holder 34 enters the space above one of the shelves 421.

[0090] The subsequent processing is the same as in the above embodiment. First, the container transfer device 101a is set to the transfer state (step S203). Here, the positioning pin, the fixing portion, and the gas nozzle of the mounting portion 43 are already positioned in the retracted position. Therefore, the mounting portion 43 is moved from the retracted position K2 to the advanced position K1, thereby setting the container transfer device 101a to the transfer state. Next, the container holding portion 34 provided in the EFEM 102 (specifically, the port unit 30) releases the storage container 9 from its hold (step S204). That is, the EFEM 102 releases the storage container 9 from the container holding portion 34 and places it on the mounting portion 43, thereby directly transferring the storage container 9 to the container transfer device 101a. Once the storage container 9 is placed on the mounting portion 43, the container transfer device 101a is set to the container transfer state (step S205). Thereafter, the container transfer device 101a places the storage container 9 on the placement section 43, and travels on the floor to move the storage container 9 to the installation position of the next device to which it is to be handed over (step S206).

[0091] <4-2. Second modified example> In the above embodiment, the shape of the transfer chamber 21 provided in the EFEM 102 and the layout of the port unit 30 provided in the transfer chamber 21 can be changed as appropriate.

[0092] For example, the EFEM 102b illustrated in FIG. 16 includes a transfer chamber 21b having a shape obtained by bisecting a hexagonal prism by a diagonal. The transfer chamber 21b includes three side walls (a first side wall 211b, a second side wall 212b, and a third side wall 213b) corresponding to the three sides of the hexagon and a side wall (a fourth side wall) 214b corresponding to the diagonal of the hexagon. The transfer chamber 21b is connected to a processing device M, for example, at the fourth side wall 214b. A port unit 30 (specifically, a base plate 31) is provided on each of the first side wall 211b, the second side wall 212b, and the third side wall 213b. In this transfer chamber 21b, adjacent port units 30 are provided on side walls that form an obtuse angle with each other.

[0093] 17 includes a rectangular transfer chamber 21c. The transfer chamber 21c includes four side walls (a first side wall 211c, a second side wall 212c, a third side wall 213c, and a fourth side wall 214c). The transfer chamber 21c is connected to a processing device M, for example, at the fourth side wall 214c. A port unit 30 (specifically, a base plate 31) is provided on each of the first side wall 211c, the second side wall 212c, and the third side wall 213c. In this transfer chamber 21c, adjacent port units 30 are provided on side walls that are perpendicular to each other.

[0094] For example, when an overhead hoist transport (OHT) is used to transfer the containment vessel 9, the containment vessel 9 can only be transferred directly below the location where the OHT rails are installed. For this reason, for example, in a conventional EFEM, the load port (a load port having a mounting section on which the containment vessel 9 is placed) had to be located directly below the OHT rails. Due to this constraint, an EFEM is generally installed so that one of its side walls is aligned along the direction in which the OHT rails extend, and the load port could only be provided on that side wall. Naturally, the transport system 100 according to the above embodiment does not impose such constraints on the layout of the port units 30. Therefore, in addition to the layout in which multiple port units 30 are arranged in a row on one side wall 212 of the EFEM 102 ( FIG. 1 ), layouts in which a port unit 30 is provided on each of multiple side walls 211 b to 213 b and 211 c to 213 c ( FIGS. 16 and 17 ) are also permitted. In this way, with the transport system 100, there are no restrictions on the layout of the port units 30, so it is possible to increase the number of port units 30 installed without increasing the footprint of the EFEM 102. From another perspective, it is possible to reduce the footprint of the EFEM 102 without reducing the number of port units 30 installed.

[0095] <4-3. Other variations> In the container transfer device 101 according to the above embodiment, for example, a tank connected to the gas nozzle 123 may be mounted on the traveling body 11. Specifically, for example, a tank connected to the gas nozzle 123 via a pipe or the like may be housed in the body 111. At least one of the tanks mounted on the traveling body 11 may be a supply tank that stores a predetermined gas (supply gas) to be supplied to the containment vessel 9. Furthermore, at least one of the tanks mounted on the traveling body 11 may be a discharge tank that stores a gas (discharge gas) discharged from the containment vessel 9. When a tank is mounted on the traveling body 11, when the container transfer device 101 is disposed near the EFEM 102 (for example, when disposed at position P opposite the port unit 30), the tank may be connected to a gas port provided on the EFEM 102 (for example, the base plate 31), and gas may be exchanged with the tank through the gas port. Specifically, for example, a supply gas may be supplied to a supply tank through a supply gas port provided in the EFEM 102, and exhaust gas stored in an exhaust tank may be discharged through an exhaust gas port provided in the EFEM 102.

[0096] In the container conveying device 101 according to the above embodiment, the placement unit drive mechanism 13 may be omitted. That is, the placement unit 12 may be fixed to the traveling body 11. As an example, the placement unit 12 may be fixed at the forward position K1.

[0097] In the container conveying device 101 according to the above embodiment, the running body 11 may be guided by various guidance methods (for example, a magnetic guidance method in which it is guided by a magnetic tape laid on the floor, a laser guidance method in which it runs while detecting surrounding information using a laser, etc.).

[0098] In the container conveying device 101 according to the above embodiment, the travel drive unit 113 may be omitted. That is, the travel vehicle 11 may be a vehicle that travels while being steered by an operator (a so-called PGV).

[0099] In the container conveying device 101 according to the above embodiment, the storage container 9 does not necessarily have to be handed over to the EFEM 102. For example, a worker may place the storage container 9 on the placement unit 12, or the worker may receive the storage container 9 placed on the placement unit 12.

[0100] In the EFEM 102 according to the above embodiment, the configuration of the container holder 34 can be modified as appropriate. For example, the number, size, shape, and the like of the holding claws 342 included in the container holder 34 can be modified as appropriate. The layout of the holding claws 342 included in the container holder 34 can also be modified as appropriate. For example, in the above embodiment, all of the holding claws 342 are provided on the sides of the opening 311 and abut against vertically extending portions of the jaw 911 of the storage container 9. However, at least one of the holding claws 342 may be provided above or below the opening 311 and abut against a horizontally extending portion of the jaw 911 of the storage container 9. The holding claw 342 may also be engaged with the jaw 911. Specifically, for example, jaw 911 may be provided with a hole, recess, groove, or the like as a locked portion, and when holding claw 342 is in holding posture F1, part of holding claw 342 may be inserted into or hooked onto the locked portion, thereby locking holding claw 342 to jaw 911. In this case, holding claw 342 may press jaw 911 toward base plate 31 while being locked to jaw 911.

[0101] In the EFEM 102 according to the above embodiment, the multiple port units 30 provided in the transfer chamber 21 are arranged at the same height. However, the multiple port units 30 provided in the transfer chamber 21 may be arranged at different heights. For example, the multiple port units 30 may be arranged vertically in the transfer chamber 21. Furthermore, the openings 311 of the multiple port units 30 provided in the transfer chamber 21 may be arranged at different heights. When the multiple port units 30 or the openings 311 provided therein are arranged at different heights, the container transfer device 101 may be provided with an elevating mechanism for raising and lowering the mounting unit 12. When the storage container 9 is transferred, the elevating mechanism may raise and lower the mounting unit 12 so that the mounting unit 12 is positioned at a height corresponding to the openings 311 at any height. Alternatively, as in the container conveying device 101a of the first modified example, multiple mounting sections 43 may be provided, arranged at different heights (for example, heights corresponding to each of the multiple openings 311), and the storage container 9 may be transferred between the mounting sections 43 and the openings 311, which are at corresponding heights.

[0102] In the EFEM 102 according to the above embodiment, the number of port units 30 provided in the transfer chamber 21 may be one.

[0103] In the EFEM 102 according to the above embodiment, the recipient of the storage container 9 does not necessarily have to be the container transfer device 101. For example, the EFEM 102 may receive the storage container 9 directly from the worker by holding the storage container 9 in a cantilever manner with the container holder 34 while the worker is holding the storage container 9 in his / her hand (specifically, for example, the storage container 9 held by the worker in a position and posture such that the jaw 911 abuts against the periphery of the opening 311 in the base plate 31). Also, for example, the EFEM 102 may hand the storage container 9 directly to the worker by releasing the container holder 34 from its hold on the storage container 9 while the worker is holding the storage container 9 held by the container holder 34 in his / her hand.

[0104] In the above embodiment, the substrates 90 stored in the storage container 9 may be, for example, wafers, wafers held in a tape frame (tape frame wafers), etc. The shape of the substrates 90 may be circular, rectangular, etc. The storage container 9 does not necessarily have to be a FOUP, and may be, for example, a FOSB, a cassette, etc.

[0105] Other configurations can also be modified in various ways without departing from the spirit of the present invention. [Explanation of symbols]

[0106] 100 Transport System 101, 101a Container transport device 11 running bodies 112 Running wheel 12 Placement section 121 Locating pin 122 Fixed part 123 Gas Nozzle 13 Mounting section drive mechanism 102 EFEM 20 Conveying section 21 Transfer chamber 22 Transport robot 30 port unit 31 Base plate 32 Door section 33 Door drive mechanism 34 Container holding part 103 Control Unit

Claims

1. a container transport device that transports a storage container that stores substrates; an EFEM connected to a processing device for processing the substrate; Equipped with The container conveying device a running body having running wheels; a mounting portion provided on the traveling body on which the storage container is placed; Equipped with The EFEM is a base plate, which is a plate-like member arranged in an upright position and has an opening formed in its surface that is opened and closed by the door portion; a container holder provided on the base plate, the container holder being able to hold the storage container in a cantilevered manner without being supported from below by another member while being in contact with the periphery of the opening in the base plate; A transport system comprising:

2. 2. The transport system according to claim 1, The placement portion is a positioning pin that is capable of appearing and disappearing from a mounting surface on which the storage container is placed, and that, in a state where it protrudes from the mounting surface, guides and positions the storage container at a predetermined position within the mounting surface; A transport system comprising:

3. 3. The transport system according to claim 1 or 2, The container conveying device a placement unit drive mechanism that moves the placement unit relative to the traveling body; A transport system comprising:

4. a base plate, which is a plate-like member arranged in an upright position and has an opening formed in its surface that is opened and closed by the door portion; a container holder provided on the base plate, capable of holding a storage container for storing substrates in a cantilever manner without being supported from below by another member while abutting the storage container against the periphery of the opening in the base plate; a door section drive mechanism provided on a main surface of the base plate opposite to a main surface against which the storage container abuts, the door section being configured to move the door section between a position where the door section opens the opening and a position where the door section closes the opening; An EFEM comprising:

5. a running body having running wheels; a mounting section provided on the traveling body, on which a storage container for storing substrates is mounted; a mount drive mechanism that moves the mount relative to the traveling body; A container transport device comprising:

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