Electroplated tool

Abstract

To provide an electroplated tool capable of making machining efficiency and tool life compatible with each other even under a high load machining condition.SOLUTION: An electroplated article includes a base metal 10 having a surface 10S to be fixed, and a superabrasive layer 20 formed on the surface 10S to be fixed, wherein the superabrasive layer 20 includes plating 24 and a plurality of superabrasive grains 22 fixed on the surface 10S to be fixed by the plating 24. In the electroplated tool, the super-abrasive grains 22 have a shape of any one of a truncated octahedron, a hexa-octahedron, and an octahedron, 50% or more of the super-abrasive grains 22 are fixed in a state where an edge portion E which is a corner or a ridge line protrudes toward a working surface, and a ratio of an occupied area of the super-abrasive grains 22 in the super-abrasive grain layer 20 when viewed from the working surface side exceeds 80%.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to an electroplated tool. [Background technology]

[0002] Electroplated tools, which have superabrasive grains electrodeposited on a base metal, are used, for example, as grinding tools for grinding plastics, glass, ceramics, metals, and other materials, as electroplated dressers for dressing grinding wheels, and as CMP pad conditioners.

[0003] For example, Patent Document 1 discloses a method for manufacturing an electrodeposited tool such as a CMP conditioner, which includes the following steps: a masking step for forming a recess in a masked portion covering the surface of a base metal, whereby regularly arranged unmasked portions are provided; a recessing step for forming recesses in the surface of the base metal that appear in the unmasked portions provided by the masking step, with a depth of 3 to 80% of the average grain size of the abrasive grains; an abrasive grain placing step for placing blocky abrasive grains with their edges raised in the recesses provided by the recessing step; a plating temporary fixing step for temporarily fixing the abrasive grains placed in the abrasive grain placing step to the surface of the base metal by plating; a masking removal step for removing the masked portion masked in the masking step; and a plating fixing step for further fixing the abrasive grains temporarily fixed to the surface of the base metal in the plating temporary fixing step after the masking removal step by using a plating layer.

[0004] Patent document 2 also discloses a CMP pad conditioner having a grinding section formed by fixing abrasive grains to a ring-shaped raised area on the outer periphery of a base metal, characterized in that holes are provided in the base metal in the grinding section and abrasive grains are fixed to these holes by brazing. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2004-358640 [Patent Document 2] Patent No. 4624293 Summary of the Invention [Problem to be solved by the invention]

[0006] In Patent Document 1, a recess is created in advance in the base metal, and blocky abrasive grains are placed in that recess, resulting in a structure in which the edges of the abrasive grains face the working surface. Patent Document 2 also describes a structure in which a conical hole is created in advance in the base metal, and abrasive grains are brazed to the hole, resulting in a structure in which the edges of the abrasive grains face the working surface. It is also described that a CMP conditioner with such a structure improves the conditioning speed, etc. However, when machining difficult-to-cut materials with high loads, there is a problem of early wear of the abrasive grains and a short tool life.

[0007] Many of the materials used in the automotive and electrical machinery industries are difficult to cut, and in recent years, the importance of processing techniques for difficult-to-cut materials has increased significantly. Grinding tools, etc., are required to have both high cutting efficiency (sharpness) and long tool life (wear resistance) depending on their intended use, and so they are required to achieve both, even under more demanding cutting conditions than ever before. However, because cutting efficiency and tool life are contradictory, it has been difficult to simultaneously meet these requirements.

[0008] Under these circumstances, an object of the present invention is to provide an electroplated tool that can achieve both high machining efficiency and long tool life even under high-load machining conditions. [Means for solving the problem]

[0009] The electroplated tool of the present invention is an electroplated tool comprising a base metal having a surface to be adhered and a superabrasive layer formed on the surface to be adhered, wherein the superabrasive layer comprises plating and a plurality of superabrasive grains adhered to the surface to be adhered by the plating, the superabrasive grains having any one of a truncated octahedron, a hexagonal octahedron and an octahedron shape, 50% or more of the superabrasive grains are adhered with their corners or edges protruding toward the working surface, and the proportion of the area of ​​the superabrasive grains in the superabrasive layer when viewed from the working surface side is more than 80%.

[0010] In this way, by arranging the superabrasive grains at high density with most of the corners or ridges protruding, it is possible to achieve excellent machining efficiency and tool life even under high-load machining conditions.

[0011] In the electroplated tool of the present invention, it is desirable that the average particle size of the superabrasive grains be 35 to 1,000 μm, and that the proportion of the superabrasive grains having particle sizes within ±10% of the average particle size be 90% or more. By using such superabrasive grains, it is easy to achieve a structure in which superabrasive grains with protruding corners or ridges are arranged at a higher density.

[0012] The bonded surface of the electroplated tool of the present invention is preferably a flat or curved surface. By using a continuous flat or curved surface as the bonded surface and arranging superabrasive grains of a specific shape, it is possible to easily form a structure in which many of the superabrasive grains have their corners or edges protruding toward the working surface and are arranged at a high density.

[0013] The thickness of the plating is preferably 20 to 95% of the average particle size of the superabrasive grains. By adopting such a configuration, processing efficiency can be improved and the superabrasive grains can be held more stably. [Effects of the Invention]

[0014] According to the present invention, an electroplated tool is provided that can achieve both high machining efficiency and long tool life even under high-load machining conditions. [Brief explanation of the drawings]

[0015] [Figure 1] 1 is a perspective view of an electroplated tool according to an embodiment of the present invention. [Figure 2] 2 is an enlarged view of a part of a cross section perpendicular to the circumferential direction of the electrodeposited tool of FIG. 1. FIG. [Figure 3] 2 is an enlarged view of a portion of the superabrasive layer of the electrodeposited tool of FIG. 1 as viewed from the working surface side. [Figure 4] 2 is a schematic diagram illustrating a superabrasive grain in the superabrasive grain layer of the electrodeposited tool of FIG. 1, in which an edge portion, which is a corner or a ridge line, protrudes toward the working surface. [Figure 5] FIG. 10 is a perspective view of an electroplated tool according to another embodiment of the present invention. [Figure 6] FIG. 6 is a cross-sectional view illustrating the structure of the outer periphery of the electrodeposited tool of FIG. 5. [Figure 7] FIG. 6 is a cross-sectional view illustrating the structure of the outer periphery of an electrodeposited tool according to another embodiment of the present invention. [Figure 8] FIG. 6 is a cross-sectional view illustrating the structure of the outer periphery of an electrodeposited tool according to another embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0016] Electroplated tools 100 to 103 of the present invention will be described below with reference to Figures 1 to 8. Note that in this specification, when the expression "to" is used, it is used to express the numerical value or physical property value before and after it. Note that common parts in Figures 1 to 8 are designated by the same reference numerals, and their description will be omitted.

[0017] <Embodiment 1> FIG. 1 is a perspective view of an electroplated tool 100 according to an embodiment of the present invention, FIG. 2 is an enlarged view of a portion of a cross section perpendicular to the circumferential direction of the electroplated tool 100, and FIG. 3 is an enlarged view of a portion of the superabrasive layer of the electroplated tool 100 as viewed from the working surface 20S side.

[0018] The electroplated tool 100 shown in FIG. 1 includes a metal base 10 and a superabrasive layer 20 formed on a bonded surface 10S (see FIG. 2) of the metal base 10. The metal base 10 is cup-shaped and includes a disk portion 10B with a mounting hole H and a ring-shaped protrusion 10A provided on the outer periphery of the disk portion 10B. The upper surface of the ring-shaped protrusion 10A is the bonded surface 10S to which superabrasive grains 22 are bonded. As shown in FIG. 2, the bonded surface 10S is flat and has no recesses or steps for arranging the superabrasive grains 22, and its surface roughness is sufficiently smaller than the average particle size of the bonded superabrasive grains 22. Examples of materials for the metal base 10 include metals such as steel, aluminum, copper, cemented carbide, molybdenum, molybdenum alloys, cermets, and titanium, as well as ceramics and plastics.

[0019] (Super abrasive layer 20) As shown in Fig. 1, the superabrasive layer 20 is a ring-shaped layer formed on the bonded surface 10S of the base metal 10, and the electrodeposited tool 100 can grind a workpiece by bringing it into contact with the working surface 20S, which is the ring-shaped surface of the superabrasive layer 20. As shown in Figs. 2 and 3, the superabrasive layer 20 includes a plurality of superabrasive grains 22 and a plating 24, and the plurality of superabrasive grains 22 are arranged in a single layer and bonded by the plating 24. The superabrasive grains 22 are truncated octahedron-shaped diamond abrasive grains, and 50% or more of the superabrasive grains 22 are bonded with their edges E (corners c or ridges e) protruding, and the proportion of the area occupied by the superabrasive grains 22 in the superabrasive layer 20 when viewed from the working surface 20S side is greater than 80%.

[0020] 4 is a schematic diagram illustrating superabrasive grains 22A in superabrasive grain layer 20, with edge portions E protruding toward working surface 20S (the side opposite to the surface in contact with adhered surface 10S). As shown in FIG. 4, the truncated octahedron has a flat surface A consisting of six quadrangular faces qa and eight hexagonal faces ha, and an edge portion E consisting of 24 corners c and 36 ridges e. Superabrasive grains 22A are adhered such that flat surface A is not parallel to adhered surface 10S, and edge portions E, which are corners c or ridges e, protrude toward working surface 20S.

[0021] The superabrasive layer 20 includes superabrasive grains 22A with edge portions E protruding toward the working surface 20S. The superabrasive grains 22 may include superabrasive grains whose flat portions A are parallel to the working surface 20S (superabrasive grains whose edge portions E do not protrude), but the proportion of the superabrasive grains 22A with edge portions E protruding toward the working surface 20S is 50% or more. The proportion of these superabrasive grains 22A (superabrasive grains with edge portions protruding toward the working surface) can be determined from an image of the surface of the superabrasive layer 20 on the working surface 20S side photographed with a microscope. For example, a rectangular region in the superabrasive layer 20, whose length is eight times the average particle size of the superabrasive grains 22, is used as the measurement region. Images of the working surface 20S of the superabrasive layer 20 are taken at eight arbitrary points using a microscope such as a digital microscope. For each image, the number of all superabrasive grains 22 (superabrasive grains with protruding edges on the working surface and superabrasive grains without protruding edges) and the number of superabrasive grains 22A are determined, and the proportion of superabrasive grains 22A is calculated. The average of the proportions of superabrasive grains 22A calculated from each image can be used as the proportion of superabrasive grains 22A with protruding edges E on the working surface relative to the superabrasive grains 22. To further improve processing efficiency (sharpness), the proportion of superabrasive grains 22A relative to the superabrasive grains 22 is preferably 60% or more, more preferably 65% ​​or more, and even more preferably 70% or more. The upper limit is 100%, but may be 95% or less, 90% or less, depending on ease of manufacturing, etc.

[0022] As described above, the proportion of the area occupied by the superabrasive grains 22 in the superabrasive grain layer 20 when viewed from the working surface 20S side is greater than 80%. The more densely the superabrasive grains 22A are arranged, the more the machining efficiency (sharpness) can be maintained and the tool life can be improved, so the proportion of the area occupied by the superabrasive grains 22 is preferably 82% or more, more preferably 85% or more, and even more preferably 90% or more. The upper limit is 100% or less, but may be 98% or less, 95% or less, etc., taking into account ease of manufacture, etc.

[0023] The area occupied by the superabrasive grains 22 as viewed from the working surface 20S side can be calculated by binarizing a microscopic image of the surface of the superabrasive grain layer 20 on the working surface 20S side and analyzing the image using image analysis software. For example, a rectangular region in the superabrasive grain layer 20 whose length is eight times the average particle size of the superabrasive grains 22 is used as the measurement region, and eight arbitrary points on the working surface 20S of the superabrasive grain layer 20 are photographed using a microscope such as a digital microscope. Next, each of the photographed images is binarized, and the proportion of the area occupied by the superabrasive grains 22 (superabrasive grains with protruding edges on the working surface and superabrasive grains without protruding edges) is calculated from each image, and the average of these values ​​is calculated. This average can be used as the proportion of the area occupied by the superabrasive grains 22 as viewed from the working surface.

[0024] The superabrasive grains 22 are preferably selected from those with an average grain size of 35 μm to 1000 μm, depending on the material, size, and processing purpose of the workpiece. This average grain size is the average value of the grain sizes of 100 random superabrasive grains 22, and the grain size of each superabrasive grain 22 is the average value of the long and short sides of the circumscribing rectangle. For example, for any 100 random superabrasive grains 22, the long and short sides of the circumscribing rectangle of the superabrasive grains 22 are determined using an image measuring device, the grain size is calculated, and the average value is used as the average grain size. Furthermore, when calculating this average grain size, the percentage of superabrasive grains 22 having a grain size within ±10% of the average grain size described below can also be determined.

[0025] The proportion of superabrasive grains 22 having a particle size within ±10% of the average particle size is preferably 90% or more, more preferably 93% or more, and even more preferably 95% or more. Using superabrasive grains 22 with a uniform particle size is preferable because it facilitates the formation of a structure in which the edge portions E of the superabrasive grains 22 are arranged at a higher density with the edge portions E facing the working surface 20S.

[0026] (Plating 24) 2, in the superabrasive layer 20, the superabrasive grains 22 protrude from the plating 24. The thickness of the plating 24 (the length in the direction perpendicular to the adherend surface 10S) is preferably a thickness that allows the superabrasive grains 22 to protrude, and from the viewpoints of the retention force of the superabrasive grains 22 and the processing efficiency (sharpness), the thickness is preferably 20 to 95% of the average particle size of the superabrasive grains 22, and more preferably 30 to 90% of the average particle size of the superabrasive grains 22.

[0027] The plating 24 is preferably made of nickel or its alloys, examples of which include Ni, Ni-S alloys, Ni-P alloys, Ni-B alloys, and Ni-Co alloys.

[0028] To have the edge portions E of the superabrasive grains 22 protruding toward the working surface 20S, as in the electroplated tool 100, the superabrasive grains 22 are simply packed onto the base metal 10 with the edge portions E facing downward (toward the base metal 10). By densely packing the superabrasive grains 22 onto the base metal 10 while applying vibration so that the edge portions E face downward, the superabrasive grains 22 can be arranged with the edge portions E protruding even if the bonded surface 10S of the base metal 10 is a flat surface without any recesses or steps. In this way, it is not necessary to process the bonded surface 10S of the base metal 10, such as by providing recesses or steps, and the structure of the electroplated tool according to the present invention, in which the superabrasive grains 22 are densely packed with the edge portions E facing the working surface 20S, can be easily manufactured.

[0029] <Embodiment 2> FIG. 5 is a perspective view of an electrodeposited tool 101 according to an embodiment of the present invention, and FIG. 6 is a cross-sectional view (cross-section perpendicular to the circumferential direction) for explaining the structure of the electrodeposited tool 101 near its outer periphery.

[0030] 5 and 6 includes a base metal 12 and a superabrasive layer 30 on a surface 12S of the base metal 12 on which superabrasive grains 32 are fixed by plating 24. The base metal 12 has two opposing main surfaces (12A, 12B), a disk-shaped inner peripheral portion 12i with a mounting hole H, and an outer peripheral portion 12o provided on the outer periphery of the inner peripheral portion 12i. The outer peripheral portion 12o has a first inclined surface S1 inclined from the outer peripheral tip 12C toward one main surface 12A of the inner peripheral portion 12i, and a second inclined surface S2 inclined from the outer peripheral tip 12C toward the other main surface 12B of the inner peripheral portion 12i. One inclined surface S1 of the outer peripheral portion 12o of the base metal 12 is the bonded surface 12S, which is not parallel but is oblique to the reference surface (the main surface 12A of the inner peripheral portion 12i), but extends in a straight line from the reference surface to the outer peripheral tip 12C, which is flat (see Figure 6). The superabrasive layer 30 is a layer provided on this bonded surface 12S, and the superabrasive layer 30 also slopes continuously toward the outer periphery along the bonded surface 12S. The electroplated tool 101 can grind a workpiece by bringing it into contact with the working surface 30S.

[0031] As shown in FIG. 6, the superabrasive grains 32 are hexahedral diamond abrasive grains. The hexahedron has a flat portion A1 consisting of six square faces and eight triangular faces, and an edge portion E1 consisting of 12 corners and 24 ridges. The superabrasive layer 30 contains superabrasive grains 32 whose edge portions E1 protrude toward the working surface 30S. At least 50% of the superabrasive grains 32 are fixed with their edge portions E1 (corners or ridges) protruding toward the working surface 30S, and the proportion of the area occupied by the superabrasive grains 32 in the superabrasive layer 30 is greater than 80%.

[0032] The electroplated tool 101 is similar to the electroplated tool 100 except for the shape of the base metal and the superabrasive grains, and the preferred forms of the electroplated tool 101, such as the proportion of the superabrasive grains 32 with their edge portions E1 protruding toward the working surface 30S, the area occupied by the superabrasive grains 32, the particle size of the superabrasive grains 32, and the thickness of the plating 24, are also similar to those of the electroplated tool 100.

[0033] <Embodiment 3> Fig. 7 is a cross-sectional view illustrating the structure of the outer periphery of an electrodeposited tool 102 according to an embodiment of the present invention. The electrodeposited tool 102 shown in Fig. 7 includes a base metal 12 and a superabrasive layer 30. The superabrasive layer 30 is provided on each of the inclined surfaces S1 and S2 of the outer periphery 12o of the base metal 12, which serve as surfaces to be bonded 12S. The electrodeposited tool 102 is similar to the electrodeposited tool 101, except that the superabrasive layer 30 is provided not only on the inclined surface S1 but also on the inclined surface S2 of the outer periphery 12o of the base metal 12.

[0034] <Embodiment 4> FIG. 8 is a cross-sectional view illustrating the structure of an electrodeposited tool 103 near its outer periphery according to an embodiment of the present invention. The electrodeposited tool 103 shown in FIG. 8 includes a base metal 14 and a superabrasive layer 30 formed on a bonded surface 14S of the base metal 14. The base metal 14 has two opposing main surfaces (14A, 14B), a disk-shaped inner periphery 14i with a mounting hole H, and an outer periphery 14o formed on the outer periphery of the inner periphery 14i. The outer periphery 14o has a first inclined surface S1 that slopes from the outer periphery tip 14C toward one main surface 14A of the inner periphery 14i, and a bottom surface S3 that is flush with the other main surface 14B of the inner periphery 14i. The inclined surface S1 of the outer periphery 14o of the base metal 14 is the bonded surface 14S, and the superabrasive layer 30 is formed on this bonded surface 14S. The electrodeposited tool 103 is similar to the electrodeposited tool 101 except for the shape of the outer periphery of the base metal.

[0035] The bonded surfaces 12S of the electroplated tools 101 and 102 and the bonded surface 14S of the electroplated tool 103 may be flat surfaces (planes) or curved surfaces without recesses (depressions) or steps for arranging the superabrasive grains 32, and may extend in a curved manner from the reference surface to the outer periphery tip, with that portion being a curved surface (not shown).

[0036] The electrodeposited tools of the present invention have been described above using electrodeposited tools 100 to 103 as examples, but the electrodeposited tools of the present invention are not limited to these forms. The electrodeposited tools of the present invention may have a configuration in which a superabrasive layer is formed over the entire surface of one main surface of a disk-shaped base metal, or a configuration in which a superabrasive layer is formed on the outer periphery of a disk-shaped base metal. Furthermore, the superabrasives are not limited to truncated octahedrons or hexagonal octahedrons, but may also be octahedrons. The superabrasives of the electrodeposited tool 100 may be limited to hexagonal octahedrons or octahedrons, and the superabrasives of the electrodeposited tools 101 to 103 may be limited to truncated octahedrons or octahedrons.

[0037] <Uses of electroplated tools> The electrodeposited tool of the present invention can be used as a grinding wheel or a dresser for dressing a grinding wheel. In particular, the electrodeposited tool of the present invention is suitable for grinding workpieces subjected to high loads, such as grinding wheels such as electrodeposited wheels for grinding hard and brittle materials such as ceramics and semiconductor silicon wafers, and hard-to-cut materials such as titanium alloys and stainless steel, and as an electrodeposited dresser for dressing such grinding wheels. [Example]

[0038] The present invention will be described in more detail below with reference to examples, but the present invention is not limited to the following examples as long as the gist of the present invention is not changed.

[0039] Example 1 Shape: Cup wheel (Φ100mm) as shown in Figure 1 Super abrasive grain: Synthetic diamond (SD), truncated octahedron (blocky), average grain size 400 μm (grain size #40), minimum and maximum grain sizes within a distribution range of ±10% of the average grain size Percentage of super abrasive grains with edges facing the working surface: 70% Super abrasive grain area: 90% Plating: Ni Plating thickness: 220μm

[0040] (Comparative Example 1) Shape: same as Example 1 Super abrasive grains: Synthetic diamond (SD), sharp (each abrasive grain is not uniform in shape, but has a different shape. Also called irregular abrasive grains), average grain size 400 μm (grain size #40), minimum and maximum grain sizes are within the distribution range of the average grain size ±15%. Percentage of super abrasive grains with edges facing the working surface: 10% Super abrasive grain area: 70% Plating: Ni Plating thickness: 220μm

[0041] A grinding test (machine: surface grinder, wheel peripheral speed: 26 m / s, depth of cut: 0.01 mm / pass) was carried out using the electrodeposited tools of Example 1 and Comparative Example 1 and a Ti alloy as the workpiece (material to be cut). Note that Ti alloy is known as one of the difficult-to-cut materials.

[0042] When the weight of workpiece removed per unit time of Example 1 and Comparative Example 1 was calculated and compared, the relative value of Example 1 was 110 when Comparative Example 1 was set to 100. Therefore, the processing efficiency of Example 1 was improved by 10% compared to Comparative Example 1.

[0043] Furthermore, when the abrasive grain wear height per weight of workpiece removed was calculated and compared between Example 1 and Comparative Example 1, the relative value of Comparative Example 1 was 200 when Example 1 was set to 100. Therefore, the electroplated tool of Example 1 was able to remove twice the amount of workpiece before reaching the abrasive grain wear height that would result in the end of its life, and the tool life of Example 1 was improved by 100% compared to Comparative Example 1.

[0044] While the lower the abrasive grain density, the more likely it is that machining efficiency will improve, while the higher the abrasive grain density, the more likely it is that tool life will improve, and machining efficiency and tool life are contradictory performances. However, Example 1 not only had improved tool life but also machining efficiency compared to Comparative Example 1, and was excellent in both machining efficiency and tool life. [Industrial Applicability]

[0045] The electrodeposited tool of the present invention can be used in various fields where grinding is performed and is therefore industrially useful. [Explanation of symbols]

[0046] 10, 12, 14 base metal 10A protrusion 10B Disc Section 10S, 12S, 14S Fixed surface 12A, 12B, 14A, 14B main surface 12C, 14C outer circumference tip 12i, 14i inner circumference 12o, 14o outer circumference 20, 30 super abrasive layer 20S, 30S working surface 22, 22A, 32 super abrasive 24 Plating 100, 101, 102, 103 Electroplated tools ha, qa surface c Vertex e Ridgeline A, A1 flat section E, E1 Edge H Mounting hole S1, S2 slope S3 bottom

Claims

1. a base metal having a surface to be fastened; a superabrasive layer formed on the surface to be fixed, the superabrasive layer includes a plating and a plurality of superabrasive grains fixed on the fixing surface by the plating; the superabrasive grains are in the shape of a truncated octahedron, a hexahedron, or an octahedron; an electroplated tool in which 50% or more of the superabrasive grains are fixed with corners or ridges protruding toward the working surface, and the ratio of the area occupied by the superabrasive grains in the superabrasive grain layer when viewed from the working surface side is more than 80%.

2. The average particle size of the superabrasive grains is 35 to 1000 μm, 2. The electroplated tool according to claim 1, wherein the proportion of the superabrasive grains having a particle size within ±10% of the average particle size is 90% or more.

3. The electroplated tool according to claim 1 or 2, wherein the surface to be fastened is a flat surface or a curved surface.

4. 3. The electroplated tool according to claim 1, wherein the thickness of the plating is 20 to 95% of the average particle size of the superabrasive grains.

Images