Working fluid

Abstract

To provide a working fluid which can be used in a multi-wire saw device and is excellent in performance for preventing the deflection of a wire saw.SOLUTION: A working fluid comprising an active ingredient and water, wherein the active ingredient comprises the following component (A): ･Polyoxyalkylene amine having a base number of 5.0 to 110mgKOH / g and a nitrogen content of 0.10 to 3.0% by mass SELECTED DRAWING: None

Description

[Technical Field]

[0001] The present invention relates to machining fluids. [Background technology]

[0002] In the manufacture of semiconductor products, it is important to accurately cut silicon ingots, which are brittle materials, and wire sawing is generally used for cutting silicon ingots from the viewpoints of processing precision and productivity. Wire sawing is also used for processing materials such as ceramics, quartz, sapphire, and glass. Generally, machining methods using a wire saw include the free abrasive method, in which machining is performed while supplying free abrasive grains to the sliding area between the wire and the workpiece, and the fixed abrasive method, in which machining is performed using a wire with abrasive grains fixed to its surface in advance. In both of the above wire sawing methods, a working fluid (coolant) is used to improve the efficiency of cutting, suppress friction between the workpiece and the tool that processes it, reduce frictional heat generated by processing, extend the life of the tool, remove chips, etc. The working fluids used for the above purposes include oil-based working fluids whose main components are mineral oil, animal and vegetable oil, synthetic oil, etc., and water-based working fluids that are made water-soluble by blending surfactant compounds. In recent years, water-soluble machining fluids have come to be used from the viewpoints of safety during work and environmental issues.

[0003] For example, Patent Document 1 discloses a water-soluble cutting fluid for slicing silicon ingots, characterized by containing, as essential components, a polyoxyalkylene adduct having a number average molecular weight of 500 or less and a specific structure, and a monovalent or divalent aliphatic carboxylic acid or a salt thereof having 4 to 10 carbon atoms (including the carbon of the carbonyl group). Patent Document 2 discloses a water-soluble working fluid composition for a fixed abrasive wire saw used to cut rare earth magnets, characterized in that the composition contains specific amounts of glycols, carboxylic acids, compounds that dissolve in water and exhibit basicity, and water (however, the total of these components is 100 parts by weight). Patent Document 3 discloses a fluid for processing brittle materials, which contains at least one selected from the group consisting of alkynediols having an HLB value of 4 or more and 12 or less and alkylene oxide adducts of alkynediols having an HLB value of 4 or more and 12 or less, a nonionic surfactant which is an ethylene oxide adduct having an HLB value of 6 or more and the number of added moles of ethylene oxide in the molecular structure of 5 or more and which does not have a carbon-carbon triple bond, and a carboxylic acid, each in a specific content.

[0004] In both of the above wire sawing methods, a multi-wire saw machine is used to cut multiple wafers from an ingot at once. In the multi-wire saw machine, two or more guide rollers are formed with a plurality of grooves at regular intervals, and one wire is wound around each groove on the rollers, and the wires are held parallel to each other with a constant tension. During cutting, the guide rollers are rotated, and a machining fluid discharged from a nozzle or the like is applied to the wire while the wire travels in one or both directions. The ingot is pressed against the wire to which the machining fluid is applied to cut the ingot. The multi-wire saw device allows for efficient cutting by cutting out a large number of wafers at once. It also has the advantage of being able to easily accommodate larger diameter ingots, as the cutting allowance is narrow and material loss during cutting is relatively small. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2011-68884 [Patent Document 2] Japanese Patent Application Laid-Open No. 2003-82335 [Patent Document 3] Japanese Patent Application Publication No. 2018-154762 Summary of the Invention [Problem to be solved by the invention]

[0006] However, when using a multi-wire saw device to cut out wafers, depending on the working fluid, the sharpness of the wire saw may be insufficient, and the wire saw may not be able to keep up with the cutting when the ingot is pressed down, resulting in the wire saw bending. When this problem occurs, measures must be taken, such as extending the ingot cutting time, which results in reduced productivity.

[0007] Therefore, an object of the present invention is to provide a machining fluid that can be used in a multi-wire saw device and has excellent performance in preventing the wire saw from bending. [Means for solving the problem]

[0008] According to the present invention, the following [1] to

[16] are provided. [1] A processing fluid containing an active ingredient and water, The working fluid contains the following active ingredient (A): Component (A): A polyoxyalkyleneamine having a base number of 5.0 to 110 mg KOH / g and a nitrogen atom content of 0.10 to 3.0 mass %. [2] The processing fluid according to [1], wherein the content of the component (A) is 50 mass% or more based on the total amount of the active ingredients. [3] The processing fluid according to [1] or [2], wherein the component (A) is at least one selected from the group consisting of alkylene oxide adducts of monoamines and alkylene oxide adducts of polyamines. [4] The processing fluid according to [3], wherein the component (A) is an alkylene oxide adduct of a polyamine. [5] The processing fluid according to [4], wherein the alkylene oxide adduct of polyamine is represented by the following general formula (I) and has a mass average molecular weight (Mw) of 500 to 10,000: [ka] [In the general formula (I), A 1 ~A 4 each independently represents an ethylene group or a propylene group, A 1 ~A 4 When a plurality of groups are present, they may be the same or different. a, b, c, and d are the average values ​​of the number of alkylene oxide units, and each independently is a number of 1 or more. [6] The working fluid according to [1] or [2], wherein the component (A) is represented by the following general formula (II): [ka] [In the general formula (II), X represents an alkyl group having 1 to 4 carbon atoms or an aminoalkyl group having 1 to 4 carbon atoms. 5 and A 6 each independently represents an ethylene group or a propylene group, A 6 When a plurality of are present, they may be the same or different. e is the average number of alkylene oxide units and is a number of 1 or more. [7] The working fluid according to [1] or [2], wherein the component (A) has a repeating unit represented by the following general formula (III): [ka] [In the general formula (III), A 7 each independently represents an ethylene group or a propylene group, A 8 each independently represents an ethylene group, a propylene group, or a butylene group; A 7 When there are multiple A, they may be the same or different. 8When a plurality of groups are present, they may be the same or different. f is the average number of alkylene oxide units and is a number of 1 or more. [8] The working fluid according to any one of [1] to [7], wherein the active ingredient further contains the following ingredient (B): Component (B): Epichlorohydrin-modified polyoxyalkylene compound [9] The processing fluid according to [8], wherein the content of the component (B) is 0.1 to 10.0 mass % based on the total amount of the active ingredients.

[10] The working fluid according to any one of [1] to [9], wherein the active ingredient further contains the following ingredient (C): Component (C): Alkynediol alkylene oxide adduct

[11] The processing fluid according to

[10] , wherein the content of the component (C) is 0.1 to 10.0 mass % based on the total amount of the active ingredients.

[12] The machining fluid according to any one of [1] to

[11] , which is used when cutting a workpiece made of a brittle material using a multi-wire saw device.

[13] The machining fluid according to

[12] , wherein the wire constituting the multi-wire saw device is a fixed abrasive wire.

[14] The machining fluid according to

[12] or

[13] , wherein the brittle material is crystalline silicon, sapphire, silicon carbide, gallium nitride, neodymium magnet, quartz, or glass.

[15] The machining fluid according to any one of

[12] to

[14] , wherein the wires constituting the multi-wire saw device have a wire diameter of 120 μm or less and a wire spacing of 1,100 μm or less.

[16] A method for producing a processing fluid containing an active ingredient and water, comprising: mixing the active ingredient with the water; The working fluid wherein the active ingredient comprises the following component (A): Component (A): A polyoxyalkyleneamine having a base number of 5.0 to 110 mg KOH / g and a nitrogen atom content of 0.10 to 3.0 mass %. [Effects of the Invention]

[0009] According to the present invention, it is possible to provide a machining fluid that can be used in a multi-wire saw device and has excellent performance in preventing the wire saw from bending. DETAILED DESCRIPTION OF THE INVENTION

[0010] The upper and lower limits of the ranges described herein can be combined in any way. For example, if the ranges are "A to B" and "C to D," the ranges "A to D" and "C to B" are also included in the scope of the present invention. Furthermore, unless otherwise specified, the numerical range "lower limit to upper limit" described in this specification means that the range is equal to or greater than the lower limit and equal to or less than the upper limit. In this specification, the numerical values ​​in the examples are numerical values ​​that can be used as upper or lower limit values. Unless otherwise specified, in this specification, a "polyoxyalkyleneamine" refers to an amine compound having oxyalkylene units as repeating units, the molecular terminals of which may be hydroxyl groups or hydrocarbyloxy groups. The oxyalkylene units may be of one type or a combination of two or more types. The oxyalkylene unit preferably has 2 to 4 carbon atoms. The origin of the oxyalkylene unit is not particularly limited, and it may be derived from an alkylene oxide or a diol. Specific examples of alkylene oxides include ethylene oxide, propylene oxide (PO), oxetane, 1,2-butylene oxide, 2,3-butylene oxide, 1,3-butylene oxide, and tetrahydrofuran.

[0011] [Form of machining fluid] The machining fluid of this embodiment contains an active ingredient and water. The active ingredient contains the following ingredient (A): Component (A): A polyoxyalkyleneamine having a base number of 5.0 to 110 mg KOH / g and a nitrogen atom content of 0.10 to 3.0 mass %.

[0012] The present inventors have conducted extensive research to solve the above problems. As a result, the inventors discovered that a machining fluid containing the above components could solve the above problems, and after further investigations, they completed the present invention.

[0013] The active ingredients contained in the machining fluid of this embodiment will be described in detail below. <Component (A)> Component (A) is a polyoxyalkyleneamine having a base number of 5.0 to 110 mgKOH / g and a nitrogen atom content of 0.10 to 3.0% by mass, and is an amine compound containing oxyalkylene units. The molecular terminals of the polyoxyalkyleneamine may be hydroxyl groups or hydrocarbyloxy groups, but are preferably hydroxyl groups. The polyoxyalkyleneamine may contain one type of oxyalkylene unit or two or more types. When two or more types are combined, the addition of the multiple types of oxyalkylene units may be either random addition or block addition, or a mixture of random addition and block addition, but is preferably a block addition copolymer.

[0014] Specifically, component (A) is required to have a base number of 5.0 to 110 mgKOH / g as measured by the perchloric acid method in accordance with JIS K 2501:2003, and when the base number is within this range, the wire saw will have excellent anti-warping performance. The base number of component (A) is preferably 8.0 to 105 mgKOH / g, and more preferably 12.0 to 100 mgKOH / g.

[0015] Furthermore, the component (A) must have a nitrogen atom content of 0.10 to 3.0 mass %, and if the nitrogen atom content is within this range, the wire saw will have excellent anti-warping performance. The nitrogen atom content of component (A) is preferably 0.20 to 2.80 mass %, more preferably 0.30 to 2.70 mass %.

[0016] The component (A) is preferably at least one selected from alkylene oxide adducts of monoamines and alkylene oxide adducts of polyamines, and more preferably an alkylene oxide adduct of polyamines. The alkylene oxide adduct of the polyamine is preferably represented by the following general formula (I) and has a mass average molecular weight (Mw) of 500 to 10,000. [ka] [In the general formula (I), A 1 ~A 4 each independently represents an ethylene group or a propylene group, A 1 ~A 4 When a plurality of groups are present, they may be the same or different. a, b, c, and d are the average values ​​of the number of alkylene oxide units, and each is independently a number of 0 or more.

[0017] In the above general formula (I), a, b, c, and d are the average values ​​of the number of alkylene oxide units, and are each independently a number of 0 or more. In addition, from the viewpoint of solubility in the base oil and suppressing cloudiness of the working fluid to improve its appearance, a, b, c, and d are each independently preferably numbers from 1 to 11, more preferably numbers from 1 to 8, and even more preferably numbers from 1 to 5.

[0018] As the component (A), a compound represented by the following general formula (II) is also preferably used.

[0019] [ka] [In the general formula (II), X represents an alkyl group having 1 to 4 carbon atoms or an aminoalkyl group having 1 to 4 carbon atoms. 5 and A 6 each independently represents an ethylene group or a propylene group, A 6When a plurality of are present, they may be the same or different. e is the average number of alkylene oxide units and is a number of 1 or more.

[0020] In the above general formula (II), e is the average value of the number of alkylene oxide units and is a number of 1 or more. Furthermore, from the viewpoint of improving the lubrication between the workpiece and the abrasive grains and of suppressing cloudiness of the machining fluid to improve the appearance, e is preferably a number from 1 to 50, more preferably a number from 1 to 48, and even more preferably a number from 1 to 45. Furthermore, X in the above general formula (II) is preferably an aminoalkyl group having 1 to 4 carbon atoms.

[0021] Furthermore, as the component (A), those having a repeating unit represented by the following general formula (III) are also preferably used.

[0022] [ka] [In the general formula (III), A 7 each independently represents an ethylene group or a propylene group, A 8 each independently represents an ethylene group, a propylene group, or a butylene group; A 7 When there are multiple A, they may be the same or different. 8 When a plurality of groups are present, they may be the same or different. f is the average number of alkylene oxide units and is a number of 1 or more.

[0023] In the above general formula (III), f is the average value of the number of alkylene oxide units and is a number of 1 or more. Furthermore, from the viewpoint of improving the lubrication between the workpiece and the abrasive grains and suppressing cloudiness of the machining fluid to improve the appearance, f is preferably a number from 1 to 50, more preferably a number from 1 to 48, and even more preferably a number from 1 to 45.

[0024] From the viewpoint of lubricity, the mass average molecular weight of the component (A) is preferably 300 or more, more preferably 400 or more, even more preferably 500 or more, and particularly preferably 600 or more. Furthermore, from the viewpoint of reducing the stickiness of the processing fluid, the mass average molecular weight of component (A) is preferably 10,000 or less, more preferably 8,000 or less, even more preferably 6,000 or less, and particularly preferably 5,000 or less. The upper and lower limits of these numerical ranges can be combined in any desired manner. Specifically, the mass average molecular weight of component (A) is preferably 300 to 10,000, more preferably 400 to 8,000, even more preferably 500 to 6,000, and particularly preferably 600 to 5,000.

[0025] The suitable ranges of the mass average molecular weight of those represented by general formulas (I) and (II) and those having repeating units represented by general formula (III) are the same as those for component (A) above.

[0026] The content of component (A) is preferably 50% by mass or more, more preferably 60% by mass or more, even more preferably 70% by mass or more, and particularly preferably 80% by mass or more, based on the total amount of the active ingredients. The content of component (A) may be 100% by mass or less, and may be 99% by mass or less.

[0027] <Component (B) and Component (C)> From the viewpoint of improving cleanliness, the machining fluid of the present embodiment preferably further contains at least one selected from the group consisting of the following component (B) or the following component (C). Component (B): Epichlorohydrin-modified polyoxyalkylene compound Component C): Alkynediol alkylene oxide adduct

[0028] <Ingredient (B)> As component (B), a compound obtained by contacting an epichlorohydrin-unmodified polyoxyalkylene compound with epichlorohydrin to modify or polymerize it can be used, but it may also be a compound having an oxyalkylene unit derived from the polymerization site of epichlorohydrin, which is obtained by adding epichlorohydrin to an alcohol and polymerizing it, or a compound having an oxyalkylene unit as the copolymerization site of alkylene oxide and epichlorohydrin, which is obtained by polymerizing alkylene oxide and epichlorohydrin to an alcohol.

[0029] As mentioned above, component (B) is a modified product with epichlorohydrin, and therefore usually contains chlorine atoms. The content of chlorine atoms in component (B) is, for example, 10,000 ppm by mass or less, 8,000 ppm by mass or less, 5,000 ppm by mass or less, 3,000 ppm by mass or less, 2,000 ppm by mass or less, 1,000 ppm by mass or less, or 700 ppm by mass or less.

[0030] The content of component (B) is preferably 0.10 to 10.0 mass %, more preferably 0.20 to 9.0 mass %, and particularly preferably 0.50 to 8.0 mass %, based on the total amount of the active ingredients.

[0031] <Ingredient (C)> The working fluid of the present embodiment preferably further contains the following component (C). Component (C): Alkynediol alkylene oxide adduct

[0032] The component (C) is an alkylene oxide adduct of an alkynediol, and the method for producing it is not particularly limited. The alkynediol includes, for example, a compound represented by the following general formula (1).

[0033] [ka]

[0034] In general formula (1), R 1 ~R 4 each independently represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R 1 ~R 4 is preferably an alkyl group having 1 to 5 carbon atoms. R 1 ~R 4 Specific examples of the alkyl group having 1 to 6 carbon atoms that can be selected as aryl include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group, a 1-methylbutyl group, a 2-methylbutyl group, a 3-methylbutyl group, a 1,1-dimethylpropyl group, a 1,2-dimethylpropyl group, and a 2,2-dimethylpropyl group. Among these, R 1 and R 3 is preferably an isobutyl group or a 3-methylbutyl group. 2 and R 4 is preferably a methyl group. In addition, the compound represented by general formula (1) is preferably R 1 and R 3 are identical to each other or R 2 and R 4 are compounds having the same structure as each other, and more preferably R 1 and R 3 are identical to each other, and R 2 and R 4 are compounds having the same structure as each other.

[0035] Furthermore, component (C) is preferably an alkylene oxide adduct of a compound represented by general formula (1), in which AO is added to each hydroxyl group of the compound represented by general formula (1), more preferably an alkylene oxide adduct of a compound represented by general formula (1), in which EO and / or PO is added to each hydroxyl group of the compound represented by general formula (1), and even more preferably an ethylene oxide adduct of a compound represented by general formula (1), in which EO is added to each hydroxyl group of the compound represented by general formula (1). In addition, when a structure in which a structure derived from EO (for example, an ethyleneoxy group or a poly(oxyethylene) structure) and a structure derived from PO (for example, a propyleneoxy group or a poly(oxypropylene) structure) are bonded is contained, the respective structures may be bonded to each other in a random manner or in a block manner, and are preferably bonded in a block manner.

[0036] Specific examples of the alkynediol include 2,5,8,11-tetramethyl-6-dodecyne-5,8-diol, 5,8-dimethyl-6-dodecyne-5,8-diol, 2,4,7,9-tetramethyl-5-dodecyne-4,7-diol, 8-hexadecyne-7,10-diol, 7-tetradecyne-6,9-diol, 2,3,6,7-tetramethyl-4-octyne-3,6-diol, 3,6-diethyl-4-octyne-3,6-diol, 2,5-dimethyl-3-hexyne-2,5-diol, 2,4,7,9-tetramethyl-5-decyne-4,7-diol, and 3,6-dimethyl-4-octyne-3,6-diol.

[0037] Component (C) is preferably 2,5,8,11-tetramethyl-6-dodecyne-5,8-diol, 5,8-dimethyl-6-dodecyne-5,8-diol, 2,4,7,9-tetramethyl-5-dodecyne-4,7-diol, 8-hexadecyne-7,10-diol, 7-tetradecyne-6,9-diol, 2,3,6,7-tetramethyl-4-octyne-3,6-diol, 3,6-diethyl-4-octyne-3,6-diol, 2, alkylene oxide adducts of one or more alkynediols selected from the group consisting of 5-dimethyl-3-hexyne-2,5-diol, 2,4,7,9-tetramethyl-5-decyne-4,7-diol, and 3,6-dimethyl-4-octyne-3,6-diol; more preferably 2,5,8,11-tetramethyl-6-dodecyne-5,8-diol, 5,8-dimethyl-6-dodecyne-5,8-diol, 2,4,7,9-tetramethyl-5 2,4,7,9-tetramethyl-5-decyne-4,7-diol, 5-octyne-4,7-diol, 6-hexadecyne-7,10-diol, 7-tetradecyne-6,9-diol, 2,3,6,7-tetramethyl-4-octyne-3,6-diol, 3,6-diethyl-4-octyne-3,6-diol, 2,5-dimethyl-3-hexyne-2,5-diol, 2,4,7,9-tetramethyl-5-decyne-4,7-diol, and 3,6-dimethyl-4-octyne-3,6-diol. more preferably, one or more selected from the group consisting of an ethylene oxide adduct of 2,5,8,11-tetramethyl-6-dodecyne-5,8-diol and an ethylene oxide adduct of 2,4,7,9-tetramethyl-5-decyne-4,7-diol; and even more preferably, an ethylene oxide adduct of 2,5,8,11-tetramethyl-6-dodecyne-5,8-diol.

[0038] The component (C) may be used alone or in combination of two or more. Furthermore, the component (C) is preferably one or more selected from the group consisting of alkylene oxide adducts of alkynediols having an HLB value of 4-12.

[0039] The content of component (C) is preferably 0.05 to 3.0 mass %, more preferably 0.5 to 2.0 mass %, based on the total amount of the active ingredients.

[0040] <Other ingredients> The active ingredient may contain ingredients other than the ingredients (A), (B) and (C) (hereinafter also referred to as "other ingredients"), as long as the object of the present invention is not impaired. Other components include additives such as surfactants other than the compounds corresponding to component (A), component (B), or component (C), pH adjusters, water retention improvers, antifoaming agents, metal deactivators, disinfectants / preservatives, rust inhibitors, and antioxidants. The other components may be used alone or in combination of two or more.

[0041] Examples of surfactants other than the compounds corresponding to component (A), component (B), or component (C) include polyoxyalkylene compounds other than component (A), component (B), or component (C), anionic surfactants, cationic surfactants, nonionic surfactants other than polyoxyalkylene compounds, and amphoteric surfactants. The polyoxyalkylene compound other than component (A), component (B), or component (C) is a compound having an oxyalkylene unit as a repeating unit, and the molecular terminal may be a hydroxyl group or a hydrocarbyloxy group. Examples of anionic surfactants include alkylbenzene sulfonates, alpha olefin sulfonates, etc. Examples of cationic surfactants include quaternary ammonium salts such as alkyltrimethylammonium salts, dialkyldimethylammonium salts, and alkyldimethylbenzylammonium salts. Examples of nonionic surfactants other than polyoxyalkylene compounds include amides such as fatty acid alkanolamides. Examples of amphoteric surfactants include alkyl betaines as betaine surfactants.

[0042] The pH adjuster is mainly used to adjust the pH of the machining fluid. Examples of the pH adjuster include various acid components and base components, and the pH of the machining fluid can be adjusted appropriately by adjusting the content ratio of these components. The acid component and the base component may react with each other to form a salt. Therefore, when an acid component and a base component are used as pH adjusters, if a reaction product of the acid component and the base component is present in the machining fluid, the contents of the acid component and the base component that contributed to the reaction can be calculated from the contents of the reaction product of the acid component and the base component, as described above. In this case, the machining fluid can be considered to contain the acid component and the base component before the reaction, instead of the reaction product.

[0043] Examples of acid components used as pH adjusters include various fatty acids such as lauric acid, stearic acid, oleic acid, linoleic acid, linolenic acid, neodecanoic acid, isononanoic acid, capric acid, and isostearic acid; carboxylic acids such as acetic acid, malic acid, and citric acid; polymeric acids such as polyacrylic acid and salts thereof; and inorganic acids such as phosphoric acid. Among these, fatty acids are preferred, and fatty acids having 12 or less carbon atoms such as neodecanoic acid, isononanoic acid, capric acid, and dodecanedioic acid are more preferred, with one or more selected from the group consisting of neodecanoic acid, isononanoic acid, capric acid, and dodecanedioic acid being even more preferred.

[0044] Examples of base components used as pH adjusters include alkanolamines such as monoethanolamine, diethanolamine, triethanolamine, monoisopropanolamine, diisopropanolamine, triisopropanolamine, tri-n-propanolamine, tri-n-butanolamine, triisobutanolamine, tri-tert-butanolamine, N-methylethanolamine, N-ethylethanolamine, N-butylethanolamine, N-cyclohexylethanolamine, N-methyldiethanolamine, N-ethyldiethanolamine, N-cyclohexyldiethanolamine, N,N-dimethylethanolamine, and N,N-diethylethanolamine; alkylamines such as methylamine, dimethylamine, ethylamine, diethylamine, propylamine, and dipropylamine; and ammonia. Among these, tertiary amines are preferred, and at least one selected from the group consisting of triethanolamine, triisopropanolamine, N-methyldiethanolamine, and N-cyclohexyldiethanolamine is more preferred.

[0045] Examples of water retention enhancers include ethylene glycol, propylene glycol, 1,4-butanediol, hexamethylene glycol, neopentyl glycol, diethylene glycol, triethylene glycol, dipropylene glycol, tripropylene glycol, glycerin, ester derivatives thereof, ether derivatives thereof, polyethylene glycol, polypropylene glycol, and the like. Antifoaming agents include, for example, silicone oil, fluorosilicone oil, polyether polysiloxane, and fluoroalkyl ether. Metal deactivators include, for example, imidazolines, pyrimidine derivatives, thiadiazoles, and benzotriazoles. Examples of disinfectants and preservatives include parahydroxybenzoic acid esters (parabens), as well as benzoic acid, salicylic acid, sorbic acid, dehydroacetic acid, p-toluenesulfonic acid and their salts, and phenoxyethanol. Examples of the rust inhibitor include alkylbenzene sulfonate, dinonylnaphthalene sulfonate, alkenyl succinate ester, and polyhydric alcohol ester. Examples of antioxidants include phenolic antioxidants and amine antioxidants.

[0046] When the working fluid of the present embodiment contains other components, the total content of the other components may be 0.10% by mass or more, 0.20% by mass or more, or 0.30% by mass or more, based on the total amount of the active ingredients, or 30.00% by mass or less, 20.00% by mass or less, 10.00% by mass or less, 5.00% by mass or less, or 3.00% by mass or less.

[0047] <Water> The machining fluid of this embodiment contains water. The water is not particularly limited, and purified water such as distilled water or ion-exchanged water (deionized water); tap water; industrial water; etc. can be used, and purified water or ion-exchanged water (deionized water) is preferred, and ion-exchanged water (deionized water) is more preferred.

[0048] The amount of water contained is adjusted appropriately depending on the manner in which the machining fluid is used. For example, when the working fluid of this embodiment is used to process a workpiece (e.g., cutting a brittle material with a multi-wire saw), the water content in the working fluid (hereinafter also referred to as the "water content of the first embodiment") is, based on 100% by mass of the total working fluid, preferably 95.000% by mass or more, more preferably 97.500% by mass or more, even more preferably 99.500% by mass or more, and particularly preferably 99.600% by mass or more, from the viewpoints of improving the flame retardancy of the working fluid and enhancing safety, and reducing the viscosity of the working fluid and improving handleability. Furthermore, from the viewpoint of ensuring the amount of active ingredient in the working fluid, the water content is preferably 99.910% by mass or less, more preferably 99.900% by mass or less, even more preferably 99.890% by mass or less, even more preferably 99.880% by mass or less, and particularly preferably 99.870% by mass or less. The machining fluid of this embodiment may be concentrated by reducing the amount of water in the machining fluid from the viewpoint of transportation efficiency and storage efficiency. For example, the machining fluid may be a concentrated product obtained by reducing the amount of water in the machining fluid and concentrating it 20 to 2,000 times. Then, when used (when machining a workpiece), the machining fluid may be diluted 20 to 2,000 times with water.

[0049] (Content of component (A)) When the water content of the working fluid of this embodiment is the water content of the first aspect, the content of component (A) is preferably 0.0100% by mass or more, based on 100% by mass of the total amount of the working fluid. By having the content of component (A) 0.0100% by mass or more, the compositional balance of the working fluid can be improved, and the effects of the present invention can be more easily improved. Here, from the viewpoint of further improving the effects of the present invention, the content of component (A) is preferably 0.0150% by mass or more, more preferably 0.0200% by mass or more, and even more preferably 0.0250% by mass or more, based on 100% by mass of the total amount of the processing fluid. Furthermore, from the viewpoint of the solubility of component (A) in water, the content of component (A) is preferably 0.100 mass% or less, more preferably 0.0800 mass% or less, and even more preferably 0.0700 mass% or less, based on the total amount of the processing fluid.

[0050] [Method of manufacturing machining fluid] The manufacturing method of the working fluid of the present embodiment is not particularly limited. For example, the manufacturing method of the working fluid of the present embodiment is a manufacturing method of a working fluid containing an active ingredient and water, mixing the active ingredient with the water; The working fluid wherein the active ingredient comprises the following component (A): Component (A): A polyoxyalkyleneamine having a base number of 5.0 to 110 mg KOH / g and a nitrogen atom content of 0.10 to 3.0 mass %.

[0051] In the method for producing a working fluid of this embodiment, one or more components selected from component (B), component (C), and other components may be further mixed. In this case, the order in which component (A), component (B), component (C), and other component (A-2) are mixed is not particularly limited. For example, component (A), and one or more components selected from component (B), component (C), and other components may be mixed sequentially or simultaneously with water, or component (A) and one or more components selected from component (B), component (C), and other components may be mixed in advance, and the mixture may be mixed with water. Note that component (A), component (B), component (C), water, and other components are the same as those described above, and the preferred embodiments thereof are also the same, so detailed explanations thereof will be omitted. Furthermore, the preferred amounts of component (A), component (B), component (C), water, and other components and the preferred ratios of the amounts of each component are the same as the respective contents and content ratios in the working fluid described above, so detailed explanations thereof will be omitted.

[0052] [Uses of machining fluid] The machining fluid of this embodiment can suppress wire breakage even when the wires are thinned and the wire spacing is narrowed in a multi-wire saw device, and has appropriate lubricity and excellent cleanliness. Therefore, the machining fluid of this embodiment can be suitably used when cutting a workpiece made of a brittle material using a multi-wire saw device. Fixed abrasive wires can be suitably used as the wires that make up the multi-wire saw device. The machining fluid of this embodiment can be used not only for cutting using a multi-wire saw device, but also for cutting using a single-wire saw device, and the wire constituting the single-wire saw device may be a fixed abrasive wire.

[0053] Examples of brittle materials include crystalline silicon, sapphire, gallium nitride, silicon carbide, neodymium magnet, quartz crystal, and glass. The machining fluid of the present embodiment is particularly suitable for cutting crystalline silicon, sapphire, or silicon carbide.

[0054] [Processing methods for brittle materials] The machining fluid of this embodiment can prevent wire breakage even when the wires are thinned and the spacing between them is narrowed in a multi-wire saw device, and has appropriate lubricity and excellent cleanliness. Therefore, according to the working fluid of the present embodiment, a method for cutting a workpiece made of a brittle material with a multi-wire saw device using the working fluid is provided. As the wire constituting the multi-wire saw device, a fixed abrasive wire can be suitably used. The working fluid of this embodiment also provides a method for cutting a workpiece made of a brittle material with a single wire saw device using the working fluid.

[0055] <Multi-wire saw device> The multi-wire saw device mentioned in the application of the working fluid and the method for processing brittle materials of this embodiment will be described. A multi-wire saw device used in cutting processes, for example, has two or more guide rollers with multiple grooves carved at regular intervals, with one wire wound around each groove, and each wire held parallel with a constant tension. During cutting, the guide rollers are rotated, and working fluid ejected from a nozzle or the like is applied to the wire while the wire travels in one or both directions, and cutting is performed by pressing a silicon ingot against the wire to which the working fluid is applied. If necessary, processing may also be performed while the working fluid is applied to the workpiece itself, such as a silicon ingot. The machining fluid used in machining is stored in a tank or the like and transported from there to the machining chamber nozzle via piping or the like. The machining fluid used during cutting is collected in a used machining fluid receiving tank or the like located below the cutting device. In some cases, the fluid is circulated within the device and reused.

[0056] The spacing between the wires used in processing the brittle material is set appropriately depending on the thickness required for the wafers to be cut out, but is preferably 1,100 μm or less, for example. Also, it is preferably 100 μm or more. [Example]

[0057] The present invention will be specifically described with reference to the following examples, although the present invention is not limited to the following examples.

[0058] [Methods for measuring various physical properties] The properties of the raw materials used in each example and comparative example were measured according to the procedures shown below.

[0059] (1) Mass average molecular weight The mass average molecular weight (Mw) was measured by gel permeation chromatography (GPC). GPC was performed using two "TSKgel (registered trademark) SuperMultiporeHZ-M" columns manufactured by Tosoh Corporation, tetrahydrofuran as an eluent, and a refractive index detector as a detector. The mass average molecular weight (Mw) was determined using polystyrene as a standard sample.

[0060] (2) HLB value The HLB value of component (C) was calculated by the Griffin method.

[0061] [Examples 1 to 8, Comparative Examples 1 to 6] The components below were mixed to prepare machining fluids having the compositions shown in Table 1, and the following evaluations were carried out. The numerical units for the blending compositions in Table 1 are "mass %." The details of each component used in preparing the machining fluid having the composition shown in Table 1 are explained below.

[0062] <Component (A)> "Polyoxyalkyleneamine 1": base number 26.4 mg KOH / g, nitrogen atom content 0.66 mass%, mass average molecular weight (Mw) = 1,600, cloud point of 1 mass% aqueous solution = 18°C, represented by the general formula (I) "Polyoxyalkyleneamine 2": base number 17.9 mgKOH / g, nitrogen atom content 0.44 mass%, mass average molecular weight (Mw) = 2,700, cloud point of 1 mass% aqueous solution = 68°C, represented by the general formula (I) "Polyoxyalkyleneamine 3": base number 23.5 mgKOH / g, nitrogen atom content 0.60 mass%, mass average molecular weight (Mw) = 1,900, cloud point of 1 mass% aqueous solution = 30°C, represented by the general formula (I) "Polyoxyalkyleneamine 4": base number 96.0 mgKOH / g, nitrogen atom content 2.50 mass%, mass average molecular weight (Mw) = 600, represented by the general formula (II) above, where X is a methyl group "Polyoxyalkyleneamine 5": base number 57.6 mg KOH / g, nitrogen atom content 1.50 mass%, mass average molecular weight (Mw) = 1,000, represented by the general formula (II) above, where X is a methyl group "Polyoxyalkyleneamine 6": base number 54.3 mg KOH / g, nitrogen atom content 1.40 mass%, mass average molecular weight (Mw) = 2,000, represented by the general formula (II) above, where X is an aminopropyl group "Polyoxyalkyleneamine 7": base number 15.8 mg KOH / g, nitrogen atom content 0.40 mass%, mass average molecular weight (Mw) = 1,900, and having a repeating unit represented by the general formula (III)

[0063] <Component (A')> "EO-PO Block Polymer 1": Polyoxyethylene-polyoxypropylene block polymer, CAS number: 9003-11-6, base number less than 0.1 mg KOH / g, nitrogen atom content less than 5 ppm by mass, mass average molecular weight (Mw) = 4,300 EO-PO Block Polymer 2: Polyoxyethylene-polyoxypropylene block polymer, CAS number: 9003-11-6, base number less than 0.1 mg KOH / g, nitrogen atom content less than 5 ppm by mass, mass average molecular weight (Mw) = 2,200 "Polyoxyalkyleneamine 8": Polyetheramine, CAS number: 65605-36-9, base number 117 mg KOH / g, nitrogen atom content 3.10 mass%, mass average molecular weight (Mw) = 900 "Triisopropanolamine": CAS number: 122-20-3

[0064] <Ingredient (B)> "Epichlorohydrin modified substance" Epichlorohydrin modified EO adduct of alcohol with 9 to 11 carbon atoms, chlorine atom content: 565 ppm by mass

[0065] <Ingredient (C)> "Alkynediol EO adduct" EO adduct of 2,5,8,11-tetramethyl-6-dodecyne-5,8-diol (EO adduct of alkynediol, HLB=8)

[0066] <Water> Ion-exchanged water

[0067] [evaluation] The machining fluids of the Examples and Comparative Examples were diluted 200 times and the following evaluations were carried out on the diluted solutions.

[0068] <Wire saw wire deflection prevention performance> The cutting machine used was a Takatori Corporation "WSD-K2," the cutting wire was a fixed abrasive wire (φ0.10 mm) manufactured by Asahi Diamond Industrial Co., Ltd., and the diluted solutions of the processing fluids prepared in Examples 1 to 8 and Comparative Examples 1 to 6 were used to cut out silicon ingots under the following conditions. (Processing conditions) Maximum wire speed: 700 m / min Wire tension: 15N Cutting speed: 0.5mm / min

[0069] Here, when cutting a silicon ingot by lowering it from above the wire and pressing it against the wire, if the cutting speed cannot keep up with the lowering speed of the silicon ingot, the wire will follow the downward movement of the silicon ingot. Therefore, the difference between the initial position of the wire and the position of the wire during cutting of the silicon ingot was taken as the amount of wire deflection, and was evaluated according to the following evaluation criteria. (Evaluation criteria) A: Deflection amount 8.00 mm or less B: Deflection amount: Over 8.00 mm and up to 8.50 mm C: Deflection amount over 8.50 mm

[0070] The composition and evaluation results of each machining fluid are shown in Table 1. [Table 1]

[0071] From Table 1, we can see the following: It is clear that the diluted solutions of the machining fluids of Examples 1 to 8, which contain component (A) as the active ingredient, have a small amount of wire deflection, and are therefore able to efficiently cut the silicon ingot. In contrast, the diluted machining fluids of Comparative Examples 1 to 6 caused a large amount of wire deflection, and it was found that the efficiency of cutting the silicon ingot was poor.

Claims

1. A processing fluid containing an active ingredient and water, The working fluid contains the following active ingredient (A): Component (A): A polyoxyalkyleneamine having a base number of 5.0 to 110 mgKOH / g and a nitrogen atom content of 0.10 to 3.0 mass%.

2. The working fluid according to claim 1, wherein the content of the component (A) is 50 mass% or more based on the total amount of the active ingredients.

3. 3. The machining fluid according to claim 1, wherein the component (A) is at least one selected from the group consisting of alkylene oxide adducts of monoamines and alkylene oxide adducts of polyamines.

4. 4. The machining fluid according to claim 3, wherein the component (A) is an alkylene oxide adduct of a polyamine.

5. 5. The processing fluid according to claim 4, wherein the alkylene oxide adduct of polyamine is represented by the following general formula (I) and has a mass average molecular weight (Mw) of 500 to 10,000: 【Chemistry 1】 [In the general formula (I), A １ ~A ４ each independently represents an ethylene group or a propylene group; A １ ~A ４ When a plurality of groups are present, they may be the same or different. a, b, c, and d are the average values ​​of the numbers of alkylene oxide units, and each independently is a number of 1 or more.

6. 3. The working fluid according to claim 1, wherein the component (A) is represented by the following general formula (II): 【Chemistry 2】 [In the general formula (II), X is an alkyl group having 1 to 4 carbon atoms or an aminoalkyl group having 1 to 4 carbon atoms. ５ and A ６ each independently represents an ethylene group or a propylene group; A ６ When a plurality of groups are present, they may be the same or different. e is the average value of the number of alkylene oxide units and is a number of 1 or more.

7. 3. The working fluid according to claim 1, wherein the component (A) has a repeating unit represented by the following general formula (III): 【Transformation 3】 [In the general formula (III), A ７ each independently represents an ethylene group or a propylene group; A ８ each independently represents an ethylene group, a propylene group, or a butylene group; A ７ When a plurality of A are present, they may be the same or different, ８ When a plurality of groups are present, they may be the same or different. f is the average number of alkylene oxide units and is a number of 1 or more.

8. The working fluid according to any one of claims 1 to 7, wherein the active ingredient further contains the following ingredient (B): Component (B): epichlorohydrin-modified polyoxyalkylene compound

9. The working fluid according to claim 8, wherein the content of the component (B) is 0.10 to 10.0 mass% based on the total amount of the active ingredients.

10. The working fluid according to any one of claims 1 to 9, wherein the active ingredient further contains the following ingredient (C): Component (C): Alkynediol alkylene oxide adduct

11. The working fluid according to claim 10, wherein the content of the component (C) is 0.10 to 10.0 mass% based on the total amount of the active ingredients.

12. The working fluid according to any one of claims 1 to 11, which is used when cutting a workpiece made of a brittle material using a multi-wire saw device.

13. The machining fluid according to claim 12, wherein the wires constituting the multi-wire saw device are fixed abrasive wires.

14. The working fluid according to claim 12 or 13, wherein the brittle material is crystalline silicon, sapphire, silicon carbide, gallium nitride, neodymium magnet, quartz crystal, or glass.

15. The machining fluid according to any one of claims 12 to 14, wherein the wires constituting the multi-wire saw device have a wire diameter of 120 µm or less and a wire spacing of 1,100 µm or less.

16. A method for producing a processing fluid containing an active ingredient and water, comprising: mixing the active ingredient with the water; The working fluid, wherein the active ingredient comprises the following component (A): Component (A): A polyoxyalkyleneamine having a base number of 5.0 to 110 mgKOH / g and a nitrogen atom content of 0.10 to 3.0 mass%.

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