Pretreatment unit for electrolyte membrane and pretreatment method therefor

Abstract

To provide a pretreatment unit of an electrolyte membrane capable of uniformly removing impurities from the electrolyte membrane while suppressing the occurrence of wrinkles in the electrolyte membrane during cutting and boiling.SOLUTION: The pre-treatment unit 10 includes a cutter 30 in which a cut position 13B is set to cut a strip-shaped electrolytic membrane 31b into a predetermined length, a boiler 40 having a fixing jig 40A for detachably fixing a plurality of cut electrolytic membranes 13 at intervals, and a pair of clips 20, 20 attached to the strip-shaped electrolytic membrane 13 in the widthwise direction. The 40A of the fixing jig is provided with a locking part 44 for locking the pair of clips 20, 20 attached to the electrolytic membrane 13 to the 40A of the fixing jig so that the plurality of electrolytic membranes 13 are stretched at intervals.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a pretreatment unit for an electrolyte membrane and a pretreatment method thereof. [Background technology]

[0002] As an example of this type of technology, Patent Document 1 proposes a film formation apparatus for forming a metal film on a substrate. The film formation apparatus includes an electrolyte membrane. The film formation apparatus forms a metal film on a substrate by electroplating while the electrolyte membrane is in contact with the substrate. The electrolyte membrane used in the film formation apparatus is pretreated by cutting a strip of the electrolyte membrane to an appropriate length. Thereafter, as shown in Patent Document 2, for example, the electrolyte membrane is boiled in a treatment liquid to remove impurities adhering to the electrolyte membrane. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2014-122377 [Patent Document 2] Japanese Patent Publication No. 2020-109215 Summary of the Invention [Problem to be solved by the invention]

[0004] However, when the electrolyte membrane is cut, wrinkles may occur in the electrolyte membrane. Furthermore, when the electrolyte membrane is boiled as in the technique of Patent Document 2, the electrolyte membranes tend to stick together, which may cause wrinkles. When a wrinkled electrolyte membrane is boiled, it may be difficult to uniformly remove impurities from the electrolyte membrane.

[0005] The present invention has been made in consideration of these points, and its object is to provide an electrolyte membrane pretreatment unit and pretreatment method that can uniformly remove impurities from an electrolyte membrane while suppressing the occurrence of wrinkles in the electrolyte membrane during cutting and boiling. [Means for solving the problem]

[0006] In view of the above, an electrolyte membrane pretreatment unit according to the present invention is a pretreatment unit for an electrolyte membrane used in a membrane formation apparatus that forms a metal coating on a surface of a substrate by electroplating through an electrolyte membrane in contact with the substrate, the pretreatment unit including: a path-forming member that horizontally dispenses a strip-shaped electrolyte membrane from a rolled electrolyte membrane and forms a transport path along which a leading end portion of the electrolyte membrane hangs vertically, the path-forming member forming a transport path along which the leading end portion of the electrolyte membrane hangs vertically, a cutting device having a cutting position set in the horizontally extending portion for cutting the strip-shaped electrolyte membrane to a predetermined length, a boiling device having a fixing jig that detachably fixes the cut electrolyte membranes at intervals between each other and a boiling tank in which the electrolyte membranes are immersed together with the fixing jig and boiled, and a pair of clips that are attached across the width of the strip-shaped electrolyte membrane before cutting, at the leading end portion of the strip-shaped electrolyte membrane before cutting and at a portion adjacent to the cutting position, so as to be positioned at both longitudinal ends of the electrolyte membrane cut by the cutting device. The fixing jig is provided with locking portions for locking a pair of clips attached to the electrolyte membranes to the fixing jig so that the electrolyte membranes are stretched with a gap therebetween.

[0007] More preferably, the film forming apparatus includes an apparatus main body having a storage recess for storing a plating solution, and a frame attached to the apparatus main body together with the electrolyte membrane so as to cover the storage recess with the electrolyte membrane. The frame includes an inner frame over which the electrolyte membrane is stretched, and an outer frame that sandwiches the periphery of the electrolyte membrane together with the inner frame. The pre-processing unit further includes a membrane stretching device for stretching the boiled electrolyte membrane over the opening of the inner frame so as to cover the opening from above with the electrolyte membrane. The membrane stretching device has a mounting table on which the inner frame is placed. The horizontal length of the mounting table is shorter than the length of the electrolyte membrane so that tension acts on the electrolyte membrane due to the weight of the pair of clips attached to the both ends when the electrolyte membrane covers the opening of the inner frame from above.

[0008] More preferably, the mounting table is formed with an engaging protrusion that engages with the inner frame so as to fill the internal space of the inner frame from below.More preferably, the membrane stretching device further has a guide mechanism that guides the outer frame to the inner frame so as to fit the outer frame into the inner frame from above with the electrolyte membrane covering the opening of the inner frame from above.

[0009] In the electrolyte membrane pretreatment method using the above-described pretreatment unit, the clips are attached to the leading end portion of the strip-shaped electrolyte membrane and to a portion adjacent to the cutting position, and the strip-shaped electrolyte membrane is cut at the cutting position while tension is applied to the electrolyte membrane by the weight of the clips attached to the leading end portion. Next, the pair of clips attached to the electrolyte membrane are engaged with the engaging portions of the fixing jig to stretch the electrolyte membrane at intervals, and the electrolyte membranes together with the fixing jig are immersed in the boiling bath to boil the electrolyte membranes. Furthermore, by engaging the engaging protrusions with the inner frame so as to fill the internal space of the inner frame from below, and then covering the opening of the inner frame from above with the electrolyte membrane, tension is applied to the electrolyte membrane by the weight of the pair of clips attached to both ends, and by guiding the outer frame to the inner frame with the guide mechanism, the electrolyte membrane is sandwiched between the outer frame and the inner frame, and the electrolyte membrane is stretched over the opening of the frame body. [Effects of the Invention]

[0010] According to the present invention, impurities can be uniformly removed from an electrolyte membrane while preventing the electrolyte membrane from wrinkling during cutting and boiling. [Brief explanation of the drawings]

[0011] [Figure 1] 1A is a schematic diagram of a cutting device for a pretreatment unit of an electrolyte membrane according to an embodiment of the present invention, and FIG. 1B is a schematic diagram of a clip attached to the electrolyte membrane shown in FIG. [Figure 2] 1A is a schematic perspective view of a fixing jig for a boiling device of a pretreatment unit for an electrolyte membrane according to an embodiment of the present invention, and FIG. 1B is a schematic view of the boiling device. [Figure 3] 1A is a schematic diagram of a membrane stretching device of a pretreatment unit of an electrolyte membrane according to an embodiment of the present invention, and FIG. 1B is a schematic diagram showing a membrane stretching state by the membrane stretching device. [Figure 4]1A is a schematic diagram showing the state in which the electrolyte membrane is attached to the main body of the membrane forming apparatus after membrane application, and FIG. 1B is a schematic diagram for explaining the state of membrane formation by the membrane forming apparatus. [Figure 5] FIG. 1 is a flow diagram of a pretreatment method using a pretreatment unit for an electrolyte membrane according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0012] A pretreatment unit 10 for an electrolyte membrane 13 according to this embodiment will be described below with reference to the drawings. The pretreatment unit 10 according to this embodiment includes a cutting device 30 shown in FIG. 1(a), a boiling device 40 shown in FIG. 2(b), a membrane-attaching device 60 shown in FIG. 3(a), and a clip 20 shown in FIG. 1(b). The pretreatment method for the electrolyte membrane 13 is a processing method using the pretreatment unit 10, which includes a cutting step S1, a boiling step S2, and a membrane-attaching step S3, as shown in FIG. 5. As shown in FIGS. 4(a) and 4(b), which will be described later, the electrolyte membrane 13 is used in a membrane-forming apparatus 1. As shown in FIG. 4(a), the electrolyte membrane 13 is attached to the apparatus body 1A of the membrane-forming apparatus 1 while being stretched across a frame 17. As shown in FIG. 4(b), the membrane-forming apparatus 1 forms a metal coating F on the surface Ba of the substrate B via the electrolyte membrane 13 by electroplating, with the electrolyte membrane 13 in contact with the substrate B.

[0013] The electrolyte membrane 13 is an electrolyte membrane (ion exchange membrane) that allows metal ions to pass through. Examples of the electrolyte membrane 13 include, but are not limited to, fluorine-based resins such as DuPont's Nafion (registered trademark), hydrocarbon-based resins, and polyamic acid resins, as well as polymer resins with ion exchange properties, such as Selemion (CMV, CMD, and CMF series) manufactured by Asahi Glass Co., Ltd. The thickness of the electrolyte membrane 13 is preferably 5 μm to 200 μm, and more preferably 20 μm to 160 μm. As shown in FIG. 1(a), a cutting device 30 peels the backsheet BS from the strip-shaped electrolyte membrane 13B dispensed from the rolled electrolyte membrane 13A, and cuts the strip-shaped electrolyte membrane 13B into sheet-shaped electrolyte membrane 13 (see, for example, FIG. 2(a)).

[0014] The cutting device 30 includes a stand 31. The stand 31 is provided with a mandrel 32 for dispensing the rolled electrolyte membrane 13A and a mandrel 33 for winding up the backsheet BS. The cutting device 30 includes a path-forming member 34 that forms a conveying path along which the strip-shaped electrolyte membrane 13B is conveyed. The conveying path is a route along which the strip-shaped electrolyte membrane 13B passes from the roll-shaped electrolyte membrane 13A. The path-forming member 34 forms a conveying path for the strip-shaped electrolyte membrane 13B so that the leading end portion of the strip-shaped electrolyte membrane 13B hangs down vertically from the roll-shaped electrolyte membrane 13A. Specifically, the path-forming member 34 includes a peeling roller 34A disposed upstream and a changing roller 34B disposed downstream for changing the conveying direction. The peeling roller 34A and the changing roller 34B are disposed horizontally at a distance from each other.

[0015] As a result, a conveying path is formed between the peeling roller 34A and the changing roller 34B, along which the strip-shaped electrolyte membrane 13B is dispensed horizontally from the roll-shaped electrolyte membrane 13A. Furthermore, a conveying path is formed below the changing roller 34B, along which the leading end portion 13a of the strip-shaped electrolyte membrane 13B hangs down vertically. Meanwhile, a roller 35 is provided below the peeling roller 34A. By forming a conveying path for the back sheet BS downward, the back sheet BS can be peeled off from the strip-shaped electrolyte membrane 13B and taken up by the mandrel 33.

[0016] A positioning unit 31a for determining the leading end position of the dispensed strip-shaped electrolyte membrane 13B is provided on a stand 31 of the cutting device 30. Furthermore, a cutting position 31b for cutting the strip-shaped electrolyte membrane 13B to a predetermined length L1 (see FIG. 2(a)) is provided on the stand 31 in a portion of the strip-shaped electrolyte membrane 13B extending in the horizontal direction. At the cutting position 31b, the strip-shaped electrolyte membrane 13B is cut by a cutting blade 31b. Between the positioning unit 31a and the cutting position 31b, the electrolyte membrane 13B has the predetermined length L1. The positioning unit 31a and the cutting position 31b of the stand 31 may be set by a mark or the like, or may be set by a scale for measuring the predetermined length L1 of the strip-shaped electrolyte membrane 13B.

[0017] In this embodiment, as shown in FIG. 2(a), a pair of clips 20, 20 are arranged at both ends of the cut electrolyte membrane 13 in the direction of length L1. As shown in FIG. 1(a), before the cutting device 30 cuts the strip-shaped electrolyte membrane 13B, the clips 20 are attached to the leading end portion 13a of the strip-shaped electrolyte membrane 13B and to the downstream portion 13b adjacent to the cutting position 31b. Here, "downstream" refers to the downstream portion along the conveyance direction of the strip-shaped electrolyte membrane 13B. Furthermore, upstream of the cutting position 31b, the clip 20 is attached to the upstream portion 13c adjacent to the cutting position 31b. After the strip-shaped electrolyte membrane 13 is cut, the clip 20 attached to the upstream portion 13c becomes the clip 20 attached to the leading end portion of the strip-shaped electrolyte membrane 13B.

[0018] As shown in FIG. 1(b), each clip 20 is attached to the strip-shaped electrolyte membrane 13B across the width direction of the strip-shaped electrolyte membrane 13B. The clip 20 has a pair of arms 21, 22 connected via a hinge 25. One arm 22 is provided with a fitting claw 23 into which a tip end 24 of the other arm 21 is detachably fitted. This allows the pair of arms 21, 22 to clamp the strip-shaped electrolyte membrane 13B. The clip 20 is made of a resin material such as polyamide resin that can withstand the boiling temperature in the boiling step S2 described below.

[0019] In the cutting step S1 shown in Figure 5, a pair of clips 20, 20 are attached to the leading end portion 13a of the strip-shaped electrolyte membrane 13B and the downstream portion 13b adjacent to the cutting position 31b. As a result, tension acts on the strip-shaped electrolyte membrane 13B due to the weight of the clip 20 attached to the leading end portion 13a. With tension acting on the strip-shaped electrolyte membrane 13B, the strip-shaped electrolyte membrane 13B is cut at the cutting position 31b. At this time, tension acts uniformly on the strip-shaped electrolyte membrane 13B across the width, making the strip-shaped electrolyte membrane 13B easy to cut and less likely to wrinkle after cutting.

[0020] Before cutting, a clip 20 may also be attached to the upstream portion 13c adjacent to the cutting position 31b so as to sandwich the cutting position 31b. After cutting the strip-shaped electrolyte membrane 13, the clip 20 attached to the upstream portion 13c becomes the clip 20 to which the leading end portion of the strip-shaped electrolyte membrane 13B is attached. By repeating this process, it is possible to produce a plurality of electrolyte membranes 13 each having a clip 20 attached to both ends, as shown in FIG. 2(a).

[0021] As shown in FIGS. 2(a) and 2(b), the boiling device 40 includes a fixture 40A that detachably fixes multiple cut electrolyte membranes 13 at intervals, and a boiling tank 40B in which the electrolyte membranes 13 are immersed together with the fixture 40A and boiled. The fixture 40A includes a pair of opposing side walls 41, 41. The side walls 41, 41 are connected by a pair of upper connecting beams 42, 42 and a pair of lower connecting beams 43, 43. Furthermore, as shown in FIG. 2(a), the pair of side walls 41, 41 of the fixture 40A are provided with locking portions 44 that lock a pair of clips 20, 20 attached to the electrolyte membranes 13 to the fixture 40A so that the multiple electrolyte membranes 13 are stretched with a gap between them. In this embodiment, the locking portions 44 are guide grooves that guide the clips 20 to lock them. The guide grooves are grooves formed according to the shape of the clips 20, and the shape of the guide grooves is not particularly limited as long as the clips 20 can be fixed to the fixing jig 40A without floating up during boiling. The guide grooves are formed at intervals on the wall surface of the side wall 41. By guiding a pair of clips 20, 20 attached to the electrolyte membrane 13 from above into the engagement grooves, the electrolyte membrane 13 in a membrane-laden state can be attached to the fixing jig 40A. A heater 48 is provided in the boiling tank 40B.

[0022] In the boiling step S2 shown in FIG. 5 , a pair of clips 20, 20 attached to the electrolyte membrane 13 are fastened to opposing fastening portions 44 of a fixing jig 40A. This allows multiple electrolyte membranes 13, 13, ... to be stretched at intervals. The electrolyte membrane 13, together with the fixing jig 40A, is then immersed in a boiling bath 40B to boil the electrolyte membrane 13. Specifically, water (e.g., pure water) contained in the boiling bath 40B is heated by a heater 48 to boil the electrolyte membrane 13 immersed together with the fixing jig 40A. In this way, by utilizing the pair of clips 20, 20 attached when cutting the strip-shaped electrolyte membrane 13B, the multiple electrolyte membranes 13 do not adhere to each other, and the occurrence of wrinkles in each electrolyte membrane 13 can be reduced. By boiling the electrolyte membrane 13 in this state, impurities can be uniformly removed from the electrolyte membrane 13 and the electrolyte membrane 13 can be uniformly swelled.

[0023] The membrane-stacking device 60 is a device for stretching an electrolyte membrane 13 on a frame 17 of the membrane-forming apparatus 1 (described later). As shown in FIG. 4(a), the membrane-forming apparatus 1 includes an apparatus main body 1A having a storage recess 15a for accommodating a plating solution L, and a frame 17 attached to the apparatus main body 1A together with the electrolyte membrane 13 so as to cover the storage recess 15a with the electrolyte membrane 13. The frame 17 includes an inner frame 17A over which the electrolyte membrane 13 is stretched in the opening of the frame 17, and an outer frame 17B that sandwiches the periphery of the electrolyte membrane 13 with the inner frame 17A. Both the inner frame 17A and the outer frame 17B are rectangular frames. As shown in FIGS. 3(a) and 3(b), in the membrane-stacking state, the inner frame 17A and the outer frame 17B are fitted together, and the outer peripheral surface 17a of the inner frame 17A faces the inner peripheral surface 17b of the outer frame 17B across the periphery of the electrolyte membrane 13.

[0024] Specifically, the membrane-stacking device 60 stretches the boiled electrolyte membrane 13 over the opening of the inner frame 17A so that the boiled electrolyte membrane 13 covers the opening of the inner frame 17A from above. The membrane-stacking device 60 has a mounting base 61 on which the inner frame 17A is placed. The mounting base 61 is formed with engagement protrusions 62 that engage with the inner frame 17A so as to fill the internal space S of the inner frame 17A from below. By providing the engagement protrusions 62 inside the inner frame 17A, it is possible to prevent the electrolyte membrane 13 from entering the interior of the inner frame 17A during membrane stretching. The engagement protrusions 62 may be made of, for example, a porous material that is softer than the main body of the mounting base 61 and the inner frame 17A. Examples of materials for the engagement protrusions 62 include a foamed resin material. Furthermore, because the inner frame 17A is positioned relative to the mounting base 61, the outer frame 17B can be accurately fitted into the inner frame 17A by a guide mechanism 68 (described later).

[0025] The membrane stretching device 60 further includes a guide mechanism 68 that guides the outer frame 17B into the inner frame 17A so that the outer frame 17B is fitted into the inner frame 17A from above with the electrolyte membrane 13 covering the opening of the inner frame 17A from above. In this embodiment, the guide mechanism 68 is a linear guide, and a support member 67 is attached to the linear guide, and the support member 67 slidably supports a gripping member 66 that grips the outer frame 17B. The support member 67 is movable vertically by the linear guide. The pair of gripping members 66, 66 are slidable horizontally relative to the support member 67 so that the pair of gripping members 66, 66 face each other.

[0026] The horizontal length L2 of the mounting base 61 is shorter than the length L1 of the electrolyte membrane 13. As a result, with the electrolyte membrane 13 covering the opening of the inner frame 17A from above, the weight of the pair of clips 20, 20 attached to both ends can apply uniform tension to the electrolyte membrane 13. As a result, the occurrence of wrinkles in the electrolyte membrane 13 stretched over the inner frame 17A can be reduced. In addition, by rounding corners 64 of the mounting base 61 that come into contact with the electrolyte membrane 13, damage to the electrolyte membrane 13 can be reduced.

[0027] In this embodiment, in the membrane stretching step S3 shown in FIG. 5 , the engaging protrusions 62 of the mounting base 61 are engaged with the inner frame 17A so as to fill the internal space S of the inner frame 17A from below. When the electrolyte membrane 13 is then placed over the opening of the inner frame 17A, tension is applied to the electrolyte membrane 13 by the weight of a pair of clips 20, 20 attached to both ends of the electrolyte membrane 13. Next, the outer frame 17B is lowered by the guide mechanism 68, and the outer frame 17B is guided into the inner frame 17A. The peripheral edge of the electrolyte membrane 13 is sandwiched between the outer frame 17B and the inner frame 17A, and the electrolyte membrane 13 is stretched over the opening of the frame body 17. The support member 67 is then slid to remove the frame body 17, including the outer frame 17B, from the support member 67. Furthermore, the electrolyte membrane 13 is cut to separate the clips 20 from the frame body 17.

[0028] Next, in an attachment step S4 shown in Fig. 5, the electrolyte membrane 13 is attached to the apparatus body 1A of the film formation apparatus 1. As shown in Fig. 4(a), the film formation apparatus 1 includes the apparatus body 1A and the above-mentioned frame 17. The apparatus body 1A has the anode 11 and a container 15 that contains the anode 11 and the plating solution L. The film formation apparatus 1 further includes a power source 14 that applies a voltage between the anode 11 and the substrate B, a mounting table 19 on which the substrate B is placed, and a linear actuator 18 that raises and lowers the container 15.

[0029] The container 15 has a container recess 15a formed therein for accommodating the plating solution L. The anode 11 is disposed in the container recess 15a of the container 15. An opening 15d is formed in the container recess 15a on the side of the substrate B. The electrolyte membrane 13 can be attached to the device main body 1A by fitting the frame 17 covered with the electrolyte membrane 13 into the container 15. As a result, with the plating solution L accommodated, the plating solution L in the container recess 15a is sealed by the electrolyte membrane 13.

[0030] The container 15 has a supply port 15b for supplying the plating solution L to the container recess 15a and a discharge port 15c for discharging the plating solution L from the container recess 15a. The supply port 15b and the discharge port 15c are formed on either side of the container recess 15a. The film forming apparatus 1 further includes a tank 58, a supply pipe 51, a discharge pipe 52, and a circulation pump 59. The tank 58 contains the plating solution L. The supply pipe 51 connects the tank 58 to the container 15, and the supply pipe 51 is provided with the circulation pump 59. The discharge pipe 52 connects the tank 58 to the container 15, and the discharge pipe 52 is provided with a pressure adjustment valve 54. The pressure adjustment valve 54 adjusts the pressure (liquid pressure) of the plating solution L in the container recess 15a to a predetermined pressure.

[0031] In this embodiment, by driving the circulation pump 59, the plating solution L is sucked from the tank 58 into the supply pipe 51 and then pumped from the supply port 15b to the accommodating recess 15a. The plating solution L in the accommodating recess 15a is returned to the tank 58 through the discharge port 15c. This completes the circulation path 50.

[0032] Next, in the film-forming step S5 shown in FIG. 5, a metal coating F is formed on the substrate B. Here, the substrate B functions as a cathode. The material of the substrate B is not particularly limited as long as it functions as a cathode (i.e., a surface having electrical conductivity). The substrate B may be made of a metal material such as aluminum or copper. The plating solution L is a liquid containing the metal of the metal coating to be formed in an ionic state. Examples of such metals include copper, nickel, gold, silver, and iron. The plating solution L is a solution in which these metals are dissolved (ionized) with an acid such as nitric acid, phosphoric acid, succinic acid, sulfuric acid, or pyrophosphoric acid. Examples of the solvent for the solution include water and alcohol.

[0033] As shown in FIG. 4(b), the substrate B is placed in the recess 19a of the mounting table 19, and the linear actuator 18 brings the electrolyte membrane 13 attached to the housing 15 into contact with the substrate B. At the same time, the circulation pump 59 is driven, and the electrolyte membrane 13 presses the substrate B with the hydraulic pressure of the plating solution L in the housing recess 15a. As a result, the electrolyte membrane 13 conforms to the substrate B, and the pressure of the plating solution L in the housing 15 is set to a constant pressure by the pressure regulating valve 54. As a result, the electrolyte membrane 13 can press uniformly against the surface of the substrate B with the regulated hydraulic pressure of the plating solution L in the housing 15.

[0034] In this pressed state, a voltage is applied between the anode 11 and the substrate B by the power supply 14. Metal ions in the plating solution are caused to permeate the electrolyte membrane 13 by electroplating, and a metal coating F can be formed on the surface of the substrate B by electroplating. In this embodiment, during film formation, the uniformly swollen electrolyte membrane 13 is in contact with the substrate B, and the metal ions in the plating solution L can be caused to uniformly permeate the electrolyte membrane 13 by electroplating, so that a homogeneous metal coating F with a uniform thickness can be formed. [Explanation of symbols]

[0035] 1: film forming device, 1A: device body, 17: frame, 17A: inner frame, 17B: outer frame, 20: clip, 30: cutting device, 31b: cutting position, 34: path forming member, 40: boiling device, 40A: fixing jig, 40B: boiling tank, 60: film attachment device, 61: mounting table, 62: engaging convex portion, F: metal film, L: plating solution

Claims

1. The electrolyte membrane pretreatment unit is used in a membrane formation device that forms a metal coating on a surface of a substrate via an electrolyte membrane by electroplating while the electrolyte membrane is in contact with the substrate, The pre-treatment unit comprises: a cutting device having a path forming member that forms a conveying path for horizontally discharging a strip-shaped electrolyte membrane from a rolled electrolyte membrane and vertically hanging down a leading end portion of the electrolyte membrane, the cutting device having a cutting position set in the horizontally extending portion for cutting the strip-shaped electrolyte membrane to a predetermined length; a boiling device including a fixing jig for detachably fixing the cut electrolyte membranes at intervals between each other, and a boiling tank for immersing the electrolyte membranes together with the fixing jig and boiling the electrolyte membranes; a pair of clips attached across the width direction of the strip-shaped electrolyte membrane to a portion of the strip-shaped electrolyte membrane before cutting at the tip side and a portion adjacent to the cutting position so as to be positioned at both longitudinal end portions of the electrolyte membrane cut by the cutting device, The electrolyte membrane pretreatment unit is characterized in that the fixing jig is provided with a locking portion that locks a pair of clips attached to the electrolyte membrane to the fixing jig so that multiple electrolyte membranes are stretched at intervals.

2. the film forming apparatus includes an apparatus main body having a storage recess formed therein for storing a plating solution, and a frame attached to the apparatus main body together with the electrolyte membrane so as to cover the storage recess with the electrolyte membrane; the frame body includes an inner frame on which the electrolyte membrane is stretched, and an outer frame that sandwiches a periphery of the electrolyte membrane together with the inner frame, the pre-treatment unit further includes a membrane stretching device for stretching the boiled electrolyte membrane over the opening of the inner frame so as to cover the opening from above, The membrane stretching device has a mounting table on which the inner frame is mounted, 2. The electrolyte membrane pretreatment unit according to claim 1, wherein the horizontal length of the support table is shorter than the length of the electrolyte membrane so that tension acts on the electrolyte membrane due to the weight of the pair of clips attached to both ends when the electrolyte membrane covers the opening of the inner frame from above.

3. 3. The electrolyte membrane pretreatment unit according to claim 2, wherein the mounting base is formed with an engaging protrusion that engages with the inner frame so as to fill the internal space of the inner frame from below.

4. The electrolyte membrane pretreatment unit of claim 3, characterized in that the membrane attachment device further has a guide mechanism that guides the outer frame to the inner frame so that the outer frame is fitted into the inner frame from above while the electrolyte membrane covers the opening of the inner frame from above.

5. A method for pretreating the electrolyte membrane using the pretreatment unit according to claim 4, comprising: The pretreatment method includes: attaching the clip to the tip end portion of the strip-shaped electrolyte membrane and to a portion adjacent to the cutting position, and cutting the strip-shaped electrolyte membrane at the cutting position while tension is acting on the electrolyte membrane due to the weight of the clip attached to the tip end portion; a step of attaching the pair of clips attached to the electrolyte membrane to the engaging portion of the fixing jig to stretch the electrolyte membrane at intervals, and immersing the electrolyte membrane together with the fixing jig in the boiling tank to boil the electrolyte membrane; a step of covering the opening of the inner frame from above with the electrolyte membrane while engaging the engaging protrusions with the inner frame so as to fill the internal space of the inner frame from below, thereby applying tension to the electrolyte membrane by the weight of the pair of clips attached to both ends, and guiding the outer frame to the inner frame with the guide mechanism, thereby sandwiching the electrolyte membrane between the outer frame and the inner frame and stretching the electrolyte membrane over the opening of the frame body; A method for pretreating an electrolyte membrane, comprising at least the steps of:

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