Electromagnetic wave irradiation device and electromagnetic wave irradiation method

Abstract

To provide an electromagnetic wave irradiation device and an electromagnetic wave irradiation method capable of irradiating an object to be irradiated with an electromagnetic wave by a new method.SOLUTION: The electromagnetic wave irradiation device EA includes an irradiation means 10 having a high-pressure mercury lamp 11 for irradiating an adhesive sheet AS as a body to be irradiated with ultraviolet rays as electromagnetic waves, a housing means 20 for housing the irradiation means 10, and an exhaust means 30 for exhausting gas in the housing means 20, and the exhaust means 30 includes a damper 33 for opening and closing an exhaust duct 31, and a control means 34 such as a personal computer or a sequencer electrically connected to a rotary motor 32. To relax thermal influence at the time of emitting ultraviolet rays.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an electromagnetic wave irradiation device and an electromagnetic wave irradiation method. [Background technology]

[0002] Electromagnetic wave irradiation devices that irradiate an object to be irradiated with electromagnetic waves are known (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 9-162141 Summary of the Invention [Problem to be solved by the invention]

[0004] The irradiation device (electromagnetic wave irradiation device) described in Patent Document 1 discloses a method of cooling the inside of a lamp case 3 (storage means) that houses a lamp 5 (irradiation means) and irradiating light (electromagnetic waves) onto a workpiece W (irradiated object), but in recent years there has been a demand for a new method of irradiating electromagnetic waves onto an irradiated object.

[0005] An object of the present invention is to provide an electromagnetic wave irradiation device and an electromagnetic wave irradiation method that can irradiate an object to be irradiated with electromagnetic waves by a new method. [Means for solving the problem]

[0006] The present invention employs the configurations described in the claims. [Effects of the Invention]

[0007] According to the present invention, the amount of gas discharged from the container is adjusted to reduce the temperature difference between the upper and lower parts of the container, so that an electromagnetic wave can be irradiated onto an irradiated object by a new method. [Brief explanation of the drawings]

[0008] [Figure 1] 1 is an explanatory diagram of an electromagnetic wave irradiation device according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In this embodiment, the X-axis, Y-axis, and Z-axis are orthogonal to each other, and the X-axis and Y-axis are axes within a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. Furthermore, in this embodiment, when viewed from the front direction of Fig. 1 parallel to the Y-axis, "up" is the direction of the arrow on the Z-axis, "down" is the opposite direction, "left" is the direction of the arrow on the X-axis, "right" is the opposite direction, "front" is the direction toward the front in Fig. 1 parallel to the Y-axis, and "rear" is the opposite direction.

[0010] The electromagnetic wave irradiation device EA comprises irradiation means 10 which performs an irradiation step of irradiating an adhesive sheet AS as an irradiated object with ultraviolet rays as electromagnetic waves, storage means 20 which stores the irradiation means 10, exhaust means 30 which performs an exhaust step of exhausting gas from the storage means 20, and temperature detection means 40 which detects the temperature inside the storage means 20. The adhesive sheet AS in this embodiment has the property that its adhesive strength is reduced by ultraviolet rays, and is attached to a ring frame RF as a frame member and an adherend WK placed in the opening of the ring frame RF, integrating these to form an integrated object UP.

[0011] The irradiation means 10 includes a high-pressure mercury lamp 11 as an electromagnetic wave emitting means that emits ultraviolet rays, focusing means 12 such as a reflector or lens that focuses the ultraviolet rays emitted by the high-pressure mercury lamp 11, a linear motor 13 as a driving device, and a table 14 as a supporting means that is supported by a slider 13A of the linear motor 13 and has a through-hole 14C formed in a supporting surface 14A that is formed by the bottom surface of a recess 14B. The electromagnetic wave emitting means is configured to generate heat when it emits ultraviolet rays.

[0012] The storage means 20 comprises a box-shaped case 21 with an upper surface 21A located above the high-pressure mercury lamp 11, and a transparent means 22 provided on the upper surface 21A, such as a transparent member made of glass or resin that transmits ultraviolet light emitted by the high-pressure mercury lamp 11, or an openable / closable shutter.

[0013] The exhaust means 30 comprises an exhaust duct 31 that communicates with the inside of the storage means 20 at the underside of the storage means 20, a rotary motor 32 as a driving device supported by the exhaust duct 31, a damper 33 that is supported by the output shaft 32A of the rotary motor 32 and opens and closes the inside of the exhaust duct 31, and a control means 34 such as a personal computer or sequencer electrically connected to the rotary motor 32, and by adjusting the amount of gas exhausted from the storage means 20 based on the detection results of the temperature detection means 40, the amount of gas exhausted from the storage means 20 is adjusted to reduce the temperature difference between the upper and lower parts of the storage means 20.

[0014] The temperature detection means 40 includes a detection device 41 such as a temperature sensor or an infrared camera supported by the case 21 .

[0015] The operation of the electromagnetic wave irradiation device EA will now be described. First, a user of the electromagnetic wave irradiation device EA (hereinafter simply referred to as "user") inputs a signal to start emitting electromagnetic waves via an operation means (not shown), such as an operation panel or a personal computer, to the electromagnetic wave irradiation device EA, whose components are arranged in the initial positions shown by the solid lines in Fig. 1. Then, the irradiation means 10 drives the high-pressure mercury lamp 11, causing it to emit light. Next, the exhaust means 30 drives the rotary motor 32 via the control means 34, which opens the damper 33 to a predetermined first opening, as shown by the two-dot chain line in Fig. 1. This causes the heat emitted from the high-pressure mercury lamp 11 to flow downward and be discharged from the exhaust duct 31, thereby reducing the temperature difference between the upper and lower parts of the storage means 20. Thereafter, when the detector 41 detects that the temperature inside the storage means 20 has reached a predetermined upper limit temperature, the exhaust means 30 drives the rotary motor 32 via the control means 34, and opens the damper 33 to a second opening larger than the first opening, as shown by the two-dot chain line in FIG. 1 , thereby increasing the exhaust volume of the exhaust means 30 compared to when the high-pressure mercury lamp 11 started emitting light, thereby suppressing the rise in temperature inside the storage means 20, and adjusting the opening of the damper 33 to adjust the exhaust volume so that the temperature does not fall below a predetermined lower limit temperature. This further reduces the temperature difference between the upper and lower parts inside the storage means 20, and stabilizes the temperature inside the storage means 20 between the upper and lower limits. Next, when the detector 41 detects that the temperature inside the storage means 20 has reached a predetermined temperature, the temperature detector 40 outputs a predetermined signal to an alarm means (not shown), such as a speaker or a display, and the alarm means emits an alarm signal, such as sound or light, to notify the user that preparation is complete.

[0016] The user then inputs a signal to start automatic operation via an operating means (not shown). Next, when the user or a conveying means (not shown), such as an articulated robot or a belt conveyor, places the integrated object UP at a predetermined position on the support surface 14A, the irradiation means 10 drives the high-pressure mercury lamp 11 and the linear motor 13, reciprocating the table 14 left and right as shown by the two-dot chain line in FIG. 1 , and irradiates the adhesive sheet AS with ultraviolet light. After that, when the table 14 returns to its initial position, the irradiation means 10 stops driving the high-pressure mercury lamp 11 and the linear motor 13. Next, the user or a conveying means (not shown) conveys the integrated object UP to the next process, and the same operations as described above are repeated.

[0017] According to the embodiment described above, the amount of gas exhausted from the storage means 20 is adjusted to reduce the temperature difference between the upper and lower parts of the storage means 20, so that ultraviolet rays can be irradiated onto the adhesive sheet AS in a new manner.

[0018] In addition, the exhaust means 30 adjusts the amount of exhaust to reduce the temperature difference between the upper and lower parts in the storage means 20, thereby suppressing the heat accumulated in the storage means 20 from being transferred to the adhesive sheet AS during irradiation, and preventing stress from being applied to the adhesive sheet AS.

[0019] As described above, the best configurations, methods, and the like for implementing the present invention have been disclosed in the above description, but the present invention is not limited thereto. That is, although the present invention has been particularly illustrated and described mainly with reference to specific embodiments, those skilled in the art can make various modifications to the above-described embodiments in terms of shape, material, quantity, and other detailed configurations without departing from the scope of the technical idea and purpose of the present invention. Furthermore, the above-disclosed descriptions limiting the shape, material, and the like are provided as examples to facilitate understanding of the present invention and are not intended to limit the present invention. Therefore, descriptions using names of components that are free from some or all of the limitations on shape, material, and the like are included in the present invention. Furthermore, the means and steps of the present invention are not limited in any way as long as they can perform the operations, functions, or steps described for those means and steps, and are in no way limited to the components and steps of a single embodiment shown in the above embodiment. For example, the irradiation means may be any means that irradiates an irradiated object with electromagnetic waves, and is not limited in any way as long as it is within the technical scope in light of the common general technical knowledge at the time of filing (the same applies to other means and steps).

[0020] The irradiation means 10 may employ, as an electromagnetic wave emitting means, for example, an LED (Light Emitting Diode) lamp, a high-pressure mercury lamp, a low-pressure mercury lamp, a metal halide lamp, a xenon lamp, a halogen lamp, etc., or an appropriate combination thereof, or may irradiate electromagnetic waves whose main electromagnetic waves include visible light, sound waves, microwaves, X-rays, gamma rays, infrared rays, etc. Any electromagnetic waves may be irradiated as long as they are capable of reducing the adhesive strength of the adhesive sheet AS depending on the characteristics, properties, properties, material, composition, etc. of the adhesive sheet AS. The irradiation means 10 may, for example, be equipped with a linear motor as a driving device that supports the storage means 20 with a slider, and may move the storage means 20 without moving the table 14 or while moving it, thereby irradiating the adhesive sheet AS with ultraviolet light. The irradiation means 10 may include a cover member that covers the recess 14B of the table 14, and a gas supply means such as a pressure pump or turbine that supplies a gas such as nitrogen gas or argon gas, and may fill the gas in the recess 14B.

[0021] The container means 20 may be, for example, a cube, a rectangular parallelepiped, a cylinder, a polygonal prism such as a triangular prism or a quadrangular prism, or any other shape.

[0022] The exhaust means 30 may be provided with a timing means such as a timer that measures the time elapsed since the high-pressure mercury lamp 11 began to emit light, instead of or in addition to the detection device 41, and may open the damper 33 to the first or second opening degree or adjust the opening degree of the damper 33 based on the time elapsed since the high-pressure mercury lamp 11 began to emit light. Alternatively, when the timing means detects that a predetermined time has elapsed since the high-pressure mercury lamp 11 began to emit light, the exhaust means 30 may notify the user via an alarm means (not shown) that preparations are complete. As shown by the two-dot chain line in FIG. 1, the exhaust means 30 may be equipped with cooling means 35 such as a Peltier element or the cooling side of a heat pipe that cools the inside of the storage means 20 to reduce the temperature difference, or may be equipped with heating means 36 such as a coil heater or the heating side of a heat pipe that heats the inside of the storage means 20 to reduce the temperature difference, or may be equipped with a blower that circulates heat within the storage means 20 to reduce the temperature difference.

[0023] The one-piece UP may be free of either the ring frame RF or the adherend WK. The frame member may be a ring frame, but may also be non-annular (not connected at the outer periphery), circular, elliptical, polygonal, or other shape.

[0024] The material, type, shape, etc., of the irradiated object and adherend WK in the present invention are not particularly limited. For example, the irradiated object and adherend WK may be circular, oval, polygonal (e.g., triangular, rectangular), or other shapes. The adhesive sheet AS may be pressure-sensitive, heat-sensitive, or other adhesive. If a heat-sensitive adhesive sheet AS is used, the adhesive sheet AS may be adhered by an appropriate method, such as providing a heating means such as a suitable coil heater or the heated side of a heat pipe. Furthermore, such adhesive sheets AS may be of any type, such as a single-layer adhesive layer, a two-layer structure in which a substrate and an adhesive layer are laminated, a three-layer structure in which one or more intermediate layers are laminated between the substrate and the adhesive layer, a three-layer structure in which one or more cover layers are laminated on the top surface of the substrate, a structure in which the substrate, intermediate layer, or cover layer are peelably provided, a double-sided adhesive sheet consisting of only an adhesive layer, or a double-sided adhesive sheet in which adhesive layers are laminated on both outermost surfaces of one or more intermediate layers. Furthermore, the adherend WK may be, for example, a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, a ceramic plate, a wooden board, or a resin, or may be a composite formed from two or more of these, and any type of member or article may be targeted.The adhesive sheet AS may be, for example, any sheet, film, tape, etc., such as an information label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, or a recording layer-forming resin sheet.

[0025] The driving equipment in the above embodiments may be electric equipment such as rotary motors, linear motors, single-axis robots, so-called articulated robots with joints on two or three or more axes, actuators such as air cylinders, hydraulic cylinders, rodless cylinders and rotary cylinders, which may be used alone, or may be a direct or indirect combination of such electric equipment and actuators, or may be electric equipment, actuators, etc. that are capable of torque control, speed control, etc. for the output parts of such electric equipment, actuators, etc., or may not be capable of torque control, speed control, etc.

[0026] In the above-described embodiments, there is a certain object (hereinafter referred to as "object A") and an object (hereinafter referred to as "object B") that moves relative to object A. In other words, object A and object B that move relatively may be such that object B moves relative to object A, which is stationary, or object A may move relative to object B, which is stationary, or both object A and object B may move. As long as the result achieved by the movement is the same, either object A or object B may move. When a supporting (holding) means or a supporting (holding) member that supports (holds) a supported member (held member) is used, a configuration may be adopted in which the supported member is supported (held) by a gripping means such as a mechanical chuck or a chuck cylinder, Coulomb force, an adhesive (adhesive sheet, adhesive tape), a pressure sensitive adhesive (adhesive sheet, adhesive tape), a magnetic force, Bernoulli suction, suction, a driving device, or the like. [Explanation of symbols]

[0027] EA…Electromagnetic wave irradiation device 10...Irradiation means 20...Containment means 30...Exhaust means 40...Temperature detection means AS…Adhesive sheet (irradiated object)

Claims

1. an irradiation means for irradiating an electromagnetic wave onto an irradiated object; a housing means for housing the irradiation means; an exhaust means for exhausting gas from the storage means, The electromagnetic wave irradiation device is characterized in that the exhaust means adjusts the amount of gas exhausted from the storage means to reduce the temperature difference between the upper and lower parts of the storage means.

2. temperature detecting means for detecting the temperature inside the container means; 2. The electromagnetic wave irradiation device according to claim 1, wherein the exhaust means adjusts the amount of gas exhausted from the container means based on the detection result of the temperature detection means.

3. an irradiation step of irradiating an object with electromagnetic waves by an irradiation means; an exhaust step of exhausting gas from a housing means that houses the irradiation means; The electromagnetic wave irradiation method is characterized in that in the exhaust step, the amount of gas exhausted from the container means is adjusted to reduce the temperature difference between the upper and lower parts of the container means.

Images