X-ray inspection apparatus

Abstract

To provide an X-ray inspection device capable of performing inspection regardless of the conveying speed of an article.SOLUTION: The X-ray inspection apparatus 1 includes a conveyance unit 5 that conveys an article G, an X-ray irradiation unit 6 that irradiates the article G conveyed by the conveyance unit 5 with X-rays, a sensor unit 7 in which a plurality of detection elements 10 that detect X-rays are arranged in an intersection direction that horizontally intersects a conveyance direction in the conveyance unit 5, an image generation unit 22 that generates an image based on a detection result output from the sensor unit 7, and an inspection unit 23 that inspects quality of the article G based on the image. The sensor section 7 outputs an integrated value of outputs from the plurality of first detection elements 11 in the first row C1 and an integrated value of outputs from the plurality of second detection elements 12 in the second row C2 when the conveyance speed of the conveyance section 5 is lower than a predetermined speed, and outputs an integrated value of outputs from the plurality of first detection elements 11 in the first row C1 and outputs from the plurality of second detection elements 12 in the second row C2 when the conveyance speed of the conveyance section 5 is equal to or higher than the predetermined speed.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an X-ray inspection apparatus. [Background technology]

[0002] Patent document 1 discloses an X-ray inspection device comprising an electromagnetic wave irradiation means for irradiating an object to be inspected with a predetermined electromagnetic wave, a transport means for transporting the object to be inspected placed on a transport surface in the Y-axis direction, and an electromagnetic wave detection means in which a group of detection elements consisting of M (M is an integer of 2 or more) detection elements arranged in the Y-axis direction are arranged in N rows (N is an integer of 2 or more) in the X-axis direction perpendicular to the Y-axis direction. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 6454820 Summary of the Invention [Problem to be solved by the invention]

[0004] In X-ray inspection equipment, the transport speed of the item (inspection target) is sometimes increased to improve production efficiency on production lines for the items to be inspected. When the transport speed of the item is fast in an X-ray inspection equipment, if the volume of the image generated based on the X-ray detection results is large, the image cannot be transferred in time for the inspection, and inspection based on the image cannot be performed.

[0005] An object of one aspect of the present invention is to provide an X-ray inspection apparatus that can perform inspection regardless of the conveying speed of an article. [Means for solving the problem]

[0006] (1) An X-ray inspection device according to one aspect of the present invention comprises a conveying section that conveys an article; an X-ray irradiation section that irradiates X-rays onto an article conveyed by the conveying section; an X-ray detection section in which a plurality of detection elements that detect X-rays are arranged in a cross direction that horizontally intersects the conveying direction in the conveying section; an image generation section that generates an image based on the detection results output from the X-ray detection section; and an inspection section that inspects the quality of the article based on the image, wherein the plurality of detection elements include first detection elements arranged in a first row and second detection elements arranged in a second row parallel to the first row, and the first row and second row are arranged alternately in multiple rows along the conveying direction, and the X-ray detection section outputs an integrated value of output values ​​of the first detection elements in the multiple first row and an integrated value of output values ​​of the second detection elements in the multiple second row when the conveying speed of the conveying section is slower than a predetermined speed, and outputs an integrated value of output values ​​of the first detection elements in the multiple first row and an integrated value of output values ​​of the second detection elements in the multiple second row when the conveying speed of the conveying section is equal to or greater than the predetermined speed.

[0007] In an X-ray inspection apparatus according to one aspect of the present invention, the X-ray detection unit outputs an integrated value of output values ​​of a plurality of first detector elements in a first row and an integrated value of output values ​​of a plurality of second detector elements in a second row when the conveying speed of the conveying unit is slower than a predetermined speed, and outputs an integrated value of output values ​​of a plurality of first detector elements in a first row and an integrated value of output values ​​of a plurality of second detector elements in a second row when the conveying speed of the conveying unit is equal to or greater than the predetermined speed. Thus, in the X-ray inspection apparatus, when the conveying speed of the conveying unit is equal to or greater than the predetermined speed, two output values, the output values ​​of the plurality of first detector elements in a first row and the output values ​​of the plurality of second detector elements in a second row, are output as one integrated value (data), and a single image is generated in the image generation unit. This allows the X-ray inspection apparatus to reduce the image size compared to when two images are generated based on two integrated values. Therefore, even when the conveying speed of the conveying unit is fast, the X-ray inspection apparatus can transfer an image from the image generation unit to the inspection unit within the inspection time. Therefore, the X-ray inspection apparatus can perform inspection regardless of the conveying speed of the item.

[0008] (2) In the X-ray inspection apparatus of (1) above, the second detection element has a plurality of second detection element groups each consisting of a plurality of second detection elements adjacent to each detection element in the first detection element and arranged adjacent to each other in the intersecting direction, and the output value of the second detection element group may be an output value obtained by performing an arithmetic operation on the output values ​​of the plurality of second detection elements constituting the second detection element group.

[0009] (3) In the X-ray inspection device described in (1) or (2) above, the image generation unit may change the number of rows of detection elements used to generate an image based on the conveying speed of the conveying unit. In the X-ray inspection device, for example, when the conveying speed of the conveying unit is fast, the number of rows of detection elements used to generate an image is reduced. As a result, the X-ray inspection device reduces the number of rows of detection elements, thereby reducing the volume of the image generated based on the integration result of the output values ​​of the detection elements in the X-ray detection unit. Therefore, in the X-ray inspection device, even when the conveying speed of the conveying unit is fast, the image can be transferred from the image generation unit to the inspection unit within the inspection time. Therefore, the X-ray inspection device can perform inspection regardless of the conveying speed of the item.

[0010] (4) In any one of the X-ray inspection devices (1) to (3) above, the number of second detection elements arranged in the second row may be greater than the number of first detection elements arranged in the first row. In this configuration, the second detection elements are smaller than the first detection elements, and foreign objects passing through the X-ray detection unit are more likely to be detected by the multiple second detection elements in the second row. Therefore, the X-ray inspection device is less likely to miss detecting foreign objects. In addition, by including both the first detection elements and the second detection elements in the X-ray detection unit, the manufacturing cost of the X-ray detection unit is less likely to increase compared to when the X-ray detection unit only has the second detection elements.

[0011] (5) In the X-ray inspection device according to any one of (1) to (4), the images may be a first image generated using the detection result of the first detection element and a second image generated using the detection result of the second detection element. This configuration can improve the contrast of the images generated by the image generation unit.

[0012] (6) In the X-ray inspection device of (5) above, the image may be a composite image obtained by combining the first image and the second image. In this configuration, differences in brightness, contrast, etc. between the first image and the second image can be reduced.

[0013] (7) In the X-ray inspection device according to any one of (1) to (6), the length of the first detection element in the intersecting direction may be longer than the length of the second detection element in the intersecting direction. With this configuration, it becomes difficult for a foreign object to go undetected. [Effects of the Invention]

[0014] According to one aspect of the present invention, inspection can be performed regardless of the transport speed of the article. [Brief explanation of the drawings]

[0015] [Figure 1] FIG. 1 is a configuration diagram of an X-ray inspection apparatus according to an embodiment. [Figure 2] FIG. 2 is a schematic diagram showing the internal configuration of the shielding box shown in FIG. [Figure 3] FIG. 3 is a schematic plan view of the main part of the sensor unit. [Figure 4] FIG. 4 is a functional configuration diagram of the control unit. [Figure 5] Figure 5(a) is a schematic plan view showing a first example of a second detection element group of a plurality of second detection elements, and Figure 5(b) is a schematic plan view showing a second example of a second detection element group of a plurality of second detection elements. DETAILED DESCRIPTION OF THE INVENTION

[0016] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the description of the drawings, the same or corresponding elements are designated by the same reference numerals, and redundant description will be omitted.

[0017] As shown in Fig. 1, the X-ray inspection apparatus 1 includes an apparatus main body 2, support legs 3, a shielding box 4, a conveying unit 5, an X-ray irradiation unit 6, a sensor unit (X-ray detection unit) 7, a display operation unit 8, and a control unit 9. The X-ray inspection apparatus 1 generates an X-ray transmission image of the article G while conveying the article G, and inspects the article G based on the X-ray transmission image. The article G before inspection is carried into the X-ray inspection apparatus 1 by a carry-in conveyor 51. The article G after inspection is carried out of the X-ray inspection apparatus 1 by a carry-out conveyor 52.

[0018] The device main body 2 houses the control unit 9 and the like. The support legs 3 support the device main body 2. The shielding box 4 is provided on the device main body 2. The shielding box 4 is a housing that prevents leakage of X-rays (electromagnetic waves) to the outside. Inside the shielding box 4 is provided an inspection room R where inspection of items G is carried out using X-rays. The shielding box 4 is formed with an entrance 4a and an exit 4b. Items G before inspection are carried into the inspection room R from the entrance 4a on the carry-in conveyor 51. After inspection, the items G are carried out from the inspection room R to the exit conveyor 52 via the exit 4b.

[0019] The conveying unit 5 is a member that conveys the article G, and is disposed so as to penetrate the center of the shielding box 4. The conveying unit 5 conveys the article G in a conveying direction A from the entrance 4a through the inspection chamber R to the exit 4b. The speed (conveying speed) at which the article G is conveyed by the conveying unit 5 is set, for example, by the control unit 9. The conveying unit 5 is, for example, a belt conveyor stretched between the entrance 4a and the exit 4b. Note that the conveying unit 5 may protrude outward beyond the entrance 4a and the exit 4b.

[0020] As shown in FIGS. 1 and 2, the X-ray irradiator 6 is an electromagnetic wave irradiator located within the shield box 4 and irradiates the object G transported by the transport unit 5 with X-rays. The X-rays include X-rays in various energy ranges, from low energy (long wavelength) to high energy (short wavelength). Therefore, the X-ray irradiator 6 irradiates the object G transported by the transport unit 5 with X-rays in multiple energy ranges. X-ray irradiation by the X-ray irradiator 6 (i.e., idling of the X-ray irradiator 6) may be performed after the X-ray inspection device 1 is started and before the inspection of the object G. Note that the terms "low" and "high" in the above-mentioned terms "low energy" and "high energy" refer to relatively "low" and "high" in the multiple energy ranges irradiated by the X-ray irradiator 6, and do not refer to a specific range. The power (particularly, the current) supplied to the X-ray irradiator 6 can be changed manually or automatically. By changing the power, the output of the X-rays irradiated to the object G can be changed. This allows X-rays with an appropriate intensity to be irradiated to the object G.

[0021] The sensor unit 7 is a sensor unit that detects electromagnetic waves. The sensor unit 7 is disposed inside the shielding box 4 at a position facing the X-ray irradiation unit 6 in the vertical direction. The transport unit 5 is disposed between the sensor unit 7 and the X-ray irradiation unit 6 in the vertical direction. FIG. 3 is a schematic plan view of the main parts of the sensor unit 7. As shown in FIG. 3, the sensor unit 7 detects X-rays and has a plurality of detection elements 10 that are arranged in a plane (two-dimensionally). The detection elements 10 are arranged at least in a direction (intersecting direction) that intersects with the transport direction A of the transport unit 5.

[0022] In this embodiment, the sensor unit 7 is a direct conversion type detection unit capable of detecting X-rays by a photon counting method. The detection element 10 is, for example, a sensor (multi-energy sensor) that detects X-rays in each of a plurality of energy ranges that pass through the article G, and the sensor unit 7 may also be a time delay integration sensor (TDI sensor). The detection element 10 includes, for example, a photon detection sensor such as a CdTe semiconductor detector. In the detection element 10, electron-hole pairs are generated, for example, when X-ray photons reach the detection element 10. Photon counting (photon counting) is performed based on the energy (photon energy) obtained at this time. The counting process is performed, for example, by a calculation unit (not shown) included in the sensor unit 7 or the detection element 10. The results of the counting process (detection results) for each detection element 10 by the calculation unit are output to the control unit 9 at predetermined time intervals. The predetermined time is a time (default time) predetermined for the X-ray inspection apparatus 1. The predetermined time interval described above is also called a read interval or a delay time, and can be changed by the control unit 9 as appropriate.

[0023] Each detection element 10 of the sensor unit 7 may discriminate the detected X-ray photon energy into two or more energy ranges based on an arbitrary threshold. In this case, the sensor unit 7 is capable of photon counting in each energy range. The arbitrary threshold is, for example, one or more values ​​(unit: keV) set by the control unit 9.

[0024] The multiple detection elements 10 include first detection elements 11 arranged in a first row C1 in the intersecting direction and second detection elements 12 arranged in a second row C2 parallel to the first row C1. Therefore, the first row C1 includes multiple first detection elements 11 arranged along the intersecting direction, and the second row C2 includes multiple second detection elements 12 arranged along the intersecting direction. In the sensor unit 7, the first row C1 and the second row C2 are arranged alternately along the conveying direction A. In other words, the sensor unit 7 includes multiple first rows C1 and multiple second rows C2, and the first row C1 and the second row C2 are arranged alternately in the conveying direction A. Therefore, the first detection elements 11 and the second detection elements 12 are arranged alternately in the conveying direction A. Each of the first row C1 and the second row C2 may function as a pseudo line sensor, for example. While FIG. 3 shows two first rows C1 and two second rows C2, three or more first rows C1 and two second rows C2 may be provided.

[0025] In this embodiment, the dimension D1 of the first detection element 11 in the conveying direction A is the same as the dimension D2 of the second detection element 12 in the conveying direction A, but is not limited to this. The dimension D3 of the first detection element 11 in the cross direction is different from the dimension D4 of the second detection element 12 in the cross direction. In this embodiment, the dimension D3 is larger than the dimension D4. For example, the dimension D3 is a natural number multiple of the dimension D4 that is 2 or more. The dimensions D1 and D3 are preferably, for example, 1.0 mm or less, and more preferably 0.1 mm to 0.9 mm. The dimensions D1 and D3 are most preferably, for example, 0.3 mm. The dimensions D2 and D4 are preferably 1.0 mm or less, and more preferably 0.1 mm to 0.9 mm.

[0026] When the number of first detection elements 11 in the first column C1 is the same as the number of second detection elements 12 in the second column C2, the brightness, contrast, etc. of an image generated using the detection results output from the second column C2 may be significantly different from the image generated using the detection results output from the first column C1. For this reason, in this embodiment, the number of second detection elements 12 arranged in the second column C2 is greater than the number of first detection elements 11 arranged in the first column C1. For example, the number of second detection elements 12 arranged in the second column C2 is a natural number multiple of the number of first detection elements 11 arranged in the first column C1, which is two or more. Alternatively, the value obtained by dividing the number of second detection elements 12 arranged in the second column C2 by the number of first detection elements 11 arranged in the first column C1 may be the same as the value obtained by dividing the dimension D3 by the dimension D4.

[0027] The dimension L1 of the gap G1 between the first detection elements 11 in the cross direction may be the same as or different from the dimension L2 of the gap G2 between the second detection elements 12 in the cross direction. In this embodiment, the dimension L1 is larger than the dimension L2. In this case, a portion of the second detection element 12 overlaps the gap G1 as viewed from the conveying direction A. For example, two adjacent second detection elements 12 overlap as viewed from the conveying direction A. This allows a foreign object to pass over one or more second detection elements 12 even if the dimensions L1 and L2 are the same. Alternatively, a portion of the second detection element 12 may overlap the gap G1 as viewed from the conveying direction A. In other words, regardless of the relationship between the dimensions L1 and L2, the first detection element 11 may overlap multiple second detection elements 12 in the conveying direction A.

[0028] When the conveying speed of the conveying unit 5 is slower than a predetermined speed, the sensor unit 7 outputs the integrated value of the output values ​​of the first detection elements 11 in the plurality of first rows C1 and the integrated value of the output values ​​of the second detection elements 12 in the plurality of second rows C2. When the conveying speed of the conveying unit 5 is equal to or higher than a predetermined speed, the sensor unit 7 outputs the integrated value of the output values ​​of the first detection elements 11 in the plurality of first rows C1 and the output values ​​of the second detection elements 12 in the plurality of second rows C2. The sensor unit 7 acquires the conveying speed of the conveying unit 5 input via the display operation unit 8. The predetermined speed can be set by the operator via the display operation unit 8.

[0029] As shown in FIG. 5( a) or 5(b), the second detection element 12 includes a plurality of second detection element groups ML1 and ML2, each of which is composed of a plurality of second detection elements 12 adjacent to each of the first detection elements 11 and arranged adjacent to each other in the intersecting direction. The output values ​​of the second detection element groups ML1 and ML2 may be output values ​​obtained by performing arithmetic processing on the output values ​​of the second detection elements 12 constituting the second detection element groups ML1 and ML2. For example, the output values ​​of the second detection element groups ML1 and ML2 are the sum or average of the output values ​​of the second detection elements 12 constituting the second detection element groups ML1 and ML2. The output values ​​of the second detection element groups ML1 and ML2 are used when the conveying speed of the conveying unit 5 is equal to or higher than a predetermined speed, but are not limited thereto, and may also be used when the conveying speed of the conveying unit 5 is slower than the predetermined speed.

[0030] As shown in FIG. 1, the display operation unit 8 is a component (display unit) provided in the device main body 2. The display operation unit 8 displays various information and accepts input operations of various conditions from the outside. The display operation unit 8 is, for example, a liquid crystal display, and displays an operation screen as a touch panel. In this case, the operator can input various conditions via the display operation unit 8. For example, the operator can set the transport speed of the transport unit 5, the power (at least one of current and voltage) supplied to the X-ray irradiation unit 6, etc. via the display operation unit 8. The input operations accepted by the display operation unit 8 are output to the transport unit 5, the sensor unit 7, the control unit 9, etc.

[0031] The control unit 9 is disposed inside the device main body 2. The control unit 9 controls the operation of each part of the X-ray inspection device 1. The control unit 9 is composed of a CPU (Central Processing Unit), ROM (Read Only Memory), RAM (Random Access Memory), etc. The ROM stores programs for controlling the X-ray inspection device 1, the operation modes of the X-ray inspection device 1, etc.

[0032] 4 is a functional configuration diagram of the control unit 9. As shown in FIG. 4, the control unit 9 includes a receiving unit 21, an image generating unit 22, an inspecting unit 23, a determining unit 24, an output unit 25, and a recording unit 26.

[0033] The receiving unit 21 receives an input operation accepted by the display operation unit 8. The receiving unit 21 receives, for example, the transport speed of the transport unit 5 set via the display operation unit 8. The receiving unit 21 also receives the detection results output from the sensor unit 7 (specifically, the detection results of X-rays output from each detection element 10). The receiving unit 21 transmits the received detection results to the image generation unit 22.

[0034] The image generation unit 22 is mainly composed of, for example, a GPU (Graphics Processing Unit) and generates an image based on the detection results output from the sensor unit 7. For example, the image generation unit 22 expands the received signals of the detection results into a two-dimensional image in memory. The memory in which the two-dimensional image is expanded is, for example, a memory included in the GPU, but is not limited to this. The image generation unit 22 reads out, for example, the detection results output from at least some of the multiple detection elements 10 included in the sensor unit 7 at a predetermined read interval, and generates one or more time delay integrated images used for inspecting the item G. For example, the image generation unit 22 generates multiple transmission images corresponding to each of the multiple energy regions. The image generation unit 22 may also generate one or more difference images from the multiple transmission images.

[0035] The image generation unit 22 may use, for example, an image processing algorithm or a program that is automatically set by machine learning. The image processing algorithm is composed of one image processing filter or a combination of multiple image processing filters. At least one of the multiple image processing algorithms can be automatically generated from multiple image processing filters based on the specifications of the X-ray inspection device 1, the inspection conditions, etc., by employing a genetic algorithm (GA), which is a method that applies the mechanisms of heredity and evolution in the biological world.

[0036] At least some of the multiple image processing algorithms can also be set by the operator as appropriate via the display operation unit 8. The program automatically set by machine learning is a predictive model (trained model) generated by machine learning, and is an inference program incorporating parameters obtained as a result of machine learning (trained parameters). Examples of machine learning used in the trained model include neural networks, support vector machines, and genetic algorithms.

[0037] The images generated by the image generation unit 22 may include an image (first image) generated using the detection results of the first detection elements 11, and an image (second image) generated using the detection results of the second detection elements 12. In this case, the image generation unit 22 generates the first image using the detection results output from the first columns C1 of the sensor unit 7, and generates the second image using the detection results output from the second columns C2 of the sensor unit 7. The image generation unit 22 may generate a composite image by combining the first image and the second image.

[0038] One pixel (first pixel) included in the first image is generated, for example, using the detection result of a predetermined first detection element 11 in one or more first columns C1. The predetermined first detection element 11 is the first detection element 11 located at a predetermined position counting from one end of the first column C1 in the cross direction. When the detection elements 10 are TDI sensors, the first pixel is generated using the detection result of the predetermined first detection element 11 in each first column C1.

[0039] One pixel (second pixel) included in the second image is generated, for example, using the detection results of a plurality of predetermined-numbered second detection elements 12 in one or more second columns C2. That is, the second pixel is generated by adding up the detection results of two or more second detection elements 12 in one or more second columns C2 and using the summation result. If the detection element 10 is a TDI sensor, the second pixel is generated by adding up the detection results of the plurality of second detection elements 12 in each second column C2. The image generation unit 22 may generate a difference image from the first image and the second image.

[0040] The image generation unit 22 changes the number of columns of the detection elements 10 used to generate an image based on the transport speed of the transport unit 5. Specifically, the image generation unit 22 changes the number of columns of the first columns C1 and the second columns C2 used to generate an image based on the transport speed of the transport unit 5. When the transport speed of the transport unit 5 is slow, the image generation unit 22 uses a larger number of columns of the first columns C1 and the second columns C2 to generate an image. When the transport speed of the transport unit 5 is fast, the image generation unit 22 uses a smaller number of columns of the first columns C1 and the second columns C2 to generate an image. For example, when the transport speed of the transport unit 5 is fast, the image generation unit 22 generates an image using only the detection results of the multiple first columns C1. When the transport speed of the transport unit 5 is even faster, the image generation unit 22 generates an image using only the detection results of some of the multiple first columns C1.

[0041] The image generation unit 22 acquires the conveying speed of the conveying unit 5 received by the receiving unit 21, for example, and references a table based on the acquired conveying speed. The table associates the conveying speed with the number of columns of the first column C1 and the second column C2 to be used. The table is set and stored in advance. The table can be modified as needed. The image generation unit 22 references the table based on the conveying speed and acquires the number of columns corresponding to (associated with) the conveying speed. The number of columns of the first column C1 and the second column C2 used by the image generation unit 22 may be changed arbitrarily by the operator. In this case, the operator operates the display operation unit 8 to set the number of columns of the first column C1 and the second column C2. Specifically, the display operation unit 8 displays the conveying speed of the conveying unit 5, and the operator checks the conveying speed and sets (specifies) the number of columns of the first column C1 and the second column C2 on the display operation unit 8.

[0042] The inspection unit 23 inspects the item G based on the image generated by the image generation unit 22. For example, the inspection unit 23 inspects the item G using the multiple transmission images, the differential image, etc. The inspection unit 23 may inspect the item G based on both the differential image and the transmission image. The item G may be inspected based on the transmission image, etc. while the differential image is being generated by the image generation unit 22. The inspection unit 23 inspects the item G for, for example, the presence or absence of foreign matter, cracks, chips, etc., but is not limited to this. When the item G is wrapped in a sheet-like packaging material, the inspection unit 23 may also inspect for tears in the packaging material, poor sealing of the packaging material (seal bite), etc. When the item G is contained in a package, the inspection unit 23 may perform a foreign matter check, a missing item check, a number of items contained, a hollow check, etc., within the package. The inspection unit 23 transmits the inspection results of the item G to the determination unit 24 and the recording unit 26.

[0043] The determination unit 24 determines whether the item G is a non-defective item based on the inspection results received from the inspection unit 23. For example, the determination unit 24 determines whether there is any foreign matter in the item G, whether there is any crack or chip in the item G, etc. The determination unit 24 transmits the determination results to the output unit 25 and the recording unit 26.

[0044] The output unit 25 outputs the determination result of the determination unit 24 to at least one of a portion of the X-ray inspection apparatus 1 other than the control unit 9 and a device different from the X-ray inspection apparatus 1. This allows at least one of the X-ray inspection apparatus 1 and a device different from the X-ray inspection apparatus 1 (for example, a sorting device arranged downstream of the X-ray inspection apparatus 1) to perform an operation when the item G is a defective product. Other examples of the device different from the X-ray inspection apparatus 1 include an input conveyor 51, an output conveyor 52, an alarm device, etc.

[0045] The recording unit 26 records signals, data, etc. generated by the control unit 9. For example, the recording unit 26 records the detection results transmitted from the receiving unit 21, image data transmitted from the image generating unit 22, data related to the inspection results transmitted from the inspecting unit 23, and data related to the judgment results transmitted from the judging unit 24.

[0046] As described above, in the X-ray inspection apparatus 1 according to this embodiment, when the conveying speed of the conveying unit 5 is slower than a predetermined speed, the sensor unit 7 outputs the integrated value of the output values ​​of the first detection elements 11 of the plurality of first rows C1 and the integrated value of the output values ​​of the second detection elements 12 of the plurality of second rows C2, respectively. When the conveying speed of the conveying unit 5 is equal to or higher than a predetermined speed, the sensor unit 7 outputs the integrated value of the output values ​​of the first detection elements 11 of the plurality of first rows C1 and the integrated value of the output values ​​of the second detection elements 12 of the plurality of second rows C2. When the conveying speed of the conveying unit 5 is fast, the image generating unit 22 generates two images based on the outputs of the integrated value of the output values ​​of the first detection elements 11 of the plurality of first rows C1 and the integrated value of the output values ​​of the second detection elements 12 of the plurality of second rows C2. When these two images are to be transferred from the image generating unit 22 to the inspection unit 23, the image size is large and therefore the images cannot be transferred from the image generating unit 22 to the inspection unit 23 within the inspection time, which may prevent the inspection in the inspection unit 23.

[0047] In this regard, in the X-ray inspection apparatus 1, when the conveying speed of the conveying unit 5 is equal to or greater than a predetermined speed, the sensor unit 7 outputs two output values, the output values ​​of the first detection elements 11 of the plurality of first rows C1 and the output values ​​of the second detection elements 12 of the plurality of second rows C2, as one integrated value (data) to the control unit 9 (image generation unit 22). In this way, in the X-ray inspection apparatus 1, when the conveying speed of the conveying unit 5 is equal to or greater than a predetermined speed, the sensor unit 7 outputs two output values, the output values ​​of the first detection elements 11 of the plurality of first rows C1 and the output values ​​of the second detection elements 12 of the plurality of second rows C2, as one integrated value (data), and one image is generated in the image generation unit 22. As a result, the X-ray inspection apparatus 1 can reduce the image size compared to when two images are generated based on two integrated values. Therefore, in the X-ray inspection apparatus 1, even when the conveying speed of the conveying unit 5 is fast, the image can be transferred from the image generation unit 22 to the inspection unit 23 within the inspection time. Therefore, the X-ray inspection apparatus 1 can perform inspection regardless of the conveying speed of the item G.

[0048] In the X-ray inspection apparatus 1 according to this embodiment, the image generation unit 22 changes the number of rows of the detecting elements 10 used to generate an image based on the conveying speed of the conveying unit 5. In the X-ray inspection apparatus 1, for example, when the conveying speed of the conveying unit 5 is fast, the number of rows of the detecting elements 10 used to generate an image is reduced. As a result, in the X-ray inspection apparatus 1, the number of rows of the detecting elements 10 is reduced, and the volume of the image generated based on the integration result of the output values ​​of the detecting elements 10 in the sensor unit 7 can be reduced. Therefore, in the X-ray inspection apparatus 1, even when the conveying speed of the conveying unit 5 is fast, the image can be transferred from the image generation unit 22 to the inspection unit 23 within the inspection time. Therefore, in the X-ray inspection apparatus 1, inspection can be performed regardless of the conveying speed of the item G.

[0049] In the X-ray inspection apparatus 1 according to this embodiment, the multiple detection elements 10 include first detection elements 11 arranged in a first row C1 and second detection elements 12 arranged in a second row C2 parallel to the first row C1. The number of second detection elements 12 arranged in the second row C2 is greater than the number of first detection elements 11 arranged in the first row C1. In this configuration, the second detection elements 12 are smaller than the first detection elements 11, and foreign objects passing through the sensor unit 7 are more likely to be detected by the multiple second detection elements 12 in the second row C2. Therefore, the X-ray inspection apparatus 1 is less likely to miss detecting foreign objects. In addition, since the sensor unit 7 includes both the first detection elements 11 and the second detection elements 12, the manufacturing cost of the sensor unit 7 is reduced compared to when the sensor unit 7 only includes the second detection elements 12.

[0050] Although the embodiments of the present invention have been described above, the present invention is not necessarily limited to the above-described embodiments, and various modifications are possible without departing from the spirit of the present invention.

[0051] In the above embodiment, the multiple detection elements 10 of the sensor unit 7 include the first detection elements 11 and the second detection elements 12 of different sizes. However, the detection elements may all be of the same type and of the same size.

[0052] In the above embodiment, the sensor unit is a device capable of detecting X-rays by a photon counting method, but is not limited to this. The detection element included in the sensor unit may have at least a scintillator and a photodiode.

[0053] In the above embodiment, the second pixel is generated using the sum of the detection results of two second detection elements, but the present invention is not limited to this. For example, the second pixel may be generated using the sum of the detection results of three or more second detection elements. In this case, some of the second detection elements used to generate the second pixel may be aligned with the third detection element in the transport direction, and another part of the second detection elements may be aligned with the fourth detection element in the transport direction. [Explanation of symbols]

[0054] 1...X-ray inspection device, 5...conveying section, 6...X-ray irradiation section, 7...sensor section (X-ray detection section), 10...detecting element, 11...first detecting element, 12...second detecting element, 22...image generating section, 23...inspection section, A...conveying direction, C1...first row, C2...second row, G...item, ML1, ML2...second detecting element group.

Claims

1. a conveying unit that conveys the article; an X-ray irradiation unit that irradiates the object conveyed by the conveying unit with X-rays; an X-ray detection unit in which a plurality of detection elements for detecting the X-rays are arranged in a direction intersecting horizontally with a conveying direction in the conveying unit; an image generating unit that generates an image based on the detection result output from the X-ray detecting unit; an inspection unit that inspects the quality of the item based on the image, The plurality of detection elements include a first row of first detector elements; a second row of second sensing elements aligned in parallel with the first row; the first rows and the second rows are each provided in a plurality of rows alternately along the conveying direction, The X-ray detection unit When the conveying speed of the conveying unit is slower than a predetermined speed, an integrated value of output values ​​of the first detection elements of the plurality of first rows and an integrated value of output values ​​of the second detection elements of the plurality of second rows are output, An X-ray inspection device that outputs an integrated value of output values ​​of the first detection elements in the first row and output values ​​of the second detection elements in the second row when the conveying speed of the conveying section is equal to or greater than a predetermined speed.

2. the second detection element includes a plurality of second detection element groups each including a plurality of second detection elements adjacent to each of the first detection elements and arranged adjacent to each other in the intersecting direction; The X-ray inspection apparatus according to claim 1 , wherein the output values ​​of the second detection element group are output values ​​obtained by performing arithmetic processing on output values ​​of the second detection elements constituting the second detection element group.

3. The X-ray inspection apparatus according to claim 1 , wherein the image generation unit changes the number of rows of the detection elements used to generate the image based on the transport speed of the transport unit.

4. The X-ray inspection apparatus according to claim 1 , wherein the number of the second detection elements arranged in the second row is greater than the number of the first detection elements arranged in the first row.

5. 3. The X-ray inspection apparatus according to claim 1, wherein the images are a first image generated using a detection result of the first detection element and a second image generated using a detection result of the second detection element.

6. The X-ray inspection apparatus according to claim 5 , wherein the image is a composite image obtained by combining the first image and the second image.

7. The X-ray inspection apparatus according to claim 1 , wherein a length of the first detection element in the intersecting direction is longer than a length of the second detection element in the intersecting direction.

Images