Probe

Abstract

To provide a probe capable of reducing variations in impedance and improving inspection accuracy.SOLUTION: The probe comprises an electrically conductive probe pin 9, an electrically conductive plunger 7 and a dielectric bushing 8. The probe pin comes into contact with the terminal connector to test characteristics of the terminal connector. The plunger is provided with a plunger through-hole 72 penetrating in the axial direction, and the probe pin is housed in the plunger through-hole. The bushing is press-fitted into the plunger through hole from a first side in the axial direction on which the probe pin comes into contact with the terminal connector. The bushing is provided with a bushing through-hole 80 penetrating the bushing in the axial direction, and the inner wall of the bushing through-hole holds the probe pin.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present disclosure relates to probes. [Background technology]

[0002] Patent Document 1 discloses an inspection probe device that is connected to a coaxial cable. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 724386 Summary of the Invention [Problem to be solved by the invention]

[0004] The probe device disclosed in Patent Document 1 includes a cylindrical external plunger, a cylindrical central plunger disposed inside the external plunger, and a cylindrical bushing disposed between the external plunger and the central plunger to insulate them. The bushing is fitted with the external plunger by a so-called clearance fit in a plane perpendicular to the axial direction, and the central plunger is also fitted with the bushing by a clearance fit in the same plane. In other words, there are predetermined air gaps between the bushing and the external plunger and between the central plunger and the bushing in the same plane.

[0005] When testing the characteristics of a terminal connector using a probe device, the central plunger is connected to the terminal connector under test, and the outer plunger is connected to ground. As a result, an electrical line is formed through the central plunger and an electrical line is formed through the outer plunger. To improve the testing accuracy of the probe device, it is necessary to maintain a constant impedance between the electrical line through the central plunger and the electrical line through the outer plunger. This impedance can vary depending on the proportion of the bushing and air gap between the central plunger and the outer plunger.

[0006] In particular, the air gap varies depending on the dimensional tolerances of the outer plunger, the center plunger, and the bushing. This causes the impedance to vary from probe device to probe device, making it difficult to manufacture probe devices with high inspection accuracy. This problem may become more pronounced as probe devices become smaller.

[0007] An object of the present disclosure is to provide a probe that can reduce impedance variations and improve testing accuracy. [Means for solving the problem]

[0008] The present disclosure provides: a conductive probe pin for contacting the terminal connector to inspect the characteristics of the terminal connector; a conductive plunger having a plunger through-hole penetrating in an axial direction, the plunger through-hole accommodating the probe pin; a dielectric bushing that is press-fitted into the plunger through-hole from a first side in the axial direction, the first side being a side where the probe pin comes into contact with the terminal connector, the bushing having a bushing through-hole that penetrates the bushing in the axial direction, and an inner wall of the bushing through-hole that holds the probe pin; A probe is provided, comprising:

[0009] According to the probe of the present disclosure, the bushing is press-fitted into the plunger from the first side, so there is no air gap between the bushing and the plunger. As a result, the air gap does not change due to variations in the dimensional tolerance of at least the plunger, so impedance variations can be reduced, and a probe capable of inspecting terminal connectors with high accuracy can be manufactured. Furthermore, the impedance can be adjusted by adjusting the amount of press-fitting of the bushing, making it easy to maintain a constant impedance for each probe manufactured. [Brief explanation of the drawings]

[0010] [Figure 1] FIG. 2 is a perspective view of the probe according to the embodiment. [Figure 2] FIG. 2 is a bottom view of the probe according to the embodiment. [Figure 3] FIG. 3 is a cross-sectional view of the probe taken along the section III-III of FIG. 2. [Figure 4] FIG. 4 is an enlarged cross-sectional view of an area A in FIG. [Figure 5] FIG. 2 is a plan view of the bushing according to the embodiment. [Figure 6] 6 is a cross-sectional view of the bushing taken along the section VI-VI of FIG. 5. [Figure 7] FIG. 2 is a perspective view of a probe pin according to the present embodiment. [Figure 8] FIG. 2 is a bottom view of the probe pin according to the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0011] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings.

[0012] 1 shows a perspective view of a probe 1 according to this embodiment. The probe 1 is used to test whether a circuit on a printed circuit board built into a terminal such as a mobile phone is operating normally. Specifically, a terminal connector for circuit testing is disposed in a line connecting an RF circuit and an antenna circuit on the printed circuit board, and the RF circuit and the antenna circuit are measured by bringing the probe 1 into contact with the terminal connector.

[0013] The probe 1 has a measurement connector 2, a coaxial cable 3, a housing 4, a flange 5, a biasing member 6, a plunger 7, and a probe pin 9 (see FIGS. 2 to 4, 7, and 8). The measurement connector 2 is electrically connected to the coaxial cable 3 and an external measurement device (not shown). The cylindrical coaxial cable 3 is indirectly electrically connected to the probe pin 9. When the probe pin 9 comes into contact with a terminal connector (not shown) to be tested, a signal from the terminal connector is transmitted to the external measurement device via the probe pin 9, the coaxial cable 3, and the measurement connector 2.

[0014] The flange 5 is a conductive member for attaching the probe 1 to a predetermined facility (not shown). The predetermined facility is, for example, a sorting machine for sorting printed circuit boards on which terminal connectors are arranged based on the results of a characteristic test of the terminal connectors. The flange 5 is fixed to a jig (not shown) of the facility by means of screws or the like. The flange 5 has a substantially rectangular shape and a predetermined thickness. The flange 5 is provided with a flange through-hole 50 that penetrates in the thickness direction.

[0015] The housing 4 is a conductive columnar member that houses the coaxial cable 3. The housing 4 has a flange through-hole 50 penetrating it. The housing 4 has a housing through-hole 40 that penetrates it in the axial direction, and the coaxial cable 3 passes through the housing through-hole 40. Here, the axial direction of the housing 4, i.e., the vertical direction in FIG. 1, is referred to as the Z direction, the long side direction of the flange 5 as the X direction, and the short side direction of the flange 5 as the Y direction. The lower side of FIG. 1, i.e., the side where the probe pin 9 comes into contact with the terminal connector, is referred to as the Z1 side (first side), and the upper side as the Z2 side (second side). The Z direction, X direction, and Y direction are perpendicular to each other.

[0016] The plunger 7 is a conductive member for accommodating the probe pin 9. The plunger 7 has a flange 70 on the Z2 side that contacts the housing 4, and a column 71 on the Z1 side. The plunger 7 is fixed to the housing 4 by fastening the flange 70 to the housing 4 with a bolt (not shown).

[0017] The biasing member 6 is a spring member that circumferentially surrounds the housing 4. The Z2-side end of the biasing member 6 contacts the end face of the flange 5, and the Z1-side end of the biasing member 6 contacts the flange portion 70. In other words, the biasing member 6 biases the flange 5 toward the Z2 side and biases the plunger 7 toward the Z1 side.

[0018] FIG. 2 shows a bottom view of the probe 1 as viewed from the Z1 side. In FIG. 2, the Z1-side end faces of the flange 5, the flange portion 70, and the column portion 71 are shown. The column portion 71 has a rectangular shape with rounded corners in a plan view. An enlarged view of a portion of the column portion 71 is shown at the bottom of FIG. 2. The plunger 7 has two plunger through-holes 72 that penetrate the column portion 71 in the axial direction, i.e., the Z direction. In the enlarged view of FIG. 2, a bushing 8 having substantially the same shape as the plunger through-hole 72 is disposed in each plunger through-hole 72.

[0019] The plunger through-hole 72 and bushing 8 have non-circular shapes in plan view, specifically, an ellipse with the longer side in the Y direction. The bushing 8 has a bushing through-hole 80 that penetrates in the Z direction. A conductive probe pin 9 is disposed in the bushing through-hole 80, which inspects the characteristics of the terminal connector by coming into contact with the terminal connector. The bushing 8 has dielectric properties and is configured not to allow a direct current to flow between the probe pin 9 and the plunger 7. The relative dielectric constant of the bushing 8 is generally higher than that of air.

[0020] FIG. 3 shows a cross-sectional view of the probe 1 along section III-III of FIG. 2, with the probe 1 cut so that the bushing 8 and the probe pin 9 are visible.

[0021] As shown in FIG. 3 , the coaxial cable 3 is inserted into the plunger through-hole 72. The Z1 side end of the coaxial cable 3 is located inside the plunger through-hole 72. A conductive cylindrical inner tube 10 extending in the Z direction is disposed inside the plunger through-hole 72. The Z1 side end of the coaxial cable 3 is connected to the Z2 side end of the inner tube 10. The outer circumferential surface of the coaxial cable 3 is covered with an insulator, so that the coaxial cable 3 and the plunger 7 are insulated from each other. On the other hand, the Z1 side end of the coaxial cable 3 is exposed and electrically connected to the inner tube 10.

[0022] 4 shows an enlarged cross-sectional view of region A in FIG. 3. The Z1 side end of the inner cylinder 10 is electrically connected to the probe pin 9. The inner cylinder 10 is not in contact with the inner wall of the plunger through-hole 72. In other words, the inner cylinder 10 is not electrically connected to the plunger 7.

[0023] The plunger through-hole 72 has a non-press-fit portion 72a on the Z2 side and a press-fit portion 72b on the Z1 side. The non-press-fit portion 72a has a circular shape in plan view. The press-fit portion 72b has a non-circular shape in plan view, specifically an ellipse that follows the shape of the bushing 8.

[0024] The center position of the non-press-fit portion 72a in the planar direction coincides with the center position of the press-fit portion 72b in the planar direction. In this specification, the center position refers to the center of gravity. For example, the center position of an oval refers to the midpoint of the line segment connecting the center of one semicircle to the center of the other semicircle.

[0025] 4, the dimension in the X direction of the non-press-fit portion 72a is smaller than the dimension in the X direction of the press-fit portion 72b. Furthermore, the dimension in the X direction of the press-fit portion 72b is smaller than the dimension in the X direction of the bushing 8. That is, the bushing 8 is press-fitted into the press-fit portion 72b. Specifically, the bushing 8 is inserted from the Z1 side of the plunger 7 and press-fitted over the entire circumference of the press-fit portion 72b in a plan view. Therefore, no air gap exists between the bushing 8 and the plunger 7 in the region where the bushing 8 is press-fitted.

[0026] 4, the Z1-side end face of the bushing 8 and the Z1-side end face of the plunger 7 form the same plane. In another embodiment, the Z1-side end face of the bushing 8 may not coincide with the Z1-side end face of the plunger 7 in the Z direction. The Z1-side end face of the bushing 8 may be located on the Z1 side or the Z2 side of the Z1-side end face of the plunger 7.

[0027] Before describing the positional relationship between the bushing 8 and the probe pin 9, the structures of the bushing 8 and the probe pin 9 will be described with reference to FIGS.

[0028] Fig. 5 shows a plan view of the bushing 8 as seen from the Z2 side, and Fig. 6 shows a longitudinal cross-sectional view of the bushing 8 taken along cross section VI-VI in Fig. 5. The bushing 8 has an outer wall 82 that defines the planar shape of the bushing 8, and a chamfered portion 83 provided at the Z1-side end of the outer wall 82. The chamfered portion 83 is provided around the entire periphery of the bushing 8. The chamfered portion 83 allows the bushing 8 to be easily press-fitted into the plunger through-hole 72. The chamfered portion 83 is a so-called C-chamfer, in which the corner is provided with an inclined surface at an angle of approximately 45°, but may also be a so-called R-chamfer, in which the corner is rounded.

[0029] The bushing through-hole 80 has a tip penetrating portion 80a on the Z1 side and a guide portion 80b on the Z2 side. The tip penetrating portion 80a is a portion through which a pin tip portion 90 of a probe pin 9, which will be described later, passes. The inner wall defining the guide portion 80b guides and holds the probe pin 9 in a predetermined position.

[0030] The shape of the tip penetrating portion 80a in a plan view is non-circular and is similar to the outer peripheral shape of the bushing 8 in a plan view, i.e., the shapes of the outer wall 82 and the chamfered portion 83. That is, the shape of the tip penetrating portion 80a is elliptical. The long side direction of the tip penetrating portion 80a coincides with the long side direction of the bushing 8. Furthermore, the center position of the tip penetrating portion 80a in the planar direction coincides with the center position of the bushing 8 in the planar direction.

[0031] The shape of the tip penetrating portion 80a and the bushing 8 in a plan view may be rectangular or elliptical. Even in such a case, the long side direction or major axis direction (in the case of an ellipse) of the tip penetrating portion 80a coincides with the long side direction or major axis direction of the bushing 8, and the center position of the tip penetrating portion 80a coincides with the center position of the bushing 8.

[0032] The guide portion 80b has a circular shape in a plan view. The center position of the guide portion 80b in the planar direction also coincides with the center position of the bushing 8 in the planar direction. The guide portion 80b has a second reduced diameter portion 80d on the Z1 side and an inner diameter portion 80c on the Z2 side. The inner diameter portion 80c has a predetermined inner diameter D2 and extends a length L2 in the Z direction. The inner diameter of the second reduced diameter portion 80d is reduced at a constant rate from the connection with the inner diameter portion 80c toward the Z1 side. In other words, the inner wall of the second reduced diameter portion 80d is a truncated cone with a constant taper angle.

[0033] The second reduced diameter portion 80d is connected to the oval-shaped tip penetrating portion 80a on the Z1 side, and therefore its termination position in the Z direction differs in the circumferential direction. In the long side direction of the tip penetrating portion 80a, i.e., the Y direction, the second reduced diameter portion 80d terminates at an inner diameter D4. In the direction perpendicular to the long side direction, i.e., the X direction, the second reduced diameter portion 80d terminates at an inner diameter D5 that is smaller than the inner diameter D4. In other words, the second reduced diameter portion 80d in the X direction extends further toward the Z1 side than the second reduced diameter portion 80d in the Y direction.

[0034] Fig. 7 shows a perspective view of the probe pin 9, and Fig. 8 shows a bottom view of the probe pin 9 as seen from the Z1 side. The probe pin 9 has a pin tip portion 90 on the Z1 side, an inner cylinder contact portion 92 on the Z2 side, and a positioning portion 91 located between the pin tip portion 90 and the inner cylinder contact portion 92 in the Z direction.

[0035] The inner cylinder contact portion 92 is a cylinder extending in the Z direction, and its outer periphery comes into contact with the inner cylinder 10. When the inner cylinder contact portion 92 comes into contact with the inner cylinder 10, the probe pin 9 is electrically connected to the inner cylinder 10.

[0036] The positioning portion 91 has a generally cylindrical shape extending in the Z direction. The positioning portion 91 has an outer diameter portion 91a connected to the inner cylinder contact portion 92 on the Z2 side, and a first reduced diameter portion 91b on the Z1 side. The outer diameter portion 91a has a predetermined outer diameter D1 and extends a length L1 in the Z direction. The outer diameter of the first reduced diameter portion 91b is reduced at a constant rate from the connection portion with the outer diameter portion 91a toward the Z1 side. In other words, the first reduced diameter portion 91b is a truncated cone with a constant taper angle. The axial center of the positioning portion 91 coincides with the axial center of the inner cylinder contact portion 92.

[0037] The pin tip 90 has an extension 90b connected to the first reduced diameter portion 91b on the Z2 side and a terminal contact portion 90a on the Z1 side that contacts the terminal connector to be tested. The extension 90b has a generally rectangular columnar shape extending in the Z direction. The terminal contact portion 90a has two generally triangular pyramid shapes extending from the connection with the extension 90b to the Z1 side. The two generally triangular pyramids are aligned in the long side direction of the rectangle, i.e., in the Y direction, with their Z1-side vertices positioned at the ends in the Y direction. The shape of the pin tip 90 is determined according to the shape of the terminal connector. That is, the shape of the terminal connector in which the probe 1 of this embodiment is used is generally rectangular.

[0038] Returning to Fig. 4, the positional relationship between the bushing 8 and the probe pin 9 will be described. In Fig. 4, the probe pin 9 is arranged so that the pin tip 90 passes through the bushing through-hole 80 and protrudes from the bushing 8, and the positioning portion 91 is housed inside the bushing through-hole 80. The positioning portion 91 does not protrude from the bushing 8 to the Z1 side or the Z2 side.

[0039] A small gap exists between the pin tip 90 and the inner wall of the tip penetrating portion 80a. This gap is large enough to prevent the probe pin 9 from rotating around its axis. This gap exists around the outer periphery of the pin tip 90 (see FIG. 2). In other words, the shape of the tip penetrating portion 80a in plan view is an ellipse that widens slightly in the radial direction from the outer periphery of the pin tip 90. As described above, the shape of the pin tip 90 is determined according to the shape of the terminal connector, and therefore the shape of the tip penetrating portion 80a is also determined according to the shape of the terminal connector. Furthermore, as described above, the shape of the bushing 8 in plan view is similar to the shape of the tip penetrating portion 80a, and therefore the shape of the bushing 8 is also determined according to the shape of the terminal connector.

[0040] The probe pin 9 is positioned and held relative to the bushing 8 by the first reduced diameter portion 91b abutting against the inner wall of the second reduced diameter portion 80d. The rate of diameter reduction of the first reduced diameter portion 91b matches the rate of diameter reduction of the second reduced diameter portion 80d. In other words, the taper angle of the first reduced diameter portion 91b matches the taper angle of the second reduced diameter portion 80d. As a result, the axial center of the first reduced diameter portion 91b coincides with the axial center of the second reduced diameter portion 80d, and therefore the axial center of the probe pin 9 coincides with the central position of the guide portion 80b.

[0041] Because the bushing 8 is press-fitted into the press-fit portion 72b, the center position of the press-fit portion 72b coincides with the center position of the bushing 8. As a result, the center position of the plunger through hole 72 coincides with the center position of the guide portion 80b. Furthermore, as described above, the axial center of the probe pin 9 coincides with the center position of the guide portion 80b. In other words, the axial center of the probe pin 9 coincides with the center position of the plunger through hole 72. As a result, the radial distance between the probe pin 9 and the inner wall of the plunger through hole 72 becomes uniform in the circumferential direction.

[0042] In order to satisfy the above-described positional relationship between the bushing 8 and the probe pin 9, the outer diameter D1 of the outer diameter portion 91a is set to be larger than the inner diameter D4 of the second reduced diameter portion 80d and smaller than the inner diameter D2 of the inner diameter portion 80c. In addition, the length L1 of the outer diameter portion 91a is set to be equal to or smaller than the length L2 of the inner diameter portion 80c.

[0043] Next, we will explain the impedance that occurs when a characteristic test of a terminal connector is performed using the probe 1 according to this embodiment. When the terminal contact portion 90a of the pin tip 90 comes into contact with the terminal connector to be tested, an electric line (referred to as the first electric line) is formed that runs from the terminal connector to the measurement connector 2 via the probe pin 9, inner tube 10, and coaxial cable 3. Meanwhile, an electric line (referred to as the second electric line) that is connected to a ground potential independent of the first electric line is formed in the plunger 7, housing 4, and flange 5.

[0044] Impedance occurs between the first and second electrical lines along the Z direction. This impedance is an important factor for improving the inspection accuracy of terminal connectors. The impedance varies depending on the distance between the first and second electrical lines and the materials present therebetween. For example, in FIG. 4, the inner cylinder 10 forming the first electrical line is separated by a predetermined distance from the inner wall of the non-press-fit portion 72a forming the second electrical line, and only air exists between the inner cylinder 10 and the inner wall of the non-press-fit portion 72a. On the other hand, the outer diameter portion 91a forming the first electrical line is separated by a distance smaller than the predetermined distance from the inner wall of the press-fit portion 72b forming the second electrical line, and air and the bushing 8 exist between the outer diameter portion 91a and the inner wall of the press-fit portion 72b. Therefore, the impedance between the inner cylinder 10 and the inner wall of the non-press-fit portion 72a is different from the impedance between the outer diameter portion 91a and the inner wall of the press-fit portion 72b.

[0045] To improve the inspection accuracy of terminal connectors, it is preferable that the impedance be maintained at a constant value in the Z direction. On the other hand, the impedance around the bushing 8 is more likely to change in the Z direction than the impedance around the inner cylinder 10 (i.e., the Z2 side). As described above, the impedance changes depending on the distance between the first and second electrical lines and the substances present therebetween, so the impedance around the bushing 8 changes depending on the dimensions of the bushing 8, the probe pin 9, and the plunger 7 in the planar direction.

[0046] In conventional probes, the bushing is inserted into the plunger with a loose fit. Therefore, the impedance around the bushing varies depending on the air gap between the bushing and the plunger, the planar dimensions of the bushing, and the air gap between the bushing and the probe pin. In other words, the impedance can vary depending on the dimensional tolerances of the plunger through-hole into which the bushing is inserted, the outer dimensions of the bushing, the inner diameter of the bushing, and the outer diameter of the probe pin. As a result, the impedance varies for each manufactured probe, making it difficult to improve the inspection accuracy of terminal connectors.

[0047] In this embodiment, the bushing 8 is press-fitted into the plunger through-hole 72 from the Z1 side, so there is no air gap between the bushing 8 and the inner wall of the press-fit portion 72b. That is, the impedance varies depending on the planar dimensions of the bushing 8 and the air gap between the bushing 8 and the probe pin 9. In other words, the impedance can vary depending on variations in the dimensional tolerances of the outer dimensions of the bushing 8, the inner diameter of the bushing 8, and the outer diameter of the probe pin 9. That is, in the probe 1 of this embodiment, there are fewer factors that affect the impedance around the bushing 8 than in conventional probes. As a result, it is possible to prevent impedance from varying between manufactured probes, making it easier to improve the inspection accuracy of terminal connectors.

[0048] Furthermore, if the impedance deviates from a predetermined value during the manufacture of the probe 1, it is possible to adjust the impedance by adjusting the press-fit amount of the bushing 8. That is, the impedance can be adjusted by moving the bushing 8 to the Z2 side or the Z1 side.

[0049] It is preferable that the impedance is uniform not only in the Z direction but also in the planar direction. In other words, to achieve uniform impedance, it is preferable that the central positions of the probe pin 9, the bushing 8, and the plunger through hole 72 coincide in a planar view. Furthermore, it is preferable that the radial distance between the probe pin 9 and the bushing 8 and the radial distance between the probe pin 9 and the inner wall of the plunger through hole 72 are as uniform as possible in the circumferential direction.

[0050] As described above, in this embodiment, the probe pin 9 is positioned relative to the bushing 8 by the inner wall of the guide portion 80b, so that the axial center of the probe pin 9 coincides with the center position of the bushing 8. Furthermore, since the center position of the plunger through hole 72 coincides with the center position of the bushing 8, the axial center of the probe pin 9 also coincides with the center position of the plunger through hole 72. That is, the probe 1 of this embodiment is likely to achieve uniform impedance in the planar direction.

[0051] Furthermore, as described above, since the long side direction of the tip penetrating portion 80a coincides with the long side direction of the bushing 8, the long side direction of the pin tip portion 90 penetrating the tip penetrating portion 80a also coincides with the long side directions of the tip penetrating portion 80a and the bushing 8 (see FIG. 2, for example). As a result, the radial distance between the pin tip portion 90 and the inner wall of the tip penetrating portion 80a and the radial distance between the pin tip portion 90 and the inner wall of the plunger through hole 72 can be made as uniform as possible in the circumferential direction.

[0052] In addition, because the bushing 8, the plunger through hole 72, and the pin tip 90 have non-circular shapes in plan view, the bushing 8 and the probe pin 9 are prevented from rotating around the Z direction. As a result, for example, while the probe 1 is in use, it is possible to prevent the radial distance between the probe pin 9 and the plunger through hole 72 from changing. This makes it possible to maintain a constant impedance while the probe 1 is in use.

[0053] In order to keep the impedance constant in the Z direction, it is preferable that the positioning portion 91 of the probe pin 9, which has a large outer diameter, is housed in the bushing through-hole 80. In this embodiment, the length L1 of the outer diameter portion 91a is set to be equal to or less than the length L2 of the inner diameter portion 80c, so that the positioning portion 91 can be housed in the bushing through-hole 80.

[0054] With the above-described configuration, it is possible to manufacture a probe 1 capable of inspecting terminal connectors with high accuracy.

[0055] The probe 1 according to this embodiment has the following advantages.

[0056] (1) Probe 1 is a conductive probe pin 9 for inspecting the characteristics of the terminal connector by contacting the terminal connector; a conductive plunger 7 having a plunger through-hole 72 penetrating in the axial direction and accommodating a probe pin 9 in the plunger through-hole 72; A dielectric bushing 8 is press-fitted into a plunger through-hole 72 from a first side in the axial direction, which is a side where a probe pin 9 comes into contact with a terminal connector, and the bushing 8 is provided with a bushing through-hole 80 that penetrates the bushing 8 in the axial direction, and an inner wall of the bushing through-hole 80 holds the probe pin 9. Equipped with.

[0057] As a result, there is no air gap between the bushing 8 and the plunger 7, which reduces the factors that affect impedance. This makes it possible to prevent impedance differences between manufactured probes and facilitates improving the inspection accuracy of terminal connectors. Furthermore, since the impedance can be adjusted by adjusting the press-fit amount of the bushing 8, it is possible to prevent impedance differences between manufactured probes.

[0058] (2) The shape of the bushing 8 in plan view is non-circular.

[0059] As a result, the bushing 8 does not rotate relative to the plunger 7, so that the impedance can be maintained constant.

[0060] (3) The probe pin 9 has a pin tip 90 at the end of the first side that contacts the terminal connector, The bushing through-hole 80 has a first-side tip through-hole 80a through which the pin tip 90 passes, The pin tip portion 90 and the tip penetrating portion 80a have a non-circular shape in plan view.

[0061] As a result, the probe pin 9 does not rotate relative to the bushing 8, so that the impedance can be maintained constant.

[0062] (4) The shape of the tip penetrating portion 80a in a plan view and the shape of the bushing 8 in a plan view are oval, rectangular, or elliptical shapes that are similar to each other, The center position of the tip penetrating portion 80a in the planar direction coincides with the center position of the bushing 8 in the planar direction, The long side direction or the long axis direction of the tip penetrating portion 80 a coincides with the long side direction or the long axis direction of the bushing 8 .

[0063] As a result, the radial distance between the pin tip 90 penetrating the tip penetrating portion 80a and the inner wall of the press-fit portion 72b can be made as uniform as possible in the circumferential direction, which makes it easier to achieve uniform impedance in the planar direction.

[0064] (5) The probe pin 9 has a positioning portion 91 located on a second side opposite to the first side with respect to the pin tip portion 90, The positioning portion 91 has an outer diameter portion 91a on the second side and a first reduced diameter portion 91b whose outer diameter decreases at a constant rate from the outer diameter portion 91a toward the first side, The bushing through-hole 80 is located on the second side and has a guide portion 80b for positioning the probe pin 9, The guide portion 80b has a second reduced diameter portion 80d whose inner diameter decreases at a constant rate from the second side toward the first side, The inner wall of the second reduced diameter portion 80d abuts against the first reduced diameter portion 91b, thereby determining its position.

[0065] As a result, the axial center of the probe pin 9 coincides with the center position of the bushing 8, making it easier to achieve uniform impedance in the planar direction.

[0066] (6) The positioning portion 91 is housed inside the bushing through-hole 80 .

[0067] As a result, the impedance tends to be constant in the Z direction.

[0068] The probe according to the present disclosure is not limited to the configuration of the above embodiment, and various modifications are possible.

[0069] The taper angle of the first reduced diameter portion 91b does not have to match the taper angle of the second reduced diameter portion 80d.

[0070] The guide portion 80b may not have the inner diameter portion 80c. In that case, the second reduced diameter portion 80d extends to the end of the guide portion 80b on the Z2 side, and the positioning portion 91 of the probe pin 9 can be accommodated in the space defined by the second reduced diameter portion 80d.

[0071] The pin tip 90 may be cylindrical in shape.

[0072] [Note] The probe according to the present disclosure provides the following aspects.

[0073] [Aspect 1] a conductive probe pin for contacting the terminal connector to inspect the characteristics of the terminal connector; a conductive plunger having a plunger through-hole penetrating in an axial direction, the plunger through-hole accommodating the probe pin; a dielectric bushing that is press-fitted into the plunger through-hole from a first side in the axial direction, the first side being a side where the probe pin comes into contact with the terminal connector, the bushing having a bushing through-hole that penetrates the bushing in the axial direction, and an inner wall of the bushing through-hole that holds the probe pin; A probe comprising:

[0074] [Aspect 2] The bushing has a non-circular shape in a plan view. 2. The probe according to embodiment 1.

[0075] [Aspect 3] the probe pin has a pin tip portion at the end of the first side that contacts the terminal connector, the bushing through-hole has the first-side tip through-portion through which the pin tip portion passes, The pin tip portion and the tip penetrating portion have non-circular shapes in a plan view. 3. The probe according to embodiment 1 or 2.

[0076] [Aspect 4] the shape of the tip penetrating portion in a plan view and the shape of the bushing in a plan view are oval, rectangular, or elliptical shapes that are similar to each other, a center position of the tip penetrating portion in a planar direction coincides with a center position of the bushing in a planar direction, The long side direction or the long axis direction of the tip penetrating portion coincides with the long side direction or the long axis direction of the bushing. The probe according to embodiment 3.

[0077] [Aspect 5] the probe pin has a positioning portion located on a second side opposite to the first side with respect to the pin tip, the positioning portion has an outer diameter portion on the second side and a first reduced diameter portion whose outer diameter decreases at a constant rate from the outer diameter portion toward the first side, the bushing through-hole is located on the second side and has a guide portion for positioning the probe pin, the guide portion has a second reduced diameter portion whose inner diameter decreases at a constant rate from the second side toward the first side, an inner wall of the second reduced diameter portion abuts against the first reduced diameter portion to determine the position; 5. The probe according to any one of aspects 3 or 4.

[0078] [Aspect 6] The positioning portion is accommodated inside the bushing through hole. 6. The probe according to embodiment 5. [Explanation of symbols]

[0079] 1: Probe 7: Plunger 72: Plunger through hole 72a: Non-press-fit section 72b: Press-fit part 8: Bushing 80:Bushing through hole 80a:Tip penetration part 80b: Guide section 80c: Inner diameter part 80d: Second narrowing section 9: Probe pin 90: Pin tip 91: Positioning unit 91a: Outer diameter part 91b: 1st reduced diameter part

Claims

1. a conductive probe pin for contacting the terminal connector to inspect the characteristics of the terminal connector; a conductive plunger having a plunger through-hole penetrating in an axial direction, the plunger through-hole accommodating the probe pin; a dielectric bushing that is press-fitted into the plunger through-hole from a first side in the axial direction, the first side being a side where the probe pin comes into contact with the terminal connector, the bushing having a bushing through-hole that penetrates the bushing in the axial direction, and an inner wall of the bushing through-hole that holds the probe pin; A probe comprising:

2. The bushing has a non-circular shape in a plan view. The probe of claim 1 .

3. the probe pin has a pin tip portion at the end of the first side that contacts the terminal connector, the bushing through-hole has the first-side tip through-portion through which the tip portion of the pin passes, The pin tip portion and the tip penetrating portion have non-circular shapes in a plan view. The probe of claim 2 .

4. the shape of the tip penetrating portion in a plan view and the shape of the bushing in a plan view are oval, rectangular, or elliptical shapes that are similar to each other, a center position of the tip penetrating portion in a planar direction coincides with a center position of the bushing in a planar direction, The long side direction or the long axis direction of the tip penetrating portion coincides with the long side direction or the long axis direction of the bushing. The probe of claim 3 .

5. the probe pin has a positioning portion located on a second side opposite to the first side with respect to the pin tip portion, the positioning portion has an outer diameter portion on the second side and a first reduced diameter portion whose outer diameter decreases at a constant rate from the outer diameter portion toward the first side, the bushing through-hole is located on the second side and has a guide portion for positioning the probe pin, the guide portion has a second reduced diameter portion whose inner diameter decreases at a constant rate from the second side toward the first side, an inner wall of the second reduced diameter portion abuts against the first reduced diameter portion to determine the position; 5. The probe according to claim 3 or 4.

6. The positioning portion is accommodated inside the bushing through hole. The probe of claim 5 .

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