Sensor

Abstract

To provide a sensor capable of improving characteristics.SOLUTION: According to one embodiment, a sensor includes a base body, a first structure fixed to the base body, and a first detection part. A second direction from the first structure body toward the first detection part crosses a first direction from the base body toward the first detection part. The first detection part includes a first element part including a first conductive member and a first other conductive member. The first structure body overlaps the first element part in the second direction.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD OF THE INVENTION An embodiment of the present invention relates to a sensor. [Background technology]

[0002] For example, there are sensors using MEMS (Micro Electro Mechanical Systems) elements, etc. Improvement of the characteristics of sensors is desired. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2022-188341 Summary of the Invention [Problem to be solved by the invention]

[0004] The embodiments provide sensors that allow for improved performance. [Means for solving the problem]

[0005] According to an embodiment, the sensor includes a base, a first structure fixed to the base, and a first detection unit. A second direction from the first structure to the first detection unit intersects with a first direction from the base to the first detection unit. The first detection unit includes a first element unit including a first conductive member and a first other conductive member. The first structure overlaps with the first element unit in the second direction. [Brief explanation of the drawings]

[0006] [Figure 1] FIG. 1 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 2] 2(a) to 2(c) are schematic cross-sectional views illustrating the sensor according to the first embodiment. [Figure 3]3A and 3B are schematic cross-sectional views illustrating the sensor according to the first embodiment. [Figure 4] FIG. 4 is a schematic plan view illustrating a part of the sensor according to the first embodiment. [Figure 5] FIG. 5 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 6] FIG. 6 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 7] 7(a) to 7(c) are schematic cross-sectional views illustrating the sensor according to the first embodiment. [Figure 8] FIG. 8 is a schematic plan view illustrating the sensor according to the second embodiment. [Figure 9] 9(a) to 9(d) are schematic cross-sectional views illustrating the sensor according to the second embodiment. [Figure 10] FIG. 10 is a schematic cross-sectional view illustrating the sensor according to the third embodiment. [Figure 11] FIG. 11 is a schematic cross-sectional view illustrating the sensor according to the third embodiment. [Figure 12] FIG. 12 is a schematic plan view illustrating the sensor according to the fourth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as those in reality. Even when the same part is shown, the dimensions and ratios may be different depending on the drawing. In this specification and in each drawing, elements similar to those previously described with reference to the previous drawings are designated by the same reference numerals, and detailed descriptions thereof will be omitted where appropriate.

[0008] (First embodiment) FIG. 1 is a schematic plan view illustrating the sensor according to the first embodiment. 2(a) to 2(c) are schematic cross-sectional views illustrating the sensor according to the first embodiment. Fig. 2(a) is a cross-sectional view taken along line Y1-Y2 in Fig. 1. Fig. 2(b) is a cross-sectional view taken along line Y3-Y4 in Fig. 1. Fig. 2(c) is a cross-sectional view taken along line Y5-Y6 in Fig. 1. 3A and 3B are schematic cross-sectional views illustrating the sensor according to the first embodiment. Fig. 3(a) is a cross-sectional view taken along line X1-X2 in Fig. 1. Fig. 3(b) is a cross-sectional view taken along line X3-X4 in Fig. 1. FIG. 4 is a schematic plan view illustrating a part of the sensor according to the first embodiment. 5 and 6 are schematic plan views illustrating the sensor according to the first embodiment.

[0009] The sensor 110 according to the embodiment includes a base 50s, a first structure 61, and a first detection unit 91. The first structure 61 is fixed to the base 50s. A second direction D2 from the first structure 61 to the first detection unit 91 intersects with a first direction D1 from the base 50s to the first detection unit 91.

[0010] The first direction D1 is the Z-axis direction. A direction perpendicular to the Z-axis direction is the X-axis direction. A direction perpendicular to the Z-axis direction and the X-axis direction is the Y-axis direction. The second direction D2 is, for example, the X-axis direction.

[0011] The first detection section 91 includes a first element section 10A. The first element section 10A includes a first conductive member 11 and a first other conductive member .

[0012] As shown in FIG. 2(b), the first structure 61 overlaps with the first element portion 10A in the second direction D2.

[0013] As shown in FIG. 3(a), for example, a first other current iA1 is supplied to the first other conductive member 21. At this time, the state of the detection object around the first element unit 10A is detected based on a value corresponding to the change in the first electrical resistance of the first conductive member 11. The first other current iA1 increases the temperature of the first element unit 10A. This changes the first electrical resistance R1 of the first conductive member 11. The temperature of the first element unit 10A changes depending on the state of the detection object. This is due to, for example, changes in heat dissipation depending on the state of the detection object.

[0014] The detection target is, for example, a gas. The detection target is, for example, hydrogen. The state of the detection target is, for example, the concentration of the detection target (for example, the concentration of hydrogen). When the first other current iA1 is supplied, the temperature of the first element unit 10A is affected by the flow rate of the detection target. The heat dissipation property changes depending on the change in the flow rate.

[0015] In the embodiment, the above-described first structure 61 is provided. The first structure 61 overlaps with the first element unit 10A in the second direction D2. The first structure 61 functions as a wall that reduces the flow of the detection target. The first structure 61 appropriately controls the direction of the flow of the detection target. The flow of the detection target passes, for example, above the first element unit 10A and at a position away from the first element unit 10A. The influence of the flow velocity can be suppressed. For example, the concentration of the detection target can be detected more accurately. A sensor capable of improving characteristics can be provided.

[0016] As shown in FIG. 2(b), the first structure 61 has a first structure height H61 relative to the base 50s. The first structure height H61 is a length along the first direction D1. The first element unit 10A has a first element unit height H1 relative to the base 50s. In the embodiment, the first structure height H61 is higher than the first element unit height H1. This can more effectively suppress the influence of the flow velocity of the detection target.

[0017] In this example, the first element unit 10A is supported by a fixing portion (for example, the first fixing portion 31). The fixing portion (for example, the first fixing portion 31) is fixed to a base 50s. The fixing portion (for example, the first fixing portion 31) supports the first element unit 10A. A first gap g1 is provided between the base 50s and the first element unit 10A. For example, the temperature of the first element unit 10A changes in accordance with changes in the gas thermal conductivity of the first gap g1. High-precision detection is possible.

[0018] In this example, the first element unit 10A is supported by a plurality of fixing portions (first fixing portion 31, second fixing portion 32, fourth fixing portion 34, and fifth fixing portion 35). The first detection unit 91 includes a plurality of fixing portions (first fixing portion 31, second fixing portion 32, fourth fixing portion 34, and fifth fixing portion 35). As shown in FIG. 2(b), the fixing portion (fifth fixing portion 35 in FIG. 2(b)) that supports the first element unit 10A has a fixing portion height (fifth fixing portion height H35) based on the base 50s. The first structure height H61 of the first structure 61 based on the base 50s may be higher than the fixing portion height (fifth fixing portion height H35). This makes it possible to more effectively suppress the influence of the flow velocity of the detection target.

[0019] 4, the first structure 61 includes a first structure fixing portion 61a, a first structure protruding portion 61b, and a first structure connecting portion 61c. The first structure fixing portion 61a is fixed to the base 50s. The first structure connecting portion 61c is provided between the first structure fixing portion 61a and the first structure protruding portion 61b. The first structure connecting portion 61c connects the first structure protruding portion 61b to the first structure fixing portion 61a.

[0020] In the first direction D1, a first structure gap ga1 is present between the base 50s and the first structure protrusion 61b. The position of the first structure protrusion 61b in the second direction D2 is between the position of the first structure fixing portion 61a in the second direction D2 and the position of the first detection portion 91 in the second direction D2.

[0021] By providing the first structure protrusion 61b located above the first structure gap ga1, the flow of the detection target can be controlled more effectively.

[0022] As shown in FIG. 4, the first structure protrusion 61b includes a first end p1 and a first intermediate portion q1. The first intermediate portion q1 is located between the first structure connection portion 61c and the first end p1. A first end height Hp1 of the first end p1 relative to the base 50s is higher than a first intermediate portion height Hq1 of the first intermediate portion q1 relative to the base 50s. The first structure protrusion 61b is inclined with respect to the Z-axis direction. This first structure protrusion 61b more effectively controls the flow of the detection target. The concentration of the detection target can be detected with higher accuracy. The first end height Hp1 may correspond to the first structure height H61.

[0023] As shown in FIG. 4, the first structure 61 includes a first insulating layer 61i and a first layer 61L. The first layer 61L overlaps the first insulating layer 61i. The material of the first layer 61L is different from the material of the first insulating layer 61i. The different materials of the first insulating layer 61i and the first layer 61L generate stress. The stress may result in a slope of the first structure protrusion 61b.

[0024] In one example, the first layer 61L may contain the same material as the material of the first other conductive member 21. The order of the first insulating layer 61i and the first layer 61L is arbitrary. For example, the first layer 61L may be provided on the first insulating layer 61i.

[0025] For example, the first layer 61L may include a compressive strain or a tensile strain, which effectively obtains the inclination of the first structure protrusion 61b.

[0026] 1, the sensor 110 may further include a second structure 62. The second structure 62 is fixed to the base 50s. The first detection unit 91 is located between the first structure 61 and the second structure 62 in the second direction D2. As shown in FIG. 4, the second structure 62 overlaps with the first detection unit 91 in the second direction D2.

[0027] 2(b), the second structure 62 has a second structure height H62 relative to the base 50s. The first element portion 10A has a first element portion height H1 relative to the base 50s. The second structure height H62 is greater than the first element portion height H1.

[0028] As already explained, the first detection unit 91 includes a fixing portion (such as the fourth fixing portion 34 in the example of FIG. 4). The fixing portion (such as the fourth fixing portion 34 in the example of FIG. 4) is fixed to the base 50s and supports the first element unit 10A. The fixing portion has a fixing portion height (such as the fourth fixing portion height H34) based on the base 50s. The second structure 62 has a second structure height H62 based on the base 50s. For example, the second structure height H62 is higher than the fixing portion height (such as the fourth fixing portion height H34). For example, the flow of the detection target can be effectively controlled. The influence of flow velocity can be suppressed.

[0029] 4, the second structure 62 may include a second structure fixing portion 62a, a second structure protruding portion 62b, and a second structure connecting portion 62c. The second structure fixing portion 62a is fixed to the base 50s. The second structure connecting portion 62c is provided between the second structure fixing portion 62a and the second structure protruding portion 62b. The second structure connecting portion 62c connects the second structure protruding portion 62b to the second structure fixing portion 62a.

[0030] A second structure gap ga2 exists between the base 50s and the second structure protruding portion 62b in the first direction D1. For example, the position of the second structure protruding portion 62b in the second direction D2 is between the position of the first detection portion 91 in the second direction D2 and the position of the second structure fixing portion 62a in the second direction D2.

[0031] By providing the second structure protrusion 62b located above the second structure gap ga2, the flow of the detection target can be controlled more effectively.

[0032] The second structure protrusion 62b includes a second end p2 and a second intermediate portion q2. The second intermediate portion q2 is located between the second structure connection portion 62c and the second end p2. A second end height Hp2 of the second end p2 relative to the base 50s may be higher than a second intermediate portion height Hq2 of the second intermediate portion q2 relative to the base 50s. The second structure protrusion 62b is inclined with respect to the Z-axis direction. Such a second structure protrusion 62b more effectively controls the flow of the detection target. The concentration of the detection target can be detected with higher accuracy. The second end height Hp2 may correspond to the second structure height H62.

[0033] 4, the second structure 62 includes a second insulating layer 62i and a second layer 62L. The second layer 62L overlaps the second insulating layer 62i. The material of the second layer 62L is different from the material of the second insulating layer 62i. The different materials of the second insulating layer 62i and the second layer 62L generate stress. The stress can result in a slope of the second structure protrusion 62b.

[0034] 1, the sensor 110 may further include a third structure 63 fixed to the base 50s and a fourth structure 64 fixed to the base 50s. The first detection unit 91 is located between the third structure 63 and the fourth structure 64 in the third direction D3. The third direction D3 intersects with a plane including the first direction D1 and the second direction D2. The third direction D3 may be, for example, the Y-axis direction.

[0035] For example, at least one of the third structure 63 and the fourth structure 64 overlaps with the first detection portion 91 in the third direction D3. The third structure 63 and the fourth structure 64 can effectively control the flow of the detection target.

[0036] The first structure 61, the second structure 62, the third structure 63, and the fourth structure 64 may be formed, for example, from a layer that will become at least a part of the first detection unit 91. The structures can be obtained efficiently.

[0037] 3(a), for example, the third structure 63 includes a third structure fixing portion 63a, a third structure protruding portion 63b, and a third structure connecting portion 63c. The third structure fixing portion 63a is fixed to the base 50s. The third structure connecting portion 63c is provided between the third structure fixing portion 63a and the third structure protruding portion 63b. The third structure connecting portion 63c connects the third structure protruding portion 63b to the third structure fixing portion 63a.

[0038] In the first direction D1, a third structure gap ga3 is present between the base 50s and the third structure protruding portion 63b. The position of the third structure protruding portion 63b in the third direction D3 is between the position of the third structure fixing portion 63a in the third direction D3 and the position of the first detection portion 91 in the third direction D3.

[0039] 3(a), for example, the fourth structure 64 includes a fourth structure fixing portion 64a, a fourth structure protruding portion 64b, and a fourth structure connecting portion 64c. The fourth structure fixing portion 64a is fixed to the base 50s. The fourth structure connecting portion 64c is provided between the fourth structure fixing portion 64a and the fourth structure protruding portion 64b. The fourth structure connecting portion 64c connects the fourth structure protruding portion 64b to the fourth structure fixing portion 64a.

[0040] In the first direction D1, a fourth structure gap ga4 is present between the base 50s and the fourth structure protrusion 64b. The position of the fourth structure protrusion 64b in the third direction D3 is between the position of the fourth structure fixing portion 64a in the third direction D3 and the position of the first detection portion 91 in the third direction D3.

[0041] A third structure height H63 of the third structure 63 relative to the base 50s may be higher than the first element portion height H1. A fourth structure height H64 of the fourth structure 64 relative to the base 50s may be higher than the first element portion height H1.

[0042] The third structure 63 may have a third structure height H63 relative to the base 50s that is higher than the fixed portion height (for example, the fifth fixed portion height H35). The fourth structure 64 may have a fourth structure height H64 relative to the base 50s that is higher than the fixed portion height (for example, the fifth fixed portion height H35). This makes it possible to more effectively suppress the influence of the flow velocity of the detection target.

[0043] In the embodiment, the first detection unit 91 may include a base 50s, a first fixed portion 31, a second fixed portion 32, a third fixed portion 33, a fourth fixed portion 34, a first element portion 10A, and a second element portion 10B. The first detection unit 91 may further include a first connection portion 31c, a second connection portion 32c, a first other connection portion 31Ac, a third connection portion 33c, a fourth connection portion 34c, and a fourth other connection portion 34Ac.

[0044] The first fixed portion 31 is fixed to the base body 50s. The second fixed portion 32 is fixed to the base body 50s. The third fixed portion 33 is fixed to the base body 50s. The fourth fixed portion 34 is fixed to the base body 50s. The fifth fixed portion 35 is fixed to the base body 50s. The sixth fixed portion 36 is fixed to the base body 50s.

[0045] The first element portion 10A includes a first conductive member 11 and a first other conductive member 21. The second element portion 10B includes a second conductive member 12. The second element portion 10B may further include a second other conductive member 22.

[0046] The first connecting portion 31c is supported by the first fixing portion 31 and supports the first element portion 10A. The second connecting portion 32c is supported by the second fixing portion 32 and supports the first element portion 10A. The first other connecting portion 31Ac is supported by the first fixing portion 31 and supports the second element portion 10B. The third connecting portion 33c is supported by the third fixing portion 33 and supports the second element portion 10B. The fourth connecting portion 34c is supported by the fourth fixing portion 34 and supports the first element portion 10A. The fourth other connecting portion 34Ac is supported by the fourth fixing portion 34 and supports the second element portion 10B.

[0047] The first connection portion 31c and the second connection portion 32c are configured to pass a first current i1 flowing through the first conductive member 11. The first connection portion 31c is configured to pass a first other current iA1 flowing through the first other conductive member 21. In this example, the second connection portion 32c is configured to pass the first other current iA1.

[0048] The first other connection portion 31Ac is configured to pass the second current i2 that flows through the second conductive member 12. In this example, the third connection portion 33c is configured to pass the second current i2.

[0049] The sensor 110 may be provided with a control unit 70. The control unit 70 may be included in the sensor 110. The control unit 70 may also be provided separately from the sensor 110. The control unit 70 is configured to supply the above current. The control unit 70 is configured to apply a voltage corresponding to the above current.

[0050] For example, the control unit 70 is configured to supply a first current i1 to the first conductive member 11. The control unit 70 is configured to supply a first other current iA1 to the first other conductive member 21. The control unit 70 is configured to supply a second current i2 to the second conductive member 12.

[0051] In the first detection unit 91, the state of the detection object around the first element unit 10A and the second element unit 10B is detected by a value corresponding to the difference between the first electrical resistance of the first conductive member 11 when the first other current iA1 flows through the first other conductive member 21 and the second electrical resistance of the second conductive member 12.

[0052] For example, when a first other current iA1 flows through the first other conductive member 21, the temperature of the first element unit 10A rises. This causes a change in the first electrical resistance R1 of the first conductive member 11. The temperature of the first element unit 10A changes depending on the state of the detection object. This is thought to be due to, for example, changes in heat dissipation depending on the state of the detection object. On the other hand, the temperature of the second element unit 10B does not substantially change. For example, the second electrical resistance R2 of the second conductive member 12 is not substantially affected by the detection object.

[0053] For example, the first element unit 10A is a sensor element. The second element unit 10B is, for example, a reference element. By detecting the difference between the first electrical resistance R1 and the second electrical resistance R2, the state of the detection target can be detected with higher accuracy. The first detection unit 91 is, for example, a resistance change sensor. The control unit 70 may be configured to detect a signal (such as a voltage) obtained from the element unit. The control unit 70 may be configured to detect a value (signal) corresponding to the electrical resistance.

[0054] In the embodiment, the first element unit 10A is supported by the first connecting portion 31c, the second connecting portion 32c, and the fourth connecting portion 34c. As described above, the first current i1 flowing through the first conductive member 11 flows through the first connecting portion 31c and the second connecting portion 32c. The first other current iA1 flowing through the first other conductive member 21 flows through the first connecting portion 31c and the second connecting portion 32c. The first element unit 10A is supported by the fourth connecting portion 34c in addition to the two connecting portions that form the current path. This allows the first element unit 10A to be supported more stably.

[0055] In the embodiment, the second element unit 10B is supported by the first other connection portion 31Ac, the third connection portion 33c, and the fourth other connection portion 34Ac. As described above, the second current i2 flowing through the second conductive member 12 flows through the first other connection portion 31Ac and the third connection portion 33c. The second element unit 10B is supported by the fourth other connection portion 34Ac in addition to the two connection portions that form the current path. This allows the second element unit 10B to be supported more stably.

[0056] In the embodiment, the first element portion 10A and the second element portion 10B are stably supported. The characteristics of the first element portion 10A and the second element portion 10B are stable. The signals obtained from the first element portion 10A and the second element portion 10B are stable. Stable, highly accurate detection results are obtained. According to the embodiment, a sensor capable of improving characteristics can be provided.

[0057] The first current i1, the first other current iA1, and the second current i2 do not pass through the fourth connecting portion 34c and the fourth other connecting portion 34Ac.

[0058] A first gap g1 is provided between the base body 50s and the first element portion 10 A. A second gap g2 is provided between the base body 50s and the second element portion 10 B. The first element portion 10A and the second element portion 10B have an MEMS structure.

[0059] A second direction D2 from the first fixed portion 31 to the third fixed portion 33 intersects with the first direction D1. A third direction D3 from the first fixed portion 31 to the second fixed portion 32 intersects with a plane including the first direction D1 and the second direction D2.

[0060] The first detection unit 91 may further include a fifth fixed portion 35, a sixth fixed portion 36, a fifth connecting portion 35c, and a sixth connecting portion 36c. The fifth fixed portion 35 is fixed to the base 50s. The sixth fixed portion 36 is fixed to the base 50s. The fifth connecting portion 35c is supported by the fifth fixed portion 35 and supports the first element unit 10A. The sixth connecting portion 36c is supported by the sixth fixed portion 36 and supports the second element unit 10B.

[0061] In this example, the direction from the fifth fixed portion 35 to the fourth fixed portion 34 is along the second direction D2. The direction from the sixth fixed portion 36 to the fourth fixed portion 34 is along the third direction D3. For example, at least a portion of the first element portion 10A is between the fifth fixed portion 35 and the fourth fixed portion 34 in the second direction D2. For example, at least a portion of the second element portion 10B is between the sixth fixed portion 36 and the fourth fixed portion 34 in the third direction D3.

[0062] The first current i1, the first other current iA1, and the second current i2 do not pass through the fourth connection portion 34c, the fourth other connection portion 34Ac, the fifth connection portion 35c, and the sixth connection portion 36c.

[0063] The first element unit 10A is supported by two connection parts through which current passes and two connection parts through which current does not pass. By being supported by four connection parts, the first element unit 10A is supported more stably. The second element unit 10B is supported by two connection parts through which current passes and two connection parts through which current does not pass. By being supported by four connection parts, the second element unit 10B is supported more stably. The signals obtained from these element units become more stable. The characteristics are further improved.

[0064] In the embodiment, the fourth fixing portion 34 supports the fourth connecting portion 34c and the fourth other connecting portion 34Ac. For example, the fourth fixing portion 34 is shared by the first element portion 10A and the second element portion 10B. This allows the size of the first detection portion 91 to be reduced. For example, a small "footprint" can be obtained. For example, the distance between the first element portion 10A and the second element portion 10B can be shortened. For example, the temperature difference between these elements can be reduced. The difference in characteristics can be reduced.

[0065] The second element portion 10B may further include a second other conductive member 22. The second other conductive member 22 does not need to be supplied with a current.

[0066] The first element portion 10A may further include a first insulating member 11i. At least a portion of the first insulating member 11i is provided between the first conductive member 11 and the first other conductive member 21. The first element portion 10A is, for example, membrane-shaped.

[0067] The second element portion 10B may further include a second insulating member 12i. At least a portion of the second insulating member 12i is provided around the second conductive member 12. At least a portion of the second insulating member 12i may be provided between the second conductive member 12 and the second other conductive member 22. The second element portion 10B is, for example, membrane-shaped.

[0068] The sensor 110 may further include a first electrode 51, a first other electrode 51A, a second electrode 52, a second other electrode 52A, and a third electrode 53. The first electrode 51 is connected to a part of the first conductive member 11 via a first connection portion 31c. The first other electrode 51A is connected to a part of the first other conductive member 21 via the first connection portion 31c. The second electrode 52 is connected to another part of the first conductive member 11 via a second connection portion 32c. The second other electrode 52A is connected to another part of the first other conductive member 21 via the second connection portion 32c.

[0069] For example, the third electrode 53 is connected to a part of the second conductive member 12 via the third connection portion 33c. The first electrode 51 is connected to another part of the second conductive member 12 via the first other connection portion 31Ac. The above-mentioned current is supplied via these electrodes. The first detection unit 91 may further include a third other electrode 53A. The third other electrode 53A may be used when supplying a current to the second other conductive member 22, etc.

[0070] In this example, the first detection unit 91 further includes a seventh fixed portion 37, a third element portion 10C, a fourth element portion 10D, a third other connection portion 33Ac, a seventh connection portion 37c, a fourth opposing other connection portion 34Cc, a second other connection portion 32Ac, a seventh other connection portion 37Ac, and a fourth opposing other connection portion 34Dc.

[0071] The seventh fixed portion 37 is fixed to the base 50s. The third element portion 10C includes a third conductive member 13 and a third other conductive member 23. The fourth element portion 10D includes a fourth conductive member 14. The fourth element portion 10D may further include a fourth other conductive member 24.

[0072] The third other connecting portion 33Ac is supported by the third fixed portion 33 and supports the third element portion 10C. The seventh connecting portion 37c is supported by the seventh fixed portion 37 and supports the third element portion 10C. The fourth opposing connecting portion 34Cc is supported by the fourth fixed portion 34 and supports the third element portion 10C.

[0073] The second other connection portion 32Ac is supported by the second fixed portion 32 and supports the fourth element portion 10D. The seventh other connection portion 37Ac is supported by the seventh fixed portion 37 and supports the fourth element portion 10D. The fourth opposing other connection portion 34Dc is supported by the fourth fixed portion 34 and supports the fourth element portion 10D.

[0074] The third other connection portion 33Ac and the seventh connection portion 37c are configured to pass a third current i3 flowing through the third conductive member 13. The third other connection portion 33Ac and the seventh connection portion 37c are configured to pass a third other current iA3 flowing through the third other conductive member 23. The second other connection portion 32Ac and the seventh other connection portion 37Ac are configured to pass a fourth current i4 flowing through the fourth conductive member 14.

[0075] These currents may be provided by the controller 70. Voltages corresponding to these currents may be provided by the controller 70.

[0076] The third element unit 10C is supported by the fourth opposing connection unit 34Cc in addition to the two connection units that form the current path. This allows the third element unit 10C to be supported more stably. The fourth element unit 10D is supported by the fourth opposing other connection unit 34Dc in addition to the two connection units that form the current path. This allows the fourth element unit 10D to be supported more stably. This further improves the characteristics.

[0077] The first detection unit 91 may further include an eighth fixed portion 38, a ninth fixed portion 39, an eighth connecting portion 38c, and a ninth connecting portion 39c. The eighth fixed portion 38 is fixed to the base 50s. The ninth fixed portion 39 is fixed to the base 50s. The eighth connecting portion 38c is supported by the eighth fixed portion 38 and supports the third element unit 10C. The ninth connecting portion 39c is supported by the ninth fixed portion 39 and supports the fourth element unit 10D.

[0078] The current that flows through the third element unit 10C does not need to flow through the eighth connection unit 38c. The third element unit 10C is further supported by the eighth connection unit 38c, through which no current flows. This further stabilizes the third element unit 10C.

[0079] The current that flows through the fourth element unit 10D does not need to flow through the ninth connection portion 39c. The fourth element unit 10D is further supported by the ninth connection portion 39c, through which no current flows. This further stabilizes the fourth element unit 10D.

[0080] In the second direction D2, the fourth fixed portion 34 is provided between the fifth fixed portion 35 and the eighth fixed portion 38. In the second direction D2, the first element portion 10A is provided between the fifth fixed portion 35 and the fourth fixed portion 34. In the second direction D2, the third element portion 10C is provided between the fourth fixed portion 34 and the eighth fixed portion 38. In the second direction D2, the second element portion 10B is provided between the first fixed portion 31 and the third fixed portion 33. In the second direction D2, the fourth element portion 10D is provided between the second fixed portion 32 and the seventh fixed portion 37.

[0081] In the third direction D3, the fourth fixed portion 34 is provided between the sixth fixed portion 36 and the ninth fixed portion 39. In the third direction D3, the second element portion 10B is provided between the sixth fixed portion 36 and the fourth fixed portion 34. In the third direction D3, the fourth element portion 10D is provided between the fourth fixed portion 34 and the ninth fixed portion 39. In the third direction D3, the first element portion 10A is provided between the first fixed portion 31 and the second fixed portion 32. In the third direction D3, the third element portion 10C is provided between the third fixed portion 33 and the seventh fixed portion 37.

[0082] With this configuration, the four element portions can be efficiently provided in a small footprint area.

[0083] The first detection unit 91 may further include a third electrode 53, a third other electrode 53A, a fourth electrode 54, and a fourth other electrode 54A. The third electrode 53 is connected to a portion of the third other conductive member 13 via a third other connection portion 33Ac. The third other electrode 53A is connected to a portion of the third other conductive member 23 via a third other connection portion 33Ac.

[0084] The fourth electrode 54 is connected to another part of the third conductive member 13 via the seventh connection portion 37c. The fourth other electrode 54A is connected to another part of the third other conductive member 23 via the seventh connection portion 37c. The above-mentioned current is supplied via these electrodes.

[0085] For example, the state of the detection target around the third element unit 10C and the fourth element unit 10D is detected by a value corresponding to the difference between the third electrical resistance R3 of the third conductive member 13 and the fourth electrical resistance R4 of the fourth conductive member 14 when a third other current iA3 flows through the third other conductive member 23. For example, when the third other current iA3 flows through the third other conductive member 23, the temperature of the third element unit 10C rises. This causes the third electrical resistance R3 of the third conductive member 13 to change. The temperature of the third element unit 10C changes depending on the state of the detection target. This is thought to be due, for example, to changes in heat dissipation depending on the state of the detection target. On the other hand, for example, the temperature of the fourth element unit 10D does not substantially change. For example, the fourth electrical resistance R4 of the fourth conductive member 14 is not substantially affected by the detection target.

[0086] For example, the third element unit 10C is a sensor element. The fourth element unit 10D is a reference element. By detecting the difference between the third electrical resistance R3 and the fourth electrical resistance R4, the state of the detection target can be detected with higher accuracy.

[0087] The fourth fixed portion 34 is shared by the first element portion 10A, the second element portion 10B, the third element portion 10C, and the fourth element portion 10D, which allows the size of the first detection portion 91 to be reduced.

[0088] A third gap g3 is provided between the base body 50s and the third element portion 10C. A fourth gap g4 is provided between the base body 50s and the fourth element portion 10D. The third element portion 10C and the fourth element portion 10D have an MEMS structure.

[0089] The fourth element portion 10D may further include a fourth other conductive member 24. The fourth other conductive member 24 does not need to be supplied with a current.

[0090] The third element portion 10C may further include a third insulating member 13i. At least a portion of the third insulating member 13i is provided between the third conductive member 13 and the third other conductive member 23. The third element portion 10C has, for example, a membrane shape. The fourth element portion 10D may further include a fourth insulating member 14i. At least a portion of the fourth insulating member 14i is provided around the fourth conductive member 14. At least a portion of the fourth insulating member 14i may be provided between the fourth conductive member 14 and the fourth other conductive member 24. The fourth element portion 10D has, for example, a membrane shape.

[0091] The control unit 70 is configured to supply a third current i3 to the third conductive member 13. The control unit 70 is configured to supply a third other current iA3 to the third other conductive member 23. The control unit 70 is configured to supply a fourth current i4 to the fourth conductive member 14.

[0092] At least one of the first conductive member 11, the first other conductive member 21, and the second conductive member 12 may include at least one selected from the group consisting of Ti, Al, TiN, Pt, and Au. At least one of the third conductive member 13, the third other conductive member 23, and the fourth conductive member 14 may include at least one selected from the group consisting of Ti, Al, TiN, Pt, and Au.

[0093] At least one of the first conductive member 11, the first other conductive member 21, and the second conductive member 12 may have a meander structure. At least one of the third conductive member 13, the third other conductive member 23, and the fourth conductive member 14 may have a meander structure. In FIG. 1, these conductive members are depicted in a simplified form to make the drawing easier to understand.

[0094] In an embodiment, the detection target may be detected by a first detection result based on signals obtained from the first element unit 10A and the second element unit 10B. In an embodiment, the detection target may be detected by a second detection result based on signals obtained from the third element unit 10C and the fourth element unit 10D. The detection target may be detected based on the first detection result and the second detection result. In an embodiment, detection may be performed by applying a bridge circuit. Higher accuracy detection results can be obtained.

[0095] 5, for example, a voltage VB+ is applied to the second electrode 52. A voltage VB- is applied to the third electrode 53. In this example, the second electrode 52 is electrically connected to another part of the first conductive member 11 via the second connection portion 32c. The part of the first conductive member 11 is electrically connected to a part of the second conductive member 12 via the first connection portion 31c and the first other connection portion 31Ac. The other part of the second conductive member 12 is electrically connected to the third electrode 53 via the third connection portion 33c.

[0096] The first conductive member 11 and the second conductive member 12 are electrically connected in series. Voltages VB+ and VB- are applied to these conductive members. Currents based on these voltages flow through these conductive members. A first current i1 flows through the first conductive member 11. A second current i2 flows through the second conductive member 12. The first current i1 flowing through the first conductive member 11 flows through the second conductive member 12 as the second current i2. The second current i2 flowing through the second conductive member 12 flows through the first conductive member 11 as the first current i1. These currents correspond to currents for detecting the electrical resistance of these conductive members.

[0097] In this example, the second electrode 52 is electrically connected to a portion of the fourth conductive member 14 via the second other connection portion 32Ac. Another portion of the fourth conductive member 14 is electrically connected to a portion of the third conductive member 13 via the seventh connection portion 37c and the seventh other connection portion 37Ac. Another portion of the third conductive member 13 is electrically connected to the third electrode 53 via the third other connection portion 33Ac.

[0098] The fourth conductive member 14 and the third conductive member 13 are electrically connected in series. Voltages VB+ and VB- are applied to these conductive members. Currents based on these voltages flow through these conductive members. A third current i3 flows through the third conductive member 13. A fourth current i4 flows through the fourth conductive member 14. The third current i3 flowing through the third conductive member 13 flows through the fourth conductive member 14 as the fourth current i4. The fourth current i4 flowing through the fourth conductive member 14 flows through the third conductive member 13 as the third current i3. These currents correspond to currents for detecting the electrical resistance of these conductive members.

[0099] A first circuit including the first conductive member 11 and the second conductive member 12 is electrically connected in parallel with a circuit including the third conductive member 13 and the fourth conductive member 14. This forms a bridge circuit.

[0100] The first electrode 51 is electrically connected to a portion of the first conductive member 11 and a portion of the second conductive member 12. An output Vout- of the bridge circuit is obtained from the first electrode 51. The fourth electrode 54 is electrically connected to a portion of the third conductive member 13 and a portion of the fourth conductive member 14. Another output Vout+ of the bridge circuit is obtained from the fourth electrode 54.

[0101] As shown in FIG. 5, the first other electrode 51A is electrically connected to a portion of the first other conductive member 21. The second other electrode 52A is electrically connected to another portion of the first other conductive member 21. The third other electrode 53A is electrically connected to a portion of the third other conductive member 23. The fourth other electrode 54A is electrically connected to another portion of the third other conductive member 23. A voltage H- is applied to the first other electrode 51A and the third other electrode 53A. A voltage H+ is applied to the second other electrode 52A and the fourth other electrode 54A. These voltages cause other currents to flow through these other conductive members.

[0102] A first other current iA1 is supplied to the first other conductive member 21. The first element unit 10A is heated. A third other current iA3 is supplied to the third other conductive member 23. The third element unit 10C is heated. These currents correspond to the power for heating.

[0103] The first element portion 10A has a first element portion height H1 based on the base body 50s. The second element portion 10B has a second element portion height H2 based on the base body 50s. The third element portion 10C has a third element portion height H3 based on the base body 50s. The fourth element portion 10D has a fourth element portion height H4 based on the base body 50s.

[0104] Each of the first structure height H61, the second structure height H62, the third structure height H63, and the fourth structure height H64 may be higher than the element portion height.

[0105] The first fixing portion 31 has a first fixing portion height H31 based on the base body 50s. The second fixing portion 32 has a second fixing portion height H32 based on the base body 50s. The third fixing portion 33 has a third fixing portion height H33 based on the base body 50s. The fourth fixing portion 34 has a fourth fixing portion height H34 based on the base body 50s. The fifth fixing portion 35 has a fifth fixing portion height H35 based on the base body 50s. The sixth fixing portion 36 has a sixth fixing portion height H36 based on the base body 50s. The seventh fixing portion 37 has a seventh fixing portion height H37 based on the base body 50s. The eighth fixing portion 38 has an eighth fixing portion height H38 based on the base body 50s. The ninth fixing portion 39 has a ninth fixing portion height H39 based on the base body 50s.

[0106] Each of the first structure height H61, the second structure height H62, the third structure height H63, and the fourth structure height H64 may be higher than the above-mentioned fixed portion height.

[0107] 7(a) to 7(c) are schematic cross-sectional views illustrating the sensor according to the first embodiment. Fig. 7(a) is a cross-sectional view corresponding to the Y1-Y2 line in Fig. 1. Fig. 7(b) is a cross-sectional view corresponding to the Y3-Y4 line in Fig. 1. Fig. 7(c) is a cross-sectional view corresponding to the Y5-Y6 line in Fig. 1. In these figures, the above-mentioned structures are omitted. As shown in these figures, in the sensor 111 according to this embodiment, the first element portion 10A further includes a first film 11f. Except for this, the configuration of the sensor 111 may be similar to the configuration of the sensor 110.

[0108] In this example, the first conductive member 11 is provided between the substrate 50s and the first film 11f. The first film 11f contains, for example, at least one selected from the group consisting of Pt and Pd. These materials function, for example, as a catalyst. Higher sensitivity can be obtained.

[0109] The second element portion 10B may further include a second film 12f. In this example, the second conductive member 12 is provided between the base body 50s and the second film 12f. The second film 12f includes, for example, at least one selected from the group consisting of Pt and Pd.

[0110] The third element portion 10C may further include a third film 13f. For example, the third conductive member 13 is provided between the base body 50s and the third film 13f. The third film 13f includes, for example, at least one selected from the group consisting of Pt and Pd.

[0111] The fourth element portion 10D may further include a fourth film 14f. For example, the fourth conductive member 14 is provided between the base body 50s and the fourth film 14f. The fourth film 14f includes, for example, at least one selected from the group consisting of Pt and Pd. The sensor 111 is, for example, a catalytic combustion type sensor.

[0112] The sensor according to the embodiment may include, for example, a thermal conduction type gas sensor. The sensor according to the embodiment may include, for example, a catalytic combustion type sensor. The sensor according to the embodiment may include, for example, an oxide semiconductor type sensor. The embodiment may be applied to any sensor in which the detection portion is heated.

[0113] (Second embodiment) FIG. 8 is a schematic plan view illustrating the sensor according to the second embodiment. 9(a) to 9(d) are schematic cross-sectional views illustrating the sensor according to the second embodiment. Fig. 9(a) is a cross-sectional view taken along line Y7-Y8 in Fig. 8. Fig. 9(b) is a cross-sectional view taken along line X5-X6 in Fig. 8. Fig. 9(c) is a cross-sectional view taken along line X7-X8 in Fig. 8. Fig. 9(d) is a cross-sectional view taken along line X9-X10 in Fig. 8.

[0114] 9, the sensor 120 according to the embodiment further includes a second detection unit 92 in addition to the first detection unit 91. The remaining configuration of the sensor 120 may be similar to that of the sensor 110 and the like.

[0115] In the second direction D2, the first structure 61 is located between the second detection portion 92 and the first detection portion 91. The second detection portion 92 includes a second detection element portion 18D. The second detection element portion 18D includes a first resistance member 18a, a second resistance member 18b, and an intermediate conductive member 18c. The first structure 61 overlaps with the second detection portion 92 in the second direction D2. For example, the first structure 61 overlaps with the second detection element portion 18D in the second direction D2.

[0116] The position of the intermediate conductive member 18c in the second direction D2 (intermediate conductive member position) is between the position of the first resistance member 18a in the second direction D2 (first resistance member position) and the position of the second resistance member 18b in the second direction D2 (second resistance member position).

[0117] In the second detection unit 92, for example, an intermediate conductive member current i18c is supplied to the intermediate conductive member 18c. This causes the temperature of the second detection element unit 18D to rise. Meanwhile, the object to be detected passes around the intermediate conductive member 18c along the second direction D2. The first resistance member 18a is located upstream of the flow of the object to be detected. The second resistance member 18b is located downstream of the flow of the object to be detected. A temperature difference occurs between these resistance members depending on the flow of the object to be detected. The temperature difference can be detected by the electrical resistance of each of these resistance members. The temperature difference depends on the flow speed of the object to be detected.

[0118] For example, when an intermediate conductive member current i18c is supplied to the intermediate conductive member 18c, a second signal corresponding to the flow velocity of the detection object passing around the second detection unit 92 is detected from the difference between the first resistance of the first resistance member 18a and the second resistance of the second resistance member 18b. The second detection unit 92 is, for example, a flow velocity sensor.

[0119] The first resistive element electrical resistance of the first resistive element 18a may be detected by the control unit 70. The second resistive element electrical resistance of the second resistive element 18b may be detected by the control unit 70. The difference between these electrical resistances may be detected by the control unit 70.

[0120] The detection result of the first detection unit 91 may be corrected by the detection result of the second detection unit 92. The detection result of the second detection unit 92 may be corrected by the detection result of the first detection unit 91.

[0121] As already described, a first signal corresponding to the concentration of the detection target around the first detection unit 91 may be detected from a value corresponding to a change in the first electrical resistance R1 of the first conductive member 11 when the first other current iA1 flows through the first other conductive member 21. The value corresponding to the change in the first electrical resistance R1 may include the difference between the first electrical resistance R1 and the second electrical resistance R2.

[0122] The control unit 70 may be configured to perform, for example, at least one of a first operation and a second operation. The first operation includes correcting the first signal based on the second signal. The second operation includes correcting the second signal based on the first signal. This allows for more accurate detection results.

[0123] As shown in FIGS. 8 and 9(a), the sensor 120 may further include a fifth structure 65. The fifth structure 65 is fixed to the base 50s. The second detection unit 92 is located between the fifth structure 65 and the first detection unit 91 in the second direction D2. The second detection unit 92 is located between the fifth structure 65 and the first structure 61 in the second direction D2. For example, a fifth structure height H65 of the fifth structure 65 relative to the base 50s may be lower than the first structure height H61. The detection target can pass around the second detection unit 92 while suppressing the influence on the flow of the detection target. The flow velocity can be detected more accurately.

[0124] The sensor 120 may further include a sixth structure 66. The sixth structure 66 is fixed to the base body 50s. The sixth structure 66 is located between the second detection unit 92 and the first structure 61 in the second direction D2. For example, a sixth structure height H66 of the sixth structure 66 relative to the base body 50s may be lower than the first structure height H61.

[0125] The sensor 120 may further include a seventh structure 67 and an eighth structure 68. The seventh structure 67 and the eighth structure 68 are fixed to the base 50s. The second detection unit 92 is located between the seventh structure 67 and the eighth structure 68 in the third direction D3.

[0126] The second detection unit 92 includes a plurality of fixed portions (fixed portion 19a, fixed portion 19b, fixed portion 19c, fixed portion 19d, fixed portion 19e, and fixed portion 19f). The second detection element unit 18D may be supported by these fixed portions. The direction from fixed portion 19a to fixed portion 19b is along the third direction D3. The direction from fixed portion 19c to fixed portion 19d is along the third direction D3. The direction from fixed portion 19e to fixed portion 19f is along the third direction D3. A connection portion may be provided between each of these fixed portions and the second detection element unit 18D. The connection portion may have a meandering structure.

[0127] A gap gb1 may be provided between the base body 50s and the second detection element portion 18D.

[0128] The fixed portion 19a has a fixed portion height H19a based on the base body 50s. The fixed portion 19b has a fixed portion height H19b based on the base body 50s. The fixed portion 19c has a fixed portion height H19c based on the base body 50s. The fixed portion 19d has a fixed portion height H19d based on the base body 50s. The fixed portion 19e has a fixed portion height H19e based on the base body 50s. The fixed portion 19f has a fixed portion height H19f based on the base body 50s.

[0129] The seventh structure 67 has a seventh structure height H67 based on the base body 50s. The eighth structure 68 has an eighth structure height H68 based on the base body 50s. These structure heights may be lower than the fixing portion heights H19a to H19f.

[0130] (Third embodiment) 10 and 11 are schematic cross-sectional views illustrating the sensor according to the third embodiment. 10, the sensor 130 according to the embodiment includes a housing 58. The remaining configuration of the sensor 130 may be the same as the configuration of the sensor 110, the sensor 111, or the sensor 120.

[0131] The housing 58 includes a first opening 59a and a second opening 59b. The detection device 10X, including the first structure 61, the first detection unit 91, and the second detection unit 92, is placed in the space inside the housing 58. In this example, the housing 58 includes a first housing member 58a, a second housing member 58b, a third housing member 58c, and a fourth housing member 58d. The direction from the first housing member 58a to the second housing member 58b is along the first direction D1. The direction from the third housing member 58c to the fourth housing member 58d is along the second direction D2.

[0132] In the example of the sensor 130 shown in FIG. 10, the first opening 59a and the second opening 59b are provided in the second housing member 58b.

[0133] The position of the detection device 10X in the second direction D2 is between the position of the first opening 59a in the second direction D2 and the position of the second opening 59b in the second direction D2. For example, the detection target (e.g., gas) is introduced into the housing 58 through the first opening 59a. The detection target passes through the space around the second detection unit 92 and the first detection unit 91 and is discharged from the second opening 59b. The flow of the detection target is effectively controlled by the first structure 61.

[0134] 11 , the first opening 59a is provided in the third housing member 58c. Alternatively, the first opening 59a is provided between the third housing member 58c and the second housing member 58b. The second opening 59b is provided in the fourth housing member 58d. Alternatively, the second opening 59b is provided between the fourth housing member 58d and the second housing member 58b. In the sensor 131 as well, the flow of the object to be detected is effectively controlled by the first structure 61.

[0135] (Fourth embodiment) FIG. 12 is a schematic plan view illustrating the sensor according to the fourth embodiment. As shown in FIG. 12, a sensor 210 according to the embodiment includes a sensor according to the first to third embodiments (for example, the sensor 110) and other sensors. The other sensors include at least one of a capacitive gas sensor 141 (for example, a capacitive hydrogen sensor), a capacitive humidity sensor 142, an oxide semiconductor sensor 143, a gas flow sensor 144, and a catalytic combustion sensor 145. The sensor according to the first embodiment (for example, the sensor 110) includes, for example, a thermal conduction gas sensor. The sensor 210 is, for example, a sensor system. The gas flow sensor 144 may be the second detection unit 92. The other sensors may include a temperature sensor or the like.

[0136] Various types of sensors may be provided in the sensor 210. Highly accurate and convenient sensors may be provided. In an embodiment, the detection results of one sensor of a different type may be used to correct the detection results of two other sensors.

[0137] The embodiments may include the following technical solutions. (Technical proposal 1) a substrate; a first structure fixed to the substrate; A first detection unit; Equipped with a second direction from the first structure to the first detection unit intersects with a first direction from the base to the first detection unit, the first detection unit includes a first element unit including a first conductive member and a first other conductive member; The sensor, wherein the first structure overlaps with the first element portion in the second direction.

[0138] (Technical proposal 2) the first structure has a first structure height based on the base, the first element portion has a first element portion height based on the base body, The sensor described in Technical Proposal 1, wherein the first structure height is higher than the first element portion height.

[0139] (Technical proposal 3) the first detection unit further includes a fixing unit fixed to the base and supporting the first element unit, the fixing portion has a fixing portion height based on the base body, the first structure has a first structure height based on the base, The sensor described in Technical Solution 1, wherein the height of the first structure is higher than the height of the fixed portion.

[0140] (Technical proposal 4) The first structure is a first structure fixing portion fixed to the base; a first structure protrusion; a first structure connecting portion provided between the first structure fixing portion and the first structure protruding portion and connecting the first structure protruding portion to the first structure fixing portion; Including, The sensor according to any one of Technical Schemes 1 to 3, wherein a first structure gap is present between the base and the first structure protrusion in the first direction.

[0141] (Technical proposal 5) The first structure protrusion is a first end; a first intermediate portion between the first structure connection portion and the first end portion; Including, The sensor described in Technical Solution 4, wherein the first end height of the first end relative to the base is higher than the first intermediate height of the first intermediate portion relative to the base.

[0142] (Technical proposal 6) The sensor described in Technical Solution 4 or 5, wherein the position of the first structure protrusion in the second direction is between the position of the first structure fixing portion in the second direction and the position of the first detection portion in the second direction.

[0143] (Technical proposal 7) The sensor according to any one of Technical Schemes 1 to 6, wherein the first structure includes a first insulating layer and a first layer overlapping the first insulating layer.

[0144] (Technical proposal 8) Further comprising a second structure fixed to the substrate; the first detection unit is located between the first structure and the second structure in the second direction, The sensor described in Technical Proposal 1, wherein the second structure overlaps with the first element portion in the second direction.

[0145] (Technical proposal 9) the second structure has a second structure height based on the base, the first element portion has a first element portion height based on the base body, The sensor described in Technical Proposal 8, wherein the second structure height is greater than the first element portion height.

[0146] (Technical proposal 10) the first detection unit further includes a fixing unit fixed to the base and supporting the first element unit, the fixing portion has a fixing portion height based on the base body, the second structure has a second structure height based on the base, The sensor described in Technical Proposal 8, wherein the second structure height is higher than the fixed portion height.

[0147] (Technical proposal 11) The second structure is a second structure fixing portion fixed to the base; a second structure protrusion; a second structure connecting portion provided between the second structure fixing portion and the second structure protruding portion, the second structure connecting portion connecting the second structure protruding portion to the second structure fixing portion; Including, The sensor according to any one of Technical Solutions 8 to 10, wherein a second structure gap is present between the base and the second structure protrusion in the first direction.

[0148] (Technical proposal 12) The second structure protrusion is A second end portion; a second intermediate portion between the second structure connection portion and the second end portion; Including, The sensor described in Technical Solution 11, wherein the second end height of the second end relative to the base is higher than the second intermediate height of the second intermediate portion relative to the base.

[0149] (Technical proposal 13) The sensor described in Technical Proposal 11 or 12, wherein the position of the second structure protruding portion in the second direction is between the position of the first detection portion in the second direction and the position of the second structure fixing portion in the second direction.

[0150] (Technical proposal 14) a third structure fixed to the substrate; a fourth structure fixed to the substrate; Furthermore, the first detection unit is located between the third structure and the fourth structure in a third direction; The sensor according to any one of Technical Schemes 8 to 13, wherein the third direction intersects with a plane including the first direction and the second direction.

[0151] (Technical proposal 15) A sensor described in any one of technical proposals 1 to 14, wherein the state of the detection object around the first element portion is detected based on a value corresponding to the change in the first electrical resistance of the first conductive member when a first other current is supplied to the first other conductive member.

[0152] (Technical proposal 16) Further comprising a second detection unit, In the second direction, the first structure is located between the second detection unit and the first detection unit, the second detection unit includes a second detection element unit including a first resistive member, a second resistive member, and an intermediate conductive member; the first structure overlaps with the second detection element portion in the second direction, The sensor described in Technical Solution 2 or 3, wherein the position of the intermediate conductive member in the second direction is between the position of the first resistive member in the second direction of the first resistive member and the position of the second resistive member in the second direction of the second resistive member.

[0153] (Technical proposal 17) Further comprising a fifth structure fixed to the substrate, the second detection unit is located between the fifth structure and the first detection unit in the second direction, The sensor described in Technical Solution 16, wherein the fifth structure height of the fifth structure relative to the base is lower than the first structure height.

[0154] (Technical proposal 18) The sensor described in Technical Proposal 16 or 17, wherein a second signal corresponding to the flow velocity of the object to be detected passing around the second detection unit is detected based on the difference between the first resistance element electrical resistance of the first resistance element and the second resistance element electrical resistance of the second resistance element when an intermediate conductive element current is supplied to the intermediate conductive element.

[0155] (Technical proposal 19) Further comprising a control unit, a first signal corresponding to the concentration of the target substance around the first detection unit is detected based on a value according to a change in a first electrical resistance of the first conductive member when a first other current flows through the first other conductive member; the control unit is configured to perform at least one of a first operation and a second operation; the first operation includes correcting the first signal based on the second signal; The sensor described in Technical Solution 18, wherein the second operation includes correcting the second signal based on the first signal.

[0156] (Technical proposal 20) further comprising a housing including a first opening and a second opening; a detection device including the first structure, the first detection unit, and the second detection unit is placed in a space inside the housing; A sensor described in any one of technical proposals 16 to 19, wherein the position of the detection device in the second direction is between the position of the first opening in the second direction and the position of the second opening in the second direction.

[0157] According to the embodiment, a sensor capable of improving characteristics can be provided.

[0158] The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configurations of the elements included in the sensor, such as the substrate, detection unit, and control unit, are within the scope of the present invention as long as a person skilled in the art can implement the present invention in a similar manner and obtain similar effects by appropriately selecting them from known ranges.

[0159] Furthermore, any combination of two or more elements of each specific example within the scope of technical feasibility is also included within the scope of the present invention as long as it includes the gist of the present invention.

[0160] In addition, all sensors that can be implemented by a person skilled in the art by appropriately modifying the design based on the sensor described above as an embodiment of the present invention also fall within the scope of the present invention as long as they include the gist of the present invention.

[0161] In addition, within the scope of the concept of the present invention, a person skilled in the art may come up with various modifications and alterations, and it will be understood that these modifications and alterations also fall within the scope of the present invention.

[0162] Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, and are also included in the scope of the invention and its equivalents as defined in the claims. [Explanation of symbols]

[0163] 10A to 10D: first to fourth element portions, 10X: detection device, 11 to 14: first to fourth conductive members, 11f to 14f: first to fourth films, 11i to 14i: first to fourth insulating members, 18D: second detection element portion, 18a, 18b: first and second resistance members, 18c: intermediate conductive member, 19a to 19f: fixing portion, 21 to 24: first to fourth other conductive members, 31 to 39: first to ninth fixing portions, 31Ac to 34Ac: first to fourth other connecting portions, 31c to 39c: first to ninth connecting portions, 34Cc: fourth opposing connecting portion, 34Dc: fourth opposing other connecting portion, 37Ac: seventh other connecting portion, 50s: base, 51 to 54: first to fourth electrodes, 51A to 54A: first to fourth other electrodes, 58: housing, 58a to 58d: first to fourth housing members, 59a, 59b: first and second openings, 61 to 68: first to eighth structures, 61L to 64L: first to fourth layers, 61a to 64a: first to fourth structure fixing portions, 61b to 64b: first to fourth structure protruding portions, 61c to 64c: first to fourth structure connecting portions, 61i, 62i: first and second insulating layers, 70: control unit, 91, 92: first and second detection units, 110, 111, 120, 130, 131, 210: sensors, 141: capacitive gas sensor, 142: capacitive humidity sensor, 143: temperature sensor, 144: gas flow sensor, 145: catalytic combustion type sensor, D1 to D3: 1st to 3rd directions, H+, H-: voltage, VB+, VB-: voltage, H1 to H4: 1st to 4th element part heights, H19a to H19f: fixing part height, H31 to H39: 1st to 9th fixing part heights, H61 to H68: 1st to 8th structure heights, Hp1, Hp2: 1st and 2nd end part heights, Hq1, Hq2: 1st and 2nd intermediate part heights, Vout+, Vout-: output, g1 to g4: 1st to 4th gaps, ga1 to ga4: 1st to 4th structure gaps, gb1: gap, i1 to i4: 1st to 4th currents, i18c: intermediate conductive member current, iA1, iA3: 1st and 3rd other currents, p1, p2: 1st and 2nd end parts, q1, q2: 1st, 2nd intermediate part

Claims

1. a substrate; a first structure fixed to the substrate; A first detection unit; Equipped with a second direction from the first structure to the first detection unit intersects with a first direction from the base to the first detection unit, the first detection unit includes a first element unit including a first conductive member and a first other conductive member; The sensor, wherein the first structure overlaps with the first element portion in the second direction.

2. the first structure has a first structure height based on the base, the first element portion has a first element portion height based on the base body, The sensor according to claim 1 , wherein the first structure height is greater than the first element portion height.

3. the first detection unit further includes a fixing unit fixed to the base and supporting the first element unit, the fixing portion has a fixing portion height based on the base body, the first structure has a first structure height based on the base, The sensor according to claim 1 , wherein the first structure height is greater than the fixed portion height.

4. The first structure is a first structure fixing portion fixed to the base; a first structure protrusion; a first structure connecting portion provided between the first structure fixing portion and the first structure protruding portion and connecting the first structure protruding portion to the first structure fixing portion; Including, The sensor of claim 1 , wherein a first structure gap is present between the base and the first structure protrusion in the first direction.

5. The first structure protrusion is A first end portion; a first intermediate portion between the first structure connection portion and the first end portion; Including, The sensor of claim 4 , wherein a first end height of the first end relative to the base is greater than a first middle height of the first middle portion relative to the base.

6. 5. The sensor according to claim 4, wherein a position of the first structure protrusion in the second direction is between a position of the first structure fixing portion in the second direction and a position of the first detection portion in the second direction.

7. The sensor of claim 1 , wherein the first structure includes a first insulating layer and a first layer overlying the first insulating layer.

8. A sensor as described in any one of claims 1 to 7, wherein the state of the detection object around the first element portion is detected based on a value corresponding to a change in the first electrical resistance of the first conductive member when a first other current is supplied to the first other conductive member.

9. Further comprising a second detection unit, In the second direction, the first structure is located between the second detection portion and the first detection portion, the second detection unit includes a second detection element unit including a first resistive member, a second resistive member, and an intermediate conductive member; the first structure overlaps with the second detection element portion in the second direction, 3. The sensor of claim 2, wherein the intermediate conductive member position in the second direction is between the first resistive member position in the second direction of the first resistive member and the second resistive member position in the second direction of the second resistive member.

10. Further comprising a control unit, a second signal corresponding to the flow velocity of the detection object passing around the second detection unit is detected based on the difference between the first resistance member electrical resistance of the first resistance member and the second resistance member electrical resistance of the second resistance member when an intermediate conductive member current is supplied to the intermediate conductive member; a first signal corresponding to the concentration of the target substance around the first detection unit is detected based on a value according to a change in a first electrical resistance of the first conductive member when a first other current flows through the first other conductive member; the control unit is configured to perform at least one of a first operation and a second operation; the first operation includes correcting the first signal based on the second signal; The sensor of claim 9 , wherein the second operation includes correcting the second signal based on the first signal.

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