Inspection method and inspection apparatus

Abstract

To improve detection accuracy of a defect of a specimen by suppressing reception of a diffracted wave by a reception part, in an inspection method for inspecting the specimen based on an ultrasonic wave transmitted through the specimen from a transmission part and received by a reception surface of the reception part when the specimen is positioned in a space between the transmission part and the reception part.SOLUTION: In the inspection method for inspecting the subject 100, the subject 100 is conveyed from the outside position OP1 toward the space S1 between the transmission unit 21 and the reception unit 22, the subject 100 is guided, and the subject 100 is inspected based on the ultrasonic waves after the length 22a in the space OP1 is made smaller than the length L2 in the outside position S1 with respect to the length between the reception surface L1 of the reception unit 22 and the subject 100 in the arrangement direction Z of the transmission unit 21 and the reception unit 22.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an inspection method and an ultrasonic inspection device. [Background technology]

[0002] Conventionally, there is an ultrasonic inspection device that has a transmitting unit that transmits ultrasonic waves toward an object to be inspected and a receiving unit that receives ultrasonic waves that have passed through the object to detect defects inside the object by analyzing the reception status of the ultrasonic waves at the receiving unit. Patent Document 1 discloses an ultrasonic inspection device in which an inspection unit having a transmitter and a receiver arranged at a predetermined interval is movable in the arrangement direction of the transmitters and receivers. In the ultrasonic inspection device of Patent Document 1, an object to be inspected being transported between the transmitter and receiver is pressed against a contact portion provided on the inspection unit, causing the inspection unit to move in the arrangement direction. As a result, the object to be inspected is guided to pass through a predetermined position between the transmitter and receiver, and change in the position of the object relative to the transmitter and receiver is suppressed. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2023-15965 Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the ultrasonic inspection device of Patent Document 1, the object passes through a position spaced apart from the receiving unit. Therefore, ultrasonic waves transmitted from the transmitting unit may bend around the outside of the edge of the object and reach the receiving unit, resulting in diffracted waves. The intensity of the diffracted waves received by the receiving unit is much greater than the intensity of ultrasonic waves that pass through the object and are received by the receiving unit, regardless of whether or not there is a defect in the object. Therefore, if the receiving unit receives diffracted waves that do not pass through the object, the accuracy of detecting defects inside the object will be reduced. For this reason, there is a need to suppress the reception of diffracted waves by the receiving unit.

[0005] The present invention has been made in consideration of the above-mentioned circumstances, and aims to provide an inspection method and an inspection apparatus for an object that can suppress the reception of diffracted waves by a receiving unit and improve the accuracy of detecting defects in the object. [Means for solving the problem]

[0006] A first aspect of the present invention is an inspection method having a transmitting unit that transmits ultrasonic waves and a receiving unit that is located with a space between it and the transmitting unit and receives the ultrasonic waves, and when the subject is located in the space, performs an inspection of the subject based on the ultrasonic waves that have passed through the subject from the transmitting unit and are received at the receiving surface of the receiving unit, the inspection method transporting the subject from an outer position of the space toward the space, guiding at least one of the subject and the receiving unit, and making the distance between the receiving surface and the subject in the arrangement direction of the transmitting unit and the receiving unit shorter in the space than the distance at the outer position, and then inspecting the subject based on the ultrasonic waves.

[0007] A second aspect of the present invention is an inspection device comprising: an inspection unit having a transmitting unit that transmits ultrasonic waves; and a receiving unit that is arranged with a space between it and the transmitting unit and receives the ultrasonic waves, and that inspects the subject based on the ultrasonic waves that pass through the subject from the transmitting unit and are received at the receiving surface of the receiving unit when the subject is located in the space; a transport unit that transports the subject from an outer position of the space toward the space; and a guidance unit that guides at least one of the subject and the receiving unit to make the distance between the receiving surface and the subject in the arrangement direction of the transmitting unit and the receiving unit shorter in the space after the subject has been transported into the space by the transport unit than the distance at the outer position. [Effects of the Invention]

[0008] According to the present invention, it is possible to suppress the reception of diffracted waves by the receiving section, thereby improving the detection accuracy of defects in the object under test. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a diagram schematically illustrating an inspection device according to a first embodiment. [Figure 2] FIG. 2 is a diagram explaining that, in the inspection device of FIG. 1, due to the large distance between the object and the receiving surface, among the ultrasonic waves transmitted from the transmitting unit, diffracted waves that go around the outside of the edge of the object reach the object. [Figure 3] FIG. 2 is a diagram explaining that, in the inspection device of FIG. 1, the distance between the object and the receiving surface is small, so that diffracted waves that go around the outside of the edge of the object among the ultrasonic waves transmitted from the transmitting unit do not reach the object. [Figure 4] FIG. 10 is a diagram schematically illustrating a first example of an inspection device according to a second embodiment. [Figure 5] FIG. 10 is a diagram schematically illustrating a second example of an inspection device according to a second embodiment. [Figure 6] FIG. 10 is a diagram schematically illustrating a third example of the inspection device according to the second embodiment. [Figure 7] FIG. 10 is a diagram schematically illustrating an inspection device according to a third embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] First Embodiment A first embodiment of the present invention will be described below with reference to FIGS. 1, the inspection device 1 uses ultrasound to inspect whether or not there is a defect 101 inside an object 100. The object 100 may be, for example, a retort pouch containing contents such as medical products or food, with the mouth of the pouch heat-sealed (melted and glued). In this case, the inspection device 1 inspects whether or not there is a defect 101, such as an air bubble, inside the heat-sealed portion of the object 100.

[0011] The inspection device 1 includes an inspection unit 2, a transport unit 3, and a guide unit 4. The inspection unit 2 has a transmitting unit 21 and a receiving unit 22. The transmitting unit 21 transmits ultrasonic waves toward the receiving unit 22. The receiving unit 22 is located with a space S1 between it and the transmitting unit 21. The receiving unit 22 also has a receiving surface 22a that receives the ultrasonic waves transmitted from the transmitting unit 21. When the subject 100 is located in the space S1, the inspection unit 2 inspects the subject 100 based on the ultrasonic waves transmitted from the transmitting unit 21 through the subject 100 and received by the receiving surface 22a of the receiving unit 22. In the following description, the direction in which the transmitters 21 and receivers 22 are aligned may be referred to as the arrangement direction Z.

[0012] The receiving section 22 of this embodiment has a receiving element unit 23 that constitutes the receiving surface 22a, and a block-shaped holder 24 that holds the receiving element unit 23. Although not shown, the receiving element unit 23 has a receiving element that receives ultrasonic waves. The receiving element unit 23 may have only one receiving element, but it is more preferable that it has multiple receiving elements. The multiple receiving elements may be arranged, for example, in an array (linear) along the receiving surface 22a, or in a matrix (vertical and horizontal) along the receiving surface 22a. Increasing the number of receiving elements enables the defect 101 to be detected with high accuracy.

[0013] The transport unit 3 transports the subject 100 from a position outside the space S1 (outside position OP1) toward the space S1. The specific configuration of the transport unit 3 may be arbitrary. The transport unit 3 in the illustrated example is composed of a pair of pinch rollers 31, 31. The pair of pinch rollers 31, 31 rotate with the subject 100 sandwiched between them, thereby transporting the subject 100 from the outside position OP1 toward the space S1. In the following description, the pair of pinch rollers 31, 31 constituting the transport unit 3 may be referred to as transport pinch rollers 31. In the drawing, the direction in which the subject 100 is transported by the transport unit 3 is indicated by an arrow X.

[0014] The guiding unit 4 guides the subject 100 toward the receiving surface 22a of the receiving unit 22. The guiding unit 4 makes the distance L1 in the space S1 after the subject 100 is transported to the space S1 by the transporting unit 3 shorter than the distance L2 at the outer position OP1, regarding the distance between the receiving surface 22a and the subject 100 in the arrangement direction Z of the transmitting unit 21 and the receiving unit 22.

[0015] The guiding unit 4 of this embodiment is an adsorption unit 41 that adsorbs the test object 100, which has been transported to the space S1 by the transport unit 3, onto the receiving surface 22a of the receiving unit 22 by air suction. The adsorption unit 41 is composed of a suction hole 411 formed in the receiving unit 22 and a suction pump 412 connected to the receiving unit 22. The suction hole 411 is formed in the holder 24 of the receiving unit 22 and opens on the surface of the holder 24 located adjacent to the receiving surface 22a (receiving element unit 23). The suction hole 411 may be arranged, for example, to surround the receiving surface 22a. Because the suction hole 411 opens at a position that avoids the receiving surface 22a, defects 101 in the test object 100 can be inspected with higher accuracy than when the suction hole 411 opens on the receiving surface 22a. The suction pump 412 sucks air into the suction holes 411. Note that the suction of air is not limited to the suction pump 412, and a vacuum ejector, for example, may also be used.

[0016] Next, a method for inspecting the subject 100 according to this embodiment will be described. 1, in the inspection method, the subject 100 is transported from an outer position OP1 toward a space S1 between the transmitter 21 and the receiver 22. At this time, the subject 100 is guided so that, regarding the distance between the subject 100 and the receiving surface 22a of the receiver 22 in the arrangement direction Z of the transmitter 21 and the receiver 22, the distance L1 in the space S1 is made smaller than the distance L2 at the outer position OP1. Then, when the subject 100 is located in the space S1, the subject 100 is inspected based on ultrasonic waves transmitted from the transmitter 21 through the subject 100 and received by the receiving surface 22a of the receiver 22. In the inspection method of this embodiment, the subject 100 transported from the outer position OP1 to the space S1 is attracted to the receiving surface 22a of the receiving unit 22 by the suction unit 41, thereby guiding the subject 100 and reducing the distance L1 between the subject 100 and the receiving surface 22a in the space S1. Specifically, the suction pump 412 starts operating, and air is sucked into the suction hole 411. The suction force of this air causes the subject 100 to be attracted to the receiving surface 22a of the receiving unit 22.

[0017] 1 to 3, the distance L1 between the subject 100 and the receiving surface 22a in the space S1 is preferably set to a distance such that diffracted waves DW1 that travel around the outside of the edge of the subject 100, among the ultrasonic waves W1 transmitted from the transmitting unit 21, do not reach a region 22a1 of the receiving surface 22a that overlaps with the subject 100 in the array direction Z. The upper limit of such distance L1 varies depending on the wavelength of the ultrasonic waves W1 transmitted from the transmitting unit 21. This point will be described below.

[0018] The upper limit of the distance L1 between the object 100 and the receiving surface 22a, which is the upper limit at which the diffracted wave DW1 does not reach the region 22a1 of the receiving surface 22a that overlaps with the object 100, is proportional to the wavelength of the ultrasonic wave W1 transmitted from the transmitter 21. Therefore, in order to prevent the diffracted wave DW1 from reaching the receiving surface 22a, the shorter the wavelength of the ultrasonic wave W1, the smaller the distance L1 between the object 100 and the receiving surface 22a must be. Conversely, the longer the wavelength of the ultrasonic wave W1, the greater the distance L1 between the object 100 and the receiving surface 22a, but the longer the wavelength of the ultrasonic wave W1, the more likely it is that the diffracted wave DW1 will not reach the receiving surface 22a. For example, if the frequency of the ultrasonic wave W1 is 800 kHz and the speed of sound is 340 m / s, that is, if the wavelength of the ultrasonic wave W1 is 0.425 mm, the upper limit of the distance L1 between the object 100 and the receiving surface 22a should be set to 0.45 mm, which prevents the diffracted wave DW1 from reaching the receiving surface 22a.

[0019] As described above, in the inspection device 1 and inspection method of the first embodiment, the distance between the inspection object 100 and the receiving surface 22a of the receiving unit 22 in the space S1 is reduced, and then the inspection of the inspection object 100 is performed. This makes it possible to prevent the receiving unit 22 from receiving the diffracted wave DW1. Therefore, it is possible to improve the detection accuracy of the defect 101 in the inspection object 100. This point will be described below with reference to FIGS. 2 and 3.

[0020] 2 and 3 are views of the inspection unit 2 as viewed from the transport direction of the subject 100 (the right side in FIG. 1). That is, in FIGS. 2 and 3, the subject 100 is transported in a direction perpendicular to the paper surface. FIGS. 2 and 3 schematically show the manner in which ultrasonic waves W1 are transmitted from the transmitter 21 to the receiver 22, and the intensity (amplitude) of the ultrasonic waves W1 received by the receiver 22, when the subject 100 is placed in the space S1 between the transmitter 21 and the receiver 22. FIG. 2 shows the manner in which the ultrasonic waves W1 propagate from the transmitter 21 to the receiver 22 when the distance L1 between the receiving surface 22a and the subject 100 is large. FIG. 3 shows the manner in which the ultrasonic waves W1 propagate from the transmitter 21 to the receiver 22 when the distance L1 between the receiving surface 22a and the subject 100 is small.

[0021] 2 and 3, the ultrasonic wave W1 transmitted from the transmitter 21 reaches the receiving surface 22a. The intensity (amplitude) of the ultrasonic wave W1 (transmitted wave PW) that has passed through the object 100 and reached the receiving surface 22a is smaller than the intensity (amplitude) of the ultrasonic wave W1 (direct wave DW) that has reached the receiving surface 22a without passing through the object 100. The intensity (amplitude) of the ultrasonic wave W1 that has passed through a portion of the object 100 where the defect 101 is present (transmitted wave PW2 from the defective portion) is smaller than the intensity (amplitude) of the ultrasonic wave W1 that has passed through a portion of the object 100 where the defect 101 is not present (transmitted wave PW1 from a normal portion).

[0022] 2, when the distance L1 between the object 100 in the space S1 and the receiving surface 22a of the receiving unit 22 is greater than the upper limit value described above, a diffracted wave DW1 with a large intensity (amplitude) reaches the region 22a1 of the receiving surface 22a that overlaps with the object 100. This increases the dynamic range of the waveform of the ultrasonic wave W1 received in the region 22a1 that overlaps with the object 100. As a result, it becomes difficult to determine whether the ultrasonic wave W1 (transmitted wave PW) that has passed through the object 100 has passed through a portion of the object 100 that has a defect 101. In other words, it becomes difficult to determine whether the transmitted wave PW2 is a transmitted wave PW2 from the defective portion or a transmitted wave PW1 from a normal portion.

[0023] On the other hand, as shown in Fig. 3, when the distance L1 between the object 100 in the space S1 and the receiving surface 22a of the receiving unit 22 is equal to or less than the upper limit value described above, the diffracted wave DW1 (see Fig. 2) with a large intensity (amplitude) does not reach the receiving surface 22a. Therefore, compared to when the diffracted wave DW1 reaches the region 22a1 of the receiving surface 22a that overlaps with the object 100, the dynamic range of the waveform of the ultrasonic wave W1 received in the region 22a1 that overlaps with the object 100 can be narrowed. This makes it easier to determine whether the ultrasonic wave W1 that has passed through the object 100 has passed through a portion of the object 100 where the defect 101 is present. Therefore, the detection accuracy of the defect 101 in the object 100 can be improved.

[0024] Furthermore, according to the inspection device 1 and inspection method of the first embodiment, the object 100 transported into the space S1 by the transport unit 3 is adsorbed onto the receiving surface 22a of the receiving unit 22 by the adsorption unit 41. This makes it possible to extremely reduce the distance L1 between the object 100 and the receiving surface 22a in the space S1. This prevents the receiving unit 22 from receiving the diffracted wave DW1.

[0025] Furthermore, in the inspection device 1 and inspection method of the first embodiment, the distance L1 between the object 100 and the receiving surface 22a in the space S1, which is smaller than the distance L2 (see FIG. 1) between the object 100 and the receiving surface 22a at the outer position OP1, is set to a distance such that the diffracted wave DW1 that travels around the outside of the edge of the object 100, among the ultrasonic waves W1 transmitted from the transmitting unit 21, does not reach the region 22a1 of the receiving surface 22a that overlaps with the object 100 in the array direction Z. This reliably prevents the receiving unit 22 from receiving the diffracted wave DW1. Therefore, the detection accuracy of the defect 101 in the object 100 can be improved.

[0026] Second Embodiment Next, a second embodiment of the present invention will be described with reference to Figures 4 to 6. In the following description, components common to those already described will be assigned the same reference numerals and redundant description will be omitted.

[0027] 4 to 6, the inspection devices 1C, 1D, and 1E of the second embodiment include, similarly to the first embodiment, an inspection unit 2, a transport unit 3, and a guidance unit 4. However, the guidance unit 4 of the second embodiment is a pressing unit 42 that presses the subject 100 transported by the transport unit 3 toward the inspection unit 2 so as to approach the receiving surface 22a of the receiving unit 22.

[0028] In the first example of the inspection apparatus 1C shown in FIG. 4, the pressing unit 42 is composed of a pair of pinch rollers 421, 421 (hereinafter also referred to as the front-side pinch roller 421) arranged adjacent to each other on the front side (left side in FIG. 4) of the inspection unit 2 in the transport direction of the specimen 100. The front-side pinch roller 421 constituting the pressing unit 42 is located between the transport unit 3 and the inspection unit 2. The position of the specimen 100 passing between the front-side pinch roller 421 is located closer to the receiving surface 22a in the arrangement direction Z than the position of the specimen 100 passing between the pair of pinch rollers 31, 31 (transport pinch rollers 31) constituting the transport unit 3. As a result, the specimen 100 transported by the transport unit 3 toward the inspection unit 2 is pressed by the front-side pinch roller 421 so as to approach the receiving surface 22a of the receiving unit 22.

[0029] In the second example of the inspection apparatus 1D shown in FIG. 5, the pressing unit 42 is configured by arranging pinch rollers 421, 422 on both the front and rear sides (left and right sides in FIG. 5) of the inspection unit 2 in the transport direction of the inspected object 100. The position of the inspected object 100 passing between a pair of pinch rollers 421, 421 (front pinch rollers 421) arranged on the front side of the inspection unit 2 and the position of the inspected object 100 passing between a pair of pinch rollers 422, 422 (hereinafter referred to as rear pinch rollers 422) arranged on the rear side of the inspection unit 2 are both located closer to the receiving surface 22a in the arrangement direction Z than the position of the inspected object 100 passing between the transport pinch rollers 31. In FIG. 5, the position of the inspected object 100 passing between the front pinch rollers 421 and the position of the inspected object 100 passing between the rear pinch rollers 422 are the same in the arrangement direction Z.

[0030] The front pinch rollers 421 press the test object 100 being transported by the transport unit 3 toward the inspection unit 2 so as to approach the receiving surface 22a of the receiver 22. The back pinch rollers 422 press the test object 100 so that the test object 100 passing through the front pinch rollers 421 and over the receiving surface 22a of the receiver 22 does not move away from the receiving surface 22a. Therefore, in the inspection apparatus 1D of the second example, the test object 100 being transported by the transport unit 3 toward the inspection unit 2 can be maintained in a state where it is positioned close to the receiving surface 22a of the receiver 22.

[0031] In the inspection device 1E of the third example shown in FIG. 6, the pressing unit 42 is configured by a support unit 423 and a guide unit 424 arranged between the transport unit 3 and the inspection unit 2. The support unit 423 has a support surface 423a that supports the subject 100 transported by the transport unit 3. The support surface 423a is flush with the receiving surface 22a in the arrangement direction Z.

[0032] The guide unit 424 has a guide surface 424a and a holding surface 424b that face the support surface 423a of the support unit 423 in the arrangement direction Z. The guide surface 424a and the holding surface 424b are aligned consecutively in this order in the transport direction of the subject 100. The guide surface 424a is inclined with respect to the support surface 423a so that the distance between the guide surface 424a and the support surface 423a of the support unit 423 decreases toward the transport direction of the subject 100. The guide surface 424a guides the subject 100 toward a gap between the support surface 423a and the holding surface 424b. The holding surface 424b is a surface parallel to the support surface 423a and extends from the guide surface 424a in the transport direction of the subject 100. The holding surface 424b holds the subject 100 between itself and the support surface 423a. The guide unit 424 may be a plate-shaped component as illustrated in FIG. 6, or may be a block-shaped component, for example.

[0033] In the pressing unit 42 of the third example, the guide surface 424a and the holding surface 424b of the guide portion 424 press the subject 100 transported from the transport unit 3 toward the inspection unit 2 so as to approach the receiving surface 22a. The support portion 423 constituting the pressing portion 42 of the third example may be formed integrally with the holding portion 24 of the receiving portion 22, for example.

[0034] As shown in Figures 4 to 6, in the inspection method for the subject 100 according to the second embodiment, as in the first embodiment, the subject 100 is transported from an outer position OP1 toward the space S1 between the transmitter 21 and the receiver 22, and the distance L1 in the space S1 between the receiving surface 22a of the receiver 22 and the subject 100 in the array direction Z is made smaller than the distance L2 at the outer position OP1. However, in the inspection method of the second embodiment, the subject 100 being transported from the outer position OP1 toward the space S1 is pressed closer to the receiving surface 22a by the pressing portion 42, thereby guiding the subject 100 and reducing the distance L1 between the subject 100 and the receiving surface 22a in the space S1.

[0035] According to the inspection devices 1C, 1D, and 1E and the inspection method of the second embodiment, the same effects as those of the first embodiment are achieved. In addition, in the inspection devices 1C, 1D, 1E and the inspection method of the second embodiment, the test object 100 transported from the outer position OP1 to the space S1 by the transport unit 3 can be reliably brought close to the receiving surface 22a of the receiving unit 22 by the pressing unit 42, thereby reducing the distance L1 between the test object 100 and the receiving surface 22a of the receiving unit 22.

[0036] Third Embodiment Next, a third embodiment of the present invention will be described with reference to Fig. 7. In the following description, components common to those already described will be assigned the same reference numerals and redundant description will be omitted.

[0037] 7, the inspection device 1F of the third embodiment includes an inspection unit 2, a transport unit 3, and a guidance unit 4, similar to the first and second embodiments. However, the guidance unit 4 of the third embodiment guides the receiving unit 22, and with regard to the distance between the receiving surface 22a of the receiving unit 22 and the subject 100 in the arrangement direction Z, the distance L1 between the subject 100 transported to the space S1 by the transport unit 3 and the receiving surface 22a of the receiving unit 22 is made smaller than the distance L2 at the outer position OP1.

[0038] The guidance unit 4 of the third embodiment is a moving unit 43 that moves the receiving unit 22 in the arrangement direction Z so that the position of the receiving surface 22a follows the position of the subject 100 in the arrangement direction Z. The moving unit 43 has a track 431, a position detection unit, a driving unit, and a control unit, none of which are shown. The track 431 extends in the arrangement direction Z. The receiving unit 22 is attached to the track 431 so as to be movable in the arrangement direction Z. The position detection unit detects the position of the subject 100 in the space S1 in the arrangement direction Z. The driving unit drives the receiving unit 22 to move along the track 431. The control unit controls the operation of the driving unit (i.e., the movement of the receiving unit 22) based on the position of the subject 100 detected by the position detection unit so that the receiving surface 22a of the receiving unit 22 approaches the position of the subject 100.

[0039] In the third embodiment of the method for inspecting the subject 100, the receiving unit 22 is guided toward the subject 100 being transported from the outer position OP1 toward the space S1, so that the distance L1 between the receiving surface 22a of the receiving unit 22 and the subject 100 in the space S1 is made smaller than the distance L2 at the outer position OP1. Specifically, for the subject 100 being transported from the outer position OP1 toward the space S1, the moving unit 43 moves the receiving unit 22 in the array direction Z, causing the position of the receiving surface 22a to follow the position of the subject 100 in the array direction Z, thereby reducing the distance L1 between the subject 100 and the receiving surface 22a in the space S1.

[0040] According to the inspection device 1F and inspection method of the third embodiment, the same effects as those of the first embodiment are achieved. Furthermore, in the inspection device 1F and inspection method of the third embodiment, the position of the receiving surface 22a of the receiving unit 22 follows the position of the subject 100 in the array direction Z by the moving unit 43, thereby reliably bringing the receiving surface 22a closer to the subject 100 and reducing the distance L1 between the subject 100 and the receiving surface 22a.

[0041] Although the present invention has been described in detail above, the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of the present invention. [Explanation of symbols]

[0042] 1, 1C, 1D, 1E, 1F...inspection device, 2...inspection unit, 3...transport unit, 4...guidance unit, 21...transmitting unit, 22...receiving unit, 22a...receiving surface, 22a1...area overlapping with the object 100, 41...suction unit, 42...pressing unit, 43...moving unit, 100...object, 101...defect, L1...distance, L2...distance, OP1...outside position, S1...space, W1...ultrasonic wave, Z...arrangement direction

Claims

1. An inspection method comprising: a transmitting unit that transmits ultrasonic waves; and a receiving unit that is positioned with a space between it and the transmitting unit and receives the ultrasonic waves; and when the subject is positioned in the space, an inspection method is performed on the subject based on the ultrasonic waves that are transmitted from the transmitting unit through the subject and received at a receiving surface of the receiving unit, transporting the subject from a location outside the space toward the space; An inspection method in which at least one of the subject and the receiving unit is guided to make the distance between the receiving surface and the subject in the arrangement direction of the transmitting unit and the receiving unit shorter in the space than the distance at the outer position, and then inspecting the subject based on the ultrasound.

2. an inspection unit that has a transmitting unit that transmits ultrasonic waves and a receiving unit that is disposed with a space between it and the transmitting unit and receives the ultrasonic waves, and that inspects the subject based on the ultrasonic waves that are transmitted from the transmitting unit through the subject and received at a receiving surface of the receiving unit when the subject is located in the space; a transport unit that transports the subject from a position outside the space toward the space; a guiding unit that guides at least one of the subject and the receiving unit to make the distance between the receiving surface and the subject in the arrangement direction of the transmitting unit and the receiving unit smaller in the space after the subject is transported into the space by the transporting unit than the distance at the outer position; An inspection device comprising:

3. The inspection device according to claim 2 , wherein the induction unit is an adsorption unit that adsorbs the test object, which has been transported into the space by the transport unit, onto the receiving surface by suction of air.

4. The inspection device according to claim 2 , wherein the guidance unit is a pressing unit that presses the subject so as to approach the receiving surface.

5. The inspection device according to claim 2 , wherein the guidance unit is a moving unit that moves the receiving unit in the arrangement direction to make the position of the receiving surface follow the position of the subject in the arrangement direction.

6. 3. The inspection device according to claim 2, wherein the distance in space is a distance at which diffracted waves of the ultrasonic waves transmitted from the transmitting unit that travel around the outside of the edge of the subject do not reach an area of ​​the receiving surface that overlaps with the subject in the array direction.

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