Machining apparatus

Abstract

To provide a machining device capable of lifting up a workpiece without being affected by an angle in a circumferential direction of a table on which the workpiece is placed, and suppressing cost required for the device.SOLUTION: The processing device 10 includes a table 35 that fixes the workpiece W and rotates, a lift pin 36 that is provided on the table 35 and can protrude from the table 35, an actuating member 38 that causes the lift pin 36 to protrude, and a drive shaft 33B that is rotatable relative to the table 35 and actuates the actuating member 38.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present disclosure relates to a processing apparatus that performs trimming processing on a workpiece such as a semiconductor wafer. [Background technology]

[0002] In trimming, a clean workpiece surface is desirable for subsequent bonding processes. For example, a hollow table is used to prevent particles from adhering to the backside of the workpiece. Furthermore, to transport the workpiece cleanly, an edge-clamping transport method is used, in which the outer periphery of the workpiece is held while transporting, and various methods for picking up the workpiece from the hollow table have been proposed. Patent Document 1 listed below discloses a method in which a lifting plate is provided in a recess in the hollow table and compressed air is sprayed from the lifting plate to lift the workpiece. Patent Documents 2 and 3 listed below disclose methods for lifting the workpiece by protruding a push-up pin above the table. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 6061629 [Patent Document 2] Patent No. 6312463 [Patent Document 3] Japanese Patent Application Laid-Open No. 2010-219190 Summary of the Invention [Problem to be solved by the invention]

[0004] However, the method using compressed air described in Patent Document 1 may not maintain the cleanliness of the workpiece surface due to the airflow caused by the compressed air being sprayed. Furthermore, the method using push-up pins described in Patent Document 2 requires the hollow table to be rotated so that the vertical axis is positioned directly below the push-up pins in order to project the push-up pins onto the table. The method using push-up pins described in Patent Document 3 requires the hollow table to be rotated so that the position of the through-hole through which the push-up pin passes is aligned with the position of the push-up pin. Such methods, which require control of the circumferential angle of the hollow table, require a motor with an angle detection mechanism, which increases costs. Furthermore, controlling the angle can be difficult, for example, in trimming processes that require higher rotation speeds.

[0005] Taking the above facts into consideration, the present invention aims to provide a processing device that can lift up a workpiece without being affected by the circumferential angle of the table on which the workpiece is placed, and that can reduce the cost required for the device. [Means for solving the problem]

[0006] A first aspect of the processing apparatus of the present invention comprises a table for fixing and rotating a workpiece, lift pins provided on the table and capable of protruding from the table, an actuating member for protruding the lift pins, and a drive shaft rotatable relative to the table and for actuating the actuating member.

[0007] In the processing apparatus of the first aspect of the present invention, the table is provided with lift pins that can be protruded from the table, so that the lift pins rotate together with the table. Furthermore, an actuating member causes the lift pins to protrude from the table, and a drive shaft that can rotate relatively to the table operates the actuating member. Because the lift pins are protruded from the table by the actuating member, even if the drive shaft and the lift pins are misaligned in at least one of the circumferential and radial directions around the rotation axis of the table, the drive shaft can protrude the lift pins from the table via the actuating member. This allows the workpiece to be lifted up without being affected by the circumferential angle of the table on which the workpiece is placed. Furthermore, because there is no need to control the circumferential angle of the table, inexpensive motors without angle detection functions, such as induction motors and asynchronous motors, can be used to rotate the table, thereby reducing the cost of the apparatus.

[0008] A processing apparatus according to a second aspect of the present invention is the processing apparatus according to the first aspect, wherein the operating member is formed in an annular shape with the rotation axis of the table as the center.

[0009] A processing apparatus according to a third aspect of the present invention is the processing apparatus according to the first or second aspect, wherein the operating member is fixed to the lift pin.

[0010] A processing device according to a fourth aspect of the present invention is the processing device according to the first or second aspect, wherein the operating member is fixed to the drive shaft.

[0011] A fifth aspect of the processing apparatus of the present invention is the processing apparatus of the first aspect described above, wherein the operating member is fixed to either the lift pin or the drive shaft and is composed of a plurality of divided members surrounding the rotation axis of the table, and the gap between the divided members is narrower than the thickness of the other of the lift pin or the drive shaft.

[0012] A processing device according to a sixth aspect of the present invention is the processing device according to any one of the first to fifth aspects, further comprising a waterproof partition wall having an insertion hole through which the drive shaft can be inserted.

[0013] A seventh aspect of the present invention is a processing apparatus according to any one of the first, second, and fifth aspects, which is provided with a waterproof partition wall having an insertion hole through which the drive shaft can be inserted, and the operating member is fixed to the drive shaft and covers the gap between the insertion hole and the drive shaft. [Effects of the Invention]

[0014] As described above, the processing device of the present invention has the excellent effect of being able to lift up a workpiece without being affected by the circumferential angle of the table on which the workpiece is placed, and also being able to reduce the cost required for the device. [Brief explanation of the drawings]

[0015] [Figure 1] 1 is a perspective view illustrating a schematic configuration of a processing device according to a first embodiment of the present invention. [Figure 2] FIG. 2 is a perspective view schematically illustrating the configuration of a workpiece holding unit. [Figure 3] 3 is a cross-sectional view taken along the line AA in FIG. 2, illustrating a state in which the lift pins of the workpiece holder are not protruding. [Figure 4] 3 is a cross-sectional view taken along the line AA in FIG. 2, showing a state in which the lift pins of the workpiece holding portion are protruding. [Figure 5] 10 is an explanatory diagram for explaining the operation of transporting the workpiece W from the workpiece holder. FIG. [Figure 6] 10A and 10B are diagrams for explaining the positional relationship between a drive shaft, a lift pin, and a ring portion. [Figure 7] FIG. 10 is a perspective view schematically showing the configuration of a workpiece holding unit of a processing device according to a second embodiment of the present invention. [Figure 8] 8 is a cross-sectional view taken along the line AA in FIG. 7, illustrating a state in which the lift pins of the workpiece holder are not protruding. [Figure 9]8 is a cross-sectional view taken along line AA, schematically illustrating the configuration of a workpiece holding unit of a processing device according to a third embodiment of the present invention. FIG. [Figure 10] 10 is a cross-sectional view taken along line AA, schematically showing a partial configuration of a workpiece holding section of a processing device according to a fourth embodiment of the present invention. FIG. [Figure 11] FIG. 10 is a perspective view schematically showing a workpiece holding portion including an operating member as a modified example of a ring portion. [Figure 12] FIG. 10 is a diagram showing the relationship between a drive shaft and a gap. [Figure 13] FIG. 10 is a diagram showing the relationship between the lift pin and the gap. [Figure 14] FIG. 10 is a perspective view schematically showing a workpiece holding portion including an operating member as another modified example of the ring portion. DETAILED DESCRIPTION OF THE INVENTION

[0016] First Embodiment 1 to 5, a processing apparatus 10 according to a first embodiment of the present invention will be described. The processing apparatus 10 according to this embodiment is an apparatus for processing a substantially disk-shaped semiconductor wafer as an example of the workpiece W, and for performing edge trimming on the workpiece W. In the following description, the processing apparatus 10 according to this embodiment will be described as an apparatus used for edge trimming, but is not limited to this configuration and can be applied to any apparatus as long as it is a processing apparatus that transfers the workpiece W to an edge clamp type transport means.

[0017] Fig. 1 is a perspective view illustrating the schematic configuration of processing apparatus 10. In Fig. 1, the X axis indicates the width direction of processing apparatus 10 when viewed from the front (diagonally from the front side of the paper), the Y axis indicates the depth direction of processing apparatus 10, and the Z axis indicates the height direction of processing apparatus 10.

[0018] 1, the processing device 10 includes a processing unit 20 that processes a workpiece W, a workpiece holding unit 30 that holds the workpiece W, and a base unit 12. As an example, the processing unit 20 and the workpiece holding unit 30 are placed on the base unit 12. As an example, the processing device 10 transports the workpiece W using an edge clamp type transport device 50, which will be described later. The transport device 50 transports the workpiece W to, for example, a load port (not shown) that stores the workpiece W and a cleaning device (not shown) that cleans the workpiece W after processing.

[0019] 1, the processing section 20 is generally configured to include a processing base 22 and a main unit 24. The processing base 22 is configured to be approximately T-shaped when viewed from above, and includes a base portion 22A that extends in the width direction on the rear side of the processing device 10 (the back side of the page).

[0020] The main unit 24 is disposed on the processing base 22 and serves to hold a grinding unit 40 for grinding the workpiece W above the workpiece holding unit 30. Specifically, the main unit 24 includes an arch-shaped column 26 formed to straddle the workpiece holding unit 30, and further includes a grinding unit 40 mounted on the column 26. The grinding unit 40 performs trimming processing on the edge of the workpiece W.

[0021] The column 26 includes a pair of support posts 26A extending in the height direction from the upper surfaces of both widthwise sides of the base base 22A of the processing base 22, and a connecting portion 26B connecting the pair of support posts 26A at their upper ends.

[0022] The grinding unit 40 is provided on each side of the connecting portion 26B in the width direction. The grinding unit 40 includes a grinding wheel 42, a grinding mechanism 44 attached to the tip of the grinding wheel 42 that is located inside the width direction of the processing device 10, and a moving mechanism 46 that moves the grinding mechanism 44 in the X-axis direction and the Z-axis direction. The moving mechanism 46 is fixed to the connecting portion 26B of the column 26 so as to be movable in the X-axis direction and the Z-axis direction, and a spindle feed mechanism or the like can be used as an example. The moving mechanism 46 is configured to be movable by a motor or the like (not shown). Furthermore, the grinding mechanism 44 is configured to be able to grind by operating (e.g., rotating) the grinding wheel 42 by a motor or the like (not shown).

[0023] In the grinding unit 40, a control device (not shown) that controls the operation of the processing device 10 controls the movement mechanism 46, which causes the movement mechanism 46 to move the grinding mechanism 44 in the X-axis direction and the Z-axis direction in accordance with the size of the workpiece W held by the workpiece holding unit 30. In this way, the control device brings the grinding wheel 42 into contact with the edge of the workpiece W. The control device also operates the grinding mechanism to operate the grinding wheel 42, thereby trimming the edge of the workpiece W.

[0024] A rectangular box-shaped waterproof table 27 extending in the depth direction is supported between the pair of support columns 26A. The waterproof table 27 has an opening 27A extending along the depth direction. A bellows-shaped waterproof lid member 27B that opens and closes the opening 27A is disposed at each of the front (near side of the page) and rear (far side of the page) ends of the opening 27A. A waterproof bulkhead 39, which will be described later, is disposed in the opening 27A, and the waterproof lid member 27B is closed, for example, by abutting against the waterproof bulkhead 39 or by covering part of the waterproof bulkhead 39.

[0025] Next, the workpiece holding unit 30 will be described. Fig. 2 is a perspective view that schematically shows the configuration of the workpiece holding unit 30, Fig. 3 is a cross-sectional view taken along line AA in Fig. 2, showing a state in which the lift pins 36 of the workpiece holding unit 30 do not protrude, and Fig. 4 is a cross-sectional view taken along line AA in Fig. 2, showing a state in which the lift pins 36 of the workpiece holding unit 30 protrude. The cross-sectional views shown in Figs. 3 and 4 are cross-sectional views taken along line AA in Fig. 2, cut in the Z-axis direction, with the centers of the drive shaft 33B and the lift pins 36 approximately aligned in a top view, and are cross-sectional views that pass through the drive shaft 33B and the lift pins 36.

[0026] As shown in Fig. 1, the workpiece holding unit 30 is provided on the processing base 22, and is provided below the connecting portion 26B of the column 26. As shown in Figs. 2 to 4, the workpiece holding unit 30 includes a holding base 32, an axis driving unit 33, a table driving unit 34, a table 35, a lift pin 36, a ring portion 38 as an operating member, and a waterproof partition wall 39.

[0027] The holding base 32 is fixed onto the processing base 22. The holding base 32 may be fixed directly onto the processing base 22, or may be fixed indirectly onto the processing base 22 via a member for adjusting the height or the like.

[0028] The axis driving unit 33 includes a cylindrical portion 33A fixed on the holding base 32, a driving shaft 33B that can move up and down in the Z-axis direction, i.e., the height direction, within the cylindrical portion 33A, and a driving source (not shown) such as a motor or cylinder that drives the driving shaft 33B. In this embodiment, as an example, three axis driving units 33 are provided at approximately equal intervals on a circumference centered on the rotation axis D of the table driving unit 34.

[0029] The table driving unit 34 is disposed on the holding base 32 and has a built-in driving source such as a motor (not shown). A table 35 is attached to the upper end of the table driving unit 34, and the table driving unit 34 rotates the table 35 about a rotation axis D by operating the driving source.

[0030] The table 35 has a generally circular shape in top view and includes a recess 35A on its central upper surface. The recess 35A is a non-machining area, and its recessed shape reduces the contact area between the table 35 and the back surface of the workpiece W, preventing particles generated during grinding from adhering to the back surface of the workpiece W. The table 35 is formed by a bottom 35B of the recess 35A and an upright portion 35C extending from the upper end of the bottom 35B in the circumferential direction. Three through holes 35D, through which the lift pins 36 are inserted, are provided, for example, at approximately equal intervals, on a circumference of the bottom 35B centered on the rotation axis D. The through holes 35D are, for example, formed on approximately the same circumference as the circumference centered on the rotation axis D on which the drive shaft 33B is disposed, when viewed from above.

[0031] The three through holes 35D are provided with bearings 37A that support the lift pins 36 movably in the Z-axis direction (height direction), and the lift pins 36 are supported by these bearings 37A. The number of through holes 35D and bearings 37A is not limited to three, and can be changed appropriately according to the number of lift pins 36 required. However, it is preferable to provide three or more in order to ensure the flatness of the workpiece W.

[0032] The lift pins 36 are pins that lift up the workpiece W and have heads 36A formed with an arc-shaped cross section at their upper ends. That is, the surface of the heads 36A that contact the workpiece W is gently curved to prevent the workpiece W from being scratched. The shafts 36B of the lift pins 36, excluding the heads 36A, are inserted into bearings 37A. A cylindrical spring member 37B is disposed at the lower end of the bearing 37A, and the shafts 36B are inserted into the spring member 37B. In this embodiment, as an example, the upper end of the spring member 37B is fixed to the lower surface of the bearing 37A or the bottom 35B of the table 35. As an example, the lower end of the spring member 37B is fixed to the upper surface of a ring portion 38.

[0033] Because the lift pins 36 are supported by bearings 37A, when the table 35 rotates, the lift pins 36 rotate together with the table 35 around the rotation axis D. At this time, because the shaft drive unit 33 is fixed to the holding base 32, the drive shaft 33B does not move on the XY plane. Therefore, when the table 35 rotates, the drive shaft 33B rotates relative to the table 35 and the lift pins 36.

[0034] Furthermore, inside the table driving unit 34, an air passage (not shown) is formed, for example, along the rotation axis D. Furthermore, at the upper end of the upright portion 35C of the table 35, a plurality of air holes (not shown) are formed at equal intervals around the rotation axis D on the circumference. Inside the bottom portion 35B and the upright portion 35C of the table 35, communication passages (see line P) are formed to connect the passage of the table driving unit 34 with the above-mentioned air holes. That is, inside the bottom portion 35B, communication passages are formed radially from the rotation axis D. In FIGS. 3 and 4, the passages and communication passages are indicated by line P. As indicated by line P, the passages and communication passages are connected to a suction source (not shown) for sucking air, and by operating the suction source, an adhesive force is generated in the air holes. The underside of the workpiece W is suction-held by this adhesive force.

[0035] As an example, the ring portion 38 is formed in a disk shape with a diameter smaller than that of the table 35 and in an annular shape with an open center. That is, the ring portion 38 is formed in an annular shape centered on the rotation axis D of the table 35. The ring portion 38 is formed to be large enough to cover the drive shaft 33B of the shaft drive unit 33 when viewed from above. The ring portion 38 is fixed to the lift pin 36; specifically, the upper surface of the ring portion 38 is fixed to the lower end surface of the lift pin 36. The method of fixing the ring portion 38 to the lift pin 36 is not particularly limited, and may be an adhesive, or may be joined by welding or the like. The method can be determined appropriately depending on the materials of the ring portion 38 and the lift pin 36. Note that in this embodiment, the ring portion 38 and the lift pin 36 are formed separately, as an example, but the present invention is not limited thereto and they may be formed integrally.

[0036] The waterproof bulkhead 39 is provided on the outer periphery of the table drive unit 34 and is provided between the ring portion 38 and the shaft drive unit 33 in the Z-axis direction. Specifically, as shown in FIGS. 3 and 4 , the waterproof bulkhead 39 is provided so as to be positioned slightly above the upper end surface of the cylindrical portion 33A of the shaft drive unit 33. As an example, the waterproof bulkhead 39 is formed of a plate member that is approximately rectangular in top view, and as shown in FIGS. 3 and 4 , includes a cylindrical portion 39A that is erected upward in approximately the center. The table drive unit 34 is inserted into the cylindrical portion 39A. Note that, as an example, the waterproof bulkhead 39 includes the cylindrical portion 39A in the present embodiment, but this is not limited thereto. An opening may be provided instead of the cylindrical portion 39A. Furthermore, the waterproof bulkhead 39 is provided with an insertion hole 39B through which the drive shaft 33B can be inserted, at a position overlapping with the drive shaft 33B of the shaft drive unit 33 in top view, and the insertion hole 39B is provided with a waterproof seal (not shown). The seal is, for example, an O-ring made of an elastic material, and is formed to have approximately the same diameter as the drive shaft 33B. The seal is disposed in the waterproof bulkhead so as to be concentric with the insertion hole 39B.

[0037] Next, a description will be given of the operation of the processing device 10 configured as above. Various operations of the processing device 10 are controlled by a control device (not shown) provided in the processing device 10, for example.

[0038] The control device operates the suction source of the workpiece holder 30 to suction-hold the underside of the workpiece W placed on the table 35, as shown in Fig. 3. With the underside of the workpiece W being suction-held, the control device moves the grinding mechanism 44 in the X-axis and Z-axis directions using the movement mechanism 46, as shown in Fig. 1, to bring the grinding wheel 42 into contact with the edge of the workpiece W.

[0039] The control device also operates the drive source of the table drive unit 34 to rotate the table 35 around the rotation axis D, and causes the grinding mechanism 44 to trim the edge of the workpiece W. At this time, the control device injects water onto the grinding position using a nozzle (not shown).

[0040] When the trimming process is completed, the control device stops the operation of the drive source of the table drive unit 34 to stop the rotation of the table 35, and also stops the operation of the grinding wheel 42 by the grinding mechanism 44. Then, the control device moves the grinding mechanism 44 to its original position by the moving mechanism 46. The control device also stops the operation of the suction source of the workpiece holder 30 to release the suction hold of the underside of the workpiece W.

[0041] Next, the control device operates the drive source of the shaft drive unit 33 of the workpiece holding unit 30, thereby moving the drive shaft 33B upward in the Z-axis direction (height direction) and operating the ring unit 38. Specifically, the drive shaft 33B moves the ring unit 38 in the Z-axis direction (height direction). As a result, the ring unit 38 can move the lift pins 36 from a state in which they do not protrude from the table 35 shown in FIG. 3 to a state in which they protrude from the table 35 shown in FIG. 4. In this way, the drive shaft 33B causes the lift pins 36 to protrude from the table 35 via the ring unit 38, thereby lifting up the workpiece W.

[0042] FIG. 5 is an explanatory diagram for explaining the operation of transporting the workpiece W from the workpiece holding unit 30. In this embodiment, as an example, the workpiece W is transported by an edge clamp type transport device 50. As shown in FIGS. 5(B) to 5(D), as an example, the transport device 50 includes a pair of transport arms 52. One end of the pair of transport arms 52 is connected by a rectangular connecting base 54. In addition, the pair of transport arms 52 include flat mounting portions 56 that extend inward on the inner surfaces facing each other.

[0043] In this embodiment, as an example, two placement sections 56 are provided at an interval in the longitudinal direction of each transfer arm 52. The pair of transfer arms 52 may be configured to be slidable in the longitudinal direction of the connecting base 54. In this case, the distance between the pair of transfer arms 52 can be changed depending on the size of the workpiece W. The transfer device 50 is mounted on a robot or traveling vehicle that can travel under the control of a control device, and the pair of transfer arms 52 and the connecting base 54 are configured to be movable in the Z-axis direction (up and down direction of the vehicle) and on the XY plane. Note that a known technique can be used to move the pair of transfer arms 52, so a detailed description thereof will be omitted here.

[0044] As shown in FIG. 5(A), the control device moves the pair of transfer arms 52 to the position of the workpiece W by moving a robot or a traveling vehicle equipped with a transfer device 50 as shown in FIG. 5(B). Next, as shown in FIG. 5(C), the control device moves the placement units 56 of the pair of transfer arms 52 to between the back surface of the workpiece W and the table 35. As shown in FIG. 5(D), the control device moves the pair of transfer arms 52 upward to place the workpiece W on the placement units 56 and lift the workpiece W. In other words, the control device moves the workpiece W away from the table 35. With the workpiece W placed on the placement units 56, the control device moves the robot or the traveling vehicle equipped with the transfer device 50 to move the workpiece W to a desired position.

[0045] After the workpiece W is transported from the table 35, the control device operates the drive source of the shaft drive unit 33 of the workpiece holder 30 in a state in which the lift pins 36 protrude from the table 35 (see FIG. 4), thereby moving the drive shaft 33B downward in the Z-axis direction (height direction). When the drive shaft 33B is moved downward, the lower surface of the ring portion 38 is no longer pressed, so the ring portion 38 is moved downward by the restoring force of the spring member 37B. At this time, the lift pins 36 to which the ring portion 38 is fixed also move downward, returning to a state in which they do not protrude from the table 35 (see FIG. 3).

[0046] Next, the effects of the processing device 10 configured as above will be described.

[0047] Fig. 6 is a diagram for explaining the positional relationship between the drive shaft 33B, the lift pins 36, and the ring portion 38. As shown in Fig. 6, in the processing apparatus 10 of the first embodiment, the ring portion 38 is disposed around the rotation axis D of the table 35. In addition, the lift pins 36 are disposed on the circumference R on which the drive shaft 33B is disposed.

[0048] In the processing device 10 of the first embodiment, the table 35 is provided with lift pins 36 that can protrude from the table 35, and therefore the lift pins 36 rotate together with the table 35. On the other hand, the drive shaft 33B is fixed on the holding base 32, and therefore the drive shaft 33B rotates relative to the lift pins 36 and the table 35. In the processing device 10 of the first embodiment, the ring portion 38 causes the lift pins 36 to protrude from the table 35, and the drive shaft 33B, which is rotatable relative to the table 35, operates the ring portion 38.

[0049] In this way, the lift pin 36 is pressed by the ring portion 38 to protrude from the table 35. Therefore, as shown in FIG. 6, even if the drive shaft 33B and the lift pin 36 are misaligned in the circumferential direction on the circumference R centered on the rotation axis D, the drive shaft 33B can cause the lift pin 36 to protrude from the table 35 via the ring portion 38.

[0050] Furthermore, if at least a portion of the lift pin 36 overlaps with the ring portion 38, the lift pin 36 is pressed by the ring portion 38. Therefore, for example, the lift pin 36 may be located on a circumference R1 having a smaller diameter than the above-mentioned circumference R, or on a circumference R2 having a larger diameter than the above-mentioned circumference R. Even if the drive shaft 33B and the lift pin 36 are misaligned in the radial direction of the circumference centered on the rotation axis D, the drive shaft 33B can cause the lift pin 36 to protrude from the table 35 via the ring portion 38.

[0051] As described above, in the processing apparatus 10 of the first embodiment, even if the drive shaft 33B and the lift pins 36 are misaligned in at least one of the circumferential and radial directions about the rotation axis D of the table 35, the drive shaft 33B can cause the lift pins 36 to protrude from the table 35 via the ring portion 38. Therefore, the processing apparatus 10 of the first embodiment can lift up the workpiece W without being affected by the circumferential angle of the table 35 on which the workpiece W is placed. Furthermore, since the processing apparatus 10 of the first embodiment does not require control of the circumferential angle of the table 35, an inexpensive motor without an angle detection function, such as an induction motor or an asynchronous motor, can be used to rotate the table 35. This allows the cost required for the processing apparatus 10 to be reduced.

[0052] Furthermore, in the processing apparatus 10 of the first embodiment, the ring portion 38 is formed in a ring shape centered on the rotation axis D of the table 35, so that the ring portion 38 allows the lift pin 36 to protrude from the table 35 without imposing any restrictions on the thickness of the lift pin 36 and the drive shaft 33B.

[0053] Furthermore, in the processing device 10 of the first embodiment, the ring portion 38 is fixed to the lift pin 36, so that the lift pin 36 can be protruded from the table 35 by abutting the drive shaft 33B against the ring portion 38.

[0054] Typically, trimming is performed in an environment where water, sludge, dust, etc. are always present. The processing device 10 of the first embodiment is provided with a waterproof partition wall 39 having an insertion hole 39B through which the drive shaft 33B can be inserted. Therefore, the waterproof partition wall 39 prevents water, sludge, dust, etc. from entering the drive shaft 33B side, and the ring portion 38 can be operated by the drive shaft 33B inserted through the insertion hole 39B.

[0055] Second Embodiment Next, a processing apparatus 10A according to a second embodiment of the present invention will be described with reference to Figures 7 and 8. The overall configuration of the processing apparatus 10A according to the second embodiment is the same as that of the first embodiment (Figure 1), so a duplicated description will be omitted.

[0056] Fig. 7 is a perspective view showing a schematic configuration of the workpiece holding part 30A, and Fig. 8 is a cross-sectional view taken along line AA in Fig. 7, showing a state in which the lift pins 36 of the workpiece holding part 30A are not protruding. Note that the cross-sectional view shown in Fig. 8 is a cross-sectional view taken along line AA in Fig. 7 in the Z-axis direction, with the centers of the drive shaft 33B and the lift pins 36 roughly aligned in a top view, similar to Figs. 3 and 4, and is a cross-sectional view passing through the drive shaft 33B and the lift pins 36.

[0057] The processing apparatus 10A of the present embodiment includes a workpiece holding unit 30A, and the configuration of this workpiece holding unit 30A is different from that of the workpiece holding unit 30 of the processing apparatus 10 of the first embodiment described above. Specifically, while the ring portion 38 of the workpiece holding unit 30 of the processing apparatus 10 of the first embodiment is fixed to the lift pins 36, the ring portion 38 of the workpiece holding unit 30A of the processing apparatus 10A of the second embodiment is fixed to the drive shaft 33B. Therefore, as shown in Fig. 7, when the lift pins 36 are not protruding from the table 35, the insertion hole 39B of the waterproof partition wall 39 is covered by the ring portion 38, and therefore the insertion hole 39B is not exposed as shown in Fig. 2.

[0058] Specifically, as shown in Fig. 8, the lower surface of the ring portion 38 is fixed to the upper end surface of the drive shaft 33B. The method of fixing the ring portion 38 to the drive shaft 33B is not particularly limited, and may be an adhesive or may be joined by welding or the like. The method can be determined appropriately depending on the materials of the ring portion 38 and the drive shaft 33B. Furthermore, the ring portion 38 is disposed so as to cover the insertion hole 39B and the drive shaft 33B when viewed from above.

[0059] In the present embodiment, as an example, the lower end of the spring member 37B is fixed to the lower end of the outer circumferential surface of the shaft portion 36B. Note that the lower end of the spring member 37B may be fixed to the upper surface of an annular flange that protrudes radially from the lower end of the outer circumferential surface of the shaft portion 36B.

[0060] Next, the operation of the processing apparatus 10A configured as described above will be described. Various operations of the processing apparatus 10A are controlled by, for example, a control device (not shown) provided in the processing apparatus 10A. Note that, with regard to the operations of the processing apparatus 10A, explanations of operations that overlap with the operations of the processing apparatus 10 of the first embodiment described above will be omitted, and only different operations will be described.

[0061] The control device operates the drive source of the shaft drive unit 33 of the workpiece holding unit 30A, thereby moving the drive shaft 33B in the Z-axis direction (upward). At this time, the ring unit 38 fixed to the drive shaft 33B also operates and moves in the Z-axis direction (upward) together with the drive shaft 33B. As a result, the ring unit 38 moves the lift pins 36 from a state in which they do not protrude from the table 35 shown in FIG. 8 to a state in which they protrude from the table 35 (see FIG. 4), thereby lifting up the workpiece W.

[0062] Next, the effects of the processing apparatus 10A configured as above will be described.

[0063] In the processing apparatus 10A of the second embodiment, similarly to the processing apparatus 10 of the first embodiment described above, the lift pins 36 are protruded from the table 35 by the ring portions 38. Therefore, even if the drive shaft 33B and the lift pins 36 are misaligned in at least one of the circumferential and radial directions about the rotation axis D of the drive shaft 33B and the rotation axis D of the lift pins 36, the drive shaft 33B can cause the lift pins 36 to protrude from the table 35 via the ring portions 38. This allows the workpiece W to be lifted up without being affected by the circumferential angle of the table 35 on which the workpiece W is placed. Furthermore, because there is no need to control the circumferential angle of the table 35, an inexpensive motor without an angle detection function, such as an induction motor or an asynchronous motor, can be used to rotate the table 35. This reduces the cost required for the processing apparatus 10A.

[0064] Furthermore, in the processing apparatus 10A of the second embodiment, the ring portion 38 is formed in a ring shape centered on the rotation axis D of the table 35, so that the ring portion 38 allows the lift pin 36 to protrude from the table 35 without imposing any restrictions on the thickness of the lift pin 36 and the drive shaft 33B.

[0065] Furthermore, in the processing device 10A of the second embodiment, the ring portion 38 is fixed to the drive shaft 33B, so that the ring portion 38 can be operated by operating the drive shaft 33B.

[0066] The processing apparatus 10A of the second embodiment includes a waterproof partition 39 having an insertion hole 39B through which the drive shaft 33B can pass. Therefore, the waterproof partition 39 prevents water, sludge, dust, and the like from entering the drive shaft 33B, while the ring portion 38 can be operated by the drive shaft 33B passing through the insertion hole 39B. Furthermore, if a seal structure is provided between the waterproof partition 39 and the drive shaft 33B, the seal structure may be worn or damaged in the above-described environment. In the processing apparatus 10A of the second embodiment, the ring portion 38 is fixed to the drive shaft 33B and covers the gap between the insertion hole 39B and the drive shaft 33B, so the ring portion 38 covers the seal structure. Therefore, the seal structure is prevented from being infiltrated by water, sludge, dust, and the like, thereby improving the durability of the seal structure.

[0067] In the processing apparatus 10A of the second embodiment, during grinding when the drive shaft 33B is not operating, the ring portion 38 moves down to the waterproof partition wall 39, thereby blocking the insertion hole 39B. Therefore, since the ring portion 38 also serves as a seal, it is not necessarily necessary to provide a seal structure for the insertion hole 39B.

[0068] <Third embodiment> Next, a processing apparatus 10B according to a third embodiment of the present invention will be described with reference to Fig. 9. The overall configuration of the processing apparatus 10B according to the third embodiment is the same as that of the first embodiment (Fig. 1), so a duplicated description will be omitted. Fig. 9 is an AA cross-sectional view schematically showing the configuration of the workpiece holding unit 30B of the processing apparatus 10B according to the third embodiment. The AA cross-sectional view shown in Fig. 9 is a cross-sectional view passing through the drive shaft 33B and the lift pin 36, similar to Figs. 3 and 4.

[0069] The processing apparatus 10B of this embodiment includes a workpiece holding unit 30B, and the configuration of this workpiece holding unit 30B is different from the workpiece holding units 30, 30A of the processing apparatuses 10, 10A of the first and second embodiments described above. Specifically, the centers of the lift pins 36 of the workpiece holding units 30, 30A of the processing apparatuses 10, 10A of the first and second embodiments are arranged on a circumference that is substantially the same as the circumference centered on the rotation axis D on which the drive shaft 33B is arranged in a top view. In contrast, in this embodiment, the centers of the lift pins 36 are arranged on a circumference that is formed more inward than the circumference centered on the rotation axis D on which the drive shaft 33B is arranged in a top view, for example. In other words, the distance from the center of the lift pins 36 to the rotation axis D is different from the distance from the center of the drive shaft 33B to the rotation axis D in a top view.

[0070] The ring portion 38 is formed so as to cover the drive shaft 33B in a top view and is fixed to the upper end surface of the drive shaft 33B. In addition, the ring portion 38 is formed so as to cover the lift pins 36 in a bottom view.

[0071] Furthermore, in the workpiece holding units 30, 30A of the machining apparatuses 10, 10A of the first and second embodiments described above, the table 35 is attached to the upper end of the table driving unit 34. In contrast to this, in the present embodiment, a spacer 31 is attached to the upper end of the table driving unit 34, and the table 35 is attached to the upper end of the spacer 31. That is, the table 35 is attached to the upper end of the table driving unit 34 via the spacer 31.

[0072] Spacer 31 is formed in a generally cylindrical shape with a diameter smaller than that of table driver 34 and smaller than the circumference of a circle centered on rotation axis D on which lift pins 36 are arranged when viewed from above. Furthermore, tubular portion 39A of waterproof partition 39 is disposed so as to surround the outer periphery of spacer 31, and waterproof partition 39 is disposed so as to cover the upper surface of table driver 34 disposed on the outer periphery side of spacer 31.

[0073] Next, the operation of the processing apparatus 10B configured as described above will be described. Various operations of the processing apparatus 10B are controlled by, for example, a control device (not shown) provided in the processing apparatus 10B. Note that, with regard to the operations of the processing apparatus 10B, explanations of operations that overlap with the operations of the processing apparatus 10 of the first embodiment described above will be omitted, and only different operations will be described.

[0074] The control device operates the drive source of the shaft drive unit 33 of the workpiece holding unit 30B to move the drive shaft 33B in the Z-axis direction (upward). At this time, the ring unit 38 fixed to the drive shaft 33B also operates and moves in the Z-axis direction (upward) together with the drive shaft 33B. Here, since the ring unit 38 covers the lift pins 36 when viewed from below, the ring unit 38 can lift up the workpiece W by moving the lift pins 36 from a state in which they do not protrude from the table 35 shown in FIG. 9 to a state in which they protrude from the table 35.

[0075] Next, the effects of the processing apparatus 10B configured as above will be described.

[0076] In processing equipment, the motor built into the table drive unit 34 may have a larger diameter to accommodate more difficult cutting materials or higher speeds. On the other hand, in processing equipment, there are also cases where a workpiece W with a small diameter, for example, 203 mm (8 inches) or less, is processed. In this case, due to the relationship between the diameters of the motors built into the table 35 and the table drive unit 34, it is difficult to directly operate the lift pins 36 with the drive shaft 33B. If it is desired to directly operate the lift pins 36 with the drive shaft 33B, it is necessary to install a long seat in the Z-axis direction where the entire drive source of the table drive unit 34 can be built in, which may result in various disadvantages such as an increase in the size of the equipment, a decrease in processing accuracy, and an increase in cost.

[0077] In the processing apparatus 10B of the present embodiment, the lift pins 36 are actuated by the ring portion 38, and therefore the drive shaft 33B can be disposed at any position in the circumferential direction and radial direction about the rotation axis D, as shown in Fig. 9. As a result, the length of the spacer 31 in the Z-axis direction only needs to be the movement stroke of the drive shaft 33B in the Z-axis direction, which makes it possible to suppress an increase in the size of the apparatus, a decrease in processing accuracy, an increase in costs, and the like.

[0078] <Fourth embodiment> Next, a processing apparatus 10C according to a fourth embodiment of the present invention will be described with reference to Fig. 10. The overall configuration of the processing apparatus 10C according to the fourth embodiment is the same as that of the first embodiment (Fig. 1), so a duplicated description will be omitted. Fig. 10 is an AA cross-sectional view schematically showing a partial configuration of a workpiece holding unit 30C of the processing apparatus 10C according to the fourth embodiment. The AA cross-sectional view shown in Fig. 10 is a cross-sectional view passing through the drive shaft 33B and the shaft portion 60A of the lift pin 60, similar to Figs. 3 and 4.

[0079] The processing apparatus 10C of this embodiment has a workpiece holding section 30C, and the configuration of this workpiece holding section 30C is different from the workpiece holding sections 30, 30A, 30B of the processing apparatuses 10, 10A, 10B of the first to third embodiments described above. Specifically, the lift pins 36 of the workpiece holding sections 30, 30A, 30B of the processing apparatuses 10, 10A, 10B of the first to third embodiments have head sections 36A formed with an arc-shaped cross section at their upper ends, but the lift pins 60 of the workpiece holding section 30C of the processing apparatus 10C of this embodiment do not have head sections 36A.

[0080] 10, the lift pin 60 of this embodiment has three shaft portions 60A, and the upper ends of the shaft portions 60A are connected within the recess 35A of the table 35. Specifically, the lift pin 60 has a cylindrical abutment portion 60B centered on the rotation axis D of the table 35, and the lower end surface of the abutment portion 60B is located at approximately the same height in the Z-axis direction as the upper end surfaces of the shaft portions 60A. The lift pin 60 also has connecting portions 60C that connect the upper end surfaces of the three shaft portions 60A to the lower end surfaces of the abutment portions 60B. As an example, the connecting portions 60C are formed of strip-shaped members that are provided radially from the abutment portion 60B toward the three shaft portions 60A.

[0081] In this embodiment, as an example, the ring portion 38 is fixed to the lower end surfaces of the three shaft portions 60A. Note that the ring portion 38 may be fixed to the upper end surface of the drive shaft 33B, as in the second embodiment.

[0082] Next, the operation of the processing apparatus 10C configured as described above will be described. Various operations of the processing apparatus 10C are controlled by, for example, a control device (not shown) provided in the processing apparatus 10C. Note that, with regard to the operations of the processing apparatus 10C, explanations of operations that overlap with the operations of the processing apparatus 10 of the first embodiment described above will be omitted, and only different operations will be described.

[0083] The control device operates the drive source of the shaft drive unit 33 of the workpiece holding unit 30C, thereby moving the drive shaft 33B in the Z-axis direction (upward) and operating the ring unit 38. Specifically, the drive shaft 33B moves the ring unit 38 in the Z-axis direction (upward). As a result, the ring unit 38 moves the shaft unit 60A of the lift pin 60 in the Z-axis direction (upward), and as the shaft unit 60A moves, the contact unit 60B also moves in the Z-axis direction (upward) and protrudes from the table 35. The workpiece W is pushed against the upper end surface of the contact unit 60B and lifted up.

[0084] Next, the effects of the processing apparatus 10C configured as above will be described.

[0085] Depending on the shape of the transport arm 52 of the transport device 50, there may be restrictions on the arrangement of the contact points between the lift pins and the workpiece W. In the processing device 10C of this embodiment, the lift pins 60 are provided with contact portions 60B that contact the lower surface of the central portion of the workpiece W, so that the contact points between the workpiece W and the lift pins 60 can be arranged in the central portion of the workpiece W. This makes it possible to accommodate transport arms of various shapes.

[0086] In the first to fourth embodiments described above, the ring portion 38 as an operating member is formed in an annular shape centered on the rotation axis D of the table 35, but the present invention is not limited to this, and other operating members may be provided instead of the ring portion 38.

[0087] <Variation 1> FIG. 11 is a perspective view showing a workpiece holding portion including an actuating member 70 as a modified example of the ring portion 38, FIG. 12 is a diagram showing the relationship between the drive shaft 33B and the gap H, and FIG. 13 is a diagram showing the relationship between the lift pin 36 and the gap H.

[0088] As shown in Figure 11, the actuating member 70 is composed of three divided members 72 surrounding the rotation axis D of the table 35, and as a whole is formed in a roughly circular ring shape with an opening in the center, similar to the ring portion 38 in the above-mentioned embodiment.

[0089] When the actuating member 70 is fixed to the lower end surface of the lift pin 36 as in the first and fourth embodiments described above, for example, the split position of the actuating member 70 is set at a position offset from the lift pin 36 when viewed from below. Also, as shown in Fig. 12, the gap H between the split members 72 is formed narrower than the diameter of the drive shaft 33B. This prevents the drive shaft 33B from passing through the gap H when the drive shaft 33B is brought into contact with the actuating member 70, regardless of the positional relationship between the drive shaft 33B and the gap H as shown by the dotted line and the dashed-dotted line in Fig. 12.

[0090] On the other hand, when the actuating member 70 is fixed to the upper end surface of the drive shaft 33B as in the second and third embodiments described above, for example, the split position of the actuating member 70 is set to a position that substantially coincides with the center of the drive shaft 33B in a top view. Also, as shown in Fig. 13, the gap H between the split members 72 is formed narrower than the thickness of the shank 36B of the lift pin 36. This prevents the shank 36B of the lift pin 36 from penetrating the gap H when the actuating member 70 is brought into contact with the lift pin 36, regardless of the positional relationship between the shank 36B and the gap H, as shown by the dotted line and the dashed-dotted line in Fig. 13.

[0091] <Variation 2> FIG. 14 is a perspective view showing a workpiece holding portion including an operating member 80 as a modified example of the ring portion 38. As shown in FIG.

[0092] 14, the actuating member 80 is formed in a rectangular shape that surrounds the rotation axis D of the table 35, and has an opening in the center, similar to the ring portion 38 in the above-described embodiment. The actuating member 80 may be fixed to the lower end surface of the lift pin 36, or may be fixed to the upper end surface of the drive shaft 33B. As such, the actuating member of the present invention is not limited to a circular shape, and may be rectangular, polygonal, or elliptical, and is not particularly limited.

[0093] [Supplementary explanation of the embodiment] In the processing apparatus 10, 10A to 10C of the above-described embodiment, the shaft portions 60A of the lift pins 36 or lift pins 60 are three, but the present invention is not limited to this and two or more shaft portions 60A may be provided. Also, in the processing apparatus 10, 10A to 10C of the above-described embodiment, the shaft portions 60A of the three lift pins 36 or lift pins 60 are provided at equal intervals, but the present invention is not limited to this and the shaft portions 60A may not be provided at equal intervals.

[0094] Furthermore, in the processing apparatuses 10, 10A to 10C of the above-described embodiments, the number of drive shafts 33B is the same as the number of shaft portions 60A of the lift pins 36 or the lift pins 60, but the present invention is not limited to this, and the number of drive shafts 33B may be increased or decreased. Furthermore, in the processing apparatuses 10, 10A to 10C of the above-described embodiments, three drive shafts 33B are provided at equal intervals, but the present invention is not limited to this, and the drive shafts 33B may not be provided at equal intervals.

[0095] Furthermore, in the processing apparatus 10B of the third embodiment described above, the ring portion is fixed to the upper end surface of the drive shaft 33B, but the ring portion may be fixed to the lower end surface of the lift pin .

[0096] Furthermore, in the processing apparatus 10C of the fourth embodiment described above, the ring portion 38 is fixed to the lower end surface of the lift pin 36, but the ring portion 38 may be fixed to the upper end surface of the drive shaft 33B.

[0097] The present invention is not limited to the above-described embodiments and includes various modifications. For example, the above-described embodiments have been described in detail to clearly explain the present invention, and the present invention is not necessarily limited to those including all of the described configurations. Furthermore, it is possible to replace part of the configuration of one embodiment with the configuration of another embodiment, or to add the configuration of another embodiment to the configuration of one embodiment. Furthermore, it is possible to add, delete, or replace part of the configuration of each embodiment with other configurations. [Explanation of symbols]

[0098] 10 Processing equipment 10A processing equipment 10B Processing equipment 10C processing equipment 33B drive shaft 35 tables 36 Lift pin 38 Ring portion (operating member) 39 Waterproof bulkhead 39B insertion hole 60 lift pins 70 Actuating member 72 Divided Members 80 Operating member D rotation axis H gap double work

Claims

1. a table that fixes and rotates the workpiece; a lift pin provided on the table and capable of protruding from the table; an actuating member for projecting the lift pin; a drive shaft that is rotatable relative to the table and that operates the operating member; A processing device comprising:

2. 2. The processing device according to claim 1, wherein the operating member is formed in an annular shape centered on the rotation axis of the table.

3. 2. The processing device according to claim 1, wherein the actuating member is fixed to the lift pin.

4. 2. The processing device according to claim 1, wherein the actuating member is fixed to the drive shaft.

5. the actuating member is fixed to either the lift pin or the drive shaft and is composed of a plurality of divided members surrounding the rotation axis of the table; 2. The processing device according to claim 1, wherein the gap between the divided members is narrower than the thickness of either the lift pin or the drive shaft.

6. The processing device according to any one of claims 1 to 5, further comprising a waterproof partition wall having an insertion hole through which the drive shaft can be inserted.

7. a waterproof bulkhead having an insertion hole through which the drive shaft can be inserted; 3. The processing device according to claim 1, wherein the operating member is fixed to the drive shaft and covers a gap between the insertion hole and the drive shaft.

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