Apparatus and method for changing orientation of carrier for manufacturing display devices

Abstract

To provide an attitude changing device of a carrier for manufacturing a display device capable of improving vapor deposition accuracy, and an attitude changing method of the carrier for manufacturing the display device.SOLUTION: According to an aspect of the present invention, there is provided a carrier attitude changing apparatus for manufacturing a display device and a carrier attitude changing method for manufacturing a display device, which are capable of improving deposition accuracy, including a driving body disposed under a conveying means for conveying a carrier accommodating a substrate and a substrate tray, a first rotating body connected to one side of the driving body, a second rotating body connected to the other side of the driving body, a connecting part connecting the first rotating body and the second rotating body to each other, and a support member on the connecting part.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] One embodiment relates to a display device manufacturing apparatus, and more particularly to a display device manufacturing carrier attitude changing apparatus and a display device manufacturing carrier attitude changing method that can improve deposition accuracy. [Background technology]

[0002] Organic light emitting diode displays (OLEDs) have self-luminous properties and, unlike liquid crystal displays (LCDs), do not require a separate light source, which allows for reduced thickness and weight. Furthermore, OLEDs offer high-quality features such as low power consumption, high brightness, and fast response speed, making them a promising next-generation display for portable electronic devices. Summary of the Invention [Problem to be solved by the invention]

[0003] An object of one embodiment is to provide an apparatus and a method for changing the attitude of a carrier for manufacturing a display device, which can improve deposition accuracy.

[0004] The problems to be solved by the present invention are not limited to those mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art from the following description. [Means for solving the problem]

[0005] According to one embodiment of the present invention for achieving the above object, a posture conversion device for a carrier for manufacturing a display device includes a driver arranged at the bottom of a conveying means for conveying a carrier containing substrates and substrate trays, a first rotor connected to one side of the driver, a second rotor connected to the other side of the driver, a connecting portion connecting the first rotor and the second rotor to each other, and a support member on the connecting portion.

[0006] According to one embodiment, a method for changing the attitude of a carrier for manufacturing a display device to achieve the above object includes preparing an attitude change device including a driver, a first rotor connected to one side of the driver and including a first support stand, a second rotor connected to the other side of the driver and including a second support stand, a connection portion connecting the first rotor and the second rotor to each other, and a support member on the connection portion; loading a substrate tray and a carrier containing substrates into the attitude change device in a horizontal attitude via a transport means; rotating the attitude change device in one direction toward the carrier to bring the support member and an electrostatic chuck of the substrate tray into contact with each other; driving the electrostatic chuck to provide an electrostatic force; and further rotating the attitude change device along the one direction to change the attitude of the carrier from the horizontal attitude to a vertical attitude.

[0007] Specific details of other embodiments are included in the detailed description and drawings. [Effects of the Invention]

[0008] According to the apparatus and method for changing the attitude of a carrier for manufacturing a display device of one embodiment, it is possible to improve deposition accuracy.

[0009] The effects obtained from the present invention are not limited to those described above, and other effects not mentioned will be clearly understood by those having ordinary skill in the technical field to which the present invention pertains from the following description. [Brief explanation of the drawings]

[0010] [Figure 1] 1 is a schematic diagram of a vapor deposition apparatus according to an embodiment. [Figure 2] FIG. 2 is a perspective view of the substrate tray of FIG. [Figure 3] FIG. 2 is a perspective view of a carrier disposed on a transport track. [Figure 4] 4 is a diagram for explaining the substrate tray of FIG. 2 coupled to the carrier of FIG. 3. FIG. [Figure 5] 1 is a perspective view illustrating a mounting device for a display device, a posture changing device, a mounting method, and a posture changing method according to an embodiment. [Figure 6] FIG. 6 is a detailed configuration diagram of the posture changing device of FIG. 5. [Figure 7] FIG. 7 is an enlarged view of part A in FIG. 6. [Figure 8] 10A and 10B are diagrams for explaining a method for changing the attitude of a carrier using an attitude changing device according to an embodiment. [Figure 9] 10A and 10B are diagrams for explaining a method for changing the attitude of a carrier using an attitude changing device according to an embodiment. [Figure 10] 10A and 10B are diagrams for explaining a method for changing the attitude of a carrier using an attitude changing device according to an embodiment. [Figure 11] 10A and 10B are diagrams for explaining a method for changing the attitude of a carrier using an attitude changing device according to an embodiment. [Figure 12] 1 is a cross-sectional view of a support and gripper of a display mounting apparatus according to one embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0011] The advantages and features of the present invention, as well as methods for achieving them, will become clearer with reference to the following detailed embodiments in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, and can be realized in various different forms. The present embodiments are provided solely for the purpose of complete disclosure of the present invention and to fully convey the scope of the invention to those skilled in the art to which the present invention pertains. The present invention is defined solely by the scope of the claims.

[0012] When elements or layers are referred to as being "on" another element or layer, this includes all cases where other layers or elements are directly on or between the other elements. The same reference numerals refer to the same components throughout the specification. The shapes, sizes, ratios, angles, numbers, etc. disclosed in the drawings for explaining the embodiments are for illustrative purposes only, and the present invention is not limited to the details shown.

[0013] Although terms such as "first" and "second" are used to describe various components, it is understood that these components are not limited by these terms. These terms are used merely to distinguish one component from another. Therefore, it is understood that the first component referred to below may be the second component within the technical concept of the present invention.

[0014] The features of the various embodiments of the present invention may be partially or wholly combined or combined with one another, and may be technically interlocked and driven in various ways, and each embodiment may be implemented independently of the others or in conjunction with one another.

[0015] Hereinafter, specific embodiments will be described with reference to the accompanying drawings.

[0016] A manufacturing apparatus for a display device according to one embodiment may include a deposition apparatus (1000; e.g., a deposition apparatus for a substrate for a display device) of FIG. 1, a mounting apparatus (2000; e.g., a mounting apparatus between a substrate for a display device and a substrate tray) of FIG. 5, and a posture conversion apparatus (3000; e.g., a posture conversion apparatus for a carrier for manufacturing a display device) of FIG.

[0017] 1 is a schematic diagram of a deposition apparatus according to an embodiment, in which the direction opposite to the third direction DR3 (hereinafter referred to as the third opposite direction) may be the direction of gravity.

[0018] As shown in FIG. 1, a deposition apparatus 1000 for a display device according to one embodiment may include a chamber 100, a deposition source 200, a deposition stage 250, a mask structure 340, a substrate tray 700, a magnet plate 800, a transfer track 500, a carrier 600, and a driving mechanism 900.

[0019] The chamber 100 may define a deposition space in which a deposition process is performed. A film deposition process for manufacturing an organic light-emitting display device is performed inside the chamber 100. The chamber 100 may be a vacuum chamber 100. The deposition source 200, deposition stage 250, driving mechanism 900, and part of the transfer track 500 are disposed within the chamber 100. Note that, when the deposition process is in progress, the deposition source 200, deposition stage 250, mask structure 340, substrate 50, substrate tray 700, magnet plate 800, part of the transfer track 500, and driving mechanism 900 are disposed within the chamber 100.

[0020] The deposition source 200 is disposed within the chamber 100. For example, the deposition source 200 is disposed between the first inner wall 101 of the chamber 100 and the deposition stage 250. The deposition source 200 provides a deposition material. The deposition material from the deposition source 200 may move toward the mask structure 340 through the opening 29 of the deposition stage 250. Specifically, the deposition source 200 heats and vaporizes a deposition material, such as an organic material or an electrode material, at a high temperature. The vaporized deposition material may then be deposited on the substrate 50 through the pattern holes of the mask structure 340. The organic material may be, for example, a material for forming a hole injection layer, a hole transport layer, a light-emitting layer, an electron transport layer, and an electron injection layer disposed between an anode electrode and a cathode electrode of an organic light-emitting diode (OLED). The substrate 50 may be, for example, a substrate used in a display device including an organic light-emitting diode (OLED).

[0021] The deposition stage 250 is disposed on the deposition source 200. For example, the deposition stage 250 is disposed between the deposition source 200 and the mask structure 340. The deposition stage 250 may be fixedly disposed inside the chamber 100. The deposition stage 250 may be inclined toward the deposition source 200. For example, the deposition stage 250 may be disposed so as to be inclined in a second direction opposite to the second direction DR2 with respect to the third direction DR3. Therefore, an acute angle may be formed between one side of the deposition stage 250 facing the deposition source 200 and the ground on which the deposition stage 250 is disposed (e.g., the bottom surface of the chamber 100). In this case, a support protruding from one side of the deposition stage 250 in the second direction is disposed below the deposition stage 250. The deposition stage 250 may have the shape of a rectangular frame with a hole in the center. For example, the deposition stage 250 may have an opening in the center.

[0022] The mask structure 340 is disposed on the deposition stage 250. For example, the mask structure 340 is disposed between the deposition stage 250 and the substrate tray 700. The mask structure 340 may be placed on a support base of the deposition stage 250. In this case, since the deposition stage 250 is tilted, the mask structure 340 may be disposed in an inclined state on the deposition stage 250. The mask structure 340 may include a frame 300 and a mask 400.

[0023] The frame 300 is disposed on the deposition stage 250. For example, the frame 300 is disposed between the deposition stage 250 and the mask 400. The frame 300 may have a square frame shape with a hole in the center. For example, the frame 300 may have an opening 39 in the center. Grooves 30 are disposed on both side edges of the frame 300. The frame 300 may include a magnetic material. For example, the frame 300 may include a material (e.g., iron (Fe)) that can be attached to a magnet.

[0024] The mask 400 is placed on the frame 300. For example, the mask 400 is placed between the frame 300 and the substrate tray 700. The mask 400 is placed on the frame 300 so as to cover the opening of the frame 300. The edge of the mask 400 is attached to the frame 300. For example, the mask 400 is attached to the frame 300 by welding. The mask 400 may be a fine metal mask (FMM).

[0025] The mask 400 may include multiple submasks 410 (or mask sticks). Each of the submasks 410 may have a rectangular shape extending in the third direction DR3. The submasks 410 may be arranged along the first direction DR1. Adjacent submasks 410 may contact each other. A portion of each submask 410, excluding both edges, may be positioned over the opening 39 of the frame 300. Although not shown in the drawings, each submask 410 may have multiple pattern holes penetrating the respective submask 410 in the second direction DR2. The deposition material from the deposition source 200 may be deposited onto the substrate 50 through the pattern holes of each submask 410. Each submask 410 may be made of a material containing a magnetic material (e.g., iron (Fe)). For example, each submask 410 may contain a material that is attracted to a magnet.

[0026] The substrate tray 700 is disposed on the mask structure 340. For example, the substrate tray 700 is disposed between the mask 400 and the magnet plate 800 of the mask structure 340. The substrate tray 700 carries the substrate 50. At this time, the substrate tray 700 can attract the substrate 50 by electrostatic force. For example, the substrate tray 700 can provide a surface on which the substrate 50 is placed and also function as an electrostatic chuck that attracts and fixes the substrate 50 to one surface of the substrate tray 700. The substrate tray 700 is made of a material including ceramic or titanium.

[0027] The magnet plate 800 is disposed on the substrate tray 700. For example, the magnet plate 800 is disposed between the substrate tray 700 and the driving mechanism 900. The magnet plate 800 is disposed on the substrate tray 700 so as to face the substrate tray 700. The magnet plate 800 provides a magnetic force. For example, the magnet plate 800 can provide a magnetic force such that the metal mask 400 is tightly attached to the substrate 50.

[0028] The magnet plate 800 may include a base member 810 and a plurality of magnets 820 arranged on the base member 810. For example, the magnets 820 are arranged on the base member 810. As a specific example, when one side of the base member 810 facing the substrate tray 700 is defined as a first surface, the magnets 820 are arranged on the first surface of the base member 810. Each magnet 820 may include, for example, a permanent magnet.

[0029] The magnets 820 have a north pole and a south pole. The magnets 820 arranged along the first direction DR1 are arranged with opposite polarities facing each other in the first direction DR1. The magnets 820 arranged along the second direction DR2 are arranged with opposite polarities facing each other.

[0030] When the surface opposite to the first surface of the base member 810 is defined as the second surface of the base member 810, a plurality of magnetic bodies 830 are disposed on the second surface of the base member 810. For example, the plurality of magnetic bodies 830 are disposed in the coupling grooves of the base member 810 on the second surface. For example, the magnetic bodies 830 may include a material that can be attached to a magnet (e.g., iron (Fe)).

[0031] The drive mechanism 900 may include a first drive mechanism 910 and a second drive mechanism 920 .

[0032] The first drive mechanism 910 is disposed between the magnet plate 800 and the second drive mechanism 920. For example, the first drive mechanism 910 is disposed between the base member 810 of the magnet plate 800 and the second drive mechanism 920. The first drive mechanism 910 may include a magnet 89. For example, the magnet 89 is disposed on the surface of the first drive mechanism 910 opposite to the surface coupled to the first drive shaft 911. The magnet 89 of the first drive mechanism may be disposed to correspond to (or overlap) the magnetic body 830 of the magnet plate 800. The magnet 89 may include a permanent magnet.

[0033] The magnet plate 800 is detachably attached to a first driving mechanism 910. For example, the base member 810 of the magnet plate 800 is detachably attached to the magnet 89 of the first driving mechanism 910. In other words, the magnetic body 830 of the base member 810 is attached to the magnet 89 of the first driving mechanism 910 by magnetic force from the magnet 89 of the first driving mechanism 910. The first driving mechanism 910 moves toward or away from the deposition source 200 inside the chamber 100. For example, the first driving mechanism 910 may move along a second reverse direction or a second direction DR2. To this end, according to one embodiment, the first driving mechanism 910 may be coupled to a first driving shaft 911 that extends along the second reverse direction or retracts along the second direction DR2. The first driving shaft 911 is coupled to an external driving unit via a hole 90 of the second driving mechanism 920 and a hole 21 of the chamber 100. The first driving mechanism 910 can also move further in the first direction DR1, the first reverse direction, the third direction DR3, or the third reverse direction. In such a case, the first driving shaft 911 can also move further in the first direction DR1, the first reverse direction, the third direction DR3, or the third reverse direction. The movement of the first driving mechanism 910 can control the movement of the magnet plate 800 attached to the first driving mechanism 910.

[0034] The second driving mechanism 920 is disposed between the first driving mechanism 910 and the second inner wall 102 of the chamber 100. The second driving mechanism 920 may include a permanent electromagnet 93. The substrate tray 700 is attached to the second driving mechanism 920. For example, the magnetic material 77 of the substrate tray 700 is attached to the second driving mechanism 920 by attaching the magnetic material 77 of the substrate tray 700 to the permanent electromagnet 93 of the second driving mechanism 920. The permanent electromagnet 93 is disposed on both side edges of the second driving mechanism 920. The magnetic material 77 is disposed on both side edges of the substrate tray 700 to correspond to the permanent electromagnet 93. The magnetic material 77 may include a magnetic material that is attached to a magnet, such as iron (Fe).

[0035] The second driving mechanism 920 may include an electromagnet instead of the permanent electromagnet 93. The second driving mechanism 920 may move toward or away from the deposition source 200 within the chamber 100. For example, the second driving mechanism 920 may move along a second reverse direction or a second direction DR2. To this end, according to one embodiment, the second driving mechanism 920 is connected to a second driving shaft 921 that extends along the second reverse direction or retracts along the second direction DR2. The second driving mechanism 920 may also move in the first direction DR1, the first reverse direction, the third direction DR3, or the third reverse direction. In this case, the second driving shaft 921 may also move in the first direction DR1, the first reverse direction, the third direction DR3, or the third reverse direction. The movement of the second driving mechanism 920 may control the movement of the substrate tray 700 attached to the second driving mechanism 920. The second drive mechanism 920 can perform an alignment operation between the substrate 50 on the substrate tray 700 and the mask structure 340 by controlling the position of the substrate tray 700 attached thereto.

[0036] The transport track 500 is arranged inside and outside the chamber 100 so as to pass through, for example, a first gate G1 and a second gate G2 of the chamber 100. The transport track 500 may extend along a first direction DR1. The first gate G1 and the second gate G2 are arranged opposite each other.

[0037] The carrier 600 moves along the transport track 500. For example, the carrier 600 can move along the transport track 500 by a magnetic levitation system. The carrier 600 can transport the substrate tray 700.

[0038] As described above, the deposition stage 250 may have an upper side tilted toward the deposition source 200 (for example, tilted at the same angle as the carrier 600 shown in FIG. 11 , which will be described later). Therefore, the mask structure 340, substrate tray 700, substrate 50, magnet plate 800, first driving mechanism 910, second driving mechanism 920, transfer track 500, and carrier 600 may also be tilted at the same angle as the deposition stage 250. Therefore, particles generated during the deposition process on the substrate 50 may fall in the direction of gravity without adhering to the substrate 50. This prevents contamination of the substrate 50 by particles.

[0039] FIG. 2 is a perspective view of the substrate tray 700 of FIG.

[0040] As shown in FIG. 2, the substrate tray 700 may include a support plate 710 and an electrostatic chuck 720 .

[0041] The support plate 710 may have the shape of a square frame with a hole in the center, for example, the support plate 710 may have an opening 79 in the center.

[0042] The electrostatic chuck 720 is disposed on the support plate 710. For example, the electrostatic chuck 720 is disposed between the support plate 710 and the substrate 50. In this case, the electrostatic chuck 720 may cover the opening 79 of the support plate 710. The substrate 50 is disposed on the electrostatic chuck 720. The electrostatic chuck 720 can attract the substrate 50 by electrostatic force.

[0043] At least one detachable member 7 is disposed on an edge of the substrate tray 700. For example, a detachable member 7 is disposed near each corner of a rectangular support plate 710. Specifically, the support plate 710 may have six detachable members 7, and three of the six detachable members 7 are disposed on the upper, central, and lower sides of a first side 71 of the substrate tray 700, respectively, and the remaining three detachable members 7 are disposed on the upper, central, and lower sides of a second side 72 of the substrate tray 700, respectively. The first side 71 and the second side 72 of the substrate tray 700 may be disposed opposite each other along the first direction DR1.

[0044] The detachable member 7 may include a coupling tip 7a and a separation groove 7b arranged adjacent to each other in the third direction DR3. The coupling tip 7a is arranged above the separation groove 7b. For example, in one detachable member 7, the coupling tip 7a may be arranged further above the separation groove 7b in the third direction DR3. The coupling tip 7a has a thickness (e.g., size in the second direction DR2) smaller than that of other portions of the substrate tray 700. For example, the coupling tip 7a may have a thickness (e.g., size in the second direction DR2) smaller than that of other portions of the support plate 710. The separation groove 7b may have a recessed shape from the first side 71 of the substrate tray 700 (e.g., the support plate 710) toward the second side 72 or from the second side 72 toward the first side 71. For example, the separation grooves 7b arranged on different sides and facing each other may have recessed shapes toward each other.

[0045] 3 is a perspective view of a carrier disposed on a transport track, which may be a perspective view of a carrier 600 disposed on the transport track 500 of FIG.

[0046] The carrier 600 moves along the transport track 500. The transport track 500 may include a lower track 501 and an upper track 502 arranged opposite each other in the third direction DR3, so that the carrier 600 may be positioned between the lower track 501 and the upper track 502. The carrier 600 may move along the transport track 500 between the lower track 501 and the upper track 502.

[0047] The carrier 600 may have a square frame shape as shown in Fig. 3. However, the shape of the carrier 600 is not limited thereto and may be modified into various shapes.

[0048] 3, the carrier 600 may include a plurality of bars 601, 602, 603, 604 and a plurality of support members 610, 620, 630. For example, the carrier 600 may include a first bar 601, a second bar 602, a third bar 603, and a fourth bar 604 that are connected to one another. A substrate tray 700 is placed in an area (e.g., opening 88b) defined by the first bar 601, the second bar 602, the third bar 603, and the fourth bar 604.

[0049] The first bar 601 and the second bar 602 face each other in the first direction DR1. The third bar 603 and the fourth bar 604 face each other in the third direction DR3. The first bar 601 is disposed between one end of the third bar 603 and one end of the fourth bar 604. The second bar 602 is disposed between the other end of the third bar 603 and the other end of the fourth bar 604.

[0050] The plurality of support members 610, 620, 630 may include at least one first support member 610 extending from the first bar 601, at least one second support member 620 extending from the second bar 602, and at least one third support member 630 extending from the third bar 603.

[0051] The first support member 610 may include an extension 611 and a plurality of protrusions 612. One side of the extension 611 may be connected to the first bar 601. The extension 611 may extend from the first bar 601 toward the second bar 602. A plurality of protrusions 612 (e.g., two protrusions 612) are disposed on the other side of the extension 611. The plurality of protrusions 612 may be rotatably coupled to the other side of the extension 611. For example, each of the plurality of protrusions 612 rotates around an axis parallel to the first direction DR1. The plurality of protrusions 612 are disposed opposite each other in the second direction DR2. Each of the plurality of protrusions 612 may have a cylindrical shape. However, the shape of the protrusions 612 is not limited thereto and may be changed to various shapes.

[0052] The second support member 620 may have the same configuration as the previously described first support member 610. However, the extension of the second support member 620 may extend from the second bar 602 towards the first bar 601.

[0053] The third support member 630 may include an extension 631, a protrusion 632, and a projection 633. One side of the extension 631 may be connected to the third bar 603. The extension 631 may extend from the third bar 603 toward the fourth bar 604. The projection 632 is disposed on the other side of the extension 631. The projection 633 is disposed on one side of the projection 632. The projection 633 may be rotatably connected to one side of the projection 632. For example, the projection 633 may rotate around an axis parallel to the second direction DR2. The projection 633 may have a cylindrical shape. However, the shape of the projection 633 is not limited thereto and may be changed to various shapes.

[0054] FIG. 4 is a diagram illustrating the substrate tray 700 of FIG. 2 coupled to the carrier 600 of FIG.

[0055] As shown in FIG. 4, the first support member 610, the second support member 620, and the third support member 630 support a substrate tray 700.

[0056] The first support members 610 each support a first side 71 of the substrate tray 700. For example, the first side 71 of the substrate tray 700 may be supported by being disposed between the protrusions 612 of the first support members 610. Specifically, the first side 71 may be supported by being disposed between the protrusions 612 of the first support members 610, whereby the coupled chip 7a of the first side 71 may be supported.

[0057] The second support members 620 each support the second side 72 of the substrate tray 700. For example, the second side 72 of the substrate tray 700 may be supported by being disposed between the protrusions of the second support members 620. Specifically, the coupling chip 7a of the second side 72 may be disposed between the protrusions of the second support members 620, thereby supporting the second side 72.

[0058] The third support members 630 each support a third edge 73 of the substrate tray 700. For example, the third edge 73 of the substrate tray 700 can be supported by being placed on the protrusions 633 of the third support members 630. At this time, the protrusions 633 of the third support members 630 can come into contact with the third edge 73.

[0059] The deposition apparatus of one embodiment may further include a pusher 55. The pusher 55 is disposed on the carrier 600. For example, the pusher 55 is disposed on a fourth bar 604 of the carrier 600. Specifically, the pusher 55 faces the fourth bar 604 via an opening 60 in the upper track 502. The pusher 55 and the opening 60 in the upper track 502 are disposed within the chamber 100.

[0060] The pusher 55 moves toward the fourth bar 604 or moves in the opposite direction. For example, the pusher 55 can move along a third reverse direction or a third direction DR3. Here, when the pusher 55 moves along the third reverse direction, the lower track 501 can also move along the third reverse direction. For example, the pusher 55 and the lower track 501 can move together along the third reverse direction.

[0061] When the pusher 55 moves along the third reverse direction, the pusher 55 may come into contact with the fourth bar 604 through the opening 60 of the upper track 502. At this time, the fourth bar 604 is lowered by the pressure of the pusher 55. In other words, when the pusher 55 presses the fourth bar 604 in the third reverse direction, the carrier 600 can move in the third reverse direction. Therefore, the first support member 610, the second support member 620, and the third support member 630 each move in the third reverse direction, so that the protrusions 612 of the first support members 610 and the protrusions of the second support members 620 are positioned to face each other across the separation grooves 7b of the substrate tray 700. In other words, the protrusions 612 of the first support members 610 and the coupling chips 7a on the first side 71 of the substrate tray 700 do not come into contact with each other, and the protrusions of the second support members 620 and the coupling chips on the second side 72 of the substrate tray 700 do not come into contact with each other. Furthermore, as described above, the carrier 600 is lowered in the third reverse direction by the pusher 55, causing the third support member 630 and the substrate tray 700 to move away from each other. For example, the protrusion of the second support member 620 and the third edge 73 of the substrate tray 700 move away from each other, so that the protrusion 633 of the third support member 630 and the third edge 73 do not come into contact with each other. As a result, the substrate tray 700 is no longer supported by the carrier 600. Therefore, the substrate tray 700 can be easily moved in the second direction DR2 and the second reverse direction without interference with the carrier 600.

[0062] The substrate tray 700 and the substrate 50 are provided from the mounting apparatus 2000. For example, the substrate tray 700 and the substrate 50 from the mounting apparatus 2000 can be provided to the deposition apparatus 1000 via the attitude conversion apparatus 3000.

[0063] The display device mounting device 2000 and the display device attitude changing device 3000 according to an embodiment will be described in detail below.

[0064] FIG. 5 is a perspective view for explaining a display device mounting device 2000, a posture changing device 3000, a mounting method, and a posture changing method according to one embodiment.

[0065] In order to explain the mounting method and the attitude changing method, three carriers 600 are shown in Fig. 5, and all three of these carriers 600 are the same carrier 600. For example, after the mounting process in the mounting device 2000, the carrier 600 is moved to the attitude changing device 3000 via the conveying means 31, and is changed from a horizontal attitude to a vertical attitude in the attitude changing device 3000. In other words, Fig. 5 shows the sequential positions of the carrier 600 conveyed along the conveying means 31 according to time.

[0066] As shown in FIG. 5 , the substrate tray 700 may further include a plurality of first clamps 11 and a plurality of first holes 41 arranged on one side edge of the support plate 710, and a plurality of second clamps 12 and a plurality of second holes 42 arranged on the other side edge of the support plate 710. The first clamps 11 and the plurality of first holes 41 are arranged adjacent to the first bar 601 of the carrier 600. The second clamps 12 and the plurality of second holes 42 are arranged adjacent to the second bar 602 of the carrier 600. The first clamps 11 and the first holes 41 are arranged alternately along the second direction DR2. The second clamps 12 and the second holes 42 are arranged alternately along the second direction DR2. The first clamps 11, the first holes 41, the second clamps 12, and the second holes 42 are exposed to the outside through through holes that penetrate the electrostatic chuck 720. The first holes 41 and the second holes 42 are arranged to correspond to the gripper 84, which will be described later.

[0067] As shown in FIG. 5, a mounting device 2000 for a display device according to one embodiment may include a conveying means 31, a mounting stage 40, a moving body 80, a first drive arm 95, a first guide bar 61, a second guide bar 62, and a plurality of support bars 70.

[0068] The conveying means 31 is disposed along the first direction DR1. The conveying means 31 conveys the carrier 600 along the first direction DR1. The conveying means 31 may include rollers 32 and a connecting shaft 33 connecting the rollers 32. The connecting shaft 33 may extend along the second direction DR2. The rollers 32 may be connected to one side and the other side of the connecting shaft 33. The rollers 32 may be rotatably connected to the connecting shaft 33.

[0069] The first guide bar 61 and the second guide bar 62 are disposed opposite each other. For example, the first guide bar 61 and the second guide bar 62 are disposed opposite each other in the second direction DR2.

[0070] The first guide bar 61 may include a first rail 61a and a first opening 61b. The first rail 61a is disposed on the first guide bar 61 along the extension direction (or longitudinal direction, for example, the first direction DR1) of the first guide bar 61. The first opening 61b penetrates the first guide bar 61. The substrate 50 can be loaded into the mounting apparatus 2000 from the outside through the first opening 61b, or the substrate 50 can be unloaded from the mounting apparatus 2000 to the outside through the first opening 61b.

[0071] The second guide bar 62 may include a second rail 62a and a second opening 62b. The second rail 62a is disposed on the second guide bar 62 along the extension direction (or longitudinal direction, e.g., first direction DR1) of the second guide bar 62. The second opening 62b penetrates the second guide bar 62. The substrate 50 can be loaded into the mounting apparatus 2000 from the outside through the second opening 62b, or the substrate 50 can be unloaded from the mounting apparatus 2000 to the outside through the second opening 62b.

[0072] The support bar 70 is disposed between the first guide bar 61 and the second guide bar 62. The support bar 70 may connect the first guide bar 61 and the second guide bar 62 to each other. For example, one end of each of the support bar 70 may be connected to the inner surface of the first guide bar 61, and the other end of each of the support bar 70 may be connected to the inner surface of the second guide bar 62.

[0073] The mounting stage 40 is disposed on a plurality of support bars 70. For example, the mounting stage 40 is disposed on the plurality of support bars 70 between the first guide bar 61 and the second guide bar 62. The mounting stage 40 may be coupled to the plurality of support bars 70. The mounting stage 40 may include a base plate 411 and a plurality of support pins 422.

[0074] The base plate 411 of the mounting stage 40 is disposed on the support bar 70. The base plate 411 can be connected to the support bar 70.

[0075] The support pins 422 of the mounting stage 40 are disposed on the base plate 411. The support pins 422 may have a columnar shape protruding upward from the base plate 411. The support pins 422 are coupled to the base plate 411. For example, one side of the support pins 422 may be coupled to the base plate 411. A spherical ball is disposed on the other end of the support pin 422 and is rotatably coupled to the support pin 422. The plurality of support pins 422 may be arranged in a matrix on the base plate 411.

[0076] The moving body 80 is disposed on the mounting stage 40. For example, the moving body 80 is disposed on the mounting stage 40 so as to overlap the mounting stage 40. The moving body 80 may be movably coupled to the first guide bar 61 and the second guide bar 62. The moving body 80 moves between the first guide bar 61 and the second guide bar 62 along the first rail 61 a of the first guide bar 61 and the second rail 62 a of the second guide bar 62. For example, the moving body 80 is guided by the first rail 61 a and the second rail 62 a and can move on the mounting stage 40 along the first direction DR1 or the first reverse direction DR1. The moving body 80 may include a support 83, a first driving unit 85, a second driving unit 86, a first coupling unit 81, a second coupling unit 82, and a gripper 84.

[0077] The support 83 of the moving body 80 is disposed between the first guide bar 61 and the second guide bar 62. The support 83 may extend along the second direction DR2. The support 83 is disposed on the mounting stage 40 so as to overlap with the mounting stage 40. The support 83 has an "r" shaped cross section.

[0078] The gripper 84 of the moving body 80 is disposed on the support 83. The gripper 84 is disposed below the support 83. The grippers 84 may be arranged in a row along the support 83 in the second direction DR2 between the first guide bar 61 and the second guide bar 62. In other words, the gripper 84 is disposed below the support 83 along the extension direction of the support 83 (e.g., the second direction DR2). The gripper 84 is coupled to and supported by the support 83. The gripper 84 has an "L"-shaped cross section.

[0079] The first coupling part 81 of the moving body 80 may be movably coupled to the first rail 61a of the first guide bar 61. The first coupling part 81 may include a first wheel movably coupled to the first rail 61a, and thus the first coupling part 81 may move along the first rail 61a by being driven by the first wheel.

[0080] The second coupling part 82 of the moving body 80 may be movably coupled to the second rail 62a of the second guide bar 62. The second coupling part 82 may include a second wheel movably coupled to the second rail 62a, so that the second coupling part 82 can move along the second rail 62a by driving the second wheel. The centers of the rotational axes of the first wheel and the second wheel may be parallel to each other and may coincide with each other. The rotational directions of the first wheel and the second wheel may be the same.

[0081] The first driving unit 85 of the moving body 80 is disposed on one side of the support 83. The first driving unit 85 may be connected to one side of the support 83 and one side of the first connecting unit 81. For example, the first driving unit 85 may include a first actuator connected to one side of the support 83. The first actuator extends (or expands) and contracts under the control of the first driving unit 85. The first driving unit 85 may include a first rotation shaft rotatably connected to one side of the first connecting unit 81. The first driving unit 85 rotates clockwise or counterclockwise around the first rotation shaft. The first driving unit 85 may control the rotation direction of the first wheel of the first connecting unit 81.

[0082] The second driving unit 86 of the moving body 80 is disposed on the other side of the support 83. The second driving unit 86 may be connected to the other side of the support 83 and one side of the second coupling unit 82. For example, the second driving unit 86 may include a second actuator connected to the other side of the support 83. The second actuator extends and contracts under the control of the second driving unit 86. The second driving unit 86 may include a second rotation shaft rotatably connected to one side of the second coupling unit 82. The second driving unit 86 rotates clockwise or counterclockwise around the second rotation shaft. The center of the second rotation shaft and the center of the first rotation shaft may be parallel to each other or may coincide with each other. The second driving unit 86 may control the rotation direction of the second wheel of the second coupling unit 82.

[0083] By operation of the first actuator of the first driving unit 85 and the second actuator of the second driving unit 86, the support 83 moves along a direction away from the first driving unit 85 and the second driving unit 86, or moves along a direction toward the first driving unit 85 and the second driving unit 86. For example, when the first actuator and the second actuator each operate in an extending direction, the support 83 can move in a direction away from the first driving unit 85 and the second driving unit 86. Note that when the first actuator and the second actuator each operate in a contracting direction, the support 83 can move in a direction toward the first driving unit 85 and the second driving unit 86. This allows the distance between the support 83 and the mounting stage 40 to be adjusted.

[0084] The support 83 rotates clockwise or counterclockwise around the first rotation axis (or the second rotation axis) due to the operation of the first rotation axis of the first drive unit 85 and the second rotation axis of the second drive unit 86. This allows the support 83 to rotate clockwise or counterclockwise around the first rotation axis of the first drive unit 85 (or the second rotation axis of the second drive unit 86).

[0085] The first drive arm 95 controls the tilt angle of the first guide bar 61. The first drive arm 95 may be rotatably connected to the other side of the first coupling part 81. The first drive arm 95 may include a first link 91 and a second link 92. One side of the first link 91 may be rotatably connected to the first coupling part 81. For example, one side of the first link 91 may be connected to a first rotation shaft of the first drive part 85. The other side of the first link 91 may be rotatably connected to a second link 92. The other side of the second link 92 may be connected to the first drive motor.

[0086] Although not shown in the drawings, a second drive arm that controls the tilt angle of the second guide bar 62 may be further connected to the other side of the second coupling part 82. The second drive arm is disposed opposite the first drive arm 95 and may have substantially the same configuration as the first drive arm 95. For example, the second drive arm may be rotatably connected to the second coupling part 82. The second drive arm may include a third link corresponding to the first link 91 and a fourth link corresponding to the second link 92. One side of the third link may be rotatably connected to the second coupling part 82. For example, one side of the third link may be connected to the second rotation shaft of the second drive part 86. The other side of the third link may be rotatably connected to the fourth link. The other side of the fourth link may be connected to the second drive motor.

[0087] The tilt angle of the first guide bar 61 and the second guide bar 62 is controlled by driving the links of the first drive arm 95 (e.g., the first link 91 and the second link 92) and the links of the second drive arm (e.g., the third link and the fourth link), and thereby the tilt angle of the support bar 70 connected to the guide bars 61 and 62 can be controlled. Furthermore, by controlling the tilt angle of the support bar 70, the tilt angle of the mounting stage 40 connected to the support bar 70 can be controlled. Therefore, the tilt angle of the mounting stage 40 can be controlled by driving the links of the first drive arm 95 (e.g., the first link 91 and the second link 92) and the links of the second drive arm (e.g., the third link and the fourth link).

[0088] A detailed description of the operation of the mounting device 2000 according to one embodiment is as follows.

[0089] First, a carrier 600 (e.g., a carrier 600 storing a substrate tray 700) is placed on the transport means 31 of the mounting device 2000, and the mounting stage 40 is placed on the carrier 600 so as to overlap the carrier 600. At this time, the movable body 80 is placed at one side end of the first guide bar 61 and the second guide bar 62 so as not to cover the first opening 61b of the first guide bar 61 and the second opening 62b of the second guide bar 62. For example, if the transport direction of the transport means 31 (e.g., the first direction DR1) relative to the mounting stage 40 is defined as the downstream direction, and the opposite direction (or reverse direction) to the transport direction of the rollers 32 is defined as the upstream direction, the movable body 80 may be placed at one side end of the first guide bar 61 and the second guide bar 62 in the downstream direction. In this case, the movable body 80 may not overlap the mounting stage 40 or may overlap the edge of the mounting stage 40.

[0090] Thereafter, the substrate 50 is loaded into the mounting apparatus 2000 from outside. For example, the substrate 50 supported by a robot arm is loaded into the mounting apparatus 2000. As a specific example, the robot arm may include a plurality of fingers spaced apart from one another, and the substrate 50 placed on the fingers may be loaded into the mounting apparatus 2000 together with the fingers. For example, the fingers on which the substrate 50 is placed pass through the first opening 61b of the first guide bar 61 and are positioned between the first guide bar 61 and the second guide bar 62. Therefore, the mounting stage 40 is positioned below the fingers so as to overlap the fingers, and the carrier 600 (e.g., the carrier 600 carrying the substrate tray 700) is positioned below the mounting stage 40 so as to overlap the mounting stage 40. In other words, the fingers are disposed between the mounting stage 40 and the substrate 50 between the first guide bar 61 and the second guide bar 62, the mounting stage 40 is disposed between the fingers and the carrier 600, and the carrier 600 is disposed between the mounting stage 40 and the transport means 31. At this time, the mounting stage 40 can be maintained in a horizontal position. For example, the mounting stage 40 and the carrier 600 (or the substrate tray 700 stored in the carrier 600) can be disposed parallel to each other. Note that the fingers are disposed on the mounting stage 40 so as not to overlap with the support pins 422 of the mounting stage 40.

[0091] The fingers then descend toward the mounting stage 40. The descended fingers are positioned between the support pins 422 of the mounting stage 40. As the fingers descend, the substrate 50 placed on the fingers is supported by the support pins 422. In other words, as the fingers descend, the substrate 50 can be supported only by the support pins 422 instead of the fingers. At this time, the lower surface of the substrate 50 can come into contact with the balls of the support pins 422.

[0092] Next, the fingers that have transferred the substrate 50 are ejected to the outside through the first opening 61b.

[0093] The movable body 80 then moves downstream (e.g., in the first direction DR1) along the first guide bar 61 and the second guide bar 62 and is positioned so as to be close to the first side (or edge 51) of the substrate 50 on the mounting stage 40.

[0094] Next, the movable body 80 moves so that the gripper 84 of the movable body 80 is positioned between the mounting stage 40 and the substrate 50. At this time, the gripper 84 supports the lower surface of the substrate 50 (e.g., the lower surface of the first side 51 of the substrate 50) between the support pins 422. For example, the gripper 84 can support the lower surface of the substrate 50 (e.g., the lower surface of the first side 51 of the substrate 50) at one side edge of the mounting stage 40. In this state, the gripper 84 can grip the first side 51 of the substrate 50. Alternatively, the gripper 84 may only support the first side 51 of the substrate 50, without gripping it.

[0095] Thereafter, as described above, the mounting stage 40 tilts with the first edge 51 of the substrate 50 supported by the gripper 84. For example, the mounting stage 40 tilts toward the downstream side as the first guide bar 61 and the second guide bar 62 tilt under the control of the first drive arm 95 and the second drive arm. Specifically, the mounting stage 40 can be tilted at a predetermined angle so that the upper surface of the mounting stage 40 (e.g., the surface on which the support pins 422 are arranged) faces the downstream side of the transport means 31, and the lower surface of the mounting stage 40 (e.g., the surface opposite the upper surface of the mounting stage 40) faces the upstream side of the transport means 31. Here, the angle formed between the upper surface of the tilted mounting stage 40 and the downstream transport means 31 can be an obtuse angle. Also, the angle formed between the lower surface of the tilted mounting stage 40 and the upstream transport means 31 can be an obtuse angle.

[0096] Next, the movable body 80 moves downstream along the first guide bar 61 and second guide bar 62, which are tilted toward the downstream direction, and the carrier 600 also moves downstream on the conveying means 31. At this time, the substrate 50 on the support pins 422 can also move downstream along the inclined surface of the mounting stage 40 together with the movable body 80. For example, the substrate 50 can move downstream together with the movable body 80 while being supported (and / or gripped) by the gripper 84 of the movable body 80. Here, the movable body 80 moves downstream along the inclined first guide bar 61 and second guide bar 62, while the carrier 600 moves downstream along the conveying means 31, which is not tilted and is horizontal. As the movable body 80 and the carrier 600 move downstream, the gripper 84 of the movable body 80 can gradually approach the first hole 41 arranged in the substrate tray 700 of the carrier 600. When the grippers 84 of the moving body 80 overlap the first holes 41 of the substrate tray 700, the movement of the moving body 80 and the carrier 600 stops.

[0097] Thereafter, the movable body 80 descends toward the first holes 41. For example, the support 83 of the movable body 80 descends toward the first holes 41 under the control of the first driving unit 85 and the second driving unit 86. Then, the grippers 84 attached to the support 83 are inserted into the first holes 41. For example, the grippers 84 may be inserted into the first holes 41 while being biased toward the upstream side in each space of the first holes 41. Here, the size of the first holes 41 in the first direction DR1 is larger than the size of the grippers 84 in the first direction DR1. Therefore, when the grippers 84 are inserted into the first holes 41, there may be an extra space (or a gap) between each gripper 84 and each first hole 41. For example, when the grippers 84 are inserted into the first holes 41, there may be an extra space within the first holes 41 to allow the grippers 84 to further move downstream. At this time, as the gripper 84 is inserted into the first hole 41, a part of the substrate 50 (for example, the first side 51 of the substrate 50) may first come into contact with the electrostatic chuck 720 of the substrate tray 700. Note that if the gripper 84 is gripping the substrate 50, the grip of the gripper 84 on the substrate 50 may be released before the moving body 80 descends toward the first hole 41.

[0098] Next, with the gripper 84 inserted into the first hole 41, the movable body 80 moves a predetermined distance downstream and then stops. The gripper 84 can then move downstream into the free space of each first hole 41. As a result, the gripper 84 moves away from the first edge 51 of the substrate 50, and contact between the first edge 51 of the substrate 50 and the gripper 84 is released. At this time, the first edge 51 of the substrate 50 may come into contact with the first clamp 11 of the substrate tray 700 as it moves downstream. In other words, the first edge of the substrate 50 may be supported by the first clamp 11, not by the gripper 84. At this time, the first clamp 11 may function as a stopper that prevents the substrate 50 from moving downstream.

[0099] Thereafter, the first clamp 11, which has been in contact with the first side 51 of the substrate 50, rotates toward the upper surface of the substrate 50 to fix the substrate 50. Therefore, the first side 51 of the substrate 50 and its periphery can be supported and fixed by the first clamp 11.

[0100] Next, with the first edge 51 of the substrate 50 supported and fixed by the first clamp 11, the movable body 80 rises away from the first hole 41. Therefore, the gripper 84 rises after being exposed to the outside within the first hole 41. This allows the gripper 84 to be positioned above the substrate 50 without coming into contact with the substrate 50.

[0101] Thereafter, the carrier 600 moves in the downstream direction with the first edge 51 of the substrate 50 supported and fixed by the first clamp 11. In other words, the mounting stage 40 remains stationary, and the carrier 600 can move further in the downstream direction. As a result, the electrostatic chuck 720 of the substrate tray 700, which was covered by the mounting stage 40, is gradually exposed, and the substrate 50, clamped by the first clamp 11 of the substrate tray 700, gradually moves in the downstream direction together with the substrate tray 700. As a result, the remaining portion of the substrate 50 on the mounting stage 40 can gradually come into contact with the electrostatic chuck 720. In other words, the movement of the carrier 600 causes the substrate tray 700 to move in the downstream direction, and this movement of the substrate tray 700 allows the substrate tray 700 to pull down the substrate 50 from the mounting stage 40 (e.g., a mounting stage 40 tilted toward the downstream side) while gripping the first edge 51 of the substrate 50 on the mounting stage 40. Therefore, as the carrier 600 (or the substrate tray 700 on the carrier 600) moves in the downstream direction, the contact area between the mounting stage 40 (e.g., the support pins 422 of the mounting stage 40) and the substrate 50 may gradually decrease, while the contact area between the electrostatic chuck 720 of the substrate tray 700 housed in the carrier 600 and the substrate 50 may gradually increase. Thus, the substrate 50 on the mounting stage 40 can be transferred from the mounting stage 40 onto the electrostatic chuck 720 of the substrate tray 700 while moving along the downstream direction.

[0102] The carrier 600 then moves further downstream until the carrier 600 and the mounting stage 40 no longer overlap. The substrate 50 can then be moved completely from the mounting stage 40 onto the electrostatic chuck 720 of the substrate tray 700. As the carrier 600 moves downstream, the first edge 51 of the substrate 50, which is closer to the downstream side, begins to contact the electrostatic chuck 720, and then the second edge 52 of the substrate 50 finally contacts the electrostatic chuck 720. At this time, the second edge 52 of the substrate 50 on the electrostatic chuck 720 can be positioned adjacent to the second clamp 12 and the second hole 42 of the substrate tray 700.

[0103] Next, the second clamp 12 rotates toward the upper surface of the substrate 50 to fix the substrate 50. Therefore, the second side 52 of the substrate 50 and its periphery can be supported and fixed by the second clamp 12. As a result, the substrate 50 can be supported and fixed on the electrostatic chuck 720 by the first clamp 11 and the second clamp 12.

[0104] Next, the carrier 600 containing the substrate tray 700 (for example, the substrate tray 700 on which the substrate 50 is placed) moves further downstream along the transport means 31 and is loaded onto the attitude changing device 3000.

[0105] Here, the posture changing device 3000 will be specifically described with reference to FIGS. 5 and 6 as follows.

[0106] FIG. 6 is a detailed configuration diagram of the posture changing device 3000 of FIG.

[0107] The attitude conversion device 3000 converts the attitude of the carrier 600, as shown in Fig. 5. For example, the attitude conversion device 3000 can convert the attitude of the carrier 600 transported along the transport means 31 from a horizontal attitude to a vertical attitude after the attachment process between the substrate 50 and the substrate tray 700 described above. According to one embodiment, the attitude conversion device 3000 is disposed below the transport means 31, as shown in Figs. 5 and 6.

[0108] As shown in FIG. 6, the attitude change device 3000 may include a driver 1100, a first rotating body 1301, a second rotating body 1302, a first connecting portion 1410, a second connecting portion 1420, and at least one support member 1810, 1820.

[0109] The driver 1100 is disposed below the conveying means 31. The driver 1100 is disposed parallel to the conveying direction of the conveying means 31. The driver 1100 may extend along a direction intersecting the conveying direction of the conveying means 31 (e.g., a first direction DR1). The driver 1100 rotates clockwise or counterclockwise. The axis of the driver 1100 may be parallel to the conveying direction of the conveying means 31. For example, the axis of the driver 1100 intersects the axis of the connecting shaft 33. The driver 1100 may have a cylindrical shape.

[0110] The first rotating body 1301 and the second rotating body 1302 are disposed opposite each other with the driver 1100 therebetween. The first rotating body 1301 and the second rotating body 1302 may have the same shape and may have substantially the same configuration.

[0111] The first rotor 1301 is rotatably disposed on one side of the driver 1100. The first rotor 1301 may include a first support 1310, a first coupling portion 1210, and protrusions 1511 and 1512.

[0112] The first support 1310 of the first rotating body 1301 is disposed on one side of the driver 1100. The first support 1310 may extend in a direction intersecting the extension direction of the driver 1100. The length of the first support 1310 in the second direction DR2 is shorter than the length of the carrier 600 in the second direction DR2. For example, the length of the first support 1310 may be shorter than the length of the first bar 601 provided on the carrier 600.

[0113] The first coupling part 1210 of the first rotating body 1301 couples the first support 1310 to one side of the driver 1100. For example, one side of the first coupling part 1210 may be rotatably coupled to one side of the driver 1100, and the other side of the first coupling part 1210 may be coupled to the first support 1310. For example, a portion of the other side of the first coupling part 1210 may be coupled to one end of the first support 1310, and another portion of the other side of the first coupling part 1210 may be coupled to the center of the first support 1310. The first coupling part 1210 may include a first coupling support (1211 in FIG. 8) and a second coupling support (1212 in FIG. 8). The first coupling support 1211 may be connected to one side of the driver 1100 and one end of the first support 1310 , and the second coupling support 1212 may be connected to one side of the driver 1100 and the center of the first support 1310 .

[0114] The multiple protrusions 1511, 1512 of the first rotating body 1301 may include a first protrusion 1511 and a second protrusion 1512. The first protrusion 1511 and the second protrusion 1512 are arranged on the first support base 1310. For example, the first protrusion 1511 is arranged on the first support base 1310 so as to overlap with a portion of the other side of the first coupling portion 81, and the second protrusion 1512 is arranged on the first support base 1310 so as to overlap with a portion of the other side of the first coupling portion 1210. When the carrier 600 is placed on the posture conversion device 3000, the first protrusion 1511 of the first rotating body 1301 is positioned to correspond to the first support member 610 of the carrier 600 that is closest to the third bar 603, and the second protrusion 1512 of the first rotating body 1301 is positioned to overlap the central first support member 610 of the first support member 610 of the carrier 600.

[0115] The second support 1320 of the second rotating body 1302 is disposed on the other side of the driver 1100. The second support 1320 may extend in a direction intersecting the extension direction of the driver 1100. The length of the second support 1320 in the second direction DR2 is shorter than the length of the carrier 600 in the second direction DR2. For example, the length of the second support 1320 may be shorter than the length of the second bar 602 provided on the carrier 600. The length of the second support 1320 may be the same as the length of the first support 1310. The second support 1320 may be parallel to the first support 1310. The second support 1320 is disposed to face the first support 1310.

[0116] The second coupling part 1220 of the second rotating body 1302 couples the second support 1320 to the other side of the driver 1100. For example, one side of the second coupling part 1220 may be rotatably coupled to the other side of the driver 1100, and the other side of the second coupling part 1220 may be coupled to the second support 1320. For example, a portion of the other side of the second coupling part 1220 may be coupled to one end of the second support 1320, and another portion of the other side of the second coupling part 1220 may be coupled to the center of the second support 1320. The second coupling part 1220 may include a first coupling support 1211 and a second coupling support 1212. The first coupling support 1211 may be connected to one side of the driver 1100 and one end of the second support 1320 , and the second coupling support 1212 may be connected to one side of the driver 1100 and the center of the second support 1320 .

[0117] The multiple protrusions 1521, 1522 of the second rotating body 1302 may include a third protrusion 1521 and a fourth protrusion 1522. The third protrusion 1521 and the fourth protrusion 1522 are arranged on the second support base 1320. For example, the third protrusion 1521 is arranged on the second support base 1320 so as to overlap with a portion of the other side of the second coupling portion 1220, and the fourth protrusion 1522 is arranged on the second support base 1320 so as to overlap with a portion of the other side of the second coupling portion 1220. When the carrier 600 is placed on the posture conversion device 3000, the third protrusion 1521 of the second rotating body 1302 is positioned to correspond to the second support member 620 of the carrier 600 that is closest to the third bar 603, and the fourth protrusion 1522 of the second rotating body 1302 is positioned to overlap the central second support member 620 of the second support member 620 of the carrier 600.

[0118] The first connector 1410 connects the first rotor 1301 and the second rotor 1302 to each other. The first connector 1410 is disposed between the first rotor 1301 and the second rotor 1302. For example, one side of the first connector 1410 may be connected to the first support 1310 of the first rotor 1301, and the other side of the first connector 1410 may be connected to the second support 1320 of the second rotor 1302. Specifically, one side of the first connector 1410 may be connected to the center of the first support 1310, and the other side of the first connector 1410 may be connected to the center of the second support 1320. The first connector 1410 may extend along the conveying direction of the conveying means 31 (e.g., the first direction DR1). For example, the first connector 1410 may extend parallel to the driver 1100.

[0119] The second connector 1420 connects the first rotor 1301 and the second rotor 1302 to each other. The second connector 1420 is disposed between the first rotor 1301 and the second rotor 1302. For example, one side of the second connector 1420 may be connected to the first support 1310 of the first rotor 1301, and the other side of the second connector 1420 may be connected to the second support 1320 of the second rotor 1302. Specifically, one side of the second connector 1420 may be connected to one side edge of the first support 1310, and the other side of the second connector 1420 may be connected to one side edge of the second support 1320. The second connector 1420 may extend along the conveying direction of the conveying means 31 (e.g., the first direction DR1). For example, the second connector 1420 may extend parallel to the driver 1100. The second connecting portion 1420 faces the first connecting portion 1410 in the second direction DR2.

[0120] The support members 1810, 1820 are arranged on the connecting portions 1410, 1420. For example, a plurality of the support members 1810, 1820 are arranged on the first connecting portion 1410 and the second connecting portion 1420. Fig. 6 shows an example in which four support members 1810, 1820 are arranged, two by two, on each of the two connecting portions 1410, 1420. For example, two first support members 1810 are arranged on the first connecting portion 1410, protruding upward from the first connecting portion 1410, and two second support members 1820 are arranged on the second connecting portion 1420, protruding upward from the second connecting portion 1420.

[0121] Support members arranged on the same connecting portion are arranged opposite each other. For example, the two first support members 1810 arranged on the first connecting portion 1410 face each other in the first direction DR1. Support members arranged on different connecting portions are arranged opposite each other. For example, the first support member 1810 on the first connecting portion 1410 and the second support member 1820 on the second connecting portion 1420 face each other in the second direction DR2.

[0122] Each support member 1810, 1820 protrudes upward from the corresponding connecting portion. For example, the first support member 1810 protrudes from the first connecting portion 1410 in a direction intersecting the extension direction of the first supporter 1310 (or the second supporter 1320). Each support member 1810, 1820 protrudes higher than the first supporter 1310 (or the second supporter 1320). In other words, each end of each support member 1810, 1820 may be positioned higher than the upper surface of the first supporter 1310 (or the second supporter 1320). For example, if a virtual extension line connecting the upper surface of the first supporter 1310 and the upper surface of the second supporter 1320 is defined as a first extension line, the first support member 1810 protrudes upward to intersect with the first extension line. Furthermore, each of the support members 1810, 1820 protrudes higher upward than the protrusions 1511, 1512, 1521, and 1522. In other words, each end of each of the support members 1810, 1820 may be positioned higher than the upper surfaces of the protrusions 1511, 1512, 1521, and 1522. For example, if a virtual extension line connecting the upper surface of the first protrusion 1511 and the upper surface of the third protrusion 1521 is defined as a second extension line, the first support member 1810 may protrude upward so as to intersect with the second extension line.

[0123] FIG. 7 is an enlarged view of part A in FIG.

[0124] As shown in FIG. 7 , the first support member 1810 may include an extension 1811 and a protrusion 1812. One side of the extension 1811 may be connected to the first connecting portion 1410. The extension 1811 may extend upward from the first connecting portion 1410. The protrusion 1812 is disposed on the other side of the extension 1811. The protrusion 1812 may be rotatably connected to the other side of the extension 1811. For example, the protrusion 1812 rotates around an axis parallel to the first direction DR1. The protrusion 1812 may have a cylindrical shape. However, the shape of the protrusion 1812 is not limited thereto and may be changed to various shapes.

[0125] When the carrier 600 is placed on the attitude conversion device 3000, the first support member 1810 and the second support member 1820 can each contact the electrostatic chuck 720.

[0126] 8, 9, 10, and 11 are diagrams for explaining a method for changing the attitude of the carrier 600 using the attitude changing device 3000 according to one embodiment. For example, Figs. 8 to 11 may be cross-sectional views taken along line II' in Fig. 5.

[0127] First, as shown in Figures 5 and 8, the carrier 600 for which the mounting process has been completed is transported along the transport means 31 to the attitude conversion device 3000. A substrate tray 700 is stored in the carrier 600, and a substrate 50 is placed on the electrostatic chuck 720 of the substrate tray 700. At this time, the carrier 600 loaded on the attitude conversion device 3000 has a horizontal attitude. For example, the carrier 600 loaded on the attitude conversion device 3000 is arranged parallel to the connecting shaft 33 of the transport means 31. Therefore, the substrate tray 700 in the carrier 600 loaded on the attitude conversion device 3000, the electrostatic chuck 720 of the substrate tray 700, and the substrate 50 placed on the electrostatic chuck 720 can also be arranged parallel to the connecting shaft 33 of the transport means 31.

[0128] 8, the electrostatic chuck 720 in the carrier 600 having a horizontal posture is curved downward along the direction of gravity (e.g., the third reverse direction). For example, the electrostatic chuck 720 has a cross section in the shape of a parabola convex in the direction of gravity. Therefore, the substrate 50 on the electrostatic chuck 720 can also have a shape similar to that of the electrostatic chuck 720. For example, the substrate 50 has a cross section in the shape of a parabola convex in the direction of gravity.

[0129] As shown in FIG. 8 , when the carrier 600 is loaded from the mounting device 2000 onto the attitude conversion device 3000, the substrate tray 700 of the carrier 600 is supported by the rollers 32. For example, the support plate 710 of the substrate tray 700 may be supported by the rollers 32. The attitude conversion device 3000 may simply overlap the carrier 600 without contacting the carrier 600. For this reason, as shown in the example of FIG. 8 , the support bases 1310 and 1320 of the attitude conversion device 3000 are arranged parallel to each other along the fourth direction DR4. As a result, when the end 999 of the first support base 1310 is positioned below the connecting shaft 33, the first support base 1310 can form a predetermined angle (θ1) with the connecting shaft 33. Here, the angle (θ1) between the first support base 1310 and the connecting shaft 33 may be an acute angle. Similarly, the angle between the second support 1320 and the connecting shaft 33 may be the same as the angle (θ1) between the first support 1310 and the connecting shaft 33.

[0130] 9, the posture conversion device 3000 rotates counterclockwise toward the carrier 600. For example, the rotors 1301 and 1302 of the posture conversion device 3000 rotate until the support tables 1310 and 1320 are aligned parallel to each other along the second direction DR2. As a result, the support tables 1310 and 1320 and the connecting shaft 33 are aligned parallel to each other. This allows the support tables 1310 and 1320 to come into contact with the carrier 600. Furthermore, the first support member 1810 and the second support member 1820 may come into contact with the electrostatic chuck 720. For example, the protrusions 1812 of the support members 1810 and 1820 may come into contact with the electrostatic chuck 720. At this time, the first support member 1810 and the second support member 1820 protrude higher than the carrier 600, and therefore the electrostatic chuck 720 has a cross section in the shape of a parabola convex in the direction opposite to the direction of gravity (for example, the third direction DR3) due to the first support member 1810 and the second support member 1820. Therefore, the substrate 50 on the electrostatic chuck 720 can also have a cross section in the shape of a parabola convex in the direction opposite to the direction of gravity (for example, the third direction DR3).

[0131] 9, when a voltage is applied to the electrostatic chuck 720 with the support bases 1310 and 1320 and the connecting shaft 33 arranged parallel to each other, the electrostatic force is generated from the electrostatic chuck 720. The electrostatic force attaches the substrate 50 to the electrostatic chuck 720. For example, the electrostatic chuck 720 and the substrate 50 are attached to each other by the support members 1810 and 1820 in a state where they are curved convexly upward from the substrate tray 700.

[0132] Then, as shown in FIG. 10 , the attitude conversion device 3000 further rotates counterclockwise while in contact with the carrier 600. For example, the rotors 1301 and 1302 of the attitude conversion device 3000 rotate until the support bases 1310 and 1320 and the carrier 600 are aligned parallel to the fifth direction DR5. As a result, with the end 999 of the first support base 1310 positioned above the connecting shaft 33, the first support base 1310 can form a predetermined angle (θ2) with the connecting shaft 33. Here, the angle (θ2) between the first support base 1310 and the connecting shaft 33 can be an acute angle. In this case, the angle (θ2) in FIG. 10 can be larger than the angle (θ1) in FIG. 8 . Similarly, the angle between the second support base 1320 and the connecting shaft 33 can be the same as the angle (θ2) between the first support base 1310 and the connecting shaft 33.

[0133] Next, as shown in FIG. 11 , the attitude conversion device 3000 further rotates counterclockwise while in contact with the carrier 600. For example, the rotors 1301 and 1302 of the attitude conversion device 3000 rotate until the support bases 1310 and 1320 and the carrier 600 are aligned parallel to the sixth direction DR6. Therefore, with the end 999 of the first support base 1310 positioned above the connecting shaft 33, the first support base 1310 can form a predetermined angle (θ3) with the connecting shaft 33. Here, the angle (θ3) between the first support base 1310 and the connecting shaft 33 can be an obtuse angle. In this case, the angle (θ3) in FIG. 11 can be larger than the angle (θ2) in FIG. 10 . Similarly, the angle between the second support base 1320 and the connecting shaft 33 can be the same as the angle (θ3) between the first support base 1310 and the connecting shaft 33. 11, the carrier 600 can have a vertical posture. For example, the carrier 600 is disposed approximately perpendicular to the connecting shaft 33 of the transport means 31. Therefore, the substrate tray 700 in the carrier 600 whose posture has been changed by the posture conversion device 3000, the electrostatic chuck 720 of the substrate tray 700, and the substrate 50 disposed on the electrostatic chuck 720 can also be disposed approximately perpendicular to the connecting shaft 33 of the transport means 31.

[0134] After the carrier 600 is gripped by the vertical transfer mechanism, the attitude conversion device 3000 rotates clockwise to return to its original position. For example, as shown in FIG. 8 , the rotors 1301 and 1302 of the attitude conversion device 3000 rotate until the support tables 1310 and 1320 are aligned parallel to each other along the fourth direction DR4. This releases the contact between the first support member 1810 and the second support member 1820 of the attitude conversion device 3000 and the electrostatic chuck 720. In other words, as shown in FIG. 11 , the supporting force of the first support member 1810 and the second support member 1820 on the electrostatic chuck 720 can be removed while the electrostatic chuck 720 is aligned vertically. At this time, even if the supporting force of the first support member 1810 and the second support member 1820 is removed, the vertically oriented electrostatic chuck 720 and the substrate 50 can be maintained in the shape of a parabola that is generally convex in the second reverse direction, as shown in FIG. 11.

[0135] A carrier 600 in a vertical position as shown in FIG. 11 (for example, a carrier 600 in a vertical position including a carrier tray and a substrate 50) is loaded into the mounting device 2000 described above along the conveying means 31. For example, the carrier 600 in a vertical position is conveyed along the conveying means 31 and loaded into the chamber 100 through the first gate G1 of the chamber 100 in FIG. 1. In the chamber 100, a deposition process is performed on the substrate 50 housed in the carrier 600 in a vertical position. At this time, inside the chamber 100, the substrate 50 can be provided with a deposition material while maintaining the vertical position as shown in FIG. 11.

[0136] According to one embodiment, the electrostatic chuck 720 of the substrate tray 700 housed in the carrier 600 in a horizontal position is supported by support members 1810 and 1820. Therefore, while the carrier 600 maintains a horizontal position (e.g., before the position of the carrier 600 is changed), the electrostatic chuck 720 and the substrate 50 on the electrostatic chuck 720 can maintain a parabolic shape that is convex in the direction from the electrostatic chuck 720 to the substrate 50. In other words, when the carrier 600 is in a horizontal position, the electrostatic chuck 720 and the substrate 50 can have substantially the same shape as the electrostatic chuck 720 and the substrate 50 when the carrier 600 is in a vertical position. Therefore, changes in the shapes of the electrostatic chuck 720 and the substrate 50 can be suppressed even during position changes of the carrier 600. If there were no support members, when the carrier 600 changes from a convex curve in the direction of gravity to a convex shape in the direction from the electrostatic chuck 720 to the substrate 50, as shown in FIG. 11 . In other words, without a support member, the shapes of the electrostatic chuck 720 and the substrate 50 may change abruptly when the carrier 600 is changed in position. In such a case, the adhesion between the electrostatic chuck 720 and the substrate 50 may decrease, causing the substrate 50 to slip on the electrostatic chuck 720, resulting in misalignment of the substrate 50. Alternatively, the substrate 50 may be separated from the electrostatic chuck 720. However, according to one embodiment, the electrostatic chuck 720 and the substrate 50 maintain substantially the same shapes as when the carrier 600 is in a vertical position before the carrier 600 is changed in position, thereby solving the above problem. For example, according to one embodiment, the adhesion between the electrostatic chuck 720 and the substrate 50 is stably maintained, and the alignment of the substrate 50 is maintained well, even when the carrier 600 is changed in position. Therefore, the deposition accuracy during the deposition process on the substrate 50 in the deposition apparatus 1000 can be improved.

[0137] FIG. 12 is a cross-sectional view of support 83 and gripper 84 of display mounting apparatus 2000 according to one embodiment.

[0138] 12, the support 83 may include a horizontal portion 83a and a vertical portion 83b. The vertical portion 83b may extend downward from one side of the horizontal portion 83a. For example, the vertical portion 83b may extend from one side of the horizontal portion 83a along a third opposite direction.

[0139] The gripper 84 may include a connecting portion 84a, a first extension portion 84c, a second extension portion 84b, and a pressure means 84d.

[0140] The coupling portion 84 a of the gripper 84 can be connected to the vertical portion 83 b of the support 83 .

[0141] The first extension portion 84c of the gripper 84 may extend along a first opposite direction at one side edge of the connecting portion 84a.

[0142] The second extension 84b of the gripper 84 is disposed on the first extension 84c. For example, the second extension 84b is disposed between the first extension 84c and the support 83. The second extension 84b may extend along the first opposite direction from the center of the coupling portion 84a.

[0143] The pressure applying means 84d of the gripper 84 is disposed between the first extension 84c and the second extension 84b. The pressure applying means 84d may be movably connected to the second extension 84b. For example, the pressure applying means 84d may move between the first extension 84c and the second extension 84b toward the first extension 84c or toward the second extension 84b. The pressure applying means 84d may be connected to an actuator disposed within the second extension 84b, for example.

[0144] The gripper 84 grips the substrate 50 via the pressure means 84d and the first extension 84c. For example, when the pressure means 84d moves toward the first extension 84c, the substrate 50 may come into contact with the first extension 84c and the pressure means 84d. At this time, the substrate 50 can be supported between the first extension 84c and the pressure means 84d due to the pressure applied by the pressure means 84d.

[0145] The gripper 84 may include the aforementioned connecting portion 84a and first extension portion 84c. In other words, the second extension portion 84b and the pressure means 84d may be omitted from the gripper 84 of FIG.

[0146] Those skilled in the art will understand that the present specification can be embodied in other specific forms without changing the technical spirit or essential features thereof. Therefore, the above-described embodiments should be understood to be illustrative in all respects and not limiting. The scope of the present specification is defined not by the above detailed description but by the claims that follow, and all modifications and variations derived from the meaning and scope of the claims and their equivalents should be construed as being within the scope of the present specification.

[0147] In addition, the present specification and drawings disclose preferred embodiments of the present specification, and specific terms are used, but these are used in a general sense merely to easily explain the technical content of the present specification and to aid in understanding the invention, and are not intended to limit the scope of the present specification. It is obvious to a person skilled in the art to which the present specification pertains that, in addition to the embodiments disclosed herein, other modifications based on the technical idea of ​​the present specification can be implemented. [Explanation of symbols]

[0148] 3000 Posture Change Device 1301 First Rotating Body 1302 Second Rotating Body 1310 1st support stand 1210 1st joint 1511 1st protrusion 1512 Second protrusion 1320 2nd support stand 1220 Second joint 1521 Third protrusion 1522 4th protrusion 31 Means of transport 32 Laura 33 Connecting shaft 1810 First support member 1820 Second support member 600 Carriers 1100 Driver 1410 1st connection part 1420 2nd connection part

Claims

1. a drive member disposed below the transport means for transporting a carrier containing substrates and substrate trays; a first rotating body connected to one side of the driving body; a second rotating body connected to the other side of the driving body; a connecting portion that connects the first rotating body and the second rotating body to each other; and a support member on the connecting portion; A device for changing the position of a carrier used in manufacturing display devices.

2. the first rotor is rotatably connected to one side of the driver; 2. The apparatus for changing the attitude of a carrier for use in manufacturing a display device according to claim 1, wherein the second rotating body is rotatably connected to the other side of the driving body.

3. The first rotating body is a first support disposed on one side of the driver; a first coupling portion connecting one side of the driver and the first support; and 2. The apparatus for changing the attitude of a carrier for use in manufacturing a display device according to claim 1, further comprising a first protrusion disposed on the first support table.

4. The second rotating body is a second support disposed on the other side of the driver; a second coupling portion connecting the other side of the driver and the second support; and 4. The apparatus for changing the attitude of a carrier for use in manufacturing a display device according to claim 3, further comprising a second protrusion disposed on the second support table.

5. 5. The apparatus for changing the attitude of a carrier for manufacturing a display device according to claim 4, wherein the connecting portion includes a first connecting portion and a second connecting portion disposed between the first support and the second support.

6. the first connecting portion connects a center portion of the first support stand and a center portion of the second support stand to each other; The apparatus of claim 5 , wherein the second connecting portion connects one side edge of the first support stand and one side edge of the second support stand to each other.

7. The support member is a first support member disposed on the first connecting portion; and The apparatus for changing the attitude of a carrier for use in manufacturing a display device according to claim 6 , further comprising a second support member disposed on the second connecting portion.

8. 8. The apparatus for changing the attitude of a carrier for use in manufacturing a display device according to claim 7, wherein the first support member and the second support member are disposed opposite to each other.

9. 8. The apparatus for changing the attitude of a carrier for use in manufacturing a display device according to claim 7, wherein a plurality of the first support members and a plurality of the second support members are provided.

10. The plurality of first support members are arranged opposite to each other, 10. The apparatus for changing the attitude of a carrier for use in manufacturing a display device according to claim 9, wherein the plurality of second support members are arranged opposite to each other.

11. The support member is an extension on the link; and 2. The apparatus for changing the attitude of a carrier for use in manufacturing a display device according to claim 1, further comprising a protrusion rotatably connected to said extension.

12. 2. The apparatus for changing the attitude of a carrier used in manufacturing a display device according to claim 1, wherein the axis of said driving body is parallel to the conveying direction of said conveying means.

13. 5. The apparatus for changing the attitude of a carrier for use in manufacturing a display device according to claim 4, wherein an end of the support member is disposed higher than each of the upper surfaces of the first support stand and the second support stand.

14. 14. The apparatus of claim 13, wherein the support member intersects with a virtual first extension line connecting an upper surface of the first support stand and an upper surface of the second support stand.

15. 5. The apparatus for changing the attitude of a carrier for use in manufacturing a display device according to claim 4, wherein an end of the support member is positioned higher than each of the upper surfaces of the first protrusion and the second protrusion.

16. The apparatus of claim 15 , wherein the support member intersects with a virtual second extension line connecting an upper surface of the first protrusion and an upper surface of the second protrusion.

17. the length of the first support is shorter than the length of the carrier; 5. The apparatus for changing the attitude of a carrier used in manufacturing a display device according to claim 4, wherein the length of the second support stand is shorter than the length of the carrier.

18. The length of the first support is shorter than the length of the first bar provided on the carrier, 18. The apparatus for changing the attitude of a carrier for manufacturing a display device according to claim 17, wherein the length of the second support stand is smaller than the length of a second bar provided on the carrier.

19. preparing a posture conversion device including a driver, a first rotor connected to one side of the driver and including a first support base, a second rotor connected to the other side of the driver and including a second support base, a connecting portion connecting the first rotor and the second rotor to each other, and a support member on the connecting portion; loading the substrate tray and the carrier containing the substrate into the attitude changing device in a horizontal position via a transport means; rotating the attitude conversion device in one direction toward the carrier to bring the support member and the electrostatic chuck of the substrate tray into contact with each other; Actuating the electrostatic chuck so that the electrostatic chuck provides an electrostatic force; and further rotating the attitude conversion device along the one direction to convert the attitude of the carrier from the horizontal attitude to a vertical attitude. A method for changing the attitude of a carrier for manufacturing a display device.

20. loading the carrier into the attitude conversion device in a horizontal attitude, 20. The method for changing the attitude of a carrier for use in manufacturing a display device according to claim 19, wherein the electrostatic chuck has a convex parabolic shape along a direction from the substrate toward the electrostatic chuck.

21. When the support member and the electrostatic chuck of the substrate tray are brought into contact with each other, 20. The method for changing the attitude of a carrier for use in manufacturing a display device according to claim 19, wherein the electrostatic chuck has a convex parabolic shape along a direction from the electrostatic chuck toward the substrate.

22. In converting the attitude of the carrier from the horizontal attitude to a vertical attitude, 20. The method for changing the attitude of a carrier for use in manufacturing a display device according to claim 19, wherein the electrostatic chuck has a convex parabolic shape along a direction from the electrostatic chuck toward the substrate.

23. 20. The method of claim 19, further comprising rotating the attitude changing device in another direction so as to move away from the carrier changed to the vertical attitude.

24. When rotating the posture change device in the other direction, 24. The method for changing the attitude of a carrier for use in manufacturing a display device according to claim 23, wherein the electrostatic chuck has a convex parabolic shape along a direction from the electrostatic chuck toward the substrate.

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