Information processing method, substrate processing system, and computer program

Abstract

To provide a method for processing information, a substrate processing system, and a computer program capable of controlling maintenance of a substrate processing device using terminal while maintaining security.SOLUTION: When a terminal is connected to one of a plurality of interfaces dispersedly provided in a substrate processing apparatus including a plurality of modules, a module whose operation can be instructed from the terminal among the plurality of modules is displayed on the terminal according to the interface to which the terminal is connected, a selection of a module to be maintained from the modules displayed on the terminal is received by the terminal, and an instruction for maintenance of the selected module is output.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to an information processing method, a substrate processing system, and a computer program. [Background technology]

[0002] A substrate processing apparatus that performs substrate processing such as etching or film formation on substrates such as semiconductor wafers or glass substrates includes multiple modules that individually perform operations for substrate processing, and also includes a display unit that displays information and an operation unit that accepts operations. Information for controlling each module is displayed on the display unit, and each module is controlled in accordance with operations accepted by the operation unit. Patent Document 1 discloses a substrate processing apparatus that uses a remote operation terminal to accept operations via a communication network. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2022-41233 Summary of the Invention [Problem to be solved by the invention]

[0004] Modules included in a substrate processing apparatus may require maintenance, such as cleaning. Maintenance can be facilitated if maintenance information and operations can be displayed and operated using a portable terminal device. However, using a terminal device to control the maintenance of each module may reduce safety. For example, performing maintenance on a module that cannot be visually inspected by a user of the terminal device may be unsafe.

[0005] The present disclosure provides an information processing method, a substrate processing system, and a computer program that enable control of maintenance of a substrate processing apparatus using a terminal device while maintaining safety. [Means for solving the problem]

[0006] In an information processing method according to one aspect of the present disclosure, when a terminal device is connected to one of a plurality of interfaces distributed in a substrate processing apparatus having a plurality of modules, the terminal device displays, depending on the interface to which the terminal device is connected, modules among the plurality of modules for which operation can be instructed from the terminal device, and the terminal device accepts the selection of a module to be maintained from among the modules displayed on the terminal device and outputs maintenance instructions for the selected module. [Effects of the Invention]

[0007] According to the present disclosure, it is possible to provide an information processing method, a substrate processing system, and a computer program that enable control of maintenance of a substrate processing apparatus using a terminal device while maintaining safety. [Brief explanation of the drawings]

[0008] [Figure 1] 1 is a conceptual diagram showing an example of the configuration of a substrate processing system. [Figure 2] FIG. 2 is a block diagram schematically illustrating an example of the internal configuration of the substrate processing apparatus. [Figure 3] FIG. 2 is a block diagram showing an example of the internal configuration of a terminal device. [Figure 4] 3 is a block diagram showing an example of the internal configuration of a control unit and an operation panel. FIG. [Figure 5] FIG. 10 is a conceptual diagram showing an example of the content of restriction information. [Figure 6] 10 is a flowchart illustrating an example of a procedure of a process performed when a terminal device is connected to an interface. [Figure 7] 1A and 1B are schematic diagrams showing an example of a block diagram of a plurality of modules and a list of the plurality of modules; [Figure 8] 10 is a flowchart showing an example of a procedure for performing maintenance on each module included in the substrate processing apparatus using a terminal device. [Figure 9] 10 is a schematic diagram showing an example of content displayed on the terminal device when module selection and maintenance content are accepted. FIG. [Figure 10] 10 is a schematic diagram showing an example of displaying the status of a module that is the subject of maintenance, the details of the maintenance, and the current number of repetitions of the maintenance. FIG. [Figure 11] 10 is a flowchart showing an example of a procedure for handling an alert in each module of the substrate processing apparatus. [Figure 12] FIG. 10 is a schematic diagram showing an example in which modules related to an alert and parameters related to the alert are highlighted. [Figure 13] 10 is a flowchart showing an example of a procedure for a process of preventing data from being transferred to the outside or from remaining in the terminal device 2. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, the present disclosure will be specifically described with reference to the drawings showing embodiments thereof. FIG. 1 is a conceptual diagram showing an example of the configuration of a substrate processing system 100. The substrate processing system 100 includes a substrate processing apparatus 1 and a terminal apparatus 2. For example, the substrate processing apparatus 1 is an apparatus that applies resist to semiconductor wafers, which are substrates, and performs development. The terminal apparatus 2 is connected to the substrate processing apparatus 1 and displays information and receives instructions related to the control of the substrate processing apparatus 1. In particular, the terminal apparatus 2 displays information and receives instructions related to maintenance. The substrate processing apparatus 1 includes multiple blocks. In the example shown in FIG. 1, the substrate processing apparatus 1 includes a carrier station block 13 and a process block 14.

[0010] Fig. 2 is a block diagram schematically illustrating an example of the internal configuration of the substrate processing apparatus 1. The substrate processing apparatus 1 includes multiple modules that individually perform operations for substrate processing. The multiple modules included in the substrate processing apparatus 1 include multiple types of modules, and multiple modules of the same type. Fig. 2 shows an example in which the substrate processing apparatus 1 includes a first module M1, multiple second modules M2, multiple third modules M3, a fourth module M4, multiple fifth modules M5, and multiple sixth modules M6.

[0011] For example, the first module M1 is a module that carries in a cassette containing multiple substrates. For example, the second module M2 is a module that applies resist to semiconductor wafers, which are substrates. For example, the third module M3 is a module that performs development. For example, the fourth module M4 is a module that transports substrates. For example, the fifth module M5 is a module that performs heat treatment on substrates.

[0012] The first module M1 is included in the carrier station block 13, and the second module M2, the third module M3, the fourth module M4, and the fifth module M5 are included in the process block 14. The second module M2 and the third module M3 are stacked vertically, i.e., in the z-axis direction shown in FIG. 1 . The fifth module M5 is also stacked in the z-axis direction. The fourth module M4 is stacked and appropriately positioned between the second module M2, the third module M3, and the fifth module M5. The sixth module M6 is included in the process block 14 and is positioned between the first module M1 and the second module M2, the third module M3, the fourth module M4, and the fifth module M5. For example, the sixth module M6 is a module that places substrates to be transferred between the carrier station block 13 and the process block 14, or a module that adjusts the temperature of the substrates. The sixth modules M6 are stacked in the z-axis direction or arranged side by side in the y-axis direction.

[0013] The substrate processing apparatus 1 is equipped with a fixed operation panel 11 and a control unit 12. The operation panel 11 displays information related to the control of the substrate processing apparatus 1 and receives instructions. The operation panel 11 corresponds to a reception device. The control unit 12 controls the operation of each module equipped in the substrate processing apparatus 1. The operation panel 11 is connected to the control unit 12. The control unit 12 controls the operation of each module in accordance with instructions received by the operation panel 11. In particular, the control unit 12 controls maintenance processing in each module in accordance with instructions received by the operation panel 11. Windows 15 are provided in multiple locations on the substrate processing apparatus 1. A user can observe the inside of the substrate processing apparatus 1 through the windows 15 and check each module.

[0014] The substrate processing apparatus 1 is provided with a plurality of interfaces to which the terminal device 2 can be connected. For example, the interface is a USB (Universal Serial Bus). FIG. 2 shows an example in which the substrate processing apparatus 1 is provided with a first interface I1, a second interface I2, a third interface I3, a fourth interface I4, a fifth interface I5, a sixth interface I6, and a seventh interface I7. The plurality of interfaces are distributed and arranged in various locations in the substrate processing apparatus 1. The first interface I1 is arranged behind the operation panel 11. In the example shown in FIG. 1, the operation panel 11 is arranged on the xz plane of the substrate processing apparatus 1, and the first interface I1 is arranged behind the operation panel 11 in the y-axis direction.

[0015] FIG. 3 is a block diagram showing an example of the internal configuration of the terminal device 2. The terminal device 2 is configured using a computer such as a tablet computer or a notebook computer. The terminal device 2 is portable by a user. The terminal device 2 includes a calculation unit 21, a memory 22, a storage unit 23, a reading unit 24, an operation unit 25, a display unit 26, and a communication unit 27. The calculation unit 21 is configured using, for example, a central processing unit (CPU), a graphics processing unit (GPU), or a multi-core CPU. The calculation unit 21 may be configured using a quantum computer. The calculation unit 21 may be one or more circuits. The memory 22 stores temporary data generated in conjunction with calculations. The memory 22 may be, for example, a random access memory (RAM). The storage unit 23 is nonvolatile and may be, for example, a hard disk or a nonvolatile semiconductor memory, or a combination of a hard disk and a nonvolatile memory. The reading unit 24 reads information from a recording medium 20 such as an optical disk or a portable memory.

[0016] The operation unit 25 receives input of information such as text by receiving operations from the user. The operation unit 25 is, for example, a keyboard, a pointing device, or a touch panel. The display unit 26 displays images. The display unit 26 is, for example, a liquid crystal display or an EL display (Electroluminescent Display). The operation unit 25 and the display unit 26 may be integrated. The communication unit 27 communicates with the outside of the terminal device 2. More specifically, the communication unit 27 is connected to any one of the first interface I1 to the seventh interface I7 via a signal line, and communicates with the control unit 12 through the interface. In this embodiment, the communication unit 27 communicates through any one of the first interface I1 to the seventh interface I7 using wired communication. Note that the communication unit 27 may also be configured to communicate using short-range wireless communication such as Bluetooth (registered trademark).

[0017] The calculation unit 21 causes the reading unit 24 to read the computer program (program product) 231 recorded on the recording medium 20, and stores the read computer program 231 in the storage unit 23. The calculation unit 21 executes processing for realizing the functions of the terminal device 2 in accordance with the computer program 231. The computer program 231 may be stored in the storage unit 23 in advance, or may be downloaded from outside the terminal device 2. In this case, the terminal device 2 does not need to be equipped with the reading unit 24.

[0018] FIG. 4 is a block diagram showing an example of the internal configuration of the control unit 12 and the operation panel 11. The control unit 12 is configured using a computer. The control unit 12 includes an arithmetic unit 121, a memory 122, a storage unit 123, and a connection unit 127. The arithmetic unit 121 is configured using, for example, a CPU, a GPU, or a multi-core CPU. The arithmetic unit 121 may be configured using a quantum computer. The arithmetic unit 121 may be one or more circuits. The memory 122 stores temporary data generated in conjunction with the calculation. The memory 122 may be, for example, a RAM. The storage unit 123 is non-volatile and may be, for example, a hard disk or a non-volatile semiconductor memory, or a combination of a hard disk and a non-volatile memory.

[0019] The storage unit 123 stores a computer program 124. The calculation unit 121 executes processing to realize the functions of the control unit 12 in accordance with the computer program 124. The connection unit 127 is connected to each module included in the substrate processing apparatus 1. The connection unit 127 transmits control signals to each module for controlling the operation of each module. The connection unit 127 also receives information indicating the state of each module from each module.

[0020] An operation panel 11 is connected to the control unit 12. The operation panel 11 has a display unit 111 and an operation unit 112. The display unit 111 is, for example, a liquid crystal display or an EL display. The display unit 111 displays information related to the control of the substrate processing apparatus 1. The operation unit 112 is, for example, a keyboard, a pointing device, or a touch panel. The operation unit 112 is operated by a user to receive instructions for controlling the substrate processing apparatus 1.

[0021] Furthermore, a first interface I1, a second interface I2, a third interface I3, a fourth interface I4, a fifth interface I5, a sixth interface I6, and a seventh interface I7 are connected to the control unit 12. The calculation unit 121 communicates with the terminal device 2 through the interface to which the terminal device 2 is connected. The calculation unit 121 transmits information related to the control of the substrate processing apparatus 1 to the terminal device 2 through the interface, and the terminal device 2 displays the received information on the display unit 26. The control unit 12 may be disposed outside the substrate processing apparatus 1. In this embodiment, the control unit 12 is connected to the substrate processing apparatus 1 via a signal line.

[0022] The terminal device 2 receives instructions for controlling the substrate processing apparatus 1 by a user operating the operation unit 25, and transmits the received instructions to the control unit 12 via the interface. The control unit 12 receives the instructions transmitted from the terminal device 2, and the calculation unit 121 controls each module in accordance with the received instructions. In particular, the control unit 12 displays information related to maintenance for each module on the terminal device 2, the terminal device 2 receives instructions related to maintenance, and the control unit 12 controls the maintenance process for each module in accordance with the received instructions.

[0023] The storage unit 123 stores software data 125 necessary for installing software used by the terminal device 2 to display information related to the control of the substrate processing apparatus 1 and to receive instructions into the terminal device 2. The software installed using the software data 125 is a part or all of a computer program 231 and data used by the computer program 231.

[0024] The operation panel 11 can receive instructions to control all the modules. The control unit 12 controls all the modules in accordance with the instructions received by the operation panel 11. The control unit 12 also limits the modules that can be controlled using the terminal device 2 depending on the interface to which the terminal device 2 is connected. The storage unit 123 stores restriction information 126 that determines whether each module can be controlled. Figure 5 is a conceptual diagram showing an example of the content of the restriction information 126. Figure 5 shows module names and module identification numbers. Multiple modules of the same type are distinguished by their identification numbers.

[0025] FIG. 5 shows interface names. A circle or a cross is associated with a module name, an identification number, and an interface name. A circle indicates that the module associated with the name and identification number can be controlled using a terminal device 2 connected to the interface associated with the name. A cross indicates that the module associated with the name and identification number cannot be controlled using a terminal device 2 connected to the interface associated with the name.

[0026] In the example shown in FIG. 5, all modules can be controlled using the terminal device 2 connected to the first interface I1. That is, the terminal device 2 accepts instructions for controlling all modules. Therefore, the terminal device 2 connected to the first interface I1 can accept the same instructions for controlling the substrate processing apparatus 1 as those that the operation panel 11 can accept. A user can use the terminal device 2 connected to the first interface I1 to perform the same operations as when using the operation panel 11. As shown in FIG. 1, the first interface I1 is located behind the operation panel 11 in the y-axis direction. Even if the user is located behind the operation panel 11, the user can use the terminal device 2 to perform the same operations as when using the operation panel 11.

[0027] In the example shown in FIG. 5, the first, second, third, and fourth modules can be controlled using the terminal devices 2 connected to the second interface I2 and the third interface I3, but the fifth module cannot be controlled. Some sixth modules can be controlled, but the other sixth modules cannot be controlled. The second and third modules can be controlled using the terminal devices 2 connected to the fourth interface I4 and the fifth interface I5, but the first, fourth, fifth, and sixth modules cannot be controlled. The fourth and fifth modules can be controlled using the terminal device 2 connected to the sixth interface I6, but the first, second, and third modules cannot be controlled. Some sixth modules can be controlled, but the other sixth modules cannot be controlled. The fifth module can be controlled using the terminal device 2 connected to the seventh interface I7, but the first, second, third, fourth, and sixth modules cannot be controlled.

[0028] For example, the restrictions on modules that can be controlled using a terminal device 2 connected to an interface other than the first interface I1 are determined according to the relative positions of the interfaces and modules. Modules whose operation can be seen from the position of a user using a terminal device 2 connected to each interface can be controlled, but modules whose operation cannot be seen cannot be controlled.

[0029] For example, when a user uses the terminal device 2 connected to the second interface I2 and the third interface I3, the user can visually observe the operations of the first, second, third, and fourth modules through the window 15. The fifth module is located behind the second, third, and fourth modules in the y-axis direction. From the perspective of a user near the second interface I2 and the third interface I3, the fifth module is located behind the second, third, and fourth modules. Therefore, the user cannot see the fifth module and cannot visually observe its operation. Furthermore, the user can visually observe the operation of the sixth module, which is located close to the second interface I2 and the third interface I3 in the y-axis direction, through the window 15. The sixth module, which is located far from the second interface I2 and the third interface I3 in the y-axis direction, is located behind the other modules from the user's perspective, and the user cannot visually observe the operation of this sixth module.

[0030] In this way, the terminal devices 2 connected to the second interface I2 and the third interface I3 can be used to control modules whose operations can be visually observed by the user. Furthermore, the terminal devices 2 connected to the second interface I2 and the third interface I3 cannot be used to control modules whose operations cannot be visually observed by the user. Similarly, for the other interfaces, the terminal devices 2 connected to the respective interfaces can be used to control modules whose operations can be visually observed by the user, but cannot control modules whose operations cannot be visually observed by the user.

[0031] If a module whose operation cannot be visually observed by the user operates, the user may be late in noticing that a malfunction has occurred in the module. By controlling modules whose operation can be visually observed from the user's position and not controlling other modules, malfunctions can be discovered quickly and the safety of the substrate processing apparatus 1 is maintained. Note that even modules whose operation cannot be visually observed by the user may be set so that they can be controlled using the terminal device 2 connected to the interface. In this case, the restriction information 126 is defined so that modules whose operation cannot be visually observed by the user can be controlled.

[0032] The operation of the substrate processing system 100 will be described. The substrate processing system 100 executes an information processing method. FIG. 6 is a flowchart showing an example of the procedure of processing performed when the terminal device 2 is connected to the interface. Hereinafter, step is abbreviated as S. The calculation unit 121 executes information processing according to the computer program 124, and the control unit 12 executes the following processing. Furthermore, the calculation unit 21 executes information processing according to the computer program 231, and the terminal device 2 executes the following processing.

[0033] The terminal device 2 is connected to one of the interfaces (S101). At this time, the terminal device 2 may perform a process for logging in. If the connected terminal device 2 does not have software installed for displaying information related to the control of the substrate processing apparatus 1 and receiving instructions (S102: NO), the control unit 12 and the terminal device 2 install the software (S103). The user determines whether the software is installed in the terminal device 2, and if the software is not installed, the user operates the operation unit 25 to input an instruction to install the software. The terminal device 2 or the control unit 12 may perform a process for determining whether the software is installed in the terminal device 2.

[0034] In S103, in response to the input instruction to install the software, the terminal device 2 downloads the software data 125 from the control unit 12. The calculation unit 21 installs the software using the software data 125. At this time, a part or all of the computer program 231 may be updated. Note that in S103, the software data 125 may be downloaded from outside the substrate processing apparatus 1 via a communication network and installed. In S103, the installation may be performed automatically without receiving an instruction from the user, or the control unit 12 may install the software in the terminal device 2. After the processing of S103 is completed, the processing of S109, which will be described later, is executed.

[0035] If the software is installed (S102: YES), the terminal device 2 compares the version of the software required to display information related to the control of the substrate processing apparatus 1 and to receive instructions with the version of the software installed in the terminal device 2 (S104). The software required to display information related to the control of the substrate processing apparatus 1 and to receive instructions corresponds to the first software. The software installed in the terminal device 2 corresponds to the second software. The control unit 12 stores the version of the software required to control the substrate processing apparatus 1. In S104, the calculation unit 21 obtains the version of the software required to control the substrate processing apparatus 1 from the control unit 12 and compares the version of the software required to control the substrate processing apparatus 1 with the version of the software installed in the terminal device 2. The comparison of the software versions may be performed by the control unit 12. The terminal device 2 determines whether the version of the software installed in the terminal device 2 is older than the version of the software required to control the substrate processing apparatus 1 (S105). The determination of the software version may be performed by the control unit 12.

[0036] If the software version is old (S105: YES), the terminal device 2 upgrades the installed software (S106). In S106, the calculation unit 21 downloads the software data 125 from the control unit 12, and installs the software using the software data 125. As a result, the software installed in the terminal device 2 is upgraded to match the version of the software required to control the substrate processing apparatus 1. The software may be upgraded by the control unit 12. After the processing of S106 is completed, the processing of S109, which will be described later, is executed.

[0037] If the software version is not old (S105: NO), the terminal device 2 determines whether the version of the software installed in the terminal device 2 is newer than the version of the software required to control the substrate processing apparatus 1 (S107). The determination of the software version may be performed by the control unit 12. If the software version is newer (S107: YES), the terminal device 2 downgrades the installed software (S108). In S108, the calculation unit 21 downloads software data 125 from the control unit 12 and installs the software using the software data 125. As a result, the software installed in the terminal device 2 is downgraded to match the version of the software required to control the substrate processing apparatus 1. The software downgrade may be performed by the control unit 12.

[0038] The process of S103 installs software required to display information related to the control of the substrate processing apparatus 1 and to accept instructions in the terminal device 2. The processes of S104 to S108 make the version of the software installed in the terminal device 2 match the version of the software required to display information related to the control of the substrate processing apparatus 1 and to accept instructions. These processes enable the terminal device 2 to execute the process of displaying information related to the control of the substrate processing apparatus 1 and to accept instructions.

[0039] In order to upgrade the software required to control the substrate processing apparatus 1, the substrate processing apparatus 1 must be shut down, which halts substrate production. This makes it difficult to upgrade the software. Furthermore, the upgraded software may not be compatible with all modules included in the substrate processing apparatus 1. Therefore, the available software versions may differ depending on the modules included in the substrate processing apparatus 1. As such, the software version required to control the substrate processing apparatus 1 may differ for each apparatus. In this embodiment, the terminal apparatus 2 can flexibly match the software version to the substrate processing apparatus 1, so that even in a situation where multiple substrate processing apparatuses 1 are present, all of the substrate processing apparatuses 1 can be controlled by the terminal apparatus 2. Furthermore, different types of substrate processing apparatuses 1 can also be controlled by the terminal apparatus 2.

[0040] When the processing of S103, S106, or S108 is completed, or when the software version is not new in S107 (S107: NO), the control unit 12 determines whether the number of terminal devices 2 connected to the multiple interfaces exceeds a predetermined first number (S109). The control unit 12 stores the first number in advance in the storage unit 123. In S109, the calculation unit 121 compares the number of terminal devices 2 connected to the multiple interfaces with the stored first number. For example, the first number is 3.

[0041] If the number of terminal devices 2 connected to multiple interfaces exceeds the first number (S109: YES), the control unit 12 ends the process. This corresponds to a case where the first number of terminal devices 2 are connected to multiple interfaces and another terminal device 2 is newly connected to the interface. In this way, the control unit 12 prevents the terminal device 2 from executing S110, which will be described later and is required for selecting a module to be maintained. As a result, the control unit 12 prohibits the terminal device 2 newly connected to the interface from accepting the selection of a module to be maintained and prohibits the terminal device 2 newly connected to the interface from performing maintenance-related processing for the module. At this time, the terminal device 2 may display a message on the display unit 26 indicating that maintenance-related processing is not possible. For example, a message explaining that maintenance-related processing is not possible due to the large number of terminal devices 2 connected to multiple interfaces may be displayed. For example, a message indicating the number of terminal devices 2 connected to multiple interfaces or the location of the interface to which the other terminal device 2 is connected may be displayed. The processing of S109 and the processing of prohibiting a terminal device 2 newly connected to the interface from accepting the selection of a module to be maintained when the number of connected terminal devices 2 exceeds the first number may be performed by the terminal device 2.

[0042] If the number of terminal devices 2 connected to the multiple interfaces does not exceed the first number (S109: NO), the terminal device 2 displays a block diagram of the multiple modules and a list of the multiple modules on the display unit 26 (S110), and the control unit 12 ends the processing. The control unit 12 and terminal device 2 end the processing of S101 to S110 each time a terminal device 2 is connected to any of the interfaces.

[0043] FIG. 7 is a schematic diagram showing an example of a block diagram 31 of multiple modules and a list 32 of multiple modules. The block diagram 31 of multiple modules is displayed. In the block diagram 31, each module is displayed as a block including the module name and identification number. The block diagram 31 may also show the layout of each module. The list 32 of multiple modules includes the name and identification number of each module. The block diagram 31 of multiple modules shows modules whose operation can be instructed from the terminal device 2 according to the interface to which the terminal device 2 is connected. More specifically, the terminal device 2 displays modules whose operation can be instructed from the terminal device 2 in the block diagram 31 on the display unit 26 in a color different from that of the other modules.

[0044] 7 shows an example of a block diagram 31 of multiple modules and a list 32 of multiple modules that are displayed when a terminal device 2 is connected to the second interface I2 or the third interface I3. As shown in FIG. 5, the first module M1, the second module M2, the third module M3, and the fourth module M4 can be controlled using the terminal device 2 connected to the second interface I2 or the third interface I3. The fifth module M5, which cannot be controlled using the terminal device 2, is displayed in gray, and the first module M1, the second module M2, the third module M3, and the fourth module M4 are displayed in different colors.

[0045] In this way, the terminal device 2 displays modules that can be controlled using the terminal device 2, i.e., modules whose operations can be instructed from the terminal device 2, in a color different from that of modules whose operations cannot be instructed from the terminal device 2. In S110, the calculation unit 21 creates an image of the module blocks in different colors based on the restriction information 126 stored in the memory unit 123 of the control unit 12, and displays the created image on the display unit 26. By changing the colors of the modules, a user who visually checks the content displayed on the display unit 26 can easily recognize modules whose operations can be instructed from the terminal device 2.

[0046] It should be noted that a method other than using different colors may be used to distinguish between modules that can be instructed to operate from the terminal device 2 and modules that cannot be instructed to operate from the terminal device 2. For example, the modules may be distinguished by flashing modules that can be instructed to operate from the terminal device 2, or by not displaying modules that cannot be instructed to operate from the terminal device 2. In the list 32 of multiple modules, a distinction may also be made between modules that can be instructed to operate from the terminal device 2 and modules that cannot be instructed to operate from the terminal device 2.

[0047] Furthermore, when displaying a block diagram 31 of multiple modules as shown in FIG. 7, the terminal device 2 displays that the terminal device 2 cannot instruct the operation of a module that is operating according to instructions different from those from the terminal device 2. For example, the terminal device 2 displays a module that is operating according to instructions from another terminal device connected to the interface or a module that is operating according to instructions from the operation panel 11, surrounded by a thick frame. In the example shown in FIG. 7, the second module M2-04 and the third module M3-04 are displayed surrounded by a thick frame. In S110, the calculation unit 21 obtains information about the modules that are operating according to instructions from the other terminal device or the operation panel 11 from the control unit 12, creates an image including blocks of the identification information modules surrounded by a thick frame, and displays the created image on the display unit 26.

[0048] By displaying the module surrounded by a thick frame, it is indicated that the module cannot be instructed to operate from the terminal device 2. The user can easily recognize a module that is operating according to instructions different from those from the terminal device 2. Note that the fact that the module cannot be instructed to operate from the terminal device 2 may be indicated in a manner other than surrounding the module with a thick frame. For example, the color of the displayed module may be different, or the color of the frame of the displayed module may be different. A character or graphic indicating that the module cannot be instructed to operate from the terminal device 2 may be attached to the module. Furthermore, in the list 32 of multiple modules, it may be indicated that a module that is operating according to instructions different from those from the terminal device 2 cannot be instructed to operate from the terminal device 2.

[0049] The list 32 of multiple modules indicates whether or not each module is in a state where it can perform an operation for substrate processing. In the example shown in FIG. 7, action on and action off buttons, one of which is filled in, are displayed in association with each module. A filled action on button indicates that the module is in a state where it can perform an operation for substrate processing. A filled action off button indicates that the module is not in a state where it can perform an operation for substrate processing. Each module performs maintenance processing in a state where it is not in a state where it can perform an operation for substrate processing. In S110, the calculation unit 21 acquires information indicating whether or not each module is in a state where it can perform an operation for substrate processing from the control unit 12, and displays the list 32 of multiple modules, including action on and action off buttons, one of which is filled in, on the display unit 26 based on the acquired information.

[0050] When the action-on button is solid, i.e., when the module is in a state where it is capable of operating for substrate processing, the module cannot perform maintenance. To perform module maintenance, the module's state must be changed to a state where it is not capable of operating for substrate processing. To perform module maintenance, the user must check the list 32 of multiple modules and perform an operation to change the module's state, preventing unexpected module maintenance. This prevents the start of maintenance from suddenly stopping substrate production by the substrate processing apparatus 1. While a module is operating for substrate processing, the terminal device 2 or the control unit 12 prohibits the process of solidifying the action-off button, i.e., the process of changing the module's state to a state where it is not capable of operating for substrate processing. This prevents the occurrence of module maintenance being accidentally performed while substrate processing is in progress.

[0051] The substrate processing system 100 performs maintenance on each module. Fig. 8 is a flowchart showing an example of a processing procedure for performing maintenance on each module included in the substrate processing apparatus 1 using the terminal device 2. The terminal device 2 changes the state of a module that is to undergo maintenance among the multiple modules included in the substrate processing apparatus 1 to a state in which no operation for substrate processing is performed (S201).

[0052] In S201, the user operates the operation unit 25, whereby the terminal device 2 receives an instruction to change the state of the module to be maintained to a state in which no operation for substrate processing is performed. For example, the user operates the operation unit 25 to input an instruction to the terminal device 2 to fill in the action-off button associated with the module to be maintained in the list 32 of multiple modules. The calculation unit 21 transmits the received instruction to the control unit 12, and the control unit 12 changes the state of the module to be maintained in accordance with the instruction. The terminal device 2 may receive an instruction to change the states of multiple modules and perform processing to change the states of the multiple modules. If the state of the module to be maintained is already a state in which no operation for substrate processing is performed, the processing of S201 may be omitted.

[0053] The terminal device 2 receives a maintenance instruction when the user operates the operation unit 25 (S202). The terminal device 2 then receives a selection of a module to be maintained (S203). After receiving the maintenance instruction in S202, the calculation unit 21 displays a list of modules that can be maintained on the display unit 26 in S203, and receives a selection of a module to be maintained from the list when the user operates the operation unit 25. The terminal device 2 then receives the details of the maintenance to be performed on the module (S204). In S204, the user operates the operation unit 25, and the calculation unit 21 receives the details of the maintenance.

[0054] 9 is a schematic diagram showing an example of the content displayed by the terminal device 2 when accepting module selection and maintenance content. In S202, the calculation unit 21 displays a list of modules that can be maintained on the display unit 26. The calculation unit 21 displays a list of modules that can accept maintenance instructions from the terminal device 2 on the display unit 26. At this time, the calculation unit 21 displays a list on the display unit 26 that does not include modules for which operation instructions cannot be received from the terminal device 2 and modules that are in a state where operation for substrate processing is possible. FIG. 9 shows an example in which the second module M2-03 has been selected as the maintenance target.

[0055] After receiving the selection of the module to be maintained in S203, in S204, the calculation unit 21 displays a list of maintenance contents that can be performed on the selected module on the display unit 26, as shown in FIG. 9. The maintenance contents include, for example, purging a specific part in the module, cleaning a specific part, moving a specific part, or replacing a specific part. The user operates the operation unit 25 to select the maintenance content to be performed from the list of maintenance contents. When the maintenance content is selected, the calculation unit 21 accepts the maintenance content. In S204, the terminal device 2 may further accept detailed settings of the maintenance content.

[0056] The terminal device 2 may accept the selection of multiple modules to be maintained in parallel. In this case, the terminal device 2 executes the processes of S203 to S204 multiple times. Maintenance can be repeated for each module multiple times. In S204, the terminal device 2 may accept the number of times that the maintenance should be repeated along with the content of the maintenance. The number of times that the maintenance should be repeated may be determined in advance. Through the processes of S202 to S204, the terminal device 2 accepts instructions to cause each module to perform maintenance.

[0057] Furthermore, in the process of S203, the terminal device 2 prohibits the acceptance of the selection of modules whose number exceeds a predetermined second number as maintenance targets. For example, the second number is four. In S203, the calculation unit 21 counts the number of modules selected as maintenance targets, and after the number of selected modules reaches the predetermined second number, prohibits the acceptance of any further selection of modules as maintenance targets. This limits the number of modules for which maintenance is performed using the terminal device 2. Furthermore, the terminal device 2 may display a message on the display unit 26 indicating that the selection of a module cannot be accepted. For example, a message explaining that the number of modules already selected as maintenance targets has reached the second number may be displayed. For example, a message indicating the number of modules already selected as maintenance targets may be displayed. The process of prohibiting the acceptance of the selection of modules whose number exceeds the predetermined second number as maintenance targets may be performed by the control unit 12.

[0058] The terminal device 2 then outputs a maintenance instruction for the module to be maintained (S205). In S205, the calculation unit 21 transmits, as a maintenance instruction, an instruction to the control unit 12 to cause the module to be maintained to perform maintenance. At this time, the calculation unit 21 transmits information indicating the module to be maintained and the content of the maintenance to the control unit 12. The control unit 12 causes the module to be maintained to perform maintenance. The content of the maintenance to be performed is the same as the content of the maintenance received by the terminal device 2. The terminal device 2 transmits the number of times the maintenance should be repeatedly performed to the control unit 12, and the control unit 12 causes the module to repeatedly perform the maintenance. The control unit 12 may also cause the module to repeatedly perform the maintenance a predetermined number of times. The terminal device 2 may also output a maintenance instruction to cause multiple modules selected as maintenance targets to perform maintenance in parallel.

[0059] The terminal device 2 displays the status of the module that is the maintenance target, the details of the maintenance, and the current number of times the maintenance has been repeated (S206). In S206, the control unit 12 transmits information indicating the status of the module and the number of times the maintenance has been repeated to the terminal device 2, and the calculation unit 21 displays the status of the module, the details of the maintenance, and the current number of times the maintenance has been repeated based on the information from the control unit 12. Fig. 10 is a schematic diagram showing an example of a display of the status of the module that is the maintenance target, the details of the maintenance, and the current number of times the maintenance has been repeated. The fact that the module is in a state where maintenance is being performed, the details of the maintenance being performed, and the current number of times the maintenance has been repeated are displayed in association with the name of the module.

[0060] In S206, the terminal device 2 may display the status of multiple modules undergoing maintenance in parallel, the details of the maintenance being performed, and the current number of repetitions of the maintenance. Fig. 10 shows an example of displaying information about the maintenance of multiple modules. By visually checking the displayed details, the user can confirm the status of the maintenance of each module being performed in the substrate processing apparatus 1.

[0061] The terminal device 2 determines whether maintenance is being performed on the module (S207). In S207, the calculation unit 21 acquires the status of the module that is the maintenance target from the control unit 12 and makes a determination. If the maintenance is completed and maintenance is not being performed (S207: NO), the terminal device 2 ends the processing for maintenance. If maintenance is being performed (S207: YES), the terminal device 2 determines whether an instruction to stop the maintenance being performed has been received (S208). While maintenance is being performed on the module, the user operates the operation unit 25, thereby inputting some instruction for the module under maintenance to the terminal device 2. In S208, the calculation unit 21 determines whether the input instruction is an instruction to stop maintenance.

[0062] If an instruction to stop the maintenance is received (S208: YES), the terminal device 2 stops the maintenance being performed on the module (S209). In S209, the calculation unit 21 transmits an instruction to stop the maintenance to the control unit 12, and the control unit 12 controls the module to stop the maintenance being performed. After S209 ends, the terminal device 2 ends the processing for maintenance.

[0063] If an instruction to stop the ongoing maintenance has not been received (S208: NO), the terminal device 2 prohibits the reception of instructions to modules other than the suspension of maintenance for the module under maintenance (S210). In S210, the calculation unit 21 prohibits the reception of instructions to modules other than the suspension of maintenance for the module under maintenance. The terminal device 2 returns the process to S206. By prohibiting the reception of instructions other than the suspension of maintenance, the terminal device 2 enables each module to stably perform maintenance.

[0064] In the substrate processing apparatus 1, parameter settings related to the state of each module are set in advance, and an alert is issued if a parameter deviates from the set value. For example, the parameters may be the thickness of the resist applied to the substrate, the amount of resist discharged from the nozzle, the movement speed of parts moving for substrate processing, the amount of air intake and exhaust for the module, the temperature of specific parts within the module, or the time for substrate processing in the module. The parameter values ​​are measured in each module.

[0065] For example, an upper or lower limit of a parameter is set as a set value, and an alert is issued when the measured parameter value exceeds the upper set value or falls below the lower set value. The control unit 12 stores the set value of the parameter for each module in the storage unit 123, and issues an alert based on a comparison between the measured parameter value for each module and the set value. For example, when the value of a parameter for a certain module deviates from the set value, the control unit 12 issues an alert for that module.

[0066] 11 is a flowchart showing an example of a processing procedure for handling an alert in each module included in the substrate processing apparatus 1. The terminal device 2 detects the occurrence of an alert (S31). In S31, the control unit 12 transmits an alert to the terminal device 2, and the terminal device 2 detects the alert by receiving the alert from the control unit 12. The terminal device 2 highlights a module related to the alert in a list 32 of multiple modules displayed on the display unit 26 (S32). In S32, the calculation unit 21 creates an image highlighting the module related to the alert from the control unit 12, and displays the created image on the display unit 26.

[0067] The terminal device 2 highlights and displays the parameters related to the alert on the display unit 26 (S33). The parameters related to the alert are specific parameters that caused the alert by their values ​​deviating from their set values. The calculation unit 21 acquires the set values ​​and current values ​​of the specific parameters from the control unit 12, and displays a list 32 of multiple modules including the acquired parameter values ​​on the display unit 26. At this time, the calculation unit 21 highlights and displays the set values ​​and current values ​​of the parameters related to the alert on the display unit 26. Parameters other than the parameters that caused the alert may be used as parameters related to the alert. For example, parameters related to the parameters that caused the alert may be stored in the storage unit 123, and the control unit 12 may determine that the parameters related to the parameters that caused the alert are parameters related to the alert and notify the terminal device 2 of this.

[0068] FIG. 12 is a schematic diagram showing an example in which a module related to an alert and parameters related to the alert are highlighted. A block diagram 31 of multiple modules and a list 32 of multiple modules are displayed, and in the module list 32, a module related to the alert is highlighted, and the parameter setting values ​​and current values ​​are displayed. FIG. 12 shows an example in which an alert has occurred for the second module M2-03. The module name is highlighted by surrounding it with a bold frame. The parameter setting values ​​and current values ​​related to the alert are also displayed and highlighted by surrounding it with a bold frame. Highlighting may be performed by methods other than surrounding it with a bold frame.

[0069] After S33 is completed, the terminal device 2 ends the process of handling the alert. By highlighting the module related to the alert, the user can confirm the module in which the alert occurred. By highlighting the parameters related to the alert, the user can confirm the parameters related to the alert. For example, the user can determine the details of maintenance for the module so as to improve the value of the parameter related to the alert.

[0070] In order to prevent leakage of confidential data related to the substrate processing apparatus 1, the terminal apparatus 2 executes a process of preventing data from being transferred to the outside of the substrate processing system 100 or from remaining in the terminal apparatus 2. The confidential data may be, for example, a recipe indicating the details of the substrate processing, parameters related to the state of each module, or log data recording the processing results in the substrate processing apparatus 1. FIG. 13 is a flowchart showing an example of the procedure for the process of preventing data from being transferred to the outside or from remaining in the terminal apparatus 2. The terminal apparatus 2 receives an instruction for a predetermined process related to the transfer of data to the outside of the substrate processing system 100 or the remaining of data in the terminal apparatus 2 (S41). In S41, the calculation unit 21 receives the instruction for the predetermined process by the user operating the operation unit 25.

[0071] The process related to external data transfer is a process that may cause data to be transferred from the terminal device 2 to outside the substrate processing system 100. For example, the process related to external data transfer is a process of transmitting data acquired from the substrate processing apparatus 1 to outside the substrate processing system 100 from the communication unit 27. For example, the process related to external data transfer is a process of recording data acquired from the substrate processing apparatus 1 to a portable recording medium such as a nonvolatile semiconductor memory. When the process related to external data transfer is performed, confidential data related to the substrate processing apparatus 1 may be leaked.

[0072] The process related to data remaining in the terminal device 2 is a process that may cause data related to the substrate processing apparatus 1 to remain in the terminal device 2. For example, the process related to data remaining in the terminal device 2 is a screenshot. The screenshot allows the content of the data displayed on the display unit 26 by the terminal device 2 to remain in the terminal device 2. For example, the process related to data remaining in the terminal device 2 is a data export. The data export allows the data acquired by the terminal device 2 from the substrate processing apparatus 1 to remain in the terminal device 2. If confidential data related to the substrate processing apparatus 1 remains in the terminal device 2, there is a possibility that the confidential data will be leaked from the terminal device 2 after the terminal device 2 becomes disconnected from the substrate processing apparatus 1.

[0073] The terminal device 2 prohibits a predetermined process related to the transfer of data to the outside or the retention of data in the terminal device 2 (S42). In S42, the calculation unit 21 does not execute the process according to the received instruction. The predetermined process to be prohibited is determined in advance, and information related to the predetermined process to be prohibited is pre-stored in the memory unit 23 or the memory unit 123 of the control unit 12. Processes other than the exemplified processes related to the transfer of data to the outside or the retention of data in the terminal device 2 may be prohibited. The terminal device 2 may display on the display unit 26 that the process is prohibited. The control unit 12 may execute the process of S42. After S42 is completed, the terminal device 2 terminates the process. By prohibiting the process related to the transfer of data to the outside or the retention of data in the terminal device 2, confidential data related to the substrate processing apparatus 1 is prevented from being transferred outside the substrate processing system 100 or from remaining in the terminal device 2. This prevents confidential data related to the substrate processing apparatus 1 from being leaked.

[0074] As described above, in this embodiment, when the terminal device 2 is connected to one of the multiple interfaces distributed in the substrate processing apparatus 1, the terminal device 2 displays the modules included in the substrate processing apparatus 1. At this time, the terminal device 2 displays, among the multiple modules, modules for which operation can be instructed from the terminal device 2, according to the interface to which the terminal device 2 is connected. The terminal device 2 accepts selection of a module to be maintained from among the modules for which operation can be instructed from the terminal device 2, and outputs maintenance instructions for the selected module. Maintenance of the modules included in the substrate processing apparatus 1 can be controlled using the terminal device 2, which can be carried by the user. Compared to a configuration in which maintenance is controlled using only the operation panel 11, this increases the degree of freedom in maintenance and improves maintainability.

[0075] In this embodiment, modules for which operation can be instructed from the terminal device 2 are displayed according to the interface to which the terminal device 2 is connected. That is, modules for which maintenance control can be performed using the terminal device 2 are limited according to the interface to which the terminal device 2 is connected. A user using the terminal device 2 connected to the interface can only visually observe some of the multiple modules included in the substrate processing apparatus 1. The modules that the user can visually observe are determined according to the user's position, and the user's position is determined according to the interface to which the terminal device 2 is connected. Therefore, modules for which maintenance control can be performed using the terminal device 2 can be limited according to the interface to which the terminal device 2 is connected so that modules that the user cannot visually observe cannot be controlled.

[0076] If a malfunction occurs during maintenance of a module that cannot be visually inspected by the user, the user may be slow to notice the malfunction. By preventing control of a module that cannot be visually inspected by the user, malfunctions can be discovered quickly during maintenance, and safety is maintained during maintenance of the substrate processing apparatus 1. Therefore, in this embodiment, maintenance of the substrate processing apparatus 1 can be controlled using the terminal device 2 while maintaining safety, improving the maintainability of the substrate processing apparatus 1.

[0077] The configuration of the substrate processing apparatus 1 described in this embodiment is an example. The substrate processing apparatus 1 may be a coating apparatus, a lithography apparatus, an exposure apparatus, a cleaning apparatus, an etching apparatus, a film forming apparatus, an apparatus for bonding or peeling substrates, or the like.

[0078] The present invention is not limited to the contents of the above-described embodiment, and various modifications are possible within the scope of the claims. In other words, embodiments obtained by combining technical means modified appropriately within the scope of the claims are also included in the technical scope of the present invention.

[0079] The matters described in each embodiment can be combined with each other. Furthermore, the independent claims and dependent claims described in the claims can be combined with each other in any and all combinations, regardless of the reference format. Furthermore, the claims use a format in which a claim references two or more other claims (multiple claim format), but this is not limited to this. A multiple claim (multi-multi claim) that references at least one other multiple claim may also be used. [Explanation of symbols]

[0080] 1. Substrate processing equipment 11 Operation panel (reception device) 12 Control Unit 2. Terminal Device 20 Recording Media 21 Arithmetic section 23 Memory section 231 Computer Programs I1, I2, I3, I4, I5, I6, I7 interfaces

Claims

1. When a terminal device is connected to one of a plurality of interfaces distributed in a substrate processing apparatus having a plurality of modules, a module that can be instructed to operate from the terminal device among the plurality of modules is displayed on the terminal device in accordance with the interface to which the terminal device is connected; Accepting, at the terminal device, a selection of a module to be maintained from among the modules displayed on the terminal device; Prints maintenance instructions for the selected module Information processing methods.

2. The terminal device receives the details of the maintenance for the module to be maintained; Output maintenance instructions according to the received content The information processing method according to claim 1 .

3. Accepting a selection of a plurality of modules to be maintained in parallel at the terminal device; Output maintenance instructions to perform maintenance on multiple selected modules in parallel The information processing method according to claim 1 .

4. The terminal device displays a list of the status of multiple modules undergoing maintenance in parallel and the details of the maintenance being performed. The information processing method according to claim 3 .

5. While maintenance of a module is being performed, instructions for the module other than stopping the maintenance are not accepted from the terminal device. The information processing method according to claim 1 .

6. When a part of the maintenance of a module is repeatedly performed, the number of times of repetition and the status of the module undergoing maintenance are displayed on the terminal device. The information processing method according to claim 1 .

7. A module whose operation can be instructed from the terminal device is displayed on the terminal device in a color different from that of other modules. The information processing method according to claim 1 .

8. For a module that is operating according to an instruction different from an instruction from the terminal device, a message is displayed on the terminal device indicating that the operation cannot be instructed from the terminal device. The information processing method according to claim 1 .

9. displaying a list of the plurality of modules on the terminal device; Using the list of the plurality of modules, an instruction to change the state of any one of the modules from a state in which substrate processing can be performed to a state in which maintenance can be performed is received. The information processing method according to claim 1 .

10. When an alert occurs in relation to a module, highlighting the module related to the alert in the list of the plurality of modules displayed on the terminal device; The parameters related to the alert are highlighted and displayed on the terminal device. The information processing method according to claim 1 .

11. Prohibits the transfer of data to an external party or the retention of data in the terminal device. The information processing method according to claim 1 .

12. When a predetermined first number of terminal devices are connected to any one of the plurality of interfaces, if another terminal device is connected to any one of the plurality of interfaces, prohibiting the other terminal device from accepting a selection of a module to be maintained; The terminal device is prohibited from accepting selection of modules exceeding a predetermined second number as maintenance targets. The information processing method according to claim 1 .

13. When a terminal device is connected to one of the plurality of interfaces, a version of first software required to instruct an operation of a module included in the substrate processing apparatus is compared with a version of second software installed in the terminal device; When a version of the second software is older than a version of the first software, the first software is installed in the terminal device to upgrade the version of the software installed in the terminal device; The second software version is higher than the first software version. If the software is newer, the first software is installed in the terminal device, thereby downgrading the version of the software installed in the terminal device. The information processing method according to claim 1 .

14. the substrate processing apparatus includes a fixed receiving device that receives a plurality of instructions for controlling the substrate processing apparatus; When a terminal device is connected to a specific interface among the plurality of interfaces, the terminal device receives a plurality of instructions that are the same as the plurality of instructions that the receiving device can receive; When a terminal device is connected to an interface different from the specific interface, only some of the instructions that can be accepted by the accepting device are accepted by the terminal device. The information processing method according to claim 1 .

15. a substrate processing apparatus including a plurality of modules; a terminal device, the substrate processing apparatus has a plurality of interfaces arranged in a distributed manner; The terminal device When connected to one of the plurality of interfaces, a module that can be instructed to operate from the terminal device among the plurality of modules is displayed in accordance with the connected interface; From the displayed modules, select the module you want to maintain. Prints maintenance instructions for the selected module Substrate processing system.

16. When a terminal device is connected to one of a plurality of interfaces distributed in a substrate processing apparatus having a plurality of modules, a module that can be instructed to operate from the terminal device is displayed according to the interface to which the terminal device is connected, among the plurality of modules; From the displayed modules, select the module you want to maintain. Prints maintenance instructions for the selected module A computer program that causes the terminal device to execute processing.

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