Table tilting device

Abstract

To provide a table tilting device capable of rotating an object around a roll axis and a pitch axis with a compact device configuration.SOLUTION: The table-tilting device 3 includes the table member, the fulcrum portion 10 that supports the table member via the spherical bearing 12, the first driver 20 that rotates the table member about the roll axis r around the fulcrum portion 10, and the second driver 30 that rotates the table member about the pitch axis p around the fulcrum portion 10, and the fulcrum portion 10, the first driver 20, and the second driver 30 are disposed on the roll axis r.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a table tilting device. [Background technology]

[0002] Patent Document 1 below discloses a liquid crystal alignment film evaluation device. This liquid crystal alignment film evaluation device includes an ellipsometer, a sample stage, an X-axis unit for moving the sample stage in the X-axis direction, a Y-axis unit for moving the sample stage in the Y-axis direction, a θ-axis unit for rotating the sample stage within a predetermined angle range at a measurement point, a Z-axis unit for moving the ellipsometer in the Z-axis direction while facing the measurement point of the liquid crystal alignment film on the sample stage, and a stone surface plate having a base, support columns, and support beams. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2002-365637 Summary of the Invention [Problem to be solved by the invention]

[0004] The sample stage is mounted on a stack of θ-axis, X-axis, and Y-axis units via a three-point support tilt table with tilt adjustment. This three-point support tilt table with tilt adjustment has a large stroke in the height direction, which poses a problem of increasing the size of the table tilting device.

[0005] The present invention has been made in view of the above-mentioned problems, and has an object to provide a table tilting device that can rotate an object around a roll axis and a pitch axis with a compact device configuration. [Means for solving the problem]

[0006] In order to solve the above problems, the table tilting device of the present invention comprises a table member, a fulcrum part that supports the table member via a spherical bearing, a first drive unit that rotates the table member around a roll axis centered on the fulcrum part, and a second drive unit that rotates the table member around a pitch axis centered on the fulcrum part, and the fulcrum part, the first drive unit, and the second drive unit are arranged on the roll axis. [Effects of the Invention]

[0007] According to the present invention, an object can be rotated around a roll axis and a pitch axis with a compact device configuration. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a perspective view of a table tilting device according to an embodiment. [Figure 2] FIG. 2 is an exploded perspective view of a table tilting device according to one embodiment. [Figure 3] FIG. 2 is a bottom perspective view of a table member according to one embodiment. [Figure 4] FIG. 2 is a plan view of a table tilting device according to one embodiment with a table member removed. [Figure 5] FIG. 5 is a cross-sectional view taken along line VV shown in FIG. [Figure 6] FIG. 2 is a perspective view of a first drive device according to one embodiment. [Figure 7] FIG. 2 is an exploded perspective view of a first drive device according to one embodiment. [Figure 8] FIG. 2 is a half cross-sectional view of a linear guide according to one embodiment. [Figure 9] FIG. 2 is a perspective view of a second drive device according to one embodiment. [Figure 10] FIG. 2 is an exploded perspective view of a second drive device according to one embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0010] Fig. 1 is a perspective view of a table tilting device 3 according to one embodiment. Fig. 2 is an exploded perspective view of the table tilting device 3 according to one embodiment. As shown in these figures, the table tilting device 3 includes a fulcrum portion 10, a first driving device 20, a second driving device 30, a base member 40, and a table member 50.

[0011] In the following explanation, an XYZ Cartesian coordinate system is set, and the positional relationships of each component are sometimes explained with reference to this XYZ Cartesian coordinate system. The X-axis direction is also referred to as the longitudinal direction of the table tilting device 3. The Y-axis direction is also referred to as the width direction or short side direction of the table tilting device 3. The Z-axis direction is also referred to as the height direction or thickness direction of the table tilting device 3.

[0012] The base member 40 has a flat plate shape extending along the XY plane. A fulcrum unit 10, a first drive unit 20, and a second drive unit 30 are provided on the upper surface of the base member 40. The table member 50 is supported by the fulcrum unit 10, the first drive unit 20, and the second drive unit 30. The table member 50 faces the base member 40 in the Z-axis direction.

[0013] In this embodiment, the outer shape of the table member 50 matches the outer shape of the base member 40. However, the outer shape of the table member 50 does not have to match the outer shape of the base member 40. The table member 50 is connected to an object (not shown). However, the table member 50 itself may be the object. In this case, the object is supported by the fulcrum portion 10, the first drive device 20, and the second drive device 30.

[0014] As shown in FIG. 2, the fulcrum part 10 is disposed at the end on the +X side of the base member 40. The fulcrum part 10 stands on the +Z side from the upper surface of the base member 40. A through hole 11 that passes through in the X-axis direction is formed at the upper end of the fulcrum part 10. An outer ring 12a of a spherical bearing 12 is attached to the through hole 11. The spherical bearing 12 is also called a spherical plain bearing.

[0015] FIG. 3 is a bottom perspective view of the table member 50 according to one embodiment. 3, inner ring 12b of spherical bearing 12 is attached to the underside of table member 50. On the underside of table member 50, first and second upright portions 51 and 52 are provided which are upright on the +Z side, and a shaft portion 53 whose both ends are supported by first and second upright portions 51 and 52.

[0016] The first upright portion 51 and the second upright portion 52 are arranged to be spaced apart in the X-axis direction. The first upright portion 51 may be one size larger than the second upright portion 52, but they may be the same size. The shaft portion 53 extends in the X-axis direction. The inner ring 12b is attached to the shaft portion 53. By engaging the inner ring 12b with the outer ring 12a, the table member 50 can rotate around the roll axis r and the pitch axis p, which are centered on the fulcrum portion 10 (spherical bearing 12), as will be described later.

[0017] 4 is a plan view of the table tilting device 3 according to one embodiment with the table member 50 removed. FIG. 5 is a cross-sectional view taken along line VV shown in FIG. As shown in Figure 4, the table tilting device 3 includes a fulcrum portion 10 that supports the table member 50 via a spherical bearing 12, a first drive unit 20 that rotates the table member 50 around the roll axis r around the fulcrum portion 10, and a second drive unit 30 that rotates the table member 50 around the pitch axis p around the fulcrum portion 10.

[0018] The roll axis r passes through the fulcrum portion 10 and extends in the X-axis direction. In a plan view, the roll axis r coincides with a central axis O1 that passes through the center of the table member 50 (base member 40) in the width direction (Y-axis direction). The first drive device 20 rotates the table member 50 around the roll axis r by moving the first connection member 21 connected to the table member 50 in the width direction (Y-axis direction). The direction of rotation around the roll axis r is referred to as the θX direction.

[0019] The pitch axis p passes through the fulcrum 10 and extends in the Y-axis direction. In a plan view, the pitch axis p coincides with an axis O2 at the fulcrum 10 that is perpendicular to the central axis O1. The second drive device 30 rotates the table member 50 around the pitch axis p by moving the second connection member 31 connected to the table member 50 in the height direction (Z-axis direction). The direction of rotation around the pitch axis p is referred to as the θY direction.

[0020] Although the table tilting device 3 of this embodiment does not include a drive device for rotating the table member 50 around the yaw axis, such a drive device may be included.

[0021] The fulcrum portion 10, the first driving device 20, and the second driving device 30 are arranged on the central axis O1 (roll axis r) of the table member 50. Specifically, the fulcrum portion 10, the first connecting member 21 of the first driving device 20, and the second connecting member 31 of the second driving device 30, which are connected to the table member 50, are arranged on the central axis O1 of the table member 50.

[0022] The first drive unit 20 is located on the -X side of the fulcrum 10. The second drive unit 30 is located further on the -X side of the first drive unit 20. In other words, the second drive unit 30 is located farther from the fulcrum 10 than the first drive unit 20. For example, if an object (not shown) is supported so that it extends from the table member 50 toward the +X side, a lifting load in the Z-axis direction acts on the second drive unit 30. Increasing the distance between the fulcrum 10 and the second drive unit 30 reduces the lifting load in the Z-axis direction, thereby reducing the size of the components of the second drive unit 30 (described later) and achieving a lighter and more compact table tilting device 3. The order of the fulcrum 10, first drive unit 20, and second drive unit 30 may be reversed.

[0023] The first drive device 20 includes a first connecting member 21 connected to the table member 50, a first link mechanism 22 coupled to the first connecting member 21 and adapted to follow at least the rotation of the table member 50 around the pitch axis p, and a first linear guide device 23 that guides the first connecting member 21 in a first direction (Y-axis direction) parallel to the pitch axis p via the first link mechanism 22.

[0024] The second drive device 30 also includes a second connecting member 31 connected to the table member 50, a second link mechanism 32 (see Figure 5) connected to the second connecting member 31 and following at least the rotation of the table member 50 around the roll axis r, and a second linear guide device 33 that guides the second connecting member 31 via the second link mechanism 32 in a second direction (Z-axis direction) perpendicular to the pitch axis p and the roll axis r.

[0025] Fig. 6 is a perspective view of the first driving device 20 according to one embodiment. Fig. 7 is an exploded perspective view of the first driving device 20 according to one embodiment. 6, the first driving device 20 includes a first connecting member 21, a first link mechanism 22, a first linear guide device 23, and a worm gear unit 24. The first driving device 20 also includes a first mounting plate 200 that is attached to the base member 40.

[0026] 7, the first connecting member 21 has a block-shaped connecting body 210. A first mounting hole 211 and a second mounting hole 212 are provided on the top surface of the connecting body 210. The first mounting holes 211 are arranged in pairs with a gap in the X-axis direction. A positioning protrusion (not shown) is attached to the first mounting hole 211 to align the table member 50 and the connecting body 210.

[0027] The second mounting holes 212 are provided in two rows along two sides extending in the X-axis direction on the top surface of the connection portion main body 210. A pair of first mounting holes 211 is disposed between the two rows of second mounting holes 212. A fixing member such as a bolt (not shown) that fixes the connection portion main body 210 and the table member 50 is attached to the second mounting holes 212.

[0028] A pair of shaft supports 213 are vertically disposed on the underside of connection portion main body 210. The pair of shaft supports 213 are spaced apart in the X-axis direction. The pair of shaft supports 213 support both ends of shaft portion 214 extending in the X-axis direction. An inner ring 224b of spherical bearing 224 is attached to shaft portion 214.

[0029] The first link mechanism 22 comprises a first arm portion 220 extending in the Y-axis direction, a first connecting portion 221 connecting one end portion of the first arm portion 220 in the Y-axis direction (the end portion on the +Y side) to the first connecting member 21 via a spherical bearing 224, and a second connecting portion 222 connecting the other end portion of the first arm portion 220 in the Y-axis direction (the end portion on the -Y side) to the first linear guide device 23 via a spherical bearing 226.

[0030] First arm portion 220 is formed in a plate shape with its length direction in the Y-axis direction, its width direction in the Z-axis direction, and its thickness direction in the X-axis direction. A through-hole 223 that penetrates in the X-axis direction is formed at the end on the +Y side of first arm portion 220. An outer ring 224a of spherical bearing 224 is attached to through-hole 223.

[0031] The inner ring 224b engages with the outer ring 224a, allowing the first connecting member 21 to rotate around the spherical bearing 224. Meanwhile, a through-hole 225 that penetrates in the X-axis direction is formed at the end on the -Y side of the first arm portion 220. An outer ring 226a of a spherical bearing 226 is attached to the through-hole 225.

[0032] The first linear guide device 23 includes a track body 231 and a moving body 232. The track body 231 is fixed to the first mounting plate 200 and includes a track rail 61 extending in the Y-axis direction. The moving body 232 includes a slider block 62 that moves in the Y-axis direction along the track rail 61. The track rail 61 and the slider block 62 configure a linear guide 60.

[0033] FIG. 8 is a half cross-sectional view of a linear guide 60 according to one embodiment. The linear guide 60 comprises a track rail 61 having a rolling element rolling groove 63 formed along the longitudinal direction, a slider block 62 having a loaded rolling element rolling groove 64 facing the rolling element rolling groove 63, and a plurality of balls 65 (rolling elements) arranged between the rolling element rolling groove 63 and the loaded rolling element rolling groove 64.

[0034] The track rail 61 is a long member having a generally rectangular cross section. On an outer surface 61b of the track rail 61 in the width direction (left-right direction on the paper in FIG. 8), a rolling element rolling groove 63 is formed along the longitudinal direction of the track rail 61 (direction perpendicular to the paper in FIG. 8). The rolling element rolling groove 63 is recessed into the outer surface 61b in a generally arc shape. A pair of rolling element rolling grooves 63 is formed on the left and right of the track rail 61.

[0035] The track rail 61 has fixing holes 66 (track body fixing holes) formed therein for fixing to the first mounting plate 200 (see FIG. 7). The fixing holes 66 are formed to penetrate the track rail 61 in the thickness direction (the vertical direction on the paper in FIG. 8). The fixing holes 66 have counterbore 66a formed therein for positioning bolts (not shown) for fixing the track rail 61 at a position lower than the upper surface 61a of the track rail 61.

[0036] The slider block 62 includes a block body 67 and a cover body 68 attached to the block body 67. The block body 67 has a rail accommodating groove 69 that accommodates the track rail 61. The rail accommodating groove 69 opens to the bottom surface of the block body 67. A fixing hole 70 (movable body fixing hole) for fixing an object (a movable block 233 described later) is formed in a mounting surface 67a, which is the top surface of the block body 67. The fixing hole 70 is formed to a predetermined depth in the thickness direction of the block body 67. The fixing hole 70 is a screw hole into which a bolt (not shown) that fixes the object is screwed.

[0037] The rail accommodating groove 69 is formed with a loaded rolling element rolling groove 64 that faces the rolling element rolling groove 63 of the track rail 61. The loaded rolling element rolling groove 64 is recessed in an arc shape into the inner surface of the rail accommodating groove 69. A pair of loaded rolling element rolling grooves 64 are formed on the left and right sides of the slider block 62 so as to sandwich the track rail 61. The loaded rolling element rolling groove 64 faces the rolling element rolling groove 63 of the track rail 61 and forms a loaded rolling element rolling path C1 along which the balls 65 roll under load.

[0038] Furthermore, an unloaded rolling member rolling path C2 is formed in the block body 67. The unloaded rolling member rolling path C2 is formed to penetrate the block body 67 in the longitudinal direction. The inner diameter of the unloaded rolling member rolling path C2 is larger than the diameter of the balls 65 so as not to apply a load to the balls 65. A pair of the unloaded rolling member rolling paths C2 are formed on the left and right sides of the slider block 62 in correspondence with the loaded rolling member rolling groove 64 (loaded rolling member rolling path C1).

[0039] The lid body 68 is attached to both longitudinal end surfaces of the block body 67. Like the block body 67, the lid body 68 has rail accommodating grooves 71 that accommodate the track rails 61. Rolling element direction changing paths C3 are formed in the lid body 68 on the surfaces that face opposite both end surfaces of the block body 67. The pair of rolling element direction changing paths C3 connect the ends of the loaded rolling element rolling path C1 and the unloaded rolling element rolling path C2, respectively, and form an endless circulation path C for the balls 65.

[0040] The endless circulation path C is composed of a pair of straight portions (loaded rolling element rolling path C1 and unloaded rolling element rolling path C2) extending in the longitudinal direction of the track rail 61, and a pair of semicircular curved portions (rolling element direction changing path C3) connecting the ends of the pair of straight portions. In this embodiment, two endless circulation paths C are formed so as to be spaced apart in the width direction of the track rail 61 and extend parallel to each other along the longitudinal direction of the track rail 61. Note that the linear guide 60 may be one having two endless circulation paths C on each side, for a total of four. Alternatively, a limited stroke linear guide without the endless circulation paths C may be used as the linear guide 60. In this limited stroke linear guide, a cage (rolling element holding member) is arranged between the rolling element rolling grooves 63 and the loaded rolling element rolling grooves 64, and balls 65 are rotatably held by ball holders provided in the cage.

[0041] The balls 65 are interposed between the track rail 61 and the slider block 62 to allow the slider block 62 to move smoothly relative to the track rail 61. The balls 65 in this embodiment are arranged inside the endless circulation path C with almost no gaps between them, and circulate through the endless circulation path C.

[0042] Returning to Fig. 7, movable body 232 includes movable block 233 fixed to slider block 62. A groove 233a is formed on the +Y side of movable block 233, into which the -Y side end of first arm portion 220 can be inserted. A shaft portion 234 extending in the X-axis direction is installed in groove 233a. An inner ring 226b of spherical bearing 226 is attached to shaft portion 234.

[0043] The inner ring 226b engages with the outer ring 226a, allowing the first arm unit 220 to rotate around the spherical bearing 226. The first driving unit 20 is equipped with an arm posture control device 25 for the first arm unit 220. As shown in Fig. 5, a pair of arm posture control devices 25 are provided, sandwiching the shaft unit 234 in the Z-axis direction.

[0044] The arm posture control device 25 includes a plunger 250 having a ball 251 and a spring 252, and a pressing screw 253 that presses the plunger 250 against the first arm portion 220. The plunger 250 is formed in a cylindrical shape with a closed bottom and an open tip on the +X side. A ball 251 is disposed at the tip of the plunger 250. A spring 252 is disposed inside the plunger 250 and urges the ball 251 toward the +X side.

[0045] The pressing screw 253 adjusts the pressing force (urging force) of the plunger 250 against the first arm portion 220. When the first arm portion 220 rotates around the axis O4 by the spherical bearing 226, the arm posture control device 25 returns the first arm portion 220 to its original posture (a posture in which the plate surface of the first arm portion 220 is along the YZ plane). This prevents the first arm portion 220 from contacting (colliding with) the movable block 233.

[0046] 7, a nut 235 is attached to the -Y side of the movable block 233. The nut 235 is threadedly engaged with a ball screw shaft 241 of the worm gear unit 24, and moves in the Y-axis direction together with the movable block 233. The worm gear unit 24 includes the ball screw shaft 241 and a gear box 242.

[0047] The ball screw shaft 241 extends in the Y-axis direction. Inside the gear box 242, there are provided a worm wheel (not shown) connected to the ball screw shaft 241 and a worm shaft (not shown) that meshes with the worm wheel. The worm shaft is connected to a rotating shaft of a motor (not shown) attached to a motor connection portion 243 of the gear box 242.

[0048] Fig. 9 is a perspective view of the second drive device 30 according to one embodiment. Fig. 10 is an exploded perspective view of the second drive device 30 according to one embodiment. 9, the second driving device 30 includes a second connecting member 31, a second link mechanism 32, a second linear guide device 33, and a worm gear unit 34. The second driving device 30 also includes a second mounting plate 300 that is attached to the base member 40.

[0049] 10, the second connecting member 31 has a plate-shaped connecting body 310. A positioning protrusion 311 and an attachment hole 312 are provided on the upper surface of the connecting body 310. The positioning protrusions 311 are arranged in pairs with a gap in the X-axis direction. The pair of positioning protrusions 311 positions the table member 50 and the connecting body 310.

[0050] The mounting holes 312 are provided in two rows along two sides extending in the X-axis direction on the top surface of the connection part main body 310. A pair of positioning protrusions 311 is disposed between the two rows of mounting holes 312. Fixing members such as bolts (not shown) that fix the connection part main body 310 and the table member 50 are attached to the mounting holes 312.

[0051] A pair of shaft supports 313 are vertically attached to the underside of connection body 310. The pair of shaft supports 313 are spaced apart in the X-axis direction. The pair of shaft supports 313 support both ends of shaft 314 extending in the X-axis direction. An inner ring 324b of spherical bearing 324 is attached to shaft 314.

[0052] The second link mechanism 32 comprises a second arm portion 320 extending in the Z-axis direction, a third connecting portion 321 connecting one end portion of the second arm portion 320 in the Z-axis direction (the end portion on the +Z side) to the second connecting member 31 via a spherical bearing 324, and a fourth connecting portion 322 connecting the other end portion of the second arm portion 320 in the Z-axis direction (the end portion on the -Z side) to the second linear guide device 33 so as to be rotatable around an axis O7 (see Figure 5) parallel to the pitch axis p.

[0053] 10, second arm portion 320 is formed in a plate shape with its longitudinal direction in the Z-axis direction, its width direction in the Y-axis direction, and its thickness direction in the X-axis direction. A through-hole 323 that penetrates in the X-axis direction is formed at the end on the +Z side of second arm portion 320. An outer ring 324a of spherical bearing 324 is attached to through-hole 323.

[0054] As the inner ring 324b engages with the outer ring 324a, the second connecting member 31 can rotate around the spherical bearing 324. Meanwhile, a thrust bush 325 is provided at the end of the second arm portion 320 on the -Z side. A pair of thrust bushes 325 are attached to both side surfaces of the second arm portion 320 facing the Y-axis direction. Note that instead of the thrust bush 325, a rolling bearing, a spherical bearing, or the like may be used.

[0055] The second linear guide device 33 includes a track body 331 and a moving body 332. The track body 331 includes a plurality of track rails 61 extending in the Z-axis direction. The moving body 232 includes a plurality of slider blocks 62 that move in the Y-axis direction along the plurality of track rails 61. In this embodiment, four track rails 61 and four slider blocks 62 are provided. That is, the second linear guide device 33 includes four linear guides 60. The number of linear guides 60 is not limited, and may be, for example, two (one opposing axis). Furthermore, the linear guides 60 may be replaced with sliding guides, and the same applies to the first drive device 20.

[0056] The second mounting plate 300 has a pair of rail support parts 301 facing each other in the Y-axis direction. Two track rails 61 are attached to the opposing surfaces of each pair of rail support parts 301 in the Y-axis direction. The two track rails 61 are spaced apart in the X-axis direction and extend parallel to each other in the Z-axis direction. The second mounting plate 300 has a recess 302 that accommodates the lower end of the track rail 61. By accommodating the lower end of the track rail 61 in the recess 302, the height dimension of the table tilting device 3 can be reduced.

[0057] The movable body 332 includes a movable block 333. A through-hole 333a is formed in the movable block 333, penetrating in the Z-axis direction. A nut 334 is attached to the through-hole 333a. The nut 334 is threadedly engaged with a ball screw shaft 341 of the worm gear unit 34, and moves in the Z-axis direction together with the movable block 333. The worm gear unit 34 includes the ball screw shaft 341 and a gear box 342.

[0058] The ball screw shaft 341 extends in the Z-axis direction. Inside the gear box 342, there are provided a worm wheel (not shown) connected to the ball screw shaft 341 and a worm shaft (not shown) that meshes with the worm wheel. The worm shaft is connected to a rotating shaft of a motor (not shown) attached to a motor connection part 343 of the gear box 342.

[0059] A pair of fixed plates 335 are fixed to the movable block 333. The pair of fixed plates 335 are disposed opposite to each other in the Y-axis direction. Two slider blocks 62 are attached to each of the surfaces of the pair of fixed plates 335 facing in the Y-axis direction and facing away from each other. The two slider blocks 62 are attached spaced apart in the X-axis direction.

[0060] A pair of shafts 336 protruding toward each other are provided on the opposing surfaces of the pair of fixed plates 335. When the pair of shafts 336 engage with the pair of thrust bushes 325, the second arm portion 320 becomes rotatable relative to the movable block 333 about an axis O7 (see FIG. 5) that is parallel to the pitch axis p.

[0061] 5, when the ball screw shaft 341 rotates in the second driving device 30, the movable block 333 is guided in the Z-axis direction by the second linear guide device 33, and the second connecting member 31 moves in the Z-axis direction via the second link mechanism 32. This causes the table member 50 to rotate around the pitch axis p around the fulcrum part 10. At this time, the first driving device 20 can follow the rotation of the table member 50 around the pitch axis p by the first link mechanism 22.

[0062] Furthermore, when the ball screw shaft 241 in the first driving device 20 rotates, the movable block 233 is guided in the Y-axis direction by the first linear guide device 23, and the first connecting member 21 moves in the Y-axis direction via the first link mechanism 22. This causes the table member 50 to rotate around the roll axis r, centered on the fulcrum part 10. At this time, the second driving device 30 can follow the rotation of the table member 50 around the roll axis r by the second link mechanism 32.

[0063] The table tilting device 3 is also capable of compound rotation including rotation around the roll axis r and the pitch axis p. At this time, the first drive unit 20 follows this compound tilting movement via the first link mechanism 22, and the second drive unit 30 follows this compound tilting movement via the second link mechanism 32. The first link mechanism 22 includes spherical bearings 224 and 226 and has a higher degree of freedom than the second link mechanism 32, but since it also includes the arm posture control device 25, it can control the posture of the first arm unit 220 so that the first arm unit 220 returns to its original posture.

[0064] As described above, the table tilting device 3 of this embodiment includes the table member 50, the fulcrum unit 10 that supports the table member 50 via the spherical bearing 12, the first drive unit 20 that rotates the table member 50 about the roll axis r around the fulcrum unit 10, and the second drive unit 30 that rotates the table member 50 about the pitch axis p around the fulcrum unit 10. Because the fulcrum unit 10, the first drive unit 20, and the second drive unit 30 are arranged on the roll axis r, the dimension of the table tilting device 3 in the width direction (Y-axis direction) can be reduced. Furthermore, by separating the function of rotating the table member 50 about the roll axis r and the function of rotating the table member 50 about the pitch axis p rather than incorporating them into a single device, the dimension of the table tilting device 3 in the height direction (Z-axis direction) can be reduced, as shown in FIG. 5 .

[0065] Moreover, in this embodiment, the first drive device 20 includes a first connecting member 21 connected to the table member 50, a first link mechanism 22 coupled to the first connecting member 21 and configured to follow at least the rotation of the table member 50 about the pitch axis p, and a first linear guide device 23 configured to guide the first connecting member 21 in a first direction (Y-axis direction) parallel to the pitch axis p via the first link mechanism 22. According to this configuration, the first connecting member 21 connected to the table member 50 is guided in the width direction (Y-axis direction) by the first linear guide device 23 via the first link mechanism 22, thereby allowing the table member 50 to rotate about the roll axis r. Furthermore, even when the table member 50 is rotated about the pitch axis p by the second drive device 30, the first link mechanism 22 can follow that movement.

[0066] Moreover, in this embodiment, the first linear guide device 23 includes a track body 231 (track rail 61) extending in the first direction, a moving body 232 (slider block 62) that moves along the track body 231, and a plurality of balls 65 (rolling bodies) interposed between the track body 231 and the moving body 232. With this configuration, the moment load generated when the table member 50 rotates can be distributed and borne by the plurality of balls 65. This allows the first drive device 20 to be made smaller.

[0067] Furthermore, in this embodiment, the first link mechanism 22 includes a first arm portion 220 extending in a first direction, a first coupling portion 221 that couples one end of the first arm portion 220 in the first direction to the first connecting member 21 via a spherical bearing 224, and a second coupling portion 222 that couples the other end of the first arm portion 220 in the first direction to the first linear guide device 23 via a spherical bearing 226, and the first drive unit 20 includes an arm posture control device 25 that returns the first arm portion 220 to its original posture when the first arm portion 220 rotates about an axis O4 parallel to the pitch axis p. This configuration prevents the first arm portion 220 from colliding with the movable block 233 and also makes it possible to control the posture of the first arm portion 220, which has a high degree of freedom, so that it reliably returns to its original posture.

[0068] Moreover, in this embodiment, the second drive device 30 includes a second connecting member 31 connected to the table member 50, a second link mechanism 32 coupled to the second connecting member 31 and configured to follow at least the rotation of the table member 50 about the roll axis r, and a second linear guide device 33 configured to guide the second connecting member 31 in a second direction (Z-axis direction) perpendicular to the pitch axis p and the roll axis r via the second link mechanism 32. According to this configuration, the second connecting member 31 connected to the table member 50 is guided in the height direction (Z-axis direction) by the second linear guide device 33 via the second link mechanism 32, thereby allowing the table member 50 to rotate about the pitch axis p. Furthermore, even when the table member 50 is rotated about the roll axis r by the first drive device 20, the second link mechanism 32 can follow that movement.

[0069] Moreover, in this embodiment, the second linear guide device 33 includes a track body 331 (track rail 61) extending in the second direction, a moving body 332 (slider block 62) that moves along the track body 331, and a plurality of balls 65 (rolling elements) interposed between the track body 331 and the moving body 232. With this configuration, the moment load generated when the table member 50 rotates can be distributed and borne by the plurality of balls 65. This allows the second drive device 30 to be made smaller.

[0070] In this embodiment, the second link mechanism 32 includes a second arm portion 320 extending in the second direction, a third coupling portion 321 that couples one end of the second arm portion 320 in the second direction to the second connecting member 31 via a spherical bearing 324, and a fourth coupling portion 322 that couples the other end of the second arm portion 320 in the second direction to the second linear guide device 33 so as to be rotatable about an axis O7 parallel to the pitch axis p. As shown in FIG. 5 , the spherical bearing 324 allows rotation about the axis O5, thereby enabling the second drive unit 30 to follow the rotation of the table member 50 about the roll axis r. However, because the second drive unit 30 is disposed farther from the fulcrum portion 10 than the first drive unit 20, the second connecting member 31 may not be able to follow the rotation about the pitch axis p solely through rotation of the spherical bearing 324 about the axis O6. For this reason, the fourth connecting portion 322 employs a thrust bushing 325 (see FIG. 10) to enable large rotation around the axis O7, which allows the second connecting member 31 to follow the rotation around the pitch axis p. In other words, the rotation angle around the pitch axis p can be increased.

[0071] As described above, according to the present embodiment, an object can be rotated around the roll axis r and the pitch axis p with a compact device configuration.

[0072] While the preferred embodiments of the present invention have been described above with reference to the drawings, the present invention is not limited to the above-described embodiments. The shapes and combinations of the components shown in the above-described embodiments are merely examples, and various modifications can be made based on design requirements, etc., without departing from the spirit of the present invention. [Explanation of symbols]

[0073] 3...table tilting device, 10...fulcrum portion, 11...through hole, 12...spherical bearing, 12a...outer ring, 12b...inner ring, 20...first drive device, 21...first connecting member, 22...first link mechanism, 23...first linear guide device, 24...worm gear unit, 25...arm attitude control device, 30...second drive device, 31...second connecting member, 32...second link mechanism, 33...second linear guide device, 34...worm gear unit, 40...base member, 50...table member, 51...first vertical portion, 52...second vertical portion, 53...shaft portion, 60...linear guide, 61...track rail, 61a ...Top surface, 61b...Outer surface, 62...Slider block, 63...Rolling element rolling groove, 64...Load rolling element rolling groove, 65...Ball, 66...Fixing hole, 67...Block body, 67a...Mounting surface, 68...Cover body, 69...Rail accommodating groove, 70...Fixing hole, 71...Rail accommodating groove, 200...First mounting plate, 210...Connection body, 211...First mounting hole, 212...Second mounting hole, 213...Shaft support portion, 214...Shaft portion, 220...First arm portion, 221...First connecting portion, 222...Second connecting portion, 223...Through hole, 224...Spherical bearing, 224a...Outer ring, 224b...Inner ring, 225...Through hole, 2 26...spherical bearing, 226a...outer ring, 226b...inner ring, 231...raceway body, 232...moving body, 233...moving block, 233a...groove portion, 234...shaft portion, 235...nut, 241...ball screw shaft, 242...gear box, 243...motor connection portion, 250...plunger, 251...ball, 252...spring, 253...press screw, 300...second mounting plate, 301...rail support portion, 302...recess, 310...connection portion main body, 311...projection, 312...mounting hole, 313...shaft support portion, 314...shaft portion, 320...second arm portion, 321...third connecting portion, 322...fourth connecting portion Connection portion, 323...through hole, 324...spherical bearing, 324a...outer ring, 324b...inner ring, 325...thrust bush, 331...raceway body, 332...moving body, 333...moving block, 333a...through hole, 334...nut, 335...fixed plate, 336...shaft, 341...ball screw shaft, 342...gear box, 343...motor connection portion, C...infinite circulation path, C1...loaded rolling element rolling path, C2...unloaded rolling element rolling path, C3...rolling element direction change path, O1...center axis, O2...axis, O4...axis, O5...axis, O6...axis, O7...axis, p...pitch axis, r...roll axis

Claims

1. A table member; a fulcrum portion that supports the table member via a spherical bearing; a first driving device that rotates the table member around a roll axis with the fulcrum portion as a center; a second drive device that rotates the table member around the pitch axis around the fulcrum portion, the fulcrum portion, the first driving device, and the second driving device are disposed on the roll axis. Table tilting device.

2. The first drive device a first connecting member connected to the table member; a first link mechanism coupled to the first connecting member and adapted to follow at least the rotation of the table member about the pitch axis; a first linear guide device that guides the first connecting member in a first direction parallel to the pitch axis via the first link mechanism, 2. The table tilting device according to claim 1.

3. The first linear guide device is a track member extending in the first direction; a moving body that moves along the track body; a plurality of rolling elements interposed between the track element and the moving element, 3. The table tilting device according to claim 2.

4. The first link mechanism is a first arm portion extending in the first direction; a first coupling portion that couples one end of the first arm portion in the first direction and the first connecting member via a spherical bearing; a second connecting portion that connects the other end of the first arm portion in the first direction and the first linear guide device via a spherical bearing, the first driving device includes an arm attitude control device that returns the first arm unit to its original attitude when the first arm unit rotates around an axis parallel to the pitch axis.

3. The table tilting device according to claim 2.

5. The second drive device a second connecting member connected to the table member; a second link mechanism coupled to the second connecting member and adapted to follow at least the rotation of the table member about the roll axis; a second linear guide device that guides the second connecting member in a second direction perpendicular to the pitch axis and the roll axis via the second link mechanism, 3. The table tilting device according to claim 1 or 2.

6. The second linear guide device is a track member extending in the second direction; a moving body that moves along the track body; a plurality of rolling elements interposed between the track element and the moving element, 6. The table tilting device according to claim 5.

7. The second link mechanism is a second arm portion extending in the second direction; a third coupling portion that couples one end of the second arm portion in the second direction and the second connecting member via a spherical bearing; a fourth connecting portion that connects the other end of the second arm portion in the second direction and the second linear motion guide device rotatably around an axis parallel to the pitch axis, 6. The table tilting device according to claim 5.

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