Valve, control method therefor, and valve system

Abstract

To provide a valve, its control method and a valve system.SOLUTION: The valve comprises a valve body and a valve disc, wherein the valve disc is driven by a pneumatic unit in the valve system to perform an operation in a chamber of the valve body. The gas is supplied to the pneumatic unit, and the pneumatic unit controls the operation of the valve disk pneumatically by a gas parameter of the gas. The present invention also provides smooth operation of the valve disc by adjusting the gas parameters supplied to the pneumatic unit. In addition, the valve further includes an operating compensation structure for preventing the valve disc from sticking or jamming.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a valve and a valve system thereof, and more particularly to a valve and a control method thereof and a valve system thereof that improves performance through a special control method and structure. [Background technology]

[0002] In semiconductor processing, vacuum coating, and other industrial applications requiring high levels of cleanliness, pneumatic valves are critical components for controlling gas flow and isolating vacuum chambers. To increase production efficiency, these valves are often required to open and close quickly. However, when conventional pneumatic valves are operated at high speeds, the valve disc violently impacts the valve body, generating significant vibrations. This vibration can propagate throughout the equipment, potentially affecting the operation of other precision components. It can also stir up dust trapped inside the valve or vacuum chamber, potentially contaminating products and reducing yields.

[0003] Furthermore, for valves operating in a vacuum environment, a localized vacuum can form between the valve disc and the inner surface of the valve body when the valve disc is in the open position, causing the valve disc to stick or move slowly, potentially affecting process timing control. Driving the valve disc at high speed requires a powerful thrust from the pneumatic unit. At the end of the operating stroke, the disc continues to move due to inertia even after the air pressure is removed, potentially colliding with the mechanical stop at the end of the stroke or exceeding its intended range of travel. This overtravel phenomenon can cause shock, wear, and vibration, affecting the valve's positioning accuracy.

[0004] Existing solutions generally focus on a single problem, such as using a simple mechanical buffer to absorb shocks or a simple throttle valve to roughly control airflow, but these methods have difficulty simultaneously meeting requirements such as high-speed drive, low vibration, and high reliability, making them unable to meet the increasingly stringent demands of advanced processes. Summary of the Invention [Problem to be solved by the invention]

[0005] The primary objective of the present invention is to provide a valve, a control method thereof, and a valve system that significantly reduce the vibrations generated by the valve during high-speed operation and effectively avoid operational abnormalities caused by vacuum suction and inertial overtravel, thereby improving the operational stability, reliability, and service life of the valve overall. [Means for solving the problem]

[0006] The valve of the present invention is characterized by comprising: a valve body having a chamber; a valve disc movably disposed within the chamber of the valve body and driven by a pneumatic unit to perform an operation, the pneumatic unit pneumatically controlling the operation of the valve disc in accordance with gas parameters supplied to the pneumatic unit; and an operation compensation mechanism for preventing the valve disc from erroneously stopping at a certain position within the valve body when the valve disc performs an operation.

[0007] A method for controlling a valve according to the present invention includes the steps of providing a valve comprising a valve body and a valve disc, the valve body having a chamber, the valve disc being movably disposed within the chamber of the valve body and being driven by a pneumatic unit to perform an operation; and performing a pneumatic control procedure, in which, when the valve disc performs an operation, the pneumatic control procedure adjusts gas parameters supplied to the pneumatic unit in an adjusting mode, so that the pneumatic unit pneumatically controls the operation of the valve disc accordingly, thereby controlling the vibration value generated when the valve disc of the valve performs an operation.

[0008] The valve system according to the present invention is characterized in that it comprises a valve body, a valve disc, the valve body having a chamber, the valve disc being movably disposed within the chamber of the valve body, a pneumatic unit for driving the valve disc of the valve to perform an operation, and a control element for adjusting gas parameters supplied to the pneumatic unit in an adjusting mode through a pneumatic control procedure, whereby the pneumatic unit pneumatically controls the operation of the valve disc accordingly, thereby controlling the vibration value generated when the valve disc of the valve performs an operation.

[0009] The valve according to the present invention comprises: a valve body having a chamber; a valve disc movably disposed within the chamber of the valve body and driven by a pneumatic unit to perform an operation, the pneumatic unit pneumatically controlling the operation of the valve disc in accordance with gas parameters supplied to the pneumatic unit; and an operation compensation mechanism for preventing the valve disc from erroneously stopping at a certain position within the valve body when the valve disc performs the operation. [Effects of the Invention]

[0010] The valve, its control method, and valve system according to the present invention have the following advantages. (1) The pneumatic control procedure can control the vibration generated by the valve disc during operation. For example, intelligent deceleration can be implemented during the start and stop phases of the valve disc's operation to effectively suppress impact vibration, greatly preventing the generation of dust and other pollutants caused by vibration and significantly improving product yield.

[0011] (2) The control method of the present invention incorporates a machine learning model to automatically generate optimal air pressure control patterns for various valves. This intelligent function enables the valve to self-adjust and be highly customizable.

[0012] (3) The operation compensation structure actively overcomes physical limitations, the vacuum burst structure eliminates valve opening delays caused by vacuum suction, and the return structure effectively absorbs inertial shock to ensure accurate return of the valve disc, thereby improving the operational reliability of the valve and eliminating problems such as sticking and poor positioning.

[0013] In order to better understand the technical features and achievable technical effects of the present invention, better embodiments and detailed descriptions are provided below. [Brief explanation of the drawings]

[0014] [Figure 1] 3 is a flowchart showing a valve control method according to the present invention. [Figure 2] 1 is a block diagram showing the functions of a valve system according to the present invention; [Figure 3] 1 is a diagram showing the structure of a portion of a first embodiment of a valve according to the present invention, showing the valve in a closed state. [Figure 4] 10 is a diagram showing the structure of a portion of a second embodiment of a valve according to the present invention, showing the valve in a closed state. FIG. [Figure 5] FIG. 5 is a side view taken along the cross-sectional line DD in FIG. [Figure 6] FIG. 6 is an enlarged view showing a partial area E in FIG. 5. [Figure 7]FIG. 10 is a diagram showing the structure of a portion of a second embodiment of a valve according to the present invention, in which the valve is in an open state and the operation correction structure of the valve includes a return structure and a vacuum breaking structure. [Figure 8] FIG. 10 is a diagram showing the structure of a portion of a second embodiment of a valve according to the present invention, in which the valve is in an open state and has exceeded the range of its intended stroke, so it presses against a return structure, and the valve operation correction structure is provided with a return structure. [Figure 9] 9 is a diagram showing the structure of the valve shown in FIG. 8, showing the valve in an open state and the valve having been returned to within the intended stroke range by the return structure. [Figure 10] 10 is a diagram showing the structure of a portion of a second embodiment of a valve according to the present invention, in which the valve is in a closed state and the operation correction structure of the valve includes a vacuum breaking structure. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0015] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The proportions of the components in the drawings of the embodiments of the present invention are shown for ease of understanding and are not actual proportions. Furthermore, the dimensional proportions of the assemblies shown in the drawings are for the purpose of explaining the components and their structures, and the present invention is not limited thereto. Meanwhile, for ease of understanding, the same components in the following embodiments will be described with the same reference numerals.

[0016] Furthermore, terms used throughout the specification and claims generally have their ordinary meanings as used in the art, in the context disclosed herein, and in the particular context, unless otherwise specified. Some terms used to describe the present invention are explained below or elsewhere in this specification to provide those of ordinary skill in the art with additional guidance regarding the description of the present invention.

[0017] The use of "first," "second," "third," etc. in this article does not denote a specific order or sequence, nor is it used to limit the invention, but is used only to distinguish between components or operations that are described with the same terminology.

[0018] Secondly, when this article uses terms such as "including," "comprising," "having," and "containing," they are all open terms, meaning including but not limited to.

[0019] Please refer to Figures 1 to 3 and Figures 4 to 10. Figure 1 is a flowchart showing a valve control method according to the present invention. Figure 2 is a block diagram showing the functions of a valve system according to the present invention. Figure 3 is a diagram showing the structure of a first embodiment of a valve according to the present invention. The valve control method according to the present invention mainly includes two steps: step S10 of providing a valve 100 and step S20 of performing a pneumatic control procedure. The valve 100 according to the present invention mainly includes a valve body 110 and a valve disc 120. The valve body 110 has a chamber 112. The valve disc 120 is movably mounted within the chamber 112 of the valve body 110 and is driven by a pneumatic unit 300 to perform an operation (e.g., opening, closing, or other operation) relative to the valve body 110. The valve 100 may optionally further include a link structure 160. The valve disc 120 is connected to the pneumatic unit 300 via the link structure 160, for example, to be driven by the pneumatic unit 300 to perform an operation. The valve disc 120 may be operated, for example, by reciprocating between an open position (e.g., a fully open position P1) and a closed position (e.g., a fully closed position P2), or to any predetermined position between the fully open position P1 and the fully closed position P2. The link structure 160 includes, for example, a toggle-type link structure including a first link 162, a second link 164, and a rocker arm 166. For example, when the toggle-type link structure is activated by the pneumatic unit 300 to change from a contracted state to an expanded state, the valve disc 120 moves from a fully open position P1 to a fully closed position P2 (i.e., corresponding to the position of the opening in the valve body 110), thereby closing the valve 100. When the toggle-type link structure is activated by the pneumatic unit 300 to change from an expanded state to a contracted state, the valve disc 120 moves from a fully closed position P2 to a fully open position P1 (i.e., not corresponding to the position of the opening in the valve body 110), thereby opening the valve 100. A baffle 165 is optionally provided on a rod (e.g., the second link 164) of the toggle-type link structure. The baffle 165 is used to restrict another rod (e.g., the first link 162) when the toggle-type link structure transitions from the deployed to the retracted state to prevent the rod from jamming, or to prevent the valve disc 120 from jamming by moving beyond its intended stroke.

[0020] For example, the pneumatic unit 300 is an air cylinder, which is provided in the valve 100, and the pneumatic unit 300 is controlled by the control element 200, which drives the valve disc 120 of the valve 100 to perform an operation. The valve system 10 according to the present invention mainly comprises a valve 100, a pneumatic unit 300, and a control element 200. The valve system 10 according to the present invention also optionally comprises a sensor element 180. The air cylinder mainly comprises a cylinder 302, a piston, and a piston rod 304. The cylinder 302 is mounted in the valve body 110 of the valve 100. The piston is located inside the cylinder 302 and is movable. One end of the piston rod 304 is connected to the piston, and the other end protrudes outside the cylinder 302 and connects to the valve disc 120 of the valve 100 via the link structure 160 of the valve 100. The air cylinder further comprises gas input and output ports A1 and A2 located on both sides of the piston in the cylinder 302. In the present invention, for example, by adjusting the pressure and / or flow rate of gas supplied to the cylinder 302 via the gas input / output ports A1 and A2, a pressure difference is generated on both sides of the piston, driving and displacing the piston rod 304. This drives the valve disc 120 of the valve 100 to perform an operation. For example, the thrust value of the valve disc 120 corresponds to, for example, a gas pressure value, and the velocity value of the valve disc 120 corresponds to, for example, a gas flow rate value. The gas is provided, for example, from a gas source (not shown). Those skilled in the art can easily understand how to supply gas to a cylinder to generate a pressure difference across the piston of a pneumatic cylinder, thereby driving the valve disc 120 to perform corresponding operations, such as opening, closing, or other operations, and therefore further explanation is omitted here.

[0021] A feature of the present invention is that when the valve disc 120 of the valve 100 performs an operation (e.g., opening, closing, or other operation), a pneumatic control procedure (step S20) is performed to adjust the gas parameters supplied to the pneumatic unit 300. The pneumatic unit 300 then controls the operation of the valve disc 120 with air pressure accordingly, thereby controlling the vibration value generated when the valve disc 120 of the valve 100 performs the operation. The vibration value is an indicator of the degree of rattle during operation of the valve 100 and is positively correlated with the amount of dust generated. The gas parameters include, for example, at least the pressure and / or flow rate of the gas. The gas may be, for example, air or other gases. Any of the gas parameters of the gases that can be used by the pneumatic unit 300 to control the operation of the valve disc 120 is within the scope of protection of the present invention. Taking the reduction of vibration and dust levels as an example, the adjustment mode of the pneumatic control procedure is, for example, to adjust the gas parameters supplied to the pneumatic unit 300 so that the operation of the valve disc 120 is smooth (or gentle), thereby reducing the vibration level generated by the valve 100 during the operation of the valve disc 120. Smooth operation here includes smooth closing, smooth opening, or smooth movement.

[0022] By performing the pneumatic pressure control procedure (step S20), gas parameters such as the gas pressure and / or gas flow rate supplied to the pneumatic unit 300 are adjusted, and the movement parameters of the valve disc 120 during operation of the valve 100 (e.g., the movement speed, acceleration, deceleration, or angular velocity of the valve disc 120) are adjusted (adjusted and controlled), thereby achieving the effect of adjusting (adjusting and controlling) the vibration value of the valve 100 (e.g., reducing the vibration value). This makes it possible to adjust (e.g., reduce) the amount of dust generated by the vibration of the valve 100. For example, by performing the pneumatic pressure control procedure (step S20), the operation of the valve disc 120 can be made smoother. Furthermore, the present invention is not limited to performing this pneumatic control process during all or part of the operation of the valve disc 120 of the valve 100. Any process that can achieve the effect of suppressing vibration and dust generation is within the scope of protection of the present invention. To illustrate, in one possible embodiment, when the valve disc 120 of the valve 100 performs an operation (e.g., closing), the present invention also selectively slows down the movement speed of the valve disc 120, for example, the closer the valve disc 120 is to a destination (e.g., the fully closed position P2) or a starting point (e.g., the fully open position P1). That is, the movement speed of the valve disc 120 is proportional to the distance from the destination (e.g., the fully closed position P2) or the starting point (e.g., the fully open position P1).

[0023] For example, when performing a smooth closing operation, the present invention can reduce the speed of the valve disc 120 in a stepwise, gradual, or continuous manner without violent collision or shaking as it approaches the fully closed position P2 of the valve body 110 by adjusting gas parameters such as the gas pressure and / or gas flow rate supplied to the pneumatic unit 300. This allows the valve disc 120 to smoothly (or gently) close the opening of the valve body 110. Specifically, the present invention uses the above-described pneumatic control procedure to slow the acceleration and deceleration of the valve disc 120 in areas of the valve body 110 that are prone to vibration and dust generation (e.g., areas approaching the stroke ends between the fully open position P1 and the fully closed position P2). This makes the movement gentler and smoother (i.e., smoother), reducing the vibration level and dust generation from the valve disc 120 during operation. Conversely, the present invention can also selectively improve the acceleration and deceleration rates in areas of the valve body 110 that are less prone to vibration generation (e.g., mid-stroke areas of the opening or closing stroke), thereby shortening the overall operating time. This intelligent speed control not only effectively reduces vibration and dust, but also maintains operating efficiency.

[0024] The present invention implements a pneumatic control procedure by, for example, using a control element 200 to adjust gas parameters supplied to a pneumatic unit 300. The pneumatic control procedure according to the present invention may also be implemented by, for example, combining a control element 200 with a solenoid valve, a piezoelectric pressure regulating valve, or a voice coil pressure regulating valve to adjust gas parameters supplied to the pneumatic unit 300, allowing the pneumatic unit 300 to pneumatically control the operation of the valve disc 120 accordingly. The control element 200 may be, for example, a control or processing device such as a programmable logic controller (PLC) or an industrial computer, but any element that can be used to regulate the gas parameters of the pneumatic unit 300 by the pneumatic control procedure of the present invention may be applied to the present invention.

[0025] For example, to achieve more intelligent control, the pneumatic control procedure of the present invention may optionally include a machine learning model established by training using an artificial intelligence algorithm (such as a neural network algorithm) to define a correspondence between the adjusted value of the gas parameter, at least one valve characteristic value, and a valve operating vibration value, where the valve characteristic value is selected from the group consisting of the weight of the valve disc, the stroke of the valve disc, the diameter of the air cylinder, the air path structure, and the operating pressure. During actual operation, the pneumatic control procedure of the present invention can determine the optimal adjustment mode of the gas parameters supplied to the pneumatic unit 300 according to the above correspondence. Furthermore, based on the above machine learning model, the pneumatic control procedure of the present invention can fully or partially automatically adjust the gas parameters supplied to the pneumatic unit 300. For example, after replacing a valve disc with a different weight, the present invention can selectively automatically adjust the gas parameters (e.g., the gas pressure and / or gas flow rate supplied to the pneumatic unit 300) to maintain optimal low-vibration or low-dust performance.

[0026] The adjustment mode of the pneumatic control procedure of the present invention may, for example, adjust the gas parameters supplied to the pneumatic unit 300 in a stepwise, incremental, or continuous manner. For example, by adjusting the gas parameters in at least two or more steps, the gas parameters (e.g., gas pressure and / or gas flow rate) can exhibit at least two or more sets of different values ​​in one operating stroke, thereby achieving smooth operation. For example, when the valve disc 120 moves between the fully open position P1 and the fully closed position P2, higher gas pressure and / or gas flow rate is provided to overcome stiction when the valve disc 120 begins to move. In the middle of the operating stroke, the gas pressure and / or gas flow rate is reduced to stabilize the speed. Toward the end of the operating stroke, the gas pressure and / or gas flow rate is further reduced, and even counter pressure is provided to achieve a buffering effect and a smooth stop.

[0027] The control architecture of the valve control method according to the present invention can employ an open-loop control scheme or a closed-loop control scheme. For example, in open-loop control, the pneumatic control procedure adjusts gas parameters, such as the pressure and / or flow rate of the gas supplied to the pneumatic unit 300, for example, through a regulation mode. In closed-loop control, the pneumatic control procedure adjusts gas parameters, such as the pressure and / or flow rate of the gas supplied to the pneumatic unit 300, for example, based on at least one physical state of the valve 100. For example, the control method for the valve 100 according to the present invention may further optionally include sensing at least one physical state of the valve 100 using at least one sensor element 180, such that the pneumatic control procedure adjusts gas parameters, such as the pressure and / or flow rate of the gas supplied to the pneumatic unit 300, in real time based on the physical state of the valve 100 using the regulation mode. The pneumatic control procedure of the present invention preferably adjusts the gas parameters supplied to the pneumatic unit 300 instantly (or synchronously) according to the physical state of the valve 100. This allows for better control effect by dynamically adjusting the gas pressure and / or gas flow rate. The sensor element 180 is selected from at least one or at least two of the group consisting of a pressure sensor, a force sensor, a temperature sensor, an optical sensor, an image sensor, a vibration sensor, an inertial sensor, and a current sensor.

[0028] The valve control method of the present invention can also be applied to metal-to-metal seal valves. The valve 100 or its sealing surface is made of a metal material. That is, the valve 100 of the present invention can selectively omit the O-ring 124 made of a rubber material and use a metal material for the sealing surface. Metal-to-metal seal valves are sensitive to shock and vibration and are prone to dust generation. The present invention can provide a more significant improvement by ensuring smooth operation of the valve disc 120.

[0029] 4 to 9, the valve 100 according to the present invention includes a valve body 110, a valve disc 120, and an operation compensation structure 140. The operation compensation structure 140 is used to prevent the valve disc 120 from sticking to a specific position within the valve body 110 due to an abnormal physical effect during operation of the valve disc 120. This position may be, for example, an intended position or an unintended position. The intended position may be, for example, an open position (e.g., a fully open position P1), a closed position (e.g., a fully closed position P2), or any other intended position. The unintended position may be any position other than the intended position (e.g., an overtravel position). The operational compensation structure 140 according to the present invention includes, for example, one or two selected from the group consisting of a vacuum breaking structure 130 and a return structure 150. Figures 4 to 7 show that the operational compensation structure 140 includes the vacuum breaking structure 130 and the return structure 150. Figures 8 and 9 show that the operational compensation structure 140 includes only the return structure 150. Figure 10 shows that the operational compensation structure 140 according to the present invention includes only the vacuum breaking structure 130.

[0030] For example, if the operation compensation structure 140 includes a vacuum break structure 130, the vacuum break structure 130 is provided on the valve body 110 and its main function is to resolve the sticking or suction phenomenon that may occur when the valve disc 120 remains in the open position P1 for a long time due to the formation of a vacuum environment, thereby enabling the valve disc 120 to smoothly start operating (e.g., closing). For example, the vacuum break structure 130 may be, for example, a groove, or any structure that can prevent the vacuum suction phenomenon between the valve disc 120 and the valve body 110. For example, if a groove is provided, the groove may be provided on one of the inner surfaces of the valve body 110. 7, when the valve disc 120 performs an operation (for example, moving from the fully open position P1 to the fully closed position P2, moving from the fully closed position P2 to the fully open position P1, or moving to any intended position between the fully open position P1 and the fully closed position P2), there is a time when the area covered by the valve disc 120 and the area not covered by the valve disc 120 communicate with each other through the groove, thereby equalizing the internal and external pressures and achieving a vacuum breaking effect. The above-mentioned time may be, for example, when the valve disc 120 is in an opening operation period, a closing operation period, or a moving operation period.

[0031] To address this sticking problem in the open state, a vacuum break structure 130 (e.g., a groove) is strategically positioned on the inner surface of the valve body 110 corresponding to the fully open position P1 of the valve disc 120. As shown in FIG. 7 , when the valve disc 120 of the valve 100 is in the fully open position P1, the valve disc 120 partially overlaps the vacuum break structure 130 (e.g., the groove), thereby preventing vacuum sticking between the valve body 110 and the valve disc 120. In other words, if the valve disc 120 includes a plate 122 and an O-ring 124, when the valve disc 120 is in the fully open position P1, the O-ring 124 partially overlaps the vacuum break structure 130 (e.g., the groove). At this time, external gas can flow along the groove between the valve disc 120 and the inner surface of the valve body 110, balancing the pressure difference around the valve disc 120 and eliminating any potential vacuum effect, allowing the valve disc 120 to operate without delay when driven by the pneumatic unit 300. The grooves, for example, at least one linear distribution structure, can be arranged parallel, perpendicular, or at an angle to the direction of movement of the valve disc 120. The angle can be set in the range of 0 to 180 degrees to achieve a better vacuum breaking (or air guiding) effect.

[0032] For example, if the actuation compensation structure 140 includes a return structure 150, the return structure 150 may be provided on the link structure 160 connecting the valve disc 120 and the pneumatic unit 300, thereby providing the valve disc 120 with a return capability. The return structure 150 is configured to provide a return force to return the valve disc 120 to the specified range of movement when the valve disc 120 overtravels (i.e., exceeds a predetermined range of movement). This prevents the valve disc 120 from becoming stuck at a specific position within the valve body 110 due to overtravel or vacuum suction. For example, if the valve disc 120 moves beyond the fully open position P1, which it is intended to maintain, due to its movement inertia, the return structure 150 can provide a corresponding return force to the valve disc 120. This return force allows the valve disc 120 to return to the fully open position P1. One feature of the present invention is that the return force of the return structure 150 is generated by the overtravel of the valve disc 120, and the magnitude of the return force corresponds to the overtravel distance of the valve disc 120. The longer the overtravel distance, the greater the restoring force.

[0033] For example, the link structure 160 is a toggle-type link structure. The return structure 150 is provided on the toggle-type link structure, so that a restoring force can be applied symmetrically to the valve disc 120. The valve 100 may further optionally include a carriage 170 that supports the valve disc 120. The toggle-type link structure includes a first link 162, a second link 164, and a rocker arm 166. Both ends of the first link 162 are pivotally connected to the carriage 170 and the second link 164, respectively. Both ends of the rocker arm 166 are pivotally connected to the second link 164 and a piston rod of the pneumatic unit 300, respectively. The return structure 150 is disposed on the second link 164. One end of the rocker arm 166 is preferably pivotally connected to an intermediate portion of the second link 164, and both ends of the second link 164 are preferably pivotally connected to one end of the first link 162 and the inner wall of the valve body 110, respectively. As described above, the second link 164 may also optionally be provided with a baffle 165. The toggle-type link structure can switch between a contracted state and an expanded state, allowing the carriage 170 and the valve disc 120 received by the carriage 170 to move along a travel path. When the toggle-type link structure is in a contracted state, the first link 162 and the second link 164 cross each other, and therefore the baffle 165 serves to stop (or limit) the first link 162, preventing the first link 162 and the second link 164 from becoming stuck due to overtravel.

[0034] In one embodiment, the return structure 150 is one or more protruding structures, e.g., a hump-like structure, and the second link 164 is also hump-like. When there are two protruding structures, they form a symmetrical double-hump design, providing a symmetrical restoring force to the valve disc 120. The multiple protruding structures can have the same or different dimensions and can be evenly or unevenly spaced to provide a customizable and flexible restoring force. The protruding structure and the link structure 160 can optionally be made of the same material, or the protruding structure can optionally be integrally formed with the link structure 160 to enhance overall structural strength.

[0035] The operating principle of the return structure 150 is elastic deformation. When a component of the valve 100 (e.g., the valve disc 120 or the pulley 170) comes into contact with the return structure 150, the return structure 150 elastically deforms from its initial shape and accumulates the above-mentioned restoring force. This causes the valve disc 120 to move away from the return structure 150 using the restoring force. Once the valve disc 120 moves away from the return structure 150, the return structure 150 returns to its initial shape due to its own elasticity, preparing for the next operation.

[0036] In summary, through innovative control methods and valve structure designs, the present invention effectively solves multiple problems in the prior art, such as vibration, dust, vacuum suction, and inertial overtravel, and provides a valve and its control method with excellent performance and high reliability.

[0037] The valve, its control method, and valve system according to the present invention have the following advantages. (1) The pneumatic control procedure can control the vibration generated by the valve disc during operation. For example, intelligent deceleration can be implemented during the start and stop phases of the valve disc's operation to effectively suppress impact vibration, greatly preventing the generation of dust and other pollutants caused by vibration and significantly improving product yield.

[0038] (2) The control method of the present invention incorporates a machine learning model to automatically generate optimal air pressure control patterns for various valves. This intelligent function enables the valve to self-adjust and be highly customizable.

[0039] (3) The operation compensation structure actively overcomes physical limitations, the vacuum burst structure eliminates valve opening delays caused by vacuum suction, and the return structure effectively absorbs inertial shock to ensure accurate return of the valve disc, thereby improving the operational reliability of the valve and eliminating problems such as sticking and poor positioning.

[0040] The foregoing description is by way of example only and is not intended to be limiting. Any equivalent modifications or variations thereto that do not depart from the spirit and scope of the present invention are intended to be encompassed within the scope of the claims. [Explanation of symbols]

[0041] 10 Valve System 100 valves 110 Valve body 112 Chamber 120 valve disc 122 Plate 124 O-ring 130 Vacuum breaking structure 140 Operational correction structure 150 Return Structure 160 Link Structure 162 First Link 164 Second Link 165 Baffle 166 Rocker arm 170 Carriage 180 sensor elements 200 Control element 300 Pneumatic Unit 302 cylinder 304 Piston rod S10~S20 steps A1, A2 gas input / output ports P1 Fully open position P2 Fully closed position DD section line E Some areas

Claims

1. providing a valve, the valve comprising a valve body and a valve disc, the valve body having a chamber, the valve disc being movably mounted within the chamber of the valve body and being driven by a pneumatic unit to perform an operation; and executing a pneumatic control procedure, the pneumatic control procedure adjusting gas parameters supplied to the pneumatic unit in an adjusting mode when the valve disc performs the operation, so that the pneumatic unit pneumatically controls the operation of the valve disc accordingly, thereby controlling a vibration value generated when the valve disc of the valve performs the operation. How to control the valve.

2. 2. The method for controlling a valve according to claim 1, wherein the gas parameters are at least a pressure and / or a flow rate of the gas.

3. 2. The valve control method of claim 1, wherein the pneumatic control procedure adjusts the gas parameters supplied to the pneumatic unit to make the operation of the valve disc smooth and reduce the vibration value generated when the valve disc of the valve performs the operation, and the smooth operation is a smooth closing operation, a smooth opening operation, or a smooth moving operation.

4. 2. The method for controlling a valve according to claim 1, wherein the pneumatic control procedure adjusts the gas parameters supplied to the pneumatic unit by a solenoid valve, a piezoelectric pressure regulator, or a voice coil pressure regulator.

5. 2. The valve control method of claim 1, wherein the pneumatic control procedure further includes constructing a machine learning model, the definition of the machine learning model including a correspondence relationship between an adjustment value of one of the gas parameters, at least one valve characteristic value, and the vibration value, and the correspondence relationship defined in the machine learning model determines the adjustment mode of the gas parameter supplied to the pneumatic unit.

6. 6. The valve control method of claim 5, wherein the machine learning model is constructed by learning using an artificial intelligence algorithm, and the valve characteristic value is selected from the group consisting of a valve disc weight, a valve disc stroke, an air cylinder diameter, an air path structure, and an operating pressure.

7. 6. The method of claim 5, wherein the pneumatic control procedure adjusts the gas parameters supplied to the pneumatic unit fully or partially automatically.

8. 2. The method for controlling a valve according to claim 1, wherein the adjusting mode of the pneumatic control procedure adjusts the gas parameters supplied to the pneumatic unit stepwise, gradually, or continuously to achieve smooth operation of the valve disc.

9. 2. The method of claim 1, wherein the pneumatic control procedure adjusts the gas parameters supplied to the pneumatic unit by open-loop or closed-loop control.

10. 2. The valve control method of claim 1, further comprising: sensing at least one physical state of the valve by at least one sensor element; and the pneumatic control procedure instantly adjusts the gas parameters supplied to the pneumatic unit in the adjustment mode according to the physical state of the valve; and the sensor element is selected from at least one or at least two of the group consisting of a pressure sensor, a force sensor, a temperature sensor, an optical sensor, an image sensor, a vibration sensor, an inertial sensor, and a current sensor.

11. The method for controlling a valve according to claim 1, wherein the valve is made of a metal material or a sealing surface of the valve is made of the metal material.

12. a valve comprising a valve body and a valve disc, the valve body having a chamber, the valve disc being movably disposed within the chamber of the valve body; a pneumatic unit for driving and operating the valve disc of the valve; and a control element for adjusting the gas parameters supplied to the pneumatic unit in an adjusting mode according to the pneumatic control procedure of claim 1, whereby the pneumatic unit accordingly pneumatically controls the operation of the valve disc, thereby controlling the vibration value generated when the valve disc of the valve performs said operation. Valve system.

13. 13. The valve system according to claim 12, wherein the valve further comprises an operation compensation structure, which can prevent the valve disc from accidentally stopping at a certain position within the valve body when performing the operation.

14. 14. The valve system according to claim 13, wherein the actuation compensation structure comprises one or two selected from the group consisting of a vacuum breaking structure and a return structure.

15. a valve body having a chamber; a valve disc movably mounted within the chamber of the valve body and driven by a pneumatic unit to perform an operation, the pneumatic unit pneumatically controlling the operation of the valve disc in response to gas parameters supplied to the pneumatic unit; and an operation compensation structure for preventing the valve disc from accidentally stopping at a certain position within the valve body when the valve disc performs the operation. valve.

16. 16. The valve of claim 15, wherein the actuation compensation structure comprises one or two selected from the group consisting of a vacuum breaking structure and a return structure.

17. 16. The valve according to claim 15, wherein the operation compensation mechanism comprises a vacuum break mechanism provided on the valve body, which breaks the adsorption phenomenon caused by the vacuum environment between the valve disc and the valve body, thereby preventing the valve disc from being adsorbed to the valve body.

18. 18. The valve of claim 17, wherein the vacuum break structure is a groove provided on the inner surface of the valve body, and due to the groove, when the valve disc performs the operation, there is a period when an area of ​​the valve disc that covers the valve body communicates with another area of ​​the valve disc that does not cover the valve body.

19. 20. The valve of claim 18, wherein the period during which the valve disc performs the operation is when the valve disc is opening, closing, or moving.

20. 19. The valve of claim 18, wherein the valve disc comprises a plate and an O-ring, the O-ring being mounted on the plate, and the O-ring partially overlapping the groove during the period when the valve disc performs the operation.

21. 21. The valve of claim 18, wherein the groove is at least one linear distribution structure, and the distribution direction of the linear distribution structure is parallel to or perpendicular to the moving direction of the valve disc, or the distribution direction of the linear distribution structure forms an angle with the moving direction, the angle being in the range of 0 to 180 degrees.

22. 18. The valve according to claim 15 or 17, wherein the operation compensation structure includes a return structure, which is provided on a link structure connecting the valve disc and the pneumatic unit, and which applies a restoring force to the valve disc when the movement of the valve disc exceeds a predetermined stroke range, thereby returning the valve disc to within the predetermined stroke range.

23. 23. The valve of claim 22, wherein the return structure is one or more protruding structures.

24. 24. The valve of claim 23, wherein the protruding structure is a knobby structure.

25. 24. The valve according to claim 23, wherein the dimensions of the protruding structures are the same or different, or the distances between the protruding structures are the same or different.

26. 24. The valve of claim 23, wherein the protruding structure is integrally formed with the linking structure, or the protruding structure and the linking structure are constructed from the same material.

27. 23. The valve of claim 22, wherein when a part of the valve contacts the return structure, the return structure undergoes elastic deformation from its initial shape, accumulating a restoring force, causing the valve disc to separate from the return structure using the restoring force, and when the valve disc separates from the return structure, the return structure recovers to its initial shape.

28. 28. The valve of claim 27, further comprising a carriage that receives the valve disc, the link structure being a toggle-type link structure, and the return structure being provided on the toggle-type link structure.

29. 29. The valve of claim 28, wherein the toggle-type link structure comprises a first link, a second link, and a rocker arm, wherein opposite ends of the first link are pivotally connected to the carriage and the second link, respectively, and opposite ends of the rocker arm are pivotally connected to the second link and a piston rod of the pneumatic unit, respectively, and the return structure is provided on the second link.

30. 30. The valve of claim 29, wherein the toggle-type link structure further comprises a baffle provided on the second link, the baffle serving to stop the first link when the toggle-type link structure transitions from an expanded state to a contracted state.

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