Scanning pattern information generation device, scanning pattern information generation method, scanning pattern information generation program, and laser light irradiation system

Abstract

To provide a scanning pattern information generating device capable of making an intensity distribution coincide with an optional target intensity distribution with high accuracy.SOLUTION: The scanning pattern information generating apparatus 10 includes a target intensity distribution information receiving unit 110 and a scanning pattern information generating unit 120. The target intensity distribution information receiving unit 110 receives target intensity distribution information indicating a target intensity distribution that is a change in the target value of the intensity of the laser beam with respect to the position in the scanning direction, the position being irradiated with the laser beam and changing in the scanning direction as time elapses. Based on the target intensity distribution information, the scanning pattern information generation unit 120 generates scanning pattern information representing a scanning pattern that is a change of the position irradiated with the laser beam with respect to time.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a scan pattern information generating device, a scan pattern information generating method, a scan pattern information generating program, and a laser light irradiation system. [Background technology]

[0002] Technologies for controlling the intensity of laser light have been attracting attention in recent years. For example, optical tweezers technology can trap microparticles on the order of several micrometers in a potential field proportional to the intensity distribution of the laser light, and is being applied to measuring the physical properties of molecular machines, cells, etc. In addition, maskless exposure devices and stereolithography 3D printers that use lasers can also create a variety of objects by controlling the laser irradiation pattern.

[0003] However, with current technologies for controlling the intensity of laser light, for example, in the case of optical tweezers, measuring the response to external force is necessary to evaluate the physical properties of molecular machines, cells, etc., but with conventional optical tweezers, the magnitude of the force changes from moment to moment, making it difficult to evaluate the physical properties. Therefore, there is a demand for accurate formation of a potential field of any shape by controlling the laser light intensity at multiple times and positions. In addition, improved resolution is also required in maskless exposure devices and stereolithography 3D printers, and it is expected that the line width of the drawing can be accurately controlled by controlling the intensity of the laser light.

[0004] For example, as described in Non-Patent Document 1, there is known a laser beam irradiation device that modulates the laser intensity for each position where the laser beam is irradiated. Also, as described in Non-Patent Document 2, there is known a laser beam irradiation device that changes the position where the laser beam is irradiated in the scanning direction over time, thereby changing the intensity of the irradiated laser beam with respect to the position in the scanning direction.

[0005] The laser beam irradiation device described in Non-Patent Document 1 has an intensity distribution that is a change in the intensity of the irradiated laser beam with respect to the position in the scanning direction, and has one maximum value. The laser beam irradiation device described in Non-Patent Document 2 has an intensity distribution that has two maximum values. [Prior art documents] [Non-patent literature]

[0006] [Non-Patent Document 1] W. Benjamin Rogers, John C. Crocker, "A tunable line optical tweezers instrument with nanometer spatial resolution," Rev. Sci. Instrum, Volume 85, Issue 4, 043704, April 1, 2014, https: / / doi.org / 10.1063 / 1.4870806 [Non-patent document 2] A. Berut, A. Arakelyan, A. Petrosyan, et al., "Experimental verification of Landauer's principle linking information and thermodynamics," Nature, vol. 483, no. 7388, p. 187-189, March 8, 2012, https: / / doi.org / 10.1038 / nature10872 Summary of the Invention [Problem to be solved by the invention]

[0007] However, Non-Patent Documents 1 and 2 do not disclose a method for determining a scanning pattern, which is a change in the position irradiated with laser light over time, so as to make the intensity distribution coincide with an arbitrary target intensity distribution with high accuracy. Therefore, the above-mentioned laser light irradiation device has a problem in that it is not possible to make the intensity distribution coincide with an arbitrary target intensity distribution with high accuracy.

[0008] One of the objectives of the present invention is to match the intensity distribution to any target intensity distribution with high accuracy. [Means for solving the problem]

[0009] In one aspect, a scan pattern information generating device includes: a target intensity distribution information receiving unit that receives target intensity distribution information representing a target intensity distribution, which is a change in a target value of the intensity of the laser light relative to a position in the scanning direction, the target value changing with time in the scanning direction at an irradiated position; a scan pattern information generating unit that generates scan pattern information representing a scan pattern that is a change over time in the position irradiated with the laser light, based on the target intensity distribution information; Equipped with.

[0010] In another aspect, a method for generating scan pattern information includes: receiving target intensity distribution information representing a target intensity distribution, which is a change in a target value of the intensity of the laser light relative to a position in the scanning direction, in which the irradiated position changes in the scanning direction over time; generating scan pattern information representing a scan pattern that is a change over time in the position irradiated with the laser light, based on the target intensity distribution information; This includes:

[0011] In another aspect, the scan pattern information generation program comprises: receiving target intensity distribution information representing a target intensity distribution, which is a change in a target value of the intensity of the laser light relative to a position in the scanning direction, in which the irradiated position changes in the scanning direction over time; generating scan pattern information representing a scan pattern that is a change over time in the position irradiated with the laser light, based on the target intensity distribution information; The computer is caused to perform a process including the steps of:

[0012] In another aspect, the laser light projection system comprises: a target intensity distribution information receiving unit that receives target intensity distribution information representing a target intensity distribution, which is a change in a target value of the intensity of the laser light relative to a position in the scanning direction, the target value changing with time in the scanning direction at an irradiated position; a scan pattern information generating unit that generates scan pattern information representing a scan pattern that is a change over time in the position irradiated with the laser light, based on the target intensity distribution information; a laser light irradiation unit that irradiates laser light in such a way that the irradiation position changes in the scanning direction over time in accordance with the scanning pattern represented by the scanning pattern information; Equipped with. [Effects of the Invention]

[0013] The intensity distribution can be matched to any target intensity distribution with high accuracy. [Brief explanation of the drawings]

[0014] [Figure 1] 1 is a block diagram showing a configuration of a laser light irradiation system according to a first embodiment. [Figure 2] 1 is a block diagram illustrating a configuration of a scan pattern information generating device according to a first embodiment. [Figure 3] FIG. 2 is a block diagram illustrating the functions of the scan pattern information generating device according to the first embodiment. [Figure 4] 10 is a graph showing an example of a change in intensity of a laser beam with respect to a position in a scanning direction. [Figure 5] 10 is a graph showing an example of a change in intensity of a laser beam with respect to a position in a scanning direction and an offset value. [Figure 6] 10 is a graph showing an example of the relationship between a position in the scanning direction and a time point at which the position is passed; [Figure 7] 10 is a graph showing the relationship between a position in the scanning direction and a time point at which the position is passed, and an example of a position-time point function. [Figure 8] 10 is a graph showing an example of a scanning pattern. [Figure 9]4 is a flowchart showing processing executed by the scan pattern information generating device of the first embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0015] Hereinafter, embodiments of a scan pattern information generating device, a scan pattern information generating method, a scan pattern information generating program, and a laser light irradiation system of the present invention will be described with reference to FIGS.

[0016] First Embodiment (overview) The scan pattern information generating device of the first embodiment includes a target intensity distribution information receiving unit and a scan pattern information generating unit. The target intensity distribution information receiving unit receives target intensity distribution information representing a target intensity distribution, which is a change in a target value of the intensity of the laser light relative to a position in the scanning direction, where the irradiated position changes in the scanning direction over time. The scan pattern information generating unit generates scan pattern information representing a scan pattern that is a change over time in the position irradiated with the laser light, based on the target intensity distribution information.

[0017] According to this, target intensity distribution information is received, and scan pattern information representing a scan pattern that is a change in the position irradiated with laser light over time is generated based on the target intensity distribution information, thereby making it possible to match the intensity distribution that is a change in the intensity of the irradiated laser light over position in the scanning direction with an arbitrary target intensity distribution with high accuracy.

[0018] (composition) As shown in FIG. 1, the laser light irradiation system 1 includes a scan pattern information generation device 10 and a laser light irradiation device 20. In this example, the laser light irradiation system 1 constitutes at least a part of optical tweezers for capturing or moving a minute object. Note that the laser light irradiation system 1 may constitute at least a part of a semiconductor exposure apparatus, a 3D printer using a stereolithography method, or the like, instead of the optical tweezers.

[0019] As shown in FIG. 2, the scan pattern information generating device 10 includes a processing device 11, a storage device 12, an input device 13, an output device 14, and a connection device 15, which are connected to each other via a bus BU1. For example, the scan pattern information generating device 10 is configured by a computer (in other words, an information processing device). The computer may be a server computer, a desktop computer, a laptop computer, or a tablet computer. The computer may also be at least a part of a smartphone or the like. The scan pattern information generating device 10 may also be configured by a plurality of devices connected to each other so as to be able to communicate with each other.

[0020] The processing device 11 executes a program stored in the storage device 12 to control the storage device 12, the input device 13, and the output device 14. In this way, the processing device 11 realizes the functions described below.

[0021] In this example, the processing device 11 is a CPU (Central Processing Unit). Note that the processing device 11 may include an MPU (Micro Processing Unit), a GPU (Graphics Processing Unit), or a DSP (Digital Signal Processor) instead of or in addition to the CPU.

[0022] In this example, the storage device 12 includes a volatile memory and a non-volatile memory, such as at least one of a random access memory (RAM), a read only memory (ROM), a semiconductor memory, an organic memory, a hard disk drive (HDD), and a solid state drive (SSD).

[0023] The input device 13 inputs information from outside the scan pattern information generation device 10. In this example, the input device 13 includes a reading device capable of reading information from a storage medium or recording medium (e.g., a semiconductor memory, an optical disk, a magneto-optical disk, or a magnetic disk), a keyboard, and a mouse. The input device 13 may also include a microphone.

[0024] The output device 14 outputs information to the outside of the scan pattern information generation device 10. In this example, the output device 14 includes a display. The output device 14 may also include a speaker. The scan pattern information generating device 10 may be provided with a touch panel display that constitutes both the input device 13 and the output device 14 .

[0025] The connection device 15 is communicably connected to a device external to the scan pattern information generation device 10 via a wired or wireless connection. In this example, the connection device 15 is communicably connected to the laser light irradiation device 20 via a wired connection. The connection device 15 transmits the generated scan pattern information to the laser light irradiation device 20 as described below. The scan pattern information represents a scan pattern that is a change over time in the position where the laser light is irradiated.

[0026] The laser light irradiation device 20 receives scan pattern information from the scan pattern information generating device 10, and irradiates laser light in accordance with the scan pattern represented by the received scan pattern information so that the irradiated position changes in the scanning direction over time.

[0027] (function) As shown in FIG. 3, the functions of the scan pattern information generating device 10 include a target intensity distribution information receiving unit 110 and a scan pattern information generating unit 120.

[0028] The target intensity distribution information receiving unit 110 receives any target intensity distribution information to be generated. The target intensity distribution information represents a target intensity distribution, which is a change in the target value of the intensity of the laser beam relative to the position in the scanning direction, where the irradiated position changes over time in the scanning direction.

[0029] In this example, the target intensity distribution information includes information representing M positions that are different from one another in the scanning direction, and information representing target values ​​of the laser light intensity at each of the M positions. M represents an integer of 2 or greater. In this example, the M positions are equally spaced in the scanning direction. Note that at least some of the M positions may not be equally spaced in the scanning direction. Furthermore, the target intensity distribution information may include information specifying a function that represents the target intensity distribution.

[0030] The scan pattern information generating unit 120 generates scan pattern information based on the target intensity distribution information received by the target intensity distribution information receiving unit 110 . The scan pattern information generation unit 120 includes a first coefficient set determination unit 121 , a second coefficient set determination unit 122 , a time point set determination unit 123 , a position time point function acquisition unit 124 , and a scan pattern determination unit 125 .

[0031] In order to approximate the target intensity distribution I(x) represented by the target intensity distribution information by superposing the intensity I0(x) of the laser light when the irradiated position does not change, the first coefficient set determination unit 121 determines N coefficients A1, A2, . . . , A N In this example, the N coefficients A1, A2, . . . , A N may be expressed as a first coefficient set.

number

[0032] x represents a position in the scanning direction, N represents the number of discretized positions in the scanning direction, and k represents an integer between 1 and N. μ k represents the k-th position among the N discretized positions. k is the kth position μ k represents the coefficient for

[0033] In this example, N discretized positions μ1, μ2, . . . , μ N are equally spaced in the scanning direction. Therefore, the kth position μ k is expressed by Equation 2.

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[0034] x min represents the minimum value of the position in the scanning direction. Δx is the N discretized positions μ1,μ2,...,μ N It represents the distance between two adjacent positions. Note that N discretized positions μ1, μ2, . . . , μ N At least some of the intervals may not be equally spaced in the scanning direction.

[0035] I0(x) is a basic intensity distribution of the intensity of the laser light with respect to the position in the scanning direction when the irradiated position does not change. In this example, the basic intensity distribution I0(x) is a Gaussian function as expressed in Equation 3. A0 and σ0 are parameters specific to the laser light irradiating device 20. For example, A0 and σ0 may be determined in advance by measuring the basic intensity distribution.

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[0036] The solid line in Fig. 4 represents an example of the target intensity distribution I(x), and the dotted line in Fig. 4 represents an example of N terms to be summed in the discretized intensity distribution I'(x).

[0037] The first coefficient set determination unit 121 determines a first cost function S1(A1, A2, . . . , A N ) to minimize N coefficients A1,A2,...,A N Determine.

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[0038] x max represents the maximum value of the position in the scanning direction. In Equation 4, the integral range is x min From x max may include values ​​outside of the range. Each of α and β is a predetermined parameter. In this example, α is 0.01. β is 1 or 2. α may be a value other than 0.01, for example, a value between 0.001 and 0.1. α may be 0. β may be a positive real number other than 1 or 2.

[0039] As shown in Equation 4, the first cost function S1(A1, A2, . . . , A N ) increases as the difference between the discretized intensity distribution I'(x) and the target intensity distribution I(x) increases. Furthermore, as expressed in Equation 4, the first cost function S1(A1, A2, . . . , A N ) are the positions μ adjacent to each other in the scanning direction. k ,μ k+1 Two coefficients A for k ,A k+1 In other words, the first cost function S1(A1, A2, . . . , A N ) represents two positions μ adjacent to each other in the scanning direction, where m represents an integer from 1 to N and n represents an integer from 1 to N and different from m. m ,μ n Two coefficients A for m ,A n The larger the difference between

[0040] The first cost function S1(A1, A2, , A N ) may be a function expressed by any one of Equations 5 to 7, instead of Equation 4.

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number

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[0041] For example, the first coefficient set determination unit 121 uses a gradient descent method, a quasi-gradient method, a Newton method, or a genetic algorithm to determine the first cost function S1(A1, A2, . . . , A N ) to minimize N coefficients A1,A2,...,A N Determine.

[0042] The second coefficient set determination unit 122 determines the N coefficients A1, A2, . . . , A N The offset value C is determined based on the above, and the target intensity distribution I(x) is corrected by adding the determined offset value C. N coefficients A1, A2, . . . , A are calculated so that the discretized intensity distribution I'(x) approaches the corrected target intensity distribution I(x) + C. N This is the value I' obtained by integrating the discretized intensity distribution I'(x) over the entire range with respect to the position x in the scanning direction. tot This is because it is necessary to make the intensity of the laser beam actually scanned coincide with the intensity of the laser beam. In this example, N coefficients A1, A2, . . . , A N may be expressed as a second set of coefficients.

[0043] The offset value C is expressed by Equation 8. The dashed dotted line in Fig. 5 shows an example of the offset value C. Note that although the offset value is a positive value in Fig. 5, it may also be a negative value.

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[0044] I' tot is a value obtained by integrating the discretized intensity distribution I′(x) over the entire range with respect to the position x in the scanning direction, and can be expressed by Equation 9.

number

[0045] I' tot,in As shown in Equation 10, the discretized intensity distribution I'(x) is calculated as x with respect to the position x in the scanning direction. min From x max represents the value integrated over the range

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[0046] I tot,exp is a parameter specific to the laser light irradiation device 20. In this example, I tot,exp may be expressed as a reference value. In this example, the reference value I tot,exp is determined in advance by measuring the intensity of the laser light in a state where the irradiated position changes in the scanning direction over time according to a predetermined scanning pattern (for example, a scanning pattern in which the irradiated position moves at a constant speed). tot,exp may be predetermined by measuring the basic intensity distribution.

[0047] The offset value C may be expressed by Equation 11 or Equation 12 instead of Equation 8.

number

number

[0048] The second coefficient set determination unit 122 determines the second cost function S2(A1, A2, . . . , A N) to minimize N coefficients A1,A2,...,A N Determine.

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[0049] In this way, the second coefficient set determination unit 122 determines the N coefficients A1, A2, . . . , A N The value I' obtained by integrating the discretized intensity distribution I'(x) with respect to the position x in the scanning direction based on tot is set to a predetermined reference value I tot,exp The target intensity distribution I(x) is corrected by adding an offset value C so that it approaches

[0050] Furthermore, the second coefficient set determination unit 122 determines a second cost function S2(A1, A2, . . . , A N ) to minimize N coefficients A1,A2,...,A N Re-decide.

[0051] Furthermore, as expressed in Equation 13, the second cost function S2(A1, A2, . . . , A N ) are the positions μ adjacent to each other in the scanning direction. k ,μ k+1 Two coefficients A for k ,A k+1 In other words, the second cost function S2(A1, A2, . . . , A N ) represents two positions μ adjacent to each other in the scanning direction, where m represents an integer from 1 to N and n represents an integer from 1 to N and different from m. m ,μ n Two coefficients A for m ,A n The larger the difference between

[0052] The second cost function S2(A1, A2, , A N) may be a function expressed by any one of Equations 14 to 16 instead of Equation 13, for example.

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number

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[0053] In addition, the second cost function S2(A1, A2, , A N ) is the first cost function S1(A1,A2,...,A N ) may be a value different from α in the second cost function S2(A1, A2, . . . , A N ) is the first cost function S1(A1,A2,...,A N ) may be a value different from β in the second cost function S2(A1, A2, . . . , A N ) may be 0.

[0054] For example, the second coefficient set determination unit 122 uses a gradient descent method, a quasi-gradient method, a Newton method, or a genetic algorithm to determine the second cost function S2(A1, A2, . . . , A N ) to minimize N coefficients A1,A2,...,A N Determine. In addition, since the force felt by a particle in optical tweezers or the like is determined by the gradient of the target intensity distribution I(x), there is no problem even if the offset value C is used for correction.

[0055] In this example, the second coefficient set determination unit 122 determines the N newly determined coefficients A1, A2, . . . , A N The offset value C is determined based on the above, and the target intensity distribution I(x) is corrected by adding the determined offset value C. N coefficients A1, A2, . . . , A are calculated so that the discretized intensity distribution I'(x) approaches the corrected target intensity distribution I(x) + C. NThe process of re-determining is repeated until the convergence condition is met.

[0056] For example, the convergence condition is the reference value I tot,exp and the integral I' of the discretized intensity distribution I'(x) tot The magnitude of the difference between and is the integral value I' tot The condition is that the value obtained by dividing by is equal to or less than a predetermined threshold value (for example, a value between 0.01 and 0.05). tot,exp and the integral I' of the discretized intensity distribution I'(x) tot The condition for convergence may be that the magnitude of the difference between and is equal to or less than a predetermined threshold. Also, the convergence condition may be that the number of times the process is repeated exceeds a predetermined threshold. Also, the second coefficient set determination unit 122 does not need to repeatedly execute the process.

[0057] The time point group determination unit 123 determines how to actually scan the laser light by using the N coefficients A1, A2, . . . , A N Based on Equation 17, N positions μ1, μ2, . . . , μ N The dwell times τ1,τ2,...,τ at N locations corresponding to N For example, as shown in Figure 6, the dwell times τ1, τ2, . . . , τ N is determined.

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[0058] Next, the time point group determination unit 123 determines the stay times τ1, τ2, . . . , τ at the determined N positions. N Based on Equation 18, N positions μ1, μ2, . . . , μ N N time points t1, t2, t N For example, as shown in Figure 6, N time points t1, t2, t N is determined.

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[0059] The position and time function acquisition unit 124 acquires N positions μ1, μ2, . . . , μ N and N time points t1, t2, . . . , t determined by the time point group determination unit 123. N and the combination of N coordinates (μ1,t1),(μ2,t2),...,(μ N ,t N ), a position-time function μ(t) is obtained that represents the relationship between the position μ in the scanning direction and the time t at which the position is passed. For example, the position-time function μ(t) is obtained as shown by the dotted line in FIG. 7. In this example, the interpolation is piecewise Hermite interpolation. In this example, the piecewise Hermite interpolation is cubic piecewise Hermite interpolation. Note that the piecewise Hermite interpolation may be J-th order piecewise Hermite interpolation other than cubic. J represents an integer equal to or greater than 1. Note that the interpolation may be an interpolation other than piecewise Hermite interpolation (for example, spline interpolation). Note that the position-time function μ(t) may be obtained by function approximation instead of interpolation. For example, function approximation is performed by applying an arbitrary function such as a polynomial to N coordinates (μ1, t1), (μ2, t2),..., (μ N ,t N )

[0060] In this example, one end μ0 of the position in the scanning direction is x min The time t0 at which the position μ0 is passed is 0, and the other end μ N+1 x max At the same time, the position μ N+1 At time t N+1 The position time function is obtained by using the fact that In other words, in this example, the position time function acquisition unit 124 calculates the coordinates (x min ,0)(μ1,t1),(μ2,t2),...,(μ N ,t N ),(x max , 1) to obtain the position time function μ(t).

[0061] The scan pattern determination unit 125 generates scan pattern information based on the position and time function μ(t) acquired by the position and time function acquisition unit 124 .

[0062] The position time function μ(t) has a value of μ when the time t is in the range from 0 to 1. Also, when the position where the laser light is irradiated is the position x in the scanning direction, min From position x max The scanning period, which is the time required for the laser beam to move to the scanning position, is a parameter specific to the laser beam irradiation device 20. Therefore, in this example, the position time function μ(t) is converted so that it has a value of the position μ in the range of time t from 0 to the scanning period T.

[0063] Furthermore, in this example, the scan pattern is determined so that the unit scan pattern according to the position and time function μ(t) is repeated while reversing the direction of movement in the scan direction every time the scan period T elapses.

[0064] In this example, the scan pattern determination unit 125 determines the scan pattern P(t) based on the position and time function μ(t) acquired by the position and time function acquisition unit 124 and Equation 19. q represents an integer equal to or greater than 0. For example, the scan pattern P(t) is determined as shown in FIG.

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[0065] The scan pattern determination unit 125 generates scan pattern information representing the determined scan pattern, and transmits the generated scan pattern information to the laser light irradiation device 20 via the connection device 15. Note that the scan pattern determination unit 125 may output the scan pattern information via the output device 14.

[0066] The description of the functions of the scan pattern information generating device 10 may be supplemented by a description of the operation of the scan pattern information generating device 10, which will be described later.

[0067] (operation) An example of the operation of the scan pattern information generating device 10 will be described with reference to FIG. First, the scan pattern information generation device 10 waits until it receives target intensity distribution information (determined as "No" in step S101). Next, a user of the scan pattern information generation device 10 inputs any target intensity distribution information via the input device 13. In this example, the target intensity distribution information is input by the input device 13 reading the target intensity distribution information recorded on a storage medium or a recording medium. As a result, the scan pattern information generation device 10 receives the input target intensity distribution information, determines as "Yes" in step S101, and proceeds to step S102.

[0068] Next, the scan pattern information generating device 10 calculates the reference value I tot,exp (determined as "No" in step S102). Next, the user of the scan pattern information generation device 10 inputs the reference value information via the input device 13. As a result, the scan pattern information generation device 10 receives the input reference value information, determines as "Yes" in step S102, and proceeds to step S103.

[0069] Next, the scan pattern information generating device 10 calculates a first cost function S1(A1, A2, . . . , A N ) to minimize N coefficients A1,A2,...,A N (in other words, a first coefficient group) is determined (step S103).

[0070] Next, the scan pattern information generating device 10 calculates the N coefficients A1, A2, . . . , A1 determined in step S103 using Equations 8 to 10, the reference value information received in step S102, and the N coefficients A1, A2, . . . , A1 determined in step S103. N Based on this, the offset value C is calculated (step S104).

[0071] Next, the scan pattern information generating device 10 compares the target intensity distribution information received in step S101 with the N coefficients A1, A2, . . . , A N and the offset value C calculated in step S104, a second cost function S2(A1, A2, . . . , A N ) to minimize N coefficients A1,A2,...,A N (in other words, the second coefficient group) is determined (step S105).

[0072] Next, the scan pattern information generating device 10 determines whether or not the convergence condition is met (step S106).

[0073] If the convergence condition is not satisfied, the scan pattern information generating device 10 determines "No" in step S106, returns to step S104, and compares the N most recent coefficients A1, A2, . . . , A1 determined in step S105 with the Equations 8 to 10, the reference value information received in step S102, and the N most recent coefficients A1, A2, . . . , A1 determined in step S105. N Based on this, the offset value C is calculated (step S104).

[0074] Next, the scan pattern information generating device 10 compares the target intensity distribution information received in step S101 with the latest N coefficients A1, A2, . . . , A N and the offset value C calculated in step S104, a second cost function S2(A1, A2, . . . , A N ) to minimize N coefficients A1,A2,...,A N (in other words, the second coefficient group) is determined (step S105).

[0075] Next, the scan pattern information generating device 10 determines whether or not the convergence condition is met (step S106).

[0076] In this way, the scan pattern information generating device 10 repeatedly executes the processes of steps S104 to S106 until the convergence condition is met.

[0077] If the convergence condition is met, the scan pattern information generating device 10 determines "Yes" in step S106, proceeds to step S107, and calculates the latest N coefficients A1, A2, . . . , A N , and based on Equation 17 and Equation 18, N time points t1, t2, . . . , t N (in other words, a group of time points) is determined (step S107).

[0078] Next, the scan pattern information generating device 10 calculates the N positions μ1, μ2, . . . , μ N and N time points t1, t2, . . . , t determined in step S107. N and the combination of N coordinates (μ1,t1),(μ2,t2),...,(μ N ,t N ) is interpolated to obtain the position time function μ(t) (step S108).

[0079] Next, the scan pattern information generation device 10 determines a scan pattern P(t) based on the position time function μ(t) acquired in step S108 and Equation 19 (step S109). Next, the scan pattern information generation device 10 generates scan pattern information representing the scan pattern determined in step S109, and transmits the generated scan pattern information to the laser light irradiation device 20 (step S110). As a result, the scan pattern information generating device 10 ends the execution of the processing shown in FIG.

[0080] The laser light irradiation device 20 receives scan pattern information from the scan pattern information generating device 10, and irradiates laser light in accordance with the scan pattern represented by the received scan pattern information so that the irradiated position changes in the scanning direction over time.

[0081] As described above, the scan pattern information generating device 10 of the first embodiment includes the target intensity distribution information receiving unit 110 and the scan pattern information generating unit 120. The target intensity distribution information receiving unit 110 receives target intensity distribution information representing a target intensity distribution, which is a change in a target value of the intensity of the laser light relative to a position in the scanning direction, where the irradiated position changes in the scanning direction over time. The scan pattern information generating unit 120 generates scan pattern information representing a scan pattern, which is a change over time in the position irradiated with the laser light, based on the target intensity distribution information.

[0082] According to this, target intensity distribution information is received, and scan pattern information representing a scan pattern that is a change in the position irradiated with laser light over time is generated based on the target intensity distribution information, thereby making it possible to match the intensity distribution that is a change in the intensity of the irradiated laser light over position in the scanning direction with an arbitrary target intensity distribution with high accuracy.

[0083] Furthermore, in the scan pattern information generating device 10 of the first embodiment, the scan pattern information generating unit 120 is configured to calculate a parameter k such that x represents a position in the scan direction, N represents the number of discretized positions in the scan direction, k represents an integer from 1 to N, and μ k represents the kth position, and A k is the kth position μ k In the case where the coefficients for the discretized intensity distribution I'(x) expressed by Equation 1 are expressed, the first cost function S1(A1, A2, . . . , A N ) to minimize N coefficients A1,A2,...,A N Determine the N coefficients A1, A2, . . ., A N The scan pattern information is generated based on the

[0084] According to this, N discrete positions μ1, μ2, . . . , μ N N coefficients A1, A2, . . . , A Nis determined with high accuracy. This allows the intensity distribution, which is the change in the intensity of the irradiated laser light with respect to the position in the scanning direction, to match an arbitrary target intensity distribution with high accuracy.

[0085] Furthermore, in the scan pattern information generating device 10 of the first embodiment, the first cost function S1(A1, A2, . . . , A N ) represents two positions μ adjacent to each other in the scanning direction, where m represents an integer from 1 to N and n represents an integer from 1 to N and different from m. m ,μ n Two coefficients A for m ,A n The larger the difference between

[0086] However, it is difficult to change the intensity of the laser light suddenly. In contrast, according to the scan pattern information generating device 10, the intensity of the laser light is changed at two positions μ adjacent to each other in the scan direction. m ,μ n This allows the intensity distribution, which is the change in the intensity of the irradiated laser light with respect to the position in the scanning direction, to match an arbitrary target intensity distribution with high accuracy.

[0087] Furthermore, in the scan pattern information generating device 10 of the first embodiment, the scan pattern information generating unit 120 determines the N coefficients A1, A2, . . . , A N The value obtained by integrating the discretized intensity distribution I'(x) with respect to the position in the scanning direction based on tot,exp The target intensity distribution I(x) is corrected by adding an offset value C so that it approaches I(x), and a second cost function S2(A1, A2, . . . , A N ) to minimize N coefficients A1,A2,...,A N Determine the N coefficients A1, A2, . . ., A N The scan pattern information is generated based on the

[0088] The integrated value of the discretized intensity distribution I'(x), which is the value obtained by integrating the discretized intensity distribution I'(x) with respect to the position in the scanning direction, corresponds to the power of the irradiated laser light. The power of the laser light irradiated in a period having a predetermined length is calculated based on a reference value I tot,exp However, the N coefficients A1, A2, . . . , A N When the target intensity distribution I(x) is used, the discretized intensity distribution integral value is tot,exp may differ relatively significantly.

[0089] In contrast, according to the scan pattern information generating device 10, the target intensity distribution I(x) is corrected by adding an offset value C, and N coefficients A1, A2, . . . , A are calculated based on a second cost function S2 that uses the corrected target intensity distribution I(x)+C. N This redefines the discretized intensity distribution integral value to the reference value I tot,exp can be made sufficiently close to

[0090] Furthermore, in the scan pattern information generating device 10 of the first embodiment, the scan pattern information generating unit 120 determines the N coefficients A1, A2, . . . , A N Based on N positions μ1,μ2,···,μ N N time points t1, t2, t N Determine the N time points t1, t2, t N The scan pattern information is generated based on the

[0091] According to this, N discrete positions μ1, μ2, . . . , μ N N time points t1, t2, t N , N positions μ1,μ2,···,μ N N coefficients A1, A2, . . . , A NThis allows the intensity distribution, which is the change in the intensity of the irradiated laser light with respect to the position in the scanning direction, to match an arbitrary target intensity distribution with high precision.

[0092] Furthermore, in the scan pattern information generating device 10 of the first embodiment, the scan pattern information generating unit 120 calculates the N positions μ1, μ2, . . . , μ N and N determined time points t1, t2, t N and the combination of N coordinates (μ1,t1),(μ2,t2),...,(μ N ,t N ) is interpolated or function-approximated (in this example, interpolated) to obtain a position-time function that represents the relationship between the position in the scanning direction and the time when that position is passed, and scan pattern information is generated based on the obtained position-time function.

[0093] According to this, N positions μ1, μ2, . . . μ N and N time points t1, t2, t N The combination of N coordinates (μ1,t1),(μ2,t2),...,(μ N ,t N ) is obtained. This allows the position where the laser light is irradiated to change smoothly over time.

[0094] The scan pattern information generating device 10 does not need to include the second coefficient set determining unit 122. In this case, the scan pattern information generating device 10 uses the N coefficients A1, A2, . . . , A determined by the first coefficient set determining unit 121. N Based on Equation 17, N positions μ1, μ2, . . . , μ N N dwell times τ1,τ2,...,τ N may be determined.

[0095] The present invention is not limited to the above-described embodiment. For example, various modifications that can be understood by those skilled in the art may be made to the above-described embodiment without departing from the spirit of the present invention. [Explanation of symbols]

[0096] 1. Laser light irradiation system 10 Scanning pattern information generating device 11 Processing equipment 12 Storage device 13 Input Devices 14 Output Devices 15 Connecting Devices 110 Target intensity distribution information receiving unit 120 Scanning pattern information generation unit 121 First coefficient group determination unit 122 Second coefficient group determination unit 123 Time Group Determination Unit 124 Position and time function acquisition unit 125 Scanning pattern determination unit 20 Laser light irradiation device BU1 bus

Claims

1. a target intensity distribution information receiving unit that receives target intensity distribution information representing a target intensity distribution, which is a change in a target value of the intensity of the laser light relative to a position in the scanning direction, the target value changing with time in the scanning direction; a scan pattern information generating unit that generates scan pattern information representing a scan pattern that is a change over time in the position irradiated with the laser light, based on the target intensity distribution information; A scan pattern information generating device comprising:

2. 2. The scanning pattern information generating device according to claim 1, The scan pattern information generation unit x represents a position in the scanning direction, N represents the number of discretized positions in the scanning direction, k represents an integer from 1 to N, and μ ｋ represents the k-th position, and A ｋ is the kth position μ ｋ In the case where the coefficients for the discretized intensity distribution I′(x) expressed by Equation 1 are expressed, the first cost function S increases as the difference between the discretized intensity distribution I′(x) expressed by Equation 1 and the target intensity distribution I(x) expressed by the target intensity distribution information increases. １ (A １ , A ２ , ..., A Ｎ ) so as to minimize the N coefficients A １ , A ２ , ..., A Ｎ and determining the N coefficients A １ , A ２ , ..., A Ｎ A scan pattern information generating device that generates the scan pattern information based on the [Equation 1]

3. 3. The scanning pattern information generating device according to claim 2, The first cost function S １ (A １ , A ２ , ..., A Ｎ ) represents two positions μ adjacent to each other in the scanning direction, where m represents an integer from 1 to N and n represents an integer from 1 to N and different from m. ｍ , μ ｎ Two coefficients A for ｍ , A ｎ The larger the difference between the two, the larger the scan pattern information generation device.

4. 4. The scanning pattern information generating device according to claim 2 or 3, The scan pattern information generation unit The determined N coefficients A １ , A ２ , ..., A Ｎ The target intensity distribution I(x) is corrected by adding an offset value C so that a value obtained by integrating the discretized intensity distribution I'(x) with respect to a position in the scanning direction based on ２ (A １ , A ２ , ..., A Ｎ ) so as to minimize the N coefficients A １ , A ２ , ..., A Ｎ and determining the N coefficients A １ , A ２ , ..., A Ｎ A scan pattern information generating device that generates the scan pattern information based on the

5. 4. The scanning pattern information generating device according to claim 2 or 3, The scan pattern information generation unit The determined N coefficients A １ , A ２ , ..., A Ｎ Based on this, the N positions μ １ , μ ２ , ..., μ Ｎ N time points t １ , t ２ , ..., t Ｎ and determining the N time points t １ , t ２ , ..., t Ｎ A scan pattern information generating device that generates the scan pattern information based on the

6. 6. The scanning pattern information generating device according to claim 5, The scan pattern information generation unit The N positions μ １ , μ ２ , ..., μ Ｎ and the determined N time points t １ , t ２ , ..., t Ｎ and N coordinates (μ １ , t １ ), (μ ２ , t ２ ), ..., (μ Ｎ , t Ｎ ) to obtain a position-time function that represents a relationship between a position in the scanning direction and a time point at which the position is passed, and generate the scan pattern information based on the obtained position-time function.

7. receiving target intensity distribution information representing a target intensity distribution, which is a change in a target value of the intensity of the laser light relative to a position in the scanning direction, the target value changing with time in the scanning direction; generating scan pattern information representing a scan pattern that is a change over time in the position irradiated with the laser light, based on the target intensity distribution information; A method for generating scan pattern information, comprising:

8. A scan pattern information generating program that causes a computer to execute the scan pattern information generating method according to claim 1.

9. The scanning pattern information generating device according to claim 1 ; a laser light irradiation unit that irradiates the laser light in such a way that the irradiation position changes over time in the scanning direction in accordance with the scanning pattern represented by the scanning pattern information; A laser light irradiation system comprising:

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