Waste gas separation and treatment method, system, electronic device, and storage medium

Abstract

The present disclosure provides a waste gas fractionation processing method, system, electronic device and storage medium.SOLUTION: The method includes the following steps: determining at least one target special gas to be purified at a current moment according to detection results of various special gases detected by the inlet gas analyzer at the current moment; determining a target two-way valve corresponding to the target special gas according to a corresponding relationship between the gas purification device and the two-way valve; and controlling opening and closing of the target two-way valve, so that the waste gas is sent into different target gas purification devices to sequentially purify the various target special gases at the current moment according to a positional relationship between the different target gas purification devices. By using the above waste gas separation processing method, system, electronic device and storage medium, the problem that the waste gas cannot be completely processed and the processing efficiency of the waste gas is low in the conventional waste gas processing method can be solved.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present application belongs to the technical field of industrial waste gas treatment, and specifically relates to a waste gas fractionation treatment method, system, electronic device and storage medium. [Background technology]

[0002] Industrial waste gases are toxic and harmful gases emitted during industrial production. For example, in the manufacturing of integrated circuits, there are approximately 50 types of special gases required for key processes such as silicon wafer manufacturing, oxidation, photolithography, vapor deposition, etching, and ion implantation. If untreated special gases are directly released into the atmosphere, it will cause severe environmental pollution.

[0003] Currently, when treating industrial waste gas, one device is usually used to purify and treat multiple types of special gases. However, because the waste gas treatment device must be able to treat multiple types of special gases, such devices cannot fully utilize their waste gas treatment capacity and cannot completely treat the waste gas, resulting in low waste gas treatment efficiency. Summary of the Invention

[0004] In view of this, the present application aims to provide a waste gas separation treatment method, system, electronic device and storage medium that can solve the problem of conventional waste gas treatment methods, which are unable to completely treat waste gas and have low waste gas treatment efficiency.

[0005] In a first aspect, an embodiment of the present application provides a waste gas fractionation treatment method, the waste gas fractionation treatment method being used in a control device for a waste gas fractionation treatment system, the waste gas fractionation treatment system including an inlet gas analyzer, a waste gas forward passage, and a plurality of gas purification subsystems, each gas purification subsystem including a gas purification device and a two-way valve, each gas purification device configured to purify one special gas in the waste gas, the method comprising:

[0006] determining at least one target special gas to be purified at the current time based on the detection results of various special gases detected by the inlet gas analyzer at the current time;

[0007] determining a target two-way valve corresponding to the target special gas based on the correspondence relationship between the gas purification device and the two-way valve;

[0008] The method includes a step of sequentially sending the waste gas into different target gas purification devices by controlling the opening and closing of the target two-way valve, and sequentially purifying various target special gases at the current time according to the positional relationship between the different target gas purification devices.

[0009] Optionally, each gas purification device is connected to the exhaust gas forward feed passage by a respective intake passage and exhaust passage, and the target two-way valve includes a target forward feed passage two-way valve and a target intake passage two-way valve, the target forward feed passage two-way valve is installed in the exhaust gas forward feed passage between the intake passage and the exhaust passage of the target gas purification device, and the target intake passage two-way valve is installed in the intake passage of the target gas purification device, and sending the exhaust gas sequentially to different target gas purification devices by controlling the opening and closing of the target two-way valve includes closing the target forward feed passage two-way valve and opening the target intake passage two-way valve to change the exhaust gas feed passage from the exhaust gas forward feed passage to the target gas purification passage, and the target gas purification passage is composed of an intake passage corresponding to the target special gas, an exhaust passage, and the target gas purification device.

[0010] Optionally, the method further includes the steps of, after determining at least one target special gas waiting for purification at the current time, determining whether the target special gas at the current time and the target special gas at the previous time are completely the same, and if they are not completely the same, opening the target forward feed passage two-way valve corresponding to the different target special gas at the previous time and closing the target intake passage two-way valve corresponding to the different target special gas.

[0011] Optionally, the step of determining at least one target special gas to be purified based on the detection results of various special gases detected by the inlet gas analyzer at the current time includes the step of determining, in the detection results, a special gas that does not meet the gas emission standards as the target special gas to be purified.

[0012] Optionally, the method further comprises placing other gas purification devices other than the target gas purification device in a non-operational mode to save energy.

[0013] Optionally, the waste gas fractionation treatment system further includes a gas source for generating purge gas, a pressure regulating valve, and a flow meter installed in the purge gas feed passage, the purge gas feed passage being connected to each of the waste gas forward feed passage, the intake passage and the exhaust passage corresponding to each gas purification device, and the method further includes a step of adjusting the flow rate and flow velocity of the purge gas entering the waste gas forward feed passage, the intake passage and the exhaust passage corresponding to each gas purification device via the purge gas feed passage by controlling the pressure regulating valve and the flow meter.

[0014] Optionally, the target special gas includes at least one of a strongly acidic corrosive special gas, a flammable special gas, a toxic special gas, a special gas containing a large amount of dust, and hydrogen gas; the gas purifying device for the strongly acidic corrosive special gas purifies the strongly acidic corrosive special gas from the waste gas using a water washing method; the gas purifying device for the flammable special gas purifies the flammable special gas from the waste gas using a high-temperature purification method; the gas purifying device for the toxic special gas purifies the toxic special gas from the waste gas using an adsorbent adsorption method; the gas purifying device for the special gas containing a large amount of dust purifies the special gas containing a large amount of dust from the waste gas using an electrostatic adsorption method; and the gas purifying device for hydrogen gas purifies the hydrogen gas from the waste gas using a hydrogen-oxygen reaction method.

[0015] In a second aspect, an embodiment of the present application further provides a waste gas fractionation treatment system, the system including a controller, an inlet gas analyzer, a waste gas forward passage, and a plurality of gas purification subsystems, each gas purification subsystem including a gas purification device and a two-way valve;

[0016] The control device is configured to carry out the waste gas fractionation treatment method described above,

[0017] the inlet gas analyzer is configured to detect the waste gas at the inlet of the waste gas fractionation treatment system, obtain detection results for various special gases, and transmit the detection results to the control device;

[0018] the waste gas forward passage is configured to route the waste gas into each gas purification device;

[0019] each of the plurality of gas purification devices is configured to purify a corresponding specialty gas;

[0020] The two-way valve corresponding to each gas purification device is configured to change the passage through which the waste gas is sent, so that the waste gas is sent to the target gas purification device for purification treatment.

[0021] In a third aspect, an embodiment of the present application further provides an electronic device, the electronic device including a processor, a memory, and a bus, wherein the memory stores machine-readable instructions executable by the processor, the processor and the memory communicate with each other via the bus when the electronic device is operating, and when the machine-readable instructions are executed by the processor, each step of the above waste gas fractionation treatment method is performed.

[0022] In a fourth aspect, an embodiment of the present application further provides a computer-readable storage medium having a computer program stored therein, the computer program executing the steps of the waste gas fractionation method described above when executed by a processor.

[0023] The embodiments of the present application have the following beneficial effects:

[0024] The waste gas separation treatment method, system, electronic device, and storage medium according to the embodiments of the present application use different gas purification devices to purify each of the various special gases in the waste gas separately, thereby treating each of the various special gases in an optimal purification environment, improving the waste gas treatment efficiency, avoiding the problem of the waste gas treatment capacity not being fully utilized when multiple types of special gases are purified simultaneously in a single waste gas treatment device, improving the waste gas treatment capacity, and solving the problem of the waste gas not being fully treated and the waste gas treatment efficiency being low compared to the waste gas treatment methods of the prior art.

[0025] In order to make the above-mentioned objects, features and advantages of the present application more apparent, preferred embodiments will be described in detail below with reference to the drawings.

[0026] In order to more clearly explain the technical solutions of the embodiments in this application, the drawings necessary for explaining the embodiments will be briefly described below. The drawings described are only for illustrating some embodiments of this application and are not intended to limit the scope. Those skilled in the art can obtain other related drawings based on these drawings without using inventive abilities. [Brief explanation of the drawings]

[0027] [Figure 1] 1 is a schematic diagram of a waste gas separation treatment system according to an embodiment of the present application. [Figure 2] 1 is a flow chart of a waste gas fractionation treatment method according to an embodiment of the present application. [Figure 3] 1 is a schematic configuration diagram of an electronic device according to an embodiment of the present application. DETAILED DESCRIPTION OF THE INVENTION

[0028] In order to make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings used in the embodiments of the present application. Of course, the described embodiments are only some of the embodiments of the present application, and do not represent all of the embodiments. The components in the embodiments of the present invention shown in the drawings can be arranged and designed in various ways. Therefore, the following detailed description of the embodiments of the present application shown in the drawings only illustrates selected embodiments of the present application and does not limit the scope of the present application to be protected. All other embodiments that can be obtained by those skilled in the art based on the embodiments of the present application without using inventive ability also fall within the scope of protection of the present application.

[0029] Industrial waste gases are toxic and harmful gases emitted during industrial production. For example, in the manufacturing of integrated circuits, approximately 50 types of special gases are required for core processes such as silicon wafer manufacturing, oxidation, photolithography, vapor deposition, etching, and ion implantation. Releasing untreated special gases directly into the atmosphere would result in severe environmental pollution. Currently, when treating industrial waste gases, a single piece of equipment is typically used to purify and treat multiple types of special gases. However, because the equipment must be able to treat multiple types of special gases, such equipment often does not fully utilize its waste gas treatment capacity, resulting in incomplete treatment of the waste gases and low waste gas treatment efficiency.

[0030] In view of this, embodiments of the present application provide a waste gas fractionation treatment system that improves the treatment efficiency of waste gas.

[0031] Referring to Figure 1, Figure 1 is a schematic diagram of a waste gas fractionation treatment system according to an embodiment of the present application. As shown in Figure 1, the waste gas fractionation treatment system 10 includes a control device (not shown), an inlet gas analyzer 101, a first gas purification subsystem 110, a second gas purification subsystem 120, a third gas purification subsystem 130, a fourth gas purification subsystem 140, and a fifth gas purification subsystem 150.

[0032] The inlet gas analyzer 101 is installed at the position of the inlet of the waste gas fractionation treatment system 10, connected to the control device, and configured to detect the waste gas at the inlet of the waste gas fractionation treatment system 10, obtain the detection results for each special gas, and transmit the detection results to the control device. The gas analyzer can detect the content information of various special gases in the waste gas, and the control device can determine the target special gas in the waste gas to be treated based on the content information.

[0033] Each gas purification subsystem includes a gas purification device and a two-way valve, the two-way valve including a forward feed passage two-way valve and an intake passage two-way valve. For example, the first gas purification subsystem 110 includes a first forward feed passage two-way valve 111, a first intake passage two-way valve 112, and a first gas purification device 113; the second gas purification subsystem 120 includes a second forward feed passage two-way valve 121, a second intake passage two-way valve 122, and a second gas purification device 123; the third gas purification subsystem 130 includes a third forward feed passage two-way valve 131, a third intake passage two-way valve 132, and a third gas purification device 133; the fourth gas purification subsystem 140 includes a fourth forward feed passage two-way valve 141, a fourth intake passage two-way valve 142, and a fourth gas purification device 143; and the fifth gas purification subsystem 150 includes a fifth forward feed passage two-way valve 151, a fifth intake passage two-way valve 152, and a fifth gas purification device 153. Each gas purifier is configured to purify one special gas in the exhaust gas, and each gas purifier is connected to the exhaust gas forward feed passage by its respective intake passage and exhaust passage. The forward feed passage two-way valve is installed in the exhaust gas forward feed passage between the intake passage and the exhaust passage of the gas purifier and is in a normally open state. The intake passage two-way valve is installed in the intake passage of the gas purifier and is in a normally closed state.

[0034] Waste gases contain dozens of types of gases that are waiting to be treated, and these gases are classified according to their properties into strong acidic corrosive special gases, flammable special gases, toxic special gases, special gases containing a large amount of dust, and hydrogen gas.

[0035] The number of gas purification subsystems is determined by the type of special gas. For example, if a maximum of five different special gases can be purified, the number of gas purification subsystems is five, and the number of corresponding gas purification devices is also five. Each of the gas purification devices is configured to purify a corresponding special gas. Each gas purification device is preset to treat a specific special gas, and purifies only the designated special gas. For example, the gas purification devices are devices for purifying multiple gases. The first gas purification device 113 is a device for purifying highly acidic and corrosive special gases, the second gas purification device 123 is a device for purifying flammable special gases, the third gas purification device 133 is a device for purifying toxic special gases, the fourth gas purification device 143 is a device for purifying dust-rich special gases, and the fifth gas purification device 153 is a device for purifying hydrogen gas. Each gas purifier corresponds to one intake passage and one exhaust passage, and the gas purifier is connected to the exhaust gas forward passage through the intake passage and the exhaust passage. The positions of the gas purifiers are not necessarily fixed, and those skilled in the art can select different arrangement sequences of the gas purifiers according to the actual situation.

[0036] The waste gas forward passage 161 is a passage that connects the intake port and the exhaust port, and is configured to send the waste gas into each gas purification device and to send the waste gas from the intake port to the exhaust port.

[0037] The waste gas fractionation treatment system 100 further includes a gas source 171 for generating a purge gas, a pressure regulating valve 172, and a flow meter 173. The gas source 171, the pressure regulating valve 172, and the flow meter 173 are all connected to a control device and installed in a purge gas feed passage. The purge gas feed passage is connected to the waste gas forward feed passage and the intake and exhaust passages of each gas purification subsystem, respectively, to purge residual gas in the waste gas forward feed passage and the intake and exhaust passages of each gas purification subsystem. The gas source 171 is configured to receive a control signal from the control device to generate the purge gas. For example, the purge gas may be nitrogen gas. The pressure regulating valve 172 is configured to receive a pressure adjustment signal from the control device to adjust the air pressure in the purge gas feed passage and provide power for feeding the purge gas. The flow meter 173 is configured to measure the flow rate of the purge gas and send the obtained flow rate value to the control device.

[0038] All gas purifiers, gas analyzers, and two-way valves are connected to a control device, which controls these devices.

[0039] Based on the same inventive idea, the embodiments of the present application also provide a waste gas fractionation treatment method corresponding to the waste gas fractionation treatment system. The principle of solving the problem of the method according to the embodiments of the present application is similar to the above-mentioned waste gas fractionation treatment method according to the embodiments of the present application, so the implementation of the system can refer to the implementation of the method, and the overlapping content will be omitted.

[0040] Referring to Figure 2, Figure 2 is a flowchart of a waste gas fractionation treatment method according to an embodiment of the present application. As shown in Figure 2, the waste gas fractionation treatment method according to an embodiment of the present application is used in a control device for a waste gas fractionation treatment system, and includes the following steps:

[0041] Step S201: Based on the detection results of various special gases detected by the inlet gas analyzer at the current time, at least one target special gas waiting to be purified at the current time is determined.

[0042] Step S202: Determine a target two-way valve corresponding to the target special gas based on the correspondence relationship between the gas purification device and the two-way valve.

[0043] Step S203: By controlling the opening and closing of the target two-way valve, the waste gas is sent to different target gas purification devices in sequence, and various target special gases at the current time are purified in sequence according to the positional relationship between the different target gas purification devices.

[0044] According to the above waste gas separation treatment method, the present application uses different gas purification devices to purify each of the various special gases in the waste gas separately, so that each of the various special gases is treated in an optimal purification environment, improving the waste gas treatment efficiency and avoiding the problem of the waste gas treatment capacity not being fully utilized when multiple types of special gases are purified simultaneously in one waste gas treatment device. This improves the waste gas treatment capacity and solves the problem of the waste gas not being completely treated and the waste gas treatment efficiency being low.

[0045] Each step in FIG. 2 will now be described in detail.

[0046] In step S201, at least one target special gas waiting to be purified at the current time is determined based on the detection results of various special gases detected by the inlet gas analyzer at the current time.

[0047] In the embodiment of the present application, the waste gas enters the waste gas sorting treatment system through the inlet, the inlet gas analyzer detects the waste gas at the inlet in real time and sends the detection results of various special gases in the waste gas to the control device, and the control device selects, based on the gas emission standards, the special gases in the detection results that do not meet the gas emission standards as the target special gases to be purified.

[0048] The detection results of the inlet gas analyzer include, but are not limited to, gas proportions and gas concentrations. Gas proportions refer to the volumetric proportion of the special gas in the waste gas, and gas concentrations refer to the mass of the gas per unit volume. The control device compares the detection data, such as gas proportions and gas concentrations, of various special gases with each emission index in the gas emission standards. If the emission index is not met, the special gas is designated as the target special gas, and if the emission index is met, the special gas is not designated as the target special gas.

[0049] The target special gas selected based on the emission index may be one or more types, including at least one of a strongly acidic corrosive special gas, a flammable special gas, a toxic special gas, a special gas containing a large amount of dust, and hydrogen gas.

[0050] After determining at least one target special gas waiting to be purified at the current time, it is determined whether the target special gas at the current time is completely the same as the target special gas at the previous time. If they are not completely the same, for a different target special gas at the previous time, the target forward feed passage two-way valve corresponding to this different target special gas is opened, and the target intake passage two-way valve corresponding to this different target special gas is closed.

[0051] For example, if the target special gas at the previous time was a strongly acidic corrosive special gas or hydrogen gas, and the target special gas at the current time is hydrogen gas, and the strongly acidic corrosive special gas is a different target special gas at the previous time, the first forward feed passage two-way valve corresponding to the strongly acidic corrosive special gas is opened, and the first intake passage two-way valve corresponding to the strongly acidic corrosive special gas is closed, thereby preventing the waste gas from entering the first gas purification device through the first intake passage two-way valve and allowing the waste gas to enter the subsequent gas purification device through the first forward feed passage two-way valve.

[0052] In step S202, a target two-way valve corresponding to the target special gas is determined based on the correspondence between the gas purification device and the two-way valve.

[0053] After the target special gas is determined, the target gas purification subsystem corresponding to the target special gas is activated, and the other gas purification subsystems are placed in standby or energy-saving mode.

[0054] In the embodiment of the present application, a target two-way valve corresponding to the target special gas is first determined, and then the target two-way valve is controlled to allow the exhaust gas to enter the target gas purification subsystem, and the target gas purification device is controlled to enter an operating mode to purify the target special gas in the exhaust gas, and the other gas purification devices other than the target gas purification device are put into a non-operating mode, i.e., a standby state or an energy-saving mode, thereby saving energy.

[0055] If the target special gas at the current time is a strongly acidic and corrosive special gas, the subsystem that processes the strongly acidic and corrosive special gas is the first gas purification subsystem, so the first forward feed passage two-way valve and the first intake passage two-way valve are determined as the target two-way valves.

[0056] In step S203, the target two-way valve is controlled to open and close, so that the waste gas is sent to different target gas purification devices in sequence, and various target special gases at the current time are purified in sequence according to the positional relationship between the different target gas purification devices.

[0057] Here, by closing the target forward feed passage two-way valve, the passage through which the exhaust gas enters other subsequent gas purification subsystems via the exhaust gas forward feed passage can be blocked. Then, by opening the target intake passage two-way valve, the passage through which the exhaust gas enters the target gas purification device is opened, changing the exhaust gas feed passage from the exhaust gas forward feed passage to the target gas purification passage. The target gas purification passage is composed of an intake passage corresponding to the target special gas, an exhaust passage, and the target gas purification device. The exhaust gas first enters the intake passage of the first gas purification subsystem, then enters the first gas purification device via the intake passage, and after being purified by the first gas purification device, enters the exhaust gas forward feed passage via the exhaust passage of the first gas purification device. This route through which the exhaust gas flows is the target gas purification passage.

[0058] Furthermore, when the target special gas is a strongly acidic corrosive special gas, the first gas purification device for strongly acidic corrosive special gas purifies the strongly acidic corrosive special gas in the waste gas by a water washing method.

[0059] When the target special gas is a flammable special gas, the second gas purification device corresponding to the flammable special gas purifies the flammable special gas in the waste gas by a high-temperature purification method.

[0060] If the target special gas is a toxic special gas, the third gas purification device for toxic special gas purifies the toxic special gas in the waste gas by adsorption with an adsorbent.

[0061] When the target special gas is a special gas containing a large amount of dust, the fourth gas purifying device for the special gas containing a large amount of dust purifies the special gas containing a large amount of dust in the waste gas by electrostatic adsorption.

[0062] When the target special gas is hydrogen gas, the fifth gas purifying device corresponding to hydrogen gas purifies the hydrogen gas in the waste gas by the method of hydrogen-oxygen reaction.

[0063] After the waste gas is subjected to a purification treatment, the waste gas is sent to an exhaust port via a waste gas forward passage and discharged to the atmosphere.

[0064] In one example, prior to the exhaust gas purification process, it is necessary to purge the remaining gas in the passages. In this case, the control device controls the pressure regulating valve and the flow meter to adjust the flow rate and flow velocity of the purge gas entering the exhaust gas forward passage, the intake passage and the exhaust passage corresponding to each gas purification device via the purge gas feed passage, thereby removing the remaining gas in the passages. The purge gas may be nitrogen gas, and no purification process is required for the nitrogen gas.

[0065] 3, which is a schematic block diagram of an electronic device according to an embodiment of the present application. As shown in FIG. 3, the electronic device 300 includes a processor 310, a memory 320, and a bus 330.

[0066] The memory 320 stores machine-readable instructions executable by the processor 310. When the electronic device 300 is running, the processor 310 and the memory 320 communicate with each other via a bus 330. When the machine-readable instructions are executed by the processor 310, each step of the waste gas separation and treatment method in the method embodiment shown in Figure 2 is performed. For specific implementation manners, please refer to the method embodiments, and therefore, description thereof will be omitted here.

[0067] An embodiment of the present application further provides a computer-readable storage medium, which stores a computer program, and when the computer program is executed by a processor, performs the steps of the waste gas fractionation method in the embodiment of the method shown in Figure 2. Specific implementation methods can be referred to the embodiment of the method, and will not be described here.

[0068] For ease and simplicity, the specific working processes of the above-described systems, devices and units will not be described here, as those skilled in the art can refer to the corresponding processes in the above method embodiments.

[0069] The systems, devices, and methods described in the embodiments of this application may be realized in other ways. The device embodiments described above are merely illustrative. For example, the division of the units described above is merely a logical functional division, and may be otherwise realized in actual practice. For example, multiple units or components may be combined or integrated into another system, or some features may be omitted or not implemented. Furthermore, the shown or discussed couplings or direct couplings or communication connections may be indirect couplings or communication connections via several interfaces, devices, or units, and may be electrical, mechanical, or other types of connections.

[0070] The units described above as separate components may or may not be physically separate. The components shown as units may or may not be physical units, i.e., they may be located in the same location or distributed across multiple network units. Some or all of the units can be selected according to actual requirements to achieve the purpose of the proposed embodiment.

[0071] Furthermore, each functional unit in each embodiment of the present application may be integrated into a single processing unit, may function as an independent physical entity, or two or more units may be integrated into a single unit.

[0072] The functions may be realized in the form of software functional units and stored in a non-volatile computer-readable storage medium executable by a processor when sold or used as an independent product. Based on this understanding, the technical solution of the present application itself, or a portion of the technical solution that contributes to the prior art, may be realized in the form of a software product. The computer software product is stored in a storage medium and includes a plurality of instructions for executing all or part of the steps of the above-described methods in each embodiment of the present application on a computer device (such as a personal computer, a server, or a network device). The storage medium includes various media capable of storing program code, such as a USB disk, a portable hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk, or an optical disk.

[0073] It should be noted that the above examples are merely specific embodiments for explaining the technical solutions of the present application and are not intended to limit the present application, and therefore the scope of protection of the present application is not limited thereto. Although the above examples have been used to describe the present disclosure in detail, it goes without saying that those skilled in the art may make improvements or modifications to the technical solutions described in the above examples, or may make equivalent substitutions for some of the technical features therein, within the technical scope of the present application. Such improvements, modifications, or substitutions do not deviate from the essence of the technical solutions from the spirit and scope of the technical solutions of the examples of the present application, and all fall within the scope of protection of the present application. Therefore, the scope of protection of the present application is dictated by the claims.

Claims

1. A waste gas fractionation treatment method, comprising: Used in the control device of waste gas separation treatment system, The waste gas fractionation treatment system includes an inlet gas analyzer, a waste gas forward passage, and a plurality of gas purification subsystems, each gas purification subsystem including a gas purification device and a two-way valve, and each gas purification device is configured to purify one special gas in the waste gas; and the waste gas fractionation treatment method includes: determining at least one target special gas to be purified at the current time based on the detection results of various special gases detected by the inlet gas analyzer at the current time; determining a target two-way valve corresponding to the target special gas based on a correspondence relationship between the gas purification device and the two-way valve; and controlling the opening and closing of the target two-way valve to sequentially send the waste gas into different target gas purification devices, and sequentially purify various target special gases at the current time according to the positional relationship between the different target gas purification devices. A method for separating and treating waste gas.

2. Each gas purification device is connected to the exhaust gas forward feed passage by a respective intake passage and exhaust passage, and the target two-way valve includes a target forward feed passage two-way valve and a target intake passage two-way valve, the target forward feed passage two-way valve is installed in the exhaust gas forward feed passage between the intake passage and the exhaust passage of the target gas purification device, and the target intake passage two-way valve is installed in the intake passage of the target gas purification device, and by controlling the opening and closing of the target two-way valve, the exhaust gas is sequentially sent into different target gas purification devices. The method includes closing the target forward feed passage two-way valve and opening the target intake passage two-way valve to change the exhaust gas feed passage from the exhaust gas forward feed passage to a target gas purification passage, wherein the target gas purification passage is constituted by an intake passage corresponding to the target special gas, an exhaust passage, and the target gas purification device.

2. The method for separating and treating waste gas according to claim 1.

3. After determining at least one target special gas waiting to be purified at the current time, determining whether the target special gas at the current time is exactly the same as the target special gas at the previous time; If the target special gases are not completely the same, the target forward feed passage two-way valve corresponding to the different target special gas at the previous time is opened, and the target intake passage two-way valve corresponding to the different target special gas is closed.

3. The method for separating and treating waste gas according to claim 2.

4. The step of determining at least one target special gas to be purified based on the detection results of various special gases detected by the inlet gas analyzer at the current time includes: and a step of designating a special gas that does not meet the gas emission standards in the detection result as a target special gas waiting to be purified.

2. The method for separating and treating waste gas according to claim 1.

5. Further, the step of placing other gas purification devices other than the target gas purification device in an inactive mode to save energy is included.

2. The method for separating and treating waste gas according to claim 1.

6. The waste gas fractional treatment system further includes a gas source for generating purge gas, a pressure regulating valve, and a flow meter, which are installed in a purge gas feed passage, and the purge gas feed passage is connected to the waste gas forward feed passage, and an intake passage and an exhaust passage corresponding to each gas purification device, and the waste gas fractional treatment method includes: The method further includes a step of adjusting the flow rate and flow velocity of the purge gas that enters the exhaust gas forward feed passage, the intake passage and the exhaust passage corresponding to each gas purification device via the purge gas feed passage by controlling the pressure regulating valve and the flow meter.

2. The method for separating and treating waste gas according to claim 1.

7. The target special gas includes at least one of a strongly acidic corrosive special gas, a flammable special gas, a toxic special gas, a special gas containing a large amount of dust, and hydrogen gas; The gas purification device for the strong acidic corrosive special gas purifies the strong acidic corrosive special gas in the waste gas by a water washing method, The gas purification device for the special flammable gas purifies the special flammable gas in the waste gas by a high-temperature purification method; The gas purification device for the toxic special gas purifies the toxic special gas in the waste gas by adsorption using an adsorbent, The gas purifying device for the special gas containing a large amount of dust purifies the special gas containing a large amount of dust in the waste gas by using an electrostatic adsorption method, The hydrogen gas purification device purifies the hydrogen gas in the waste gas by hydrogen-oxygen reaction method.

2. The method for separating and treating waste gas according to claim 1.

8. 1. A waste gas separation and treatment system, comprising: a control device, an inlet gas analyzer, a waste gas forward passage, and a plurality of gas purification subsystems, each gas purification subsystem including a gas purification device and a two-way valve; The control device is configured to carry out the waste gas separation treatment method according to any one of claims 1 to 7, the inlet gas analyzer is configured to detect the waste gas at the inlet of the waste gas fractionation treatment system, obtain detection results for various special gases, and transmit the detection results to the control device; the waste gas forward passage is configured to route the waste gas into each gas purification device; each of the plurality of gas purification devices is configured to purify a corresponding specialty gas; The two-way valve corresponding to each gas purification device is configured to change the passage for sending the waste gas to the target gas purification device for purification treatment. A waste gas separation and treatment system.

9. An electronic device, The electronic device includes a processor, a storage medium, and a bus, and machine-readable instructions executable by the processor are stored in the storage medium. When the electronic device works, the processor and the storage medium communicate with each other via the bus, and when the processor executes the machine-readable instructions, each step of the waste gas separation treatment method according to any one of claims 1 to 7 is performed. An electronic device characterized by:

10. A computer-readable storage medium, comprising: A computer program is stored in the computer-readable storage medium, and when the computer program is executed by a processor, each step of the waste gas separation treatment method according to any one of claims 1 to 7 is performed. A computer-readable storage medium comprising:

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