Vibrating pieces, vibrating devices, and oscillators

Abstract

To provide vibrating pieces, vibrating devices, and oscillators with excellent vibration characteristics. [Solution] The vibrating piece 1 comprises a substrate 2 made of an SC-cut quartz plate, a first excitation electrode 3a arranged on the first surface, and a first connecting electrode 4a electrically connected to the first excitation electrode 3a and provided at one end of the substrate in the X' axis direction. The first excitation electrode 3a has chamfered portions at the four corners of the rectangle, and when the width in the Z' axis direction of the chamfered portion located on the +Z' side of the first short side is e1, the width in the Z' axis direction of the chamfered portion located on the -Z' side of the first short side is e2, the width in the Z' axis direction of the chamfered portion located on the -Z' side of the second short side is e3, and the width in the Z' axis direction of the chamfered portion located on the +Z' side of the second short side is e4, then e1, e2, e3, and e4 satisfy the following equations (1) to (4). e2 <e1…(1)、e4<e3…(2)、 e2

Description

Technical Field

[0001] The present invention relates to a vibrating piece, a vibration device, and an oscillator.

Background Art

[0002] For example, Patent Document 1 discloses a crystal vibrating piece capable of suppressing unnecessary vibration, improving sensitivity, or comprehensively suppressing multiple types of unnecessary vibration. This crystal vibrating piece is composed of a crystal substrate, and electrodes such as excitation electrodes are formed on the crystal substrate. At least one of the edges constituting at least one of the excitation electrode and the peripheral portion of the crystal substrate is formed in an arc shape at least partially.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, the vibrating piece described in Patent Document 1 uses an AT-cut crystal substrate, and a method for suppressing unnecessary vibration in an SC-cut crystal substrate has not been considered.

Means for Solving the Problems

[0005] The vibrating piece according to an application example of the present invention comprises a substrate made of an SC-cut quartz plate having a first surface perpendicular to the Y'' axis of a new orthogonal coordinate system (X',Y'',Z') obtained by rotating a predetermined angle around the Z axis of an orthogonal coordinate system (X',Y'',Z) by the rotation of a predetermined angle around the X'' axis of the new orthogonal coordinate system (X',Y'',Z) obtained by this rotation, and a second surface that is in a front-back relationship with the first surface; a first excitation electrode disposed on the first surface; and a first connecting electrode electrically connected to the first excitation electrode and provided at one end of the substrate in the X' axis direction, wherein the first excitation electrode has, in a plan view, a first short side intersecting the X' axis, and the same as the The first excitation electrode is a rectangle having a second short side located on the +X' side of the first short side, and a pair of long sides intersecting the Z' axis, and the first excitation electrode has chamfered portions at the four corners of the rectangle, where e1 is the width in the Z' axis direction of the chamfered portion located on the +Z' side of the first short side, e2 is the width in the Z' axis direction of the chamfered portion located on the -Z' side of the first short side, e3 is the width in the Z' axis direction of the chamfered portion located on the -Z' side of the second short side, and e4 is the width in the Z' axis direction of the chamfered portion located on the +Z' side of the second short side, and e1, e2, e3, and e4 satisfy the following equations (1) to (4). e2 <e1…(1) e4 <e3…(2) e2 <e3…(3) e4 <e1…(4)

[0006] The vibrating piece according to an application example of the present invention comprises a substrate made of an SC-cut quartz plate having a first surface perpendicular to the Y'' axis of a new orthogonal coordinate system (X',Y'',Z') obtained by rotating a predetermined angle around the Z axis of an orthogonal coordinate system (X',Y'',Z) by the rotation of a predetermined angle around the X'' axis of the new orthogonal coordinate system (X',Y'',Z) obtained by this rotation, and a second surface that is in a front-back relationship with the first surface; a first excitation electrode disposed on the first surface; and a first connecting electrode electrically connected to the first excitation electrode and provided at one end of the substrate in the Z' axis direction, wherein the first excitation electrode has, in a plan view, a fourth short side intersecting the Z' axis, and the fourth The first excitation electrode is a rectangle having a fifth short side located on the -Z' side of the short side, and a pair of long sides intersecting the X' axis, and the first excitation electrode has chamfered portions at the four corners of the rectangle, and when e5 is the width in the X' axis direction of the chamfered portion located on the -X' side of the fourth short side, e6 is the width in the X' axis direction of the chamfered portion located on the -X' side of the fifth short side, e7 is the width in the X' axis direction of the chamfered portion located on the +X' side of the fifth short side, and e8 is the width in the X' axis direction of the chamfered portion located on the +X' side of the fourth short side, e5, e6, e7, and e8 satisfy the following equations (13) to (16). e6 <e5…(13) e8 <e7…(14) e6 <e7…(15) e8 <e5…(16)

[0007] The vibrating piece according to an application example of the present invention comprises a substrate made of an SC-cut quartz plate having a first surface perpendicular to the Y'' axis of a new Cartesian coordinate system (X',Y'',Z') obtained by rotating a predetermined angle around the Z axis of a Cartesian coordinate system (X',Y'',Z) by the rotation of a predetermined angle around the X'' axis of the new Cartesian coordinate system (X',Y'',Z) obtained by this rotation, and a second surface that is in a front-back relationship with the first surface; and a first excitation electrode disposed on the first surface and integrally formed thereon, wherein the substrate is a rectangle having a pair of sides parallel to the X' axis and a pair of sides parallel to the Z' axis, and in a plan view, a virtual line parallel to the X' axis that divides the first excitation electrode in the Z' direction is defined as the first virtual line, and the first excitation electrode is parallel to the Z' axis in the X' direction The virtual line dividing the region into two is designated as the second virtual line, the region of the first excitation electrode located +Z' to the first virtual line and -X' to the second virtual line is designated as the first region, the region of the first excitation electrode located -Z' to the first virtual line and -X' to the second virtual line is designated as the second region, the region of the first excitation electrode located -Z' to the first virtual line and +X' to the second virtual line is designated as the third region, and the region of the first excitation electrode located +Z' to the first virtual line and +X' to the second virtual line is designated as the fourth region, wherein the areas of the first region and the third region are smaller than the area of ​​the second region and smaller than the area of ​​the fourth region, respectively.

[0008] A vibration device according to an application example of the present invention comprises a vibrating piece and a base that supports the vibrating piece by being joined to the first connecting electrode.

[0009] An oscillator according to an application example of the present invention comprises the vibrating element, an oscillation circuit electrically connected to the first excitation electrode, and a base in which the vibrating element and the oscillation circuit are housed. [Brief explanation of the drawing]

[0010] [Figure 1] This is a schematic diagram showing the configuration of the vibration device according to the first embodiment. [Figure 2] This is a schematic cross-sectional view of the line A1-A1 in Figure 1. [Figure 3A]This is a diagram for explaining the cutting angle of the substrate. [Figure 3B] This is a diagram for explaining the cutting angle of the substrate. [Figure 4] This is a plan view showing the configuration of the vibrating piece according to the first embodiment. [Figure 5] This is a plan view showing the configuration of the vibrating piece according to the first embodiment. [Figure 6] This is a plan view showing the configuration of the vibrating piece according to the first modification of the first embodiment. [Figure 7] This is a plan view showing the configuration of the vibration device according to the second modification of the first embodiment. [Figure 8] This is a plan view showing the configuration of the vibrating piece according to the second embodiment. [Figure 9] This is a plan view showing the configuration of the vibrating piece according to the modification of the second embodiment. [Figure 10] This is a schematic plan view showing the configuration of the oscillator according to the third embodiment. [Figure 11] This is a schematic cross-sectional view taken along line A2 - A2 in FIG. 10.

Embodiments for Carrying Out the Invention

[0011] Hereinafter, embodiments according to the present invention will be described with reference to the drawings. In each of the following figures, for the purpose of making each layer and each member recognizable, the scales of each layer and each member are made different from the actual ones.

[0012] For the sake of convenience of explanation, in FIGS. 1, 2, 7, 10, and 11, the x-axis, the y-axis, and the z-axis are shown as three mutually orthogonal axes. Also, the direction along the x-axis is referred to as the "x-axis direction", the direction along the y-axis is referred to as the "y-axis direction", and the direction along the z-axis is referred to as the "z-axis direction". Also, the tip side of the arrow in each axis direction is also referred to as the "+ side", and the base end side is also referred to as the "- side". Also, the plane parallel to the x-axis and the y-axis is also referred to as the "xy plane". Also, the plan view when viewed from the +z direction is simply referred to as the "plan view".

[0013] For convenience of explanation, in FIGS. 3B, 4 to 6, 8, and 9, the X'-axis, Y''-axis, and Z'-axis are shown as three axes orthogonal to each other, and the tip side of the illustrated arrow is defined as the "+ side" and the base side as the "- side". In the following description, the direction parallel to the X'-axis is referred to as the "X'-axis direction", the direction parallel to the Y''-axis is referred to as the "Y''-axis direction", and the direction parallel to the Z'-axis is referred to as the "Z'-axis direction". Further, for convenience of explanation, in a plan view when viewed from the Y''-axis direction, the surface in the Y''-axis direction is described as the main surface. Also, the X'-axis corresponds to the x-axis, and the +X' direction is the -x direction. The Z'-axis corresponds to the y-axis, and the +Z' direction is the +y direction. The Y''-axis corresponds to the z-axis, and the +Y'' direction is the +z direction. Therefore, the plan view when viewed from the +Y'' direction is also simply referred to as the "plan view".

[0014] <First Embodiment> The vibration device 100 according to the first embodiment of the present invention will be described with reference to FIGS. 1 and 2. FIG. 1 is a schematic diagram showing the configuration of the vibration device 100 according to the first embodiment. FIG. 2 is a schematic cross-sectional view taken along line A1 - A1 in FIG. 1. Note that FIG. 1 shows the state where the lid body 90 is removed.

[0015] The vibration device 100 is a surface-mount component in which the vibration piece 1 is packaged. The vibration device 100 includes a base 80, a vibration piece 1, and a lid body 90. The base 80 is a flat plate-like member that supports the vibration piece 1, and the lid body 90 is a box-like member in which a recess 91 is formed. The package 70 is formed by joining the base 80 and the lid body 90. The vibration piece 1 is housed in the internal space S of the package 70.

[0016] The base 80 has two faces 81 and 82 that are in a front-back relationship in the z-axis direction and are parallel to the xy-plane. The base 80 is approximately rectangular in plan view. The base 80 has two external terminals 83 on the -z side face 81. The base 80 has a first electrode pad 84 electrically connected to one external terminal 83 and a second electrode pad 85 electrically connected to the other external terminal 83 on the +z side face 82. The first electrode pad 84 and the second electrode pad 85 are aligned along the y-axis direction. The constituent material of the base 80 is silicon, but is not particularly limited and may be glass or ceramic, for example.

[0017] The lid 90 is box-shaped, with a substantially rectangular shape in plan view and a recess 91 opening in the -z direction. The opening 92 of the recess 91 of the lid 90 is joined to the base 80 via a joining member 93, and the recess 91 together with the base 80 partitions the internal space S that houses the vibrating piece 1. The joining of the lid 90 and the base 80 may be direct joining without using the joining member 93. Furthermore, the internal space S is under reduced pressure, preferably closer to a vacuum. This reduces viscous resistance and improves the oscillation characteristics of the vibrating piece 1. The constituent material of the lid 90 is silicon, but is not particularly limited, and may be, for example, glass or ceramic.

[0018] The vibrating element 1 comprises a substrate 2, a pair of excitation electrodes 3, and a pair of connecting electrodes 4.

[0019] The substrate 2 is a plate-like structure formed from quartz, parallel to the xy plane, and is an SC-cut quartz plate, as described later. In Figure 1, the substrate 2 is a rectangle having a pair of long sides LS1 and LS2 and a pair of short sides SS1 and SS2. The long sides LS1 and LS2 are aligned along the x-axis, and the short sides SS1 and SS2 are aligned along the y-axis. The substrate 2 has a first surface 12 and a second surface 13 that are in a front-back relationship in the z-axis direction. The first surface 12 is the -z side and faces the base 80. The second surface 13 is the +z side and faces the lid 90.

[0020] The pair of excitation electrodes 3 includes a first excitation electrode 3a positioned on the first surface 12 and a second excitation electrode 3b positioned on the second surface 13. In plan view, the excitation electrode 3 is a rectangle having a pair of long sides LE1, LE2 and a pair of short sides SE1, SE2. The long sides LE1, LE2 are aligned along the x-axis, and the short sides SE1, SE2 are aligned along the y-axis. In plan view, the first excitation electrode 3a and the second excitation electrode 3b overlap each other.

[0021] The pair of connecting electrodes 4 includes a first connecting electrode 4a electrically connected to the first excitation electrode 3a, and a second connecting electrode 4b electrically connected to the second excitation electrode 3b. The first connecting electrode 4a and the second connecting electrode 4b are arranged on the first surface 12 of the substrate 2 and are aligned in the y-axis direction along the short side SS2 on the -x side. That is, in a plan view, the first connecting electrode 4a and the second connecting electrode 4b are positioned between the short side SS2 and the excitation electrode 3. The substrate 2 has lead wirings 14 and 15, and the first connecting electrode 4a is electrically connected to the first excitation electrode 3a by lead wiring 14, and the second connecting electrode 4b is electrically connected to the second excitation electrode 3b by lead wiring 15.

[0022] The first connecting electrode 4a and the second connecting electrode 4b are joined to the first electrode pad 84 and the second electrode pad 85 by a conductive bonding member 16. This supports the vibrating piece 1 on the base 80. In other words, the portion of the substrate 2 where the first connecting electrode 4a and the second connecting electrode 4b are located is the support portion. The pair of excitation electrodes 3 generate vibration in the vibrating piece 1 by applying a voltage supplied from an external terminal 83 to the substrate 2. The material of the bonding member 16 is not particularly limited and may be Ag paste or Au bump.

[0023] Here, the crystal axes of the substrate 2 will be explained using Figures 3A, 3B, and 4. Figures 3A and 3B illustrate the cutting angles of the substrate 2. Figure 4 is a plan view showing the configuration of the vibrating piece 1 according to the first embodiment. The quartz material of the substrate 2 has mutually orthogonal crystal axes X, Y, and Z, as shown in Figure 3A. The X axis is called the electrical axis, the Y axis the mechanical axis, and the Z axis the optical axis. Note that the X, Y, and Z axes are different from the x, y, and z axes in Figures 1, 2, 7, 10, and 11. The axes obtained by rotating the X and Y axes counterclockwise by a predetermined angle of approximately 22° around the Z axis are the X' and Y' axes. As shown in Figure 3B, the axes obtained by rotating the Y' and Z axes counterclockwise by a predetermined angle of approximately 34° around the X' axis are the Y'' and Z' axes. The substrate 2 is cut along the X'Z' plane, which is parallel to the X' and Z' axes. The cut substrate 2 has a plane perpendicular to the Y'' axis. In this way, an SC-cut quartz plate is obtained. Note that the SC-cut quartz plate is a so-called double-rotated Y-cut quartz plate.

[0024] Substrate 2 has orthogonal crystal axes X', Y'', and Z', with the thickness direction being the Y'' axis direction. In substrate 2, the plane that is orthogonal to the Y'' axis and includes the X' and Z' axes is the main plane. In substrate 2, thickness-sliding vibrations are excited as the main vibration on the main plane, and it has excellent stress sensitivity characteristics and thermal shock resistance characteristics.

[0025] In Figure 4, the long sides LS1 and LS2 of the substrate 2 are aligned along the X' axis, and the short sides SS1 and SS2 are aligned along the Z' axis. That is, the substrate 2 has a pair of short sides SS1 and SS2 that intersect with respect to the X' axis, and a pair of long sides LS1 and LS2 that intersect with respect to the Z' axis. The first surface 12 of the substrate 2 is the -Y'' side, and the second surface 13 is the +Y'' side.

[0026] In Figure 4, the long sides LE1 and LE2 of the excitation electrode 3 are aligned along the X' axis, while the short sides SE1 and SE2 are aligned along the Z' axis. That is, short side SE1 intersects the X' axis, and short side SE2 intersects the X' axis and is located on the +X' side of short side SE1. Short side SE1 corresponds to the first short side, and short side SE2 corresponds to the second short side. In addition, the pair of long sides LE1 and LE2 intersect the Z' axis.

[0027] The connecting electrode 4 is provided at one end of the substrate 2 in the X' axis direction, and in this embodiment, it is provided at the +X' side end.

[0028] The manufacturing method for the excitation electrode 3 and the connecting electrode 4 will now be described. First, a film of chromium (Cr) or the like is deposited on the main surface of the substrate 2, and then gold (Au) or the like is laminated on top of the chromium (Cr). These chromium (Cr) and gold (Au) electrode films are formed into the desired shape by methods such as vacuum deposition or sputtering using a metal mask, or by metal etching using photolithography after the film has been deposited on the entire main surface of the substrate 2. Note that the electrode film formation material to improve the adhesion between the substrate 2 and the gold (Au) electrode film is not limited to chromium (Cr), but may also be nickel-chromium (NiCr) alloy or nickel (Ni). Furthermore, the electrode film formation material necessary to obtain stable vibration characteristics and long-term stability is not limited to gold (Au), but may also be platinum (Pt) or silver (Ag).

[0029] The shape of the excitation electrode 3 will be explained again using Figure 4. The first excitation electrode 3a and the second excitation electrode 3b are each integrally formed and not divided. In plan view, the excitation electrode 3 has chamfered portions at the four corners of the rectangle. The shape of the chamfered portion is R-shaped, that is, arc-shaped. In plan view, of the four corners, the corner located on the -X' side and the +Z' side is the first electrode corner 17. The remaining corners, in plan view, clockwise from the first electrode corner 17, are the second electrode corner 18, the third electrode corner 19, and the fourth electrode corner 20. The first electrode corner 17 and the third electrode corner 19 each have a larger R, that is, a larger chamfer, than the second electrode corner 18. Also, the first electrode corner 17 and the third electrode corner 19 each have a larger R, that is, a larger chamfer, than the fourth electrode corner 20.

[0030] Let V1 be a first imaginary line parallel to the X' axis and bisecting the width of the excitation electrode 3 in the Z' axis direction, and let V2 be a second imaginary line parallel to the Z' axis and bisecting the width of the excitation electrode 3 in the X' axis direction. Assume that the excitation electrode 3 is divided into four regions by the two imaginary lines V1 and V2. Of the four regions, the region located on the -X' side and the +Z' side is the first region S1. The remaining regions, viewed from a plan view, are the second region S2, the third region S3, and the fourth region S4, clockwise from the first region S1. Due to the difference in the size of R, i.e., the difference in the size of the chamfer, the areas of the first region S1 and the third region S3 are smaller than the area of ​​the second region S2 and smaller than the area of ​​the fourth region S4.

[0031] Let us explain this in more detail using Figure 5. Figure 5 is a plan view showing the configuration of the vibrating piece 1 according to the first embodiment. When the long sides LE1, LE2 and the short sides SE1, SE2 are virtually extended, the four intersection points where they intersect are defined as intersection points P1 to P4. The intersection of the first electrode corner 17 is P1, the intersection of the second electrode corner 18 is P2, the intersection of the third electrode corner 19 is P3, and the intersection of the fourth electrode corner 20 is P4.

[0032] The distance from intersection points P1 to P4 to the straight sections of short side SE1 and short side SE2, i.e., the width of the chamfer at each corner, is e1 at the first electrode corner 17, e2 at the second electrode corner 18, e3 at the third electrode corner 19, and e4 at the fourth electrode corner 20. That is, width e1 is the width in the Z' axis direction of the chamfer located on the +Z' side of the first short side. Width e2 is the width in the Z' axis direction of the chamfer located on the -Z' side of the first short side. Width e3 is the width in the Z' axis direction of the chamfer located on the -Z' side of the second short side. Width e4 is the width in the Z' axis direction of the chamfer located on the +Z' side of the second short side.

[0033] In this case, the ranges e1 to e4 satisfy all of the following equations (1) to (4). e2 <e1…(1) e4 <e3…(2) e2 <e3…(3) e4 <e1…(4)

[0034] In this way, the shape of the excitation electrode 3 can be made suitable for the position of the main vibration. Furthermore, by not placing the excitation electrode 3 in regions that do not contribute to excitation, the coupling of unwanted higher-order mode vibrations caused by the plate thickness with the main vibration at the excitation electrode 3 is suppressed. Thus, in the substrate 2 formed from an SC-cut quartz plate, the vibration characteristics of the vibrating piece 1 can be improved by suppressing the coupling of unwanted secondary vibrations with the main vibration while maintaining the size of the excitation electrode 3 area.

[0035] The widths e1 and e3 should preferably be less than half the width of the excitation electrode 3 in the Z' axis direction. This suppresses the increase in equivalent series resistance in the vibrating piece 1 and stabilizes the oscillation of the main vibration.

[0036] Next, the corners of substrate 2 will be explained using Figure 5. Substrate 2 has chamfered edges on its four rectangular corners. The shape of the chamfered edges is R-shaped, or arc-shaped. Of the four corners, the corner on the -X' and +Z' sides is the first substrate corner 8. The remaining corners, in a plan view, are, clockwise from the first substrate corner 8, the second substrate corner 9, the third substrate corner 10, and the fourth substrate corner 11. In a plan view, the first substrate corner 8 and the second substrate corner 9 are located on the opposite side of the excitation electrode 3 from the first connecting electrode 4a and the second connecting electrode 4b. In a plan view, the third substrate corner 10 and the fourth substrate corner 11 are located on the same side of the excitation electrode 3 as the first connecting electrode 4a and the second connecting electrode 4b. The first substrate corner 8 and the second substrate corner 9 have a larger radius (R) than the third substrate corner 10 and the fourth substrate corner 11, meaning they have a larger chamfer.

[0037] In this embodiment, the chamfering of the substrate 2 refers to the process of forming the R-shape of the four corners simultaneously with the four sides of the rectangle when the substrate 2 is etched out from the quartz plate that serves as the material. However, the method for forming the four sides of the rectangle and the four corners is not limited to this, and processes such as polishing or grinding may also be used.

[0038] Substrate 2 has chamfered edges on both ends of the short side SS1 on the -X' side. Short side SS1 corresponds to the third short side. When the long sides LS1, LS2 and short side SS1 are virtually extended, the two intersection points where they intersect are defined as intersection points P5 and P6. The intersection of the first substrate corner 8 is P5, and the intersection of the second substrate corner 9 is P6.

[0039] The distance from intersection P5 to the straight section of the short side SS1, i.e., the width of the chamfer at the first substrate corner 8, is r1. The distance from intersection P6 to the straight section of the short side SS1, i.e., the width of the chamfer at the second substrate corner 9, is r2. In other words, width r1 is the width in the Z' axis direction of the chamfer located on the +Z' side of the third short side. Width r2 is the width in the Z' axis direction of the chamfer located on the -Z' side of the third short side.

[0040] At this time, the widths r1 and r2 in the substrate 2 and the widths e2 and e4 in the excitation electrode 3 satisfy all of the following equations (5) to (8). e2 <r1…(5) e4 <r2…(6) e2 <r2…(7) e4 <r1…(8)

[0041] By doing so, unwanted vibrations caused by the corners of the substrate 2 can be suppressed, thereby further improving the vibration characteristics of the vibrating piece 1.

[0042] Although the third short side was described as the short side SS1 on the -X' side, it is not limited to this. The third short side can be any short side located on the opposite side of the excitation electrode 3 from the first connecting electrode 4a and the second connecting electrode 4b. That is, if the first connecting electrode 4a and the second connecting electrode 4b are located on the -X' side of the excitation electrode 3, the third short side can be the short side SS2 on the +X' side.

[0043] Although the first connecting electrode 4a and the second connecting electrode 4b were described as being positioned between the short side SS2 and the excitation electrode 3 in a plan view in Figure 1, the invention is not limited to this arrangement. For example, the first connecting electrode 4a and the second connecting electrode 4b may be positioned between the short side SS1 and the excitation electrode 3.

[0044] Although it has been explained that the base 80 is a flat plate-shaped member and the lid 90 is a box-shaped member with a recess 91, the design is not limited to this. For example, the base 80 may be a box-shaped member with a recess, and the lid 90 may be a flat plate-shaped member. Alternatively, the base 80 may be a box-shaped member made of ceramic, and the lid 90 may be a flat plate-shaped member made of metal.

[0045] The shape of the excitation electrode 3 is not limited to a rectangle, but may be any shape such as a square, ellipse, circle, or rhombus.

[0046] The R-shape of the chamfered portion of the excitation electrode 3 and the chamfered portion of the substrate 2 is not limited to a circular arc with a constant radius R. For example, the radius R may change within the chamfered portion, and it is sufficient that it includes a convex curve in a plan view.

[0047] Although the chamfered portion of the excitation electrode 3 and the chamfered portion of the substrate 2 have been described as having an R shape, the shape is not particularly limited to this. For example, it may have a shape with straight sections intersecting the X' and Z' axes, i.e., a C-shaped surface, or a shape with both curved and straight sections.

[0048] The chamfered portion of the excitation electrode 3 may have different shapes at each corner. For example, the first electrode corner 17 and the third electrode corner 19 may have an R shape, while the second electrode corner 18 and the fourth electrode corner 20 may have a C shape.

[0049] The shape of the substrate 2 is not limited to a rectangle; for example, it may be square.

[0050] The chamfered portion of substrate 2 may have different shapes at each corner. For example, the first substrate corner 8 and the third substrate corner 10 may have an R shape, while the second substrate corner 9 and the fourth substrate corner 11 may have a C shape.

[0051] In a plan view, the shapes of the first excitation electrode 3a and the second excitation electrode 3b are not necessarily identical. For example, at the corners of the first excitation electrode 3a and the second excitation electrode 3b that overlap in a plan view, one may be rounded (R-shaped) and the other may be chamfered (C-shaped). Alternatively, both may be rounded (R-shaped), but with different radius sizes.

[0052] As described above, in this embodiment, the chamfered portion of the excitation electrode 3 and the chamfered portion of the substrate 2 have a shape with straight sections intersecting the X' and Z' axes in a plan view, or an arc shape. This allows the chamfer shape to be selected according to the size of the vibrating piece 1, the position of the chamfered portion, or the manufacturing method. In other words, it is possible to provide a vibrating piece 1 that offers increased design flexibility and reduced manufacturing costs.

[0053] In Figure 1, the first connecting electrode 4a and the second connecting electrode 4b are described as being aligned in the y-axis direction along the short side SS2 on the -x side, but this is not limited to this arrangement. The first connecting electrode 4a and the second connecting electrode 4b may also be aligned in the y-axis direction along the short side SS1 on the +x side. In either case, the vibrating piece 1 is fixed to the base 80 with two-point support. This allows the fixed state to be stabilized over the long term while suppressing the effects of support stress. Therefore, a highly reliable vibrating piece 1 can be provided.

[0054] Although the substrate 2 has been described as being flat, its shape in the thickness direction is not particularly limited to this. For example, the position where the excitation electrode 3 is provided may be a forward mesa or an inverted mesa. Alternatively, it may be convex or beveled. Furthermore, in these cases, one surface may be flat and the other surface may be concave or convex.

[0055] As described above, the vibration device 100 in this embodiment comprises a vibrating piece 1 and a base 80 that supports the vibrating piece 1 by joining it with a first connecting electrode 4a. In this way, it is possible to suppress the coupling of unwanted secondary vibrations in the vibrating piece 1 with the main vibration, and to provide a vibration device 100 with excellent vibration characteristics.

[0056] <Modification 1 of the first embodiment> A modification 1 of the first embodiment will be described with reference to Figure 6. Figure 6 is a plan view showing the configuration of the vibrating piece 1a according to modification 1 of the first embodiment. In Figure 6, components similar to those in the previously described embodiment are denoted by the same reference numerals. The explanation will focus on the differences from the first embodiment, and similar items will be omitted from the explanation.

[0057] The substrate 2 is provided with a slit T between the excitation electrode 3 and the first connecting electrode 4a and the second connecting electrode 4b. The slit T penetrates from the first surface 12 to the second surface 13 in the Y'' axis direction of the vibrating piece 1a. In plan view, the slit T includes a first portion T1 extending along the Z' axis direction, a second portion T2 connected to the +Z' end of the first portion T1 and extending in the -X' direction, and a third portion T3 connected to the -Z' end of the first portion T1 and extending in the -X' direction. The first portion T1 is located between the first connecting electrode 4a and the second connecting electrode 4b and the excitation electrode 3. The second portion T2 is located on the +Z' side of the excitation electrode 3. The third portion T3 is located on the -Z' side of the excitation electrode 3.

[0058] The edge of the substrate 2 that defines a portion of the first portion T1 on the side of the excitation electrode 3 is edge 41. The edge of the substrate 2 that defines a portion of the second portion T2 on the side of the excitation electrode 3 is edge 42. The edge of the substrate 2 that defines a portion of the third portion T3 on the side of the excitation electrode 3 is edge 43.

[0059] The corner of the substrate 2 that demarcates a portion of the slit T on the -X' side of the first portion T1 and the +Z' side of the third portion T3 is the fifth substrate corner 26. The corner of the substrate 2 that demarcates a portion of the slit T on the -X' side of the first portion T1 and the -Z' side of the second portion T2 is the sixth substrate corner 27.

[0060] Specifically, the fifth substrate corner 26 is the corner where imaginary lines extending sides 41 and 43 intersect, and the sixth substrate corner 27 is the corner where imaginary lines extending sides 41 and 42 intersect. The fifth substrate corner 26 and the sixth substrate corner 27 are chamfered and have an R shape. The chamfered portion of the fifth substrate corner 26 corresponds to the first chamfered portion, and the chamfered portion of the sixth substrate corner 27 corresponds to the second chamfered portion. The chamfers of the fifth substrate corner 26 and the sixth substrate corner 27 are larger than the chamfers of the second electrode corner 18 and the fourth electrode corner 20.

[0061] Let's explain this in more detail. When sides 41, 42, and 43 are virtually extended, the two intersection points where they meet are designated as P7 and P8 from the -Z' side. The intersection point of the fifth board corner 26 is P7, and the intersection point of the sixth board corner 27 is P8.

[0062] The distance from intersection point P7 to the straight section of side 41, i.e., the width of the chamfer at the fifth substrate corner 26, is r3. The distance from intersection point P8 to the straight section of side 41, i.e., the width of the chamfer at the sixth substrate corner 27, is r4. In other words, width r3 is the width in the Z' axis direction of the first chamfer located at the corner where the imaginary straight lines extending side 41 and side 43 intersect. Width r4 is the width in the Z' axis direction of the second chamfer located at the corner where the imaginary straight lines extending side 41 and side 42 intersect.

[0063] At this time, the widths r3 and r4 in the substrate 2 and the widths e2 and e4 in the excitation electrode 3 satisfy all of the following equations (9) to (12). e2 <r4…(9) e4 <r3…(10) e2 <r3…(11) e4 <r4…(12)

[0064] In this way, unwanted vibrations can be suppressed, and frequency fluctuations and deterioration of aging characteristics caused by the support stress resulting from the joint between the vibrating element 1a and the base 80 can also be suppressed.

[0065] Furthermore, the slit T is not necessarily limited to including a first portion T1, a second portion T2, and a third portion T3. For example, the slit T does not have to include the second portion T2, nor does it have to include the third portion T3, or it does not have to include the second portion T2 and the third portion T3. At least a portion of the slit T is provided between the first connecting electrode 4a and the excitation electrode 3.

[0066] Furthermore, the direction in which the first part T1 extends is not necessarily limited to along the Z' axis; for example, it may be inclined from the Z' axis.

[0067] Furthermore, the slit T is not particularly limited to being composed of a single through-hole. For example, there may be a non-through portion between the first portion T1 and the second portion T2, or the first portion T1 may be composed of multiple through-holes arranged along the Z' axis.

[0068] <Modification 2 of the first embodiment> A second modification of the first embodiment will be described with reference to Figure 7. Figure 7 is a plan view showing the configuration of the vibration device 110 according to the second modification of the first embodiment. Note that Figure 7 shows the device with the cover 90 (see Figure 2) removed. Also, in Figure 7, components that are the same as those in the previously described embodiment are denoted by the same reference numerals. Note that the explanation will focus on the differences from the first embodiment, and similar items will be omitted from the explanation.

[0069] The vibration device 110 of the modified example 2 comprises a base 80b, a vibrating piece 1b, and a cover 90. The vibration device 110 of the modified example 2 is similar to the vibration device 100 of the first embodiment except that the structure of the vibrating piece 1b and the structure of the base 80b are different.

[0070] In the vibrating piece 1b, in a plan view, the first connecting electrode 4c and the second connecting electrode 4d are positioned between the -x-side short side SS2 and the excitation electrode 3. The first connecting electrode 4c is positioned on the first surface 12 of the substrate 2, and the second connecting electrode 4d is positioned on the second surface 13 of the substrate 2. In a plan view, a portion of the first connecting electrode 4c and a portion of the second connecting electrode 4d overlap at a position through which the center line CL in the y-axis direction of the vibrating piece 1b passes.

[0071] In the base 80b, the first electrode pad 84b and the second electrode pad 85b are arranged side by side along the x-axis. The second electrode pad 85b is positioned on the -x side relative to the first electrode pad 84b. In a plan view, the first electrode pad 84b is positioned to overlap with a portion of the first connecting electrode 4c. In a plan view, the second electrode pad 85b is positioned on the -x side relative to the second connecting electrode 4d, and at least a portion of it is exposed from the vibrating piece 1b.

[0072] The first connecting electrode 4c is bonded to the first electrode pad 84b by a conductive bonding member 16. The second connecting electrode 4d is electrically connected to the second electrode pad 85b via a bonding wire 94.

[0073] This configuration allows the vibrating element 1b to be fixed to the base 80b with single-point support. This further reduces the influence of support stress.

[0074] <Second Embodiment> The vibrating piece 1c according to the second embodiment will be described with reference to Figure 8. Figure 8 is a plan view showing the configuration of the vibrating piece 1c according to the second embodiment.

[0075] The vibrating piece 1c of the second embodiment includes a substrate 2c, a pair of excitation electrodes 3, and a pair of connecting electrodes 4. The vibrating piece 1c of the second embodiment is the same as the vibrating piece 1 of the first embodiment except that the orientation of the crystal axes X' and Z' in the vibrating piece 1c is different.

[0076] In Figure 8, in a plan view, the long sides LS3 and LS4 of the substrate 2c are aligned along the Z' axis, and the short sides SS3 and SS4 are aligned along the X' axis. In a plan view, the long sides LE3 and LE4 of the excitation electrode 3 are aligned along the Z' axis, and the short sides SE3 and SE4 are aligned along the X' axis. That is, the short side SE3 intersects the Z' axis, and the short side SE4 intersects the Z' axis and is located on the -Z' side of the short side SE3. The short side SE3 corresponds to the fourth short side, and the short side SE4 corresponds to the fifth short side. Also, the pair of long sides LE3 and LE4 intersect the X' axis.

[0077] Of the four corners of the excitation electrode 3, the corner located on the -X' and +Z' sides in a plan view is the fifth electrode corner 17c. The remaining corners, in a plan view, clockwise from the fifth electrode corner 17c, are the sixth electrode corner 18c, the seventh electrode corner 19c, and the eighth electrode corner 20c. The fifth electrode corner 17c and the seventh electrode corner 19c have a larger radius (R) than the sixth electrode corner 18c and the eighth electrode corner 20c, meaning they have a larger chamfer.

[0078] In the excitation electrode 3, when the four sides are virtually extended, the four intersection points that intersect each other are defined as intersection points P9 to P12. The intersection at the fifth electrode corner 17c is P9, the intersection at the sixth electrode corner 18c is P10, the intersection at the seventh electrode corner 19c is P11, and the intersection at the eighth electrode corner 20c is P12.

[0079] The distance from intersection points P9 to P12 to the straight sections of short side SE3 and short side SE4, i.e., the width of the chamfer at each corner, is e5 at the fifth electrode corner 17c, e6 at the sixth electrode corner 18c, e7 at the seventh electrode corner 19c, and e8 at the eighth electrode corner 20c. In other words, width e5 is the width in the X' axis direction of the chamfer located on the -X' side of the fourth short side. Width e6 is the width in the X' axis direction of the chamfer located on the -X' side of the fifth short side. Width e7 is the width in the X' axis direction of the chamfer located on the +X' side of the fifth short side. Width e8 is the width in the X' axis direction of the chamfer located on the +X' side of the fourth short side.

[0080] In this case, e5 to e8 satisfy all of the following equations (13) to (16). e6 <e5…(13) e8 <e7…(14) e6 <e7…(15) e8 <e5…(16)

[0081] In this way, the excitation electrodes 3 can be positioned according to the location of the main vibration. Therefore, in an SC-cut quartz substrate, the vibration characteristics of the vibrating piece 1c can be improved by suppressing the coupling of unwanted secondary vibrations with the main vibration while maintaining the size of the area of ​​the excitation electrodes 3.

[0082] In substrate 2c, of the four corners, the corner on the -X' side and the +Z' side is the 7th substrate corner 31. The remaining corners, clockwise from the 7th substrate corner 31, are the 8th substrate corner 32, the 9th substrate corner 33, and the 10th substrate corner 34. Substrate 2c has chamfered edges at both ends of the short side SS3 on the +Z' side, namely the 7th substrate corner 31 and the 10th substrate corner 34. The short side SS3 corresponds to the 6th short side.

[0083] When the long sides LS3, LS4 and the short side SS3 on the +Z' side are virtually extended, the two intersection points where they intersect are defined as intersection points P13 and P14. The intersection point of the 7th substrate corner 31 is P13, and the intersection point of the 10th substrate corner 34 is P14. The distance from intersection point P13 to the straight portion of the short side SS3, i.e., the width of the chamfer at the 7th substrate corner 31, is r5. The distance from intersection point P14 to the straight portion of the short side SS3, i.e., the width of the chamfer at the 10th substrate corner 34, is r6. In other words, width r5 is the width in the X' axis direction of the chamfer located on the -X' side of the 6th short side. Width r6 is the width in the X' axis direction of the chamfer located on the +X' side of the 6th short side.

[0084] At this time, the widths r5, r6 and the widths e6, e8 at the excitation electrode 3 satisfy all of the following equations (17) to (20). e6 <r5…(17) e8 <r5…(18) e8 <r6…(19) e6 <r6…(20)

[0085] By doing so, unwanted vibrations caused by the corners of the substrate 2c can be suppressed, thereby further improving the vibration characteristics of the vibrating element 1c.

[0086] Although the sixth short side was described as the short side SS3 on the +Z' side, it is not limited to this. The sixth short side can be any short side located on the opposite side of the excitation electrode 3 from the first connecting electrode 4e and the second connecting electrode 4f. That is, if the first connecting electrode 4e and the second connecting electrode 4f are located on the +Z' side of the excitation electrode 3, the sixth short side can be the short side SS4 on the -Z' side.

[0087] <Modified form of the second embodiment> A modified example of the second embodiment will be described with reference to Figure 9. Figure 9 is a plan view showing the configuration of the vibrating piece 1d according to a modified example of the second embodiment. In Figure 9, components similar to those in the previously described embodiment are denoted by the same reference numerals. The explanation will focus on the differences from the second embodiment, and similar items will be omitted from the explanation.

[0088] The substrate 2c is provided with a slit Tc between the excitation electrode 3 and the first connecting electrode 4e and the second connecting electrode 4f. The slit Tc penetrates from the first surface 12 to the second surface 13 in the Y'' axis direction of the vibrating piece 1d. In plan view, the slit Tc includes a first portion Tc1 extending along the X' axis direction, a second portion Tc2 connected to the +X' end of the first portion Tc1 and extending in the +Z' direction, and a third portion Tc3 connected to the -X' end of the first portion Tc1 and extending in the +Z' direction. The second portion Tc2 is located on the +X' side of the excitation electrode 3. The third portion Tc3 is located on the -X' side of the excitation electrode 3.

[0089] On the +Z' side of the first portion Tc1 and the +X' side of the third portion Tc3, the corner of the substrate 2c that demarcates a part of the slit Tc is the 11th substrate corner 35. On the +Z' side of the first portion Tc1 and the -X' side of the second portion Tc2, the corner of the substrate 2c that demarcates a part of the slit Tc is the 12th substrate corner 36. The 11th substrate corner 35 and the 12th substrate corner 36 are chamfered and have an R shape. The chamfered portion of the 11th substrate corner 35 corresponds to the 3rd chamfered portion, and the chamfered portion of the 12th substrate corner 36 corresponds to the 4th chamfered portion.

[0090] The edge of the substrate 2c that defines a portion of the first portion Tc1 on the side of the excitation electrode 3 is edge 41c. The edge of the substrate 2 that defines a portion of the second portion Tc2 on the side of the excitation electrode 3 is edge 42c. The edge of the substrate 2 that defines a portion of the third portion Tc3 on the side of the excitation electrode 3 is edge 43c.

[0091] When sides 41c, 42c, and 43c are virtually extended, the two intersection points where they meet are denoted as P15 and P16 from the -X' side.

[0092] The distance from intersection point P15 to the straight section of side 41c, i.e., the width of the chamfer at the 11th substrate corner 35, is r7. The distance from intersection point P16 to the straight section of side 41c, i.e., the width of the chamfer at the 12th substrate corner 36, is r8. In other words, width r7 is the width in the X' axis direction of the third chamfer located at the corner where the imaginary straight lines extending sides 41c and 43c intersect. Width r8 is the width in the X' axis direction of the fourth chamfer located at the corner where the imaginary straight lines extending sides 41c and 42c intersect.

[0093] At this time, the widths r7 and r8 in the substrate 2c and the widths e6 and e8 in the excitation electrode 3 satisfy all of the following equations (21) to (24). e6 <r7…(21) e8 <r8…(22) e6 <r8…(23) e8 <r7…(24)

[0094] In this way, unwanted vibrations can be suppressed, and frequency fluctuations and deterioration of aging characteristics caused by the support stress generated by the joint between the vibrating element 1d and the base 80 can be suppressed.

[0095] <Third Embodiment> Regarding the oscillator 200 according to the third embodiment, a crystal oscillator equipped with the aforementioned vibrating element 1 will be used as an example and explained with reference to Figures 10 and 11. Figure 10 is a schematic plan view showing the configuration of the oscillator 200. Figure 11 is a schematic cross-sectional view taken along line A2-A2 in Figure 10. Note that in Figure 10, the lid 202 is removed for the convenience of explaining the internal configuration of the oscillator 200.

[0096] The oscillator 200 includes a base 201, a cover 202, a vibrating element 1, and an oscillation circuit 203.

[0097] The structure of the oscillator 200 is substantially the same as that of the vibration device 100 of the first embodiment, except that the oscillation circuit 203 is provided on the base 201. The oscillation circuit 203 is electrically connected to the excitation electrode 3 provided on the vibrating piece 1, and can excite the vibrating piece 1.

[0098] By doing so, it is possible to suppress the coupling of unwanted secondary vibrations with the main vibration, thereby providing an oscillator 200 with excellent vibration characteristics.

[0099] The above description is based on embodiments of the vibrating pieces 1, 1a to 1d, the vibrating devices 100 and 110, and the oscillator 200. However, this embodiment is not limited thereto, and the configuration of each part can be replaced with any configuration having a similar function. In addition, other arbitrary components may be added to this embodiment. Furthermore, each embodiment may be combined as appropriate. [Explanation of Symbols]

[0100] 1,1a~1d... Vibration piece, 2,2c... Substrate, 3... Excitation electrode, 3a... First excitation electrode, 3b... Second excitation electrode, 4... Connection electrode, 4a, 4c, 4e... First connection electrode, 4b, 4d, 4f... Second connection Electrode, 8... Corner of first substrate, 9... Corner of second substrate, 10... Corner of third substrate, 11... Corner of fourth substrate, 12... First surface, 13... Second surface, 14, 15... Lead wiring, 16... Bonding member, 17... First electrode corner Part, 17c...5th electrode corner, 18...2nd electrode corner, 18c...6th electrode corner, 19...3rd electrode corner, 19c...7th electrode corner, 20...4th electrode corner, 20c...8th electrode corner, 26...5th substrate corner, 27...6th substrate corner, 31...7th substrate corner, 32...8th substrate corner, 33...9th substrate corner, 34...10th substrate corner, 35...11th substrate corner, 36...12th substrate corner, 41~43...side 41c~43c...side, 70...package, 80,80b...base, 81,82...face, 83...external terminal, 84,84b...first electrode pad, 85,85b...second electrode pad, 90...lid, 91...recess, 92...opening, 93...bonding member, 94...bonding wire, 100,110...vibration device, 200...oscillator, 201...base, 202...lid, 203...oscillating circuit, C L...center line, e1~e8...width, LE1~LE4...long side, LS1~LS4...long side, P1~P16...intersection, r1~r8...width, S...internal space, S1...first region, S2...second region, S3...third region, S4...fourth region, SE1~SE4...short side, SS1~SS4...short side, T,Tc...slit, T1...first part, T2...second part, T3...third part, V1...first virtual line, V2...second virtual line

Claims

1. A substrate made of an SC-cut quartz plate having a first surface perpendicular to the Y'' axis of a new Cartesian coordinate system (X', Y'', Z') obtained by rotating a Cartesian coordinate system (X', Y'', Z) by a predetermined angle around the Z axis of the Cartesian coordinate system (X', Y'', Z') by a predetermined angle around the X'' axis of the new Cartesian coordinate system (X', Y'', Z') obtained by this rotation, and a second surface that is in a front-back relationship with the first surface, A first excitation electrode arranged on the first surface, The first excitation electrode is electrically connected to the first connecting electrode and is provided at one end of the substrate in the X' axis direction, The first excitation electrode is a rectangle in plan view, having a first short side intersecting the X' axis, a second short side intersecting the X' axis and located on the +X' side of the first short side, and a pair of long sides intersecting the Z' axis. The first excitation electrode is provided with chamfered portions at the four corners of the rectangle, e1 is the width in the Z' axis direction of the chamfered portion located on the +Z' side of the first short side. The width of the chamfered portion located on the -Z' side of the first short side in the Z' axis direction is e2, The width of the chamfered portion located on the -Z' side of the second short side in the Z' axis direction is e3. The vibrating piece is characterized in that, when e4 is the width in the Z' axis direction of the chamfered portion located on the +Z' side of the second short side, e1, e2, e3, and e4 satisfy the following equations (1) to (4). e2 < e1 ... (1) e4 < e3 ... (2) e2 < e3 ... (3) e4 < e1 ... (4)

2. A substrate made of an SC-cut quartz plate having a first surface perpendicular to the Y'' axis of a new Cartesian coordinate system (X', Y'', Z') obtained by rotating a Cartesian coordinate system (X', Y'', Z) by a predetermined angle around the Z axis of the Cartesian coordinate system (X', Y'', Z') by a predetermined angle around the X'' axis of the new Cartesian coordinate system (X', Y'', Z') obtained by this rotation, and a second surface that is in a front-back relationship with the first surface, A first excitation electrode arranged on the first surface, The first excitation electrode is electrically connected to the first connecting electrode and is provided at one end of the substrate in the Z' axis direction, The first excitation electrode is a rectangle in plan view, having a fourth short side intersecting the Z' axis, a fifth short side intersecting the Z' axis and located -Z' side of the fourth short side, and a pair of long sides intersecting the X' axis. The first excitation electrode is provided with chamfered portions at the four corners of the rectangle, The width of the chamfered portion located on the -X' side of the fourth short side in the X' axis direction is e5. The width of the chamfered portion located on the -X' side of the fifth short side in the X' axis direction is e6. The width of the chamfered portion located on the +X' side of the fifth short side in the X' axis direction is e7, The vibrating piece is characterized in that, when e8 is the width in the X' axis direction of the chamfered portion located on the +X' side of the fourth short side, e5, e6, e7, and e8 satisfy the following equations (13) to (16). e6<e5…(13) e8<e7…(14) e6<e7…(15) e8<e5...(16)

3. The substrate is a rectangle in plan view, having a pair of short sides intersecting the X' axis and a pair of long sides intersecting the Z' axis. The substrate is provided with chamfered portions at both ends of the third short side, which is located on the opposite side in the X' axis direction from one of the pair of short sides. The width of the chamfered portion located on the +Z' side of the third short side in the Z' axis direction is r1, The vibrating piece according to claim 1, wherein when the width in the Z' axial direction of the chamfered portion located on the -Z' side of the third short side is r2, e2, e4, r1, and r2 satisfy the following equations (5) to (8). e² < r¹ ... (5) e4 < r2 ... (6) e² < r² ... (7) e4 < r1 ... (8)

4. The substrate is a rectangle in plan view, having a pair of short sides intersecting the Z' axis and a pair of long sides intersecting the X' axis. The substrate is provided with chamfered portions at both ends of the sixth short side, which is located on the opposite side in the Z' axis direction from one of the pair of short sides. The width of the chamfered portion located on the -X' side of the sixth short side in the X' axis direction is r5. The vibrating piece according to claim 2, wherein when the width in the X' axis direction of the chamfered portion located on the +X' side of the sixth short side is r6, e6, e8, r5, and r6 satisfy the following equations (17) to (20). e6<r5…(17) e8<r5…(18) e8<r6...(19) e6<r6...(20)

5. The substrate has a slit that penetrates from the first surface to the second surface, The vibrating piece according to any one of claims 1 to 4, wherein at least a portion of the slit is provided between the first connecting electrode and the first excitation electrode.

6. The substrate is provided with a slit that penetrates from the first surface to the second surface, The aforementioned slit is A first portion located between the first connecting electrode and the first excitation electrode, extending along the Z' axis, A second portion located on the +Z' side of the first excitation electrode and extending along the X' axis, A third portion located on the -Z' side of the first excitation electrode and extending along the X' axis, A first chamfered portion is located at the corner where virtual straight lines extending from the first side of the first portion on the side of the third portion on the side of the first portion intersect, The first portion has a side on the first excitation electrode side, and the second portion has a side on the first excitation electrode side, and the second portion has a second chamfered portion located at the corner where two imaginary straight lines extending from each side intersect. The width of the first chamfered portion in the Z' axis direction is r3, The vibrating piece according to claim 1 or 3, wherein when the width of the second chamfered portion in the Z' axis direction is r4, e2, e4, r3, and r4 satisfy the following equations (9) to (12). e² < r⁴ ... (9) e4<r3...(10) e2<r3...(11) e4<r4...(12)

7. The substrate is provided with a slit that penetrates from the first surface to the second surface, The aforementioned slit is A first portion located between the first connecting electrode and the first excitation electrode, extending along the X' axis, A second portion located on the +X' side of the first excitation electrode and extending along the Z' axis, A third portion located on the -X' side of the first excitation electrode and extending along the Z' axis, A third chamfered portion located at the corner where virtual straight lines extending from the first side of the first portion on the side of the third portion on the side of the first portion intersect, The first portion has a side on the first excitation electrode side, and the second portion has a side on the first excitation electrode side, and the second portion has a side on the first excitation electrode side, and the fourth chamfered portion is located at the corner where the imaginary straight lines extending from each side intersect, The width of the third chamfered portion in the X' axis direction is r7, The vibrating piece according to claim 2 or 4, wherein when the width of the fourth chamfered portion in the X' axis direction is r8, e6, e8, r7, and r8 satisfy the following equations (21) to (24). e6<r7…(21) e8<r8...(22) e6<r8…(23) e8<r7…(24)

8. The vibrating piece according to any one of claims 1 to 4, wherein the chamfered portion has a shape having straight sections intersecting the X' axis and the Z' axis in a plan view, or is arc-shaped.

9. A second excitation electrode is arranged on the second surface, The device comprises a second connecting electrode electrically connected to the second excitation electrode, The vibrating piece according to any one of claims 1 to 4, wherein the first connecting electrode and the second connecting electrode are arranged side by side along the short side of the substrate on the first surface.

10. A second excitation electrode is arranged on the second surface, The device comprises a second connecting electrode electrically connected to the second excitation electrode, The first connecting electrode is positioned on the first surface, and the second connecting electrode is positioned on the second surface. The vibrating piece according to any one of claims 1 to 4, wherein the first connecting electrode and the second connecting electrode overlap in a plan view.

11. A substrate made of an SC-cut quartz plate having a first surface perpendicular to the Y'' axis of a new Cartesian coordinate system (X', Y'', Z') obtained by rotating a Cartesian coordinate system (X', Y'', Z) by a predetermined angle around the Z axis of the Cartesian coordinate system (X', Y'', Z') by a predetermined angle around the X'' axis of the new Cartesian coordinate system (X', Y'', Z') obtained by this rotation, and a second surface that is in a front-back relationship with the first surface, The first excitation electrode is arranged on the first surface and integrally formed with it, The substrate is a rectangle having a pair of sides parallel to the X' axis and a pair of sides parallel to the Z' axis. In a plan view, a virtual line parallel to the X' axis that bisects the first excitation electrode in the Z' direction is defined as the first virtual line, and a virtual line parallel to the Z' axis that bisects the first excitation electrode in the X' direction is defined as the second virtual line. Among the first excitation electrodes, the region on the +Z' side of the first virtual line and on the -X' side of the second virtual line is defined as the first region. Of the first excitation electrode, the region on the -Z' side of the first virtual line and on the -X' side of the second virtual line is defined as the second region. Of the first excitation electrode, the region on the -Z' side of the first virtual line and on the +X' side of the second virtual line is defined as the third region. Of the first excitation electrode, the region on the +Z' side of the first virtual line and on the +X' side of the second virtual line is defined as the fourth region. The vibrating piece is characterized in that the areas of the first region and the third region are each smaller than the area of ​​the second region and smaller than the area of ​​the fourth region.

12. A vibrating piece according to any one of claims 1 to 4, A vibration device comprising a base that supports the vibrating piece by being joined to the first connecting electrode.

13. A vibrating piece according to any one of claims 1 to 4 and claim 11, An oscillation circuit electrically connected to the first excitation electrode, An oscillator comprising: a base housing the vibrating element and the oscillation circuit.

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