Torque wrench and control method

Abstract

We propose a novel technology for a tool used to fasten blade fixing nuts that secure cutting blades in cutting equipment. [Solution] A torque wrench for fastening a blade fixing nut for fixing a cutting blade, comprising: a grip portion for being held by hand; a holding portion for holding the blade fixing nut; a sensor for detecting the torque applied to a rod connected to the holding portion; and a control unit for receiving a signal from the sensor. The control unit calculates the torque based on the signal from the sensor, compares the difference between the calculated torque and a reference torque, and determines the fastening state based on the difference.

Description

Technical Field

[0006] , , ,

[0001] The present invention relates to a tool used to attach and detach a fixing nut for fixing a cutting blade to a rotating shaft in a cutting device for dicing (individualizing) a semiconductor wafer or the like.

Background Art

[0002] A wafer on which a plurality of devices such as ICs and LSIs are partitioned by a dividing line and formed on the surface is divided into individual devices by cutting the dividing line vertically and horizontally with a cutting device, and is incorporated into various electrical devices such as mobile phones and personal computers for use.

[0003] The cutting device includes a holding unit that holds a workpiece, and a cutting unit that includes a cutting blade that cuts the workpiece held by the holding unit. The workpiece held by the holding unit is cut with high precision by the cutting blade and diced (individualized) into individual devices.

[0004] Now, when setting up a new cutting blade or when replacing the cutting blade due to wear or breakage of the cutting edge during use, it is necessary to fasten the blade fixing nut for fixing the cutting blade with a predetermined torque. For example, as disclosed in Patent Document 1, it is known that a tool for attaching and detaching the blade fixing nut is used.

Prior Art Documents

Patent Documents

[0007] Furthermore, while torque wrenches (free-spinning torque tools) can be used to tighten bolts to the correct torque, the operator's technique can lead to over-tightening or under-tightening. In other words, variations in torque due to human factors can occur, potentially leading to defects such as poor cutting.

[0008] Furthermore, if there were situations where records (evidence) were not kept regarding whether or not the fastening was performed with the specified torque, or if recording errors occurred by workers, it would be impossible to verify the torque at the time of fastening later, indicating room for improvement in terms of traceability.

[0009] In view of the above problems, the present invention proposes a novel technology for a tool for fastening a blade fixing nut for fixing a cutting blade of a cutting device. [Means for solving the problem]

[0010] The problems that this invention aims to solve are as described above, and next, a unit for solving these problems will be described.

[0011] According to one aspect of the present invention, a torque wrench for fastening a blade fixing nut for fixing a cutting blade is provided, comprising: a grip portion for being held by hand; a holding portion for holding the blade fixing nut; a sensor for detecting torque applied to a rod connected to the holding portion; and a control unit for receiving signals from the sensor.

[0012] Furthermore, according to one aspect of the present invention, the control unit calculates torque based on a signal from a sensor, compares the difference between the calculated torque and a reference torque, and determines the fastening state based on the difference.

[0013] Furthermore, according to one aspect of the present invention, the device has an input unit for acquiring the reference torque from a higher-level system via communication.

[0014] Furthermore, according to one aspect of the present invention, the device has an output unit for outputting the calculated torque via communication.

[0015] Furthermore, according to one aspect of the present invention, the output unit outputs a determination result corresponding to the difference.

[0016] Furthermore, according to one aspect of the present invention, the holding portion comprises a cylindrical holder, a base portion provided coaxially with the holder inside the holder and rotatable integrally with the holder, a plurality of engaging claws arranged circumferentially around the central axis of the base portion, and a plurality of engaging pins provided on the tip side of the base portion. The engaging claws engage with the outer circumference of the blade fixing nut to hold the blade fixing nut. The blade fixing nut is held by narrowing the opening of each engaging claw when the base portion is pushed into the holder. The engaging pins are inserted into engaging holes formed in the blade fixing nut. The blade fixing nut is rotated by grasping and rotating the grip portion.

[0017] Furthermore, according to one aspect of the present invention, a management method using a torque wrench is provided, comprising the steps of: calculating torque in the control unit; transmitting the calculated torque to a higher-level system; and recording the calculated torque in the higher-level system. [Effects of the Invention]

[0018] The present invention provides the following effects: In other words, according to one aspect of the present invention, since the grip portion for being grasped by hand and the holding portion for holding the blade fixing nut are integrally formed, management and work become easier compared to conventional methods that use both a fixing nut fastening means and a torque wrench.

[0019] Further, according to one aspect of the present invention, since the fastening state is determined by the control unit, it is possible to prevent the occurrence of variations in the fastening torque due to human factors, and thus it is possible to prevent the occurrence of problems such as cutting defects.

[0020] Also, according to one aspect of the present invention, by logging whether the fastening was performed with a specified torque, it is possible to check the fastening torque later and ensure traceability regarding the fastening torque.

Brief Description of the Drawings

[0021] [Figure 1] A diagram showing an example of a cutting device. [Figure 2] A diagram showing an example of a cutting unit. [Figure 3] A perspective view showing an overview of a torque wrench. [Figure 4] A plan view showing an overview of a torque wrench. [Figure 5] An exploded perspective view showing an overview of a torque wrench. [Figure 6] A diagram for explaining a first posture in which the base portion protrudes from the holder. [Figure 7] A diagram for explaining a situation where the blade fixing nut and the base portion are pushed into the holder. [Figure 8] A diagram for explaining a second posture in which the base portion is housed in a state of being pushed into the holder. [Figure 9] A diagram for explaining the tracking of the calculated torque. <00001​​​​​​​​​As shown in Figure 1, the cutting apparatus 1 is configured to include a holding table 2, a moving mechanism 3, an imaging unit 4, and a cutting unit 5. The workpiece is not particularly limited, but can be various plate-shaped processing materials such as plate-shaped semiconductor wafers, optical device wafers, plate-shaped inorganic material substrates, and plate-shaped ductile materials.

[0024] The holding table 2 holds the workpiece by suction. The holding table 2 is formed in a disc shape, with its upper surface being a plane parallel to the horizontal. The holding table 2 is made of porous ceramic and is connected to a vacuum suction source (not shown).

[0025] The moving mechanism 3 moves the holding table 2 and the cutting unit 5 relative to each other in the X-axis, Y-axis, and Z-axis directions. The moving mechanism 3 consists of an X-axis moving mechanism 3a, a Y-axis moving mechanism 3b, and a Z-axis moving mechanism 3c. The X-axis moving mechanism 3a supports the holding table 2 so that it can move relative to the main body 6 in the X-axis direction (corresponding to the cutting feed direction). The Y-axis moving mechanism 3b supports the cutting unit 5 so that it can move relative to the main body 6 in the Y-axis direction (corresponding to the indexing feed direction). The Z-axis moving mechanism 3c supports the cutting unit 5 so that it can move relative to the main body 6 in the Z-axis direction (corresponding to the depth of cut feed direction). Each of the moving mechanisms 3a to 3c is composed of, for example, a motor, a ball screw, a nut, etc.

[0026] The imaging unit 4 takes images of the planned division lines (street) of the workpiece before cutting in order to align the cutting unit 5 with respect to those lines. The imaging unit 4 is, for example, a camera using a CCD (Charge Coupled Device) image sensor.

[0027] The cutting unit 5 performs cutting operations on the workpiece. As shown in Figure 2, the cutting unit 5 is composed of a drive mechanism 10, a cutting blade 20, a blade mount 30, and a blade fixing nut 40.

[0028] As shown in Figure 2, the drive mechanism 10 rotates the cutting blade 20 at high speed. The drive mechanism 10 includes a spindle 11, a spindle housing 12, and a motor (not shown). A blade mount 30 is detachably fixed to the tip of the spindle 11 by a mount fixing nut 50.

[0029] The cutting blade 20 is configured as a so-called hub blade, and comprises an annular hub base 21 made of a metal such as an aluminum alloy, and an annular cutting edge 22 formed to surround the outer circumference of the hub base 21.

[0030] The hub base 21 has a fitting hole 24 in the center for mounting onto the boss portion 34 of the blade mount 30. The boss portion 34 of the blade mount 30 is inserted through the fitting hole 24. The cutting edge 22 is made of abrasive grains such as diamond or CBN (Cubic Boron Nitride) and a bonding material (binder) such as metal or resin, and is formed to a predetermined thickness.

[0031] The blade mount 30 is configured to have a flange portion 32 for clamping the cutting edge 22 of the cutting blade 20, a boss portion 34 that is inserted through the fitting hole 24 of the cutting blade 20, and a male screw 36 to which the blade fixing nut 40 is fastened.

[0032] The blade fixing nut 40 is ring-shaped, and has a female thread 42 on its inner circumference that screws onto the male thread 36 of the blade mount 30. Furthermore, the end face of the blade fixing nut 40 has four pin insertion holes 44, each 90 degrees apart, allowing for the insertion of an engagement pin for a torque wrench (described later) and rotational operation.

[0033] In the above description, we have described the case where the cutting blade 20 is a hub blade, but the present invention can also be implemented when the cutting blade is a washer blade.

[0034] As described above, the cutting device 1, as shown in Figure 1, has its moving parts, such as the cutting unit 5, automatically controlled by the control unit 8, and the workpiece is automatically cut. The control unit 8 is equipped with a communication function and, as will be described in more detail later, can be configured to establish communication with a torque wrench and manage the logging of the tightening torque of the cutting blade. The cutting device 1 is equipped with a monitor 7, which can display the operating status of the device and various setting information.

[0035] Next, we will explain the torque wrench used for replacing cutting blades. As shown in Figures 3 to 5, the torque wrench 60 is configured to include a grip portion 62 for being held by hand, a holding portion 70 for holding a blade fixing nut, a sensor 66 for detecting the torque applied to a rod 64 connected to the holding portion 70, and a control unit 67 for receiving signals from the sensor 66.

[0036] The grip portion 62 is, for example, made of a cylindrical metal member and is the part that is grasped by the worker, and its circumferential surface has grooves 62a formed on it to prevent slipping.

[0037] The internal space of the grip section 62 houses a sensor 66, a control unit 67, an input unit 68, an output unit 69, and the like. The control unit 67, input unit 68, and output unit 69 can be made up of, for example, IC chips. Multiple batteries, which serve as the power supply 61, are also housed within the space.

[0038] A display unit 63 for displaying various information is provided on the outer circumference of the grip unit 62. The display unit 63 consists of a display unit 63a for digitally displaying various information such as torque values, an LED light-emitting unit 63b, and operation buttons 63c.

[0039] As shown in Figure 5, one end of the rod 64 is housed in the space inside the grip portion 62, and a sensor 66 is attached to the rod 64. The sensor 66 is, for example, a strain gauge, which detects the torque acting on the rod 64 by a change in voltage, and outputs the detected change in voltage to the control unit 67. The control unit 67 calculates the torque based on this change in voltage.

[0040] As shown in Figure 5, a holding portion 70 is positioned at one end of the grip portion 62 in the longitudinal direction. The holding portion 70 comprises a cylindrical holder 72, a base portion 74 provided inside the holder 72 coaxially with the holder 72 and rotatable integrally with the holder 72, multiple engaging claws 75 arranged in the circumferential direction around the central axis of the base portion 74, and multiple engaging pins 76 provided on the tip side of the base portion 74.

[0041] As shown in Figure 5, one end of the holder 72 is fixed to one end of the rod 64, and the torque acting on the holder 72 is detected by a sensor 66 attached to the rod 64.

[0042] As shown in Figure 6, the holder 72 is made of a cylindrical member, and a cylindrical base portion 74 is housed inside the cylinder. Multiple locking holes 72a are formed in the holder 72 in the circumferential direction, and locking pins 72b are inserted through the locking holes 72a into multiple pin holes 73 formed in the circumferential surface of the base portion 74. This allows the locking pins 72b to move within the range of the locking holes 72a, and the base portion 74 can slide axially relative to the holder 72. In addition, the locking pins 72b catch on the locking holes 72a, allowing the holder 72 and the base portion 74 to rotate together as a single unit.

[0043] As shown in Figure 6, each engaging claw 75 engages with the outer circumference of the blade fixing nut 40 to hold the blade fixing nut 40. Each engaging claw 75 is rotatably provided at multiple locations in the circumferential direction of the base portion 74. As shown in Figure 7, when the base portion 74 is moved to push into the holder 72, each engaging claw 75 tilts as it is pressed against the inner wall surface of the holder 72. This tilting reduces the diameter of the area surrounded by the multiple engaging claws 75, so that the blade fixing nut 40 is held by being gripped by the multiple engaging claws 75.

[0044] As shown in Figure 6, the base portion 74 is biased by a spring (not shown) in a direction that pushes it out of the holder 72 (to the left in Figure 6), and the locking pin 72b catches on the first position 72c of the locking hole 72a, setting the base portion 74 to a first position where it protrudes from the holder 72.

[0045] As shown in Figure 6, when the base portion 74 is in the first position, rotation of each engaging claw 75 is permitted, and by opening each engaging claw 75 and widening the diameter of the area surrounded by the engaging claws 75, the blade fixing nut 40 can be temporarily fixed so that it is surrounded by the engaging claws 75.

[0046] As shown in Figure 6, when the blade fixing nut 40 is brought into contact with the base portion 74 and pushed against the holder 72, as shown in Figure 7, the engaging claw 75 rotates so as to be pushed down by the holder 72, and the blade fixing nut 40 is gripped by the engaging claw 75. Then, by rotating the blade fixing nut 40 (base portion 74) relative to the holder 72 in the direction of arrow L, the locking pin 72b is moved to the second position 72d of the locking hole 72a, as shown in Figure 8.

[0047] As described above, the blade fixing nut 40 is gripped by each engaging claw 75, as shown in Figure 8. Furthermore, the locking pin 72b moves to the second position 72d and catches in the locking hole 72a, setting the base portion 74 to a second position where it is pushed into the holder 72.

[0048] As shown in Figures 6 and 7, the engagement pin 76 is inserted into a pin insertion hole 44 formed in the blade fixing nut 40. As shown in Figure 8, when the base portion 74 is set to the second position, when rotated in the direction of arrow L, the locking pin 72b remains locked in the locking hole 72a at the second position 72d, allowing the base portion 74, holder 72, and blade fixing nut 40 to rotate together as a single unit.

[0049] As shown in Figure 8, the cutting blade 20 can be fixed to the blade mount 30 by fastening the blade fixing nut 40 to the male thread 36 of the blade mount 30, as shown in Figure 2.

[0050] Furthermore, when rotated in the direction of arrow R shown in Figure 8, the locking pin 72b returns to the first position 72c of the locking hole 72a, resulting in the state shown in Figure 6, which allows the blade fixing nut 40 to be loosened.

[0051] When fastening the blade fixing nut 40 using the torque nut configured as described above, the torque is calculated by the control unit 67 shown in Figure 3, in the state shown in Figure 8. Here, the control unit 67 compares the difference between the calculated torque and the reference torque, and determines the fastening state based on the difference.

[0052] Specifically, as shown in Figure 9, the reference torque used as the basis for comparison is input from the input unit 68. The input unit 68 is equipped with a communication function, and for example, by operating the operation button 63c (Figure 3), the reference torque can be obtained from a higher-level system via communication.

[0053] As shown in Figure 9, the higher-level system includes, for example, the control unit 8 (Figure 1) of the cutting device 1, the server 90 installed in the factory where the cutting device 1 is installed, and the server 91 installed in a remote location. Furthermore, the communication method is not particularly limited and can include, for example, Wi-Fi (registered trademark), Bluetooth (registered trademark), or the internet.

[0054] In addition, the reference torque may be input via communication, or, as shown in Figure 3, it may be input by selecting from a set of values ​​using the operation button 63c provided on the torque wrench 60, or by inputting a numerical value.

[0055] As shown in Figure 9, the control unit 67 calculates the difference between the reference torque acquired by the input unit 68 and the measured torque, and uses this difference to determine the fastening state, that is, whether the torque is within a predetermined range. For example, if the reference torque is 4 N (Newtons), it determines whether it is within a range of plus or minus 10% (3.6 N to 4.4 N). If the difference is within the predetermined range, it means that the fastening was performed with the appropriate torque.

[0056] The control unit 67 outputs the determination result to the output unit 69. If the difference is within a predetermined range, the output unit 69 outputs light, sound, vibration, etc., to inform the operator that the torque is correct. For example, this may involve lighting up the LED light-emitting unit 63b shown in Figure 3, generating an electronic sound through a speaker (not shown), or generating a grip portion 62 through a vibrator (not shown).

[0057] During the fastening process, the torque gradually increases. For example, once the calculated torque gradually increases and enters a predetermined range, a normal "beep, beep" sound is emitted as long as it remains within that range. If the torque becomes too strong and exceeds the predetermined range, an abnormal "beep" sound is emitted to indicate that the torque is too strong.

[0058] In this way, the worker can complete the fastening process with the correct torque by stopping the fastening when a normal sound is emitted. If an abnormal sound is emitted, the worker can simply turn the torque wrench in the opposite direction and then fasten again, making the work easy to perform.

[0059] In addition, for example, in the LED light-emitting unit 63b shown in Figure 3, after entering a predetermined range, it may emit green light as long as it remains within the predetermined range, and then emit red light after it exceeds the predetermined range. Furthermore, symbols or messages may be displayed on the display unit 63a.

[0060] As shown in Figure 9, the control unit 67 outputs the calculated torque to the output unit 69. The output unit 69 has a communication function and can transmit the calculated torque to a higher-level system via communication. The output unit 69 transmits the torque to the higher-level system, for example, at predetermined intervals.

[0061] In the higher-level system, the torque used during fastening operations can be tracked by managing the torque log. For example, by managing the log in the control unit 8 of the cutting device 1, the torque at the time the fastening operation was completed can be displayed on the monitor 7 (Figure 1) of the cutting device 1. In log management, for example, working time, operator, and cutting device identification number can be managed in association with the torque.

[0062] The present invention can be carried out as described in the above examples. As shown in Figure 3, the torque wrench 60 of this embodiment has a grip portion 62 for being held by hand and a holding portion 70 for holding the blade fixing nut, which are integrally formed. Therefore, compared to conventional systems that use both a fixing nut fastening means and a torque wrench, management and operation become easier.

[0063] Furthermore, as shown in Figure 3, the fastening state is determined by the control unit 67, which prevents variations in fastening torque due to human error, and consequently prevents defects such as cutting defects.

[0064] Furthermore, as shown in Figure 9, by logging whether or not the fastening was performed with the specified torque, the fastening torque can be checked later, ensuring traceability regarding the fastening torque. [Explanation of Symbols]

[0065] 1 Cutting equipment 5 Cutting Units 7 Monitors 8 Control Unit 20 cutting blades 21 Hub base 30 Blade Mount 40 Blade fixing nuts 44 Pin insertion holes 60 Torque wrench 61 Power supply 62 Grip section 63 Display section 63a Display section 63b Light-emitting part 63c Operation Buttons 64 rods 66 sensors 67 Control Unit 68 Input section 69 Output section 70 Holding part 72 Holder 72a Locking hole 72b Locking pin 72c first position 72d 2nd position 73 pin holes 74 Base section 75 Engaging claws 76 Engagement pins 90 servers 91 Servers

Claims

1. A torque wrench for tightening a blade fixing nut for securing a cutting blade, A grip section for holding in the hand, A retaining part that holds the blade fixing nut, A sensor that detects the torque applied to the rod connected to the holding part, A control unit that receives signals from the sensor, A torque wrench.

2. The control unit calculates the torque based on the signal from the sensor, The difference between the calculated torque and the reference torque is compared, The fastening status is determined based on the difference. The torque wrench according to feature 1.

3. It has an input unit for acquiring the reference torque from a higher-level system via communication. The torque wrench according to feature 2.

4. It has an output unit for outputting the calculated torque via communication. A torque wrench according to any one of claims 1 to 3.

5. The output unit outputs a determination result corresponding to the difference. The torque wrench according to feature 4.

6. The retaining part is, A cylindrical holder, A base portion is provided inside the holder, coaxially with the holder, and rotatably integrated with the holder; Multiple engaging claws are arranged in the circumferential direction with respect to the central axis of the base portion, Multiple engagement pins provided on the tip side of the base portion, It has, The engaging claws engage with the outer circumference of the blade fixing nut to hold the blade fixing nut, and the blade fixing nut is held by narrowing the opening of each engaging claw when the base portion is moved to push into the holder. The engagement pin is inserted into an engagement hole formed in the blade fixing nut, and the blade fixing nut is rotated by grasping and rotating the grip portion. A torque wrench according to any one of claims 1 to 3.

7. The retaining part is, A cylindrical holder, A base portion is provided inside the holder, coaxially with the holder, and rotatably integrated with the holder; Multiple engaging claws are arranged in the circumferential direction with respect to the central axis of the base portion, Multiple engagement pins provided on the tip side of the base portion, It has, The engaging claws engage with the outer circumference of the blade fixing nut to hold the blade fixing nut, and the blade fixing nut is held by narrowing the opening of each engaging claw when the base portion is moved to push into the holder. The engagement pin is inserted into an engagement hole formed in the blade fixing nut, and the blade fixing nut is rotated by grasping and rotating the grip portion. The torque wrench according to feature 4.

8. The retaining part is, A cylindrical holder, A base portion is provided inside the holder, coaxially with the holder, and rotatably integrated with the holder; Multiple engaging claws are arranged in the circumferential direction with respect to the central axis of the base portion, Multiple engagement pins provided on the tip side of the base portion, It has, The engaging claws engage with the outer circumference of the blade fixing nut to hold the blade fixing nut, and the blade fixing nut is held by narrowing the opening of each engaging claw when the base portion is moved to push into the holder. The engagement pin is inserted into an engagement hole formed in the blade fixing nut, and the blade fixing nut is rotated by grasping and rotating the grip portion. The torque wrench according to feature 5.

9. A control method using a torque wrench as described in claim 5, The steps include: calculating torque in the control unit, The steps include: transmitting the calculated torque to a higher-level system, A step to record the torque calculated by the higher-level system, A management method having

10. A control method using a torque wrench as described in claim 8, The steps include: calculating torque in the control unit, The steps include: transmitting the calculated torque to a higher-level system, A step to record the torque calculated by the higher-level system, A management method having

Images