Controlling the magnetic field magnification of electron microscopes

Abstract

A system or technology for controlling the magnetic magnification of an electron microscope is provided. [Solution] In various embodiments, the system may comprise an electron microscope that diffracts electrons through an analysis sample and uses one or more magnetic immersion fields to correct the trajectory of electrons onto an electron detector. That is, it enables magnification reduction and capture of portions of the diffraction pattern that may be located outside the area of ​​the electron detector, using a fixed-position electron detector and without additional hardware.

Description

Technical Field

[0001] [Background Art] Electron microscopes utilize a fixed-position electron detector. This causes a fixed camera length, forcing a trade-off between the advantages of a longer camera length and a shorter camera length, and thus limiting the versatility of the electron microscope if there is no optical system that can change it.

Summary of the Invention

[0002] The following presents an overview for achieving a basic understanding of one or more embodiments. This overview is not intended to identify key or important elements or to define the scope or claims of a particular embodiment. Its sole purpose is to present concepts in a simplified form as a prelude to the more detailed description that follows. In one or more embodiments described herein, a device, system, computer-implemented method, apparatus, or computer program product is provided that facilitates improved resolution and effective reduction of an electron microscope.

[0003] According to one or more embodiments, a system is provided. The system can include an electron microscope that diffracts electrons through an analysis sample and uses one or more magnetic immersion fields to modify the trajectory of the electrons onto an electron detector. The scientific instrument can further include a non-transitory computer-readable memory that can store computer-executable components. The system can further include a processor operatively coupled to the non-transitory computer-readable memory and capable of executing the computer-executable components stored in the non-transitory computer-readable memory. In various embodiments, the computer-executable components can include an image correction component that generates an image of the diffraction pattern of electrons colliding with the electron detector.

[0004] The advantage of this system and / or the corresponding computer implementation method and / or computer program product may be its ability to enable reduction and thus zoom control using a fixed-position electron detector and without additional hardware. This reduction can enable the capture of portions of the diffraction pattern that might otherwise be located outside the area of ​​the electron detector. [Brief explanation of the drawing]

[0005] The embodiments will be readily apparent from the following detailed description in conjunction with the accompanying drawings. For the sake of this description, similar reference numerals indicate similar structural elements. The embodiments are shown in the figures of the accompanying drawings as examples, not as limitations.

[0006] [Figure 1] This is a block diagram of an exemplary scientific instrument module for performing magnetic immersion field reduction according to various embodiments described herein.

[0007] [Figure 2] This is a flowchart illustrating an exemplary, non-limiting method for performing magnetic immersion field reduction according to various embodiments described herein.

[0008] [Figure 3] This specification shows a block diagram of an exemplary, non-limiting scientific instrument that facilitates magnetic immersion field reduction according to one or more embodiments described herein.

[0009] [Figure 4] The diagrams shown herein illustrate electron microscopes that do not use magnetic field reduction, according to one or more embodiments described herein.

[0010] [Figure 5] The following are diagrams of electron microscopes using magnetic field reduction according to one or more embodiments described herein.

[0011] [Figure 6]The diagram shows a magnetic immersion field applied to an electron diffraction stream according to one or more embodiments described herein.

[0012] [Figure 7] A flowchart of diffraction pattern images using magnetic field reduction according to one or more embodiments described herein is shown.

[0013] [Figure 8] This specification shows a graph illustrating the relationship between the ampere-turn value of the magnetic immersion field and the effective camera length of diffraction pattern images generated according to one or more embodiments described herein.

[0014] [Figure 9] This specification shows a graph illustrating the relationship between the ampere-turn value of the magnetic immersion field and the magnification of diffraction pattern images generated according to one or more embodiments described herein.

[0015] [Figure 10] A graph showing the relationship between magnetic field reduction and electron detector resolution according to one or more embodiments described herein is shown.

[0016] [Figure 11] A flowchart shows an exemplary, non-limiting computer implementation method that facilitates reduction in an electron microscope, according to one or more embodiments described herein.

[0017] [Figure 12] A block diagram of an example of a non-limiting operating environment that can facilitate one or more embodiments described herein is shown. [Modes for carrying out the invention]

[0018] The following detailed description is merely illustrative and is not intended to limit the embodiments and / or the application or use of the embodiments. Furthermore, there is no intention to be bound by the expressions or the information presented or implied in the foregoing Summary of the Invention section or the section of Modes for Carrying Out the Invention. Here, one or more embodiments will be described with reference to the drawings, where the same reference numerals are used throughout to indicate the same elements. In the following description, many specific details are set forth for the purpose of providing a more thorough understanding of one or more embodiments. However, it is clear that one or more embodiments can be practiced without these specific details in various cases.

[0019] In a particular branch of the electron microscope, electrons are guided through an electron-transparent sample, diffract the electron flow, and are then collected on an electron detector to generate an image of the diffraction pattern. Prior to the experiment, the electron detector is inserted at a fixed length or position (e.g., camera length) below the sample. Thus, increasing the camera length improves the spatial resolution, but limits the range of the spatial resolution and may create some defect spots outside the surface area of the detector, or shortening the camera length improves the coverage rate, but decreases the spatial resolution, presenting a choice. Furthermore, as the performance of the electron microscope is improved and the analysis of 2D materials up to 5 - 6 keV becomes possible, the mutual spatial range constraints become more severe due to the effects of the increase in electron wavelength and the increase in Bragg angle. Additionally, changing the physical position of the electron detector between experiments can be time-consuming and there is a risk of damaging the components of the electron microscope.

[0020] To overcome one or more of the deficiencies of the above-described prior art, one or more embodiments described herein can diffract electrons through an analysis sample with an electron microscope and modify the electron trajectories onto an electron detector of the electron microscope with one or more magnetic immersion fields. In this way, electrons and / or diffraction spots that would normally miss the electron detector and thus could not be captured can be directed onto the electron detector, thereby capturing a more accurate representation of the sample and effectively functioning as a reduction or zoom-out of the diffraction pattern. By varying the value of the ampere-turns, the electron trajectories are modified to a degree that allows for variable magnification control without the need to physically move components such as the electron detector within the electron microscope.

[0021] Furthermore, an image of the diffraction pattern can be generated based on the detected diffraction spots. The application of the magnetic immersion field can cause an unintentional rotation of the diffraction pattern. Therefore, one or more digital image rotation corrections can be applied to correct the image of the diffraction pattern. Thus, the embodiments described herein facilitate the use of the magnetic field effect on the diffraction pattern to enable magnification control. By calibrating the effects of reduction and rotation on the diffraction pattern, digital image post-processing can correct for any deviation from the expected forms such as rotation that may result from the magnetic immersion field.

[0022] Reference is now made to the drawings to describe one or more embodiments, with the same reference numbers being used throughout to indicate the same elements. In the following description, numerous specific details are set forth for the purpose of providing a more thorough understanding of one or more embodiments. However, it is clear that one or more embodiments can be practiced without these specific details in various instances.

[0023] FIG. 1 shows an example of a non-limiting block diagram of a scientific instrument module 100 according to various embodiments described herein.

[0024] In various embodiments, the scientific instrument module 100 can be implemented by circuits (including, for example, electrical or optical components) such as programmed computing devices. The logic of the scientific instrument module 100 can be contained in a single computing device or distributed across multiple computing devices communicating with each other as needed. Examples of computing devices that can implement the scientific instrument module 100, either individually or in combination, are discussed herein with reference to Figure 12.

[0025] The scientific instrument module 100 may include a first logic 102 and a second logic 104. As used herein, the term “logic” may include a device that performs a set of operations associated with a logic element. For example, any of the logic elements included in the scientific instrument module 100 may be implemented by one or more computing devices programmed with instructions that cause one or more processing devices of a computing device to perform a set of operations associated with one or more of those devices. In certain embodiments, a logic element may include one or more non-temporary computer-readable media, which, when executed by one or more processing devices of the computing device, have instructions that cause one or more of the computing devices to perform the set of operations associated with them. As used herein, the term “module” may refer to a collection of one or more logic elements that together perform a module and associated functions. Different logic elements within a module may take the same form or different forms. For example, some logic within a module may be implemented by programmed general-purpose processing devices, while other logic within a module may be implemented by application-specific integrated circuits (ASICs). In another example, different logic elements within a module may be associated with different sets of instructions executed by one or more processing devices. A module may not contain all of the logic elements depicted in the associated drawings; for example, a module may contain a subset of the logic elements depicted in the associated drawings when the module performs a subset of the operations considered herein by reference to that module.

[0026] In various embodiments, scientific instruments corresponding to the scientific instrument module 100 can be used. In various aspects, the scientific instrument may be any suitable computerized device capable of electronically measuring scientific, clinical, or research-related properties, characteristics, or attributes of an analytical specimen (e.g., a known or unknown mixture, compound, or substance aggregate). In a non-limiting example, the scientific instrument may be an electron microscope.

[0027] The first logic 102 can determine how to excite one or more magnetic immersion fields to modify the electron trajectory. For example, modification or bending of the electron flow trajectory can be achieved by using a Lorentz force with variable excitations measured in ampere-turns, applied to one or more magnetic immersion lenses or magnetic coils in the electron microscope. Thus, the desired amount of reduction (e.g., zoom out) can be determined based on a given value of ampere-turns and the electron landing energy. The first logic 102 can then be made to apply an appropriate magnetic immersion field to the constituent hardware of the electron microscope.

[0028] The second logic 104 may perform one or more image corrections on the diffraction pattern generated by the modification of electron orbitals. For example, for a given value of ampere-turns, the diffraction pattern is rotated by a given amount of magnetic immersion field. Therefore, rotation correction can be applied to the image of the diffraction pattern based on the applied value of ampere-turns and the acceleration voltage to generate a rotation-corrected and non-magnified diffraction pattern.

[0029] Figure 2 is a flowchart of a computer implementation method 200 according to one or more embodiments described herein. The operation of the computer implementation method 200 can perform any preferred operation by using it in any preferred configuration (for example, it can be performed by any of the various modules, computing devices, or graphical user interfaces described in Figures 1, 7, 8, 9, and 10, or by using them in combination). Although each operation is illustrated once in a specific order in Figure 2, this operation can be preferably reordered or repeated as desired (for example, different operations to be performed can be performed in parallel as appropriate).

[0030] In 202, a first operation can be performed. For example, the first logic 102 of the scientific instrument module 100 may perform the operation of 202. The first operation may include diffracting electrons through an analysis sample by an electron microscope.

[0031] In 204, a second operation can be performed. For example, the first logic 102 of the scientific instrument module 100 may perform the operation in 204. The second operation may include determining the value of ampere-turns to apply to the magnetic immersion field, and then applying the magnetic immersion field to the electron flow using the constituent hardware of the electron microscope.

[0032] In 206, a third operation can be performed. For example, the second logic 104 of the scientific instrument module 100 may perform the operation in 206. The third operation may include applying digital rotational correction to the diffraction pattern based on the applied ampere-turns and the accelerating voltage used by the electron microscope.

[0033] Figure 3 shows a block diagram of an exemplary, non-limiting scientific instrument that can facilitate magnification control of an electron microscope according to one or more embodiments described herein. As shown, the scientific instrument 302 may include an electron microscope 306.

[0034] In various embodiments, the electron microscope 306 may be any suitable electron microscope. In various examples, the electron microscope 306 may be equipped with any suitable configuration hardware 324 for generating electron microscope images and generating magnetic immersion fields. In various cases, the electron microscope 306 may be equipped with a scanning electron microscope capable of measuring or determining the surface shape of an analytical sample or a double-beam microscope. In another non-limiting example, the electron microscope 306 may be equipped with a transmission electron microscope capable of measuring or determining the internal structure details of an analytical sample. Furthermore, in a non-limiting example, the electron microscope 306 may be equipped with any suitable type of charge-particle microscope (e.g., a microscope that uses a beam of non-electron ions to capture images). Further examples of the electron microscope 306 include, but are not limited to, energy-dispersive spectroscopy, electron energy loss spectroscopy, and electron backscatter diffraction spectroscopy.

[0035] In any case, given an analysis sample, the electron microscope 306 can generate an input image of the whole or a part of the analysis sample by diffracting the electron stream through the analysis sample onto the electron detector.

[0036] In various embodiments, the scientific instrument 302 may be equipped with a reduction system 308. In various cases, the reduction system 308 can facilitate effective magnification / reduction control of the electron microscope 306.

[0037] In various embodiments, the reduction system 308 may include a processor 310 (e.g., a computer processing unit, a microprocessor) and a non-temporary computer-readable memory 312 connected or coupled to the processor 310 in an operable, operational, or communicative manner. The non-temporary computer-readable memory 312 can store computer-executable instructions that, when executed by the processor 310, cause the processor 310 or other components of the reduction system 308 (e.g., a trajectory correction component 316 and / or an image correction component 314) to perform one or more operations. In various embodiments, the non-temporary computer-readable memory 312 can store computer-executable components (e.g., a trajectory correction component 316 and / or an image correction component 314), and the processor 310 can execute the computer-executable components.

[0038] In various embodiments, the reduction system 308 may include a trajectory correction component 316. In various aspects, the trajectory correction component 316 can determine the value of ampere-turns to excite one or more magnetic immersion fields and generate a desired reduction amount. For example, the trajectory correction component 316 may receive a command from an entity such as a user operating the electron microscope 306 to reduce (e.g., zoom out) an image of the diffraction pattern by a specific amount. Since the electron response to the magnetic field is predictable, the value of ampere-turns can be determined based on factors such as electron landing energy, the geometry of the magnetic pole pieces, and the electron beam energy of the electron beam train. In the simple case, the landing electron energy is numerically equal to the accelerating voltage. When a booster tube system is used, variations in the electron beam energy due to relative position within the column can be taken into account.

[0039] Once determined, the trajectory correction component 316 can cause the configuration hardware 324 of the electron microscope 306 to apply a magnetic immersion field at a given ampere-turn value. The magnetic immersion field can correct or bend the electron trajectories, causing electrons or diffraction spots that might otherwise miss the electron detector of the electron microscope 306 to collide with the detector instead, thereby capturing a more complete version of the diffraction pattern. This makes it possible for the electron detector to capture features that would otherwise be uncapable due to the camera length, such as higher-order Laue zone (HOLZ) rings. Figure 9, described in detail below, shows a graph illustrating the ampere-turn values ​​to apply to achieve a particular reduction amount.

[0040] Similarly, the trajectory correction component 316 can receive the effective camera long distance and determine the value of ampere-turns used to reduce the diffraction pattern to approximate the captured diffraction pattern using its physical camera length. Through this application of the magnetic immersion field, the effective zoom or camera length of the electron microscope can be controlled without moving the electron detector. Figure 8, described in detail below, shows a graph illustrating the value of ampere-turns applied to achieve a specific amount of camera length. Thus, the electron detector can be positioned at a greater camera length to enable higher magnification and better precision processing, while the reduction provided by the application of the magnetic immersion field offers the advantages of shorter camera lengths, more reciprocal space, and capturing a larger portion of the overall diffraction pattern.

[0041] In various embodiments, the reduction system 308 may include an image correction component 314. In various aspects, the image correction component 314 can generate an image of the diffraction pattern captured by the electron detector of the electron microscope 306. For example, it can create a digital image showing the diffraction pattern upon impact with the electron detector.

[0042] In various embodiments, the image correction component 314 can further correct distortion or deviation of the diffraction pattern image generated using the electron microscope 306. In some cases, the application of a magnetic immersion field may cause deviations such as rotation of the diffraction pattern, and thus cause deviations in the image generated by the image correction component 314. For example, the application of a magnetic immersion field may cause rotation of the diffraction pattern, which is then reflected in the image of the diffraction pattern. This can cause problems during analysis because the diffraction spots in the image are not in the correct position relative to the part of the analysis sample that caused the diffraction spots.

[0043] Therefore, the image correction component 314 can correct rotation by applying one or more digital transformations. For example, given values ​​of ampere-turns and electron beam landing energy, the diffraction pattern is rotated by a given amount. Thus, considering the value of ampere-turns and electron landing energy, the image correction component 314 can apply an appropriate amount of inversion to correct the image. In another embodiment, the image correction component 314 can determine an appropriate amount of inversion based on the initial diffraction pattern. For example, first, an enlarged (e.g., without a magnetic immersion field applied) diffraction pattern image can be generated. The image correction component 314 can recognize the relative orientation of various diffraction spots in the image. Then, when a reduced diffraction pattern image is provided, the image correction component 314 can apply an amount of inversion such that the relative orientation of various diffraction spots is the same in both the enlarged and reduced diffraction pattern images. In this way, rotation of the diffraction pattern image can be corrected, and thus a more accurate representation of the sample is provided.

[0044] Figure 4 shows a diagram of an electron microscope without magnetic field reduction according to one or more embodiments described herein.

[0045] As shown, the electron microscope 400 includes a final lens 402 that directs electrons toward the sample 404 along direction 410. The electrons are diffracted by the sample 404, creating a diffraction pattern 408. However, as shown, the outer edges of the diffracted electrons 407 extend beyond the edge of the electron detector 406. Therefore, the outer region of the diffraction pattern 408 is not captured by the detector 406, thus producing an incomplete diffraction pattern image. The electron detector 406 could be positioned closer to the sample 404 to capture more of the diffraction pattern, but this would reduce the camera length and thus cause the problems associated with the short camera length discussed earlier above.

[0046] Figure 5 shows a diagram of an electron microscope using magnetic field reduction according to one or more embodiments described herein.

[0047] As explained above in relation to Figures 1-3, a magnetic immersion field can be applied to electrons diffracted through sample 404. As shown in Figure 5, the diffraction pattern 508 is stronger due to the use of the magnetic immersion field, and therefore all diffracted electrons 407 collide with the electron detector 406. Thus, the entire diffraction pattern is captured. As explained above, this has a reduction effect, producing a diffraction pattern image that appears zoomed out without the need to physically change the camera length (e.g., the relative position of the electron detector 406). Furthermore, the electron detector 406 is positioned in the same location as in Figure 4. Thus, Figure 5 utilizes the same camera length and therefore the same reciprocal resolution while capturing the entire diffraction pattern.

[0048] Figure 6 shows a diagram of a magnetic immersion field applied to an electron diffraction stream according to one or more embodiments described herein.

[0049] As shown, an additional magnetic immersion field 602 is applied to the diffracted electrons to generate a diffraction pattern 508. A magnetic focusing field 601 is used to obtain the smallest possible beam spot in the sample 404. Arrows 604 indicate the main direction in which the electron beam is moving. In one or more embodiments, the magnetic immersion field 602 may be generated using one or more magnetic immersion lenses in the electron microscope. In another embodiment, the electron microscope may comprise one or more magnetic coils specifically arranged to generate a magnetic immersion field. As described above in relation to Figures 1 to 3, the magnetic immersion field 602 can be applied to achieve a specific reduction amount. For example, an entity operating the electron microscope may specify the reduction amount to apply. The trajectory correction component 316 can then determine the value of ampere-turns to apply based on the electron's landing energy and the specified reduction amount. Similarly, as described above in relation to Figures 1 to 3, the magnetic immersion field 602 can be applied to achieve a specific camera length. For example, an entity operating the electron microscope may specify the camera length to utilize. Next, the trajectory correction component 316 can determine the ampere-turn value to apply based on the electron's landing energy and the specified camera length.

[0050] Figure 7 shows a flowchart of diffraction pattern images using magnetic field reduction according to one or more embodiments described herein.

[0051] As shown, Image 702 shows the diffraction pattern without magnetic field reduction (e.g., a magnification of 1). Images 704, 706, and 708 show the effect of increased reduction (e.g., a magnetic immersion field with an increased number of ampere-turns). As illustrated, as the value of ampere-turns increases, the diffraction pattern is reduced or zoomed out, so that in Images 706 and 708, higher-order Laue zone rings become visible at the outer edge of the diffraction pattern. These rings were not captured in Images 702 and 704 due to some electrons lacking electron detectors.

[0052] Additionally, as shown, as the ampere-turn value increases, the diffraction pattern rotates counterclockwise in this example. Therefore, to correct this rotational deviation, the image correction component 314 can apply a clockwise rotation correction so that the relative orientation of images 702 and 708 is the same when output to the entity operating the electron microscope. Furthermore, in one or more embodiments, the image correction component 314 can apply one or more digital transformations to correct geometric deviations, as described above in relation to Figure 3.

[0053] Figure 8 shows Graph 800, which illustrates the relationship between the ampere-turn value of the magnetic immersion field and the effective camera length in diffraction pattern images generated according to one or more embodiments described herein. The y-axis of Graph 800 represents the effective camera length of the electron microscope, and the x-axis of Graph 800 represents the excitation of the additional immersion field utilized. Data points are shown for both the 10 keV and 30 keV settings of the electron microscope. As shown, for the data collected in Figure 8, the actual camera length (e.g., the physical distance to the electron detector) is 35 mm. As the ampere-turn value increases, the effective camera length decreases due to the reduction effect, starting from approximately 1000 ampere-turns. Therefore, given an effective camera length value by the entity operating the electron microscope, the trajectory correction component 316 can use Graph 800 and the electron microscope power setting to determine an appropriate value for ampere-turns.

[0054] Figure 9 shows Graph 900, which illustrates the relationship between the ampere-turn value of the magnetic immersion field and the magnification of the diffraction pattern image generated according to one or more embodiments described herein. The y-axis of Graph 900 represents the magnification of the electron microscope, and the x-axis of Graph 900 represents the value of ampere-turns used. Data points are shown for both 10 keV and 30 keV settings of the electron microscope, both practically and in simulation. As shown, the magnification level decreases as the value of ampere-turns increases. Therefore, given a magnification level by an entity operating the electron microscope, the orbital correction component 316 can use Graph 900 and the power setting of the electron microscope to determine an appropriate value of ampere-turns.

[0055] Figure 10 shows graph 1000 illustrating the relationship between the lateral resolution and excitation of an additional magnetic immersion field according to one or more embodiments described herein. The y-axis of graph 1000 represents the lateral resolution and inverse space in nm units, and the x-axis of graph 1000 represents the excitation of the additional immersion field being utilized. As shown, when operating in 10 keV mode, the lateral resolution can be improved from approximately 1.4 nm to approximately 0.35 nm while using the additional immersion field. When operating in 30 keV mode, the lateral resolution can be improved from 0.7 nm to 0.2 nm.

[0056] Figure 11 shows a flowchart of an exemplary, non-limiting computer implementation method 1100 that can facilitate reduction in an electron microscope, according to one or more embodiments described herein.

[0057] In various embodiments, operation 1102 may include diffracting electrons through the analysis sample by an electron microscope (e.g., electron microscope 306). For example, the electron microscope may accelerate an electron beam toward the sample, which then passes through the sample, is diffracted, and creates a diffraction spot.

[0058] In various embodiments, operation 1104 may include correcting the trajectory of electrons on the electron detector of the electron microscope. For example, as described above in relation to Figures 1-3, the entity operating the electron microscope may specify the effective camera length or magnification to be used based on the electron landing energy and a specified camera length and / or magnification, and a computer-executable component such as the trajectory correction component 316 may determine the value of ampere-turns to be used in the magnetic immersion field to achieve the specified camera length or reduction. As described above in relation to Figures 8 and 9, an excitation of about 1000-4000 ampere-turns can be used to provide effective reduction. The configuration hardware of the electron microscope 306 can then apply the magnetic immersion field to correct the trajectory of electrons diffracted through the sample and generate the desired effective camera length or magnification. Furthermore, some of the diffraction spots in the diffraction pattern may normally miss the electron detector due to the physical camera length. Therefore, by correcting the trajectory of one or more electrons, all or a larger portion of the diffraction spot may collide with the electron detector, thus capturing a more complete diffraction pattern.

[0059] In various embodiments, operation 1106 may include correcting the image deviation of the diffraction pattern from the expected form by a device (e.g., image correction component 314). For example, as described above in relation to Figures 1 to 7, the application of a magnetic immersion field may cause rotation of the diffraction pattern. Therefore, considering the electron landing energy and the applied ampere-turn values, the image correction component 314 may apply a digital transformation to the image to correct the rotation.

[0060] The advantages of the system described herein, and / or the corresponding computer implementation method and / or computer program product, may be its ability to allow reduction and adjustment of the effective camera length without changing the physical position of the electron detector in the electron microscope. This provides the ability to easily change the magnification, thus enabling the advantages of both higher and lower camera lengths, and providing the flexibility to easily change the magnification without adjusting the physical components. This can enable faster performance of multiple experiments because no physical modification of the electron microscope is required to capture diffraction pattern images at different camera lengths. In addition, as described above in relation to Figure 10, this can enable improved resolution, allowing for clear imaging of smaller objects than previously possible. Furthermore, by applying one or more post-processing image techniques, any expected deviations in the diffraction pattern that may arise due to the application of the magnetic immersion field can be corrected, thus producing accurate and representative diffraction pattern images.

[0061] In various examples, machine learning algorithms or models can be implemented in any preferred manner to facilitate the preferred embodiments described herein. To facilitate some of the above embodiments of machine learning in various embodiments, consider the following considerations of artificial intelligence (AI). The various embodiments described herein can use artificial intelligence to facilitate the automation of one or more functions or features. Components can use various AI-based schemes to implement the various embodiments / examples disclosed herein. To provide or assist in many of the decisions described herein (e.g., decisions, confirmations, inferences, calculations, predictions, forecasts, estimations, derivations, foresights, detections, computations), components described herein can examine all or subsets of data to which access is permitted and infer or determine the state of a system or environment from a set of observations obtained through events or data. Decisions can be used to identify specific situations or actions, or, for example, to generate probability distributions between states. Decisions can be probabilistic, i.e., calculations of probability distributions for states of interest based on considerations of data and events. Decisions may also refer to techniques used to construct higher-level events from a set of events or data.

[0062] Such decisions may generate new events or actions from observed or memorized sets of event data, regardless of whether those events are temporally close and correlated, or whether the events and data are derived from one or more event and data sources. The components disclosed herein include various classification schemes or systems (e.g., support vector machines, neural networks, expert systems, Bayesian belief networks, fuzzy logic, data fusion engines, etc.) that are explicitly trained (e.g., via training data) and implicitly trained (e.g., via observation of behavior, preferences, historical information, external information, etc.) that can be used in relation to performing actions that are automatically or determined in relation to the claimed subject. Thus, many functions, actions, or decisions can be automatically learned and performed using classification schemes or systems.

[0063] A classifier can map an input attribute vector, z=(z1,z2,z3,z4,zn), to a degree of confidence that the input belongs to a class, such as f(z)=confidence(class). Such classifications can use probabilistic or statistical analysis (e.g., considering the usefulness and cost of the analysis) to automatically determine the actions to take. A support vector machine (SVM) is one example of a classifier that can be used. An SVM works by finding a hypersurface in the input space, which attempts to separate trigger criteria from non-trigger events. Intuitively, this allows for the correct classification of test data that is similar to but not identical to the training data. Other direct and indirect model classification approaches include, for example, Naive Bayes, Bayesian networks, decision trees, neuronetworks, fuzzy logic models, or probabilistic classification models that offer various independence patterns, all of which can be used. Classifications used herein also include statistical regressions used to develop priority models.

[0064] To provide additional context for the various embodiments described herein, Figure 11 and the following discussion are intended to provide a brief and general description of a preferred computing environment 1100 that can implement various embodiments of the embodiments described herein. While the embodiments have been described in the general context of computer executable instructions that can be run on one or more computers, those skilled in the art will recognize that these embodiments can also be implemented in combination with other program modules or as a combination of hardware and software.

[0065] Generally, a program module includes routines, programs, components, data structures, etc., that perform a specific task or implement a specific abstract data type. Furthermore, those skilled in the art will understand that the methods of the present invention can be used operationally connected to one or more related devices, such as single-processor or multi-processor computer systems, minicomputers, mainframe computers, Internet of Things (IoT) devices, distributed computing systems, as well as personal computers, portable computing devices, microprocessor-based electronic devices, and programmable consumer electronic devices.

[0066] The embodiments described herein can also be implemented in a distributed computing environment in which specific tasks are performed by remote processing devices linked via a communication network. In a distributed computing environment, program modules can be located on both local and remote memory storage devices.

[0067] Computing devices typically include a variety of media, which may include computer-readable storage media, machine-readable storage media, or communication media, and these two terms are used herein to distinguish them from one another as follows: Computer-readable storage media or machine-readable storage media can be any available storage media that can be accessed by a computer, and include both volatile and non-volatile media, removable and non-removable media. By example, but not by limitation, computer-readable storage media or machine-readable storage media can be implemented in relation to any method or technique for storing information such as computer-readable or machine-readable instructions, program modules, structured data, or unstructured data.

[0068] Computer-readable storage media may include, but are not limited to, random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technologies, compact disk read-only memory (CD-ROM), digital versatile disk (DVD), Blu-ray disc (BD) or other optical disk storage devices, magnetic cassettes, magnetic tapes, magnetic disk storage devices or other magnetic storage devices, solid-state drives or other solid-state storage devices, or other tangible or non-temporary media that can be used to store desired information. In this regard, the terms “tangible” or “non-temporary” as used herein for storage, memory, or computer-readable media are understood to exclude only the temporary signals themselves that propagate as modifiers, and not to waive any rights to all standard storage, memory, or computer-readable media that do not merely propagate temporary signals themselves.

[0069] A computer-readable storage medium can be accessed by one or more local or remote computing devices, for example, through access requests, queries, or other data retrieval protocols, and various operations can be performed on the information stored on that medium.

[0070] Communication media typically include any information distribution or transmission medium that embodies computer-readable instructions, data structures, program modules, or other structured or unstructured data in data signals, such as modulated data signals, such as carrier waves or other transmission mechanisms. The terms “modulated data signal” or “signal” mean a signal in which one or more of its characteristics are set or modified to encode information within one or more signals. By example, but not limited to, communication media include wired media such as wired networks or direct wired connections, as well as wireless media such as acoustic, RF, infrared, and other wireless media.

[0071] Referring again to Figure 12, an exemplary environment 1200 for implementing various embodiments of the embodiments described herein includes a computer 1202, a processing unit 1204, a system memory 1206, and a system bus 1208. The system bus 1208 connects system components, including but not limited to the system memory 1206, to the processing unit 1204. The processing unit 1204 can be any of various commercially available processors. Dual microprocessors and other multiprocessor architectures can also be used as the processing unit 1204.

[0072] The system bus 1208 can be one of several types of bus structures that can further interconnect with memory buses, peripheral buses, and local buses (with or without a memory controller) using any of various commercially available bus architectures. The system memory 1206 includes ROM 1212 and RAM 1212. The basic input / output system (BIOS) can store information in non-volatile memory such as ROM, erasable programmable read-only memory (EPROM), and EEPROM, and the BIOS includes basic routines that help transfer information between elements within the computer 1202, such as during startup. RAM 1212 may also include high-speed RAM such as static RAM for caching data.

[0073] The computer 1202 further includes an internal hard disk drive (HDD) 1214 (e.g., EIDE, SATA), one or more external storage devices 1216 (e.g., magnetic floppy disk drive (FDD) 1216, memory stick or flash drive reader, memory card reader, etc.), and a drive 1220 capable of reading from or writing to disks 1222 such as CD-ROMs, DVDs, BDs, etc., e.g., a solid-state drive, optical disk drive, etc. Alternatively, if a solid-state drive is included, disks 1222 are not included unless otherwise specified. Although the internal HDD 1214 is shown as being located inside the computer 1202, the internal HDD 1214 may also be configured for external use in a suitable chassis (not shown). Additionally, although not shown in environment 1200, a solid-state drive (SSD) may be used in addition to or instead of the HDD 1214. The HDD 1214, external storage device 1216, and drive 1220 are connectable to the system bus 1208 via the HDD interface 1224, external storage interface 1226, and drive interface 1228, respectively. The interface 1224 for external drive implementation may include at least one or both of the Universal Serial Bus (USB) and the Institute of Electrical and Electronics Engineers (IEEE) 1294 interface technology. Other external drive connection technologies are considered within the embodiments described herein.

[0074] Drives and their associated computer-readable storage media provide non-volatile storage such as data, data structures, and computer-executable instructions. In the case of computer 1202, drives and storage media correspond to the storage of any data in a suitable digital format. While the above description of computer-readable storage media refers to each type of storage device, it should be understood by those skilled in the art that other types of computer-readable storage media, whether currently existing or to be developed in the future, may also be used in the exemplary operating environment, and furthermore, any such storage media may contain computer-executable instructions for performing the methods described herein.

[0075] The drive and RAM 1212 can store many program modules, including an operating system 1230, one or more application programs 1232, other program modules 1234, and program data 1236. The operating system, applications, modules, or data, in whole or in part, can also be cached in RAM 1212. The systems and methods described herein can be implemented using various commercially available operating systems or combinations of operating systems.

[0076] Computer 1202 may optionally include emulation techniques. For example, a hypervisor (not shown) or other intermediary may emulate the hardware environment of operating system 1230, and the emulated hardware may optionally differ from the hardware shown in Figure 12. In such embodiments, operating system 1230 may include one VM among several virtual machines (VMs) hosted on computer 1202. Furthermore, operating system 1230 may provide application 1232 with a runtime environment such as a Java runtime environment or a .NET framework. The runtime environment is a consistent execution environment that enables application 1232 to run on any operating system that includes the runtime environment. Similarly, operating system 1230 may support containers, and application 1232 may take the form of a container, which is a lightweight, standalone, executable package of software including, for example, code, runtime, system tools, system libraries, and application configuration.

[0077] Furthermore, computer 1202 can be enabled with security modules such as a trusted processing module (TPM). For example, in a TPM, a boot component is hashed within a time limit and waits for the result to match a secure value before loading the next boot component. This process can be applied at any layer in the code execution stack of computer 1202, for example, at the application execution level or the operating system (OS) kernel level, thereby enabling security at any level of code execution.

[0078] The user can input instructions and information to the computer 1202 via one or more wired / wireless input devices, such as a keyboard 1238, a touchscreen 1240, a mouse 1242, or other point devices. Other input devices (not shown) may include a microphone, an infrared (IR) remote control, a radio frequency (RF) remote control, or other remote control, a joystick, a virtual reality controller or virtual reality headset, a gamepad, a stylus pen, an image input device such as a camera, a gesture sensor input device, a visual-motion sensor input device, an emotion or face detection device, or a biometric input device such as a fingerprint or iris scanner. These and other input devices are often connected to the processing unit 1204 via an input device interface 1244 that can be coupled to the system bus 1208, but can also be connected via other interfaces such as a parallel port, an IEEE 1294 serial port, a game port, a USB port, an IR interface, or a BLUETOOTH® interface.

[0079] Monitor 1246 or other types of display devices can also be connected to the system bus 1208 via an interface such as a video adapter 1248. In addition to monitor 1246, a computer typically includes other peripheral output devices (not shown), such as speakers and printers.

[0080] Computer 1202 can operate in a network environment using logic connections via wired or wireless communication to one or more remote computers, such as remote computers 1250. The remote computers 1250 can be workstations, server computers, routers, personal computers, portable computers, microprocessor-based entertainment devices, peer devices, or other common network nodes, typically including many or all of the elements described with respect to computer 1202, but for brevity, only the memory / storage device 1252 is shown. The illustrated logic connections include wired / wireless connections to a local area network (LAN) 1254 or a wide area network (e.g., a wide area network (WAN) 1256). Such LAN and WAN networking environments are common in offices and enterprises, facilitating enterprise-scale computer networks such as intranets, all of which can connect to global communication networks such as the Internet.

[0081] When used in a LAN networking environment, computer 1202 can connect to local network 1254 via a wired or wireless network interface or adapter 1258. Adapter 1258 can facilitate wired or wireless communication to LAN 1254, and LAN may also include a wireless access point (AP) placed on it to communicate with adapter 1258 in wireless mode.

[0082] When used in a WAN networking environment, computer 1202 may include a modem 1260 or connect to a communication server on the WAN 1256 via other means for establishing communication over the WAN 1256, such as the Internet. The modem 1260 may be internal or external and wired or wireless and may connect to the system bus 1208 via an input device interface 1244. In a networked environment, program modules shown with respect to computer 1202 or a part thereof may be stored in a remote memory / storage device 1252. It will be understood that the illustrated network connection is illustrative and other means for establishing communication links between computers may be used.

[0083] When used in either a LAN or WAN network environment, computer 1202 can access a cloud storage system or other network-based storage system, such as a network virtual machine that provides one or more modes of storing or processing information, in addition to, or instead of, the external storage device 1216 described above. Generally, the connection between computer 1202 and the cloud storage system can be established via LAN 1254 or WAN 1256, for example, by an adapter 1258 or modem 1260, respectively. When computer 1202 is connected to the relevant cloud storage system, the external storage interface 1226 can manage the storage provided by the cloud storage system, similar to other types of external storage devices, with the assistance of the adapter 1258 or modem 1260. For example, the external storage interface 1226 can be configured to provide access to the cloud storage sources as if those sources were physically connected to computer 1202.

[0084] Computer 1202 may be capable of communicating with any wireless device or entity configured to operate wirelessly, such as any device or location associated with a printer, scanner, desktop or portable computer, portable data assistant, communications satellite, wireless discoverable tag (e.g., kiosk, newsstand, product shelf, etc.), and telephone. This may include Wireless Fidelity (Wi-Fi) and Bluetooth® wireless technologies. Thus, the communication may be a predefined structure similar to existing networks, or simply ad-hoc communication between at least two devices.

[0085] Various non-limiting forms are illustrated in the following examples.

[0086] Example 1: A system comprising an electron microscope that diffracts electrons through an analytical sample and corrects the trajectory of electrons on an electron detector using one or more magnetic immersion fields.

[0087] Example 2: A system according to any of the prior embodiments, further comprising a memory for storing computer executable components and a processor for executing computer executable components stored in the memory, wherein the computer executable components include an image correction component that generates an image of the diffraction pattern of electrons colliding with an electron detector.

[0088] Example 3: The modification comprises exciting one or more magnetic immersion fields by a given ampere-turn value, and the computer-executable component further comprises a trajectory correction component that determines a given ampere-turn value, so that, as a result, the trajectory of an electron is directed relative to an electron detector by a given electron landing energy, according to any of the prior embodiments.

[0089] Example 4: The system according to any of the prior embodiments, wherein one or more of the electrons' initial orbitals before modification are located outside the region of the electron detector.

[0090] Example 5: The system according to any of the prior embodiments, wherein the image correction component further performs one or more digital corrections to correct the image deviation of the diffraction pattern.

[0091] Example 6: The system according to any of the prior examples, wherein the electron microscope comprises at least one of a scanning electron microscope or a dual-beam microscope.

[0092] Example 7: The system according to any of the prior embodiments, wherein one or more magnetic immersion fields are generated by one or more magnetic immersion lenses or one or more magnetic coils.

[0093] In various embodiments, any combination of Examples 1 to 7 can be implemented.

[0094] Example 8: A method comprising diffracting electrons through an analytical sample using an electron microscope and correcting the trajectory of electrons on the electron detector of the electron microscope by one or more magnetic immersion fields.

[0095] Example 9: The method according to any of the prior embodiments, further comprising generating an image of the diffraction pattern of electrons colliding with an electron detector by a device operably coupled to a processor.

[0096] Example 10: The method according to any of the prior examples, wherein the modification includes exciting one or more magnetic immersion fields by a given ampere-turn value.

[0097] Example 11: The method according to any of the prior embodiments, further comprising determining a given ampere-turn value by the device such that, at a given electron landing energy, the electron trajectory is directed relative to the electron detector.

[0098] Example 12: The method according to any of the prior embodiments, wherein one or more of the electrons' initial orbitals before modification are located outside the region of the electron detector.

[0099] Example 13: The method according to any of the prior embodiments, further comprising correcting the image deviation of the diffraction pattern by a device.

[0100] Example 14: The method according to any of the prior embodiments, wherein one or more magnetic immersion fields are generated by one or more magnetic immersion lenses or one or more magnetic coils.

[0101] In various embodiments, any combination of Examples 8 to 14 can be implemented.

[0102] Example 15: A computer program product comprising a non-temporary computer-readable memory in which program instructions are embodied, wherein the program instructions are executable by the processor to cause electrons to diffract through an analysis sample using an electron microscope, and to correct the trajectory of electrons on the electron detector of the electron microscope using one or more magnetic immersion fields.

[0103] Example 16: A computer program product according to any of the prior embodiments, wherein the program instructions are further executable by the processor, causing the processor to generate an image of the diffraction pattern of electrons colliding with an electron detector.

[0104] Example 17: A computer program product according to any of the prior embodiments, the modification comprising exciting one or more magnetic immersion fields by a given ampere-turn value, thereby directing the electron trajectory relative to an electron detector at a given electron landing energy.

[0105] Example 18: A computer program product according to any of the prior embodiments, wherein the program instructions are further executable by the processor to cause the processor to correct the image deviation of the diffraction pattern.

[0106] Example 19: A computer program product according to any of the prior embodiments, wherein the electron microscope comprises at least one of a scanning electron microscope or a dual-beam microscope.

[0107] Example 20: A computer program product according to any of the prior embodiments, wherein one or more magnetic immersion fields are generated by one or more magnetic immersion lenses or one or more magnetic coils.

[0108] In various embodiments, any combination of Examples 15 to 20 can be implemented.

[0109] In various embodiments, any combination of Examples 1 to 20 can be implemented.

Claims

1. It is a system, A system comprising an electron microscope that diffracts electrons through an analytical sample and corrects the trajectory of the electrons on an electron detector using one or more magnetic immersion fields.

2. Memory for storing executable components of a computer, The system further comprises a processor that executes the computer executable components stored in the memory, wherein the computer executable components are The system according to claim 1, further comprising an image correction component that generates an image of the diffraction pattern of the electrons colliding with the electron detector.

3. The system according to claim 2, wherein the modification includes exciting one or more magnetic immersion fields by a given ampere-turn value, and the computer-executable component further comprises a trajectory correction component that determines a given ampere-turn value, so that the trajectory of the electron is directed relative to the electron detector by a given electron landing energy.

4. The system according to claim 1, wherein one or more of the initial orbitals of the electrons before modification are located outside the region of the electron detector.

5. The system according to claim 2, wherein the image correction component further performs one or more digital corrections to correct the image deviation of the diffraction pattern.

6. The system according to claim 1, wherein the electron microscope comprises at least one of a scanning electron microscope or a double-beam microscope.

7. The system according to claim 1, wherein the one or more magnetic immersion fields are generated by one or more magnetic immersion lenses or one or more magnetic coils.

8. It is a method, Using an electron microscope, electrons are diffracted through the sample being analyzed, A method comprising correcting the trajectory of electrons on the electron detector of the electron microscope by using one or more magnetic immersion fields.

9. The method according to claim 8, further comprising generating an image of the diffraction pattern of the electrons colliding with the electron detector by a device operably coupled to the processor.

10. The method according to claim 9, wherein the modification includes exciting one or more magnetic immersion fields by a given ampere-turn value.

11. The method according to claim 10, further comprising determining a given ampere-turn value by the device such that the electron's trajectory is directed relative to the electron detector at a given electron landing energy.

12. The method according to claim 8, wherein one or more of the initial orbitals of the electrons before modification are located outside the region of the electron detector.

13. The method according to claim 9, further comprising correcting the image deviation of the diffraction pattern using the device.

14. The method according to claim 8, wherein the one or more magnetic immersion fields are generated by the one or more magnetic immersion lenses or the one or more magnetic coils.

15. A computer program comprising program instructions, The aforementioned program instructions are executable by the processor, and the processor, By using an electron microscope, electrons are diffracted through the analysis sample. One or more magnetic immersion fields are used to correct the trajectory of the electrons on the electron detector of the electron microscope. Computer program.

16. The aforementioned program instruction is given to the processor, The computer program according to claim 15, which is executable by the processor to cause the electrons that collide with the electron detector to generate an image of the diffraction pattern of the electrons.

17. The computer program according to claim 15, wherein the modification includes exciting one or more magnetic immersion fields by a given ampere-turn value, so that the electron trajectory is directed relative to the electron detector with a given electron landing energy.

18. The aforementioned program instruction is given to the processor, The computer program according to claim 16, further executable by the processor to correct the deviation of the diffraction pattern image.

19. The computer program according to claim 15, wherein the electron microscope comprises at least one of a scanning electron microscope or a double-beam microscope.

20. The computer program according to claim 15, wherein the one or more magnetic immersion fields are generated by one or more magnetic immersion lenses or one or more magnetic coils.

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