Filter device

Abstract

This invention provides a filter device that reduces foreign matter accumulation in check valves, thereby suppressing a decrease in their lifespan. [Solution] The filter device 1 is installed in a flow path 78 in which the direction of gas flow alternately switches, and filters foreign matter from the gas. It has first and second ports 68, 30 through which gas enters and exits, first and second flow paths 5, 6 connected in parallel between these ports, a first check valve 40 installed in the first flow path that allows gas to flow from the first port to the second port, and a first filter module 20 that filters foreign matter from the gas flowing through the first flow path, a second check valve 65 installed in the second flow path that allows gas to flow from the second port to the first port, and a second filter module 60 that filters foreign matter from the gas flowing through the second flow path. The first filter module is located on the first port side of the first check valve in the first flow path, and the second filter module is located on the second port side of the second check valve in the second flow path.

Description

Technical Field

[0001] The present invention relates to a filter device that is attached to a flow path in which the gas flow direction alternates, and filters foreign substances such as dust from the gas flowing through the flow path.

Background Art

[0002] [[ID={11]] A filter device that is attached to a flow path in which the gas flow direction alternates, and filters foreign substances such as dust from the bidirectional gas flowing through the flow path by filters provided corresponding to each flow direction, is already known as disclosed in, for example, Patent Document 1.

[0003] By the way, the filter device described in this Patent Document 1 has two ports through which gas enters and exits, two flow paths connected in parallel between these ports, and check valves and filters provided in these two flow paths. However, in each flow path, since the filter is arranged on the downstream side of the check valve, foreign substances are likely to accumulate in the check valve, which may reduce the life of the filter device.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] Therefore, the technical problem of the present invention is to suppress the accumulation of foreign substances in the check valve in a filter device that is attached to a flow path in which the gas flow direction alternates and filters foreign substances such as dust from the gas flowing through the flow path, and to improve the product life.

Means for Solving the Problems

[0006] To solve the above problems, the filter device according to the present invention is a filter device that is attached to a flow path in which the direction of gas flow alternately switches, and filters foreign matter such as dust from gas flowing through the flow path, wherein the filter device has a first port and a second port through which gas enters and exits, and a first flow path and a second flow path connected in parallel between the first and second ports, the first flow path is provided with a first check valve that allows the flow of gas from the first port to the second port and prevents the flow of gas from the second port to the first port, and a first filter module for filtering foreign matter from gas flowing through the first flow path, the second flow path is provided with a second check valve that allows the flow of gas from the second port to the first port and prevents the flow of gas from the first port to the second port, and a second filter module for filtering foreign matter from gas flowing through the second flow path, the first filter module is arranged between the first port and the first check valve in the first flow path, and the second filter module is arranged between the second port and the second check valve in the second flow path.

[0007] In the filter device, preferably, the first and second filter modules each have a filter element for filtering foreign matter from a gas, an inlet for introducing gas into the filter element, and an outlet for discharging the gas from which foreign matter has been filtered by the filter element. The filter device includes a first pipeline connecting the outlet of the first filter module to the second port and equipped with a first check valve, a second pipeline connecting the outlet of the second filter module to the first port and equipped with a second check valve, and in the second pipeline, the first port and the second check valve The first filter module has a first communication channel connected to the inlet of the first filter module from between the check valve and the first port, and a second communication channel connected to the inlet of the second filter module from between the second port and the first check valve in the first pipeline, wherein the first channel is formed by a series of channels that sequentially pass from the first port through the first communication channel, the first filter module, and the first pipeline to the second port, and the second channel is formed by a series of channels that sequentially pass from the second port through the second communication channel, the second filter module, and the second pipeline to the first port.

[0008] In this case, more preferably, the filter device has one end and the other end at both ends in the axial direction, and comprises a first body having a first conduit and a first communication channel formed inside that extend linearly along the axial direction, and a second body having a second conduit and a second communication channel formed inside that extend linearly along the axial direction, wherein the first filter module is detachably attached to the one end of the first body, the second port is attached to the other end of the first body, the second filter module is detachably attached to the other end of the second body, the first port is attached to the one end of the second body, and the first communication channel and the second communication channel extend parallel to each other and in a direction perpendicular to the first conduit and the second conduit.

[0009] In this case, more preferably, the first and second filter modules each include a filter element formed in a cylindrical shape extending along the axial direction and having an internal space partitioned by an inner circumferential surface, and a bottomed, hollow filter case that houses the filter element and forms an annular space on the outer circumferential surface of the filter element, wherein in the first filter module, an opening in the internal space of the filter element that opens to the first body side is formed as the outlet, and an opening in the annular space that opens to the first body side is formed as the inlet, and in the second filter module, an opening in the internal space of the filter element that opens to the second body side is formed as the outlet, and an opening in the annular space that opens to the second body side is formed as the inlet. Furthermore, more preferably, the filter case is made of a transparent material so that the filter element can be seen from the outside through the filter case.

[0010] Furthermore, in the filter device, more preferably, the filter device comprises a first filter block consisting of a first body, a first filter module, and a second port extending along the axial direction, and a second filter block consisting of a second body, a second filter module, and a first port extending along the axial direction, wherein the first communication channel is formed in a first projection protruding from the side surface of the first body and opens at the tip of the first projection, and the second communication channel is formed in a second projection protruding from the side surface of the second body, An opening is provided at the tip of the second projection, and a second engaging recess is provided on the side surface of the first body, which communicates with the first conduit and engages with the second projection, and the second communication channel communicates with the first conduit through the second engaging recess, and a first engaging recess is provided on the side surface of the second body, which communicates with the second conduit and engages with the first projection, and the first communication channel communicates with the second conduit through the first engaging recess, and the first and second filter blocks are detachably connected to each other with the first and second projections engaged with the first and second engaging recesses.

[0011] Furthermore, in the filter device, more preferably, a first insertion recess and a second insertion recess into which the first and second filter modules are inserted are provided at one end of the first body and the other end of the second body, and cylindrical first connecting members and second connecting members having through holes extending along the axial direction are housed at the bottom of the first and second insertion recesses, the first connecting member forming a first annular flow path between its outer circumferential surface and the inner circumferential surface of the first insertion recess, the first communication flow path and the inlet of the first filter module are in communication through the first annular flow path, and one end of the first connecting member The end of the second connecting member is fitted into the outlet of the first filter module to support the filter element, and a valve seat for moving the valve body of the first check valve toward and toward the other end is formed thereon. The second connecting member has a second annular flow path between its outer circumferential surface and the inner circumferential surface of the second insertion recess, and the second annular flow path connects the second communication flow path and the inlet of the second filter module. The other end of the second connecting member is fitted into the outlet of the second filter module to support the filter element, and a valve seat for moving the valve body of the second check valve toward and toward the other end is formed thereon.

[0012] Furthermore, more preferably, the filter device has a mounting portion to which a holder is connected on at least one of the sides of the first body opposite to the first communication channel and the side of the second body opposite to the second communication channel, the mounting portion has a plurality of cylindrical portions that extend in the width direction perpendicular to the axial direction and are spaced apart in the axial direction, and the holder is detachably connected to both ends in the width direction of each of the plurality of cylindrical portions on both sides of the filter device with respect to the axis. [Effects of the Invention]

[0013] As described above, according to the present invention, in a filter device installed in a flow path in which the direction of gas flow alternately switches, for filtering foreign matter such as dust from the gas flowing through the flow path, the first filter module is arranged between the first port and the first check valve in the first flow path, and the second filter module is arranged between the second port and the second check valve in the second flow path, thereby suppressing the accumulation of foreign matter on the check valve and improving the product life. [Brief explanation of the drawing]

[0014] [Figure 1] This is a perspective view of a filter device according to one embodiment of the present invention. [Figure 2] This is a longitudinal cross-sectional view of the filter device. [Figure 3] This is a perspective view of a filter device with a holder attached. [Figure 4] This is a perspective view of the holder. [Figure 5] This is a cross-sectional view of a filter device through which air flows in the first channel. [Figure 6] This is a cross-sectional view of a filter device through which air flows in the second channel. [Modes for carrying out the invention]

[0015] Hereinafter, an embodiment of the filter device according to the present invention will be described with reference to the attached drawings. The filter device 1 of this embodiment is attached to a flow path 78 in which the flow direction of a gas such as air alternately switches, and filters out foreign matter such as dust from the bidirectional gas (for example, compressed air) flowing through this flow path 78. For example, it is interposed in a flow path connecting a vacuum generator capable of alternately outputting positive and negative pressure and an adsorption pad.

[0016] As shown in FIGS. 1 and 2, the filter device 1 has a first filter block 10 extending along the axis L direction, and a second filter block 50 detachably connected to the lower part of the first filter block 10 and extending along the axis L direction. The first filter block 10 has a first pipeline 12 extending along the axis L direction inside. At one end of the first filter block 10 in the axis L direction, a first filter module 20 communicating with the first pipeline 12 is provided. At the other end of the first filter block 10 in the axis L direction, a second port 30 communicating with the first pipeline 12 is provided. Also, in the first pipeline 12, between the first filter block 10 and the second port 30, a first check valve 40 is provided that allows the flow of gas from the first filter module 20 side to the second port 30 side and blocks the flow of gas in the opposite direction.

[0017] The second filter block 50 has a second pipeline 52 extending along the axis L direction inside. At one end of the second filter block 50 in the axis L direction, a first port 68 communicating with the second pipeline 52 is provided. At the other end of the second filter block 50 in the axis L direction, a second filter module 60 communicating with the second pipeline 52 is provided. Also, in the second pipeline 52, between the second filter block 50 and the first port 68, a second check valve 65 is provided that allows the flow of gas from the second filter module 60 side to the first port 68 side and blocks the flow of gas in the opposite direction.

[0018] The filter device 1 further has a first communication flow path 13 connecting the first port 68 to the first filter module 20 and a second communication flow path 53 connecting the second port 30 to the second filter module 60. As a result, between the first and second ports 68, 30, there are formed a first flow path 5 (see FIG. 5) through which gas flows from the first port 68 through the first filter module 20 to the second port 30, and a second flow path 6 (see FIG. 6) through which gas flows from the second port 30 through the second filter module 60 to the first port 68.

[0019] That is, the filter device 1 has a first port 68 and a second port 30 through which gas enters and exits, and a first flow path 5 and a second flow path 6 connected in parallel between the first and second ports 68, 30. And in the first flow path 5, a first check valve 40 that allows the flow of gas from the first port 68 toward the second port 30 and blocks the flow of gas from the second port 30 toward the first port 68, and a first filter module 20 disposed between the first port 68 and the first check valve 40 are provided. Further, in the second flow path 6, a second check valve 65 that allows the flow of gas from the second port 30 toward the first port 68 and blocks the flow of gas from the first port 68 toward the second port 30, and a second filter module 60 disposed between the second port 30 and the second check valve 65 are provided.

[0020] Thus, the first flow path 5 is formed by a series of flow paths that sequentially lead from the first port 68 to the first communication flow path 13, the first filter module 20, and the first pipe 12 and reach the second port 30 (see FIG. 5), and the second flow path 6 is formed by a series of flow paths that sequentially lead from the second port 30 to the second communication flow path 53, the second filter module 60, and the second pipe 52 and reach the first port 68 (see FIG. 6).

[0021] Specifically, as shown in FIG. 2, the filter device 1 has one end 2 and the other end 3 at both ends in the axial direction of the axis L. In this embodiment, the first and second filter blocks 10, 50 are formed to have the same shape and dimensions, and are detachably connected in a state where they are arranged in opposite directions in the axial direction of the axis L.

[0022] The first filter block 10 has a first body 11 extending along the axial direction of the axis L. At the end of the first body 11 on the one end 2 side, the first filter module 20 is detachably attached, and at the end of the first body 11 on the other end 3 side, a joint forming the second port 30 is attached.

[0023] Inside the first body 11, a first conduit 12 extending along the axis L and a first communication channel 13 are formed. The first conduit 12 is installed between both ends of the first body 11 in the axis L direction. The first communication channel 13 is formed in a first projection 14 that protrudes from the side surface 11a of the first body 11 along the axis L in a direction perpendicular to the axis L. At this time, the side surface 11a of the first body 11 is a flat surface that forms the lower surface of the first body 11 and faces toward the second filter block 50.

[0024] The first projection 14 protrudes from one end 2 of the side surface 11a and is formed in a frustoconical shape, with its outer diameter gradually decreasing from the upper base end to the lower tip end. A sealing member 14a is attached to the tip of the first projection 14, and this sealing member 14a hermetically fits the first projection 14 and the first engagement recess 55 formed in the second filter block 50. Details of this first engagement recess 55 will be described later.

[0025] The first communication channel 13 extends vertically within the first projection 14. The lower upstream end of the first communication channel 13 opens at the tip of the first projection 14, and the upper downstream end communicates with the gas inlet 27 of the first filter module 20. In this case, the first communication channel 13 extends in a direction perpendicular to the first pipeline 12.

[0026] Furthermore, a second engagement recess 15 is provided on the side surface 11a of the first body 11, which communicates with the first conduit 12. A second projection 54, which will be described later, is fitted into this second engagement recess 15. More specifically, the second engagement recess 15 is provided on the other end 3 side of the side surface 11a, and is formed in a hollow frustoconical shape such that the inner diameter gradually decreases from the lower outer opening to the upper bottom. The bottom of the second engagement recess 15 is open and communicates with the first conduit 12.

[0027] As shown in Figure 2, the second port 30 is fitted with a quick-connect pipe fitting 31. This pipe fitting 31 is configured such that, when a synthetic resin pipe (tube) (not shown) is inserted into it, the edge 32a of the locking member 32 locks onto the outer circumference of the pipe, holding the pipe in a non-loosening state. When a cylindrical release bush 33 is pushed along the pipe, the tip of the release bush 33 releases the lock of the edge 32a, allowing the pipe to be pulled out.

[0028] The first filter module 20 is formed in a hollow cylindrical shape extending along the axis L direction and includes a filter element 21 that filters foreign matter from gas by allowing gas to flow radially, and a bottomed hollow filter case 23 that houses the filter element 21 and forms an annular space 24 on the outer circumferential surface of the filter element 21. In this case, the filter element 21 includes an internal space 21a partitioned by its inner circumferential surface. Specifically, the filter case 23 is made of a transparent resin material, thereby making the filter element 21 visible from the outside through the filter case 23. The filter case 23 further includes a cylindrical case body portion 25 and a lid portion 26 that closes one end 2 of the case body portion 25, and a projection 26a is formed on the inner surface of the lid portion 26 that protrudes toward the other end 3. The projection 26a is inserted from one end 2 of the internal space 21a of the filter element 21, supporting the one end 2 of the filter element 21 and closing the opening at the one end 2 of the internal space 21a. Here, the annular space 24 is a space formed between the outer circumferential surface of the filter element 21 and the inner circumferential surface of the filter case 23.

[0029] Furthermore, the first filter module 20 has an inlet 27 for introducing gas into the filter element 21 and an outlet 28 for discharging the gas from which foreign matter has been filtered by the filter element 21. Specifically, the inlet 27 is formed by an opening that opens to the first body 11 side (other end 3 side) of the annular space 24, and the outlet 28 is formed by an opening that opens to the first body 11 side (other end 3 side) of the internal space 21a of the filter element 21.

[0030] A male threaded portion 23a is formed on the outer circumferential surface of the other end 3 side of the filter case 23. On the other hand, a first insertion recess 16 is provided at the end 2 side of the first body 11, and a female threaded portion 16a is formed on the inner surface of the insertion recess 16 on the end 2 side. The male threaded portion 23a is screwed into the female threaded portion 16a. Furthermore, a sealing member 23b is provided on the end 2 side of the male threaded portion 23a at the other end 3 side of the filter case 23. Therefore, the filter case 23 can be airtightly attached to the first body 11 by screwing it into the first insertion recess 16. Conversely, to remove the filter case 23 from the first insertion recess 16, the filter case 23 can be removed from the first insertion recess 16 by rotating the filter case 23 in the opposite direction to the mounting direction. As a result, the filter element 21 is exposed, making it easy to replace the filter element 21.

[0031] A cylindrical first connecting member 35, having a through hole 36 aligned with the axis L, is housed at the bottom of the first insertion recess 16 (the other end 3 side) relative to the first filter module 20. Specifically, the first connecting member 35 has a cylindrical projection 37 protruding from its end on the one end 2 side and a valve hole 38 opened at its end on the other end 3 side. The projection 37 is detachably fitted into the opening on the other end 3 side of the filter element 21, supporting the other end of the filter element 21.

[0032] The valve hole 38 is arranged coaxially with respect to the through hole 36 and is formed to be large in diameter. The end of the first check valve 40 on one end 2 side is inserted into the valve hole 38 so as to be able to reciprocate along the axis L. An annular valve seat 39 is formed at the bottom of the valve hole 38, that is, the peripheral edge facing the other end 3 side of the opening of the through hole 36. As a result, the valve body 41 of the first check valve 40 moves toward and away from the valve seat 39, thereby blocking or opening the connection between the outlet 28 and the second port 30.

[0033] The outer diameter of the first connecting member 35 is smaller than the inner diameter of the inner surface of the first insertion recess 16, and is the same as or slightly larger than the outer diameter of the filter element 21, and is also smaller than the inner diameter of the annular space 24. For this reason, a first annular channel 17 is formed between the outer circumferential surface of the first connecting member 35 and the inner surface of the first insertion recess 16, and the first annular channel 17 communicates with the first communication channel 13 and the inlet 27.

[0034] The first check valve 40 is positioned in the first conduit 12 on the side of the second port 30 (the other end 3 side) than the first connecting member 35. The first check valve 40 comprises a cylindrical valve body support portion 42 that is slidably fitted along the inner surface of the first conduit 12 in the axial direction L, a valve body 41 connected to the end of the valve body support portion 42 on the one end 2 side and protruding toward the one end 2 side, and a spring member 43 housed within the valve body support portion 42 that constantly biases the first check valve 40 toward the one end 2 side (in the direction that causes the valve body 41 to contact the valve seat 39).

[0035] The spring member 43 has its other end 3 side in contact with an annular step portion 12a protruding from the inner surface of the first conduit 12, and its one end 2 side in contact with the bottom of the valve body support portion 42. Thus, the valve body 41 is formed in a closed-bottom cylindrical shape with one end 2 side closed and the other end 3 side open, and the outer circumference of the bottom wall of the valve body 41 facing one end side is in contact with the valve seat 39 by the spring member 43 so as to be able to move toward and away from it. In addition, a plurality of communication holes 41a are provided through the circumferential wall of the valve body 41, spaced apart in the circumferential direction, and these communication holes 41a communicate with the second port 30 through the internal space 42a of the valve body support portion 42.

[0036] Next, the second filter block 50 will be described. As mentioned above, the second filter block 50 is formed to be the same shape and dimensions as the first filter block 10, and as mentioned above, it is simply connected to the first filter block 10 in the opposite direction in the axial L direction. For this reason, the differences between the second filter block 50 and the first filter block 10 will be described, and parts that are identical will be denoted by corresponding reference numerals and their descriptions will be omitted.

[0037] The second filter block 50 has a second body 51 extending along the axis L, a second filter module 60 is detachably attached to the other end 3 of the second body 51, and a joint forming a first port 68 is attached to the one end 2 of the second body 51.

[0038] Inside the second body 51, a second conduit 52 extending along the axis L and a second communication channel 53 are formed. The second communication channel 53 is formed within a second projection 54 that protrudes from the side surface 51a of the second body 51 along the axis L in a direction perpendicular to the axis L. At this time, the side surface 51a of the second body 51 is a flat surface that forms the upper surface of the second body 51 and faces toward the first body 11.

[0039] As described above, the first pipeline 12 and the second pipeline 52 extend parallel to each other along the axis L, and the first connecting passage 13 and the second connecting passage 53 extend parallel to each other in a direction perpendicular to the axis L. Therefore, the respective passage lengths of the first passage 5 and the second passage 6 can be reduced, making the filter device 1 more compact.

[0040] The second projection 54 protrudes from the other end 3 of the side surface 51a and is formed in a frustoconical shape, with its outer diameter gradually decreasing from the lower base end to the upper tip end. A sealing member 54a is attached to the tip of the second projection 54, and this sealing member 54a provides an airtight fit between the second projection 54 and the second engagement recess 15 formed in the first filter block 10. The second communication channel 53 extends vertically within the second projection 54, with the upper upstream end of the second communication channel 53 opening at the tip of the second projection 54, and the lower downstream end communicating with the gas inlet 27 in the second filter module 60. The second communication channel 53 is parallel to the first communication channel 13 and extends in a direction perpendicular to the second pipeline 52.

[0041] Furthermore, a first engagement recess 55 is provided on the side surface 51a of the second body 51, which communicates with the second conduit 52. The first projection 14 is fitted into this first engagement recess 55. More specifically, the first engagement recess 55 is provided on one end 2 of the side surface 51a and is formed in a hollow frustoconical shape such that the inner diameter gradually decreases from the upper outer opening to the lower bottom. The bottom of the first engagement recess 55 is open and communicates with the second conduit 52.

[0042] Since the configuration of the first port 68 is substantially the same as that of the second port 30, it is given the same reference numerals as the second port 30 and its description is omitted.

[0043] The configuration of the second filter module 60 is substantially the same as that of the first filter module 20, so it is given the same reference numerals as the first filter module 20 and its description is omitted. The inlet 27 of the second filter module 60 is formed by an opening that opens to the second body 51 side (one end 2 side) of the annular space 24, and the outlet 28 is formed by an opening that opens to the second body 51 side (one end 2 side) of the internal space 21a of the filter element 21.

[0044] A male threaded portion 23a is formed on the outer circumferential surface of one end 2 of the filter case 23. On the other hand, a second insertion recess 56 is provided at the other end 3 of the second body 51, and a female threaded portion 16a is formed on the inner surface of the second insertion recess 56 on the other end 3 side. The male threaded portion 23a is screwed into the female threaded portion 16a. Furthermore, a sealing member 23b is provided on the other end 3 side of the male threaded portion 23a of the filter case 23. Therefore, the filter case 23 can be airtightly attached to the second body 51 by screwing it into the second insertion recess 56. Conversely, by rotating the filter case 23 attached to the second insertion recess 56 in the opposite direction to the attachment direction, the filter case 23 can be removed from the second insertion recess 56. As a result, the filter element 21 is exposed, making it easy to replace the filter element 21.

[0045] Within the second insertion recess 56, a second connecting member 63 is housed on the bottom side (end 2 side) of the second insertion recess 56 relative to the second filter module 60. The second connecting member 63 is the same as the first connecting member 35, so it is given the same reference numeral as the first connecting member 35 and its description is omitted. The protruding portion 37 of the second connecting member 63 is detachably fitted into the opening on the end 2 side of the filter element 21, supporting one end of the filter element 21.

[0046] A second check valve 65 is inserted into the valve hole 38 of the second connecting member 63 so as to be able to reciprocate along the axis L, and an annular valve seat 39 facing one end 2 is formed at the bottom of the valve hole 38. As a result, the valve body 41 of the second check valve 65 moves toward and away from the valve seat 39, thereby blocking or opening the connection between the outlet 28 of the second filter module 60 and the first port 68. A second annular passage 57 is formed between the outer circumferential surface of the second connecting member 63 and the inner surface of the second insertion recess 56, and the second annular passage 57 communicates with the second communication passage 53 and the inlet 27 of the second filter module 60.

[0047] Since the second check valve 65 has the same configuration as the first check valve 40, it is given the same reference numerals as the first check valve 40 and its description is omitted. The second check valve 65 is located in the second pipeline 52 on the side of the first port 68 (side of one end 2) than the second connecting member 63. Multiple communication holes 41a provided in the valve body 41 of the second check valve 65 communicate with the first port 68 through the internal space 42a of the valve body support portion 42.

[0048] The first and second filter blocks 10 and 50 configured in this way are connected by engaging the first projection 14 with the first engagement recess 55 and engaging the second projection 54 with the second engagement recess 15, so that the sides 11a and 51a of the first and second filter blocks 10 and 50 are in contact with each other. As shown in Figure 3, the filter device 1 is provided with fixing parts 70 for fixing the first and second filter blocks 10 and 50 together in the connected state.

[0049] Specifically, the fixing portion 70 is provided on the sides 11a and 51a of the first and second filter blocks 10 and 50, respectively. Since these fixing portions 70 have the same structure, the fixing portion 70 provided on one end 2 will be described, and the fixing portion 70 provided on the other end 3 will be given the same reference numeral as the fixing portion 70 on one end 2 and its description will be omitted.

[0050] As shown in Figures 3 and 5, the fixing portion 70 includes a fixing plate portion 71 extending in the width direction perpendicular to the axis L direction from the upper end of the first engagement recess 55, a guide hole 72 that penetrates the fixing plate portion 71 in the width direction, a groove portion 73 provided in an annular shape in the circumferential direction on the outer surface of the first protrusion 14 and positioned at a location intersecting the guide hole 72, and a pin member 74 that is inserted into the guide hole 72 and the groove portion 73 to fix the first and second filter blocks 10 and 50 together. Here, the groove portion 73 is recessed on the base end side of the first protrusion 14 than the seal member 14a. This prevents air from leaking out of the flow path through the groove portion 73.

[0051] More specifically, the fixing plate portion 71 is fixed to the second body 51 and extends to both sides in the width direction so as to surround the first engagement recess 55. The guide hole 72 is branched around the first engagement recess 55 so as to open into the first engagement recess 55 on both sides in the axial L direction. On the other hand, the pin member 74 is formed in a U shape from a metal wire such as stainless steel that has spring elasticity, and is formed by first and second leg portions 74a and 74b that can be inserted into each of the pair of guide holes 72 that branch around the first engagement recess 55, and a connecting portion 74c that connects these leg portions 74a and 74b to each other.

[0052] With the fixing portion 70 configured in this way, when the first projection 14 is engaged with the first engagement recess 55, the first and second legs 74a and 74b of the pin member 74 are inserted into each of the pair of guide holes 72, respectively, and these first and second legs 74a and 74b are inserted into the groove portion 73 through the guide holes 72. As a result, the first projection 14 and the first engagement recess 55 are fixed to each other in the vertical direction through these first and second legs 74a and 74b, so that the first and second filter blocks 10 and 50 can be fixed in a connected state. Conversely, to separate the first and second filter blocks 10 and 50 from each other, the pin member 74 can be removed from the guide holes 72. Furthermore, the fixing structure in which the second projection 54 is engaged with the second engagement recess 15 and these are fixed through the fixing part 70 is the same as the fixing structure in which the first projection 14 is fixed to the first engagement recess 55 through the fixing part 70 described above, so its explanation will be omitted.

[0053] Incidentally, as shown in Figures 3 and 4, the filter device 1 has a mounting portion 80 to which the holder 90 is connected on at least one of the following sides: the side 11b of the first body 11 opposite to the first communication passage 13 side (i.e., the upper surface of the first body 11) and the side 51b of the second body 51 opposite to the second communication passage 53 side (i.e., the upper surface of the second body 51). The mounting portion 80 has a plurality of cylindrical portions 81 that extend in the width direction perpendicular to the axis L direction and are spaced apart in the axis L direction. In this embodiment, the filter device 1 has mounting portions 80 on both the upper side 11b (upper surface) of the first body 11 and the lower side 51b (lower surface) of the second body. Specifically, the mounting portion 80 has two cylindrical portions 81. The cylindrical portions 81 extend on both sides in the width direction of the filter device 1, straddling the axis L. Multiple filter devices 1 can be connected by inserting, for example, wires or rods through these cylindrical parts 81.

[0054] A holder 90 for holding the filter device 1 is detachably attached to the mounting portion 80. The holder 90 is detachably connected to both ends in the width direction of each of the plurality of cylindrical portions 81 on both sides of the filter device 1 with the shaft L in between. Specifically, the holder 90 has a base plate 91 and engaging portions 92 that protrude upward from both ends in the width direction of the base plate 91 and detachably engage with the cylindrical portions 81, and is integrally molded from resin. The base plate 91 is provided with a plurality of holes 91a into which fastening members such as screws for fixing it to the mounting location are inserted. The engaging portion 92 has a leg portion 93 that protrudes upward from the base plate 91 and an engaging recess 94 provided at the tip of the leg portion 93 that detachably engages with the cylindrical portion 81.

[0055] More specifically, the substrate 91 is formed in a rectangular shape extending in the axial L direction, the axial L length of the substrate 91 is shorter than the axial L length of the filter device 1, and the width of the substrate 91 is the same as or slightly shorter than the width of the filter device 1. At each of the widthwise ends of the substrate 91, two engaging portions 92 are provided, which are spaced apart in the axial L direction and are arranged at the same distance as the distance between the two cylindrical portions 81. In this embodiment, the leg portion 93 has flexible first leg portion 93a and second leg portion 93b spaced apart in the axial L direction. The engaging recess 94 has engaging claw portions 95 provided at the tips of these first and second leg portions 93a and 93b, respectively. The engaging claw portion 95 has an inner surface 95a that curves inward and outward in a convex shape in the axial L direction, and a gap 96 into which the cylindrical portion 81 can be inserted is formed between the upper ends of this pair of engaging claw portions 95. When the cylindrical portion 81 is inserted into this gap 96, the first leg portion 93a and the second leg portion 93b bend away from each other, causing the gap 96 to expand, and the cylindrical portion 81 is held between the pair of engaging claw portions 95, thereby locking the cylindrical portion 81 into the engaging portion 92.

[0056] On the other hand, when removing the holder 90 from the mounting portion 80, the filter device 1 is moved relative to the holder 90 so that the cylindrical portion 81 of the mounting portion 80 is disengaged from the engaging portion 92. This causes the cylindrical portion 81 to disengage from the pair of engaging claw portions 95 through the gap 96, allowing the mounting portion 80 to be removed from the holder 90.

[0057] Next, the operation of the filter device 1 when filtering foreign matter such as dust from the gas flowing through the flow path 78 will be explained. First, the case when the gas flowing through the flow path 78 flows through the first flow path 5 of the filter device 1, that is, when positive pressure is input to the first port 68, will be explained. In this case, as shown in Figure 5, the gas flows in from the first port 68 and flows into the first annular flow path 17 through the second pipe 52 and the first connecting flow path 13. The gas that has flowed into the first annular flow path 17 is then introduced into the annular space 24 from the inlet 27 of the first filter module 20. The gas then passes through the filter element 21 from its outer surface to its inner surface, and foreign matter is removed by the filter element 21 at that time. The gas that has had this foreign matter removed and has flowed into the internal space 21a from the inner surface of the filter element 21 then flows into the through hole 36 of the first connecting member 35 from the outlet 28. The gas flowing into the through-hole 36 displaces the valve body 41 of the first check valve 40 toward the second port 30 (the other end 3) against the biasing force of the spring member 43, thereby separating the valve body 41 from the valve seat 39 and opening the valve. As a result, the gas flows out of the first check valve 40 through the internal space 42a and the first conduit 12 into the flow path 78 from the second port 30.

[0058] Next, we will describe the case where the gas flowing through the flow path 78 flows through the second flow path 6 of the filter device 1, that is, when negative pressure is input to the first port 68. In this case, as shown in Figure 6, the gas flows in from the second port 30 and flows through the first conduit 12 and the second connecting flow path 53 into the second annular flow path 57. The gas that has flowed into the second annular flow path 57 is then introduced into the annular space 24 from the inlet 27 of the second filter module 60. The gas then passes through the filter element 21 from its outer surface to its inner surface, and foreign matter is removed by the filter element 21 in the process. The gas that has had this foreign matter removed and has flowed into the internal space 21a from the inner surface of the filter element 21 then flows from the outlet 28 into the through hole 36 of the second connecting member 63. The gas flowing into the through-hole 36 displaces the valve body 41 of the second check valve 65 toward the first port 68 side (end 2 side) against the biasing force of the spring member 43, thereby separating the valve body 41 from the valve seat 39 and opening the valve. As a result, the gas flows out of the second check valve 65 through the internal space 42a and the second conduit 52 into the flow path 78 from the first port 68.

[0059] In the embodiments described above, the first and second filter blocks 10 and 50 are described as having the same shape, but this is not the only case. The first and second filter blocks 10 and 50 may have different shapes, or they may be formed as a single unit. [Explanation of Symbols]

[0060] 1. Filter device 2 one end 3 The other end 5. First channel 6. Second channel 10. First filter block 11th Body 11a, 11b, 51a, 51b side 12 1st pipeline 13. First connecting channel 14 1st protrusion 15. Second engagement recess 16. First insertion recess 17. First Ring Channel 20. First filter module 21 filter elements 21a Interior space 23 Filter Case 24 Circular Space 27 Inlet 28 Outlet 30 Port 2 35 First connecting member 39 valve seats 40. First check valve 50 Second filter block 51 Second Body 52 2nd pipeline 53 Second connecting channel 54 Second protrusion 55 First engagement recess 56 Second insertion recess 57 Second Ring Channel 60. Second filter module 63 Second connecting member 65. Second check valve 68 Port 1 78 channels 80 Mounting part 81 Cylindrical part 90 Holder L axis

Claims

1. A filter device installed in a flow path in which the direction of gas flow alternately switches, for filtering out foreign matter such as dust from the gas flowing through the flow path, The filter device has a first port and a second port through which gas enters and exits, and a first flow path and a second flow path connected in parallel between the first and second ports. The first flow path is provided with a first check valve that allows the flow of gas from the first port to the second port and prevents the flow of gas from the second port to the first port, and a first filter module for filtering foreign matter from the gas flowing through the first flow path. The second flow path is provided with a second check valve that allows the flow of gas from the second port to the first port and prevents the flow of gas from the first port to the second port, and a second filter module for filtering foreign matter from the gas flowing through the second flow path. The first filter module is positioned between the first port and the first check valve in the first flow path. The second filter module is positioned between the second port and the second check valve in the second flow path. A filter device characterized by the following features.

2. The first and second filter modules each have a filter element for filtering foreign matter from a gas, an inlet for introducing gas into the filter element, and an outlet for discharging the gas from which foreign matter has been filtered by the filter element. The filter device includes a first conduit connecting the outlet of the first filter module and the second port, and provided with the first check valve; a second conduit connecting the outlet of the second filter module and the first port, and provided with the second check valve; a first communication channel in the second conduit connected from between the first port and the second check valve to the inlet of the first filter module; and a second communication channel in the first conduit connected from between the second port and the first check valve to the inlet of the second filter module. The first flow path is formed by a series of flow paths that sequentially pass through the first port, the first communication flow path, the first filter module, and the first conduit to the second port. The second flow path is formed by a series of flow paths that sequentially pass through the second port, the second communication flow path, the second filter module, and the second conduit to the first port. The filter device according to claim 1.

3. The filter device has one end and the other end at both ends in the axial direction, and comprises a first body having a first conduit and a first communication channel formed inside that extend linearly along the axial direction, and a second body having a second conduit and a second communication channel formed inside that extend linearly along the axial direction. The first filter module is detachably attached to one end of the first body, and the second port is attached to the other end of the first body. The second filter module is detachably attached to the other end of the second body, and the first port is attached to the one end of the second body. The first and second connecting channels extend parallel to each other and in directions perpendicular to the first and second pipelines. The filter device according to claim 2.

4. The first and second filter modules each include a filter element formed in a cylindrical shape extending along the axial direction and having an internal space partitioned by an inner circumferential surface, and a bottomed, hollow filter case that houses the filter element and forms an annular space on the outer circumferential surface of the filter element. In the first filter module, an opening in the internal space of the filter element that opens towards the first body is formed as the outlet, and an opening in the annular space that opens towards the first body is formed as the inlet. In the second filter module, an opening in the internal space of the filter element that opens to the second body side is formed as the outlet, and an opening in the annular space that opens to the second body side is formed as the inlet. The filter device according to claim 3.

5. The filter case is made of a transparent material, thereby making the filter element visible from the outside through the filter case. The filter device according to feature 4.

6. The filter device comprises a first filter block consisting of a first body, a first filter module, and a second port extending along the axial direction, and a second filter block consisting of a second body, a second filter module, and a first port extending along the axial direction. The first communication channel is formed within a first projection that protrudes from the side surface of the first body, and opens at the tip of the first projection. The second communication channel is formed within a second projection that protrudes from the side surface of the second body, and opens at the tip of the second projection. A second engagement recess is provided on the side surface of the first body, which communicates with the first conduit and engages with the second projection, and the second communication channel communicates with the first conduit through the second engagement recess. A first engagement recess is provided on the side surface of the second body, which communicates with the second conduit and engages with the first projection, and the first communication channel communicates with the second conduit through the first engagement recess. With the first and second protrusions engaged with the first and second engagement recesses, the first and second filter blocks are detachably connected to each other. The filter device according to claim 3.

7. At one end of the first body and at the other end of the second body, a first insertion recess and a second insertion recess are provided into which the first and second filter modules are inserted, and at the bottom of the first and second insertion recesses, cylindrical first and second connecting members are housed, each having a through hole extending along the axial direction. The first connecting member has a first annular flow path formed between its outer circumferential surface and the inner circumferential surface of the first insertion recess, the first communicating flow path and the inlet of the first filter module are connected by the first annular flow path, one end of the first connecting member is fitted into the outlet of the first filter module to support the filter element, and the other end has a valve seat formed thereon that moves the valve body of the first check valve toward and toward. The second connecting member has a second annular flow path formed between its outer circumferential surface and the inner circumferential surface of the second insertion recess, the second communicating flow path and the inlet of the second filter module are connected by the second annular flow path, the other end of the second connecting member is fitted into the outlet of the second filter module to support the filter element, and a valve seat is formed at one end thereof to move the valve body of the second check valve toward and toward. The filter device according to feature 4.

8. The filter device has a mounting portion to which a holder is connected on at least one of the sides of the first body opposite to the first communication channel and the side of the second body opposite to the second communication channel. The mounting portion has a plurality of cylindrical portions that extend in the width direction perpendicular to the axial direction and are spaced apart in the axial direction. The holder is detachably connected to each of the plurality of cylindrical portions at both ends in the width direction on both sides of the filter device, with respect to the shaft. The filter device according to feature 6.

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