Heat treatment equipment

Abstract

To provide a heat treatment apparatus that can uniformly heat the surface of a workpiece with a simple configuration. [Solution] A heat treatment apparatus 100 that heats a workpiece 50 by radiant heat from an infrared heater 20 housed inside a glass tube 10, wherein the transmittance of the intervening portion 11 of the glass tube 10 interposed between the workpiece 50 and the infrared heater 20 in the direction directly facing the workpiece 50 of the infrared heater 20 is lower than the transmittance of the other non-intervening portion 12 of the intervening portion 11.

Description

Technical Field

[0001] The present disclosure relates to the structure of a heat treatment apparatus that heats a workpiece by radiant heat.

Background Art

[0002] A heat treatment apparatus that heats a workpiece by radiant heat from an infrared heater is used. Patent Document 1 discloses a brazing apparatus that uniformly heats a workpiece by the radiant heat and hot air of an infrared heater to perform brazing.

[0003] Patent Document 2 discloses a heating unit in which an incandescent lamp is housed in a quartz glass tube having a low transmittance of far infrared rays and a high transmittance of near infrared rays. This heating unit can prevent irradiation of far infrared rays to a light-transmissive workpiece by the tube and uniformly heat the front and back of the light-transmissive workpiece with near infrared rays.

[0004] Patent Document 3 discloses a heat treatment apparatus that heats a workpiece by radiant heat, in which a partition plate is interposed between a plurality of heating elements and a semiconductor to disperse infrared rays radiated from the plurality of heating elements and uniformly heat the workpiece.

[0005] Patent Document 4 discloses a heating apparatus that uniformly heats a workpiece by infrared radiation heaters provided at both ends of a vacuum chamber and a high-frequency induction heating coil disposed on the outer peripheral portion of the workpiece.

Prior Art Documents

Patent Documents

[0006]

Patent Document 1

Patent Document 2

Patent Document 3

Patent Document 4

[0007] The conventional devices disclosed in Patent Documents 1, 3, and 4 require hot air devices, partitions, or high-frequency induction heating coils, resulting in the devices becoming large. Furthermore, while the conventional heating unit disclosed in Patent Document 2 can uniformly heat both sides of a light-transmitting workpiece, it is difficult to uniformly heat the surface of a normal workpiece that is not light-transmitting.

[0008] Therefore, the object of this disclosure is to provide a heat treatment apparatus that can uniformly heat the surface of a workpiece with a simple configuration. [Means for solving the problem]

[0009] The heat treatment apparatus of the present disclosure is a heat treatment apparatus that heats a workpiece by radiant heat from a heating element housed in a glass tube, characterized in that the transmittance of the intervening portion of the glass tube between the workpiece and the heating element in the direction directly facing the workpiece of the heating element is lower than the transmittance of the other non-intervening portions of the intervening portion. [Effects of the Invention]

[0010] This reduces the radiant heat from the heating element directly to the workpiece through the intervening portion, suppressing the temperature rise in the center of the workpiece. As a result, the temperature of the center of the workpiece can be brought closer to the temperature of the periphery. Therefore, the surface of the workpiece can be heated uniformly. [Brief explanation of the drawing]

[0011] [Figure 1] This is an elevation view showing the heat treatment apparatus and workpiece of the embodiment. [Figure 2] This is a plan view showing the heat treatment apparatus and workpiece of the embodiment, and is the AA cross-section shown in Figure 1. [Figure 3] This is a plan view showing a heat treatment apparatus and workpiece as an example. [Modes for carrying out the invention]

[0012] The heat treatment apparatus 100 of the embodiment will be described below with reference to the drawings. As shown in Figures 1 and 2, the heat treatment apparatus 100 includes a glass tube 10 and an infrared heater 20. The glass tube 10 is cylindrical. The infrared heater 20 is housed inside the glass tube 10. As shown by the white arrow in Figure 1, the infrared heater 20 is a heating element that emits infrared rays and heats the workpiece 50 by infrared radiation. The workpiece 50 is the object to be heated by the heat treatment apparatus 100. The workpiece 50 may be, for example, a laminated electrode and a sealing resin.

[0013] As shown in Figure 2, the infrared heater 20 is a longitudinal member with a rectangular cross-section. The white arrows in Figure 2 indicate the direction of the infrared heater 20 directly facing the workpiece 50. Infrared rays emitted from the ends 21 and 22 of the infrared heater 20 in the direction of direct contact reach the workpiece 50 through optical paths 91 and 92 parallel to the white arrows. Therefore, the portion of the glass tube 10 between optical paths 91 and 92 in Figure 2, shown by the hatched diagonal lines, becomes an intervening portion 11 that is interposed between the workpiece 50 and the infrared heater 20 in the direction of the infrared heater 20 directly facing the workpiece 50. The portion of the glass tube 10 outside of optical paths 91 and 92 becomes a non-intervening portion 12 that is not interposed between the workpiece 50 and the infrared heater 20 in the direction of direct contact. The infrared transmittance of the intervening portion 11 is lower than that of the non-intervening portion 12.

[0014] While there are various methods for reducing infrared transmittance, for example, the surface of the intervening portion 11 may be made rough to reduce infrared transmittance.

[0015] In the heat treatment apparatus 100 configured as described above, as shown in FIG. 2, the infrared rays radiated in the facing direction from the end portions 21 and 22 of the infrared heater 20 reach the workpiece 50 through the optical paths 91 and 92. Then, in the region between the optical paths 91 and 92, the infrared rays reach the central portion 51 of the workpiece 50 through the intervening portion 11. On the other hand, in the region outside the optical paths 91 and 92, the infrared rays reach the peripheral portion 52 of the workpiece 50 through the non-intervening portion 12 without passing through the intervening portion 11.

[0016] In the central portion 51, the infrared rays are incident on the surface of the workpiece 50 substantially perpendicularly. On the other hand, in the peripheral portion 52, the infrared rays are incident on the surface of the workpiece 50 obliquely. Therefore, when there is no intervening portion 11, the heating amount per unit area by the infrared rays is larger in the central portion 51 than in the peripheral portion 52. On the other hand, the heat treatment apparatus 100 of the embodiment has an intervening portion 11 whose infrared transmittance is lower than that of the non-intervening portion 12. In this case, since the amount of infrared rays incident on the central portion 51 is reduced, the heating amount per unit area of the central portion 51 by the infrared rays is reduced. As a result, the heating amount per unit area of the central portion 51 by the infrared rays becomes the same as the heating amount per unit area of the peripheral portion 52. Therefore, the heat treatment apparatus 100 can uniformly heat the central portion 51 and the peripheral portion 52.

[0017] As described above, the heat treatment apparatus 100 of the embodiment can reduce the radiant heat in the facing direction of the infrared heater 20 with respect to the workpiece 50 by the intervening portion 11 and suppress the temperature rise of the central portion 51 of the workpiece 50. Therefore, the heat treatment apparatus 100 can bring the temperature of the central portion 51 closer to the temperature of the peripheral portion 52. Thus, the heat treatment apparatus 100 can uniformly heat the surface of the workpiece 50 with a simple configuration.

[0018] Next, the heat treatment apparatus 110 of the reference example will be described while referring to FIG. The same parts as those of the heat treatment apparatus 100 described above with reference to FIGS. 1 and 2 are denoted by the same reference numerals and the description thereof will be omitted.

[0019] The heat treatment apparatus 110 heats the workpiece 50 by the radiant heat from the infrared heater 20 housed in the glass tube 15, and includes a glass plate 30 interposed between the workpiece 50 and the infrared heater 20 in the direct facing direction of the infrared heater 20 with respect to the workpiece 50. Here, the glass plate 30 has been subjected to a transmittance reduction treatment.

[0020] The glass tube 15 is cylindrical, and like the non-intervening portion 12 of the glass tube 10 of the heat treatment apparatus 100 described above with reference to FIGS. 1 and 2, the transmittance of infrared rays is high.

[0021] Similar to the above description, the infrared rays radiated from the end portions 21 and 22 of the infrared heater 20 in the direct facing direction reach the workpiece 50 through the optical paths 91 and 92. The glass plate 30 is disposed so as to be interposed between the infrared heater 20 and the workpiece 50 in the region between the optical path 91 and the optical path 92. Therefore, in the region between the optical paths 91 and 92, the infrared rays pass through the glass plate 30 and reach the central portion 51 of the workpiece 50.

[0022] Here, the glass plate 30 has been subjected to a transmittance reduction treatment such that the transmittance of infrared rays is reduced. The transmittance reduction treatment may be, for example, one in which fine irregularities are formed on the surface of the glass plate 30. [[ID=十三]]

[0023] The heat treatment apparatus 110 can reduce the radiant heat in the direct facing direction of the infrared heater 20 with respect to the workpiece 50 by the glass plate 30 having a low transmittance of infrared rays, and can suppress the temperature rise of the central portion 55 of the workpiece 50, so that the temperature of the central portion 55 can be made close to the temperature of the peripheral portion 56. Thus, the heat treatment apparatus 110 can uniformly heat the surface of the workpiece 50 with a simple configuration.

Explanation of Reference Numerals

[0024] 10, 15 glass tubes, 11 intervening portion, 12 non-intervening portion, 20 infrared heater, 21, 22 end portions, 30 glass plate, 50 workpiece, 51, 55 central portions, 52, 56 peripheral portions, 91, 92 optical paths, 100, 110 heat treatment apparatuses.

Claims

[Claim 1] A heat treatment apparatus that heats a workpiece by radiant heat from a heating element housed in a glass tube, The transmittance of the intervening portion of the glass tube between the workpiece and the heating element in the direction directly facing the workpiece of the heating element is lower than the transmittance of the other non-intervening portions of the intervening portion. A heat treatment apparatus characterized by the following.

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