Drawer type box-type furnace
By using a fixed heating element and a modular design in a drawer-type box furnace, the short-circuit problem caused by the expansion and contraction of the heating wire is solved, improving heat utilization and ease of module replacement, and achieving efficient temperature control and energy saving.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-01
- Publication Date
- 2026-03-27
AI Technical Summary
In existing drawer-type box furnaces, the heating wires expand and contract after heating, causing changes in their spacing, which can easily lead to short circuits and damage. The heat radiation is not concentrated, resulting in low energy efficiency.
The heating element is fixedly installed at the bottom of the insulation board and connected to the heating cavity via a sliding track. The heating element radiates heat downwards. Combined with the split module design and double-layer insulation board, it improves heat utilization and facilitates module replacement.
It improves thermal radiation efficiency by more than 80%, reduces the demand for heating materials, reduces maintenance downtime, and achieves precise temperature control and material savings.
Smart Images
Figure CN224051029U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of hot working equipment, can apply to the diffusion furnace of semiconductor and photovoltaic or various heating devices and diffusion furnace, specifically a drawer type box -type furnace. BACKGROUND
[0002] The drawer type box -type furnace is an industrial heating equipment combining the structure foundation of box -type furnace and the operating characteristics of drawer, and the core design improves the material taking and placing efficiency through the modularized drawer structure, while the uniformity and stability of high-temperature treatment are maintained.
[0003] The existing drawer type box -type furnace heating mode is that the heating pipe is placed in several ceramic tubes in each layer of heating cavity, the heating wire is wound outside the ceramic tube, and the heating wire is fixed by the ceramic tube. The advantage of this structure is simple, but the heating wire has no fixed structure in the radial direction of the ceramic tube except for the rod welding. The heating wire will expand in length after heating and will shrink after cooling. After many cycles, the spacing between the heating wires will change, and the spacing will become smaller and smaller. When the spacing is less than the safe distance, the heating wires will produce a large fire phenomenon, and finally a short circuit will occur. And the heating wire is fixed by winding the ceramic tube. The heat of the heating wire radiates outward in a circular manner, but the elements that need to be heated are only below the heating pipe. In addition to the downward direction, the heat scattered in other directions can only be utilized by the flow of gas driven by the fan, resulting in low energy efficiency. SUMMARY
[0004] Therefore, the utility model aims at providing a drawer type box -type furnace by heating the densely wound heating wire.
[0005] In order to solve the above technical problems, the technical scheme of the utility model is:
[0006] A drawer type box -type furnace, comprising a box -type furnace body, a furnace door provided with an opening of the box -type furnace body, a plurality of drawer type heating cavities provided in the box -type furnace body, a bottom plate for placing the elements to be processed provided in the lower part of the heating cavity, and a heating module provided in the upper part of the heating cavity, the heating module comprising a heat insulation plate provided in the upper part of the heating cavity and a heating belt fixedly installed at the bottom of the heat insulation plate, one side of the heating belt being closely attached to the heat insulation plate, and the other side radiating heat downward to the elements to be processed on the bottom plate in the upper part of the heating cavity.
[0007] Preferably, the heating belt is fixed to the bottom of the heat insulation plate by a plurality of hooks.
[0008] Preferably, the heating module is divided into a plurality of independent sub-heating modules in the same layer of the heating cavity, each of the sub-heating modules comprising the heat insulation plate and the heating belt fixedly installed at the bottom of the heat insulation plate.
[0009] Preferably, the heat insulation plate is movably connected with the heating cavity, and a sliding rail is arranged at the upper portion of the heating cavity, the heat insulation plate being slidably connected with the heating cavity through the sliding rail, and the heat insulation plate being slid into or out of the heating cavity on the sliding rail.
[0010] Further, the sliding rail is made of silicon carbide material.
[0011] Further, the movement direction of the sliding rail is towards the opening of the box furnace body, and the heat insulation plate is slid in the sliding rail and out of the heating cavity from the opening of the box furnace body.
[0012] Further, a groove corresponding to the sliding rail is formed on the side wall of the box furnace body, the movement direction of the sliding rail is towards the groove, and the heat insulation plate is slid in the sliding rail and out of the heating cavity from the groove.
[0013] Preferably, the heat insulation plate is provided in a double-layer structure, and a reflecting plate is clamped between the two layers of the heat insulation plate.
[0014] Preferably, the heat insulation plate is made of quartz plate.
[0015] The technical effects of the present application mainly lie in the following aspects: the heating belt is fixed at the bottom of the heat insulation plate, so that the heat of the heating belt is radiated downward to the maximum extent, and the heat radiation efficiency is greater than 80%; and the fixing mode of the heating belt can reduce the surface load compared with the winding mode of the heating wire, so that the power demand can be met by using less material, thereby saving the use of raw materials; the movable design of the heat insulation plate and the heating cavity facilitates the replacement of damaged heat insulation plates and heating belt equipment, and in combination with the split design of the heating module, the heat insulation plate and the heating belt equipment can be replaced and maintained online without long-term shutdown, thereby reducing the maintenance cost; the split design of the heating module can also output different powers to accurately control the temperature of different areas. BRIEF DESCRIPTION OF DRAWINGS
[0016] Figure 1 FIG. 1 is a simple schematic diagram of the box furnace structure in the prior art;
[0017] Figure 2 FIG. 4 is a simple schematic diagram of the whole box furnace according to the present application;
[0018] Figure 3 FIG. 5 is a simple schematic diagram of the heating cavity of the present application viewed from below;
[0019] Figure 4The whole side simple schematic view of the utility model.
[0020] 1-box furnace body;11-side wall;111-groove body; 2-heating cavity;21-bottom plate;22-heating module;221-heat insulation plate;222-heating band;3-sliding rail. DETAILED DESCRIPTION
[0021] The specific embodiments of the utility model are further described in detail below in combination with the drawings, so that the technical scheme of the utility model is easier to understand and master. Example 1
[0022] According to Figure 1 As shown in Figure 1, a drawer type box furnace includes a box furnace body 1, a furnace door provided with the opening of the box furnace body 1, a plurality of drawer type heating cavities 2 provided in the box furnace body 1, a bottom plate 21 for placing elements to be processed provided at the lower part of the heating cavity 2 and a heating module 22 provided at the upper part of the heating cavity 2, generally the heating module 22 is a heating wire wound outside a ceramic tube, heat is radiated to the surrounding through the heating wire, but the heating wire has no fixed structure in the radial direction of the ceramic tube except for the lead bar welding, the heating wire will expand in length after heating and will contract after cooling, after multiple cycles, the spacing between the heating wires will change, the spacing will become smaller and smaller, when it is less than the safe distance, a large fire phenomenon will occur between the heating wires, finally short circuit damage will occur. And the heating wire is fixed by winding the ceramic tube, the heat of the heating wire will be radiated outward in a circumferential manner, but the elements to be heated are only below the heating tube, in addition to the downward direction, the heat scattered in other directions can only be utilized by the flow of gas driven by the fan, resulting in that the energy efficiency utilization rate is less than 60%.
[0023] According to Figures 2-4As shown, in order to reduce the probability of damage of the heat generating module 22 and improve the energy efficiency, the heat generating module 22 includes a heat insulation plate 221 arranged at the upper part of the heating cavity 2 and a heat generating belt 222 fixedly installed at the bottom of the heat insulation plate 221, one side of the heat generating belt 222 is close to the heat insulation plate 221, and the other side radiates heat to the element to be processed on the bottom plate 21 downward from the upper part of the heating cavity 2. The heat generating belt 222 is fixed to the bottom of the heat insulation plate 221 by a plurality of hooks; the heat insulation plate 221 is made of quartz plate, which can be continuously recycled, and when the heat generating module 22 is damaged, only the heat generating belt 222 needs to be replaced without replacing the quartz plate. The heat insulation plate 221 is a large plane, when one side of the heat generating belt 222 is close to the heat insulation plate 221, the heat insulation plate 221 can reflect and radiate the heat of the heat generating belt 222 to the element to be heated, so that the element to be heated can be fully heated, the efficiency of heat radiation is greater than 80%, and energy can be saved. Moreover, the surface load of the heat generating belt 222 relative to the heat generating wire is low, less material can meet the power demand, and material use can be saved. Embodiment 2
[0024] The difference from embodiment 1 is that the heat generating module 22 adopts a split modular design, the heat generating module 22 is divided into a plurality of independent split heat generating modules in the same layer of the heating cavity 2, each of the split heat generating modules includes the heat insulation plate 221 and the heat generating belt 222 fixedly installed at the bottom of the heat insulation plate 221, different power can be output to different areas of the split heat generating modules, the temperature of different areas can be accurately controlled, and the purpose of reducing energy consumption can be achieved. Embodiment 3
[0025] The difference from embodiment 1 or 2 is that the heat insulation plate 221 is movably connected with the heating cavity 2, a sliding rail 3 is arranged at the upper part of the heating cavity 2, the sliding rail 3 is made of silicon carbide material which is resistant to high temperature, the heat insulation plate 221 is slidably connected with the heating cavity 2 through the sliding rail 3, and the heat insulation plate 221 slides into or out of the heating cavity 2 on the sliding rail 3. Specifically, the movement direction of the sliding rail 3 is toward the opening of the box-type furnace body 1, the heat insulation plate 221 slides in the sliding rail 3 and slides out of the heating cavity 2 from the opening of the box-type furnace body 1. The furnace door of the box-type furnace body 1 is opened to quickly replace the heat generating module 22, so that the convenience of quickly replacing the heat generating module 22 is realized, and the damaged heat generating module can also be replaced online without long downtime, thereby improving the maintenance efficiency and the continuity of production. Embodiment 4
[0026] The difference from the embodiment 3 is that a groove 111 corresponding to the sliding track 3 is formed on the side wall 11 of the box furnace body 1, the moving direction of the sliding track 3 is towards the groove 111, the heat insulation plate 221 slides in the sliding track 3 and slides out of the heating cavity 2 from the groove 111. When the heating module 22 is replaced, it can be replaced after the furnace door is opened, reducing the instantaneous loss of temperature in the furnace. A closing plate for closing the groove 111 can be installed outside the side wall 11 of the box furnace body 1 to keep the temperature in the furnace stable and reduce heat loss. Embodiment 5
[0027] The difference from the embodiment 1 is that when it is necessary to further increase the radiation efficiency, the heat insulation plate 221 is provided in a double-layer structure, and a reflecting plate is clamped between the two layers of the heat insulation plate 221, which can make more heat radiation to the heated elements, improving the utilization rate of heat.
Claims
1. A drawer-type box furnace comprising a box furnace body, a furnace door provided to open the box furnace body, a plurality of drawer-type heating cavities provided in the box furnace body, a bottom plate provided at a lower portion of the heating cavities to place elements to be processed, and a heat generating module provided at an upper portion of the heating cavities, characterized in that: The heat generating module comprises a heat insulation plate arranged at the upper part of the heating cavity and a heat generating belt fixedly installed at the bottom of the heat insulation plate, and one side of the heat generating belt is close to the heat insulation plate and the other side radiates heat downward to the element to be processed on the bottom plate at the upper part of the heating cavity.
2. A drawer-type box furnace according to claim 1, characterized in that: The heat generating belt is fixed to the bottom of the heat insulation plate by hooks.
3. A drawer-type box furnace according to claim 1, characterized in that: The heat generating module is divided into a plurality of independent sub heat generating modules in the same layer of the heating cavity, and each sub heat generating module comprises the heat insulation plate and the heat generating belt fixedly installed at the bottom of the heat insulation plate.
4. The drawer-type box furnace according to claim 1, characterized in that: The heat insulation plate is movably connected with the heating cavity, and a sliding rail is arranged at the upper part of the heating cavity, the heat insulation plate is slidably connected with the heating cavity through the sliding rail, and the heat insulation plate slides into or out of the heating cavity on the sliding rail.
5. A drawer-type box furnace according to claim 4, characterized in that: The sliding rail is made of silicon carbide material.
6. A drawer-type box furnace according to claim 4, characterized in that: The movement direction of the sliding rail is toward the opening of the box furnace body, the heat insulation plate slides in the sliding rail and slides out of the heating cavity from the opening of the box furnace body.
7. A drawer-type box furnace according to claim 4, characterized in that: A groove corresponding to the sliding rail is formed on the side wall of the box furnace body, the movement direction of the sliding rail is toward the groove, and the heat insulation plate slides in the sliding rail and slides out of the heating cavity from the groove.
8. A drawer-type box furnace according to claim 1, characterized in that: The heat insulation plate is arranged in a double-layer structure, and a reflecting plate is clamped between the two layers of the heat insulation plate.
9. A drawer-type box furnace according to any one of claims 1-8, characterized in that: The heat insulation plate is made of quartz plate.