UV irradiation condition setting device and UV irradiation device

Abstract

The objective is to provide an ultraviolet irradiation condition setting device and an ultraviolet irradiation device that eliminate the need for readjustment work according to environmental conditions at the site of use of the ultraviolet irradiation device, or that make readjustment work easier if it is necessary. [Solution] The ultraviolet irradiation condition setting device according to the embodiment uses training data that includes at least one of the ambient humidity and ambient temperature at the location where the ultraviolet irradiation device is used as explanatory variables, and at least one of the power applied to the ultraviolet irradiating light source and the relative position of the light source with respect to the object being processed as objective variables, and uses the input ambient humidity and ambient temperature to calculate at least one of the power applied to the light source and the relative position of the light source with respect to the object being processed according to a machine learning algorithm.

Description

Technical Field

[0001] Embodiments of the present invention relate to an ultraviolet irradiation condition setting device and an ultraviolet irradiation device.

Background Art

[0002] Ultraviolet irradiation devices are used for, for example, surface treatments such as removal of organic substances (photo cleaning treatment) attached to the surface of an object to be processed (object to be treated), surface modification, and formation of an oxide film, photo alignment treatment of liquid crystals, curing of ultraviolet curable resins, sterilization, and the like.

[0003] Here, the illuminance of ultraviolet rays irradiated from an ultraviolet irradiation device onto the surface of an object to be processed is affected by, for example, environmental conditions at the location where the ultraviolet irradiation device is used. For example, when the environmental humidity increases or the environmental temperature increases, the illuminance of ultraviolet rays on the surface of the object to be processed may decrease.

[0004] Therefore, for example, even when the illuminance of ultraviolet rays on the surface of the object to be processed is within a predetermined range during the shipment inspection of the ultraviolet irradiation device, there is a possibility that the illuminance of ultraviolet rays on the surface of the object to be processed may be insufficient or the illuminance of ultraviolet rays may be excessive at the location where the ultraviolet irradiation device is used. If the illuminance of ultraviolet rays is insufficient or the illuminance of ultraviolet rays is excessive, there is a possibility that the quality and effect of the treatment may vary or deteriorate.

[0005] In this case, at the location where the ultraviolet irradiation device is used, if the position or applied power of the elements provided in the ultraviolet irradiation device is adjusted, the illuminance of ultraviolet rays on the surface of the object to be processed can be made within a predetermined range even if the environmental conditions change.

[0006] However, this approach would render the setup and adjustment work during the pre-shipment inspection of the UV irradiation device useless, and would necessitate readjustment work at the device's usage location. In this case, readjustment work at the usage location of the UV irradiation device is time-consuming and laborious. Furthermore, if the usage location of the UV irradiation device is a remote location such as overseas, the time and effort required for readjustment work will be even greater.

[0007] Therefore, there was a need for the development of technologies that would eliminate the need for readjustment work according to environmental conditions at the site where ultraviolet irradiation equipment is used, or that would make readjustment work easier if it is necessary. [Prior art documents] [Patent Documents]

[0008] [Patent Document 1] Japanese Patent Publication No. 2010-080351 [Overview of the Initiative] [Problems that the invention aims to solve]

[0009] The problem that the present invention aims to solve is to provide an ultraviolet irradiation condition setting device and an ultraviolet irradiation device that eliminate the need to perform readjustment work according to environmental conditions at the location where the ultraviolet irradiation device is used, or that make readjustment work easier even if readjustment work is required. [Means for solving the problem]

[0010] The ultraviolet irradiation condition setting device according to the embodiment uses training data, which includes at least one of the ambient humidity and ambient temperature at the location where the ultraviolet irradiation device is used as explanatory variables, and at least one of the power applied to the ultraviolet irradiation light source and the relative position of the light source with respect to the object being treated as objective variables, along with the input ambient humidity and ambient temperature, to calculate at least one of the power applied to the light source and the relative position of the light source with respect to the object being treated, according to a machine learning algorithm. [Effects of the Invention]

[0011] According to embodiments of the present invention, it is possible to provide an ultraviolet irradiation condition setting device and an ultraviolet irradiation device that eliminate the need to perform readjustment work according to environmental conditions at the location where the ultraviolet irradiation device is used, or that make readjustment work easier even if readjustment work is required. [Brief explanation of the drawing]

[0012] [Figure 1] This is a schematic side view illustrating the ultraviolet irradiation device according to this embodiment. [Figure 2] Figure 1 is a schematic side view of the ultraviolet irradiation device in the direction of the AA line. [Modes for carrying out the invention]

[0013] The embodiments will be illustrated below with reference to the drawings. In each drawing, similar components are denoted by the same reference numerals, and detailed descriptions will be omitted as appropriate.

[0014] The ultraviolet irradiation device 1 according to this embodiment can be used, for example, to irradiate the surface of a workpiece (object to be treated) with ultraviolet light for surface treatment such as removal of organic matter adhering to the surface of the workpiece (photocleaning), surface modification, and formation of an oxide film, as well as for photoalignment treatment of liquid crystals, curing of ultraviolet-curable resins, and sterilization. However, the uses of the ultraviolet irradiation device 1 are not limited to those exemplified.

[0015] In addition, the light source provided in the ultraviolet irradiation device 1 can be, for example, a dielectric barrier discharge lamp such as an excimer lamp or a discharge lamp such as a mercury lamp, or a light-emitting element such as a light-emitting diode that irradiates ultraviolet rays.

[0016] In this case, the illuminance of the ultraviolet rays irradiated from the excimer lamp is easily affected by environmental conditions such as humidity and temperature. Therefore, in the following, as an example, the case where an excimer lamp is provided as the light source in the ultraviolet irradiation device 1 will be described.

[0017] FIG. 1 is a schematic side view for exemplifying the ultraviolet irradiation device 1 according to the present embodiment. FIG. 2 is a schematic side view in the direction of line A-A of the ultraviolet irradiation device 1 in FIG. 1. In FIG. 2, the moving part 9 is omitted for the sake of avoiding complication.

[0018] As shown in FIGS. 1 and 2, the ultraviolet irradiation device 1 is provided with, for example, an excimer lamp 2, a positioning part 3, a positioning part 4, a frame 5, a lighting circuit 6, a cooling part 7, a gas supply part 8, a moving part 9, a controller 10, and an ultraviolet irradiation condition setting device 11.

[0019] As an example, the case where three excimer lamps 2 are provided is exemplified, but the number of excimer lamps 2 can be appropriately changed according to the size and number of the processed object 100 irradiated with ultraviolet rays. That is, at least one excimer lamp 2 may be provided.

[0020] As shown in FIG. 2, the excimer lamp 2 is provided with, for example, a discharge tube 21, an internal electrode 22, a reflection film ۲۳, a terminal cover ۲۴, a lead wire ۲۵, and an external electrode ۲۶.

[0021] The light-emitting tube 21 is cylindrical and has a form with a total length (length along the tube axis 21a) longer than the tube diameter. The light-emitting tube 21 can be, for example, a cylindrical tube. Sealing portions are provided at both ends of the light-emitting tube 21 in the direction along the tube axis 21a. By providing the sealing portions, the internal space of the light-emitting tube 21 can be hermetically sealed.

[0022] A rare gas is enclosed in the internal space of the light-emitting tube 21. In the excimer lamp 2, barrier discharge is performed between the internal electrode 22 and the external electrode 26 to give high-energy electrons to the enclosed rare gas to generate excimer-excited molecules. When the excimer-excited molecules return to their original state, ultraviolet rays having a specific peak wavelength are generated according to the type of the rare gas. Therefore, the rare gas enclosed in the internal space of the light-emitting tube 21 can be appropriately changed according to the use of the excimer lamp 2. The rare gas enclosed in the internal space of the light-emitting tube 21 can be, for example, krypton, xenon, argon, neon, or the like. Alternatively, a mixed gas in which a plurality of types of rare gases are mixed can be enclosed in the internal space of the light-emitting tube 21. For example, if the enclosed rare gas is xenon, ultraviolet rays with a peak wavelength of 172 nm can be generated.

[0023] The pressure (enclosure pressure) of the rare gas in the internal space of the light-emitting tube 21 at 25°C can be, for example, about 80 kPa to 200 kPa. The pressure (enclosure pressure) of the rare gas in the internal space of the light-emitting tube 21 at 25°C can be determined by the standard state of the gas (SATP (Standard Ambient Temperature and Pressure): temperature 25°C, 1 bar).

[0024] The light-emitting tube 21 is formed of, for example, a material having a high transmittance of ultraviolet rays with a peak wavelength of 200 nm or less. The light-emitting tube 21 is formed of, for example, a material containing SiO2 (silicon dioxide). The light-emitting tube 21 can be formed of, for example, synthetic quartz glass.

[0025] The internal electrode 22 has, for example, a coil 22a and a leg 22b. The coil 22a and the leg 22b can be formed integrally. The coil 22a and the leg 22b can be formed from, for example, a wire containing tungsten as the main component.

[0026] The coil 22a is spiral-shaped and is installed in the internal space of the discharge tube 21. The coil 22a extends along the tube axis 21a of the discharge tube 21 in the central region of the internal space of the discharge tube 21. A gap can be provided between the coil 22a and the inner wall of the discharge tube 21. Alternatively, no gap may be provided, and the coil 22a and the reflective film 23 may be in contact. If the reflective film 23 is not provided, the coil 22a and the inner wall of the discharge tube 21 may be in contact. However, if a gap of a predetermined size or less is provided, a stable barrier discharge can be generated at a low voltage.

[0027] Legs 22b are provided at each of the ends of the coil 22a. Legs 22b are linear in shape and extend from the ends of the coil 22a along the tube axis 21a of the discharge tube 21. Legs 22b are electrically connected to the lead wires 25.

[0028] The reflective film 23 is a film-like structure and is provided on the inner wall of the discharge tube 21. The reflective film 23 is provided between the external electrode 26 and the internal electrode 22 (coil 22a). The reflective film 23 reflects ultraviolet light generated in the internal space of the discharge tube 21 that does not travel in the direction of irradiation toward the direction of irradiation. The reflective film 23 contains, for example, SiO2. Note that the reflective film 23 is not necessarily required and can be omitted. However, if the reflective film 23 is provided, the efficiency of ultraviolet light extraction can be improved and chemical structural changes of the discharge tube 21 caused by incident ultraviolet light can be suppressed.

[0029] The terminal covers 24 are provided at each of the ends of the discharge tube 21 in the direction along the tube axis 21a. The terminal covers 24 cover, for example, the sealing portion of the discharge tube 21. The terminal covers 24 are formed from an insulating material such as resin or ceramics.

[0030] One end of the lead wire 25 is electrically connected to the internal electrode 22 via an inner lead and an outer lead provided in the sealing portion of the discharge tube 21. As shown in Figure 2, the other end of the lead wire 25 is electrically connected to the lighting circuit 6. The lead wire 25 can be provided on only one end of the discharge tube 21, or on both ends of the discharge tube 21.

[0031] The external electrode 26 is plate-shaped and is provided on the outside of the discharge tube 21. The external electrode 26 extends along the tube axis 21a of the discharge tube 21. If a reflective film 23 is provided, the external electrode 26 can be positioned opposite the reflective film 23. Also, if the length of the discharge tube 21 in the direction along the tube axis 21a is long, multiple external electrodes 26 can be provided for one discharge tube 21, as shown in Figure 2. At least a portion of the surface of the external electrode 26 facing the discharge tube 21 can be in contact with the outer surface of the discharge tube 21. The external electrode 26 can be made from a metal such as stainless steel or aluminum.

[0032] The positioning unit 3 prevents the excimer lamp 2 from shifting position around its tube axis 21a. As shown in Figures 1 and 2, the positioning units 3 can be provided in pairs, for example, for one excimer lamp 2.

[0033] The positioning section 3 is plate-shaped, penetrates in the thickness direction, and has a hole 3a that opens on the end face opposite to the frame 5 side. The terminal cover 24 of the excimer lamp 2 is provided inside the hole 3a. The inner wall surface of the hole 3a is provided with a flat surface 3a1 that contacts the flat surface 24a provided on the side surface of the terminal cover 24. By the flat surface 24a of the terminal cover 24 contacting the flat surface 3a1 of the positioning section 3, it is possible to suppress misalignment of the excimer lamp 2 around the tube axis 21a.

[0034] The positioning section 4 prevents the excimer lamp 2 from moving in the direction along the tube axis 21a. A pair of positioning sections 4 can be provided for one excimer lamp 2, or for a plurality of excimer lamps 2 arranged side by side. In the direction along the tube axis 21a of the excimer lamp 2, the pair of positioning sections 4 face each other. In the direction along the tube axis 21a of the excimer lamp 2, the excimer lamp 2 is provided between the positioning sections 4. In this case, at least one of the pair of positioning sections 4 is in contact with the terminal cover 24 of the excimer lamp 2. Therefore, it is possible to prevent the position of the excimer lamp 2 sandwiched between the pair of positioning sections 4 from moving.

[0035] The positioning parts 3 and 4 can be attached to the frame 5 using fastening members such as screws. The positioning parts 3 and 4 can be formed from a resin such as fluororesin.

[0036] Frame 5 holds the excimer lamp 2, positioning unit 3, and positioning unit 4. The structure of frame 5 is not particularly limited; it can be a framework structure as illustrated in Figure 2, or it can be a plate-like body, etc. Frame 5 can be made from, for example, metal.

[0037] As shown in Figure 2, the lighting circuit 6 is electrically connected to the internal electrode 22 via wiring 6b, terminal 6a, and lead wire 25. The lighting circuit 6 is also electrically connected to the external electrode 26 via wiring 6c. In Figure 1, one lighting circuit 6 lights up three excimer lamps 2, but it is also possible to electrically connect one lighting circuit 6 to each of multiple excimer lamps 2.

[0038] The lighting circuit 6 converts power from the AC power source into high-voltage, high-frequency power. For example, the lighting circuit 6 is equipped with an inverter and applies lamp power of approximately 37 kHz and 2.4 kW to the excimer lamp 2.

[0039] The cooling section 7 is block-shaped and extends in a direction along the tube axis 21a of the discharge tube 21. The cooling section 7 is provided between the positioning sections 3. The cooling section 7 is provided between the external electrode 26 of the excimer lamp 2 and the frame 5 in a direction intersecting the direction in which the tube axis 21a extends. A gap is provided between the surface of the cooling section 7 facing the external electrode 26 and the outer surface of the external electrode 26. Inside the cooling section 7, there is a hole 7c that extends along the tube axis 21a of the discharge tube 21. The hole 7c is provided with a plurality of discharge holes 7c1 that open to the surface of the cooling section 7 facing the external electrode 26. The cooling section 7 is made of a metal such as aluminum or stainless steel.

[0040] The gas supply unit 8 supplies gas to the gap between the surface of the cooling unit 7 facing the external electrode 26 and the outer surface of the external electrode 26, via the holes 7c and discharge holes 7c1 of the cooling unit 7. The gas supply unit 8 may be equipped with a gas supply source 81 and a gas control unit 82.

[0041] The gas supply source 81 supplies gases such as dry air, nitrogen gas, and noble gases (e.g., argon, neon, helium, etc.) to the holes 7c of the cooling unit 7.

[0042] The gas control unit 82 controls, for example, at least one of the flow rate and / or pressure of the gas supplied to the cooling unit 7. The gas control unit 82 may also have a function to switch between starting and stopping the gas supply.

[0043] The moving part 9 moves the relative position of the excimer lamp 2 with respect to the workpiece 100 in a direction intersecting the direction in which the pipe axis 21a extends. The moving part 9 illustrated in Figure 1 moves the position of the excimer lamp 2 toward the workpiece 100 or toward the workpiece 100 in a direction intersecting the direction in which the pipe axis 21a extends.

[0044] The moving section 9 includes, for example, a control motor 9a such as a servo motor, multiple conversion mechanisms 9b such as ball screws that convert the rotational motion of the control motor 9a into linear motion, a transmission mechanism 9c such as a timing pulley or timing belt that synchronously rotates the multiple conversion mechanisms 9b, and a guide mechanism 9d such as a linear bearing that guides the linear motion. The guide mechanism 9d can be provided, for example, in a housing to which the frame 5 of the ultraviolet irradiation device 1 is attached.

[0045] Note that the configuration of the movable part 9 is not limited to the example shown. The movable part 9 only needs to be capable of moving the relative position of the excimer lamp 2 with respect to the workpiece 100.

[0046] Furthermore, although the example given illustrates the case where the position of the excimer lamp 2 is moved in a direction intersecting the direction in which the pipe axis 21a extends, the position of the workpiece 100 may also be moved, or the positions of the excimer lamp 2 and the workpiece 100 may be moved. In other words, the moving part 9 only needs to move the relative position of the excimer lamp 2 with respect to the workpiece 100 in a direction intersecting the direction in which the pipe axis 21a extends.

[0047] Furthermore, while a remotely controllable mobile unit 9 using a control motor 9a or the like has been illustrated, the operator may, for example, operate the mobile unit 9 to move the relative position of the excimer lamp 2 with respect to the workpiece 100. For example, the mobile unit 9 may have a screw mechanism, and the operator may operate the screw mechanism or the like. However, if the mobile unit 9 is remotely controllable using a control motor 9a or the like, the relative position of the excimer lamp 2 with respect to the workpiece 100 can be moved even while the ultraviolet irradiation device 1 is in operation (while ultraviolet light is being irradiated). In addition, the relative position of the excimer lamp 2 with respect to the workpiece 100 can be moved from a remote location.

[0048] The controller 10 includes, for example, an arithmetic unit such as a CPU (Central Processing Unit) and a storage unit such as semiconductor memory. The controller 10 is, for example, a computer. The storage unit stores a control program that controls the operation of each element provided in the ultraviolet irradiation device 1. The arithmetic unit controls the operation of each element provided in the ultraviolet irradiation device 1 based on the control program stored in the storage unit.

[0049] For example, the controller 10 controls the lighting circuit 6 to switch between applying and stopping power to the excimer lamp 2, or to change the power applied to the excimer lamp 2. For example, the controller 10 controls the gas supply unit 8 to switch between supplying and stopping gas to the cooling unit 7, or to change the flow rate of gas supplied to the cooling unit 7. For example, the controller 10 controls the moving unit 9 to move the relative position of the excimer lamp 2 with respect to the workpiece 100.

[0050] Furthermore, the controller 10 may also be equipped with an input section for the operator to input data, a monitor to display the operating status and abnormality indications of the ultraviolet irradiation device 1, and a power switch.

[0051] If the ultraviolet irradiance on the surface of the workpiece 100 is insufficient or excessive, the quality and effectiveness of the treatment may vary or decrease. Therefore, generally, during the shipment inspection of the ultraviolet irradiation device 1, the power applied to the excimer lamp 2 is adjusted, or the relative position of the excimer lamp 2 with respect to the workpiece 100 is adjusted, so that the ultraviolet irradiance on the surface of the workpiece 100 is within a predetermined range.

[0052] However, the irradiance of ultraviolet light emitted from the ultraviolet irradiation device 1 to the surface of the workpiece 100 is affected by the environmental conditions at the location where the ultraviolet irradiation device 1 is used. Therefore, if the environmental conditions during the shipment inspection of the ultraviolet irradiation device 1 differ from the environmental conditions at the location where the ultraviolet irradiation device is used, even if the irradiance of ultraviolet light on the surface of the workpiece 100 is set within a predetermined range during the shipment inspection of the ultraviolet irradiation device 1, there is a risk that the irradiance of ultraviolet light on the surface of the workpiece 100 may be insufficient or excessive at the location where the ultraviolet irradiation device 1 is used.

[0053] For example, if the light source of the ultraviolet irradiation device 1 is an excimer lamp 2, the illuminance of ultraviolet rays on the surface of the object 100 will decrease if the ambient humidity or ambient temperature increases. For example, in the case of an excimer lamp 2, the effect of ambient humidity becomes significant, and the illuminance of ultraviolet rays at 60% humidity is about 90% of the illuminance of ultraviolet rays at 20% humidity. Furthermore, if the ambient temperature also increases, the illuminance of ultraviolet rays will decrease even further.

[0054] In this case, the relationship between ambient humidity and the irradiance of ultraviolet light on the surface of the treated object 100 is not linear. Furthermore, the appropriate range of irradiance of ultraviolet light on the surface of the treated object 100 may vary depending on the material and surface condition of the surface of the treated object 100, the type of treatment, and other factors.

[0055] Therefore, in order to set the ultraviolet irradiance on the surface of the treated object 100 within an appropriate range, it is necessary to comprehensively consider factors such as environmental conditions, the material of the surface of the treated object 100, the surface condition of the treated object 100, and the effects depending on the type of treatment, and then set at least one of the following: the power applied to the excimer lamp 2 and the relative position of the excimer lamp 2 with respect to the treated object 100. However, it is difficult to make such complex settings in a short period of time. Therefore, the ultraviolet irradiation device 1 according to this embodiment is provided with an ultraviolet irradiation condition setting device 11.

[0056] As shown in Figures 1 and 2, the ultraviolet irradiation condition setting device 11 is electrically connected to the controller 10. In this case, the ultraviolet irradiation condition setting device 11 can be formed integrally with the controller 10, for example, or connected to the controller 10 via wiring or the like. The ultraviolet irradiation condition setting device 11 can also be separated from the controller 10. For example, the ultraviolet irradiation condition setting device 11 is used in shipping inspections and manufacturing processes, and can be separated from the controller 10 when shipping the ultraviolet irradiation condition setting device 11 or when installing the ultraviolet irradiation device 1 at the place of use.

[0057] The ultraviolet irradiation condition setting device 11 includes, for example, a processing unit such as a CPU and a storage unit such as semiconductor memory. The ultraviolet irradiation condition setting device 11 is, for example, a computer. The storage unit stores a program for creating a model according to a machine learning algorithm and training data (teacher data).

[0058] Machine learning algorithms such as SVR (Support Vector Regression), PLS (Partial Least Squares), deep learning, random forest, and decision tree can be used. In this case, if deep learning is used for machine learning, it is possible to recognize the complex conditions mentioned above and create an accurate trained model relatively easily.

[0059] Furthermore, the training data used in the deep learning method is created in advance. The created training data is stored in the memory unit of the ultraviolet irradiation condition setting device 11. The training data includes explanatory variables and a target variable. Explanatory variables include, for example, the humidity of the environment, the temperature of the environment, the material of the surface of the treated object 100, the surface condition of the treated object 100, and the effect depending on the type of treatment (for example, in the case of photocleaning or surface modification, the wettability of the surface of the treated object 100). The dependent variable is, for example, the power applied to the excimer lamp 2, and at least one of the relative positions of the excimer lamp 2 with respect to the workpiece 100.

[0060] In this case, the ambient humidity and ambient temperature change more frequently than the surface material of the workpiece 100, the surface condition of the workpiece 100, and the type of treatment. Furthermore, depending on the type of light source, the influence of either ambient humidity or ambient temperature on the illuminance of ultraviolet rays on the surface of the workpiece 100 may be greater. For example, as mentioned above, when the light source is an excimer lamp 2, the influence of ambient humidity on illuminance is greater than the influence of ambient temperature on illuminance.

[0061] Therefore, the explanatory variables for the training data can be at least one of the environmental humidity and the environmental temperature.

[0062] The ambient temperature and humidity can be, for example, the ambient temperature and humidity at a position approximately 1.5 m horizontally away from the excimer lamp 2. The ambient temperature and humidity can be detected, for example, by a temperature sensor and a humidity sensor electrically connected to the ultraviolet irradiation condition setting device 11. Alternatively, the operator can input the detected ambient temperature and humidity values ​​into the ultraviolet irradiation condition setting device 11.

[0063] Furthermore, the surface material of the object 100, the surface condition of the object 100, and the effects according to the type of treatment (for example, the wettability of the surface of the object 100) can be detected, for example, by sensors or image detection devices electrically connected to the ultraviolet irradiation condition setting device 11. Alternatively, the operator can input the surface material of the object 100, the surface condition of the object 100, and the effects according to the type of treatment into the ultraviolet irradiation condition setting device 11.

[0064] The ultraviolet irradiation condition setting device 11 uses the input data (for example, at least one of the ambient humidity, ambient temperature, surface material of the object 100, and surface condition of the object 100) and training data to calculate, according to a machine learning algorithm, at least one of the power to be applied to the excimer lamp 2 and the relative position of the excimer lamp 2 with respect to the object 100. The calculation results are output from the ultraviolet irradiation condition setting device 11 and input to the controller 10.

[0065] Increasing the power applied to the excimer lamp 2 may shorten its lifespan. Therefore, the ultraviolet irradiation condition setting device 11 can prioritize the relative position of the excimer lamp 2 relative to the workpiece 100, or assign a priority order to the output, rather than the power applied to the excimer lamp 2. In this way, the lifespan of the excimer lamp 2 can be extended and appropriate ultraviolet irradiation can be performed.

[0066] The controller 10 controls the lighting circuit 6 to apply power to the excimer lamp 2, for example, based on the power value calculated by the ultraviolet irradiation condition setting device 11. The controller 10 controls the moving unit 9 to move the relative position of the excimer lamp 2 with respect to the workpiece 100, based on the value of the relative position of the excimer lamp 2 with respect to the workpiece 100, which is calculated by the ultraviolet irradiation condition setting device 11, for example.

[0067] Furthermore, the power value and at least one of the relative positions of the excimer lamp 2 with respect to the workpiece 100 can be displayed on a display device electrically connected to the ultraviolet irradiation condition setting device 11 or on a display device electrically connected to the controller 10. The operator can then input the power value and movement amount to the controller 10 based on the values ​​displayed on the display device. Alternatively, the operator may adjust the relative position of the excimer lamp 2 with respect to the workpiece 100 by operating a screw mechanism or the like based on the values ​​displayed on the display device.

[0068] Furthermore, data communication between the ultraviolet irradiation condition setting device 11 and the controller 10 can be enabled via the internet or other means. For example, as mentioned above, the ultraviolet irradiation condition setting device 11 may be located remotely (e.g., at a manufacturer) and separated from the controller 10. In such cases, the humidity of the environment, the temperature of the environment, the material of the surface of the object to be treated 100, the surface condition of the object to be treated 100, and the type of treatment may change at the location where the ultraviolet irradiation device 1 is used. In such cases, data such as the changed humidity of the environment can be transmitted to the ultraviolet irradiation condition setting device 11, the aforementioned calculations can be performed remotely, and the calculation results can be input to the controller 10 via the internet or other means. This enables proper operation of the ultraviolet irradiation device 1 located remotely.

[0069] Furthermore, if the ambient humidity, ambient temperature, surface material of the object to be treated 100, surface condition of the object to be treated 100, and type of treatment at the location where the ultraviolet irradiation device 1 is used are known in advance, this data can be input into the ultraviolet irradiation condition setting device 11, and based on the calculation results, the power value to be applied to the excimer lamp 2 can be stored in the memory of the controller 10, or the relative position of the excimer lamp 2 with respect to the object to be treated 100 can be adjusted in advance. In this way, there is no need to perform readjustment work according to the environmental conditions at the location where the ultraviolet irradiation device 1 is used.

[0070] As explained above, if the ultraviolet irradiation condition setting device 11 is provided, it becomes possible to avoid having to readjust the ultraviolet irradiation device 1 in accordance with environmental conditions, or if readjustment is necessary, the readjustment will be made easier.

[0071] Although several embodiments of the present invention have been illustrated above, these embodiments are presented as examples only and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included in the scope and spirit of the invention, as well as in the claims of the invention and its equivalents. Furthermore, the embodiments described above can be implemented in combination with each other. [Explanation of Symbols]

[0072] 1 UV irradiation device, 2 excimer lamp, 6 lighting circuit, 9 mobile unit, 10 controller, 11 UV irradiation condition setting device

Claims

1. An ultraviolet irradiation condition setting device that calculates the power to be applied to the light source and the relative position of the light source with respect to the object, according to a machine learning algorithm, using training data that includes at least one of the ambient humidity and ambient temperature at the location where the ultraviolet irradiation device is used as explanatory variables, and at least one of the power applied to the ultraviolet irradiation light source and the relative position of the light source with respect to the object being treated as objective variables, and at least one of the input ambient humidity and ambient temperature.

2. A light source that emits ultraviolet light; A lighting circuit that applies power to the aforementioned light source; A moving part that moves the relative position of the light source with respect to the workpiece; The lighting circuit and the controller that controls the moving part; The ultraviolet irradiation condition setting device according to claim 1; It is equipped with, The aforementioned controller, Based on the value of the power to be applied to the light source calculated by the ultraviolet irradiation condition setting device, the lighting circuit is controlled. An ultraviolet irradiation device that controls the moving part based on the value of the relative position of the light source with respect to the object being treated, calculated by the ultraviolet irradiation condition setting device.

3. The ultraviolet irradiation apparatus according to claim 2, wherein the light source is an excimer lamp.

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