Coating member and coating apparatus

Abstract

The present invention provides a coating member and a coating apparatus that allow the coating needle to be easily attached to and detached from the coating needle fixing member. [Solution] The coating member 4 comprises a coating needle 24, a coating needle fixing member 25, an elastic member 27, and a pressing member 26. The coating needle 24 is capable of transferring coating material to the surface of an object. The coating needle fixing member 25 is provided with an opening 25a into which the coating needle 24 can be inserted. The elastic member 27 is positioned inside the opening 25a. The pressing member 26 can press the elastic member 27. When the pressing member 26 presses the elastic member 27 with the coating needle 24 inserted through the opening 25a, the elastic member 27 elastically deforms so that it presses against the outer circumferential surface of the coating needle 24.

Description

Technical Field

[0001] The present disclosure relates to an application member and an application device.

Background Art

[0002] Conventionally, an application device including an application needle for applying a liquid material to an object has been known. Japanese Patent No. 7164997 (Patent Document 1) discloses an application member in which an application needle is detachable from an application needle fixing member.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, there is room for improvement in detaching the application needle fixed to the application needle fixing member.

[0005] The present disclosure has been made in view of the above problems, and an object thereof is to provide an application member and an application device in which an application needle can be easily detached from an application needle fixing member.

Means for Solving the Problems

[0006] The application member according to the present disclosure includes an application needle, an application needle fixing member, an elastic member, and a pressing member. The application needle can transfer a coating material to the surface of an object. An opening is provided in the application needle fixing member. The opening allows the application needle to be inserted. The elastic member is disposed inside the opening. The pressing member can press the elastic member. When the pressing member presses the elastic member with the application needle inserted through the opening, the elastic member elastically deforms so as to press the outer peripheral surface of the application needle.

[0007] A coating apparatus according to this disclosure comprises the coating member and a linear motion unit. The linear motion unit changes the relative position of the coating member with respect to the object. [Effects of the Invention]

[0008] According to this disclosure, it is possible to provide a coating member and a coating apparatus in which a coating needle can be easily attached to and detached from a coating needle fixing member. [Brief explanation of the drawing]

[0009] [Figure 1] This is a schematic diagram of a coating apparatus according to Embodiment 1. [Figure 2] Figure 1 is a schematic diagram showing the coating member of the coating apparatus. [Figure 3] This is a schematic diagram showing the configuration of the coating needle holder shown in Figure 2, according to Embodiment 1. [Figure 4] Figure 2 is a schematic diagram showing the base body of the coating member. [Figure 5] This is a schematic cross-sectional view showing the state before the coating needle is joined to the coating needle fixing member in Embodiment 1. [Figure 6] Figure 3 is a schematic cross-sectional view showing the joining mechanism between the coating needle and the coating needle fixing member. [Figure 7] This is a schematic cross-sectional view showing the joining configuration between the coating needle and the coating needle fixing member according to Embodiment 2. [Modes for carrying out the invention]

[0010] Embodiments of the present invention will be described below with reference to the figures. In the following figures, identical or corresponding parts will be given the same reference numeral, and their descriptions will not be repeated.

[0011] (Embodiment 1) <Configuration of the coating device> Figure 1 is a schematic diagram of a coating apparatus 100 according to Embodiment 1. The coating apparatus 100 according to Embodiment 1 will be explained using Figure 1. For the sake of explanation, the X, Y, and Z directions are introduced. Referring to Figure 1, the coating apparatus 100 according to Embodiment 1 mainly comprises a processing chamber, a linear motion unit 11 located inside the processing chamber, a coating member 4, an observation optical system 6, a CCD camera 7 connected to the observation optical system 6, and a control unit. The control unit includes a monitor 9, a control computer 10, and an operation panel 8.

[0012] Inside the processing chamber, a linear motion unit 11 is installed to change the relative position of the coating material. The linear motion unit 11 includes a Y-axis table 2, an X-axis table 1, and a Z-axis table 3. Specifically, the Y-axis table 2 is installed on the bottom of the processing chamber. This Y-axis table 2 is movable in the Y-axis direction. Specifically, a guide part is installed on the underside of the Y-axis table 2. This guide part is slidably connected to a guide rail installed on the bottom of the processing chamber. A ball screw is also connected to the underside of the Y-axis table 2. By operating this ball screw with a drive member such as a motor, the Y-axis table 2 can move along the guide rail (in the Y-axis direction). Furthermore, the upper surface of the Y-axis table 2 is a mounting surface for mounting the substrate 5, which is the object to be processed. Therefore, the Y-axis table 2 functions as a holder for holding the substrate 5, which is the object to be coated with liquid material.

[0013] An X-axis table 1 is installed on a Y-axis table 2. The X-axis table 1 is positioned on a structure that straddles the Y-axis table 2 in the X-axis direction. A movable body, to which the Z-axis table 3 is connected, is mounted on the X-axis table 1 so as to be movable in the X-axis direction. The movable body is movable in the X-axis direction, for example, using a ball screw. The X-axis table 1 is fixed to the bottom surface of the processing chamber via the above structure. Therefore, the Y-axis table 2 described above is movable in the Y-axis direction relative to the X-axis table 1.

[0014] A Z-axis table 3 is installed on the mobile body connected to the X-axis table 1, as described above. An observation optical system 6 and a coating member 4 are connected to the Z-axis table 3. The observation optical system 6 is used to observe the coating position on the substrate 5, which is the object to be coated. The CCD camera 7 converts the observed image into an electrical signal. The Z-axis table 3 holds these observation optical system 6 and coating member 4 so that they can move in the Z-axis direction.

[0015] The control computer 10 and operation panel 8 for controlling the Y-axis table 2, X-axis table 1, Z-axis table 3, observation optical system 6, and coating material 4, as well as the monitor 9 attached to the control computer, are installed outside the processing room. The monitor 9 displays image data converted by the CCD camera 7 mentioned above and output data from the control computer 10. The operation panel 8 is used to input commands to the control computer 10.

[0016] <Composition of coating material> Figure 2 is a schematic diagram showing the coating member 4 of the coating apparatus 100 shown in Figure 1. Referring to Figure 2, the coating member 4 of Embodiment 1 mainly includes a servo motor 41, a cam 43, a bearing 44 held in contact with the cam surface of the cam 43, a cam connecting plate 45, a movable part 46, a movable base 35 that holds the coating needle holder 20, and a coating material container 21. The coating needle holder 20 is detachably attached to the movable base 35. In other words, the movable base 35, as a base body, detachably holds the coating needle holder 20.

[0017] In the coating member 4, the servo motor 41 is installed such that the central axis extends in the direction along the Z-axis direction shown in FIG. 1. A cam 43 is connected to the rotating shaft of the servo motor 41. The cam 43 is rotatable about the central axis of the servo motor 41. The cam 43 includes a central portion connected to the rotating shaft of the servo motor 41 and a flange portion connected to one end of the central portion. The upper surface of the flange portion (the surface on the servo motor 41 side) is a cam surface. This cam surface is formed in an annular shape along the outer periphery of the central portion and is formed in a slope shape such that the distance from the bottom surface of the flange portion varies. Specifically, the cam surface includes an upper end flat region where the distance from the bottom surface is the farthest (thickest), a lower end flat region disposed at an interval from the upper end flat region, and a slope portion that smoothly connects between the upper end flat region and the lower end flat region. The lower end flat region is a region where the distance from the bottom surface is the closest (thinnest).

[0018] A bearing 44 is arranged so as to contact the cam surface of the cam 43. A cam connecting plate 45 is connected to the bearing 44. In the cam connecting plate 45, the other end opposite to the one end connected to the bearing 44 is fixed to a movable portion 46. A movable base 35 as a base body is connected to the movable portion 46. A coating needle holder 20 is installed on the movable base 35. The coating needle holder 20 includes a coating needle 24. The coating needle 24 can apply a liquid material to a substrate 5 as an object. The coating needle 24 is arranged to protrude from the coating needle holder 20 on the lower surface of the coating needle holder 20 (the lower side opposite to the side where the servo motor 41 is located). A coating material container 21 is arranged under the coating needle holder 20. The coating needle 24 is held in a state of being inserted into the coating material container 21.

[0019] A fixed pin is fixed to the movable part 46. Also, another fixed pin is fixed to the base that holds the servo motor 41. A spring is installed to connect between these fixed pins. By this spring, the movable part 46 is in a state of receiving a force toward the coating material container 21 side. Also, by the force of this spring, the bearing 44 maintains a state of being pressed against the cam surface of the cam 43.

[0020] Also, the movable part 46 and the movable base 35 are connected to a linear guide installed on the base that holds the servo motor 41 and are movable along the Z-axis direction.

[0021] In the coating member 4 described above, by driving the servo motor 41, the rotation axis of the servo motor 41 is rotated to rotate the cam 43. As a result, the position of the bearing 44 in contact with the cam surface of the cam 43 in the Z-axis direction varies according to the rotation of the rotation axis of the servo motor 41. Then, according to the position variation of the bearing 44 in the Z-axis direction, the movable part 46 and the movable base 35 move in the Z-axis direction, whereby the position of the coating needle 24 in the Z-axis direction can be changed.

[0022] FIG. 3 is a schematic diagram showing the configuration of the coating needle holder 20 shown in FIG. 2 according to Embodiment 1. In FIG. 3, for convenience of explanation, each member included in the coating needle holder is shown disassembled. As shown in FIG. 3, the coating needle holder 20 has a holder base 22 as a housing, a holder lid 23, a coating needle fixing member 25, a pressing member 26, and an elastic member 27 (see FIG. 5).

[0023] A recess 22a is formed inside the holder base 22 to accommodate the coating needle fixing member 25 to which the coating needle 24 is connected. In other words, the coating needle fixing member 25 is positioned inside the housing, which is composed of the holder base 22 and the holder cover 23. With most of the coating needle fixing member 25 positioned inside the housing, which is composed of the holder base 22 and the holder cover 23, the coating needle fixing member 25 is fixed to the holder base 22 and the holder cover 23 by screwing it to the holder base 22 and the holder cover 23. That is, the coating needle fixing member 25 is fixed to the holder base 22 and the holder cover 23 such that a portion of the coating needle fixing member 25 protrudes from the housing.

[0024] Figure 4 is a schematic diagram showing the base body of the coating member 4 shown in Figure 2. Referring to Figure 8, as described above, in the coating member 4, the coating needle holder 20 is detachably attached to the movable base 35. Specifically, on the surface of the coating needle holder 20 facing the movable base 35 (the surface of the holder base 22), there are multiple magnets (for example, two) not shown. Also, as shown in Figure 4, there are multiple magnets (two in Figure 4) 33 on the movable base 35. The coating needle holder 20 can be installed on the movable base 35 by the mutual attraction between the magnets on the surface of the holder base 22 and the magnets 33 on the movable base 35 shown in Figure 4. By adjusting the positions of the magnets on the surface of the holder base 22 and the magnets 33 on the movable base 35, the position of the coating needle holder 20 can be accurately positioned when the coating needle holder 20 is attracted to the movable base 35 by the magnetic force acting between the magnets on the holder base 22 and the magnets 33 on the movable base 35.

[0025] For example, the reference surface of the coating needle holder 20 in the Z direction can be pressed against the reference surface 34 of the movable base 35, and the reference surface of the coating needle holder 20 in the X direction can be pressed against the reference surface 36 of the movable base 35. This state can be achieved, for example, by the following configuration. That is, with the coating needle holder 20 installed on the movable base 35, the relative positions of the magnets on the coating needle holder 20 and the magnets 33 on the movable base 35, which face each other, are adjusted. Specifically, the position of the magnets 33 on the movable base 35 is positioned closer to the reference surfaces 34 and 36 than the position of the magnets on the coating needle holder 20. In this way, the magnetic force between the magnets on the surface of the coating needle holder 20 and the magnets 33 on the movable base 35 can apply an attractive force to the coating needle holder 20 toward the reference surfaces 34 and 36 (an attractive force in the direction indicated by the arrows in Figure 4). As a result, the coating needle holder 20 can be fixed to the movable base 35 with high positional accuracy and reproducibility.

[0026] Figure 5 is a schematic cross-sectional view showing the state before the coating needle 24 is joined to the coating needle fixing member 25 in Embodiment 1. Figure 6 is a schematic cross-sectional view showing the joining configuration of the coating needle 24 and the coating needle fixing member 25 in Figure 3. The coating needle fixing member 25 is fixed to the end of the coating needle 24 opposite to the tip portion 24a side that applies liquid material to the object (i.e., the base portion 24b side) in the extending direction of the coating needle 24 (Z direction in Figure 3). The coating needle fixing member 25 detachably fixes the coating needle 24.

[0027] Specifically, as shown in Figures 5 and 6, the coating needle fixing member 25 is provided with an opening 25a into which a coating needle 24 can be inserted. The opening 25a has an opening surface H1, an intermediate surface H2, a bottom surface H3, a first side surface, and a second side surface. The opening of the opening 25a is located on the opening surface H1. The coating needle 24 is inserted from the opening surface H1 into the opening 25a. The bottom surface H3 is a surface into which the coating needle 24 can abut. In the direction in which the opening 25a extends, the intermediate surface H2 is located between the opening surface H1 and the bottom surface H3. The first side surface is the surface connecting the opening surface H1 and the intermediate surface H2. The second side surface is the surface connecting the bottom surface H3 and the intermediate surface H2. The inner diameter of the second side surface is smaller than the inner diameter of the first side surface. The inner diameter of the opening 25a may be larger than the diameter of the base portion 24b of the application needle 24 so that the application needle 24 can be smoothly inserted into the opening 25a.

[0028] The bottom surface H3 is positioned at a distance L from the opening (opening surface H1) of the opening 25a between 2.5 mm and 6.0 mm. The length of the coating needle 24 is greater than or equal to distance L. In this way, when the coating needle 24 is housed in the opening 25a, a portion of the coating needle 24 protrudes from the opening 25a.

[0029] The elastic member 27 is positioned inside the opening 25a. Specifically, the elastic member 27 is in contact with the intermediate surface H2 and the first side surface. The elastic member 27 is, for example, an annular O-ring. The material constituting the elastic member 27 may be any of nitrile rubber, fluororubber, silicone rubber, natural rubber, acrylic rubber, urethane rubber, butadiene rubber, and chloroprene rubber. When the coating needle 24 is inserted into the opening 25a, the O-ring, as the elastic member 27, surrounds the coating needle 24. The inner diameter of the O-ring may be approximately the same as the diameter of the base portion 24b of the coating needle 24, or slightly larger, so that the coating needle 24 can be smoothly inserted into the O-ring.

[0030] The pressing member 26 can press against the elastic member 27. A portion of the pressing member 26 is positioned inside the opening 25a. A male thread is formed on the outer circumferential surface of the portion of the pressing member 26 positioned inside the opening 25a. A female thread is formed on the first side surface. In this way, the pressing member 26 fits into the opening 25a.

[0031] The pressing member 26 is provided with a through hole 26a. The through hole 26a extends in the Z direction in Figure 3. A coating needle 24 can be inserted through the through hole 26a. The inner diameter of the through hole 26a may be slightly larger than the diameter of the base portion 24b of the coating needle 24 so that the coating needle 24 can be smoothly inserted into the through hole 26a.

[0032] As shown in Figure 5, the elastic member 27 is positioned between the pressing member 26 and the intermediate surface H2. The pressing member 26 can press the elastic member 27. Specifically, by tightening the pressing member 26, the pressing member 26 presses the elastic member 27.

[0033] Next, a method for fixing the coating needle 24 to the coating needle fixing member 25 will be described. First, as shown in Figure 5, the pressing member 26 is loosened relative to the opening 25a so that the elastic member 27 does not deform. At this time, the inner diameter of the elastic member 27 may be approximately the same as the diameter of the base portion 24b of the coating needle 24, or it may be slightly larger.

[0034] Next, the coating needle 24 is inserted through the through hole 26a of the pressing member 26, the opening of the elastic member 27, and the opening 25a of the coating needle fixing member 25 so that the base portion 24b abuts against the bottom surface H3.

[0035] Next, the pressing member 26 is loosened relative to the opening 25a. In this way, with the coating needle 24 inserted through the opening 25a, the pressing member 26 presses against the elastic member 27. As a result, as shown in Figure 6, the elastic member 27 elastically deforms so that it presses against the outer surface of the coating needle 24. In this way, the coating needle 24 is sandwiched by the elastic member 27 and fixed to the coating needle fixing member 25.

[0036] Next, we will explain how to remove the coating needle 24 from the coating needle fixing member 25. First, loosen the pressing member 26 with respect to the opening 25a. By doing so, the shape of the elastic member 27 returns to its shape before elastic deformation.

[0037] Next, for example, the application needle 24 can be removed from the application needle fixing member 25 by pulling it with a person's hand.

[0038] <Effects and Effects> The coating member 4 according to this disclosure comprises a coating needle 24, a coating needle fixing member 25, an elastic member 27, and a pressing member 26. The coating needle 24 is capable of transferring a coating material to the surface of an object. The coating needle fixing member 25 is provided with an opening 25a into which the coating needle 24 can be inserted. The elastic member 27 is disposed inside the opening 25a. The pressing member 26 can press the elastic member 27. When the pressing member 26 presses the elastic member 27 with the coating needle 24 inserted through the opening 25a, the elastic member 27 elastically deforms so that it presses the outer circumferential surface of the coating needle 24.

[0039] This allows the coating needle 24 to be easily attached to and detached from the coating needle fixing member 25. Furthermore, since the coating needle 24 is not integrated with the coating needle fixing member 25, there is no need to discard any other components when replacing the coating needle 24. As a result, costs can be reduced when replacing the coating needle 24.

[0040] According to the coating member 4 described above, the opening 25a has a bottom surface H3 to which the coating needle 24 can contact. The bottom surface H3 is located at a distance L from the opening (opening surface H1) of the opening 25a that is between ○○ mm and ○○ mm.

[0041] In this manner, when the coating needle 24 is housed in the opening 25a, a portion of the coating needle 24 protrudes from the opening 25a. Furthermore, when transferring the coating material to the surface of the object, the bottom surface H3 presses against the coating needle 24, thereby fixing the relative position of the coating needle 24 within the opening 25a.

[0042] The coating apparatus 100 according to this disclosure comprises the coating member 4 and a linear motion unit 11. The linear motion unit 11 changes the relative position of the coating member 4 with respect to the object.

[0043] In this way, a coating device 100 can be obtained in which the coating needle 24 can be easily attached to and detached from the coating needle fixing member 25.

[0044] (Embodiment 2) <Composition of coating material> Figure 7 is a schematic cross-sectional view showing the joining configuration of the coating needle 24 and the coating needle fixing member 25 according to Embodiment 2. Figure 7 corresponds to Figure 6. The coating member 4 according to Embodiment 2 will be explained using Figure 7. The coating member 4 shown in Figure 7 basically has the same configuration as the coating member 4 shown in Figures 5 and 6, but the coating member 4 differs in that it has a low-friction member 28.

[0045] As shown in Figure 7, the low-friction member 28 is positioned inside the opening 25a. Specifically, the low-friction member 28 is positioned between the pressing member 26 and the elastic member 27. In this configuration, with the coating needle 24 inserted through the opening 25a, the pressing member 26 presses the elastic member 27 via the low-friction member 28. This reduces the frictional force generated between the pressing member 26 and the elastic member 27 when the pressing member 26 is tightened so that the elastic member 27 undergoes elastic deformation. As a result, wear on the pressing member 26 and the elastic member 27 is reduced.

[0046] The low-friction member 28 may be O-shaped. That is, when the coating needle 24 is inserted into the opening 25a, the low-friction member 28 surrounds the coating needle 24. The low-friction member 28 may be a thin ring, and the surface roughness of the low-friction member 28 is small.

[0047] <Effects and Effects> The coating member 4 described above includes a low-friction member 28. The low-friction member 28 is positioned inside the opening 25a. With the coating needle 24 inserted through the opening 25a, the pressing member 26 presses the elastic member 27 via the low-friction member 28.

[0048] In this way, when tightening the pressing member 26 so that the elastic member 27 undergoes elastic deformation, the frictional force generated between the pressing member 26 and the elastic member 27 is reduced. As a result, wear on the pressing member 26 and the elastic member 27 is reduced.

[0049] The embodiments disclosed herein should be considered in all respects to be illustrative and not restrictive. The scope of the present invention is indicated by the claims rather than by the foregoing description, and all modifications within the meaning and scope equivalent to the claims are intended to be included. [Explanation of symbols]

[0050] 1 X-axis table, 2 Y-axis table, 3 Z-axis table, 4 coating material, 5 substrate, 6 observation optics, 7 CCD camera, 8 operation panel, 9 monitor, 10 control computer, 11 linear motion unit, 20 coating needle holder, 21 coating material container, 22 holder base, 22a recess, 23 holder lid, 24 coating needle, 24a tip, 24b base, 25 coating needle fixing member, 25a opening, 26 pressing member, 26a through hole, 27 elastic member, 28 low friction member, 33 magnet, 34 reference surface, 35 movable base, 36 reference surface, 41 servo motor, 43 cam, 44 bearing, 45 cam connecting plate, 46 movable part, 100 coating device, H1 opening surface, H2 middle surface, H3 bottom surface, L distance.

Claims

1. A coating needle capable of transferring a coating material to the surface of an object, A coating needle fixing member having an opening into which the coating needle can be inserted, An elastic member disposed inside the opening, The system includes a pressing member capable of pressing the elastic member, A coating member wherein, with the coating needle inserted through the opening, the pressing member presses against the elastic member, causing the elastic member to elastically deform so that it presses against the outer surface of the coating needle.

2. The opening is equipped with a low-friction member, The coating member according to claim 1, wherein the pressing member presses the elastic member via the low-friction member while the coating needle is inserted through the opening.

3. The opening has a bottom surface to which the coating needle can make contact, The coating member according to claim 1 or claim 2, wherein the bottom surface is provided at a position at a distance of ○○ mm or more and ○○ mm or less from the opening of the opening.

4. A coating member according to claim 1 or claim 2, A coating apparatus comprising a linear motion unit for changing the relative position of the coating member with respect to the object.

5. The coating member according to claim 3, A coating apparatus comprising a linear motion unit for changing the relative position of the coating member with respect to the object.

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