Cleaning equipment and electronic component mounting equipment

Abstract

To provide a cleaning device and an electronic component mounting device that perform cleaning efficiently without reducing cycle time. [Solution] The cleaning apparatus of the embodiment is characterized by comprising: a stage on which a display panel having a plurality of electrode rows to be cleaned is placed and which moves in a first direction which is the transport direction of the display panel; and a plurality of cleaning units which move in a second direction intersecting the first direction and clean the plurality of electrode rows on the display panel which moves in the first direction as the stage moves.

Description

Technical Field

[0001] Embodiments of the present invention relate to a cleaning device and a mounting device for electronic components.

Background Art

[0002] In liquid crystal display devices such as displays and OLED displays, when mounting a driver IC on a display panel, a technique of mounting the driver IC on a film-like wiring circuit board containing polyimide, called COF (Chip on Film or Chip on Flexible), is used.

[0003] At the edge of the display panel of these display devices, an electrode row having electrically connected connection lead terminals is provided along the edge of the display panel. After an anisotropic conductive member called a tape-shaped ACF (Anisotropic Conducting Film) is attached to this electrode row, the driver IC is pressure-bonded.

[0004] In the process until the ACF is attached, foreign matter may adhere to the electrode row. If the ACF is attached to the electrode row in the presence of these foreign matters, a connection failure will occur. Therefore, before attaching the ACF, the display panel is cleaned by a cleaning device to remove foreign matters.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] In the cleaning apparatus described above, multiple cleaning units, including ultrasonic cleaning, wiping cleaning, and plasma cleaning, are arranged along the substrate transport path. In this apparatus, the electrode rows are cleaned as the substrate is transported and passes through each cleaning unit.

[0007] However, in recent years, the display panel market has seen a demand for the manufacture of irregularly shaped display panels used in vehicles and other applications. Such display panels have curved surfaces (curved sections) and concave edges (notched sections). There is a need for a cleaning device that can also clean the electrode rows located in curved sections, notched sections, and other areas with varying depths on such display panels.

[0008] Therefore, embodiments of the present invention provide a cleaning apparatus and an electronic component mounting apparatus that can clean electrode rows arranged in curved or notched portions of a display panel. [Means for solving the problem]

[0009] The cleaning apparatus of the embodiment is characterized by comprising: a stage section on which a display panel having a plurality of electrode rows to be cleaned is placed and which moves in a first direction which is the transport direction of the display panel; and a plurality of cleaning sections which move in a second direction intersecting the first direction and clean the plurality of electrode rows on the display panel which moves in the first direction as the stage section moves. [Brief explanation of the drawing]

[0010] [Figure 1] This is an example of connecting the display panel to be crimped and the electronic component in this embodiment. [Figure 2] This is an example of the connection between the electrode row ER of the display panel and the terminal row TR of the electronic component in this embodiment. [Figure 3] This is a cross-sectional view showing the crimped portion of the ACF in the display panel and electronic component in this embodiment. [Figure 4] This is a top view showing an example of the configuration of the mounting device in this embodiment. [Figure 5] It is a schematic configuration diagram of the sticking device in this embodiment. [Figure 6] It is a schematic configuration diagram of the temporary pressure bonding device in this embodiment. [Figure 7] It is a schematic configuration diagram of the main pressure bonding device in this embodiment. [Figure 8] It is a schematic configuration diagram of the cleaning device in this embodiment. [Figure 9] It is a schematic configuration diagram of the ultrasonic cleaning part in this embodiment. [Figure 10] It is a schematic configuration diagram of the wiping cleaning part in this embodiment. [Figure 11] It is a schematic configuration diagram of the plasma cleaning part in this embodiment. [Figure 12] It is an example of the block diagram of the control part in this embodiment. [Figure 13] It is the first figure explaining the procedure of positioning the cleaning device in this embodiment. [Figure 14] It is the second figure explaining the procedure of positioning the cleaning device in this embodiment. [Figure 15] It is the third figure explaining the procedure of positioning the cleaning device in this embodiment. [Figure 16] It is the flowchart of cleaning in this embodiment. [Figure 17] It is a figure explaining the procedure of positioning the cleaning device in the comparative example. [Figure 18] It is the first figure explaining the procedure of positioning the cleaning device in the modification example of this embodiment. [Figure 19] It is the second figure explaining the procedure of positioning the cleaning device in the modification example of this embodiment. [Figure 20] It is the third figure explaining the procedure of positioning the cleaning device in the modification example of this embodiment. [Figure 21] It is the fourth figure explaining the procedure of positioning the cleaning device in the modification example of this embodiment.

Embodiments for Carrying Out the Invention

[0011] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. These embodiments do not limit the present invention. The drawings are schematic or conceptual, and the ratios of each part etc. are not necessarily the same as those in reality. In the specification and the drawings, the same reference numerals are given to the same elements as those described above with respect to the already shown drawings, and the detailed description will be omitted as appropriate.

[0012] Also, in the present disclosure, the terms "above" and "below" can be appropriately read as "more than" and "less than" respectively. Also, the terms "more than" and "less than" can be appropriately read as "above" and "below" respectively.

[0013] Also, the X-axis, Y-axis, and Z-axis described below indicate axes perpendicular to each other. The X-direction and Y-direction intersect each other and correspond to the horizontal directions (lateral directions) perpendicular to the gravitational direction, and the Z-direction corresponds to the vertical direction (perpendicular direction) intersecting the X-direction and Y-direction. Also, the +Z direction corresponds to the upward direction, and the -Z direction corresponds to the downward direction. Also, the θ-direction corresponds to the rotational direction with the Z-axis as the rotation axis. The X-direction is an example of the first direction, the Y-direction is an example of the second direction, and the Z-direction is an example of the third direction.

[0014] FIG. 1 shows an example of the connection between the display panel 100 to be cleaned and the electronic component 300 in the present embodiment. FIG. 2 shows an example of the connection between the electrode row ER of the display panel 100 and the terminal row TR of the electronic component 300 in the present embodiment, and shows an enlarged view of one crimping location in the display panel 100 and the electronic component 300.

[0015] Referring to Figures 1 and 2, the display panel 100 and electronic components 300 to be cleaned according to this embodiment will be described. In this example, as shown in Figures 1(A) to (F), a case in which multiple electronic components 300 are crimped along the edge of the display panel 100 will be described. Figure 1 shows an example in which multiple electronic components 300 are crimped onto a relatively large display panel 100 used in vehicles, etc. In the example of Figure 1(A), the display panel 100 is equipped with a color filter 101. The cleaning device described in this embodiment can clean not only display panels 100 equipped with a color filter 101, but also display panels 100 that are not equipped with a color filter 101.

[0016] The following describes examples of electronic components 300 arranged along the edges of the display panel 100, including not only cases where the electronic components 300 are arranged on the same straight line parallel to the first direction, but also cases where the electronic components 300 are arranged along the edges of the display panel 100 including curved portions, cases where the electronic components 300 are arranged along the edges of the display panel 100 including notches which are rectangular cutouts, and cases where the electronic components 300 are arranged along the edges of multiple sides of the display panel 100, and so on, where the electronic components 300 are arranged on non-colinear lines. Examples (A) to (F) are cases where multiple electronic components 300 are arranged on the same straight line or non-colinear lines, or where multiple electronic components 300 are arranged in a mixed manner on the same straight line or non-colinear lines.

[0017] Figures 1(A), (B), and (C) show examples of crimping electronic components 300 along the edges of a display panel 100 including a curved portion, and Figure 1(D) shows an example of crimping electronic components 300 along the edges of a display panel 100 including a notched portion. In the example of Figure 1(D), the electronic components 300 are arranged on a first straight line parallel to the first direction in the notched portion, and on a second straight line parallel to the first direction in the portions other than the notched portion. Multiple electronic components 300 may be arranged in the notched portion. Figure 1(E) shows an example of crimping electronic components 300 along the edges of multiple sides of the display panel 100. Figure 1(F) shows an example of crimping electronic components 300 along the straight portion of the display panel 100.

[0018] As shown in Figure 2, electrode rows ER, which are conductive portions, are provided at predetermined locations on the edge of the display panel 100. The electrode rows ER extend in a direction that intersects with the edge of the display panel 100 and are arranged in rows along the edge. Hereafter, the direction in which these rows are arranged will be referred to as the arrangement direction of the electrode rows ER. An electrode row ER is a collection of multiple electrodes formed in a row. Each electrode row ER is connected to a circuit in the display area via a signal line. Multiple electrode rows ER are arranged side by side with a predetermined interval (pitch p) between them.

[0019] As shown in Figure 1(A), the electronic component 300 is a component that is joined to the display panel 100 via the ACF 500. In this embodiment, for example, COF is used for the electronic component 300. COF is a component in which a driver IC is mounted and printed wiring is formed on a flexible sheet made of a flexible resin.

[0020] As shown in Figure 2, one side of the electronic component 300 is provided with a conductive portion called a terminal row TR. The terminal row TR is a collection of terminals for electrically connecting to the electrode row ER of the display panel 100. Each terminal row TR is connected, for example, to a driver IC on the COF via a signal line. Multiple terminal rows TR are arranged side by side with a predetermined interval (pitch p) between them. The electrode row ER of the display panel 100 and the terminal row TR of the electronic component 300 have a predetermined correspondence in which they should be connected to each other, and they are crimped together so that the positions of the corresponding electrodes and terminals match. For this reason, the electrode row ER and the terminal row TR have the same spacing. The width and spacing of these electrode row ER and terminal row TR ensure conductivity between corresponding electrodes and terminals, as well as insulation between other adjacent electrodes and terminals. In the following explanation, for the sake of simplicity, multiple electrode rows ER in a unit to which the electronic component 300 is connected will be simply referred to as the electrode row ER.

[0021] Figure 3 is a cross-sectional view showing the crimped portion of the ACF500 between the display panel 100 and the electronic component 300 in this embodiment.

[0022] As shown in Figure 3(A), ACF500 is an anisotropic conductive material, a film formed by dispersing conductive particles 320 on a substrate 310. A thermosetting resin that hardens upon heating is used as the substrate 310. After the electronic components 300 are positioned on the display panel 100, they are temporarily bonded to the panel via ACF500 with a pressure of approximately 10 to 100 N.

[0023] As shown in Figure 3(B), in this crimping process, the ACF500 is sandwiched between the electronic component 300 and the display panel 100 and crimped with a pressure of approximately 200 to 1000 N. The conductive particles 320 located between the electrode row ER and the terminal row TR are crushed between the electrode row ER and the terminal row TR, thereby achieving conductivity in the thickness direction and insulation in the surface direction of the electrode row ER and the terminal row TR. Furthermore, the thermosetting resin of the base material 310 of the ACF500 hardens upon heating, adhering the electronic component 300 to the display panel 100. In other words, electrical connection between the terminal row TR and the electrode row ER, and mechanical connection between the display panel 100 and the electronic component 300 can be achieved through heat crimping.

[0024] Figure 4 is a top view showing an example of the configuration of the mounting device 10 in this embodiment.

[0025] The cleaning of the electrode array ER, the application of the ACF, and the crimping of the electronic components described above are performed by the mounting apparatus 10 shown in Figure 1. The mounting apparatus 10 comprises a cleaning device 1, an application device 3, a temporary crimping device 5, and a permanent crimping device 7. It also includes a transport device 9 for transporting the display panel 100 between each device of the mounting apparatus 10. The mounting apparatus 10 is an example of an electronic component mounting apparatus. The ACF is an example of a tape-like member. The display panel 100 is an example of an object to be applied.

[0026] In this embodiment, the terminals of the display panel 100 are cleaned by the cleaning device 1 of the mounting device 10. After cleaning, the ACF is attached to the display panel 100 by the adhesive device 3. Then, the electronic components 300 are mounted to the display panel 100 by sequentially crimping by the temporary crimping device 5 and the main crimping device 7. After processing is completed in each device, the display panel 100 is transported by the transport device 9.

[0027] The cleaning device 1, adhesive device 3, temporary crimping device 5, and main crimping device 7 described above are each equipped with control units 19a, 19b, 19c, and 19d that control their respective movement mechanisms. The mounting device 10 is also equipped with a control unit 19 that integrates and controls these four control units 19a, 19b, 19c, and 19d. For example, after processing in each device is completed, the control unit 19 controls the transport device 9 to transport the display panel 100.

[0028] The cleaning apparatus 1 includes a cleaning unit 1a and has multiple cleaning sections adjacent to each other along the transport path of the display panel 100. Each cleaning process is performed sequentially on the display panel 100 as it passes through the transport path at a constant speed. The cleaning processes include, for example, an ultrasonic cleaning process using an ultrasonic airflow obtained by applying ultrasonic vibrations to ionized air (clean air ionized by ionizing clean air), a wiping cleaning process using a wiping cloth and cleaning solution, and a plasma cleaning process that generates plasma under atmospheric pressure for cleaning. In this embodiment, the cleaning apparatus 1 moves each cleaning section in a direction intersecting the transport direction relative to the stage section 16 that moves in the transport direction, positions them in the cleaning position, and then cleans the electrode row ER.

[0029] The cleaning apparatus 1 comprises a cleaning unit 1a and a control unit 19a. The cleaning unit 1a has various moving mechanisms, which are controlled by the control unit 19a. The cleaning process is carried out by the control of the control unit 19a. A detailed configuration will be described later.

[0030] The adhesive device 3 incorporates ACF500 as a reel-shaped adhesive tape, cuts it to a predetermined length, and attaches it to the electrode row ER of the display panel 100. For example, the adhesive device 3 is a device that presses and attaches a tape-like member to the display panel 100. The adhesive device 3 comprises an adhesive unit 3a and a control unit 19b. The adhesive unit 3a has various moving mechanisms, and these moving mechanisms are controlled by the control unit 19b.

[0031] Figure 5 shows the adhesive unit 3a in this embodiment. The adhesive unit 3a includes a guide roller 1100, a substrate stage 1300, an up / down drive mechanism 1400, a pressure tool 1500, a heater 1500a, a path roller 1800, a supply reel 1900, a feed device 3000, a cylinder 3300, a cutting section 3400, a holding block 3500, and a winding reel 3600. The substrate stage 1300 has a base 1600, and a table 1700 is provided on the upper surface of the base 1600, which is driven in the X, Y, and θ directions by an X drive source 1600a, a Y drive source 1600b, and a θ drive source 1600c. The substrate stage 1300 is also located directly below the pressure tool 1500.

[0032] As shown in Figure 5, a display panel 100, which is to be attached, is supplied to the table 1700 and held in place by suction.

[0033] As shown in Figure 5, the adhesive tape 2000 is attached to a release tape 1000 made of synthetic resin and wound onto a supply reel 1900, and is guided by a pair of guide rollers 1100 with the adhesive tape 2000 facing downwards. As a result, the adhesive tape 2000 faces above the electrode row ER of the display panel 100 placed on the table 1700.

[0034] Above the table 1700, a pressure tool 1500, which serves as an adhesive means and has a heater 1500a, is provided so as to be movable up and down by a vertical drive mechanism 1400. The adhesive tape 2000 is cut to a predetermined length by a cutting section 3400, which will be described later, and the portion 2000a cut to the predetermined length is positioned below the pressure tool 1500 as described later.

[0035] When the portion 2000a of the adhesive tape 2000, which has been cut to a predetermined length, is positioned, the pressurizing tool 1500 descends and the portion 2000a of the adhesive tape 2000, which has been cut to a predetermined length, is attached to the side of the display panel 100 where the electrode row ER is provided. Subsequently, the release tape 1000 is peeled off from the adhesive tape 2000 by the peeling unit 5100, and only the release tape 1000 is wound onto the take-up reel 3600 via the path roller 1800.

[0036] The adhesive tape 2000 and the release tape 1000 are transported by a feeder 3000, which serves as a feeding means. This feeder 3000 has a chuck 3100 formed to grip the release tape 1000. This chuck 3100 is driven reciprocally in the direction indicated by the ± arrows in the figure by a drive mechanism (not shown).

[0037] Therefore, when the chuck 3100 is driven in the direction indicated by the + in the figure while holding the release tape 1000, the adhesive tape 2000 is pulled out from the supply reel 1900 in the + direction together with the release tape 1000, and the portion 2000a cut to a predetermined length is positioned below the pressurizing tool 1500.

[0038] The cutting section 3400 has a cutting section 3400 that is driven vertically by a cylinder 3300 which serves as a drive source.

[0039] The cutting section 3400 is driven upward by the cylinder 3300 to a height that cuts approximately half the thickness of the release tape 1000, which is held in the holding block 3500. In other words, the release tape 1000 is half-cut by the cutting section 3400.

[0040] The release section 5100 peels the release tape 1000 from the adhesive tape 2000 attached to the display panel 100. The release section 5100 has release rods 5200 and 5300. The release rods 5200 and 5300 are, for example, round rods and are members that come into contact with the release tape 1000. The release rod 5200 comes into contact with the surface of the release tape 1000, i.e., the surface on the adhesive tape 2000 side, and the release rod 5300 comes into contact with the back surface of the release tape 1000. The release rods 5200 and 5300 move horizontally from the downstream side to the upstream side in the transport direction of the adhesive tape 2000 while in contact with the release tape 1000, by a moving mechanism (not shown), thereby peeling the release tape 1000 from the adhesive tape 2000 that is pressed onto the display panel 100. Furthermore, after peeling, the peeling rods 5200 and 5300 move horizontally from the upstream side to the downstream side, retracting from the attachment position.

[0041] Let's explain again using Figure 4. The temporary crimping device 5 is a device for temporarily crimping electronic components 300 onto the display panel 100. The temporary crimping device 5 comprises a temporary crimping unit 5a and a control unit 19c. The temporary crimping unit 5a has various moving mechanisms, and these moving mechanisms are controlled by the control unit 19c. After temporary crimping, the display panel with the electronic components 300 temporarily crimped is transported to the main crimping device 7.

[0042] As shown in Figure 6, the temporary crimping unit 5a is provided with a table unit 3200. This table unit 3200 has an XY table 3700 mounted on a base 2100, which is driven in the X and Y directions. A mounting table 2700 is mounted on this XY table 3700, which is driven in the Z and θ directions. Therefore, this mounting table 2700 is driveable in the X, Y, Z, and θ directions. With the panel supported by the table unit 3200, the temporary crimping unit 5a moves the display panel 100 in the X and Y directions to temporarily crimp the electronic components 300.

[0043] Below the attachment position of the temporary crimping unit 5a, there are two imaging units 2200 (only one is shown in the figure) that capture images of alignment marks (not shown) provided on the display panel 100.

[0044] The display panel 100 is placed on the mounting table 2700 by a pair of support arms 2300. A backup 2400 is provided at the attachment position. Above the backup 2400, an attachment tool 2500 is provided so as to be movable in the vertical direction.

[0045] The transport device 9 is equipped with a transport arm (not shown), and the display panel 100 is supplied onto the mounting table 2700 via the transport arm. The display panel 100 supplied to the mounting table 2700 is held in place by suction by a pad 2900 provided on its upper surface. The edges of the display panel 100 protrude outward from the periphery of the mounting table 2700. The mounting table 2700 on which the display panel 100 is supplied is driven to the other end of the base 2100. That is, the mounting table 2700 is transported from the supply position where the display panel 100 is supplied to the lower part of the temporary crimping position for temporarily crimping the electronic component 300 to one side 100a of the display panel 100 via the ACF 500. At the lower part of this temporary crimping position, the alignment marks provided on the display panel 100 are captured by the imaging unit 2200.

[0046] When the ACF500 is pressed by the adhesive tool 2500, the mounting table 2700 releases the suction from the pad 2900 and descends further, moving from the adhesive position to the supply position with the support arm 2300 supporting the display panel 100. A new display panel 100 is supplied to the mounting table 2700 when it moves to the supply position.

[0047] When the ACF500 is attached to one side 100a of the display panel 100, the first transport arm 2600 descends from above the display panel 100, and rises by adhering to the top surface of the display panel 100 with the pad 2600a provided on its lower surface. At the same time, a pair of support arms 2300 open at a predetermined interval, and the mounting table 2700, which is waiting below the attachment position, rises. As described above, the mounting table 2700 is positioned so that one side 100a of the display panel 100 rests on the top surface of the backup 24, and the ACF500 is attached to that side 100a, and this process is repeated.

[0048] Specifically, the two imaging units 2200 recognize the two alignment marks on the display panel 100, thereby recognizing any θ-direction misalignment of the display panel 100. If there is a θ-direction misalignment, the mounting table 2700 corrects the misalignment in the θ direction. That is, after the display panel 100 is placed on the mounting table 2700, the mounting table 2700 is moved in the Y direction to the temporary crimping position. Then, the two imaging units 2200 detect the alignment marks on the display panel 100 and detect any θ-direction misalignment of the display panel 100. After detecting the θ-direction misalignment, the mounting table 2700 is moved in the θ direction to correct the misalignment.

[0049] Once the display panel 100 is positioned in this manner, the electronic component 300 is supplied to the adhesive tool 2500 from a component supply unit (not shown). The backup 2400 is then raised to a position where it contacts the back surface of the display panel 100. The adhesive tool 2500 is then lowered to perform a preliminary crimping of the electronic component 300 and the display panel 100.

[0050] Let's explain again using Figure 4. The crimping device 7 is a device that permanently crimps the display panel 100 and electronic components 300 that have been temporarily crimped in the temporary crimping device 5. The crimping device 7 comprises a permanent crimping unit 7a and a control unit 19d. The crimping unit 7a has various moving mechanisms, and these moving mechanisms are controlled by the control unit 19d. The display panel 100 and electronic components 300 are heated and crimped at a higher temperature and pressure than during the temporary crimping.

[0051] As shown in Figure 7, the crimping unit 7a is provided with a table unit 3800. This table unit 3800 is mounted on a base 3900, and the base 3900 is provided with an XY table 4000 that is driven in the X and Y directions. A mounting table 4100 that is driven in the Z and θ directions is provided on the XY table 4000. Therefore, the mounting table 4100 is driveable in the X, Y, Z, and θ directions.

[0052] The display panel 100 is supplied onto the mounting table 4100 via a transport arm (not shown) of the transport device 9, and is held in place by suction by a pad 4200 provided on its upper surface. The edges of the display panel 100 protrude outward from the peripheral edge of the mounting table 4100.

[0053] The display panel 100 is supplied to the mounting table 4100 of the crimping unit 7a. That is, the display panel 100 is supplied to the mounting table 4100 at the supply position at one end of the longitudinal direction of the base 3900. After the display panel 100 is placed on the mounting table 4100, the mounting table moves in the Y direction. That is, the mounting table 4100 is moved in the Y direction so that the main crimping tool 4600 is above the portion where the electrode row ER of the display panel 100 and the terminal row TR of the electronic component 300 are temporarily crimped, and the backup 4500 is below it.

[0054] Two imaging units 4300 (only one shown in the figure) are provided at this crimping position to capture alignment marks (not shown) provided on the display panel 100.

[0055] The mounting table 4100 is transported from the supply position where the display panel 100 is supplied to the lower part of the main crimping position for permanently crimping the electronic component 300 that has been temporarily crimped to one side 100a of the display panel 100. At the lower part of the main crimping position, the alignment marks provided on the display panel 100 are captured by the imaging unit 4300. After the alignment marks of the display panel 100 are captured, the θ-direction displacement of the display panel 100 is detected. After detecting the θ-direction displacement, the mounting table 4100 is moved in the θ-direction in the same manner as the adhesive unit 3a to correct the displacement. After correction, the backup 4500 rises to a position where it contacts the back surface of the display panel 100, and then the main crimping tool 4600 pressurizes the temporarily crimped portion to perform permanent crimping.

[0056] When the crimping tool 4600 is applying pressure to the electronic component 300, the mounting table 4100 releases the suction of the pad 4200 and descends to below the main crimping position. The support arm 4400 supports the display panel 100, and the table is driven on the base 3900 from the main crimping position to the supply position. At this supply position, a new display panel 100 with the electronic component 300 temporarily crimped to one side 100a and the other side 100b is supplied to the mounting table 4100. The mounting table 4100, now supplied with the new display panel 100, is then driven to a position below the main crimping position, below the display panel 100 supported by the support arm 4400, that is, a position that can be recognized by the imaging unit 4300, and waits there.

[0057] When the electronic component 300 is fully crimped to one side 100a of the display panel 100, the third transport arm 4700 descends from above the display panel 100, and rises by adhering to the top surface of the display panel 100 with a pad provided on its underside. At the same time, the pair of support arms 4400 open at a predetermined interval, and the mounting table 4100, which is waiting below the crimping position, rises. As described above, the mounting table 4100 is positioned so that one side 100a of the display panel 100 rests on the top surface of the backup 4500, and the electronic component 300 on that side 100a is fully crimped, and this process is repeated.

[0058] Figure 8 is a schematic diagram of the cleaning device 1 in this embodiment.

[0059] The cleaning apparatus 1 in this embodiment comprises multiple cleaning units and cleans each electrode row ER arranged on the display panel 100. The display panel 100 is, for example, a substrate as a component of a flat panel display and has various shapes as shown in Figure 2. As shown in Figure 8, the cleaning apparatus 1 comprises an ultrasonic cleaning unit 12, a wiping cleaning unit 13, a plasma cleaning unit 14, a support unit 15, a stage unit 16, a control unit 19, and an imaging unit 600. The ultrasonic cleaning unit 12, the wiping cleaning unit 13, the plasma cleaning unit 14, the support unit 15, and the stage unit 16 are collectively referred to as the cleaning unit 1a. The imaging unit 600 is fixed in an initial position and performs imaging to align the display panel 100 to a reference position. The reference position is a pre-set design reference position. By rotating the stage unit 16 to position the electrode row ER on the reference position, the reference position is set so that not only the orientation of the electrode row ER in the rotation direction but also its XY coordinates are positioned on the reference position. In the following explanation, the home position of each cleaning unit will be assumed to be located on the reference position.

[0060] Hereinafter, the +X direction, which is the transport direction of the display panel 100, will also be referred to as the transport direction. In this embodiment, the cleaning device 1 has the ultrasonic cleaning unit 12, the wiping cleaning unit 13, and the plasma cleaning unit 14 arranged in that order at predetermined intervals from the upstream side in the transport direction.

[0061] The cleaning apparatus 1 of this embodiment cleans the display panel 100, which is transported in the +X direction, in the order of ultrasonic cleaning, wiping cleaning, and plasma cleaning. Therefore, the support section 15 is connected to the ultrasonic cleaning section 12, the wiping cleaning section 13, and the plasma cleaning section 14 in the order of +X direction. In addition, as shown by the dashed arrows, the cleaning apparatus 1 of this embodiment has a stage section 16 that moves in the +X direction, passing through the ultrasonic cleaning section 12, the wiping cleaning section 13, and the plasma cleaning section 14 in that order, and cleaning the electrode row ER at each cleaning section. In addition, when cleaning by each cleaning section, the stage section 16 places the display panel 100 on it and moves in the +X direction at a predetermined speed. For example, if the display panel 100 includes curved or notched portions, the electrode row ER is arranged along these edges. The cleaning apparatus 1 grasps information such as the position of the electrode row ER placed on the display panel 100 and the inclination in the θ direction in which the electrode row ER is placed, and moves each cleaning section in the Y direction based on this information.

[0062] The cleaning apparatus 1 of this embodiment will be described using an example in which the cleaning section comprises an ultrasonic cleaning section 12, a wiping cleaning section 13, and a plasma cleaning section 14, but the examples of cleaning sections are not limited to these. For example, the cleaning section may be a combination of the ultrasonic cleaning section 12 and the plasma cleaning section 14, or a combination of the wiping cleaning section 13 and the plasma cleaning section 14. These combinations are just examples, and the apparatus may be configured using other cleaning sections in addition to the ultrasonic cleaning section 12, the wiping cleaning section 13, and the plasma cleaning section 14.

[0063] During cleaning by each cleaning unit, the stage unit 16 moves in the +X direction at a predetermined speed. The ultrasonic cleaning unit 12, the wiping cleaning unit 13, and the plasma cleaning unit 14 move in the Y direction to match the arrangement of the electrode row ER on the display panel 100 when cleaning the electrode row ER. The following describes each part of the cleaning apparatus 1.

[0064] As shown in Figure 8, the stage unit 16 includes a transport stage 161 and an X-direction movement mechanism 162. The transport stage 161 is a flat platform on which the display panel 100 is placed. The X-direction movement mechanism 162 moves along a slide rail in the X direction using a built-in ball screw and motor, based on the control of the control unit 19.

[0065] Furthermore, when the display panel 100 is supplied to the stage unit 16, or when the display panel 100 is discharged from the stage unit 16, the stage unit 16 is positioned at a predetermined supply / discharge position.

[0066] Furthermore, the stage section 16 may also include a Y-direction movement mechanism and a Z-direction movement mechanism in addition to the X-direction movement mechanism 162. For example, the Y-direction movement mechanism may be assembled so that the X-direction movement mechanism, the Y-direction movement mechanism, and the Z-direction movement mechanism are stacked in that order. The Y-direction movement mechanism moves in the Y direction on a slide rail using a built-in ball screw and motor, similar to the X-direction movement mechanism 162. For example, the cleaning device 1 can move the Y-direction movement mechanism based on the control of the control unit 19 to position the electrode array ER to be cleaned in any of the cleaning sections. The Z-direction movement mechanism may be driven by, for example, an air cylinder or an electric actuator. The Z-direction movement mechanism drives the X-direction movement mechanism 162 and the Y-direction movement mechanism in the Z direction.

[0067] As shown in Figure 9, when the display panel 100 placed on the stage unit 16 is transported, the ultrasonic cleaning unit 12 moves to a cleaning position in the Y direction based on the control of the control unit 19a and ultrasonically cleans the electrode rows ER to be cleaned. For cleaning, the ultrasonic cleaning unit 12 generates an ultrasonic airflow by applying ultrasonic vibrations to ionized air, which is ionized clean air. The ultrasonic cleaning unit 12 removes dust by spraying the ultrasonic airflow onto the electrode rows ER arranged on the display panel 100 and sucking up the airflow sprayed onto the surface of the display panel 100. After cleaning the electrode rows ER to be cleaned, the ultrasonic cleaning unit 12 moves in the Y direction and is positioned for the next electrode row ER to be cleaned. In this way, the ultrasonic cleaning unit 12 cleans each electrode row ER arranged on the display panel 100.

[0068] Figure 9 shows the internal structure of the ultrasonic cleaning unit 12 as viewed from the -Y direction.

[0069] The ultrasonic cleaning unit 12 comprises a casing 123 and a first Y-direction moving mechanism 124. A discharge nozzle 121 and a suction nozzle 122 are provided at the lower end of the casing 123. The casing 123 has an internal space. The inside of the casing 123 is divided into a discharge chamber 127 and a suction chamber 128. The discharge chamber 127 contains an ionizer 126 that ionizes the pressurized clean air and an ultrasonic generator 125 that applies ultrasonic vibrations to the ionized clean air and ejects it from the discharge nozzle 121. The suction chamber 128 collects dust and debris sucked in from the suction nozzle 122. The detailed configuration of the ultrasonic cleaning unit 12 will be described later.

[0070] The discharge nozzle 121 is provided to be inserted into the discharge chamber 127 and is located on the lower end surface side of the casing 123. The discharge nozzle 121 injects ultrasonic airflow onto the electrode row ER on the display panel 100. For example, if the electrode row ER on the display panel 100 becomes charged and dust adheres to it due to static electricity, the positive and negative ions of the ionized ultrasonic airflow remove the static electricity, and furthermore, the aerodynamic dust removal force of the ultrasonic airflow removes dust from the surface of the electrode row ER on the display panel 100.

[0071] The suction nozzle 122 is provided on the lower end surface side of the casing 123. The suction nozzle 122 sucks in the ultrasonic airflow that is injected onto the electrode row ER on the display panel 100 by the discharge nozzle 121. In this embodiment, the ultrasonic cleaning unit 12 is equipped with one suction nozzle 122 in the -X and +X directions, respectively, flanking the discharge nozzle 121. Therefore, the ultrasonic airflow is injected onto the electrode row ER on the display panel 100 and then sucked in by the suction nozzle 122.

[0072] Clean air is supplied to the discharge chamber 127 from a compressed air source (not shown). An ionizer 126 is installed inside the discharge chamber 127 and ionizes the clean air supplied to the discharge chamber 127 by corona discharge. An ultrasonic generator 125 generates ultrasonic vibrations in the ionized clean air. The resulting ultrasonic airflow is then injected through the discharge nozzle 121 onto the electrode row ER on the display panel 100.

[0073] The suction chamber 128 is located inside the casing 123 and communicates with the suction nozzle 122. The suction chamber 128 has the function of collecting the ultrasonic airflow injected by the discharge nozzle 121 onto the electrode row ER on the display panel 100 via the suction nozzle 122. In other words, it collects the ultrasonic airflow containing dust and debris removed from the surface of the electrode row ER on the display panel 100.

[0074] The ultrasonic cleaning unit 12 comprises a discharge nozzle 121, a suction nozzle 122, a casing 123, and a first Y-direction movement mechanism 124. The casing 123 of the ultrasonic cleaning unit 12 is divided into a discharge chamber and a suction chamber. The discharge chamber contains an ionizer (not shown) for ionizing the pressurized clean air and an ultrasonic generator (not shown) for applying ultrasonic vibrations to the ionized clean air. The suction chamber collects the collected dust and debris. The detailed configuration of the ultrasonic cleaning unit 12 will be described later.

[0075] The discharge nozzle 121 injects an ultrasonic airflow of ionized clean air onto the electrode row ER on the display panel 100. The suction nozzle 122 sucks in the ultrasonic airflow that has been injected onto the electrode row ER on the display panel 100 by the discharge nozzle 121. In this embodiment, the ultrasonic cleaning unit 12 is equipped with one suction nozzle 122 in the -X and +X directions for each discharge nozzle 121. Therefore, the ultrasonic airflow is injected onto the electrode row ER on the display panel 100 and then sucked in by the suction nozzle 122.

[0076] Thus, even when the display panel 100 is charged, the positive and negative ions of the ionized ultrasonic airflow remove static electricity, and furthermore, the aerodynamic dust removal force of the ultrasonic airflow removes dust from the surface of the display panel 100. The removed dust is collected in the suction chamber inside the casing 123.

[0077] Clean air is supplied to the discharge chamber 127 from a compressed air source (not shown). An ionizer 126 is installed inside the discharge chamber 127 and ionizes the clean air supplied to the discharge chamber 127 by corona discharge. An ultrasonic generator 125 generates ultrasonic vibrations in the ionized clean air. The resulting ultrasonic airflow is injected through the discharge nozzle 121 onto the electrode row ER on the display panel 100.

[0078] The suction chamber 128 is located inside the casing 123 and communicates with the suction nozzle 122. The suction chamber 128 has the function of collecting the ultrasonic airflow injected by the discharge nozzle 121 onto the electrode row ER on the display panel 100 via the suction nozzle 122. In other words, it collects the ultrasonic airflow containing dust and debris removed from the surface of the electrode row ER on the display panel 100.

[0079] The first Y-direction movement mechanism 124 comprises a connection unit 124a, a ball screw 124c, and a linear guide 124d. The connection unit 124a is connected to the ball screw 124c and moves in the Y direction along the linear guide 124d in accordance with the rotation of a servo motor (not shown). When the display panel 100 is transported from the -X direction, the ultrasonic cleaning unit 12 moves the connection unit 124a to position the discharge nozzle 121 in the cleaning position and sprays ultrasonic airflow onto the electrode row ER on the display panel 100 to remove dust and debris adhering to the electrode row ER on the display panel 100.

[0080] The first Y-direction movement mechanism 124 moves in the +Y or -Y direction to move the ultrasonic cleaning unit 12 to the electrode row ER to be cleaned among the electrode rows ER arranged to match the shape of the display panel 100. The first Y-direction movement mechanism 124 positions the casing 123 at the cleaning position of the display panel 100. The first Y-direction movement mechanism 124 is connected to the support unit 15. The ultrasonic cleaning unit 12 may also be equipped with a first X-direction movement mechanism. In this case, in addition to moving in the Y direction, the ultrasonic cleaning unit 12 moves in the +X or -X direction to the cleaning position.

[0081] The cleaning position is determined using the transport position information and the electrode row position information of the electrode row ER to be cleaned. The position in the Y direction and the timing of control may be determined using, for example, a pre-set recipe configured by the user. It is conceivable that the electrode row position information included in this pre-set recipe be stored in the control unit 19a and loaded and used when the program is executed.

[0082] Next, the wiping and cleaning unit 13 of this embodiment, shown in Figures 8 and 10, will be described. When the display panel 100 placed on the stage unit 16 is transported, the wiping and cleaning unit 13 moves to a cleaning position in the Y direction based on the control of the control unit 19a and wipes and cleans the electrode row ER to be cleaned. More specifically, it is a cleaning unit that grips the moving display panel 100 from above and below with a pressing head via a wiping cloth and wipes and cleans the electrode row ER of the display panel 100.

[0083] As shown in Figure 10, the wiping and cleaning unit 13 is equipped with two pressing heads, an upper pressing head 131 and a lower pressing head 132, and a 3Y direction movement mechanism 130. Also, as shown in Figure 10, it is equipped with an actuator 134 that simultaneously moves the upper pressing head 131 and the lower pressing head 132 in the direction of moving toward and toward each other. A strip-shaped wiping cloth 139 is arranged along the contact surface where the upper pressing head 131 and the lower pressing head 132 contact the electrode row ER to be cleaned.

[0084] Furthermore, although the detailed configuration will be described later, the actuator 134, based on the control of the control unit 19a, drives two built-in drive arms 135 connected to each pressing head, thereby moving each pressing head in the Z direction and clamping the display panel 100 from above and below. The wiping and cleaning unit 13, with the upper pressing head 131 and the lower pressing head 132 respectively, clamps the display panel 100 from above and below, and while pressing the wiping cloth 139 against it, the stage unit 16 moves the display panel 100 in the X direction, thereby cleaning each electrode row ER to be cleaned.

[0085] The wiping and cleaning unit 13 is equipped with two pressing heads (upper pressing head 131 and lower pressing head 132) facing each other during cleaning. This configuration allows each pressing head to press the display panel 100 from the vertical direction (±Z direction), and the wiping cloth is used to wipe away dust and debris.

[0086] As shown in Figure 10, the tips of the upper pressing head 131 and the lower pressing head 132 (towards the display panel 100) have upper pressing elements 131a and 132a, respectively, that protrude toward the display panel 100. These upper pressing elements 131a and 132a contact the electrode row ER of the display panel 100 via the wiping cloth 139. The rear ends of the upper pressing head 131 and the lower pressing head 132 (towards the actuator 134) are connected to the drive arm 135 of the actuator 134, respectively.

[0087] Furthermore, the wiping cleaning unit 13 supplies cleaning fluid to the wiping cloth 139 through a cleaning fluid supply mechanism (not shown) provided with micro-pores 137 in the upper pressing element 131a of the upper pressing head 131 and micro-pores 138 in the lower pressing element 132a of the lower pressing head 132, maintaining the wiping cloth 139 in a wet state during cleaning. For this reason, wiping cleaning will also be referred to as wet cleaning below.

[0088] The control unit 19a moves the stage unit 16, and when the electrode row ER to be cleaned on the display panel 100 approaches the wiping cleaning unit 13, the actuator 134 drives the drive arms 135 and 136 connected to the upper pressing head 131 and the lower pressing head 132. As a result, the upper pressing element 131a moves in the -Z direction and the lower pressing element 132a moves in the +Z direction, gripping the display panel 100 with a predetermined pressure. For example, the control unit 19a may control the actuator 134 to grip the display panel 100 just before positioning the electrode row ER to be cleaned against the upper pressing head 131 and the lower pressing head 132. After gripping the display panel 100, the control unit 19a controls the guide roller 133 to feed out the wiping cloth 139 and clean the electrode row ER1 (see Figure 13). This setting is configured, for example, in the processing recipe.

[0089] The wiping cloth 139 is a strip-shaped cloth used to clean the electrode rows ER of the display panel 100, and is wound onto a supply reel (not shown) positioned in the +Z direction. The wiping cloth 139 is also fed out from the +Z direction of the upper indenter 131a, guided by the guide roller 133 from the upper indenter 131a side to the lower indenter 132a side, and recovered by a recovery reel (not shown) positioned in the -Z direction. At predetermined timings, for example, after cleaning the electrode rows ER to be cleaned, the wiping cloth is wound up each time, so that a new cleaning surface faces the next electrode row ER to be cleaned. The humidity of the wiping cloth 139 is controlled by a humidity sensor, and when the humidity falls below a predetermined level, cleaning solution is supplied from the supply pump through the micropores 137 and 138.

[0090] Furthermore, after the cleaning of the electrode row ER, which is the area to be cleaned, is completed, the wiping and cleaning unit 13 releases the gripped display panel 100 by moving the third Y-direction moving mechanism 130. The position and control timing in the Y direction may be determined using information set in advance by the user, for example, according to the arrangement of the electrode row ER on the display panel 100. It is conceivable that this information be stored in the control unit 19a and loaded and used when the program is executed.

[0091] The third Y-direction movement mechanism 130 moves in the +Y or -Y direction to move the wiping and cleaning unit 13 to the electrode row ER to be cleaned among the electrode rows ER arranged to match the shape of the display panel 100. The third Y-direction movement mechanism 130 is connected to the support unit 15. The wiping and cleaning unit 13 may also be equipped with a third X-direction movement mechanism. In this case, in addition to moving in the Y direction, the wiping and cleaning unit 13 can move in the +X or -X direction to the cleaning position.

[0092] Next, the plasma cleaning unit 14 of this embodiment, shown in Figures 8 and 11, will be described. Figure 11 shows the internal structure of the plasma cleaning unit 14 as viewed from the -Y direction.

[0093] As shown in Figure 11, the plasma cleaning unit 14 comprises a plasma irradiation tube 141, a casing 142, and a second Y-direction moving mechanism 143. Electrodes and a dielectric layer (not shown) are built into the casing 142. The plasma cleaning unit 14 generates plasma gas inside the casing 142 and irradiates it from the lower end of the plasma irradiation tube 141 toward the electrode row ER to be cleaned.

[0094] When the display panel 100 placed on the stage unit 16 is transported, the plasma cleaning unit 14 moves to a cleaning position in the Y direction based on the control of the control unit 19a and performs plasma cleaning of the electrode rows ER to be cleaned. For cleaning, the plasma cleaning unit 14 generates plasma and irradiates the electrode rows ER on the display panel 100 with the generated plasma. After cleaning the electrode rows ER to be cleaned, the plasma cleaning unit 14 moves in the Y direction and positions itself for the next electrode row ER to be cleaned. In this way, the plasma cleaning unit 14 cleans each electrode row ER on the display panel 100.

[0095] Plasma gas is supplied to the casing 142 from the gas supply pipe 147. When a high-frequency electric field is applied between the electrode 144 and the casing 142 via the dielectric layer 145 by the high-frequency power supply 146 while the plasma gas is supplied inside the casing 142, a dielectric barrier discharge occurs between the electrode 144 and the casing 142. This causes the plasma gas present between the casing 142 and the dielectric layer 145 to be ionized or excited, generating plasma. The generated plasma is irradiated from the plasma irradiation tube 141 onto the electrode row ER on the display panel 100.

[0096] Furthermore, when the display panel 100 placed on the stage unit 16 is transported, the plasma cleaning unit 14 moves to a cleaning position in the Y direction based on the control of the control unit 19a and performs plasma cleaning of the electrode rows ER to be cleaned. For cleaning, the plasma cleaning unit 14 generates plasma and irradiates the electrode rows ER on the display panel 100 with the generated plasma. After cleaning the electrode rows ER to be cleaned, the plasma cleaning unit 14 moves in the Y direction and positions itself for the next electrode row ER to be cleaned. In this way, the plasma cleaning unit 14 cleans each electrode row ER on the display panel 100.

[0097] The second Y-direction movement mechanism 143 moves in the +Y or -Y direction to move the wiping cleaning unit 13 to the electrode row ER to be cleaned among the electrode rows ER arranged to match the shape of the display panel 100. The second Y-direction movement mechanism 143 is connected to the support unit 15. The plasma cleaning unit 14 may also be equipped with a second X-direction movement mechanism. In this case, in addition to moving in the Y direction, the plasma cleaning unit 14 moves in the +X or -X direction to the cleaning position.

[0098] As described above, in this embodiment, the three cleaning units are configured to move in the Y direction. Furthermore, in the initial state, these cleaning units are positioned on a cleaning position extending in the X direction. The cleaning position is a pre-set design axis. In the following description, the home position of each cleaning unit will be assumed to lie on this cleaning position.

[0099] Figure 12 is an example of a block diagram of the control unit 19a in this embodiment.

[0100] The control unit 19a controls each part of the cleaning device 1. The control unit 19a is programmed with control contents for the ultrasonic cleaning unit 12, the wiping cleaning unit 13, the plasma cleaning unit 14, and the stage unit 16.

[0101] The control unit 19a can be implemented, for example, by installing a program for the control unit 19a on a PC (Programmable Controller). The control unit 19a consists of an input / output control unit 190, a mechanism control unit 191, a storage unit 192, and a setting unit 195, etc. Each unit is controlled by a PC (not shown).

[0102] The input / output control unit 190 is an interface that controls signal conversion and input / output between each cleaning unit and stage unit 16 that are to be controlled.

[0103] The mechanism control unit 191 controls the operation of each cleaning unit and the stage unit 16. For example, with the display panel 100 mounted on the stage unit 16, the mechanism control unit 191 moves the display panel 100 in the +X direction at a predetermined timing or position. The mechanism control unit 191 then passes the display panel 100 through the ultrasonic cleaning unit 12, the wiping cleaning unit 13, and the plasma cleaning unit 14 in that order to clean each electrode row ER. Information necessary for the cleaning process, such as the position of the display panel 100, the position of the electrode row ER, and the transport speed of the display panel 100, is used, for example, information loaded from the storage unit 192.

[0104] The mechanism control unit 191 controls the first Y-direction moving mechanism 124 to position the discharge nozzle 121 at a position corresponding to the electrode row ER to be cleaned, in order to control the ultrasonic cleaning unit 12. The mechanism control unit 191 then sprays an ultrasonic airflow onto the electrode row ER to be cleaned to perform the cleaning. The mechanism control unit 191 may continuously generate, spray, and suck the ultrasonic airflow during the cleaning process, or it may perform these controls only when the discharge nozzle 121 is positioned in the cleaning position.

[0105] The mechanism control unit 191 controls the third Y-direction movement mechanism 130 to position each pressing head at the location of the electrode row ER to be cleaned, in order to control the wiping and cleaning unit 13. Then, the mechanism control unit 191 controls the actuator 134 to drive the drive arms 135 and 136. The upper pressing element 131a moves in the -Z direction and the lower pressing element 132a moves in the +Z direction, so that the upper pressing head 131 and the lower pressing head 132 grip the display panel 100. After the cleaning is complete, the mechanism control unit 191 controls the actuator 134 again to drive the drive arms 135 and 136. The upper pressing element 131a moves in the +Z direction and the lower pressing element 132a moves in the -Z direction, so that the upper pressing head 131 and the lower pressing head 132 release the display panel 100.

[0106] The mechanism control unit 191 controls the second Y-direction moving mechanism 143 to position the plasma irradiation tube 141 at the position of the electrode row ER to be cleaned, in order to control the plasma cleaning unit 14. The mechanism control unit 191 irradiates the electrode row ER to be cleaned with plasma to clean it. The mechanism control unit 191 may generate plasma continuously during cleaning, or it may generate it when it is positioned at the cleaning position.

[0107] The memory unit 192 stores various information such as programs and operating conditions. For example, the memory unit 192 stores the position data of the display panel 100, the position data of the electrode row ER which is the cleaning area, the transport speed of the display panel 100, and setting information received from the operator. This information may also be stored in the memory unit 192 in advance by the user.

[0108] The input unit 193 is an input means such as a switch, touch panel, keyboard, or mouse for the operator to operate the cleaning device 1 via the control unit 19a. The operator can use the input unit 193 to input information necessary for control and store it in the storage unit 192.

[0109] The output unit 194 is an output means such as a display, lamp, or meter that makes information for checking the status of the device visible to the operator. For example, the output unit 194 can display an input screen for information received from the input unit 193.

[0110] The setting unit 195 is a processing unit that sets information in the storage unit 192 according to the input. For example, it stores information input from the input unit 193 as setting information in the storage unit.

[0111] Figures 13-15 illustrate the procedure for positioning the cleaning device 1 in this embodiment.

[0112] The procedure for cleaning three electrode rows ER (electrode rows ER1 to ER3) arranged on the edge of a display panel 100 including a curved portion using the cleaning device 1 will be described with reference to Figures 13 to 15. In this embodiment, the display panel 100 has different edge depths (positions in the Y direction), and the electrode rows ER1 to ER3 are arranged non-collinearly at the edge. In this embodiment, three electrode rows ER are used as an example on the edge of the display panel 100, but the number of electrode rows ER can be one or more. Even if the number of electrode rows ER is one or more, cleaning can be performed in the same order as below: ultrasonic cleaning, wiping cleaning, and plasma cleaning. The cleaning method using the cleaning device 1 as described below is also one aspect of the present invention.

[0113] Electrode rows ER1 to ER3 are examples of the first to third electrode rows, respectively. The electrode rows ER arranged on the display panel 100 are not limited to these examples, and the display panel 100 may have the first to nth electrode rows (n being an integer of 1 or more). The cleaning device 1 can clean the electrode rows ER of various display panels 100, such as those shown in Figure 1, by combining the movement of the stage section 16 in the X direction with the movement of the ultrasonic cleaning section 12 and the plasma cleaning section 14 in the Y direction. The positioning method of each cleaning section is not limited to the examples shown in Figures 13 to 15. For example, the positioning procedure may be changed depending on the shape of the display panel 100 and the electrode rows ER arranged thereon.

[0114] Furthermore, in Figures 13-15, for the sake of simplicity, the positions of the discharge nozzle 121 in the ultrasonic cleaning unit 12, the pressing heads in the wiping cleaning unit 13, and the plasma irradiation tube 141 in the plasma cleaning unit 14 of the cleaning apparatus 1 are shown as US, WET, and PLAZMA, respectively. The dashed lines extending in the X direction indicate the cleaning positions, and in the initial state, each cleaning unit is assumed to be in its home position. In this embodiment, the initial state is assumed to be when the display panel 100 is placed on the transport stage 161 before cleaning. In addition, information necessary for the cleaning process (processing recipe), such as the transport speed and position information of the stage unit 16, is assumed to be loaded from the storage unit 192. Furthermore, the processing recipes for the operation of the ultrasonic cleaning unit 12, the wiping cleaning unit 13, and the plasma cleaning unit 14 are also assumed to be loaded from the storage unit 192.

[0115] The processing recipe specifies, for example, movement control in the stage section 16, movement control in the ultrasonic cleaning section 12, flow rate control of clean air and ultrasonic operation control, operation of the pressing head in the wiping cleaning section, winding operation of the wiping cloth and operation of the processing liquid, movement control in the plasma cleaning section 14, gas supply control and discharge control, etc. The control unit 19a controls each mechanism in accordance with this processing recipe.

[0116] As shown in Figure 13(A), in the initial state, the imaging unit 600 captures alignment marks on the display panel 100, and then the display panel 100 is aligned to a reference position. This reference position can be, for example, the position where the trajectory of the electrode row ER located furthest in the +Y direction among the multiple electrode rows ER on the display panel 100 moves in the X direction passes through the cleaning center positions of the three cleaning units located in the initial position. This reference position can be determined arbitrarily. Based on the recognition results of the imaging unit 600, the mechanism control unit 191 controls each movement mechanism to move the stage unit 16 in the X, Y, and θ directions to align it to the origin position. In Figure 13(A), the control unit 19a controls the imaging unit 600 and aligns it to the origin position. From this state, the X-direction movement mechanism 162 moves the display panel 100 on the transport stage 161 in the X direction. In this embodiment, the origin position of the stage section 16 is such that the electrode row ER2 of the display panel 100 shown in Figure 13(A) coincides with the Y-direction position of the reference position. The X-direction reference position can be set arbitrarily.

[0117] At this time, each cleaning unit is positioned from its initial position (the position of each cleaning unit shown by the dashed line in Figure 13(A)) by the first Y-direction moving mechanism 124, the second Y-direction moving mechanism 143, and the third Y-direction moving mechanism 130 to correspond to the position of electrode array ER1, which is the electrode array ER to be cleaned first. Since electrode array ER1 is located in the -Y direction from the cleaning position, the discharge nozzle 121, each pressing head, and the plasma irradiation tube 141 move in the -Y direction where electrode array ER1 is located by driving the first Y-direction moving mechanism 124, the second Y-direction moving mechanism 143, and the third Y-direction moving mechanism 130.

[0118] From this state, the X-direction movement mechanism 162 moves the stage section 16 in the X direction, causing the electrode row ER1 to pass below the discharge nozzle 121 for ultrasonic cleaning (Figure 13(A)). When the ultrasonic cleaning of the electrode row ER1 by the ultrasonic cleaning section 12 is complete, the first Y-direction movement mechanism 124 positions the discharge nozzle 121 of the ultrasonic cleaning section 12 to correspond to the position of the electrode row ER2 to be ultrasonically cleaned next (Figure 13(B)). Since the electrode row ER2 is located in the +Y direction relative to the electrode row ER1, the discharge nozzle 121 is moved in the +Y direction by the drive of the first Y-direction movement mechanism 124.

[0119] Subsequently, the X-direction movement mechanism 162 moves the stage section 16 in the X direction, and when the electrode row ER1 is positioned to correspond to the wiping and cleaning section 13, each pressing head of the wiping and cleaning section 13 grips the display panel 100. Wiping and cleaning is performed as the electrode row ER1, moving in the X direction, passes through while being sandwiched between the wiping cloth 139 (Figure 13(B)).

[0120] Once the wiping and cleaning of electrode array ER1 is complete, each pressing head opens the display panel 100, and the third Y-direction movement mechanism 130 positions the wiping and cleaning unit 13 to correspond to the position of electrode array ER2 to be wiped and cleaned next (Figure 13(C)). Since electrode array ER2 is located in the +Y direction relative to electrode array ER1, the third Y-direction movement mechanism 130 drives each pressing head in the +Y direction.

[0121] As the stage unit 16 continues to move in the X direction, the electrode row ER2 is positioned to correspond to the ultrasonic cleaning unit 12, and ultrasonic cleaning is performed by passing the electrode row ER2 below the discharge nozzle 121 (Figure 13(C)). When ultrasonic cleaning of the electrode row ER2 is complete, the first Y-direction movement mechanism 124 positions the ultrasonic cleaning unit 12 to correspond to the position of the electrode row ER3 to be ultrasonically cleaned next. Since the electrode row ER3 is in a position in the -Y direction relative to the electrode row ER2, the discharge nozzle 121 is moved in the -Y direction by the drive of the first Y-direction movement mechanism 124 (Figure 14(A)).

[0122] Next, the X-direction movement mechanism 162 moves the stage section 16 in the X direction, and when the electrode row ER1 is positioned to correspond to the plasma cleaning section 14, the electrode row ER1 is passed below the plasma irradiation tube 141 to perform plasma cleaning (Figure 14(A)). Once the plasma cleaning of the electrode row ER1 is complete, the second Y-direction movement mechanism 143 positions the plasma irradiation tube 141 in front of the electrode row ER1. Then, the X-direction movement mechanism 162 moves the stage section 16 in the X direction, passing the electrode row ER1 below the plasma irradiation tube 141 to perform plasma cleaning again.

[0123] Next, the X-direction movement mechanism 162 moves the stage section 16 in the X direction, and when the electrode row ER2 is positioned to correspond to the wiping cleaning section 13, the electrode row ER2 moving in the X direction is caught in the wiping cloth 139 and passes through, performing wiping cleaning (Figure 14(B)). When the wiping cleaning of the electrode row ER2 is complete, the pressing head opens the display panel 100, and the third Y-direction movement mechanism 130 positions the wiping cleaning section 13 to correspond to the position of the next electrode row ER3 to be wiped clean. Since the electrode row ER3 is in a position in the -Y direction relative to the electrode row ER2, the third Y-direction movement mechanism 130 drives each pressing head to move in the -Y direction (Figure 14(C)).

[0124] Furthermore, as the X-direction movement mechanism 162 moves the stage section 16 in the X direction, when the electrode row ER3 is positioned to correspond to the ultrasonic cleaning section 12, the electrode row ER3 is passed below the discharge nozzle 121 to perform ultrasonic cleaning (Figure 14(C)).

[0125] Next, the X-direction movement mechanism 162 moves the stage section 16 in the X direction, causing the electrode array ER2 to pass below the plasma irradiation tube 141. As the electrode array ER2 passes below the plasma irradiation tube 141, it is plasma-cleaned by the plasma irradiated from the plasma irradiation tube 141 (Figure 15(A)). Once the plasma cleaning of electrode array ER2 is complete, the second Y-direction movement mechanism 143 positions the plasma irradiation tube 141 over electrode array ER3, which will be plasma-cleaned next (Figure 15(B)). Since electrode array ER3 is located in the -Y direction relative to electrode array ER2, the second Y-direction movement mechanism 143 drives the plasma irradiation tube 141 in the -Y direction.

[0126] Furthermore, the electrode array ER3, which moves in the X direction, is caught in the wiping cloth 139 as it passes through, performing wiping cleaning (Figure 15(B)). Once wiping cleaning is complete, each pressing head opens the display panel 100.

[0127] With the plasma irradiation tube 141 of the plasma cleaning unit 14 positioned to correspond to the electrode row ER3 in the Y direction, the electrode row ER3 of the display panel 100, which is moved in the X direction by the drive of the X direction moving mechanism 162, passes below the plasma irradiation tube 141. The electrode row ER3 is plasma-cleaned by the plasma irradiated from the plasma irradiation tube 141 (Figure 15(C)). After the cleaning of each electrode row ER is complete, the display panel 100 is transported to an unshown discharge unit for further processing. After the cleaning of each electrode row ER is complete, each cleaning unit moves to its home position (initial position).

[0128] Figure 16 is a flowchart of the cleaning process in this embodiment.

[0129] This flowchart describes the cleaning process, starting with the initial state of the display panel 100 being placed on the transport stage 161 before cleaning. It also assumes that information necessary for the cleaning process, such as the transport speed of the display panel 100, is loaded from the storage unit 192. Furthermore, as explained in Figure 13, the procedure for the cleaning device 1 to clean multiple (n) electrode rows ER located on the edges of the display panel 100, including the curved portion, is described.

[0130] In this flowchart, multiple electrode rows ER are identified by variables i, j, and k. That is, they are described as electrode row ERi, electrode row ERj, and electrode row ERk. The variables for electrode row ER increase by 1 according to the order in which they are cleaned. For example, in the case of the display panel 100 in Figure 1(A), the electrode rows corresponding to each electronic component 300 are described as ER1, ER2, ER3...ER6 (n=6) from the rightmost end in the longitudinal direction. Therefore, the variables i, j, and k are integers satisfying 1<=i<=n, 1<=j<=n, and 1<=k<=n, respectively, and are used to describe the i, j, and kth electrode rows ER that are to be cleaned.

[0131] Furthermore, variable i is used as a variable when ultrasonic cleaning is performed in the ultrasonic cleaning section. Variable j is used as a variable when wipe cleaning is performed in the wipe cleaning section. Variable k is used as a variable when plasma cleaning is performed in the plasma cleaning section. In this flowchart, steps S3 to S6 represent the ultrasonic cleaning process, steps S7 to S10 represent the wipe cleaning process, and steps S11 to S14 represent the plasma cleaning process.

[0132] Furthermore, this flowchart describes an example in which, as the display panel 100 moves in the +X direction, each mechanism control unit 191 controls the first Y-direction movement mechanism 124, the second Y-direction movement mechanism 143, and the third Y-direction movement mechanism 130 in parallel to clean each electrode row ER. The cleaning flow is not limited to this example, and various flowcharts can be adopted depending on the shape of the display panel 100.

[0133] In step S1, the variables i, j, and k are assigned the value 1. In step S2, the mechanism control unit 191 controls the X-direction movement mechanism 162 to start moving the display panel 100 placed on the stage unit 16 in the +X direction, that is, in the direction of each cleaning unit. Thereafter, the stage unit 16 moves in the X direction at a predetermined speed according to the processing recipe.

[0134] In step S3, the mechanism control unit 191 controls the first Y-direction movement mechanism 124 to position the discharge nozzle 121 in the Y-direction relative to the electrode row ERi. In this flowchart, when i=1, the discharge nozzle 121 is positioned in the Y-direction relative to the electrode row ER1. In step S4, the mechanism control unit 191 controls the X-direction movement mechanism 162 to move the electrode row ERi=1 under the discharge nozzle 121.

[0135] In step S5, the mechanism control unit 191 performs ultrasonic cleaning when electrode train ERi=1 passes under the discharge nozzle 121. In step S6, the mechanism control unit 191 determines whether the variable i is less than n. If the variable i is less than n (YES in step S6), 1 is added to the variable i and the process returns to step S3. If the variable i is 1, then the variable i becomes 2. In other words, the next electrode train ER to be cleaned is electrode train ER2. From here on, steps S3 to S5 are repeated to perform ultrasonic cleaning of electrode trains ER2 to ERn. In step S6, if the mechanism control unit 191 determines that the variable i is not less than n (NO in step S5), it considers that ultrasonic cleaning of all electrode trains ER to be ultrasonically cleaned is complete and proceeds to step S15.

[0136] In step S15, the mechanism control unit 191 controls the first Y-direction movement mechanism 124 to move the discharge nozzle 121 to the home position.

[0137] In step S7, the mechanism control unit 191 controls the third Y-direction movement mechanism 130 to position the Y-direction position of each pressing head relative to the electrode array ERj. In this flowchart, when j=1, each pressing head is positioned at the Y-direction position of the electrode array ER1. In step S8, the mechanism control unit 191 controls the X-direction movement mechanism 162 to bring the electrode array ERj=1 closer to each pressing head.

[0138] In step S9, the mechanism control unit 191 cleans the display panel 100 by clamping it with each pressing head, focusing on the adjacent electrode row ERj=1. After cleaning, the mechanism control unit 191 releases the clamping of the display panel 100 by each pressing head. In step S10, the mechanism control unit 191 determines whether the variable j is less than n. If the variable j is less than n (YES in step S6), 1 is added to the variable j, and the process returns to step S7. If the variable j is 1, then the variable j becomes 2. In other words, the next electrode row ER to be cleaned is electrode row ER2. Steps S7 to S9 are repeated thereafter to clean electrode rows ER2 to ERn. In step S10, if the mechanism control unit 191 determines that the variable j is not less than n (NO in step S5), it considers that cleaning of all electrode rows ER to be cleaned is complete and proceeds to step S15.

[0139] In step S15, the mechanism control unit 191 controls the third Y-direction movement mechanism 130 to move each pressing head to the home position.

[0140] In step S11, the mechanism control unit 191 controls the second Y-direction movement mechanism 143 to position the plasma irradiation tube 141 in the Y-direction relative to the electrode array ERk. In this flowchart, when k=1, the plasma irradiation tube 141 is positioned in the Y-direction relative to the electrode array ER1. In step S12, the mechanism control unit 191 controls the X-direction movement mechanism 162 to move the electrode array ERk=1 under the plasma irradiation tube 141.

[0141] In step S13, the mechanism control unit 191 performs plasma cleaning when electrode train ERk=1 passes under the plasma irradiation tube 141. In step S14, the mechanism control unit 191 determines whether the variable k is less than n. If the variable k is less than n (YES in step S6), 1 is added to the variable k and the process returns to step S11. If the variable k is 1, then the variable k becomes 2. In other words, the next electrode train ER to be cleaned is electrode train ER2. From here on, steps S11 to S13 are repeated to perform wiping cleaning of electrode trains ER2 to ERk. In step S14, if the mechanism control unit 191 determines that the variable k is not less than n (NO in step S5), it considers that plasma cleaning of all electrode trains ER to be plasma cleaned is complete and proceeds to step S15.

[0142] In step S15, the mechanism control unit 191 controls the second Y-direction movement mechanism 143 to move the plasma irradiation tube 141 to the home position. In step S16, the mechanism control unit 191 controls the X-direction movement mechanism 162 to stop the movement of the stage unit 16 in the +X direction.

[0143] As shown in the flow chart above, after each cleaning unit has finished cleaning the electrode array ER1 to Ern, the cleaning flow is terminated.

[0144] (effect) According to this embodiment, since each cleaning unit of the cleaning device 1 is configured to move in the Y direction by a Y-direction movement mechanism, it becomes possible to position it on the electrode row ER that moves in the X direction, and to perform cleaning in accordance with the electrode row ER of the display panel 100 that moves in the X direction. As a result, even when the electrode row ER is provided on parts of the display panel 100 with different depths, such as curved parts and notched parts, the cleaning device 1 can complete ultrasonic cleaning, wiping cleaning, and plasma cleaning in a single movement in the X direction without rotating the stage unit 16, that is, it can complete all the necessary cleaning items for the electrode row ER.

[0145] Furthermore, according to this embodiment, when cleaning a large display panel 100 used in vehicles or the like, there is no need to rotate the stage section 16, and the cleaning device 1 can be made more space-saving.

[0146] Next, we will compare the cleaning device 1 described in this embodiment with the cleaning device 1 shown in Figure 17. In the comparative example, the cleaning device 1 does not have a Y-direction movement mechanism for each cleaning section. That is, each cleaning section is fixed in place. For example, when cleaning electrode rows ER1 to ER3 that are not on the same straight line at the edge of a display panel 100 including a curved portion, the cleaning device 1 rotates the stage section 16 in the θ direction to position it at each cleaning section.

[0147] As shown in Figure 17(A), the stage unit 16 is moved in the X direction. Furthermore, the stage unit 16 is rotated in the θ direction so that the arrangement direction of the electrode row ER1 is parallel to the X direction. In this state, the electrode row ER1 is cleaned by passing through the ultrasonic cleaning unit 12, the wiping cleaning unit 13, and the plasma cleaning unit 14.

[0148] Once the cleaning of the electrode array ER1 is complete by each cleaning unit, the stage unit 16 is moved in the -X direction. In other words, it is returned to the initial position when the display panel 100 was placed on the stage unit 16 (Figure 17(B)).

[0149] At this position, the stage unit 16 rotates in the θ direction so that the arrangement direction of the electrode row ER2 is parallel to the X direction. In this state, while moving the stage unit 16 in the X direction, the electrode row ER2 is cleaned by passing through the ultrasonic cleaning unit 12, the wiping cleaning unit 13, and the plasma cleaning unit 14.

[0150] Once the cleaning of the electrode array ER2 is complete by each cleaning unit, the stage unit 16 is moved in the -X direction. In other words, it is returned to the initial position when the display panel 100 was placed on the stage unit 16 (Figure 17(C)). At this position, the stage unit 16 rotates in the θ direction so that the arrangement direction of the electrode array ER3 is parallel to the X direction. In this state, as the stage unit 16 is moved in the X direction, the electrode array ER3 is cleaned by passing through the ultrasonic cleaning unit 12, the wiping cleaning unit 13, and the plasma cleaning unit 14.

[0151] As described above, if the display panel 100 includes curved shapes (curved portions) or concave shapes (notched portions) on its edges, the cleaning device 1 rotates the stage unit 16 at each angle in which the electrode rows ER are positioned to clean, positioning the electrode rows ER to be cleaned in each cleaning unit and performing the cleaning. For large display panels 100 used in vehicles, etc., if the stage unit 16 is rotated each time an electrode row ER is cleaned, it is not possible to position the cleaning unit at the next cleaning position until cleaning by all cleaning units is completed, which results in a longer cycle time.

[0152] According to this embodiment, even when the electrode rows ER are provided in curved or notched portions of the display panel 100, or in other areas with different depths, the cleaning device 1 can complete ultrasonic cleaning, wiping cleaning, and plasma cleaning with just one movement in the X direction without rotating the stage unit 16. In other words, all necessary cleaning items for the electrode rows ER can be completed with just one movement of the stage unit 16 in the X direction.

[0153] Furthermore, the ultrasonic cleaning unit 12 and the plasma cleaning unit 14 may be equipped with an X-direction movement mechanism to adjust the distance between the ultrasonic cleaning unit 12 and the wipe cleaning unit 13, and between the wipe cleaning unit 13 and the plasma cleaning unit 14. This allows the position in the X-direction of each cleaning unit to be adjusted according to the spacing of each electrode row ER.

[0154] Next, a modified example of the cleaning device 1 in this embodiment will be described. In this modified example, the procedure for the cleaning device 1 to clean three electrode rows ER arranged on the edge of a recessed display panel 100 having a notched portion will be described as electrode rows ER1 to ER3. In this example, electrode row ER2 will be described as being located in the notched portion.

[0155] As shown in Figure 18(A), in the initial state, the imaging unit 600 captures alignment marks on the display panel 100, and then the stage unit 16 is aligned to the origin position. In this modified example, each moving mechanism moves the stage unit 16 so that the arrangement direction of electrode rows ER1 and ER3 among electrode rows ER1 to ER3 is at the reference position as the origin position. Subsequently, according to the processing recipe, the X-direction moving mechanism 162 moves the display panel 100 on the transport stage 161 in the X direction.

[0156] As shown in Figure 18(B), the electrode array ER1 is positioned in the reference direction, and the X-direction movement mechanism 162 causes the electrode array ER1 to pass under the discharge nozzle 121 of the ultrasonic cleaning unit 12, where it is cleaned by the ultrasonic airflow discharged from the discharge nozzle.

[0157] When ultrasonic cleaning of electrode array ER1 is complete, the ultrasonic cleaning unit 12 moves the discharge nozzle 121 in the Y direction by the first Y-direction movement mechanism 124 to correspond to the position of electrode array ER2, which is to be cleaned next. As shown in Figure 18(C), the first Y-direction movement mechanism 124 moves the discharge nozzle 121 from the reference position in the -Y direction to a predetermined distance to correspond to electrode array ER2. The X-direction movement mechanism 162 causes electrode array ER2 to pass under the discharge nozzle 121 of the ultrasonic cleaning unit 12 and clean it by the ultrasonic airflow discharged from the discharge nozzle.

[0158] When ultrasonic cleaning of electrode row ER2 is complete, the ultrasonic cleaning unit 12 moves the discharge nozzle 121 in the Y direction by the first Y-direction movement mechanism 124 to correspond to the position of electrode row ER3, which is the next to be cleaned. As shown in Figure 19(A), the first Y-direction movement mechanism 124 moves the discharge nozzle 121 in the +Y direction to correspond to electrode row ER3, which is located at the reference position. The X-direction movement mechanism 162 causes electrode row ER3 to pass under the discharge nozzle 121 of the ultrasonic cleaning unit 12 and clean it with the ultrasonic airflow discharged from the discharge nozzle. Furthermore, simultaneously with the cleaning of electrode row ER3, electrode row ER1 passes through the wiping cleaning unit 13. When electrode row ER1 approaches each pressing head, each pressing head grips the display panel 100, and electrode row ER1 is wiped clean by the wiping cloth 139 while moving in the X direction.

[0159] Once the electrode array ER1 has been wiped clean, each pressing head releases its grip on the display panel 100. The third Y-direction movement mechanism 130 then moves each pressing head in the Y direction. As shown in Figure 19(B), the wiping and cleaning unit 13 moves in the -Y direction to correspond to the electrode array ER2, and each pressing head grips the display panel 100.

[0160] With the display panel 100 held in place, the electrode row ER2 is moved in the X direction and wiped clean by the wiping cloth 139 (see Figure 19(C)).

[0161] Once the electrode row ER2 has been wiped clean, each pressing head releases its grip on the display panel 100. The third Y-direction movement mechanism 130 then moves each pressing head in the Y direction. As shown in Figure 20(A), the wiping and cleaning unit 13 moves in the +Y direction to correspond to the electrode row ER3, and each pressing head grips the display panel 100, cleaning the electrode row ER3, which is moving in the X direction, with the wiping cloth 139. Once the wiping and cleaning of the electrode row ER3 is complete, each pressing head releases its grip on the display panel 100. Furthermore, the X-direction movement mechanism 162 causes the electrode row ER1 to pass under the plasma irradiation tube 141 of the plasma cleaning unit 14, where it is cleaned by the plasma irradiated from the plasma irradiation tube 141.

[0162] Once the plasma cleaning of electrode array ER1 is complete, the plasma cleaning unit 14 moves the plasma irradiation tube 141 in the Y direction using the second Y-direction moving mechanism 143 to correspond to the position of electrode array ER2, which is the next target for cleaning. As shown in Figure 20(B), the second Y-direction moving mechanism 143 moves in the -Y direction to correspond to the position of electrode array ER2.

[0163] The X-direction movement mechanism 162 causes the electrode array ER2 to pass below the plasma irradiation tube 141 of the plasma cleaning unit 14, and it is cleaned by the plasma irradiated from the plasma irradiation tube 141 (see Figure 20(C)).

[0164] Once the plasma cleaning of electrode array ER2 is complete, the plasma cleaning unit 14 moves the plasma irradiation tube 141 in the Y direction using the second Y-direction moving mechanism 143 to correspond to the position of electrode array ER3, which is the next target for cleaning. As shown in Figure 21(A), the second Y-direction moving mechanism 143 moves in the +Y direction to correspond to the position of electrode array ER3.

[0165] When the plasma irradiation tube 141 is positioned to correspond to the electrode row ER3, the display panel 100, which moves in the X direction along the reference position, indicates that the electrode row ER3 passes below the plasma irradiation tube 141 of the plasma cleaning unit 14 and is cleaned by the plasma irradiated from the plasma irradiation tube 141 (see Figure 21(B)).

[0166] Once the cleaning of electrode rows ER1 to ER3 by each cleaning unit is complete, the respective drive mechanisms move the display panel 100 on the stage unit 16 to a position for removal (see Figure 21(C)). The display panel 100 is then removed to an unshown discharge unit for further processing.

[0167] According to a modified version of this embodiment, the cleaning device 1 moves the display panel 100 in the X direction together with the stage unit 16, and moves each cleaning unit in the Y direction to align the position of the electrode row ER in the notched portion of the display panel 100, thereby positioning the electrode row ER in the Y direction in the notched portion of the display panel 100 to correspond to the position of the wiping cleaning unit 13, and then cleaning. As a result, even when the electrode row ER is provided in the notched portion of the display panel 100, the cleaning device 1 can complete ultrasonic cleaning, wiping cleaning, and plasma cleaning with just one movement in the X direction without rotating the stage unit 16.

[0168] Although several embodiments have been described above, these embodiments are presented only as examples and are not intended to limit the scope of the invention. The novel cleaning apparatus 1 described herein can be implemented in a variety of other forms. Furthermore, various omissions, substitutions, modifications, and combinations can be made to the forms of the cleaning apparatus 1 described herein without departing from the spirit of the invention. The appended claims and equivalents are intended to include such forms and modifications included in the scope and spirit of the invention. [Explanation of Symbols]

[0169] 1: Cleaning device, 1a: Cleaning unit, 3: Adhesion device, 5: Temporary crimping device, 7: Main crimping device, 10: Mounting device, 12: Ultrasonic cleaning unit, 13: Wipe-cleaning section, 14: Plasma cleaning section, 15: Support section, 16: Stage section, 19: Control unit, 100: Display panel, 101: Color filter, 121: Discharge nozzle, 122: Suction nozzle, 123: Casing, 124: First Y-direction movement mechanism, 124a: Connection unit, 124c: Ball screw, 124d: Linear guide, 125: Ultrasonic generator, 126: Ionizer, 127: Discharge chamber, 128: Suction chamber, 130: Third Y-direction movement mechanism, 131: Upper pressing head, 131a: Upper pressing element, 132: Lower pressing head, 132a: Lower pressing element, 133: Guide roller, 134: Actuator, 135: Drive arm, 137: Micropore, 138: Micropore, 139: Wiping cloth, 141: Plasma irradiation tube, 142: Casing, 143: Second Y-direction movement mechanism, 144: Electrode, 145: Dielectric layer, 146: High-frequency power supply, 147: Gas supply pipe, 161: Transport stage, 162: X-direction movement mechanism, 163: θ-direction movement mechanism, 190: Input / Output Control Unit, 191: Mechanism Control Unit, 192: Memory Unit, 193: Input Unit, 194: Output section, 195: Setting section, 300: Electronic components, 310: Substrate, 320: Conductive particles, 500: ACF, 600: Imaging unit 1000: Release tape, 1100: Guide roller, 1300: Substrate stage, 1400: Up / down drive mechanism, 1500: Pressurizing tool, 1600: Base, 1600a: X drive source, 1600b: Y drive source, 1600c: θ drive source, 1700: Table, 1800: Path roller, 1900: Supply reel, 2000: Adhesive tape, 2100: Base, 2200: Imaging unit, 2400: Backup, 2500: Paste tool, 2600: First transport arm, 2700: Mounting table, 2800: Second transport arm, 2900: Pad, 3000: Feeder, 3100: Chuck 3200: Table unit, 3300: Cylinder, 3400: Cutting section, 3500: Holding block, 3600: Take-up reel, 3700: XY table, 3800: Table unit, 3900: Base, 4000: XY table, 4100: Mounting table, 4200: Pad, 4300: Imaging unit, 4400: Support arm, 4500: Backup, 4600: Main crimping tool, 4700: Third transport arm, 4800: Fourth transport arm, 4900: Protective tape, 5100: Peeling part, 5200: Peeling rod, 5300: Peeling rod, ER: electrode row

Claims

1. A display panel having multiple electrode rows to be cleaned is placed on a stage section which moves in a first direction that is the transport direction of the display panel, Multiple cleaning units that move in a second direction intersecting the first direction and clean the multiple electrode rows on the display panel that move in the first direction as the stage unit moves, A cleaning device characterized by being equipped with the following features.

2. The cleaning apparatus according to claim 1, characterized in that the plurality of cleaning units move in a second direction to correspond to the position of the electrode row to be cleaned among the plurality of electrode rows on the display panel that moves in a first direction as the stage unit moves.

3. The cleaning apparatus according to claim 2, characterized in that the plurality of cleaning units move in the second direction to correspond to the position of the next electrode row to be cleaned after the cleaning of a predetermined electrode row to be cleaned has been completed among the plurality of electrode rows.

4. The cleaning apparatus according to any one of claims 1 to 3, characterized in that the plurality of cleaning units include at least one of a wiping cleaning unit that performs wiping cleaning, an ultrasonic cleaning unit that performs ultrasonic cleaning, and a plasma cleaning unit that performs plasma cleaning.

5. The cleaning apparatus according to any one of claims 1 to 3, characterized in that the plurality of electrode rows are arranged along the edge of the display panel, mixed on the same straight line parallel to the first direction and on non-colinear lines that are not on the same straight line.

6. The cleaning apparatus according to any one of claims 1 to 3, characterized in that the plurality of electrode rows are arranged along the edge of the display panel on non-collinear lines that are not parallel to the first direction.

7. An electronic component mounting apparatus equipped with a cleaning device, which mounts electronic components to a plurality of electrode rows provided on the edge of a display panel to be mounted, The cleaning device is A stage section on which the display panel having multiple electrode rows to be cleaned is placed and which moves in a first direction that is the transport direction of the display panel, Multiple cleaning units that move in a second direction intersecting the first direction and clean the multiple electrode rows on the display panel that move in the first direction as the stage unit moves, An electronic component mounting apparatus characterized by being equipped with [a specific feature].

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