Physical quantity sensors and electronic devices

Abstract

To provide a small physical quantity sensor with a high Q value and high detection sensitivity, and an electronic device using the same. [Solution] The physical quantity sensor 1 includes a ring portion 31 that can vibrate in an annular manner, four support portions 61-64, four beams 71-72 that connect the support portions 61-64 to the nodes of the annular vibration of the ring portion 31, a pair of first mass portions 51, 52 having movable parts and arranged opposite to each other in the X1 axis direction via the ring portion 31, a pair of second mass portions 53, 54 having movable parts and arranged opposite to each other in the Y axis direction via the ring portion 31, and a vibration means 4 that vibrates at least one of the pair of first mass portions 51, 52 and the pair of second mass portions 53, 54 in opposite phases to each other at a first frequency, and the ring portion 31 vibrates in an annular manner in the X axis direction and the Y axis direction according to the first frequency.

Description

Technical Field

[0001] The present invention relates to a physical quantity sensor and an electronic device using the same.

Background Art

[0002] In recent years, angular velocity sensors for detecting angular velocity have been widely used for shake correction of imaging devices such as digital cameras and for attitude control of mobile navigation systems such as vehicle navigation systems using GPS signals. Also, as an angular velocity sensor, there is known one that can detect angular velocities around each of the three mutually orthogonal axes with a single sensor (see, for example, Patent Document 1).

[0003] The sensor described in Patent Document 1 has an annular drive mass, an anchor disposed at the center thereof, an elastic anchor element connecting the drive mass and the anchor, and a substrate 2 to which the anchor is fixed, and is configured to detect angular velocity around each axis in a state where the drive mass is rotationally vibrated. However, in such a configuration, the vibration of the drive mass is transmitted to the substrate 2 through the elastic anchor element and the anchor, resulting in vibration leakage. When such vibration leakage occurs, the Q value of the vibration of the sensor decreases (that is, energy loss is caused). When the Q value of the vibration decreases, a desired vibration amplitude cannot be obtained, and the detection sensitivity of the sensor deteriorates. Also, a driving device with high driving ability is required to obtain a necessary amplitude, leading to an increase in the size of the sensor.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] The object of the present invention is to provide a small physical quantity sensor having a high Q value and high detection sensitivity, and an electronic device using the same. [Means for solving the problem]

[0006] These objectives are achieved by the present invention described below. The physical quantity sensor of the present invention, when two mutually orthogonal axes are designated as the first axis and the second axis, A ring portion capable of circular vibration, The four support parts that support the ring portion, Four beams connecting each of the support parts to the nodes of the ring vibration of the ring part, A pair of first mass parts having a movable part and arranged opposite to each other in a direction parallel to the first axis via the ring part, A pair of second mass parts having a movable part and arranged opposite to each other in a direction parallel to the second axis via the ring part, A pair of first springs connecting each of the first mass parts and the ring part, such that each of the first mass parts can vibrate in a direction parallel to the first axis relative to the ring part, A pair of second springs connect each of the second mass parts to the ring part, such that each of the second mass parts can vibrate in a direction parallel to the second axis relative to the ring part, A vibration means for vibrating at least one of the pair of first mass parts and the pair of second mass parts in a planar direction including the first axis and the second axis at a first frequency and in opposite phase to each other, The device comprises at least one transducer that converts the displacement of the movable part of each of the first mass parts and the movable part of each of the second mass parts into an electrical signal, The ring portion is characterized by vibrating in a circular motion in a direction parallel to the first axis and in a direction parallel to the second axis, according to the first frequency. This makes it possible to provide a small physical quantity sensor with a high Q value and high detection sensitivity.

[0007] The physical quantity sensor of the present invention, when two mutually orthogonal axes are designated as the first axis and the second axis, A ring portion capable of circular vibration, The four support parts that support the ring portion, Four beams connecting each of the support parts and the four fixed points that form nodes of the ring vibration of the ring part, A pair of first mass parts are arranged opposite to each other in a direction parallel to the first axis via the ring portion, each having a first movable part that is displaceable about an axis parallel to the second axis and a second movable part that is displaceable in a direction parallel to the second axis, A pair of second mass parts are arranged opposite to each other in a direction parallel to the second axis via the ring portion, having a third movable part that can be displaced about an axis parallel to the first axis and a fourth movable part that can be displaced in a direction parallel to the first axis, A pair of first spring portions connecting each of the first mass portions and the ring, such that each of the first mass portions can vibrate in a direction parallel to the first axis relative to the ring portion, A pair of second springs connect each of the second mass parts to the ring, such that each of the second mass parts can vibrate in a direction parallel to the second axis with respect to the ring, A vibration means for vibrating at least one of the pair of first mass parts and the pair of second mass parts in a planar direction including the first axis and the second axis at a first frequency and in opposite phase to each other, A transducer that converts the displacement amounts of the first movable part of each of the first mass parts and the third movable part of each of the second mass parts into an electrical signal, The device includes a transducer that converts the displacement amounts of the second movable part and the fourth movable part of each of the first mass parts into an electrical signal, The ring portion is characterized by vibrating in a circular motion in a direction parallel to the first axis and in a direction parallel to the second axis, according to the first frequency. This makes it possible to provide a small physical quantity sensor with a high Q value and high detection sensitivity.

[0008] The physical quantity sensor of the present invention has a substrate that supports the ring portion, The substrate is preferably composed of a semiconductor substrate, an insulating substrate, or a composite substrate in which a semiconductor layer and an insulating layer are laminated. This results in a simpler device configuration. In the physical quantity sensor of the present invention, it is preferable that the ring portion has an outer diameter and an inner diameter, with a gap inside the inner diameter, and that the ring portion is elastically deformable. This allows the ring section to vibrate more efficiently in a circular motion.

[0009] In the physical quantity sensor of the present invention, the first spring portion is restricted from deformation in a direction parallel to the second axis and from deformation in a direction parallel to an axis perpendicular to both the first and second axes. Preferably, the second spring portion is restricted from deformation in a direction parallel to the first axis and from deformation in a direction parallel to an axis perpendicular to both the first and second axes. This allows the first mass section to be stably vibrated in a direction parallel to the first axis, and the second mass section to be stably vibrated in a direction parallel to the second axis.

[0010] In the physical quantity sensor of the present invention, the four support portions are preferably located inside the pair of first mass portions and the pair of second mass portions and outside the ring portion, and are provided in a position that is mirror-symmetric with respect to the first axis and the second axis that intersect with the center of the ring portion. This allows for miniaturization of the device. Furthermore, it provides stable support for the ring section.

[0011] In the physical quantity sensor of the present invention, it is preferable that each of the beams is restricted from radial displacement from the center of the ring. This allows for more effective prevention or suppression of vibration leakage. In the physical quantity sensor of the present invention, the vibration means is preferably either electrostatically driven or piezoelectrically driven. As a result, the first mass portion and the second mass portion can be efficiently vibrated.

[0012] In the physical quantity sensor of the present invention, it is preferable that the transducer has a detection ability of any one of an electrostatic type, a piezoelectric type, and a piezoresistive type. As a result, a physical quantity sensor with excellent detection ability can be obtained. In the physical quantity sensor of the present invention, it is preferable that the transducer detects an angular velocity around the first axis, an angular velocity around the second axis, and an angular velocity around a third axis orthogonal to both the first axis and the second axis. As a result, it can be used as an angular velocity sensor.

[0013] In the physical quantity sensor of the present invention, it is preferable that the transducer cancels out a linear acceleration in a predetermined direction electrically by being paired with each other with the other transducers. As a result, the detection accuracy of the angular velocity is improved. In the physical quantity sensor of the present invention, it is preferable that each of the transducers has its own resonance frequency. As a result, since it can be driven in a resonance mode, the detection accuracy of the angular velocity is further improved.

[0014] In the physical quantity sensor of the present invention, it is preferable that the circular ring vibration of the ring portion is a vibration that repeatedly contracts in a direction parallel to the first axis and expands in a direction parallel to the second axis, and expands in a direction parallel to the first axis and contracts in a direction parallel to the second axis. In the physical quantity sensor of the present invention, it is preferable that each of the first spring portions and each of the second spring portions are connected to a portion inclined 45 degrees from both the first axis and the second axis of the ring portion. As a result, it is possible to effectively prevent or suppress the leakage of the circular ring vibration of the ring portion to the outside.

[0015] The physical quantity sensor of the present invention is characterized in that the projected outer shape of the assembly of the pair of first mass parts and the pair of second mass parts is substantially circular. This makes it possible to miniaturize the device. The physical quantity sensor of the present invention is characterized in that the projected outer shape of the assembly of the pair of first mass parts and the pair of second mass parts is substantially rectangular. This makes it possible to miniaturize the device.

[0016] In the physical quantity sensor of the present invention, it is preferable that the vibration means is connected to the inside of each of the first mass parts and each of the second mass parts. This makes it possible to miniaturize the device. In the physical quantity sensor of the present invention, it is preferable that the transducer is connected to the inside of each of the first mass parts and each of the second mass parts. This makes it possible to miniaturize the device.

[0017] The physical quantity sensor of the present invention, when two mutually orthogonal axes are designated as the first axis and the second axis, Extendable connecting section, The four support parts that support the connecting part are provided at positions inclined at a predetermined angle from both the first and second axes that intersect the center of the connecting part, Four beams connecting each of the aforementioned support parts to the aforementioned connecting parts, A pair of first mass parts having a movable part and arranged opposite to each other in a direction parallel to the first axis via the ring part, A pair of second mass parts having a movable part and arranged opposite to each other in a direction parallel to the second axis via the ring part, A pair of first springs connecting each of the first mass parts and the ring part, such that each of the first mass parts can vibrate in a direction parallel to the first axis relative to the ring part, A pair of second springs connect each of the second mass parts to the ring part, such that each of the second mass parts can vibrate in a direction parallel to the second axis relative to the ring part, A vibration means for vibrating at least one of the pair of first mass parts and the pair of second mass parts in a planar direction including the first axis and the second axis at a first frequency and in opposite phase to each other, The device comprises at least one transducer that converts the displacement of the movable part of each of the first mass parts and the movable part of each of the second mass parts into an electrical signal, The connection between the beam and the connecting portion is characterized in that when the connecting portion expands and contracts in accordance with the first frequency, the connection portion becomes a node. This makes it possible to provide a small physical quantity sensor with a high Q value and high detection sensitivity. The electronic device of the present invention is characterized by using the physical quantity sensor of the present invention. This makes it possible to provide highly reliable electronic devices. [Brief explanation of the drawing]

[0018] [Figure 1] This is a schematic plan view showing a first embodiment of the physical quantity sensor of the present invention. [Figure 2] Figure 1 is a detailed plan view of the physical quantity sensor shown. [Figure 3] This is a plan view illustrating the vibration of the ring portion of the physical quantity sensor shown in Figure 2. [Figure 4] This is a plan view illustrating the configuration of the detection means of the physical quantity sensor shown in Figure 2. [Figure 5] This is a diagram illustrating the operation of a physical quantity sensor. [Figure 6] This is a diagram illustrating the operation of a physical quantity sensor. [Figure 7] This is a diagram illustrating the operation of a physical quantity sensor. [Figure 8] This is a plan view showing a second embodiment of the physical quantity sensor of the present invention. [Figure 9] This is a plan view showing a third embodiment of the physical quantity sensor of the present invention. [Figure 10] This is a plan view showing a fourth embodiment of the physical quantity sensor of the present invention. [Figure 11] This is a plan view showing a fifth embodiment of the physical quantity sensor of the present invention. [Figure 12] This is a plan view showing a sixth embodiment of the physical quantity sensor of the present invention. [Figure 13] This is a plan view showing a seventh embodiment of the physical quantity sensor of the present invention. [Figure 14] This is a plan view showing an eighth embodiment of the physical quantity sensor of the present invention. [Figure 15] This invention relates to an electronic device (notebook personal computer) equipped with a physical quantity sensor. [Figure 16] This invention relates to an electronic device (mobile phone) equipped with a physical quantity sensor. [Figure 17] This invention relates to an electronic device (digital still camera) equipped with a physical quantity sensor. [Modes for carrying out the invention]

[0019] The physical quantity sensor of the present invention will be described in detail below based on preferred embodiments shown in the accompanying drawings. <First Embodiment> Figure 1 is a schematic plan view showing a first embodiment of the physical quantity sensor of the present invention, Figure 2 is a detailed plan view of the physical quantity sensor shown in Figure 1, Figure 3 is a plan view illustrating the vibration of the ring portion of the physical quantity sensor shown in Figure 2, Figure 4 is a plan view illustrating the configuration of the detection means of the physical quantity sensor shown in Figure 2, and Figures 5, 6, and 7 are diagrams illustrating the driving of the physical quantity sensor, respectively. For the sake of explanation, in each figure, the X-axis, Y-axis, and Z-axis are shown as three mutually orthogonal axes. Furthermore, below, the direction parallel to the X-axis (first axis) will be referred to as the "X-axis direction," the direction parallel to the Y-axis (second axis) as the Y-axis direction, and the direction parallel to the Z-axis (third axis) as the "Z-axis direction."

[0020] 1. Physical quantity sensor The physical quantity sensor 1 of this embodiment is an angular velocity sensor capable of detecting angular velocity around the X axis, angular velocity around the Y axis, and angular velocity around the Z axis. Such an angular velocity sensor offers excellent convenience because it can independently detect angular velocity around each of the three axes with a single sensor.

[0021] As shown in Figure 1, the physical quantity sensor 1 comprises a ring portion 31 capable of annular vibration, four substrate fixing portions (support portions) 61, 62, 63, 64 supporting the ring portion 31, four beams 71, 72, 73, 74 connecting the substrate fixing portions 61, 62, 63, 64 to the nodes of the annular vibration of the ring portion 31, a pair of first vibrating portions (first mass portions) 51, 52 having movable parts and positioned opposite each other in the X-axis direction via the ring portion 31, and a pair of movable portions positioned opposite each other in the Y-axis direction via the ring portion 31 The device includes a pair of second vibrating parts (second mass parts) 53, 54 positioned within the ring portion 31, a pair of first inner spring parts (first spring parts) 81, 82 connecting the first vibrating parts 51, 52 to the ring portion 31 so that the first vibrating parts 51, 52 can vibrate relative to the ring portion 31 in the X-axis direction, and a pair of second inner spring parts (second spring parts) 83, 84 connecting the second vibrating parts 53, 54 to the ring portion 31 so that the second vibrating parts 53, 54 can vibrate relative to the ring portion 31 in a direction parallel to the Y-axis. Furthermore, it includes a vibration means 4 that vibrates the first vibrating parts 51, 52 in the X-axis direction at a first frequency and in opposite phase to each other, and a transducer (detection means 9) that converts the displacement amounts of the movable parts contained within the first vibrating parts 51, 52 and the movable parts contained within the second vibrating parts 53, 54 into electrical signals. The ring portion 31 vibrates in a circular motion in the X-axis and Y-axis directions according to the first frequency. With such a physical quantity sensor 1, the vibration of the ring portion 31 does not leak to the substrate, so the Q value of the vibration can be increased while miniaturizing the device. Therefore, a small physical quantity sensor with excellent detection accuracy can be provided.

[0022] The following provides a detailed explanation of physical quantity sensor 1. As shown in Figure 2, the physical quantity sensor 1 includes a vibration system structure 3 provided in the XY plane, a substrate 2 supporting the vibration system structure 3, a vibration means 4 for vibrating the vibration system structure 3, and a detection means 9 for detecting the angular velocity applied to the physical quantity sensor 1. -Vibration system structure- As shown in Figure 2, the vibration system structure 3 comprises a ring portion (connecting portion) 31, a pair of first vibrating portions (first mass portions) 51, 52 arranged opposite each other in the X-axis direction via the ring portion 31, first inner spring portions (first spring portions) 81, 82 connecting the first vibrating portions 51, 52 to the ring portion 31, a pair of second vibrating portions (second mass portions) 53, 54 arranged opposite each other in the Y-axis direction via the ring portion 31, second inner spring portions (second spring portions) 83, 84 connecting the second vibrating portions 53, 54 to the ring portion 31, and an inner fixing provided around the ring portion 31. It is composed of support parts 61, 62, 63, 64, beams 71, 72, 73, 74 that connect the ring part 31 and the inner fixing parts 61, 62, 63, 64, outer fixing parts 651, 652, 661, 662, 671, 672, 681, 682 provided on the outside of the vibrating parts 51, 52, 53, 54, and outer spring parts 851, 852, 861, 862, 871, 872, 881, 882 that connect the vibrating parts 51, 52, 53, 54 and the outer fixing parts 651, 652, 661, 662, 671, 672, 681, 682.

[0023] The vibration system structure 3 of this embodiment is constructed primarily of silicon, and the aforementioned parts are integrally formed by processing the silicon substrate (silicon wafer) into a desired external shape using thin-film deposition techniques (e.g., deposition techniques such as epitaxial growth and chemical vapor deposition) and various processing techniques (e.g., etching techniques such as dry etching and wet etching). Alternatively, the aforementioned parts can also be formed by bonding a silicon substrate and a glass substrate together and then processing only the silicon substrate into the desired external shape.

[0024] At the very least, by using silicon as the main material of the vibration system structure 3, excellent vibration characteristics and superior durability can be achieved. Furthermore, the application of microfabrication techniques used in the fabrication of silicon semiconductor devices becomes possible, enabling miniaturization of the physical quantity sensor 1. In addition, by using silicon as the main material of the vibration system structure 3, as described later, the physical quantity sensor 1 can be driven without forming electrodes on the vibration system structure 3, thus simplifying the structure of the device. Even with materials other than silicon, such as insulators, it is possible to form the vibration system structure of the present invention by coating its outer periphery with a metal film.

[0025] The main material of substrate 2 is not limited to silicon; for example, it may be quartz or various types of glass. In this embodiment, the vibration system structure 3 has a projected outline that is approximately circular when viewed in a plan view with the Z-axis direction as the normal. This allows for miniaturization of the physical quantity sensor 1.

[0026] (Ring section) The ring portion 31 is an annular shape composed of concentric circles with an outer diameter and an inner diameter, and has no structure inside the inner diameter. In the following, the center of the ring portion 31 will be referred to as "center O". Furthermore, the ring portion 31 is positioned so that its axis is parallel to the Z-axis. This ring portion 31 is elastically deformable, and as shown in Figure 3, the vibration of the first vibrating portions 51 and 52 by the vibration means 4 causes it to deform into a first state in which it contracts in the X-axis direction and expands in the Y-axis direction, and a second state in which it expands in the X-axis direction and contracts in the Y-axis direction. In the following, the vibration that repeats between the first and second states will also be referred to as "annular vibration".

[0027] (First vibration section) The first vibrating part 51 is plate-shaped. The first vibrating part 51 is composed of a frame part 511 that forms the edge of the first vibrating part 51, a Z-axis displacement part (first movable part, movable part) 512 connected to the frame part 511 via shaft parts 513 and 514, a comb-shaped drive electrode 515, and a Y-axis displacement part (second movable part, movable part) 516 connected to the frame via a spring part 517.

[0028] Similarly, the first vibrating part 52 is also plate-shaped. The first vibrating part 52 is also composed of a frame part 521 that forms the edge of the first vibrating part 52, a Z-axis displacement part (first movable part, movable part) 522 connected to the frame part 521 via shaft parts 523 and 524, a comb-shaped drive electrode 525, and a Y-axis displacement part (second movable part, movable part) 526 connected to the frame via a spring part 527.

[0029] The first vibrating sections 51 and 52 will be described in detail below. However, since the first vibrating sections 51 and 52 have similar configurations, the first vibrating section 51 will be described as a representative example, and the description of the first vibrating section 52 will be omitted. The outer shape of the frame portion 511 is approximately a 90-degree sector when viewed from above with the Z-axis as the normal. This frame portion 511 has a pair of first openings 511a, a pair of second openings 511b, and a third opening 511c.

[0030] Multiple comb-shaped drive electrodes 515 are arranged in each first opening 511a. Each drive electrode 515 extends in the Y-axis direction and is spaced apart from one another in the X-axis direction. These drive electrodes 515 constitute a part of the vibration means 4. A Y-axis displacement section 516 is provided inside each second opening 511b. The Y-axis displacement section 516 consists of a frame 516a and a plurality of detection electrodes 516b provided inside the frame 516a. The detection electrodes 516b extend in the X-axis direction and are spaced apart from each other in the Y-axis direction.

[0031] Each Y-axis displacement section 516 is connected to the frame section 511 by four spring sections 517. Each spring section 517 has a shape that extends in the Y-axis direction while reciprocating in the X-axis direction. By giving each spring section 517 this shape, the spring section 517 can be smoothly extended and contracted in the Y-axis direction, and deformation of the spring section 517 in directions other than the Y-axis direction (i.e., the X-axis direction and the Z-axis direction) can be effectively prevented or suppressed. Therefore, each Y-axis displacement section 516 can be smoothly displaced in the Y-axis direction.

[0032] A Z-axis displacement section 512 is provided inside the third opening 511c. The Z-axis displacement section 512 is connected to the frame section 511 by shaft sections 513 and 514. The shaft sections 513 and 514 extend in the Y-axis direction and are provided coaxially. Therefore, when a stress in the Z-axis direction is applied to the physical quantity sensor 1, the Z-axis displacement section 512 rotates around the shaft sections 513 and 514 while twisting and deforming the shaft sections 513 and 514 around their axes. The first vibrating section 51 has been described above. As mentioned above, the first vibrating section 52 has the same configuration as the first vibrating section 51, and is provided symmetrically with respect to the Y-axis that intersects the center O of the ring section 31 in a plan view with the Z-axis as the normal. However, the requirement of the present invention is a configuration that minimizes vibration leakage to the substrate 2, and the components do not need to be perfectly symmetrical with respect to the center O or the Y-axis.

[0033] (Second vibration section) The second vibrating section 53 is plate-shaped. The second vibrating section 53 is composed of a frame section 531 that forms the edge of the second vibrating section 53, a Z-axis displacement section (third movable section, movable section) 532 connected to the frame section 531 via shaft sections 533 and 534, and an X-axis displacement section (fourth movable section, movable section) 536 connected to the frame via a spring section 537. Similarly, the second vibrating section 54 is also plate-shaped. The second vibrating section 54 is also composed of a frame section 541 that forms the edge of the second vibrating section 54, a Z-axis displacement section (third movable section, movable section) 542 connected to the frame section 541 via shaft sections 543 and 544, and an X-axis displacement section (fourth movable section, movable section) 546 connected to the frame via a spring section 547.

[0034] The second vibrating sections 53 and 54 will be described in detail below. However, since the second vibrating sections 53 and 54 have similar configurations, the second vibrating section 53 will be described as a representative example, and the description of the second vibrating section 54 will be omitted. The outer shape of the frame portion 531 is approximately a 90-degree sector when viewed from above with the Z-axis as the normal. Furthermore, the outer shape of the frame portion 531 is the same as that of the frame portions 511 and 521 of the first vibrating portions 51 and 52. A pair of second openings 531b and a third opening 531c are formed in this frame portion 531.

[0035] Inside each second opening 511b, an X-axis displacement section 536 is provided. The X-axis displacement section 536 consists of a frame section 536a and a plurality of detection electrodes 536b provided inside the frame section 536a. The detection electrodes 536b extend in the Y-axis direction and are spaced apart from each other in the X-axis direction. This X-axis displacement section 536 is connected to the frame section 531 by four spring sections 537. Each spring section 537 has a shape that extends in the X-axis direction while reciprocating in the Y-axis direction. By giving each spring section 537 this shape, the spring section 537 can be smoothly extended and contracted in the X-axis direction, and deformation of the spring section 537 in directions other than the X-axis direction (i.e., the Y-axis and Z-axis directions) can be effectively prevented or suppressed. Therefore, the X-axis displacement section 536 can be smoothly displaced in the X-axis direction.

[0036] A Z-axis displacement section 532 is provided inside the third opening 531c. The Z-axis displacement section 532 is connected to the frame section 531 by shaft sections 533 and 534. The shaft sections 533 and 534 extend in the X-axis direction and are provided coaxially. Therefore, when a Z-axis stress is applied to the physical quantity sensor 1, the Z-axis displacement section 532 rotates around the shaft sections 533 and 534 while twisting and deforming the shaft sections 533 and 534 around their axes. The second vibrating section 53 has been described above. As mentioned above, the second vibrating section 54 has the same configuration as the second vibrating section 53, and is provided symmetrically with respect to the X-axis that intersects the center O of the ring section 31 in a plan view with the Z-axis as the normal. However, as mentioned above, the second vibrating sections 53 and 54 do not need to be perfectly symmetrical with respect to the center O or the X-axis.

[0037] (First inner spring section) The first inner spring portion 81 connects the first vibrating portion 51 and the ring portion 31. The first inner spring portion 82 connects the first vibrating portion 52 and the ring portion 31. Since the first inner spring portions 81 and 82 have similar configurations, the first inner spring portion 81 will be described as a representative example below, and the description of the first inner spring portion 82 will be omitted.

[0038] The first inner spring portion 81 is composed of a pair of spring portions 811 and 812, each of which has a shape that extends in the X-axis direction while reciprocating in the Y-axis direction. Furthermore, the spring portions 811 and 812 are arranged symmetrically with respect to the X-axis that intersects the center O of the ring portion 31 in a plan view with the Z-axis as the normal. By giving each spring portion 811 and 812 this shape, the first inner spring portion 81 can be smoothly extended and contracted in the X-axis direction while suppressing (restricting) deformation in the Y-axis and Z-axis directions. Therefore, as will be described later, the first vibrating portion 51 can be smoothly vibrated in the X-axis direction while the first inner spring portion 81 is extended and contracted in the X-axis direction.

[0039] (Second inner spring section) The second inner spring section 83 connects the second vibrating section 53 and the ring section 31. Similarly, the second inner spring section 84 connects the second vibrating section 54 and the ring section 31. Since the second inner spring sections 83 and 84 have similar configurations, the second inner spring section 83 will be described as a representative example below, and the description of the first inner spring section 84 will be omitted.

[0040] The second inner spring section 83 is composed of a pair of spring sections 831 and 832, each of which has a shape that extends in the Y-axis direction while reciprocating in the X-axis direction. Furthermore, the spring sections 831 and 832 are arranged symmetrically with respect to the Y-axis that intersects the center O of the ring section 31 in a plan view with the Z-axis as the normal. By configuring the second inner spring section 83 in this way, the second inner spring section 83 can be smoothly extended and contracted in the Y-axis direction while suppressing (restricting) deformation in the X-axis and Z-axis directions. Therefore, as will be described later, the second vibrating section 53 can be smoothly vibrated in the Y-axis direction while the second inner spring section 83 is extended and contracted in the Y-axis direction.

[0041] (Inner fixed part) The inner fixing parts 61, 62, 63, and 64 have the function of supporting the ring part 31. These inner fixing parts 61, 62, 63, and 64 are each provided inside the four vibrating parts 51, 52, 53, and 54. By arranging the inner fixing parts 61, 62, 63, and 64 in this way, space can be used effectively, and the physical quantity sensor 1 can be made smaller. In addition, the length of the beams 71, 72, 73, and 74 can be shortened, so the ring part 31 can be supported more stably. Furthermore, by arranging the inner fixing parts 61, 62, 63, and 64 in this way, they can act as stoppers for the first vibrating parts 51, 52 and the second vibrating parts 53, and 54.

[0042] The inner fixing parts 61, 62, 63, and 64 are arranged at 90-degree intervals around the outer circumference of the ring part 31 in a plan view with the Z-axis as the normal. Specifically, in a plan view with the Z-axis as the normal, when a pair of axes J1 and J2 intersect the center O of the ring part 31 and are inclined at 45 degrees with respect to the X-axis and Y-axis, respectively, the inner fixing parts 61 and 63 are located on axis J1 and are positioned opposite each other via the ring part 31. The inner fixing parts 62 and 64 are located on axis J2 and are positioned opposite each other via the ring part 31. In other words, the four inner fixing parts 61, 62, 63, and 64 are positioned mirror-symmetrically with respect to both the X and Y axes. This allows the ring portion 31 to be stably supported.

[0043] (beam) Beams 71, 72, 73, and 74 connect the ring portion 31 to the inner fixing portions 61, 62, 63, and 64. Beam 71 extends linearly along axis J1 and connects the ring portion 31 to the inner fixing portion 61. Similarly, beam 72 extends linearly along axis J2 and connects the ring portion 31 to the inner fixing portion 62. Beam 73 also extends linearly along axis J1 and connects the ring portion 31 to the inner fixing portion 63. Beam 74 also extends linearly along axis J2 and connects the ring portion 31 to the inner fixing portion 64.

[0044] These beams 71, 72, 73, and 74 are connected to respective points (fixed points, fixed points of the first group) on the side of the ring portion 31 that are inclined at 45 degrees with respect to the X and Y axes, respectively. As shown in Figure 3, these fixed points are nodes in the annular vibration of the ring portion 31 (i.e., points where substantially no displacement or deformation occurs). By connecting the beams 71, 72, 73, and 74 to these fixed points, the annular vibration of the ring portion 31 is not hindered by the beams 71, 72, 73, and 74, and vibrations caused by the annular vibration are prevented or suppressed from leaking to the outside of the vibration system structure 3 via the beams 71, 72, 73, and 74 and the fixed parts 61, 62, 63, and 64. As a result, the Q value of the vibration of the vibration system structure 3 is increased, and the detection accuracy of the physical quantity sensor 1 is improved. Furthermore, because the vibration system structure 3 can be vibrated efficiently, the output of the vibration means 4 can be reduced, and as a result, the physical quantity sensor 1 can be miniaturized. Furthermore, beams 71, 72, 73, and 74 are restricted from moving (deforming) in the radial direction (extending direction) relative to the center O of the ring portion 31. This allows the ring portion 31 to be supported more stably by the inner fixing parts 61, 62, 63, and 64, and also allows for more effective prevention or suppression of vibration leakage.

[0045] (Outside fixed part) The outer fixing parts 651, 652, 661, 662, 671, 672, 681, and 682 are provided on the outside of the four vibrating parts 51, 52, 53, and 54, respectively. The outer fixing parts 651 and 652 are provided in correspondence with the first vibrating part 51 and are spaced apart from each other in the Y-axis direction. Similarly, the outer fixing parts 661 and 662 are provided in correspondence with the first vibrating part 52 and are spaced apart from each other in the Y-axis direction. The outer fixing parts 671 and 672 are provided in correspondence with the second vibrating part 53 and are spaced apart from each other in the X-axis direction. The outer fixing parts 681 and 682 are provided in correspondence with the second vibrating part 54 and are spaced apart from each other in the X-axis direction.

[0046] (Outer spring part) The outer spring sections 851, 852, 861, 862, 871, 872, 881, and 882 connect the outer fixing sections 651, 652, 661, 662, 671, 672, 681, and 682 to the vibrating sections 51, 52, 53, and 54. Specifically, the outer spring sections 851 and 852 connect the first vibrating section 51 to the outer fixing sections 651 and 652, the outer spring sections 861 and 862 connect the first vibrating section 52 to the outer fixing sections 661 and 656, the outer spring sections 871 and 872 connect the second vibrating section 53 to the outer fixing sections 671 and 672, and the outer spring sections 881 and 882 connect the second vibrating section 54 to the outer fixing sections 681 and 682.

[0047] The outer spring portions 851 and 852 have a shape that extends in the X-axis direction while reciprocating in the Y-axis direction. Furthermore, the outer spring portions 851 and 852 are provided symmetrically with respect to the X-axis that intersects with the center O of the ring portion 31. Similarly, the outer spring portions 861 and 862 have a shape that extends in the X-axis direction while reciprocating in the Y-axis direction. Furthermore, the outer spring portions 861 and 862 are provided symmetrically with respect to the X-axis that intersects with the center O of the ring portion 31. The outer spring portions 871 and 872 have a shape that extends in the Y-axis direction while reciprocating in the X-axis direction. Furthermore, the outer spring portions 871 and 872 are provided symmetrically with respect to the Y-axis that intersects with the center O of the ring portion 31.

[0048] Similarly, the outer spring portions 881 and 882 have a shape that extends in the Y-axis direction while reciprocating in the X-axis direction. Furthermore, the outer spring portions 881 and 882 are provided symmetrically with respect to the Y-axis that intersects with the center O of the ring portion 31. However, it is not an essential condition of the present invention that the outer spring portions 851 and 852, 861 and 862, 871 and 872, and 881 and 882 are perfectly symmetrical with respect to the center O, the X-axis, or the Y-axis. The vibration system structure 3 described above has a unique resonant frequency. As a result, as will be described later, the vibration system structure 3 can be driven in resonant mode, and the accuracy of angular velocity detection can be improved.

[0049] -substrate- The substrate 2 supports the vibration system structure 3. As shown in Figure 2, the substrate 2 is plate-shaped and is located in the XY plane. The vibration system structure 3 is fixed and supported to the substrate 2 by joining the inner fixing parts 61, 62, 63, 64 and the outer fixing parts 651, 652, 661, 662, 671, 672, 681, 682 of the vibration system structure 3 to the upper surface of the substrate 2.

[0050] The method of joining the substrate 2 to the inner fixing parts 61, 62, 63, 64 and the outer fixing parts 651, 652, 661, 662, 671, 672, 681, 682 is not particularly limited, and they may be joined using various joining methods such as direct joining or anode joining. Depending on the constituent materials of the vibration system structure 3 and the substrate 2, they may also be joined using a support member such as an adhesive. Furthermore, recesses are formed on the upper surface of the substrate 2 (the surface facing the vibration system structure 3) as needed. These recesses have the function of preventing contact between the substrate 2 and the parts of the vibration system structure 3 that actually vibrate (for example, the first vibrating parts 51, 52 and the second vibrating parts 53, 54). Such a substrate 2 is formed, for example, by processing a semiconductor substrate such as silicon, an insulating substrate such as glass or quartz, or a composite substrate consisting of a semiconductor layer and an insulating layer into a desired external shape using various processing techniques. This simplifies the configuration of the physical quantity sensor 1.

[0051] -Vibration means- The vibration means 4 has the function of vibrating the first vibrating parts 51 and 52 in opposite phases in the X-axis direction at a predetermined frequency (first frequency). That is, the vibration means 4 vibrates the first vibrating parts 51 and 52 in such a way that it repeatedly alternates between a state in which the first vibrating parts 51 and 52 are displaced toward each other (inward) and a state in which the first vibrating parts 51 and 52 are displaced toward each other (outward).

[0052] Such a vibrating means 4 has a plurality of fixed electrodes 41 provided in correspondence with the drive electrode 515 of the first vibrating unit 51. Each fixed electrode 41 has a pair of comb-shaped electrode pieces 411, 412 that are arranged opposite each other in the X-axis direction via the drive electrode 515. Similarly, the vibrating means 4 has a plurality of fixed electrodes 42 provided in correspondence with each drive electrode 525 of the first vibrating unit 52. Each fixed electrode 42 has a pair of comb-shaped electrode pieces 421, 422 that are arranged opposite each other in the X-axis direction via the drive electrode 525.

[0053] The vibration means 4 applies alternating voltages with a 180-degree phase difference to each electrode piece 411, 421 and each electrode piece 412, 422 using a power source (not shown), thereby generating electrostatic forces between each drive electrode 515, 525 and each electrode piece 411, 421, and between each drive electrode 515, 525 and each electrode piece 412, 422, respectively. This causes the first inner spring portions 81, 82 and the outer spring portions 851, 852, 861, 862 to expand and contract in the X-axis direction, while the first vibrating portions 51, 52 vibrate in the X-axis direction in opposite phases to each other and at a predetermined frequency.

[0054] The frequency of the alternating voltage is not particularly limited, but it is preferably approximately equal to the resonant frequency of the vibration system structure 3. This allows the vibration system structure 3 to be driven in resonant mode, thereby improving the accuracy of angular velocity detection. When the first vibrating parts 51 and 52 vibrate in opposite phases to each other, the vibration is transmitted to the ring part 31 via the first inner spring parts 81 and 82. As a result, the ring part 31 deforms so as to contract in the X-axis direction and expand in the Y-axis direction when the first vibrating parts 51 and 52 are displaced inward, and so as to expand in the X-axis direction and contract in the Y-axis direction when the first vibrating parts 51 and 52 are displaced outward. In other words, the ring part 31 vibrates in a circular motion in sync with the vibration of the first vibrating parts 51 and 52.

[0055] Furthermore, when the ring portion 31 deforms by annular vibration, contracting in the X-axis direction and expanding in the Y-axis direction, the second vibrating portions 53 and 54 are both displaced outward as a result of this deformation. Conversely, when it deforms by expanding in the X-axis direction and contracting in the Y-axis direction, the second vibrating portions 53 and 54 are both displaced inward. In other words, the second vibrating portions 53 and 54 vibrate in the Y-axis direction in opposite phases to each other, synchronized with the annular vibration of the ring portion 31.

[0056] In other words, the physical quantity sensor 1 can vibrate the vibrating parts 51, 52, 53, and 54 by utilizing the annular vibration of the ring portion 31, so that the first vibrating parts 515 and 52 are displaced inward while the second vibrating parts 53 and 54 are displaced outward, and the first vibrating parts 51 and 52 are displaced outward while the second vibrating parts 53 and 54 are displaced inward, repeating this cycle.

[0057] The fixed points to which the beams 71, 72, 73, and 74 of the ring section 31 are connected are nodes in the annular vibration of the ring section 31 (i.e., parts where displacement and deformation do not substantially occur). Therefore, the annular vibration of the ring section 31 is not hindered by the beams 71, 72, 73, and 74, and vibrations caused by the annular vibration are prevented or suppressed from leaking to the outside of the vibration system structure 3 via the beams 71, 72, 73, and 74 and the fixed parts 61, 62, 63, and 64. As a result, the Q value of the vibration of the vibration system structure 3 is increased, and the detection accuracy of the physical quantity sensor 1 is improved. In addition, because the vibration system structure 3 can be vibrated efficiently, the output of the vibration means 4 can be reduced, and as a result, the physical quantity sensor 1 can be miniaturized. Furthermore, electrostatic drive as in this embodiment allows for smoother and more reliable generation of the vibrations described above. In addition, in this embodiment, since the vibration means 4 is connected to the inside of each vibration part 51, 52, 53, and 54, space can be used effectively, and the physical quantity sensor 1 can be miniaturized.

[0058] -Detection means 9- As shown in Figure 4, the detection means 9 includes displacement transducers 91, 92, 93, and 94, and rotation transducers 95, 96, 97, and 98. Note that, for the sake of clarity, some components of the physical quantity sensor 1 are not shown in Figure 4. The displacement transducer 91 has a Y-axis displacement section 516 provided on the first vibrating section 51 and a fixed electrode 911 fixed to the substrate 2 via an anchor. Multiple fixed electrodes 911 are provided corresponding to the detection electrode 516b of the Y-axis displacement section 516. Each fixed electrode 911 has a pair of electrode pieces 911a, 911b arranged opposite each other via the detection electrode 516b, and these electrode pieces 911a, 911b are provided extending in the X-axis direction.

[0059] The displacement transducer 92 has a Y-axis displacement section 526 provided on the first vibrating section 52 and a fixed electrode 921 fixed to the substrate 2 via an anchor. Multiple fixed electrodes 921 are provided corresponding to the detection electrode 526b of the Y-axis displacement section 526. Each fixed electrode 921 has a pair of electrode pieces 921a, 921b arranged opposite each other via the detection electrode 526b, and these electrode pieces 921a, 921b are provided extending in the X-axis direction.

[0060] The displacement transducer 93 has an X-axis displacement section 536 provided on the second vibration section 53 and a fixed electrode 931 fixed to the substrate 2 via an anchor. Multiple fixed electrodes 931 are provided corresponding to the detection electrode 536b of the X-axis displacement section 536. Each fixed electrode 931 has a pair of electrode pieces 931a, 931b arranged opposite each other via the detection electrode 536b, and these electrode pieces 931a, 931b are provided extending in the Y-axis direction.

[0061] The displacement transducer 94 has an X-axis displacement section 546 provided on the second vibration section 54 and a fixed electrode 941 fixed to the substrate 2 via an anchor. Multiple fixed electrodes 941 are provided corresponding to the detection electrode 546b of the X-axis displacement section 546. Each fixed electrode 941 has a pair of electrode pieces 941a, 941b arranged opposite each other via the detection electrode 546b, and these electrode pieces 941a, 941b are provided extending in the Y-axis direction. In this embodiment, since these displacement transducers 91, 92, 93, and 94 are connected to the inside of the vibration units 51, 52, 53, and 54, the space of the device can be used effectively, and the physical quantity sensor 1 can be miniaturized.

[0062] The rotary transducer 95 has a Z-axis displacement section 512 provided on the first vibrating section 51 via shafts 513 and 514, and a fixed electrode 951 fixed to the substrate 2 and positioned opposite the Z-axis displacement section 512 at a distance in the Z-axis direction. The rotary transducer 96 has a Z-axis displacement section 522 provided on the first vibrating section 52 via shafts 523 and 524, and a fixed electrode 961 fixed to the substrate 2 and positioned opposite the Z-axis displacement section 522 at a distance in the Z-axis direction.

[0063] The rotary transducer 97 has a Z-axis displacement section 532 provided on the second vibrating section 53 via shafts 533 and 534, and a fixed electrode 971 fixed to the substrate 2 and positioned opposite the Z-axis displacement section 532 at a distance in the Z-axis direction. The rotary transducer 98 has a Z-axis displacement section 542 provided on the second vibrating section 54 via shafts 543 and 544, and a fixed electrode 981 fixed to the substrate 2 and positioned opposite the Z-axis displacement section 542 at a distance in the Z-axis direction. In this embodiment, since these rotary transducers 95, 96, 97, and 98 are connected inside the vibrating sections 51, 52, 53, and 54, the space of the device can be used effectively, and the physical quantity sensor 1 can be miniaturized.

[0064] The method for detecting angular velocity using the detection means 9 described below will be briefly explained with reference to Figures 5, 6, and 7. Note that, for the sake of clarity, some of the components of the physical quantity sensor 1 are omitted from Figures 5, 6, and 7. -Detection of angular velocity around the Z axis- As shown in Figure 5, when the vibration means 4 vibrates the first vibrating parts 51 and 52 in the X-axis direction, and the second vibrating parts 53 and 54 in the Y-axis direction, and an angular velocity ω about the Z-axis is applied to the physical quantity sensor 1, a Coriolis force in the Y-axis direction acts on the first vibrating parts 51 and 52 vibrating in the X-axis direction, and a Coriolis force in the X-axis direction acts on the second vibrating parts 53 and 54 vibrating in the Y-axis direction.

[0065] When such a Coriolis force acts, in the first vibrating section 51, the Y-axis displacement section 516 is displaced in the Y-axis direction relative to the frame section 511. This changes the capacitance between the detection electrode 516b and the electrode piece 911a, and the capacitance between the detection electrode 516b and the electrode piece 911b, resulting in a difference in these capacitances. Similarly, in the first vibrating section 52, the Y-axis displacement section 526 is displaced in the Y-axis direction relative to the frame section 521. This changes the capacitance between the detection electrode 526b and the electrode piece 921a, and the capacitance between the detection electrode 516b and the electrode piece 921b, resulting in a difference in these capacitances.

[0066] Furthermore, in the second vibration section 53, the X-axis displacement section 536 is displaced in the X-axis direction relative to the frame section 531, which changes the capacitance between the detection electrode 536b and the electrode piece 931a, and the capacitance between the detection electrode 536b and the electrode piece 931b, resulting in a difference in these capacitances. Similarly, in the second vibration section 54, the X-axis displacement section 546 is displaced in the X-axis direction relative to the frame section 541, which changes the capacitance between the detection electrode 546b and the electrode piece 941a, and the capacitance between the detection electrode 546b and the electrode piece 941b, resulting in a difference in these capacitances. The detection means 9 can then detect such changes in electrostatic capacitance occurring in each of the vibrating parts 51, 52, 53, and 54, and from the detection results, it can detect the angular velocity around the Z axis applied to the physical quantity sensor 1.

[0067] -Detection of angular velocity around the X-axis- As shown in the perspective view in Figure 6, when the vibration means 4 vibrates the first vibrating parts 51 and 52 in the X-axis direction while the second vibrating parts 53 and 54 vibrate in the Y-axis direction, and an angular velocity around the X-axis is applied to the physical quantity sensor 1, a Coriolis force in the Z-axis direction acts on the second vibrating parts 53 and 54 that are vibrating in the Y-axis direction.

[0068] When such a Coriolis force acts, in the second vibrating section 53, the Z-axis displacement section 532 rotates around the shafts 533 and 534, which changes the capacitance between the Z-axis displacement section 532 and the fixed electrode 971. Similarly, in the second vibrating section 54, the Z-axis displacement section 542 rotates around the shafts 543 and 544, which changes the capacitance between the Z-axis displacement section 542 and the fixed electrode 981. The detection means 9 can then detect such changes in electrostatic capacitance occurring in the second vibration sections 53 and 54, and from the detection results, it can detect the angular velocity around the X axis applied to the physical quantity sensor 1.

[0069] -Detection of angular velocity around the Y-axis- As shown in Figure 7, when the vibration means 4 vibrates the first vibrating parts 51 and 52 in the X-axis direction, while the second vibrating parts 53 and 54 vibrate in the Y-axis direction, and an angular velocity around the Y-axis is applied to the physical quantity sensor 1, a Coriolis force in the Z-axis direction acts on the first vibrating parts 51 and 52 that are vibrating in the X-axis direction.

[0070] When such a Coriolis force acts, in the first vibrating section 51, the Z-axis displacement section 512 rotates around the shafts 513 and 514, which changes the capacitance between the Z-axis displacement section 512 and the fixed electrode 951. Similarly, in the first vibrating section 52, the Z-axis displacement section 522 rotates around the shafts 523 and 524, which changes the capacitance between the Z-axis displacement section 522 and the fixed electrode 961.

[0071] The detection means 9 can then detect such changes in electrostatic capacitance occurring in the first vibrating sections 51 and 52, and from the detection results, it can detect the angular velocity around the X axis applied to the physical quantity sensor 1. As described above, the physical quantity sensor 1 can detect angular velocity around all axes: the X, Y, and Z axes. Therefore, the physical quantity sensor 1 is compact and highly convenient. Furthermore, in this embodiment, since an electrostatic detection means 9 is used, it is possible to improve detection accuracy while miniaturizing the device.

[0072] Furthermore, in the physical quantity sensor 1, the displacement transducers 91 and 92 work together to cancel the acceleration (linear acceleration) in the Y-axis direction applied to the physical quantity sensor 1. In addition, the displacement transducers 93 and 94 work together to cancel the acceleration in the X-axis direction applied to the physical quantity sensor 1. Furthermore, the rotation transducers 95, 96, 97, and 98 work together to cancel the acceleration in the Z-axis direction applied to the physical quantity sensor 1.

[0073] Specifically, for example, when acceleration is applied to the physical quantity sensor 1 in the Y-axis direction, the Y-axis displacement part 516 of the first vibration part 51 and the Y-axis displacement part 526 of the first vibration part 52 are both displaced to the same side in the Y-axis direction. This displacement of the Y-axis displacement parts 516 and 526 is different from the displacement when angular velocity around the Z-axis is applied (i.e., the displacement of the Y-axis displacement parts 516 and 526 to opposite sides in the Y-axis direction). Therefore, the physical quantity sensor 1 can detect the acceleration applied to the physical quantity sensor 1 from the change in capacitance between the detection electrode 516b and each electrode piece 911a, 911b, and between the detection electrode 526b and each electrode piece 921a, 921b. If this angular velocity is detected, the detected acceleration can be electrically canceled by correction processing, etc. As a result, the accuracy of the physical quantity sensor 1's angular velocity detection is further improved. The same cancellation can be performed for acceleration in the X-axis direction and acceleration in the Z-axis direction.

[0074] <Second Embodiment> Figure 8 is a plan view showing a second embodiment of the physical quantity sensor of the present invention. This description of the physical quantity sensor in this embodiment will focus on the differences from the previously described embodiment, and similar matters will be omitted from the explanation. The physical quantity sensor 1 of this embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the configuration of the vibration means is different. In Figure 8, the same reference numerals are used for components that are the same as those of the first embodiment described above.

[0075] In the physical quantity sensor 1 of this embodiment, the vibration means 4 is also connected to the second vibration sections 53 and 54. Specifically, the second vibration section 53 is provided with a plurality of drive electrodes 535 extending in the X-axis direction, and the second vibration section 54 is also provided with a plurality of drive electrodes 545 extending in the X-axis direction. Furthermore, the vibration means 4 has a plurality of fixed electrodes 43 provided in correspondence with the drive electrode 535 of the second vibration unit 53. Each fixed electrode 43 has a pair of comb-shaped electrode pieces 431, 432 arranged opposite to each other in the Y-axis direction via the drive electrode 535. Similarly, the vibration means 4 has a plurality of fixed electrodes 44 provided in correspondence with each drive electrode 545 of the second vibration unit 54. Each fixed electrode 44 has a pair of comb-shaped electrode pieces 441, 442 arranged opposite to each other in the Y-axis direction via the drive electrode 545.

[0076] The vibration means 4 then applies alternating voltages with a 180-degree phase difference to the electrode pieces 411, 421, 432, 442 and 412, 422, 431, 441 using a power source (not shown), causing the first vibrating sections 51 and 52 to vibrate in the X-axis direction in opposite phases to each other, while the second vibrating sections 53 and 54 vibrate in the Y-axis direction in opposite phases to each other and on the opposite side from the first vibrating sections 51 and 52. This second embodiment can also achieve the same effects as the first embodiment described above.

[0077] <Third Embodiment> Figure 9 is a plan view showing a third embodiment of the physical quantity sensor of the present invention. This description of the physical quantity sensor in this embodiment will focus on the differences from the previously described embodiment, and similar matters will be omitted from the explanation. The physical quantity sensor 1 of this embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the projected shape of the vibration system structure is different. In Figure 9, components that are the same as those of the first embodiment described above are denoted by the same reference numerals.

[0078] In the physical quantity sensor 1 of this embodiment, the outer shapes of the vibrating parts 51, 52, 53, and 54 are trapezoidal when viewed from a plane with the Z-axis as the normal. Furthermore, the projected outer shape of the assembly of the vibrating parts 51, 52, 53, and 54 is approximately rectangular when viewed from a plane with the Z-axis direction as the normal. This allows for miniaturization of the physical quantity sensor 1. In addition, for example, when the physical quantity sensor 1 is mounted on a chip, it corresponds to the shape of the chip, making mounting on the chip easy. This third embodiment can also achieve the same effects as the first embodiment described above.

[0079] <Fourth Embodiment> Figure 10 is a plan view showing a fourth embodiment of the physical quantity sensor of the present invention. This description of the physical quantity sensor in this embodiment will focus on the differences from the previously described embodiment, and similar matters will be omitted from the explanation. The physical quantity sensor 1 of this embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the configuration of the vibration means is different. In Figure 10, the same reference numerals are used for components that are the same as those of the first embodiment described above.

[0080] The vibration means 4 of this embodiment is configured to vibrate the first vibrating parts 51 and 52 in the X-axis direction by piezoelectric drive. In the following description, the first vibrating part 51 will be described as representative, and the description of the first vibrating part 52 will be omitted. The first vibrating section 51 has a fixed section 518a provided inside the first opening 511a and fixed to the substrate 2, and a plurality of connecting sections 518b provided inside the first opening 511a and connecting the fixed section 518a and the frame section 511. Each connecting section 518b extends in the Y-axis direction and is spaced apart from each other in the X-axis direction. The vibration means 4 has a pair of piezoelectric elements 45 and 46 provided at each connecting portion 518b. The piezoelectric elements 45 and 46 are provided extending in the Y-axis direction and spaced apart in the X-axis direction.

[0081] Each piezoelectric element 45 and 46 consists of a pair of electrodes arranged opposite each other in the Z-axis direction and a piezoelectric layer interposed between the pair of electrodes. By applying a voltage between the pair of electrodes, they expand or contract in the Y-axis direction. Therefore, when each piezoelectric element 45 is expanded and each piezoelectric element 46 is contracted, each connecting portion 518b is deformed by bending, and the end connected to the frame portion 511 is displaced toward the ring portion 31, resulting in the first vibrating portion 51 being displaced inward. Conversely, when each piezoelectric element 45 is contracted and each piezoelectric element 46 is expanded, each connecting portion 518b is deformed by bending, and the end connected to the frame portion 511 is displaced toward the opposite side of the ring portion 31, resulting in the first vibrating portion 51 being displaced outward.

[0082] In the vibration means 4 of the configuration, voltage is applied to each piezoelectric element 45 and 46 such that the states of extending each piezoelectric element 45 and contracting each piezoelectric element 46 are alternately repeated, and the states of contracting each piezoelectric element 45 and extending each piezoelectric element 46 are repeated, thereby causing the first vibrating parts 51 and 52 to vibrate in the X-axis direction in opposite phases to each other. This fourth embodiment can also achieve the same effects as the first embodiment described above.

[0083] <Fifth Embodiment> Figure 11 is a plan view showing a fifth embodiment of the physical quantity sensor of the present invention. This description of the physical quantity sensor in this embodiment will focus on the differences from the previously described embodiment, and similar matters will be omitted from the explanation. The physical quantity sensor 1 of this embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the configuration of the detection means is different. In Figure 11, the same reference numerals are used for components that are the same as those of the first embodiment described above. Furthermore, the configurations of the first vibrating sections 51 and 52 are the same as those of the second vibrating sections 53 and 54, so in the following description, the first vibrating section 51 and the second vibrating section 53 will be described as representatives, and the descriptions of the first vibrating section 52 and the second vibrating section 54 will be omitted.

[0084] The first vibrating section 51 is provided inside the second opening 511b and has a plate-shaped Y-axis displacement section 519a that can be displaced in the Y-axis direction relative to the frame section 511, and a plurality of spring sections 519b that connect the Y-axis displacement section 519a and the frame section 511. Each spring section 519b is provided extending in the X-axis direction. The second vibrating section 53 is provided inside the second opening 531b and has a plate-shaped X-axis displacement section 539a that can be displaced in the X-axis direction relative to the frame section 531, and a plurality of spring sections 539b that connect the X-axis displacement section 539a and the frame section 531. Each spring section 539a is provided extending in the Y-axis direction.

[0085] The detection means 9 has a pair of piezoelectric elements 991 and 992 provided on each spring portion 519b of the first vibrating section 51. The piezoelectric elements 991 and 992 extend in the X-axis direction and are spaced apart from each other in the Y-axis direction. The detection means 9 also has a pair of piezoelectric elements 993 and 994 provided on each spring portion 539b of the second vibrating section 53. The piezoelectric elements 993 and 994 extend in the Y-axis direction and are spaced apart from each other in the X-axis direction.

[0086] Each piezoelectric element 991, 992, 993, and 994 consists of a pair of electrodes arranged opposite each other in the Z-axis direction and a piezoelectric layer interposed between the pair of electrodes. These piezoelectric elements 991, 992, 993, and 994 have the property of generating electric charge through deformation, and the greater the amount of deformation, the greater the electric charge generated. Therefore, when an angular velocity around the Z axis is applied to the physical quantity sensor 1, and the Y-axis displacement portion of the first vibrating portion 51 is displaced in the Y-axis direction while bending and deforming the spring portion 519b in the Y-axis direction, the piezoelectric elements 991 and 992 generate an electric charge of a magnitude corresponding to the deformation of the spring portion 519b. Similarly, when the X-axis displacement portion of the second vibrating portion 53 is displaced in the X-axis direction while bending and deforming the connecting portion 539b in the X-axis direction, the piezoelectric elements 993 and 994 generate an electric charge of a magnitude corresponding to the deformation of the connecting portion 539b. The detection means 9 detects the angular velocity around the Z axis by detecting the magnitude of the charge generated from these piezoelectric elements 991, 992, 993, and 994.

[0087] <Sixth Embodiment> Figure 12 is a plan view showing a sixth embodiment of the physical quantity sensor of the present invention. This description of the physical quantity sensor in this embodiment will focus on the differences from the previously described embodiment, and similar matters will be omitted from the explanation. The physical quantity sensor 1 of this embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the configuration of the detection means is different. In Figure 12, the same reference numerals are used for components that are the same as those of the first embodiment described above. Furthermore, the configurations of the first vibrating sections 51 and 52 are the same as those of the second vibrating sections 53 and 54, so in the following description, the first vibrating section 51 and the second vibrating section 53 will be described as representatives, and the descriptions of the first vibrating section 52 and the second vibrating section 54 will be omitted.

[0088] The first vibrating section 51 is provided inside the second opening 511b and has a plate-shaped Y-axis displacement section 519a that can be displaced in the Y-axis direction relative to the frame section 511, and a plurality of spring sections 519b that connect the Y-axis displacement section 519a and the frame section 511. Each spring section 519b is provided extending in the X-axis direction. The second vibrating section 53 is provided inside the second opening 531b and has a plate-shaped X-axis displacement section 539a that can be displaced in the X-axis direction relative to the frame section 531, and a plurality of spring sections 539b that connect the X-axis displacement section 539a and the frame section 531. Each spring section 539a is provided extending in the Y-axis direction.

[0089] The detection means 9 of this embodiment includes piezoresistive sections 995 provided on each spring section 519b of the first vibrating section 51, and piezoresistive sections 996 provided on each spring section 539b of the second vibrating section 53. The piezoresistive sections 995 and 996 can be formed, for example, when the vibrating system structure 3 is formed using an n-type silicon substrate, by diffusing impurities such as boron to a high concentration and forming a p-type silicon layer in the diffused portion.

[0090] The piezoresistors 995 and 996 have the property that their resistance value changes with deformation, and the greater the deformation, the greater the change in resistance value. Therefore, when angular velocity around the Z axis is applied to the physical quantity sensor 1, and the Y-axis displacement part of the first vibrating part 51 is displaced in the Y-axis direction while bending and deforming the spring part 519b in the Y-axis direction, the resistance value of the piezoresistor 995 changes to a value corresponding to the amount of deformation of the spring part 519b. Similarly, when the X-axis displacement part of the second vibrating part 53 is displaced in the X-axis direction while bending and deforming the connecting part 539b in the X-axis direction, the resistance value of the piezoresistor 996 changes to a value corresponding to the amount of deformation of the connecting part 539b. The detection means 9 detects the angular velocity around the Z-axis by detecting the change in the resistance values ​​of the piezo-resistive sections 995 and 996.

[0091] <Seventh Embodiment> Figure 13 is a plan view showing a seventh embodiment of the physical quantity sensor of the present invention. Note that, for the sake of clarity, some components of the physical quantity sensor are omitted from the illustration in Figure 13. This description of the physical quantity sensor in this embodiment will focus on the differences from the previously described embodiment, and similar matters will be omitted from the explanation.

[0092] The physical quantity sensor 1 of this embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the configuration of the detection means is different. In Figure 13, the same reference numerals are used for components that are the same as those of the first embodiment described above. Furthermore, the configurations of the four vibrating parts are the same as each other except for the arrangement around the Z axis, so below, the first vibrating part 51 will be described as representative, and the descriptions of the first vibrating part 52 and the second vibrating parts 53 and 54 will be omitted.

[0093] In the first vibration section 51, a Y-axis displacement section 516 is provided on the outside of the frame section 511 and is connected to the frame section 511 by a plurality of spring sections 517. This Y-axis displacement section 516 consists of a plate-shaped base 516c and a plurality of detection electrodes 516d protruding from the base 516c in the X-axis direction. The displacement transducer 91 of the detection means 9 in this embodiment has a Y-axis displacement section 516 provided on the first vibration section 51 and a fixed electrode 911 fixed to the substrate 2 via an anchor. Multiple fixed electrodes 911 are provided corresponding to the detection electrode 516d of the Y-axis displacement section 516. Each fixed electrode 911 has a pair of electrode pieces 911a and 911b arranged opposite each other via the detection electrode 516d, and these electrode pieces 911a and 911b are provided extending in the X-axis direction.

[0094] <Eighth Embodiment> Figure 14 is a plan view showing an eighth embodiment of the physical quantity sensor of the present invention. Note that in Figure 13, for the sake of clarity, some components of the physical quantity sensor are omitted from the illustration. This description of the physical quantity sensor in this embodiment will focus on the differences from the previously described embodiment, and similar matters will be omitted from the explanation.

[0095] The physical quantity sensor 1 of this embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the configuration of the detection means is different. In Figure 14, the same reference numerals are used for components that are the same as those of the first embodiment described above. Furthermore, the configurations of the four vibrating parts are the same as each other except for the arrangement around the Z axis, so below, the first vibrating part 51 will be described as representative, and the descriptions of the first vibrating part 52 and the second vibrating parts 53 and 54 will be omitted.

[0096] In the first vibrating section 51, a Z-axis displacement section 516A, provided on the outside of the frame section 511, is connected to the frame section 511 by a pair of connecting springs 517A. The pair of connecting springs 517A each extend along the radial direction with respect to the center O of the ring section 31. The Z-axis displacement section 516A has a plate-shaped base 516Aa and a plurality of fixed electrodes 516Ab that protrude radially from the base 516Aa with respect to the center O of the ring section 31.

[0097] In this first vibrating section 51, the Coriolis force in the Y-axis direction, which is generated when an angular velocity around the Z-axis is applied, causes the Z-axis displacement section 516A to rotate around the Z-axis, while bending and deforming the pair of connecting springs 517A. With this configuration, the Coriolis force in the Y-axis direction can be converted into a stress around the Z-axis, thereby increasing the amount of displacement of the Z-axis displacement section 516A.

[0098] The rotary transducer 91 of the detection means 9 in this embodiment has a Z-axis displacement part 516A provided on the first vibrating part 51 and a fixed electrode 911 fixed to the substrate 2 via an anchor. Multiple fixed electrodes 911 are provided corresponding to the fixed electrode 516Ab of the Z-axis displacement part 516A. Each fixed electrode 911 has a pair of electrode pieces 911a, 911b arranged opposite each other via the fixed electrode 516Ab. The vibrating pieces of each embodiment described above can be applied to various types of electronic devices, and the resulting electronic devices will be highly reliable.

[0099] Here, the electronic device equipped with the vibrating element of the present invention will be described in detail with reference to Figures 15 to 17. Figure 15 is a perspective view showing the configuration of a mobile (or notebook) personal computer to which the electronic device equipped with the physical quantity sensor of the present invention is applied. In this figure, the personal computer 1100 consists of a main body 1104 equipped with a keyboard 1102 and a display unit 1106 equipped with a display unit 100, the display unit 1106 being rotatably supported by the main body 1104 via a hinge structure. Such a personal computer 1100 has a built-in physical quantity sensor 1 that functions as an angular velocity detection means (gyro sensor).

[0100] Figure 16 is a perspective view showing the configuration of a mobile phone (including PHS) to which the electronic device equipped with the physical quantity sensor of the present invention is applied. In this figure, the mobile phone 1200 is equipped with a plurality of operation buttons 1202, an earpiece 1204, and a microphone 1206, and a display unit 100 is positioned between the operation buttons 1202 and the earpiece 1204. Such a mobile phone 1200 has a built-in physical quantity sensor 1 that functions as an angular velocity detection means (gyro sensor).

[0101] Figure 17 is a perspective view showing the configuration of a digital still camera to which the electronic device equipped with the physical quantity sensor of the present invention is applied. Note that this figure also shows a simplified representation of connections to external devices. Here, while a conventional camera exposes silver halide photographic film to light from the subject's light image, the digital still camera 1300 generates an imaging signal (image signal) by photoelectrically converting the subject's light image using an image sensor such as a CCD (Charge Coupled Device).

[0102] The back of the case (body) 1302 of the digital still camera 1300 is equipped with a display unit, which displays information based on the imaging signal from the CCD. The display unit functions as a viewfinder, displaying the subject as an electronic image. Furthermore, a light-receiving unit 1304, including an optical lens (imaging optical system) and a CCD, is provided on the front side (back side in the diagram) of the case 1302.

[0103] When the photographer confirms the subject image displayed on the display unit and presses the shutter button 1306, the imaging signal from the CCD at that moment is transferred and stored in the memory 1308. Furthermore, in this digital still camera 1300, a video signal output terminal 1312 and a data communication input / output terminal 1314 are provided on the side of the case 1302. As shown in the diagram, a television monitor 1430 is connected to the video signal output terminal 1312, and a personal computer 1440 is connected to the data communication input / output terminal 1314, as needed. Furthermore, through a predetermined operation, the image capture signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440. Such a digital still camera 1300 has a built-in physical quantity sensor 1 that functions as an angular velocity detection means (gyro sensor).

[0104] Furthermore, the electronic devices equipped with the vibrating element of the present invention can be applied not only to the personal computer (mobile personal computer) shown in Figure 15, the mobile phone shown in Figure 16, and the digital still camera shown in Figure 17, but also to, for example, inkjet ejection devices (e.g., inkjet printers), laptop personal computers, televisions, video cameras, video tape recorders, car navigation systems, pagers, electronic organizers (including those with communication functions), electronic dictionaries, calculators, electronic game devices, word processors, workstations, video phones, security television monitors, electronic binoculars, POS terminals, medical devices (e.g., electronic thermometers, blood pressure monitors, blood glucose meters, electrocardiogram measuring devices, ultrasound diagnostic devices, electronic endoscopes), fish finders, various measuring instruments, instruments (e.g., instruments for vehicles, aircraft, ships), flight simulators, and the like.

[0105] Although the physical quantity sensor of the present invention has been described above based on the illustrated embodiment, the present invention is not limited thereto, and the configuration of each part can be replaced with any configuration having a similar function. Furthermore, the present invention may include any other components. Also, the present invention may be a combination of any two or more components (features) from the above embodiments. [Explanation of symbols]

[0106] 1...Physical quantity sensor 2...Substrate 3...Vibration system structure 31...Ring part 4...Vibration means 41...Fixed electrode 411, 412...Electrode piece 42...Fixed electrode 421, 422...Electrode piece 43, 44...Fixed electrode 431, 432...Electrode piece 441, 442...Electrode piece 45, 46...Piezoelectric element 51...First vibration part 511...Frame part 511a...First opening 511b...Second opening 511c...Third opening 512...Z-axis displacement part 513, 514...Shaft part 515...Drive electrode 516...Y-axis displacement part 516A...Displacement part 516Aa...Base part 516Ab...Fixed electrode 516a...Frame part 516b...Detection electrode 516c...Base 516d...Detection electrode 517...Spring section 517A...Pair of connecting springs 518a...Fixed section 518b...Connecting section 519a...Y-axis displacement section 519b...Spring section 52...First vibration section 521...Frame section 522...Z-axis displacement section 523, 524...Shaft section 525...Drive electrode 526...Y-axis displacement section 526b...Detection electrode 527...Spring section 53...Second vibration section 531...Frame section 531a...First opening 531b...Second opening 531c...Third opening 532...Z-axis displacement section 533, 534...Shaft section 535...Drive electrode 536...X-axis displacement section 536a...Frame section 536b...Detection electrode 537...Spring section 539a...Spring section 539b...Connecting section 519a...X-axis displacement section 519b...Spring section 54...Second vibration section 541...Frame section 542...Z-axis displacement section 543, 544...Shaft section 545...Drive electrode 546...Detection electrode 546b...Y-axis extension section 547...Spring section 61, 62, 63, 64...Inner fixing section 651, 652, 661, 662, 671, 672, 681, 682...Outer fixing section 71, 72, 73, 74...Beam 81...First inner spring section 811, 812...Spring section 82...First inner spring section 83...Second inner spring section 831, 832...Spring section 84...Second inner spring section 851, 852, 861, 862, 871, 872, 881, 882...Outer spring section 9...Detection means 91...Displacement transducer 911, 912...Fixed electrodes 911a, 911b...Electrode pieces 92...Displacement transducer921, 922... Fixed electrodes 921a, 921b... Electrode pieces 93... Displacement transducer 931, 932... Fixed electrodes 931a, 931b... Electrode pieces 94... Displacement transducer 941, 942... Fixed electrodes 941a, 941b... Electrode pieces 95... Rotation transducer 951... Fixed electrode 96... Rotation transducer 961... Fixed electrode 97... Rotation transducer 971... Fixed electrode 98... Rotation transducer 981... Fixed electrode 991, 992... Piezoelectric elements 993, 994... Piezoelectric elements 995, 996... Piezoresistive parts 100... Display unit 1100... Personal computer 1102... Keyboard 1104... Main unit 1106...Display unit 1200...Mobile phone 1202...Operation buttons 1204...Earpiece 1206...Transmitter 1300...Digital still camera 1302...Case 1304...Light receiving unit 1306...Shutter button 1308...Memory 1312...Video signal output terminal 1314...Input / output terminal 1430...Television monitor 1440...Personal computer J1, J2...Axis

Claims

1. When two mutually orthogonal axes are designated as the first axis and the second axis, A ring portion capable of circular vibration, The four support parts that support the ring portion, Four beams connecting each of the support parts to the nodes of the ring vibration of the ring part, A pair of first mass parts having a movable part and arranged opposite to each other in a direction parallel to the first axis via the ring part, A pair of second mass parts having a movable part and arranged opposite to each other in a direction parallel to the second axis via the ring part, A pair of first spring portions connecting each of the first mass portions and the ring portion are provided so that each of the first mass portions can vibrate in a direction parallel to the first axis with respect to the ring portion, A pair of second springs connect each of the second masses to the ring portion, such that each of the second masses can vibrate in a direction parallel to the second axis relative to the ring portion, A vibration means for vibrating at least one of the pair of first mass parts and the pair of second mass parts in a planar direction including the first axis and the second axis at a first frequency and in opposite phase to each other, The device comprises at least one transducer that converts the displacement of the movable part of each of the first mass parts and the movable part of each of the second mass parts into an electrical signal, The ring portion is characterized by vibrating in a circular motion in a direction parallel to the first axis and in a direction parallel to the second axis, according to the first frequency.

2. When two mutually orthogonal axes are designated as the first axis and the second axis, A ring portion capable of circular vibration, The four support parts that support the ring portion, Four beams connecting each of the support parts and the four fixed points that form nodes of the ring vibration of the ring part, A pair of first mass parts are arranged opposite to each other in a direction parallel to the first axis via the ring portion, each having a first movable part that is displaceable about an axis parallel to the second axis and a second movable part that is displaceable in a direction parallel to the second axis, A pair of second mass parts are arranged opposite to each other in a direction parallel to the second axis via the ring portion, having a third movable part that can be displaced about an axis parallel to the first axis and a fourth movable part that can be displaced in a direction parallel to the first axis, A pair of first spring portions connecting each of the first mass portions and the ring, such that each of the first mass portions can vibrate in a direction parallel to the first axis relative to the ring portion, A pair of second spring portions connecting each of the second mass portions and the ring, such that each of the second mass portions can vibrate in a direction parallel to the second axis with respect to the ring, A vibration means for vibrating at least one of the pair of first mass parts and the pair of second mass parts in a planar direction including the first axis and the second axis at a first frequency and in opposite phase to each other, A transducer that converts the displacement amounts of the first movable part of each of the first mass parts and the third movable part of each of the second mass parts into an electrical signal, The device includes a transducer that converts the displacement amounts of the second movable part and the fourth movable part of each of the first mass parts into an electrical signal, The ring portion is characterized by vibrating in a circular motion in a direction parallel to the first axis and in a direction parallel to the second axis, according to the first frequency.

3. The substrate has a support for the ring portion, The physical quantity sensor according to claim 1 or 2, characterized in that the substrate is composed of a semiconductor substrate, an insulating substrate, or a composite substrate in which a semiconductor layer and an insulating layer are laminated.

4. The physical quantity sensor according to any one of claims 1 to 3, characterized in that the ring portion has an outer diameter and an inner diameter, with a void inside the inner diameter, and the ring portion is elastically deformable.

5. The first spring portion is restricted from deformation in a direction parallel to the second axis and from deformation in a direction parallel to an axis perpendicular to both the first and second axes. The physical quantity sensor according to any one of claims 1 to 4, characterized in that the second spring portion is restricted from deformation in a direction parallel to the first axis and from deformation in a direction parallel to an axis perpendicular to the first axis and the second axis.

6. The physical quantity sensor according to any one of claims 1 to 5, characterized in that the four support portions are located inside the pair of first mass portions and the pair of second mass portions and outside the ring portion, and are provided in positions that are mirror-symmetric with respect to the first axis and the second axis that intersect with the center of the ring portion.

7. The physical quantity sensor according to any one of claims 1 to 6, characterized in that each of the beams is restricted from radial displacement from the center of the ring.

8. The physical quantity sensor according to any one of claims 1 to 7, characterized in that the vibration means is either electrostatically driven or piezoelectrically driven.

9. The physical quantity sensor according to any one of claims 1 to 8, characterized in that the transducer has the detection capability of either an electrostatic type, a piezoelectric type, or a piezoresistive type.

10. The physical quantity sensor according to any one of claims 1 to 9, characterized in that the transducer detects the angular velocity around the first axis, the angular velocity around the second axis, and the angular velocity around a third axis that is orthogonal to both the first and second axes.

11. The physical quantity sensor according to any one of claims 1 to 10, characterized in that each transducer, when paired with other transducers, electrically cancels linear acceleration in a predetermined direction.

12. The physical quantity sensor according to any one of claims 1 to 11, characterized in that each of the transducers also has its own resonant frequency.

13. The physical quantity sensor according to any one of claims 1 to 12, characterized in that the annular vibration of the ring portion is a vibration that repeatedly alternates between a state in which it contracts in a direction parallel to the first axis and expands in a direction parallel to the second axis, and a state in which it expands in a direction parallel to the first axis and contracts in a direction parallel to the second axis.

14. The physical quantity sensor according to any one of claims 1 to 13, characterized in that the first spring portion and the second spring portion are connected to portions of the ring portion that are inclined at a 45-degree angle from both the first and second axes.

15. The physical quantity sensor according to any one of claims 1 to 14, characterized in that the projected outer shape of the assembly of the pair of first mass parts and the pair of second mass parts is substantially circular.

16. The physical quantity sensor according to any one of claims 1 to 14, characterized in that the projected outer shape of the assembly of the pair of first mass parts and the pair of second mass parts is substantially rectangular.

17. The physical quantity sensor according to any one of claims 1 to 16, wherein the vibrating means is connected to the inside of each of the first mass parts and each of the second mass parts.

18. The physical quantity sensor according to any one of claims 1 to 17, wherein the transducer is connected to the inside of each of the first mass parts and each of the second mass parts.

19. When two mutually orthogonal axes are designated as the first axis and the second axis, Extendable connecting section, The four support parts that support the connecting part are provided at positions inclined at a predetermined angle from both the first and second axes that intersect the center of the connecting part, Four beams connecting each of the aforementioned support parts to the aforementioned connecting parts, A pair of first mass parts having a movable part and arranged opposite to each other in a direction parallel to the first axis via the ring part, A pair of second mass parts having a movable part and arranged opposite to each other in a direction parallel to the second axis via the ring part, A pair of first spring portions connecting each of the first mass portions and the ring portion are provided so that each of the first mass portions can vibrate in a direction parallel to the first axis with respect to the ring portion, A pair of second springs connect each of the second masses to the ring portion, such that each of the second masses can vibrate in a direction parallel to the second axis relative to the ring portion, A vibration means for vibrating at least one of the pair of first mass parts and the pair of second mass parts in a planar direction including the first axis and the second axis at a first frequency and in opposite phase to each other, The device comprises at least one transducer that converts the displacement of the movable part of each of the first mass parts and the movable part of each of the second mass parts into an electrical signal, A physical quantity sensor characterized in that when the connecting portion expands and contracts in accordance with the first frequency, the connection between the beam and the connecting portion becomes a node.

20. An electronic device characterized by using a physical quantity sensor as described in any one of claims 1 to 19.

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