Workpiece holding member

Abstract

To enable stable holding of the workpiece on the stage. [Solution] The workpiece holding member 900 includes a first member 910 on which a first magnetic member 911a is provided, a second member 920 on which a second magnetic member 921a is provided, and a position adjustment mechanism 940 that defines the positional relationship between the first member 910 and the second member 920 so that the first workpiece holding surface 915 and the second workpiece holding surface 925 face each other, and moves the first member 910 and the second member 920 relative to each other in a direction in which the first workpiece holding surface 915 and the second workpiece holding surface 925 move toward and away from each other.

Description

Technical Field

[0001] The present disclosure relates to a work holding member capable of holding various works in a predetermined posture.

Background Art

[0002] For example, Patent Document 1 discloses a three-dimensional scanner that scans a work placed on a stage to generate three-dimensional data. This type of three-dimensional scanner is mainly configured to irradiate structured illumination light onto the work on the stage, image and analyze the distortion of the illumination light with a camera, and thereby measure the three-dimensional shape of the work.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] By the way, in a three-dimensional scanner such as Patent Document 1, it is necessary to hold the posture of the work on the stage so that the portion of the work whose shape is to be measured is within the visual field range of the camera.

[0005] For example, when assuming a thin plate-shaped work, if it is placed on the stage in a lying posture, the work will be stable. Therefore, it is conceivable to scan in two postures: a posture where the front side of the work is facing up and a posture where the front side of the work is facing down in order to scan the entire work. However, when the plate-shaped work is lying on the stage, the vertical dimension of the side wall of the work, which is the common area between the two postures, becomes short. As a result, the overlapping area between the two sets of three-dimensional data measured in the two postures is narrow, and it is difficult to perform high-precision synthesis.

[0006] Therefore, it is conceivable to widen the overlapping area and enable high-precision synthesis by standing a plate-shaped workpiece upright on the stage and measuring the large front and back surfaces separately. However, since a plate-shaped workpiece is unstable when standing upright on the stage, even slight vibrations can change the position of the workpiece, leading to a decrease in measurement accuracy in 3D scanning, which assumes that the workpiece does not move during the scanning process.

[0007] This disclosure is made in view of the above points, and its purpose is to enable the workpiece to be held stably on the stage. [Means for solving the problem]

[0008] To achieve the above objective, a workpiece holding member according to one aspect of the present disclosure includes: a first member having an external shape elongated in a first direction and having a plurality of sides including a first mounting surface and a first workpiece holding surface elongated in the first direction, with a first magnetic member provided on the first mounting surface; a second member having an external shape elongated in a second direction and having a plurality of sides including a second mounting surface and a second workpiece holding surface elongated in the second direction, with a second magnetic member provided on the second mounting surface; a position adjustment mechanism that defines the positional relationship between the first member and the second member such that the first workpiece holding surface and the second workpiece holding surface face each other while the first mounting surface and the second mounting surface face the same direction, and moves the first member and the second member relative to each other in a direction in which the first workpiece holding surface and the second workpiece holding surface move toward and away from each other.

[0009] With this configuration, by separating the first workpiece holding surface and the second workpiece holding surface using a position adjustment mechanism, it becomes possible to easily position the workpiece between the first and second workpiece holding surfaces. After positioning the workpiece between the first and second workpiece holding surfaces, the workpiece is held by the first and second workpiece holding surfaces by bringing them closer together using the position adjustment mechanism. In this state, the first and second members can be held magnetically to the stage, for example, by the first and second magnetic members, respectively, so that even thin or elongated workpieces can be kept stable in an upright position on the stage.

[0010] A workpiece holding member according to another aspect of the present disclosure includes: a first member having an external shape elongated in a first direction and having a plurality of sides including a first mounting surface and a first workpiece holding surface elongated in the first direction; a second member having an external shape elongated in a second direction and having a plurality of sides including a second mounting surface and a second workpiece holding surface elongated in the second direction; a position adjustment mechanism that defines the positional relationship between the first member and the second member such that the first workpiece holding surface and the second workpiece holding surface face each other when the first mounting surface and the second mounting surface are facing the same direction, and moves the first member and the second member relative to each other in a direction in which the first workpiece holding surface and the second workpiece holding surface move toward and away from each other; and an adsorption part that applies an adsorption force to hold the first mounting surface and the second mounting surface in contact with a predetermined surface.

[0011] With this configuration, the workpiece is held by the first workpiece holding surface and the second workpiece holding surface, and the first and second members can be attached to the stage by a force such as magnetic force, adhesive force, or tack force using the suction part.

[0012] A workpiece holding member according to yet another aspect of the present disclosure is a workpiece holding member that holds a workpiece between a first holding portion provided on a first member and a second holding portion provided on a second member, and comprises a position adjustment mechanism that has a rotating bolt, a bearing nut through which the rotating bolt passes, and a tip holding portion that holds the tip of the rotating bolt, and by rotating the rotating bolt, changes the relative positional relationship between the rotating bolt and the bearing nut, thereby adjusting the relative positional relationship between the first holding portion and the second holding portion; a first member having a first magnet that is attracted to a magnetic stage, the first holding portion, and the bearing nut; a second member having a second magnet that is attracted to the magnetic stage, the second holding portion, and the tip holding portion; and an opening / closing hinge that serves as a rotation axis when adjusting the relative positional relationship between the first member and the second member by the position adjustment mechanism, and connects the first member and the second member. When the positional relationship between the first and second members is adjusted by the position adjustment mechanism, they maintain a state of being attracted to the magnetization stage by the first and second magnets, and by rotating the rotating bolt, the first and second members slide relative to the magnetization stage with the opening / closing hinge as the axis of rotation.

[0013] With this configuration, while the workpiece is held by the first workpiece holding surface and the second workpiece holding surface, the first member and the second member can be magnetically attracted to, for example, the stage by the first magnet and the second magnet, respectively. [Effects of the Invention]

[0014] As explained above, for example, thin or elongated workpieces can be held stably on the stage. [Brief explanation of the drawing]

[0015] [Figure 1] Figure 1 shows the overall configuration of a three-dimensional scanner according to an embodiment of the present invention. [Figure 2]Figure 2 is a block diagram of the three-dimensional scanner. [Figure 3] Figure 3 is a side view of the measurement unit and the pedestal unit. [Figure 4] Figure 4 is a block diagram of the measurement unit. [Figure 5] Figure 5 is a diagram showing a configuration example of the module. [Figure 6] Figure 6 is a perspective view of the work holding member seen from above. [Figure 7] Figure 7 is a perspective view of the work holding member seen from below. [Figure 8] Figure 8 is a plan view of the work holding member. [Figure 9] Figure 9 is a bottom view of the work holding member. [Figure 10] Figure 10 is a front view of the work holding member. [Figure 11] Figure 11 is a rear view of the work holding member. [Figure 12] Figure 12 is a right side view of the work holding member. [Figure 13] Figure 13 is a left side view of the work holding member. [Figure 14] Figure 14 is a plan view showing a state where both arms of the work holding member are open. [Figure 15] Figure 15 is a cross-sectional view taken along line XV-XV in Fig. 8. [Figure 16] Figure 16 is a cross-sectional view taken along line XVI-XVI in Fig. 11. [Figure 17] Figure 17 is a plan view showing a state where the release lever of the work holding member is in the release position. <� [Figure 18] Figure 18 is a view corresponding to Fig. 16 showing a state where the release lever of the work holding member is in the release position. [Figure 19] Figure 19 is a view corresponding to Fig. 6 according to a modified example.

Mode for Carrying Out the Invention

[0016] Embodiments of the present invention will be described in detail below with reference to the drawings. The following description of preferred embodiments is essentially illustrative and is not intended to limit the present invention, its applications, or its uses.

[0017] Figure 1 shows the overall configuration of a three-dimensional scanner 1 according to an embodiment of the present invention. The three-dimensional scanner 1 is a device capable of acquiring three-dimensional data by measuring the shape of a workpiece (object to be measured) W, converting it into mesh data of the workpiece W, and outputting it. The three-dimensional scanner 1 can also convert the mesh data of the workpiece W into CAD data and output it, or convert the mesh data into surface data and output it.

[0018] In the following description, when measuring the shape of a workpiece W, coordinate information of the workpiece W surface is obtained by irradiating the workpiece W with a predetermined pattern of measurement light and using the signal obtained from the reflected light reflected from the surface of the workpiece W. For example, as the predetermined pattern of measurement light, a measurement method using triangulation with a fringe projection image obtained from the reflected light, which is projected onto the workpiece W, can be used. However, in this invention, the principle and configuration for obtaining the coordinate information of the workpiece W are not limited to this, and other methods can also be applied.

[0019] The three-dimensional scanner 1 comprises a measuring unit 100 for measuring the shape of a workpiece W, a base unit 600 on which the workpiece W can be placed, a controller 200, a light source unit 300, and a display unit 400. The controller 200 may be incorporated into the measuring unit 100, the light source unit 300 may be incorporated into the measuring unit 100, or the display unit 400 may be incorporated into the measuring unit 100. Furthermore, the controller 200 and the light source unit 300 may be integrated, or the controller 200 and the display unit 400 may be integrated.

[0020] The three-dimensional scanner 1 uses a light source unit 300 to provide structured illumination to the workpiece W, captures a fringe projection image, generates a depth image containing coordinate information, and can measure the three-dimensional dimensions and shape of the workpiece W based on this image. Measurement using such fringe projection has the advantage of shortening measurement time because it allows for three-dimensional measurement without moving the workpiece W or optical systems such as lenses in the Z direction (height direction).

[0021] Figure 2 shows a block diagram of a three-dimensional scanner 1 according to an embodiment of the present invention. As shown in this figure, the measurement unit 100 includes a pattern light projection unit (first projection unit) 110 that projects pattern light for measurement onto the workpiece W, a light receiving unit 120, a measurement control unit 150, and an illumination light output unit 130. The projection unit 110 is the part that irradiates the workpiece W, which is placed on the mounting unit 140 (described later), with measurement light having a predetermined pattern. Placing the workpiece W on the mounting unit 140 is the same as arranging the workpiece W on the mounting unit 140.

[0022] The light-receiving unit 120 is fixed in an inclined position with respect to the mounting surface 142 of the rotating stage 143, which will be described later. The light-receiving unit 120 receives the measurement light that is irradiated by the light-emitting unit 110 and reflected by the workpiece W. When the light-receiving unit 120 receives the measurement light as reflected light from the workpiece W, it generates and outputs a first measurement reception signal that represents the amount of measurement light received. The light-receiving unit 120 can generate an observation image for observing the overall shape of the workpiece W by imaging the workpiece W placed on the mounting unit 140. In this example, there is an illumination light output unit 130, but uniform light may be irradiated onto the workpiece W from the light-emitting unit 110. In this case, the light-emitting unit 110 is a component that irradiates the workpiece W with measurement light and uniform light at different timings. The light-receiving unit 120 can also receive the uniform light irradiated from the light-emitting unit 110 and output a second reception signal for texture acquisition. For example, it is also possible to irradiate the measurement light source with uniform light of the same wavelength as the measurement light and output a received signal containing uniaxial color information. Although not shown in the diagram, it is also possible to prepare a first camera and a second camera that are calibrated, acquire the shape with the first camera and acquire texture information with the second camera. The texture information includes color information and brightness information of the workpiece W.

[0023] The light-receiving unit 120 according to this embodiment includes a high-magnification light-receiving unit and a low-magnification light-receiving unit. The high-magnification light-receiving unit is the part of the workpiece W that can be imaged at a magnified view compared to the low-magnification light-receiving unit. On the other hand, the low-magnification light-receiving unit is a light-receiving unit with a wider field of view compared to the high-magnification light-receiving unit.

[0024] The base unit 600 comprises a base plate 602, a mounting unit 140, and a movement control unit (stage control unit) 144. The mounting unit 140 is supported on the base plate 602 of the base unit 600. The movement control unit 144 controls the movement and rotation of the rotating stage 143 on which the workpiece W is placed. The movement control unit 144 may be provided on the base unit 600 side or on the controller 200 side.

[0025] The light source unit 300 is connected to the measurement unit 100. The light source unit 300 is the part that generates measurement light and supplies it to the measurement unit 100. The controller 200 is the part that controls the measurement unit 100 and the like. The display unit 400 is connected to the controller 200 and is configured to display the image generated by the measurement unit 100, and to allow necessary settings, inputs, selections, etc.

[0026] The mounting section 140 has a rotating stage 143 with a mounting surface 142 on its upper surface on which the workpiece W is placed. The rotating stage 143 is made of a magnetic material and is magnetized. Examples of magnetic materials include iron-based metals, or materials that possess magnetic properties. As shown in Figure 4, two mutually orthogonal directions within the mounting surface 142 of the rotating stage 143 are defined as the X direction and the Y direction, and are indicated by arrows X and Y, respectively. The direction perpendicular to the mounting surface 142 of the mounting section 140 is defined as the Z direction and is indicated by arrow Z. The direction of rotation around an axis parallel to the Z direction is defined as the θ direction and is indicated by arrow θ.

[0027] The mounting section 140 includes a rotating stage 143 that rotates the mounting surface 142 around an axis extending in the Z direction, and a translational stage 141 that moves the mounting surface 142 horizontally (in the X and Y directions). The translational stage 141 has an X-direction movement mechanism and a Y-direction movement mechanism. The rotating stage 143 has a θ-direction rotation mechanism. The mounting section 140 may also include a fixing member (clamp) for fixing the workpiece W to the mounting surface 142. Furthermore, the mounting section 140 may include a tilt stage having a mechanism that can rotate around an axis parallel to the mounting surface 142.

[0028] The movement control unit 144 controls the rotational movement of the rotating stage 143 and the parallel movement of the translational stage 141 according to the measurement conditions set by the measurement condition setting unit 261, which will be described later. The movement control unit 144 also controls the movement of the mounting unit 140 by the mounting movement unit based on the measurement area set by the measurement condition setting unit 261, which will be described later.

[0029] The controller 200 includes a CPU (Central Processing Unit) 210, ROM (Read-Only Memory) 220, working memory 230, storage device (storage unit) 240, and an operation unit 250, etc. For example, a PC (Personal Computer) can be used as the controller 200.

[0030] The configuration of the measurement unit 100 is shown in the block diagram of Figure 4. The measurement unit 100 comprises a light-emitting unit 110, a light-receiving unit 120, an illumination light output unit 130, a measurement control unit 150, and a main body case 101 housing these components. The light-emitting unit 110 includes a measurement light source 111, a pattern generation unit 112, and a plurality of lenses 113, 114, and 115. The light-receiving unit 120 includes a camera 121 and a plurality of lenses 122 and 123. When performing measurements at different magnifications by providing multiple light-receiving units, a light-receiving unit 120a including a low-magnification camera 121 and low-magnification lenses, and a light-receiving unit 120b including a high-magnification camera 121 and high-magnification lenses may be installed. Note that the configuration is not limited to this one; the magnification may be varied by switching between multiple lenses for a single camera 121, or by providing a zoom lens for a single camera 121.

[0031] The light-emitting unit 110 is positioned diagonally above the mounting unit 140. In the example shown in Figure 4, the measurement unit 100 includes two light-emitting units 110, but the measurement unit 100 may include multiple light-emitting units 110. Here, a first measurement light-emitting unit 110A (right side in Figure 4) capable of irradiating the workpiece W with a first measurement light ML1 from a first direction, and a second measurement light-emitting unit 110B (left side in Figure 4) capable of irradiating the workpiece W with a second measurement light ML2 from a second direction different from the first direction are provided. The first measurement light-emitting unit 110A and the second measurement light-emitting unit 110B are arranged symmetrically with the optical axis of the light-receiving unit 120 as the center of symmetry. Although not shown, it is also possible to have three or more light-emitting units 110, or to move the light-emitting unit 110 and the mounting unit 140 relative to each other to project light onto the workpiece W in different directions, even while using a common light-emitting unit 110. In the above example, multiple light-emitting units 110 are provided and the light is received by a common light-receiving unit 120. However, conversely, multiple light-receiving units 120 may be provided to receive light from a common light-emitting unit 110. Furthermore, in this example, the irradiation angle of the illumination light emitted by the light-emitting unit 110 with respect to the Z direction is fixed, but this can also be made variable.

[0032] Each first measurement light projection unit 110A and second measurement light projection unit 110B is equipped with a first measurement light source and a second measurement light source, respectively, as measurement light sources 111. These measurement light sources 111 are, for example, halogen lamps that emit white light. The measurement light source 111 may also be a light source that emits monochromatic light, such as a blue LED (light-emitting diode) or organic EL that emits blue light. The light emitted from the measurement light source 111 (hereinafter referred to as "measurement light") is appropriately focused by the lens 113 and then incident on the pattern generation unit 112.

[0033] The relative positions of the light-receiving unit 120, light-emitting units 110A and 110B, and the light-receiving unit 120 are determined such that the central axes of the light-emitting units 110A and 110B intersect at a position where the arrangement of the workpiece W on the mounting unit 140 and the depth of field of the light-emitting and light-receiving units 110 and 120 are appropriate. Furthermore, since the center of the rotation axis in the θ direction coincides with the central axis of the light-receiving unit 120, when the mounting unit 140 rotates in the θ direction, the workpiece W rotates within the field of view around the rotation axis without moving out of the field of view.

[0034] The pattern generation unit 112 reflects the light emitted from the measurement light source 111 so that it projects measurement light onto the workpiece W. The measurement light incident on the pattern generation unit 112 is converted into a preset pattern and a preset intensity (brightness) and emitted. The measurement light emitted by the pattern generation unit 112 is converted by a plurality of lenses 114 and 115 into light with a diameter larger than the observation and measurement field of view of the light receiving unit 120, and then irradiated onto the workpiece W on the mounting unit 140.

[0035] The pattern generation unit 112 is a component that can switch between a projection state in which measurement light is projected onto the workpiece W and a non-projection state in which measurement light is not projected onto the workpiece W. For example, a DMD (Digital Micromirror Device) can be used for such a pattern generation unit 112. A pattern generation unit 112 using a DMD can be controlled by the measurement control unit 150 to switch between a reflection state in which the measurement light is reflected onto the optical path as the projection state and a light-shielding state in which the measurement light is blocked as the non-projection state.

[0036] A DMD is an element in which numerous micromirrors (tiny mirror surfaces) are arranged on a plane. Each micromirror can be individually switched ON or OFF by the measurement control unit 150, so a desired projection pattern can be constructed by combining the ON and OFF states of numerous micromirrors. This makes it possible to generate the pattern necessary for triangulation and measure the shape of the workpiece W. In this way, the DMD functions as a projection pattern optical system that projects a periodic projection pattern for measurement onto the workpiece W during measurement. Furthermore, the DMD has excellent response speed and offers the advantage of being able to operate at high speeds compared to shutters and the like.

[0037] In the above example, an example using a DMD for the pattern generation unit 112 was described, but the present invention is not limited to a DMD for the pattern generation unit 112, and other materials can be used. For example, an LCOS (Liquid Crystal on Silicon: reflective liquid crystal element) may be used as the pattern generation unit 112. Alternatively, a transmissive material may be used instead of a reflective material to adjust the amount of light transmitted for measurement. In this case, the pattern generation unit 112 is placed on the optical path of the measurement light, and a light projection state that transmits the measurement light and a light shielding state that blocks the measurement light are switched. For example, an LCD (liquid crystal display) can be used for such a pattern generation unit 112. Alternatively, the pattern generation unit 112 may be configured using a projection method using multiple line LEDs, a projection method using multiple optical paths, an optical scanner method composed of a laser and a galvanometer mirror, an AFI (Accordion fringe interferometry) method that uses interference fringes generated by superimposing beams divided by a beam splitter, or a projection method using a physical grid composed of a piezo stage and a high-resolution encoder and a moving mechanism.

[0038] The light-receiving unit 120 is positioned above the mounting unit 140. The measurement light reflected upward from the workpiece W towards the mounting unit 140 is collected and imaged by the multiple lenses 122 and 123 of the light-receiving unit 120, and then received by the camera 121.

[0039] Camera 121 is a CCD (charge-coupled device) camera, for example, including an image sensor 121a. Image sensor 121a is, for example, a monochrome CCD (charge-coupled device). Image sensor 121a may be other image sensors such as a CMOS (complementary metal-oxide-semiconductor) image sensor. Color image sensors require each pixel to correspond to the reception of red, green, and blue light, resulting in lower measurement resolution compared to monochrome image sensors, and sensitivity is reduced because each pixel requires a color filter. Therefore, in this embodiment, a monochrome CCD is used as the image sensor, and a color image is acquired by illuminating the workpiece W with illumination corresponding to RGB in a time-division manner using the illumination light output unit 130, which will be described later. With this configuration, a color image of the object to be measured can be acquired without reducing the measurement accuracy. Illumination light output unit 130 is an example of a second light projection unit that irradiates the workpiece W with illumination light. The illumination light can be uniform light.

[0040] A color image sensor may also be used as the image sensor 121a. In this case, although the measurement accuracy and sensitivity will be lower compared to a monochrome image sensor, it will no longer be necessary to irradiate the image sensor with illumination corresponding to RGB in a time-division manner from the illumination light output unit 130. A color image can be acquired simply by irradiating with white light, thus simplifying the illumination optical system. Each pixel of the image sensor 121a outputs an analog electrical signal corresponding to the amount of light received (hereinafter referred to as the "received light signal") to the measurement control unit 150.

[0041] The measurement control unit 150 is equipped with an A / D converter (analog-to-digital converter) and a FIFO (First In First Out) memory (not shown). The light received signal output from the camera 121 is sampled at a constant sampling period and converted into a digital signal by the A / D converter of the measurement control unit 150, based on control by the light source unit 300. The digital signals output from the A / D converter are sequentially stored in the FIFO memory. The digital signals stored in the FIFO memory are sequentially transferred to the controller 200 as pixel data.

[0042] The control unit 250 of the controller 200 may include, for example, a keyboard or a pointing device. Examples of pointing devices include a mouse or a joystick.

[0043] The ROM 220 of the controller 200 stores system programs and the like. The working memory 230 of the controller 200 consists of, for example, RAM (Random Access Memory) and is used for processing various data. The storage device 240 consists of a solid-state drive, a hard disk drive, etc. The storage device 240 stores a reverse engineering program. The storage device 240 is also used to store various data such as pixel data (image data), setting information, and measurement conditions provided by the measurement control unit 150. Measurement conditions include, for example, the settings of the light-emitting unit 110 (pattern frequency, pattern type) and the type of light-receiving unit 120 (low-magnification light-receiving unit, high-magnification light-receiving unit), which are set by the scanner module 260 described later when measuring the shape of the workpiece W. Furthermore, the storage device 240 can also store brightness information, coordinate information, and attribute information for each pixel that makes up the measurement image.

[0044] The CPU210 is a control circuit or control element that processes given signals and data, performs various calculations, and outputs the calculation results. In this specification, CPU refers to an element or circuit that performs calculations, and is used to mean not limited to processors such as CPUs, MPUs, GPUs, and TPUs for general-purpose PCs, regardless of their name, but also including processors such as FPGAs, ASICs, LSIs, microcontrollers, and chipsets such as SoCs.

[0045] The CPU 210 generates image data based on pixel data provided by the measurement control unit 150. The CPU 210 also performs various processing on the generated image data using the working memory 230. For example, based on the light-receiving signal output from the light-receiving unit 120, the CPU 210 generates measurement data representing the three-dimensional shape of the workpiece W contained within the field of view of the light-receiving unit 120 at a specific position on the mounting unit 140. The measurement data is the image itself acquired by the light-receiving unit 120. For example, when measuring the shape of the workpiece W using a phase-shift method, multiple images constitute one set of measurement data. The measurement data may also be point cloud data, which is a collection of points having three-dimensional position information. Measurement data of the workpiece W can be obtained using this point cloud data. Point cloud data is data represented by a collection of multiple points having three-dimensional coordinates.

[0046] The movement control unit 144 determines, based on measurement data of at least a portion of the workpiece W, whether to perform only the rotation of the rotating stage 143 or both the rotation of the rotating stage 143 and the translation of the translation stage 141. This facilitates three-dimensional measurement by automatically determining the imaging range according to the external shape of the workpiece W without the user having to be aware of it. The movement control unit 144 can also control the rotation of the rotating stage 143 after moving the translation stage 141 in the XY direction and then stopping the movement in the XY direction, thereby acquiring the shape around the workpiece W. Furthermore, scanning can also be performed by moving and rotating the workpiece W relative to the measuring unit 100 while the measuring unit 100 is fixed.

[0047] The display unit 400 is a component for displaying stripe projection images acquired by the measurement unit 100, depth images generated based on the stripe projection images, texture images captured by the measurement unit 100, various user interface screens, etc. The display unit 400 is composed of, for example, an LCD panel or an organic EL (electroluminescent) panel. Furthermore, by using a touch panel in the display unit 400, it can also be used in conjunction with the operation unit 250. The display unit 400 can also display images generated by the light receiving unit 120.

[0048] The light source unit 300 includes a control board 310 and an observation illumination light source 320. A CPU (not shown) is mounted on the control board 310. The CPU of the control board 310 controls the light-emitting unit 110, the light-receiving unit 120, and the measurement control unit 150 based on commands from the CPU 210 of the controller 200. Note that this configuration is just one example, and other configurations are possible. For example, the light-emitting unit 110 and the light-receiving unit 120 could be controlled by the measurement control unit 150, or the light-emitting unit 110 and the light-receiving unit 120 could be controlled by the controller 200, thus omitting the control board. Alternatively, a power supply circuit for driving the measurement unit 100 can be provided in this light source unit 300.

[0049] The observation illumination light source 320 includes, for example, three LEDs that emit red, green, and blue light. By controlling the brightness of the light emitted from each LED, the observation illumination light source 320 can generate light of any color. The illumination light IL generated from the observation illumination light source 320 is output from the illumination light output unit 130 of the measurement unit 100 through a light guide member (light guide). In addition to LEDs, other light sources such as semiconductor lasers (LDs), halogen lights, and HIDs can also be used as appropriate for the observation illumination light source. In particular, if a color imaging sensor is used as the image sensor, a white light source can be used for the observation illumination light source.

[0050] The illumination light IL output from the illumination light output unit 130 illuminates the workpiece W by switching between red, green, and blue light in a time-division manner. This allows the texture images captured by these RGB lights to be combined to obtain a color texture image, which can then be displayed on the display unit 400.

[0051] A three-dimensional measurement program and applications for realizing the functions of the three-dimensional scanner 1 are installed on the controller 200. This allows the three-dimensional measurement method according to the present invention to be executed using the three-dimensional scanner 1. The three-dimensional measurement method is a method for measuring the three-dimensional shape of a workpiece W and is executed by a computer in the controller 200. The three-dimensional measurement program that causes the computer to execute the three-dimensional measurement method can be recorded on the storage medium 1000. The storage medium 1000 may be an optical disc such as a CD-ROM or DVD-ROM, or a semiconductor memory such as a memory card.

[0052] In the controller 200, on which the three-dimensional measurement program and application are installed, the CPU 210, ROM 220, working memory 230, storage device 240, etc., constitute the scanner module 260, conversion module 270, integration module 280, and analysis module 290 shown in Figure 5. In this embodiment, the system is divided into four modules: scanner module 260, conversion module 270, integration module 280, and analysis module 290. However, any two or more of these modules 260, 270, 280, and 290 may be integrated to form a single module. Furthermore, parts of each module 260, 270, 280, and 290 may be incorporated into other modules. In other words, the configuration example shown in Figure 5 is just one example and is not limited to the configuration example shown in Figure 5.

[0053] The scanner module 260 acquires image data of the workpiece W by measuring its shape and creates mesh data of the workpiece W based on that image data. The conversion module 270 converts the mesh data created by the scanner module 260 into CAD data. CAD data is three-dimensional shape information composed of analytical surfaces and freeform surfaces, and includes surface data, solid data, and data used for design. Surface data is data of shape surfaces composed of freeform surfaces and analytical surfaces, such as side data and planar data of a cylinder.

[0054] The integration module 280 is responsible for transmitting signals and data from the scanner module 260 to the conversion module 270 and the analysis module 290, and transmitting signals and data from the conversion module 270 to the scanner module 260. In this example, a module is a unit capable of executing multiple arithmetic processes, and can also be called a functional unit, functional block, etc.

[0055] The scanner module 260 includes, for example, a measurement condition setting unit 261, a scanner control unit 262, a point cloud acquisition unit 263a, a mesh data generation unit 263b, a scanner output unit 264, etc. The measurement condition setting unit 261 is the part that sets the measurement conditions for the shape of the workpiece. The scanner control unit 262 is the part that controls the measurement unit 100 according to the measurement conditions set in the measurement condition setting unit 261 to generate image data and acquires measurement data for the workpiece W based on the generated image data.

[0056] The point cloud acquisition unit 263a is responsible for acquiring point cloud data of the workpiece W based on the image data of the workpiece W acquired by the scanner control unit 262. The mesh data generation unit 263b is responsible for acquiring the point cloud data acquired by the point cloud acquisition unit 263a, processing the acquired point cloud data, and converting it into mesh data.

[0057] The scanner output unit 264 is the part that outputs the mesh data created by the mesh data generation unit 263b and additional data to the conversion module 270. The additional data is, for example, data that includes at least one of the measurement conditions and data calculated from the measurement data of the workpiece W.

[0058] The scanner module 260 controls the measurement unit 100 and generates three-dimensional data along with the various conditions under which the shape of the workpiece W was measured (measurement model, measurement magnification, resolution, etc.) and the raw data (e.g., image data) at the time of measurement. The three-dimensional data is mesh data containing multiple polygons and can also be called polygon data. A polygon is data composed of information that identifies multiple points and information that shows the polygonal surface formed by connecting those points. For example, it can consist of information that identifies three points and information that shows the triangular surface formed by connecting those three points. Mesh data and polygon data can also be defined as data represented by a collection of multiple polygons.

[0059] The conversion module 270 converts mesh data into CAD data and determines the conversion process based on measurement conditions and raw data. Specifically, the conversion module 270 includes, for example, a data input unit 271, a processing parameter determination unit 272, a CAD conversion unit 273, and a CAD output unit 274. The data input unit 271 is the part that receives mesh data output from the scanner output unit 264 and additional data. The processing parameter determination unit 272 is the part that determines the processing parameters for converting mesh data into CAD data according to the additional data received by the data input unit 271. The CAD conversion unit 273 is the part that converts mesh data into CAD data according to the processing parameters determined by the processing parameter determination unit 272. The CAD output unit 274 is the part that outputs the CAD data converted by the CAD conversion unit 273.

[0060] The analysis module 290 of the 3D scanner 1 is a module for generating 3D data of a workpiece W placed in different orientations and synthesizing the respective 3D data to generate composite 3D data of the workpiece W. The analysis module 290 has a data acquisition unit 291 that acquires 3D data of the workpiece W placed on the rotating stage 143. The rotating stage 143 is designed so that the user can place the workpiece W in any orientation. For example, to acquire the 3D shapes of the front and back sides of the workpiece W, the workpiece W can be placed on the rotating stage 143 with the front side facing upwards to acquire 3D data, and then the workpiece W can be placed on the rotating stage 143 with the back side facing upwards to acquire 3D data. In addition, to acquire the 3D shape of the side of the workpiece W, the workpiece W can be placed on the rotating stage 143 with the side facing upwards to acquire 3D data. For example, the orientation in which the front side of the workpiece W faces upwards can be defined as the first orientation, and the orientation in which the back side of the workpiece W faces upwards can be defined as the second orientation. Furthermore, the orientation in which the side of the workpiece W faces upwards can be defined as the third orientation. This definition of orientations is merely an example, and any two orientations can be different. For instance, the first, second, and third orientations can be defined according to the shape of the workpiece W and the range from which three-dimensional data is to be acquired. A fourth and fifth orientation may also be defined; the number of orientations is not particularly limited.

[0061] The data acquisition unit 291 acquires first three-dimensional data, which is the three-dimensional data of the workpiece W placed on the rotating stage 143 in a first position, and second three-dimensional data, which is the three-dimensional data of the workpiece W placed on the rotating stage 143 in a second position. Similarly, the data acquisition unit 291 also acquires third three-dimensional data, which is the three-dimensional data of the workpiece W placed on the rotating stage 143 in a third position, fourth three-dimensional data, which is the three-dimensional data of the workpiece W placed on the rotating stage 143 in a fourth position, and so on.

[0062] The mesh data generation unit 263b generates first mesh data, which is the mesh data of the workpiece W positioned in a first position, and second mesh data, which is the mesh data of the workpiece W positioned in a second position. Similarly, the mesh data generation unit 263b can also generate third mesh data, which is the mesh data of the workpiece W positioned in a third position, and fourth mesh data, which is the mesh data of the workpiece W positioned in a fourth position.

[0063] When the mesh data generation unit 263b is generating mesh data, the data acquisition unit acquires the first mesh data and the second mesh data generated by the mesh data generation unit 263b as the first three-dimensional data and the second three-dimensional data, respectively. Similarly, the third mesh data and the fourth mesh data can also be acquired.

[0064] For example, the three-dimensional data (first three-dimensional data) of a workpiece W positioned in a first orientation can be stored in the storage device 240. In this case, the reading unit 292 of the analysis module 290 reads the first three-dimensional data stored in the storage device 240. Similarly, the second, third, and fourth three-dimensional data can be stored in the storage device 240, and in this case, the reading unit 292 reads the second, third, and fourth three-dimensional data from the storage device 240, respectively.

[0065] If CAD data for workpiece W exists, the CAD data for workpiece W can also be stored in the storage device 240. In this case, the reading unit 292 reads the CAD data stored in the storage device 240 from the storage device 240.

[0066] The analysis module 290 has a posture calculation unit 293. The posture calculation unit 293 is the part that calculates a placement posture different from the first placement posture based on the first three-dimensional data acquired by the data acquisition unit 291. Specifically, it calculates a recommended placement posture (hereinafter also simply referred to as "placement posture") different from the first placement posture based on the three-dimensional data read from the storage device 240 by the reading unit 292. The display control unit 255 overlays the recommended placement posture calculated by the posture calculation unit 293 onto the live image acquired by the data acquisition unit 291.

[0067] When calculating an arrangement posture different from the first arrangement posture, the posture calculation unit 293 first identifies the first arrangement posture of the workpiece W based on the first three-dimensional data. By identifying the first arrangement posture, the posture calculation unit 293 can calculate arrangement postures different from this first arrangement posture. The method is not particularly limited, but examples include a method of virtually arranging the measuring unit 100 at regular intervals on a sphere or regular polygon centered on the first three-dimensional data, or a method of approximating the first three-dimensional data with a convex polygon and virtually arranging the measuring unit 100 in a direction facing each face. The distance between the measuring unit 100 and the workpiece can be set based on the focal length of the lens of the measuring unit 100. In this embodiment, since the measuring unit 100 is equipped with a rotating stage 143, for example, the posture calculation unit 293 can calculate multiple arrangement postures by virtually rotating the first three-dimensional data around the rotation axis of the rotating stage 143. When rotating the first three-dimensional data, it is not necessary to rotate it a full 360°, and the rotation angle may be less than 360°.

[0068] Furthermore, if the workpiece W is large, there are cases where the measuring unit 100 needs to be moved parallel to the workpiece W multiple times for scanning. Whether or not this is the case can be determined by the analysis module 290 based on whether or not the first three-dimensional data exceeds the measurable range (length, width, and height) of the measuring unit 100. If the first three-dimensional data exceeds the measurable range of the measuring unit 100, it can be determined that the measuring unit 100 needs to be moved parallel to the workpiece W multiple times for scanning. Conversely, if the first three-dimensional data is within the measurable range of the measuring unit 100, it can be determined that the scanning is possible without moving the measuring unit 100 parallel to the workpiece W multiple times.

[0069] In cases where the measuring unit 100 is moved parallel to the workpiece W multiple times and scanned, the measuring unit 100 is virtually positioned in multiple directions based on the center point obtained by parallel movement so that the measurement range of the measuring unit 100 overlaps by a certain amount and includes the largest portion of the workpiece. Although the method of virtually moving the measuring unit 100 has been described, the method is not limited to this; the workpiece may also be moved or rotated.

[0070] By scanning the workpiece W positioned in the recommended orientation, a second set of three-dimensional data can be obtained, and a second set of mesh data can be generated. Similarly, by scanning the workpiece W positioned in the recommended orientation, a third set of three-dimensional data can be obtained, and a third set of mesh data can be generated. Furthermore, by scanning the workpiece W positioned in the recommended orientation, a fourth set of three-dimensional data can be obtained, and a fourth set of mesh data can be generated.

[0071] The alignment unit 290A of the analysis module 290 is responsible for aligning the first three-dimensional data acquired by the data acquisition unit 291 with the second three-dimensional data. During this alignment, the overlapping region extracted by the extraction unit 290B of the analysis module 290 is used. The extraction unit 290B is responsible for extracting the overlapping region between the first three-dimensional data positioned in a first position and the second three-dimensional data positioned in a second position. The extraction unit 290B can extract the overlapping region using, for example, the normal vector of the three-dimensional data or the color information of the workpiece. In other words, the alignment unit 290A can perform alignment based on the three-dimensional data included in the overlapping region extracted by the extraction unit 290B.

[0072] The analysis module 290 has a synthesis unit 290G. The synthesis unit 290G is the part that synthesizes the first three-dimensional data of the workpiece W positioned in a first position aligned by the alignment unit 290A and the second three-dimensional data of the workpiece W positioned in a second position, and generates synthesized three-dimensional data. The synthesis unit 290G can also acquire the first mesh data as the first three-dimensional data and the second mesh data as the second three-dimensional data. In this case, the synthesis unit 290G synthesizes the first mesh data and the second mesh data and generates synthesized mesh data as synthesized three-dimensional data. The synthesis unit 290G can not only synthesize the first three-dimensional data and the second three-dimensional data, but can also synthesize the third three-dimensional data with the first three-dimensional data and the second three-dimensional data, or synthesize the fourth three-dimensional data with the first three-dimensional data, the second three-dimensional data, and the third three-dimensional data.

[0073] (Workpiece holding member) The workpiece holding member 900 shown in Figures 6 and 7 is a device or apparatus for holding the workpiece W on the rotating stage 143, and can also be called a workpiece holder, workpiece holding device, etc. If the workpiece W is a thin plate, it may be difficult to place it upright on the rotating stage 143. In such cases, the plate-shaped workpiece W can be stabilized by placing it on the rotating stage 143 in a lying position. When placed in this position, the workpiece W is scanned in two positions: one with the front side of the workpiece W facing upwards, and another with the front side of the workpiece W facing downwards, in order to scan the entire workpiece W.

[0074] However, when a plate-shaped workpiece W is laid flat on the stage, the vertical dimension of the side surface of the workpiece W corresponds to the thickness dimension of the workpiece W, and thus becomes shorter. A shorter vertical dimension of the side surface of the workpiece W means that the overlapping area between the two orientations becomes smaller, which may reduce the accuracy when combining the three-dimensional data measured in the two orientations.

[0075] Furthermore, in addition to accuracy considerations, selecting an appropriate scanning posture is crucial for scanning the workpiece W from all directions in fewer attempts. For example, it is conceivable to present the user with a recommended placement posture calculated by the posture calculation unit 293 based on the data obtained in the first scan. However, if the posture calculation unit 293 calculates a placement posture with a small contact area with the rotating stage 143, it may be difficult to perform measurement of the workpiece W in that posture.

[0076] In this embodiment, the workpiece holding member 900 can be used to stably hold the workpiece W on the rotating stage 143, even when the workpiece W is a plate-shaped workpiece that is unstable when placed in an upright position, or when the area of ​​contact between the workpiece W and the rotating stage 143 is small. "Stably holding" means that the workpiece W is not only less likely to fall over during scanning, but also less prone to vibration and less likely to experience minute displacements. The workpiece holding member 900 can be used as needed and is not essential to the three-dimensional scanner 1, but for example, the workpiece holding member 900 may be a component of the three-dimensional scanner 1.

[0077] The workpiece holding member 900 has a first arm (first member) 910 and a second arm (second member) 920 that grip the workpiece W, and an opening / closing hinge 930 that connects the first arm 910 and the second arm 920 so that they can be opened and closed. Figures 6 to 13, 15 and 16 show the first arm 910 and the second arm 920 in a completely closed state. Figure 14 shows the first arm 910 and the second arm 920 in an open state. In this way, the first arm 910 and the second arm 920 can be switched from a closed state to an open state and from an open state to a closed state, and the degree of opening can be set according to the shape and size of the workpiece W.

[0078] In this embodiment, the orientation of the workpiece holding member 900 is defined as shown in each figure. Specifically, the rear side of the workpiece holding member 900 is the side connected by the opening / closing hinge 930, and the front side of the workpiece holding member 900 is the side where the first arm 910 and the second arm 920 open. The front side may also be defined as the front side, and the rear side as the rear side. Furthermore, the right side of the workpiece holding member 900 is the side located to the right when the workpiece holding member 900 is viewed from the front, and the left side of the workpiece holding member 900 is the side located to the left when the workpiece holding member 900 is viewed from the front. The left-right direction may also be defined as the width direction. In addition, the side that is positioned above when the workpiece holding member 900 is used on the rotating stage 143 is defined as the upper side, and the side that is positioned below when the workpiece holding member 900 is used on the rotating stage 143 is defined as the lower side. The up-down direction may also be defined as the thickness direction. This definition of directions is for the convenience of describing the embodiment and does not limit the orientation during use.

[0079] The first arm 910 and the second arm 920 are located on the right and left sides of the workpiece holding member 900, respectively, and can therefore be called the right arm and the left arm. In the plan view shown in Figure 8, the depth direction when fully closed is defined as the longitudinal direction of the first arm 910. The first arm 910 has an external shape that is long in the depth direction. When fully closed, the longitudinal direction of the second arm 920 is approximately parallel to the longitudinal direction of the first arm 910. Therefore, the second arm 920 also has an external shape that is long in the depth direction. In this embodiment, the first direction, which is the longitudinal direction of the first arm 910, and the second direction, which is the longitudinal direction of the second arm 920, are approximately parallel, but the first direction and the second direction may intersect in a plan view.

[0080] The first arm 910 has multiple sides, including a top surface, a bottom surface, and both left and right sides. The bottom surface of the first arm 910 is a first mounting surface 911 that is long in the depth direction. A first magnetic member 911a is provided on the first mounting surface 911. The left side of the first arm 910 includes a first workpiece holding surface 912.

[0081] The first magnetic member 911a is composed of a permanent magnet that generates a magnetic force capable of being attracted to the rotating stage 143, which is made of a magnetic material. If the rotating stage 143 is made of a permanent magnet, the first magnetic member 911a may be made of a magnetic material such as iron, or it may be made of a permanent magnet. The first magnetic member 911a may be composed of a combination of a magnetic material such as iron and a permanent magnet.

[0082] The first magnetic member 911a is positioned in the middle of the longitudinal direction of the first arm 910. The fixing structure for the first magnetic member 911a to the first arm 910 is not particularly limited, but for example, a fixing structure using screws can be cited. In this embodiment, only one first magnetic member 911a is provided, but this is not limited to this, and multiple first magnetic members 911a may be provided. When multiple first magnetic members 911a are provided, they can be provided at intervals from each other in the longitudinal direction of the first arm 910.

[0083] The lower end surface of the first magnetic member 911a is flat. Since the mounting surface 142 of the rotating stage 143 also has a flat portion, when the first magnetic member 911a is attracted to the rotating stage 143, it becomes less likely to wobble relative to the rotating stage 143 and becomes stable. The first magnetic member 911a may be embedded in the first arm 910. The attractive force of the first magnetic member 911a to the rotating stage 143 can be arbitrarily set depending on the type and size of the permanent magnet used. If the rotating stage 143 is made of permanent magnets, the attractive force can be set depending on the type of permanent magnet that makes up the rotating stage 143. In this embodiment, the attractive force of the first magnetic member 911a and the attractive force of the rotating stage 143 are set so that when a typical workpiece W is held by the workpiece holding member 900, the first arm 910 can be firmly attracted to the rotating stage 143 so that the workpiece W does not fall over or wobble.

[0084] Furthermore, the first magnetic member 911a may constitute the first suction part. In this case, the first arm 910 will have the first suction part. The first suction part is the part that applies an attractive force to hold the first mounting surface 911 in contact with the mounting surface (predetermined surface) 142 of the rotating stage 143. The first suction part may be composed of a part of the first arm 910. That is, if a part of the first arm 910 is made of a permanent magnet, the first arm 910 will be the member having the first suction part. Note that the first suction part is not limited to the magnetic member described above, but may also be a pressing member that applies a biasing force to the first arm 910 in order to hold the first mounting surface 911 on the mounting surface (predetermined surface) 142 of the rotating stage 143. Alternatively, the first arm 910 may be magnetized, and the mounting surface (predetermined surface) 142 of the rotating stage 143 may be made of a magnetic material, so that the first mounting surface 911 is held on the mounting surface (predetermined surface) 142 of the rotating stage 143.

[0085] The second arm 920 has multiple sides, including a top surface, a bottom surface, and both left and right sides. The bottom surface of the second arm 920 is a second mounting surface 921 that is long in the depth direction. A second magnetic member 921a, such as a permanent magnet, is provided on the second mounting surface 921. The right side of the second arm 920 includes a second workpiece holding surface 922.

[0086] The second magnetic member 921a, like the first magnetic member 911a, is composed of a permanent magnet that generates a magnetic force capable of attracting the rotating stage 143. If the rotating stage 143 is composed of a permanent magnet, the second magnetic member 921a may be composed of a magnetic material such as iron, or it may be composed of a permanent magnet. The second magnetic member 921a may be composed of a combination of a magnetic material such as iron and a permanent magnet.

[0087] The second magnetic member 921a is positioned in the middle of the second arm 920 in the longitudinal direction. The fixing structure for the second magnetic member 921a to the second arm 920 is not particularly limited, but for example, a fixing structure using screws can be used. In this embodiment, only one second magnetic member 921a is provided, but this is not limited to this, and multiple second magnetic members 921a may be provided. When multiple second magnetic members 921a are provided, they can be provided at intervals from each other in the longitudinal direction of the second arm 920.

[0088] The lower end surface of the second magnetic member 921a is flat. Since the mounting surface 142 of the rotating stage 143 also has a flat portion, when the second magnetic member 921a is attracted to the rotating stage 143, it becomes less likely to wobble relative to the rotating stage 143 and becomes more stable. In particular, since the first magnetic member 911a is provided on the first arm 910 and the second magnetic member 921a is provided on the second arm 920, when the workpiece holding member 900 is placed on the rotating stage 143, at least two points that are far apart from each other are attracted to the rotating stage 143. As a result, the workpiece holding member 900 holding the workpiece W becomes even more stable.

[0089] The second magnetic member 921a may be embedded in the second arm 920. The attractive force of the second magnetic member 921a on the rotating stage 143 can be arbitrarily set depending on the type and size of the permanent magnet used. In this embodiment, the attractive force of the second magnetic member 921a is set so that the second arm 920 can be firmly attached to the rotating stage 143 so that the workpiece W, when held by the workpiece holding member 900, does not fall over or shake.

[0090] Furthermore, a second magnetic member 921a may constitute a second suction portion. In this case, the second arm 920 will have a configuration that includes the second suction portion. The second suction portion is the part that applies an attractive force to hold the second mounting surface 921 in contact with the mounting surface (a predetermined surface) 142 of the rotating stage 143. The second suction portion may be composed of a part of the second arm 920. That is, if a part of the second arm 920 is made of a permanent magnet, the second arm 920 will be the member having the second suction portion. Note that the second suction portion is not limited to the magnetic member described above, but may also be a pressing member that applies a biasing force to the second arm 920 in order to hold the second mounting surface 921 on the mounting surface (a predetermined surface) 142 of the rotating stage 143. Alternatively, the second arm 920 may be magnetized, and the mounting surface (predetermined surface) 142 of the rotating stage 143 may be made of a magnetic material, so that the second mounting surface 911 is held on the mounting surface (predetermined surface) 142 of the rotating stage 143.

[0091] Although not shown in the figures, only one of the first magnetic member 911a and the second magnetic member 921a may be provided. Also, only one of the first adsorption part and the second adsorption part may be provided.

[0092] Furthermore, when the first magnetic member 911a and the second magnetic member 921a are provided, the workpiece W can be supported at three points by the contact point between the workpiece W and the mounting surface, the first magnetic member 911a as the first adsorption part, and the second magnetic member 921a as the second adsorption part, thereby enabling more stable holding of the workpiece W.

[0093] As shown in Figure 16, the opening / closing hinge 930 is composed of a pivot axis extending in the vertical direction. The opening / closing hinge 930 is provided at the rear end (one end in the first direction) of the workpiece holding member 900, and the rear end of the first arm 910 and the rear end of the second arm 920 are connected by the opening / closing hinge 930. The opening / closing hinge 930 serves as the axis of rotation when adjusting the relative positional relationship between the first arm 910 and the second arm 920 by the position adjustment mechanism 940, which will be described later.

[0094] A first holding portion 915 is provided at the front end of the first arm 910. Specifically, a first recess 910a is formed at the front end of the first arm 910, opening towards the second arm 920. The base of the first holding portion 915 is housed within the first recess 910a. A first support shaft 916 is provided in the first recess 910a of the first arm 910, which rotatably supports the base of the first holding portion 915. The first support shaft 916 extends in the vertical direction, and the first holding portion 915 rotates around the first support shaft 916. A first workpiece holding surface 912 is formed on the end face of the first holding portion 915. The first workpiece holding surface 912 is oriented to the left, but its orientation can be changed by the rotation of the first holding portion 915 around the first support shaft 916. For example, as shown in Figure 14, even when the first arm 910 and the second arm 920 are opened, the first workpiece holding surface 912 can remain facing left by rotating the first holding part 915 around the first pivot shaft 916. Furthermore, depending on the shape and size of the workpiece W, the first holding part 915 can be rotated around the first pivot shaft 916 to allow the first workpiece holding surface 912 to make stable contact with the surface of the workpiece W over as wide an area as possible.

[0095] A second holding portion 925 is also provided at the front end of the second arm 920, similar to the first arm 910. Specifically, a second recess 920a is formed at the front end of the second arm 920, opening towards the first arm 910. The base of the second holding portion 925 is housed within the second recess 920a. The second arm 920 has a second support shaft 926 provided within the second recess 920a that rotatably supports the base of the second holding portion 925. The second support shaft 926 extends in the vertical direction, and the second holding portion 925 rotates around the second support shaft 926. A second workpiece holding surface 922 is formed on the end face of the second holding portion 925. The second workpiece holding surface 922 is oriented to the right, but its orientation can be changed in the same way as the first workpiece holding surface 912 by rotating the second holding part 925 around the second support shaft 926. Since the first workpiece holding surface 912 and the second workpiece holding surface 922 are configured to be rotatable by the first support shaft 916 and the second support shaft 926, the first workpiece holding surface 912 and the second workpiece holding surface 922 can be kept substantially parallel regardless of the shape and size of the workpiece W, making it possible to hold the workpiece W more stably.

[0096] As shown in Figure 16, a first through-hole 913 is formed in the longitudinal middle portion of the first arm 910, penetrating in the direction of moving toward and away from the second arm 920 (left-right direction). The first through-hole 913 opens on both the left and right sides of the first arm 910.

[0097] A second through-hole 923 is formed in the longitudinal middle portion of the second arm 920, penetrating in the direction of moving toward and away from the first arm 910 (left-right direction). The second through-hole 923 opens on both the left and right sides of the second arm 920.

[0098] The workpiece holding member 900 is equipped with a position adjustment mechanism 940 that adjusts the relative positional relationship between the first arm 910 and the second arm 920. The position adjustment mechanism 940 defines the positional relationship between the first arm 910 and the second arm 920 so that the first workpiece holding surface 912 and the second workpiece holding surface 922 face each other when the first mounting surface 911 of the first arm 910 and the second mounting surface 921 of the second arm 920 are both facing downwards, and is a mechanism that moves the first arm 910 and the second arm 920 relative to each other in a direction in which the first workpiece holding surface 912 and the second workpiece holding surface 922 move toward and away from each other.

[0099] Specifically, the position adjustment mechanism 940 includes a rotating bolt 941, a bearing nut 942 provided on the first arm 910, and a tip retaining portion 943 provided on the second arm 920. The bearing nut 942 is housed inside the first through hole 913 of the first arm 910 and is rotatably supported around an axis extending vertically relative to the first arm 910. In other words, the bearing nut 942 is rotatably supported around an axis perpendicular to the axial direction of the rotating bolt 941 relative to the first arm 910.

[0100] The bearing nut 942 has a threaded hole 942a that penetrates in the left-right direction (a direction perpendicular to the axial direction during rotation). The threaded shaft portion 941a of the rotating bolt 941 is screwed into the threaded hole 942a of the bearing nut 942 and penetrates the bearing nut 942 when it is positioned to extend in the left-right direction.

[0101] The tip holder portion 943 is housed inside the second through hole 923 of the second arm 920. A fitting hole 943a is formed on the right side of the tip holder portion 943, which is open to the right. The tip of the screw shaft portion 941a fits into the fitting hole 943a, and by fitting the tip of the screw shaft portion 941a into the fitting hole 943a, the tip holder portion 943 holds the tip of the rotating bolt 941. The fitting hole 943a is formed to prevent the screw shaft portion 941a from coming out by preventing relative movement of the screw shaft portion 941a in the left-right direction with respect to the tip holder portion 943 when the tip of the screw shaft portion 941a is fitted into it, while allowing rotation of the screw shaft portion 941a relative to the tip holder portion 943. As will be described later, the tip holder portion 943 is supported by the second arm 920 via a release lever 960.

[0102] An operating knob 941b is provided at the base end of the rotating bolt 941. The user can rotate the rotating bolt 941 by holding the knob 941b, and by rotating the rotating bolt 941, the relative positional relationship between the rotating bolt 941 and the bearing nut 942 can be changed, thereby adjusting the relative positional relationship between the first retaining part 915 and the second retaining part 925.

[0103] When the rotating bolt 941 is rotated in a direction that moves it to the left relative to the bearing nut 942, the first arm 910 and the second arm 920 can be opened, as shown in Figure 14. Conversely, when the rotating bolt 941 is rotated in a direction that moves it to the right relative to the bearing nut 942, the first arm 910 and the second arm 920 can be closed until the first workpiece holding surface 912 and the second workpiece holding surface 922 come into contact, as shown in Figure 8, etc. In this way, by rotating the rotating bolt 941, the opening angle between the first arm 910 and the second arm 920 can be changed almost steplessly.

[0104] After opening the first arm 910 and the second arm 920, the workpiece W is placed between the first workpiece holding surface 912 and the second workpiece holding surface 922. Then, by rotating the rotary bolt 941 in the direction that closes the first arm 910 and the second arm 920, the first workpiece holding surface 912 and the second workpiece holding surface 922 can be brought into contact with the surface of the workpiece W. By tightening the rotary bolt 941, the workpiece W can be clamped between the first workpiece holding surface 912 and the second workpiece holding surface 922.

[0105] In this embodiment, the release lever 960 makes it easy to switch to a clamped state in which the workpiece W is clamped with stronger force, and to switch from the clamped state to the non-clamped state. Specifically, as shown in Figure 8, the workpiece holding member 900 is pivotably supported on the second arm 920 and includes a release lever 960 for changing the relative position between the first workpiece holding surface 912 and the second workpiece holding surface 922 by the pivoting motion. As shown in Figure 16, the release lever 960 has a base end portion 961 housed inside the second through hole 923 of the second arm 920 and an operating portion 962 extending to the left from the base end portion 961. The operating portion 962 is provided so as to protrude from the left side of the second arm 920 (one side opposite to the second workpiece holding surface 922).

[0106] The base end 961 is supported inside the second through hole 923 so as to be rotatable about an axis that extends vertically relative to the second arm 920. The base end 961 is provided with a vertically extending pin portion 961a. This pin portion 961a is inserted into a retaining hole 943b formed in the left portion of the tip retaining portion 943. Thus, the left portion of the tip retaining portion 943 is connected to the base end 961 of the release lever 960 via the pin portion 961a.

[0107] The holding hole 943b is an elongated hole in the depth direction of the workpiece holding member 900. As shown in Figure 16, when the release lever 960 is swung inward to the locked position, the tip holding portion 943, which is connected to the release lever 960 by the pin portion 961a, is displaced to the left. This pulls the rotating bolt 941 to the left, allowing a force to be applied in the closing direction to the first arm 910 and the second arm 920. At this time, if the workpiece W is positioned so as to be in contact with the first workpiece holding surface 912 and the second workpiece holding surface 922, the workpiece holding member 900 will grip the workpiece W with strong force.

[0108] On the other hand, as shown in Figure 18, when the release lever 960 is swung towards the front to the unlocked position, the tip holding part 943 is displaced to the right. This pushes the rotating bolt 941 to the right, causing the first arm 910 and the second arm 920 to act in an opening direction. As a result, the workpiece holding member 900 switches from a clamped state to a non-clamped state. In other words, the workpiece holding member 900 can be switched from a clamped state to a non-clamped state, and from a non-clamped state to a clamped state, simply by swinging the release lever 960. Note that the release lever 960 only needs to be operated when necessary, and if the workpiece W can be held without swinging the release lever 960, the operation of the release lever 960 can be omitted.

[0109] A protrusion 920b is provided on the left side of the second arm 920. The protrusion 920b is located away from the operating part 962 of the release lever 960 towards the front of the workpiece holding member 900, and the protrusion 920b and the operating part 962 are spaced apart in the depth direction. The protrusion 920b can be used as a place for the user to grip when swinging the release lever 960 towards the user. For example, by placing the index finger or the like on the protrusion 920b and the thumb on the operating part 962 of the release lever 960, it becomes easier to apply force when swinging the release lever 960 towards the user.

[0110] As shown in Figure 13, the second arm 920 is provided with a spring 980 that constantly presses the release lever 960 in the locking direction.

[0111] Figure 19 shows a modified workpiece holding member 900 according to this embodiment. Identification members 900A are provided on the side surfaces of the first arm 910 and the second arm 920 of the workpiece holding member 900. The identification members 900A are, for example, members with AR (augmented reality) markers, two-dimensional codes, etc. The light receiving unit 120 of the measurement unit 100 receives reflected light from the workpiece W, enabling simultaneous measurement of the workpiece W and imaging of the identification members 900A. The identification members 900A can be acquired as an image and recognized by the analysis module 290 of the measurement unit 100. In addition, three-dimensional data of the workpiece holding member 900 is pre-stored in the storage device 240.

[0112] The analysis module 290 identifies the position and orientation of the workpiece holding member 900 by recognizing the identification member 900A. The analysis module 290 uses the information regarding the position and orientation of the identified workpiece holding member 900 and the three-dimensional data of the workpiece holding member 900 stored in the storage device 240 to automatically perform a removal process to remove the three-dimensional data of the workpiece holding member 900 that is present in the scan range. As a result, the data acquisition unit 291 can acquire three-dimensional data of the workpiece W that does not contain the workpiece holding member 900.

[0113] When using the workpiece holding member 900, the workpiece W is held on the rotating stage 143 by being sandwiched between the first holding portion 915 provided on the first arm 910 and the second holding portion 925 provided on the second arm 920. At this time, before the workpiece W is held by the workpiece holding member 900, the workpiece holding member 900 is placed on the rotating stage 143. Then, the first magnetic member 911a and the second magnetic member 921a are attracted to the rotating stage 143. When adjusting the relative positional relationship between the first arm 910 and the second arm 920 by the position adjustment mechanism 940 while the first magnetic member 911a and the second magnetic member 921a maintain their attracted state to the rotating stage 143, and by rotating the rotating bolt 941, the first arm 910 and the second arm 920 slide relative to the rotating stage 143 with the opening / closing hinge 930 as the axis of rotation. In other words, the attractive forces of the first magnetic member 911a and the second magnetic member 921a are set such that when the opening angle between the first arm 910 and the second arm 920 is changed by the position adjustment mechanism 940, the first magnetic member 911a and the second magnetic member 921a are allowed to slide relative to the rotating stage 143. When adjusting the position with the position adjustment mechanism 940, the release lever 960 is set to the unlocked position.

[0114] The positional relationship between the first arm 910 and the second arm 920 is adjusted by the position adjustment mechanism 940 to hold the workpiece W between the first holding part 915 and the second holding part 925, and then the release lever 960 is set to the locked position. This makes it possible to keep even thin or elongated workpieces W stable in an upright position on the rotating stage 143.

[0115] Instead of the configuration in which the first arm 910 and the second arm 920 are connected by an opening / closing hinge 930, the first arm 910 and the second arm 920 may be connected to a guide rail. In this case, the first arm 910 and the second member 920 can be moved relative to each other along the guide rail by rotating the rotating bolt 941.

[0116] The embodiments described above are merely illustrative in all respects and should not be interpreted restrictively. Furthermore, any modifications or changes within the equivalent scope of the claims are all within the scope of the present invention. The adsorption portion in this embodiment is composed of a permanent magnet, but is not limited to this; for example, the adsorption portion may be composed of an adhesive, bonding agent, etc. Also, height adjustment members may be detachably attached to the first magnetic member 911a and the second magnetic member 921a. The height adjustment member is a member having a predetermined dimension in the vertical direction. The upper surface of the height adjustment member is attracted to, for example, the first magnetic member 911a, while the lower surface of the height adjustment member is attracted to, for example, the rotating stage 143. Furthermore, as described above, the workpiece holding member 900 can be attached to the rotating stage 143 in a position where the opening and closing directions of the first arm 910 and the second arm 920 are horizontal, as well as in a position where the opening and closing directions of the first arm 910 and the second arm 920 are vertical, or in a position where the opening and closing directions of the first arm 910 and the second arm 920 are inclined with respect to the horizontal plane. In short, the position in which the workpiece holding member 900 is used is not particularly limited. [Industrial applicability]

[0117] As described above, the workpiece holding member according to the present invention can be used to hold various workpieces in a predetermined position. [Explanation of Symbols]

[0118] 1. Three-dimensional scanner 900 Workpiece holding member 910 First arm (first component) 911 First mounting surface 911a First magnetic member 912 First workpiece holding surface 913 First through hole 920 Second arm (second component) 921 Second mounting surface 921a Second magnetic member 922 Second workpiece holding surface 923 Second through hole 920b protrusion 930 Opening / Closing Hinge 940 Position adjustment mechanism 941 Rotary Bolt 942 Bearing nut 943 Tip holding part 960 Release Lever 900A Identification Member

Claims

1. A first member having an external shape elongated in a first direction, and having a plurality of sides including a first mounting surface and a first workpiece holding surface elongated in the first direction, with a first magnetic member provided on the first mounting surface, A second member having an external shape elongated in a second direction, and having multiple sides including a second mounting surface and a second workpiece holding surface elongated in the second direction, with a second magnetic member provided on the second mounting surface, The positional relationship between the first member and the second member is defined such that the first mounting surface and the second mounting surface face each other while the first mounting surface and the second mounting surface face the same direction, and a position adjustment mechanism is provided to move the first member and the second member relative to each other in a direction such that the first workpiece holding surface and the second workpiece holding surface move toward and away from each other. A workpiece holding member equipped with the following features.

2. A first member having an external shape elongated in a first direction, and having multiple sides including a first mounting surface and a first workpiece holding surface, A second member having an external shape that is elongated in a second direction, and having multiple sides including a second mounting surface and a second workpiece holding surface that are elongated in the second direction, The positional relationship between the first member and the second member is defined such that the first mounting surface and the second mounting surface face each other while the first mounting surface and the second mounting surface face the same direction, and a position adjustment mechanism is provided to move the first member and the second member relative to each other in a direction such that the first workpiece holding surface and the second workpiece holding surface move toward and away from each other. A suction part that applies an adsorption force to hold the first mounting surface and the second mounting surface in contact with a predetermined surface, A workpiece holding member equipped with the following features.

3. A workpiece holding member that holds a workpiece by sandwiching it between a first holding portion provided on a first member and a second holding portion provided on a second member, A position adjustment mechanism comprising a rotating bolt, a bearing nut through which the rotating bolt passes, and a tip holding portion that holds the tip of the rotating bolt, wherein the relative positional relationship between the rotating bolt and the bearing nut is changed by rotating the rotating bolt, and the relative positional relationship between the first holding portion and the second holding portion is adjusted. A first member having a first magnet that is attracted to a magnetic stage, the first holding part, and the bearing nut, A second member having a second magnet that is attracted to the magnetic stage, a second holding portion, and a tip holding portion, The device includes an opening / closing hinge that serves as the axis of rotation for adjusting the relative positional relationship between the first member and the second member by the position adjustment mechanism, and connects the first member and the second member. The first member and the second member maintain their attracted state to the magnetization stage by the first magnet and the second magnet when their positional relationship is adjusted by the position adjustment mechanism, and slide relative to the magnetization stage with the opening / closing hinge as the axis of rotation by rotating the rotating bolt, thereby forming a workpiece holding member.

4. In the workpiece holding member according to claim 1, The position adjustment mechanism includes a rotating bolt, a bearing nut provided on the first member through which the rotating bolt passes, and a tip holding portion provided on the second member that holds the tip of the rotating bolt, and is a workpiece holding member.

5. In the workpiece holding member according to claim 4, The invention further comprises an opening and closing hinge connecting the first member and the second member, A workpiece holding member in which the opening angle between the first member and the second member changes by rotating the aforementioned rotating bolt.

6. In the workpiece holding member according to claim 4, A workpiece holding member wherein the first member and the second member are connected to a guide rail, and the first member and the second member are moved relative to each other along the guide rail by rotating a rotating bolt.

7. In the workpiece holding member according to claim 1, A workpiece holding member, wherein the first member is provided with a first pivot shaft for rotating a first holding portion having the first workpiece holding surface.

8. In the workpiece holding member according to claim 4, A workpiece holding member is provided with a tip holding portion to which a release lever is pivotably supported relative to the second member, and which changes the relative position between the first workpiece holding surface and the second workpiece holding surface by the pivoting motion.

9. In the workpiece holding member according to claim 8, The operating portion of the release lever is provided so as to protrude from one side of the second member that is opposite to the second workpiece holding surface. A workpiece holding member wherein a protrusion is provided on one side surface of the second member.

10. In the workpiece holding member according to claim 4, The bearing nut is supported on the first member so as to be rotatable around an axis perpendicular to the axial direction of the rotating bolt, and is a workpiece holding member.

11. In the workpiece holding member according to claim 4, The first member has a first through hole that penetrates it in a direction toward and away from the second member. The bearing nut is a workpiece holding member provided inside the first through hole.

12. In the workpiece holding member according to claim 4, The second member has a second through-hole that penetrates it in a direction away from the first member. The aforementioned tip holding portion is a workpiece holding member provided inside the second through hole.

13. In the workpiece holding member according to claim 5, One end of the first member in the first direction and one end of the second member in the second direction are connected by the opening / closing hinge. The first member has the first workpiece holding surface at the other end in the first direction, The second member has the second workpiece holding surface at the other end in the second direction, The bearing nut is provided on the intermediate portion of the first member in the first direction. A workpiece holding member wherein the tip holding portion is provided at the intermediate portion of the second member in the second direction.

14. In the workpiece holding member according to claim 1, The first magnetic member is positioned in the middle of the first member in the first direction, The second magnetic member is a workpiece holding member positioned at the intermediate portion of the second member in the second direction.

15. In the workpiece holding member according to claim 1, A workpiece holding member is provided on the side surface of the first member, which is recognizable by a measuring device that measures the three-dimensional shape of the workpiece.

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