Degassing device

Abstract

To provide a degassing device that has a configuration that allows it to exert its maximum degassing capacity even when installed in a limited space. [Solution] This degassing device 1 comprises a housing 100, a degassing area 111 provided inside the housing 100 for degassing dissolved gas from the solution to be processed, a gas permeable tube 200 arranged in the degassing area 111 for passing the solution to be processed, a depressurization line 300 provided in the housing 100 to reduce the pressure of the degassing area 111 and communicating with the degassing area 111, an introduction section 130 provided in the housing 100 for introducing the solution to be processed L into the gas permeable tube 200, and an outlet section 140 provided in the housing 100 for leading the degassed solution to be processed from the gas permeable tube 200 to the outside of the housing 100, wherein the gas permeable tube 200 includes a first wound section 200A and a second wound section 200B wound in the degassing area 111.

Description

Technical Field

[0001] This invention relates to a degassing device.

Background Art

[0002] Dissolved gas in the solution to be treated causes corrosion of the pipe through which the solution to be treated flows, reduction in pressure and heat exchange rate due to the generation of bubbles, and uneven application of the solution to be treated due to the generated bubbles. Therefore, depending on the method of use and purpose of use of the solution to be treated, degassing of the dissolved gas in the solution to be treated is necessary. Examples of applications where degassing of high purity is required include, in particular, the manufacturing process of semiconductor elements. For example, degassing of helium (He) from the solution to be treated can be mentioned.

[0003] A general structure of a degassing device has a double structure in which a gas-permeable tube (hereinafter referred to as a gas-permeable tube) is installed inside a sealed decompression chamber. By flowing the solution to be treated (chemical material) through the gas-permeable tube and decompressing (vacuuming) the space between the outer chamber and the gas-permeable tube, the dissolved gas dissolved inside the solution to be treated passing through the gas-permeable tube is degassed from the solution to be treated.

[0004] For the gas-permeable tube, materials such as fluororesin materials and polyolefins are used. Examples of fluororesin materials include polytetrafluoroethylene (PTFE), perfluoroalkoxyalkane (PFA), ethylene-tetrafluoroethylene copolymer (ETFE), polychlorotrifluoroethylene (PCTFE), and the like. Examples of materials such as polyolefins include polyethylene (PE), polypropylene (PP), and the like.

[0005] As an example of the above-described degassing device, those disclosed in Patent Document 1 (Japanese Patent Application Laid-Open No. 2007-319854) and Patent Document 2 (Japanese Patent Application Laid-Open No. 2017-181110) can be mentioned.

Prior Art Documents

Patent Documents

[0006] [Patent Document 1] Japanese Patent Publication No. 2007-319854 [Patent Document 2] Japanese Patent Publication No. 2017-181110 [Overview of the project] [Problems that the invention aims to solve]

[0007] The degassing device disclosed in Patent Document 1 has a structure in which gas-permeable tubes are bundled together to form a U-shaped tube and housed inside a decompression chamber.

[0008] The degassing device disclosed in Patent Document 2 is a degassing device for use in liquid chromatographs and the like, but the degassing tube disclosed is in a state where it is wound in a loop shape multiple times.

[0009] The degassing devices disclosed in Patent Documents 1 and 2 do not pose a problem in locations where a large space can be secured. However, when considering housing the degassing device in a limited space, for example, as part of a series of large devices, the configuration was not designed to maximize the degassing capacity.

[0010] This technology was developed to solve the above-mentioned problems, and aims to provide a degassing device that has a configuration that can exert maximum degassing capacity even when installed in a limited space. [Means for solving the problem]

[0011] This technology provides the following degassing device. [1] A degassing apparatus for degassing dissolved gas from a solution to be processed, comprising: a housing; a degassing area provided inside the housing for degassing the dissolved gas from the solution to be processed; a gas-permeable tube arranged in the degassing area for passing the solution to be processed; a depressurization line provided in the housing so as to communicate with the degassing area in order to reduce the pressure of the degassing area; an introduction section provided in the housing for introducing the solution to be processed into the gas-permeable tube; and an outlet section provided in the housing for leading the degassed solution to be processed out of the housing from the gas-permeable tube, wherein the gas-permeable tube includes a first wound section and a second wound section within the degassing area.

[0012] [2] The degassing device according to [1], wherein the housing comprises a main body that constitutes the degassing area by an internal space, and a lid that seals the degassing area and is fixed to the main body, and when the direction extending from the bottom surface of the degassing area to the lid is defined as the direction of the central axis, the first winding portion has a form in which it is wound spirally along the central axis, and the second winding portion has a form in which it is wound spirally along the central axis on the outer circumference side of the first winding portion.

[0013] [3] The degassing device according to [2], wherein the degassing area includes a plurality of first guide pins arranged at predetermined intervals on a circumference of a first radial distance around the central axis and a plurality of second guide pins arranged at predetermined intervals on a circumference of a second radial distance greater than the first radial distance around the central axis, the first winding portion is wound spirally along the outside of the plurality of first guide pins and the second winding portion is wound spirally along the outside of the plurality of second guide pins.

[0014] [4] The degassing device according to [3], further comprising a third winding section and a fourth winding section, wherein the third winding section is spirally wound around the central axis on the outer circumference side of the second winding section, and the fourth winding section is spirally wound around the central axis on the outer circumference side of the third winding section, wherein a plurality of third guide pins are arranged at predetermined intervals on a circumference of a circle with a third radial distance greater than the second radial distance around the central axis, and a plurality of fourth guide pins are arranged at predetermined intervals on a circumference of a circle with a fourth radial distance greater than the third radial distance around the central axis, the third winding section is spirally wound around the outside of the plurality of third guide pins, and the fourth winding section is spirally wound around the outside of the plurality of fourth guide pins.

[0015] [5] The degassing device according to [4], wherein one end of each of the first guide pin, the second guide pin, the third guide pin, and the fourth guide pin is fixed to the first support plate, and the other end of each is fixed to the second support plate, and the gas permeable tube is wrapped around the outer circumference of each of the first guide pin, the second guide pin, the third guide pin, and the fourth guide pin, and the unitized state in which the first winding portion, the second winding portion, the third winding portion, and the fourth winding portion are provided is housed in the housing.

[0016] [6] The degassing device according to [5], wherein the first winding portion is wound from the side of the first support plate toward the side of the second support plate, the second winding portion is folded back on the side of the second support plate and wound toward the side of the first support plate, the third winding portion is folded back on the side of the first support plate and wound toward the side of the second support plate, and the fourth winding portion is folded back on the side of the second support plate and wound toward the side of the first support plate, and one end and the other end of the gas permeable tube are located toward the side of the first support plate.

[0017] [7] The casing has a main body portion that constitutes the degassing area by an internal space, and a lid that closes the degassing area in a sealed state and is fixed to the main body portion. When the direction extending from the bottom surface of the degassing area toward the lid side is defined as the direction of the central axis, the first winding portion has a form wound in a spiral shape along the circumference of the central axis, and the second winding portion is stacked on the first winding at the central axis (CL) and has a form wound in a spiral shape along the circumference of the central axis. The degassing device according to [1].

[0018] [8] The gas-permeable tube is a fluororesin material or a polyolefin resin. The degassing device according to [1].

Advantages of the Invention

[0019] An object of this disclosure is to provide a degassing device having a configuration capable of exhibiting maximum degassing ability even when arranged in a limited space.

Brief Description of the Drawings

[0020] [Figure 1] It is a perspective view showing the configuration of the degassing device of the embodiment. [Figure 2] It is a longitudinal sectional view of the degassing device of the embodiment. [Figure 3] It is an overall perspective view of the gas-permeable tube assembly unit of the embodiment. [Figure 4] It is a partial perspective view of the gas-permeable tube assembly unit of the embodiment. [Figure 5] It is a longitudinal sectional view of the gas-permeable tube assembly unit of the embodiment. [Figure 6] It is a schematic plan view showing the wound form of the gas-permeable tube of another form. [Figure 7] It is a schematic longitudinal sectional view showing the wound form of the gas-permeable tube of another form.

Modes for Carrying Out the Invention

[0021] A degassing apparatus according to an embodiment based on this disclosure will be described below with reference to the drawings. In the embodiments described below, when the number, quantity, etc. are mentioned, the scope of the present invention is not necessarily limited to the number, quantity, etc., unless otherwise specified. The same reference numeral will be used for the same part or equivalent part, and redundant descriptions will not be repeated. It is intended from the outset that the configurations in the embodiments will be used in appropriate combinations.

[0022] In this disclosure, the terms “comprise,” “include,” and “have” are in open-ended form. That is, if a certain configuration is included, other configurations may or may not be included.

[0023] [Embodiment: Degassing device 1] The schematic configuration of the degassing device 1 of this embodiment will be described with reference to Figures 1 and 2. Figure 1 is a perspective view showing the configuration of the degassing device 1, and Figure 2 is a longitudinal cross-sectional view of the degassing device 1.

[0024] The degassing device 1 is for degassing dissolved gas from a solution L to be processed. The degassing device 1 comprises a housing 100 that constitutes a vacuum chamber, a degassing area 111 provided inside the housing 100 for degassing dissolved gas from the solution L to be processed, a gas permeable tube 200 arranged in the degassing area 111 for passing the solution L to be processed, a depressurization line 300 provided in the housing 100 to reduce the pressure of the degassing area 111 and communicating with the degassing area 111, an introduction section 130 provided in the housing 100 for introducing the solution L to be processed into the gas permeable tube 200, and an outlet section 140 provided in the housing 100 for guiding the degassed solution to be processed from the gas permeable tube 200 to the outside of the housing 100. In the degassing area 111, the degassed dissolved gas is taken out to the outside of the housing 100 through the depressurization line 300.

[0025] The housing 100 is equipped with a leak sensor 500 for detecting leakage of the solution L to be processed into the degassing area 111.

[0026] The housing 100 includes a main body 110 that constitutes the degassing area 111 and a lid 120 that is fixed by bolts or the like to make the degassing area 111 airtight. The main body 110 and the lid 120 are made of metal and are constructed to withstand pressure reduction in the degassing area 111. In this embodiment, the degassing area 111 has a roughly cylindrical shape, with a maximum diameter of about 140 mm and a height of about 90 mm. The pressure inside the housing 100 is maintained at atmospheric pressure before pressure reduction, and once pressure is reduced by the pressure reduction line 300, it is maintained at that pressure.

[0027] In this embodiment, a gas permeable tube 200 is placed in the degassing area 111, and a unitized gas permeable tube assembly unit 400, which includes at least a wound first winding section 200A and a wound second winding section 200B, is placed in the degassing area 111.

[0028] When the direction extending from the bottom surface 111b of the degassing area 111 towards the lid portion 120 is defined as the direction of the central axis CL, the first winding portion 200A and the second winding portion 200B of the gas permeable tube 200 are wound around the central axis CL.

[0029] The gas permeable tube 200 can be made of a fluororesin material or a polyolefin-based resin material. Examples of fluororesin materials include polytetrafluoroethylene (PTFE), perfluoroalkoxyalkane (PFA), ethylene-tetrafluoroethylene copolymer (ETFE), and polychlorotrifluoroethylene (PCTFE). Examples of polyolefin-based resin materials include polyethylene (PE) and polypropylene (PP). The outer diameter of the gas permeable tube 200 is approximately 4 mm as an example, but gas permeable tubes 200 with other outer diameters may also be used.

[0030] (Gas-permeable tube assembly unit 400) The gas permeable tube assembly unit 400 will be described with reference to Figures 3 to 5. Figure 3 is an overall perspective view of the gas permeable tube assembly unit 400, Figure 4 is a partial perspective view of the gas permeable tube assembly unit 400, and Figure 5 is a longitudinal cross-sectional view of the gas permeable tube assembly unit 400.

[0031] The gas-permeable tube assembly unit 400 includes a disc-shaped first support plate 480 and a second support plate 490 which is positioned opposite the first support plate 480 and has the same shape as the first support plate 480.

[0032] Between the first support plate 480 and the second support plate 490 are eight first guide pins P1 arranged at predetermined intervals on a circumference with a first radial distance r1 around the central axis Cl, and eight second guide pins P2 arranged at predetermined intervals on a circumference with a second radial distance r2 greater than the first radial distance r1 around the central axis CL.

[0033] Furthermore, in this embodiment, eight third guide pins P3 are arranged at predetermined intervals on the circumference of a circle with a third radial distance r3 greater than the second radial distance r2 around the central axis CL; eight fourth guide pins P4 are arranged at predetermined intervals on the circumference of a circle with a fourth radial distance r4 greater than the third radial distance r3 around the central axis CL; and eight fifth guide pins P5 are arranged at predetermined intervals on the circumference of a circle with a fifth radial distance r5 greater than the fourth radial distance r4 around the central axis CL.

[0034] Each guide pin is fixed to the outside of the first support plate 480 and the second support plate 490 using screws 470. The gas permeable tube 200 is a single tube that is wound around the outer circumference of the first guide pin P1 to the fourth guide pin P4. The winding state of the gas permeable tube 200 wound around the outer circumference of the fourth guide pin P4 is maintained by the inside of the fifth guide pin P5.

[0035] As shown in Figure 5, the gas-permeable tube 200 is wound spirally (10 times) along the outside of the first guide pin P1, from the side of the first support plate 480 toward the side of the second support plate 490 (in the figure, from bottom to top), to form the first winding section 200A.

[0036] The gas-permeable tube 200 that reaches the side of the second support plate 490 is folded back on the side of the second support plate 490 and wound spirally (10 times) along the outside of the second guide pin P2 from the side of the second support plate 490 toward the side of the first support plate 480 (in the figure, from top to bottom), forming the second winding section 200B.

[0037] The gas-permeable tube 200 that reaches the side of the first support plate 480 is folded back on the side of the first support plate 480 and wound spirally (10 times) along the outside of the third guide pin P3 from the side of the first support plate 480 toward the side of the second support plate 490 (in the figure, from bottom to top), forming the third winding section 200C.

[0038] The gas-permeable tube 200 that reaches the side of the second support plate 490 is folded back on the side of the second support plate 490 and wound spirally (10 times) along the outside of the fourth guide pin P4 from the side of the second support plate 490 toward the side of the first support plate 480 (in the figure, from top to bottom), forming the fourth winding section 200D.

[0039] Both the one end 200x and the other end 200y of the gas-permeable tube 200 are located on the side of the first support plate 480, with one end connected to the introduction section 130 and the other end connected to the outlet section 140.

[0040] The number of guide pins used in the gas permeable tube assembly unit 400 described above, and the number of winding stages of the gas permeable tube 200, are appropriately selected according to the required degassing performance of the gas permeable tube assembly unit 400, and are not limited to the above quantities and stages.

[0041] In this example, one end 200x and the other end 200y of the gas-permeable tube 200 are both located on the side of the first support plate 480, but this is not limited to this arrangement. Both the one end 200x and the other end 200y may be located on the side of the second support plate 490, or one of the two ends 200x and 200y may be located on the side of the first support plate 480 and the other on the side of the second support plate 490.

[0042] In the degassing device 1 using the gas permeable tube assembly unit 400 having the above configuration, dissolved gas can be effectively degassed as the solution L to be treated passes through the gas permeable tube 200, which is arranged in a substantially cylindrical degassing area 111.

[0043] For example, if the degassing area 111 has a diameter of 140 mm and a height of 90 mm, it is possible to accommodate a gas-permeable tube 200 of approximately 6.5 m in length within the degassing area 111. As a result, it was confirmed that, for example, 88% of the dissolved gas could be degassed from the solution L to be treated.

[0044] Although a configuration using multiple guide pins is disclosed for the purpose of maintaining the spiral winding shape of the gas permeable tube 200 in good condition, it is not necessarily required to use guide pins if the spiral winding shape of the gas permeable tube 200 can be well maintained within the degassing area 111 without using guide pins.

[0045] (Other winding configurations of gas-permeable tube 200) Referring to Figures 6 and 7, other winding configurations of the gas permeable tube 200 will be described. Figures 6 and 7 are schematic plan and longitudinal section views showing the winding configurations of other configurations of the gas permeable tube 200.

[0046] In the above embodiment, the gas-permeable tube 200 is wound spirally around a central axis CL. In the embodiment shown in Figures 6 and 7, the first winding section 200A is wound spirally around the central axis CL, and a total of eight layers of stacking structures are adopted, with the second winding section 200B to the eighth winding section 200H, each having a similar winding structure, stacked on top of the first winding section 200A. Note that the number of stacking layers can be two or more.

[0047] As described above, the degassing device 1 of this embodiment can achieve maximum degassing capacity even when the degassing device 1 is placed in a limited space, without increasing its size.

[0048] Specifically, by increasing the overall length of the gas permeable tube 200 placed inside the reduced pressure chamber, the surface area of ​​the gas permeable tube 200 that acts on the permeation of the solution to be treated becomes larger, and the time the solution to be treated passes through the inside of the gas permeable tube 200 increases. As a result, the degassing performance can be effectively improved.

[0049] Furthermore, since this degassing device 1 has high degassing performance, if it is used, for example, in the manufacturing process of semiconductor devices, it is expected that the variation in film deposition quality will be reduced by the chemical solution from which dissolved gases in the solution being treated will improve the yield of semiconductor devices.

[0050] Furthermore, the degassing device in this embodiment does not require an increase in size, and can achieve maximum degassing capacity, leading to a reduction in the amount of material used. Therefore, it can contribute to some of the activities related to SDG Goal 12, "Responsible Consumption and Production."

[0051] Although a degassing apparatus has been described in the embodiments above, the embodiments disclosed herein are illustrative in all respects and are not restrictive. The scope of the present invention is indicated by the claims, and all modifications are made within the meaning and scope of equivalents of the claims. [Explanation of Symbols]

[0052] 1 Degassing device, 100 Housing, 110 Main body, 111 Degassing area, 111b Bottom, 120 Lid, 130 Inlet, 140 Outlet, 200 Gas permeable tube, 200A First winding section, 200B Second winding section, 200C Third winding section, 200D Fourth winding section, 200H Eighth winding section, 200x One end, 200y Other end, 300 Pressure reduction line, 400 Gas permeable tube assembly unit, 470 Screw, 480 First support plate, 490 Second support plate, 500 Leak sensor, P1 First guide pin, P2 Second guide pin, P3 Third guide pin, P4 Fourth guide pin, P5 Fifth guide pin, r1 First radius distance, r2 Second radius distance, r3 Third radius distance, r4 4th radial distance, r5 5th radial distance.

Claims

1. A degassing device for removing dissolved gases from a solution to be processed, The casing and A degassing area is provided within the housing for degassing the dissolved gas from the solution to be processed, A gas-permeable tube is placed in the degassing area and through which the solution to be treated is passed; A depressurization line is provided in the housing so as to communicate with the degassing area in order to reduce the pressure in the degassing area, To introduce the solution to be processed into the gas-permeable tube, an introduction section is provided in the housing, In order to guide the degassed solution to be treated out of the housing from the gas-permeable tube, the housing is provided with an outlet section, Equipped with, The gas-permeable tube includes a first wound portion and a second wound portion in the degassing area. Degassing device.

2. The aforementioned enclosure is The main body, which constitutes the degassing area by its internal space, The aforementioned degassing area is sealed and the lid is fixed to the main body, It has, When the direction extending from the bottom surface of the degassing area towards the lid is defined as the direction of the central axis, The first winding portion has a form that is wound spirally around the central axis, The second winding portion has a form in which it is wound spirally around the central axis on the outer circumference side of the first winding portion. The degassing apparatus according to claim 1.

3. In the aforementioned degassing area, A plurality of first guide pins are arranged at predetermined intervals on a circumference of a first radial distance around the central axis, A plurality of second guide pins are arranged at predetermined intervals on a circumference of a circle with a second radial distance greater than the first radial distance around the central axis, It was placed, The first winding portion is wound spirally along the outside of the plurality of first guide pins, The second winding portion is spirally wound along the outside of the plurality of second guide pins. The degassing apparatus according to claim 2.

4. It further comprises Volume 3 and Volume 4, The third winding portion has a shape that is spirally wound around the central axis on the outer circumference side of the second winding portion, The fourth winding portion has a shape that is spirally wound around the central axis on the outer circumference side of the third winding portion, In the aforementioned degassing area, A plurality of third guide pins are arranged at predetermined intervals on a circumference of a circle with a third radial distance greater than the second radial distance around the central axis, A plurality of fourth guide pins are arranged at predetermined intervals on a circumference of a circle with a fourth radial distance greater than the third radial distance around the central axis, It was placed, The third winding portion is wound spirally along the outside of the plurality of third guide pins, The fourth winding portion is spirally wound along the outside of the plurality of fourth guide pins. The degassing apparatus according to claim 3.

5. One end of each of the first guide pin, the second guide pin, the third guide pin, and the fourth guide pin is fixed to the first support plate, and the other end of each is fixed to the second support plate. The gas-permeable tube is wrapped around the outer circumference of each of the first guide pin, the second guide pin, the third guide pin, and the fourth guide pin. The unit, in which the first winding section, the second winding section, the third winding section, and the fourth winding section are provided, is housed within the housing. The degassing apparatus according to claim 4.

6. The first winding portion is wound from the side of the first support plate toward the side of the second support plate, The second winding portion is folded back on the side of the second support plate and wound towards the side of the first support plate. The third winding portion is folded back on the side of the first support plate and wound towards the side of the second support plate. The fourth winding portion is folded back on the side of the second support plate and wound towards the side of the first support plate. The gas-permeable tube has one end and the other end located on the side of the first support plate. The degassing apparatus according to claim 5.

7. The aforementioned enclosure is The main body, which constitutes the degassing area by its internal space, The aforementioned degassing area is sealed and the lid is fixed to the main body, It has, When the direction extending from the bottom surface of the degassing area towards the lid is defined as the direction of the central axis, The first winding portion has a shape that is wound in a spiral shape along the central axis, The second winding portion is stacked on the first winding portion on the central axis and has a form that is wound in a spiral shape around the central axis. The degassing apparatus according to claim 1.

8. The gas-permeable tube is made of a fluororesin material or a polyolefin resin. A degassing apparatus according to any one of claims 1 to 7.

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